Furnace tube equipment

Abstract

The present application discloses a furnace tube device, which relates to the field of semiconductor manufacturing equipment. The furnace tube device includes: a process tube, the interior of which is used to form a process area; a flange member, disposed below the process tube for carrying the process tube; a susceptor for carrying a plurality of substrates; a sealing cover, disposed below the susceptor and the flange member. The sealing cover includes an air inlet channel and a purge portion. The air inlet channel has an air inlet end and an air outlet end. The air inlet end is used to receive inlet air, and the air outlet end communicates with the purge portion. The purge portion is provided with a plurality of air holes, the plurality of air holes are arranged facing the process area, and the purge portion is close to the flange member. By continuously purging with gas, the particle deposition on the surfaces of the flange member and the sealing cover can be significantly reduced, thereby reducing the pollution risk, optimizing the cleanliness of the process environment, and reducing the cleaning frequency of the flange member and the sealing cover.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment, and particularly to a furnace tube device. Background Art

[0002] In the process of semiconductor manufacturing, furnace tube devices are widely used in processes such as high-temperature oxidation, diffusion, and chemical vapor deposition. Furnace tube devices generally include structures such as process tubes, flange parts, susceptors, and sealing covers. To ensure the stability of the process and the clean environment of the process area, flange parts and sealing covers are key components. However, the existing furnace tube devices still have the following problems in actual use:

[0003] In the existing furnace tube devices, reaction gases will generate particles during the operation of the process area. These particles are easily deposited on the surfaces of the flange parts and the sealing covers. Under the influence of the air flow formed by the supply gas, these particles are easily floated upward and thus contaminate the wafers, affecting the processing quality of the wafers.

[0004] There is usually a lack of effective air flow design at the flange parts and the sealing covers of the existing furnace tube devices, which is likely to cause particle accumulation. Summary of the Invention

[0005] To solve the technical problem that particles are easily deposited on the surfaces of the flange parts and the sealing parts of the furnace tube device, this application provides a furnace tube device, including: a process tube, the interior of which is used to form a process area; a flange part, arranged below the process tube and used to carry the process tube; a susceptor, used to carry a plurality of substrates; a sealing cover, arranged below the susceptor and the flange part. The sealing cover includes an air inlet channel and a purging part. The air inlet channel has an air inlet end and an air outlet end. The air inlet end is used to receive inlet air, and the air outlet end is communicated with the purging part. The purging part is provided with a plurality of air holes, and the plurality of air holes are arranged towards the process area. The purging part is close to the flange part; a lifting mechanism, used to drive the susceptor and the sealing cover to move up and down in the vertical direction so that the susceptor can be moved into and out of the process area. After the susceptor is moved into the process area, the sealing cover and the flange part jointly seal the process area.

[0006] In an embodiment of this application, the flange part includes a gas supply port, and the sealing cover is configured such that: after the susceptor is moved into the process area, the upper end surface of the sealing cover contacts the lower end surface of the flange part to seal the process area, and the air inlet end of the air inlet channel is communicated with the gas supply port to supply gas to the plurality of air holes through the gas supply port.

[0007] In an embodiment of this application, the flange part has an inner end surface facing the process area, and the purging part is located between the outer wall of the susceptor and the inner end surface of the flange part.

[0008] In an embodiment of the present application, the purging part further includes a gas supply cavity, which is arranged below the plurality of air holes, and the plurality of air holes are communicated with the intake passage through the gas supply cavity.

[0009] In an embodiment of the present application, the plurality of air holes are evenly distributed within the purging part.

[0010] In an embodiment of the present application, the outlet angle of the plurality of air holes is vertically upward.

[0011] In an embodiment of the present application, the plurality of air holes include a first group of air holes and a second group of air holes. The first group of air holes is arranged near the inner end face of the flange member, the outlet angle of the first group of air holes faces the inner end face of the flange member, and the outlet angle of the second group of air holes is vertically upward.

