Spectrum device and spectrum calibration and detection method

Abstract

The invention relates to a spectrum device and a spectrum calibration and detection method. The spectrum device comprises a monochromator module which is used for carrying out light splitting on a broadband optical signal and outputting narrowband monochromatic light; the first detection light path module is used for carrying out light signal detection on the narrowband monochromatic light to obtain a first detection signal; the data acquisition and processing module is used for acquiring photon number information of the first detection signal, acquiring broadband tunable monochromatic light according to the photon number information, and performing spectrum calibration according to the broadband tunable monochromatic light; the monochromator module is also used for splitting the spectral signal of the to-be-measured target and outputting a spectral distribution signal; the second detection light path module is used for carrying out light signal detection on the spectral distribution signal to obtain a second detection signal; and the data acquisition and processing module is also used for acquiring arrival photon information of the spectrum distribution signal and performing spectrum detection on the to-be-detected target according to the arrival photon information. By adopting the device, high-precision broadband tunable monochromatic light output and spectrum detection can be realized.

Description

Technical Field

[0001] The present application relates to the technical field of spectral calibration and detection, and in particular to a spectral device and a spectral calibration and detection method. Background Art

[0002] The spectrometer is one of the most important instruments in material characterization and chemical analysis. The spectrometer can measure the spectral lines absorbed or emitted by a substance, thereby analyzing its composition and structure. It is the most commonly used measurement tool in scientific research and industrial applications. Generally speaking, spectrometers can be divided into four types according to different working principles: (1) dispersion type; (2) narrowband filtering type; (3) Fourier transform type; (4) computational spectroscopy type. The first three types belong to traditional spectral spectrometry technology. The fourth type is a newly emerging new spectral spectrometry technology. Through a pre-calibrated one-to-many mapping relationship of "spectral input-measurement output", an algorithm combination is used to approximate or reconstruct the incident spectral information from the measurement data set. The advantage is that no wavelength multiplexing components are required, which greatly reduces the structural complexity and physical size of the device.

[0003] In the traditional way, the computational spectrometer needs to pre-calibrate the one-to-many mapping relationship of "spectral input-measurement output" through the broadband tunable light source calibration system before spectral detection can be performed. However, the broadband tunable light source calibration system is based on tunable laser technology to output broadband tunable monochromatic light. The coverage wavelength of tunable lasers is limited and expensive, which limits the wavelength range of tunable output monochromatic light, making it impossible to achieve high-precision broadband tunable monochromatic light output and spectral detection. Summary of the invention

[0004] Based on this, it is necessary to provide a spectral device that can achieve high-precision broadband tunable monochromatic light output and spectral detection in order to address the above technical problems.

[0005] In a first aspect, the present application provides a spectral device, the device comprising:

[0006] A monochromator module is used to split the broadband optical signal and output narrow-band monochromatic light;

[0007] A first detection optical path module is connected to the monochromator module and is used to detect the narrow-band monochromatic light to obtain a first detection signal;

[0008] A data acquisition and processing module is connected to the first detection optical path module, and is used to collect photon number information of the first detection signal, obtain broadband tunable monochromatic light according to the photon number information, and perform spectrum calibration according to the broadband tunable monochromatic light; the photon number information includes the number of photons and the arrival time of each photon;

[0009] The monochromator module is also used to split the spectral signal of the target to be measured and output a spectral distribution signal;

[0010] A second detection optical path module is connected to the monochromator module and is used to perform optical signal detection on the spectral distribution signal to obtain a second detection signal;

[0011] The data acquisition and processing module is connected to the second detection optical path module and is used to collect the arrival photon information of the second detection signal and perform spectral detection on the target to be detected according to the arrival photon information; the arrival photon information includes the time information and position information of the arrival photon.

