Multi-imaging-mode composite detector and imaging method thereof

Abstract

The invention provides a composite detector with multiple imaging modes, and belongs to the technical field of imaging devices. The device comprises a detector main body mounting beam, a vacuum feed-through sealing flange, a detector supporting arm, an R-axis reciprocating rotation driving mechanism, an X2-axis driving mechanism, a detector A, a signal amplifier A and a shielding shell, a detector B, a signal amplifier B and a shielding shell, a multi-channel signal processor, a detector sealing mounting flange and a compressible and twistable metal corrugated pipe. According to the invention, a plurality of detectors are fused in a single accessory to synchronously capture BSE signals / X-ray signals / cathode fluorescence signals and STEM signals. And frequent switching among a plurality of devices is not needed, so that the experiment efficiency is remarkably improved, and meanwhile, the device purchase and maintenance cost of a user is effectively reduced. Different detectors are integrated in one accessory, only one interface needs to be occupied, the structure of the device is simplified, space can be reserved for other accessories, and the function of the electron microscope is maximized.

Description

Technical Field

[0001] The present invention relates to the technical field of imaging devices, and in particular to a composite detector with multiple imaging modes and an imaging method thereof. Background Art

[0002] Scanning Electron Microscope (SEM) is a high-resolution, high-magnification electronic optical instrument that uses a narrowly focused, short-wavelength high-energy electron beam as an illumination source, stimulates various physical information through the interaction between the electron beam and matter, and uses detectors to collect, process and image this information.

[0003] like Figure 1 As shown, the backscattered electron detector (BSE) is used to detect high-energy electrons generated by elastic or inelastic scattering of the incident electron beam 6 focused by the objective lens 2 and the atomic nuclei of the sample 5. It is an important component of the scanning electron microscope and can provide important information about the composition and structure of the sample. The BSE detector is usually a semiconductor detector composed of doped semiconductor materials (such as silicon) and is placed directly above the sample.

[0004] like Figure 1 As shown, the energy dispersive spectrometer (EDS) collects characteristic X-rays generated by the interaction between the electron beam 6 and the sample 5, and analyzes the element types and contents in the micro-area on the surface of the sample according to the energy and wavelength of the characteristic X-rays. Each element has its own characteristic wavelength of X-rays, and the size of the characteristic wavelength depends on the characteristic energy released during the energy level transition process. The EDS detector usually uses a silicon drift detector and is placed above the sample.

[0005] like Figure 1 As shown, the working principle of the cathode fluorescence detector (CL) is based on the photoelectric effect. In a scanning electron microscope, when a high-energy incident electron beam 6 bombards the surface of the sample 5, it excites the electrons in the sample and causes them to transition to a higher energy level. These electrons release energy during the deexcitation process, part of which is emitted in the form of visible light or ultraviolet light, generating cathode fluorescence signals. These signals are received by the cathode fluorescence detector and converted into electrical signals, which are then analyzed and displayed. By detecting the intensity and wavelength distribution of the cathode fluorescence signal, information about the sample's energy band structure, defect state, impurity distribution, etc. can be obtained. The cathode fluorescence detector is usually located above the sample.

[0006] like Figure 1As shown in the figure, the scanning transmission electron microscopy (STEM) is a working mode of the scanning electron microscope. In the STEM mode, the incident electron beam 6 is scanned onto the sample 5. When it passes through the sample, the intensity changes with the structure and composition of the sample. The STEM detector is placed under the sample to collect and process these transmitted or scattered electron signals to form different images, such as bright field image (BF), annular dark field (ADF) image and high angle annular dark field (HAADF) image. These signals reflect different information of the sample, such as surface morphology, crystal structure and element distribution.

[0007] Generally speaking, due to the different positions and functions of BSE detectors, energy dispersive spectrometers (EDS), cathodoluminescence detectors (CL) and STEM detectors in SEM systems, different interfaces are often required to install these accessories at the same time. In addition to the above accessories, there are also secondary electron detectors (SE), spectrometers (WDS), etc. The wide variety of accessories also brings some inconveniences. For example, different accessories require space to install and operate, which increases the manufacturing and maintenance costs of the equipment; with the increase of accessories, when acquiring different signals, users need to switch between different devices, which increases the difficulty of operating the SEM system; when the number of side interfaces is limited by the installation position, some accessories are incompatible, resulting in the inability to maximize the scanning electron microscope function.

