Plasma linear device sample stage and plasma linear device

Abstract

The present invention relates to the technical field of plasma linear devices, and discloses a plasma linear device sample stage and a plasma linear device. It includes a sample rod, a mounting member, an insulating component, a bellows, and an adjusting component. A sample seat for placing a sample is provided at the first end of the sample rod. The mounting member is provided with a mounting hole communicating with the main body, the sample rod passes through the mounting hole, and the diameter of the mounting hole is larger than the outer diameter of the sample rod. The insulating component is fixedly connected to the second end of the sample rod. The bellows is sleeved on the sample rod, the inner diameter of the bellows is larger than the outer diameter of the sample rod, one end of the bellows is hermetically connected to the insulating component, and the other end is hermetically connected to the mounting member. The adjusting component is connected to the insulating component. The insulating component insulates the sample rod from the bellows and the sample rod from the adjusting component. The diameter of the mounting hole and the inner diameter of the bellows are both larger than the outer diameter of the sample rod, avoiding contact between the sample rod and the mounting member or the bellows during movement, and improving the insulation performance of the plasma linear device sample stage.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma linear devices, and particularly to a sample stage of a plasma linear device and a plasma linear device. Background Art

[0002] A plasma linear device is an important device for studying the first wall materials of nuclear fusion. Samples of different materials are placed on its sample stage and face the plasma in the vacuum chamber to receive high-energy irradiation. The irradiation temperature is very high, and most of the heat needs to be removed by a cooling system. With the in-depth research, the plasma density is getting higher and higher, the energy received by the samples is getting higher and higher, and the requirements for the insulation and sealing performance of the sample stage are also getting higher and higher. In addition, after the sample stage is installed on the plasma linear device, the sample stage faces the plasma source in the vacuum chamber. During the test, the sample stage and the plasma source need to be coaxial. To compensate for the machining and installation errors of the sample stage and also to be able to test the experimental data under different conditions such as different distances between the plasma source and the sample, the sample stage needs to be adjusted in the front-back, left-right, and up-down directions to ensure the reliability of the measurement data. Summary of the Invention

[0003] The object of the present invention is to provide a sample stage of a plasma linear device and a plasma linear device, which can ensure the insulation and sealing performance between the sample stage and the vacuum chamber, and at the same time the sample stage is adjustable, which can improve the reliability of the measurement data.

[0004] To achieve the above object, the present invention provides a sample stage of a plasma linear device, including:

[0005] A sample rod, a sample seat for placing a sample is provided at the first end of the sample rod;

[0006] A mounting member for connecting with the main body of the plasma linear device. The mounting member is provided with a mounting hole communicating with the vacuum chamber in the main body. The sample rod passes through the mounting hole, and the diameter of the mounting hole is larger than the outer diameter of the sample rod;

[0007] An insulation assembly, the insulation assembly is fixedly connected to the second end of the sample rod;

[0008] A bellows, sleeved on the sample rod. The inner diameter of the bellows is larger than the outer diameter of the sample rod. One end of the bellows is hermetically connected to the insulation assembly, the other end is hermetically connected to the mounting member, and the bellows communicates with the mounting hole;

[0009] An adjustment assembly, the adjustment assembly is connected to the insulation assembly to adjust the position of the sample rod.

[0010] According to one embodiment of the present invention, the second end of the sample rod is provided with a connecting portion.

[0011] The insulation assembly comprises:

[0012] A connecting flange, the connecting flange is connected to the bellows and blocks one end of the bellows, and a first through hole is provided on the connecting flange;

[0013] An insulating tube, wherein the insulating tube is sleeved on the sample rod, one end of the insulating tube is connected to the connecting flange, the first through hole and the insulating tube jointly define a connecting channel, the sample rod is passed through the connecting channel, the diameter of the connecting channel is larger than the outer diameter of the sample rod, and the other end of the insulating tube is connected to the connecting portion.