[0012] In one embodiment, the monochromator module includes a first entrance slit, a second entrance slit, a first exit slit, a second exit slit, and a grating light splitting component;

[0013] A grating spectrometer is used to perform grating spectrometry on the broadband optical signal input from the first incident slit to obtain narrow-band monochromatic light, and output the narrow-band monochromatic light through the first exit slit;

[0014] The grating spectroscopic component is also used to perform grating spectroscopic analysis on the spectrum signal of the target to be measured input from the second incident slit to obtain a spectrum distribution signal, and output the spectrum distribution signal through the second exit slit.

[0015] In one embodiment, the first detection optical path module includes:

[0016] A coupling unit, used for coupling narrow-band monochromatic light to a computational spectrum chip;

[0017] The computational spectrum chip is used to detect the optical signal of the narrow-band monochromatic light to obtain a first detection signal.

[0018] In one embodiment, the coupling unit is an optical coupling unit or a spatial coupling unit.

[0019] In one embodiment, the second detection optical path module includes:

[0020] A relay mirror is used to extend the transmission optical path of the spectral distribution signal and to adjust the beam of the spectral distribution signal;

[0021] A linear array single photon detector is connected to the relay mirror and is used to detect the optical signal of the adjusted spectral distribution signal to obtain a second detection signal;

[0022] A refrigeration device is provided, wherein a linear array single photon detector is housed in the refrigeration device, and is used to ensure that the linear array single photon detector operates within a preset temperature range.

[0023] In one embodiment, the linear array single-photon detector includes a superconducting nanowire single-photon imaging device, which is used to perform optical signal detection on the adjusted spectral distribution signal to obtain a second detection signal.

[0024] In one embodiment, a superconducting nanowire single-photon imaging device includes a superconducting delay region, the superconducting delay region includes a delay line and a superconducting nanowire detector that are separately arranged, the superconducting nanowire detector includes a plurality of detection units, each detection unit includes a plurality of parallel nanowires that are parallel to each other;

[0025] The delay line is used to delay the time information of the arriving photons in the adjusted spectral distribution signal, and a plurality of mutually parallel parallel nanowires are used to detect the time information of the arriving photons in the adjusted spectral distribution signal, and the position information of the arriving photons in the adjusted spectral distribution signal is determined based on the time difference detected by the plurality of mutually parallel parallel nanowires, and a second detection signal is obtained based on the detected time information and position information of the arriving photons.

[0026] In one embodiment, the data acquisition and processing module includes:

[0027] The acquisition module is a time-correlated single photon counting module, which is used to collect the photon number information of narrow-band monochromatic light and the arrival photon information of the target to be measured;

[0028] The terminal is connected to the acquisition module and is used to obtain broadband tunable monochromatic light according to the photon number information, perform spectral calibration according to the broadband tunable monochromatic light, and perform spectral detection on the target to be measured according to the arriving photon information.

[0029] In one embodiment, the device further comprises: a light source module connected to the monochromator module, the light source module comprising:

[0030] Laser, used to output broadband parallel light;

[0031] The beam adjustment unit is connected to the laser and is used to focus the broadband parallel light to obtain a broadband optical signal.

[0032] In one embodiment, the device further comprises: a collecting light path module connected to the monochromator module, the collecting light path module comprising:

[0033] The converging objective lens is used to collect and collimate the outgoing light signal of the target to be measured to obtain a collimated light signal;

[0034] The converging lens is connected to the converging objective lens and is used to focus the collimated light signal and output the spectrum signal of the target to be measured to the monochromator module.

[0035] In a second aspect, the present application provides a spectrum calibration and detection method, the method comprising:

[0036] Performing optical signal detection on the narrow-band monochromatic light to obtain a first detection signal;

[0037] Collecting photon number information of the first detection signal, obtaining broadband tunable monochromatic light according to the photon number information, and performing spectrum calibration according to the broadband tunable monochromatic light; the photon number information includes the number of photons and the arrival time of each photon;

[0038] Split the spectral signal of the target to be measured and output the spectral distribution signal;

[0039] Performing optical signal detection on the spectral distribution signal to obtain a second detection signal;

[0040] The arrival photon information of the second detection signal is collected, and spectral detection is performed on the target to be detected according to the arrival photon information; the arrival photon information includes time information and position information of the arrival photon.