[0008] In summary, the wide variety of accessories in the SEM brings some inconveniences. For example, different accessories require space to install and operate, which increases the manufacturing and maintenance costs of the equipment. With the increase of accessories, users need to switch between different devices when acquiring different signals, which increases the difficulty of operating the SEM system. When the number of side interfaces is limited by the installation position, some accessories are incompatible, resulting in the inability to maximize the function of the SEM. Summary of the invention

[0009] In view of this, in order to solve the technical problem in the prior art that when acquiring different signals, users need to switch between different devices, which increases the difficulty of operating the SEM system, on the one hand, the present invention provides a composite detector with multiple imaging modes, which synchronously captures BSE signals / X-ray signals / cathode fluorescence signals and STEM signals by integrating multiple detectors into a single accessory, and also gives users the ability to flexibly select detectors according to experimental needs and accurately locate them to different areas of the sample. There is no need to frequently switch between multiple devices, which significantly improves experimental efficiency and effectively reduces the user's equipment purchase and maintenance costs. Different detectors are integrated in one accessory and only need to occupy one interface, which simplifies the structure of the equipment and leaves space for other accessories to maximize the function of the electron microscope.

[0010] To achieve the above object, the present invention provides the following technical solutions: A composite detector with multiple imaging modes, comprising: A detector body mounting beam, on which a YZ two-dimensional motion table capable of performing X-axis displacement motion along the detector body mounting beam is mounted; A vacuum feedthrough sealing flange is fixed on the YZ two-dimensional motion table, and realizes displacement motion in the Y-axis and Z-axis directions under the drive of the YZ two-dimensional motion table; A detector support arm, one end of which is fixed to the vacuum feedthrough sealing flange; The R-axis reciprocating rotation driving mechanism and the X2-axis driving mechanism are respectively fixed to the other end of the detector support arm; The detector A, the signal amplifier A and the shielding shell are fixed on the R-axis reciprocating rotation drive mechanism as an integral structure to achieve 0-360° reciprocating rotation of the R-axis; The detector B, the signal amplifier B and the shielding shell are fixed on the X2-axis driving mechanism as an integral structure to achieve reciprocating motion along the X-axis direction, and the signal detection surface of the detector B is always facing the (Z+) direction; A multi-channel signal processor is fixed to the end of the YZ two-dimensional motion stage and performs circuit and signal communication through the vacuum feedthrough sealing flange; A detector sealing mounting flange is sleeved on the detector support arm and is used to be fixed to the working chamber; The compressible and torsionable metal bellows is connected between the vacuum feedthrough sealing flange and the detector sealing mounting flange and is used to provide deformation margins for compression, tension and torsion.

[0011] Preferably, the detector body mounting beam is provided with a driving device for driving the YZ two-dimensional motion table to perform X-axis displacement motion.

[0012] Preferably, the driving device comprises: A driving motor is fixed on the detector body mounting beam; The lead screw is connected to the output end of the driving motor and is threadedly connected to the YZ two-dimensional motion table to drive the YZ two-dimensional motion table to perform X-axis displacement motion.

[0013] Preferably, the driving device further comprises: The guide rail is arranged on the detector body mounting beam and is slidably connected with the YZ two-dimensional motion platform.

[0014] Preferably, the detector A and the detector B are of particle detector type.

[0015] On the other hand, the present invention also provides an imaging method of the composite detector with multiple imaging modes, which can realize one of the following four imaging modes: Scanning transmission electron beam bright field and dark field imaging modes; Scanning transmission electron beam bright field, dark field and backscattered electron imaging modes; Scanning transmission electron beam bright field, dark field imaging and elemental energy spectrum imaging mode; Scanning transmission electron beam bright field, dark field and cathodoluminescence imaging modes.

