Adjustable vacuum wall-passing device

Abstract

The invention discloses an adjustable vacuum wall-passing device, which relates to the technical field of automation, and comprises an inductor and a Z-direction adjusting mechanism, the Z-direction adjusting mechanism is connected with a mounting frame, the upper part of the Z-direction adjusting mechanism is provided with an X-direction adjusting mechanism, and the X-direction adjusting mechanism is provided with a Y-direction adjusting mechanism; the Y-direction adjusting mechanism is provided with a transformer and a supporting assembly, the supporting assembly is connected with a corrugated pipe, the corrugated pipe and the supporting assembly are connected in a sealed mode and form a telescopic transition vacuum cavity matched with a lower-stage vacuum chamber, the inductor is arranged in the transition vacuum cavity, one end of the inductor penetrates through the supporting assembly to be connected with the transformer, and the other end of the inductor is connected with the lower-stage vacuum chamber. The other end of the inductor extends out of the corrugated pipe. The device is simple in structure, low in failure rate and convenient to maintain, the Z-direction adjusting mechanism, the X-direction adjusting mechanism and the Y-direction adjusting mechanism are sequentially arranged on the mounting frame, so that the movement directions of the inductor have various combinations, the inductor penetrates through the telescopic vacuum cavity, and the flexibility is high.

Description

Technical Field

[0001] The invention relates to the field of automation technology, in particular to a vacuum wall-penetrating device. Background Art

[0002] In the process of metal heat treatment, it is inevitable to carry out the work in vacuum. At this time, induction heating is often used. However, due to the diversity of workpieces, vacuum heat treatment has higher and higher requirements for the flexibility of heat treatment equipment. Ordinary vacuum wall-passing devices are rigidly connected. The wall-passing devices are fixed on the wall of the vacuum furnace and are relatively fixed to the position of the vacuum furnace. Therefore, the fixed installation of the inductor is very critical, which directly affects the heating effect, equipment stability and safety. That is, the installation position of the inductor in the vacuum heating furnace determines the distribution of the alternating magnetic field generated by it in the furnace. When the installation position of the inductor is off-center or asymmetrical, it will lead to uneven distribution of the magnetic field. Due to different installation positions, the heating speed will be faster, resulting in uneven temperature distribution and affecting product quality. The fixing method of the inductor in the vacuum heating furnace is very important, which is directly related to the stability of the inductor during the heating process. If the inductor is not firmly fixed, the inductor may undergo uncontrollable displacement during the heating process due to the influence of various factors such as electromagnetic force, thermal stress and mechanical vibration. In some vacuum heating occasions, when the vacuum furnace is in working state, it is necessary to use a device outside the vacuum furnace to drive the inductor inside the vacuum furnace to move as needed to make the magnetic field more evenly distributed in the groove area. However, the existing inductor cannot achieve directional movement in the vacuum working state of the vacuum furnace, which has limitations. Summary of the invention

[0003] In view of the deficiencies in the above-mentioned background technology, the present invention proposes an adjustable vacuum wall-penetrating device, which solves the problem in the prior art that the position of the sensor is fixed and has limitations when the vacuum furnace is in working state.

[0004] The technical solution of the present invention is implemented as follows: an adjustable vacuum wall-crossing device includes a sensor and a Z-direction adjustment mechanism, the Z-direction adjustment mechanism is connected to a mounting frame, an X-direction adjustment mechanism is provided on the upper part of the Z-direction adjustment mechanism, a Y-direction adjustment mechanism is provided on the X-direction adjustment mechanism, a transformer and a support assembly are provided on the Y-direction adjustment mechanism, a bellows is connected to the support assembly, the bellows is sealed and connected to the support assembly to form a transition vacuum cavity that cooperates with a lower vacuum chamber, the sensor is arranged in the transition vacuum cavity, and one end of the sensor passes through the support assembly to be connected to the transformer, and the other end of the sensor extends out of the bellows.

[0005] Further preferably, the Z-direction adjustment mechanism includes an adjustment component 1, a mounting platform 1 is provided at the lower portion of the adjustment component 1, the mounting platform 1 is installed on the mounting frame, and a limiting guide component 1 cooperating with the adjustment component 1 is also provided on the mounting platform 1.

