Method and device for eliminating image vibration of scanning electron microscope

Abstract

The invention provides a scanning electron microscope image vibration elimination method and device, electronic equipment and a storage medium. The method comprises the following steps: determining a vibration sampling point; performing spectral analysis on secondary electron sampling signals obtained by performing single-point sampling on the vibration sampling points to obtain corresponding vibration amplitude information and vibration frequency information; determining a signal peak value in a spectrogram obtained by spectral analysis, and fitting the signal peak value by using boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information; and performing vibration elimination processing on the target scanning electron microscope image. According to the scanning electron microscope image vibration elimination method and device, the electronic equipment and the storage medium provided by the embodiment of the invention, the numerical value of the frequency-amplitude combination of the main vibration peak is obtained in a mode of optimally selecting the vibration sampling points and carrying out single-point scanning, so that only the phase needs to be fitted in a graph recovery process; and the image recovery efficiency and effect are greatly improved.

Description

Technical Field

[0001] The present application relates to the field of image processing, and in particular to a method and device for eliminating vibration of a scanning electron microscope image. Background Art

[0002] Scanning electron microscope (SEM) is a large precision instrument used for high-resolution micro-area morphology analysis. It has the characteristics of large depth of field, high resolution, intuitive imaging, strong three-dimensional sense, wide magnification range, and the ability to rotate and tilt the sample to be tested in three-dimensional space. In addition, it has the advantages of rich testable sample types, almost no damage or contamination to the original sample, and the ability to obtain morphology, structure, composition and crystallography information at the same time.

[0003] When we use a scanning electron microscope to obtain an image of the sample surface, it is usually accompanied by different types of noise. These noises have a serious impact on the quality of the image obtained. For example, there is a mechanical pump and a molecular pump in the scanning electron microscope, which are used to provide a vacuum environment so that the emitted electron beam will not collide with impurities in the air when passing through the lens hole and reaching the sample. However, the motors of these two pumps will produce periodic vibrations, which may be transmitted to the equipment and affect the measurement results. Generally, we will use vibration suppressors outside the equipment to suppress these vibrations as much as possible, but the distortion caused by vibration can still be seen in the image. In addition, the stray electromagnetic field in the environment of the scanning electron microscope equipment will also interfere with the movement of the scanning electrons, causing vibration distortion in the final imaging. The above-mentioned types of vibration interference will ultimately affect the quality of the scanning electron microscope image. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide a method, device, electronic device and storage medium for eliminating vibration of a scanning electron microscope image.

[0005] In a first aspect, an embodiment of the present invention provides a method for eliminating vibration of a scanning electron microscope image, the method comprising: Acquire a target scanning electron microscope image to be processed, and determine a vibration sampling point in the target scanning electron microscope image; Performing spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling for a preset time on the vibration sampling points to obtain corresponding vibration amplitude information and vibration frequency information; Determine the signal peak in the spectrum diagram obtained by spectrum analysis, and fit the signal peak using the boundary length information in the target scanning electron microscope image to obtain the corresponding vibration phase information; The target SEM image is subjected to vibration elimination processing using the vibration amplitude information, the vibration frequency information and the vibration phase information.

[0006] Optionally, the determining the vibration sampling points in the target scanning electron microscope image specifically includes: The vibration sampling points in the target scanning electron microscope image are determined according to the change gradient values ​​of the secondary electron yields at different positions in the target scanning electron microscope image in the X-axis and Y-axis directions.

[0007] Optionally, fitting the signal peak using boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information specifically includes: Determine the boundary length of the vibration sampling point in the target SEM image; The signal peak is fitted using the boundary length as an adaptation function to obtain corresponding vibration phase information.

[0008] Optionally, fitting the signal peak using boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information specifically includes: Determine the pixel value on the boundary where the vibration sampling point is located in the target SEM image; The pixel values ​​on the boundary are subjected to fast Fourier transform to determine the vibration phase information where the boundary pixel values ​​change most slowly.