[0014] According to one embodiment of the present invention, the plasma linear device sample stage also includes a support member, which is sleeved on the sample rod and in contact with the sample rod. The support member is located on a side of the connecting flange away from the insulating tube and is connected to the connecting flange. The support member is made of polytetrafluoroethylene material.

[0015] According to one embodiment of the present invention, the connecting flange includes a flange body and at least one measuring tube, the flange body is connected to the bellows, the first through hole is provided on the flange body, the flange body is connected to the insulating tube on one side facing the bellows, the measuring tube is connected to the flange body, and the measuring tube is communicated with the bellows.

[0016] According to one embodiment of the present invention, the sample rod includes a rod body, a sample holder and a fixing member, the sample holder is connected to one end of the rod body, the fixing member is connected to the sample holder, the sample clamp is arranged between the fixing member and the sample holder, and the other end of the rod body is connected to the insulating component.

[0017] According to one embodiment of the present invention, the fixing piece is annular, a groove is provided on the side of the sample holder away from the rod body, the fixing piece is sleeved on the sample holder, a sample space is formed between the fixing piece and the groove, the sample is located in the sample space, and a jet hole is provided on the fixing piece, and the jet hole connects the sample space and the external space.

[0018] According to an embodiment of the present invention, a thermocouple groove is provided at the bottom of the sample holder, the thermocouple groove extends from the center of the bottom of the sample holder to the outer peripheral wall of the sample rod, and the thermocouple groove is used to accommodate a thermocouple.

[0019] According to an embodiment of the present invention, the sample stage of the plasma linear device further includes a water inlet pipe and a water outlet pipe. A cooling cavity is provided in the sample rod, and both the water inlet pipe and the water outlet pipe are communicated with the cooling cavity.

[0020] According to an embodiment of the present invention, the cooling cavity extends from the second end to the first end. The end of the water outlet pipe is located at the second end, and the water inlet pipe extends from the second end to the first end. The inner wall of the cooling cavity adjacent to the sample seat is the bottom wall of the cooling cavity. The distance between the water inlet pipe and the bottom wall is L, and 8mm ≤ L ≤ 12mm.

[0021] The present invention also provides a plasma linear device, including:

[0022] A main body, a vacuum chamber is provided in the main body, and an installation port communicated with the vacuum chamber is provided on the main body;

[0023] The sample stage of the plasma linear device as described above, the installation member is hermetically connected to the main body and seals the installation port, and the installation hole is communicated with the installation port.

[0024] In a sample stage of a plasma linear device according to an embodiment of the present invention, an installation member is connected to a corrugated pipe. A sample rod passes through the installation hole of the installation member and the corrugated pipe, and the diameter of the installation hole and the inner diameter of the corrugated pipe are both larger than the outer diameter of the sample rod. And the second end of the sample rod is fixed by an insulating assembly, and the insulating assembly is connected to an adjusting assembly and the corrugated pipe. In this way, the insulating assembly insulates between the sample rod and the corrugated pipe, and between the sample rod and the adjusting assembly. The settings of the corrugated pipe and the installation member avoid the contact between the sample rod and the installation member or the corrugated pipe during the movement process, improve the insulation performance of the sample stage of the plasma linear device, and improve the reliability of measurement data. In addition, when adjusting the position of the sample rod, the corrugated pipe can expand and contract with the movement of the sample rod to ensure the sealing performance of the sample stage of the plasma linear device. Description of the Drawings

[0025] Figure 1 is a perspective view of the sample stage of the plasma linear device provided by an embodiment of the present invention.

[0026] Figure 2 is a cross-sectional view of the sample stage of the plasma linear device provided by an embodiment of the present invention.

[0027] Figure 3 is Figure 2 a partial enlarged view of part A in

[0028] Figure 4 is an assembly drawing of the sample rod and the insulating assembly provided by an embodiment of the present invention.

[0029] Figure 5It is the second assembly drawing of the sample rod and the insulation component provided by the embodiment of the present invention.

