Single crystal furnace

Abstract

The present invention discloses a single crystal furnace, which comprises: a furnace body, a furnace chamber is formed in the furnace body, and a gas inlet is formed in the top wall of the furnace chamber of the furnace body; the crucible is mounted in the furnace chamber, and a crucible opening which is open towards the air inlet is formed in the crucible; the flow guide device is installed in the furnace chamber and located above the crucible, a flow guide channel is formed in the flow guide device, a flow guide inlet communicated with the air inlet is formed in the upper end of the flow guide device, and a flow guide outlet communicated with the crucible opening is formed in the lower end of the flow guide device. According to the single crystal furnace disclosed by the embodiment of the invention, the flow guide device is arranged to guide the flow of the gas, so that the gas entering the furnace chamber from the gas inlet can flow to the crucible along the flow guide channel, the crystal bar is cooled in the flowing process, the flow of the gas can be more gathered, and the crystal bar is fully cooled; and the cooling effect on the crystal bar is improved.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal silicon manufacturing, and in particular to a single crystal furnace. Background Art

[0002] After the existing straight-pull single crystal pulling is completed, the crystal rod needs to be gradually cooled for a period of time before it can be safely taken out. However, during the cooling process of the crystal rod, crystal cracks are prone to occur, resulting in crystal rod loss and increased costs. The reason for crystal cracks is mostly due to insufficient cooling, which causes uneven release of crystal stress. There is room for improvement. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a single crystal furnace, which can guide the flow of gas so that the gas can flow along the guide channel to cool the crystal rod during the flow, and can make the flow of gas more concentrated to fully cool the crystal rod, improve the cooling effect of the crystal rod, and reduce the occurrence of crystal cracks.

[0004] According to an embodiment of the present invention, the single crystal furnace includes: a furnace body, a furnace cavity is formed in the furnace body, and an air inlet is formed on the top wall of the furnace cavity; a crucible, the crucible is installed in the furnace cavity, and the crucible is formed with a crucible opening open toward the air inlet; a guide device, the guide device is installed in the furnace cavity and is located above the crucible, a guide channel is formed in the guide device, a guide inlet connected to the air inlet is formed at the upper end of the guide device, and a guide outlet connected to the crucible opening is formed at the lower end of the guide device.

[0005] According to the single crystal furnace of the embodiment of the present invention, the crucible and the guide device can be installed by setting up the furnace chamber. The guide device can guide the flow of gas, so that the gas entering the furnace chamber from the air inlet can flow to the crucible along the guide channel, so as to cool the crystal rod during the flow, and the flow of gas can be made more concentrated to fully cool the crystal rod, thereby improving the cooling effect of the crystal rod and reducing the occurrence of crystal cracks.

[0006] According to some embodiments of the single crystal furnace of the present invention, the guide device is configured to be detachably connected to the top wall of the furnace chamber.

[0007] According to some embodiments of the single crystal furnace of the present invention, the top wall of the furnace chamber is provided with a first hanging portion, the upper end of the guide device is provided with a second hanging portion, and the guide device is suspended on the first hanging portion through the second hanging portion.

[0008] According to some embodiments of the single crystal furnace of the present invention, the first hanging part is configured as a hanging rod, the hanging rod is formed with a hanging groove open upward, and the second hanging part is configured as a hanging protrusion protruding downward, and the hanging protrusion extends into the hanging groove.

[0009] According to some embodiments of the single crystal furnace of the present invention, the hanging rod includes a hanging rod portion, a hanging support portion and a hook portion, the hanging rod portion is connected to the furnace body, the hanging rod portion and the hook portion are respectively bent upward and connected to two ends of the hanging support portion, the hook portion is spaced apart from the hanging rod portion and together with the hanging support portion defines the hanging groove.

[0010] According to the single crystal furnace of some embodiments of the present invention, the upper end of the hook portion is lower than the upper end of the hanging rod portion.

[0011] According to the single crystal furnace of some embodiments of the present invention, the upper end of the guide device is provided with a hanging flange extending outward, the hanging protrusion is connected to the hanging flange, and the hanging protrusion is constructed as a hanging block protruding downward relative to the hanging flange.

[0012] According to some embodiments of the single crystal furnace of the present invention, there are multiple first hanging parts and multiple second hanging parts, the multiple first hanging parts are matched with the multiple second hanging parts in a one-to-one correspondence, and the multiple second hanging parts are distributed at intervals in the circumferential direction of the guide device.

[0013] The single crystal furnace according to some embodiments of the present invention further includes a heat shield structure, which is installed in the furnace chamber and located above the crucible. The heat shield structure forms a heat shield channel that runs through the upper and lower directions. At least a portion of the lower end of the guide device extends into the heat shield channel, and the lower end of the heat shield channel extends into the crucible mouth.