[0012] In an embodiment of the present application, the furnace tube device further includes a rotating mechanism. The rotating mechanism has a rotating shaft, the sealing cover has an opening, the rotating shaft is arranged to pass through the opening and is connected to the susceptor, and there is a gap between the outer side wall of the rotating shaft and the inner side wall of the opening. The rotating mechanism is used to drive the susceptor to rotate.

[0013] In an embodiment of the present application, the furnace tube device further includes a purging pipeline and a baffle. The purging pipeline is used to supply gas into the gap, and the baffle is arranged on the sealing cover and is located between the outer wall of the susceptor and the purging part.

[0014] In an embodiment of the present application, the furnace tube device further includes a partition plate. The partition plate is arranged on the upper end face of the sealing cover and is located below the susceptor, and the baffle is arranged on the partition plate.

[0015] In an embodiment of the present application, both the flange member and the sealing cover are made of metal.

[0016] To solve the above technical problems, the present application also proposes a furnace tube device, including: a process tube, the interior of which is used to form a process area; a flange member, arranged below the process tube and used to carry the process tube; a susceptor, used to carry a plurality of substrates; a sealing cover, arranged below the susceptor and the flange member; a purging member, arranged on the upper end face of the sealing cover, and the flange member surrounds the purging member. The purging member includes multiple groups of air holes arranged at intervals along the extending direction of the purging member, and each group of air holes includes a plurality of air holes; a lifting mechanism, used to control the susceptor and the sealing cover to move up and down in the vertical direction so that the susceptor can be moved into and out of the process area. After the susceptor is moved into the process area, the sealing cover and the flange member jointly seal the process area.

[0017] In one embodiment of the present application, the flange member includes a gas supply port, the sealing cover includes an air inlet passage, the purging member is in communication with the air inlet passage, and the sealing cover and the purging member are configured such that: when the susceptor is moved into the process area, the upper end surface of the sealing cover contacts the lower end surface of the flange member to seal the process area, and the air inlet end of the air inlet passage is in communication with the gas supply port to supply gas to the purging member through the gas supply port.

[0018] In one embodiment of the present application, the furnace tube device further includes a gas supply member disposed between the flange member and the sealing cover, and the gas supply member is connected to the purging member for supplying gas to the purging member.

[0019] In one embodiment of the present application, the flange member has an inner end surface facing the process area, and the purging range of the plurality of air holes covers the inner end surface of the flange member.

[0020] In one embodiment of the present application, the purging member is disposed between the outer wall of the susceptor and the inner end surface of the flange member.

[0021] The positive and progressive effects of the present application are as follows: The purging portion of the sealing cover is designed with a plurality of air holes and supplies gas through the air inlet passage, so that the gas is purged upward from the plurality of air holes, effectively forming an upward air flow. The purging portion is disposed on the sealing cover and is close to the flange member. The air flow formed by the plurality of air holes can prevent particles from falling onto the sealing cover and the flange member, and the continuous purging of the gas can significantly reduce the particle deposition on the surfaces of the flange member and the sealing cover, thereby reducing the pollution risk and optimizing the cleanliness of the process environment. In addition, the purged gas can also form a protective layer, reducing the risk of corrosion of the sealing cover and the flange member by corrosive gases. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic structural diagram of the furnace tube device according to Embodiment 1 of the present application;

[0023] Figure 2 It is a top view of the purging portion according to Embodiment 1 of the present application;

[0024] Figure 3 It is a schematic structural diagram of the furnace tube device according to Embodiment 2 of the present application;

[0025] Figure 4 It is a schematic structural diagram of the furnace tube device according to Embodiment 3 of the present application;

[0026] Figure 5 It is a schematic structural diagram of the furnace tube device according to Embodiment 4 of the present application;

[0027] Figure 6 It is a first schematic diagram of a partial structure of the furnace tube device according to Embodiment 4 of the present application;

[0028] Figure 7 This is the second schematic diagram of the partial structure of the furnace tube equipment according to Embodiment 4 of the present application. Detailed implementation manners