[0030] Figure 6 It is a cross-sectional view of the sample rod and the insulation component connected provided by the embodiment of the present invention.

[0031] Figure 7 It is one of the structural schematic diagrams of the connecting flange provided by the embodiment of the present invention.

[0032] Figure 8 It is the second structural schematic diagram of the connecting flange provided by the embodiment of the present invention.

[0033] Figure 9 It is the structural schematic diagram of the insulating tube provided by the embodiment of the present invention.

[0034] Reference numerals:

[0035] 110. Sample rod; 1101. First end; 1102. Second end; 111. Rod body; 112. Sample seat; 1121. Groove; 1122. Thermocouple groove; 113. Connecting part; 114. Fixing part; 1141. Jet hole; 115. Cooling cavity; 116. Bottom wall;

[0036] 120. Insulation component; 121. Connecting flange; 1211. Flange body; 1212. First through hole; 1213. Measuring tube; 122. Insulating tube; 1221. Tube body; 1222. First flange; 1223. Second flange; 123. Connecting channel;

[0037] 130. Mounting part; 131. Mounting hole; 140. Bellows; 141. Reinforcing rod;

[0038] 150. Support part; 160. Water inlet pipe; 161. Water outlet pipe;

[0039] 170. Adjusting component; 171. Fixed seat; 172. Support seat; 173. Sliding platform; 174. Base; 175. Support frame;

[0040] X. First direction; Y. Second direction; Z. Third direction. Detailed implementation manners

[0041] The following combines the drawings and embodiments to further describe in detail the specific implementation manners of the present invention. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0042] In the description of the embodiments of the present invention, the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the embodiments of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0043] In the description of the embodiments of the present invention, unless otherwise clearly defined and limited, the terms "connected" and "coupled" shall be understood in a broad sense. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific situations.

[0044] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0045] As Figure 1 And Figure 2 As shown, a sample stage of a plasma linear device according to an embodiment of the present invention includes a sample rod 110, an insulating assembly 120, a mounting member 130, a bellows 140, and an adjusting assembly 170.

[0046] Specifically, a sample holder 112 for placing a sample is provided at the first end 1101 of the sample rod 110. The mounting member 130 is used to connect with the main body of the linear plasma device. The mounting member 130 is provided with a mounting hole 131 communicating with the vacuum chamber inside the main body. The sample rod 110 passes through the mounting hole 131, and the diameter of the mounting hole 131 is larger than the outer diameter of the sample rod 110. The insulating assembly 120 is fixedly connected to the second end 1102 of the sample rod 110. The bellows 140 is sleeved on the sample rod 110. The inner diameter of the bellows 140 is larger than the outer diameter of the sample rod 110. One end of the bellows 140 is hermetically connected to the insulating assembly 120, and the insulating assembly 120 seals one end of the bellows 140; the other end of the bellows 140 is hermetically connected to the mounting member 130, and the inner space of the bellows 140 communicates with the mounting hole 131. The adjusting assembly 170 is connected to the insulating assembly 120 to adjust the position of the sample rod 110.

[0047] The sample holder 112 is provided at the first end 1101 of the sample rod 110 to fix the sample. As Figure 1 shown, the sample holder 112 is located on the end face of the first end 1101, and the axis of the sample rod 110 passes through the sample holder 112. The sample rod 110 passes through the mounting hole 131 on the mounting member 130. The first end 1101 of the sample rod 110 is located inside the vacuum chamber, and the sample holder 112 is located inside the vacuum chamber. During operation, the sample is placed on the sample holder 112 and located inside the vacuum chamber to receive high-energy irradiation. The second end 1102 of the sample rod 110 is connected to the bellows 140 through the insulating assembly 120. On the one hand, it fixes and supports the sample rod 110, and on the other hand, it insulates the sample rod 110 from the bellows 140. The adjusting assembly 170 is connected to the insulating assembly 120. The adjusting assembly 170 can drive the sample rod 110 to move through the insulating assembly 120 and adjust the position of the sample rod 110 to conduct experiments or compensate for errors in the processing and installation processes. In some embodiments, the adjusting assembly 170 can at least drive the insulating assembly 120 to move in the first direction X, the second direction Y, and the third direction Z, where the axis of the sample rod 110 is parallel to the first direction X, and the first direction X, the second direction Y, and the third direction Z are perpendicular to each other in pairs.

