Flexible compensation device

Abstract

The invention relates to the technical field of compensators, in particular to a flexible compensation device which comprises a shell, a flexible compensation device body and a flexible compensation device body. The movable block is located in the working cavity, the movable block comprises a main body part and a connecting part, the top surface of the main body part is provided with a locking bulge with a radian, the side wall of the main body part is provided with an arc-shaped contact surface, and a positioning groove is formed in the side wall of the main body part; the locking plate is arranged in the working cavity and located above the movable block, and the bottom face of the locking plate is provided with a locking inner concave face matched with the positioning protrusion; the limiting block is arranged in the working cavity and used for making contact with the movable block; the positioning block is provided with a positioning groove, the positioning block is provided with a positioning protrusion matched with the positioning groove, the positioning protrusion is rotationally provided with a rolling wheel, and through cooperation of the movable block, the locking block, the limiting block and the positioning block, the flexible compensation device has the advantages of being large in compensation amplitude in the X direction, the Y direction and the Z direction, large in inclination and rotation compensation angle and capable of rotating to be reset.

Description

Technical Field

[0001] The present invention relates to the technical field of compensators, and in particular to a flexible compensating device. Background Art

[0002] As the name implies, the flexible compensator of the manipulator is a device installed on the manipulator that can absorb and compensate for the displacement, vibration and deviation of the manipulator during operation. It can instantly sense and correct the tiny deviation of the manipulator through high-precision displacement, ensuring that the manipulator can complete the task accurately and smoothly.

[0003] The gripper of the robot arm needs to have flexible compensation functions in multiple directions, such as movement, rotation, tilt and deflection in the three directions of X, Y and Z axes, in order to complete the work, and it must be able to reset after the work is completed to facilitate the next execution of the work. However, the existing flexible compensator has a small compensation range and a high degree of flexible contact, so a higher performance flexible compensation device needs to be developed. In addition, the adjustment and calibration process of the flexible compensator may be relatively complicated and require professional technology and equipment, which increases the difficulty of use and maintenance, and may also affect the operation accuracy and stability of the robot. Summary of the invention

[0004] The technical problem to be solved by the present invention is: in order to overcome the problem in the prior art that the manipulator cannot achieve efficient self-adaptation for the position offset and angle deviation of pulling out and loading workpieces, a flexible compensation device is provided.

[0005] The technical solution adopted by the present invention to solve the technical problem is: a flexible compensation device, comprising:

[0006] A shell body, wherein a working chamber is formed inside the shell body, and an activity chamber is formed on the bottom surface of the shell body;

[0007] The movable block is located in the working cavity. The movable block includes a main body and a connecting part. The main body is located in the working cavity. The top of the connecting part is fixedly connected to the main body. The other end of the connecting part passes through the movable cavity and extends to the outside of the shell. The top surface of the main body has a curved locking protrusion. The side wall of the main body has an arc-shaped contact surface. The side wall of the main body is provided with a positioning groove. The working cavity allows the main body to move, tilt, deflect or rotate therein.

[0008] A locking plate is arranged in the working chamber and is located above the movable block. The bottom surface of the locking plate has a locking inner concave surface that matches the locking protrusion. When the locking plate is pressed down so that the locking plate and the locking protrusion are in contact, the Z-axis direction position of the movable block is locked.

[0009] A limit block is arranged in the working chamber and is used to contact with the movable block;

[0010] And a positioning block, which is arranged in the working cavity, and the positioning block has a positioning protrusion matching the positioning groove, and a roller is rotatably arranged on the positioning protrusion. When the positioning block and the limit block clamp the movable block and the positioning protrusion is aligned with the positioning groove, the positioning protrusion enters the positioning groove and is clamped by the positioning and limit blocks, so that the movable block is fixed in the XY axis plane. When the positioning block and the limit block clamp the movable block and the positioning protrusion is against the contact surface, the roller contacts the contact surface and is driven by the clamping force of the positioning block and the limit block, so that the movable block rotates until the positioning protrusion is embedded in the positioning groove, completing the fixation of the movable block in the XY axis plane. Through the cooperation of the movable block, the locking block, the limit block and the positioning block, the flexible compensation device has large compensation amplitudes in the X, Y and Z directions, large tilt and rotation compensation angles, and rotation reset characteristics, so that the compensation range is wider and the degree of freedom is higher.

