An ultrapure water recycling system based on ion adsorption structure

By setting up a complex flow pattern of sliding plates and arc-shaped plates inside the adsorption tank, the problem of uneven cation distribution is solved, the adsorption efficiency and wastewater recycling rate are improved, and the pure water recycling after the cleaning treatment of semiconductor parts is realized.

CN119822445BActive Publication Date: 2025-11-14DALIAN KAIVITES SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202510003970.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-01-02
Publication Date
2025-11-14
Estimated Expiration
2045-01-02

AI Technical Summary

Technical Problem

In existing technologies, the pure water after the cleaning of semiconductor parts contains a large number of cations. When these cations are adsorbed by colloids in the adsorption tank, the natural flow of the fluid leads to uneven local concentrations, resulting in low adsorption efficiency and affecting the recycling of wastewater.

Method used

An ultrapure water recycling system based on ion adsorption structure is adopted. Multiple convection circulations are formed by the rotation of sliding plates and arc plates in the stirring section within the tank, ensuring that cations are evenly distributed in the solution. The arc plates and sliding plates are staggered to form a complex flow pattern, avoiding dead zones and improving adsorption efficiency.

Benefits of technology

It achieves uniform distribution of cations, improves adsorption efficiency, ensures uniform treatment of wastewater, reduces the impact of dead zones, and improves wastewater recycling rate, which is in line with the concept of sustainable development.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention relates to the field of wastewater treatment technology and discloses an ultrapure water recycling system based on an ion adsorption structure. The system includes a placement section comprising a tank with a support frame fixedly connected to its bottom; and a stirring section comprising a connecting shaft, the outer end of which is rotatably connected to the interior of the tank. This ultrapure water recycling system based on an ion adsorption structure effectively solves the problem in existing technologies where the pure water after cleaning semiconductor components contains a large number of cations, requiring adsorption by colloids in an adsorption tank. However, the colloidal medium relies on the natural flow of fluid to contact the contaminated pure water, resulting in localized concentration differences within the tank. This leads to uneven distribution of colloidal particles, resulting in low overall adsorption efficiency, reduced treatment effectiveness, and hindering subsequent wastewater recycling.
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Description

Technical Field

[0001] This invention relates to the field of wastewater treatment technology, specifically to an ultrapure water recycling system based on an ion adsorption structure. Background Technology

[0002] Colloidal adsorption tanks are commonly used equipment in chemical, environmental protection, and pharmaceutical fields for treating materials containing colloidal particles. They use adsorbents to adsorb colloidal particles, thereby separating colloids from liquids. They are widely used in wastewater treatment, dye recovery, food processing, and other industries.

[0003] In existing technologies, the pure water after cleaning semiconductor components contains a large number of cations, which need to be adsorbed by colloids in an adsorption tank. The colloidal medium relies on the natural flow of the fluid to contact the contaminated pure water, which will produce local concentration differences in the tank. It cannot be evenly distributed in the adsorption tank, resulting in uneven adsorption process. Some colloidal particles are not effectively adsorbed, resulting in low overall adsorption efficiency, reduced treatment effect, and impact on subsequent wastewater recycling. Summary of the Invention

[0004] Technical problems to be solved

[0005] To address the aforementioned shortcomings of existing technologies, this invention provides an ultrapure water recycling system based on an ion adsorption structure. This system effectively solves the problem that in existing technologies, the pure water after semiconductor component cleaning contains a large number of cations, requiring adsorption through colloids in an adsorption tank. However, the colloidal medium relies on the natural flow of the fluid to contact the contaminated pure water, resulting in localized concentration variations within the tank. This leads to uneven distribution of colloids within the adsorption tank, uneven adsorption, and some colloidal particles failing to be effectively adsorbed, resulting in low overall adsorption efficiency, reduced treatment effectiveness, and hindering subsequent wastewater recycling.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] This invention provides an ultrapure water recycling system based on an ion adsorption structure, comprising:

[0008] The placement part includes a tank body, and a support frame is fixedly connected to the bottom of the tank body;

[0009] The stirring section includes a connecting shaft, the outer end of which is rotatably connected to the inside of the tank. An arc-shaped plate is fixedly connected to the outer circumference of the connecting shaft. Two sets of arc-shaped plates are arranged in a circumferential array centered on the connecting shaft. Each set of arc-shaped plates has several plates. One arc-shaped plate near the outer end of the tank has a curved surface design and fits against the end of the inner wall of the tank. A slide is provided between the connecting shaft and the arc-shaped plates, and one end of the slide passes through the connecting shaft and extends to the outside.