[0048] Both ends of the bellows 140 are respectively connected to the mounting member 130 and the insulating assembly 120. The bellows 140 communicates with the mounting hole 131. Thus, when adjusting the position of the sample rod 110, the bellows 140 can expand and contract with the movement of the sample rod 110 to ensure the sealing performance of the sample stage of the linear plasma device. In some embodiments, flanges are provided at both ends of the bellows 140 for connecting with the mounting member 130 or the insulating assembly 120. As Figure 2As shown, a reinforcing rod 141 is detachably connected between the flanges at both ends of the corrugated pipe 140. The reinforcing rod 141 is a threaded rod member and can fix the length of the corrugated pipe 140. The inner diameter of the corrugated pipe 140 and the diameter of the mounting hole 131 are both larger than the outer diameter of the sample rod 110, so that the sample rod 110 has a large moving range, avoiding the insulation failure caused by the contact between the sample rod 110 and the mounting member 130 during the movement. It can be understood that in order to ensure the irradiation effect on the sample, the sample rod 110 usually has a set installation position. In some embodiments, with the axis of the sample rod 110 at the set installation position as the central axis, the movable range of the sample rod 110 is cylindrical, the diameter of the cylinder is D, the diameter of the sample rod 110 is d, and the inner diameter of the corrugated pipe 140 and the diameter of the mounting hole 131 are both larger than D + 2d.

[0049] According to the sample stage of the plasma linear device of the embodiment of the present invention, the mounting member 130 is connected to the corrugated pipe 140, the sample rod 110 passes through the mounting hole 131 of the mounting member 130 and the corrugated pipe 140, and the diameter of the mounting hole 131 and the inner diameter of the corrugated pipe 140 are both larger than the outer diameter of the sample rod 110. And the second end 1102 of the sample rod 110 is fixed by the insulating component 120, and the insulating component 120 is connected to the adjusting component 170 and the corrugated pipe 140. In this way, the insulating component 120 insulates between the sample rod 110 and the corrugated pipe 140, and between the sample rod 110 and the adjusting component 170. The settings of the corrugated pipe 140 and the mounting member 130 avoid the contact between the sample rod 110 and the mounting member 130 or the corrugated pipe 140 during the movement, improve the insulation performance of the sample stage of the plasma linear device, and improve the reliability of the measurement data and the operation safety. In addition, when adjusting the position of the sample rod 110, the corrugated pipe 140 can expand and contract with the movement of the sample rod 110 to ensure the sealing performance of the sample stage of the plasma linear device.

[0050] As Figure 3 And Figure 4 As shown, according to some embodiments of the present invention, the insulating component 120 includes a connecting flange 121 and an insulating tube 122. The connecting flange 121 is connected to the corrugated pipe 140 and plugs one end of the corrugated pipe 140. The connecting flange 121 and the corrugated pipe 140 can be connected by fasteners such as bolts. The insulating tube 122 is sleeved on the sample rod 110. A connecting portion 113 is provided at the second end 1102 of the sample rod 110. One end of the insulating tube 122 is connected to the connecting flange 121, and the insulating tube 122 and the connecting flange 121 can be connected and sealed through a gasket and fasteners; the other end is connected to the connecting portion 113. The insulating tube 122 is made of an insulating material. For example, the insulating tube 122 can be made of a ceramic material, and the insulating tube 122 can insulate the sample rod 110 from the connecting flange 121. In Figure 3In the example, the insulating tube 122 is located in the bellows 140. The connecting flange 121 is provided with a first through hole 1212, and the first through hole 1212 and the insulating tube 122 jointly define a connecting channel 123. The sample rod 110 is passed through the connecting channel 123. The diameter of the connecting channel 123 is greater than the outer diameter of the sample rod 110, and the peripheral wall of the sample rod 110 does not contact the inner wall of the connecting channel 123. The connecting portion 113 is connected to the insulating tube 122, the insulating tube 122 is connected to the connecting flange 121, and the connecting flange 121 is connected to the bellows 140, so as to fix the sample rod 110, isolate the sample rod 110 from the connecting flange 121 and the bellows 140, and ensure the insulation performance of the sample rod 110.

