Cutting and spraying structure of MOS (Metal Oxide Semiconductor) chip

Abstract

The invention discloses a cutting and spraying structure of an MOS (Metal Oxide Semiconductor) chip, relates to the technical field of chip cutting, and solves the technical problem that a calibration structure is influenced due to the fact that a cutting structure rotates to drive water flow to appear in chip calibration and other processes when the flow speed of cooling water and the rotating speed of the cutting structure are directly associated to facilitate regulation and control in an existing chip cutting machine. The relatively long driving block is arranged between the cutting knife and the cutting frame, the sliding extrusion block is arranged in the driving block, and the extrusion block and the driving block are longer than the cutting knife, so that the MOS chip is in contact with the extrusion block before being in contact with the cutting knife, and the extrusion block is driven to move; further, a transfer gear and other structures are improved to drive a straight-through block and a circulation block to move, water flow is guided into a spray head, then water flow rushes out of the interior of the spray head after an extrusion block is extruded, the position of the extrusion block can assist in positioning of a cutting knife and an MOS chip, and the extrusion block can drive a driving block to rotate after moving; and the influence on the work of the cutter is avoided.

Description

Technical Field

[0001] The invention belongs to the field of chip processing, relates to a chip dicing technology, and specifically is a dicing spray structure for a MOS chip. Background Art

[0002] MOS chip usually refers to MOS tube (metal-oxide-semiconductor field-effect transistor) and its related integrated circuit chips; MOS chip processing needs to be cut by blades, etc.

[0003] The reference patent name is: A chip dicing cutting machine (patent announcement number: CN117464853A). Through the power mechanism and transmission mechanism between the water spray structure and the cutting structure, the rotation of the cutting structure is linked to the water flow speed. The faster the rotation speed during cutting, the greater the corresponding water flow rate, and thus the higher the efficiency of cooling the cutting structure.

[0004] However, when implementing the above technical solution, the following problems exist: in the above device, the cutting structure is in a rotating state, and the entire device is in a water spraying state, but the cutting structure is not only in a rotating state during the cutting process. When cutting multiple chips continuously, the cutting knife may remain in a rotating state in the short gap between cutting each chip, thereby ensuring that the required rotation speed and stability can be achieved during cutting; and during the positioning and adjustment stage of the chip, the cutting structure needs to rotate for a short time to facilitate the calibration position; during the calibration process, the appearance of water flow may affect the line of sight, resulting in errors in the results; during the non-cutting process, the rotation of the cutting structure drives the water flow impact, which to a certain extent wastes resources.

[0005] To this end, the present invention proposes a dicing and spraying structure for a MOS chip. Summary of the invention

[0006] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a MOS chip cutting spray structure, which solves the problem that when the existing chip cutting machine directly links the flow rate of cooling water with the rotation speed of the cutting structure for easy regulation, the cutting structure rotates during the chip calibration process, driving the water flow, which affects the calibration structure.

[0007] To achieve the above object, according to an embodiment of the first aspect of the present invention, a dicing and spraying structure for a MOS chip is provided, comprising:

[0008] A cutting frame, wherein the cutting frame is fixedly arranged inside the dicing machine; a cutting knife and a nozzle are detachably connected inside the cutting frame; a circulation slot is provided inside the cutting frame, and a transmission assembly is provided between the circulation slot and the cutting frame;

[0009] The transmission assembly comprises:

[0010] A driving block, wherein the driving block is rotatably arranged on the surface of the cutting frame, the length of the driving block is greater than the radius of the cutting knife, and an extrusion block is slidably connected inside the driving block; a plurality of extrusion teeth are fixedly connected to the surface of the extrusion block, and a driving gear is fixedly connected to the surface of the driving block, and the extrusion teeth are meshed with the driving gear;

[0011] A driving rod, a straight-through block and a circulation block, wherein the driving rod, the straight-through block and the circulation block are all slidably arranged inside the cutting frame, and an acceleration component is arranged between the driving rod and the driving gear; a connecting belt is fixedly connected between the driving rod and the straight-through block and the circulation block.

[0012] Optionally, the extension lines of the driving rod and the extrusion block are perpendicular to each other in space, and the extension lines of the straight-through block and the circulation block are perpendicular to each other in space.

