Diamond-based X-ray target and preparation method thereof

Abstract

The invention provides a diamond-based X-ray target and a preparation method thereof, and relates to the technical field of X-ray, the preparation method comprises the following steps: based on preset structural characteristics, processing a diamond blank to obtain a diamond body, the diamond body comprising a first surface and a plurality of second surfaces; fixing the diamond body on the electrode plate to enable the electrode plate to cover the first surface; an electrode plate serves as an electroforming electrode, a heat dissipation layer is formed on the multiple second surfaces in an electroforming mode, the thickness of the heat dissipation layer is larger than that of the diamond body, and the diamond body wraps the heat dissipation layer; removing the electrode plate from the first surface; and vacuum-plating a target material on the first surface to form a target material layer to obtain the X-ray target. According to the X-ray target, the diamond body with the polyhedral structure is designed, the heat dissipation layer wrapping the diamond body is combined, heat generated by the target material layer on the first surface is conducted to the heat dissipation layer in parallel through the multiple second surfaces of the diamond body, and the heat dissipation efficiency of the X-ray target is greatly improved.

Description

Technical Field

[0001] The present application relates to the field of X-ray technology, and in particular to a diamond-based X-ray target and a method for preparing the same. Background Art

[0002] X-ray targets are important core components of X-ray sources used to generate X-rays in X-ray computed tomography (CT). As an important direction and indicator for the development of CT, high-power density X-ray sources urgently need to solve the problem of heat dissipation. Diamond is an ideal heat transfer material for X-ray targets due to its high thermal conductivity.

[0003] In the prior art, an X-ray target is formed by coating the target material of the X-ray target on the front side of the diamond film. However, this method can only dissipate heat through the back side of the diamond film that is not coated with the target material, and its heat dissipation area is limited, and it cannot solve the heat dissipation problem of high power density X-ray sources. Summary of the invention

[0004] The present application provides a diamond-based X-ray target and a preparation method thereof, which improves the heat dissipation performance of the X-ray target by processing a diamond body having a first surface and a plurality of second surfaces with a larger area.

[0005] In a first aspect, an embodiment of the present application provides a method for preparing a diamond-based X-ray target, the preparation method comprising: based on preset structural features, processing a diamond blank to obtain a diamond body, the diamond body comprising a first surface and multiple second surfaces, the sum of the areas of the multiple second surfaces being greater than the area of ​​the first surface; fixing the diamond body to an electrode plate so that the electrode plate covers the first surface; using the electrode plate as an electroforming electrode, electroforming a heat dissipation layer on the multiple second surfaces, the thickness of the heat dissipation layer along the direction from the first surface toward the electrode plate being greater than the thickness of the diamond body, and the diamond body is wrapped in the heat dissipation layer; removing the electrode plate from the first surface; and plating a target material on the first surface to form a target material layer to obtain an X-ray target.

[0006] In a second aspect, an embodiment of the present application provides a diamond-based X-ray target, comprising a diamond body, a heat dissipation layer and a target material layer, the diamond body comprising a first surface and multiple second surfaces, the sum of the areas of the multiple second surfaces being greater than the area of ​​the first surface; the diamond body can be fixed to an electrode plate, and the electrode plate covers the first surface; the heat dissipation layer is electroformed on the multiple second surfaces using the electrode plate as an electroforming electrode; along the direction from the first surface toward the electrode plate, the thickness of the heat dissipation layer is greater than the thickness of the diamond body, and the diamond body is wrapped in the heat dissipation layer; after the electrode plate is removed from the first surface, the target material layer covers the first surface; wherein the heat generated by the target material layer is conducted to the heat dissipation layer via the multiple second surfaces.

[0007] The above-mentioned diamond-based X-ray target and preparation method thereof, by designing a diamond body with a polyhedral structure and combining it with a heat dissipation layer wrapped in the diamond body, conducts the heat generated by the target material layer on the first surface to the heat dissipation layer in parallel through multiple second surfaces of the diamond body, thereby greatly improving the heat dissipation efficiency of the X-ray target. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0009] Figure 1 This is a first flow chart of a method for preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0010] Figure 2 A second flow chart of the method for preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0011] Figure 3 A schematic diagram of the structure of a diamond-based X-ray target provided in an embodiment of the present application.

[0012] Figure 4 This is a first schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0013] Figure 5 A second schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0014] Figure 6 A third schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0015] Figure 7 A fourth schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0016] Figure 8 A fifth schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0017] Fig. 9 The sixth schematic diagram of preparing a diamond-based X-ray target provided in an embodiment of the present application.

[0018] Explanation of numbers in the figure: 100-X-ray target; 200-cutting body; 1-diamond body; 10-diamond blank; 11-first surface; 12-second surface; 2-heat dissipation layer; 3-target material layer; 4-electrode plate; 5-prefabricated solution; Y-direction of the first surface toward the electrode plate; W1-thickness of the diamond body; W2-thickness of the heat dissipation layer.