[0006] Further preferably, the adjustment component 1 includes a servo motor 1, the output end of the servo motor 1 is provided with a synchronous wheel 1, the synchronous wheel 1 is connected to a synchronous wheel 2 that cooperates with the synchronous wheel 1, the synchronous wheel 2 is connected to a bearing with a seat arranged on the mounting platform, the middle part of the synchronous wheel 2 is threadedly connected to a guide screw rod that passes through the bearing with a seat 1, and the upper part of the guide screw rod is connected to a lifting seat 2.

[0007] Further preferably, the limiting guide assembly includes at least one guide seat, which is fixedly connected to the through hole of the mounting platform, and a guide shaft parallel to the guide screw is slidably connected in the guide seat, and a lifting seat is connected to the top of the guide shaft.

[0008] Further preferably, the X-direction adjustment mechanism comprises an adjustment component 2, a mounting platform 2 connected to the Z-direction adjustment mechanism is provided at the lower portion of the adjustment component 2, and a limiting guide component 2 cooperating with the adjustment component 2 is provided on the mounting platform 2.

[0009] Further preferably, the Y-direction adjustment mechanism includes an adjustment component three, a mounting platform three connected to the X-direction adjustment mechanism is provided at the lower portion of the adjustment component three, a limit guide component three cooperating with the adjustment component three is provided on the mounting platform three, and a guide direction of the limit guide component three is perpendicular to the guide direction of the limit guide component two.

[0010] Further preferably, the adjustment component 2 includes a servo motor 2, and the adjustment component 3 includes a servo motor 3. The servo motor 2 and the servo motor 3 are both installed on the corresponding bracket 1. The output shafts of the servo motor 2 and the servo motor 3 pass through the corresponding bracket 1 and are respectively connected to a screw rod, which is connected to the seat bearing 2 and the seat bearing 3. The screw rod is connected to a moving block, and the moving block is located between the seat bearing 2 and the seat bearing 3.

[0011] Further preferably, the position limiting guide assembly 2 and the position limiting guide assembly 3 both include guide rail 1 and guide rail 2, guide rail 1 and guide rail 2 are symmetrically arranged on both sides of the screw rod, and at least two sliders are slidably connected to guide rail 1 and guide rail 2, and pads are connected to the sliders.

[0012] Further preferably, the support assembly includes a second bracket, on which a sealing plate cooperating with the bellows is provided, a through hole is provided on the sealing plate, and a sealing ring cooperating with the sensor is provided in the through hole.

[0013] Further preferably, one end of the bellows is provided with flange 1, which is connected to bracket 2, and the other end of the bellows is provided with flange 2, which is connected to the lower vacuum chamber.

[0014] The beneficial effects of the present invention are: 1. The present invention has a simple structure, a low failure rate, and is easy to maintain. The Z-direction adjustment mechanism, the X-direction adjustment mechanism, and the Y-direction adjustment mechanism are sequentially arranged on the mounting frame, so that the sensor movement direction has a variety of combinations, which can meet the requirements of various processing techniques; the sensor passes through a retractable transition vacuum chamber design formed by a bellows and a support assembly and matched with a lower vacuum chamber, which has high flexibility and can adapt to the processing of workpieces of various specifications.

[0015] 2. The Z-direction adjustment mechanism, the X-direction adjustment mechanism and the Y-direction adjustment mechanism of the present invention all use a servo motor and a limit guide assembly to limit the moving direction, which can make the moving position more accurate, while also avoiding the influence of the vacuum state on the sensor, and has good adjustment stability.

[0016] 3. The bellows of the present invention adopts a flange that cooperates with the second bracket, a sealing plate is arranged on the second bracket, and a sealing ring cooperates with the sensor to form a vacuum chamber inside the bellows. The bellows can cooperate to adjust the position of the sensor to ensure the processing environment of the workpiece. The surface of the bellows is treated with a metal coating to increase its service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying any creative work.

[0018] Figure 1 It is a structural schematic diagram of the present invention; Figure 2 It is a schematic diagram of the installation of the Z-direction adjustment mechanism of the present invention; Figure 3 It is a schematic diagram of the installation of the X-direction adjustment mechanism of the present invention; Figure 4 It is a schematic diagram of the installation of the Y-direction adjustment mechanism of the present invention; Figure 5 It is a schematic diagram of the installation of the bellows of the present invention; Figure 6 Schematic diagram of the installation of the sensor of the present invention.