[0014] According to the single crystal furnace of some embodiments of the present invention, the inner wall of the heat shield channel is spaced apart from the outer peripheral wall of the flow guide device.

[0015] According to some embodiments of the single crystal furnace of the present invention, the heat shield structure is movable in the up and down directions relative to the furnace body; and / or the heat shield structure includes an outer guide tube, an inner guide tube and a water-cooled shield, and the outer guide tube and the inner guide tube are filled with thermal insulation felt.

[0016] According to some embodiments of the single crystal furnace of the present invention, the furnace body includes a furnace cover and a furnace barrel, the furnace cover is connected to the top of the furnace barrel and defines the furnace cavity together with the furnace barrel, the air inlet is arranged on the furnace cover, and the guide device is connected to the furnace cover.

[0017] According to some embodiments of the single crystal furnace of the present invention, the distance between the guide inlet and the air inlet is d, and satisfies: 20mm≤d≤50mm.

[0018] According to the single crystal furnace of some embodiments of the present invention, the lower end of the guide device is also provided with a camera capture port and / or an observation port connected to the guide outlet; the top wall of the furnace cavity is provided with a camera installation port and an observation window, the camera installation port is arranged opposite to the camera capture port, and the observation window is arranged opposite to the observation port.

[0019] According to the single crystal furnace of some embodiments of the present invention, the inner diameter of the flow guide inlet is larger than the inner diameter of the flow guide outlet.

[0020] According to some embodiments of the single crystal furnace of the present invention, a sub-chamber is further provided on the top of the furnace body, an air inlet channel is formed in the sub-chamber, and the air inlet channel is communicated with the air inlet port.

[0021] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0023] Figure 1 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present invention;

[0024] Figure 2 is a schematic structural diagram of a flow guiding device according to an embodiment of the present invention;

[0025] Figure 3 is a schematic structural diagram of a first hanging portion according to an embodiment of the present invention;

[0026] Figure 4 It is a schematic diagram of the connection between the flow guiding device and the first hanging part according to an embodiment of the present invention.

[0027] Reference numerals:

[0028] Single crystal furnace 100,

[0029] Furnace body 1, furnace cavity 11, air inlet 12, first hanging part 13, hanging groove 131, hanging rod part 132, hanging support part 133, hook part 134, furnace cover 14, furnace barrel 15, auxiliary chamber 16, air inlet channel 161,

[0030] Crucible 2, crucible mouth 21,

[0031] The flow guiding device 3, the flow guiding channel 31, the flow guiding inlet 32, the flow guiding outlet 33, the second hanging part 34, the hanging flange 35, the camera capture port 36, the observation port 37,

[0032] Heat shield structure 4 , heat shield channel 41 . DETAILED DESCRIPTION

[0033] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0035] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] Reference below Figure 1-Figure 4 The single crystal furnace 100 according to an embodiment of the present invention is described. By setting a guide device 3, the flow of gas can be guided, so that the gas entering the furnace chamber 11 from the air inlet 12 can flow to the crucible 2 along the guide channel 31, so as to cool the crystal rod during the flow, and the flow of gas can be made more concentrated to fully cool the crystal rod, thereby improving the cooling effect of the crystal rod and reducing the occurrence of crystal cracks.

[0037] like Figure 1 As shown, a single crystal furnace 100 according to an embodiment of the present invention includes: a furnace body 1, a crucible 2 and a flow guide device 3.

[0038] A furnace cavity 11 is formed in the furnace body 1, and an air inlet 12 is formed on the top wall of the furnace cavity 11 of the furnace body 1; a crucible 2 is installed in the furnace cavity 11, and a crucible port 21 is formed in the crucible 2 and is open toward the air inlet 12; a flow guide device 3 is installed in the furnace cavity 11 and is located above the crucible 2, and a flow guide channel 31 is formed in the flow guide device 3, a flow guide inlet 32 ​​connected to the air inlet 12 is formed at the upper end of the flow guide device 3, and a flow guide outlet 33 connected to the crucible port 21 is formed at the lower end of the flow guide device 3.

[0039] Specifically, the single crystal furnace 100 is a device for growing single crystal materials, which can make the materials grow according to a specific crystal structure to form single crystals, such as single crystal silicon rods, etc. The furnace body 1 serves as the outer shell structure of the single crystal furnace 100 and can provide a closed space to facilitate the control of environmental conditions such as temperature during the growth of the crystal rod. The crucible 2 serves as a container and can be used to contain raw materials, such as polycrystalline silicon raw materials during the pulling process of single crystal silicon rods, and the crucible 2 can be a quartz crucible to improve the high temperature resistance of the crucible 2. The flow guide device 3 is used to guide the flow of gas, such as guiding the flow of argon gas to make the argon gas flow more concentrated, and the blowing cooling effect on the crystal rod is also better, so that the crystal rod can be cooled more fully.