[0009] Optionally, performing vibration elimination processing on the target scanning electron microscope image by using the vibration amplitude information, the vibration frequency information and the vibration phase information specifically includes: Obtaining image displacement information according to the vibration amplitude information, the vibration frequency information and the vibration phase information; The image displacement information is used to move the image data of the target SEM image to the target position, and the two images before and after the movement are interpolated to obtain the SEM image after vibration elimination.

[0010] Optionally, the vibration sampling points include vibration sampling points in the horizontal direction and vibration sampling points in the vertical direction.

[0011] Optionally, the vibration amplitude information, the vibration frequency information and the vibration phase include vibration amplitude information, vibration frequency information and vibration phase information in the horizontal direction, and vibration amplitude information, vibration frequency information and vibration phase information in the vertical direction.

[0012] In a second aspect, an embodiment of the present invention provides a device for eliminating vibration of a scanning electron microscope image, characterized in that the device comprises: A sampling point determination module is used to obtain a target scanning electron microscope image to be processed and determine vibration sampling points in the target scanning electron microscope image; A spectrum analysis module, used to perform spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling of the vibration sampling points for a preset time, to obtain corresponding vibration amplitude information and vibration frequency information; A phase determination module is used to determine the signal peak in the spectrum diagram obtained by spectrum analysis, and fit the signal peak using the boundary length information in the target scanning electron microscope image to obtain the corresponding vibration phase information; The vibration elimination module is used to perform vibration elimination processing on the target scanning electron microscope image by using the vibration amplitude information, the vibration frequency information and the vibration phase information.

[0013] In a third aspect, an embodiment of the present invention provides an electronic device, characterized in that it includes: one or more processors; A memory for storing one or more programs; When the one or more programs are executed by the one or more processors, the one or more processors execute the method as described in the first aspect.

[0014] In a fourth aspect, an embodiment of the present invention provides a computer-readable storage medium having executable instructions stored thereon, wherein when the executable instructions are executed by a processor, the processor is caused to execute the method described in the first aspect.

[0015] The scanning electron microscope image vibration elimination method, device, electronic device and storage medium provided by the embodiments of the present invention are intended to solve the problem that the traditional scanning electron microscope de-vibration method has no known information in the vibration fitting process and can only fit by combining different amplitudes, frequencies and phases, resulting in too many unknown parameters and thus low recovery efficiency and poor effect. The embodiments of the present invention obtain the value of the frequency-amplitude combination of the main vibration peak by optimizing the selection of vibration sampling points and performing single-point scanning, so that only the phase needs to be fitted during the image recovery process, which greatly improves the efficiency and effect of image recovery. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solution of the embodiments of the present application, the drawings required for use in the embodiments of the present application are briefly introduced below.

[0017] Figure 1 A schematic diagram of a flow chart of a method for eliminating vibration of a scanning electron microscope image provided by an embodiment of the present invention; Figure 2 A schematic diagram of a vibration sampling point determination result provided by an embodiment of the present invention; Figure 3 A schematic diagram of a flow chart of a vibration phase determination method provided by an embodiment of the present invention; Figure 4Another schematic diagram of a flow chart of a vibration phase determination method provided by an embodiment of the present invention; Figure 5 A schematic flow chart of a vibration elimination method provided by an embodiment of the present invention; Figure 6 A schematic diagram of the fitted vibration images in the horizontal and vertical directions provided by an embodiment of the present invention; Figure 7 A comparison diagram of scanning electron microscope images before and after interpolation provided by an embodiment of the present invention; Figure 8 A schematic diagram of the structure of a device for eliminating vibration of a scanning electron microscope image provided by an embodiment of the present invention; Fig. 9 A schematic diagram of the structure of an electronic device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.

[0019] Similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0020] Scanning electron microscope (SEM) is a large precision instrument used for high-resolution micro-area morphology analysis. It has the characteristics of large depth of field, high resolution, intuitive imaging, strong three-dimensional sense, wide magnification range, and the ability to rotate and tilt the sample to be tested in three-dimensional space. In addition, it has the advantages of rich testable sample types, almost no damage or contamination to the original sample, and the ability to obtain morphology, structure, composition and crystallography information at the same time.

