Optical flatness detection equipment for photo-thermal back plate

Abstract

The invention discloses photo-thermal backboard optical flatness detection equipment, and relates to the technical field of optical flatness detection equipment, the photo-thermal backboard optical flatness detection equipment comprises a placing rack, a photo-thermal backboard body is placed on the placing rack, convex edges are integrally formed on the two sides of the front side and the back side of the photo-thermal backboard body and the two sides of the photo-thermal backboard body, and the convex edges are arranged on the front side and the back side of the photo-thermal backboard body. A plurality of sets of installation frames used in cooperation with the convex edges are fixed to the containing frame, an auxiliary assembly used in cooperation with the photo-thermal back plate body is arranged on the containing frame, and the photo-thermal back plate body is effectively limited conveniently and rapidly in a pressing and adsorption dual-positioning mode; the photo-thermal backboard body can be in a center state on the placing frame while being limited, more accurate detection is facilitated, a pneumatic driving mode is adopted in the whole process, buffering force can be effectively given to the photo-thermal backboard body when the limiting plate makes contact with the photo-thermal backboard body, deformation of the photo-thermal backboard body caused by hard collision is avoided, and the service life of the photo-thermal backboard body is prolonged. And the precision of later detection is further improved.

Description

Technical Field

[0001] The present invention relates to the technical field of optical flatness detection equipment, and in particular to optical flatness detection equipment for photothermal backplanes. Background Art

[0002] Flatness refers to the deviation of the macroscopic concave-convex height of the substrate from the ideal plane. Flatness is an indicator that limits the variation of the actual plane from its ideal plane. It is used to control the shape error of the actual plane being measured. When testing the optical flatness of the photothermal backplane, the photothermal backplane optical flatness detection equipment is required.

[0003] When inspecting existing photothermal backplanes, most of them are directly placed on a placement seat or fixed with tools such as bolts to facilitate inspection. However, there are two problems: firstly, the photothermal backplane cannot be positioned, and secondly, the limiting method is very cumbersome, and the photothermal backplane cannot be quickly limited as needed, and it is impossible to ensure that the photothermal backplane is in a centered state during inspection, which will directly affect the overall inspection accuracy of the inspection equipment. For this reason, a photothermal backplane optical flatness inspection device is proposed. Summary of the invention

[0004] The purpose of the present invention is to provide an optical flatness detection device for a photothermal backplane to solve the problem raised in the above background technology that the photothermal backplane cannot be quickly limited as needed, and it cannot be ensured that the photothermal backplane is in a centered state during detection, which will directly affect the overall detection accuracy of the detection equipment.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a photothermal backplane optical flatness detection device, comprising a placement rack, on which a photothermal backplane body is placed, the inner and outer sides of the photothermal backplane body are integrally formed with convex edges, a plurality of groups of mounting racks used in conjunction with the convex edges are fixed on the placement rack, the optical rod portion of each group of the mounting racks is provided with a mounting seat, each group of the mounting seats is provided with a laser displacement sensor used in conjunction with the convex edge, and the placement rack is provided with an auxiliary component used in conjunction with the photothermal backplane body.

[0006] Preferably, the auxiliary component includes a slide seat symmetrically slidably arranged on the placement rack along the left and right directions and two groups of bar frames located above the placement rack, each group of the slide seats is fixed with a limit plate that fits on the photothermal backplane body, and a bracket is fixed on the placement rack. The two groups of bar frames are fixed on the sides close to each other through a docking plate, and the top of the bracket is fixed to the bottom of one of the groups of bar frames. A movable rack used in conjunction with the photothermal backplane body is slidably arranged in each group of the bar frames, a first spring is fixed at one end of each group of the movable racks, and the end of the first spring away from the movable rack is fixed to the inner wall of the bar frame, a pneumatically driven adsorption structure used in conjunction with the slide seat and the limit plate is provided on the bracket, and a pressure sensor used in conjunction with the photothermal backplane body is embedded on the side of the limit plates away from each other.