[0029] The present application will be further described below by way of embodiments, but the present application is not limited to the scope of the embodiments. Embodiment 1

[0030] As Figure 1 and Figure 2 shown, this embodiment provides a furnace tube equipment, including a process tube 100, a flange 200, a susceptor 300, a sealing cover 400 and a lifting mechanism. The inside of the process tube 100 is used to form a process area. The flange 200 is arranged below the process tube 100 for carrying the process tube 100. The susceptor 300 is used to carry a plurality of substrates. The sealing cover 400 is arranged below the susceptor 300 and the flange 200. The sealing cover 400 includes a purging part 440 and an air inlet channel 410. The air inlet channel 410 has an air inlet end and an air outlet end. The air inlet end is used to receive inlet air, and the air outlet end is communicated with the purging part 440. The purging part 440 is provided with a plurality of air holes 430, and the plurality of air holes 430 are arranged towards the process area. The purging part 440 is close to the flange 200. The lifting mechanism is used to drive the susceptor 300 and the sealing cover 400 to lift and lower in the vertical direction, so that the susceptor 300 can be moved into and out of the process area. After the susceptor 300 is moved into the process area, the sealing cover 400 and the flange 200 jointly seal the process area.

[0031] The purging part 440 of the sealing cover 400 is designed with a plurality of air holes 430 and supplied with gas through the air inlet channel 410, so that the gas is purged upward from the plurality of air holes 430, effectively forming an upward air flow. The purging part 440 is arranged on the sealing cover 400 and close to the flange 200. The air flow formed by the plurality of air holes 430 can prevent particles from falling on the sealing cover 400 and the flange 200. Through continuous purging of the gas, the particle deposition on the surfaces of the flange 200 and the sealing cover 400 can be significantly reduced, thereby reducing the pollution risk and optimizing the cleanliness of the process environment. In addition, the purging gas can also form a protective layer to reduce the risk of the sealing cover 400 and the flange 200 being corroded by corrosive gases.

[0032] Wherein, the gas supplied to the plurality of air holes 430 can be nitrogen or inert gas.

[0033] In some embodiments, the flange member 200 includes a gas supply port 220, and the sealing cover 400 is configured such that when the susceptor 300 is moved into the process area, the upper end surface of the sealing cover 400 contacts the lower end surface of the flange member 200 to seal the process area. Moreover, the gas inlet end of the gas inlet passage 410 communicates with the gas supply port 220 to supply gas to the plurality of pores 430 through the gas supply port 220. By providing the gas supply port 220 on the flange member 200 for gas supply, with the flange member 200 fixed, the gas supply pipeline for supplying gas to the gas supply port 220 does not need to move up and down with the sealing cover 400, making gas supply more convenient.

[0034] In some embodiments, the flange member 200 has an inner end surface 210 facing the process area, and the purging portion 440 is located between the outer wall of the susceptor 300 and the inner end surface 210 of the flange member 200. There is no obstruction by the susceptor 300 in this area, making it easier for particles to deposit. By disposing the purging portion 440 in this area, unnecessary purging can be reduced and the purging efficiency is higher. Among them, the plurality of pores 430 may entirely cover the purging portion 440 or partially cover the purging portion 440.

[0035] In some embodiments, as Figure 1 shown, the purging portion 440 further includes a gas supply chamber 420, which is disposed below the plurality of pores 430, and the plurality of pores 430 communicate with the gas inlet passage 410 through the gas supply chamber 420. By providing the gas supply chamber 420 below the plurality of pores 430 and the plurality of pores 430 communicating with the gas inlet passage 410 through the gas supply chamber 420, the gas supply chamber 420 can play a role in gas distribution. The gas supply chamber 420 provides a more stable air flow, and the air flow pressures of the plurality of pores 430 are substantially the same, thereby further improving the purging effect.

