Multi-stage pressurizing multi-head sintering structure and sintering machine thereof

Abstract

The invention discloses a multi-stage pressurizing multi-head sintering structure and a sintering machine thereof.The multi-stage pressurizing multi-head sintering structure comprises an air cylinder fixing plate, at least two multi-stage force-multiplying air cylinders are fixedly installed on the air cylinder fixing plate, protective cover plates are arranged on the outer sides of the multi-stage force-multiplying air cylinders, and the protective cover plates are fixedly connected with the air cylinder fixing plate; the pressure detection assembly is correspondingly arranged at the output end of the multi-stage force-multiplying air cylinder; the pressure head assembly is mounted at the pressure detection assembly and comprises a pressure head; the heating plate assembly is arranged at one end of the protective cover plate, a through hole is formed in the heating plate assembly, and the pressing head can penetrate through the through hole to extend out of the protective cover plate under the action of the multi-stage force-multiplying air cylinder. Compared with the current mainstream nano-silver sintering equipment which adopts single-head sintering, the multi-stage pressurizing multi-pressure-head sintering structure disclosed by the invention can be used for processing a plurality of parts or a plurality of workpieces, is relatively high in efficiency and can meet the large-scale production task.

Description

Technical Field

[0001] The invention belongs to the technical field of multi-head sintering structures, and in particular relates to a multi-stage pressurized multi-head sintering structure and a sintering machine thereof. Background Art

[0002] In many fields such as electronic materials, traditional sintering methods (such as high-temperature furnace sintering) usually require high temperatures (generally several hundred degrees Celsius or even higher). This high-temperature sintering process will bring many problems. On the one hand, high energy consumption is a significant disadvantage. High-temperature sintering equipment consumes a lot of electricity during the heating process. On the other hand, for some temperature-sensitive materials or substrate materials, high temperatures may cause material performance degradation or structural damage.

[0003] As electronic products develop towards miniaturization and high performance, a technology that can achieve good connection at lower temperatures is needed. Nanosilver sintering technology can achieve good electrical and mechanical connections between chips and substrates at relatively low temperatures (below 300°C), thereby improving the reliability and performance of packaging.

[0004] However, the current mainstream nanosilver sintering equipment all adopts single-head sintering, which can only process one part or one workpiece at a time, with low efficiency and difficult to meet large-scale production tasks. Therefore, the current demand for mass production of nanosilver sintering in this industry is an urgent problem to be solved. Summary of the invention

[0005] In view of the above problems existing in the prior art, the present invention provides a multi-stage pressurized multi-head sintering structure, in which at least two multi-stage force cylinders are fixedly installed on the cylinder fixing plate, and the pressure head can pass through the through hole and extend out of the protective cover plate under the action of the multi-stage force cylinders. Compared with the current mainstream nano-silver sintering equipment that adopts single-head sintering, the multi-stage pressurized multi-head sintering structure of the present invention can process multiple parts or multiple workpieces, with high efficiency, and can meet large-scale production tasks.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions: A multi-stage pressurized multi-head sintering structure, comprising: A cylinder fixing plate, on which at least two multi-stage multi-force cylinders are fixedly mounted, a protective cover plate being arranged on the outer side of the multi-stage multi-force cylinder, and the protective cover plate being fixedly connected to the cylinder fixing plate; A pressure detection component, the pressure detection component is correspondingly arranged at the output end of the multi-stage force cylinder; A pressure head assembly installed at the pressure detection assembly, the pressure head assembly comprising a pressure head; and A heating plate assembly is arranged at one end of the protective cover plate, wherein the heating plate assembly is provided with a through hole, and the pressure head can pass through the through hole and extend out of the protective cover plate under the action of a multi-stage force cylinder.

[0007] Furthermore, a water cooling plate assembly is arranged between the heating plate assembly and the cylinder fixing plate, the water cooling plate assembly comprises a water cooling plate with a flow channel opened inside, a joint is arranged on the side of the water cooling plate, and the water cooling plate is distributed on the side of the pressure detection assembly.

[0008] Furthermore, the pressure detection assembly includes a connecting block fixed to the output end of the multi-stage double-force cylinder, a pressure sensor is fixed to the side of the connecting block away from the multi-stage double-force cylinder, and an insulation column is fixed to the side of the pressure sensor away from the connecting block.