[0007] Preferably, the pneumatically driven adsorption structure includes an air pump fixed to the right side of the bracket, the air inlet end of the air pump is connected to a T-tube, and the air outlet end of the air pump is connected to a first three-way tube, and two groups of air storage cylinders are longitudinally embedded in the bracket symmetrically along the front and rear directions. Piston rods are slidably arranged in the air storage cylinders, and the ends of the piston rods close to each other pass through the air storage cylinders and are fixed to a sliding frame. The sides of the two groups of air storage cylinders on the right side away from each other are connected with a U-shaped butt joint tube, and one end of the first three-way tube is connected to the U-shaped butt joint tube. Both sides of the bracket are rotatably equipped with a vertical shaft, and a push plate is fixed on the vertical shaft, and an auxiliary plate is rotatably installed at one end of the push plate away from the vertical shaft, and one end of the auxiliary plate is rotatably installed on the slide seat, one end of the vertical shaft is fixed to a driving plate, and a slideway is provided on the driving plate, and a device that can be driven on the slide and rotates symmetrically in the up and down directions is installed on the back side of the sliding frame. The U-shaped buttress is connected to the air pump by a threaded cannula, and the end of the second buttress is connected to the air pump by a threaded cannula.

[0008] Preferably, a plurality of groups of rollers capable of being attached to the solar thermal backplane body are installed on a side of the movable frame that is rotatable in sequence along the left-right direction.

[0009] Preferably, the back side of the limit plate is connected to a pressure relief pipe, one end of the pressure relief pipe is connected to the U-shaped chamber, and a sixth solenoid valve is arranged on the pressure relief pipe.

[0010] Preferably, a limiting frame is inserted into the side of each group of the movable frames close to the drum, a round hole for inserting the limiting frame is opened on the top of another group of the strip frames, and a toggle seat is fixed to the side of the movable frame away from the drum.

[0011] Preferably, the drive plates are staggered in the up-down direction, a second spring is fixed to one end of the piston rod away from each other, and one end of the second spring away from the piston rod is fixed to the outside of the inner cavity of the air reservoir.

[0012] Preferably, the number of adsorption holes on each group of the limiting plates is at least four, and a sealing ring is provided on each group of the adsorption holes.

[0013] Preferably, the second three-way pipe is fixed on one group of the strip frames, a support plate is fixed on the bent pipe, and one end of the support plate away from the bent pipe is fixed on the slide seat.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] In the present invention, by setting an auxiliary component and a pneumatically driven adsorption structure, a slide seat with a certain length can be used to preliminarily place the photothermal backplane body to be inspected, and the elastic rebound of the first spring can be used to continuously give a driving force to the moving frame, so that the two groups of moving frames can continuously give a squeezing force to the front and back sides of the inner cavity of the photothermal backplane body according to the size of the photothermal backplane body, so that the photothermal backplane body can be in a centered state of the front and back positions on the placement frame, and an air pump is used to provide an air source, and with the cooperation of the first solenoid valve, the second solenoid valve, the third solenoid valve and the fifth solenoid valve, the front and back positions of the sliding frame can be controlled as needed, so that with the cooperation of the driving plate, the push plate and the auxiliary plate, the two groups of slide seats can be synchronously displaced in the opposite direction, and then the two groups of limit plates can follow the reverse displacement, so as to quickly contact the two sides of the inner cavity of the photothermal backplane body and form a certain squeezing force, and a pressure sensor is used to monitor the pressure change in real time, so that when the pressures at the two places are at the same At the same time, the limit plate is controlled to stop moving in time to avoid excessive movement and damage to the photothermal backplane body. At this time, the photothermal backplane body can be quickly centered in cooperation with the moving frame, and with the cooperation of the fourth solenoid valve, the sixth solenoid valve and the second solenoid valve, the opening and closing states of the second three-way pipe, the pressure relief pipe and the first three-way pipe can be controlled, so that after the limit plate contacts the photothermal backplane body and stops moving, the air in the U-shaped chamber can be quickly extracted and a negative pressure state can be formed, so that the limit plate can be quickly adsorbed on the photothermal backplane body. The dual positioning method of pressing and adsorption is adopted to facilitate the rapid and effective limitation of the photothermal backplane body, and the photothermal backplane body can be placed in a centered state on the placement rack while limiting, which is convenient for more accurate detection. The entire driving method adopts pneumatic, which can effectively give the photothermal backplane body a buffer force when the limit plate contacts the photothermal backplane body, avoiding hard collision and causing deformation of the photothermal backplane body, and further improving the accuracy of later detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the optical flatness detection device of the photothermal backplane of the present invention;