[0013] Optionally, the track cross-sections of the connecting belts are all at right angles; the difference between the gap between the straight-through block and the distal end of the circulation slot and the gap between the circulation block and the distal end of the circulation slot is equal to the diameter of the circulation slot.

[0014] Optionally, a mounting rod is slidably connected inside the cutting frame, a protruding rod is fixedly connected to the surface of the mounting rod, a sliding groove is provided on the surface of the driving gear, and the sliding groove is adapted to the protruding rod.

[0015] Optionally, a motor is fixedly connected to the surface of the cutting frame, one end of the motor output shaft is fixedly connected to an embedded block, one end of the cutting knife close to the motor is threadedly connected to an embedded column, and the embedded block is adapted to the embedded column.

[0016] Optionally, a through groove is formed on the surface of the cutting blade, the radius of the through groove is greater than the distance between the protruding rod and the center of the mounting rod, and the length of the mounting rod is equal to the distance between the cutting frame and the embedded block.

[0017] Optionally, the acceleration assembly includes a transfer gear rotatably arranged inside the cutting frame, a plurality of acceleration teeth are fixedly connected to the surface of the driving rod, a plurality of auxiliary teeth are fixedly connected inside the cutting frame, and the transfer gear is meshed with both the acceleration teeth and the auxiliary teeth.

[0018] Optionally, the accelerating teeth and the auxiliary teeth are symmetrically arranged relative to the center of the transfer gear, and the number of the accelerating teeth is more than twice the number of the auxiliary teeth.

[0019] Optionally, the transfer gear and the cutting frame are both fixedly connected with transmission wheels, a transmission belt is connected between the transmission wheels, and a driving groove is opened on the surface of the transmission wheel located inside the cutting frame, and the driving groove is adapted to the protruding rod.

[0020] Optionally, an electric telescopic rod is fixedly connected inside the cutting frame, the electric telescopic rod is fixedly connected to the straight-through block, a marking block is fixedly connected to the surface of the electric telescopic rod, a movable groove is opened on the surface of the cutting frame, and the marking block is adapted to the movable groove.

[0021] Compared with the prior art, the beneficial effects of the present invention are as follows: by arranging a relatively long driving block between the cutting knife and the cutting frame, a sliding extrusion block is arranged inside the driving block. Since the length of the extrusion block and the driving block is relatively longer than that of the cutting knife, the MOS chip will contact the extrusion block before contacting the cutting knife, driving the extrusion block to move, thereby improving the transfer gear and other structures to drive the straight-through block and the circulation block to move, thereby causing the groove through which the water flows inside the circulation groove to present a 7 shape, guiding the water flow to the inside of the nozzle, and then the water flow will rush out of the nozzle only after the extrusion block is squeezed. At this time, the cutting knife contacts the MOS chip, and the position of the extrusion block can assist in the positioning of the cutting knife and the MOS chip. After the extrusion block moves, it will drive the driving block to rotate, thereby avoiding it affecting the work of the cutting knife. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural stereogram of the present invention;

[0023] Figure 2 is a three-dimensional structural cross-sectional view of the driving block of the present invention;

[0024] Figure 3 is a three-dimensional structural cross-sectional view of the mounting rod of the present invention;

[0025] Figure 4 For the present invention Figure 3 A magnified view of the local structure at point A in the middle;

[0026] Figure 5 For the present invention Figure 3 A magnified view of the local structure at B in the middle;

[0027] Figure 6 It is a three-dimensional structural cross-sectional view of the circulation channel of the present invention.

