Equipment and method for recycling tetramethylammonium hydroxide

Abstract

The invention relates to the technical field of tetramethylammonium hydroxide recycling, in particular to tetramethylammonium hydroxide recycling equipment and a tetramethylammonium hydroxide recycling method, the tetramethylammonium hydroxide recycling equipment comprises a tank body and a partition plate, and the partition plate is arranged in the tank body; the upper end and the lower end of the screen mesh cylinder are rotationally installed between the tank body and the partition plate, the top end of the storage cylinder is connected with the bottom end of the partition plate, and the flow guide plate is arranged between the storage cylinder and the tank body; the top ends of the multiple first conveying pipes are arranged on the partition plate in a communicating mode, the bottom ends of the multiple first conveying pipes communicate with the storage cylinder, the multiple first discharging openings communicate with the outer side wall of the storage cylinder, and intercepting nets are arranged in the multiple first discharging openings; the impurity removal effect of tetramethylammonium hydroxide is achieved, the filtering treatment efficiency is improved, the purification and recycling effect of tetramethylammonium hydroxide is achieved, and the labor intensity of workers for cleaning the tetramethylammonium hydroxide is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of recycling of tetramethylammonium hydroxide, and in particular to equipment and a method for recycling of tetramethylammonium hydroxide. Background Art

[0002] Tetramethylammonium hydroxide is an important organic base, which is widely used in semiconductor manufacturing, liquid crystal display production and other fields. However, tetramethylammonium hydroxide will become ineffective due to impurity contamination during use. In order to save costs and reduce environmental pollution, it is of great significance to develop a device and method for extracting and purifying tetramethylammonium hydroxide.

[0003] At present, in the existing equipment, such as the patent with announcement number CN202983247U, the utility model discloses a tetramethylammonium hydroxide waste liquid concentration equipment, including a feed pump, a flow meter, three groups of heating evaporation devices, a discharge pump and a finished product tank, wherein the three groups of heating evaporation devices include three groups and each group consists of a preheater, a heater and an evaporator, and the preheater is connected to the heater, and the heater is connected to the evaporator; the preheaters of each group in the three groups are connected to each other, and the first-effect evaporator in one group is connected to the second-effect heater in the second group.

[0004] However, it was found during the use of the equipment that the equipment was not convenient for filtering tetramethylammonium hydroxide, which increased the impurity contamination in the tetramethylammonium hydroxide and reduced the effect of its purification and recovery. Summary of the invention

[0005] In order to solve the above technical problems, the present invention provides a device and method for recycling tetramethylammonium hydroxide, which can achieve the impurity removal effect of tetramethylammonium hydroxide, improve the filtration treatment efficiency, achieve the purification and reuse effect of tetramethylammonium hydroxide, and reduce the labor intensity of personnel cleaning it.

[0006] The invention discloses a tetramethylammonium hydroxide recycling device, comprising a tank body and a partition, wherein the partition is arranged inside the tank body; a conveying device, a cleaning device, a collecting device, a screen cylinder, a storage cylinder, a guide plate, a plurality of first conveying pipes and a plurality of first discharge ports, wherein the upper and lower ends of the screen cylinder are rotatably installed between the tank body and the partition, the top end of the storage cylinder is connected to the bottom end of the partition, the guide plate is arranged between the storage cylinder and the tank body, the top ends of the plurality of first conveying pipes are connected to the partition, the bottom ends of the plurality of first conveying pipes are connected to the storage cylinder, the plurality of first discharge ports are connected to the outer side wall of the storage cylinder, and interception nets are arranged inside the plurality of first discharge ports, the conveying device and the cleaning device are respectively arranged on the tank body, the conveying device is used to convey materials into the screen cylinder, and the cleaning device is used to The inside of the screen cylinder is cleaned, and the collecting device is connected to the tank body. The collecting device is used to evaporate and purify the material; the screen cylinder is rotated to centrifugally filter and separate the tetramethylammonium hydroxide inside, and the filtered tetramethylammonium hydroxide is transported to the inside of the storage cylinder through the partition and the diversion of multiple groups of first conveying pipes, and the impurities remain in the screen cylinder, thereby achieving the impurity removal effect of the tetramethylammonium hydroxide and improving the filtration treatment efficiency; by filling the storage cylinder with ion exchange resin, when the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities from the tetramethylammonium hydroxide, thereby improving the further impurity removal effect, and then the tetramethylammonium hydroxide is transported to the collecting device, and it is evaporated and concentrated by the collecting device, thereby achieving the purification and reuse effect of the tetramethylammonium hydroxide.

