Flow detection method, fluid pump and groove type semiconductor cleaning equipment

Abstract

The invention discloses a flow detection method, a fluid pump and groove type semiconductor cleaning equipment, the flow detection method is applied to the fluid pump, and the fluid pump comprises a pump shell, two variable-volume cavities and a valve device, and the two variable-volume cavities and the valve device are arranged in the pump shell; the pump shell is provided with an outlet and an inlet. The two variable volume chambers are communicated with the outlet and the inlet through valve devices; the volumes of the two variable-volume cavities are alternately changed, the volume of one variable-volume cavity is increased so that fluid enters through the inlet, and the volume of the other variable-volume cavity is decreased so that the fluid contained in the variable-volume cavity can be discharged through the outlet; the flow detection method comprises the following steps: detecting the duration of the two variable-volume chambers experiencing one-time volume change; and calculating the flow of the fluid according to the volume of the variable-volume chamber filled with the fluid and the duration of one-time volume change. According to the scheme, the problem that the ultrasonic flowmeter cannot detect the flow due to the fact that more bubbles are generated in the preparation process of the cleaning liquid of the semiconductor cleaning process in the background technology can be solved.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor process equipment, and specifically relates to a flow detection method, a fluid pump and a tank-type semiconductor cleaning equipment. Background Art

[0002] Trough-type semiconductor cleaning equipment is a relatively important type of cleaning equipment in the semiconductor field. In the specific cleaning process, the robot immerses the silicon wafer in the cleaning tank of the trough-type semiconductor cleaning equipment. The cleaning liquid in the cleaning tank is driven by a fluid pump to circulate, thereby achieving cleaning according to a certain flow field. During the cleaning process, the cleaning liquid completes high-quality cleaning of chemicals, particles, metals and other impurities remaining on the surface of the silicon wafer through chemical reactions under specific conditions. Among them, the circulation flow rate of the cleaning liquid during the circulation process is an important parameter for detecting whether the cleaning liquid reacts with the impurities on the surface of the silicon wafer according to a specific flow field, so the accuracy of the circulation flow rate detection of the cleaning liquid is crucial to the trough-type semiconductor cleaning equipment.

[0003] In the related art, the tank-type semiconductor cleaning equipment is equipped with an ultrasonic flowmeter. Different cleaning processes require different types of cleaning fluids. For some cleaning fluids that will produce bubbles during the mixing process, since the cleaning fluid contains bubbles, it will affect the detection of the ultrasonic flowmeter. In the specific detection process, the ultrasonic waves emitted by the ultrasonic flowmeter will be interfered by the bubbles in the cleaning fluid, resulting in the inability to detect the flow rate, which seriously restricts the application scope of the tank-type semiconductor cleaning equipment. Taking the cleaning fluid as a mixture of sulfuric acid and hydrogen peroxide as an example, the cleaning process is a high-temperature process, and hydrogen peroxide is unstable. In the process of injecting hydrogen peroxide into sulfuric acid or replenishing hydrogen peroxide, hydrogen peroxide is easily decomposed to produce gas, which will cause a large number of bubbles to be generated in the mixed liquid, which makes the ultrasonic flowmeter unable to detect the flow rate. Summary of the invention

[0004] The present application discloses a flow detection method, a fluid pump and a tank-type semiconductor cleaning device to solve the problem described in the background technology that a large number of bubbles are generated during the cleaning liquid configuration process during the semiconductor process, resulting in an ultrasonic flow meter being unable to detect the flow.

[0005] In order to solve the above technical problems, this application provides the following technical solutions: In a first aspect, an embodiment of the present invention discloses a flow detection method, which is applied to a fluid pump, wherein the fluid pump comprises a pump housing, two variable volume chambers and a valve device arranged in the pump housing; the pump housing has an outlet and an inlet; the two variable volume chambers are connected to the outlet and the inlet through the valve device; the two variable volume chambers alternately change their volumes, wherein the volume of one chamber increases so that the fluid enters through the inlet, while the volume of the other chamber decreases so that the fluid contained therein is discharged through the outlet; the flow detection method comprises: detecting the duration of a volume change of the two variable volume chambers; The flow rate of the fluid is calculated based on the volume of the variable volume chamber when it is filled with the fluid and the time duration for the variable volume chamber to undergo a volume change.