[0040] In addition, a furnace chamber 11 is formed in the furnace body 1. The furnace chamber 11 can provide a certain space to accommodate the crucible 2 and the guide device 3, etc., that is, the crucible 2 and the guide device 3 can be installed in the furnace chamber 11 to achieve the installation of the crucible 2 and the guide device 3, and an air inlet 12 is formed on the top wall of the furnace chamber 11. The air inlet 12 can connect the furnace chamber 11 with the external space or other components, so that the gas in the external space or other components can enter the furnace chamber 11 to cool the crystal rod, and the guide device 3 is set on the crucible. Above the crucible 2, the air inlet 12, the guide device 3 and the crucible 2 can be arranged in sequence along the up and down direction, so that the gas entering the furnace chamber 11 from the air inlet 12 can flow to the crucible 2 along the guide device 3. At the same time, the crucible 2 is formed with a crucible mouth 21 open to the air inlet 12. The crucible mouth 21 is used to allow the gas flowing into the crucible 2 to further enter the crucible 2 from the crucible mouth 21, so as to blow and cool the crystal rod during the flow process. The material of the guide device 3 can be quartz, ceramic, graphite or carbon-carbon, etc.

[0041] Moreover, the guide device 3 is formed with a guide channel 31, and the guide channel 31 allows gas to pass through so that the gas can flow along the guide channel 31, that is, the flow of the gas can be guided, and a guide inlet 32 ​​connected to the air inlet 12 is formed at the upper end of the guide device 3, and a guide outlet 33 connected to the crucible port 21 is formed at the lower end, that is, the gas entering the furnace chamber 11 from the air inlet 12 can enter the guide channel 31 from the guide inlet 32, flow along the guide channel 31 to the guide outlet 33, and then flow from the guide outlet 33 through the crucible port 21 to the inside of the crucible 2, so as to cool the crystal rod during the flow, and the flow of the gas can be more concentrated, so as to fully cool the crystal rod and improve the cooling effect of the crystal rod.

[0042] According to the single crystal furnace 100 of the embodiment of the present invention, the crucible 2 and the guide device 3 can be installed by setting the furnace chamber 11. The guide device 3 can guide the flow of gas, so that the gas entering the furnace chamber 11 from the air inlet 12 can flow to the crucible 2 along the guide channel 31, so as to cool the crystal rod during the flow, and the flow of gas can be more concentrated to fully cool the crystal rod, thereby improving the cooling effect of the crystal rod and reducing the occurrence of crystal cracks.

[0043] In some embodiments, the flow guiding device 3 is configured to be detachably connected to the top wall of the furnace cavity 11 .

[0044] Specifically, the guide device 3 is used to guide the flow of gas. The guide device 3 is connected to the top wall of the furnace chamber 11 so that the gas entering the furnace chamber 11 from the air inlet 12 can directly enter the guide device 3, so that the flow of gas can be more concentrated under the action of the guide device 3, so as to fully cool the crystal rod, and reduce the flow of gas along the inner wall of the furnace chamber 11 to cause eddy currents and airflow turbulence, thereby reducing the possibility of crystal rod shaking.

[0045] Furthermore, the guide device 3 is detachably connected to the top wall of the furnace chamber 11, so that the guide device 3 can be easily connected or separated from the top wall of the furnace chamber 11. When the guide device 3 is connected to the top wall of the furnace chamber 11, the guide device 3 can be installed so that the guide device 3 can guide the flow of gas. When the guide device 3 is separated from the top wall of the furnace chamber 11, the guide device 3 can be easily replaced to install different guide devices 3 in different furnace bodies 1, which can increase the application range of the guide device 3, and the guide device 3 can be selectively installed to adapt to different growth stages of the crystal rod, thereby improving the flexibility of the setting.

[0046] In some embodiments, a first hanging portion 13 is provided on the top wall of the furnace cavity 11 , a second hanging portion 34 is provided on the upper end of the flow guide device 3 , and the flow guide device 3 is suspended on the first hanging portion 13 through the second hanging portion 34 .

[0047] Specifically, the guide device 3 is detachably connected to the top wall of the furnace cavity 11, a first hanging portion 13 is provided on the top wall of the furnace cavity 11, and a second hanging portion 34 is provided at the upper end of the guide device 3, and the guide device 3 can be suspended on the first hanging portion 13 through the second hanging portion 34, that is, the first hanging portion 13 can be hang-connected with the second hanging portion 34, and then the connection or separation between the inner wall of the furnace cavity 11 and the guide device 3 can be achieved through the cooperation between the first hanging portion 13 and the second hanging portion 34, so as to facilitate the installation or disassembly of the guide device 3, and the hanging connection method is simple and easy to operate.