[0007] Preferably, the conveying device includes a conveying box, a second conveying pipe, a conveying tank, a one-way inlet valve, a one-way outlet valve, a piston, a reciprocating screw, a slider and a guide column. The conveying box is installed on the top of the tank body, the bottom end of the second conveying pipe is connected to the bottom of the inner wall of the screen cylinder, the upper part of the second conveying pipe is rotatably installed in the conveying box, the second conveying pipe is provided with an opening, the opening is used to connect the conveying box with the screen cylinder, the bottom end of the conveying tank is connected to the top of the conveying box, and the lower part of the conveying tank is provided with a vent, the one-way inlet valve and the one-way outlet valve are respectively connected and arranged on the conveying tank, the output end of the one-way outlet valve is connected to the conveying box, the piston is slidably installed in the conveying tank up and down, the reciprocating screw is rotatably installed on the inner wall of the conveying tank, the bottom end of the reciprocating screw is connected to the top of the second conveying pipe, and the slider is cooperated and installed in the reciprocating screw. On the reciprocating screw, the top of the slider is connected to the bottom of the guide column, the guide column is slidably installed on the conveying tank and connected to the bottom of the piston; when the screen cylinder rotates, it drives the second conveying pipe to rotate, and after the second conveying pipe rotates, it drives the reciprocating screw to rotate, and after the reciprocating screw rotates, it drives the slider to move back and forth, so that the slider drives the piston to move up and down, and when the piston moves downward, the tetramethylammonium hydroxide that needs to be reused is transported to the conveying tank through the one-way inlet valve, and when the piston moves upward, the tetramethylammonium hydroxide in the conveying tank is transported to the conveying box through the one-way discharge valve, and the conveying box transports the tetramethylammonium hydroxide to the screen cylinder through the second conveying pipe, so that the screen cylinder rotates to centrifugally filter the tetramethylammonium hydroxide while transporting the tetramethylammonium hydroxide, thereby improving the working efficiency and convenience of the equipment.

[0008] Preferably, the cleaning device includes a collecting tank, a first discharge valve, a vent valve, a third delivery pipe, a collecting tank and an air suction pump, the collecting tank is mounted on the outer wall of the tank body, the first discharge valve and the vent valve are respectively connected and arranged on the collecting tank, the top end of the third delivery pipe is connected to the collecting tank, the bottom end of the third delivery pipe is connected to the collecting tank, the top end of the collecting tank is mounted on the inner wall of the tank body, the outer wall of the collecting tank is provided with an absorption port, and the absorption port of the collecting tank is in contact with the inner wall of the screen cylinder, the air suction pump is mounted on the outer wall of the tank body, and the input end of the air suction pump is connected to the collecting tank; when the screen cylinder rotates The impurities attached to the inner wall of the screen cylinder are scraped and cleaned through the absorption port of the collecting tank, so that the collecting tank collects the impurities, and the air is sucked into the collecting tank by starting the suction pump, so that negative pressure is generated in the collecting tank and then the collecting tank is sucked through the third conveying pipe, so that the impurities collected in the collecting tank are transported to the collecting tank for storage. When the impurities in the collecting tank need to be discharged, the vent valve and the first discharge valve are opened. After the vent valve is opened, external air is allowed to enter the collecting tank. After the pressure in the collecting tank is balanced, the internal impurities are discharged through the first discharge valve, thereby improving the convenience of use.

[0009] Preferably, the collecting device includes a heating box, a second discharge valve, a condenser and a reflux pipe, the heating box is connected to the tank body, the second discharge valve is connected and arranged on the heating box, the condenser is connected and arranged at the top of the heating box, the input end of the reflux pipe is connected to the condenser, and the output end of the reflux pipe is connected to the tank body; the tetramethylammonium hydroxide after impurity removal discharged from the storage cylinder is transported to the interior of the heating box through a guide plate, the tetramethylammonium hydroxide is heated and evaporated by the heating box, so that the tetramethylammonium hydroxide is concentrated and purified, the evaporated steam is cooled and condensed into water by the condenser, and then transported to the lower part of the tank body by the reflux pipe, thereby improving the convenience of recycling the condensed water.

