Glass substrate optical detection platform, device, method and application

Abstract

The invention discloses a glass substrate optical detection platform, device, method and application, the glass substrate optical detection platform comprises an adsorption carrying table and a jacking mechanism, the adsorption carrying table comprises a first adsorption area used for adsorbing a glass substrate, the jacking mechanism comprises a mounting platform and an ejector pin assembly, and the ejector pin assembly comprises a first adsorption area and a second adsorption area used for adsorbing the glass substrate. The adsorption carrying table and the ejector pin assembly are mounted on the mounting platform; the ejector pin assembly comprises a plurality of ejector pins capable of being adsorbed in a vacuum mode, a plurality of through holes allowing the ejector pins to pass through are formed in the adsorption carrying table, and the surface of the adsorption carrying table is subjected to deep color hard oxidation treatment. The influence of the platform background on the imaging effect can be reduced, meanwhile, product friction damage during material taking and placing is reduced, and the durability of the platform is considered.

Description

Technical Field

[0001] The present invention belongs to the field of optical detection, and in particular relates to a glass substrate optical detection platform, device, method and application. Background Art

[0002] The display field is another important application field of glass substrates besides semiconductor fields such as chips. The high transparency and optical uniformity of glass substrates ensure good optical performance, excellent flatness ensures display quality, mechanical strength and chemical resistance enable it to cope with various environments, and thermal stability and low thermal expansion coefficient ensure the stability of the product under high-load operation. In addition, the self-luminous properties of glass substrates also make them particularly important in new display fields such as Micro LED.

[0003] Although the application of glass substrates in the display field brings many advantages, there are also some obvious disadvantages. The following are the main disadvantages of glass substrates:

[0004] Fragility: Compared with organic substrates, glass substrates have weaker impact and vibration resistance, so they are more susceptible to damage or breakage during manufacturing, transportation, and use. This fragility not only increases the risk during the production process, but may also affect the stability and reliability of the chip after packaging.

[0005] Difficult processing: The processing of glass substrates is relatively complex and difficult. Due to its hardness and brittleness, special cutting, grinding and etching techniques are required, which increases the technical difficulty and cost of the manufacturing process. In addition, for fine patterns and wiring, the processing accuracy of glass substrates is also required to be higher, further increasing the difficulty of processing.

[0006] Higher cost: Glass substrates are usually more expensive to manufacture than organic substrates. This is mainly due to their complex processing, special material requirements, and high technical requirements. The high cost may limit the application of glass substrates in low-cost or large-scale production.

[0007] Mismatched thermal expansion coefficients: There may be a mismatch in thermal expansion coefficients between the glass substrate and the chip material. In an environment with large temperature changes, this mismatch may cause stress concentration, warping or fracture, which in turn affects the reliability and performance of the chip.

[0008] Poor compatibility with existing processes: Due to the characteristics and processing requirements of glass substrates, there may be compatibility issues with existing chip packaging processes. This may require more R&D resources to develop packaging processes that are compatible with glass substrates, increasing technical difficulty and cost.

[0009] To address the above issues, it is necessary to perform AOI inspection on the packaged glass substrates. However, in the actual production process, there is a lack of a suitable glass substrate optical inspection platform to meet the requirements of loading and unloading and optical inspection mechanisms. Summary of the invention

[0010] In view of all or part of the deficiencies of the prior art described above, the object of the present invention is to provide a glass substrate optical inspection platform, a glass substrate optical inspection device, a glass substrate optical inspection method and application, which can reduce the influence of the platform background on the imaging effect, reduce the friction damage of the product when taking and placing materials, and take into account the durability of the platform.

[0011] In order to achieve the above-mentioned invention object, the present invention provides the following technical solutions:

[0012] The present invention provides a glass substrate optical inspection platform, including an adsorption platform and a lifting mechanism, wherein the adsorption platform includes a first adsorption area for adsorbing a glass substrate, the lifting mechanism includes a mounting platform and an ejector assembly, the adsorption platform and the ejector assembly are mounted on the mounting platform; the ejector assembly includes a plurality of ejectors capable of vacuum adsorption, the adsorption platform is provided with a plurality of through holes for the ejectors to pass through, and the surface of the adsorption platform is subjected to dark hard oxidation treatment. By setting an ejector (ejector PIN) mechanism, the product can be separated from the inspection platform to avoid the generation of a false vacuum between the two, resulting in abnormal material collection. Dark hard oxidation treatment is a metal surface treatment process, particularly suitable for aluminum and its alloys, forming a dense and hard oxide film on the surface of the aluminum alloy, significantly enhancing the wear resistance of the surface of the part. Different shades of dark colors (such as black and dark gray) are obtained, and the dark surface can absorb more light and reduce the light reflectivity. The present invention selects a suitable surface treatment, which can effectively eliminate the influence of the platform background on optical imaging, while reducing the friction damage of the product during material collection and discharge, and taking into account the durability of the platform.

