Flow distribution piece, flow distribution assembly, flow distribution structure setting method and machining equipment

Abstract

The invention relates to the technical field of machining, in particular to a flow distribution piece, a flow distribution assembly, an arrangement method of a flow distribution structure and machining equipment. According to the embodiment of the invention, the distribution density of the air outlet holes in the unit area on the first surface is configured to be in a positive correlation trend with the corresponding distribution distance, so that the air inlet holes can be distributed on the basis of the corresponding distribution distance between the unit area on the first surface and the air inlet holes; the distribution density of the air outlet holes in the unit area of the first face is correspondingly controlled, the difference of the air output between the unit area away from the air inlet holes and the unit area close to the air inlet holes is reduced, then the uniformity of the air output of all the areas of the flow distribution piece can be improved, and therefore the product quality can be improved.

Description

Technical Field

[0001] The present application relates to the field of processing technology, and in particular to a flow distribution member, a flow distribution assembly, a setting method of a flow distribution structure, and processing equipment. Background Art

[0002] In the related art, when coating the surface of a substrate in a reaction chamber, it is necessary to distribute different chemical sources to the surface of the substrate with the help of a related distribution structure, and the chemical sources react on the surface of the substrate, thereby depositing a thin film on the substrate. In this process, the uniformity of the coating of the coating equipment (especially large-scale coating equipment) needs to be improved, so that the product quality needs to be improved. Summary of the invention

[0003] Based on this, it is necessary to provide a flow distribution part, a flow distribution component, a setting method of a flow distribution structure and a processing equipment to improve product quality.

[0004] According to one aspect of the present application, an embodiment of the present application provides a flow distribution component, including a main body; the main body has a first air duct, and an air inlet hole and an air outlet hole that are both connected to the first air duct; the main body includes a first surface and a second surface, the first surface is provided with multiple air outlet holes, and the second surface is provided with an air inlet hole; wherein the distribution density of the air outlet holes within a unit area on the first surface is positively correlated with the distribution distance; the distribution density of the air outlet holes within a unit area on the first surface is the ratio of the total opening area of ​​all the air outlet holes within the unit area to the area of ​​the unit area; the distribution distance is the distance between the unit area and the air inlet hole.

[0005] In one of the embodiments, the distribution density of the air outlet holes on at least a portion of the unit area in the at least a portion of the unit area increases continuously with the increase of the distribution distance.

[0006] In one of the embodiments, the distribution density of the air outlet holes on at least a portion of the unit area increases in stages as the distribution distance increases.

[0007] In one of the embodiments, the distribution density of the air outlet holes on at least a portion of the unit area increases irregularly with the increase of the distribution distance.

[0008] In one of the embodiments, the distribution density of the air outlet holes on at least a portion of the unit area increases in accordance with a first preset rule as the distribution distance increases.

[0009] In one embodiment, the first preset rule includes at least one of a number series rule, a function relationship rule, and a recursive logic rule.

[0010] In one of the embodiments, the distribution density of the air outlet holes on at least a portion of the unit area increases in a first preset series as the distribution distance increases.

[0011] In one embodiment, the first preset number sequence is configured to have multiple number sequence types.

[0012] In one embodiment, the first preset number sequence is configured to have a number sequence type.

[0013] In one embodiment, the first preset number sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence.

[0014] In one embodiment, the main body has at least one air inlet hole connected to the first air duct, and the distribution distance is the minimum distance between a unit area and the at least one air inlet hole along the extension direction of the first air duct; the distance between two adjacent air outlet holes on the first surface along the extension direction of the first air duct in the extension direction of the first air duct is negatively correlated with the center distance of the first area; the center distance of the first area is the minimum distance between the center of the area between the two air outlet holes and the at least one air inlet hole along the extension direction of the first air duct.

[0015] In one of the embodiments, in at least a portion of the unit area, the distance between two adjacent air outlets on the first surface along the extension direction of the first air channel increases continuously as the center distance of the first area decreases.

[0016] In one of the embodiments, in at least a portion of the unit area, the distance between two adjacent air outlets on the first surface along the extension direction of the first air channel increases in stages as the center distance of the first area decreases.

[0017] In one embodiment, in at least a portion of the unit area, the distance between two adjacent air outlets on the first surface along the extension direction of the first air channel increases irregularly as the distance from the center of the first area decreases.

[0018] In one embodiment, in at least part of the unit area, the distance between two adjacent air outlets on the first surface along the extension direction of the first air channel increases according to a second preset rule as the distance from the center of the first area decreases.

[0019] In one embodiment, the main body has at least one air inlet hole connected to the first air duct, and the distribution distance is the minimum distance between a unit area and at least one air inlet hole; the aperture of the air outlet hole on the first surface is positively correlated with the center distance of the first hole; the center distance of the first hole is the minimum distance between the center of the air outlet hole and the center of at least one air inlet hole along the extension direction of the first air duct.

[0020] In one of the embodiments, in at least a portion of the unit area, the diameter of the air outlet holes on the first surface increases continuously as the distance from the center of the first hole increases.

[0021] In one of the embodiments, in at least a portion of the unit area, the diameter of the air outlet holes on the first surface increases in stages as the distance from the center of the first hole increases.

[0022] In one of the embodiments, in at least a portion of the unit area, the diameter of the air outlet holes on the first surface increases irregularly as the distance from the center of the first hole increases.

[0023] In one of the embodiments, in at least a portion of the unit area, the diameter of the air outlet holes on the first surface increases according to a third preset rule as the distance from the center of the first hole increases.

[0024] In one embodiment, at least one of the second preset rule and the third preset rule is a target rule, and the target rule satisfies one of the following rules:

[0025] First law: The target law includes at least one of the laws of number series, laws of functional relations, and laws of recursive logic;

[0026] Second rule: the target rule includes the first target number sequence rule, and the number sequence corresponding to the first target number sequence rule is configured to have multiple number sequence types or one number sequence type;

[0027] The third rule: the target rule includes the second target number sequence rule, and the number sequence corresponding to the second target number sequence rule includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence.

[0028] In one embodiment, the main body has a plurality of air inlet holes connected to the first air duct, and the distribution distance is the minimum distance among the distances between the unit area and the plurality of air inlet holes along the extension direction of the first air duct; the first air duct has a first end and a second end arranged relatively to each other along the extension direction of the first air duct, and the first end and the second end are both configured as air inlet ends correspondingly connected to the plurality of air inlet holes; wherein, in at least part of the unit area, the spacing between two adjacent air outlet holes on the first surface along the extension direction of the first air duct in the extension direction of the first air duct increases in a geometric progression, an arithmetic progression, a Fibonacci sequence, and a Dayan sequence as the center distance of the second area decreases; the center distance of the second area is the minimum distance among the first corresponding distances, and the first corresponding distance includes the distance between the center of the area between the two air outlet holes and the first end along the extension direction of the first air duct, and the distance between the center of the area between the two air outlet holes and the second end along the extension direction of the first air duct.

[0029] In one embodiment, the main body has a plurality of air inlet holes connected to the first air duct, and the distribution distance is the minimum distance between the unit area and the plurality of air inlet holes along the extension direction of the first air duct; the first air duct has a first end and a second end relatively arranged along the extension direction of the first air duct, and the first end and the second end are both configured as air inlet ends correspondingly connected to the plurality of air inlet holes; wherein, in at least part of the unit area, the aperture of the air outlet holes on the first surface increases with the increase of the center distance of the second holes in a geometric progression, an arithmetic progression, a Fibonacci sequence, and a Dayan sequence; the center distance of the second holes is the minimum distance among the second corresponding distances, and the second corresponding distances include the distance between the center of the air outlet hole and the first end along the extension direction of the first air duct, and the distance between the center of the air outlet hole and the second end along the extension direction of the first air duct.

[0030] In one embodiment, all the air outlet holes are arranged in multiple rows on the first surface along a direction intersecting with the extension direction of the first air channel; in at least one row of air outlet holes, the distribution density of the air outlet holes per unit area on the first surface is positively correlated with the distribution distance.

[0031] In one of the embodiments, a plurality of first surfaces are provided, all of which are arranged in sequence along a direction intersecting the extension direction of the first air duct, and the air outlets on all of the first surfaces are arranged toward the same side; all of the air outlets on each first surface constitute an air outlet group, and there are a first air outlet group and a second air outlet group in all of the air outlet groups, and the first air outlet group and the second air outlet group output different types of gases; and the total opening area of ​​the first air outlet group is smaller than the total opening area of ​​the second air outlet group.

[0032] In one embodiment, the apertures of the air outlet holes in the first air outlet hole group and the apertures of the air outlet holes in the second air outlet hole group are equal.

[0033] In one embodiment, the diameter of the air outlet holes in the first air outlet hole group and the diameter of the air outlet holes in the second air outlet hole group are both in a range of 0.1 mm to 30 mm.

[0034] In one embodiment, the minimum distance between two adjacent air outlet holes in the first air outlet hole group is equal to the minimum distance between two adjacent air outlet holes in the second air outlet hole group.

[0035] In one embodiment, the minimum distance between two adjacent air outlet holes in the first air outlet hole group and the minimum distance between two adjacent air outlet holes in the second air outlet hole group are both 1 mm to 50 mm.

[0036] In one embodiment, for the air outlet holes in the first air outlet hole group, the distribution density of the air outlet holes per unit area increases in a first arithmetic progression as the distribution distance increases;

[0037] For the outlet holes in the second outlet hole group, the distribution density of the outlet holes per unit area increases in a second arithmetic progression as the distribution distance increases;

[0038] The first arithmetic progression and the second arithmetic progression satisfy a preset condition, and the preset condition includes at least one of the following items:

[0039] First term: the common difference of the first arithmetic sequence is greater than the common difference of the second arithmetic sequence;

[0040] Second term: The distribution density of the first terms in the first arithmetic progression is equal to the distribution density of the first terms in the second arithmetic progression.

[0041] In one embodiment, the tolerance of the first arithmetic progression is 0.002 mm to 20 mm, and the tolerance of the second arithmetic progression is 0.001 mm to 19 mm.

[0042] In one embodiment, the total area of ​​all the air outlet holes on the first surface accounts for 0.5% to 95%.

[0043] In one of the embodiments, a groove body is further provided on the main body and is arranged in one-to-one correspondence with the first surface. The first surface constitutes the bottom wall of the corresponding groove body, and all the air outlet holes on the first surface are connected to the groove body.

[0044] According to another aspect of the present application, an embodiment of the present application provides a flow distribution component, including the flow distribution part in any of the above embodiments; all air outlets constitute multiple air outlet groups; among all air outlet groups, there are two adjacent air outlet groups that output different types of gases; a drainage cavity and a drainage channel connected to the drainage cavity are also provided on the main body; a drainage channel is provided between two adjacent air outlet groups that output different types of gases, and the inlets of all drainage channels and all air outlets are arranged toward the same side.

[0045] In one of the embodiments, the drainage channel has an outlet connected to the inlet of the drainage channel; the open area of ​​the outlet of the drainage channel within the unit spatial area of ​​the drainage channel is negatively correlated with the spatial distance; the spatial distance is the distance between the unit spatial area and the air inlet.

[0046] In one of the embodiments, the open area of ​​the outlet of at least part of the drainage channel within the unit spatial area of ​​the drainage channel increases continuously as the spatial distance decreases.

[0047] In one of the embodiments, the open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases in stages as the spatial distance decreases.

[0048] In one of the embodiments, the open area of ​​at least part of the outlet of the drainage channel within the unit spatial area of ​​the drainage channel increases irregularly as the spatial distance decreases.

[0049] In one of the embodiments, the open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases according to a fourth preset rule as the spatial distance decreases.

[0050] In one embodiment, the fourth preset rule includes at least one of a number series rule, a function relationship rule, and a recursive logic rule.

[0051] In one embodiment, the open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases in a second preset series as the spatial distance decreases.

[0052] In one embodiment, the second preset number sequence is configured to have multiple number sequence types.

[0053] In one embodiment, the second preset number sequence is configured to have a number sequence type.

[0054] In one embodiment, the second preset number sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence.

[0055] In one embodiment, the main body has a plurality of air inlet holes connected to the first air channel; the spatial distance is the minimum spacing between the unit spatial area and the plurality of air inlet holes.

[0056] In one embodiment, the flow distribution assembly also includes a movably arranged adjustment member, which is configured to adjust the open area of ​​the outlet of the drainage channel; wherein a plurality of adjustment holes are provided on the adjustment member; and the open area of ​​the outlet of the drainage channel is limited by the overlapping area of ​​the outlet of the drainage channel and the adjustment hole.

[0057] In one embodiment, the adjusting member includes a plurality of sub-adjusting members, each of which is provided with a plurality of adjusting holes; the outlet of the drainage channel includes a plurality of sub-outlets that are independent of each other; all the adjusting holes are arranged in a one-to-one correspondence with all the sub-outlets; and the open area of ​​a sub-outlet is limited by the overlapping area of ​​the sub-outlet and the corresponding adjusting hole.

[0058] In one embodiment, the outlet of the drainage channel includes an edge outlet arranged near the edge of the main body, and the adjusting member includes an edge adjusting member arranged near the edge of the main body and corresponding to the edge outlet; the open area of ​​the edge outlet is defined by the overlapping area between the edge outlet and the corresponding adjusting hole on the edge adjusting member.

[0059] In one embodiment, there are a first air outlet group and a second air outlet group in all the air outlet groups, all the first air outlet groups are configured to output multiple first gases, all the air outlets in each first air outlet group are configured to output the same first gas, and the second air outlet group is configured to output the second gas; wherein all the air outlet groups and all the drainage channels are continuously and adjacently arranged in a preset order; and the preset order satisfies at least one of the following conditions:

[0060] The first condition: based on the preset sequence from front to back, the front and back of each gas outlet group are both drainage channels, the second gas outlet group is between two adjacent first gas outlet groups for outputting different first gases, and the first gas outlet groups and the second gas outlet groups are arranged alternately;

[0061] The second condition: the first one in the preset sequence is the second air outlet group, and the last one in the preset sequence is the drainage channel; or, the first and last ones in the preset sequence are both the second air outlet group;

[0062] The third condition: the number of occurrences of the first gas outlet groups corresponding to any two different types of first gases is the same.

[0063] In one embodiment, the preset order satisfies at least the first condition; based on the preset order from front to back, the first air outlet group, the drainage channel located before the first air outlet group, the drainage channel located after the first air outlet group, and the second air outlet group adjacent to the first air outlet group constitute a combination; the flow distribution component also includes a plurality of isolation members arranged in the drainage cavity, and the plurality of isolation members divide the drainage cavity into a plurality of mutually independent sub-drainage cavities; each combination corresponds to at least one sub-drainage cavity, and all air outlets and entrances of all drainage channels in the same combination are connected to the corresponding at least one sub-drainage cavity, and different combinations correspond to different sub-drainage cavities.

[0064] In one embodiment, all the assemblies are arranged in one-to-one correspondence with all the sub-drainage chambers; all the air outlets and inlets of the drainage channels in the same assembly are connected to the corresponding sub-drainage chambers.

[0065] In one embodiment, a plurality of main bodies are provided; all the main bodies are arranged in sequence, and the air inlet ends of the first air passages of all the main bodies are located on the same side, and all the air outlets are arranged toward the same side.

[0066] In one embodiment, a plurality of first air channels are provided; the flow distribution component further includes a flow divider configured to divide the gas to be distributed into the plurality of first air channels.

[0067] In one embodiment, the flow distribution assembly also includes a protective member connected to the peripheral side of the main body; the protective member has a blowing channel and a plurality of blowing holes connected to the blowing channel; all the blowing holes define a blowing area, and all the air outlet holes define an air outlet area, and the blowing area is at least partially arranged around the air outlet area.

[0068] In one of the embodiments, the flow distribution assembly further includes a heating element; the heating element is connected to the main body, and the heating element is configured to heat the gas input into the first air channel.

[0069] According to another aspect of the present application, an embodiment of the present application provides a method for setting a flow distribution structure, including:

[0070] Based on the distance relationship between the unit area of ​​the first surface of the flow distribution component and the air inlet holes on the second surface of the flow distribution component, the distribution density of the air outlet holes to be set on the first surface within the unit area of ​​the first surface is determined; the distribution density of the air outlet holes to be set within the unit area of ​​the first surface is positively correlated with the distribution distance; the distribution density of the air outlet holes to be set within the unit area of ​​the first surface is the ratio of the total opening area of ​​all the air outlet holes to be set within the unit area to the area of ​​the unit area; the distribution distance is the distance between the unit area and the air inlet holes;

[0071] According to the distribution density, air outlet holes are arranged on the first surface.

[0072] In one embodiment, based on the distance relationship between the unit area of ​​the first surface of the flow distribution member and the air inlet holes on the second surface of the flow distribution member, determining the distribution density of the air outlet holes to be arranged on the first surface within the unit area of ​​the first surface includes:

[0073] Based on the distance relationship between the unit area of ​​the first surface and the air inlet, determine the threshold range of the structural parameters of the air outlet holes to be set in each unit area; wherein the structural parameters include the aperture of the air outlet holes to be set and the spacing between adjacent air outlet holes to be set;

[0074] The structural parameters within each threshold range are combined in a preset configuration to obtain a distribution density;

[0075] The preset configuration method includes at least one of the following configuration methods:

[0076] The first configuration mode: for the target unit area, the apertures of all the air outlets are the same, and the distribution density is configured based on the change in the spacing between adjacent air outlets to be set;

[0077] The second configuration mode: for the target unit area, the spacing between adjacent air outlet holes to be set is the same, and the distribution density is configured based on the change of the aperture of the air outlet hole;

[0078] The third configuration mode: for the target unit area, the distribution density is configured based on the change in the spacing between adjacent air outlet holes to be set and the change in the aperture of the air outlet holes.

[0079] In one embodiment, determining a threshold range of a structural parameter of the air outlet to be set in each unit area includes:

[0080] Based on the arrangement rule of the spacing between two adjacent air outlet holes to be set, the distribution rule of the air outlet holes to be set is determined; the arrangement rule of the spacing between two adjacent air outlet holes to be set includes that the spacing between the two adjacent air outlet holes to be set is negatively correlated with the center distance of the first area; the center distance of the first area is the distance between the center of the area between the two air outlet holes to be set and the air inlet along the extension direction of the first air channel to be set; the first air channel to be set is used for corresponding communication with the air outlet holes to be set;

[0081] Based on the distribution law, a threshold range of the structural parameters of the air outlet to be set is determined.

[0082] In one embodiment, determining a threshold range of a structural parameter of the air outlet to be set in each unit area includes:

[0083] Based on the arrangement rule of the apertures of the air outlet holes to be set, the distribution rule of the air outlet holes to be set is determined; the arrangement rule of the apertures of the air outlet holes to be set includes that the apertures of the air outlet holes to be set are positively correlated with the hole center distance; the hole center distance is the distance between the center of the air outlet holes to be set and the air inlet along the extension direction of the first air channel to be set; the first air channel to be set is used for corresponding communication with the air outlet holes to be set;

[0084] Based on the distribution law, a threshold range of the structural parameters of the air outlet to be set is determined.

[0085] In one embodiment, determining a threshold range of a structural parameter of the air outlet to be set in each unit area includes:

[0086] Based on the arrangement rule of the spacing between two adjacent air outlet holes to be set and the arrangement rule of the apertures of the air outlet holes to be set, the distribution rule of the air outlet holes to be set is determined; the arrangement rule of the spacing between two adjacent air outlet holes to be set includes that the spacing between two adjacent air outlet holes to be set is negatively correlated with the area center distance; the area center distance is the distance between the center of the area between the two air outlet holes to be set and the air inlet hole; the arrangement rule of the apertures of the air outlet holes to be set includes that the aperture of the air outlet holes to be set is positively correlated with the hole center distance; the hole center distance is the distance between the center of the air outlet hole to be set and the air inlet hole along the extension direction of the first air channel to be set; the first air channel to be set is used for corresponding communication with the air outlet holes to be set;

[0087] Based on the distribution law, a threshold range of the structural parameters of the air outlet to be set is determined.

[0088] In one embodiment, based on the distance relationship between the unit area of ​​the first surface of the flow distribution member and the air inlet holes on the second surface of the flow distribution member, the distribution density of the air outlet holes to be arranged on the first surface within the unit area of ​​the first surface is determined, which includes:

[0089] Based on the size of the unit area of ​​the first surface, determining all unit area constituting the first surface;

[0090] Based on the position of each unit area region and the position of the air inlet, determining the distance between each unit area region and the air inlet;

[0091] The corresponding distances of each unit area are compared to obtain a first size relationship between each unit area and the air inlet, and the first size relationship is used as the distance relationship between the unit area of ​​the first surface of the flow distribution component and the air inlet.