[0010] Preferably, it also includes a second discharge port, a cylinder, a plug body, a feeding pipe and a guide platform, the second discharge port is connected and arranged at the lower part of the outer wall of the tank body, multiple groups of cylinders are installed on the inner wall of the tank body, the movable ends of the multiple groups of cylinders are connected to the bottom end of the plug body, the plug body is arranged at the bottom opening of the storage cylinder, the guide platform is arranged at the bottom of the tank body, and the feeding pipe is connected and arranged on the outer wall of the storage cylinder; the reflux pipe transports condensed water into the tank body above the guide platform, when the ion exchange resin in the storage cylinder has been used for a period of time, the plug body is driven to move downward by controlling the multiple groups of cylinders, so that the ion exchange resin in the storage cylinder is discharged downward and falls into the condensed water, so that the condensed water cleans the ion exchange resin, and the cleaned ion exchange resin and condensed water are discharged through the second discharge port, thereby improving the convenience of cleaning treatment before regeneration of the ion exchange resin and improving energy utilization. After the ion exchange resin is regenerated, the ion exchange resin is put into the storage cylinder for reuse through the feeding pipe, thereby improving the convenience of equipment use.

[0011] Preferably, it also includes a motor, a first gear, a gear ring and a second gear, the motor is mounted on the outer wall of the tank body, the first gear is arranged on the output end of the motor, the gear ring is mounted on the outer wall of the screen cylinder, the gear ring is meshed with the first gear, the second gear is mounted on the power input end of the suction pump, and the second gear is meshed with the gear ring; the motor drives the gear ring to rotate through the first gear, so that the gear ring drives the second gear and the screen cylinder to rotate, thereby improving the linkage effect of the equipment, improving work efficiency and reducing power drive costs.

[0012] Preferably, it also includes a spiral blade, which is rotatably installed on the upper part of the inner wall of the storage cylinder, and the top of the spiral blade is connected to the bottom end of the screen cylinder; the screen cylinder rotates and drives the spiral blade to rotate, so that the spiral blade transports the tetramethylammonium hydroxide entering the storage cylinder downward, thereby improving the fluidity of the tetramethylammonium hydroxide when passing through the ion exchange resin.

[0013] Preferably, it also includes a spoiler installed on the inner wall of the screen cylinder; when the screen cylinder rotates, the spoiler is driven to rotate, so that the spoiler drives the tetramethylammonium hydroxide in the screen cylinder to flow, thereby improving the centrifugal separation effect of the tetramethylammonium hydroxide.

[0014] A method for recycling tetramethylammonium hydroxide, preferably comprising the following steps: S1. According to the pH value of the tetramethylammonium hydroxide to be reused as needed, add an appropriate amount of acid to adjust the pH value to neutral or weak alkaline; S2, transporting the tetramethylammonium hydroxide material to be reused to the inside of the screen cylinder, and rotating the screen cylinder to centrifugally filter and separate the tetramethylammonium hydroxide inside the screen cylinder to remove impurities; S3, the tetramethylammonium hydroxide after centrifugal filtration is transported through the ion exchange resin flow, and when the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities from the tetramethylammonium hydroxide and releases H + Ions, further purified, to improve the removal of further impurities; S4, transporting tetramethylammonium hydroxide to a collecting device, and evaporating and concentrating it through the collecting device; S5. The evaporated and concentrated tetramethylammonium hydroxide is then concentrated by membrane technology to increase its concentration to the industrial standard.