[0010] The slide rail is slidably connected to a partition mechanism that can be used to separate the interior of the tank. The connecting shaft is equipped with a driving component through a cavity formed inside it, and the cavity is connected to the interior of the slide rail.

[0011] Furthermore, a feed pipe is fixedly connected to the top of the tank, a connecting pipe is fixedly connected to the bottom of the tank, and an RO membrane tank is fixedly connected to the other end of the connecting pipe.

[0012] Furthermore, the separating mechanism includes a sliding plate, which is slidably connected to the arc-shaped plate by a clip fixed to its outer surface. The outer surface of the sliding plate is provided with a toothed groove, and the end of the arc-shaped plate away from the connecting shaft is provided with an elastic element that fits against the inner circumference of the tank.

[0013] Furthermore, the driving component includes a driving base, the output end of which is connected to a gear via a synchronous belt drive, the top end of which is fixedly connected to a rotating shaft, the top end of which extends into the cavity, and the outer surface of which is fixedly connected to a toothed ring that meshes with the tooth groove.

[0014] Furthermore, the elastic element includes a connecting block, the inner surface of which slides against the outer surface of the arc-shaped plate, and a corrosion-resistant spring connected to the outer side of the arc-shaped plate is provided on the side of the connecting block near the connecting shaft.

[0015] Furthermore, the side of the connecting block away from the corrosion-resistant spring is designed with an arc surface, and a corrosion-resistant rubber that fits tightly against the inner wall of the tank is fixedly connected to the side of the connecting block away from the corrosion-resistant spring.

[0016] Furthermore, a sealing plate that fits against the outer surface of the connecting shaft is fixedly connected to the side of the sliding plate away from the connecting block.

[0017] Furthermore, a backwash inlet pipe is fixedly connected to the bottom of the tank, and a backwash outlet pipe is fixedly connected to the top of the tank.

[0018] The technical solution provided by this invention has the following advantages compared with the prior art:

[0019] This invention incorporates sliding plates and arc-shaped plates. During the waste liquid adsorption stage, the sliding plates are in an expanded state within the arc-shaped plates. A rotating shaft drives the sliding plates and arc-shaped plates to rotate inside the tank, resulting in a more uniform distribution of wastewater within the tank and preventing localized excessively high or low concentrations. When the stirring section inside the tank adsorbs cations from the wastewater, the sliding plates are in an expanded state compared to the arc-shaped plates. Each set of sliding plates and arc-shaped plates is staggered, arranged in a C-shape. When the rotating shaft drives the entire assembly to rotate, the two sets of C-shaped arc-shaped plates and sliding plates create multiple convection cycles within the tank. The sliding plates induce clockwise flow of the liquid inside the tank, while the arc-shaped plates induce counterclockwise flow. These two flows in different directions intertwine, allowing the liquid to mix thoroughly. This convection circulation ensures that cations and waste gas are evenly distributed in the solution. The arc-shaped plate and sliding plate can cover a wider area, effectively agitating the liquid at the edges and corners of the tank, preventing the formation of "dead zones" in these areas. In these dead zones, cation colloids may not be able to fully contact the adsorption medium due to lack of flow, affecting the adsorption effect. The stirring part can push the liquid from the center area to the edge and then bring it back from the edge to the center, so that the liquid in the entire adsorption tank can participate in the stirring process, ensuring the uniformity of cation colloids in the solution. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0021] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of the tank, support frame, and feed pipe according to an embodiment of the present invention;

[0023] Figure 3 This is a schematic cross-sectional view of the tank body according to an embodiment of the present invention;

[0024] Figure 4 This is a schematic diagram of the structure of the connecting shaft, sliding plate, and arc plate according to an embodiment of the present invention;

[0025] Figure 5 This is a schematic diagram of the structure of the driving component according to an embodiment of the present invention;

[0026] Figure 6 This is another cross-sectional view of the tank body according to an embodiment of the present invention;

[0027] Figure 7 This is a partial view of the separating mechanism, connecting shaft, and arc-shaped plate according to an embodiment of the present invention;

[0028] Figure 8 This is a schematic diagram of the structure of the elastic element and the arc-shaped plate in an embodiment of the present invention;

[0029] Figure 9 This is an embodiment of the present invention. Figure 8 A magnified structural diagram of part A in the middle;

[0030] Figure 10 This is a schematic diagram of the structure of the connecting shaft, the arc-shaped plate, and the sliding plate according to an embodiment of the present invention;

[0031] Figure 11 This is a cross-sectional view of the connecting shaft and the rotating shaft according to an embodiment of the present invention.