[0092] In one embodiment, based on the distance relationship between the unit area of ​​the first surface of the flow distribution member and the air inlet holes on the second surface of the flow distribution member, determining the distribution density of the air outlet holes to be arranged on the first surface within the unit area of ​​the first surface includes:

[0093] Determining a target relationship between the distribution densities of the air outlet holes to be arranged on each unit area according to the first size relationship;

[0094] Based on the target relationship, determining the distribution density of the air outlet holes to be set on each unit area;

[0095] The target relationship satisfies one of the following target conditions:

[0096] First target condition: the distribution density of the air outlet holes to be arranged on at least a portion of the unit area in the at least a portion of the unit area continuously increases with the increase of the distribution distance;

[0097] Second target condition: the distribution density of the air outlet holes to be arranged on at least a portion of the unit area increases in stages as the distribution distance increases;

[0098] The third target condition is that the distribution density of the air outlet holes to be set on at least part of the unit area increases according to a first preset rule as the distribution distance increases; the first preset rule includes at least one of a sequence rule, a function relationship rule, and a recursive logic rule;

[0099] Fourth target condition: the distribution density of the air outlet holes to be arranged on at least part of the unit area in the at least part of the unit area increases in a first preset sequence as the distribution distance increases; the first preset sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a large derivative sequence;

[0100] Fifth target condition: the distribution density of the air outlet holes to be arranged on at least a portion of the unit area in the at least a portion of the unit area increases irregularly with the increase of the distribution distance.

[0101] In one embodiment, the method for setting the flow distribution structure further includes:

[0102] Based on the type of gas outputted by the gas outlet holes to be arranged on the first surface, the distribution densities corresponding to the gas outlet holes to be arranged on the first surface are determined respectively.

[0103] In one embodiment, the method for setting the flow distribution structure further includes:

[0104] Based on a plurality of gas outlet groups to be arranged formed by all the gas outlets to be arranged, a drainage channel is arranged between two adjacent gas outlet groups outputting different gas types; the inlets of all the drainage channels and all the gas outlets are arranged toward the same side;

[0105] Based on the distance relationship between the unit spatial area of ​​the drainage channel and the air inlet, the target open area of ​​the outlet of the drainage channel within the unit spatial area of ​​the drainage channel is determined; the drainage channel has an outlet connected to the inlet of the drainage channel; the target open area of ​​the outlet of the drainage channel within the unit spatial area of ​​the drainage channel is negatively correlated with the spatial distance; the spatial distance is the distance between the unit spatial area and the air inlet;

[0106] The open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel is configured according to the target open area.

[0107] In one embodiment, based on the distance relationship between the unit space area of ​​the drainage channel and the air inlet, determining the target open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel includes:

[0108] Based on the size of the unit space area of ​​the drainage channel, determining all unit space areas constituting the drainage channel;

[0109] Based on the positions of the unit space areas and the air inlets, determining the distance between the unit space areas and the air inlets;

[0110] The corresponding distances of each unit space area are compared to obtain a second size relationship of the distances between each unit space area and the air inlet, and the second size relationship is used as the distance relationship between the unit space area of ​​the drainage channel and the air inlet.

[0111] In one embodiment, determining a target open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel based on a distance relationship between the unit space area of ​​the drainage channel and the air inlet hole comprises:

[0112] Determining the area relationship between the target open areas corresponding to each unit space area according to the second size relationship;

[0113] Based on the area relationship, determine the target open area corresponding to each unit space area;

[0114] Among them, the area relationship satisfies one of the following area conditions:

[0115] First area condition: the target open area of ​​at least part of the outlet of the drainage channel within the unit spatial area of ​​the drainage channel increases continuously as the spatial distance decreases;

[0116] Second area condition: the target open area of ​​at least part of the outlet of the drainage channel within the unit space area of ​​the drainage channel increases in stages as the spatial distance decreases;

[0117] The third area condition: the target open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases according to a fourth preset rule as the spatial distance decreases; the fourth preset rule includes at least one of a sequence rule, a function relationship rule, and a recursive logic rule;

[0118] Fourth area condition: the target open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases in a second preset sequence as the spatial distance decreases; the second preset sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a large derivative sequence;

[0119] Fifth area condition: the target open area of ​​at least part of the outlet of the drainage channel within the unit spatial area of ​​the drainage channel increases irregularly as the spatial distance decreases.

[0120] In one embodiment, according to the target open area, the open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel is configured, and then the method includes:

[0121] Based on the arrangement relationship between the air outlet group and the drainage channel on the first surface, the first air outlet group, the drainage channel adjacent to the first air outlet group, and the second air outlet group adjacent to the first air outlet group are combined as a combination; the first air outlet group and the second air outlet group are groups with different types of gases output among all the air outlet groups;

[0122] Based on the assembly, at least one sub-drainage cavity connected to all the air outlets and the inlets of all the drainage channels in the assembly is configured; wherein different assemblies correspond to different sub-drainage cavities, and all sub-drainage cavities are independent of each other.

[0123] According to yet another aspect of the present application, an embodiment of the present application provides a processing device, including a flow distribution device;

[0124] The flow distribution device includes at least one of the following:

[0125] The flow distribution member in any of the above embodiments;

[0126] The flow distribution component in any of the above embodiments;

[0127] The flow distribution structure is manufactured using the flow distribution structure setting method in any of the above embodiments.

[0128] In one embodiment, the processing equipment further includes a transmission roller for conveying the substrate;

[0129] There are multiple flow distribution devices, and all of them are arranged in sequence around a partial area of ​​the circumferential side wall of the drive roller; the flow distribution devices are spaced apart from the circumferential side wall of the drive roller, and the flow distribution surfaces of the flow distribution devices are arranged toward the circumferential side wall of the drive roller.

[0130] In one of the embodiments, the main body of the flow distribution device has a first surface disposed toward the driving roller, and the first surface is configured as an arc surface.

[0131] In one embodiment, the processing equipment is configured as a coating equipment.

[0132] In the above-mentioned flow distribution component, flow distribution assembly, setting method and processing equipment of the flow distribution structure, the flow distribution component at least includes a main body, a plurality of air outlets are provided on the first surface of the main body, and an air inlet is provided on the second surface of the main body. By configuring the distribution density of the air outlets in the unit area of ​​the first surface to be positively correlated with the distribution distance, the distribution density of the air outlets in the unit area of ​​the first surface can be correspondingly controlled, so that the distribution density of the air outlets in the unit area far away from the air inlet is generally greater than the distribution density in the unit area near the air inlet, thereby generally increasing the gas output per unit area far away from the air inlet and reducing the gas output per unit area near the air inlet. Through the above-mentioned configuration method, the gas output corresponding to different unit area areas can be correspondingly controlled according to the position of the air inlet, so that the difference in gas output between the unit area far away from the air inlet and the unit area near the air inlet can be reduced, which is conducive to a more uniform distribution of gas in a wider area, thereby improving the uniformity of the gas output in each area of ​​the flow distribution component, and thus improving the uniformity of the flow distribution. In addition, during the gas flow process, the pressure near the gas inlet is relatively high. By configuring the distribution density of the gas outlet holes as described above, it is easier for the gas to flow from the higher pressure area to the lower pressure area, thereby balancing the pressure of the entire system, helping to regulate the pressure, thereby improving the stability of the gas supply, further improving the uniformity of the distribution flow, and thus improving product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0133] Figure 1 A schematic diagram of a three-dimensional structure of a flow distribution member provided in some embodiments of the present application;

[0134] Figure 2 A schematic diagram of a cross-sectional three-dimensional structure of a flow distribution member provided in some embodiments of the present application at a viewing angle;

[0135] Figure 3 for Figure 2 A schematic diagram of the local enlarged structure at A1 in the middle;

[0136] Figure 4 A schematic diagram of the structure of the flow distribution member provided in some embodiments of the present application at a viewing angle;

[0137] Figure 5 This is a schematic diagram of a structure in which an air outlet is provided on the first surface in some embodiments of the present application;

[0138] Figure 6 A schematic diagram of a first surface divided into a plurality of unit area regions in some embodiments of the present application;

[0139] Figure 7 This is a schematic diagram of a first surface divided into a plurality of unit area regions in another embodiment of the present application;

[0140] Figure 8 This is a schematic diagram of a structure in which a plurality of first surfaces are provided with air outlet holes in some embodiments of the present application;

[0141] Fig. 9 This is a schematic diagram of a three-dimensional cross-sectional structure of a flow distribution member in some embodiments of the present application at another viewing angle;

[0142] Fig.10 for Fig. 9 A schematic diagram of the local enlarged structure at A2 in the middle;

[0143] Fig.11 This is a schematic diagram of the structure of the groove body and the first air channel in some embodiments of the present application;

[0144] Fig.12 A schematic diagram of the three-dimensional structure of a flow distribution assembly provided in some embodiments of the present application;

[0145] Fig.13 A schematic diagram of the decomposed structure of a distribution flow assembly provided in some embodiments of the present application;

[0146] Fig.14 This is a schematic diagram of a three-dimensional structure of the main body and the adjusting member in some embodiments of the present application;

[0147] Fig.15 This is a schematic diagram of the structure of the adjusting member in some embodiments of the present application;

[0148] Fig.16 A schematic diagram of the overlap area in some embodiments of the present application;

[0149] Fig.17 A schematic diagram of a cross-sectional three-dimensional structure of a flow distribution member provided in some embodiments of the present application at another viewing angle;

[0150] Fig.18 This is a schematic diagram of the structure of the adjusting member in some other embodiments of the present application;

[0151] Fig.19 A schematic diagram of the structure of a flow distribution assembly provided in some other embodiments of the present application;

[0152] Fig. 20 It is a schematic cross-sectional structural diagram of a flow distribution assembly provided in some other embodiments of the present application;

[0153] Fig.21 This is a schematic diagram of the structure of the flow distribution assembly including the flow diverter in some embodiments of the present application;

[0154] Fig. 22 This is a schematic diagram of the structure of multiple flow distribution components used in conjunction with a transmission roller in some embodiments of the present application;

[0155] Fig.23 A partial structural schematic diagram of processing equipment provided for some embodiments of the present application.

[0156] Description of reference numerals:

[0157] Processing equipment 100;

[0158] Reaction chamber 110, reaction chamber Q1, input port s1, output port s2;

[0159] Transmission mechanism 120, transmission roller 121;

[0160] Flow distribution component 130, main body 131, first end Da, second end Db, first surface m1, first air channel p1, first end p11, second end p12, air inlet end pt, second surface m2, air inlet hole c1, air outlet hole c2, connecting channel cx, air outlet hole group T, first air outlet hole group T11, second air outlet hole group T22, groove body G, drainage channel e, drainage inlet e1, drainage outlet e2, sub-outlet e21, edge outlet ey, first channel ea, second channel eb, third channel ec, drainage chamber Q2, sub-drainage chamber Q21, first wall i, cover 132, opening f, adjustment member 133, sub-adjustment member 133a, adjustment hole j1, mounting hole j2, edge adjustment member jy, first surface b1, isolation member 134, diverter member 135, second air channel p2, diverter channel p3, protective member 136, blowing channel p4, blowing hole ck, blowing groove cp, air curtain QL, heating member 137;

[0161] first distribution distance n1, second distribution distance n2, third distribution distance n3, unit area z0, first unit area z01, second unit area z02, third unit area z03, first spacing w, aperture d, first size u1, second size u2, first area r1, first edge area ra, second edge area rb;

[0162] Gap g, passing area v1, overlapping area v2;

[0163] Substrate 200;

[0164] First direction F1, second direction F2, third direction F3, air intake direction K, plane E. DETAILED DESCRIPTION

[0165] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0166] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0167] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0168] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0169] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0170] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0171] Please refer to Figures 1 to 4 The embodiment of the present application provides a flow distribution member, including a main body 131. The main body 131 has a first air passage p1, and an air inlet c1 and an air outlet c2 both connected to the first air passage p1.

[0172] The main body 131 is a main component constituting the flow distribution part. The main body 131 can be roughly set in a plate shape. Plate-shaped means that the dimensions of the main body 131 in the length and width directions are larger than the dimensions in the thickness direction, and does not mean that the main body 131 must be a plate. In the embodiment of the present application, the length direction of the main body 131 is the first direction F1, the width direction of the main body 131 is the second direction F2, and the thickness direction of the main body 131 is the third direction F3. The first direction F1, the second direction F2 and the third direction F3 are perpendicular to each other. For the convenience of introduction below, the first direction F1, the second direction F2 and the third direction F3 will be used as references for exemplary explanation. Of course, the main body 131 can also be a component with other shapes and structures, which is not specifically limited here.

[0173] The first air passage p1 is disposed inside the main body 131, and the first air passage p1 is a passage for outputting gas. The first air passage p1 may be disposed to extend longitudinally. For example, the longitudinal extension direction of the first air passage p1 may be parallel to the first direction F1, or may be inclined relative to the first direction F1. In the embodiment of the present application, the longitudinal extension direction of the first air passage p1 is parallel to the first direction F1.

[0174] The air inlet c1 is a hole for inputting gas and is connected to the first air passage p1. The air outlet c2 is a hole for outputting gas. The gas can be input to the first air passage p1 through the air inlet c1 and then output from the air outlet c2 through the first air passage p1.

[0175] Please continue to refer to Figures 2 to 4 , and combined with reference Figure 5 The main body 131 includes a first surface m1 and a second surface m2. The first surface m1 is provided with a plurality of gas outlet holes c2, and the second surface m2 is provided with a gas inlet hole c1. At least part of the first surface m1 may be exposed to the main body 131. In the embodiment of the present application, the entire first surface m1 is exposed to the main body 131. In this way, the gas output from the gas outlet holes c2 may be released outside the main body 131.

[0176] For example, Figure 5 For example, the first surface m1 may be a plane, and the first surface m1 is perpendicular to the third direction F3. Of course, the first surface m1 may also be a curved surface, which is not specifically limited here. Since a plurality of air outlets c2 are provided on the first surface m1, and the plurality of air outlets c2 are connected to the first airway p1, the first surface m1 and the first airway p1 are substantially arranged relative to each other. In the embodiment of the present application, since the first airway p1 can be extended along the first direction F1, correspondingly, the first surface m1 can be extended along the first direction F1. Further, the first surface m1 may be the outer wall surface of the first airway p1, in which case the air outlet c2 passes through the wall of the first airway p1. Of course, the first surface m1 may also be a surface located outside the outer wall of the first airway p1, in which case the air outlet c2 may be connected to the first airway p1 by means of a related connecting structure. It can be set according to the specific usage, and is not specifically limited here.

[0177] For example, Figures 1 to 3 For example, the second surface m2 can be a plane, and the second surface m2 is perpendicular to the first direction F1. In the embodiment of the present application, two end surfaces of the main body 131 arranged opposite to each other along the first direction F1 constitute the second surface m2, and the two second surfaces m2 are both provided with air inlet holes c1. It can be set according to the specific usage, and no specific limitation is made here.

[0178] Combined with reference Figure 4 and Figure 5 , the distribution density of the outlet holes c2 in the unit area z0 on the first surface m1 is positively correlated with the distribution distance. The distribution density of the outlet holes c2 in the unit area z0 on the first surface m1 is the ratio of the total opening area of ​​all the outlet holes c2 in the unit area to the area of ​​the unit area z0. The distribution distance is the distance between the unit area z0 and the inlet hole c1.

[0179] The distribution density within the unit area z0 is used to characterize the density of the pores c2. For example, the distribution density within the unit area z0 refers to the area ratio occupied by the pores c2 within the unit area z0; wherein, if all the pores c2 are of the same size and the pores c2 within the unit area z0 are completely located within the unit area z0, then the area occupied by the pores c2 within the unit area z0 is also equal to the number of pores c2 within the unit area z0 multiplied by the area occupied by a single pore c2; if all the pores c2 are not exactly the same size and part of the pores c2 within the unit area z0 are complete and part are incomplete, then the area occupied by the pores c2 within the unit area z0 is the sum of the total area occupied by all the complete pores c2 within the unit area z0 and the total area occupied by all the incomplete pores c2 within the unit area z0. The smaller the distribution density of the pores c2 in the unit area z0, the more sparse the pores c2 are, and vice versa.

[0180] The "unit area" refers to the first surface m1 of the body 131 and is related to the area of ​​the first surface m1. The "unit area region z0" is a region selected from the first surface m1. The size and shape of the selected unit area region z0 depends on different unit area size definitions. After the unit area size is defined, the size of the unit area region z0 has a relative size and shape relative to the first surface m1. For example, the size of the unit area region z0 can be 1 cm 2 (square centimeters), or 1 mm 2 (square millimeters), or 1000mm 2 (square millimeters), 1100 mm 2 (square millimeters), etc. The size of the unit area can be determined according to the size of the first surface m1 and the usage requirements, and the embodiment of the present application does not specifically limit this. Similarly, the division of the unit area region z0 can be customized according to actual conditions. For example, the first surface m1 can be divided into N1×M1 square areas of equal area, each of which is a unit area region z0, where N1 and M1 are preset positive integers, and the selection of N1 and M1 is determined by the area size of the first surface m1. Of course, the shape of each unit area region z0 is not limited to a square. It can be understood that the shape of each unit area region z0 is the same and the size is also the same.

[0181] Exemplary, with reference to Figure 6 , Figure 6illustratively shows the situation of dividing the unit area z0 of the first surface m1 along the first direction F1, the unit area z0 is arranged in a square, a plurality of unit area z0 are arranged in sequence along the first direction F1, and two adjacent unit area z0 along the first direction F1 are adjacent; wherein N1 is 18, and M1 is 1. Figure 7 , Figure 7 The figure schematically shows the situation of dividing the unit area z0 of the first surface m1 along the first direction F1 and the second direction F2. Multiple unit area regions z0 are arranged in columns along the first direction F1 and in rows along the second direction F2. Two adjacent unit area regions z0 are adjacent to each other; wherein N1 is 36 and M1 is 2.

[0182] Of course, in some other embodiments, the shape of the unit area z0 may also be a rectangle or other shapes. The unit area z0 divided on the first surface m1 may include an incomplete unit area z0. For example, after the unit area z0 is divided according to the use requirements, the remaining area is not enough to divide a complete unit area z0. The remaining area can be converted according to the use requirements to set the required air outlet c2. It can be set according to the specific use situation and is not specifically limited here.

[0183] Thus, after the shape and size of the unit area z0 are determined, the distribution density of the outlet holes c2 within the unit area z0 on the first surface m1 and the distance between each unit area z0 and the inlet holes c1 can be determined, that is, the distribution density and distribution distance mentioned above.

[0184] The opening area ratio is used as the control benchmark to illustrate the meaning of distribution density. Figures 4 to 6 , since the distribution density of the air outlet holes c2 in the unit area z0 on the first surface m1 is the ratio of the total opening area of ​​all the air outlet holes c2 in the unit area z0 to the area of ​​the unit area z0, the area of ​​the first surface m1 can be determined first, and then the total opening area on the first surface m1 can be determined according to the required air output, and then the total area ratio of all the air outlet holes c2 on the first surface m1 can be obtained. Of course, the control reference can also be the distribution distance, hole center distance, etc. described later, which can be selected according to specific use requirements and is not specifically limited here.

[0185] Take the intake from both ends of the first airway p1 as an example to explain the meaning of the distribution distance. Figures 2 to 5, the air intake direction K on one side of the first surface m1 along the first direction F1 is substantially the same direction as the first direction F1, and the air intake direction K on the other side of the first surface m1 along the first direction F1 is substantially opposite to the first direction F1. The distribution distance between each unit area region z0 on the first surface m1 and the air intake hole c1 can be roughly regarded as the distance between the unit area region z0 and the edge of the first surface m1 on one side along the first direction F1.