[0015] Preferably, in S1, the pH value of tetramethylammonium hydroxide is adjusted to 7-9 by using hydrochloric acid or sodium hydroxide.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. The tetramethylammonium hydroxide is separated by centrifugal filtration to filter out particulate impurities and ion exchange resin to remove ionic impurities, thereby improving the impurity removal effect; 2. Cool the evaporated steam and condense it into water for recycling, which improves the convenience of cleaning treatment before regeneration of ion exchange resin and improves energy utilization; 3. The impurities in the screen cylinder are cleaned by the cleaning device, thereby reducing the labor intensity of personnel cleaning it; 4. Improve the linkage effect of equipment, improve work efficiency and reduce power drive costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the axonometric structure of the present invention; Figure 2 It is a schematic diagram of the axonometric structure of the connection between the tank body and the partition, etc.; Figure 3 It is a schematic diagram of the partial axonometric structure of the connection between the storage cylinder and the first delivery pipe, etc.; Figure 4 It is a schematic diagram of the axonometric partial structure of the connection between the conveying box and the conveying tank; Figure 5 It is a schematic diagram of the axonometric partial structure of the connection between the screen cylinder and the gear ring; Figure 6It is a schematic diagram of the axonometric partial structure of the connection between the collection tank and the vent valve, etc.; Figure 7 It is a schematic diagram of the partial axonometric structure of the connection between the storage cylinder and the feeding pipe; Figure 8 It is a schematic diagram of the axonometric local structure of the connection between the screen cylinder and the spiral blades; Fig. 9 is an axonometric partial structural diagram of the connection between the second delivery pipe and the spoiler, etc.; Fig.10 It is an axonometric partial structural diagram of the connection between the heating box and the second discharge valve, etc.

[0018] Markings in the accompanying drawings: 101, tank body; 102, partition; 103, screen cylinder; 104, storage cylinder; 105, guide plate; 106, first delivery pipe; 107, first discharge port; 201, delivery box; 202, second delivery pipe; 203, delivery tank; 204, one-way inlet valve; 205, one-way discharge valve; 206, piston; 207, reciprocating screw; 208, slider; 209, guide column; 301, collection tank; 302, first discharge valve ; 303, vent valve; 304, third delivery pipe; 305, collecting tank; 306, suction pump; 401, heating box; 402, second discharge valve; 403, condenser; 404, reflux pipe; 501, second discharge port; 502, cylinder; 503, plug body; 504, feeding pipe; 505, guide table; 601, motor; 602, first gear; 603, gear ring; 604, second gear; 701, spiral blade; 801, spoiler. DETAILED DESCRIPTION

[0019] In order to facilitate understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive. Example