[0051] like Figure 3 and Figure 9 As shown, in some embodiments, the connecting portion 113 is a disc-shaped structure arranged on the outer peripheral wall of the sample rod 110, and the insulating tube 122 includes a first flange 1222, a tube body 1221 and a second flange 1223 connected in sequence. The first flange 1222 can be connected to the connecting flange 121 by screws, and the second flange 1223 is connected to the connecting portion 113 by screws.

[0052] like Figure 3 and Figure 6 As shown, according to some embodiments of the present invention, the plasma linear device sample stage further includes a support member 150, which is sleeved on the sample rod 110 and in contact with the sample rod 110. The support member 150 is located on the side of the connecting flange 121 away from the insulating tube 122 and connected to the connecting flange 121. The support member 150 is made of polytetrafluoroethylene material to separate the sample rod 110 and the connecting flange 121 to play an insulating role. Specifically, the support member 150 is annular, and a second through hole is provided on the support member 150. The sample rod 110 is inserted into the second through hole. The inner wall of the second through hole is in contact with the peripheral wall of the sample rod 110 to block the gap between the sample rod 110 and the first through hole 1212. On the side of the connecting flange 121 facing the bellows 140 , the sample rod 110 is fixed and supported by the connecting portion 113 connected to the insulating tube 122 . On the side of the connecting flange 121 facing away from the bellows 140 , the sample rod 110 is supported by the supporting member 150 to improve the stability of the sample rod 110 .

[0053] like Figure 6 and Figure 7As shown, according to some embodiments of the present application, the connecting flange 121 includes a flange body 1211 and at least one measuring tube 1213, the flange body 1211 is connected to the bellows 140 and blocks one end of the bellows 140, the first through hole 1212 is provided on the flange body 1211, and the side of the flange body 1211 facing the bellows 140 is connected to the insulating tube 122. The measuring tube 1213 is connected to the flange body 1211, and the measuring tube 1213 is in communication with the bellows 140, and the measuring plug-in and the diagnostic plug-in can be inserted through the measuring tube 1213 to detect parameters such as the temperature inside the sample stage of the plasma linear device, or to detect the sample. In some embodiments, the measuring tube 1213 is located on the side of the flange body 1211 away from the bellows 140, and the end of the measuring tube 1213 is provided with a flange for connecting with the measuring plug-in and the diagnostic plug-in.

[0054] like Figure 6 As shown, according to some embodiments of the present invention, the sample rod 110 includes a rod body 111, a sample holder 112 and a fixing member 114. The sample holder 112 is connected to one end of the rod body 111. The sample holder 112 and the rod body 111 can be welded, such as brazed, to improve the stability of the connection between the sample holder 112 and the rod body 111, and the heat transfer performance between the sample holder 112 and the rod body 111 is good to avoid the sample holder 112 from being overheated. The sample holder 112 can be made of oxygen-free copper, and the rod body 111 can be made of stainless steel. The fixing member 114 is connected to the sample holder 112, and the sample clamp is arranged between the fixing member 114 and the sample holder 112. The other end of the rod body 111 is connected to the insulating component 120, and the connecting portion 113 is arranged on the outer wall of the other end of the rod body 111.