[0009] Furthermore, the heating plate assembly includes a heating plate, a heating rod and a temperature measuring thermocouple. The heating plate is provided with a through hole corresponding to the multi-stage power cylinder. The temperature measuring thermocouple and the heating rod both extend into the heating plate from one side. The temperature measuring thermocouple is used to detect the temperature of the heating plate.

[0010] Furthermore, a heat insulation plate is arranged between the heating plate assembly and the water cooling plate, and the heat insulation plate is fixed to the lower part of the water cooling plate.

[0011] Furthermore, the multi-stage multiplying force cylinder is a five-stage multiplying force cylinder.

[0012] Furthermore, the pressure head assembly also includes a pressure head fixing plate, the pressure head fixing plate is fixed to the heat insulation column, and the pressure head is fixed to the pressure head fixing plate.

[0013] Furthermore, the protection cover plate includes a first side cover plate and a second side cover plate, and the first side cover plate and the second side cover plate are respectively fixed on both sides of the cylinder fixing plate.

[0014] Furthermore, the multi-stage multiplier cylinder has a plurality of air inlets, and each air inlet is respectively equipped with a solenoid valve.

[0015] In addition, the present application also seeks protection for a sintering machine equipped with any one of the multi-stage pressurized multi-head sintering structures described above.

[0016] Compared with the prior art, the beneficial effects of this solution are: Applying pressure during the nanosilver sintering process is an important process means. The sintering pressure refers to the pressure applied to the surface of the material externally when sintering the nanosilver material. This pressure can promote better contact between the nanosilver particles and accelerate the sintering process. For applications such as chip packaging, the pressurized sintering pressure is generally 10-50MPa. This pressure range can effectively achieve a good connection between the chip and the substrate, ensuring the electrical performance and mechanical stability of the chip during operation. The present invention provides a multi-stage pressurized multi-head sintering structure and a sintering machine thereof, wherein at least two multi-stage double-force cylinders are fixedly installed on a cylinder fixing plate, a pressure detection component is correspondingly arranged at the output end of the multi-stage double-force cylinder, and a heating plate component is arranged at one end of the protective cover plate. The pressure head can extend out of the protective cover plate through a through hole under the action of the multi-stage double-force cylinder.

[0017] Compared with the current mainstream nano-silver sintering equipment that all adopts single-head sintering, the multi-stage pressurized multi-head sintering structure of the present invention can process multiple parts or multiple workpieces with high efficiency and can meet large-scale production tasks. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is the main view of the sintering machine; Figure 2 This is a schematic diagram of the multi-stage pressurized multi-head sintering structure; Figure 3 This is another structural schematic diagram of the multi-stage pressurized multi-head sintering structure; Figure 4 This is a cross-sectional view of the multi-stage pressurized multi-head sintering structure; Figure 5 It is a schematic diagram of the structure of a multi-stage multi-force cylinder; Figure 6 Schematic diagram of the heating plate assembly structure.

[0019] The reference numerals in the drawings are as follows: multi-stage pressurized multi-head sintering structure 1, cylinder fixing plate 11, multi-stage double-force cylinder 12, air inlet 121, air outlet 122, pressure sensor 14, connecting block 15, insulation column 16, pressure head 17, pressure head fixing plate 18, outer shell 2, heating plate assembly 3, heating rod 31, temperature measuring thermocouple 32, insulation plate 33, water cooling plate 4, water inlet joint 41, water outlet joint 42, first side cover plate 5, second side cover plate 6. DETAILED DESCRIPTION

[0020] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0021] A multi-stage pressurized multi-head sintering structure, such as Figure 2-Figure 4 As shown, including: A cylinder fixing plate 11, on which at least two multi-stage multi-force cylinders 12 are fixedly mounted, and a protective cover plate is disposed outside the multi-stage multi-force cylinder 12, and the protective cover plate is fixedly connected to the cylinder fixing plate 11; A pressure detection component, the pressure detection component is correspondingly arranged at the output end of the multi-stage multi-force cylinder 12; A pressure head 17 assembly installed at the pressure detection assembly, the pressure head 17 assembly comprising a pressure head 17; and The heating plate assembly 3 is arranged at one end of the protective cover plate, and the heating plate assembly 3 is provided with a through hole. The pressure head 17 can pass through the through hole and extend out of the protective cover plate under the action of the multi-stage force cylinder 12.