[0020] The invention discloses a tetramethylammonium hydroxide recycling device, comprising a tank body 101 and a partition 102, wherein the partition 102 is arranged inside the tank body 101; and further comprising a conveying device, a cleaning device, a collecting device, a screen cylinder 103, a storage cylinder 104, a guide plate 105, a plurality of first conveying pipes 106 and a plurality of first discharge ports 107, wherein the upper and lower ends of the screen cylinder 103 are rotatably mounted between the tank body 101 and the partition 102, the top end of the storage cylinder 104 is connected to the bottom end of the partition 102, and the guide plate 105 is arranged between the storage cylinder 104 and the tank body 10 1, the top ends of the multiple groups of first conveying pipes 106 are connected and arranged on the partition 102, the bottom ends of the multiple groups of first conveying pipes 106 are connected and arranged on the outer wall of the storage cylinder 104, and the multiple groups of first discharge ports 107 are connected and arranged on the outer wall of the storage cylinder 104, and interception nets are arranged in the multiple groups of first discharge ports 107, the conveying device and the cleaning device are respectively arranged on the tank body 101, the conveying device is used to convey the material to the screen cylinder 103, the cleaning device is used to clean the screen cylinder 103, the collecting device is connected to the tank body 101, and the collecting device is used to evaporate and purify the material; The conveying device includes a conveying box 201, a second conveying pipe 202, a conveying tank 203, a one-way inlet valve 204, a one-way outlet valve 205, a piston 206, a reciprocating screw 207, a slider 208 and a guide column 209. The conveying box 201 is installed on the top of the tank body 101, the bottom end of the second conveying pipe 202 is connected to the bottom of the inner wall of the screen cylinder 103, the upper part of the second conveying pipe 202 is rotatably installed in the conveying box 201, and the second conveying pipe 202 is provided with an opening, which is used to connect the conveying box 201 with the screen cylinder 103, the bottom end of the conveying tank 203 is connected to the top of the conveying box 201, and the conveying A vent is provided at the lower part of the delivery tank 203, a one-way inlet valve 204 and a one-way outlet valve 205 are respectively connected and arranged on the delivery tank 203, the output end of the one-way outlet valve 205 is connected with the delivery box 201, a piston 206 is slidably installed in the delivery tank 203, a reciprocating screw 207 is rotatably installed on the inner wall of the delivery tank 203, the bottom end of the reciprocating screw 207 is connected to the top end of the second delivery pipe 202, a slider 208 is cooperatively installed on the reciprocating screw 207, the top end of the slider 208 is connected to the bottom end of the guide column 209, the guide column 209 is slidably installed on the delivery tank 203 and connected to the bottom end of the piston 206; In this embodiment, the tetramethylammonium hydroxide material to be reused is transported to the inside of the screen cylinder 103 by a conveying device, and the screen cylinder 103 is rotated to centrifugally filter and separate the tetramethylammonium hydroxide inside. The filtered tetramethylammonium hydroxide is transported to the inside of the storage cylinder 104 through the partition 102 and the diversion of multiple groups of first conveying pipes 106, and the impurities remain in the screen cylinder 103, thereby achieving the impurity removal effect of the tetramethylammonium hydroxide and improving the filtration treatment efficiency. By filling the storage cylinder 104 with ion exchange resin, when the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities from the tetramethylammonium hydroxide, thereby improving the further impurity removal effect. After that, the tetramethylammonium hydroxide is transported to the collecting device, and it is evaporated and concentrated by the collecting device to achieve the purification and reuse effect of the tetramethylammonium hydroxide. The screen cylinder 10 is cleaned by the cleaning device. 3, thereby reducing the labor intensity of personnel cleaning it; when the screen cylinder 103 rotates, it drives the second conveying pipe 202 to rotate, and after the second conveying pipe 202 rotates, it drives the reciprocating screw 207 to rotate, and after the reciprocating screw 207 rotates, it drives the slider 208 to move up and down, so that the slider 208 drives the piston 206 to move up and down, and when the piston 206 moves downward, the tetramethylammonium hydroxide to be reused is transported to the conveying tank 203 through the one-way inlet valve 204, and when the piston 206 moves upward, the tetramethylammonium hydroxide in the conveying tank 203 is transported to the conveying box 201 through the one-way discharge valve 205, and the conveying box 201 transports the tetramethylammonium hydroxide to the screen cylinder 103 through the second conveying pipe 202, so that the screen cylinder 103 rotates to centrifugally filter the tetramethylammonium hydroxide while transporting the tetramethylammonium hydroxide, thereby improving the working efficiency and convenience of use of the equipment. Example