[0013] The ejector pin assembly includes a first ejector pin group and a second ejector pin group, each of which has at least three ejectors. The first ejector pin group is used to support one side edge of the glass substrate, and the second ejector pin group is used to support the other side edge of the glass substrate. The ejector pin includes a vacuum suction cup arranged at the top and a ejector rod connected to the vacuum suction cup. The mounting platform includes a gas distribution plate connected to the ejector rod for gas circulation during vacuuming. The present invention sets ejector pin groups located at the edges of both sides of the product, and each ejector pin group includes at least three ejectors. Through the simulation of deformation variables, it can be known that this design can make the sagging amount of the product after lifting within a controllable range. The deformation variable will not only directly affect the flatness of products such as glass substrates that are highly related to display quality, but also if the sagging amount is too much and exceeds the controllable range, it will interfere with the material loading and unloading mechanism during the loading and unloading process, causing damage to the product. The ejector pin with a vacuum suction cup can make the ejector pin assembly support the product more stable.

[0014] A registration sensor is provided in the middle of the adsorption platform, located between the first ejector group and the second ejector group; at least two groups of the first ejector groups are provided radially on one side of the registration sensor, and at least two groups of the second ejector groups are provided radially on the other side. The registration sensor is used to sense whether the product to be tested is in place. Two groups of first ejector groups and two groups of second ejector groups are provided. The first ejector group and the second ejector group close to the registration sensor are used to support relatively small-sized products, and the first ejector group and the second ejector group far from the registration sensor are used to support relatively large-sized products. The same glass substrate optical inspection platform can meet the requirements of taking, placing and inspecting products of different sizes.

[0015] The number of ejector pins in the first ejector pin group is 3-7 and they are arranged in a straight line, the number of ejector pins in the second ejector pin group is 3-7 and they are arranged in a straight line, and the first ejector pin group and the second ejector pin group are arranged in parallel. Under the condition of conforming to the deformation amount and the maximum stress, a smaller number of ejector pins is preferably set, for example, 5, so as to prevent the background effect caused by the optical inspection of transparent products such as glass substrates. Through the reasonable arrangement of the ejector pins, it is possible to avoid the product from producing a false vacuum and sticking to the adsorption stage, resulting in the pulling of fragments when taking out the material, or even the inability to take out the material.

[0016] The distance between the adjacent first ejector group and the second ejector group is 150-200mm, the distance between two adjacent first ejector groups or two adjacent second ejector groups is 100-150mm, the distance between two ejectors in the same first ejector group or second ejector group is 100-150mm, and the diameter of the via hole is 10-20mm. The reasonable layout of distance and size can meet different loading and unloading methods, provide appropriate deformation and maximum stress, so that the product can avoid being interfered by the loading and unloading mechanism and causing fragments.

[0017] The mounting platform includes a driving mechanism, and the driving mechanism drives the first ejector group and the second ejector group to rise and fall. Specifically, the mounting platform may also include a first driving assembly and a second driving assembly, and the first driving assembly and the second driving assembly both include a mounting plate, two guide rails and a slide module, the guide rails are mounted on the mounting plate, the slide module is mounted on the guide rails, the first ejector group is mounted on the slide module of the first driving assembly, and the second ejector group is mounted on the slide module of the second driving assembly. The two guide rails can make the lifting process more stable and more conducive to the ejector assembly's adsorption and bearing of the product. In other schemes, the first driving assembly and the second driving assembly can be driven by the same power through switching, and the first driving assembly and the second driving assembly can also have only one of them, that is, only one mounting plate, one guide rail and one slide module are provided, and the first ejector group and the second ejector group are mounted on the same slide module.

[0018] The first adsorption area includes a plurality of first adsorption holes, which are linearly arranged on both sides of each of the first ejector pin group and the second ejector pin group. The evenly arranged small hole adsorption method allows products such as transparent glass substrates to be evenly adsorbed, solving the problem of Z-axis jump caused by uneven adsorption in the original suction cup / adsorption groove method.