[0017] Figure 2 for Figure 1 A magnified view of the structure at center A;

[0018] Figure 3 It is a partial three-dimensional diagram of the structure of the optical flatness detection device of the photothermal backplane of the present invention;

[0019] Figure 4 It is a partial bottom view of the structure of the optical flatness detection device of the photothermal backplane of the present invention;

[0020] Figure 5 It is a partial cross-sectional view of the structure of the limiting plate of the present invention;

[0021] Figure 6A partial cross-sectional view of the structure of the pneumatically driven adsorption structure of the present invention;

[0022] Figure 7 It is a partial cross-sectional view of the structure of the strip frame of the present invention;

[0023] Figure 8 It is a partial three-dimensional diagram of the structure of the pneumatically driven adsorption structure of the present invention.

[0024] In the figure: 1, placement rack; 2, photothermal backplane body; 3, mounting rack; 4, mounting seat; 5, laser displacement sensor; 6, slide seat; 7, limit plate; 8, bracket; 9, bar frame; 10, first spring; 11, moving rack; 12, roller; 13, limit rack; 14, air pump; 15, air reservoir; 16, piston rod; 17, second spring; 18, T-tube; 19, first three-way pipe; 20, U-shaped butt pipe; 21, sliding rack; 22, vertical axis ; 23. Push plate; 24. Auxiliary plate; 25. Drive plate; 26. Slide; 27. Moving block; 28. Second three-way pipe; 29. ​​Telescopic tube; 30. Bend pipe; 31. U-shaped chamber; 32. Adsorption hole; 33. Pressure sensor; 34. First solenoid valve; 35. Second solenoid valve; 36. Third solenoid valve; 37. Fourth solenoid valve; 38. Toggle seat; 39. Exhaust pipe; 40. Fifth solenoid valve; 41. Pressure relief pipe; 42. Sixth solenoid valve. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] Example