[0021] On the basis of Example 1, a tetramethylammonium hydroxide recycling device of the present invention, the cleaning device includes a collecting tank 301, a first discharge valve 302, a vent valve 303, a third delivery pipe 304, a collecting tank 305 and an air pump 306, the collecting tank 301 is installed on the outer wall of the tank body 101, the first discharge valve 302 and the vent valve 303 are respectively connected and arranged on the collecting tank 301, the top of the third delivery pipe 304 is connected to the collecting tank 301, the bottom of the third delivery pipe 304 is connected to the collecting tank 305, the top of the collecting tank 305 is installed on the inner wall of the tank body 101, the outer wall of the collecting tank 305 is provided with an absorption port, and the absorption port of the collecting tank 305 is in contact with the inner wall of the sieve cylinder 103, the air pump 306 is installed on the outer wall of the tank body 101, and the input end of the air pump 306 is connected to the collecting tank 301; The collecting device includes a heating box 401, a second discharge valve 402, a condenser 403 and a reflux pipe 404. The heating box 401 is in communication with the tank body 101. The second discharge valve 402 is in communication with and arranged on the heating box 401. The condenser 403 is in communication with and arranged at the top of the heating box 401. The input end of the reflux pipe 404 is in communication with the condenser 403, and the output end of the reflux pipe 404 is in communication with the tank body 101. It also includes a second discharge port 501, a cylinder 502, a plug body 503, a feeding pipe 504 and a guide platform 505. The second discharge port 501 is connected and arranged at the lower part of the outer wall of the tank body 101. The multiple groups of cylinders 502 are installed on the inner wall of the tank body 101. The moving ends of the multiple groups of cylinders 502 are connected to the bottom ends of the plug bodies 503. The plug body 503 is arranged at the bottom opening of the storage cylinder 104. The guide platform 505 is arranged at the inner bottom of the tank body 101. The feeding pipe 504 is connected and arranged on the outer wall of the storage cylinder 104. It also includes a motor 601, a first gear 602, a gear ring 603 and a second gear 604, wherein the motor 601 is mounted on the outer wall of the tank body 101, the first gear 602 is arranged on the output end of the motor 601, the gear ring 603 is mounted on the outer wall of the screen cylinder 103, the gear ring 603 is meshed with the first gear 602, and the second gear 604 is mounted on the power input end of the suction pump 306, and the second gear 604 is meshed with the gear ring 603; It also includes a spiral blade 701, which is rotatably mounted on the upper part of the inner wall of the storage cylinder 104, and the top of the spiral blade 701 is connected to the bottom end of the screen cylinder 103; It also includes a spoiler 801, which is installed on the inner wall of the screen cylinder 103; In the present embodiment, the screen cylinder 103 drives the second delivery pipe 202 to rotate when it rotates, and the second delivery pipe 202 drives the reciprocating screw 207 to rotate after the rotation of the reciprocating screw 207, and the reciprocating screw 207 drives the slider 208 to move up and down, so that the slider 208 drives the piston 206 to move up and down, and when the piston 206 moves downward, the tetramethylammonium hydroxide to be reused is delivered to the delivery tank 203 through the one-way inlet valve 204, and when the piston 206 moves upward, the tetramethylammonium hydroxide in the delivery tank 203 is delivered to the delivery box 201 through the one-way discharge valve 205, and the delivery box 201 delivers the tetramethylammonium hydroxide to the screen cylinder 103 through the second delivery pipe 202, so that the screen cylinder 103 rotates to centrifugally filter the tetramethylammonium hydroxide while delivering the tetramethylammonium hydroxide , improving the working efficiency and convenience of use of the equipment. When the screen drum 103 rotates, the impurities attached to the inner wall of the screen drum 103 are scraped and cleaned through the absorption port of the collecting tank 305, so that the collecting tank 305 collects the impurities, and the air suction pump 306 is started to suck air into the collecting tank 301, so that negative pressure is generated in the collecting tank 301, and then the collecting tank 305 is sucked through the third conveying pipe 304, and then the impurities collected in the collecting tank 305 are transported to the collecting tank 301 for storage. When it is necessary to discharge the impurities in the collecting tank 301, the vent valve 303 and the first discharge valve 302 are opened. After the vent valve 303 is opened, the external air is allowed to enter the collecting tank 301. After the pressure in the collecting tank 301 is balanced, the internal impurities are discharged through the first discharge valve 302, thereby improving the convenience of use. Example

[0022] A method for recycling tetramethylammonium hydroxide of the present invention comprises the following steps: S1. According to the pH value of the tetramethylammonium hydroxide to be reused as needed, add an appropriate amount of acid to adjust the pH value to neutral or weak alkaline; S2, transporting the tetramethylammonium hydroxide material to be reused to the inside of the mesh cylinder 103, and rotating the mesh cylinder 103 so that the mesh cylinder 103 centrifuges and separates the tetramethylammonium hydroxide inside to remove impurities; S3, the tetramethylammonium hydroxide after centrifugal filtration is transported through the ion exchange resin flow, and when the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities from the tetramethylammonium hydroxide and releases H + Ions, further purified, to improve the removal of further impurities; S4, transporting tetramethylammonium hydroxide to a collecting device, and evaporating and concentrating it through the collecting device; S5, the evaporation-concentrated tetramethylammonium hydroxide is then concentrated by membrane technology to increase its concentration to the industrial standard; In S1, the pH value of tetramethylammonium hydroxide is adjusted to 7-9 by using hydrochloric acid or sodium hydroxide.

[0023] like Figures 1 to 10 As shown, a device and method for recycling tetramethylammonium hydroxide of the present invention, when working, the tetramethylammonium hydroxide material to be recycled is transported to the inside of the screen cylinder 103 by a conveying device, and the screen cylinder 103 is rotated to centrifugally filter and separate the tetramethylammonium hydroxide inside. The filtered tetramethylammonium hydroxide is transported to the inside of the storage cylinder 104 through the partition 102 and the diversion of multiple groups of first conveying pipes 106, and the impurities remain in the screen cylinder 103, thereby achieving the impurity removal effect of the tetramethylammonium hydroxide, and the storage cylinder 104 is filled with ion exchange resin. When the tetramethylammonium hydroxide flows through the ion exchange resin, the ion impurities of the tetramethylammonium hydroxide are removed, and then the tetramethylammonium hydroxide is transported to the collection device, and it is evaporated and concentrated by the collection device, so as to achieve the purification and reuse effect of the tetramethylammonium hydroxide.