[0019] The adsorption platform also includes a second adsorption area, the first adsorption area and the second adsorption area are connected with a switching valve; the second adsorption area includes a plurality of second adsorption holes, the second adsorption holes are linearly arranged along the circumference of the adsorption platform outside the first adsorption area, and the second adsorption holes are arranged in at least two rows along the radial direction of the adsorption platform. There is an adsorption partition design, and the adsorption area can be automatically or manually switched for products of different specifications.

[0020] The product is a transparent glass substrate, and the surface of the adsorption platform is treated with black hard oxidation; an L-shaped positioning piece and a straight-shaped positioning piece are provided on one side of the adsorption platform. Selecting a suitable surface treatment can effectively eliminate the influence of the platform background on optical imaging, while reducing the friction damage of the product during loading and unloading, and taking into account the durability of the platform. The L-shaped positioning piece and the straight-shaped positioning piece are used to position the product during manual feeding.

[0021] The present invention also provides a glass substrate optical inspection device, comprising the above-mentioned glass substrate optical inspection platform and a loading and unloading mechanism; the loading and unloading mechanism is a tooth fork loading and unloading mechanism, a mechanical arm loading and unloading mechanism or a manual loading and unloading mechanism. The glass substrate optical inspection platform of the present invention is compatible with different loading and unloading methods.

[0022] The present invention also provides a method for optically inspecting a glass substrate, using the above-mentioned optical inspection device for a glass substrate, comprising the following steps:

[0023] S1: The glass substrate to be tested is transported to the top of the adsorption stage by using the pick-up and place-down mechanism, and the ejector pin assembly of the ejection mechanism is lifted and vacuum is absorbed;

[0024] S2: the material taking and placing mechanism descends to the top of the ejector assembly, the glass substrate is placed on the ejector assembly, and the material taking and placing mechanism leaves;

[0025] S3: the ejector assembly descends to the surface of the adsorption stage, the ejector assembly breaks the vacuum, and the glass substrate is placed on the adsorption stage;

[0026] S4: Optically inspecting the glass substrate. After the inspection, the vacuum of the adsorption platform is broken, the ejector assembly rises to the top of the adsorption platform and absorbs the vacuum, and the material taking and placing mechanism takes off the glass substrate.

[0027] The present invention also provides the application of the glass substrate optical inspection platform in a back-end product inspection line of glass substrate microcircuit etching technology, massive through-hole technology, thick copper plating technology or ultra-thin glass technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 is a top view of a glass substrate optical inspection platform provided in Example 1;

[0030] Figure 2 is a schematic diagram of another viewing angle of a glass substrate optical inspection platform provided in Example 1;

[0031] Figure 3 is a partial schematic diagram of the jacking mechanism provided in Example 1;

[0032] Figure 4 is a schematic diagram of another viewing angle of a glass substrate optical inspection platform provided in Example 1;

[0033] Figure 5 is a side view of a glass substrate optical inspection platform provided in Example 1;

[0034] Figure 6This is a partial schematic diagram of the jacking mechanism provided in Example 1 from another perspective.

[0035] Figure markings: 1-adsorption platform; 10-via; 11-on-board sensor; 12-first adsorption area; 13-second adsorption area; 14-switching valve; 101-L-shaped positioning piece; 102-I-shaped positioning piece; 2-mounting platform; 21-first drive assembly; 22-second drive assembly; 201-mounting plate; 202-guide rail; 203-slide module; 204-connecting plate; 205-drive motor; 3-thrust pin assembly; 31-first ejector pin group; 32-second ejector pin group; 300-thrust pin; 301-vacuum suction cup; 302-thrust rod; 303-gas distributor plate. DETAILED DESCRIPTION

[0036] The technical solutions in the specific embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] It should be noted that, in order to describe the technical solution more specifically, the steps described in the following embodiments do not strictly correspond to the steps described in the content of the invention.

