Conveyor mechanism for intelligently suspending and conveying finished silicon carbide wafers

Abstract

The present invention discloses a conveying mechanism for intelligently suspending and conveying finished silicon carbide wafers, specifically relating to the technical field of intelligent suspension conveying. It includes a suspension outer groove rail, two socket plates, a rotating shaft, a small gear, and an intelligent linkage energy-saving lubrication conveying component; among them, the intelligent linkage energy-saving lubrication conveying component includes a large gear, a sealing hole ring, a hole plate, a rubber hole ring, a lubricating oil pipe, a lower discharge pipe, and a docking through hole. Through the intelligent linkage energy-saving lubrication conveying component, the present invention not only can utilize the power source driven by a servo motor for lubrication, saving equipment and electric energy, but also can adjust the lubrication speed according to the conveying speed driven by the rotating shaft, thereby realizing the function of intelligent energy-saving adjustment of lubrication by using the transmission power of conveying, making the conveying intelligent linkage better, and thus solving the problems of difficultly realizing intelligent energy-saving adjustment of lubrication by using the transmission power of conveying and poor intelligent linkage of conveying.

Description

Technical Field

[0001] The present invention relates to the technical field of intelligent suspension conveying, and more specifically, to a conveying mechanism for intelligently suspending and conveying finished silicon carbide wafers. Background Art

[0002] The intelligent suspension conveying system moves materials through a suspension carrier, achieving efficient conveying of finished silicon carbide wafers. This conveying method is not only fast but also reduces the cumbersome process and errors of manual handling, improving production efficiency. At the same time, the intelligent automation system can accurately convey according to the preset suspension path and speed, ensuring the stability and consistency of the wafers during the processing.

[0003] The patent of Chinese Patent Application CN118637267A discloses an intelligent circular suspension device for a clothing production line. Through the reciprocating change of the angles of two hanging rods, on the one hand, it can achieve the reciprocating tensioning and flat tensioning of the conveyed clothing, and on the other hand, when the rocking shaft rotates, the up-and-down shaking of the rocking shaft and the vibration frame can not only achieve the vibration leveling and vibration wrinkle removal of the clothing fabric, but also reciprocally change the heating angle and heating position of the clothing fabric. However, this technology has the following defects.

[0004] When the intelligent suspension conveying mechanism conveys the finished silicon carbide wafers, it needs to be guided and conveyed in the suspended track. During the conveying, in order to reduce friction, maintenance personnel need to regularly lubricate the track, but the lubrication position is at a high altitude and is relatively inconvenient to operate. Moreover, during the use of the intelligent suspension conveying mechanism, it is necessary to adjust different conveying speeds according to the conveying requirements. It is difficult to achieve rapid supply of lubricating oil for full lubrication during high-speed conveying, and it is difficult to supply lubricating oil at a low speed when the conveying speed is low to achieve the function of saving lubricating oil. The oil supply speed is difficult to be intelligently matched and adjusted according to the conveying speed, and it is difficult to use the transmission power of the conveying to achieve intelligent energy-saving adjustment of lubrication. The intelligent linkage of the conveying is relatively poor. Therefore, a conveying mechanism for intelligently suspending and conveying finished silicon carbide wafers is needed. Summary of the Invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides the following technical solutions: a conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers, comprising a hanging outer groove rail, two socket plates are fixedly connected to the upper surface of the hanging outer groove rail, each of the socket plates is rotatably connected to a rotating shaft, the outer wall of the rotating shaft and the upper surface of the socket plate are fixedly connected to a small gear, and the outer wall of the small gear is provided with an intelligent linkage energy-saving lubrication conveying component; the intelligent linkage energy-saving lubrication conveying component comprises a large gear meshingly connected to the outer wall of the small gear, a sealing hole ring is fixedly connected to the upper surface of the sealing hole ring, a hole plate is fixedly connected to the upper surface of the sealing hole ring, and a rubber hole ring is fixedly connected to the upper surface of the hole plate; a lubricating oil pipe is slidably provided on the upper surface of the rubber hole ring, and a lower row pipe is slidably connected to the lower surface of the sealing hole ring near its edge line, and a docking through hole is opened on the inner wall of the hole plate.