[0027] See also Figures 1 to 8The present invention provides a technical solution: a photothermal backplane optical flatness detection device, comprising a placement rack 1, on which a photothermal backplane body 2 is placed, the inner and outer sides of the photothermal backplane body 2 are integrally formed with convex edges, a plurality of mounting racks 3 used in conjunction with the convex edges are fixed on the placement rack 1, the optical rod portion of each group of mounting racks 3 is provided with a mounting seat 4, each group of mounting seats 4 is provided with a laser displacement sensor 5 used in conjunction with the convex edge, the placement rack 1 is provided with an auxiliary component used in conjunction with the photothermal backplane body 2, the auxiliary component comprises a slide seat 6 symmetrically slidably arranged on the placement rack 1 along the left and right directions and two groups of bar frames 9 located above the placement rack 1, each group of slide seats 6 is fixed with a limit plate 7 attached to the photothermal backplane body 2, a bracket 8 is fixed on the placement rack 1, and the two groups The side where the strip frames 9 are close to each other is fixed by a docking plate, and the top of the bracket 8 is fixed to the bottom of one group of strip frames 9. A movable frame 11 used in conjunction with the photothermal backplane body 2 is slidably arranged in each group of strip frames 9. The side of the movable frame 11 away from the strip frame 9 is rotated in sequence in the left and right directions and is equipped with multiple groups of rollers 12 that can fit on the photothermal backplane body 2. By setting the rollers 12, the photothermal backplane body 2 will not excessively rub against the movable frame 11 when moving, so as to avoid hindering the normal movement of the photothermal backplane body 2. A first spring 10 is fixed to one end of each group of movable frames 11, and the end of the first spring 10 away from the movable frame 11 is fixed to the inner wall of the strip frame 9. A limit frame 13 is inserted on the side of each group of movable frames 11 close to the roller 12. Another group of strip frames 11 is provided with a plurality of rollers 12 that can fit on the photothermal backplane body 2. A round hole for inserting the limiting frame 13 is provided on the top of the frame 9, and a toggle seat 38 is fixed on the side of the mobile frame 11 away from the roller 12. The design of the limiting frame 13 and the round hole can quickly store and fix the mobile frame 11 into the bar frame 9 after the photothermal backplane body 2 is positioned, so as to avoid the photothermal backplane body 2 being deformed due to the existence of long-term thrust. The toggle seat 38 is designed to facilitate the displacement of the mobile frame 11. A pneumatically driven adsorption structure used in conjunction with the slide seat 6 and the limiting plate 7 is provided on the bracket 8. The pneumatically driven adsorption structure includes an air pump 14 fixed on the right side of the bracket 8. The air inlet end of the air pump 14 is connected to a T-tube 18, and the air outlet end of the air pump 14 is connected to a first three-way pipe 19. Two sets of air storage cylinders 15 are longitudinally embedded symmetrically in the front-to-back direction on the bracket 8. A piston rod 16 is slidably arranged in the gas storage cylinder 15, and the end of the piston rod 16 that is close to each other passes through the gas storage cylinder 15 and is fixed with a sliding frame 21. The right side of the two groups of gas storage cylinders 15 that are away from each other are connected with a U-shaped butt joint pipe 20, and one end of the first three-way pipe 19 is connected to the U-shaped butt joint pipe 20. Both sides of the bracket 8 are rotatably equipped with a vertical shaft 22, and a push plate 23 is fixed on the vertical shaft 22. The end of the push plate 23 away from the vertical shaft 22 is rotatably equipped with an auxiliary plate 24, and one end of the auxiliary plate 24 is rotatably installed on the slide seat 6. A driving plate 25 is fixed at one end of the vertical shaft 22, and a slideway 26 is opened on the driving plate 25. A moving block 27 that can slide in the slideway 26 is symmetrically rotated in the up and down direction on the back of the sliding frame 21, and the driving plates 25 are staggered in the up and down directions.The driving plates 25 are staggered in the up-down direction so as to drive the two groups of push plates 23 to swing synchronously in opposite directions. A second spring 17 is fixed to one end of the piston rod 16 away from each other, and the end of the second spring 17 away from the piston rod 16 is fixed to the outside of the inner cavity of the gas storage cylinder 15. The second spring 17 is designed to provide a certain buffering force when the piston rod 16 moves to avoid hard pushing. The T-tube 18 is connected with a second three-way pipe 28, and both ends of the second three-way pipe 28 are connected with a telescopic pipe 29, and the end of the telescopic pipe 29 away from the second three-way pipe 28 is connected with a bent pipe 30. A U-shaped chamber 31 is opened in each group of limiting plates 7, and one end of the bent pipe 30 is embedded in the limiting plate 7 and communicated with the U-shaped chamber 31. The second three-way pipe 28 is fixed on one of the groups of bar frames 9. The fixed design can limit the second three-way pipe 28. A support plate is fixed on the bent pipe 30 and the end of the support plate away from the bent pipe 30 is fixed on the slide seat 6. The design of the support plate can limit the bent pipe 30 to prevent it from excessive shaking. A plurality of groups of adsorption holes 32 that are interconnected with the U-shaped chamber 31 are opened on the side away from each other of the limiting plates 7. The number of adsorption holes 32 on each group of limiting plates 7 is at least four groups. A sealing ring is provided on each group of adsorption holes 32. The number of adsorption holes 32 is limited to improve the adsorption effect. The design of the sealing ring further improves the sealing between the adsorption holes 32 and the photothermal backplane body 2. The T-tube 18 is away from the second three-way pipe 28 and A first solenoid valve 34 is provided at one end of the air pump 14, a second solenoid valve 35 is provided at one end of the first three-way pipe 19 away from the air pump 14 and the U-shaped butt joint pipe 20, two groups of third solenoid valves 36 are sequentially provided on the U-shaped butt joint pipe 20 along the front-to-back direction, a fourth solenoid valve 37 is provided at one end of the second three-way pipe 28 close to the T-shaped pipe 18, an exhaust pipe 39 is connected to the side of the air storage cylinder 15 away from the U-shaped butt joint pipe 20, and a fifth solenoid valve 40 is provided on the exhaust pipe 39, and a pressure sensor 33 used in conjunction with the photothermal backplane body 2 is embedded on the side of the limit plates 7 away from each other, and a dual positioning method of pressing and adsorption is adopted to facilitate the rapid and effective limiting of the photothermal backplane body 2, and the photothermal backplane body 2 can be limited within the limit. When the limit plate 7 is in position, it is in the center state on the placement rack 1, which is convenient for more accurate detection. The whole driving method adopts pneumatic, which can effectively give the photothermal backboard body 2 a buffer force when the limit plate 7 contacts the photothermal backboard body 2, avoiding hard direct contact that easily causes the photothermal backboard body 2 to deform, and further improves the accuracy of later detection. The back of the limit plate 7 is connected with a pressure relief pipe 41, one end of the pressure relief pipe 41 is connected with the U-shaped chamber 31, and the pressure relief pipe 41 is provided with a sixth solenoid valve 42. The design of the sixth solenoid valve 42 can control the opening and closing state of the pressure relief pipe 41, so as to control the adsorption state of the limit plate 7 and the photothermal backboard body 2. A controller is provided on one side of the front of the placement rack 1. ,