[0048] In some embodiments, the first hanging portion 13 is configured as a hanging rod, the hanging rod is formed with a hanging slot 131 open upward, and the second hanging portion 34 is configured as a hanging protrusion protruding downward, and the hanging protrusion extends into the hanging slot 131.

[0049] Specifically, the top wall of the furnace cavity 11 is provided with a first hanging portion 13, and the guide device 3 is provided with a second hanging portion 34, and the second hanging portion 34 is suspended on the first hanging portion 13. The first hanging portion 13 can be constructed as a hanging rod, and the second hanging portion 34 can be constructed as a hanging protrusion, that is, the hanging protrusion can be hung on the hanging rod, and the hanging rod is formed with a hanging groove 131 open upward, and the hanging protrusion is constructed to protrude downward, that is, the hanging protrusion can be extended into the hanging groove 131, so as to realize the connection between the guide device 3 and the top wall of the furnace cavity 11 through the cooperation between the hanging protrusion and the hanging rod.

[0050] In some embodiments, the hanging rod includes a hanging rod portion 132, a hanging support portion 133 and a hook portion 134. The hanging rod portion 132 is connected to the furnace body 1. The hanging rod portion 132 and the hook portion 134 are respectively bent upward and connected to the two ends of the hanging support portion 133. The hook portion 134 is separated from the hanging rod portion 132 and together with the hanging support portion 133 defines a hanging groove 131.

[0051] Specifically, Figure 3-Figure 4 As shown, the hanging protrusion can extend into the hanging groove 131 to achieve hanging cooperation with the hanging rod. The hanging rod includes a hanging rod portion 132, a hanging support portion 133 and a hook portion 134. The hanging rod portion 132 is used to be connected to the furnace body 1 to achieve connection between the hanging rod and the inner wall of the furnace cavity 11, and the hanging rod portion 132 can be fixedly connected to the furnace body 1 to improve the connection strength and connection reliability between the two. The hanging support portion 133 is used to bear the weight of the guide device 3, and the hook portion 134 is used to contact and press with the hanging protrusion to prevent the hanging protrusion from escaping from the hanging groove 131.

[0052] The hanging rod portion 132 and the hook portion 134 are respectively bent upward and connected to the two ends of the hanging support portion 133, so that the hanging support portion 133 can be set horizontally, and the lower ends of the hanging rod portion 132 and the lower ends of the hook portion 134 are respectively connected to the two ends of the hanging support portion 133, so that the hanging rod can be a whole, which can improve the overall structural strength of the hanging rod, and the hook portion 134 is separated from the hanging rod portion 132 and defines a hanging groove 131 together with the hanging support portion 133, so that the hanging groove 131 can be opened upward and have a certain space, so as to facilitate the hanging protrusion to extend into the inside of the hanging groove 131, so as to realize the cooperation between the hanging protrusion and the hanging rod, that is, to realize the connection between the guide device 3 and the furnace body 1.

[0053] In some embodiments, the upper end of the hook portion 134 is lower than the upper end of the hanging rod portion 132 .

[0054] Specifically, the upper end of the hanging rod portion 132 is connected to the top wall of the furnace cavity 11, and the upper end of the hanging rod portion 132 is higher than the upper end of the hook portion 134, that is, there is a certain gap between the upper end of the hook portion 134 and the top wall of the furnace cavity 11, so that the hanging protrusion can extend from the gap between the upper end of the hook portion 134 and the top wall of the furnace cavity 11 to the inside of the hanging groove 131, so as to cooperate with the hanging rod to realize the connection between the guide device 3 and the furnace body 1.

[0055] It should be noted that the gap between the upper end of the hook portion 134 and the top wall of the furnace chamber 11 should not be too large to avoid the generation of eddy currents in the gap and the shaking of the crystal rod. That is, the gap between the upper end of the hook portion 134 and the top wall of the furnace chamber 11 should be minimized while allowing the hanging protrusion to extend into the hanging groove 131 to avoid the generation of eddy currents as much as possible.

[0056] In some embodiments, the upper end of the guide device 3 is provided with a hanging flange 35 extending outward, the hanging protrusion is connected to the hanging flange 35, and the hanging protrusion is constructed as a hanging block protruding downward relative to the hanging flange 35.