[0186] Continue with Figure 6 For example, the distribution distance can be characterized by the distance between the center of the unit area z0 and the left edge of the first surface m1 in the figure. It can be seen that, with the left edge of the first surface m1 as the reference, the first three unit area z0s set along the first direction F1 can be recorded as the first unit area z01, the second unit area z02 and the third unit area z03, and the distribution distances corresponding to the first unit area z01, the second unit area z02 and the third unit area z03 can be roughly regarded as the first distribution distance n1, the second distribution distance n2 and the third distribution distance n3, and the first distribution distance n1, the second distribution distance n2 and the third distribution distance n3 increase in sequence. In the case where air is also taken in on the right side of the first surface m1, the distance between the first unit area z01 and the right edge of the first surface m1 is greater than the distance between the second unit area z02 and the right edge of the first surface m1, and the distance between the second unit area z02 and the right edge of the first surface m1 is greater than the distance between the third unit area z03 and the right edge of the first surface m1. In the case where the air intake on the left side of the first surface m1 and the air intake on the right side of the first surface m1 exist at the same time, although the air intake on both the left and right sides of the first surface m1 will affect the air intake volume of the air outlet c2, since the first unit area z01, the second unit area z02 and the third unit area z03 are closer to the left edge of the first surface m1 at this time, the air intake on the left side of the first surface m1 at this time has a greater impact on the corresponding air outlet volume of the first unit area z01, the second unit area z02 and the third unit area z03. Therefore, the corresponding distribution distance is determined based on the left edge of the first surface m1. That is, in the case where there are two air intake directions K, the corresponding distribution distance of the unit area z0 is determined based on the side corresponding to the shorter distance between the unit area z0 and the corresponding side edge. For the unit area z0 located in the middle of the first surface m1, the distance between the unit area z0 in the middle and the two side edges of the first surface m1 is consistent, so the corresponding distribution distance of the unit area z0 in the middle can also be determined.

[0187] It can also be understood that if the first surface m1 has air intake on both sides along the first direction F1, the gas output from the air outlet c2 of the unit area z0 near the left side of the first surface m1 is substantially input from the air inlet c1 on the left side of the first surface m1. More specifically, the distribution distances corresponding to each unit area z0 on the portion from the edge area to the center area of ​​the first surface m1 can be determined based on the center of the first surface m1 along the first direction F1. Figure 5 In the illustrated situation, it can be seen that the air outlet holes c2 become denser toward the central area of ​​the first surface m1.

[0188] It should be noted that the first distribution distance n1, the second distribution distance n2 and the third distribution distance n3 are only schematic illustrations of the distribution distances. In the actual design process, the actual distribution distances can be determined in combination with the actual structure of the flow distribution component to facilitate the determination of the distribution density of the required air outlet holes c2 within the unit area z0 on the first surface m1.

[0189] The positive correlation trend refers to the relationship between the "distribution density of the pores c2 in the unit area z0 on the first surface m1" and the "distribution distance". When the "distribution distance" corresponding to the unit area z0 increases, the distribution density of the pores c2 in the unit area z0 also tends to increase, and when the "distribution distance" corresponding to the unit area z0 decreases, the distribution density of the pores c2 in the unit area z0 also tends to decrease. In other words, the increase or decrease of the "distribution distance" corresponding to the unit area z0 does not necessarily lead to an increase or decrease in the distribution density of the pores c2 in the unit area z0, as long as the "distribution density of the pores c2 in the unit area z0 on the first surface m1" and the "distribution distance" are generally positively correlated.

[0190] For example, Figure 6 For example, the distribution density of the first three unit area regions z0 of the air outlet c2 arranged along the first direction F1 are the first distribution density, the second distribution density and the third distribution density respectively. The first distribution density may be equal to the second distribution density, and both the first distribution density and the second distribution density are less than the third distribution density; the first distribution density may be less than the second distribution density, and the second distribution density is equal to the third distribution density; the first distribution density, the second distribution density and the third distribution density may increase in sequence. More specifically, the difference between the first distribution density and the second distribution density may be less than, equal to or greater than the difference between the second distribution density and the third distribution density. That is, as long as the distribution density of the air outlet c2 in the unit area region z0 on the first surface m1 is generally positively correlated with the distribution distance, no specific limitation is made here.

[0191] For example, Figure 7 For example, the corresponding distribution distances of two adjacent unit area regions z0 along the second direction F2 are equal, and the distribution density of the air outlet c2 in the two unit area regions z0 can be the same or different, as long as the distribution density relationship from the edge area on the left side of the first surface m1 to the central area of ​​the first surface m1, and from the edge area on the right side of the first surface m1 to the central area of ​​the first surface m1 can satisfy the above-mentioned distribution density relationship, and no specific limitation is made here.

[0192] In this way, after the shape, size and corresponding distribution distance of the unit area z0 are determined, the distribution density of the air outlet holes c2 within the unit area z0 on the first surface m1 can be determined.

[0193] Based on the same gas flow rate, when the distribution density of the gas outlet holes c2 in the unit area z0 on the first surface m1 is greater, the gas output of the gas outlet holes c2 in the unit area z0 will be greater. Correspondingly, when the distribution density of the gas outlet holes c2 in the unit area z0 on the first surface m1 is smaller, the gas output of the gas outlet holes c2 in the unit area z0 will be smaller.

[0194] Since the gas will not only encounter resistance during the transportation process, thus causing the loss of gas energy, but will also be discharged from the air outlet c2, resulting in a smaller flow rate of the remaining gas, thereby making the gas outlet volume of the air outlet c2 closer to the air inlet c1 greater than the gas outlet volume of the air outlet c2 farther away from the air inlet c1. Therefore, by configuring the distribution density of the air outlet c2 in the unit area z0 on the first surface m1 to be positively correlated with the corresponding distribution distance, the distribution density of the air outlet c2 in the unit area z0 on the first surface m1 can be controlled based on the distribution distance corresponding to the unit area z0 on the first surface m1 and the air inlet c1, so that the distribution density of the air outlet c2 in the unit area z0 far from the air inlet c1 is greater than the distribution density in the unit area z0 near the air inlet c1, thereby substantially increasing the gas outlet volume of the unit area z0 far from the air inlet c1 and reducing the gas outlet volume of the unit area z0 near the air inlet c1.

[0195] Therefore, the gas output corresponding to different unit area regions z0 can be controlled according to the position of the air inlet c1, which can reduce the difference in gas output between the unit area region z0 far away from the air inlet c1 and the unit area region z0 close to the air inlet c1, which is conducive to a more uniform distribution of gas in a wider area, thereby improving the uniformity of gas output in each area of ​​the flow distribution component, thereby improving the uniformity of flow distribution. In addition, during the gas flow process, the pressure near the air inlet is relatively high. By configuring the distribution density of the air outlet as described above, it is easier for the gas to flow from the area with higher pressure to the area with lower pressure, thereby balancing the pressure of the entire system, helping to regulate the pressure, thereby improving the stability of the gas supply, and further improving the uniformity of the flow distribution.

[0196] It should be noted that the flow distribution components provided in the embodiments of the present application can be applied to various fields that require flow distribution, such as the energy field (such as a fluidized bed for gas-solid separation), the chemical field (such as a chemical reactor), the environmental protection field (such as an adsorption tower), and the electronic and electrical field (such as semiconductor manufacturing). Taking the semiconductor manufacturing process as an example, when coating a substrate, the coating process used can be a coating process such as chemical vapor deposition (CVD) and atomic layer deposition (ALD), which is beneficial to improve the uniformity of the coating on the substrate. To facilitate the explanation of the various implementation methods provided in the embodiments of the present application, the following description will be given using the application of the flow distribution component in the coating process as an example, but it is not limited to this.

[0197] In some embodiments, the distribution density of the air outlet holes c2 on at least a portion of the unit area z0 within the at least a portion of the unit area z0 increases continuously with the increase of the distribution distance.

[0198] When the distribution density increases continuously, the gas can gradually and smoothly diffuse to a wider area during the flow process, forming a continuously changing pressure gradient. The stable pressure gradient guides the gas flow, so that the gas and the surface of the substrate can achieve better contact efficiency. In this way, the continuously changing relationship can be determined according to the gas flow requirements, thereby achieving the required gas distribution on the substrate surface.

[0199] In some embodiments, the distribution density of the air outlet holes c2 on at least a portion of the unit area z0 in the at least a portion of the unit area z0 increases in stages as the distribution distance increases.

[0200] When the distribution density increases in stages, pressure gradient changes will be formed in different stages, which will help control the flow of gas at the junction of different stages, so that the gas flow direction can be controlled in different areas.

[0201] In some embodiments, the distribution density of the air outlet holes c2 on at least a portion of the unit area z0 in the at least a portion of the unit area z0 increases irregularly with the increase of the distribution distance.

[0202] When the reaction area's demand for gas concentration and flow rate does not show a simple linear or regular change, the irregularly increasing distribution density of the gas outlet c2 can flexibly adjust the gas output at different positions to meet the gas distribution needs of complex-shaped workpieces or special reaction areas, making the reaction more complete and uniform, and increasing the product quantity.

[0203] Therefore, the changing trend of the distribution density can be controlled in accordance with the gas demand of each region, and no specific restrictions are made here. It should be noted that the above-mentioned "continuous increase with the increase of distribution distance", "stage increase with the increase of distribution distance" and "irregular increase with the increase of distribution distance" can be flexibly combined, and no specific restrictions are made here.

[0204] In some embodiments, the distribution density of the air outlet holes c2 on at least a portion of the unit area z0 within the at least a portion of the unit area z0 increases according to a first preset rule as the distribution distance increases.

[0205] The first preset rule refers to the rule regarding how the distribution density of the air outlet holes c2 changes with the distribution distance.

[0206] Different locations have different requirements for the concentration of the reaction gas. By increasing the distribution density of the gas outlet c2 according to the first preset rule, the flow rate of the gas at different locations can be more accurately controlled, thereby forming the required film thickness and component distribution on the substrate, and improving product quality and production efficiency.

[0207] In some embodiments, the first preset rule includes at least one of a number series rule, a function relationship rule, and a recursive logic rule.

[0208] The sequence rule refers to a rule that arranges the changes in the distribution density of the vents c2 in the form of a sequence. For example, taking a certain position in the unit area z0 as the starting point, as the distribution distance increases, the distribution density of the vents c2 increases in an arithmetic sequence, a geometric sequence or other specific sequence.

[0209] The functional relationship law is a law that uses a continuous mathematical function to describe the relationship between the distribution density and distribution distance of the vent holes c2. For example, the functional relationship law can be a linear function, a quadratic function, or an exponential function.

[0210] The recursive logic rule refers to the deduction of the distribution density of the vents c2 of the next unit area z0 through the logical relationship based on the distribution density information of the vents c2 of the previous one or several unit areas z0. This rule reflects the correlation and logic of the change of distribution density.

[0211] When the first preset rule includes a sequence rule, not only can the distribution density of the air outlet c2 be changed more accurately according to the preset position, and the gas flow rate can be more accurately controlled, but it is also easy to implement and adjust. In addition, when the distribution of the flow distribution part is controlled in an automated manner, since digital logic is usually processed based on discrete values, the sequence rule can be better adapted to the digital logic, making it easier to control the distribution of the air outlet c2 and the release of gas in an automated manner, further improving the degree of automation.

[0212] When the first preset rule includes a functional relationship rule, not only can more accurate continuous change control of gas distribution be achieved, but also a more complex distribution density change trend of the gas outlet holes c2 can be provided.

[0213] When the first preset rule includes a recursive logic rule, since the recursive logic rule can make decisions and adjustments based on local information, when dealing with the design of flow distribution parts with complex shapes or irregular areas, it is possible to start from the local area and gradually build a more suitable distribution of the air outlets c2, thereby improving the flexibility and adaptability of the design. Since this rule adjusts the distribution density of the subsequent air outlets c2 according to the previous state, the flow distribution parts have a certain degree of adaptability, which can compensate for the impact of factors such as component aging and environmental changes on gas distribution to a certain extent, thereby improving the stability and effectiveness of gas distribution.

[0214] Therefore, when the first preset rule includes at least one of a sequence rule, a function relationship rule, and a recursive logic rule, it can not only improve the accuracy and flexibility of gas distribution, but also enhance the adaptability and stability of the flow distribution component, which is convenient for designing the flow distribution component. One or more of these rules can be used flexibly, and no specific restrictions are made here.

[0215] In some embodiments, the distribution density of the air outlet holes c2 on at least a portion of the unit area z0 within the at least a portion of the unit area z0 increases in a first preset series as the distribution distance increases.

[0216] The "first preset sequence" refers to a preset sequence used to describe the law of change of the distribution density of the gas outlet c2 with the distribution distance. It provides an accurate and discrete method for the design of the flow distribution component and the gas distribution control.

[0217] The advantages brought by configuring the first preset number series can be understood by referring to the number series rules illustrated in some of the aforementioned embodiments, and will not be elaborated here.

[0218] In some embodiments, the first preset number sequence is configured to have multiple number sequence types; or, the first preset number sequence is configured to have one number sequence type.

[0219] When the first preset sequence is configured to have one sequence type, it can not only simplify the design and control, meet the requirements of the required process, but also facilitate maintenance and troubleshooting. For example, if the gas distribution is abnormal, the maintenance personnel can check whether the distribution density of the gas outlet c2 meets the requirements one by one according to the known single sequence type and its rules, which makes it easier to find the blocked or damaged gas outlet c2 and shorten the maintenance time.

[0220] When the first preset sequence is configured to have multiple sequence types, it can not only adapt to different process requirements, but also improve the versatility and flexibility of the flow distribution parts. For example, the core computing area of ​​the chip requires extremely high-precision uniform deposition of the film layer, while the edge of the chip needs to pay attention to the abnormal film thickness caused by the edge effect. In this way, by using different sequence types for different areas, the consistency of the film layer can be improved.

[0221] In some embodiments, the first preset number sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence.

[0222] In the case where the first preset sequence includes a geometric sequence, when the distribution density increases with the distribution distance in a geometric sequence, it means that the farther away from the air inlet c1, the greater the increase in the distribution density of the air outlet c2 is in geometric proportion. In this way, during the gas transmission process, as the gas diffuses from the air inlet c1 to a distance and the pressure gradually decreases, by increasing the distribution density of the air outlet c2 in a geometric manner, the air pressure balance of each area can be adjusted more accurately, which is conducive to ensuring that each area has a suitable gas discharge volume, maintaining the overall air pressure stability, and improving the situation where the local pressure is too high or too low to affect the gas flow. At the same time, it can also better adapt to the characteristics of the gradual attenuation of gas energy during the flow process, so that the gas can flow out more smoothly through the air outlet c2, reducing the energy waste such as gas retention due to insufficient energy, thereby improving the energy utilization efficiency.

[0223] When the first preset number sequence includes an arithmetic progression, the distribution density of the gas outlet holes c2 can be made to change evenly within the unit area z0, which is beneficial to more evenly distribute the gas flow rate. At the same time, it is also beneficial to manufacturing and design.

[0224] In the case where the first preset number sequence includes the Fibonacci sequence, when the distribution density of the vent c2 changes according to the Fibonacci sequence, it can simulate the efficiency and rationality of gas flow to a certain extent, and is more conducive to adjusting the gas flow in combination with the characteristics of gas flow. At the same time, since the ratio of two adjacent terms of the Fibonacci sequence gradually approaches the golden ratio, this characteristic allows the distribution of the vent c2 to have a reasonable density increase with the increase in distribution distance, and to improve the situation of excessive density or sparseness. Under limited resource conditions (such as the material used to make the vent, the space occupied, etc.), a more optimized resource allocation can be achieved, which is conducive to improving the uniformity of gas outlet.

[0225] In the case where the first preset number sequence includes the Dayan number sequence, the numerical regularity of the Dayan number sequence has a certain complexity. Since there may be a variety of interference factors affecting the flow and distribution of the gas, such as airflow disturbances in different directions, temperature gradient changes, etc., the distribution density change of the outlet holes c2 of the Dayan number sequence can better adapt to such a complex environment, and through its irregular but inherently regular density adjustment, the uniformity of the outlet gas can be more effectively improved in a complex environment.

[0226] In this way, the characteristics of different regions can be analyzed, and combined with the structure of the first airway p1, at least one of the geometric sequence, arithmetic sequence, Fibonacci sequence, and Dayan sequence can be used to configure the distribution density of the air outlet c2. For example, the Dayan sequence is used to configure the air outlet c2 in a complex area, the arithmetic sequence is used to configure the air outlet c2 in a more stable area, the Fibonacci sequence is used to configure the air outlet c2 in an area where the gas flow characteristics need to be combined, and the geometric sequence is used to configure the air outlet c2 in a wider area. Of course, it is not limited to this. In other words, for the first airway p1 with different structures, one of the geometric sequence, arithmetic sequence, Fibonacci sequence, and Dayan sequence can be used to configure the air outlet c2, and a combination of at least two of the geometric sequence, arithmetic sequence, Fibonacci sequence, and Dayan sequence can also be used to configure the air outlet c2, thereby further improving the uniformity of the air outlet volume in each area.

[0227] In this way, by configuring the distribution density of the air outlet c2 in the unit area z0 to increase regularly with the increase of the distribution distance, the corresponding air outlet volume can be controlled by utilizing the corresponding rule. This is not only beneficial to the arrangement and production of the air outlet c2 and convenient for controlling the uniformity of the air outlet volume, but also different first preset series can be selected according to specific usage conditions.

[0228] In some embodiments, please refer to Figures 1 to 3The main body 131 has at least one air inlet hole c1 connected to the first air channel p1, and the distribution distance is the minimum distance between the unit area region z0 and the at least one air inlet hole c1 along the extension direction of the first air channel p1.

[0229] “The distribution distance is the minimum distance between the unit area area z0 and the at least one air inlet hole c1 along the extension direction of the first air duct p1” means that, when there is one air inlet hole c1, the distribution distance is the minimum distance between the unit area area z0 and the air inlet hole c1 along the extension direction of the first air duct p1; when there are multiple air inlet holes c1, the minimum distance between the unit area area z0 and each air inlet hole c1 along the extension direction of the first air duct p1 is the distribution distance.

[0230] The extension direction of the first airway p1 refers to the direction in which the first airway p1 extends, but does not limit the shape of the first airway p1. The first airway p1 can be a channel extending in one direction, or a structure extending in multiple directions. For example, if a channel extends in one direction, the channel is configured to extend in a straight line. If a channel extends in multiple directions, the channel can be configured to extend in a curved line or a broken line. Figure 2 and Figure 3 As an example, it is illustrated that the first air channel p1 is extended along the first direction F1, and the extending direction of the first air channel p1 is the first direction F1.

[0231] Since the corresponding distribution distance of each unit area z0 is measured based on the minimum distance, the distribution density of the air outlet c2 on the unit area z0 is determined based on the minimum distance. Therefore, when designing the flow distribution parts, the size, number and distribution density of the air outlet c2 can be set according to this distance relationship.

[0232] Although each air inlet c1 has an effect on the gas output per unit area z0, determining the distribution density of the air outlet c2 based on the aforementioned minimum distance can make the gas more uniform during transmission. Specifically, from the perspective of gas dynamics, when the gas flows in the first airway p1, the path along the minimum distance is the easiest and smoothest flow direction, and the gas tends to be transmitted quickly along this path. The gas transmitted along this path will have a greater impact on the corresponding unit area z0, so determining the distribution density of the air outlet c2 on the unit area z0 based on the aforementioned minimum distance is conducive to further improving the uniformity of the flow distribution. In addition, during the flow of gas, it will be affected by many factors, such as the bending, branching, and intersection of the airway, which makes the flow of gas flow complicated. Considering the distribution density of the air outlet c2 based on the minimum distance can not only compensate for the difference in gas distribution caused by changes in airflow by adjusting the distribution of the air outlet c2, and improve the uniformity of the overall gas distribution, but also simplify the analysis of the airflow and facilitate the setting of the flow distribution parts.

[0233] Of course, in some other embodiments, the distribution distance when the air intake c1 hole is set to multiple can also be determined based on weighted distance rules, rules based on the geometric center, resistance-distance rules, attenuation-distance rules, partition coordination rules, etc., and no specific restrictions are made here.

[0234] Specifically, the "rule based on weighted distance" means that weighted calculation is performed based on factors such as gas flow, pressure, and gas properties of different inlet holes c1. For example, if the gas flow of a certain inlet hole c1 is larger and its influence weight on the unit area z0 is higher, then when calculating the distribution distance, the distance weight from the inlet hole c1 to the unit area z0 will be increased accordingly.

[0235] “Based on the rule based on the geometric center” means that the distance from the unit area z0 to the center of the geometric figure formed by the multiple air inlet holes c1 can be used as a measure of the distribution distance.

[0236] "Based on the resistance-distance rule" means that when the gas flows in the first airway p1, it will be affected by factors such as airway wall friction and local resistance in the bend. According to the principles of fluid mechanics, the total resistance along the airway from each air inlet c1 to the unit area z0 is calculated. The resistance is related to the airway length, diameter, roughness, and gas flow rate. In this way, the distribution distance corresponding to the path with high resistance is large, which means that the gas is more inclined to reach the unit area z0 through the path with low resistance, which helps to optimize the gas distribution.