[0011] In order to solve the problem of how to drive the limit block to move, the housing further includes a first pneumatic cavity, in which a first pneumatic block, a first pneumatic rod and a first reset element are arranged, the first pneumatic rod is fixedly connected to the first pneumatic block, and the other end of the first pneumatic rod passes through the housing and is fixedly connected to the limit block, the first reset element is sleeved on the first pneumatic rod, one end of the first reset element abuts against the housing, and the other end abuts against the first pneumatic block;

[0012] The shell is provided with a first air hole which is communicated with the first pneumatic cavity.

[0013] In order to solve the problem of how to drive the positioning block to move, the housing further includes a second pneumatic cavity, in which a second pneumatic block, a second pneumatic rod and a second reset element are arranged. The second pneumatic rod is fixedly connected to the second pneumatic block, and the other end passes through the housing and is fixedly connected to the positioning block. The second reset element is sleeved on the second pneumatic rod, and the two ends of the second reset element abut against the housing, and the other end abuts against the second pneumatic block.

[0014] The shell body is provided with a second air hole which is communicated with the second pneumatic cavity.

[0015] In order to solve the problem of how to drive the locking plate to move, a third pneumatic chamber connected to the working chamber is further provided in the shell, a third air hole connected to the third pneumatic chamber is provided on the top surface of the shell, a pneumatic plate is slidably arranged in the third pneumatic chamber, the pneumatic plate and the locking plate are fixedly connected, and ventilation in the third pneumatic chamber causes the pneumatic plate to descend.

[0016] In order to solve the problem of low stability of the movable block in the accommodating cavity, a plurality of positioning springs are further arranged in the movable cavity, the positioning springs are circumferentially spaced around the connecting portion of the movable block, a ring is sleeved on the connecting shaft of the movable block, one end of the positioning spring is fixedly connected to the shell, and the other end is fixedly connected to the ring.

[0017] In order to solve the problem that the compensator is inconvenient for equipment connection, the flexible compensation device further includes a connecting plate, and the connecting plate and the bottom end of the connecting part of the movable block are fixedly connected.

[0018] In order to solve the problem that the roller protrusion hinders the cooperation between the positioning groove and the positioning protrusion, the positioning groove further includes a receiving groove connected to the positioning groove, the receiving groove is used for placing the roller, and the roller is eccentrically arranged;

[0019] When the movable block is fixed in the XY axis plane, the roller is located in the accommodating groove.

[0020] The beneficial effect of the present invention is that a flexible compensation device provided by the present invention, through the cooperation of a movable block, a locking block, a limit block and a positioning block, makes the flexible compensation device have the characteristics of large compensation amplitudes in the X, Y and Z directions, large tilt and rotation compensation angles, and rotation resettable, so that the compensation range is wider and the degree of freedom is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0022] Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0023] Figure 2 It is a schematic diagram of the top view of the structure of the present invention;

[0024] Figure 3 The present invention Figure 2 Schematic diagram of the cross-sectional structure at AA in the middle;

[0025] Figure 4 It is a structural schematic diagram of the movable block, the limit block and the positioning block of the present invention;

[0026] Figure 5 It is a structural schematic diagram of the movable block, the limit block and the positioning block of the present invention from another perspective.

[0027] In the figure: 1, housing, 11, working chamber, 12, movable chamber, 13, first pneumatic chamber, 14, second pneumatic chamber, 15, third pneumatic chamber, 16, first air hole, 17, second air hole, 18, third air hole;

[0028] 2. movable block, 21. main body, 22. connecting portion, 23. locking protrusion, 24. contact surface, 25. positioning groove, 26. receiving groove;

[0029] 3. locking plate, 31. locking inner concave surface, 32. pneumatic plate;

[0030] 4. a limit block, 41. a first pneumatic block, 42. a first pneumatic rod, 43. a first resetting element;

[0031] 5. positioning block, 51. positioning protrusion, 52. roller, 53. second pneumatic block, 54. second pneumatic rod, 55. second resetting element;

[0032] 6. Positioning spring, 61. Ring

[0033] 7. Connecting plate. DETAILED DESCRIPTION

[0034] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0035] like Figure 1 Schematic diagram of the structure of the present invention, a flexible compensation device, comprising:

[0036] The shell 1 has a working chamber 11 formed inside and an activity chamber 12 formed on the bottom surface of the shell 1;