[0057] Specifically, the guide device 3 is provided with a hanging flange 35, and the hanging protrusion is connected to the hanging flange 35, so that the hanging protrusion is connected to the guide device 3, so as to realize the connection between the guide device 3 and the inner wall of the furnace cavity 11 by hanging the hanging protrusion on the hanging rod. At the same time, the hanging flange 35 is arranged at the upper end of the guide device 3, so as to connect the hanging protrusion connected to the hanging flange 35 with the top wall of the furnace cavity 11, and to avoid interference between the guide device 3 and the top wall of the furnace cavity 11, which makes it impossible to install the guide device 3, and the hanging flange 35 is extended outward from the upper end of the guide device 3, so as to extend the hanging protrusion toward the direction close to the hanging rod, so as to extend the hanging protrusion into the hanging groove 131, so as to realize the connection between the guide device 3 and the top wall of the furnace cavity 11.

[0058] Furthermore, by constructing the hanging protrusion as a hanging block protruding downward relative to the hanging flange 35, the hanging protrusion can be extended downward so that the hanging protrusion has a certain length in the up and down direction, which can increase the matching length between the hanging protrusion and the hanging groove 131, thereby improving the connection reliability between the hanging protrusion and the hanging rod, that is, improving the connection reliability between the guide device 3 and the top wall of the furnace chamber 11, and constructing the hanging protrusion as a hanging block can reduce the setting length of the hanging protrusion on the hanging flange 35, thereby reducing the weight of the guide device 3, so as to improve the reliability of the suspension rod in suspending the guide device 3.

[0059] In some embodiments, there are multiple first hanging parts 13 and multiple second hanging parts 34 , the multiple first hanging parts 13 are matched with the multiple second hanging parts 34 in a one-to-one correspondence, and the multiple second hanging parts 34 are distributed at intervals in the circumferential direction of the guide device 3 .

[0060] Specifically, the first hanging part 13 can be hung and matched with the second hanging part 34 to realize the connection between the top wall of the furnace chamber 11 and the flow guide device 3, and the first hanging part 13 and the second hanging part 34 are both set to be multiple, that is, the number of the first hanging part 13 and the second hanging part 34 can be two, three or more, and the multiple first hanging parts 13 and the multiple second hanging parts 34 are matched one by one, that is, for each first hanging part 13, a second hanging part 34 is provided to cooperate with it, so that The connection reliability between the top wall of the furnace cavity 11 and the flow guide device 3 is improved by the cooperation between the multiple first hanging parts 13 and the multiple second hanging parts 34. In addition, the multiple second hanging parts 34 are spaced apart and distributed in the circumferential direction of the flow guide device 3, and the multiple first hanging parts 13 are also spaced apart and distributed. Thus, the multiple first hanging parts 13 and the multiple second hanging parts 34 can be hung and connected at multiple positions in the circumferential direction of the flow guide device 3, which can improve the connection stability between the top wall of the furnace cavity 11 and the flow guide device 3.

[0061] In such Figure 2 In the illustrated embodiment, there are three first hanging portions 13 and three second hanging portions 34, and the three second hanging portions 34 are distributed and spaced apart in the circumferential direction of the flow guide device 3. The three second hanging portions 34 can be evenly distributed in the circumferential direction of the flow guide device 3, so as to improve the connection reliability and connection stability between the top wall of the furnace chamber 11 and the flow guide device 3 through the cooperation between the three first hanging portions 13 and the three second hanging portions 34.

[0062] In some embodiments, the single crystal furnace 100 also includes a heat shield structure 4, which is installed in the furnace chamber 11 and located above the crucible 2. The heat shield structure 4 forms a heat shield channel 41 that runs through the up and down directions. At least a portion of the lower end of the guide device 3 extends into the heat shield channel 41, and the lower end of the heat shield channel 41 extends into the crucible mouth 21.

[0063] Specifically, the heat shield structure 4 is used for heat preservation and insulation to stabilize the temperature field in the single crystal furnace 100. The heat shield structure 4 is installed in the furnace chamber 11 to achieve the installation of the heat shield structure 4, and the heat shield structure 4 is arranged above the crucible 2, that is, the heat shield structure 4 is arranged around the crystal rod, so that the heat shield structure 4 can stabilize the temperature field around the crystal rod. At the same time, the heat shield structure 4 is formed with a heat shield channel 41 that runs through in the up and down directions, which can realize the temperature gradient control of the crystal rod, and the lower end of the heat shield channel 41 is extended to the crucible. The heat shield structure 4 is provided in the opening 21, and the heat preservation effect of the heat shield structure 4 can be improved. In addition, at least a part of the lower end of the guide device 3 is extended into the heat shield channel 41, that is, part or all of the lower end of the guide device 3 is extended into the heat shield channel 41, so as to shield the heat leaked from the top of the heat shield structure 4 to a certain extent, which is beneficial to the cooling of the crystal rod. In addition, the setting of the guide device 3 can reduce the formation of vortexes by the gas flowing along the inner wall of the furnace chamber 11, thereby reducing the residue above the heat shield structure 4 from being blown into the crucible 2, causing slag eating and wire breaking.