[0006] In a second aspect, an embodiment of the present invention discloses a fluid pump, which includes a pump housing and two variable volume chambers and a valve device arranged in the pump housing; the pump housing has an outlet and an inlet; the two variable volume chambers are respectively connected to the outlet and the inlet through the valve device; the two variable volume chambers alternately change their volumes, one of which becomes larger in volume to allow fluid to enter through the inlet while the other becomes smaller in volume to discharge the fluid it contains through the outlet, and the fluid pump includes a processor, which is used to execute the flow detection method described in the first aspect above.

[0007] In the third aspect, an embodiment of the present invention discloses a trough-type semiconductor cleaning equipment, which includes a cleaning trough, a cleaning liquid circulation pipeline and the fluid pump described in the second aspect, wherein the cleaning liquid circulation pipeline includes a first pipe section and a second pipe section, wherein the first end of the first pipe section is connected to the top of the cleaning trough for receiving the cleaning liquid discharged from the cleaning trough, the second end of the first pipe section is connected to the inlet, the first end of the second pipe section is connected to the outlet, and the second end of the second pipe section is connected to the bottom of the cleaning trough for transporting the cleaning liquid into the cleaning trough.

[0008] The flow detection method disclosed in the embodiment of the present invention makes full use of the structure of the fluid pump and the principle of pumping fluid, and realizes the detection of the flow rate of the fluid by combining the known constant value of the volume of the variable volume chamber when it is filled with fluid with the detected time length of the two variable volume chambers undergoing a volume change. When this flow detection method is used to detect the flow rate of the cleaning liquid in the semiconductor cleaning process, the flow rate will not be unable to be detected due to the influence of bubbles generated during the configuration of the cleaning liquid in the semiconductor cleaning process. It can be seen that the flow detection method disclosed in the embodiment of the present invention can solve the problem described in the background technology that a large number of bubbles are generated during the configuration of the semiconductor cleaning liquid, resulting in the inability of the ultrasonic flowmeter to detect the flow rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 and Figure 2 They are schematic diagrams of the structure of a part of the fluid pump disclosed in the embodiments of the present invention in different states; Figure 1 The thick black arrow in the figure indicates that the fluid is discharged from the fluid pump; Figure 1 The thick white arrow in the figure indicates that the fluid enters the fluid pump; Figure 2 The thick black arrow in the figure indicates that the fluid flows into the fluid pump. Figure 2 The thick white arrow in the figure indicates that the fluid is discharged from the fluid pump; Figure 1 and Figure 2 The thin black arrows in the figure indicate the direction of gas flow in the drive mechanism.

[0010] Figure 3 is a schematic flow chart of a fluid detection method disclosed in an embodiment of the present invention; Figure 4 is a schematic structural diagram of a fluid pump disclosed in an embodiment of the present invention; Figure 5 It is a schematic diagram of the structure of a trough-type semiconductor cleaning device disclosed in an embodiment of the present invention.

[0011] Description of reference numerals: 100-fluid pump, 110-pump housing, 111-outlet, 112-inlet, 113-first inner cavity, 114-second inner cavity, 115-first gas path interface, 116-second gas path interface, 120-variable volume chamber, 130-valve device, 131-first one-way valve, 132-second one-way valve, 133-third one-way valve, 134-fourth one-way valve, 140-in-place sensor, 150-driving mechanism, 151-first gas path, 152-second gas path, 153-switching valve, 200-cleaning tank, 300-circulation pipeline, 310-first pipe section, 320-second pipe section, 400-Liquid presence detection sensor, 500 - Heater. DETAILED DESCRIPTION

[0012] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in combination with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0013] The technical solutions disclosed in various embodiments of the present application are described in detail below in conjunction with the accompanying drawings.

[0014] Please refer to Figures 1 to 5 The embodiment of the present invention discloses a flow rate detection method, which is applied to a fluid pump 100. The fluid pump 100 may be a liquid pump or a gas pump, and the embodiment of the present invention does not limit the specific type of the fluid pump 100.

[0015] The fluid pump 100 according to the embodiment of the present invention may include a pump housing 110 , a variable volume chamber 120 and a valve device 130 .