[0024] The main functions achieved by the present invention are: 1. The tetramethylammonium hydroxide is separated by centrifugal filtration to filter out particulate impurities and ion exchange resin to remove ionic impurities, thereby improving the impurity removal effect; 2. Cool the evaporated steam and condense it into water for recycling, which improves the convenience of cleaning treatment before regeneration of ion exchange resin and improves energy utilization; 3. The impurities in the screen cylinder 103 are cleaned by the cleaning device, thereby reducing the labor intensity of the personnel for cleaning it; 4. Improve the linkage effect of equipment, improve work efficiency and reduce power drive costs.

[0025] The suction pump 306, heating box 401, condenser 403, cylinder 502 and motor 601 of the tetramethylammonium hydroxide recycling and reuse equipment and method of the present invention are purchased on the market. Technical personnel in the industry only need to install and operate them according to the accompanying instruction manual, without the need for technical personnel in this field to make creative efforts.

[0026] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A device for recycling tetramethylammonium hydroxide, comprising a tank body (101) and a partition (102), wherein the partition (102) is arranged inside the tank body (101); characterized in that: The invention also comprises a conveying device, a cleaning device, a collecting device, a screen cylinder (103), a storage cylinder (104), a guide plate (105), a plurality of first conveying pipes (106) and a plurality of first discharge ports (107). The upper and lower ends of the screen cylinder (103) are rotatably mounted between the tank body (101) and the partition plate (102). The top end of the storage cylinder (104) is connected to the bottom end of the partition plate (102). The guide plate (105) is arranged between the storage cylinder (104) and the tank body (101). The top ends of the plurality of first conveying pipes (106) are connected to the bottom end of the partition plate (102). On the partition (102), the bottom ends of the plurality of first conveying pipes (106) are connected to the storage cylinder (104), the plurality of first discharge ports (107) are connected and arranged on the outer wall of the storage cylinder (104), and interception nets are arranged in the plurality of first discharge ports (107). The conveying device and the cleaning device are respectively arranged on the tank body (101), the conveying device is used to convey the material into the screen cylinder (103), the cleaning device is used to clean the screen cylinder (103), and the collecting device is connected to the tank body (101), and the collecting device is used to evaporate and purify the material.

2. The device for recycling tetramethylammonium hydroxide according to claim 1, characterized in that: The conveying device comprises a conveying box (201), a second conveying pipe (202), a conveying tank (203), a one-way inlet valve (204), a one-way outlet valve (205), a piston (206), a reciprocating screw (207), a slider (208) and a guide column (209); the conveying box (201) is mounted on the top of the tank body (101); the bottom end of the second conveying pipe (202) is connected to the bottom of the inner wall of the screen cylinder (103); the upper part of the second conveying pipe (202) is rotatably mounted in the conveying box (201); the second conveying pipe (202) is provided with an opening, the opening being used to connect the conveying box (201) with the inside of the screen cylinder (103); the bottom end of the conveying tank (203) is connected to the top of the conveying box (201); A vent is provided at the lower part of the conveying tank (203); a one-way inlet valve (204) and a one-way outlet valve (205) are respectively connected and arranged on the conveying tank (203); an output end of the one-way outlet valve (205) is connected to the conveying box (201); a piston (206) is slidably mounted in the conveying tank (203) up and down; a reciprocating screw (207) is rotatably mounted on the inner wall of the conveying tank (203); a bottom end of the reciprocating screw (207) is connected to a top end of the second conveying pipe (202); a slider (208) is cooperatively mounted on the reciprocating screw (207); a top end of the slider (208) is connected to a bottom end of a guide column (209); and the guide column (209) is slidably mounted on the conveying tank (203) and connected to a bottom end of the piston (206).