[0019] In the figure: 1, mounting frame, 2, bearing seat 1, 3, guide screw, 4, servo motor 1, 5, guide seat, 6, guide shaft, 7, servo motor 2, 8, servo motor 3, 9, mounting platform 1, 10, synchronous wheel 1, 11, synchronous wheel 2, 12, lifting seat 1, 13, lifting seat 2, 14, mounting platform 2, 15, slider, 16, cushion block, 17, mounting platform 3, 18, bracket 1, 19, bearing seat 2, 20, moving block, 21, screw, 22, bearing seat 3, 23 guide rail 1, 24, guide rail 2, 25, fixed block 1, 26, bracket 2, 27, flange 1, 28, bellows, 29, flange 2, 30, sensor, 31, sealing plate, 32, sealing ring, 33, transformer. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] like Figure 1 As shown, in Example 1, an adjustable vacuum wall-passing device includes a sensor 30 and a Z-direction adjustment mechanism, the Z-direction adjustment mechanism is connected to a mounting frame 1, an X-direction adjustment mechanism is provided on the upper part of the Z-direction adjustment mechanism, a Y-direction adjustment mechanism is provided on the X-direction adjustment mechanism, a transformer 33 and a support assembly are provided on the Y-direction adjustment mechanism, a bellows 28 is connected to the support assembly, and the surface of the bellows 28 is treated with a metal coating to have a longer service life. The bellows 28 is sealed and connected to the support assembly to form a transition vacuum chamber that cooperates with the lower vacuum chamber, the sensor 30 is arranged in the transition vacuum chamber, one end of the sensor 30 passes through the support assembly and is connected to a fixed block 25 on the transformer 33, and the other end of the sensor 30 extends out of the bellows 28 and extends into the lower vacuum chamber. The device has a simple structure, a low failure rate and is easy to maintain. A Z-direction adjustment mechanism, an X-direction adjustment mechanism and a Y-direction adjustment mechanism are sequentially arranged on the mounting frame 1, so that the moving directions of the sensor 30 have various combinations and can meet the requirements of various processing techniques. The sensor 30 passes through a retractable transition vacuum chamber design formed by the bellows 28 and the support assembly and matched with the lower vacuum chamber, which has high flexibility and can adapt to the processing of workpieces of various specifications.

[0022] like Figure 2~Figure 4As shown, Example 2 is an adjustable vacuum wall-passing device, which is different from the technical solution of Example 2 in that the Z-direction adjustment mechanism includes an adjustment component 1, and a mounting platform 1 9 is provided at the lower part of the adjustment component 1, and the mounting platform 1 9 is mounted on the mounting frame 1, and a limit guide component 1 is also provided on the mounting platform 1 9 to cooperate with the adjustment component 1. The adjustment component 1 is connected to the mounting platform 1 9 and is used to adjust the X-direction adjustment mechanism and the Y-direction adjustment mechanism on the Z-direction adjustment mechanism in the Z-direction, that is, to adjust up and down in the height direction, and the limit guide component 1 is used to further limit the up and down adjustment position, improve the heating uniformity, and avoid the sensor 30 from rotating and deviating when adjusting the direction of the sensor 30, which affects the accuracy of the sensor 30 measurement.

[0023] In this embodiment, the adjustment component 1 includes a servo motor 14 and a guide screw 3. The output end of the servo motor 4 is provided with a synchronous wheel 10. The synchronous wheel 10 is connected with a synchronous wheel 2 11 matched with the synchronous wheel 10. The synchronous wheel 10 and the synchronous wheel 2 11 can be selected as a synchronous pulley group or a synchronous sprocket group. The synchronous pulley group and the synchronous sprocket group are provided with corresponding synchronous belts or synchronous chains. The synchronous wheel 2 11 is connected with a seat bearing 1 2 arranged on the mounting platform. The middle part of the synchronous wheel 2 11 is threadedly connected with the guide screw 3 passing through the seat bearing 1 2. The upper part of the guide screw 3 is connected with a lifting seat 2. The lifting seat 2 13 is connected with a connecting flange, which is used to fix the guide screw 3 so that when the synchronous wheel 10 drives the synchronous pulley 2 to rotate, the guide screw 3 can slide up and down along the seat bearing 1 2. The seat bearing 2 is mounted on the mounting hole in the middle of the mounting platform 9, and the inner ring of the seat bearing 2 is fixedly connected to the synchronous wheel 11. When the synchronous wheel 11 rotates, the guide screw 3 moves up and down in the seat bearing 2. Further preferably, the adjustment component 1 can also be selected as a lifting cylinder, the lower part of the lifting cylinder is fixedly mounted on the mounting platform 9, and the upper part of the lifting cylinder is fixedly connected to the corresponding X-direction adjustment mechanism.