[0022] According to a specific embodiment provided by the present invention, in this embodiment, the multi-stage double-force cylinder 12 can be a 2-6-stage double-force cylinder, and the number of the multi-stage double-force cylinder 12 is set to be multiple, for example, six, each multi-stage double-force cylinder 12 is respectively fixed perpendicular to the side of the cylinder fixing plate 11 by bolts, and the cylinder fixing plate 11 is fixed on the nano silver sintering machine. Each multi-stage double-force cylinder 12 works independently, and the output end of the multi-stage double-force cylinder 12 passes through the cylinder fixing plate 11, and the protective cover plate is surrounded by the outside of the multi-stage double-force cylinder 12 to play a protective role. A pressure detection component is installed at the output end of each multi-stage double-force cylinder 12, and the pressure detection component is installed with a pressure head 17, and the pressure is output to the product to be sintered through the pressure head 17.

[0023] Applying pressure during the nanosilver sintering process is an important process. Sintering pressure refers to the pressure applied to the surface of the material when sintering the nanosilver material. This pressure can promote better contact between the nanosilver particles and accelerate the sintering process. For applications such as chip packaging, the pressure of pressurized sintering is generally 10-50MPa. This pressure range can effectively achieve a good connection between the chip and the substrate, ensuring the electrical performance and mechanical stability of the chip during operation.

[0024] Compared with the current mainstream nano-silver sintering equipment that all adopts single-head sintering, the multi-stage pressurized multi-head 17 sintering structure of the present invention can process multiple parts or multiple workpieces with high efficiency and can meet large-scale production tasks.

[0025] Furthermore, a water cooling plate 4 assembly is provided between the heating plate assembly 3 and the cylinder fixing plate 11, and the water cooling plate 4 assembly includes a water cooling plate 4 with a flow channel opened inside, and a joint is provided on the side of the water cooling plate 4, and the water cooling plate 4 is distributed on the side of the pressure detection assembly.

[0026] According to a specific embodiment provided by the present invention, a water cooling plate 4 is provided outside the pressure sensor 14 for circulating cooling to prevent high temperature from damaging the electrical components of the pressure sensor 14. The water cooling plate 4 is provided with a through hole to make way for the multi-stage force cylinder 12, and the thickness of the water cooling plate 4 meets the moving stroke range of the pressure sensor 14. A water inlet joint 41 and a water outlet joint 42 are installed on the side of the water cooling plate 4.

[0027] Furthermore, if Figure 4 As shown, the pressure detection assembly includes a connection block 15 fixed to the output end of the multi-stage double-force cylinder 12, the connection block 15 is fixed to the side away from the multi-stage double-force cylinder 12, and the pressure sensor 14 is fixed to the side away from the connection block 15. The heat-insulating column 16. The connection block 15 is fixed on the output shaft of the multi-stage double-force cylinder 12, the output shaft of the multi-stage double-force cylinder 12 is connected to the pressure sensor 14 through the connection block 15, the pressure sensor 14 is connected to the heat-insulating column 16, the heat-insulating column 16 is directly connected to the fixing plate of the pressure head 17, and the fixing plate of the pressure head 17 is fixed to the pressure head 17 by bolts.

[0028] When the present invention is in use, the size of the pressurized sintering pressure needs to be calculated by the host computer according to the product formula requirements. The host computer program will automatically adjust the output level of the multi-stage double-force cylinder 12 to perform multi-stage pressurization. The output shaft of the multi-stage double-force cylinder 12 is pushed out to maintain the pressure of the product. The maintaining pressure is transmitted back to the host computer in real time through the pressure sensor 14. The host computer compares the output pressure size with the actual pressure size, performs real-time pressure closed-loop feedback adjustment, and realizes high-precision pressure control.

[0029] Furthermore, if Figure 6 As shown, the heating plate assembly 3 includes a heating plate, a heating rod 31 and a temperature measuring thermocouple 32. The heating plate is provided with a through hole corresponding to the multi-stage power cylinder 12. The temperature measuring thermocouple 32 and the heating rod 31 both extend into the heating plate from one side. The temperature measuring thermocouple 32 is used to detect the temperature of the heating plate.

[0030] According to a specific embodiment provided by the present invention, the pressure head 17 is heated by a heating plate assembly 3, and a heating rod 31 and a temperature measuring thermocouple 32 are installed on the heating plate. The heating rod 31 can pass through the heating plate horizontally, so that the heating plate is heated more evenly. The temperature measuring thermocouple 32 is used to detect the temperature of the heating plate and transmit the temperature data to the host computer.