[0036] In some embodiments, as Figure 2 shown, the plurality of pores 430 are uniformly distributed within the purging portion 440. The uniformly distributed pores 430 can prevent the absence of air flow in a local area, forming a uniform air flow within the entire purging portion 440 to prevent particles from falling, and significantly reducing the deposition of particles on the flange member 200 and the sealing cover 400.

[0037] In some embodiments, as Figure 1 shown, the outlet angles of the plurality of pores 430 can be vertically upward.

[0038] In some embodiments, the outlet angles of the plurality of pores 430 can also be obliquely upward.

[0039] In some embodiments, both the flange member 200 and the sealing cover 400 are made of metal. The metal material has excellent workability and higher machining accuracy, which is beneficial to improving the assembly accuracy and sealing performance of the furnace tube equipment. Moreover, using a metal material has higher strength, is not prone to deformation or breakage, and ensures that the furnace tube equipment has excellent structural stability.

[0040] Among them, the furnace tube device further includes a sealing ring, and the sealing ring is arranged on the lower end face of the flange member 200. By adding the sealing ring, the sealing performance of the furnace tube device can be further enhanced. Among them, the flange member 200 is annular and is arranged below the process tube 100, and the sealing ring can also be arranged between the flange member 200 and the process tube 100. Embodiment 2

[0041] The structure of Embodiment 2 is basically the same as that of Embodiment 1, and the difference lies in that, as Figure 3 shown, the plurality of air holes 430 include a first group of air holes and a second group of air holes. The first group of air holes is arranged close to the inner end face 210 of the flange member 200, and the air outlet angle of the first group of air holes faces the inner end face 210 of the flange member 200. The air outlet angle of the second group of air holes is vertically upward. The first group of air holes is arranged close to the inner end face 210 of the flange member 200, and its air outlet angle faces the inner end face 210 of the flange member 200. By specifically purging the inner end face 210 of the flange member 200 through the directional air flow, the probability of deposition particles in this area can be more effectively reduced. The air outlet angle of the second group of air holes is vertically upward, which can prevent particle deposition in the upper area of the sealing cover 400. By dividing the plurality of air holes 430 into two groups in the furnace tube device of Embodiment 2 and supplying air to different areas respectively, the purging effect at the flange member 200 can be strengthened, and the particle deposition at the flange member 200 can be further reduced. Among them, the air outlet angles of the plurality of air holes 430 in the first group can include a plurality of different angles to cover the entire inner end face 210 of the flange member 200 and further improve the purging effect. Embodiment 3

[0042] As Figure 4 shown, in Embodiment 3, the furnace tube device further includes a rotating mechanism 500. The rotating mechanism 500 has a rotating shaft 510. The sealing cover 400 has an opening. The rotating shaft 510 is arranged to pass through the opening and connect with the susceptor 300. There is a gap between the rotating shaft 510 and the inner side wall of the opening. The rotating mechanism 500 is used to drive the susceptor 300 to rotate.

[0043] The furnace tube device further includes a purging pipeline 600 and a baffle 720. The purging pipeline 600 is used to supply air into the gap. The baffle 720 is arranged on the sealing cover 400 and is located between the outer wall of the susceptor 300 and the purging part 440. Specifically, the purging pipeline 600 passes through the rotating mechanism 500. Both the purging pipeline 600 and the rotating mechanism 500 lift and lower synchronously with the susceptor 300. When the upper end face of the sealing cover 400 contacts the lower end face of the flange member 200, the air inlet of the purging pipeline 600 is communicated with the air supply port 220.

[0044] By supplying gas to the gap between the rotating shaft 510 and the sealing cover 400 through the purge pipeline 600, it can effectively prevent particles from entering the rotating mechanism 500 through the gap, thereby contaminating the rotating mechanism 500, and can effectively improve the service life of the rotating mechanism 500. And the airflow formed by the purge pipeline 600 is located below the susceptor 300, and has a certain purging effect on the area below the susceptor 300, thereby reducing the probability of particle deposition in the area below the susceptor 300. The baffle 720 can play a role in guiding the airflow, changing the horizontal flow of the airflow into an upward flow, and thus will not interfere with the upward airflow at the air holes 430. In some embodiments, the baffle 720 is annular.