[0016] The pump housing 110 is a peripheral component of the fluid pump 100. The pump housing 110 is not only used to provide a foundation for direct or indirect installation of other components of the fluid pump 100, but also used to form some functional spaces. In the embodiment of the present invention, the pump housing 110 has an outlet 111 and an inlet 112. During the process of the fluid pump 100 pumping the fluid, the fluid will enter the fluid pump 100 from the inlet 112, and the fluid will eventually be discharged from the fluid pump 100 from the outlet 111. In order to facilitate the connection of the pipeline for conveying the fluid, the outlet 111 and the inlet 112 can be respectively opened at two opposite ends of the pump housing 110.

[0017] The variable volume chamber 120 is a flexible structure or an elastic structure, so that its volume can be changed. In the process of the fluid pump 100 conveying the fluid, the variable volume chamber 120 is used for temporary storage of the fluid. The fluid entering the fluid pump 100 from the inlet 112 will enter the variable volume chamber 120, and then be discharged from the variable volume chamber 120 to the outlet 111. In the embodiment of the present invention, there are two variable volume chambers 120, and the two variable volume chambers 120 are arranged in the pump housing 110.

[0018] The valve device 130 is disposed in the pump housing 110, and the valve device 130 is used to control the flow of the fluid between the inlet 112 and the variable volume chamber 120 and between the variable volume chamber 120 and the outlet 111. The two variable volume chambers 120 are both connected to the outlet 111 and the inlet 112 through the valve device 130. In the embodiment of the present invention, under the action of the valve device 130, the two variable volume chambers 120 alternately change their volumes, and the volume of one of them becomes larger so that the fluid enters through the inlet 112, while the volume of the other becomes smaller so that the fluid contained therein is discharged through the outlet 111.

[0019] The working process of the fluid pump 100 involved in the embodiment of the present invention for pumping fluid is as follows: the valve device 130 controls the inlet 112 to be alternately connected to the two variable volume chambers 120, and also controls the outlet 111 to be alternately connected to the two variable volume chambers 120, so that the two variable volume chambers 120 are not simultaneously connected to the inlet 112, nor are they simultaneously connected to the outlet 111, so that the fluid entering the fluid pump 100 from the inlet 112 will eventually enter one of the variable volume chambers 120 whose volume has increased, while the other variable volume chamber 120 whose volume has decreased will discharge its internal fluid through the outlet 111, then the valve device 130 switches the connection relationship, so that the volume of the variable volume chamber 120 whose internal fluid has been discharged increases to receive the fluid flowing into the fluid pump 100 from the inlet 112, while the volume of the variable volume chamber 120 filled with fluid decreases to discharge its internal fluid from the fluid pump 100 through the outlet 111, and the above working cycle is performed, so that the fluid pump 100 continuously pumps fluid.

[0020] The flow detection method disclosed in the embodiment of the present invention may include the following steps: S101 , detecting the duration of a volume change of two variable volume chambers 120 .

[0021] In this step, the time it takes for the two variable volume chambers 120 to experience a volume change refers to the time required for one of the two variable volume chambers 120 that is filled with fluid to discharge the fluid. In essence, it is also the time it takes for the volume of this variable volume chamber 120 to decrease, and the time it takes for the other one of the two variable volume chambers 120 to be filled with fluid, that is, the time it takes for the volume of the other one of the two variable volume chambers 120 to increase.

[0022] It should be noted that the volumes of the two variable volume chambers 120 when filled with fluid are equal and both are constant. In the embodiment of the present invention, the two variable volume chambers 120 can be a film bag structure or a bellows structure, and the embodiment of the present invention does not limit the specific structure of the variable volume chamber 120.

[0023] S102, calculating the flow rate of the fluid according to the volume of the variable volume chamber 120 when it is filled with fluid and the duration of one volume change.

[0024] As described above, the volume of the variable volume chamber 120 when it is filled with fluid is a constant. During the process of the fluid pump pumping fluid, the flow rate of the fluid will determine the duration of a volume change experienced by the two variable volume chambers 120. Based on this, this step can calculate the flow rate of the fluid by detecting the duration of a volume change experienced by the two variable volume chambers 120, and then dividing the volume of the variable volume chamber 120 when it is filled with fluid by the duration of a volume change.