[0006] Preferably, the pinion is rotatably connected to the socket plate, the sealing hole ring is slidably connected to the pinion, and the inner wall center point of the lubricating oil pipe is in the same vertical line as the inner wall center point of the lower row pipe. The lower row pipe is fixedly connected to the suspension outer groove rail, and the rubber hole ring and the sealing hole ring are both connected to the docking through hole; the cross-sectional shape of the docking through hole is circular. The inner wall of the large gear is fixedly connected with a linkage shaft, and a socket shaft bar is provided below the large gear. The socket shaft bar is fixedly connected to the socket plate, and the socket shaft bar is slidably connected to the rotating shaft; the socket shaft bar is rotatably connected to the linkage shaft. The top of the lubricating oil pipe is fixedly connected with a receiving barrel, and a bracket is provided on one side of the outer wall of the receiving barrel, and the suspension outer groove rail and the receiving barrel are fixedly connected to the bracket. The upper surface of the socket plate and near its two ends are fixedly connected with a suspension mounting rod, and the suspension mounting rod is made of carbon fiber material.

[0007] When this technology is used for transportation, when the shaft rotates at high speed, the shaft will drive the small gear to rotate at high speed, and the large gear will drive the linkage shaft to rotate. The large gear drives the sealing hole ring to rotate, the hole plate drives the rubber hole ring to rotate, and the sealing hole ring moves along the upper surface of the lower row pipe. When the docking through hole on the hole plate is located between the lubricating oil pipe and the lower row pipe, the lubricating oil pipe and the lower row pipe are connected through the docking through hole. The lubricating oil inside the container barrel can enter the hole position of the rubber hole ring along the lubricating oil pipe, enter the hole position of the sealing hole ring through the docking through hole, and the sealing hole ring drips the lubricating oil into the lower row pipe. It is discharged to the groove body inside the hanging outer groove rail through the lower row pipe. When the controller starts the servo motor to drive the shaft to rotate at a low speed, the shaft drives the small gear to drive at a low speed, so that the rotation speed of the hole plate is also low, so that the docking through hole on the hole plate can pass through the bottom of the lubricating oil pipe a few times within the specified time, so as to slowly discharge the lubricating oil into the groove body inside the hanging outer groove rail.

[0008] Preferably, a guide block is fixedly connected to the top of the inner wall of the hanging outer groove rail and located below the lower row of pipes, a gap is provided between the guide block and one side of the inner wall of the hanging outer groove rail, and a lubrication guide assembly is provided on the upper inclined surface of the guide block; the lubrication guide assembly includes two limit blocks fixedly arranged on the upper inclined surface of the guide block, two strip holes are provided on the inner wall of the guide block, and a plurality of block blocks are provided on the lower surface of each of the strip holes, and the plurality of block blocks are fixedly connected to the guide block, and a lower drip column is fixedly connected to the lower surface of each block block. The vertical cross-section shape of the two limit blocks is a triangle, and the upper inclined surface of the guide block is a smooth surface.

[0009] When this technology is used for transportation, the lubricating oil is discharged along the lower discharge pipe to the inclined surface of the guide block, and the lubricating oil is discharged along the guide block, so as to fit the gap between the guide block and the inner wall of the suspension outer groove rail. The graphene slider passes through the lubrication position inside the suspension outer groove rail and can be automatically lubricated. At the same time, another part of the lubricating oil flows down along the strip hole to the block, and the lower drip column drips the lubricating oil to the bottom surface of the inner part of the suspension outer groove rail.

[0010] Preferably, a controller is fixedly connected to one side of one of the socket plates, a servo motor is installed at the top of one of the rotating shafts, the controller is electrically connected to the servo motor, the output end of the servo motor is fixedly connected to one of the rotating shafts, a reinforcement frame is provided on one side of the servo motor, the socket plate and the servo motor are fixedly connected to the reinforcement frame, a pulley is fixedly connected to the outer wall of the rotating shaft near its bottom end, the lower surface of the pulley is slidably connected to a hanging inner groove rail, and the two socket plates are fixedly connected to the upper surface of the hanging inner groove rail.

[0011] The outer wall of the pulley is provided with a transmission toothed belt, and the two pulleys are meshed and connected with the transmission toothed belt. A plurality of linkage blocks are fixedly connected to both sides of the transmission toothed belt, and a support shaft is fixedly connected to one side of the linkage block. The outer wall of the support shaft is rotatably connected with a moving roller, and the moving roller is rollingly connected to the inner wall of the hanging outer groove rail. One end of the support shaft is fixedly connected with a graphene slider, and the graphene slider is slidingly connected to the hanging outer groove rail; the lower surface of the linkage block is fixedly connected with a suspension rod, and the suspension rod is slidingly connected to the hanging outer groove rail, and a conveying box is fixedly installed at the bottom end of the suspension rod. The outer walls of the moving roller and the graphene slider are both smooth surfaces, and the moving roller and the graphene slider are both made of graphene material.