[0019] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0021] The terms "first", "second", "third", "fourth", etc. (if any) in the specification and claims of this application and the above-mentioned drawings are used to distinguish similar planning objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate. In other words, the described embodiments are implemented according to an order other than that illustrated or described herein. In addition, the terms "including" and "having" and any of their variations may also include other content. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to only those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0022] It should be noted that the descriptions involving "first", "second", etc. in this application are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0023] Please see Figure 1 , which is a flow chart of a method for preparing a diamond-based X-ray target provided in an embodiment of the present application. The present application provides a method for preparing a diamond-based X-ray target. The preparation method includes steps S101-S105.

[0024] Step S101, based on preset structural features, processing the diamond blank to obtain a diamond body.

[0025] In step S101, the diamond body 1 includes a first surface 11 and a plurality of second surfaces 12. The first surface 11 can be used to plate a target material to form an X-ray target 100. The second surface 12 is used to conduct the heat generated by the X-ray target 100. The sum of the areas of the plurality of second surfaces 12 is greater than the area of ​​the first surface 11. The preset structural feature is the expected three-dimensional structure of the diamond body 1. The preset structural feature includes but is not limited to the shape and number of faces of the diamond body 1, the shape and area size of each face, the expected first surface 11 and second surface 12 in each face, etc. Specifically, the preset structural features in the present application include the shape and number of faces of the diamond body 1, and the shape and area of ​​the first surface 11. The shape of the first surface 11 includes but is not limited to a hexagon, an octagon, etc. More specifically, the present application does not limit the shape of the second surface 12, and the number of faces of the second surface 12 and the area of ​​each second surface 12 are related to the area of ​​the first surface 11 to reflect the heat dissipation performance of the X-ray target 100.

[0026] Further, the area of ​​each second surface 12 is greater than the area of ​​the first surface 11. The first surface 11 and the plurality of second surfaces 12 are connected in sequence, so that the diamond body 1 presents a closed polyhedron structure. In the present application, the processing is achieved by mechanically grinding the diamond blank 10, and the first surface 11 is processed on the diamond body 1 based on the preset structural features, and the first surface 11 is processed into a plurality of second surfaces 12 of sufficient size accordingly.

[0027] Step S102, fixing the diamond body to the electrode plate so that the electrode plate covers the first surface.

[0028] In step S102, the material of the electrode plate 4 is at least one of titanium, platinum, nickel, etc. or their corresponding alloys. Specifically, the material of the electrode plate 4 in this embodiment is titanium. The present application arranges the first surface 11 of the diamond body 1 relative to the electrode plate 4 so that the first surface 11 is covered by the electrode plate 4, so that when the heat dissipation layer 2 is subsequently electroformed on multiple second surfaces 12, the heat dissipation layer 2 will not cover the first surface 11 and occupy the space of the target material.

[0029] Step S103, using the electrode plate as an electroforming electrode, electroforming a heat dissipation layer on a plurality of second surfaces.

[0030] In step S103, along the direction Y from the first surface toward the electrode plate, the thickness W2 of the heat dissipation layer is greater than the thickness W1 of the diamond body. More specifically, the thickness of the heat dissipation layer 2 is much greater than the thickness of the diamond body 1, so that the diamond body 1 is completely wrapped in the heat dissipation layer 2. The material used for the heat dissipation layer 2 should have good thermal conductivity. The material of the heat dissipation layer 2 is at least one of copper, silver, graphite and the like or their corresponding alloys. Specifically, the material of the heat dissipation layer 2 in this embodiment is copper. In other words, the electrode plate and the heat dissipation layer are made of different materials.

[0031] In the present application, the heat dissipation layer 2 can be closely attached to the multiple second surfaces 12 when electroforming the multiple second surfaces 12. The X-ray target 100 can form a continuous heat-conducting structure with the diamond body 1 through the multiple second surfaces 12, and effectively conduct the heat of the X-ray target 100 from the heat dissipation layer 2 through the second surface 12 to ensure the stability and continuity of the heat dissipation of the X-ray target 100. In other words, the present application directly combines the heat dissipation layer 2 with the second surface 12 of the diamond body 1 by electroforming, so that the heat dissipation layer 2 is densely and evenly covered on the second surface 12, ensuring that there is no gap between the heat dissipation layer 2 and the multiple second surfaces 12 of the diamond body 1, and greatly improving the thermal conductivity efficiency of the X-ray target 100.

[0032] Step S104, removing the electrode plate from the first surface.