[0016] Preferably, the scanning transmission electron beam bright field and dark field imaging modes are as follows: The YZ two-dimensional motion table moves as a whole in the (X-) direction; The X2-axis driving mechanism realizes the overall movement of the detector B, the signal amplifier B and the shielding shell in the (X2-) direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the (Y+) and (Y-) directions, so that the detectors A and B are aligned concentrically with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the (Z+) direction; place the sample on detector A; The incident electron beam with a certain energy is concentric with the Z axis and incident on the sample. The bright field signal electrons with a small angle with the Z axis pass through the central hole of detector A and are incident on the detection surface of detector B, realizing the collection of bright field signal electrons; Dark field signal electrons that form a larger angle with the Z axis are incident on the annular detection surfaces of different diameters of detector A, thereby collecting dark field signal electrons at different angles.

[0017] Preferably, the scanning transmission electron beam bright field, dark field and backscattered electron imaging modes are as follows: The YZ two-dimensional motion table moves as a whole in the (X-) direction; The X2-axis driving mechanism realizes the overall movement of the detector B, the signal amplifier B and the shielding shell in the (X2-) direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the (Y+) and (Y-) directions, so that the detectors A and B are aligned concentrically with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the (Z-) direction; Place the sample between detector A and detector B; The incident electron beam with a certain energy is concentric with the Z axis, passes through the central hole of detector A, and is incident on the sample. The electrons passing through the sample are incident on the detection surface of detector B, realizing the collection of bright field signal electrons and dark field signal electrons; The backscattered electron signal emitted from the sample surface is incident on the annular detection surface of different diameters of detector A in the (Z+) direction, realizing the signal collection of backscattered electrons at different angles.

[0018] Preferably, the scanning transmission electron beam bright field, dark field imaging and element spectrum imaging modes are specifically as follows: The YZ two-dimensional motion table moves as a whole in the (X-) direction; The X2-axis driving mechanism realizes the overall movement of the detector B, the signal amplifier B and the shielding shell in the (X2-) direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the (Y+) and (Y-) directions, so that the detectors A and B are aligned concentrically with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the (Z-) direction; Place the sample between detector A and detector B; The incident electron beam with a certain energy is concentric with the Z axis, passes through the central hole of detector A, and is incident on the sample. The electrons passing through the sample are incident on the detection surface of detector B, realizing the collection of bright field signal electrons and dark field signal electrons; The X-ray signal emitted from the sample surface is incident on the detection surface of detector A in the (Z+) direction, realizing the signal collection of X-rays at different angles.

[0019] Preferably, the scanning transmission electron beam bright field, dark field imaging and cathode fluorescence imaging modes are as follows: The YZ two-dimensional motion table moves as a whole in the (X-) direction; The X2-axis driving mechanism realizes the overall movement of the detector B, the signal amplifier B and the shielding shell in the (X2-) direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the (Y+) and (Y-) directions, so that the detectors A and B are aligned concentrically with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the (Z-) direction; Place the sample between detector A and detector B; The incident electron beam with a certain energy is concentric with the Z axis, passes through the central hole of detector A, and is incident on the sample. The electrons passing through the sample are incident on the detection surface of detector B, realizing the collection of bright field signal electrons and dark field signal electrons; The cathode fluorescence signal emitted from the sample surface is incident on the detection surface of detector A in the (Z+) direction, thereby collecting cathode fluorescence signals at different angles.

[0020] Compared with the prior art, the present invention has the following beneficial effects: The composite detector with multiple imaging modes provided by the present invention simultaneously captures BSE signals / X-ray signals / cathode fluorescence signals and STEM signals by integrating multiple detectors into a single accessory, and also enables users to flexibly select detectors according to experimental requirements and accurately locate them to different areas of the sample. There is no need to frequently switch between multiple devices, which significantly improves experimental efficiency and effectively reduces the user's equipment purchase and maintenance costs. Different detectors are integrated in one accessory and only need to occupy one interface, which simplifies the structure of the equipment and leaves space for other accessories, maximizing the function of the electron microscope.