[0032] The labels in the diagram represent: 1. Placement section; 11. Tank body; 111. Feed pipe; 112. Connecting pipe; 12. Support frame; 13. RO membrane tank; 2. Stirring section; 21. Connecting shaft; 22. Arc plate; 221. Slide rail; 23. Separating mechanism; 231. Sliding plate; 2311. Gear groove; 232. Driving component; 2321. Driving seat; 2322. Synchronous belt; 2323. Gear; 2324. Rotating shaft; 2325. Gear ring; 233. Sealing plate; 24. Elastic component; 241. Connecting block; 242. Corrosion-resistant spring. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0034] The present invention will be further described below with reference to embodiments.

[0035] Example:

[0036] Please see Figures 1-11 This invention provides a technical solution: an ultrapure water recycling system based on an ion adsorption structure, comprising:

[0037] Placement part 1, the placement part 1 includes a tank 11, and a support frame 12 is fixedly connected to the bottom of the tank 11;

[0038] The stirring part 2 includes a connecting shaft 21. The outer end of the connecting shaft 21 is rotatably connected to the inside of the tank 11. An arc plate 22 is fixedly connected to the outer circumference of the connecting shaft 21. Two sets of arc plates 22 are arranged in a circumferential array with the connecting shaft 21 as the center. Each set of arc plates 22 has several arc plates. The arc plates 22 near the top and bottom of the inner wall of the tank 11 are designed with curved surfaces. The arc plates 22 fit against the top and bottom of the inner wall of the tank 11. A sealing strip is provided in the curved surface of the arc plates 22. A slide 221 is opened between the connecting shaft 21 and the arc plates 22. One end of the slide 221 passes through the connecting shaft 21 and extends to the outside.

[0039] The slide 221 has a sliding connection inside a partition mechanism 23 that can be used to separate the interior of the tank 11. The connecting shaft 21 has a drive component 232 provided through a cavity opened inside it, and the cavity is connected to the interior of the slide 221.

[0040] The top of the tank body 11 is fixedly connected to the feed pipe 111, the bottom of the tank body 11 is fixedly connected to the connecting pipe 112, and the other end of the connecting pipe 112 is fixedly connected to the RO membrane tank 13.

[0041] The separating mechanism 23 includes a sliding plate 231, which is slidably connected to the arc-shaped plate 22 via a retaining strip fixed to its outer surface. The outer surface of the sliding plate 231 has a toothed groove 2311. The end of the arc-shaped plate 22 away from the connecting shaft 21 is provided with an elastic element 24 that fits against the inner circumference of the tank body 11. In the initial state, the sliding plate 231 and the arc-shaped plate 22 are separated and in an unfolded state. The outer end of the sliding plate 231 is confined within a limiting element inside the connecting shaft 21, and the sliding plate 231 and the arc-shaped plate 22 are arranged in a C-shape.

[0042] The drive unit 232 includes a drive base 2321. The output end of the drive base 2321 is connected to a gear 2323 via a synchronous belt 2322. The top end of the gear 2323 is fixedly connected to a rotating shaft 2324. The top end of the rotating shaft 2324 extends into the cavity. A toothed ring 2325 that meshes with the tooth groove 2311 is fixedly connected to the outer surface of the rotating shaft 2324.

[0043] The elastic element 24 includes a connecting block 241, the inner surface of which slides against the outer surface of the arc plate 22, and a corrosion-resistant spring 242 connected to the outer side of the arc plate 22 is provided on the side of the connecting block 241 near the connecting shaft 21.

[0044] The side of the connecting block 241 away from the corrosion-resistant spring 242 is designed with an arc surface. The side of the connecting block 241 away from the corrosion-resistant spring 242 is fixedly connected with corrosion-resistant rubber that fits tightly against the inner wall of the tank 11, which can better seal the two chambers during the desorption process of the colloid.