[0021] When we use a scanning electron microscope to obtain an image of the sample surface, it is usually accompanied by different types of noise. These noises have a serious impact on the quality of the image obtained. For example, there is a mechanical pump and a molecular pump in the scanning electron microscope, which are used to provide a vacuum environment, so that the emitted electron beam will not collide with impurities in the air when passing through the lens hole and reaching the sample. However, the motors of these two pumps will produce periodic vibrations, and these vibrations may be transmitted to the equipment and affect the measurement results. Generally, we will use vibration suppressors outside the equipment to suppress these vibrations as much as possible, but the distortion caused by vibration can still be seen in the image. In addition, the stray electromagnetic fields in the environment where the scanning electron microscope equipment is located will also interfere with the movement of the scanning electrons, causing vibration distortion in the final imaging. The above-mentioned types of vibration interference will ultimately affect the quality of the scanning electron microscope image. Based on this, an embodiment of the present invention provides a method for eliminating vibration of a scanning electron microscope image, attached. Figure 1 A schematic flow chart of a method for eliminating vibration of a scanning electron microscope image provided by an embodiment of the present invention is shown.

[0022] Step S110, acquiring a target scanning electron microscope image to be processed, and determining vibration sampling points in the target scanning electron microscope image.

[0023] For a scanning electron microscope, the electron beam emitted by its electron gun is focused and converged into a point light source, which forms a high-energy electron beam under the acceleration voltage. The high-energy electron beam is focused into a light spot with a small diameter through multiple (one, two, three, etc.) electromagnetic lenses. After passing through the last electromagnetic lens with a scanning coil, the electron beam bombards the sample surface point by point in a raster scanning manner, and stimulates electron signals at different depths at the same time. At this time, the electron signal will be received by the probes of different signal receivers above the sample, and transmitted synchronously to the computer display through the amplifier to form a real-time imaging record. The electron signals stimulated by the incident electron bombarding the sample surface are: Auger electrons (AuE), secondary electrons (SE), backscattered electrons (BSE), X-rays (characteristic X-rays, continuous X-rays), cathode fluorescence (CL), absorbed electrons (AE) and transmitted electrons. The purpose of each electron signal varies depending on the depth of action.

[0024] The embodiment of the present invention is mainly used to restore the distortion of scanning electron microscope images caused by some fixed-mode vibrations. These distortions may come from the regular vibrations of the entire imaging result caused by the vacuum pump (generally with a rotation speed of several hundred to several thousand RPM) and the interference electromagnetic field. The characteristics of these vibrations are that their periods and vibration modes are relatively fixed. We can extract the characteristic information of these vibrations through a single-point scanning method, which helps us to remove the distortion in the SEM image more quickly and effectively.

[0025] Therefore, in this step, the position of the single-point scan in the SEM image, i.e., the vibration sampling point, must first be determined. The vibration information in the present invention will be decomposed into vibration information in the horizontal direction and vibration information in the vertical direction, which correspond to the vibration sampling points in the horizontal direction and the vibration sampling points in the vertical direction of the single-point scan, respectively. The vibration information in the horizontal direction and the vibration information in the vertical direction will be eliminated separately in subsequent steps.

[0026] The single-point scanning in the embodiment of the present invention refers to fixing the electron gun of the scanning electron microscope at a suitable position, performing electron emission for a long time, and collecting the curve I(t) of the change of the secondary electron yield over time. According to the principle of scanning electron microscope imaging, when the incident conditions remain unchanged, the secondary electron yield per unit time is related to the spatial configuration (mainly morphology) of the electron incident on the position of the sample.

[0027] During the single-point scanning process, when the electron gun is at a point with a gentle slope when performing single-point scanning, the displacement generated by the vibration is within a linear range. The spatial displacement of the sample will be proportionally scaled to the change in secondary electron yield, and the periodic displacement vibration will also be linearly converted into periodic oscillation changes in secondary electron yield.