[0037] like Figure 2 , Figure 3 , Figure 4 As shown, the movable block 2 is located in the working chamber 11. The movable block 2 includes a main body 21 and a connecting portion 22. The main body 21 is located in the working chamber 11. The top of the connecting portion 22 is fixedly connected to the main body 21. The other end of the connecting portion 22 passes through the movable chamber 12 and extends to the outside of the shell 1. The top surface of the main body 21 has a curved locking protrusion 23. The locking protrusion 23 is a conical surface that is inclined downward from the center to the surrounding direction. The side wall of the main body 21 has an arc-shaped contact surface 24, and the contact surface 24 is an arc surface. A positioning groove 25 is opened on the side wall of the main body 21. The working chamber 11 can allow the main body 21 to move, tilt, deflect or rotate therein;

[0038] like Figure 2 , Figure 3 , Figure 4 As shown, the locking plate 3 is arranged in the working chamber 11, and the locking plate 3 is located above the movable block 2. The bottom surface of the locking plate 3 has a locking inner concave surface 31 that matches the locking protrusion 23. When the locking plate 3 is pressed down so that the locking plate 3 and the locking protrusion 23 are in contact, the Z-axis direction position of the movable block 2 is locked; a third pneumatic chamber 15 connected to the working chamber 11 is provided in the shell 1, and a third air hole 18 connected to the third pneumatic chamber 15 is provided on the top surface of the shell 1. A pneumatic plate 32 is slidably arranged in the third pneumatic chamber 15, and the pneumatic plate 32 is fixedly connected to the locking plate 3. Ventilation in the third pneumatic chamber 15 causes the pneumatic plate 32 to descend.

[0039] like Figure 2 , Figure 3 , Figure 4As shown, the limit block 4 is arranged in the working chamber 11, and the limit block 4 is used to contact the movable block 2; the housing 1 is provided with a first pneumatic chamber 13, and the first pneumatic block 41, the first pneumatic rod 42 and the first reset element 43 are arranged in the first pneumatic chamber 13. The first reset element 43 is a spring, and the first pneumatic rod 42 is fixedly connected to the first pneumatic block 41, and the other end passes through the housing 1 and is fixedly connected to the limit block 4. The first reset element 43 is sleeved on the first pneumatic rod 42, and one end of the first reset element 43 abuts against the housing 1, and the other end abuts against the first pneumatic block 41;

[0040] The housing 1 is provided with a first air hole 16 which is in communication with the first pneumatic cavity 13 .

[0041] In another embodiment, one end surface of the limit block 4 close to the movable block 2 may be an inwardly concave arc surface, which can better cooperate with the movable block 2. The flexible compensation device is used to compensate for the movement error of mechanical equipment.

[0042] The first pneumatic block 41 , the first pneumatic rod 42 and the first resetting element 43 are all in one-to-one correspondence. There can be one or more first pneumatic blocks 41 , which is not specifically limited in the present application.

[0043] like Figure 2 , Figure 3 , Figure 4 As shown, the positioning block 5 is arranged in the working chamber 11, and the positioning block 5 has a positioning protrusion 51 matching the positioning groove 25, and a roller 52 is rotatably arranged on the positioning protrusion 51. When the positioning block 5 and the limit block 4 clamp the movable block 2, and the positioning protrusion 51 is aligned with the positioning groove 25, the positioning protrusion 51 enters the positioning groove 25 and is clamped by the positioning and limit blocks 4, so that the movable block 2 is fixed in the XY axis plane. When the positioning block 5 and the limit block 4 clamp the movable block 2, and the positioning protrusion 51 is against the contact surface 24, the roller 52 contacts the contact surface 24 and is driven by the clamping force of the positioning block 5 and the limit block 4, so that the movable block 2 rotates until the positioning protrusion 51 is embedded in the positioning groove 25, completing the fixation of the movable block 2 in the XY axis plane, and the positioning groove 25 is a V-shaped structure.

[0044] The groove wall of the positioning groove 25 is provided with a receiving groove 26 connected thereto, and the receiving groove 26 is used to place the roller 52; when the movable block 2 is fixed in the XY axis plane, the roller 52 is located in the receiving groove 26, and the roller 52 is eccentrically arranged, that is, deviated from the center of the positioning block 5.