[0025] The flow detection method disclosed in the embodiment of the present invention makes full use of the structure of the fluid pump 100 and the principle of pumping fluid, and realizes the detection of the flow rate of the fluid by combining the known constant value of the volume of the variable volume chamber 120 when it is filled with fluid with the detected time length of the two variable volume chambers 120 undergoing a volume change. When this flow detection method is used to detect the flow rate of the cleaning liquid in the semiconductor cleaning process, the flow rate will not be unable to be detected due to the influence of bubbles generated during the configuration of the cleaning liquid in the semiconductor cleaning process. It can be seen that the flow detection method disclosed in the embodiment of the present invention can solve the problem described in the background technology that the semiconductor process generates a large number of bubbles during the configuration of the cleaning liquid, which causes the ultrasonic flowmeter to be unable to detect the flow rate.

[0026] It should be emphasized that the flow detection method disclosed in the embodiment of the present invention is not limited to the detection of the flow of the cleaning liquid in the semiconductor cleaning process, but can also detect the flow of other liquids such as water, and can also detect the flow of dry gas in the semiconductor cleaning process, and the embodiment of the present invention does not limit it. However, when the flow detection method disclosed in the embodiment of the present invention is applied to the flow detection of the cleaning liquid in the semiconductor cleaning process, it will not be interfered by the bubbles in the cleaning liquid, which will cause the flow to be unable to be detected.

[0027] As described above, in S101, it is necessary to detect the duration of a volume change of the two variable volume chambers 120. There are many specific detection methods, for example, directly detecting the time taken for the volume of the fluid in the variable volume chamber 120 to change from zero to fill the variable volume chamber 120, or directly detecting the time taken for the variable volume chamber 120 to go from being filled with fluid to being completely discharged, etc. Based on this, the fluid pump 100 disclosed in the embodiment of the present invention may include a detection device, which can directly detect the time taken for the volume change of the variable volume chamber 120 to determine the duration of a volume change.

[0028] As described above, the variable volume chamber 120 can have a variety of structures. In one embodiment, the adjacent ends of the two variable volume chambers 120 can be fixed ends, and are respectively connected to the valve device 130. The opposite ends of the two variable volume chambers 120 are movable ends, and the volume of the corresponding variable volume chamber 120 is changed by moving toward the fixed end or away from the fixed end. In this structure, the variable volume chamber 120 is a telescopic structure, and the volume can be enlarged or reduced by telescoping, which is conducive to more standardized deformation of the variable volume chamber 120.

[0029] Based on this, in other embodiments, the detection device of the fluid pump 100 may include two in-place sensors 140. The two in-place sensors 140 may be disposed in the pump housing 110 and arranged opposite to the moving ends of the two variable volume chambers 120 respectively so as to be triggered by the moving ends when the corresponding variable volume chambers 120 are filled with fluid.

[0030] In one embodiment, the in-place sensor 140 is arranged on a side away from the fixed end of the variable volume chamber 120. When the mobile end of the variable volume chamber 120 moves in a direction away from the fixed end (i.e., the fluid flows into the variable volume chamber 120 on one side), when the in-place sensor 140 contacts the mobile end to be triggered, it means that the variable volume chamber is filled with fluid; thereafter, when the mobile end separates from the in-place sensor 140 and starts to move in a direction close to the fixed end, it means that the variable volume chamber is discharging fluid.

[0031] Based on this structure, the detection of the time when the two variable volume chambers 120 undergo a volume change includes: In the specific detection process, the fluid pump 100 may include a timer, which is electrically connected to the two in-place sensors 140 respectively. When one of the two in-place sensors 140 changes from a triggered state to an untriggered state, the timer can be started to start timing, and when the other of the two in-place sensors 140 is triggered, the timer can be started to end timing. This time interval is the duration of a volume change experienced by the two variable volume chambers 120.

[0032] During the specific flow detection process, the fluid pump 100 may occasionally malfunction. In order to ensure the accuracy of the flow detection, the flow detection method disclosed in the embodiment of the present invention may also include: among the multiple detected time durations of a volume change, the volume change time duration that does not fall within the preset time duration range is determined as an abnormal time duration, and the flow of the fluid is not calculated based on this (i.e., the abnormal time duration).

[0033] The fluid pump 100 continuously pumps fluid when working, that is, the two variable volume chambers 120 continuously experience volume changes for multiple times. In order to improve the detection accuracy, the flow rate of the fluid is calculated based on the volume of the variable volume chamber 120 when it is filled with fluid and the duration of the volume change, including: among the multiple detected time durations of experiencing a volume change, the volume change duration within a preset time duration is determined as a normal duration, and the average of the flow rates determined by the normal duration is used as the flow rate of the fluid.