[0028] Specifically, the vibration sampling point determination method in this step can be implemented by determining the vibration sampling points in the target scanning electron microscope image according to the change gradient values ​​of the secondary electron yields at different positions in the target scanning electron microscope image in the X-axis and Y-axis directions. Taking the vibration sampling points in the vertical direction as an example, Figure 2 The schematic diagram of the vibration sampling point determination result is shown in the figure. When traversing the scanning electron microscope image, the vibration sampling point shown in the figure can be found. Here, the change of the secondary electron yield in the Y direction is relatively significant and linear, and it is almost unchanged in the X direction. Therefore, by sampling this position, the vibration situation in the Y direction can be obtained. Similarly, a position suitable for measuring the vibration in the X direction can also be found, that is, the judgment condition becomes that the change of the secondary electron yield in the X direction is relatively significant and linear, and it is almost unchanged in the Y direction. It is worth noting that there may be multiple vibration sampling points in the horizontal direction and the vertical direction that meet the conditions in a scanning electron microscope image. It is sufficient to determine a vibration sampling point in the horizontal direction and a vibration sampling point in the vertical direction respectively.

[0029] Step S120 , performing spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling at the vibration sampling points for a preset time to obtain corresponding vibration amplitude information and vibration frequency information.

[0030] After determining the vibration sampling points in the horizontal direction and the vibration sampling points in the vertical direction, this step performs spectrum analysis on the secondary electron sampling signals obtained by single-point scanning of the vibration sampling points. The preset time in the step can be a preset empirical value. It can also be used as the initial setting time. In the process of single-point sampling, the sampling time needs to be controlled until a satisfactory signal is obtained, that is, a single-point sampling of a non-preset time period is performed at each sampling point. The length of this time period is determined based on the vibration characteristics that are expected to be captured, in order to ensure that the key details of the vibration behavior can be fully recorded while avoiding unnecessary noise interference. After the single-point sampling is completed, we obtain a series of secondary electron sampling signals representing the vibration state at different time points. These signals are captured by specific detectors, and they reflect the changes in the secondary electron emission intensity stimulated by the tiny displacement of the material surface caused by the vibration. Secondary electrons are ideal for analyzing vibration characteristics because of their high sensitivity to surface morphology.

[0031] Next, in order to extract useful information from these complex signals, it is necessary to apply spectrum analysis techniques, which is a mathematical method for converting time domain signals into frequency domain, which allows us to observe the intensity of the components of the signal at different frequencies. By performing spectrum analysis on the secondary electron sampling signal, we can identify specific frequency components related to the vibration, which directly correspond to the natural frequency of the vibrating system or the vibration frequency caused by external excitation.

[0032] In addition, the results of spectrum analysis can also provide information on vibration amplitude. Amplitude reflects the maximum distance that the vibration deviates from the equilibrium position and is an important indicator for measuring vibration intensity. In the spectrum graph, amplitude information is usually expressed as the intensity (or amplitude) of each frequency component. The higher the intensity, the more significant the vibration at that frequency. So far, the above process is applied to the vibration sampling points in the horizontal direction and the vibration sampling points in the vertical direction respectively, and the vibration amplitude information and vibration frequency information corresponding to the horizontal direction and the vertical direction are obtained.

[0033] Step S130, determining the signal peak in the spectrum diagram obtained by spectrum analysis, and fitting the signal peak using the boundary length information in the target scanning electron microscope image to obtain corresponding vibration phase information.

[0034] Specifically, as attached Figure 3 As shown, the vibration phase determination method in step S130 can be implemented according to steps S131~S132.

[0035] Step S131, determining the boundary length of the vibration sampling point in the target SEM image.

[0036] Step S132, using the boundary length as an adaptation function to fit the signal peak value to obtain corresponding vibration phase information.

[0037] In the above steps, it is necessary to identify and select the most significant peaks from the vibration spectrum as the basis for fitting. These significant peaks usually correspond to the main frequency components in the vibration, which can reflect the key dynamic characteristics of the vibration system. By focusing only on these significant peaks, we can reduce the computational complexity while retaining enough information to approximate the entire vibration signal.