[0045] A sealing plate 233 that fits against the outer surface of the connecting shaft 21 is fixedly connected to the side of the sliding plate 231 away from the connecting block 241.

[0046] The bottom of the tank 11 is fixedly connected to a backwash inlet pipe, and the top of the tank 11 is fixedly connected to a backwash outlet pipe.

[0047] The process of wastewater adsorption by the colloid inside tank 11:

[0048] In practical applications, the pure water used for post-processing of semiconductor components in the external overflow tank needs to be treated. The water contains a large number of impurities and cations. In order to protect the environment and reduce resource waste, the wastewater needs to be recycled. The overflow tank initially removes most of the impurity particles, and at the end of the overflow tank, the water to be treated enters the tank 11 from the feed pipe 111 in the placement part 1.

[0049] When the tank 11 is running, the drive seat 2321 in the start drive component 232 is activated. Its output end drives the gear 2323 to rotate through the synchronous belt 2322. A rotating shaft 2324 is fixedly connected above the gear 2323. The rotating shaft 2324 starts to rotate slowly under its influence. Several sets of toothed rings 2325 are sleeved on the outer circumference of the rotating shaft 2324. Each set of toothed rings 2325 corresponds to two sliding plates 231. The height of the toothed rings 2325 is the same as the height of the sliding plates 231, and they are always engaged with the toothed grooves 2311 opened on the outer surface of the sliding plates 231.

[0050] During normal operation, the sealing plate 233 at the outer end of the sliding plate 231 does not contact the outer surface of the connecting shaft 21. The sliding plate 231 is positioned away from the interior of the arc-shaped plate 22 within the slide rail 221. The sealing plate 233 at the outer end of the sliding plate 231 is close to the inner wall of the tank 11. A limiting component is provided inside the connecting shaft 21 to restrict the outer end of the sliding plate 231 away from the sealing plate 233, ensuring that the sliding plate 231 will not accidentally detach from the connecting shaft 21 in the unfolded state. When the colloid inside the tank 11 normally adsorbs wastewater, the corrosion-resistant spring 242 is in a contracted state, and the inner wall of the connecting block 241 and the smooth side of the sliding plate 231 are slidably connected through the sealing component.

[0051] At this point, wastewater containing a large number of cations enters the tank 11 through the feed pipe 111 via an external pump. The tank 11 is filled with colloidal adsorption media, which typically have a large specific surface area and abundant active sites. Cations in the wastewater are adsorbed onto the surface of these media through electrostatic attraction or chemical bonding. When using these adsorption media, their surfaces carry a negative charge, which attracts cation colloids. The porous structure of the colloids also provides ample space for cation adsorption.

[0052] The rotating shaft 2324 drives the sliding plate 231 to move. Because the sliding plate 231 is restricted by the limiting component inside the connecting shaft 21, it is already at the outermost edge of the connecting shaft 21. At this time, the rotating shaft 2324 and the connecting shaft 21 form a single unit. As the rotating shaft 2324 continues to rotate, the connecting shaft 21, which is sleeved on its outer surface, rotates synchronously inside the tank 11. During rotation, the cationic colloid is more evenly distributed in the solution within the adsorption tank 11, improving adsorption efficiency.

[0053] In the stirring section 2, the sliding plate 231 is in an extended state. Two sets of sliding plates 231 and arc-shaped plates 22 are provided, both arranged in a circumferential array around the connecting shaft 21, with the sliding plates 231 and arc-shaped plates 22 staggered. One set of sliding plates 231 and one set of arc-shaped plates 22 are arranged in a C-shape. When the rotating shaft 2324 drives the entire assembly to rotate, the two sets of C-shaped arc-shaped plates 22 and sliding plates 231 can generate more complex fluid movements within the tank 11. These movements enable the liquid to form multiple convection cycles within the tank 11. The sliding plate 231 causes the liquid to flow clockwise within the tank 11, while the arc-shaped plate 22 causes it to flow counterclockwise. These two different flow directions intertwine, allowing the liquid to mix thoroughly. This convection cycle ensures that the cationic colloid is evenly distributed in the solution, avoiding localized excessively high or low concentrations, thereby improving adsorption efficiency.

