Automatic cycle test system and test method for getter pump

Abstract

The invention relates to the technical field of getter testing, in particular to an automatic cycle testing system and method for a getter pump. The system comprises a vacuum chamber, a vacuumizing system, a baking temperature control system, an activation power supply, a cooling device and an air supply system, wherein valves, instruments, a heating power supply, a cooling power supply and an activation power supply on a connecting pipeline are connected with a data acquisition system and an automatic control system; besides, the vacuum chamber is divided into a Pm chamber and a Pg chamber by an orifice plate, the Pm chamber is connected with an air supply system, a to-be-detected getter pump is arranged in the Pg chamber, a valve switch in the system is controlled through a data acquisition system and an automatic control system, and circulation of heating activation, low-pressure air chamber pressure adjustment, cooling and air suction test is automatically completed. Meanwhile, the pressure of the Pm chamber and the pressure of the Pg chamber are recorded, and the inspiration rate, the inspiration capacity and corresponding curves are automatically calculated. According to the detection system and method, automatic control of multi-cycle inspiration testing can be realized, and the testing efficiency and the testing accuracy are improved.

Description

Technical Field

[0001] The invention relates to the technical field of getter testing, and in particular to an automatic circulation testing system and a testing method for a getter pump. Background Art

[0002] Getter pump is a vacuum pump composed of getter array. It is generally composed of non-evaporable getter alloy and heating components. After being activated in the vacuum system, the getter pump can absorb various active gases, such as hydrogen, oxygen, nitrogen, carbon monoxide, carbon dioxide, etc., but does not absorb rare gases. It is suitable for improving the ultimate vacuum of other high vacuum pumps (molecular pumps, ion pumps, oil diffusion pumps, etc.) or maintaining the working vacuum of small vacuum equipment. It is widely used in desktop and portable analysis systems, synchrotron radiation sources, particle accelerators, thin film deposition systems, portable vacuum equipment and other fields.

[0003] Since most of the application fields of getter pumps require a long service life, the cycle service life of the getter pump is a key parameter that determines whether the getter pump can be actually used. If the getter pump's air absorption performance decreases due to irreversible reactions during the cyclic absorption and degassing process, the cycle life will end, which will greatly affect the performance of the getter pump in practical applications. Usually, for getter pumps, the cyclic hydrogen absorption service life is required to be at least 100 times to ensure the long-term stable operation of the high vacuum system. Therefore, the cycle service life of the getter pump is a parameter that needs to be focused on, but the cycle test process requires a lot of manpower and time costs, so it is necessary to develop an automatic cycle test system for getter pumps.

[0004] Testing the cycle service life of the getter pump is to test the attenuation of the getter pump's suction rate and suction capacity with the number of cycles. In the prior art, a single test is usually performed on the getter. For example, Chinese Patent 202222674719.6 "A New Getter Test System" discloses a getter test system, which uses a method of directly passing hydrogen into the sample chamber at a uniform speed. After the getter sample is activated, only a weak fixed gas flow is passed. After a period of time, the suction capacity will decrease due to the getter being close to saturation, so that the vacuum degree in the sample chamber will increase. At this time, a time value can be obtained, which can be used to measure the suction rate. The suction volume can be calculated by time and uniform flow rate, thereby realizing the test evaluation of the getter. The test system focuses on the performance test of getter materials and products with small inhalation capacity, while the getter pump has a large single inhalation capacity, especially for hydrogen. According to the inhalation rate measurement method of the test system, it takes more than a month for the getter pump to be close to saturation, and then the sample chamber pressure will rise. The attenuation of the inhalation rate is nonlinear, so this method is inaccurate and inefficient to measure the inhalation rate, and it is impossible to test and evaluate the cycle life of the getter pump. Therefore, it is urgent to develop an automatic cycle test method for the getter pump to obtain the change law of the getter pump inhalation rate and inhalation capacity with the number of cycles. Summary of the invention

[0005] In order to overcome the shortcomings of existing testing technology, the present invention proposes an automatic circulation test system and test method for a getter pump:

[0006] An automatic circulation test system for a getter pump comprises a vacuum chamber, a vacuum pumping system, a baking temperature control system, an activation power supply, a cooling device and an air supply system, wherein the air supply system comprises a gas cylinder, a first pneumatic valve, a low-pressure air chamber, a micro electric needle valve and a third pneumatic valve connected in series in sequence, wherein the low-pressure air chamber is connected to an absolute pressure gauge; the vacuum pumping system comprises an electric butterfly valve and a vacuum pump group connected in series, wherein the low-pressure air chamber is connected to the vacuum pump group via a fourth pneumatic valve; the baking temperature control system is surrounded outside the vacuum chamber, and the cooling device is arranged facing the vacuum chamber; the vacuum chamber is provided with a hole The flow plate is divided into a Pm chamber and a Pg chamber, the Pm chamber and the Pg chamber are respectively connected with a Pm vacuum gauge and a Pg vacuum gauge, wherein the Pm chamber is respectively connected with a third pneumatic valve and an electric butterfly valve, the Pg chamber is internally provided with a getter pump to be tested, and an activation power supply is connected with the getter pump through a cable; the first pneumatic valve, an absolute pressure gauge, a micro electric needle valve, a third pneumatic valve, a fourth pneumatic valve, a Pm vacuum gauge, a Pg vacuum gauge, a baking temperature control system, an activation power supply, a cooling device, a vacuum pump group, and an electric butterfly valve are all electrically connected with a data acquisition system and an automatic control system.

[0007] Furthermore, in the gas supply system, a pressure reducing valve and a mass flow meter are connected in series between the gas cylinder and the first pneumatic valve, and a second pneumatic valve is connected in series between the low-pressure gas chamber and the micro electric needle valve. The pressure reducing valve, mass flow meter and second pneumatic valve are all electrically connected to the data acquisition system and the automatic control system.

[0008] Furthermore, the baking temperature control system includes a heating body and a thermocouple, the heating body is a heating sleeve, a heating coil or a heating belt, and the heating body is wound around the outside of the vacuum chamber.

[0009] Furthermore, the cooling device is a fan, which is located at the same horizontal plane as the vacuum chamber.

[0010] A method for automatically cycling a getter pump using the above test system comprises the following steps:

[0011] Step 1: Assemble the getter pump into the Pg chamber of the vacuum chamber;

[0012] Step 2: Start the vacuum pump group and the electric butterfly valve to exhaust the vacuum chamber. The vacuum pumping time should be ≥ 20 minutes. The Pm vacuum gauge and Pg vacuum gauge should be less than 10. -3 Pa;

[0013] Step 3: Input the set values ​​of getter pump temperature, vacuum chamber temperature, low-pressure gas chamber volume, small hole thickness and diameter of orifice plate, baking temperature, baking time, baking cut-off vacuum, activation current, activation holding time, cooling time, test atmosphere, gas conductance, test pressure Pg, low-pressure gas chamber pre-adjustment initial pressure, suction test duration, and number of cycles into the automatic control system;

[0014] Step 4: 20 minutes after starting the baking temperature control system, start the activation power supply, and activate according to the set values ​​of the activation current and activation holding time until the set baking time and baking cut-off vacuum degree are met at the same time, and then turn off the baking temperature control system and the activation power supply at the same time;

[0015] Step 5: While starting the activation power supply, adjust the pressure of the low-pressure air chamber. When the pre-adjusted initial pressure of the low-pressure air chamber is lower than the set value, open all valves on the passage from the gas cylinder to the first pneumatic valve in sequence to perform air replenishment operations until the low-pressure air chamber reaches the set value and then close all valves on the passage from the gas cylinder to the first pneumatic valve; when the pre-adjusted initial pressure of the low-pressure air chamber is higher than the set value, open the fourth pneumatic valve to pump air to below 0.1Pa, close the fourth pneumatic valve, and then open all valves on the passage from the gas cylinder to the first pneumatic valve in sequence to perform air replenishment operations until the low-pressure air chamber reaches the set value and then close all valves;

[0016] Step 6: Start the cooling device until the set cooling time is reached and then shut down;

[0017] Step 7: Open all valves between the low-pressure air chamber and the Pm chamber. The micro-electric needle valve automatically controls the flow to maintain the Pg vacuum gauge at the set value of the test pressure Pg. At the same time, the pressure change of the Pm vacuum gauge is recorded until the single test time is reached, and then all valves between the pressure chamber and the Pm chamber are closed;

[0018] Step 8: Repeat steps 4 to 7 in a loop, each time step 4 to 7 is a loop, until the set number of loops is completed.

[0019] The analysis data acquisition system collects data signals within the system in real time, controls each valve through the automatic control system, and records the data of the Pm vacuum gauge and Pg vacuum gauge.