[0237] "Based on the attenuation-distance rule" means that the concentration of some gases will decay due to factors such as diffusion during transmission. The concentration change from the air inlet to the unit area can be determined by establishing a gas concentration decay model. For another example, the gas temperature may also decay during transmission, especially in long-distance or non-adiabatic airways. Temperature changes will affect the physical properties of the gas, and the temperature decay from the air inlet c1 to the unit area z0 can be calculated using models such as the heat conduction equation.

[0238] "Based on the partition coordination rule" means that in each unit area z0, when determining the distribution density of the air outlet c2 based on the minimum distance, the main factors affecting the unit area z0 by the air inlet are considered. At the same time, by adjusting the distribution density of the air outlet c2 at the boundary of the unit area z0, coordination between unit area z0 is achieved, thereby balancing the influence of other air inlets.

[0239] In some embodiments, please refer to Figures 1 to 3 The distance between two adjacent outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 in the extension direction of the first air channel p1 is negatively correlated with the first area center distance. The first area center distance is the minimum distance between the center of the area between the two outlet holes c2 and the at least one air inlet hole c1 in the extension direction of the first air channel p1.

[0240] The negative correlation trend refers to the relationship between "the distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 in the extension direction of the first air channel p1" and "the center distance of the first area". When the "center distance of the first area" increases, the "distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 in the extension direction of the first air channel p1" tends to decrease, and when the "center distance of the first area" decreases, the "distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 in the extension direction of the first air channel p1" tends to increase. In other words, the increase or decrease of the "center distance of the first area" does not necessarily lead to a decrease or increase in the "distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 in the extension direction of the first air channel p1", as long as the "distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 in the extension direction of the first air channel p1" and the "center distance of the first area" are substantially negatively correlated. The implementation and understanding of the negative correlation trend can refer to the positive correlation trend illustrated above, and will not be repeated here. It can be understood that the negative correlation trend is the opposite trend to the positive correlation trend.

[0241] For the unit area region z0 with the center distance of the first area determined by the same air inlet hole c1, as the center distance of the first area increases (i.e., farther away from the corresponding air inlet hole c1), the corresponding spacing of the air outlet holes c2 increases, which means that in the unit area region z0 close to the air inlet hole c1, the distribution of the air outlet holes c2 is denser, thereby making the distribution of the gas more uniform.

[0242] In some embodiments, in at least part of the unit area z0, the distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 in the extension direction of the first air channel p1 continuously increases as the center distance of the first area decreases.

[0243] It can be understood that the distribution of the air outlet c2 formed by "continuously increasing with decreasing distance from the center of the first area" can be roughly understood by referring to the distribution of the air outlet c2 formed by "the distribution density of the air outlet c2 on at least part of the unit area z0 in the at least part of the unit area z0 continuously increases with increasing distribution distance" illustrated in some of the aforementioned embodiments, and the related advantages can also be understood by reference, which will not be repeated here.

[0244] In some embodiments, in at least part of the unit area z0, the distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 increases in stages as the center distance of the first area decreases.

[0245] It can be understood that the distribution of the air outlet c2 formed by "increasing in stages with decreasing distance from the center of the first area" can be roughly understood by referring to the distribution of the air outlet c2 formed by "the distribution density of the air outlet c2 on at least part of the unit area z0 in the at least part of the unit area z0 increases in stages with increasing distribution distance" illustrated in some of the aforementioned embodiments, and the related advantages can also be understood by reference, which will not be repeated here.

[0246] In some embodiments, in at least part of the unit area z0, the distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 increases irregularly as the center distance of the first area decreases.

[0247] It can be understood that the distribution of the air outlet c2 formed by "increasing irregularly with decreasing distance from the center of the first area" can be roughly understood by referring to the distribution of the air outlet c2 formed by "the distribution density of the air outlet c2 on at least part of the unit area z0 in the at least part of the unit area z0 increases irregularly with increasing distribution distance" illustrated in some of the aforementioned embodiments, and the related advantages can also be understood by reference, which will not be repeated here.

[0248] In some embodiments, in at least part of the unit area z0, the distance between two adjacent air outlets c2 on the first surface m1 along the extension direction of the first air channel p1 increases according to a second preset rule as the center distance of the first area decreases.

[0249] It can be understood that the distribution of the air outlet c2 formed by "increasing according to the second preset rule as the distance from the center of the first area decreases" can be roughly understood by referring to the distribution of the air outlet c2 formed by "the distribution density of the air outlet c2 on at least part of the unit area z0 within the at least part of the unit area z0 increases according to the first preset rule as the distribution distance increases" illustrated in some of the aforementioned embodiments, and the related advantages possessed can also be understood by reference, which will not be repeated here.

[0250] In addition, in combination with some control methods of "the distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1" illustrated above, by controlling "the distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 in the extension direction of the first air channel p1", it is also convenient to control the distribution of the air outlet holes c2.

[0251] In some embodiments, please refer to Figure 5 The diameter d of the outlet hole c2 on the first surface m1 is positively correlated with the first hole center distance. The first hole center distance is the minimum distance between the center of the outlet hole c2 and the center of the at least one inlet hole c1 along the extension direction of the first air channel p1.

[0252] The understanding of the positive correlation trend can be understood by referring to the situations illustrated in some of the aforementioned embodiments, which will not be elaborated here.

[0253] For the unit area z0 in which the center distance of the first hole is determined by the same air inlet hole c1, as the center distance of the first hole increases (i.e., farther away from the corresponding air inlet hole c1), the aperture of the air outlet hole c2 becomes larger, which means that in the unit area z0 close to the air inlet hole c1, the distribution of the air outlet holes c2 is denser, thereby making the distribution of the gas more uniform.

[0254] In some embodiments, in at least a portion of the unit area z0, the aperture d of the air outlet holes c2 on the first surface m1 increases continuously as the distance from the center of the first hole increases.

[0255] It can be understood that the distribution of the air outlet c2 formed by "continuously increasing with the increase of the distance from the center of the first hole" can be roughly understood by referring to the distribution of the air outlet c2 formed by "the distribution density of the air outlet c2 on at least part of the unit area z0 in the at least part of the unit area z0 continuously increases with the increase of the distribution distance" illustrated in some of the aforementioned embodiments, and the relevant advantages possessed can also be understood by reference, which will not be repeated here.

[0256] In some embodiments, in at least a portion of the unit area z0, the aperture d of the air outlet holes c2 on the first surface m1 increases in stages as the distance from the center of the first hole increases.

[0257] It can be understood that the distribution of the air outlet c2 formed by "increasing in stages with the increase of the distance from the center of the first hole" can be roughly understood by referring to the distribution of the air outlet c2 formed by "the distribution density of the air outlet c2 on at least part of the unit area z0 in the at least part of the unit area z0 increases in stages with the increase of the distribution distance" illustrated in some of the aforementioned embodiments, and the relevant advantages possessed can also be understood by reference, which will not be repeated here.

[0258] In some embodiments, in at least a portion of the unit area z0, the aperture d of the air outlet hole c2 on the first surface m1 increases irregularly as the distance from the center of the first hole increases.

[0259] It can be understood that the distribution of the air outlet c2 formed by "increasing irregularly with the increase of the distance from the center of the first hole" can be roughly understood by referring to the distribution of the air outlet c2 formed by "the distribution density of the air outlet c2 on at least part of the unit area z0 in the at least part of the unit area z0 increases irregularly with the increase of the distribution distance" illustrated in some of the aforementioned embodiments, and the related advantages can also be understood by reference, which will not be repeated here.

[0260] In some embodiments, in at least a portion of the unit area z0, the aperture d of the air outlet holes c2 on the first surface m1 increases according to a third preset rule as the distance from the center of the first hole increases.

[0261] It can be understood that the distribution of the air outlet c2 formed by "increasing according to the third preset rule with increasing distance from the center of the first hole" can be roughly understood by referring to the distribution of the air outlet c2 formed by "the distribution density of the air outlet c2 on at least part of the unit area z0 within the at least part of the unit area z0 increases according to the first preset rule with increasing distribution distance" illustrated in some of the aforementioned embodiments, and the related advantages possessed can also be understood by reference, which will not be repeated here.

[0262] In addition, by combining and referring to some control methods of “aperture d of the air outlet holes c2 on the first surface m1 ” illustrated above, by controlling “aperture d of the air outlet holes c2 on the first surface m1 ”, it is also convenient to control the distribution of the air outlet holes c2 .

[0263] In some embodiments, at least one of the second preset rule and the third preset rule is a target rule, and the target rule satisfies one of the first rule, the second rule, and the third rule. The first rule is that the target rule includes at least one of a sequence rule, a function relationship rule, and a recursive logic rule. The second rule is that the target rule includes a first target sequence rule, and the sequence corresponding to the first target sequence rule is configured to have multiple sequence types or one sequence type. The third rule is that the target rule includes a second target sequence rule, and the sequence corresponding to the second target sequence rule includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a large derivative sequence.

[0264] It can be understood that the second preset rule can be the target rule, the third preset rule can be the target rule, or both the second preset rule and the third preset rule can be the target rule, and no specific limitation is made here. The relevant implementation methods and advantages of the target rule can be understood with reference to the first preset rule illustrated above, and no further description is given here. In specific implementation, the second preset rule and the third preset rule can be the same or different, and no specific limitation is made here.

[0265] In some embodiments, please refer to Figures 1 to 3 The first air passage p1 has a first end p11 and a second end p12 which are arranged opposite to each other along the extension direction of the first air passage p1. At least one of the first end p11 and the second end p12 is an air inlet end pt.

[0266] For example, Figures 1 to 3 For example, the extension direction of the first air channel p1 is the first direction F1, the direction from the first end p11 to the second end p12 is the first direction F1, and the first end p11 and the second end p12 are both air inlet ends pt. For another example, the first end p11 or the second end p12 can be the air inlet end pt. Of course, the extension direction of the first air channel p1 can also be understood and implemented with reference to the contents illustrated in some of the aforementioned embodiments, and no specific limitation is made here.

[0267] In the case of air intake at the end of the first airway p1, it is convenient to install the relevant air intake structure and perform relevant maintenance. In the case that the first end p11 and the second end p12 are both air intake ends pt, it is not only conducive to making the gas more evenly distributed in the first airway p1, but also can reduce airflow resistance and pressure loss. It can be understood that in the case that the first end p11 and the second end p12 are both air intake ends pt, the gas can enter from the first end p11 and the second end p12 at the same time, and intersect and mix with each other in the first airway p1. In this way, the gas can be more effectively distributed evenly in the extension direction of the entire first airway p1, so that the gas flow rate, pressure, etc. of each part tend to be relatively balanced, thereby improving the uniformity of the gas distribution in the first airway p1. At the same time, when the air intake pressure at one end fluctuates, the air intake at the other end can compensate and adjust to a certain extent, so that the total amount and pressure of the gas entering the first airway p1 remain relatively stable, enhancing the ability of the entire system to cope with air intake pressure fluctuations, and improving the reliability and stability of the system operation. When large-scale equipment is used for coating, configuring both the first end p11 and the second end p12 as air inlet ends pt is more conducive to meeting the uniformity requirements of large-scale equipment.

[0268] In some embodiments, please refer to Figures 1 to 5 The main body 131 has a plurality of air inlet holes c1 connected to the first air channel p1, and the distribution distance is the minimum distance between the unit area region z0 and the plurality of air inlet holes c1 along the extension direction of the first air channel p1. The first air channel p1 has a first end p11 and a second end p12 arranged relatively along the extension direction of the first air channel p1, and the first end p11 and the second end p12 are both configured as air inlet ends pt correspondingly connected to the plurality of air inlet holes c1. Among them, in at least part of the unit area region z0, the distance between two adjacent air outlet holes c2 on the first surface m1 along the extension direction of the first air channel p1 in the extension direction of the first air channel p1 increases in a geometric progression, an arithmetic progression, a Fibonacci sequence, and a large derivative sequence as the distance from the center of the second region decreases. The center distance of the second area is the minimum distance among the first corresponding distances, and the first corresponding distance includes the distance between the center of the area between the two air outlet holes c2 and the first end p11 along the extension direction of the first air channel p1, and the distance between the center of the area between the two air outlet holes c2 and the second end p12 along the extension direction of the first air channel p1.

[0269] Specifically, both the first end p11 and the second end p12 are connected to the plurality of air inlet holes c1, that is, at least one of the plurality of air inlet holes c1 is connected to the first end p11, and the remaining air inlet holes c1 are connected to the second end p12. Figures 1 to 3For example, two air inlet holes c1 are provided, and two air inlet holes c1 are provided on the second surface m2. One air inlet hole c1 is communicated with the first end p11, and the other air inlet hole c1 is communicated with the first end p12.

[0270] The second area center distance is determined by the smallest of "the distance between the center of the area between the two air outlet holes c2 and the first end p11 along the extension direction of the first air channel p1" and "the distance between the center of the area between the two air outlet holes c2 and the second end p12 along the extension direction of the first air channel p1".

[0271] The relevant implementation methods and related advantages of the center distance of the second area, as well as "increasing at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence as the center distance of the second area decreases", can be understood by referring to the relevant implementation methods and related advantages of the center distance of the first area involved in some of the aforementioned embodiments, and will not be repeated here.

[0272] It can be understood that in other embodiments, the distance between two adjacent air outlets c2 on the first surface m1 along the extension direction of the first air channel p1 in at least part of the unit area z0 in the extension direction of the first air channel p1 is negatively correlated with the center distance of the second area. In some other embodiments, the distance between two adjacent air outlets c2 on the first surface m1 along the extension direction of the first air channel p1 in at least part of the unit area z0 in the extension direction of the first air channel p1 increases continuously as the center distance of the second area decreases, or increases in stages as the center distance of the second area decreases, or increases irregularly as the center distance of the second area decreases. No specific restrictions or elaborations are made here.

[0273] In some embodiments, the main body 131 has a plurality of air inlet holes c1 connected to the first air channel p1, and the distribution distance is the minimum distance between the unit area z0 and the plurality of air inlet holes c1 along the extension direction of the first air channel p1. The first air channel p1 has a first end p11 and a second end p12 arranged relatively along the extension direction of the first air channel p1, and the first end p11 and the second end p12 are both configured as air inlet ends pt correspondingly connected to the plurality of air inlet holes c1. Among them, in at least part of the unit area z0, the aperture d of the air outlet hole c2 on the first surface m1 increases in a geometric progression, an arithmetic progression, a Fibonacci sequence, and a large derivative sequence as the center distance of the second hole increases. The second hole center distance is the minimum distance among the second corresponding distances, and the second corresponding distance includes the distance between the center of the air outlet hole c2 and the first end p11 along the extension direction of the first air channel p1, and the distance between the center of the air outlet hole c2 and the second end p12 along the extension direction of the first air channel p1.

[0274] Specifically, the related implementations between the “first end p11 and the second end p12” and the air inlet end pt may refer to the situations illustrated in some of the aforementioned embodiments, which will not be described in detail here.

[0275] The second hole center distance is determined by the smallest of "the distance between the center of the air outlet c2 and the first end p11 along the extension direction of the first air channel p1" and "the distance between the center of the air outlet c2 and the second end p12 along the extension direction of the first air channel p1".

[0276] The relevant implementation methods and related advantages of the second hole center distance, as well as "increasing at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence with the increase of the second hole center distance" can be understood by referring to the relevant implementation methods and related advantages of the first hole center distance involved in some of the aforementioned embodiments, and will not be repeated here.

[0277] It can be understood that in other embodiments, the aperture d of the air outlet hole c2 on the first surface m1 may be positively correlated with the center distance of the second hole in at least part of the unit area z0. In some other embodiments, the aperture d of the air outlet hole c2 on the first surface m1 may be continuously increased with the increase of the center distance of the second hole in at least part of the unit area z0, or may be increased in stages with the increase of the center distance of the second hole, or may be increased irregularly with the increase of the center distance of the second hole. No specific limitation or elaboration is made here.

[0278] Therefore, in combination with the various embodiments illustrated above, the distribution density of the air outlet c2 can be controlled by controlling the hole spacing, the distribution density of the air outlet c2 can be controlled by controlling the pore size, or the distribution density of the air outlet c2 can be controlled by controlling the spacing and the pore size, without specific limitation here.

[0279] It should be noted that the first air channel p1 may have multiple ends or no ends (for example, the first air channel p1 may be extended along a closed figure). When the first air channel p1 has multiple ends, at least part of the ends of the first air channel p1 may be configured as air inlet ends. The first air channel p1 may have multiple air inlet ends or one air inlet end. For example, when the first air channel p1 has two ends (i.e., the first end p11 and the second end p12) arranged opposite to each other along the extension direction of the first air channel p1, at least one of the first end p11 and the second end p12 may be configured as the air inlet end, or an air inlet hole c1 may be provided in any part of the first end p11 and the second end p12 on the first air channel p1, and no specific restrictions are made here. In this way, the distribution density of the air outlet holes c2 can be flexibly adjusted by configuring the extension structure of the first air channel p1, the position of the air inlet hole c1, the position of the air inlet end pt, and the aforementioned spacing and aperture, and no specific restrictions are made here.

[0280] In some embodiments, please refer to Figure 2 , Figure 4 and Figure 5 , when both the first end p11 and the second end p12 are air inlet ends pt, the first air passage p1 is extended along the first direction F1, and a plane passing through the center point of the first air passage p1 and perpendicular to the first direction F1 divides the first air passage p1 into two sub-passages. Figure 5 From the perspective of FIG. 1 , a plane E that divides the first airway p1 into two sub-channels is indicated by a dotted line.

[0281] Among them, for each sub-channel, along the direction from the center point to the air inlet end pt of the sub-channel, the spacing between two adjacent air outlet holes c2 along the first direction F1 on the first surface m1 in the first direction D1 is set in at least one of a geometric progression, an arithmetic progression, a Fibonacci sequence, and a Dayan sequence; the direction from the center point to the air inlet end pt is parallel to the first direction F1; and / or, for each sub-channel, along the direction from the air inlet end pt of the sub-channel to the center point, the aperture d of the air outlet holes c2 on the first surface m1 is set in at least one of a geometric progression, an arithmetic progression, a Fibonacci sequence, and a Dayan sequence; the direction from the air inlet end pt to the center point is parallel to the first direction F1.

[0282] In this way, in the case of air intake at both ends, the distribution density of the air outlet holes c2 can be adjusted by controlling the hole spacing and / or hole diameter. It can be set according to the specific use situation and is not specifically limited here.

[0283] In some embodiments, all the outlet holes c2 are arranged in multiple rows on the first surface m1 along a direction intersecting with the extension direction of the first air channel p1. In at least one row of outlet holes c2, the distribution density of the outlet holes c2 within a unit area z0 on the first surface m1 is positively correlated with the distribution distance.

[0284] Exemplarily, all the air outlet holes c2 may be arranged in a plurality of rows along the second direction F2 on the first surface m1 , and each row of air outlet holes c2 may be disposed along the first direction F1 on the first surface m1 .

[0285] In this way, the air outlet holes c2 on the first surface m1 can be arranged in multiple rows, and the distribution density of the air outlet holes c2 can be controlled by controlling the distribution of the air outlet holes c2 in the row, so that the distribution density of the air outlet holes c2 can be controlled more flexibly. It should be noted that the implementation methods and advantages related to the positive correlation trend can refer to the contents illustrated in some of the aforementioned embodiments, which will not be repeated here.

[0286] In some embodiments, please refer to Figure 4 and Figure 5 , and combined with reference Figure 8, a plurality of first surfaces m1 are provided, all first surfaces m1 are arranged in sequence along a direction intersecting with the extension direction of the first gas channel p1, and the gas outlet holes c2 on all first surfaces m1 are arranged toward the same side. All gas outlet holes c2 on each first surface m1 constitute a gas outlet hole group T. Among all gas outlet hole groups T, there is a first gas outlet hole group T1 for outputting process gas, and a second gas outlet hole group T2 for outputting barrier gas. The total opening area of ​​the first gas outlet hole group T1 is smaller than the total opening area of ​​the second gas outlet hole group T2.

[0287] For example, Figure 4 , Figure 5 and Figure 8 For example, the extension direction of the first air channel p1 may be the first direction F1, and all the first surfaces m1 may be arranged in sequence along the second direction F2.