[0045] The housing 1 is provided with a second pneumatic cavity 14, in which a second pneumatic block 53, a second pneumatic rod 54 and a second reset element 55 are arranged. The second pneumatic rod 54 is fixedly connected to the second pneumatic block 53. The second reset element 55 is a spring, the other end of which passes through the housing 1 and is fixedly connected to the positioning block 5. The second reset element 55 is sleeved on the second pneumatic rod 54, and the two ends of the second reset element 55 abut against the housing 1, and the other end abuts against the second pneumatic block 53.

[0046] The housing 1 is provided with a second air hole 17 which is in communication with the second pneumatic cavity 14 .

[0047] The second pneumatic block 53 , the second pneumatic rod 54 and the second reset element 55 are all in one-to-one correspondence. There can be one or more second pneumatic blocks 53 , which is not specifically limited in the present application.

[0048] like Figure 2 , Figure 3 , Figure 4 As shown, a plurality of positioning springs 6 are arranged in the movable cavity 12, and the positioning springs 6 are circumferentially spaced around the connecting portion 22 of the movable block 2. A collar 61 is sleeved on the connecting shaft of the movable block 2. One end of the positioning spring 6 is fixedly connected to the housing 1, and the other end is fixedly connected to the collar 61. In the present application, there are eight positioning springs 6, which are evenly spaced. The positioning springs 6 are used to increase the damping of the movement of the movable block 2 and assist in repairing the position of the movable block 2.

[0049] In another embodiment, power elements such as a cylinder and a screw mechanism can also be used to drive the locking plate 3, the limit block 4 and the positioning block 5 to move away from or close to the movable block 2 respectively, and squeeze the movable block 2 to reset it after contact.

[0050] like Figure 1 , Figure 2 As shown, the flexible compensation device further comprises a connecting plate 7, and the connecting plate 7 is fixedly connected to the bottom end of the connecting portion 22 of the movable block 2.

[0051] Working principle:

[0052] When the flexible compensation device is in the air-off state (i.e., the air in the first pneumatic chamber 13, the second pneumatic chamber 14 and the third pneumatic chamber 15 is cut off), the limit block 4 and the positioning block 5 (under the action of the first reset element 43 and the second reset element 55) are in a state away from the movable block 2. The movable block 2 is in the Z-axis extreme position due to the action of gravity. At this time, the main body 21 of the movable block 2 can move, tilt, deflect or rotate in the working chamber 11.

[0053] Before taking the material, the flexible compensation device is inflated, and air is successively introduced into the first pneumatic chamber 13 and the second pneumatic chamber 14 to correct the position of the movable block 2, and air is introduced into the third pneumatic chamber 15 to correct the movable block 2 and position and correct the initial position of the movable block 2, and the flexible compensation device continues to maintain the inflated state until it moves above the material taking station.

[0054] When picking up materials, due to the position and angular offset between the gripper and the workpiece due to the gripper installed on the flexible compensation device, the movable block 2 of the flexible compensation device will produce changes in deflection, position and rotation, thereby compensating for the errors in the XY, tilt and circumferential directions between the gripper and the workpiece, so that the gripper can be aligned with the grasping part of the workpiece (to avoid damaging the workpiece) to complete the grasping.

[0055] After taking the material, air is successively introduced into the first pneumatic cavity 13 and the second pneumatic cavity 14. Due to the pneumatic drive, there is a certain elastic movement gap in the process of the positioning block 5 and the limit block 4 clamping the movable block 2, so that the first pneumatic block 41 moves in the first pneumatic cavity 13. At this time, the first reset element 43 contracts, and the first pneumatic block 41 drives the limit block 4 to approach the movable block 2 through the first pneumatic rod 42, so that the second pneumatic block 53 moves in the second pneumatic cavity 14. At this time, the second reset element 55 contracts, and the second pneumatic block 53 drives the positioning block 5 to approach the movable block 2 through the second pneumatic rod 54. If the movable block 2 basically has no rotation or the rotation amplitude is small (the positioning protrusion 51 of the positioning block 5 can be directly aligned with the positioning groove 25), at this time, the positioning protrusion 51 of the positioning block 5 can directly align with the positioning groove 25. The movable block 2 is aligned with the positioning groove 25 and enters the positioning groove 25, and the limiting block 4 contacts the movable block 2 and is clamped by the positioning block 5, thereby completing the fixing of the movable block 2 in the XY axis plane, that is, completing the angle correction (resetting) of the movable block 2 (precise resetting in the XY direction); if the movable block 2 rotates with a large amplitude, that is, the positioning protrusion 51 of the positioning block 5 cannot be directly aligned with the positioning groove 25 and enter the positioning groove 25, at this time, the roller 52 on the positioning protrusion 51 of the positioning block 5 first contacts the contact surface 24 on the outer periphery of the movable block 2, and under the squeezing and clamping of the limiting block 4, the movable block 2 is forced to rotate circumferentially until the positioning protrusion 51 enters the positioning groove 25, thereby completing the fixing of the movable block 2 in the XY axis plane, that is, completing the angle correction (resetting) of the movable block 2 (precise resetting in the XY direction);