[0021] The multi-imaging mode composite detector and method of the present invention are unique in that they are equipped with an advanced module front end, which has the ability to install dual detectors and can stably install BSE detectors / energy dispersive spectrometers / cathode fluorescence detectors and STEM detector chips. Through the precisely designed up and down, front and back translation mechanism, users can easily switch the use surface and position of different detectors. In addition, the module front end has a built-in high-precision positioning mechanism to ensure that the position can be accurately adjusted when switching detectors, thereby ensuring accurate signal reception.

[0022] The multi-imaging mode composite detector provided by the present invention is highly integrated and flexibly configured. Users can integrate different detectors according to actual needs and automatically adjust the front position of the module, which greatly improves the functional diversity and operational convenience of the scanning electron microscope (SEM).

[0023] The multi-imaging mode composite detector provided by the present invention has space optimization and multi-functional expansion. This multi-imaging mode design greatly saves the internal space of the SEM, makes it possible to incorporate more other types of detectors or functional modules into the SEM system, significantly enhances the versatility and expansion potential of the system, and achieves excellent cost performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 Schematic diagram of different working modes when different detectors are located above and below the sample; Figure 2 The figure is a schematic diagram of the layout and vacuum sealing method of the device of the present invention in the electron microscope; Figure 3 It is a schematic diagram of the main structure, functional parts and working modes of the device of the present invention; Figure 4 A schematic diagram of realizing bright field and dark field imaging modes of a scanning transmission electron beam according to an embodiment of the present invention; Figure 5 A schematic diagram of realizing the scanning transmission electron beam bright field, dark field and backscattered electron imaging modes according to an embodiment of the present invention; Figure 6A schematic diagram of realizing bright field, dark field imaging and element energy spectrum composition imaging modes of a scanning transmission electron beam according to an embodiment of the present invention; Figure 7 A schematic diagram of realizing scanning transmission electron beam bright field, dark field imaging and cathode fluorescence imaging modes according to an embodiment of the present invention; In the figure, 1. working chamber; 2. objective lens; 3. vacuum environment; 4. composite detector; 5. sample; 6. incident electron beam; 7. dark field signal electron; 8. bright field signal electron; 9. backscattered electron; 10. seal; 11. compressible and torsion metal bellows; 12. vacuum feed-through sealing flange; 13. detector A; 14. detector B; 15. signal amplifier A and shielding shell; 16. signal amplifier B and shielding shell; 17. R-axis reciprocating rotation drive mechanism; 18. X2-axis drive mechanism; 19. detector support arm; 20. detector sealing mounting flange; 21. detector body mounting beam; 22. lead screw; 23. YZ two-dimensional motion table; 24. guide rail; 25. drive motor; 26. multi-channel signal processor. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", "top / bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "mounted / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] like Figure 2As shown, the present invention provides a composite detector 4 with multiple imaging modes, which realizes the sealed isolation of the vacuum environment 3 in the working chamber 1 from the external environment through the sealing member 10, the compressible and torsion metal bellows 11, and the vacuum feed-through sealing flange 12, and realizes the transmission of power supply and communication signals.

[0029] like Figure 3 As shown, the composite detector 4 with multiple imaging modes provided by the present invention includes: A detector body mounting beam 21 on which a YZ two-dimensional motion table 23 capable of performing X-axis displacement motion along the detector body mounting beam 21 is mounted; The vacuum feed-through sealing flange 12 is fixed on the YZ two-dimensional motion stage 23, and realizes displacement movement in the Y-axis and Z-axis directions under the drive of the YZ two-dimensional motion stage 23, specifically, the displacement movement in the (Y+), (Y-), (Z+), (Z-) directions, and the movement stroke is determined by actual needs. The displacement movement can be in the form of, but not limited to, a manual micrometer knob, a precision screw, or a piezoelectric motor.

[0030] One end of the detector support arm 19 is fixed on the vacuum feedthrough sealing flange 12 .