[0054] The process of RO membrane filtration of ultrapure water after cation removal:

[0055] After the solution undergoes colloidal adsorption treatment inside tank 11, once the concentration of cation colloids decreases to meet emission standards or production requirements, it will be discharged from tank 11 through the bottom connecting pipe 112 and enter the RO membrane tank 13 in the next process. During the discharge process, the flow rate needs to be controlled by a valve to ensure a smooth flow of the solution and prevent the adsorption medium from being carried out due to excessive flow rate. The wastewater solution after cation removal enters the RO membrane tank 13 under high pressure, where the RO membrane begins its filtration function. The RO membrane is a semi-permeable membrane that only allows water molecules to pass through. Based on the principle of reverse osmosis, when the pressure on the wastewater side is higher than the osmotic pressure on the other side of the RO membrane, water molecules will diffuse through the RO membrane from the wastewater side to the other side. After filtration by the RO membrane, the water that has passed through the RO membrane is collected and can be returned to the top of the overflow tank to achieve the recycling of ultrapure water for further post-processing of semiconductor components.

[0056] The process of desorbing the colloid inside the tank 11:

[0057] As the adsorption process of colloids on a large number of ions in ultrapure water proceeds, the colloids gradually become saturated. Once the adsorption medium reaches saturation, it can be regenerated chemically to restore its adsorption capacity. For ion exchange resin adsorption media, after it has adsorbed a large number of cations from ultrapure water, it can be rinsed with acid or alkaline solutions to desorb the adsorbed cation colloids, thereby restoring the resin's adsorption capacity.

[0058] Intermittent desorption of the colloid inside the tank 11 is performed to ensure its good adsorption capacity. During this process, the drive seat 2321 needs to be stopped and then rotated in the opposite direction. The synchronous belt 2322 drives the gear 2323 and the rotating shaft 2324 to rotate in the opposite direction. During rotation, the toothed ring 2325 fixedly connected to the outer surface of the rotating shaft 2324 also rotates synchronously, and drives the sliding plate 231 to move in the slide rail 221 by engaging with its toothed groove 2311. The toothed ring 2325 engages with the toothed grooves 2311 on both sides inside the cavity, which can make the sliding plates 231 on both sides move towards each other or away from each other at the same time. At this time, the sliding plate 231 moves between two adjacent arc-shaped plates 22 under the path restriction of the slide rail 221 by the upper and lower side retainers. The sealing plate 233 gradually moves away from the inner wall of the tank 11 and moves towards the connecting shaft 21.

[0059] The outer end of the sliding plate 231, away from the sealing plate 233, moves closer to the elastic element 24. When its outer end comes into contact with the inner wall of the connecting block 241, the rotating shaft 2324 continues to rotate, pressing the sliding plate 231 away from the connecting shaft 21. During this process, the outer end of the sliding plate 231 drives the connecting block 241 to slide towards the inner wall of the tank 11. The corrosion-resistant spring 242 between the connecting block 241 and the arc-shaped plate 22 undergoes elastic deformation under tensile force until the corrosion-resistant rubber on the outer surface of the connecting block 241 is tightly fitted to the inner wall of the tank 11, creating a sliding seal between the connecting block 241 and the smooth surface of the sliding plate 231. At this point, the side of the sealing plate 233 closest to the sliding plate 231 is tightly fitted to the slide rail 221 on the outer surface of the connecting shaft 21. The drive seat 2321 stops operating and remains in this state. Both sliding plates 231 on both sides perform the same action, dividing the interior of the tank 11 into two chambers.

[0060] The backwash inlet pipe and backwash outlet pipe are arranged on the same axis to ensure that the internal colloids are on the same side during desorption. The feed pipe 111 and the connecting pipe 112 are arranged to the left and right with the tank body 11 as the center. The backwash inlet pipe is fixedly connected to the bottom of the tank body 11. At this time, the backwash inlet pipe is connected to one of the chambers. The rinsing solution is filled into the chamber through the backwash inlet pipe, and is evenly filled into the interior of the tank body 11 from bottom to top, so that the cations adsorbed in the colloids are desorbed, thereby restoring the adsorption capacity of the resin. After desorption is completed, it is discharged from the backwash outlet pipe at the top.