[0038] Next, the embodiment of the present invention uses the boundary length of the vibration sampling point in the scanning electron microscope image as the adaptation function for fitting the signal peak. Since the phase of the vibration is unknown, the boundary length of the SEM image under different phase combinations is calculated by adjusting the parameters of the vibration phase, and the phase combination with the shortest boundary length is found. This step is actually optimizing an objective function, that is, minimizing the boundary length of the SEM image, so as to approximate the actual vibration phase. This method makes full use of the spatial information of the SEM image and improves the accuracy of vibration phase estimation.

[0039] On the other hand, when the vibration phase fitted in steps S131-S132 finally makes the image vibration elimination result unsatisfactory, as shown in the attached figure, Figure 4 As shown, the vibration phase determination method in step S130 can be implemented according to steps S133~S134.

[0040] Step S133, determining the pixel value on the boundary where the vibration sampling point is located in the target SEM image; Step S134, performing fast Fourier transform on the pixel values ​​on the boundary to determine the vibration phase information with the most gradual change of the boundary pixel values.

[0041] In the above steps, if the initially fitted vibration phase fails to achieve the ideal image vibration elimination effect, another possible implementation of the present invention is to extract the data on the boundary and perform a fast Fourier transform (FFT) to verify and optimize the phase. FFT analysis can reveal the frequency components in the boundary data and their changes. By comparing the FFT results under different phase combinations, the phase combination that makes the boundary data change most smoothly can be found, which specifically means that the distribution of the frequency components in the frequency domain is more uniform or continuous, which usually means that the vibration signal is more stable and easier to process.

[0042] In summary, the embodiment of the present invention utilizes steps S131 to S132 or steps S133 to S134 to be applied to vibration sampling points in the horizontal direction and vibration sampling points in the vertical direction to obtain vibration phase information corresponding to the horizontal direction and the vertical direction.

[0043] Step S140: performing vibration elimination processing on the target SEM image using the vibration amplitude information, the vibration frequency information and the vibration phase information.

[0044] Specifically, Figure 5 As shown, the vibration elimination method in step S140 can be implemented through steps S141~S142.

[0045] Step S141, obtaining image displacement information according to the vibration amplitude information, the vibration frequency information and the vibration phase information; Step S142, after moving the image data of the target SEM image to the target position using the image displacement information, interpolating the two images before and after the movement to obtain a SEM image after vibration elimination.

[0046] Attached Figure 6 The fitted vibration images in the horizontal and vertical directions are shown respectively. In the previous steps, the vibration amplitude information, vibration frequency information and vibration phase information have been obtained. This information is obtained by real-time monitoring and analysis of the tiny vibrations of the equipment or sample during the imaging process of the target scanning electron microscope image. The vibration amplitude reveals the degree to which the vibration deviates from the equilibrium position, the vibration frequency reflects the speed of the vibration, and the vibration phase describes the position of the vibration waveform relative to the reference point at a certain moment.

[0047] Based on these vibration information, we can further calculate the image displacement information, which directly reflects the actual displacement of the pixels in the target SEM image caused by the vibration. Since the vibration information is associated with the pixel position of the target SEM image, the displacement of each pixel due to the vibration is obtained. Once we have obtained the image displacement information, we can use this information to correct the SEM image. Specifically, we move the image data of the target SEM image to its proper target position according to the calculated displacement. This process involves precise adjustment and rearrangement of the image data to ensure that each pixel is located in its correct position. Specifically, the vibration amplitude information, the vibration frequency information and the vibration phase include vibration amplitude information, vibration frequency information and vibration phase information in the horizontal direction, and vibration amplitude information, vibration frequency information and vibration phase information in the vertical direction.

[0048] However, simply moving the image data to the target position may not be enough to completely eliminate the impact of vibration. Because in actual operation, vibration may cause the image to appear blank or overlap in certain areas. To solve this problem, we use image interpolation technology to fill the blank areas of the image caused by vibration and smooth the overlapping parts of the image to obtain a more complete and clear SEM image. Specifically, the image before and after the displacement can be linearly interpolated in the horizontal and vertical directions respectively by sampling linear interpolation to obtain the SEM image after the vibration is eliminated. The effect is shown in the attached figure. Figure 7 The comparison of scanning electron microscope images before and after interpolation is shown in the figure.