[0024] In this embodiment, the position-limiting guide assembly 1 includes at least one guide seat 5. Preferably, the guide seat 5 is four guide seats 5 arranged circumferentially outside the guide screw 3. The guide seat 5 is fixedly connected to the through hole of the mounting platform 1 9. A guide shaft 6 arranged parallel to the guide screw 3 is slidably connected in the guide seat 5. The top of the guide shaft 6 is connected to the lifting seat 12. The guide seat 5 is a tubular structure. A position-limiting ring is arranged on the outer wall of the middle part of the tubular structure. The tubular structure and the position-limiting ring are an integrated structure. The position-limiting ring is connected to the mounting platform 1 9 by bolts, thereby fixing the guide seat 5 on the mounting platform 1 9. The guide shaft 6 slides up and down along the guide seat 5 to prevent the guide shaft 6 from deflecting when it moves up and down, thereby realizing the position-limiting of the adjustment assembly 1 when it moves up and down, and avoiding deflection during the lifting process.

[0025] In this embodiment, the X-direction adjustment mechanism includes an adjustment component 2, and the lower part of the adjustment component 2 is provided with a mounting platform 2 14 connected to the Z-direction adjustment mechanism, and the mounting platform 2 14 is provided with a limit guide component 2 that cooperates with the adjustment component 2. The adjustment component 2 is used to adjust the Y-direction adjustment mechanism and the structure installed on the Y-direction adjustment mechanism to move left and right, and the limit guide component 2 is used to limit the adjustment direction of the adjustment component 2 to further ensure the accuracy of the moving position. The Y-direction adjustment mechanism includes an adjustment component 3, and the lower part of the adjustment component 3 is provided with a mounting platform 3 17 connected to the X-direction adjustment mechanism, and the mounting platform 3 17 is provided with a limit guide component 3 that cooperates with the adjustment component 3, and the guide direction of the limit guide component 3 is perpendicular to the guide direction of the limit guide component 2. The adjustment component 3 is used to adjust the transformer 33 and the structure installed on the transformer 33 to move in the front and back directions, and the limit guide component 3 is used to limit the adjustment direction of the adjustment component 3 so that it is always perpendicular to the moving direction of the adjustment component 2, so as to avoid the deflection of the adjustment position affecting the position of the sensor 30 and causing the problem of measurement error.

[0026] In this embodiment, the adjustment component 2 includes a servo motor 2 7, and the adjustment component 3 includes a servo motor 3 8. The servo motor 2 7 and the servo motor 3 8 are both installed on the corresponding bracket 18. The output shafts of the servo motor 2 7 and the servo motor 3 8 pass through the corresponding bracket 18 and are respectively connected to a screw rod 21. The screw rod 21 is connected to the seat bearing 2 19 and the seat bearing 3 22. The screw rod 21 is connected to a moving block 20, and the moving block 20 is located between the seat bearing 2 19 and the seat bearing 3 22. The bracket 18 is mounted on the corresponding mounting platform 2 14 or mounting platform 3 17. The corresponding servo motor 2 7 or servo motor 3 8 is mounted on one side of the bracket 18. The bearing 2 19 and the bearing 3 22 are mounted on the other side of the bracket 18. The bearing 2 19 and the bearing 3 22 are fixedly connected to the corresponding mounting platform 2 14 and the mounting platform 3 17. The bearing 2 19 and the bearing 3 22 are connected with a screw rod 21. The screw rod 21 is connected to the output shaft of the corresponding servo motor 2 7 or the servo motor 3 8. The screw rod 21 is connected to the moving block 20. The moving block 20 has a threaded hole in the middle. The moving block 20 can move along the screw rod 21. The moving block 20 is connected to the corresponding mounting platform 3 17 or the transformer 33. Further preferably, the adjusting component 2 and the adjusting component 3 can also be selected as a rodless cylinder. The lower part of the rodless cylinder is fixedly mounted on the corresponding mounting platform, and the slide on the rodless cylinder is connected to the corresponding direction adjustment member.