[0045] In some embodiments, the furnace tube device further includes a partition 710, which is disposed on the upper end surface of the sealing cover 400 and below the susceptor 300, and the baffle 720 is disposed on the partition 710. The partition 710 can play a role in heat preservation. The rotating shaft 510 also passes through the partition 710 and has a gap with the partition 710. Embodiment 4

[0046] As Figure 5 shown, the furnace tube device in Embodiment 4 is basically the same as that in Embodiment 1. The furnace tube device in this embodiment includes: a process tube 100, a flange member 200, a susceptor 300, a sealing cover 400, a purge member 800, and a lifting mechanism. Among them, the process tube 100, the flange member 200, the susceptor 300, and the lifting mechanism are the same as those in the furnace tube device in Embodiment 1. The purge member 800 is disposed on the upper end surface of the sealing cover 400. The purge member 800 is annular, and the flange member 200 is disposed around the purge member 800. The purge member 800 includes a plurality of groups of air holes 810 arranged at intervals along the extending direction of the purge member 800, that is, circumferentially. Each group of air holes 810 includes a plurality of air holes 810.

[0047] In some embodiments, the flange member 200 includes a gas supply port 220, the sealing cover 400 includes an air intake passage 410, the purge member 800 is communicated with the air intake passage 410, and the sealing cover 400 and the purge member 800 are configured such that: when the susceptor 300 is moved into the process area, the upper end surface of the sealing cover 400 contacts the lower end surface of the flange member 200 to seal the process area, and the air intake end of the air intake passage 410 is communicated with the gas supply port 220 to supply gas to the purge member 800 through the gas supply port 220. The purge member 800 is close to the flange member 200, and the outlet angles of the plurality of air holes 810 face the inner end surface 210 of the flange member 200. The purge member 800 is an annular structure with a hollow interior for supplying gas to the air holes 810. In some embodiments, the gas supply method is not limited to this. As Figure 6 shown, a gas supply member 900 can also be separately provided, which is disposed between the flange member 200 and the sealing cover 400 to directly supply gas to the purge member 800.

[0048] In some embodiments, such as Figure 5 shown, the purging range of the plurality of air holes 810 covers the inner end surface 210 of the flange 200, which can enhance the protection of the flange 200. Specifically, the cross-section of the purging member 800 is circular, and the air outlet angle range of each group of air holes 810 is 0° - 60°. The plurality of air outlet angles of each group of air holes 810 can be respectively set to 0°, 10°, 15°, 30°, 45°, 60°. Among them, the air outlet angle is based on the horizontal line.

[0049] In some embodiments, such as Figure 7 shown, the cross-section of the purging member 800 is square, and the purging member 800 is disposed between the outer wall of the susceptor 300 and the inner end surface 210 of the flange 200. The distribution of the air holes 810 on the upper surface of the purging member 800 is the same as that of the air holes 430 in Figure 2 .

[0050] Although the specific embodiments of the present application have been described above, those skilled in the art should understand that this is only an example. Without departing from the principles and essence of the present application, those skilled in the art can make various changes or modifications to these embodiments, but these changes and modifications all fall within the protection scope of the present application.

Claims

1. A furnace tube device, characterized in that, Comprising: A process tube, the interior of which is used to form a process area; A flange member, disposed below the process tube, for supporting the process tube; A susceptor, for carrying a plurality of substrates; A sealing cover, disposed below the susceptor and the flange member. The sealing cover includes an air inlet channel and a purging portion. The air inlet channel has an air inlet end and an air outlet end. The air inlet end is used to receive incoming air, and the air outlet end communicates with the purging portion. The purging portion is provided with a plurality of air holes, and the plurality of air holes are arranged towards the process area, and the purging portion is close to the flange member; A lifting mechanism, for driving the susceptor and the sealing cover to lift in the vertical direction, so that the susceptor can be moved into and out of the process area. When the susceptor is moved into the process area, the sealing cover and the flange member jointly seal the process area.