[0020] Furthermore, when the test gas is used for the first time or when the test gas is replaced, the fourth pneumatic valve and the vacuum pump group are opened to evacuate the low-pressure gas chamber to below 0.1 Pa.

[0021] Furthermore, the automatic control system calculates the data collected from the Pm vacuum gauge and the Pg vacuum gauge, and outputs the suction rate S and suction capacity Q in real time according to the following formula: t And the corresponding curve:

[0022]

[0023] Where t is the test time; C is the orifice conductance; p m Pm is the vacuum gauge number; p g Pg is the vacuum gauge indication.

[0024] The beneficial effects of the present invention are:

[0025] (1) The present invention divides the vacuum chamber into two chambers through a perforated flow plate, and adjusts each valve through an automatic control system to keep the pressure of the Pg chamber where the getter pump is located constant, while monitoring and recording the pressure changes in the Pm chamber. The setting of the air supply system can buffer the air flow, create a stable test environment, and avoid errors in the getter pump test results caused by large fluctuations in ventilation volume;

[0026] (2) The use of the automatic cycle test system for the getter pump of the present invention can realize the full automatic control of the multiple cycle air suction test of the getter pump, automatically control the opening and closing of the valve during the cycle, automatically adjust the pre-adjusted pressure of the low-pressure air chamber, and automatically adjust the pressure of the Pg chamber and the air intake flow rate during the ventilation test phase, thereby avoiding the deviation of the test results caused by the manual operation of the system and the recording of data, saving the manpower and time costs during long-term continuous cycle testing, and improving the test efficiency and test accuracy. In addition, it is suitable for samples such as getter pumps with large single air suction volume, and realizes accurate evaluation of the life of the getter pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The embodiments of the present invention are further described below with reference to the accompanying drawings, in which:

[0028] Figure 1 A flow chart of an embodiment of an automatic cycle test system for a getter pump according to the present invention is shown.

[0029] Among them, 1-gas cylinder; 2-pressure reducing valve; 3-mass flowmeter; 4-first pneumatic valve; 5-low-pressure gas chamber; 6-absolute pressure gauge; 7-second pneumatic valve; 8-micro electric needle valve; 9-third pneumatic valve; 10-vacuum chamber; 11-Pm vacuum gauge; 12-Pg vacuum gauge; 13-baking temperature control system; 14-absorbent pump; 15-activation power supply; 16-cooling device; 17-vacuum pump group; 18-electric butterfly valve; 19-orifice flow plate; 20-Pm chamber; 21-Pg chamber; 22-computer; 23-fourth pneumatic valve. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below through specific embodiments in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0031] In one embodiment, a getter pump automatic circulation test system includes a vacuum chamber 10, a vacuum pumping system, a baking temperature control system 13, an activation power supply 15, a cooling device and a gas supply system:

[0032] The gas supply system includes a gas cylinder 1, a pressure reducing valve 2, a mass flow meter 3, a first pneumatic valve 4, a low-pressure gas chamber 5, a second pneumatic valve 7, a micro electric needle valve 8 and a third pneumatic valve 9 which are connected in series in sequence. The low-pressure gas chamber 5 is connected to an absolute pressure gauge 6. The data of the absolute pressure gauge 6 is transmitted to the data acquisition system. After the system analyzes and determines the deviation from the pre-adjusted initial pressure, it feeds back to the automatic control system to control the opening and closing states of the first pneumatic valve 4 and the fourth pneumatic valve 23 and the flow size and on-off of the mass flow meter 3.

[0033] The vacuum pumping system includes an electric butterfly valve 18 and a vacuum pump group 17 connected in series. The vacuum pump group 17 and the electric butterfly valve 18 are connected to an automatic control system through cables to control the start and stop of the vacuum pump group and the on and off of the electric butterfly valve.

[0034] The low-pressure air chamber 5 is connected to the vacuum pump group 17 via the fourth pneumatic valve 23;

[0035] The baking temperature control system 13 is surrounded by the outside of the vacuum chamber 10, and includes a heating body and a thermocouple. The heating body is a heating coil, and the heating coil is wound around the outside of the vacuum chamber 10. The heating body and the thermocouple are connected to the data acquisition system and the automatic control system through cables, and are used to adjust the system baking temperature and baking time;

[0036] The cooling device 16 is arranged facing the vacuum chamber 10, specifically a fan, which is located at the same level as the vacuum chamber 10 and blows air directly toward the vacuum chamber 10. The cooling device 16 is connected to the data acquisition system and the automatic control system through a cable to control the start and stop of the fan.