[0034] The fluid pump 100 disclosed in the embodiment of the present invention may further include a first alarm. In the embodiment in which the fluid pump 100 includes the first alarm, the flow detection method may further include: when the number of abnormal durations detected within the first preset time period is greater than the preset number threshold, controlling the first alarm to alarm. In this embodiment, when the number of abnormal durations detected within the first preset time period is greater than the preset number threshold, it means that the fluid pump 100 frequently fails and affects the stable detection of the fluid flow, based on which the first alarm reminds relevant personnel to perform maintenance through an alarm.

[0035] As described above, the two variable volume chambers 120 change their volumes alternately, one of which becomes larger so that the fluid enters through the inlet 112, while the other becomes smaller so that the fluid contained therein is discharged through the outlet 111. In order to achieve the alternating volume changes of the two variable volume chambers 120, the fluid pump 100 disclosed in the embodiment of the present invention may further include a driving mechanism 150. The driving mechanism 150 is used to drive the two variable volume chambers 120 to alternately change their volumes so that the fluid enters the fluid pump 100 through the inlet 112 and the fluid flows out of the fluid pump 100 through the outlet 111.

[0036] It should be noted that the single driving time corresponding to the variable volume chamber 120 undergoing a volume change by the driving mechanism 150 is sufficient to ensure that the variable volume chamber 120 completely drains the fluid filled therein. Specifically, the driving mechanism 150 drives the movable end to move toward the fixed end and / or away from the fixed end within each single driving time, so that one of the two in-position sensors 140 changes from a triggered state to a non-triggered state, and the other is triggered.

[0037] In the embodiment of the present invention, the structure of the driving mechanism 150 can be various. For example, the driving mechanism 150 can be two telescopic driving mechanisms respectively connected to the two variable volume chambers 120, and the two telescopic driving mechanisms can respectively and simultaneously drive the two variable volume chambers 120 to alternately change the volume. In other embodiments, the embodiment of the present invention discloses a driving mechanism 150, and the disclosed driving mechanism 150 includes a first gas path 151, a second gas path 152 and a switching valve 153. The pump housing 110 can be provided with a first inner cavity 113 and a second inner cavity 114 isolated from each other, the first inner cavity 113 is respectively isolated from the inlet 112 and the outlet 111, and the second inner cavity 114 is respectively isolated from the inlet 112 and the outlet 111. The two ends of the first gas path 151 are respectively connected to the first interface of the switching valve 153 and the first inner cavity 113, specifically, the end of the first gas path 151 is connected to the first inner cavity 113 through the first gas path interface 115. The two ends of the second gas path 152 are respectively connected to the second interface of the switching valve 153 and the second inner cavity 114. An end of the second gas path 152 is in communication with the second inner cavity 114 through the second gas path interface 116 .

[0038] The switching valve 153 is used to switch the ventilation direction of the first interface and the second interface to control the switching of the first gas path 151 and the second gas path 152 to switch the intake and exhaust, so as to drive the two variable volume chambers 120 to alternately change the volume. The driving mechanism 150 of this structure realizes the switching of the intake and exhaust of the first inner cavity 113 and the second inner cavity 114 by switching the intake and exhaust of the first gas path 151 and the second gas path 152, and finally realizes the alternating volume change of the two variable volume chambers 120. This gas-driven method has the advantages of simple structure and convenient control.

[0039] It should be noted that the switching cycle of the switching valve 153 switching the ventilation direction of the first interface and the second interface is the single drive duration mentioned above. In the embodiment of the present invention, the single drive duration can be a preset duration value, and the single drive duration determines the pumping efficiency of the fluid pump 100 for the fluid.

[0040] In the specific detection process, the single driving time is relatively long. After the driving mechanism 150 drives the two variable volume chambers 120 to experience a volume change, the driving mechanism 150 has not yet used up the single driving time. The time difference between the two variable volume chambers 120 experiencing a volume change and the driving mechanism 150 completing a single driving is the pause time. The longer the pause time, the lower the working efficiency of the fluid pump 100.