[0038] Example 1

[0039] Provides a glass substrate optical inspection platform, referring to Figure 1 and Figure 2 , including an adsorption platform 1 and a lifting mechanism, the adsorption platform 1 can be an aluminum plate or other. The adsorption platform 1 includes a first adsorption area 12 for adsorbing products. The lifting mechanism includes a mounting platform 2 and an ejector assembly 3, the adsorption platform 1 and the ejector assembly 3 are mounted on the mounting platform 2. Figure 3 and Figure 4The ejector assembly 3 includes a plurality of ejectors 300 capable of vacuum adsorption, specifically including a first ejector group 31 having five ejectors 300 and a second ejector group 32 having five ejectors 300. The first ejector group 31 is used to support one side edge of the product, and the second ejector group 32 is used to support the other side edge of the product. The adsorption carrier 1 is provided with a plurality of through holes 10 for the ejectors 300 to pass through, and the surface of the adsorption carrier 1 is subjected to a dark hard oxidation treatment. The ejector 300 includes a vacuum suction cup 301 arranged at the top and an ejector rod 302 connected to the vacuum suction cup 301. The mounting platform 2 includes a gas distribution plate 303 connected to the ejector rod 302 for gas circulation during vacuuming. The first ejector group 31 includes five ejectors 300 arranged in a straight line, and the second ejector group 32 includes five ejectors 300 arranged in a straight line. The first ejector group 31 and the second ejector group 32 are arranged in parallel. Under the condition of satisfying the deformation amount and the maximum stress, fewer ejector pins 300 can be provided to prevent the background influence caused by the optical inspection of the transparent product (the product in this embodiment is a transparent glass substrate).

[0040] Reference Figure 1 and Figure 4 The product registration sensor 11 is also provided in the middle of the adsorption carrier 1, and is located between the first ejector group 31 and the second ejector group 32; two groups of first ejector groups 31 are provided radially on one side of the registration sensor 11, and two groups of second ejector groups 32 are provided radially on the other side. The registration sensor 11 is used to sense whether the product to be tested is in place. The first ejector group 31 and the second ejector group 32 close to the registration sensor 11 are used to support the edge of a relatively small product, and the first ejector group 31 and the second ejector group 32 far from the registration sensor 11 are used to support the edge of a relatively large product. The same glass substrate optical inspection platform can meet the requirements of the placement and inspection of products of different sizes. The distance between adjacent first ejector pin groups 31 and second ejector pin groups 32 is 150-200 mm, the distance between two adjacent first ejector pin groups 31 is 100-150 mm, the distance between two adjacent second ejector pin groups 32 is 100-150 mm, the distance between two ejector pins 300 in the same first ejector pin group 31 is 100-150 mm, the distance between two ejector pins 300 in the same second ejector pin group 32 is 100-150 mm, and the diameter of the via 10 is 10-20 mm.

[0041] Reference Figure 5 and Figure 6The mounting platform 2 also includes a first drive assembly 21 and a second drive assembly 22. The first drive assembly 21 and the second drive assembly 22 both include a mounting plate 201, two guide rails 202 and a slide module 203. The guide rails 202 are mounted on the mounting plate 201, and the slide module 203 is mounted on the guide rails 202. The first ejector group 31 is mounted on the slide module 203 of the first drive assembly 21, and the second ejector group 32 is mounted on the slide module 203 of the second drive assembly 22. The ejectors 300 on the two first ejector groups 31 are driven by the first drive assembly 21 to achieve simultaneous lifting, and the ejectors 300 on the two second ejector groups 32 are driven by the second drive assembly 22 to achieve simultaneous lifting. Specifically, the slide module 203 is a Z-axis slide module, including a connecting plate 204 and a driving motor 205. The driving motor 205 is mounted on the connecting plate 204. The connecting plate 204 is connected to the guide rails 202, and the air distributor 303 is mounted on the connecting plate 204. The two guide rails 202 can make the lifting process more stable and more conducive to the adsorption and bearing of the product by the ejector assembly 3.

[0042] Reference Figure 1 and Figure 4 , the surface of the adsorption platform 1 is subjected to black hard oxidation treatment; an L-shaped positioning member 101 and a straight-shaped positioning member 102 are provided on one side of the adsorption platform 1. Selecting a suitable surface treatment can effectively eliminate the influence of the platform background on the optical imaging, while taking into account the durability of the platform; different surface treatment methods will affect the detection and the service life of the adsorption platform 1. The L-shaped positioning member and the straight-shaped positioning member are used to position the product during manual feeding. The first adsorption area 12 includes a plurality of first adsorption holes, which are linearly arranged on both sides of each first ejector group 31 and second ejector group 32. The adsorption platform 1 also includes a second adsorption area 13, and the first adsorption area 12 and the second adsorption area 13 are connected to a switching valve 14; the second adsorption area 13 includes a plurality of second adsorption holes, which are linearly arranged on the outside of the first adsorption area 12 along the circumference of the adsorption platform 1, and the second adsorption holes are arranged in two rows along the radial direction of the adsorption platform 1. There is an adsorption partition design, and the adsorption area can be automatically or manually switched for products of different specifications by opening and closing the switching valve 14. When the product size is relatively small, only the first adsorption area 12 needs to be opened. When the product size is relatively large, both the first adsorption area 12 and the second adsorption area 13 need to be opened to achieve stable adsorption of the glass substrate during detection.