[0031] The R-axis reciprocating rotation drive mechanism 17 and the X2-axis drive mechanism 18 are respectively fixed to the other end of the detector support arm 19, and the power supply and communication cables are arranged through the wiring groove reserved in the detector support arm 19. Among them, the R-axis reciprocating rotation drive mechanism 17 can include but is not limited to a gear and bearing structure driven by a motor. The X2-axis drive mechanism 18 can be but is not limited to a linear bearing structure driven by a motor or a piezoelectric motor. It can be selected according to actual needs.

[0032] The detector A13, the signal amplifier A and the shielding shell 15 are fixed on the R-axis reciprocating rotation drive mechanism 17 as an integral structure to achieve the reciprocating rotation of the R-axis 0-360°; The detector B14, signal amplifier B and shielding shell 16 are fixed on the X2-axis driving mechanism 18 as an integral structure to achieve reciprocating motion along the X-axis direction. The motion stroke is determined by actual needs, and the signal detection surface of the detector B14 is always facing the (Z+) direction.

[0033] The multi-channel signal processor 26 is fixed to the end of the YZ two-dimensional motion stage 23 and performs circuit and signal communication through the vacuum feedthrough sealing flange 12 .

[0034] The detector sealing mounting flange 20 is sleeved on the detector support arm 19 and is used to be fixed to the working chamber 1 (such as Figure 2 as shown).

[0035] The compressible and torsion metal bellows 11 is connected between the vacuum feedthrough sealing flange 12 and the detector sealing mounting flange 20 to provide deformation margins for compression, tension and torsion. Specifically: When the YZ two-dimensional motion table 23 and its attached mounting structure are performing the movements of (X-), (X+), (Y+), (Y-), (Z+), and (Z-), the compressible and torsion metal bellows 11 provides deformation margins for compression, tension, and torsion.

[0036] In the present invention, the detector body mounting beam 21 is provided with a driving device for driving the YZ two-dimensional motion table 23 to perform X-axis displacement motion.

[0037] In the present invention, the driving device comprises: A driving motor 25 is fixed on the detector body mounting beam 21; The lead screw 22 is connected to the output end of the driving motor 25 and is connected to the YZ two-dimensional motion table 23 to drive the YZ two-dimensional motion table 23 to perform X-axis displacement motion.

[0038] In the present invention, the driving device further comprises: The guide rail 24 is disposed on the detector body mounting beam 21 and is slidably connected to the YZ two-dimensional motion table 23 .

[0039] In the above-mentioned driving device, the driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 performs linear guidance to realize the overall movement of the YZ two-dimensional motion table 23 and its auxiliary mounting structure in the (X-) and (X+) directions.

[0040] like Figure 4-7 As shown, on the other hand, the present invention also provides an imaging method of the composite detector 4 with multiple imaging modes, which can realize one of the following four imaging modes: like Figure 4 As shown, scanning transmission electron beam bright field and dark field imaging modes; like Figure 5 As shown, scanning transmission electron beam bright field, dark field and backscattered electron 9 imaging modes; like Figure 6 As shown, scanning transmission electron beam bright field, dark field imaging and element energy spectrum imaging modes; like Figure 7 As shown, scanning transmission electron beam bright field, dark field imaging and cathodoluminescence imaging modes.

[0041] Working mode 1: Scanning transmission electron beam bright field and dark field imaging mode. The present invention realizes scanning transmission electron beam bright field and dark field imaging mode. Detector A13 realizes dark field imaging, and detector B14 realizes bright field imaging. The details are as follows: The driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 provides linear guidance to achieve the overall movement of the YZ two-dimensional motion table 23 and its attached mounting structure in the (X-) direction; The X2-axis driving mechanism 18 realizes the overall movement of the detector B14, the signal amplifier B and the shielding shell 16 in the (X2-) direction; The YZ two-dimensional motion stage 23 realizes displacement adjustment motion in the (Y+) and (Y-) directions, so that the detector A13 and the detector B14 are aligned concentrically with the Z axis; Rotate the R-axis reciprocating rotation drive mechanism 17 to rotate the detection surface of the detector A13 toward the (Z+) direction; place the sample 5 above the detector A13 at a certain distance, and the actual distance is adjusted according to the signal strength; The incident electron beam 6 with a certain energy is concentric with the Z axis and incident on the sample 5, which is thick enough for electrons to penetrate. The bright field signal electrons 8 with a small angle to the Z axis pass through the central hole of the detector A13 and are incident on the detection surface of the detector B14, thereby collecting the bright field signal electrons 8; The dark field signal electrons 7 that form a larger angle with the Z axis are incident on the annular detection surfaces of different diameters of the detector A13, thereby realizing the collection of the dark field signal electrons 7 at different angles.