[0012] When this technology is used for transportation, the servo motor is started to drive the rotating shaft to rotate at a high speed. The rotating shaft rotates inside the socket plate, the pulley rotates within the limit of the inner groove track of the suspension, the transmission belt drives multiple linkage blocks to move, the support shaft drives the moving roller to move, and the moving roller rolls along the inner groove of the outer groove track of the suspension. The graphene slider slides along the inner groove of the outer groove track of the suspension for guiding, and the suspension rod slides along the outer groove track of the suspension, driving the transportation box to move.

[0013] The technical effects and advantages of the present invention:

[0014] 1. Through the intelligent linkage energy-saving lubrication conveying component of the present invention, the servo motor drives the rotating shaft to rotate at a high speed. The docking through-holes on the hole plate can pass through the bottom of the lubricating oil pipe multiple times within a specified time, so as to quickly drain the lubricating oil into the inner groove of the outer groove track of the suspension for high-speed lubrication. The servo motor drives the rotating shaft to rotate at a low speed, and the rotating shaft drives the small gear to also rotate at a low speed. The docking through-holes can pass through the bottom of the lubricating oil pipe fewer times within a specified time, slowly draining the lubricating oil into the inner groove of the outer groove track of the suspension. It can not only use the power source driven by the servo motor for lubrication, saving equipment and electric energy, but also adjust the lubrication speed according to the conveying speed driven by the rotating shaft, realizing intelligent linkage energy-saving lubrication of the inner groove of the outer groove track of the suspension, and thus achieving intelligent energy-saving adjustment of lubrication by using the transmission power of transportation, making the transportation intelligent linkage better.

[0015] 2. The present invention adopts a lubrication diversion component. The lubricating oil drains down along the downcomer to the inclined surface of the diversion block, and is limited on both sides by two limit blocks. The lubricating oil can lubricate the side surface of the inner groove of the outer groove track of the suspension. Another part of the lubricating oil flows down to the baffle, and the dripping column drips the lubricating oil to the bottom position inside the outer groove track of the suspension to lubricate the moving roller and the graphene slider, making the transportation smoother and reducing transportation wear.

[0016] 3. The present invention drives multiple linkage blocks to move through the transmission belt. The linkage blocks drive the support shaft to move. The moving roller rolls along the inner groove of the outer groove track of the suspension. The support shaft drives the graphene slider to move. The graphene slider slides along the inner groove of the outer groove track of the suspension for guiding. The suspension rod drives the transportation box to move. The transportation box drives the finished silicon carbide wafers to be suspended and transported. Therefore, the graphene slider and the moving roller can achieve double lubrication, reducing transportation wear and having better transportation durability. Description of the Drawings

[0017] Figure 1 It is the main view structure schematic diagram of the conveying mechanism for intelligently suspending and transporting finished silicon carbide wafers of the present invention.

[0018] Figure 2 It is the partial structure schematic diagram of the cut-off connection between the outer groove track of the suspension and the socket plate of the present invention.

[0019] Figure 3 This is a schematic vertical cross-sectional view of the conveying mechanism for intelligently suspending and conveying finished silicon carbide wafers according to the present invention.

[0020] Figure 4 This is a schematic partial vertical cross-sectional view of the connection between the rotating shaft and the pulley according to the present invention.

[0021] Figure 5 According to the present invention Figure 4 This is an enlarged schematic view of the structure at position A in

[0022] Figure 6 According to the present invention Figure 4 This is an enlarged schematic view of the structure at position B in

[0023] Figure 7 This is a schematic bottom view of the lubricating diversion assembly according to the present invention.

[0024] Figure 8 This is a schematic cross-sectional view of the conveying mechanism for intelligently suspending and conveying finished silicon carbide wafers according to the present invention.

[0025] Figure 9 This is a schematic partial top cross-sectional view of the connection between the linkage block and the support shaft according to the present invention.