[0064] In some embodiments, the inner wall of the heat shield channel 41 is spaced apart from the outer peripheral wall of the flow guide device 3 .

[0065] Specifically, the heat shield structure 4 is used for thermal insulation, and the guide device 3 is used for guiding the flow of gas. The inner wall of the heat shield channel 41 and the outer wall of the guide device 3 are spaced apart and distributed, so that there is a certain distance between the inner wall of the heat shield channel 41 and the outer wall of the guide device 3, which can avoid interference between the heat shield structure 4 and the guide device 3, and further improve the reliability of the operation of the heat shield structure 4 and the guide device 3.

[0066] In some embodiments, the heat shield structure 4 is movable in the up and down direction relative to the furnace body 1; and / or, the heat shield structure 4 includes an outer guide tube, an inner guide tube and a water-cooled shield, and the outer guide tube and the inner guide tube are filled with thermal insulation felt.

[0067] Specifically, the heat shield structure 4 is used for heat preservation and insulation to achieve temperature gradient control of the crystal rod. The heat shield structure 4 is constructed to be movable in the up and down directions relative to the furnace body 1, which can reduce the relative displacement of the crystal rod and the heat shield structure 4 to a certain extent, so as to reduce the crystal rod experiencing different temperature zones during the lifting process, thereby reducing the longitudinal temperature gradient of the crystal rod and reducing crystal cracking caused by concentrated release of thermal stress. A driving structure can be set in the single crystal furnace 100, and the driving structure can be used to drive the heat shield structure 4 to move, so as to reduce the relative displacement of the crystal rod and the heat shield structure 4.

[0068] Among them, it should be noted that in the present application, the segmented cooling process can be divided into three stages: the first cooling stage: after the crystal rod leaves the liquid surface, the crystal is lifted at the first crystal lifting speed, the speed is 3-6mm / min, and the lifting time is 10-30min. During the first cooling stage, the heat shield structure 4 is not lifted; the second cooling stage: immediately after the first cooling stage ends, the second cooling stage is entered, during which the crystal is lifted at the second crystal lifting speed, the speed is 3-7mm / min, and the lifting time is 20-50min. In the second cooling stage, during the crystal lifting process, the heat shield structure 4 is synchronously lifted at a certain speed, the lifting speed is 2-7mm / min, and the duration is 20-50min; the third cooling stage: immediately after the second cooling stage ends, the third cooling stage is entered, during which the crystal rod is rapidly lifted at 500-800mm / min, and the heat shield structure 4 is not lifted at this stage. As shown in Table 1, the crystal cracking ratios corresponding to different crystal lifting speeds and lifting speeds of the heat shield structure 4 in the second cooling stage are shown.

[0069]

[0070] Table 1

[0071] In addition, the heat shield structure 4 includes an outer guide tube, an inner guide tube and a water-cooled shield. The outer guide tube can be used to protect the internal structure of the heat shield structure 4 and can play a role in heat preservation. The inner guide tube can be used to absorb heat to improve the heat dissipation efficiency of the crystal rod. The water-cooled shield is used to form a cold field to reduce the temperature of the crystal rod and increase the growth rate of the crystal rod. In addition, insulation felt is filled between the outer guide tube and the inner guide tube. The insulation felt is used to improve the insulation effect of the heat shield structure 4, reduce heat loss, and reduce energy consumption. At least a part of the lower end of the guide device 3 is extended into the heat shield channel 41, so that the guide device 3 can shield the heat leaked from the gap of the insulation felt, which is beneficial to the cooling of the crystal rod.

[0072] In some embodiments, the furnace body 1 includes a furnace cover 14 and a furnace barrel 15 , the furnace cover 14 is connected to the top of the furnace barrel 15 and defines a furnace cavity 11 together with the furnace barrel 15 , the air inlet 12 is provided on the furnace cover 14 , and the guide device 3 is connected to the furnace cover 14 .

[0073] Specifically, the furnace cover 14 is detachable relative to the furnace barrel 15 to facilitate observation and maintenance of the internal situation of the furnace chamber 11. The furnace cover 14 is connected to the top of the furnace barrel 15 and defines the furnace chamber 11 together with the furnace barrel 15 to provide a certain space for installing the guide device 3, the crucible 2 and the heat shield structure 4, and the air inlet 12 is set on the furnace cover 14, that is, the air inlet 12 is set above the guide device 3, so that the gas can enter from the air inlet 12 and flow downward along the guide device 3 to the position where the crucible 2 is located, and the guide device 3 is connected to the furnace cover 14 so that the air inlet 12 is connected with the guide device 3, so that the gas entering the furnace chamber 11 from the air inlet 12 can directly enter the guide channel 31, so that the gas flow is more concentrated, the crystal rod is fully cooled, and the gas flow along the inner wall of the furnace chamber 11 can be avoided to cause eddy currents and air flow turbulence, thereby reducing the possibility of crystal rod shaking.