[0049] Finally, after the above steps, we get a SEM image after eliminating vibration. This image not only has higher clarity and stability, but also can more accurately reflect the microstructure and characteristics of the sample surface.

[0050] The scanning electron microscope image vibration elimination method provided by the embodiment of the present invention aims to solve the problem that the traditional scanning electron microscope de-vibration method has no known information in the vibration fitting process and can only fit by combining different amplitudes, frequencies, and phases, resulting in too many unknown parameters and thus low recovery efficiency and poor effect. The embodiment of the present invention obtains the value of the frequency-amplitude combination of the main vibration peak by optimizing the selection of vibration sampling points and performing single-point scanning, so that only the phase needs to be fitted during the image recovery process, which greatly improves the efficiency and effect of image recovery.

[0051] Based on any of the above embodiments, as shown in the attached Figure 8 As shown, an embodiment of the present invention provides a device for eliminating vibration of a scanning electron microscope image, characterized in that the device comprises: The sampling point determination module 810 is used to obtain a target SEM image to be processed and determine vibration sampling points in the target SEM image; The spectrum analysis module 820 is used to perform spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling of the vibration sampling points for a preset time to obtain corresponding vibration amplitude information and vibration frequency information; The phase determination module 830 is used to determine the signal peak in the spectrum diagram obtained by spectrum analysis, and fit the signal peak using the boundary length information in the target SEM image to obtain the corresponding vibration phase information; The vibration elimination module 840 is used to perform vibration elimination processing on the target SEM image by using the vibration amplitude information, the vibration frequency information and the vibration phase information.

[0052] The scanning electron microscope image vibration elimination device provided in the embodiment of the present invention aims to solve the problem that the traditional scanning electron microscope de-vibration method has no known information in the vibration fitting process and can only fit by combining different amplitudes, frequencies, and phases, resulting in too many unknown parameters and thus low recovery efficiency and poor effect. The embodiment of the present invention obtains the value of the frequency-amplitude combination of the main vibration peak by optimizing the selection of vibration sampling points and performing single-point scanning, so that only the phase needs to be fitted during the image recovery process, which greatly improves the efficiency and effect of image recovery.

[0053] Based on any of the above embodiments, Fig. 9 The physical structure diagram of the electronic device provided by the embodiment of the present invention is shown, and the electronic device may include: a processor (processor) 910, a communication interface (CommunicationsInterface) 920, a memory (memory) 930 and a communication bus 940, wherein the processor 910, the communication interface 920, and the memory 930 communicate with each other through the communication bus 940. The processor 910 can call the logic instructions in the memory 930 to execute the following method: Acquire a target scanning electron microscope image to be processed, and determine a vibration sampling point in the target scanning electron microscope image; Performing spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling for a preset time on the vibration sampling points to obtain corresponding vibration amplitude information and vibration frequency information; Determine the signal peak in the spectrum diagram obtained by spectrum analysis, and fit the signal peak using the boundary length information in the target scanning electron microscope image to obtain the corresponding vibration phase information; The target SEM image is subjected to vibration elimination processing using the vibration amplitude information, the vibration frequency information and the vibration phase information.

[0054] In addition, the logic instructions in the above-mentioned memory 930 can be implemented in the form of a software functional unit and can be stored in a computer-readable storage medium when it is sold or used as an independent product. Based on this understanding, the technical solution of the embodiment of the present invention is essentially or the part that contributes to the prior art or the part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in the embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk and other media that can store program codes.

[0055] On the other hand, an embodiment of the present invention further provides a non-transitory computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the method provided in each of the above embodiments is implemented, for example, including: Acquire a target scanning electron microscope image to be processed, and determine a vibration sampling point in the target scanning electron microscope image; Performing spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling for a preset time on the vibration sampling points to obtain corresponding vibration amplitude information and vibration frequency information; Determine the signal peak in the spectrum diagram obtained by spectrum analysis, and fit the signal peak using the boundary length information in the target scanning electron microscope image to obtain the corresponding vibration phase information; The target SEM image is subjected to vibration elimination processing using the vibration amplitude information, the vibration frequency information and the vibration phase information.