[0037] The vacuum chamber 10 is divided into a Pm chamber 20 and a Pg chamber 21 by an orifice plate 19. The Pm chamber 20 and the Pg chamber 21 are respectively connected to a Pm vacuum gauge 11 and a Pg vacuum gauge 12. The measurement data of the Pm vacuum gauge 11 and the Pg vacuum gauge 12 are fed back to the data acquisition system and the automatic control system through cables. The Pm chamber 20 is respectively connected to the third pneumatic valve 9 and the electric butterfly valve 18. The Pg chamber 21 has a built-in getter pump 14 to be tested. The activation power supply 15 is connected to the getter pump 14 through a cable, and is also connected to the data acquisition system and the automatic control system through a cable, for regulating the activation current and holding time of the getter pump.

[0038] In summary, the pressure reducing valve 2, the mass flow meter 3, the first pneumatic valve 4, the absolute pressure gauge 6, the second pneumatic valve 7, the micro electric needle valve 8, the third pneumatic valve 9, the fourth pneumatic valve 23, the Pm vacuum gauge 11, the Pg vacuum gauge 12, the baking temperature control system 13, the activation power supply 15, the cooling device 16, the vacuum pump group 17, and the electric butterfly valve 18 are all connected to the data acquisition system and the automatic control system. The computer 22 is connected to the data acquisition system and the automatic control system for data input and display.

[0039] The automatic cycle test method of the getter pump using the above test system, taking the room temperature cycle hydrogen absorption performance test process of a 400L getter pump as an example, includes the following steps: (wherein the gas to be tested can be H2, CO, N2, wherein the purity of H2 should be ≥99.99%, the purity of CO should be ≥99.95%, and the purity of N2 should be ≥99.95%).

[0040] Step 1: Assemble the getter pump into the Pg chamber 21 of the vacuum chamber 10 through the CF interface;

[0041] Step 2: Start the vacuum pump group 17 and the electric butterfly valve 18 to exhaust the vacuum chamber 10. The vacuum pumping time is ≥ 20 minutes. The Pm vacuum gauge 11 and the Pg vacuum gauge 12 are lower than 10. -3 Pa;

[0042] Step 3: Input the following into the automatic control system of the computer 22: the getter pump temperature 25°C, the vacuum chamber temperature 25°C, the low-pressure gas chamber volume 4000mL, the orifice thickness of the orifice plate 0.4mm and the diameter 10mm, the baking temperature 230°C, the baking time 60min, the baking cut-off vacuum degree 2E-4Pa, the activation current 4.7A, the activation holding time ≥60min, the cooling time 100min, the test atmosphere H2, the gas flow conductance 33L / s, the test pressure Pg=1.8E-4Pa, the low-pressure gas chamber pre-adjusted initial pressure 1000Pa, the suction test time 120min, and the number of cycles 100 times;

[0043] Step 4: 20 minutes after starting the baking temperature control system, start the activation power supply 15, and activate it according to the set values ​​of the activation current and the activation holding time, until the set baking time and baking cut-off vacuum degree are met at the same time, and then turn off the baking temperature control system 13 and the activation power supply 15;

[0044] Step 5: while starting the activation power supply 15, that is, while activating the getter pump, the pressure of the low-pressure air chamber 5 is adjusted. When the pre-adjusted initial pressure of the low-pressure air chamber is lower than the set value, all valves on the passage from the gas cylinder 1 to the first pneumatic valve 4 are opened in sequence to perform air replenishment operations until the low-pressure air chamber 5 reaches the set value and then all valves are closed; when the pre-adjusted initial pressure of the low-pressure air chamber is higher than the set value, the fourth pneumatic valve 23 is opened to pump air to below 0.1 Pa, and then all valves on the passage from the gas cylinder 1 to the first pneumatic valve 4 are opened in sequence to perform air replenishment operations until the low-pressure air chamber 5 reaches the set value and then all valves are closed;

[0045] Step 6: Start the cooling device 16 until the set cooling time is reached and then shut down;

[0046] Step 7: Open the second pneumatic valve 7 and the third pneumatic valve 9, and the micro-electric needle valve 8 automatically controls the flow rate so that the Pg vacuum gauge 12 is maintained at the set value of the test pressure Pg, and the pressure change of the Pm vacuum gauge 11 is recorded at the same time, until the single test time is reached, and then the second pneumatic valve 7, the micro-electric needle valve 8, and the third pneumatic valve 9 are closed;

[0047] Step 8: Repeat steps 4 to 7 in a loop, each time step 4 to 7 is a loop, until the set number of loops is completed.