[0041] The above-mentioned spectral device, since the monochromator module has a broadband spectral response range from visible to infrared, provides a broadband tunable monochromatic light output through the monochromator module, realizes a wide-spectrum, high-precision wavelength calibration spectrum, and realizes high-precision, high-sensitivity single-photon spectral detection through the monochromator module, effectively solving the problem that traditional technologies cannot realize the integration of broadband tunable monochromatic light output and spectral detection, and can simultaneously meet the needs of broadband spectral calibration and high-sensitivity single-photon spectral detection, not only can it realize wide-spectrum, high-precision spectral calibration and spectral detection, but it also has the advantages of simple structure, high integration and miniaturization. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the related technologies, the drawings required for use in the embodiments or the related technical descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0043] Figure 1 is a schematic structural diagram of a spectral device in one embodiment;

[0044] Figure 2 is a schematic structural diagram of a spectral device in another embodiment;

[0045] Figure 3 A schematic diagram of the optical path of a spectral device in one embodiment;

[0046] Figure 4 Schematic diagram of the flow of the spectrum calibration and detection method in each embodiment.

[0047] Description of reference numerals:

[0048] 100, monochromator module; 101, first incident slit; 102, second incident slit; 103, first exit slit; 104, second exit slit; 105, grating spectrometer; 200, first detection optical path module; 2011, optical fiber focusing lens; 2012, transmission optical fiber; 202, computational spectrum chip; 300, second detection optical path module; 301, relay lens; 302, linear array single photon detector; 303, refrigeration device; 400, data acquisition and processing module; 401, acquisition module; 402, terminal; 500, light source module; 501, laser; 502, beam adjustment unit; 600, collection optical path module; 601, convergence objective lens; 602, convergence lens; 700, target to be measured. DETAILED DESCRIPTION

[0049] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0050] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0051] It can be understood that the terms "first", "second", etc. used in the present application can be used in this article to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish the first element from another element.

[0052] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" and the like specify the presence of stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. At the same time, the term "and / or" used in this specification includes any and all combinations of the relevant listed items.

[0053] In the traditional way, the computational spectrometer needs to pre-calibrate the one-to-many mapping relationship of "spectral input-measurement output" through a broadband tunable light source calibration system before spectral detection can be performed. At present, there are two main means to provide broadband tunable monochromatic light output: dispersion spectrometry technology based on monochromator and tunable laser technology. If the wavelength tuning of the tunable laser is performed for spectral subdivision scanning, it takes a lot of time, the calibration cycle is long, and the cost of tunable lasers is high. The wavelength coverage of a single laser is limited. If you want to achieve a wide spectral range in the visible and infrared bands, you need a combination of multiple lasers to achieve it, which greatly increases the cost and complexity of the system. As the needs of scientific research gradually develop towards high time resolution, high precision, high sensitivity, wide band, integrated miniaturization, etc., traditional spectrometers cannot meet the growing actual needs. There is an urgent need for a multifunctional instrument that can simultaneously perform broadband tunable monochromatic light output and single-photon spectral detection.

[0054] To address the above problems, a spectral device is proposed, which has the functions of broadband tunable monochromatic light output and single-photon spectral detection. It can realize wide-band and high-precision calibration and detection, and has the advantages of simple structure, high integration and miniaturization.

[0055] See also Figure 1 , Figure 1 The structure diagram of the spectral device in one embodiment of the present application is shown, and the spectral device includes a monochromator module 100, a first detection optical path module 200, a second detection optical path module 300 and a data acquisition and processing module 400. The monochromator module 100 is respectively connected to the first detection optical path module 200 and the second detection optical path module 300, and the data acquisition and processing module 400 is respectively connected to the first detection optical path module 200 and the second detection optical path module 300. The data acquisition and processing module 400 is also connected to the monochromator module 100.