[0056] Air enters the third pneumatic chamber 15, causing the pneumatic plate 32 to descend and drive the locking plate 3 to synchronously descend and approach the movable block 2. When the locking plate 3 abuts against the movable block 2, the movable block 2 is reset and locked in the height direction due to the cooperation between the locking protrusion 23 and the locking inner concave surface 31.

[0057] After the manipulator grabs the workpiece and moves to the installation site, the flexible compensation device remains inflated so that the position of the movable block 2 is locked.

[0058] During assembly, when the workpiece grasped by the manipulator moves to above the installation position, the flexible compensation device is de-energized, and the limit block 4 and the positioning block 5 (under the action of the first reset element 43 and the second reset element 55) are in a state of being away from the movable block 2. The movable block 2 is in the Z-axis limit position due to gravity, so that the movable block 2 can move freely, and the manipulator moves downward. If there is an error between the workpiece and the installation position, the workpiece enters the installation position under the position compensation of the flexible compensator, the manipulator is released, and the flexible compensation device is inflated again to reset the position of the movable block 2, and the flexible compensation device remains inflated until the manipulator moves above the material picking station.

[0059] During the complete process of material removal and loading, the manipulator moves to the top of the workpiece, the flexible compensation device is inflated to reset the movable block 2 to locate the initial position of the movable block 2, and then the flexible compensation device is de-energized, the movable block 2 can move freely, and the manipulator descends to grab the workpiece. After grabbing is completed, the flexible compensation device remains inflated, so that the position of the movable block 2 is reset and locked until the workpiece moves to above the installation position, the flexible compensation device is de-energized, at this time, the movable block 2 can move freely, and the manipulator moves downward. If there is an error between the workpiece and the installation position, the workpiece enters the installation position under the compensation of the flexible compensator, the manipulator is released, and the flexible compensation device is inflated again to reset the position of the movable block 2.

[0060] The gripper can drive the workpiece to move to the designated assembly position, and there is a positional and angular offset (error) between the workpiece and the workstation. The first pneumatic chamber 13, the second pneumatic chamber 14 and the third pneumatic chamber 15 are cut off from the air. During the assembly process, the existing errors will cause the movable block 2 of the compensator to produce changes in deflection, position and rotation, etc., to compensate for the XY, tilt and circumferential errors between the workpiece and the workstation, so that the workpiece can be aligned with the workstation to avoid damage to the workpiece and the workstation, thereby completing the assembly.

[0061] The air in the first pneumatic chamber 13, the second pneumatic chamber 14 and the third pneumatic chamber 15 is cut off, and the limit block 4 and the positioning block 5 return to their initial positions under the elastic force of the first reset element 43 and the elastic force of the second reset element 55 respectively, and the movable block 2 is in an active state, that is, the movable block 2 can have changes in deflection, position and rotation.