[0288] In this way, the gas volume of the output process gas is substantially smaller than the gas volume of the output barrier gas, thereby facilitating the barrier gas to block the corresponding adjacent process gas.

[0289] In some embodiments, please refer to Figure 4 and Figure 5 , and combined with reference Figure 8 , the aperture d of the air outlet holes c2 in the first air outlet hole group T1 is equal to the aperture d of the air outlet holes c2 in the second air outlet hole group T2.

[0290] In this way, based on the same aperture, it is convenient to control the total opening area of ​​the first air outlet hole group T1 and the total opening area of ​​the second air outlet hole group T2 by controlling the interval between two adjacent air outlet holes c2.

[0291] In some embodiments, please refer to Figure 4 , Figure 5 and Figure 8 The aperture d of the air outlet holes c2 in the first air outlet hole group T1 and the aperture d of the air outlet holes c2 in the second air outlet hole group T2 are both 0.1 mm to 30 mm. For example, the aperture d can be 0.1 mm, 0.2 mm, 0.5 mm, 1 mm, 2 mm, 5 mm, 7 mm, 10 mm, 13 mm, 15 mm, 18 mm, 20 mm, 22 mm, 26 mm or 30 mm.

[0292] The smaller aperture d can not only realize the trace and more precise release of gas, but also make the gas ejected in a finer fluid form, increase the contact area between the gas and the surrounding environment, and promote the diffusion and mixing of gas in local areas. The larger aperture d can not only provide a higher gas flow rate and flow rate, so that the gas covers a larger area more quickly, but also form the required gas flow pattern in a larger space, further optimizing the gas distribution. It should be noted that the smaller aperture d and the larger aperture d are relative, and the relative size of the aperture d is different for substrates of different sizes. The aperture d of the air outlet c2 in the first air outlet group T1 and the aperture d of the air outlet c2 in the second air outlet group T2 can be controlled according to the required distribution of the air outlet c2, and no specific restrictions are made here. When the aperture d is 0.1mm to 30mm, it is also convenient to make the corresponding air outlet c2.

[0293] In some embodiments, the minimum distance between two adjacent air outlet holes c2 in the first air outlet hole group T1 is equal to the minimum distance between two adjacent air outlet holes c2 in the second air outlet hole group T1.

[0294] In this way, it is advantageous to perform differentiated settings based on the same quantity, so as to control the total opening area of ​​the first air outlet hole group T1 and the total opening area of ​​the second air outlet hole group T2.

[0295] In some embodiments, the minimum distance between two adjacent air outlet holes c2 in the first air outlet hole group T1 and the minimum distance between two adjacent air outlet holes c2 in the second air outlet hole group T1 are both 1 mm to 50 mm.

[0296] Exemplarily, the minimum spacing may be 1 mm, 3 mm, 8 mm, 10 mm, 14 mm, 16 mm, 20 mm, 25 mm, 35 mm, 40 mm, 46 mm, or 50 mm.

[0297] The range of the minimum spacing can be understood with reference to the range of the apertures illustrated above. Unlike the aperture, when the apertures are the same, the smaller the spacing between two adjacent air outlet holes c2 on the unit area z0, the greater the distribution density of the air outlet holes c2 on the unit area z0. When the spacing is the same, the larger the aperture of the air outlet holes c2 on the unit area z0, the greater the distribution density of the air outlet holes c2 on the unit area z0. When the apertures and / or spacings are different, the distribution density of the air outlet holes c2 on the unit area z0 can be considered in combination with the comprehensive effect of the apertures and spacings. When the minimum spacing is 1 mm to 50 mm, it is also convenient to make the corresponding air outlet holes c2.

[0298] In some embodiments, please refer to Figure 4 and Figure 5 , and combined with reference Figure 8 , for the outlet holes c2 in the first outlet hole group T1, the distribution density of the outlet holes c2 in the unit area z0 increases in a first arithmetic progression as the distribution distance increases. For the outlet holes c2 in the second outlet hole group T2, the distribution density of the outlet holes c2 in the unit area z0 increases in a second arithmetic progression as the distribution distance increases. The first arithmetic progression and the second arithmetic progression meet a preset condition, and the preset condition includes at least one of the following items: the first item, the tolerance of the first arithmetic progression is greater than the tolerance of the second arithmetic progression; the second item, the distribution density of the first item in the first arithmetic progression is equal to the distribution density of the first item in the second arithmetic progression.

[0299] For a vent group T, the larger the tolerance of the vent group T is, the faster the density of the vent c2 increases, and the greater the change in the distribution density of the vent c2 is, based on the positive correlation trend mentioned above. In this way, compared with the control of the output volume of the barrier gas, the control of the output volume of the process gas is more significant. In this way, not only can the uniformity of the output volume of the process gas be controlled, but also the influence of the pressure change caused by the output barrier gas on the process gas can be reduced, thereby further improving the uniformity of the output of the process gas.

[0300] The “first distribution density” refers to the distribution density of the vents c2 on the first unit area z0. The first unit area z0 can be determined based on the distribution distance. In the embodiment of the present application, the unit area z0 with the smallest distribution distance is the first unit area z0.

[0301] In this way, the total opening area of ​​the first air outlet hole group T1 and the total opening area of ​​the second air outlet hole group T2 can be controlled based on the tolerance and / or the leading term distribution density of the arithmetic progression.

[0302] In some embodiments, please refer to Figure 4 and Figure 5 , and combined with reference Figure 8 , the tolerance of the first arithmetic progression is 0.002mm to 20mm, and the tolerance of the second arithmetic progression is 0.001mm to 19mm.

[0303] The tolerance of the first arithmetic sequence can be any value in the range of 0.002 mm to 20 mm, and the tolerance of the second arithmetic sequence can be any value in the range of 0.001 mm to 19 mm. As long as the tolerance of the first arithmetic sequence is greater than the tolerance of the second arithmetic sequence, or the distribution density of the first term in the first arithmetic sequence is equal to the distribution density of the first term in the second arithmetic sequence, no specific limitation is made here.

[0304] In this way, the tolerance of the first arithmetic progression and the tolerance of the second arithmetic progression can be flexibly set to control the distribution density of the air outlet holes in different air outlet hole groups T.

[0305] In some embodiments, the total area of ​​all the air outlet holes c2 on the first surface m1 accounts for 0.5% to 95%.

[0306] Exemplarily, the total area of ​​all the air outlet holes c2 on the first surface m1 may account for 0.5%, 1%, 10%, 25%, 33%, 45%, 50%, 63%, 72%, 80%, 83%, 90% or 95%.

[0307] In this way, the total area ratio of all the gas outlet holes c2 on the first surface m1 can be flexibly set to achieve more accurate gas control, large-volume gas delivery, or progressive gas distribution, which is not specifically limited here.

[0308] It can be understood that the total opening area of ​​the first vent group T1 and the total opening area of ​​the second vent group T2 can be flexibly selected and combined by the control methods of the total opening area illustrated above, and no specific restrictions are made here. Exemplarily, for the first vent group T1 and the second vent group T2, the aperture d of the vent c2 is 0.1 mm, the smallest first spacing w is 1 mm, and all the first spacings w in the corresponding vent group T form an arithmetic progression; wherein the corresponding tolerance of the first vent group T1 is 0.002 mm, and the corresponding tolerance of the second vent group T2 is 0.001 mm. The total area of ​​all vents c2 on each first surface m1 accounts for 0.5%.

[0309] In some embodiments, please refer to Figures 2 to 4 , and combined with reference Figures 9 to 11 The main body 131 is also provided with a groove body G arranged in a one-to-one correspondence with the first surface m1, and the bottom wall of the groove body G constitutes the first surface m1 arranged corresponding to the groove body G.

[0310] The trough body G is an open structure, and the bottom wall of the trough body G is arranged opposite to the open mouth of the trough body G. The trough body G has a certain accommodating space.

[0311] Thus, by providing the groove body G, since the bottom wall of the groove body G constitutes the first surface m1, it is beneficial to gather the gas output from the gas outlet c2 of the first surface m1 and improve the uniformity of the output gas, which is further beneficial to improve the uniformity of the output gas.

[0312] In some embodiments, please refer to Figures 9 to 11 The dimension of the groove body G along the second direction F2 (the first dimension u1) is greater than the dimension of the air outlet c2 along the second direction F2 (the second dimension u2).

[0313] In this way, by configuring the first size u1 to be larger than the second size u2, it is beneficial for the output gas to be gathered and mixed in the tank body G, thereby further improving the uniformity of the output gas.

[0314] In some embodiments, please refer to Figures 9 to 11 The first air passage p1 is connected to the tank body G via the communication channel cx, and the portion where the communication channel cx is connected to the tank body G defines the air outlet c2. In this way, the tank body G and the first air passage p1 are connected easily.

[0315] Based on the same invention concept, please refer to Fig.12 and Fig.13 , and combined with reference Figures 1 to 4 , Fig. 9 and Fig.10 , an embodiment of the present application provides a flow distribution component 130, including the flow distribution member in any of the above embodiments. All the air outlet holes c2 constitute a plurality of air outlet groups T. Among all the air outlet groups T, there are two adjacent air outlet groups T that output different types of gases. A drainage chamber Q2 and a drainage channel e connected to the drainage chamber Q2 are also provided on the main body 131. A drainage channel e is provided between two adjacent air outlet groups T that output different types of gases, and the inlets of all the drainage channels e and all the air outlet holes c2 are arranged toward the same side.

[0316] The drainage channel e is a channel for guiding and transmitting gas flow. According to the position where the drainage channel e is set, the function of gas extraction or discharge or drainage of impurities such as dust in the corresponding area can be realized. Exemplarily, the drainage of the drainage channel e can be achieved by extraction, and accordingly, the drainage process can be regarded as an extraction process. In the embodiment of the present application, the opening direction of the entrance of the drainage channel e can be roughly the third direction F3, and the longitudinal extension direction of the drainage channel e can be parallel to the first direction F1.

[0317] In the case where the gases output by the two first surfaces m1 adjacent to the drainage channel e are different types of process gases, impurities such as dust and particles generated by the process gases contacting and reacting with each other before reaching the surface of the substrate can be extracted, thereby effectively reducing the amount of dust generated during the surface treatment of the substrate. In the case where the gases output by the two first surfaces m1 adjacent to the drainage channel e are process gas and barrier gas, respectively, the barrier gas can be extracted to maintain the gas pressure difference inside and outside the flow distribution component, which is beneficial to the output of the process gas. At the same time, the process gas can be discharged through the drainage channel e after deposition, further improving the situation of dust generation. In this way, by setting a drainage channel e between the two surfaces corresponding to the output of different gases, it is beneficial to improve the quality of the coating. Of course, when the output gas is a gas for other purposes, it can also be understood with reference to the process gas and barrier gas, which will not be repeated here, and the product quality can be improved.

[0318] In some embodiments, please refer to Figure 2 , Figure 3 , Fig.12 and Fig.13 , the flow distribution component 130 also includes a cover body 132. The main body 131 is recessed to form a drainage cavity Q2, and the cover body 132 covers the opening of the drainage cavity Q2. The cover body 132 can be set in a plate shape and have an opening f, by means of which the drainage cavity Q2 can be drained. Two openings f can be provided, one of which is located at one end of the cover body 132 along the first direction F1, and the other opening f is located at the other end of the cover body 132 along the first direction F1. In this way, it is beneficial to drain the drainage cavity Q2.

[0319] In some other embodiments, a particle collector and a vacuum pump may be configured, and the drainage chamber Q2 is drained by means of the vacuum pump, and the extracted gas or impurities are recovered to the particle collector. In this way, the environment can be protected and resource utilization can be improved.

[0320] In some embodiments, please refer to Figures 1 to 4 , Fig. 9 and Fig.10 The drainage channel e has an outlet connected to the inlet of the drainage channel e. The open area of ​​the outlet of the drainage channel e in the unit space area of ​​the drainage channel e is negatively correlated with the spatial distance. The spatial distance is the distance between the unit space area and the air inlet c1.

[0321] The open area in the unit space region is used to characterize the degree of opening of the outlet of the drainage channel e. The larger the open area in the unit space region, the larger the opening of the drainage outlet in the unit space region zk, and the more gas can pass through, and vice versa, the less gas can pass through.

[0322] "Unit space area" refers to the spatial range set as a target volume within the spatial scope defined by the drainage channel e, that is, the unit space area is an area with a target volume. For example, the drainage channel can be divided into several cubic areas of the same size, and each such cubic area can be regarded as a unit space area. For specific understanding, please refer to the unit area z0, which will not be repeated here. It can be understood that the difference is that the unit space area is a three-dimensional area, and the unit area z0 is a two-dimensional area.

[0323] The implementation and understanding of the relationship between the spatial distance and the air inlet hole c1 can refer to the implementation and understanding of the relationship between the distribution distance and the air inlet hole c1 illustrated in some of the aforementioned embodiments, and will not be elaborated here.

[0324] In the embodiment of the present application, Figures 1 to 3For example, when air is taken in from both ends of the first airway p1, the opening area of ​​the drainage channel e closer to the center is smaller, and the opening area of ​​the drainage channel e closer to the edge is larger.

[0325] It should be noted that the relevant implementation methods and relevant understandings of the negative correlation trend can be understood by referring to the situations illustrated in some of the aforementioned embodiments, and the determination and understanding of the distance between the unit space area and the air inlet c1 can also be determined and understood by referring to the distribution distances involved in some of the aforementioned embodiments, which will not be repeated here.

[0326] In this way, by configuring the open area of ​​the outlet of the drainage channel e within the unit space area of ​​the drainage channel e to be negatively correlated with the "distance between the unit space area and the air inlet c1", the flow rate of the extracted gas can be further controlled according to the density of the gas output by the air outlet c2, which is beneficial to improving the uniformity of the gas output by the air outlet c2.

[0327] In some embodiments, please refer to Figures 1 to 4 , Fig. 9 and Fig.10 , the open area of ​​at least part of the outlet of the drainage channel e within the unit spatial area of ​​the drainage channel e continuously increases as the spatial distance decreases; or, the open area of ​​at least part of the outlet of the drainage channel e within the unit spatial area of ​​the drainage channel e increases in stages as the spatial distance decreases; or, the open area of ​​at least part of the outlet of the drainage channel e within the unit spatial area of ​​the drainage channel e increases irregularly as the spatial distance decreases.

[0328] “Decrease and continuously increase”, “decrease and increase in stages” and “decrease and increase irregularly” can be understood by referring to the relevant situations illustrated in some of the aforementioned embodiments, and will not be elaborated here.

[0329] In this way, the open area of ​​the outlet of the drainage channel e in each unit space area of ​​the drainage channel e can be controlled, and then the flow rate of the extracted gas can be further controlled according to the density of the gas output from the outlet c2, which is further beneficial to improve the uniformity of the gas output from the outlet c2.

[0330] Of course, in some other embodiments, the open area of ​​the outlet of the drainage channel e in each unit space area of ​​the drainage channel e can be adjusted according to the distribution density of the air outlet c2 in the unit area z0 on the first surface m1 mentioned above. The open area of ​​the outlet of the drainage channel e in each unit space area of ​​the drainage channel e can be further configured according to the required rules. It can be set according to specific usage requirements and is not specifically limited here.

[0331] In some embodiments, the open area of ​​at least part of the outlet of the drainage channel e within the unit space area of ​​the drainage channel e increases according to a fourth preset rule as the spatial distance decreases.

[0332] The fourth preset rule can be understood by referring to the first preset rule, the second preset rule and the third preset rule illustrated above, and will not be elaborated here.

[0333] In this way, by configuring the fourth preset rule, it is easy to determine the outflow amount and speed of the drainage gas under different conditions, thereby facilitating the design of the open area in each unit space area.

[0334] In some embodiments, the fourth preset rule includes at least one of a number series rule, a function relationship rule, and a recursive logic rule.

[0335] The rules of number series, functional relationships, and recursive logic can be understood by referring to the situations and related advantages illustrated in some of the aforementioned embodiments, and will not be elaborated here.

[0336] In some embodiments, the open area of ​​the outlet of the drainage channel e within the unit space area of ​​the drainage channel e increases in a second preset series as the spatial distance decreases.

[0337] In this way, since the second preset number series is a number series with a certain regularity, it is easier to determine the outflow amount and speed of the drainage gas under different conditions, thereby making it easier to design the open area in each unit space area.

[0338] In some embodiments, the second preset number sequence is configured to have multiple number sequence types; or, the second preset number sequence is configured to have one number sequence type.

[0339] The multiple number series types and one number series type can be understood by referring to the situations and related advantages illustrated in some of the aforementioned embodiments, which will not be elaborated here.

[0340] In some embodiments, the second preset number sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence.

[0341] The second preset number sequence can be understood by referring to the relevant implementation methods and advantages of the first preset number sequence illustrated in some of the aforementioned embodiments, and will not be elaborated herein.

[0342] In some embodiments, the body 131 has a plurality of air inlet holes c1 communicating with the first air passage p1. The spatial distance is the minimum distance between the unit spatial area and the plurality of air inlet holes.

[0343] Since the corresponding distribution distance of each unit space area is measured based on the minimum spacing, the open area of ​​the outlet of the drainage channel e within the unit space area of ​​the drainage channel e is determined based on the minimum distance. Therefore, when designing the flow distribution parts, the open area of ​​the outlet of the drainage channel e within the unit space area of ​​the drainage channel e can be set according to this distance relationship.

[0344] The relevant implementation methods and advantages of the minimum spacing can be understood by referring to the minimum distances illustrated in some of the aforementioned embodiments, and will not be described in detail here. Therefore, considering the open area of ​​the outlet of the drainage channel e within the unit space area of ​​the drainage channel e based on the minimum distance can facilitate the setting of the open area and the manufacturing.

[0345] Of course, in some other embodiments, the relevant implementation methods of spatial distance can also refer to the relevant implementation methods of distribution distance, such as the aforementioned rules based on weighted distance, rules based on geometric center, resistance-distance rules, attenuation-distance rules, partition coordination rules, etc., which are not specifically limited here, and the relevant advantages and understandings are not elaborated here.

[0346] Therefore, in combination with the situations illustrated in some of the above embodiments, the distribution density of the open area in each unit space area can be flexibly adjusted according to different work requirements.

[0347] In some embodiments, please refer to Fig.13 , and combined with reference Figures 14 to 16 The flow distribution assembly 130 further includes a movable adjustment member 133, which is configured to adjust the open area of ​​the outlet of the drainage channel e. The adjustment member 133 is provided with a plurality of adjustment holes j1, and the open area of ​​the outlet of the drainage channel e is defined by the overlap area of ​​the outlet of the drainage channel e and the adjustment holes j1.

[0348] Exemplary, with reference to Figures 14 to 16 The inner wall of the drainage cavity Q2 includes a first wall i, and the outlets of all drainage channels e are opened on the first wall i. The adjustment hole j1 passes through the adjustment member 133 along the third direction F3, and the longitudinal extension direction of the adjustment hole j1 can be parallel to the first direction F1. Of course, the longitudinal extension direction of the adjustment hole j1 can also be set at an angle to the first direction F1. Fig.16When the adjustment hole j1 and the outlet of the drainage channel e (i.e., the drainage outlet e2) overlap, the overlapping portion is the open portion of the outlet of the drainage channel e, and substances such as gas and dust can pass through the open portion, that is, the overlapping area v2 of the overlapping portion is the passable passing area v1. When the adjustment hole j1 and the outlet of the drainage channel e partially overlap, the non-overlapping portion of the adjustment hole j1 and the outlet of the drainage channel e is blocked by the adjustment member 133 and the first wall i. The adjustment member 133 may be provided with a plurality of mounting holes j2, and the connecting member may connect the adjustment member 133 and the first wall i by means of the mounting holes j2. The mounting holes j2 may be extended along the second direction F2 so that the adjustment member 133 can move relative to the first wall i along the second direction F2, thereby adjusting the open area of ​​the outlet of the drainage channel e. Of course, the adjustment member 133 may move relative to the first wall i in other directions, as long as the open area of ​​the outlet of the drainage channel e can be adjusted, and no specific restrictions are made here.

[0349] In this way, by setting the adjustment member 133, the open area of ​​the outlet of the drainage channel e can be adjusted, and the open area can be set according to different usage requirements, thereby improving the applicability of the flow distribution component 130 and making it suitable for more usage scenarios.