2. The furnace tube equipment according to claim 1, characterized in that, The flange member includes a gas supply port. The sealing cover is configured such that: when the susceptor is moved into the process area, the upper end surface of the sealing cover contacts the lower end surface of the flange member to seal the process area, and the air inlet end of the air inlet channel communicates with the gas supply port to supply gas to the plurality of air holes through the gas supply port.

3. The furnace tube equipment according to claim 1, characterized in that, The flange member has an inner end surface facing the process area, and the purging portion is located between the outer wall of the susceptor and the inner end surface of the flange member.

4. The furnace tube equipment according to any one of claims 1-3, characterized in that, The purging portion further includes a gas supply chamber, disposed below the plurality of air holes, and the plurality of air holes communicate with the air inlet channel through the gas supply chamber.

5. The furnace tube equipment according to claim 1, characterized in that The plurality of air holes are evenly distributed within the purging portion.

6. The furnace tube device according to claim 1, wherein The outlet angles of the plurality of air holes are vertically upward.

7. The furnace tube equipment according to claim 1, characterized in that, The plurality of air holes include a first group of air holes and a second group of air holes. The first group of air holes is arranged close to the inner end surface of the flange member, and the outlet angle of the first group of air holes faces the inner end surface of the flange member, and the outlet angle of the second group of air holes is vertically upward.

8. The furnace tube device according to claim 1, wherein, The furnace tube device further includes a rotating mechanism. The rotating mechanism has a rotating shaft. The sealing cover has an opening. The rotating shaft is arranged to pass through the opening and is connected to the susceptor. There is a gap between the outer side wall of the rotating shaft and the inner side wall of the opening, and the rotating mechanism is used to drive the susceptor to rotate.

9. The furnace tube equipment according to claim 8, characterized in that, The furnace tube device further includes a purging pipeline and a baffle. The purging pipeline is used to supply gas into the gap, and the baffle is disposed on the sealing cover and is located between the outer wall of the susceptor and the purging portion.

10. The furnace tube device according to claim 9, wherein, The furnace tube device further includes a partition plate, disposed on the upper end surface of the sealing cover and below the susceptor, and the baffle is disposed on the partition plate.

11. The furnace tube device according to claim 1, characterized in that, Both the flange member and the sealing cover are made of metal material.

12. A furnace tube device, characterized in that, Comprising: A process tube, the interior of which is used to form a process area; A flange member, disposed below the process tube, for supporting the process tube; A susceptor, for carrying a plurality of substrates; A sealing cover, disposed below the susceptor and the flange member; A purging member, disposed on the upper end surface of the sealing cover, and the flange member surrounds the purging member. The purging member includes multiple groups of air holes arranged at intervals along the extending direction of the purging member, and each group of air holes includes a plurality of air holes; A lifting mechanism for controlling the vertical lifting of the susceptor and the sealing cover to move the susceptor into and out of the process area. After the susceptor is moved into the process area, the sealing cover and the flange member jointly seal the process area. Among them, the flange member includes a gas supply port, the sealing cover includes an air intake passage, the purging member is communicated with the air intake passage, and the sealing cover and the purging member are configured such that after the susceptor is moved into the process area, the upper end surface of the sealing cover contacts the lower end surface of the flange member to seal the process area, and the air intake end of the air intake passage is communicated with the gas supply port to supply gas to the purging member through the gas supply port.

13. The furnace tube device according to claim 12, characterized in that, The furnace tube device further includes a gas supply member disposed between the flange member and the sealing cover, and the gas supply member is connected to the purging member for supplying gas to the purging member.

14. The furnace tube equipment according to any one of claims 12-13, characterized in that, The flange member has an inner end surface facing the process area, and the purging range of the plurality of air holes covers the inner end surface of the flange member.

15. The furnace tube equipment according to any one of claims 12-13, characterized in that, The purging member is disposed between the outer wall of the susceptor and the inner end surface of the flange member.

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