[0055] According to some embodiments of the present invention, the fixing member 114 is annular, a groove 1121 is provided on the side of the sample holder 112 away from the rod body 111, the fixing member 114 is sleeved on the sample holder 112, a sample space is formed between the fixing member 114 and the groove 1121, and the sample is located in the sample space. Specifically, part of the sample is located in the sample space, and the other part is clamped between the fixing member 114 and the sample holder 112. A jet hole 1141 is provided on the fixing member 114, and the jet hole 1141 connects the sample space and the external space, and the sample receives high-energy radiation through the jet hole 1141. In some embodiments, the fixing member 114 can be processed into a nut, and the outer peripheral wall of the sample holder 112 is provided with a threaded surface, and the threaded surface is used to connect with the fixing member 114, so as to facilitate the installation and fixing of the sample. The fixing member 114 can be made of a high-temperature resistant material, such as molybdenum.

[0056] According to some embodiments of the present invention, a thermocouple groove 1122 is provided at the bottom of the sample holder 112. The thermocouple groove 1122 extends from the center of the bottom of the sample holder 112 to the outer peripheral wall of the sample rod 110. The thermocouple groove 1122 is used to accommodate a thermocouple, and the thermocouple is used to detect the temperature of the sample holder 112.

[0057] According to some embodiments of the present invention, the plasma linear device sample stage further includes a water inlet pipe 160 and a water outlet pipe 161. A cooling cavity 115 is provided inside the sample rod 110. Both the water inlet pipe 160 and the water outlet pipe 161 are communicated with the cooling cavity 115. The coolant is injected into the cooling cavity 115 through the water inlet pipe 160 to cool the sample rod 110, and finally the coolant is output through the water outlet pipe 161.

[0058] As Figure 6 shown, according to some embodiments of the present invention, the cooling cavity 115 extends from the second end 1102 of the sample rod 110 to the first end 1101 to increase the flow path length of the water flow, increase the contact area between the coolant and the sample rod 110, and improve the cooling speed. The end of the water outlet pipe 161 is located at the second end 1102. The water inlet pipe 160 extends into the cooling cavity 115, and the water inlet pipe 160 extends from the second end 1102 of the sample rod 110 to the first end 1101, increasing the distance between the end of the water inlet pipe 160 and the end of the water outlet pipe 161, so that the coolant can fully contact the inner wall of the cooling cavity 115 and improve the cooling effect. The distance between the water inlet pipe 160 and the bottom wall 116 of the cooling cavity 115 is L, and 8mm ≤ L ≤ 12mm, so that the water column output by the water inlet pipe 160 can directly hit the bottom wall 116 of the cooling cavity 115, accelerating the heat conduction of the sample holder 112. For example, L can be 8mm, 9mm, 10mm, 12mm, etc. Among them, the bottom wall 116 of the cooling cavity 115 is the inner wall on the side adjacent to the sample holder 112. For example, as Figure 6 shown, the sample holder 112 is brazed to one end of the rod body 111. The inside of the rod body 111 is a hollow structure. One side of the sample holder 112 and the inner wall of the rod body 111 jointly define the cooling cavity 115. The distance between the end of the water inlet pipe 160 and the sample holder 112 can be 10mm. It should be noted that only some examples are provided here. The distance between the end of the water inlet pipe 160 and the sample holder 112 is not limited to this, as long as the water flow can impact the bottom wall 116 of the cooling cavity 115 to improve the heat exchange speed and does not affect the water flow.

[0059] As Figure 1 With Figure 2As shown, according to some embodiments of the present invention, the adjustment assembly 170 includes a fixed seat 171, a support seat 172, a sliding platform 173, and a base 174. The sliding platform 173 is movably connected to the base 174, and the sliding platform 173 can move relative to the base 174 in the first direction X, the second direction Y, and the third direction Z. The base 174 can be fixed to the ground or fixed to the support frame 175. In some embodiments, the adjustment assembly 170 further includes a first sliding assembly, a second sliding assembly, and a third sliding assembly provided between the base 174 and the sliding platform 173. The first sliding assembly can be a screw structure or a pneumatic push rod structure, and the first sliding assembly is used to drive the sliding platform 173 to move along the first direction X; the second sliding assembly can be a screw structure or a pneumatic push rod structure, and the second sliding assembly is used to drive the sliding platform 173 to move along the second direction Y; the third sliding assembly can be a screw structure or a pneumatic push rod structure, and the third sliding assembly is used to drive the sliding platform 173 to move along the third direction Z.