[0061] Meanwhile, one chamber desorbs the colloid inside, while the other chamber's feed pipe 111 and connecting pipe 112 allow liquid to flow in and out normally, adsorbing the contaminated ultrapure water through the colloid. After one side completes the desorption of the colloid, clean water is poured into this chamber to achieve a relatively balanced liquid level on both sides. The drive seat 2321 is then activated, driving the gear 2323 and gear ring 2325 to rotate in the same direction as in the previous step. Because the sealing plate 233 is tightly attached to the connecting shaft 21, the sliding plate 231 cannot continue to move in this direction. At this point, the sliding plate 231 and the arc plate 22 form a whole again, rotating 180 degrees while adhering to the inner wall of the tank 11, thus swapping the positions of the two chambers. The chamber on the side that has completed the desorption continues to adsorb ions from the contaminated ultrapure water, while the chamber on the side that has not completed the desorption repeats the above steps to desorb the colloid inside.

[0062] After the colloid in both chambers has been desorbed, the rotating shaft 2324 is driven to rotate again by the drive seat 2321. The sliding plates 231 on both sides move in opposite directions under the action of the toothed ring 2325. The sealing plate 233 gradually separates from the outer surface of the connecting shaft 21. The outer end of the sliding plate 231 separates from the outer surface of the connecting block 241. Under the action of the corrosion-resistant spring 242, the connecting block 241 moves closer to the connecting shaft 21 (to reduce the wear between its outer wall and the inner wall of the tank 11 during subsequent stirring). The elastic element 24 is in a contracted state. When the outer end of the sliding plate 231 reaches the position of the limiting element in the connecting shaft 21, the sliding plate 231 and the arc plate 22 form a whole again. The arc plate 22, the connecting shaft 21 and the sliding plate 231 rotate synchronously inside the tank 11. The sliding plate 231 is in an unfolded state at this time. The sliding plate 231 and the arc plate 22 are arranged in a C-shape to uniformly stir the internal solution.

[0063] In summary, the above-mentioned stirring section 2 has the following advantages:

[0064] Advantage 1: It can recycle and reuse the ultrapure water flowing out from the bottom of the overflow tank after the post-processing of semiconductor components. After sedimentation to remove large particulate impurities, the wastewater passes through tank 11 to adsorb a large number of ions, and finally undergoes final osmotic filtration through RO membrane tank 13. The filtered ultrapure water then re-enters the upstream of the overflow tank for further post-processing of semiconductor components. By recycling and treating contaminated ultrapure water, environmental pollution is reduced, and water resources are recycled, which aligns with the concept of sustainable development.

[0065] Advantage 2: The colloidal adsorption medium filled inside the tank 11 has a large specific surface area and abundant active sites, which can effectively adsorb cations in wastewater and improve treatment efficiency. Meanwhile, the rotating shaft 2324 and the connecting shaft 21 drive the sliding plate 231 and the arc plate 22 to rotate inside the tank 11, making the wastewater more evenly distributed inside the tank 11, avoiding the problem of local concentration being too high or too low, and further improving the adsorption efficiency.

[0066] Thirdly, when the stirring section 2 inside the tank 11 adsorbs cations from the wastewater, the sliding plate 231 is in an unfolded state compared to the arc-shaped plate 22. Each set of sliding plates 231 and arc-shaped plates 22 are staggered, forming a C-shaped discharge pattern. When the rotating shaft 2324 drives the entire structure to rotate, the two sets of C-shaped arc-shaped plates 22 and sliding plates 231 create multiple convection cycles within the tank 11. The sliding plate 231 causes the liquid to flow clockwise within the tank 11, while the arc-shaped plate 22 causes it to flow counterclockwise. These two different flow directions intertwine, ensuring thorough mixing of the liquid. This convection cycle ensures that cations and waste gas are evenly distributed in the solution.

[0067] Fourthly, because the ultrapure water after processing semiconductor components contains a large number of metal ions, the adsorption colloidal medium inside tank 11 will gradually become saturated after adsorbing a large number of cations. The saturation rate of the colloidal medium increases rapidly, requiring frequent shutdowns to regenerate the colloidal medium inside tank 11. The separating mechanism 23 divides the inside of tank 11 into two chambers, allowing for alternating adsorption and desorption operations. While one chamber is desorbing, the other can continue adsorption, achieving continuous wastewater treatment, improving production efficiency, equipment utilization, and processing capacity.