[0033] In step S104, the electrode plate 4 is removed from the first surface 11 by soaking in a prefabricated solution 5. The prefabricated solution only acts on the electrode plate 4 but not on the heat dissipation layer 2. The effects of the prefabricated solution 5 include chemical reaction and / or corrosion to selectively remove specific materials. For example, the electrode plate 4 is made of a first material and the heat dissipation layer 2 is made of a second material. The first material is one of materials such as titanium, platinum, nickel, or a corresponding alloy thereof, and the second material is one of materials such as copper, silver, graphite, or a corresponding alloy thereof. When the first material is titanium and the second material is copper, the prefabricated solution 5 is a hydrofluoric acid solution. When the electrode plate 4 is soaked in the hydrofluoric acid solution, the hydrofluoric acid will react chemically with titanium to consume the electrode plate 4, thereby removing the electrode plate 4 from the first surface 11. It can be understood that since the materials of the electrode plate 4 and the heat dissipation layer 2 are different, the electrode plate 4 can be selectively removed by different prefabricated solutions 5. Since the heat dissipation layer 2 is fixed to the plurality of second surfaces 12 by electroforming, and the prefabricated solution 5 has no effect on the heat dissipation layer 2, when the electrode plate 4 is removed by the prefabricated solution 5, the heat dissipation layer 2 can still remain free of peeling or damage, thereby ensuring the integrity of the heat dissipation layer 2 structure.

[0034] Step S105 , coating a target material on the first surface to form a target material layer to obtain an X-ray target.

[0035] In step S105, when the electrode plate 4 is removed from the first surface 11, the first surface 11 is exposed to the heat dissipation layer 2. The target layer 3 is formed on the first surface 11 by vacuum coating. The material of the target layer 3 is at least one of tungsten, copper, aluminum, molybdenum and gold. Specifically, the material of the target layer 3 in the present application is tungsten. The target layer 3 also covers the side of the heat dissipation layer 2 close to the first surface 11.

[0036] Please see Figure 2 , which is a second flow chart of the method for preparing a diamond-based X-ray target provided in an embodiment of the present application. Before removing the electrode plate from the first surface, the preparation method further includes step S201.

[0037] Step S201 , based on the preset shape of the X-ray target, cutting the diamond body, the electrode plate and the heat dissipation layer to obtain the cut diamond body, the electrode plate and the heat dissipation layer, forming a cut body.

[0038] In step S201, the diamond body, the electrode plate and the heat dissipation layer are cut by mechanical processing, so that the diamond body, the electrode plate and the heat dissipation layer retain the corresponding shapes of the first surface 11 and the plurality of second surfaces 12, and the heat dissipation layer 2 and the electrode plate 4 are respectively adapted to the expected three-dimensional structural features of the X-ray target 100 to form a cut body 200. In order to subsequently remove the electrode plate 4 from the first surface by immersing the cut body 200 in the prefabricated solution 5.

[0039] Please see Figure 3 The present application also provides a diamond-based X-ray target 100. The X-ray target 100 includes a diamond body 1, a heat dissipation layer 2 and a target material layer 3. The diamond body 1 includes a first surface 11 and multiple second surfaces 12. The sum of the areas of the multiple second surfaces 12 is greater than the area of ​​the first surface 11. The diamond body 1 can be fixed to the electrode plate 4, and the electrode plate 4 covers the first surface 11. The heat dissipation layer 2 uses the electrode plate 4 as an electroforming electrode and is electroformed on multiple second surfaces 12. Along the direction Y from the first surface to the electrode plate, the thickness W2 of the heat dissipation layer is greater than the thickness W1 of the diamond body, and the diamond body 1 is wrapped in the heat dissipation layer 2. After the electrode plate 4 is removed from the first surface 11, the target material layer 3 covers the first surface 11. The heat generated by the target material layer 3 is conducted to the heat dissipation layer 2 through the multiple second surfaces 12. The target material layer 3 also covers the side of the heat dissipation layer 2 close to the first surface 11. The diamond-based X-ray target 100 in the present application is prepared by a diamond-based X-ray target preparation method. The preparation method has been described in detail above and will not be repeated here.

[0040] The preparation process of the diamond-based X-ray target 100 will be described below with reference to the accompanying drawings.

[0041] like Figure 4-Figure 9 As shown, Figure 4-Figure 9 The schematic diagram of preparing a diamond-based X-ray target is illustrated. First, based on the preset structural features, the diamond blank 10 is processed by mechanical grinding to obtain the first surface 11 and multiple second surfaces 12 of the diamond body 1; then, the diamond body 1 is fixed to the electrode plate 4 by gluing so that the electrode plate 4 covers the first surface 11; then, the electrode plate 4 is used as an electroforming electrode to electroform a heat dissipation layer 2 on multiple second surfaces 12; then, based on the preset shape of the X-ray target 100, the diamond body 1, the electrode plate 4 and the heat dissipation layer 2 are cut to obtain the cut diamond body 1, the electrode plate 4 and the heat dissipation layer 2 to form a cut body 200; then, the electrode plate 4 is removed from the first surface 11 by immersing the cut body 200 in a prefabricated solution 5; finally, the target material is vacuum-plated on the first surface 11 to form a target material layer 3 to obtain the X-ray target 100.