[0026] Reference numerals are: 1, suspension outer groove rail; 2, socket plate; 3, rotating shaft; 4, small gear; 5, large gear; 6, sealing hole ring; 7, hole plate; 8, rubber hole ring; 9, lubricating oil pipe; 10, lower discharge pipe; 11, docking through hole; 12, linkage shaft; 13, socket shaft strip; 14, loading bucket; 15, bracket; 16, controller; 17, suspension mounting rod; 18, diversion block; 19, limit block; 20, slot hole; 21, stop block; 22, dropping column; 23, servo motor; 24, reinforcement frame; 25, pulley; 26, suspension inner groove rail; 27, transmission toothed belt; 28, linkage block; 29, support shaft; 30, moving roller; 31, graphene slider; 32, suspension rod; 33, conveying box. Detailed implementation manners

[0027] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0028] As shown in the attached Figure 1 -attached Figure 9A conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers is shown. The conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers is provided with an intelligent linkage energy-saving lubrication conveying component and a lubrication guide component. The setting of each component can not only utilize the power source driven by the servo motor 23 for lubrication, saving equipment and electric energy, but also can drive the conveying speed according to the rotating shaft 3, thereby adjusting the lubrication speed, realizing intelligent linkage energy-saving lubrication. The groove body inside the outer groove rail 1 of the suspension can utilize the transmission force of the conveying to realize intelligent energy-saving adjustment of lubrication, and the intelligent linkage of the conveying is better. The specific structural settings of each mechanism and component are as follows.

[0029] In this technical solution, as shown in the attached Figure 1 - Attachment Figure 6 As shown, two socket plates 2 are fixedly connected to the upper surface of the hanging outer groove rail 1, and a rotating shaft 3 is rotatably connected to the interior of each socket plate 2. A pinion 4 is fixedly connected to the outer wall of the rotating shaft 3 and located on the upper surface of the socket plate 2, and an intelligent linkage energy-saving lubrication and conveying component is provided on the outer wall of the pinion 4; the intelligent linkage energy-saving lubrication and conveying component includes a large gear 5 meshingly connected to the outer wall of the pinion 4, and a sealing hole ring 6 is fixedly connected to the upper surface of the large gear 5.

[0030] A hole plate 7 is fixedly connected to the upper surface of the sealing hole ring 6, and a rubber hole ring 8 is fixedly connected to the upper surface of the hole plate 7. A lubricating oil pipe 9 is slidably provided on the upper surface of the rubber hole ring 8, and a lower row pipe 10 is slidably connected to the lower surface of the sealing hole ring 6 near its edge line. A docking through hole 11 is provided on the inner wall of the hole plate 7. The pinion 4 is rotatably connected to the socket plate 2, and the sealing hole ring 6 is slidably connected to the pinion 4. The center point of the inner wall of the lubricating oil pipe 9 is on the same vertical line as the center point of the inner wall of the lower row pipe 10. The lower row pipe 10 is fixedly connected to the suspension outer groove rail 1, and the rubber hole ring 8 and the sealing hole ring 6 are both connected to the docking through hole 11; the cross-sectional shape of the docking through hole 11 is circular.

[0031] In this technical solution, as shown in the attached Figure 2 - Attachment Figure 6 As shown, a linkage shaft 12 is fixedly connected to the inner wall of the large gear 5, and a sleeve shaft bar 13 is provided below the large gear 5. The sleeve shaft bar 13 is fixedly connected to the sleeve plate 2, and the sleeve shaft bar 13 is slidably connected to the rotating shaft 3; the sleeve shaft bar 13 and the linkage shaft 12 are rotationally connected, so that the large gear 5 drives the linkage shaft 12 to rotate, thereby ensuring that the linkage shaft 12 rotates stably inside the sleeve shaft bar 13.

[0032] The top end of the lubricating oil pipe 9 is fixedly connected and communicated with a loading barrel 14. One side of the outer wall of the loading barrel 14 is provided with a bracket 15. Both the hanging outer groove rail 1 and the loading barrel 14 are fixedly connected to the bracket 15, so as to facilitate the hanging outer groove rail 1 to support the bracket 15 and the bracket 15 to support the loading barrel 14, increasing the stability of the loading barrel 14 during use. On one side of one of the socket plates 2, a controller 16 is fixedly connected. On the upper surface of the socket plate 2 and near both ends thereof, hanging mounting rods 17 are fixedly connected. The hanging mounting rods 17 are made of carbon fiber material, so as to facilitate hanging and fixing the hanging mounting rods 17 at the top position of the inner wall of the factory building by using expansion bolts. The socket plate 2 is supported by the hanging mounting rods 17, and the controller 16 is supported by the socket plate 2, increasing the stability of the controller 16.