[0041] In order to improve the working efficiency of the fluid pump 100, the flow detection method disclosed in the embodiment of the present invention may further include: The intake and exhaust switching duration of the switching valve 153 for the first gas path 151 and the second gas path 152 is adjusted according to the duration of the two variable volume chambers 120 experiencing a volume change, so that the intake and exhaust switching duration is greater than the duration of the volume change and less than the preset single drive duration.

[0042] That is, in this embodiment, the single driving duration can be adjusted according to the duration of a volume change of the two variable volume chambers 120, so that the single driving duration is less than a preset value.

[0043] In this embodiment, the duration of a volume change experienced by the two detected variable volume chambers 120 is used as a reference to reduce the intake and exhaust switching duration of the switching valve 153 for the first air path 151 and the second air path 152, so that the intake and exhaust switching duration is no longer based on the preset single drive duration, but is less than the preset single drive duration. This scheme can reduce the pause duration, and thus improve the working efficiency of the fluid pump 100.

[0044] As described above, the valve device 130 is used to control the flow of fluid between the inlet 112 and the variable volume chamber 120 and between the variable volume chamber 120 and the outlet 111. The valve device 130 can be a single valve that can be electromagnetically switched to realize the function of the valve device 130, or it can be a valve group formed by a combination of multiple valves.

[0045] The embodiment of the present invention discloses a specific valve device 130 . The disclosed valve device 130 may include a first one-way valve 131 , a second one-way valve 132 , a third one-way valve 133 and a fourth one-way valve 134 .

[0046] One of the two variable volume chambers 120 is connected to the outlet 111 through the first one-way valve 131 and to the inlet 112 through the second one-way valve 132; the other of the two variable volume chambers 120 is connected to the outlet 111 through the third one-way valve 133 and to the inlet 112 through the fourth one-way valve 134. When the volume of the variable volume chamber 120 connected to the first one-way valve 131 and the second one-way valve 132 increases and the volume of the variable volume chamber 120 connected to the third one-way valve 133 and the fourth one-way valve 134 decreases, the second one-way valve 132 is in an open state, the first one-way valve 131 is in a closed state, the third one-way valve 133 is in an open state, and the fourth one-way valve 134 is in a closed state.

[0047] When the volume of the variable volume chamber 120 connected to the first one-way valve 131 and the second one-way valve 132 decreases and the volume of the variable volume chamber 120 connected to the third one-way valve 133 and the fourth one-way valve 134 increases, the first one-way valve 131 is in an open state, the second one-way valve 132 is in a closed state, the third one-way valve 133 is in a closed state, and the fourth one-way valve 134 is in an open state.

[0048] The valve device 130 of this structure is composed of four one-way valves with a simple structure, and the function of the valve device 130 can be met without complex control, which is conducive to reducing the manufacturing cost of the fluid pump 100. At the same time, the first one-way valve 131, the second one-way valve 132, the third one-way valve 133 and the fourth one-way valve 134 are mechanical valves, which have good working stability and can work more stably.

[0049] Based on the flow detection method disclosed in the embodiment of the present invention, the embodiment of the present invention discloses a fluid pump 100, which includes the pump housing 110, two variable volume chambers 120 and a valve device 130 mentioned above. The fluid pump 100 may also include a processor, and the processor is used to execute the steps in the fluid detection method described in the above implementation.

[0050] Based on the fluid pump 100 disclosed in the embodiment of the present invention, the embodiment of the present invention further discloses a tank-type semiconductor cleaning device. The disclosed tank-type semiconductor cleaning device includes a cleaning tank 200, a cleaning liquid circulation pipeline 300 and the fluid pump 100 described in the above embodiment.

[0051] The cleaning liquid circulation pipeline 300 includes a first pipe section 310 and a second pipe section 320. The first end of the first pipe section 310 is connected to the top of the cleaning tank 200 for receiving the cleaning liquid discharged from the cleaning tank 200, the second end of the first pipe section 310 is connected to the inlet 112, the first end of the second pipe section 320 is connected to the outlet 111, and the second end of the second pipe section 320 is connected to the bottom of the cleaning tank 200 for transporting the cleaning liquid into the cleaning tank 200.

[0052] The tank-type semiconductor cleaning equipment of this structure can realize the circulation of the cleaning liquid through the fluid pump 100 to ensure the uniformity of the cleaning liquid, and can also detect the flow rate of the cleaning liquid during the circulation process.