[0048] The analysis data acquisition system collects data signals in the system in real time, controls each valve through the automatic control system, and records the data of the Pm vacuum gauge 11 and the Pg vacuum gauge 12.

[0049] When the test gas is used for the first time or when it is replaced, the fourth pneumatic valve 23 and the vacuum pump group 17 are opened to evacuate the low-pressure gas chamber 5 to below 0.1 Pa to obtain the lowest possible back vacuum to ensure the purity of the gas to be tested.

[0050] The computer 22 makes the automatic control system and the data acquisition system cooperate with each other, adjusts the pressure of the low-pressure air chamber by analyzing the data signals collected by the data acquisition system, and realizes the control of the pressure of the Pg vacuum gauge and the adjustment of the intake air flow rate during the suction test phase, and calculates and analyzes the collected data of the Pm vacuum gauge 11 and the Pg vacuum gauge 12 through the PLC and modules in the automatic control system, and outputs the suction rate S and the suction capacity Q in real time according to the following formula t And the corresponding curve:

[0051]

[0052] Where t is the test time; C is the orifice conductance; p m Pm is the vacuum gauge number; p g Pg is the vacuum gauge indication.

[0053] The activation current range of the activation power supply 15 is 0-20A; the measurement range of the absolute pressure gauge 6 is 0Pa-20000 Pa; the range of the mass flow meter 3 is 0-500sccm; the measurement range of the Pm vacuum gauge and the Pg vacuum gauge is 5.0*10 -7 -1.0*10 0 Pa; the range of the micro electric needle valve is 1*10 -8 mbar-2.5bar, flow control range 3*10 -7 -75L / min.

[0054] After the getter pump is assembled, the test method can automatically control the automatic cycle of exhaust and air replenishment of the air supply system, test pressure adjustment, valve opening and closing, baking activation, cooling, and air suction test through parameter setting. No human intervention is required and continuous testing can be performed for a long time. While improving the test efficiency, it also avoids the deviation of test results that may be caused by human factors.

[0055] Some exemplary embodiments of the present invention are described above. It can be understood that the above embodiments are only used to explain the present invention and do not constitute a limitation on the protection scope of the present invention. The features in these embodiments can be recombined in a suitable manner, and the scheme obtained thereby is still within the protection scope required by the present invention. Based on the above embodiments, all other embodiments obtained by those skilled in the art without making creative work, that is, all modifications, equivalent substitutions and improvements made within the spirit and principles of this application, fall within the protection scope required by the present invention.

Claims

1. An automatic circulation test system for a getter pump, comprising a vacuum chamber (10), a vacuum pumping system, a baking temperature control system (13), an activation power supply (15), a cooling device and an air supply system, characterized in that: The gas supply system comprises a gas cylinder (1), a first pneumatic valve (4), a low-pressure gas chamber (5), a micro electric needle valve (8) and a third pneumatic valve (9) which are connected in series in sequence, and the low-pressure gas chamber (5) is connected to an absolute pressure gauge (6); the vacuum pumping system comprises an electric butterfly valve (18) and a vacuum pump group (17) which are connected in series, and the low-pressure gas chamber (5) is connected to the vacuum pump group (17) via a fourth pneumatic valve (23); the baking temperature control system (13) is surrounded by the outside of the vacuum chamber (10), and the cooling device (16) is arranged facing the vacuum chamber (10); the vacuum chamber (10) is divided into a Pm chamber (20) and a Pg chamber (21) by a hole flow plate (19), and the Pm chamber (20) and the Pg chamber (21) are ) are respectively connected to a Pm vacuum gauge (11) and a Pg vacuum gauge (12), wherein the Pm chamber (20) is respectively connected to a third pneumatic valve (9) and an electric butterfly valve (18), the Pg chamber (21) has a built-in getter pump (14) to be tested, and an activation power supply (15) is connected to the getter pump (14) through a cable; the first pneumatic valve (4), an absolute pressure gauge (6), a micro electric needle valve (8), a third pneumatic valve (9), a fourth pneumatic valve (23), a Pm vacuum gauge (11), a Pg vacuum gauge (12), a baking temperature control system (13), an activation power supply (15), a cooling device (16), a vacuum pump group (17), and an electric butterfly valve (18) are all electrically connected to a data acquisition system and an automatic control system.