[0028] Working principle: the user pulls the two sets of toggle seats 38 in advance, thereby driving the two sets of mobile racks 11 to move synchronously into the bar frame 9, thereby compressing the first spring 10, and then the user places the photothermal backplane body 2 to be detected on the two sets of slide seats 6, and at this time the limit plate 7 is not in contact with the photothermal backplane body 2, and at this time the elastic rebound of the first spring 10 can drive the mobile rack 11 to reset, and at this time the two sets of mobile racks 11 can continuously give a squeezing force to the front and back of the inner cavity of the photothermal backplane body 2 according to the size of the photothermal backplane body 2, so that the photothermal backplane body 2 can be in a centered state in the front and rear positions on the placement rack 1, and at the same time the user turns on the air pump 14, the first solenoid valve 34, a group of third solenoid valves 36 on the front and back through the controller. The fifth solenoid valve 40 is arranged on the front side. At this time, the air pump 14 delivers the gas to the front group of gas cylinders 15 through the T-tube 18, the first three-way pipe 19 and the U-shaped butt pipe 20. As the gas is continuously filled, the piston rod 16 in the front group of gas cylinders 15 will be driven to move backward, thereby pushing the sliding frame 21 and the back group of piston rods 16 to move backward synchronously, and the back group of piston rods 16 will push the gas in the back group of gas cylinders 15 to be discharged through the exhaust pipe 39 when moving, and the moving sliding frame 21 can drive the driving plate 25 to swing to the back side under the sliding cooperation of the moving block 27 and the slideway 26, and at this time, the push plate 23 will swing to the front synchronously, and under the active cooperation of the auxiliary plate 24, the two groups of slide seats 6 can be driven to move outward synchronously, thereby driving the two groups The limit plates 7 move synchronously in the opposite direction until the two groups of limit plates 7 are in contact with the photothermal backplane body 2 synchronously. At this time, the pressure sensor 33 monitors the pressure change in real time. When the two groups of pressure sensors 33 show that the pressure is the same, the limit plates 7 are promptly controlled to stop moving to avoid excessive movement and damage to the photothermal backplane body 2. At this time, the mobile frame 11 can be used to quickly center the photothermal backplane body 2, and at the same time, the above-mentioned opened valves are closed, and the fourth solenoid valve 37 and the second solenoid valve 35 are opened. At this time, the air pump 14 quickly extracts the air in the U-shaped chamber 31 through the second three-way pipe 28, the telescopic pipe 29 and the bent pipe 30, and forms a negative pressure state inside the U-shaped chamber 31, so that the limit plates 7 can be quickly adsorbed on the photothermal backplane body 2 using multiple groups of adsorption holes 32, squeezing and After the adsorption and fixation is completed, the user pulls the mobile frame 11 to retract inward, and uses the connection between the limit frame 13 and the round hole to position the mobile frame 11 after moving, so as to avoid the deformation of the photothermal backplane body 2 caused by the long-term thrust formed by the first spring 10. The dual positioning method of pressing and adsorption is adopted, which is convenient for quickly and effectively limiting the photothermal backplane body 2, and the photothermal backplane body 2 can be placed in the center of the placement frame 1 while limiting, which is convenient for more accurate detection. The whole driving method adopts pneumatic, which can effectively give the photothermal backplane body 2 a buffer force when the limit plate 7 contacts the photothermal backplane body 2, avoiding hard direct contact that easily causes the photothermal backplane body 2 to deform, and further improves the accuracy of later detection. After the limit is completed,The user can then start to detect the optical flatness of the photothermal backplane body 2 using the laser displacement sensor 5 or other external measurement structures.