[0053] In a further embodiment, the tank-type semiconductor cleaning equipment disclosed in the embodiment of the present invention may further include a fluid presence detection sensor 400, which is disposed on the first pipe section 310 or the second pipe section 320, and the fluid presence detection sensor 400 is used to detect whether there is cleaning fluid in the first pipe section 310 or the second pipe section 320. The fluid presence detection sensor 400 can detect whether there is cleaning fluid in the first pipe section 310 or the second pipe section 320 to determine whether the tank-type semiconductor cleaning equipment is in a normal working state.

[0054] The tank-type semiconductor cleaning equipment disclosed in the embodiment of the present invention may further include a second alarm, which may be connected to the fluid presence detection sensor 400. The second alarm is used to alarm when the fluid presence detection sensor 400 does not receive a signal indicating that there is cleaning fluid in the cleaning fluid circulation pipeline 300 from the fluid presence detection sensor 400 within a second preset time period. The alarm of the second alarm can remind the operator to perform timely maintenance.

[0055] In order to make the temperature of the cleaning liquid more easily meet the temperature requirements of the semiconductor cleaning process, the semiconductor cleaning equipment disclosed in the embodiment of the present invention may further include a heater 500, which is arranged on the first pipe section 310 or the second pipe section 320, and the heater 500 is used to heat the cleaning liquid flowing through the cleaning liquid circulation pipeline 300. During the circulation of the cleaning liquid, the cleaning liquid passing through the cleaning liquid circulation pipeline 300 is heated and then enters the cleaning tank 200.

[0056] The above embodiments of the present application focus on describing the differences between the various embodiments. As long as the different features of the various embodiments are not contradictory, they can be combined to form more specific embodiments. Considering the simplicity of the text, they will not be repeated here.

[0057] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A flow detection method, applied to a fluid pump (100), the fluid pump (100) comprising a pump housing (110) and two variable volume chambers (120) and a valve device (130) arranged in the pump housing (110); the pump housing (110) having an outlet (111) and an inlet (112); the two variable volume chambers (120) are both connected to the outlet (111) and the inlet (112) through the valve device (130); the two variable volume chambers (120) alternately change their volumes, wherein the volume of one increases so that a fluid enters through the inlet (112), while the volume of the other decreases so that the fluid contained therein is discharged through the outlet (111); the flow detection method comprises: detecting the duration of a volume change experienced by the two variable volume chambers (120); The flow rate of the fluid is calculated based on the volume of the variable volume chamber (120) when it is filled with the fluid and the duration of a volume change.

2. The flow detection method according to claim 1, characterized in that: The fluid pump (100) further comprises a detection device, the detection device comprising two in-place sensors (140); the adjacent ends of the two variable volume chambers (120) are fixed ends and are respectively connected to the valve device (130); the opposite ends of the two variable volume chambers (120) are movable ends, and the volume of the corresponding variable volume chamber (120) is changed by moving in a direction close to the fixed end or moving in a direction away from the fixed end; the two in-place sensors (140) are arranged in the pump housing (110), and are respectively arranged opposite to the movable ends of the two variable volume chambers (120) so as to be triggered by the movable ends when the corresponding variable volume chamber (120) is filled with the fluid.

3. The flow detection method according to claim 2, characterized in that: The detecting the duration of a volume change experienced by the two variable volume chambers (120) comprises: According to the time interval from when one of the two in-position sensors (140) changes from a triggered state to an untriggered state to when the other is triggered, the time interval is determined to be the duration of a volume change experienced by the two variable volume chambers (120).

4. The flow detection method according to any one of claims 1 to 3, characterized in that: The flow detection method further includes: among the multiple detected time periods of experiencing a volume change, determining the volume change time period that does not fall within a preset time period range as an abnormal time period, and not calculating the flow rate of the fluid based on it.

5. The flow detection method according to claim 4, characterized in that: The step of calculating the flow rate of the fluid according to the volume of the variable volume chamber (120) when it is filled with the fluid and the duration of a volume change, comprises: Among the multiple detected durations of experiencing a volume change, the volume change duration that falls within the preset duration range is determined as a normal duration, and the average of the flow rates determined by the duration is used as the flow rate of the fluid.