[0056] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.

[0057] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for eliminating vibration of a scanning electron microscope image, characterized in that: The method comprises: Acquire a target scanning electron microscope image to be processed, and determine a vibration sampling point in the target scanning electron microscope image; Performing spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling for a preset time on the vibration sampling points to obtain corresponding vibration amplitude information and vibration frequency information; Determine the signal peak in the spectrum diagram obtained by spectrum analysis, and fit the signal peak using the boundary length information in the target scanning electron microscope image to obtain the corresponding vibration phase information; The target SEM image is subjected to vibration elimination processing using the vibration amplitude information, the vibration frequency information and the vibration phase information.

2. The method for eliminating vibration of a scanning electron microscope image according to claim 1, characterized in that: Determining the vibration sampling points in the target scanning electron microscope image specifically includes: The vibration sampling points in the target scanning electron microscope image are determined according to the change gradient values ​​of the secondary electron yields at different positions in the target scanning electron microscope image in the X-axis and Y-axis directions.

3. The method for eliminating vibration of a scanning electron microscope image according to claim 1, characterized in that: The step of fitting the signal peak value using the boundary length information in the target scanning electron microscope image to obtain the corresponding vibration phase information specifically includes: Determine the boundary length of the vibration sampling point in the target SEM image; The signal peak is fitted using the boundary length as an adaptation function to obtain corresponding vibration phase information.

4. The method for eliminating vibration of a scanning electron microscope image according to claim 1, characterized in that: The step of fitting the signal peak value using the boundary length information in the target scanning electron microscope image to obtain the corresponding vibration phase information specifically includes: Determine the pixel value on the boundary where the vibration sampling point is located in the target SEM image; The pixel values ​​on the boundary are subjected to fast Fourier transform to determine the vibration phase information where the boundary pixel values ​​change most slowly.

5. The method for eliminating vibration of a scanning electron microscope image according to claim 1, characterized in that: The performing vibration elimination processing on the target scanning electron microscope image by using the vibration amplitude information, the vibration frequency information and the vibration phase information specifically includes: Obtaining image displacement information according to the vibration amplitude information, the vibration frequency information and the vibration phase information; The image displacement information is used to move the image data of the target SEM image to the target position, and the two images before and after the movement are interpolated to obtain the SEM image after vibration elimination.

6. The method for eliminating vibration of a scanning electron microscope image according to any one of claims 1 to 5, characterized in that: The vibration sampling points include vibration sampling points in the horizontal direction and vibration sampling points in the vertical direction.

7. The method for eliminating vibration of a scanning electron microscope image according to any one of claims 1 to 5, characterized in that: The vibration amplitude information, the vibration frequency information, and the vibration phase include vibration amplitude information, vibration frequency information, and vibration phase information in a horizontal direction, and vibration amplitude information, vibration frequency information, and vibration phase information in a vertical direction.

8. A device for eliminating vibration of a scanning electron microscope image, characterized in that: The device comprises: A sampling point determination module is used to obtain a target SEM image to be processed and determine vibration sampling points in the target SEM image; A spectrum analysis module, used to perform spectrum analysis on the secondary electron sampling signals obtained by performing single-point sampling of the vibration sampling points for a preset time, to obtain corresponding vibration amplitude information and vibration frequency information; A phase determination module is used to determine the signal peak in the spectrum diagram obtained by spectrum analysis, and fit the signal peak using the boundary length information in the target scanning electron microscope image to obtain the corresponding vibration phase information; The vibration elimination module is used to perform vibration elimination processing on the target scanning electron microscope image by using the vibration amplitude information, the vibration frequency information and the vibration phase information.

9. An electronic device, characterized in that: include: one or more processors; A memory for storing one or more programs; When the one or more programs are executed by the one or more processors, the one or more processors execute the method as claimed in any one of claims 1 to 7.

10. A computer-readable storage medium having executable instructions stored thereon, characterized in that: When the executable instructions are executed by a processor, the processor executes the method according to any one of claims 1 to 7.

Images