2. The automatic cycle test system for a getter pump according to claim 1, characterized in that: In the gas supply system, a pressure reducing valve (2) and a mass flow meter (3) are connected in series between the gas cylinder (1) and the first pneumatic valve (4); a second pneumatic valve (7) is connected in series between the low-pressure gas chamber (5) and the micro electric needle valve (8); and the pressure reducing valve (2), the mass flow meter (3) and the second pneumatic valve (7) are all electrically connected to a data acquisition system and an automatic control system.

3. The automatic cycle test system for a getter pump according to claim 1, characterized in that: The baking temperature control system (13) comprises a heating body and a thermocouple, wherein the heating body is a heating sleeve, a heating coil or a heating belt, and the heating body is wound around the outside of the vacuum chamber (10).

4. The automatic cycle test system for a getter pump according to claim 1, characterized in that: The cooling device (16) is a fan and is located at the same horizontal plane as the vacuum chamber (10).

5. A method for automatically circulating a getter pump according to the test system of any one of claims 1 to 4, characterized in that: The following steps are involved: Step 1: Assemble the getter pump into the Pg chamber (21) of the vacuum chamber (10); Step 2: Start the vacuum pump group (17) and the electric butterfly valve (18) to exhaust the vacuum chamber (10). The vacuum pumping time is ≥ 20 minutes. The Pm vacuum gauge (11) and the Pg vacuum gauge (12) are lower than 10. -3 Pa; Step 3: Input the set values ​​of getter pump temperature, vacuum chamber temperature, low-pressure gas chamber volume, small hole thickness and diameter of orifice plate, baking temperature, baking time, baking cut-off vacuum, activation current, activation holding time, cooling time, test atmosphere, gas conductance, test pressure Pg, low-pressure gas chamber pre-adjustment initial pressure, suction test duration, and number of cycles into the automatic control system; Step 4: After starting the baking temperature control system (13) for 20 minutes, start the activation power supply (15), and activate according to the set values ​​of the activation current and the activation holding time until the set baking time and baking cut-off vacuum degree are met at the same time, and then turn off the baking temperature control system (13) and the activation power supply (15); Step 5: while starting the activation power supply (15), the pressure of the low-pressure air chamber (5) is adjusted. When the pre-adjusted initial pressure of the low-pressure air chamber is lower than the set value, all valves on the passage from the gas cylinder (1) to the first pneumatic valve (4) are opened in sequence to perform air replenishment operations until the low-pressure air chamber (5) reaches the set value and then all valves are closed; when the pre-adjusted initial pressure of the low-pressure air chamber is higher than the set value, the fourth pneumatic valve (23) is opened to pump air to below 0.1 Pa, and after closing the fourth pneumatic valve (23), all valves on the passage from the gas cylinder (1) to the first pneumatic valve (4) are opened in sequence to perform air replenishment operations until the low-pressure air chamber (5) reaches the set value and then all valves are closed; Step 6: Start the cooling device (16) until the set cooling time is reached and then shut down; Step 7: Open all valves between the low-pressure air chamber (5) and the Pm chamber (20), and the micro-electric needle valve (8) automatically controls the flow rate so that the Pg vacuum gauge (12) is maintained at the set value of the test pressure Pg, and the pressure change of the Pm vacuum gauge (11) is recorded at the same time, until the single test time is reached, and then close all valves between the pressure chamber (5) and the Pm chamber (20); Step 8: Repeat steps 4 to 7 in a loop, each time step 4 to 7 is a loop, until the set number of loops is completed. The analysis data acquisition system collects data signals in the system in real time, controls each valve through the automatic control system, and records the data of the Pm vacuum gauge (11) and the Pg vacuum gauge (12).

6. A method for automatically circulating a getter pump according to claim 5, characterized in that: When the test gas is used for the first time or when it is replaced, the fourth pneumatic valve (23) and the vacuum pump group (17) are opened to evacuate the low-pressure gas chamber (5) to below 0.1 Pa.

7. A method for testing an automatic cycle of a getter pump according to claim 5, characterized in that: The automatic control system calculates the data collected from the Pm vacuum gauge (11) and the Pg vacuum gauge (12), and outputs the suction rate S and suction capacity Q in real time according to the following formula: t And the corresponding curve: Where t is the test time; C is the orifice conductance; p m Pm is the vacuum gauge number; p g Pg is the vacuum gauge indication.

Images