[0028] In the figure: 1. cutting frame; 2. circulation slot;

[0029] 31. driving block; 32. extrusion block; 33. driving gear; 34. driving rod; 35. straight-through block; 36. circulation block; 37. connecting belt;

[0030] 41. mounting rod; 42. protruding rod; 43. sliding groove;

[0031] 51. Transfer gear; 52. Auxiliary gear; 53. Transmission wheel; 54. Transmission belt;

[0032] 61. Electric telescopic rod; 62. Marking block; 63. Moving slot. DETAILED DESCRIPTION

[0033] The technical scheme of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] like Figure 1-6 As shown, a MOS chip cutting and spraying structure includes:

[0035] The cutting frame 1 is fixedly arranged inside the dicing machine and is a connection and support structure of the slicing mechanism inside the dicing machine;

[0036] The cutting frame 1 is detachably connected with a cutting knife;

[0037] A nozzle, the nozzle is detachably arranged inside the cutting frame 1, the nozzle is tilted, a flow slot 2 is opened inside the cutting frame 1, the flow slot 2 is detachably connected to two water pipes and the nozzle, the cross section of the flow slot 2 is T-shaped, and the two water pipes are symmetrically arranged;

[0038] A transmission assembly is provided between the circulation slot 2 and the cutting frame 1;

[0039] The transmission assembly comprises:

[0040] A driving block 31, wherein the driving block 31 is rotatably arranged on the surface of the cutting frame 1, wherein the cross section of the driving block 31 is L-shaped and the length thereof is greater than the radius of the cutting knife, wherein an extrusion block 32 is slidably connected inside the driving block 31, wherein a driving spring is fixedly connected between the extrusion block 32 and the driving block 31; wherein a plurality of extrusion teeth (not shown in the figure) are fixedly connected to the surface of the extrusion block 32, wherein a driving gear 33 is fixedly connected to the surface of the driving block 31, wherein the extrusion teeth are meshed with the driving gear 33;

[0041] A driving rod 34, a straight-through block 35 and a circulation block 36, wherein the driving rod 34, the straight-through block 35 and the circulation block 36 are all slidably arranged inside the cutting frame 1, and an acceleration component is arranged between the driving rod 34 and the driving gear 33; the extension lines of the driving rod 34 and the extrusion block 32 are perpendicular to each other in space, and the extension lines of the straight-through block 35 and the circulation block 36 are perpendicular to each other in space; a pulling spring is fixedly connected between the circulation block 36 and the cutting frame 1, and when the pulling spring is in a natural state, the circulation block 36 is separated from the circulation slot 2, and a connecting belt 37 is fixedly connected between the driving rod 34 and the straight-through block 35 and the straight-through block 35 and the circulation block 36, and the track cross section of the connecting belt 37 is at a right angle; the difference between the far-end gap between the straight-through block 35 and the circulation slot 2 and the far-end gap between the circulation block 36 and the circulation slot 2 is equal to the diameter of the circulation slot 2;

[0042] The MOS chip cutting and spraying structure, in actual application, is provided with a relatively long driving block 31 between the cutting knife and the cutting frame 1, and a sliding extrusion block 32 is provided inside the driving block 31. Since the extrusion block 32 and the driving block 31 are relatively longer than the cutting knife, the MOS chip will contact the extrusion block 32 before contacting the cutting knife, driving the extrusion block 32 to move, thereby improving the transfer gear 51 and other structures to drive the straight-through block 35 and the circulation block 36 to move, thereby causing the groove through which the water flows inside the circulation groove 2 to present a 7 shape, guiding the water flow to the inside of the nozzle, and then the water flow will rush out of the nozzle only after the extrusion block 32 is squeezed. At this time, the cutting knife contacts the MOS chip, and the position of the extrusion block 32 can assist in the positioning of the cutting knife and the MOS chip. After the extrusion block 32 moves, it will drive the driving block 31 to rotate, thereby preventing it from affecting the work of the cutting knife.

[0043] In some specific embodiments, a mounting rod 41 is slidably connected inside the cutting frame 1, a protruding rod 42 is fixedly connected to the surface of the mounting rod 41, and a sliding groove 43 is opened on the surface of the driving gear 33, and the sliding groove 43 is adapted to the protruding rod 42; through the adaptation of the protruding rod 42 of the mounting rod 41 and the sliding groove 43, the driving block 31 is restricted between the cutting frame 1 and the cutting knife, which is convenient for disassembly and installation;

[0044] In a further embodiment, a motor is fixedly connected to the surface of the cutting frame 1, a coupling (not shown in the figure) is fixedly connected to one end of the motor output shaft, an embedded block is fixedly connected to the surface of the coupling (not shown in the figure), an embedded column is threadedly connected to one end of the cutting knife close to the motor, and the embedded block is adapted to the embedded column; the motor and the cutting knife are fixedly connected by the embedded block and the embedded column, so that the cutting knife can be quickly replaced;