[0042] Among them, the area of ​​the first surface 11 is 0.5-25 square millimeters. The preset structural feature is that the shape of the first surface 11 is hexagonal. The material of the electrode plate 4 is titanium. The thickness of the electrode plate 4 is 0.1-0.5 mm. The area of ​​the electrode plate 4 facing the first surface 11 is 5-500 square millimeters. The material of the heat dissipation layer 2 is copper. The thickness W2 of the heat dissipation layer is 4-50 mm to fully wrap the diamond body 1. The material of the target layer 3 can be tungsten, copper, aluminum, molybdenum, gold and other metal materials. The thickness of the target layer 3 is 0.5-50 microns.

[0043] In the above embodiment, by designing a diamond body with a polyhedral structure and combining it with a heat dissipation layer wrapped around the diamond body, the heat generated by the target material layer on the first surface is conducted to the heat dissipation layer in parallel through multiple second surfaces of the diamond body, thereby greatly improving the heat dissipation efficiency of the X-ray target.

[0044] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

[0045] It should be understood that, although the steps in the flowchart of the accompanying drawings are displayed in sequence as indicated by the arrows, these steps are not necessarily executed in sequence in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least a part of the steps in the flowchart of the accompanying drawings may include multiple sub-steps or multiple stages, and these sub-steps or stages are not necessarily executed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be executed in turn or alternately with other steps or at least a part of the sub-steps or stages of other steps.

[0046] The above examples are only preferred embodiments of the present application, and certainly cannot be used to limit the scope of rights of the present application. Therefore, equivalent changes made according to the claims of the present application still fall within the scope covered by the present application.

Claims

1. A method for preparing a diamond-based X-ray target, characterized in that: The preparation method comprises: Based on the preset structural features, a diamond blank is processed to obtain a diamond body, wherein the diamond body comprises a first surface and a plurality of second surfaces, and the sum of the areas of the plurality of second surfaces is greater than the area of ​​the first surface; fixing the diamond body to an electrode plate so that the electrode plate covers the first surface; Using the electrode plate as an electroforming electrode, electroforming a heat dissipation layer on the plurality of second surfaces, the thickness of the heat dissipation layer being greater than the thickness of the diamond body along the direction from the first surface toward the electrode plate, and the diamond body being wrapped in the heat dissipation layer; removing the electrode plate from the first surface; A target material is plated on the first surface to form a target material layer to obtain an X-ray target.

2. The preparation method according to claim 1, characterized in that The preset structural features include the shape and number of faces of the diamond body, and the shape and area of ​​the first surface.

3. The preparation method according to claim 1, characterized in that: The area of ​​each second surface is larger than the area of ​​the first surface.

4. The preparation method according to claim 1, characterized in that: Before removing the electrode plate from the first surface, the preparation method further comprises: Based on the preset shape of the X-ray target, the diamond body, the electrode plate and the heat dissipation layer are cut to obtain the cut diamond body, the electrode plate and the heat dissipation layer to form a cut body.

5. The preparation method according to claim 4, characterized in that: The electrode plate and the heat dissipation layer are made of different materials; the electrode plate is removed from the first surface by immersing the cut body in a prefabricated solution, the prefabricated solution only acts on the electrode plate but not on the heat dissipation layer, and the effects of the prefabricated solution include chemical reaction and / or corrosion.

6. The preparation method according to claim 5, characterized in that: The electrode plate is made of titanium, the heat dissipation layer is made of copper, and the prefabricated solution is a hydrofluoric acid solution.

7. The preparation method according to claim 1, characterized in that: When the electrode plate is removed from the first surface, the first surface is exposed to the heat dissipation layer.

8. A diamond-based X-ray target, characterized in that: The X-ray target comprises: A diamond body, comprising a first surface and a plurality of second surfaces, wherein the sum of the areas of the plurality of second surfaces is greater than the area of ​​the first surface; the diamond body can be fixed to an electrode plate so that the electrode plate covers the first surface; A heat dissipation layer is formed on the plurality of second surfaces by electroforming, using the electrode plate as an electroforming electrode; along the direction from the first surface to the electrode plate, the thickness of the heat dissipation layer is greater than the thickness of the diamond body, and the diamond body is wrapped in the heat dissipation layer; a target material layer, after the electrode plate is removed from the first surface, covering the first surface; The heat generated by the target material layer is conducted to the heat dissipation layer through the plurality of second surfaces.

9. The X-ray target according to claim 8, characterized in that The area of ​​each second surface is larger than the area of ​​the first surface.

10. The X-ray target according to claim 8, wherein The target material layer also covers a side of the heat dissipation layer close to the first surface.

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