[0042] Working mode 2: Scanning transmission electron beam bright field, dark field and backscattered electron 9 imaging modes The device of the invention can realize the scanning transmission electron beam bright field, dark field and backscattered electron 9 imaging modes, with the backscattered electron 9 imaging realized by the detector A13 and the scanning transmission electron beam bright field and dark field imaging realized by the detector B14; The process is that the driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 performs linear guidance to achieve the overall movement of the (d14) YZ two-dimensional motion table 23 and its attached mounting structure in the (X-) direction; The X2-axis driving mechanism 18 realizes the overall movement of the detector B14, the signal amplifier B and the shielding shell 16 in the (X2-) direction; The YZ two-dimensional motion stage 23 realizes displacement adjustment motion in the (Y+) and (Y-) directions, so that the detector A13 and the detector B14 are aligned concentrically with the z-axis; Rotate the R-axis reciprocating rotation drive mechanism 17 to rotate the detection surface of the detector A13 toward the (Z-) direction; Sample 5 is placed between detector A13 and detector B14, and the actual distance is adjusted according to the signal strength; The incident electron beam 6 with a certain energy is concentric with the Z axis, passes through the central hole of the detector A13, and is incident on the sample 5, which is thick enough for electrons to penetrate. The electrons that pass through the sample 5 are incident on the detection surface of the detector B14, realizing the collection of the bright field signal electrons 8 and the dark field signal electrons 7; The backscattered electron 9 signal emitted from the surface of the sample 5 is incident on the annular detection surface of different diameters of the detector A13 in the (Z+) direction, thereby collecting the backscattered electron 9 signals at different angles.

[0043] Working mode 3: Scanning transmission electron beam bright field, dark field imaging and element spectrum imaging mode The device of the invention can realize the scanning transmission electron beam bright field, dark field imaging and element spectrum imaging mode, and the detector A13 is replaced with an X-ray detector to receive the X-ray signal generated by the sample 5; the detector B14 realizes the scanning transmission electron beam bright field and dark field imaging; The process is that the driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 performs linear guidance to realize the overall movement of the YZ two-dimensional motion table 23 and its attached mounting structure in the (X-) direction; The X2-axis driving mechanism 18 realizes the overall movement of the detector B14, the signal amplifier B and the shielding shell 16 in the (X2-) direction; The YZ two-dimensional motion stage 23 realizes displacement adjustment motion in the (Y+) and (Y-) directions, so that the detector A13 and the detector B14 are aligned concentrically with the Z axis; Rotate the R-axis reciprocating rotation drive mechanism 17 to rotate the detection surface of the detector A13 toward the (Z-) direction; Sample 5 is placed between detector A13 and detector B14, and the actual distance is adjusted according to the signal strength; The incident electron beam 6 with a certain energy is concentric with the Z axis, passes through the central hole of the detector A13, and is incident on the sample 5, which is thick enough for electrons to penetrate. The electrons that pass through the sample 5 are incident on the detection surface of the detector B14, realizing the collection of bright field signal electrons 8 and dark field signal electrons 7; The X-ray signal emitted from the surface of sample 5 is incident on the detection surface of detector A13 in a certain direction, thereby collecting X-ray signals at different angles.