[0350] In some embodiments, please refer to Fig.13 and Fig.14 , the adjusting member 133 includes a plurality of sub-adjusting members 133a, and a plurality of adjusting holes j1 are provided on the sub-adjusting member 133a. The outlet of the drainage channel e includes a plurality of sub-outlets e21 that are independent of each other. That is, the drainage outlet e2 is composed of a plurality of sub-outlets e21 that are independent of each other. Among them, all the adjusting holes j1 are arranged in a one-to-one correspondence with all the sub-outlets e21. The open area of ​​the sub-outlet e21 is defined by the overlapping area of ​​the sub-outlet e21 and the corresponding adjusting hole j1.

[0351] For example, Fig.13 and Fig.14 For example, all sub-adjusting members 133a are arranged in sequence along the first direction F1. The drainage outlet e2 includes a plurality of sub-outlets e21 that are arranged in sequence along the first direction F1 and are independent of each other. The sub-outlets e21 of all drainage channels e are arranged in rows along the second direction F2 on the first wall i, and arranged in columns along the first direction F1. The area of ​​the first wall i where each column of sub-outlets e21 on the first wall i is located is defined as the first area r1. All sub-adjusting members 133a are arranged in one-to-one correspondence with all first areas r1, and the total open area of ​​the sub-outlets e21 on the first area r1 is defined by the adjustment hole j1 on the corresponding sub-adjusting member 133a. It can be understood that in order to facilitate the illustration of the corresponding structure, Fig.13 and Fig.14 The first region r1 on the first wall i is divided by a dotted line. Fig.14Part of the sub-adjusting members 133a and a first region r1 are shown in FIG. Each sub-adjusting member 133a may be provided with the aforementioned mounting hole j2, so that the position of each sub-adjusting member can be adjusted separately.

[0352] Of course, all the sub-adjusting members 133a can be arranged in columns along the first direction F1 and in rows along the second direction F2, and all the sub-adjusting members 133a can be arranged in a substantially rectangular array. The structures, specifications, and sizes of all the sub-adjusting members 133a can be the same or different. In this way, the sub-adjusting members 133a can be flexibly arranged according to the use requirements, and no specific limitation is made here.

[0353] Exemplary, with reference to Fig.17 , the drainage channel e has a drainage inlet e1 (i.e., the inlet of the drainage channel e) and a drainage outlet e2 (i.e., the outlet of the drainage channel e). The drainage channel e can be generally arranged in a groove shape. The drainage inlet e1 is formed at the open portion of the drainage channel e. The drainage outlet e2 is provided on the bottom wall of the drainage channel e. The drainage outlet e2 includes a plurality of sub-outlets e21 that are sequentially arranged along the first direction F1 and are independent of each other. In the embodiment of the present application, the sub-outlets e21 are longitudinally extended along the first direction F1, and all the sub-outlets e21 are generally arranged in a rectangular array. Combined with reference Fig.14 Each sub-adjusting member 133a can correspondingly adjust the opening area of ​​the sub-outlet e21 on the first region r1. At this time, the first region r1 can be regarded as roughly corresponding to the aforementioned unit space region.

[0354] Understandable, combined with reference Figures 1 to 3 When the first air passage p1 is inletted at both ends along the first direction F1, the first regions r1 are divided and arranged in sequence along the first direction F1, and the opening area of ​​the sub-outlet e21 on the first region r1 can be adjusted independently in coordination with the independently arranged sub-adjusting member 133a. For example, the opening area of ​​the sub-outlet e21 on the first region r1 close to the edge along the first direction F1 can be made larger than the opening area of ​​the sub-outlet e21 on the first region r1 close to the middle, and then the distribution density of the air outlet c2 mentioned above can be adjusted, and under the limitation of the coordination of the distribution density and the opening area, the gas output from the air outlet c2 can be made more uniform.

[0355] Thus, by configuring the adjusting member 133 to include multiple sub-adjusting members 133a, the required open area can be independently adjusted according to the usage requirements of different regions, which can not only improve the accuracy of adjustment, but also improve the flexibility of use. Compared with the integrated adjusting member 133, configuring the adjusting member 133 to include a split structure (i.e., including multiple independent sub-adjusting members 133a) also makes it easier to configure the structure of the adjusting member 133.

[0356] Thus, in the case where a plurality of sub-adjusting members 133a are provided, by providing the outlet of the drainage channel e with a plurality of sub-outlets e21, it is not only beneficial to more flexibly adjust the required open area, but also beneficial to further improve the uniformity of the outlet gas.

[0357] Of course, in some other embodiments, the adjusting holes j1 and the sub-outlets e21 may not be arranged in a one-to-one correspondence, and the number, longitudinal extension direction, shape and shape of the adjusting holes j1 and the sub-outlets e21 may be different. Fig.18 , each sub-outlet e21 is sequentially and discontinuously arranged along the first direction F1. That is, the sub-outlet e21 is composed of multiple independent parts. At this time, the structure of the sub-outlet e21 is different from that of the adjustment hole j1. It can be flexibly arranged according to the specific use situation, and no specific limitation is made here.

[0358] In some embodiments, please refer to Fig.13 and Fig.14 The outlet of the drainage channel e includes an edge outlet ey disposed near the edge of the main body 131, and the adjusting member 133 includes an edge adjusting member jy disposed near the edge of the main body 131 and corresponding to the edge outlet ey. The open area of ​​the edge outlet ey is defined by the overlapping area of ​​the edge outlet ey and the adjusting hole j1 on the corresponding edge adjusting member jy.

[0359] Specifically, Fig.13 and Fig.14 For example, the adjusting member 133 includes a plurality of sub-adjusting members 133a, and the sub-adjusting member 133a is provided with an adjusting hole j1. The outlet of the drainage channel e includes a plurality of sub-outlets e21 that are independent of each other. That is, the drainage outlet e2 is composed of a plurality of sub-outlets e21 that are independent of each other. Among them, all sub-outlets e21 include an edge outlet ey arranged near the edge of the main body 131, and all sub-adjusting members 133a include an edge adjusting member jy arranged near the edge of the main body 131 and corresponding to the edge outlet ey. The open area of ​​the edge outlet ey is defined by the overlapping area of ​​the edge outlet ey and the adjusting hole j1 on the corresponding edge adjusting member jy.

[0360] For example, Fig.13 and Fig.14For example, the main body 131 has a first end Da and a second end Db that are arranged opposite to each other along the first direction F1. As shown above, the sub-outlets e21 of all drainage channels e can be arranged in rows along the second direction F2 on the first wall i and arranged in columns along the first direction F1. The first sub-outlet e21 of each column of sub-outlets e21 is arranged close to the first end Da, and the last sub-outlet e21 is arranged close to the second end Db. The edge outlet ey includes the first sub-outlet e21 of all columns of sub-outlets e21 and the last sub-outlet e21 of all columns of sub-outlets e21. The area of ​​the first wall i where the first sub-outlet e21 of all columns of sub-outlets e21 is located is the first edge area, and the area of ​​the first wall i where the last sub-outlet e21 of all columns of sub-outlets e21 is located is the second edge area. All sub-adjusting members 133a include sub-adjusting members 133a that only cover the first edge region and sub-adjusting members 133a that only cover the second edge region. The sub-adjusting members 133a located in the first edge region and the sub-adjusting members 133a located in the second edge region can be substantially extended along the second direction F2. The specifications of the sub-adjusting members 133a located in the first edge region and the sub-adjusting members 133a located in the second edge region are different from the size specifications of other sub-adjusting members 133a.

[0361] In this way, by means of the edge outlet ey, shielding areas can be formed at both ends of the main body 131, and a relatively independent deposition area that can be used for deposition on the surface of the substrate is formed between the two shielding areas, which is beneficial to improve the coating quality.

[0362] In some embodiments, please refer to Fig.19 , the drainage channel e includes a first channel ea, a second channel eb and a third channel ec which are arranged in sequence and are independent of each other. The first channel ea is arranged for the first edge area, the third channel ec is arranged for the second edge area rb, and the second channel eb is arranged for the area between the first edge area and the second edge area. The outlet of the first channel ea and the outlet of the third channel ec define an edge outlet ey, and the outlet of the second channel eb defines all sub-outlets e21 in the area between the first edge area and the second edge area.

[0363] By setting the drainage channel e as the first channel ea, the second channel eb and the third channel ec which are independent of each other, the drainage process at the edge area and the drainage process at the middle area are further made independent of each other. In this way, the interference with the regulation of the drainage process at the middle area is further reduced, which is more conducive to improving the coating quality by means of the shielding area formed by the sub-outlet e21 of the drainage channel e in the edge area.

[0364] Of course, in Figure 1 and Figure 4In the illustrated drainage channel e, the aforementioned first channel ea, second channel eb and third channel ec are connected to each other, and the drainage channel e is arranged in a groove-like structure as illustrated in some of the aforementioned embodiments. It can be arranged according to specific usage conditions and is not specifically limited here.

[0365] In some embodiments, please refer to Figures 1 to 4 , Figures 8 to 10 , among all the gas outlet groups T, there are first gas outlet groups T1 for outputting the first gas and second gas outlet groups T2 for outputting the barrier gas, all the first gas outlet groups T1 are configured to output multiple first gases, all the gas outlets c2 in each first gas outlet group T1 are configured to output the same first gas, and the second gas outlet group T2 is configured to output the second gas. Among them, all the gas outlet groups T and all the drainage channels e are continuously and adjacently arranged in a preset order. The preset sequence satisfies at least one of the following conditions: the first condition, based on the order from front to back of the preset sequence, the preceding and succeeding order of each air outlet group T are both drainage channels e, the second air outlet group T2 is between two adjacent first air outlet groups T1 for outputting different first gases, and the first air outlet groups T1 and the second air outlet groups T2 are arranged alternately; the second condition, the first one in the preset sequence is the second air outlet group T2, and the last one in the preset sequence is the drainage channel e; or, the first and last ones in the preset sequence are both the second air outlet group T2; the third condition, the first air outlet groups T1 corresponding to any two different types of first gases appear the same number of times.

[0366] Exemplarily, the first gas may be a process gas, and the second gas may be a barrier gas. The process gas may be water vapor or TMA. Water vapor and TMA may be arranged alternately for output. For example, along the second direction F2, water vapor may be introduced into the first gas channels p1 arranged at positions 1, 5, 9, etc., barrier gas may be introduced into the first gas channels p1 arranged at positions 2, 4, 6, 8, 10, etc., and TMA may be introduced into the first gas channels p1 arranged at positions 3, 7, 11, etc. The first gas channels p1 arranged at positions 1 and 3 may be provided with a barrier gas. The barrier gas outputted by the second gas outlet group T2 connected to the first gas channel p1 at position 2 is blocked between the area where the first gas outlet group T1 connected to the first gas channel p1 at position 1 is located and the area where the first gas outlet group T1 connected to the first gas channel p1 at position 3 is located. In this way, the substrate can complete multiple growth cycles by moving in sequence. Of course, other orders can also be used, and can be set according to different process requirements. No specific restrictions are made here, as long as different types of process gases are blocked by barrier gases.

[0367] In this way, by arranging the second gas outlet group T2 between two adjacent first gas outlet groups T1 for outputting different gases, different process gases outputted can be blocked by means of barrier gas. Since the barrier gas does not react with the process gas, the area outputting the barrier gas can form an isolation zone within a certain space, and separate different process gases in space, which can improve the mixing, reaction or interference between different process gases, and thus effectively block the particles generated by the chemical reaction of the process gas. At the same time, the barrier gas also helps to make the pressure of each area relatively stable, and improve the uniformity of the output process gas.

[0368] Furthermore, the growth cycle required by the substrate can be completed according to actual use requirements, and the deposition process can be controlled separately to obtain the required growth cycle, which helps to control the thickness, component distribution and surface morphology of the substrate and meet the use requirements of different application scenarios. In the case where the first one in the preset order is the second air outlet group T2, and the last one in the preset order is the drainage channel e, when multiple main bodies 131 are provided and the multiple main bodies 131 are arranged in sequence, it is convenient for two adjacent main bodies 131 to cooperate with each other, which is conducive to the complete formation of the aforementioned growth cycle. In the case where the first and last ones in the preset order are both the second air outlet group T2, when multiple main bodies 131 are provided and the multiple main bodies 131 are arranged in sequence, it is not necessary to distinguish between the first end Da and the second end Db of the main body 131, which is convenient for the arrangement of multiple main bodies 131.

[0369] Of course, the first gas may not be a process gas, and the second gas may not be a barrier gas. For any situation where the second gas needs to be output between two different first gases, the above implementation can be used to obtain a corresponding flow distribution method, and no specific limitation is made here.

[0370] In some embodiments, please refer to Fig. 20 , the preset order at least satisfies the first condition. Based on the preset order from front to back, the first air outlet group T1, the drainage channel e located in front of the first air outlet group T1, the drainage channel e located in the back of the first air outlet group T1, and the second air outlet group T2 adjacent to the first air outlet group T1, constitute a combination. The flow distribution component 130 also includes a plurality of isolation members 134 arranged in the drainage chamber Q2, and the plurality of isolation members 134 divide the drainage chamber Q2 into a plurality of mutually independent sub-drainage chambers Q21. Each combination corresponds to at least one sub-drainage chamber Q21, and all the air outlets c2 and the entrances of all the drainage channels e in the same combination are connected to the corresponding at least one sub-drainage chamber Q21. Different combinations correspond to different sub-drainage chambers Q21.

[0371] As described in some of the aforementioned embodiments, when the gases outputted from the two first surfaces m1 adjacent to the drainage channel e are different types of process gases, the drainage channel e can extract the relevant impurities such as dust and particles. In this process, there may be a risk that the extracted different types of process gases react in the drainage chamber Q2, so that the relevant impurities such as dust or particles generated by the reaction may fall back to the surface of the substrate through the drainage channel e. When an isolation member 134 is provided, different types of process gases drained to the drainage chamber Q2 can be separated, reducing the risk of impurities falling back to the surface of the substrate through the drainage channel e, thereby improving product quality.

[0372] In some embodiments, please refer to Fig. 20 All the assemblies are arranged in one-to-one correspondence with all the sub-drainage chambers Q21. All the air outlets c2 and the inlets of the drainage channels e in the same assembly are connected to the corresponding sub-drainage chambers.

[0373] In this way, by arranging all the assemblies in one-to-one correspondence with all the drainage sub-cavities, not only can the product quality be improved, but the overall structure can also be made simpler.

[0374] Of course, in some other embodiments, one assembly may correspond to a plurality of sub-drainage cavities, and the sub-drainage cavities corresponding to all assemblies are different from each other, which is not specifically limited here.

[0375] In some embodiments, a plurality of bodies 131 are provided. All the bodies 131 are arranged in sequence, and the first ends p11 of the first air passages p1 of all the bodies 131 are located on the same side, and the second ends p12 of the first air passages p1 of all the bodies 131 are located on the same side.

[0376] Thus, by configuring the flow distribution component 130 to include a plurality of main bodies 131, the flow distribution component 130 can be configured in a modular manner, which helps to reduce the process difficulty and processing cost, and facilitates the manufacture, assembly and maintenance of the flow distribution component 130. At the same time, the required process gases can also be arranged more flexibly.

[0377] In some embodiments, please refer to Fig.21 , a plurality of first air passages p1 are provided. The flow distribution assembly 130 further includes a flow divider 135, and the flow divider 135 is configured to divide the gas to be distributed into the plurality of first air passages p1.

[0378] For example, Fig.21 As an example, a situation where two flow dividers 135 are provided is illustrated. The flow divider 135 is provided with two second air passages p2 and a plurality of flow divider channels p3. Fig.21In the figure, the approximate positions of the first air passage p1, the second air passage p2 and the diverter passage p3 are indicated by dotted lines. The arrangement can be made according to specific use requirements and is not specifically limited here. The diverter 135 and the main body 131 can be detachably connected by means of a bolt structure, and a seal (such as a sealing ring) can be arranged between the diverter 135 and the main body 131.

[0379] It should be noted that Fig.21 Only the arrangement concept of the flow divider 135 is shown. In actual use, the internal structure of the flow divider 135 can be more finely arranged according to the requirements of different process gases or barrier gases in some of the aforementioned embodiments to meet the requirements of different output gases. That is, the structure of the flow divider 135 can be flexibly adjusted according to different process requirements to adapt to different gas input conditions and process requirements.

[0380] In this way, by providing the flow divider 135, it is convenient to distribute the gas more evenly and to control the gas flow in different areas to meet different usage requirements.

[0381] In some embodiments, please refer to Fig. 20 , and combined with reference Fig. 22 The distribution assembly 130 further includes a protective member 136 coupled to the periphery of the main body 131. The protective member 136 has a blowing channel p4 and a plurality of blowing holes ck connected to the blowing channel p4. All the blowing holes ck define a blowing area, and all the outlet holes c2 define an outlet area, and the blowing area is at least partially arranged around the outlet area.

[0382] For example, Fig. 20 For example, a plurality of blowing channels p4 may be provided on the protective member 136, and the blowing holes ck of different blowing channels p4 may have different directions, which is conducive to expanding the blowing range. The protective member 136 may be provided at least at one end of the main body 131 along the second direction F2. In the case where a plurality of main bodies 131 are provided, the protective member 136 may be provided on the side where the two main bodies 131 are away from each other. That is, the protective member 136 may form a structure that at least surrounds a portion of the circumference of the flow distribution device. Combined with reference Fig. 22 When a plurality of flow distribution components 130 are arranged around the transmission roller 121 for transmitting the substrate, when the outlet area z2 is surrounded by the blowing area, the gas blown out by the protective member 136 can form an air curtain QL, thereby isolating the deposition area of ​​the process gas from the outside as much as possible, thereby improving the coating quality. Fig. 22 In order to facilitate the illustration of the air curtain QL, the protection member 136 is not shown.

[0383] A blowing groove cp may also be provided on the protective member 136, and the blowing groove cp may be used to gather and mix the blown gas. It should be noted that the positional relationship between the blowing groove cp, the blowing hole ck and the blowing channel p4 may be understood by referring to the positional relationship between the groove body G, the outlet hole c2 and the first air channel p1, and will not be described in detail here.

[0384] In this way, by providing the protective member 136 , the deposition area of ​​the process gas can be isolated from the outside as much as possible by means of the blowing area formed by the gas blown out by the protective member 136 , thereby further improving the coating quality.

[0385] In some embodiments, please refer to Fig.12 and Fig.13 The flow distribution assembly 130 further includes a heating element 137 , which is connected to the main body 131 , and is configured to heat the gas input into the first air passage p1 .

[0386] The heating element 137 is a component that can generate heat and transfer the heat to the surrounding environment or an object. The heating element 137 can be configured in a plate shape. Fig.12 and Fig.13 For example, the heating element 137 may be disposed on a side of the main body 131 away from the air outlet side of the main body 131 , that is, the heating element 137 is disposed on a side of the main body 131 along the third direction F3 .

[0387] In this way, by providing the heating element 137 , the gas input into the first gas channel p1 can be heated, which is beneficial for the process gas to react on the substrate to form a thin film.

[0388] Based on the same inventive concept, an embodiment of the present application provides a method for setting a flow distribution structure, comprising the following steps:

[0389] Step S110, based on the distance relationship between the unit area of ​​the first surface of the flow distribution component and the air inlet holes on the second surface of the flow distribution component, determine the distribution density of the air outlet holes to be set on the first surface within the unit area of ​​the first surface; the distribution density of the air outlet holes to be set within the unit area of ​​the first surface is positively correlated with the distribution distance; the distribution density of the air outlet holes to be set within the unit area of ​​the first surface is the ratio of the total opening area of ​​all the air outlet holes to be set within the unit area to the area of ​​the unit area; the distribution distance is the distance between the unit area and the air inlet holes;

[0390] Step S120: setting air outlet holes on the first surface according to the distribution density.

[0391] Since the distribution density of the air outlet holes to be arranged in the unit area of ​​the first surface is positively correlated with the distribution distance, the air outlet holes arranged on the first surface can meet the requirement of "the distribution density of the air outlet holes in the unit area of ​​the first surface is positively correlated with the distribution distance". For related advantages, reference can be made to the advantages of the flow distribution parts illustrated in some of the aforementioned embodiments, which will not be elaborated here.