[0029] However, as is well known to those skilled in the art, the working principles and wiring methods of the laser displacement sensor 5, the air pump 14, the first solenoid valve 34, the second solenoid valve 35, the third solenoid valve 36, the fourth solenoid valve 37, the fifth solenoid valve 40, the sixth solenoid valve 42 and the controller are commonplace, and are conventional means or common knowledge, and will not be elaborated herein. Those skilled in the art may make any optional selections according to their needs or convenience.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A photothermal backplane optical flatness detection device, comprising a placement frame (1), characterized in that: The placement rack (1) is provided with a photothermal backplane body (2), the inner and outer sides of the photothermal backplane body (2) are integrally formed with convex edges, a plurality of groups of mounting racks (3) used in conjunction with the convex edges are fixed to the placement rack (1), the optical rod portion of each group of the mounting racks (3) is provided with a mounting seat (4), each group of the mounting seats (4) is provided with a laser displacement sensor (5) used in conjunction with the convex edge, and the placement rack (1) is provided with an auxiliary component used in conjunction with the photothermal backplane body (2).

2. The optical flatness detection device for a photothermal backplane according to claim 1, characterized in that: The auxiliary component comprises a slide seat (6) symmetrically slidably arranged on the placement rack (1) in the left-right direction and two groups of bar frames (9) located above the placement rack (1), each group of the slide seats (6) being fixed with a limit plate (7) attached to the photothermal backplane body (2), the placement rack (1) being fixed with a bracket (8), the two groups of the bar frames (9) being fixed on their mutually adjacent sides by a docking plate, the top of the bracket (8) being fixed to the bottom of one of the groups of the bar frames (9), and each group of the bar frames (9) being fixed with a limit plate (7) in the bottom of the two groups of the bar frames (9). A movable frame (11) for use in conjunction with a photothermal backplane body (2) is slidably arranged, a first spring (10) is fixed to one end of each group of the movable frames (11), and an end of the first spring (10) away from the movable frame (11) is fixed to the inner wall of the bar frame (9), the bracket (8) is provided with a pneumatically driven adsorption structure for use in conjunction with a sliding seat (6) and a limit plate (7), and a pressure sensor (33) for use in conjunction with the photothermal backplane body (2) is embedded on the side of the limit plate (7) away from each other.