[0074] In some embodiments, the distance between the guide inlet 32 ​​and the air inlet 12 is d, and satisfies: 20 mm≤d≤50 mm.

[0075] Specifically, the distance between the guide inlet 32 ​​and the air inlet 12 can be d, and d can be between 20 mm and 50 mm, that is, d can be 25 mm, 35 mm or 45 mm, etc., that is, the distance between the guide inlet 32 ​​and the air inlet 12 should not be too large or too small. If it is too large, the gap between the upper end of the hook part 134 and the top wall of the furnace chamber 11 will be too large, which is easy to cause eddy currents and air flow turbulence in the gap, causing the crystal rod to shake. If it is too small, the gap between the upper end of the hook part 134 and the top wall of the furnace chamber 11 will be too small, which is not conducive to the extension of the hanging protrusion into the hanging groove 131, resulting in the inability to install the guide device 3.

[0076] In some embodiments, the lower end of the diversion device 3 is also provided with a camera capture port 36 and / or an observation port 37 connected to the diversion outlet 33; the top wall of the furnace cavity 11 is provided with a camera installation port and an observation window, the camera installation port is arranged opposite to the camera capture port 36, and the observation window is arranged opposite to the observation port 37.

[0077] Specifically, Figure 2As shown, a camera capture port 36 and an observation port 37 are provided at the lower end of the flow guide device 3. The camera capture port 36 is used to enable the camera to capture indicators such as the diameter of the crystal rod and the temperature of the liquid surface in the furnace chamber 11, and the observation port 37 is used to enable the operator to observe the situation in the furnace chamber 11, so as to timely grasp the operation situation in the furnace chamber 11. The camera capture port 36 and the observation port 37 are both arranged at the lower end of the flow guide device 3, that is, the camera capture port 36 and the observation port 37 are both arranged at a position close to the liquid surface, so as to timely grasp and analyze the situation there. Moreover, the camera capture port 36 and the observation port 37 are both connected to the flow guide outlet 33, which can facilitate the setting of the camera capture port 36 and the observation port 37, and can reduce the processing difficulty.

[0078] At the same time, a camera mounting port and an observation window are provided on the top wall of the furnace cavity 11. The camera mounting port is used to install a camera, and the camera mounting port is arranged opposite to the camera capture port 36, so that the camera can capture the situation in the furnace cavity 11 through the camera capture port 36. The observation window is used to enable the operator to observe the situation in the furnace cavity 11, and the observation window is arranged opposite to the observation port 37, so that the operator can observe the situation in the furnace cavity 11 from the observation window through the observation port 37. The camera can be a CCD camera.

[0079] Also, it should be noted that the camera capture port 36 and the observation port 37 can be set apart, that is, the camera installation port and the observation window can be set apart to avoid interference between the two, which would result in the inability to install the camera or the operator being unable to observe the situation inside the furnace cavity 11.

[0080] In some embodiments, the inner diameter of the diversion inlet 32 ​​is greater than the inner diameter of the diversion outlet 33 .

[0081] Specifically, a diversion inlet 32 ​​is formed at the upper end of the diversion device 3, and a diversion outlet 33 is formed at the lower end. The camera capture port 36 and the observation port 37 are connected to the diversion outlet 33, that is, the camera capture port 36 and the observation port 37 are both set at the lower end of the diversion device 3, and the inner diameter of the diversion inlet 32 ​​is constructed to be larger than the inner diameter of the diversion outlet 33, which can avoid the upper end of the diversion device 3 from blocking the camera capture port 36 and the observation port 37, resulting in the camera being unable to capture the situation in the furnace cavity 11 through the camera capture port 36 or the operator being unable to observe the situation in the furnace cavity 11 through the observation port 37.

[0082] In some embodiments, a sub-chamber 16 is further provided on the top of the furnace body 1 , and an air inlet channel 16 is formed in the sub-chamber 16 , and the air inlet channel 16 is communicated with the air inlet 12 .