[0027] In this embodiment, the position limiting guide assembly 2 and the position limiting guide assembly 3 both include a guide rail 1 23 and a guide rail 2 24, and the guide rail 1 23 and the guide rail 2 24 are arranged parallel and symmetrically on both sides of the lead screw. At least two sliders 15 are slidably connected to the guide rail 1 23 and the guide rail 2 24, and the slider 15 is connected to a cushion block 16. The Z-direction adjustment mechanism, the X-direction adjustment mechanism and the Y-direction adjustment mechanism all use a servo motor and a position limiting guide assembly to limit the moving direction, which can make the moving position more accurate, and also avoid the influence of the vacuum state on the sensor 30, and the adjustment stability is good. The guide rail 1 23 and the guide rail 2 24 both include an "8"-shaped structure, and the lower part of the "8"-shaped rod is connected to a connecting plate. The "8"-shaped rod and the connecting plate are an integrated structure, and the lower part of the slider 15 is provided with a groove that cooperates with the guide rail 1 23 and the guide rail 2 24. Preferably, two sliders 15 are provided on the guide rail 1 23 and the guide rail 2 24, and a cushion block 16 is fixedly connected to the upper portion of the slider 15. The cushion block 16 and the moving block 20 cooperate with the corresponding mounting platform 3 17 or the transformer 33, so that the mounting platform 3 17 and the transformer 33 are always in a horizontal state, thereby maintaining the stability of the sensor 30 during the movement, thereby ensuring the stability of the sensor 30.

[0028] The other structures are the same as those in Example 1.

[0029] like Figure 5 and Figure 6 As shown, embodiment 3 is an adjustable vacuum wall-passing device, which is different from the technical solution of embodiment 2 in that the support assembly includes a bracket 26, which is a U-shaped structure frame, which is installed on a transformer 33, and a sealing plate 31 is provided on the bracket 26 to match the bellows 28, and a through hole is provided on the sealing plate 31, and a sealing ring 32 is provided in the through hole to seal with the inductor 30, and the sealing ring 32 is used to make the inductor 30 be sealed and connected to the sealing plate 31. A flange 1 27 is provided at one end of the bellows 28, and the flange 1 27 is installed on the bracket 26, and a flange 29 is provided at the other end of the bellows 28, and the flange 29 is connected to the lower vacuum chamber. The sealing gaskets between flange 1 27 and bracket 2 26, flange 1 27 and sealing plate 31, flange 2 29 and the outer wall of the lower vacuum chamber, flange 1 27 and bellows 28, and flange 29 and bellows 28 form a vacuum chamber inside the bellows 28, ensuring the processing environment of the workpiece.

[0030] The specific Z-direction adjustment mechanism is as follows: a mounting platform 9 is provided on the mounting frame 1, a bearing 2 with a seat is provided below the center of the mounting platform 9, and the bearing 2 with a seat is fixed by its own flange and the mounting platform 9. Four guide seats 5 are evenly provided below the center of the mounting platform 9 and around the bearing 2 with a seat, and the four guide seats 5 are fixed by their own flange and the mounting platform 9. A guide shaft 6 is provided through each of the four guide seats 5, and a lifting seat 12 is provided at the top of each guide shaft 6. Corresponding to the bearing 2 with a seat, a synchronous wheel 2 11 is provided on the mounting platform 9, a guide screw 3 is provided through the bearing 2 with a seat and the synchronous wheel 2 11, and a lifting seat 2 13 is provided at the top of the guide screw 3. A servo motor 4 is provided below the mounting platform 9 and on one side of the bearing 2 with a seat, and corresponding to the servo motor 4, a synchronous wheel 10 is provided on the mounting platform 9, and the synchronous wheel 10 and the synchronous wheel 2 11 are connected by a synchronous belt. The second installation platform 14 is arranged on the four first jacking seats 12 and the second jacking seats 13 , and the four first jacking seats 12 and the second jacking seats 13 are fixed by the flanges provided by them and the second installation platform 14 .

[0031] The servo motor 14 drives the synchronous wheel 10, which drives the synchronous wheel 10 to drive the synchronous wheel 2 11 through the synchronous belt, and the synchronous wheel 2 11 drives the bearing 12 with a seat, and the bearing 12 with a seat drives the guide screw 3 to make the mounting platform 2 14 and all the components on the mounting platform 2 14 move in the Z direction. That is, the servo motor 14 drives the mounting platform 2 14 and all the components on the mounting platform 2 14 except the flange 2 29 move in the Z direction.