[0044] Working mode 4: Scanning transmission electron beam bright field, dark field imaging and cathodoluminescence imaging mode The device of the invention can realize the scanning transmission electron beam bright field, dark field imaging and cathode fluorescence imaging mode, and the detector A13 is replaced with a cathode fluorescence detector to receive the cathode fluorescence signal generated by the sample 5; the detector B14 realizes the scanning transmission electron beam bright field and dark field imaging; The process is that the driving motor 25 and the lead screw 22 provide driving force, and the guide rail 24 performs linear guidance to realize the overall movement of the YZ two-dimensional motion table 23 and its attached mounting structure in the (X-) direction; The X2-axis driving mechanism 18 realizes the overall movement of the detector B14, the signal amplifier B and the shielding shell 16 in the direction; The YZ two-dimensional motion stage 23 realizes displacement adjustment motion in the (Y+) and (Y-) directions, so that the detector A13 and the detector B14 are aligned concentrically with the (Z)Z axis; Rotate the R-axis reciprocating rotation drive mechanism 17 to rotate the detection surface of the detector A13 toward the (Z-) direction; place the sample 5 between the detector A13 and the detector B14, and the actual distance is adjusted according to the signal strength; The incident electron beam 6 with a certain energy is concentric with the Z axis, passes through the central hole of the detector A13, and is incident on the sample 5. The electrons of the sample 5 can penetrate through the thickness of the sample 5, and the electrons passing through the sample 5 are incident on the detection surface of the detector B14, realizing the collection of the bright field signal electrons 8 and the dark field signal electrons 7; The cathode fluorescence signal emitted from the surface of sample 5 is incident on the detection surface of detector A13 in the (Z+) direction, thereby collecting cathode fluorescence signals at different angles.

[0045] The above are only preferred specific implementations of the present invention; however, the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and improved concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A composite detector with multiple imaging modes, characterized in that: include: A detector body mounting beam, on which a YZ two-dimensional motion table capable of performing X-axis displacement motion along the detector body mounting beam is mounted; A vacuum feedthrough sealing flange is fixed on the YZ two-dimensional motion table, and realizes displacement motion in the Y-axis and Z-axis directions under the drive of the YZ two-dimensional motion table; A detector support arm, one end of which is fixed to the vacuum feedthrough sealing flange; The R-axis reciprocating rotation driving mechanism and the X2-axis driving mechanism are respectively fixed to the other end of the detector support arm; The detector A, the signal amplifier A and the shielding shell are fixed on the R-axis reciprocating rotation drive mechanism as an integral structure to achieve 0-360° reciprocating rotation of the R-axis; The detector B, the signal amplifier B and the shielding shell are fixed on the X2-axis driving mechanism as an integral structure to achieve reciprocating motion along the X-axis direction, and the signal detection surface of the detector B is always facing the (Z+) direction; A multi-channel signal processor is fixed to the end of the YZ two-dimensional motion stage and performs circuit and signal communication through the vacuum feedthrough sealing flange; A detector sealing mounting flange is sleeved on the detector support arm and is used to be fixed to the working chamber; The compressible and torsionable metal bellows is connected between the vacuum feedthrough sealing flange and the detector sealing mounting flange and is used to provide deformation margins for compression, tension and torsion.

2. A composite detector with multiple imaging modes according to claim 1, characterized in that: The detector body mounting beam is provided with a driving device for driving the YZ two-dimensional motion table to perform X-axis displacement motion.

3. A composite detector with multiple imaging modes according to claim 2, characterized in that: The driving device comprises: A driving motor is fixed on the detector body mounting beam; The lead screw is connected to the output end of the driving motor and is connected to the YZ two-dimensional motion table to drive the YZ two-dimensional motion table to perform X-axis displacement motion.

4. A composite detector with multiple imaging modes according to claim 3, characterized in that: The driving device further comprises: The guide rail is arranged on the detector body mounting beam and is slidably connected with the YZ two-dimensional motion platform.

5. A composite detector with multiple imaging modes according to any one of claims 1 to 4, characterized in that: The detector A and the detector B are of particle detector type.

6. An imaging method of a composite detector with multiple imaging modes according to any one of claims 1 to 5, characterized in that: Capable of achieving one of the following four imaging modes: Scanning transmission electron beam bright field and dark field imaging modes; Scanning transmission electron beam bright field, dark field and backscattered electron imaging modes; Scanning transmission electron beam bright field, dark field imaging and elemental energy spectrum imaging mode; Scanning transmission electron beam bright field, dark field and cathodoluminescence imaging modes.