[0033] In this technical solution, as shown in the attached Figure 6 -attached Figure 7 figure, at the top end of the inner wall of the hanging outer groove rail 1 and below the lower row of pipes 10, a diversion block 18 is fixedly connected. There is a gap between the diversion block 18 and one side of the inner wall of the hanging outer groove rail 1. A lubricating diversion assembly is provided on the upper inclined surface of the diversion block 18. The lubricating diversion assembly includes two limit blocks 19 fixedly arranged on the upper inclined surface of the diversion block 18. Two strip holes 20 are opened in the inner wall of the diversion block 18. A plurality of stop blocks 21 are provided on the lower surface of each strip hole 20. The plurality of stop blocks 21 are all fixedly connected to the diversion block 18. A dripping column 22 is fixedly connected to the lower surface of each stop block 21. The vertical cross-sectional shapes of the two limit blocks 19 are both triangular, and the upper inclined surface of the diversion block 18 is a smooth surface.

[0034] In this technical solution, as shown in the attached Figure 2 -attached Figure 9 figure, on one side of one of the socket plates 2, a controller 16 is fixedly connected. At the top end of one of the rotating shafts 3, a servo motor 23 is installed. The controller 16 is electrically connected to the servo motor 23. The output end of the servo motor 23 is fixedly connected to one of the rotating shafts 3. A reinforcing frame 24 is provided on one side of the servo motor 23. Both the socket plate 2 and the servo motor 23 are fixedly connected to the reinforcing frame 24. A pulley 25 is fixedly connected to the outer wall of the rotating shaft 3 and near its bottom end. The lower surface of the pulley 25 is slidably connected to a hanging inner groove rail 26. Both of the socket plates 2 are fixedly connected to the upper surface of the hanging inner groove rail 26.

[0035] The outer wall of the pulley 25 is provided with a transmission toothed belt 27. Both pulleys 25 are in meshing transmission connection with the transmission toothed belt 27. A plurality of linkage blocks 28 are fixedly connected to both sides of the transmission toothed belt 27. One side of the linkage block 28 is fixedly connected with a support shaft 29. The outer wall of the support shaft 29 is rotationally connected with a moving roller 30. The moving roller 30 is in rolling connection with the inner wall of the suspension outer groove rail 1. One end of the support shaft 29 is fixedly connected with a graphene slider 31, and the graphene slider 31 is in sliding connection with the suspension outer groove rail 1. The lower surface of the linkage block 28 is fixedly connected with a suspension rod 32, and the suspension rod 32 is in sliding connection with the suspension outer groove rail 1. The bottom end of the suspension rod 32 is fixedly installed with a conveying box 33. The outer walls of the moving roller 30 and the graphene slider 31 are both smooth surfaces, and the moving roller 30 and the graphene slider 31 are both made of graphene material.

[0036] The working principle of the conveying mechanism for intelligently suspending and conveying silicon carbide wafer products of the present invention is as follows:

[0037] Step 1: During installation and placement, first use expansion bolts to suspend and fix the suspension installation rod 17 at the top position of the inner wall of the factory building, so that the four suspension installation rods 17 are suspended and fixed. The suspension installation rod 17 supports the socket plate 2, the socket plate 2 supports the suspension outer groove rail 1, and the socket plate 2 can provide a supporting force for the suspension inner groove rail 26 to complete the suspension installation. Then place the silicon carbide wafer products inside the conveying box 33 to achieve the operation of loading and conveying.

[0038] Step 2: During variable-speed conveying, the support reinforcement frame 24 is supported by the socket plate 2, the reinforcement frame 24 supports the servo motor 23, the controller 16 starts the servo motor 23 to drive the rotating shaft 3 to rotate at a high speed, where the high speed is 50 revolutions per minute. The rotating shaft 3 rotates inside the socket plate 2, the rotating shaft 3 drives the pulley 25 to rotate, the pulley 25 rotates within the limit of the suspension inner groove rail 26. At the same time, the pulley 25 drives the transmission toothed belt 27 to engage and drive, the transmission toothed belt 27 drives a plurality of linkage blocks 28 to move, the linkage block 28 drives the support shaft 29 to move, the support shaft 29 drives the moving roller 30 to move, and the moving roller 30 rolls along the inner wall groove of the suspension outer groove rail 1. At the same time, the support shaft 29 drives the graphene slider 31 to move, and the graphene slider 31 slides along the inner wall groove of the suspension outer groove rail 1 for guiding. In this way, the linkage block 28 drives the suspension rod 32 to move, the suspension rod 32 slides along the suspension outer groove rail 1, the suspension rod 32 drives the conveying box 33 to move, and the conveying box 33 drives the silicon carbide wafer products to be suspended and conveyed.