[0045] In a further embodiment, a through groove is provided on the surface of the cutting blade, the radius of the through groove is greater than the distance between the protruding rod 42 and the center of the mounting rod 41, and the length of the mounting rod 41 is equal to the distance between the cutting frame 1 and the embedded block; through the through groove, the mounting rod 41 can directly penetrate the position of the cutting blade, and due to its length, the other end of the mounting rod 41 contacts the surface of the embedded block, thereby ensuring the position of the driving block 31 and ensuring that the driving block 31 can move independently;

[0046] In some specific embodiments, the acceleration assembly includes a transfer gear 51 rotatably arranged inside the cutting frame 1, a plurality of acceleration teeth are fixedly connected to the surface of the driving rod 34, a plurality of auxiliary teeth 52 are fixedly connected to the inside of the cutting frame 1, the transfer gear 51 is meshed with both the acceleration teeth and the auxiliary teeth 52, the acceleration teeth and the auxiliary teeth 52 are symmetrically arranged relative to the center of the transfer gear 51, and the number of the acceleration teeth is more than twice the number of the auxiliary teeth 52; and then the transfer gear 51 is meshed with the fixed auxiliary teeth 52 and the sliding acceleration teeth at the same time, and when the transfer gear 51 rotates, it will move under the action of the auxiliary teeth 52, driving the driving rod 34 to move, and at the same time, due to the meshing of the transfer gear 51 and the acceleration teeth, the driving rod 34 is driven to move for a second time, thereby increasing the moving distance of the driving rod 34;

[0047] In a further embodiment, the transfer gear 51 and the cutting frame 1 are both fixedly connected with a transmission wheel 53, and the transmission wheels 53 are transmission-connected with a transmission belt 54. The surface of the transmission wheel 53 located inside the cutting frame 1 is provided with a driving groove, and the driving groove is adapted to the protruding rod 42; through the driving groove, the rotation of the driving gear 33 can be transmitted to the surface of the transmission wheel 53 through the protruding rod 42, and then through the transmission wheel 53 and the transmission belt 54, the transfer gear 51 can be driven to rotate, thereby causing the driving rod 34 to slide;

[0048] In some specific implementation schemes, the cutting frame 1 is fixedly connected to an electric telescopic rod 61, the electric telescopic rod 61 is fixedly connected to the straight-through block 35, the surface of the electric telescopic rod 61 is fixedly connected to a marking block 62, and a moving groove 63 is provided on the surface of the cutting frame 1, and the marking block 62 is adapted to the moving groove 63; the position of the straight-through block 35 can be controlled separately by the electric telescopic rod 61, and then the water flow can be ensured to enter the inside of the nozzle during the process of cleaning the surface of the MOS chip after the cutting is completed, and the marking block 62 is provided, so that the position of the straight-through block 35 can be directly observed, which is convenient for controlling the water flow;

[0049] Working principle of the present invention:

[0050] When the cutting blade is not working and not in contact with the MOS chip, the driving block 31 is perpendicular to the cutting frame 1, the straight-through block 35 is separated from the flow slot 2, the flow block 36 is located inside the flow slot 2, and the water flows horizontally through the flow slot 2;

[0051] During the contact between the cutting knife and the MOS chip, the driving rod 34 first contacts the MOS chip. During the movement of the cutting knife, the driving rod 34 slides, and then the extrusion teeth drive the driving gear 33 to rotate, causing the driving block 31 to rotate as a whole away from the MOS chip. Under the action of the mounting rod 41, the transmission wheel 53 rotates, thereby driving the transfer gear 51 to rotate, causing the driving rod 34 to move. Under the action of gravity and the pull spring, the straight-through block 35 and the circulation block 36 move, and then the straight-through block 35 blocks the circulation slot 2, and the circulation slot 2 at the position of the circulation block 36 is unobstructed.

[0052] The above embodiments are only used to illustrate the technical method of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical method of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the present invention.