[0056] The monochromator module 100 is used to split the broadband optical signal and output narrowband monochromatic light. The first detection optical path module 200 is connected to the monochromator module 100 and is used to detect the narrowband monochromatic light to obtain a first detection signal. The data acquisition and processing module 400 is connected to the first detection optical path module 200 and is used to collect the photon number information of the first detection signal, obtain the broadband tunable monochromatic light according to the photon number information, and perform spectral calibration according to the broadband tunable monochromatic light. The photon number information includes the number of photons and the arrival time of each photon. The monochromator module 100 is also used to split the spectral signal of the target to be measured and output a spectral distribution signal. The second detection optical path module 300 is connected to the monochromator module 100 and is used to detect the spectral distribution signal to obtain a second detection signal. The data acquisition and processing module 400 is connected to the second detection optical path module 300 and is used to collect the arrival photon information of the second detection signal and perform spectral detection on the target to be measured according to the arrival photon information. The arrival photon information includes the time information and position information of the arrival photon.

[0057] Optionally, the spectral device can simultaneously realize the output of broadband tunable monochromatic light and single-photon spectral detection through a monochromator. Among them, broadband tunable monochromatic light refers to a light source that can cover a wider spectrum range, and the output light wavelength or frequency can be changed by adjusting parameters while maintaining the monochromaticity of its light wavelength. Broadband tunable monochromatic light is used for spectral calibration. In the process of the spectral device outputting broadband tunable monochromatic light, the monochromator module 100 is used to receive a broadband optical signal, wherein the broadband optical signal refers to an optical signal containing multiple frequency or wavelength components, usually covering a wider spectrum range. The monochromator module 100 performs grating splitting on the broadband optical signal to obtain narrowband monochromatic light, and transmits the narrowband monochromatic light to the first detection optical path module 200. Among them, narrowband monochromatic light refers to an optical signal with very close wavelengths and a very small spectrum width, which can be regarded as light of a single wavelength.

[0058] The first detection optical path module 200 is used to detect the optical signal of the narrowband monochromatic light to obtain the first detection signal. Optical signal detection refers to detecting whether the optical signal exists, that is, the arriving photons in the optical signal. The first detection signal includes the arriving photons in the narrowband monochromatic light. The data processing module data acquisition processing module 400 is used to collect the photon number information of the first detection signal, and the photon number information is the light intensity. The first detection signal is modulated according to the photon number information to obtain the narrowband wavelength output spectrum of the entire broadband spectrum, that is, the broadband tunable monochromatic light. Afterwards, the data acquisition processing module 400 is also used to perform spectral calibration based on the broadband tunable monochromatic light. The method of spectral calibration is a calibration method well known to those skilled in the art and will not be repeated here.

[0059] The spectral device can also perform single-photon spectral detection. The monochromator module 100 is used to receive the spectral signal of the target to be measured, perform grating splitting on the spectral signal of the target to be measured, obtain a spectral distribution signal, and transmit the spectral distribution signal to the second detection optical path module 300. Among them, the target to be measured refers to a substance, sample or system used for spectral detection. The second detection optical path module 300 is used to perform optical signal detection on the spectral distribution signal to obtain a second detection signal. The second detection signal includes the arriving photons in the spectral distribution signal. The data acquisition and processing module 400 is also used to collect the arrival photon information of the second detection signal in the second detection optical path module 300, perform spectral detection on the target to be measured according to the arrival photon information, obtain the spectral information of the target to be measured, and control the monochromator module 100 to output spectral information of different wavelengths to the second detection optical path module 300 according to the spectral information of the target to be measured, so as to obtain the broadband spectral information of the target to be measured. Among them, the arrival photon information may include the time information and position information of the arrival photon. Spectral detection refers to the wavelength or frequency distribution characteristics of light obtained by detecting the interaction between the target to be measured and light. Broadband spectral information reflects the response of the target to light of different wavelengths.