[0068] Fifthly, when the internal colloid adsorbs ions in the wastewater, the rotating shaft 2324 drives the arc plate 22 and the sliding plate 231 to rotate inside the tank 11. At this time, the elastic element 24 is in a contracted state, which avoids wear on the inner wall of the tank 11 during the rotation. When the internal colloid desorbs, the elastic element 24 is squeezed by the sliding plate 231 in a contracted state, which squeezes the connecting block 241 against the inner wall of the tank 11, so that the two separated chambers are in a sealed state, ensuring that while one chamber is performing adsorption, the other chamber can be desorbed or cleaned.

[0069] Advantage 6: During the adsorption process, the connecting block 241 at the outer end of the arc plate 22 and the sealing plate 233 at the outer end of the sliding plate 231 are close to the inner wall of the tank 11, covering a wider area. This effectively agitates the liquid at the edges and corners of the tank 11, preventing the formation of "dead zones" in these areas. In these dead zones, the cationic colloids may not be able to fully contact the adsorption medium due to lack of flow, affecting the adsorption effect. This stirring part 2 can push the liquid from the central area to the edge and then bring it back from the edge to the center, so that the liquid in the entire adsorption tank can participate in the stirring process, ensuring the uniformity of the cationic colloids in the solution.

[0070] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. An ultrapure water recycling system based on an ion adsorption structure, characterized in that, include: Placement part (1), the placement part (1) includes a tank (11), and a support frame (12) is fixedly connected to the bottom of the tank (11); The stirring part (2) includes a connecting shaft (21). The outer end of the connecting shaft (21) is rotatably connected to the inside of the tank (11). An arc plate (22) is fixedly connected to the outer circumference of the connecting shaft (21). Two sets of arc plates (22) are arranged in a circumferential array with the connecting shaft (21) as the center. Each set of arc plates (22) has several. One arc plate (22) near the outer end of the tank (11) adopts a curved surface design and is in contact with the inner wall end of the tank (11). A slide (221) is opened between the connecting shaft (21) and the arc plate (22). One end of the slide (221) passes through the connecting shaft (21) and extends to the outside. The slide (221) is slidably connected to a partition mechanism (23) for separating the interior of the tank (11), and the connecting shaft (21) is provided with a driving member (232) through a cavity opened inside it, and the cavity is connected to the interior of the slide (221). The separating mechanism (23) includes a sliding plate (231), which is slidably connected to the arc plate (22) by a clip fixed on its outer surface. The outer surface of the sliding plate (231) is provided with a toothed groove (2311). An elastic element (24) is provided at one end of the arc plate (22) away from the connecting shaft (21) and fits against the inner circumference of the tank (11). The elastic element (24) includes a connecting block (241), the inner surface of which slides against the outer surface of the arc plate (22). A corrosion-resistant spring (242) is provided on the side of the connecting block (241) near the connecting shaft (21) and connected to the outer side of the arc plate (22).

2. The ultrapure water recycling system based on an ion adsorption structure according to claim 1, characterized in that: The top of the tank (11) is fixedly connected to a feed pipe (111), the bottom of the tank (11) is fixedly connected to a connecting pipe (112), and the end of the connecting pipe (112) away from the tank (11) is fixedly connected to an RO membrane tank (13).

3. The ultrapure water recycling system based on an ion adsorption structure according to claim 1, characterized in that: The drive unit (232) includes a drive base (2321). The output end of the drive base (2321) is connected to a gear (2323) via a synchronous belt (2322). A rotating shaft (2324) is fixedly connected to the top of the gear (2323). The top of the rotating shaft (2324) extends into the cavity. A toothed ring (2325) that meshes with the tooth groove (2311) is fixedly connected to the outer surface of the rotating shaft (2324).

4. The ultrapure water recycling system based on an ion adsorption structure according to claim 1, characterized in that: The side of the connecting block (241) away from the corrosion-resistant spring (242) is designed with an arc surface, and the side of the connecting block (241) away from the corrosion-resistant spring (242) is fixedly connected with corrosion-resistant rubber that fits tightly against the inner wall of the tank (11).

5. The ultrapure water recycling system based on an ion adsorption structure according to claim 4, characterized in that: A sealing plate (233) that fits against the outer surface of the connecting shaft (21) is fixedly connected to the side of the sliding plate (231) away from the connecting block (241).

6. The ultrapure water recycling system based on an ion adsorption structure according to claim 2, characterized in that: The bottom of the tank (11) is fixedly connected to a backwash water inlet pipe, and the top of the tank (11) is fixedly connected to a backwash water outlet pipe.

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