[0031] Furthermore, a heat insulation board 33 is provided between the heating plate assembly 3 and the water cooling plate 4, and the heat insulation board 33 is fixed to the lower part of the water cooling plate 4. The heat insulation board 33 can separate the water cooling plate 4 from the heating plate, and prevent the electrical components of the pressure sensor 14 from being damaged by high temperature.

[0032] Furthermore, if Figure 5As shown, the multi-stage multi-force cylinder 12 is a five-stage multi-force cylinder, and the multi-stage multi-force cylinder 12 is also provided with an air outlet 122 .

[0033] Furthermore, the pressure head 17 assembly also includes a pressure head 17 fixing plate, the pressure head 17 fixing plate is fixed to the heat insulation column 16, and the pressure head 17 is fixed to the pressure head 17 fixing plate.

[0034] Furthermore, the protection cover plate includes a first side cover plate 5 and a second side cover plate 6, which are respectively fixed on both sides of the cylinder fixing plate 11. The first side cover plate 5 and the second side cover plate 6 can be an integrated structure or a plate structure composed of multiple plates.

[0035] Furthermore, the multi-stage force cylinder 12 has a plurality of air inlets 121, and each air inlet 121 is respectively equipped with a solenoid valve, through which the compressed air is controlled to be on and off.

[0036] In addition, if Figure 1 As shown, the present application also claims protection for a sintering machine, which includes a housing 2 and is equipped with any one of the multi-stage pressurized multi-head sintering structures 1 described above.

[0037] Finally, it should be noted that in the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0038] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multi-stage pressurized multi-head sintering structure, characterized in that: include: A cylinder fixing plate, on which at least two multi-stage multi-force cylinders are fixedly mounted, a protective cover plate being arranged on the outer side of the multi-stage multi-force cylinder, and the protective cover plate being fixedly connected to the cylinder fixing plate; A pressure detection component, the pressure detection component is correspondingly arranged at the output end of the multi-stage force cylinder; A pressure head assembly installed at the pressure detection assembly, the pressure head assembly comprising a pressure head; and A heating plate assembly is arranged at one end of the protective cover plate, wherein the heating plate assembly is provided with a through hole, and the pressure head can pass through the through hole and extend out of the protective cover plate under the action of a multi-stage force cylinder.

2. The multi-stage pressurized multi-head sintering structure according to claim 1, characterized in that: A water cooling plate assembly is also arranged between the heating plate assembly and the cylinder fixing plate. The water cooling plate assembly includes a water cooling plate with a flow channel opened inside. A joint is arranged on the side of the water cooling plate. The water cooling plate is distributed on the side of the pressure detection assembly.

3. The multi-stage pressurized multi-head sintering structure according to claim 2, characterized in that: The pressure detection assembly includes a connection block fixed to the output end of the multi-stage double-force cylinder, a pressure sensor is fixed to the side of the connection block away from the multi-stage double-force cylinder, and a heat insulation column is fixed to the side of the pressure sensor away from the connection block.

4. The multi-stage pressurized multi-head sintering structure according to claim 3, characterized in that: The heating plate assembly includes a heating plate, a heating rod and a temperature measuring thermocouple. The heating plate is provided with a through hole corresponding to the multi-stage power cylinder. The temperature measuring thermocouple and the heating rod both extend into the heating plate from one side. The temperature measuring thermocouple is used to detect the temperature of the heating plate.

5. The multi-stage pressurized multi-head sintering structure according to claim 4, characterized in that: A heat insulation plate is arranged between the heating plate assembly and the water cooling plate, and the heat insulation plate is fixed to the lower part of the water cooling plate.

6. A multi-stage pressurized multi-head sintering structure according to any one of claims 1 to 5, characterized in that: The multi-stage multi-power cylinder is a five-stage multi-power cylinder.

7. The multi-stage pressurized multi-head sintering structure according to claim 6, characterized in that: The pressure head assembly also includes a pressure head fixing plate, the pressure head fixing plate is fixed to the heat insulation column, and the pressure head is fixed to the pressure head fixing plate.

8. The multi-stage pressurized multi-head sintering structure according to claim 7, characterized in that: The protection cover plate includes a first side cover plate and a second side cover plate, and the first side cover plate and the second side cover plate are respectively fixed on both sides of the cylinder fixing plate.

9. The multi-stage pressurized multi-head sintering structure according to claim 8, characterized in that: The multi-stage power cylinder has a plurality of air inlets, and each air inlet is respectively equipped with a solenoid valve.

10. A sintering machine, characterized in that: The multi-stage pressurized multi-head sintering structure according to any one of claims 1 to 8 is installed.

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