[0043] The product is a transparent glass substrate, and the detection camera above takes a picture downward. Because the adsorption platform 1 as the background will affect the detection, the number of adsorption holes and ejector pins 300 needs to be controlled. Too many will have a significant impact on the image. If the number of adsorption holes or ejector pins 300 is too small or randomly arranged, it will cause uneven adsorption and cause the product surface to appear wavy. The design of this embodiment is to arrange about 20 adsorption holes neatly near each via 10, which meets the requirements of adsorption force through calculation. Through the reasonable layout of adsorption holes and ejector pins 300, the solution provided by the present invention can strictly control the deformation amount and maximum stress of the glass substrate without affecting the detection, so that it meets the requirements of detection and product yield.

[0044] Example 2

[0045] A glass substrate optical inspection device comprises a glass substrate optical inspection platform and a material loading and unloading mechanism in Embodiment 1; the material loading and unloading mechanism is a tooth fork loading and unloading mechanism, a mechanical arm loading and unloading mechanism or a manual loading and unloading mechanism. In this embodiment, it is a tooth fork loading and unloading mechanism.

[0046] Example 3

[0047] A method for optically inspecting a glass substrate, using a glass substrate optical inspection device according to embodiment 2, comprises the following steps:

[0048] S1: The glass substrate to be tested is transported to the top of the adsorption stage 1 by using a tooth fork loading mechanism, and the ejector assembly 3 (i.e., the ejector pins 300 on both sides) of the ejector mechanism is lifted to a first height along the Z axis, and the ejector assembly 3 is vacuumed;

[0049] S2: the tooth fork feeding mechanism descends to the top of the ejector assembly 3 (i.e., the first height), the glass substrate is placed on the ejector assembly 3, and the tooth fork feeding mechanism breaks the vacuum, descends to avoid the position, retracts, and then leaves;

[0050] S3: The adsorption stage 1 is vacuumed, the ejector assembly 3 descends to the surface of the adsorption stage 1 (second height), the ejector assembly 3 breaks the vacuum, and the glass substrate is placed on the adsorption stage 1; the ejector assembly 3 descends along the Z axis to below the adsorption stage 1 (third height);

[0051] S4: Optically inspect the glass substrate. After the inspection, the vacuum of the adsorption stage 1 is broken, the ejector assembly 3 is raised to the second height and vacuum is absorbed, and the inspected glass substrate is further raised to the first height, and the tooth fork unloading mechanism removes the glass substrate.

[0052] Example 4

[0053] The glass substrate optical inspection platform of Example 1 is applied to the back-end product inspection line of glass substrate microcircuit etching technology, mass through-hole technology, thick copper plating technology or ultra-thin glass technology.

[0054] The present invention is applicable to the field of Mini LED / Micro LED display technology. The provided glass substrate optical inspection platform and glass substrate optical inspection device have a compact layout and can be applied to glass substrate microcircuit etching technology, massive through-hole technology (TGV), thick copper plating technology, ultra-thin glass technology and other back-end product inspection lines, with a wide range of applications. By setting up a top PIN mechanism, the product can be separated from the inspection platform to avoid the generation of a false vacuum between the two, which would cause abnormal material removal. For the tooth fork loading and unloading method, the number and position of the top PINs are reasonably arranged and the deformation is simulated so that the sagging amount of the product after lifting is within a controllable range, avoiding interference between the loading and unloading and the tooth fork, which would cause fragments.

[0055] The above embodiments are only used to help understand the method and core idea of ​​the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A glass substrate optical inspection platform, characterized in that: The invention comprises an adsorption platform (1) and a lifting mechanism, wherein the adsorption platform (1) comprises a first adsorption area (12) for adsorbing a glass substrate, and the lifting mechanism comprises a mounting platform (2) and an ejector assembly (3), wherein the adsorption platform (1) and the ejector assembly (3) are mounted on the mounting platform (2); the ejector assembly (3) comprises a plurality of ejector pins (300) capable of vacuum adsorption, and the adsorption platform (1) is provided with a plurality of through holes (10) for the ejector pins (300) to pass through, and the surface of the adsorption platform (1) is subjected to a dark hard oxidation treatment.