Claims

1. A MOS chip scribing and spraying structure, characterized in that: include: A cutting frame (1), wherein the cutting frame (1) is fixedly arranged inside a dicing machine; a cutting knife and a nozzle are detachably connected inside the cutting frame (1); a circulation groove (2) is provided inside the cutting frame (1), and a transmission component is provided between the circulation groove (2) and the cutting frame (1); The transmission assembly comprises: A driving block (31), the driving block (31) is rotatably arranged on the surface of the cutting frame (1), the length of the driving block (31) is greater than the radius of the cutting knife, and an extrusion block (32) is slidably connected inside the driving block (31); a plurality of extrusion teeth are fixedly connected to the surface of the extrusion block (32), and a driving gear (33) is fixedly connected to the surface of the driving block (31), and the extrusion teeth are meshed with the driving gear (33); A driving rod (34), a straight-through block (35) and a circulation block (36), wherein the driving rod (34), the straight-through block (35) and the circulation block (36) are all slidably arranged inside the cutting frame (1), and an acceleration component is arranged between the driving rod (34) and the driving gear (33); and a connecting belt (37) is fixedly connected between the driving rod (34) and the straight-through block (35) and the circulation block (36).

2. A MOS chip scribing and spraying structure according to claim 1, characterized in that: The extended lines of the driving rod (34) and the extrusion block (32) are perpendicular to each other in space, and the extended lines of the straight-through block (35) and the circulation block (36) are perpendicular to each other in space.

3. The MOS chip scribing and spraying structure according to claim 1, characterized in that: The track cross-sections of the connecting belts (37) are all at right angles; the difference between the gap at the far end of the straight-through block (35) and the circulation groove (2) and the gap at the far end of the circulation block (36) and the circulation groove (2) is equal to the diameter of the circulation groove (2).

4. The MOS chip scribing and spraying structure according to claim 1, characterized in that: The cutting frame (1) is internally slidably connected with a mounting rod (41), the surface of the mounting rod (41) is fixedly connected with a protruding rod (42), the surface of the driving gear (33) is provided with a sliding groove (43), and the sliding groove (43) is adapted to the protruding rod (42).

5. The MOS chip scribing and spraying structure according to claim 4, characterized in that: A motor is fixedly connected to the surface of the cutting frame (1); one end of the motor output shaft is fixedly connected to an embedding block; one end of the cutting knife close to the motor is threadedly connected to an embedding column; the embedding block is adapted to the embedding column.

6. The MOS chip scribing and spraying structure according to claim 5, characterized in that: A through groove is provided on the surface of the cutting blade, the radius of the through groove is greater than the distance between the center of the protruding rod (42) and the installation rod (41), and the length of the installation rod (41) is equal to the distance between the cutting frame (1) and the embedded block.

7. The MOS chip scribing and spraying structure according to claim 4, characterized in that: The acceleration assembly comprises a transfer gear (51) rotatably arranged inside the cutting frame (1); a plurality of acceleration teeth are fixedly connected to the surface of the driving rod (34); a plurality of auxiliary teeth (52) are fixedly connected inside the cutting frame (1); and the transfer gear (51) is meshed with both the acceleration teeth and the auxiliary teeth (52).

8. The MOS chip scribing and spraying structure according to claim 7, characterized in that: The accelerating teeth and the auxiliary teeth (52) are symmetrically arranged relative to the center of the intermediate gear (51), and the number of the accelerating teeth is more than twice the number of the auxiliary teeth (52).

9. The MOS chip scribing and spraying structure according to claim 7, characterized in that: The transfer gear (51) and the cutting frame (1) are both fixedly connected with a transmission wheel (53), and a transmission belt (54) is connected between the transmission wheels (53). A driving groove is formed on the surface of the transmission wheel (53) inside the cutting frame (1), and the driving groove is adapted to fit the protruding rod (42).

10. The MOS chip scribing and spraying structure according to claim 1, characterized in that: An electric telescopic rod (61) is fixedly connected inside the cutting frame (1), the electric telescopic rod (61) is fixedly connected to the straight-through block (35), a marking block (62) is fixedly connected to the surface of the electric telescopic rod (61), a movable groove (63) is provided on the surface of the cutting frame (1), and the marking block (62) is adapted to fit the movable groove (63).

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