[0392] In some embodiments, step S110 includes the following steps:

[0393] Step S111: determining a threshold range of structural parameters of the air outlet holes to be arranged in each unit area based on the distance relationship between the unit area of ​​the first surface and the air inlet holes; wherein the structural parameters include the aperture of the air outlet holes to be arranged and the spacing between adjacent air outlet holes to be arranged;

[0394] Step S112, combining the structural parameters within each threshold range in a preset configuration manner to obtain a distribution density;

[0395] Among them, the preset configuration method includes at least one of the following configuration methods: the first configuration method, for the target unit area, the apertures of all the air outlets are the same, and the distribution density is configured based on the change in the spacing between adjacent air outlets to be set; the second configuration method, for the target unit area, the spacing between adjacent air outlets to be set is the same, and the distribution density is configured based on the change in the aperture of the air outlet; the third configuration method, for the target unit area, the distribution density is configured based on the change in the spacing between adjacent air outlets to be set and the change in the aperture of the air outlet.

[0396] Specifically, the distribution density is related to the aperture d and the spacing of the air outlet holes c2. Different distribution densities can be obtained based on the same aperture d of the air outlet holes c2 and different spacings. Different distribution densities can also be obtained based on the same spacing of the air outlet holes c2 and different aperture d. Different distribution densities can also be obtained by combining multiple rows and / or multiple rows of air outlet holes c2. This can be understood in conjunction with the contents illustrated in some of the aforementioned embodiments, and will not be repeated here.

[0397] In this way, the required distribution density can be flexibly set by the relevant combination of the structural parameters of the air outlet holes. It can be set according to the specific usage and is not specifically limited here.

[0398] In some embodiments, determining a threshold range of a structural parameter of an air outlet to be set in each unit area region comprises the following steps:

[0399] Step S111a, based on the arrangement rule of the spacing between two adjacent air outlet holes to be set, determine the distribution rule of the air outlet holes to be set; the arrangement rule of the spacing between two adjacent air outlet holes to be set includes that the spacing between the two adjacent air outlet holes to be set is negatively correlated with the center distance of the first area; the center distance of the first area is the distance between the center of the area between the two air outlet holes to be set and the air inlet along the extension direction of the first air channel to be set; the first air channel to be set is used for corresponding communication with the air outlet holes to be set;

[0400] Step S111b: determining a threshold range of a structural parameter of the vent hole to be set based on the distribution rule.

[0401] In this way, determining the arrangement rule based on a qualitative reference is conducive to forming an arrangement with a certain regularity. This can be understood in conjunction with the contents illustrated in some of the above embodiments, and will not be repeated here.

[0402] In some embodiments, determining a threshold range of a structural parameter of an air outlet to be set in each unit area region comprises the following steps:

[0403] Step S111c, based on the arrangement rule of the apertures of the air outlet holes to be set, determining the distribution rule of the air outlet holes to be set; the arrangement rule of the apertures of the air outlet holes to be set includes that the apertures of the air outlet holes to be set are positively correlated with the hole center distance; the hole center distance is the distance between the center of the air outlet holes to be set and the air inlet along the extension direction of the first air channel to be set; the first air channel to be set is used for corresponding communication with the air outlet holes to be set;

[0404] Step S111d: Determine a threshold range of the structural parameters of the vent holes to be set based on the distribution rule.

[0405] In this way, determining the arrangement rule based on a qualitative reference is conducive to forming an arrangement with a certain regularity. This can be understood in conjunction with the contents illustrated in some of the above embodiments, and will not be repeated here.

[0406] In some embodiments, determining a threshold range of a structural parameter of an air outlet to be set in each unit area region comprises the following steps:

[0407] Step S111e, based on the arrangement rule of the spacing between two adjacent air outlet holes to be set and the arrangement rule of the apertures of the air outlet holes to be set, determine the distribution rule of the air outlet holes to be set; the arrangement rule of the spacing between two adjacent air outlet holes to be set includes that the spacing between two adjacent air outlet holes to be set is negatively correlated with the area center distance; the area center distance is the distance between the center of the area between the two air outlet holes to be set and the air inlet hole; the arrangement rule of the apertures of the air outlet holes to be set includes that the aperture of the air outlet holes to be set is positively correlated with the hole center distance; the hole center distance is the distance between the center of the air outlet hole to be set and the air inlet hole along the extension direction of the first air channel to be set; the first air channel to be set is used for corresponding communication with the air outlet holes to be set;

[0408] Step S111f: determining a threshold range of a structural parameter of the vent to be set based on the distribution rule.

[0409] In this way, determining the arrangement rule based on a qualitative reference is conducive to forming an arrangement with a certain regularity. This can be understood in conjunction with the contents illustrated in some of the above embodiments, and will not be repeated here.

[0410] In some embodiments, the step S110 further includes the following steps:

[0411] Step SG, based on the size of the unit area of ​​the first surface, determining all unit area constituting the first surface;

[0412] Step SH, based on the position of each unit area region and the position of the air inlet hole of the flow distribution structure, determining the distance between each unit area region and the air inlet hole of the flow distribution structure;

[0413] Step SI, compare the corresponding distances of each unit area area to obtain a first size relationship between the distances of each unit area area and the air inlet holes of the flow distribution structure, and use the first size relationship as the distance relationship between the unit area area of ​​the first surface of the flow distribution component and the air inlet holes.

[0414] In this way, by taking the size relationship as the distance relationship, it is convenient to set the required distribution density. This can be understood in conjunction with the contents illustrated in some of the above embodiments, and will not be repeated here.

[0415] In some other embodiments, the distance relationship may also include a proportional relationship, a difference relationship, a near-far relationship, etc. The distance relationship may be selected according to specific usage requirements and is not specifically limited here.

[0416] In some embodiments, step S110 includes the following steps:

[0417] Step Sa, determining a target relationship between the distribution densities of the air outlet holes to be set on each unit area according to the first size relationship;

[0418] Step Sb: based on the target relationship, determine the distribution density of the air outlet holes to be set on each unit area.

[0419] Wherein, the target relationship satisfies one of the first target condition, the second target condition, the third target condition, the fourth target condition and the fifth target condition. The first target condition is that the distribution density of the vents to be set on at least part of the unit area in the at least part of the unit area increases continuously with the increase of the distribution distance. The second target condition is that the distribution density of the vents to be set on at least part of the unit area in the at least part of the unit area increases in stages with the increase of the distribution distance. The third target condition is that the distribution density of the vents to be set on at least part of the unit area in the at least part of the unit area increases with the increase of the distribution distance according to the first preset rule; the first preset rule includes at least one of the sequence rule, the function relationship rule and the recursive logic rule. The fourth target condition is that the distribution density of the vents to be set on at least part of the unit area in the at least part of the unit area increases with the increase of the distribution distance according to the first preset sequence; the first preset sequence includes at least one of the geometric sequence, the arithmetic sequence, the Fibonacci sequence and the large derivative sequence. The fifth target condition is that the distribution density of the air outlet holes to be arranged on at least a portion of the unit area in the at least a portion of the unit area increases irregularly with the increase of the distribution distance.

[0420] The advantages and related implementation methods brought about by the above target relationship can be understood in conjunction with the contents illustrated in some of the aforementioned embodiments, and will not be elaborated here.

[0421] In some embodiments, the method for setting the flow distribution structure further includes the following steps:

[0422] Step S130 : determining the distribution densities corresponding to the gas outlet holes to be arranged on the first surface based on the types of gases output by the gas outlet holes to be arranged on the first surface.

[0423] By setting the corresponding distribution density for different output gases, it is beneficial to improve the quality of the coating. The relevant specific advantages can also be referred to the situations illustrated in some of the above embodiments, which will not be repeated here.

[0424] In some embodiments, the method for setting up the flow distribution device structure further includes the following steps:

[0425] Step S140: based on the plurality of gas outlet groups to be set up formed by all the gas outlets to be set up, a drainage channel is arranged between two adjacent gas outlet groups outputting different gas types; the inlets of all the drainage channels and all the gas outlets are arranged toward the same side;

[0426] Step S150, based on the distance relationship between the unit spatial area of ​​the drainage channel and the air inlet, determine the target open area of ​​the outlet of the drainage channel within the unit spatial area of ​​the drainage channel; the drainage channel has an outlet connected to the inlet of the drainage channel; the target open area of ​​the outlet of the drainage channel within the unit spatial area of ​​the drainage channel is negatively correlated with the spatial distance; the spatial distance is the distance between the unit spatial area and the air inlet;

[0427] Step S160: configuring the open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel according to the target open area.

[0428] The advantages and some implementations of the drainage channel can be understood by referring to the situations illustrated in some of the aforementioned embodiments, and will not be elaborated here.

[0429] In some embodiments, the step S150 further includes the following steps:

[0430] Step SK1: determining all unit space areas constituting the drainage channel based on the size of the unit space area of ​​the drainage channel;

[0431] Step SK2: determining the distance between each unit space area and the air inlet based on the position of each unit space area and the air inlet;

[0432] Step SK3, compare the corresponding distances of each unit space area to obtain a second size relationship of the distances between each unit space area and the air inlet, and use the second size relationship as the distance relationship between the unit space area of ​​the drainage channel and the air inlet.

[0433] The relevant implementation methods and advantages of the arrangement of the drainage channel can be understood by referring to the contents illustrated in some of the aforementioned embodiments, and will not be elaborated here.

[0434] In some embodiments, step S150 includes the following steps:

[0435] Step S151, determining the area relationship between the target open areas corresponding to each unit space area according to the second size relationship;

[0436] Step S152: Based on the area relationship, determine the target open area corresponding to each unit space area.

[0437] Among them, the area relationship satisfies one of the first area condition, the second area condition, the third area condition, the fourth area condition and the fifth area condition. The first area condition is that the target open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases continuously as the spatial distance decreases. The second area condition is that the target open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases in stages as the spatial distance decreases. The third area condition is that the target open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases according to a fourth preset rule as the spatial distance decreases; the fourth preset rule includes at least one of a sequence rule, a function relationship rule, and a recursive logic rule. The fourth area condition is that the target open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases in a second preset sequence as the spatial distance decreases; the second preset sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a large derivative sequence. The fifth area condition is that the target open area of ​​the outlet of at least part of the drainage channel within the unit space area of ​​the drainage channel increases irregularly as the spatial distance decreases.

[0438] The related implementation methods and advantages of the open area of ​​the drainage channel can be understood by referring to the contents illustrated in some of the aforementioned embodiments, and will not be elaborated here.

[0439] In some embodiments, according to the target open area, the open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel is configured, and then the method includes:

[0440] Step S170: based on the arrangement relationship between the air outlet group and the drainage channel on the first surface, the first air outlet group, the drainage channel adjacent to the first air outlet group, and the second air outlet group adjacent to the first air outlet group are combined as a body; the first air outlet group and the second air outlet group are groups of different types of gases output among all the air outlet groups;

[0441] Step S180: Based on the assembly, configure at least one sub-drainage cavity connected to all the air outlets and the inlets of all the drainage channels in the assembly; wherein different assemblies correspond to different sub-drainage cavities, and all sub-drainage cavities are independent of each other.

[0442] The relevant implementation methods and advantages of the sub-drainage cavity can be understood by referring to the contents illustrated in some of the aforementioned embodiments, and will not be elaborated here.

[0443] It should be noted that the relevant contents, implementation methods and advantages of the flow distribution parts and flow distribution components involved in the setting method of the flow distribution structure illustrated above can be understood by referring to some of the aforementioned embodiments. In addition, the relevant acquisition process and determination process involved in the setting method of the flow distribution structure illustrated above can be obtained by manual acquisition and calculation, or by setting some modules for acquisition and calculation. It can be set according to the specific use process, and no specific restrictions are made here.

[0444] It should be understood that the steps in the flowcharts illustrated above are not necessarily executed in the order shown, as long as the setting requirements can be met. Unless otherwise clearly stated in this document, these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least part of the steps or stages in other steps.

[0445] Based on the same invention concept, please refer to Fig.23 , the embodiment of the present application provides a processing device 100, including a flow distribution device. The flow distribution device includes at least one of the following: a flow distribution member in any of the above embodiments; a flow distribution assembly in any of the above embodiments; a flow distribution structure manufactured using the setting method of the flow distribution structure in any of the above embodiments.

[0446] Exemplarily, the processing equipment 100 may be a coating equipment, which may be used in an ALD (Atomic Layer Deposition) process or a CVD (Chemical Vapor Deposition) process. Of course, the coating equipment 100 may also be used in any other process that requires the use of a flow distribution device. It may be configured according to specific usage requirements, and no specific limitation is made here.

[0447] The advantages possessed by the flow distribution member or flow distribution assembly in any of the above embodiments are also possessed by the processing equipment 100 and will not be elaborated here.

[0448] In some embodiments, please refer to Fig.23 The processing equipment 100 further includes a driving roller 121 for conveying the substrate. A plurality of flow distribution devices are provided, and all flow distribution devices are sequentially arranged around a partial area of ​​the circumferential side wall of the driving roller 121. The flow distribution device is spaced apart from the circumferential side wall of the driving roller 121, and the flow distribution surface of the flow distribution device is arranged toward the circumferential side wall of the driving roller.

[0449] For example, Fig.23For example, the flow distribution device adopts a flow distribution component 130, and the coating equipment 100 includes a reaction chamber 110 and a transmission mechanism 120. The reaction chamber 110 has a reaction chamber Q1, and an input port s1 and an output port s2 both connected to the reaction chamber Q1. The transmission mechanism 120 is arranged in the reaction chamber Q1, and the transmission mechanism 120 is configured to transfer the substrate 200 from the input port s1 to the output port s2, and the transmission mechanism 120 includes a transmission roller 121. Among them, the flow distribution component 130 is arranged in the reaction chamber Q1, and the flow distribution device 130 corresponds to the conveying path of the substrate 200. The flow distribution device 130 is used to distribute the chemical source to the substrate 200.

[0450] In this way, by using a plurality of flow distribution devices together, it is not only convenient to set up the flow distribution device, but also can reduce the difficulty and processing cost of manufacturing the flow distribution device, and at the same time can also arrange the required process gases more flexibly.

[0451] In some embodiments, please refer to Figure 1 and Fig.23 , and in combination with the flow distribution member and flow distribution assembly 130 illustrated in some of the aforementioned embodiments, the main body 131 of the flow distribution device has a first surface b1 disposed toward the driving roller 121, and the first surface b1 is configured as an arc surface.

[0452] In this way, by configuring the first surface b1 as an arc surface, the gap defined between the flow distribution device and the driving roller 121 can be more uniform, thereby improving the coating quality.

[0453] In some embodiments, the processing equipment is configured as a coating equipment. This is conducive to improving the coating quality. Of course, in some other embodiments, the processing equipment can also be applied to various fields that require distribution and processing, such as the energy field, chemical field, environmental protection field, and electronic and electrical fields, as shown in some of the aforementioned embodiments, and no specific limitation is made here.

[0454] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0455] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A flow distribution component, characterized in that: The invention comprises a main body; the main body has a first air passage, and an air inlet and an air outlet both connected to the first air passage; the main body comprises a first surface and a second surface, the first surface is provided with a plurality of the air outlets, and the second surface is provided with the air inlet; The distribution density of the air outlet holes per unit area on the first surface is positively correlated with the distribution distance; The distribution density of the air outlet holes in the unit area on the first surface is the ratio of the total opening area of ​​all the air outlet holes in the unit area to the area of ​​the unit area; the distribution distance is the distance between the unit area and the air inlet hole.

2. The flow distribution member according to claim 1, characterized in that: The distribution density of the air outlet holes on at least part of the unit area increases continuously with the increase of the distribution distance; or The distribution density of the air outlet holes on at least part of the unit area increases in stages as the distribution distance increases; or The distribution density of the air outlet holes on at least part of the unit area increases irregularly with the increase of the distribution distance.

3. The flow distribution member according to claim 1, characterized in that: The distribution density of the air outlet holes on at least part of the unit area increases according to a first preset rule as the distribution distance increases.

4. The flow distribution member according to claim 3, characterized in that: The first preset rule includes at least one of a number series rule, a function relationship rule, and a recursive logic rule.

5. The flow distribution member according to claim 3, characterized in that: The distribution density of the air outlet holes on at least part of the unit area increases in a first preset series as the distribution distance increases.

6. The flow distribution member according to claim 5, characterized in that: The first preset number sequence is configured to have multiple number sequence types; or The first preset number sequence is configured to have a number sequence type.

7. The flow distribution member according to claim 5, characterized in that: The first preset number sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence.

8. The flow distribution member according to claim 1, characterized in that: The main body has at least one air inlet hole connected to the first air channel, and the distribution distance is the minimum distance between the unit area and the at least one air inlet hole along the extension direction of the first air channel; The distance between two adjacent air outlet holes on the first surface in the extension direction of the first air duct is negatively correlated with the center distance of the first area; the center distance of the first area is the minimum distance between the center of the area between the two air outlet holes and the at least one air inlet hole in the extension direction of the first air duct.

9. The flow distribution member according to claim 8, characterized in that: In at least part of the unit area, the distance between two adjacent air outlet holes on the first surface along the extension direction of the first air channel in the extension direction of the first air channel increases continuously as the distance from the center of the first area decreases; or In at least part of the unit area, the distance between two adjacent air outlet holes on the first surface along the extension direction of the first air channel increases in stages as the center distance of the first area decreases; or In at least part of the unit area, the distance between two adjacent air outlet holes on the first surface along the extension direction of the first air channel increases irregularly as the center distance of the first area decreases.

10. The flow distribution member according to claim 8, characterized in that: In at least part of the unit area, the distance between two adjacent air outlet holes on the first surface along the extension direction of the first air channel increases in accordance with a second preset rule as the center distance of the first area decreases.

11. The flow distribution member according to claim 1 or 8, characterized in that: The main body has at least one air inlet hole connected to the first air channel, and the distribution distance is the minimum distance between the unit area and the at least one air inlet hole; The aperture of the air outlet on the first surface is positively correlated with the first hole center distance; the first hole center distance is the minimum distance between the center of the air outlet and the center of the at least one air inlet along the extension direction of the first air duct.

12. The flow distribution member according to claim 11, characterized in that: In at least a portion of the unit area, the diameter of the air outlet holes on the first surface increases continuously as the center distance of the first holes increases; or In at least part of the unit area, the diameter of the air outlet holes on the first surface increases in stages as the distance from the center of the first holes increases; or In at least a portion of the unit area, the diameter of the air outlet holes on the first surface increases irregularly as the distance from the center of the first hole increases.

13. The flow distribution member according to claim 11, characterized in that: In at least a portion of the unit area, the diameter of the air outlet holes on the first surface increases according to a third preset rule as the distance from the center of the first hole increases.

14. The flow distribution member according to claim 10 or 13, characterized in that: At least one of the second preset rule and the third preset rule is a target rule, and the target rule satisfies one of the following rules: First law: the target law includes at least one of a sequence law, a function relationship law, and a recursive logic law; Second rule: the target rule includes a first target number sequence rule, and the number sequence corresponding to the first target number sequence rule is configured to have multiple number sequence types or one number sequence type; The third rule: the target rule includes the second target number sequence rule, and the number sequence corresponding to the second target number sequence rule includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence.

15. The flow distribution member according to any one of claims 1-10, 12 and 13, characterized in that: The main body has a plurality of air inlet holes connected to the first air channel, and the distribution distance is the minimum distance between the unit area and the plurality of air inlet holes along the extension direction of the first air channel; The first air channel has a first end and a second end that are arranged opposite to each other along the extension direction of the first air channel, and the first end and the second end are both configured as air inlet ends correspondingly connected to the plurality of air inlet holes; Wherein, in at least part of the unit area, the distance between two adjacent air outlets on the first surface along the extension direction of the first air channel increases in the extension direction of the first air channel in the form of at least one of a geometric progression, an arithmetic progression, a Fibonacci sequence, and a large derivative sequence as the distance from the center of the second area decreases; The center distance of the second area is the minimum distance among the first corresponding distances, and the first corresponding distance includes the distance between the center of the area between the two air outlets and the first end along the extension direction of the first air channel, and the distance between the center of the area between the two air outlets and the second end along the extension direction of the first air channel.

16. The flow distribution member according to any one of claims 1-10, 12, and 13, characterized in that: The main body has a plurality of air inlet holes connected to the first air channel, and the distribution distance is the minimum distance between the unit area and the plurality of air inlet holes along the extension direction of the first air channel; The first air channel has a first end and a second end that are arranged opposite to each other along the extension direction of the first air channel, and the first end and the second end are both configured as air inlet ends correspondingly connected to the plurality of air inlet holes; Wherein, in at least part of the unit area, the aperture of the vent holes on the first surface increases in at least one of a geometric progression, an arithmetic progression, a Fibonacci sequence, and a large derivative sequence as the distance from the center of the second hole increases; The second hole center distance is the minimum distance among the second corresponding distances, and the second corresponding distances include the distance between the center of the air outlet hole and the first end along the extension direction of the first air channel, and the distance between the center of the air outlet hole and the second end along the extension direction of the first air channel.