6. The flow detection method according to claim 4, characterized in that: The fluid pump (100) further comprises a first alarm, and the flow detection method further comprises: When the number of times the abnormal duration is detected within the first preset time period is greater than a preset number threshold, the first alarm is controlled to sound an alarm.

7. The flow detection method according to claim 3, characterized in that: The fluid pump (100) further comprises a driving mechanism (150). The driving mechanism (150) drives the movable end to move in a direction close to the fixed end and / or in a direction away from the fixed end within each single driving time, so that one of the two in-position sensors (140) changes from a triggered state to a non-triggered state, and the other is triggered.

8. The flow detection method according to claim 7, characterized in that: The pump housing (110) is provided with a first inner cavity (113) and a second inner cavity (114) which are isolated from each other; the first inner cavity (113) is isolated from the inlet (112) and the outlet (111) respectively, and the second inner cavity (114) is isolated from the inlet (112) and the outlet (111) respectively; the driving mechanism (150) comprises a first gas path (151), a second gas path (152) and a switching valve (153); the two ends of the first gas path (151) are respectively connected to a first interface of the switching valve (153) and the first inner cavity (113), and the two ends of the second gas path (152) are respectively connected to a second interface of the switching valve (153) and the second inner cavity (114); the switching valve (153) controls the switching of the first gas path (151) and the second gas path (152) to switch the air intake and exhaust by switching the air ventilation directions of the first interface and the second interface; The flow detection method also includes: The switching duration of the switching valve (153) for the first gas path (151) and the second gas path (152) is adjusted according to the duration of the two variable volume chambers (120) experiencing a volume change, so that the switching duration of the intake and exhaust is greater than the duration of the volume change and less than the single drive duration preset by the drive mechanism (150).

9. A fluid pump, characterized in that: The fluid pump (100) comprises a pump housing (110), two variable volume chambers (120) and a valve device (130) arranged in the pump housing (110); the pump housing (110) has an outlet (111) and an inlet (112); the two variable volume chambers (120) are respectively connected to the outlet (111) and the inlet (112) through the valve device (130); the two variable volume chambers (120) change their volumes alternately, wherein the volume of one increases so that a fluid enters through the inlet (112), while the volume of the other decreases so that the fluid contained therein is discharged through the outlet (111); the fluid pump (100) further comprises a processor, wherein the processor is used to execute the flow detection method according to any one of claims 1 to 8.

10. The fluid pump according to claim 9, characterized in that The valve device (130) comprises a first one-way valve (131), a second one-way valve (132), a third one-way valve (133) and a fourth one-way valve (134); one of the two variable volume chambers (120) is connected to the outlet (111) via the first one-way valve (131) and is connected to the inlet (112) via the second one-way valve (132); the other of the two variable volume chambers (120) is connected to the outlet (111) via the third one-way valve (133) and is connected to the inlet (112) via the fourth one-way valve (134); When the volume of the variable volume chamber (120) connected to the first one-way valve (131) and the second one-way valve (132) increases and the volume of the variable volume chamber (120) connected to the third one-way valve (133) and the fourth one-way valve (134) decreases, the second one-way valve (132) is in an open state, the first one-way valve (131) is in a closed state, the third one-way valve (133) is in an open state, and the fourth one-way valve (134) is in a closed state; When the volume of the variable volume chamber (120) connected to the first one-way valve (131) and the second one-way valve (132) decreases and the volume of the variable volume chamber (120) connected to the third one-way valve (133) and the fourth one-way valve (134) increases, the first one-way valve (131) is in an open state, the second one-way valve (132) is in a closed state, the third one-way valve (133) is in a closed state, and the fourth one-way valve (134) is in an open state.

11. A tank-type semiconductor cleaning device, characterized in that: The invention comprises a cleaning tank (200), a cleaning liquid circulation pipeline (300) and a fluid pump (100) according to claim 9 or 10, wherein the cleaning liquid circulation pipeline (300) comprises a first pipe section (310) and a second pipe section (320), wherein a first end of the first pipe section (310) is connected to the top of the cleaning tank (200) for receiving the cleaning liquid discharged from the cleaning tank (200), a second end of the first pipe section (310) is connected to the inlet (112), a first end of the second pipe section (320) is connected to the outlet (111), and a second end of the second pipe section (320) is connected to the bottom of the cleaning tank (200) for conveying the cleaning liquid into the cleaning tank (200).

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