2. The glass substrate optical inspection platform according to claim 1, characterized in that: The ejector pin assembly (3) comprises a first ejector pin group (31) and a second ejector pin group (32), each of which comprises at least three ejector pins (300); the first ejector pin group (31) is used to support one side edge of a glass substrate, and the second ejector pin group (32) is used to support the other side edge of the glass substrate; the ejector pin (300) comprises a vacuum suction cup (301) arranged at a top end and an ejector rod (302) connected to the vacuum suction cup (301); and the mounting platform (2) comprises a gas distribution plate (303) connected to the ejector rod (302) for gas circulation during vacuum extraction.

3. The glass substrate optical inspection platform according to claim 2, characterized in that: The adsorption carrier (1) is also provided with a registration sensor (11) in the middle, which is located between the first ejector group (31) and the second ejector group (32); at least two groups of the first ejector groups (31) are radially provided on one side of the registration sensor (11), and at least two groups of the second ejector groups (32) are radially provided on the other side; the number of ejector pins (300) of the first ejector group (31) is 3 to 7 and arranged in a straight line, the number of ejector pins (300) of the second ejector group (32) is 3 to 7 and arranged in a straight line, and the first ejector group (31) and the second ejector group (32) are arranged in parallel.

4. The glass substrate optical inspection platform according to claim 2, characterized in that: The distance between adjacent first ejector pin groups (31) and second ejector pin groups (32) is 150-200 mm, the distance between two adjacent first ejector pin groups (31) or two adjacent second ejector pin groups (32) is 100-150 mm, the distance between two ejector pins (300) in the same first ejector pin group (31) or second ejector pin group (32) is 100-150 mm, and the diameter of the via hole (10) is 10-20 mm.

5. The glass substrate optical inspection platform according to claim 2, characterized in that: The mounting platform (2) further comprises a first drive assembly (21) and a second drive assembly (22), wherein the first drive assembly (21) and the second drive assembly (22) both comprise a mounting plate (201), two guide rails (202) and a slide module (203), wherein the guide rails (202) are mounted on the mounting plate (201), the slide module (203) is mounted on the guide rails (202), the first ejector assembly (31) is mounted on the slide module (203) of the first drive assembly (21), and the second ejector assembly (32) is mounted on the slide module (203) of the second drive assembly (22).

6. The glass substrate optical inspection platform according to claim 2, characterized in that: The first adsorption area (12) includes a plurality of first adsorption holes, which are linearly arranged on both sides of each of the first ejector pin group (31) and the second ejector pin group (32); the adsorption platform (1) also includes a second adsorption area (13), and the first adsorption area (12) and the second adsorption area (13) are connected to a switching valve (14); the second adsorption area (13) includes a plurality of second adsorption holes, which are linearly arranged on the outside of the first adsorption area (12) along the circumference of the adsorption platform (1), and the second adsorption holes are arranged in at least two rows along the radial direction of the adsorption platform (1).

7. The glass substrate optical inspection platform according to claim 1, characterized in that: The product is a transparent glass substrate, and the surface of the adsorption carrier (1) is subjected to black hard oxidation treatment; an L-shaped positioning piece (101) and a straight-line positioning piece (102) are provided on one side of the adsorption carrier (1).

8. A glass substrate optical inspection device, characterized in that: It comprises a glass substrate optical inspection platform and a material loading and unloading mechanism as described in any one of claims 1 to 7; the material loading and unloading mechanism is a tooth fork loading and unloading mechanism, a mechanical arm loading and unloading mechanism or manual loading and unloading mechanism.

9. A method for optically inspecting a glass substrate, characterized in that: The glass substrate optical inspection device according to claim 8 comprises the following steps: S1: using the material loading and unloading mechanism to transport the glass substrate to be tested to the top of the adsorption platform (1), and the ejector pin assembly (3) of the ejector mechanism is lifted and vacuum is sucked; S2: the material taking and placing mechanism descends to the top of the ejector assembly (3), the glass substrate is placed on the ejector assembly (3), and the material taking and placing mechanism moves away; S3: the ejector pin assembly (3) descends to the surface of the adsorption carrier (1), the ejector pin assembly (3) breaks the vacuum, and the glass substrate is placed on the adsorption carrier (1); S4: Optically inspecting the glass substrate. After the inspection is completed, the vacuum of the adsorption platform (1) is broken, the ejector pin assembly (3) is raised to the top of the adsorption platform (1) and vacuum is absorbed, and the material taking and placing mechanism removes the glass substrate.

10. Application of the glass substrate optical inspection platform according to any one of claims 1 to 7 in a back-end product inspection line of glass substrate microcircuit etching technology, mass through-hole technology, thick copper plating technology or ultra-thin glass technology.

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