[0032] The X-direction adjustment mechanism is as follows: a bracket 18 is arranged at the middle of one end of the mounting platform 2 14, and a servo motor 2 7 is arranged outside the bracket 18. Corresponding to the servo motor 2 7, a seat bearing 2 19 and a seat bearing 3 22 are arranged on the mounting platform 2 14, and a screw rod 21 passes through the seat bearing 2 19 and the seat bearing 3 22 and is connected to the driving shaft of the servo motor 2 7. A moving block 20 is arranged on the screw rod between the seat bearing 2 19 and the seat bearing 3 22. On the mounting platform 2 14, a guide rail 2 24 and a guide rail 1 23 are respectively arranged on the left and right sides of the servo motor 2 7, and two sliders 15 are respectively arranged on the guide rail 2 24 and the guide rail 1 23. In order to make the top of the slider 15 and the top of the moving block 20 at the same height, a cushion block 16 is respectively arranged on each slider 15. The mounting platform 3 17 is arranged on four cushion blocks 16 and the moving block 20 and is fixedly connected to the four cushion blocks 16 and the moving block 20.

[0033] The servo motor 27 drives the mounting platform 3 17 and all components on the mounting platform 3 17 except the flange 29 to move in the X direction.

[0034] The specific Y-direction adjustment mechanism is as follows: the Y-direction adjustment mechanism is arranged on the mounting platform 3 17, and the Y-direction motion module is arranged in the same manner as the X-direction motion module except that the arrangement direction is different from that of the X-direction motion module. The servo motor 3 8 drives the Y-direction motion module and all components on the Y-direction motion module (except the flange 2 29) to move in the Y direction.

[0035] The movement in the above three directions can enable the sensor 30 to realize seven movement combinations: X, Y, Z, XY, XZ, YZ, XYZ, etc., which is highly flexible and can adapt to the processing of workpieces of various specifications.

[0036] The specific transition vacuum chamber is as follows: a transformer 33 is arranged on the Y-axis motion module, a bracket 26 is arranged on one side of the fixed block 1 25 of the transformer 33, a flange 1 27 is arranged on the bracket 26, a bellows 28 is arranged on the other side of the flange 1 27, a flange 29 is arranged on the other end of the bellows 28, and a sealing gasket is arranged between the flange 1 27 and the bellows 28, and between the flange 29 and the bellows 28. A sealing plate 31 is arranged in the middle of the flange 1 27, and two small holes are arranged on the sealing plate 31. The sensor 30 passes through the two small holes on the flange 2 26, the bellows 28 and the sealing plate 31 and is connected to the fixed block 1 25, and a sealing ring 32 is arranged between the sensor 30 and the two small holes on the sealing plate 31. Flange 1 27, sealing plate 31, flange 29, sealing ring 32, sealing gaskets between flange 1 27 and bellows 28 and between flange 29 and bellows 28 form a vacuum chamber inside bellows 28. Flange 29 is sealed and connected to the lower vacuum chamber.

[0037] Working process: The Z-direction adjustment mechanism, the X-direction adjustment mechanism and the Y-direction adjustment mechanism cooperate to drive the sensor to the initial position through the servo motor; the workpiece is placed in the vacuum chamber, and after the vacuum degree of the vacuum chamber reaches the requirement, the corresponding servo motor drives the sensor to the working position to heat the workpiece; after heating is completed, the corresponding servo motor drives the sensor to the initial position.

[0038] The other structures are the same as those in Example 2.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An adjustable vacuum wall-passing device, characterized in that: The invention comprises a sensor (30) and a Z-direction adjustment mechanism, wherein the Z-direction adjustment mechanism is connected to a mounting frame (1), an X-direction adjustment mechanism is arranged on the upper part of the Z-direction adjustment mechanism, a Y-direction adjustment mechanism is arranged on the X-direction adjustment mechanism, a transformer (33) and a support assembly are arranged on the Y-direction adjustment mechanism, a bellows (28) is connected to the support assembly, the bellows (28) is sealedly connected to the support assembly and forms a transition vacuum chamber that cooperates with a lower vacuum chamber, the sensor (30) is arranged in the transition vacuum chamber, one end of the sensor (30) passes through the support assembly and is connected to the transformer (33), and the other end of the sensor (30) extends out of the bellows (28).