[0039] Step 3: During intelligent linkage energy-saving lubrication and transportation, when the rotating shaft 3 rotates at high speed, the rotating shaft 3 will drive the small gear 4 to rotate at high speed. The small gear 4 drives the large gear 5 to mesh and rotate, and the large gear 5 drives the linkage shaft 12 to rotate. The socket plate 2 provides a supporting force for the socket shaft bar 13, so as to ensure that the linkage shaft 12 rotates stably inside the socket shaft bar 13. The large gear 5 drives the sealing hole ring 6 to rotate, the sealing hole ring 6 drives the hole plate 7 to rotate, and the hole plate 7 drives the rubber hole ring 8 to rotate. Thus, the rubber hole ring 8 rotates and moves along the bottom end of the lubricating oil pipe 9.

[0040] At the same time, the sealing hole ring 6 moves along the upper surface of the lower discharge pipe 10. When the docking through hole 11 on the hole plate 7 is located between the lubricating oil pipe 9 and the lower discharge pipe 10, the lubricating oil pipe 9 and the lower discharge pipe 10 are communicated through the docking through hole 11. In this way, the hanging outer groove rail 1 supports the support bracket 15, the support bracket 15 supports the loading bucket 14, and the lubricating oil inside the loading bucket 14 can flow into the hole position of the rubber hole ring 8 along the lubricating oil pipe 9, enter the inside of the hole plate 7 along the hole position of the rubber hole ring 8, and then enter the docking through hole 11. It enters the hole position of the sealing hole ring 6 through the docking through hole 11, and the sealing hole ring 6 drips the lubricating oil into the lower discharge pipe 10. It is discharged through the lower discharge pipe 10 into the groove inside the hanging outer groove rail 1. Thus, at the position of the guide block 18, when the rotating shaft 3 rotates at high speed, the small gear 4 can also rotate at high speed, so that the docking through hole 11 on the hole plate 7 can pass through the bottom of the lubricating oil pipe 9 multiple times within a specified time, so as to quickly discharge the lubricating oil into the groove inside the hanging outer groove rail 1 for high-speed lubrication.

[0041] When the controller 16 starts the servo motor 23 to drive the rotating shaft 3 to rotate at a low speed, where the low speed is 20 revolutions per minute, the rotating shaft 3 drives the small gear 4 to also be driven at a low speed, so that the rotation speed of the hole plate 7 is also low. In this way, the docking through hole 11 on the hole plate 7 can pass through the bottom of the lubricating oil pipe 9 fewer times within a specified time, so as to slowly discharge the lubricating oil into the groove inside the hanging outer groove rail 1. It can not only utilize the power source driven by the servo motor 23, but also realize intelligent linkage energy-saving lubrication of the groove inside the hanging outer groove rail 1 according to different driving speeds of the rotating shaft 3.

[0042] Step 4: When lubricating and guiding, the lubricating oil flows down along the lower discharge pipe 10 to the inclined surface of the guiding block 18, and is limited on both sides by the two limiting blocks 19. In this way, the lubricating oil flows down along the guiding block 18, so as to fit into the gap between the guiding block 18 and the inner wall of the suspension outer groove rail 1. The lubricating oil can lubricate the side surface of the inner groove of the suspension outer groove rail 1, so that the graphene slider 31 can be automatically lubricated when passing through the lubricated position inside the suspension outer groove rail 1. At the same time, another part of the lubricating oil flows down along the strip hole 20 to the baffle 21, and the baffle 21 guides it to the dropping column 22, and the dropping column 22 drops the lubricating oil to the inner bottom surface position of the suspension outer groove rail 1. In this way, the moving roller 30 can be automatically lubricated when passing through the inner bottom surface position of the suspension outer groove rail 1. The transportation is smoother, the wear of the moving roller 30 and the graphene slider 31 is reduced, and the transportation durability is better.

[0043] The content not described in detail in the specification belongs to the prior art well-known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited. Conventional equipment can be used. In this technical solution, since the electrical control components not mentioned belong to the prior art, they are not shown in the figure and will not be described here.