[0060] Both the fixed seat 171 and the support seat are fixedly connected to the sliding platform 173. The fixed seat 171 is connected to the bellows 140, and the support seat 172 is connected to the insulation assembly 120. For example, both the fixed seat 171 and the support seat 172 are in a block shape, and both the fixed seat 171 and the support seat 172 are formed with arc-shaped grooves. The bellows 140 is located in the arc-shaped groove of the fixed seat 171 and is connected to the fixed seat 171 through fasteners. The connecting flange 121 of the insulation assembly is located in the arc-shaped groove of the support seat 172 and is connected to the support seat 172 through fasteners.

[0061] According to a plasma linear device of an embodiment of the present invention, it includes a main body and a plasma linear device sample stage as described above. A vacuum chamber is provided in the main body, and an installation port communicating with the vacuum chamber is provided on the main body; the installation member 130 is hermetically connected to the main body and seals the installation port, and the installation hole 131 communicates with the installation port. Specifically, the installation member 130 is connected to the main body through fasteners, and the installation member 130 and the main body are sealed through a sealing gasket. The installation hole 131 on the installation member 130 communicates with the installation port on the main body, so that the installation hole 131 communicates with the vacuum chamber. The sample rod 110 passes through the installation hole 131 and the installation port, and the sample seat 112 on the sample rod 110 is located in the vacuum chamber. A plasma source is provided in the vacuum chamber, and the plasma source, the sample seat 112, and the axis of the sample rod 110 are on the same straight line.

[0062] In summary, the embodiment of the present invention provides a plasma linear device sample stage, which has at least the following advantages:

[0063] 1. The insulating component 120 insulates the sample rod 110 from the bellows 140 and the sample rod 110 from the adjusting component 170. The settings of the bellows 140 and the mounting member 130 prevent the sample rod 110 from contacting the mounting member 130 or the bellows 140 during movement, improving the insulation performance of the sample stage of the plasma linear device.

[0064] 2. When adjusting the position of the sample rod 110, the bellows 140 can expand and contract with the movement of the sample rod 110 to ensure the sealing performance of the sample stage of the plasma linear device.

[0065] 3. By arranging the water inlet pipe 160 close to the bottom wall of the cooling cavity 115 and the water outlet pipe 161 away from the bottom wall of the cooling cavity 115, the heat dissipation speed of the sample holder 112 is improved.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the present invention, rather than limiting the present invention. It should be pointed out that for those of ordinary skill in the art of this technology, without departing from the technical principle of the present invention, several improvements and replacements can still be made, and these improvements and replacements should also be regarded as the protection scope of the present invention.

Claims

1. A plasma linear device sample stage, characterized in that: include: A sample rod (110), wherein a first end (1101) of the sample rod (110) is provided with a sample seat (112) for placing a sample; A mounting member (130) used for connecting to a main body of the plasma linear device, the mounting member (130) being provided with a mounting hole (131) communicating with a vacuum chamber in the main body, the sample rod (110) passing through the mounting hole (131), and the diameter of the mounting hole (131) being larger than the outer diameter of the sample rod (110); An insulating component (120), the insulating component (120) being fixedly connected to the second end (1102) of the sample rod (110); a bellows (140) sleeved on the sample rod (110), the inner diameter of the bellows (140) being greater than the outer diameter of the sample rod (110), one end of the bellows (140) being sealedly connected to the insulating component (120), and the other end of the bellows (140) being sealedly connected to the mounting member (130), and the bellows (140) being in communication with the mounting hole (131); an adjusting component (170), the adjusting component (170) being connected to the insulating component (120) to adjust the position of the sample rod (110); The second end (1102) of the sample rod (110) is provided with a connecting portion (113). The insulating component (120) comprises: a connecting flange (121), the connecting flange (121) being connected to the bellows (140) and sealing one end of the bellows (140), the connecting flange (121) being provided with a first through hole (1212); An insulating tube (122), the insulating tube (122) being sleeved on the sample rod (110), one end of the insulating tube (122) being connected to the connecting flange (121), the first through hole (1212) and the insulating tube (122) jointly defining a connecting channel (123), the sample rod (110) being passed through the connecting channel (123), the diameter of the connecting channel (123) being greater than the outer diameter of the sample rod (110), and the other end of the insulating tube (122) being connected to the connecting portion (113).