[0060] In this embodiment, since the monochromator module 100 has a broadband spectral response range from visible to infrared, the spectral device provides a broadband tunable monochromatic light output through the monochromator module 100, realizes a wide spectrum, high-precision wavelength calibration spectrum, and realizes high-precision, high-sensitivity single-photon spectral detection through the monochromator module 100, which effectively solves the problem that traditional technologies cannot realize the integration of broadband tunable monochromatic light output and spectral detection, and can simultaneously meet the needs of broadband spectral calibration and high-sensitivity single-photon spectral detection, not only can it realize wide spectral band, high-precision spectral calibration and spectral detection, but also has the advantages of simple structure, high integration and miniaturization.

[0061] See also Figure 2 , Figure 2 A schematic structural diagram of a spectral device in another embodiment of the present application is shown. The spectral device further includes a light source module 500 and a collecting light path module 600.

[0062] The light source module 500 is connected to the monochromator module 100, and the light source module 500 includes a laser and a beam adjustment unit. The laser is used to output broadband parallel light. Exemplarily, the operating band of the laser can cover 400nm-2500nm, including but not limited to supercontinuum lasers, bromine tungsten lamps, xenon lamps, etc. The beam adjustment unit is connected to the laser and is used to focus the broadband parallel light to obtain a broadband optical signal. Exemplarily, the beam adjustment unit can be a focusing lens. By setting the beam adjustment unit, the collection aperture and efficiency of the optical signal can be improved.

[0063] The collecting optical path module 600 is connected to the monochromator module 100, and the collecting optical path module 600 includes a converging objective lens and a converging lens. The converging objective lens is used to collect and collimate the outgoing light signal of the target to be measured to obtain a collimated light signal. The converging lens is connected to the converging objective lens, and is used to focus the collimated light signal and output the spectral signal of the target to be measured to the monochromator module. By collecting and collimating the outgoing light signal through the converging objective lens, the divergent light signal can be converted into parallel light or quasi-parallel light, and the collimated light signal is focused by the converging lens, so that the diameter of the light spot is reduced, the energy is more concentrated, and the divergence angle of the light signal is reduced, which is more conducive to the transmission of the light signal.

[0064] See also Figure 3 , Figure 3 The optical path schematic diagram of the spectral device in one embodiment of the present application is shown, and the light source module 500 includes a laser 501 and a beam adjustment unit 502. The collection optical path module 600 includes a convergence objective lens 601 and a convergence lens 602. The monochromator module 100 includes a first incident slit 101, a second incident slit 102, a first exit slit 103, a second exit slit 104 and a grating light splitting component 105.

[0065] The grating spectrometer component 105 is used to perform grating spectrometry on the broadband light signal input from the first incident slit 101 to obtain narrow-band monochromatic light, and output the narrow-band monochromatic light through the first exit slit 103; the grating spectrometer component 105 is also used to perform grating spectrometry on the spectral signal of the target 700 to be measured input from the second incident slit 102 to obtain a spectral distribution signal, and output the spectral distribution signal through the second exit slit 104.

[0066] Optionally, in the process of outputting broadband tunable monochromatic light, the broadband parallel light output by the laser 501 is focused by the beam adjustment unit 502 to obtain a broadband light signal. The beam adjustment unit 502 inputs the broadband light signal to the first incident slit 101, and enters the grating light splitting component of the monochromator module 100 through the first incident slit 101. The grating light splitting component 105 performs grating light splitting on the broadband light signal and controls the first exit slit 103 to output narrowband monochromatic light.

[0067] Furthermore, the monochromator module 100 can perform grating automatic scanning to control the first exit slit 103 to output narrowband monochromatic light at different wavelengths, so as to subsequently obtain the entire broadband spectrum, ie, broadband tunable monochromatic light.