[0062] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A flexible compensation device, characterized in that: include: A shell (1) having a working chamber (11) formed therein, and a movable chamber (12) formed on the bottom surface of the shell (1); A movable block (2) is located in the working cavity (11). The movable block (2) comprises a main body (21) and a connecting part (22). The main body (21) is located in the working cavity (11). The top end of the connecting part (22) is fixedly connected to the main body (21). The other end of the connecting part (22) passes through the movable cavity (12) and extends to the outside of the shell (1). The top surface of the main body (21) has a curved locking protrusion (23). The side wall of the main body (21) has an arc-shaped contact surface (24). The side wall of the main body (21) is provided with a positioning groove (25). The working cavity (11) allows the main body (21) to move, tilt, deflect or rotate therein. A locking plate (3) is arranged in the working chamber (11) and is located above the movable block (2). The bottom surface of the locking plate (3) has a locking inner concave surface (31) that matches the locking protrusion (23). When the locking plate (3) is pressed down so that the locking plate (3) and the locking protrusion (23) are in contact, the Z-axis direction position of the movable block (2) is locked. A limit block (4) is arranged in the working chamber (11), and the limit block (4) is used to contact the movable block (2); and a positioning block (5) arranged in the working chamber (11); the positioning block (5) has a positioning protrusion (51) matching the positioning groove (25); a roller (52) is rotatably arranged on the positioning protrusion (51); when the positioning block (5) and the limiting block (4) clamp the movable block (2) and the positioning protrusion (51) is aligned with the positioning groove (25), the positioning protrusion (51) enters the positioning groove (25) and is clamped by the positioning and limiting blocks (4). The movable block (2) is fixed in the XY axis plane. When the positioning block (5) and the limiting block (4) clamp the movable block (2) and the positioning protrusion (51) faces the contact surface (24), the roller (52) contacts the contact surface (24) and, driven by the clamping force of the positioning block (5) and the limiting block (4), the movable block (2) rotates until the positioning protrusion (51) is embedded in the positioning groove (25), thereby completing the fixing of the movable block (2) in the XY axis plane.

2. A flexible compensation device according to claim 1, characterized in that: The shell (1) is provided with a first pneumatic cavity (13), and a first pneumatic block (41), a first pneumatic rod (42) and a first reset element (43) are arranged in the first pneumatic cavity (13); the first pneumatic rod (42) is fixedly connected to the first pneumatic block (41), and the other end of the first pneumatic rod (42) passes through the shell (1) and is fixedly connected to the limit block (4); the first reset element (43) is sleeved on the first pneumatic rod (42), and one end of the first reset element (43) abuts against the shell (1), and the other end abuts against the first pneumatic block (41); The housing (1) is provided with a first air hole (16) which is in communication with the first pneumatic cavity (13).

3. A flexible compensation device according to claim 1, characterized in that: The shell (1) is provided with a second pneumatic cavity (14), and a second pneumatic block (53), a second pneumatic rod (54) and a second reset element (55) are arranged in the second pneumatic cavity (14); the second pneumatic rod (54) is fixedly connected to the second pneumatic block (53), and the other end of the second pneumatic rod (54) passes through the shell (1) and is fixedly connected to the positioning block (5); the second reset element (55) is sleeved on the second pneumatic rod (54), and the two ends of the second reset element (55) abut against the shell (1), and the other end abuts against the second pneumatic block (53); The housing (1) is provided with a second air hole (17) which is in communication with the second pneumatic cavity (14).

4. A flexible compensation device according to claim 1, characterized in that: A third pneumatic chamber (15) communicating with the working chamber (11) is provided in the shell (1), a third air hole (18) communicating with the third pneumatic chamber (15) is provided on the top surface of the shell (1), a pneumatic plate (32) is slidably arranged in the third pneumatic chamber (15), the pneumatic plate (32) and the locking plate (3) are fixedly connected, and ventilation in the third pneumatic chamber (15) causes the pneumatic plate (32) to descend.

5. A flexible compensation device according to claim 1, characterized in that: A plurality of positioning springs (6) are arranged in the movable chamber (12). The positioning springs (6) are circumferentially spaced around the connecting portion (22) of the movable block (2). A collar (61) is sleeved on the connecting shaft of the movable block (2). One end of the positioning spring (6) is fixedly connected to the housing (1), and the other end is fixedly connected to the collar (61).

6. A flexible compensation device according to claim 1, characterized in that: The flexible compensation device also includes a connecting plate (7), and the connecting plate (7) is fixedly connected to the bottom end of the connecting portion (22) of the movable block (2).

7. A flexible compensation device according to claim 1, characterized in that: The housing (1).

8. A flexible compensation device according to claim 1, characterized in that: A receiving groove (26) is provided on the groove wall of the positioning groove (25) and is in communication with the positioning groove (25). The receiving groove (26) is used for placing a roller (52). The roller (52) is arranged eccentrically. When the movable block (2) is fixed in the XY axis plane, the roller (52) is located in the accommodating groove (26).

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