17. The flow distribution member according to any one of claims 1-10, 12, and 13, characterized in that: Along a direction intersecting with an extending direction of the first air channel, all the air outlet holes are arranged in a plurality of rows on the first surface; In at least one row of the air outlet holes, the distribution density of the air outlet holes per unit area on the first surface is positively correlated with the distribution distance.

18. The flow distribution member according to any one of claims 1-10, 12, and 13, characterized in that: There are a plurality of first surfaces, all of which are arranged in sequence along a direction intersecting with the extending direction of the first air channel, and the air outlets on all of the first surfaces are arranged toward the same side; All the air outlet holes on each of the first surfaces form an air outlet hole group, and among all the air outlet hole groups there are a first air outlet hole group and a second air outlet hole group, and the first air outlet hole group and the second air outlet hole group output different types of gases; The total opening area of ​​the first air outlet group is smaller than the total opening area of ​​the second air outlet group.

19. The flow distribution member according to claim 18, characterized in that: The apertures of the air outlet holes in the first air outlet hole group and the apertures of the air outlet holes in the second air outlet hole group are equal.

20. The flow distribution member according to claim 19, characterized in that: The apertures of the air outlet holes in the first air outlet hole group and the apertures of the air outlet holes in the second air outlet hole group are both in a range of 0.1 mm to 30 mm.

21. The flow distribution member according to claim 18, characterized in that: The minimum distance between two adjacent air outlet holes in the first air outlet hole group is equal to the minimum distance between two adjacent air outlet holes in the second air outlet hole group.

22. The flow distribution member according to claim 21, characterized in that: The minimum distance between two adjacent air outlet holes in the first air outlet hole group and the minimum distance between two adjacent air outlet holes in the second air outlet hole group are both 1 mm to 50 mm.

23. The flow distribution member according to claim 18, characterized in that: For the air outlet holes in the first air outlet hole group, the distribution density of the air outlet holes in the unit area increases in a first arithmetic progression as the distribution distance increases; For the air outlet holes in the second air outlet hole group, the distribution density of the air outlet holes in the unit area increases in a second arithmetic progression as the distribution distance increases; Wherein, the first arithmetic progression and the second arithmetic progression satisfy a preset condition, and the preset condition includes at least one of the following items: The first term: the common difference of the first arithmetic progression is greater than the common difference of the second arithmetic progression; Second term: the distribution density of the first terms in the first arithmetic progression is equal to the distribution density of the first terms in the second arithmetic progression.

24. The flow distribution member according to claim 23, characterized in that: The tolerance of the first arithmetic progression is 0.002 mm to 20 mm, and the tolerance of the second arithmetic progression is 0.001 mm to 19 mm.

25. The flow distribution member according to any one of claims 1-10, 12, and 13, characterized in that: The total area of ​​all the air outlet holes on the first surface accounts for 0.5% to 95%.

26. The flow distribution member according to any one of claims 1-10, 12, and 13, characterized in that: The main body is further provided with a groove body arranged in one-to-one correspondence with the first surface, the first surface constitutes the corresponding bottom wall of the groove body, and all the air outlet holes on the first surface are connected to the groove body.

27. A flow distribution component, characterized in that: The flow distribution member comprises the flow distribution member according to any one of claims 1 to 26; all the air outlet holes constitute a plurality of air outlet hole groups; among all the air outlet hole groups, two adjacent air outlet hole groups output different types of gases; The main body is also provided with a drainage cavity and a drainage channel connected to the drainage cavity; the drainage channel is arranged between two adjacent groups of gas outlet holes with different output gas types, and the inlets of all the drainage channels and all the gas outlet holes are arranged toward the same side.

28. The flow distribution assembly according to claim 27, characterized in that: The drainage channel has an outlet connected to the inlet of the drainage channel; The open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel is negatively correlated with the spatial distance; The spatial distance is the distance between the unit spatial area and the air inlet.

29. The flow distribution assembly according to claim 28, characterized in that: The open area of ​​at least part of the outlet of the drainage channel within the unit space area of ​​the drainage channel increases continuously as the spatial distance decreases; or The open area of ​​at least part of the outlet of the drainage channel within the unit space area of ​​the drainage channel increases in stages as the spatial distance decreases; or The open area of ​​at least part of the outlet of the drainage channel within the unit space area of ​​the drainage channel increases irregularly as the spatial distance decreases.

30. The flow distribution assembly according to claim 28, characterized in that: The open area of ​​at least part of the outlet of the drainage channel within the unit space area of ​​the drainage channel increases according to a fourth preset rule as the spatial distance decreases.

31. The flow distribution assembly according to claim 30, characterized in that: The fourth preset rule includes at least one of a number series rule, a function relationship rule, and a recursive logic rule.

32. The flow distribution assembly according to claim 31, characterized in that: The open area of ​​at least part of the outlets of the drainage channel within the unit space area of ​​the drainage channel increases in a second preset series as the spatial distance decreases.

33. The flow distribution assembly according to claim 32, characterized in that: The second preset number sequence is configured to have multiple number sequence types; or The second preset number sequence is configured to have a number sequence type.

34. The flow distribution member according to claim 32, characterized in that: The second preset number sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a Dayan sequence.

35. The flow distribution assembly according to claim 28, characterized in that: The main body has a plurality of air inlet holes communicating with the first air passage; The spatial distance is the minimum distance between the unit spatial area and the plurality of air inlet holes.

36. The flow distribution assembly according to claim 28, characterized in that: The flow distribution assembly further includes a movably arranged adjustment member, wherein the adjustment member is configured to adjust an open area of ​​an outlet of the drainage channel; Wherein, the adjusting member is provided with a plurality of adjusting holes; and the open area of ​​the outlet of the drainage channel is defined by the overlapping area of ​​the outlet of the drainage channel and the adjusting holes.

37. The flow distribution assembly according to claim 36, characterized in that: The adjusting member includes a plurality of sub-adjusting members, and the sub-adjusting members are provided with a plurality of adjusting holes; the outlet of the drainage channel includes a plurality of sub-outlets that are independent of each other; All the regulating holes are arranged in one-to-one correspondence with all the sub-outlets; the open area of ​​the sub-outlet is defined by the overlapping area between the sub-outlet and the corresponding regulating hole.

38. The flow distribution assembly according to claim 36, characterized in that: The outlet of the drainage channel includes an edge outlet arranged close to the edge of the main body, and the adjusting member includes an edge adjusting member arranged close to the edge of the main body and corresponding to the edge outlet; The open area of ​​the edge outlet is defined by the overlapping area between the edge outlet and the corresponding adjustment hole on the edge adjustment member.

39. The flow distribution assembly according to any one of claims 27 to 38, characterized in that: There are a first gas outlet group and a second gas outlet group in all the gas outlet groups, all the first gas outlet groups are configured to output a plurality of first gases, all the gas outlets in each of the first gas outlet groups are configured to output the same first gas, and the second gas outlet group is configured to output a second gas; Wherein, all the air outlet groups and all the drainage channels are arranged continuously and adjacently in a preset order; and the preset order satisfies at least one of the following conditions: The first condition: based on the order from front to back of the preset order, the preceding and succeeding order of each of the gas outlet groups are both the drainage channels, the second gas outlet group is between two adjacent first gas outlet groups for outputting different first gases, and the first gas outlet groups and the second gas outlet groups are arranged alternately; Second condition: the first one in the preset sequence is the second air outlet group, and the last one in the preset sequence is the drainage channel; or, the first and last ones in the preset sequence are both the second air outlet group; The third condition: the first gas outlet groups corresponding to any two different types of first gases appear the same number of times.

40. The flow distribution assembly according to claim 39, characterized in that: The preset order at least satisfies the first condition; Based on the order from front to back of the preset sequence, the first air outlet group, the drainage channel located before the first air outlet group, the drainage channel located after the first air outlet group, and the second air outlet group adjacent to the first air outlet group constitute a combination; The flow distribution assembly further includes a plurality of isolating members disposed in the drainage cavity, wherein the plurality of isolating members divide the drainage cavity into a plurality of mutually independent sub-drainage cavities; Each of the assemblies corresponds to at least one sub-drainage cavity, and all of the air outlets and inlets of all of the drainage channels in the same assembly are connected to the corresponding at least one sub-drainage cavity, and different assemblies correspond to different sub-drainage cavities.

41. The flow distribution assembly according to claim 40, characterized in that: All the assemblies are arranged in one-to-one correspondence with all the sub-drainage cavities; All the air outlet holes and the inlets of the drainage channels in the same assembly are communicated with the corresponding sub-drainage chambers.

42. The flow distribution assembly according to any one of claims 27 to 38, characterized in that: The main body is provided with a plurality of; All the main bodies are arranged in sequence, and the air inlet ends of the first air passages of all the main bodies are located on the same side, and all the air outlets are arranged toward the same side.

43. The flow distribution assembly according to any one of claims 27 to 38, characterized in that: The first airway is provided with a plurality of The flow distribution component further includes a flow divider configured to divide the gas to be distributed into a plurality of the first gas channels.

44. The flow distribution assembly according to any one of claims 27 to 38, characterized in that: The flow distribution assembly also includes a protective member connected to the peripheral side of the main body; The protective member has a blowing channel and a plurality of blowing holes connected to the blowing channel; all the blowing holes define a blowing area, and all the outlet holes define an outlet area, and the blowing area is at least partially arranged around the outlet area.

45. The flow distribution assembly according to any one of claims 27 to 38, characterized in that: The flow distribution assembly also includes a heating element; The heating element is connected to the main body, and is configured to heat the gas input into the first air channel.

46. ​​A method for setting a flow distribution structure, characterized in that: include: Based on the distance relationship between the unit area of ​​the first surface of the flow distribution component and the air inlet holes on the second surface of the flow distribution component, the distribution density of the air outlet holes to be set on the first surface within the unit area of ​​the first surface is determined; the distribution density of the air outlet holes to be set within the unit area of ​​the first surface is positively correlated with the distribution distance; the distribution density of the air outlet holes to be set within the unit area of ​​the first surface is the ratio of the total opening area of ​​all the air outlet holes to be set within the unit area to the area of ​​the unit area; the distribution distance is the distance between the unit area and the air inlet holes; According to the distribution density, air outlet holes are arranged on the first surface.

47. The method for setting up a flow distribution structure according to claim 46, characterized in that: The determining of the distribution density of the air outlet holes to be arranged on the first surface within the unit area of ​​the first surface based on the distance relationship between the unit area of ​​the first surface of the flow distribution member and the air inlet holes on the second surface of the flow distribution member comprises: Based on the distance relationship between the unit area of ​​the first surface and the air inlet, a threshold range of structural parameters of the air outlet holes to be arranged in each unit area is determined; wherein the structural parameters include the aperture of the air outlet holes to be arranged and the spacing between adjacent air outlet holes to be arranged; Combining each structural parameter within the threshold range in a preset configuration to obtain the distribution density; The preset configuration method includes at least one of the following configuration methods: The first configuration mode: for a target unit area, all the air outlet holes have the same aperture, and the distribution density is configured based on the change in the spacing between adjacent air outlet holes to be set; The second configuration mode: for the target unit area, the spacing between the adjacent air outlet holes to be set is the same, and the distribution density is configured based on the change of the aperture of the air outlet holes; The third configuration mode: for a target unit area, the distribution density is configured based on the change in the spacing between adjacent air outlet holes to be set and the change in the aperture of the air outlet holes.

48. The method for setting up a flow distribution structure according to claim 47, characterized in that: The step of determining a threshold range of a structural parameter of the vent hole to be set in each unit area includes: Based on the arrangement rule of the spacing between two adjacent air outlet holes to be set, the distribution rule of the air outlet holes to be set is determined; the arrangement rule of the spacing between the two adjacent air outlet holes to be set includes that the spacing between the two adjacent air outlet holes to be set is negatively correlated with the center distance of the first area; the center distance of the first area is the distance between the center of the area between the two air outlet holes to be set and the air inlet along the extension direction of the first air channel to be set; the first air channel to be set is used for corresponding communication with the air outlet holes to be set; Based on the distribution law, a threshold range of the structural parameters of the air outlet to be set is determined.

49. The method for setting up a flow distribution structure according to claim 47, characterized in that: The step of determining a threshold range of a structural parameter of the vent hole to be set in each unit area includes: Based on the arrangement rule of the apertures of the air outlet holes to be set, the distribution rule of the air outlet holes to be set is determined; the arrangement rule of the apertures of the air outlet holes to be set includes that the apertures of the air outlet holes to be set are positively correlated with the hole center distance; the hole center distance is the distance between the center of the air outlet holes to be set and the air inlet along the extension direction of the first air channel to be set; the first air channel to be set is used for corresponding communication with the air outlet holes to be set; Based on the distribution law, a threshold range of the structural parameters of the air outlet to be set is determined.

50. The method for setting up a flow distribution structure according to claim 47, characterized in that: The step of determining a threshold range of a structural parameter of the vent hole to be set in each unit area includes: Based on the arrangement rule of the spacing between two adjacent air outlet holes to be set and the arrangement rule of the apertures of the air outlet holes to be set, the distribution rule of the air outlet holes to be set is determined; the arrangement rule of the spacing between two adjacent air outlet holes to be set includes that the spacing between two adjacent air outlet holes to be set is negatively correlated with the area center distance; the area center distance is the distance between the center of the area between the two air outlet holes to be set and the air inlet hole; the arrangement rule of the apertures of the air outlet holes to be set includes that the aperture of the air outlet holes to be set is positively correlated with the hole center distance; the hole center distance is the distance between the center of the air outlet hole to be set and the air inlet hole along the extension direction of the first air duct to be set; the first air duct to be set is used for corresponding communication with the air outlet holes to be set; Based on the distribution law, a threshold range of the structural parameters of the air outlet to be set is determined.

51. The method for setting up a flow distribution structure according to any one of claims 46 to 50, characterized in that: The determining of the distribution density of the air outlet holes to be arranged on the first surface within the unit area of ​​the first surface based on the distance relationship between the unit area of ​​the first surface of the flow distribution member and the air inlet holes on the second surface of the flow distribution member comprises: Determining all unit area regions constituting the first surface based on the size of the unit area region of the first surface; Based on the position of each of the unit area regions and the position of the air inlet hole, determining the distance between each of the unit area regions and the air inlet hole; The corresponding distances of each unit area are compared to obtain a first size relationship between the distances of each unit area and the air inlet, and the first size relationship is used as the distance relationship between the unit area of ​​the first surface of the flow distribution component and the air inlet.

52. The method for setting up the flow distribution structure according to claim 51, characterized in that: The determining, based on the distance relationship between the unit area of ​​the first surface of the flow distribution member and the air inlet holes on the second surface of the flow distribution member, the distribution density of the air outlet holes to be arranged on the first surface within the unit area of ​​the first surface comprises: Determining a target relationship between the distribution densities of the air outlet holes to be arranged on each of the unit area regions according to the first size relationship; Based on the target relationship, determining the distribution density of the air outlet holes to be set on each of the unit area regions; The target relationship satisfies one of the following target conditions: First target condition: the distribution density of the air outlet holes to be arranged on at least part of the unit area in the at least part of the unit area continuously increases with the increase of the distribution distance; Second target condition: the distribution density of the air outlet holes to be arranged on at least part of the unit area increases in stages as the distribution distance increases; The third target condition: the distribution density of the vent holes to be arranged on at least part of the unit area increases according to a first preset rule as the distribution distance increases; the first preset rule includes at least one of a sequence rule, a function relationship rule, and a recursive logic rule; Fourth target condition: the distribution density of the vent holes to be arranged on at least part of the unit area in the at least part of the unit area increases in a first preset sequence as the distribution distance increases; the first preset sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a large derivative sequence; Fifth target condition: the distribution density of the air outlet holes to be set on at least part of the unit area increases irregularly with the increase of the distribution distance.

53. The method for setting up a flow distribution structure according to any one of claims 46 to 50, characterized in that: The method for setting the flow distribution structure also includes: Based on the type of gas output by the gas outlet holes to be arranged on the first surface, the distribution densities corresponding to the gas outlet holes to be arranged on the first surface are respectively determined.

54. The method for setting up the flow distribution structure according to claim 53, characterized in that: The method for setting the flow distribution structure also includes: Based on the plurality of gas outlet groups to be set formed by all the gas outlets to be set, a drainage channel is arranged between two adjacent gas outlet groups outputting different gas types; the inlets of all the drainage channels and all the gas outlets are arranged toward the same side; Based on the distance relationship between the unit space area of ​​the drainage channel and the air inlet, a target open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel is determined; the drainage channel has an outlet connected to the entrance of the drainage channel; the target open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel is negatively correlated with the spatial distance; the spatial distance is the distance between the unit space area and the air inlet; The open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel is configured according to the target open area.

55. The method for setting up a flow distribution structure according to claim 54, characterized in that: The step of determining a target open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel based on the distance relationship between the unit space area of ​​the drainage channel and the air inlet hole comprises: Based on the size of the unit space area of ​​the drainage channel, determining all unit space areas constituting the drainage channel; Based on the positions of the unit space regions and the air inlet holes, determining the distance between the unit space regions and the air inlet holes; The corresponding distances of each unit space area are compared to obtain a second size relationship between each unit space area and the air inlet, and the second size relationship is used as the distance relationship between the unit space area of ​​the drainage channel and the air inlet.

56. The method for setting up a flow distribution structure according to claim 55, characterized in that: The determining, based on the distance relationship between the unit space area of ​​the drainage channel and the air inlet, a target open area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel comprises: Determining, based on the second size relationship, an area relationship between target open areas corresponding to each of the unit space regions; Based on the area relationship, determining the target open area corresponding to each of the unit space areas; Wherein, the area relationship satisfies one of the following area conditions: First area condition: the target open area of ​​at least part of the outlet of the drainage channel within the unit space area of ​​the drainage channel increases continuously as the spatial distance decreases; Second area condition: the target open area of ​​at least part of the outlet of the drainage channel within the unit space area of ​​the drainage channel increases in stages as the spatial distance decreases; Third area condition: the target open area of ​​at least part of the outlet of the drainage channel within the unit space area of ​​the drainage channel increases according to a fourth preset rule as the spatial distance decreases; the fourth preset rule includes at least one of a sequence rule, a function relationship rule, and a recursive logic rule; Fourth area condition: the target open area of ​​at least part of the outlet of the drainage channel within the unit space area of ​​the drainage channel increases in a second preset sequence as the spatial distance decreases; the second preset sequence includes at least one of a geometric sequence, an arithmetic sequence, a Fibonacci sequence, and a large derivative sequence; Fifth area condition: the target open area of ​​at least part of the outlet of the drainage channel within the unit spatial area of ​​the drainage channel increases irregularly as the spatial distance decreases.

57. The method for setting up a flow distribution structure according to claim 54, characterized in that: The step of configuring the opening area of ​​the outlet of the drainage channel within the unit space area of ​​the drainage channel according to the target opening area comprises: Based on the arrangement relationship between the air outlet group and the drainage channel on the first surface, the first air outlet group, the drainage channel adjacent to the first air outlet group, and the second air outlet group adjacent to the first air outlet group are combined as a combination; the first air outlet group and the second air outlet group are groups of different types of gases output among all the air outlet groups; Based on the assembly, at least one sub-drainage cavity connected to all the air outlets and the inlets of all the drainage channels in the assembly is configured; wherein different assemblies correspond to different sub-drainage cavities, and all the sub-drainage cavities are independent of each other.

58. A processing equipment, characterized in that: including a flow distribution device; The flow distribution device includes at least one of the following: The flow distribution member according to any one of claims 1 to 26; A distribution assembly as described in any one of claims 27 to 45; The flow distribution structure is manufactured using the flow distribution structure setting method as described in any one of claims 46-57.

59. The processing equipment according to claim 58, characterized in that The processing equipment also includes a transmission roller for conveying the substrate; There are multiple flow distribution devices, all of which are arranged in sequence around a partial area of ​​the circumferential side wall of the drive roller; the flow distribution devices are spaced apart from the circumferential side wall of the drive roller, and the flow distribution surfaces of the flow distribution devices are arranged toward the circumferential side wall of the drive roller.

60. The processing equipment according to claim 59, characterized in that The main body of the flow distribution device has a first surface arranged toward the driving roller, and the first surface is configured as an arc surface.

61. The processing equipment according to any one of claims 58 to 60, characterized in that The processing equipment is configured as a coating equipment.

Images