3. The device for recycling tetramethylammonium hydroxide according to claim 1, characterized in that: The cleaning device comprises a collecting tank (301), a first discharge valve (302), a vent valve (303), a third delivery pipe (304), a collecting tank (305) and an air suction pump (306); the collecting tank (301) is mounted on the outer wall of the tank body (101); the first discharge valve (302) and the vent valve (303) are respectively arranged on the collecting tank (301) in communication; the top end of the third delivery pipe (304) is in communication with the collecting tank (301); the bottom end of the third delivery pipe (304) is in communication with the collecting tank (305); the top end of the collecting tank (305) is mounted on the inner wall of the tank body (101); an absorption port is arranged on the outer wall of the collecting tank (305); and the absorption port of the collecting tank (305) is in contact with the inner wall of the screen cylinder (103); the air suction pump (306) is mounted on the outer wall of the tank body (101); and the input end of the air suction pump (306) is in communication with the collecting tank (301).

4. The device for recycling tetramethylammonium hydroxide according to claim 1, characterized in that: The collecting device comprises a heating box (401), a second discharge valve (402), a condenser (403) and a reflux pipe (404); the heating box (401) is in communication with the tank body (101); the second discharge valve (402) is in communication with and arranged on the heating box (401); the condenser (403) is in communication with and arranged at the top of the heating box (401); the input end of the reflux pipe (404) is in communication with the condenser (403); and the output end of the reflux pipe (404) is in communication with the tank body (101).

5. The device for recycling tetramethylammonium hydroxide according to claim 1, characterized in that: The invention also comprises a second discharge port (501), a cylinder (502), a plug body (503), a feeding pipe (504) and a guide platform (505); the second discharge port (501) is arranged in communication with the lower part of the outer wall of the tank body (101); the plurality of groups of cylinders (502) are installed on the inner wall of the tank body (101); the movable ends of the plurality of groups of cylinders (502) are connected to the bottom end of the plug body (503); the plug body (503) is arranged at the bottom opening of the storage cylinder (104); the guide platform (505) is arranged at the inner bottom of the tank body (101); and the feeding pipe (504) is arranged in communication with the outer wall of the storage cylinder (104).

6. The device for recycling tetramethylammonium hydroxide according to claim 3, characterized in that: The invention also comprises a motor (601), a first gear (602), a gear ring (603) and a second gear (604), wherein the motor (601) is mounted on the outer wall of the tank body (101), the first gear (602) is arranged on the output end of the motor (601), the gear ring (603) is mounted on the outer wall of the screen cylinder (103), the gear ring (603) is meshed with the first gear (602), and the second gear (604) is mounted on the power input end of the suction pump (306), and the second gear (604) is meshed with the gear ring (603).

7. The device for recycling tetramethylammonium hydroxide according to claim 1, characterized in that: It also includes a spiral blade (701), which is rotatably mounted on the upper part of the inner wall of the storage cylinder (104), and the top end of the spiral blade (701) is connected to the bottom end of the screen cylinder (103).

8. The device for recycling tetramethylammonium hydroxide according to claim 1, characterized in that: It also includes a spoiler (801), which is installed on the inner wall of the screen cylinder (103).

9. A method for recycling tetramethylammonium hydroxide, characterized in that: The following steps are involved: S1. According to the pH value of the tetramethylammonium hydroxide to be reused as needed, add an appropriate amount of acid to adjust the pH value to neutral or weak alkaline; S2, transporting the tetramethylammonium hydroxide material to be reused into the interior of the mesh cylinder (103), and rotating the mesh cylinder (103) so that the mesh cylinder (103) centrifugally filters and separates the tetramethylammonium hydroxide inside to remove impurities; S3, the tetramethylammonium hydroxide after centrifugal filtration is transported through the ion exchange resin flow, and when the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities from the tetramethylammonium hydroxide and releases H + Ions, further purified, to improve the removal of further impurities; S4, transporting tetramethylammonium hydroxide to a collecting device, and evaporating and concentrating it through the collecting device; S5. The evaporated and concentrated tetramethylammonium hydroxide is then concentrated by membrane technology to increase its concentration to the industrial standard.

10. A method for recycling tetramethylammonium hydroxide as claimed in claim 9, characterized in that: In S1, the pH value of tetramethylammonium hydroxide is adjusted to 7-9 by using hydrochloric acid or sodium hydroxide.

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