[0044] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An intelligent suspension conveying mechanism for conveying finished silicon carbide wafers comprises a suspension outer groove rail, and two socket plates are fixedly connected to the upper surface of the suspension outer groove rail, and is characterized in that: Each of the socket plates is rotatably connected to a rotating shaft, and a pinion is fixedly connected to the outer wall of the rotating shaft and located on the upper surface of the socket plate, and an intelligent linkage energy-saving lubrication conveying component is provided on the outer wall of the pinion; The intelligent linkage energy-saving lubrication delivery component includes a large gear meshingly connected to the outer wall of the small gear, a sealing hole ring is fixedly connected to the upper surface of the large gear, the small gear is rotatably connected to the socket plate, the sealing hole ring and the small gear are slidably connected, a hole plate is fixedly connected to the upper surface of the sealing hole ring, and a rubber hole ring is fixedly connected to the upper surface of the hole plate; a lubricating oil pipe is slidably provided on the upper surface of the rubber hole ring, and a lower row pipe is slidably connected to the lower surface of the sealing hole ring near its edge line, and the inner wall center point of the lubricating oil pipe is at the center point of the inner wall of the lower row pipe On the same vertical line, a docking through hole is opened on the inner wall of the orifice plate, a guide block is fixedly connected to the top of the inner wall of the hanging outer groove rail and below the lower row pipe, a gap is provided between the guide block and one side of the inner wall of the hanging outer groove rail, and a lubrication guide component is provided on the upper inclined surface of the guide block; the lubrication guide component includes two limit blocks fixedly arranged on the upper inclined surface of the guide block, two strip holes are opened on the inner wall of the guide block, and a plurality of blocks are provided on the lower surface of each strip hole, and the plurality of blocks are fixedly connected to the guide block, and a lower drip column is fixedly connected to the lower surface of each block.

2. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: The lower row pipe is fixedly connected to the suspension outer groove rail, and the rubber hole ring and the sealing hole ring are both connected to the docking through hole; The cross-sectional shape of the butt-jointing through hole is circular.

3. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: The inner wall of the large gear is fixedly connected with a linkage shaft, and a sleeve shaft bar is provided below the large gear. The sleeve shaft bar is fixedly connected to the sleeve plate, and the sleeve shaft bar is slidably connected to the rotating shaft. The sleeve shaft is rotationally connected to the linkage shaft.

4. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: The top end of the lubricating oil pipe is fixedly connected to a containing barrel, a bracket is provided on one side of the outer wall of the containing barrel, and the hanging outer groove rail and the containing barrel are fixedly connected to the bracket.

5. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: The upper surface of the sleeve plate and positions close to its two ends are fixedly connected with suspension mounting rods, and the suspension mounting rods are made of carbon fiber material.

6. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: The vertical cross-sections of the two limit blocks are both triangular, and the upper inclined surface of the guide block is a smooth surface.

7. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: A controller is fixedly connected to one side of one of the sleeve plates, a servo motor is installed at the top of one of the rotating shafts, the controller is electrically connected to the servo motor, the output end of the servo motor is fixedly connected to one of the rotating shafts, a reinforcement frame is provided on one side of the servo motor, the sleeve plate and the servo motor are fixedly connected to the reinforcement frame, a pulley is fixedly connected to the outer wall of the rotating shaft near its bottom end, a suspension inner groove rail is slidably connected to the lower surface of the pulley, and the two sleeve plates are fixedly connected to the upper surface of the suspension inner groove rail; The outer wall of the pulley is provided with a transmission toothed belt, and the two pulleys are meshed and transmission-connected with the transmission toothed belt, and a plurality of linkage blocks are fixedly connected to both sides of the transmission toothed belt, and one side of the linkage block is fixedly connected to a support shaft, and the outer wall of the support shaft is rotatably connected to a moving roller, and the moving roller is rollingly connected to the inner wall of the suspension outer groove rail, and one end of the support shaft is fixedly connected to a graphene slider, and the graphene slider is slidingly connected to the suspension outer groove rail; The lower surface of the linkage block is fixedly connected with a hanging rod, and the hanging rod is slidably connected with the hanging outer groove rail, and the bottom end of the hanging rod is fixedly installed with a conveying box.

8. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 7 is characterized in that: The outer walls of the moving roller and the graphene slider are both smooth surfaces, and the moving roller and the graphene slider are both made of graphene material.

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