[0068] In the process of single-photon spectrum detection, the spectrum signal emitted by the target 700 to be measured is collected and collimated by the converging lens 601 to obtain a collimated light signal. The focus of the converging lens 602 is near the second incident slit 102, and the converging lens 602 focuses the collimated light signal to the second incident slit 102, so that the spectrum signal of the target 700 to be measured is input to the grating spectroscopic component through the second incident slit 102. After the grating spectroscopic component performs grating spectrometry on the spectrum signal, a spectrum distribution signal is obtained, so that the spectrum distribution signal is emitted through the second exit slit 104.

[0069] By setting different entrance slits and exit slits, the monochromator module 100 can receive broadband light signals and spectral signals of the target to be measured 700. The grating spectrometer component 105 performs grating spectrometry, which can decompose the complex light into monochromatic light and separate the light of different wavelengths, so as to obtain broadband tunable monochromatic light and spectral detection.

[0070] Please continue reading Figure 3 The first detection optical path module 200 includes a coupling unit and a computational spectrum chip 202. The coupling unit is connected to the computational spectrum chip 202. The coupling unit is used to couple the narrow-band monochromatic light to the computational spectrum chip; the computational spectrum chip 202 is used to perform optical signal detection on the narrow-band monochromatic light to obtain a first detection signal.

[0071] Optionally, the first detection optical path module 200 can also be called a coupling optical path module. The narrowband monochromatic light output by the first exit slit 103 enters the coupling unit, and the coupling unit efficiently couples the narrowband monochromatic light to the photosensitive surface of the computational spectrum chip 202. The computational spectrum chip 202 performs optical signal detection on the narrowband monochromatic light to obtain a first detection signal. Exemplarily, the computational spectrum chip 202 can be a superconducting nanowire single-photon detector.

[0072] Further, the coupling unit is an optical coupling unit or a spatial coupling unit. When the coupling unit is an optical coupling unit, the optical coupling unit includes a fiber focusing lens 2011 and a transmission optical fiber 2012. The narrow-band monochromatic light reaches the calculation spectrum chip 202 through the fiber focusing lens 2011 and the transmission optical fiber 2012.

[0073] Please continue reading Figure 3 The second detection optical path module 300 includes a relay mirror 301, a linear array single photon detector 302 and a cooling device 303. The relay mirror 301 is connected to the linear array single photon detector 302, the linear array single photon detector 302 is arranged in the cooling device 303, and the computational spectrum chip 202 is also arranged in the cooling device 303.

[0074] The relay mirror 301 is used to extend the transmission optical path of the spectral distribution signal and adjust the light beam of the spectral distribution signal; the linear array single photon detector 302 is used to detect the optical signal of the adjusted spectral distribution signal to obtain a second detection signal; the refrigeration device 303 is used to ensure that the linear array single photon detector operates within a preset temperature range.

[0075] Optionally, the spectral distribution signal output by the second exit slit 104 enters the relay mirror 301, which is used to extend the transmission optical path of the spectral distribution signal and adjust the beam of the spectral distribution signal. The relay mirror 301 transmits the adjusted spectral distribution signal to the linear array single photon detector 302 for detection.

[0076] Exemplarily, the relay lens 301 is a 1:1 lens group with a focal length of 100 mm, made of calcium fluoride, and capable of transmitting light in the visible and infrared bands.

[0077] By providing a relay lens 301 in the second detection optical path module 300, the optical path is extended and the light beam is adjusted to meet the optical requirements of the new device.

[0078] The computational spectroscopy chip 202 and the linear array single photon detector 302 are both superconducting devices, which have advantages over traditional semiconductors such as higher sensitivity, lower dark counts, and lower time jitter, but they also require lower temperature conditions to work. Therefore, the computational spectroscopy chip 202 and the linear array single photon detector 302 are arranged in a refrigeration device 303, which can provide low-temperature working conditions for the computational spectroscopy chip 202 and the linear array single photon detector 302.