[0083] Specifically, the auxiliary chamber 16 can be used to introduce gas. The auxiliary chamber 16 is set at the top of the furnace body 1, and the auxiliary chamber 16 is connected to the furnace cover 14. An air inlet channel 16 is formed in the auxiliary chamber 16. The air inlet channel 16 allows gas to pass through. The air inlet channel 16 is connected with the air inlet port 12, and the auxiliary chamber 16 is connected with the inside of the furnace cavity 11 through the air inlet port 12, so that the gas can enter the furnace cavity 11 from the air inlet channel 16 through the air inlet port 12, and flow inside the furnace cavity 11 to cool the crystal rod.

[0084] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0085] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A single crystal furnace, characterized in that: include: A furnace body, wherein a furnace cavity is formed in the furnace body, and an air inlet is formed on a top wall of the furnace cavity; A crucible, the crucible is installed in the furnace chamber, and the crucible is formed with a crucible opening opened toward the air inlet; A flow guide device is installed in the furnace chamber and is located above the crucible. A flow guide channel is formed in the flow guide device. A flow guide inlet connected to the air inlet is formed at the upper end of the flow guide device, and a flow guide outlet connected to the crucible port is formed at the lower end of the flow guide device.

2. The single crystal furnace according to claim 1, characterized in that: The flow guide device is configured to be detachably connected to the top wall of the furnace cavity.

3. The single crystal furnace according to claim 2, characterized in that: A first hanging portion is provided on the top wall of the furnace cavity, a second hanging portion is provided on the upper end of the flow guide device, and the flow guide device is hung on the first hanging portion through the second hanging portion.

4. The single crystal furnace according to claim 3, characterized in that: The first hanging part is configured as a hanging rod, and the hanging rod is formed with a hanging groove open upwardly, and the second hanging part is configured as a hanging protrusion protruding downwardly, and the hanging protrusion extends into the hanging groove.

5. The single crystal furnace according to claim 4, characterized in that: The hanging rod includes a hanging rod portion, a hanging support portion and a hook portion, the hanging rod portion is connected to the furnace body, the hanging rod portion and the hook portion are respectively bent upward and connected to two ends of the hanging support portion, the hook portion is spaced apart from the hanging rod portion and together with the hanging support portion defines the hanging groove.

6. The single crystal furnace according to claim 5, characterized in that: The upper end of the hook portion is lower than the upper end of the hanging rod portion.

7. The single crystal furnace according to claim 4, characterized in that: The upper end of the flow guide device is provided with a hanging flange extending outward, the hanging protrusion is connected to the hanging flange, and the hanging protrusion is constructed as a hanging block protruding downward relative to the hanging flange.

8. The single crystal furnace according to claim 3, characterized in that: There are multiple first hanging parts and multiple second hanging parts, and the multiple first hanging parts are matched with the multiple second hanging parts in a one-to-one correspondence, and the multiple second hanging parts are distributed at intervals in the circumferential direction of the guide device.

9. The single crystal furnace according to any one of claims 1 to 8, characterized in that: It also includes a heat shield structure, which is installed in the furnace chamber and located above the crucible. The heat shield structure forms a heat shield channel that runs through in the up and down directions. At least a part of the lower end of the guide device extends into the heat shield channel, and the lower end of the heat shield channel extends into the crucible mouth.

10. The single crystal furnace according to claim 9, characterized in that: The inner wall of the heat shield channel is spaced apart from the outer peripheral wall of the flow guide device.

11. The single crystal furnace according to claim 9, characterized in that: The heat shield structure is movable in the up and down directions relative to the furnace body; And / or, the heat shield structure includes an outer guide tube, an inner guide tube and a water-cooled shield, and thermal insulation felt is filled between the outer guide tube and the inner guide tube.

12. The single crystal furnace according to any one of claims 1 to 8, characterized in that: The furnace body comprises a furnace cover and a furnace barrel, the furnace cover is connected to the top of the furnace barrel and defines the furnace cavity together with the furnace barrel, the air inlet is arranged on the furnace cover, and the flow guide device is connected to the furnace cover.

13. The single crystal furnace according to claim 12, characterized in that: The distance between the guide inlet and the air inlet is d, and satisfies: 20mm≤d≤50mm.

14. The single crystal furnace according to any one of claims 1 to 8, characterized in that: The lower end of the diversion device is also provided with a camera capture port and / or an observation port connected to the diversion outlet; The top wall of the furnace cavity is provided with a camera installation port and an observation window. The camera installation port is arranged opposite to the camera capture port, and the observation window is arranged opposite to the observation port.

15. The single crystal furnace according to any one of claims 1 to 8, characterized in that: The inner diameter of the flow guide inlet is greater than the inner diameter of the flow guide outlet.

16. The single crystal furnace according to any one of claims 1 to 8, characterized in that: The top of the furnace body is also provided with a sub-chamber, an air intake passage is formed in the sub-chamber, and the air intake passage is communicated with the air inlet.

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