2. The plasma linear device sample stage according to claim 1, characterized in that: The plasma linear device sample stage further comprises a support member (150), the support member (150) being sleeved on the sample rod (110) and in contact with the sample rod (110), the support member (150) being located on a side of the connecting flange (121) away from the insulating tube (122) and being connected to the connecting flange (121), and the support member (150) being made of polytetrafluoroethylene material.

3. The plasma linear device sample stage according to claim 1, characterized in that: The connecting flange (121) comprises a flange body (1211) and at least one measuring tube (1213); the flange body (1211) is connected to the bellows (140); the first through hole (1212) is provided on the flange body (1211); the side of the flange body (1211) facing the bellows (140) is connected to the insulating tube (122); the measuring tube (1213) is connected to the flange body (1211), and the measuring tube (1213) is in communication with the bellows (140).

4. The plasma linear device sample stage according to claim 1, characterized in that: The sample rod (110) comprises a rod body (111), a sample holder (112) and a fixing member (114); the sample holder (112) is connected to one end of the rod body (111); the fixing member (114) is connected to the sample holder (112); the sample clamp is arranged between the fixing member (114) and the sample holder (112); and the other end of the rod body (111) is connected to the insulating component (120).

5. The plasma linear device sample stage according to claim 4, characterized in that: The fixing member (114) is annular in shape, and a groove (1121) is provided on a side of the sample holder (112) facing away from the rod body (111). The fixing member (114) is sleeved on the sample holder (112), and a sample space is formed between the fixing member (114) and the groove (1121). The sample is located in the sample space. The fixing member (114) is provided with a jet hole (1141), and the jet hole (1141) connects the sample space with an external space.

6. The plasma linear device sample stage according to claim 4, characterized in that: A thermocouple groove (1122) is provided at the bottom of the sample holder (112), and the thermocouple groove (1122) extends from the center of the bottom of the sample holder (112) to the outer peripheral wall of the sample rod (110), and the thermocouple groove (1122) is used to accommodate a thermocouple.

7. The plasma linear device sample stage according to claim 1, characterized in that: The plasma linear device sample stage further comprises a water inlet pipe (160) and a water outlet pipe (161); a cooling cavity (115) is provided in the sample rod (110); and both the water inlet pipe (160) and the water outlet pipe (161) are in communication with the cooling cavity (115).

8. The plasma linear device sample stage according to claim 7, characterized in that: The cooling cavity (115) extends from the second end (1102) to the first end (1101), the end of the water outlet pipe (161) is located at the second end (1102), the water inlet pipe (160) extends from the second end (1102) to the first end (1101), an inner wall of the cooling cavity (115) adjacent to the sample holder (112) is the bottom wall of the cooling cavity (115), and a distance between the water inlet pipe (160) and the bottom wall is L, 8 mm ≤ L ≤ 12 mm.

9. A plasma linear device, characterized in that: include: A main body, wherein a vacuum chamber is provided in the main body, and a mounting port communicating with the vacuum chamber is provided on the main body; The plasma linear device sample stage according to any one of claims 1 to 8, wherein the mounting member (130) is sealedly connected to the main body and blocks the mounting port, and the mounting hole (131) is connected to the mounting port.

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