7. The imaging method of a composite detector with multiple imaging modes according to claim 6, characterized in that: The scanning transmission electron beam bright field and dark field imaging modes are specifically as follows: The YZ two-dimensional motion table moves as a whole in the (X-) direction; The X2-axis driving mechanism realizes the overall movement of the detector B, the signal amplifier B and the shielding shell in the (X2-) direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the (Y+) and (Y-) directions, so that the detectors A and B are aligned concentrically with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the (Z+) direction; place the sample on detector A; The incident electron beam with a certain energy is concentric with the Z axis and incident on the sample. The bright field signal electrons with a small angle with the Z axis pass through the central hole of detector A and are incident on the detection surface of detector B, realizing the collection of bright field signal electrons; Dark field signal electrons that form a large angle with the Z axis are incident on the annular detection surfaces of different diameters of detector A, thereby collecting dark field signal electrons at different angles.

8. The imaging method of a composite detector with multiple imaging modes according to claim 6, characterized in that: The scanning transmission electron beam bright field, dark field and backscattered electron imaging modes are as follows: The YZ two-dimensional motion table moves as a whole in the (X-) direction; The X2-axis driving mechanism realizes the overall movement of the detector B, the signal amplifier B and the shielding shell in the (X2-) direction; The YZ two-dimensional motion table realizes the displacement adjustment movement in the (Y+) and (Y-) directions, so that the detector A and the detector B are aligned concentrically with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the (Z-) direction; Place the sample between detector A and detector B; The incident electron beam with a certain energy is concentric with the Z axis, passes through the central hole of detector A, and is incident on the sample. The electrons passing through the sample are incident on the detection surface of detector B, realizing the collection of bright field signal electrons and dark field signal electrons; The backscattered electron signal emitted from the sample surface is incident on the annular detection surface of different diameters of detector A in the (Z+) direction, realizing the signal collection of backscattered electrons at different angles.

9. The imaging method of a composite detector with multiple imaging modes according to claim 6, characterized in that: The scanning transmission electron beam bright field, dark field imaging and element spectrum imaging modes are specifically as follows: The YZ two-dimensional motion table moves as a whole in the (X-) direction; The X2-axis driving mechanism realizes the overall movement of the detector B, the signal amplifier B and the shielding shell in the (X2-) direction; The YZ two-dimensional motion stage realizes the displacement adjustment movement in the (Y+) and (Y-) directions, so that the detectors A and B are aligned concentrically with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the (Z-) direction; Place the sample between detector A and detector B; The incident electron beam with a certain energy is concentric with the Z axis, passes through the central hole of detector A, and is incident on the sample. The electrons passing through the sample are incident on the detection surface of detector B, realizing the collection of bright field signal electrons and dark field signal electrons; The X-ray signal emitted from the sample surface is incident on the detection surface of detector A in the (Z+) direction, realizing the signal collection of X-rays at different angles.

10. The imaging method of a composite detector with multiple imaging modes according to claim 6, characterized in that: The scanning transmission electron beam bright field, dark field imaging and cathode fluorescence imaging modes are specifically as follows: The YZ two-dimensional motion table moves as a whole in the (X-) direction; The X2-axis driving mechanism realizes the overall movement of the detector B, the signal amplifier B and the shielding shell in the (X2-) direction; The YZ two-dimensional motion table realizes the displacement adjustment movement in the (Y+) and (Y-) directions, so that the detector A and the detector B are aligned concentrically with the Z axis; Rotate the R-axis reciprocating drive mechanism to rotate the detection surface of detector A toward the (Z-) direction; Place the sample between detector A and detector B; The incident electron beam with a certain energy is concentric with the Z axis, passes through the central hole of detector A, and is incident on the sample. The electrons passing through the sample are incident on the detection surface of detector B, realizing the collection of bright field signal electrons and dark field signal electrons; The cathode fluorescence signal emitted from the sample surface is incident on the detection surface of detector A in the (Z+) direction, thereby collecting cathode fluorescence signals at different angles.

Images