2. The adjustable vacuum wall-penetrating device according to claim 1, characterized in that: The Z-direction adjustment mechanism comprises an adjustment component 1, a mounting platform 1 (9) is provided at the lower part of the adjustment component 1, the mounting platform 1 (9) is mounted on the mounting frame (1), and a limit guide component 1 cooperating with the adjustment component 1 is also provided on the mounting platform 1 (9).

3. The adjustable vacuum wall-passing device according to claim 2, characterized in that: The adjustment component 1 comprises a servo motor 1 (4), the output end of the servo motor 1 (4) is provided with a synchronous wheel 1 (10), the synchronous wheel 1 (10) is connected to a synchronous wheel 2 (11) matched with the synchronous wheel 1 (10), the synchronous wheel 2 (11) is connected to a seat bearing 1 (2) arranged on the mounting platform, the middle part of the synchronous wheel 2 (11) is threadedly connected to a guide screw rod (3) passing through the seat bearing 1 (2), and the upper part of the guide screw rod (3) is connected to a lifting seat 2 (13).

4. The adjustable vacuum wall-penetrating device according to claim 3, characterized in that: The position limiting guide assembly 1 comprises at least one guide seat (5), the guide seat (5) being fixedly connected to a through hole of a mounting platform 1 (9), a guide shaft (6) being slidably connected inside the guide seat (5) and being arranged parallel to the guide screw rod (3), and a lifting seat 1 (12) being connected to the top of the guide shaft (6).

5. The adjustable vacuum wall-passing device according to any one of claims 2 to 4, characterized in that: The X-direction adjustment mechanism comprises an adjustment component 2, the lower part of which is provided with a mounting platform 2 (14) connected to the Z-direction adjustment mechanism, and the mounting platform 2 (14) is provided with a limit guide component 2 cooperating with the adjustment component 2.

6. The adjustable vacuum wall-penetrating device according to claim 5, characterized in that: The Y-direction adjustment mechanism comprises an adjustment component three, a mounting platform three (17) connected to the X-direction adjustment mechanism is provided at the lower part of the adjustment component three, a limit guide component three cooperating with the adjustment component three is provided on the mounting platform three (17), and the guide direction of the limit guide component three is perpendicular to the guide direction of the limit guide component two.

7. The adjustable vacuum wall-penetrating device according to claim 6, characterized in that: The adjustment component 2 comprises a servo motor 2 (7), and the adjustment component 3 comprises a servo motor 3 (8). The servo motor 2 (7) and the servo motor 3 (8) are both mounted on the corresponding bracket 1 (18). The output shafts of the servo motor 2 (7) and the servo motor 3 (8) pass through the corresponding bracket 1 (18) and are respectively connected to screw rods (21). The screw rods (21) are connected to the seat bearing 2 (19) and the seat bearing 3 (22). The screw rods (21) are connected to a moving block (20). The moving block (20) is located between the seat bearing 2 (19) and the seat bearing 3 (22).

8. The adjustable vacuum wall-penetrating device according to claim 7, characterized in that: The position limiting guide assembly 2 and the position limiting guide assembly 3 both comprise a guide rail 1 (23) and a guide rail 2 (24), wherein the guide rail 1 (23) and the guide rail 2 (24) are arranged parallel and symmetrically on both sides of the screw rod (21), and at least two sliders (15) are slidably connected to the guide rail 1 (23) and the guide rail 2 (24), and a cushion block (16) is connected to the slider (15).

9. The adjustable vacuum wall-passing device according to any one of claims 1 to 4 and 6 to 8, characterized in that: The support assembly comprises a second bracket (26), the second bracket (26) being provided with a sealing plate (31) cooperating with the bellows (28), the sealing plate (31) being provided with a through hole, and a sealing ring (32) being provided in the through hole and cooperating with the sensor (30) in a sealing manner.

10. The adjustable vacuum wall-penetrating device according to claim 9, characterized in that: One end of the bellows (28) is provided with a flange 1 (27), and the flange 1 (27) is connected to the bracket 2 (26). The other end of the bellows (28) is provided with a flange 2 (29), and the flange 2 (29) is connected to the lower vacuum chamber.

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