3. The optical flatness detection device for a photothermal backplane according to claim 2, characterized in that: The pneumatically driven adsorption structure comprises an air pump (14) fixed on the right side of the bracket (8), the air inlet end of the air pump (14) is connected to a T-shaped pipe (18), the air outlet end of the air pump (14) is connected to a first three-way pipe (19), two groups of air storage cylinders (15) are symmetrically embedded in the bracket (8) along the front-to-back direction, piston rods (16) are slidably arranged in the air storage cylinders (15), the ends of the piston rods (16) that are close to each other pass through the air storage cylinders (15) and are fixed to a sliding frame (21), the right sides of the two groups of air storage cylinders (15) that are away from each other are connected to a U-shaped butt joint pipe (20) and the first three-way pipe (19) is connected to the first three-way pipe (20) and the second three-way pipe (21) is connected to the first three-way pipe (21) and the second three-way pipe (21) is connected to the first three-way pipe (20 ...). One end of a three-way pipe (19) is connected to the U-shaped butt pipe (20), and both sides of the bracket (8) are rotatably mounted with a vertical shaft (22), and a push plate (23) is fixed on the vertical shaft (22), and an auxiliary plate (24) is rotatably mounted on the end of the push plate (23) away from the vertical shaft (22), and one end of the auxiliary plate (24) is rotatably mounted on the slide seat (6), and a driving plate (25) is fixed at one end of the vertical shaft (22), and a slideway (26) is provided on the driving plate (25), and a moving member capable of sliding in the slideway (26) is rotatably mounted on the back side of the sliding frame (21) in a vertically symmetrical direction. The T-shaped tube (18) is connected to a second three-way tube (28), and both ends of the second three-way tube (28) are connected to telescopic tubes (29). One end of the telescopic tube (29) away from the second three-way tube (28) is connected to a bent tube (30). A U-shaped chamber (31) is provided in each set of the limiting plates (7), and one end of the bent tube (30) is embedded in the limiting plates (7) and is connected to the U-shaped chamber (31). A plurality of adsorption holes (32) connected to the U-shaped chamber (31) are provided on one side of the limiting plates (7) away from each other. The T-shaped tube (18) is away from the second three-way tube (28). A first solenoid valve (34) is provided at one end of the three-way pipe (28) and the air pump (14); a second solenoid valve (35) is provided at one end of the first three-way pipe (19) away from the air pump (14) and the U-shaped butt-joint pipe (20); two groups of third solenoid valves (36) are provided in sequence along the front-to-rear direction on the U-shaped butt-joint pipe (20); a fourth solenoid valve (37) is provided at one end of the second three-way pipe (28) close to the T-shaped pipe (18); and an exhaust pipe (39) is connected to the side of the air storage cylinder (15) away from the U-shaped butt-joint pipe (20); a fifth solenoid valve (40) is provided on the exhaust pipe (39).

4. The optical flatness detection device for a photothermal backplane according to claim 2, characterized in that: A plurality of groups of rollers (12) capable of being attached to the photothermal backplane body (2) are installed on a side of the movable frame (11) away from the strip frame (9) and are rotatable in sequence along the left-right direction.

5. The optical flatness detection device for a photothermal backplane according to claim 2, characterized in that: The back side of the limit plate (7) is connected to a pressure relief pipe (41), one end of the pressure relief pipe (41) is connected to the U-shaped chamber (31), and a sixth solenoid valve (42) is provided on the pressure relief pipe (41).

6. The optical flatness detection device for a photothermal backplane according to claim 2, characterized in that: A limiting frame (13) is inserted into the side of each group of the movable frames (11) close to the roller (12), and a round hole for inserting the limiting frame (13) is opened on the top of another group of the strip frames (9). A toggle seat (38) is fixed to the side of the movable frames (11) away from the roller (12).

7. The optical flatness detection device for a photothermal backplane according to claim 3, characterized in that: The drive plates (25) are arranged in an alternating manner in the up-down direction; a second spring (17) is fixed to one end of the piston rod (16) that is away from the other; and an end of the second spring (17) that is away from the piston rod (16) is fixed to the outside of the inner cavity of the air storage cylinder (15).

8. The optical flatness detection device for a photothermal backplane according to claim 3, characterized in that: The number of adsorption holes (32) on each group of the limiting plates (7) is at least four, and a sealing ring is provided on each group of the adsorption holes (32).

9. The optical flatness detection device for a photothermal backplane according to claim 3, characterized in that: The second three-way pipe (28) is fixed on one of the groups of bar frames (9), a support plate is fixed on the bent pipe (30), and one end of the support plate away from the bent pipe (30) is fixed on the slide seat (6).

Images