[0079] Please continue reading Figure 3 The data acquisition processing module 400 includes an acquisition module 401 and a terminal 402 . The acquisition module 401 is connected to the terminal 402 , and the acquisition module 401 is also connected to the computational spectrum chip 202 and the linear array single photon detector 302 . The terminal 402 is connected to the monochromator module 100 .

[0080] The acquisition module 401 is a time-correlated single photon counting module, which is used to collect the photon number information of narrowband monochromatic light and the arrival photon information of the target 700 to be measured; the terminal 402 is used to obtain broadband tunable monochromatic light according to the photon number information, perform spectral calibration according to the broadband tunable monochromatic light, and perform spectral detection on the target 700 to be measured according to the arrival photon information.

[0081] Optionally, the acquisition module 401 is a time-correlated single photon counting module, and the time-correlated single photon counting module includes a photon acquisition channel. Exemplarily, the time-correlated single photon counting module has a maximum of 16 channels, and the time accuracy can reach 3 picoseconds (ps). The time-correlated single photon counting module is connected to the computational spectrum chip 202, and is used to collect the photon number information of narrow-band monochromatic light from the acquisition computational spectrum chip 202, and transmit the photon number information to the terminal 402. The terminal 402 reads the photon number information transmitted by the time-correlated single photon counting module, post-processes the photon number information, extracts the photon arrival time and the number of photons at different wavelengths, and calculates the photosensitive surface pixel position of the corresponding photon according to the photon arrival time, thereby obtaining the narrow-band wavelength output spectrum of the entire broadband spectrum, that is, obtaining broadband tunable monochromatic light. The broadband tunable monochromatic light is used to perform spectral calibration on the computational spectrum chip 202.

[0082] The photon collection channel is connected to the linear array single photon detector 302, and is used to collect the arrival photon information of the target to be measured 700 from the linear array single photon detector 302, and transmit the arrival photon information to the terminal 402. The terminal 402 reads the arrival photon information transmitted by the photon collection channel, detects the photon number information, and thus obtains the spectrum information of the target to be measured 700. According to the spectrum information range of the target to be measured 700, the grating spectrometer component in the monochromator module 100 is adjusted, and the spectrum information of different wavelengths is selected to enter the linear array single photon detector 302, thereby completing the spectrum detection and obtaining the broadband spectrum information of the target to be measured 700.

[0083] By collecting the photon number information of narrowband monochromatic light and the arrival photon information of the target 700 to be measured through the time-correlated single photon counting module, the data collection accuracy can be improved, thereby further improving the accuracy of broadband tunable monochromatic light and the spectral detection accuracy.

[0084] In an exemplary embodiment, the linear array single-photon detector 302 includes a superconducting nanowire single-photon imaging device, which is used to perform optical signal detection on the adjusted spectral distribution signal to obtain a second detection signal.

[0085] Because superconducting nanowire single-photon imaging devices have the ability to simultaneously detect the time information and position information of arriving photons, and have wide-spectrum response capabilities, they can achieve spectral detection in a wide spectrum with high integration.

[0086] Further, the superconducting nanowire single-photon imaging device includes a superconducting delay region, the superconducting delay region includes a delay line and a superconducting nanowire detector that are separately arranged, the superconducting nanowire detector includes a plurality of detection units, each detection unit includes a plurality of mutually parallel nanowires;

[0087] The delay line is used to delay the time information of the arriving photons in the adjusted spectral distribution signal, and a plurality of mutually parallel parallel nanowires are used to detect the time information of the arriving photons in the adjusted spectral distribution signal, and the position information of the arriving photons in the adjusted spectral distribution signal is determined based on the time difference detected by the plurality of mutually parallel parallel nanowires, and a second detection signal is obtained based on the detected time information and position information of the arriving photons.

[0088] The superconducting nanowire single-photon imaging device is a linear array detector, including a superconducting delay zone. The superconducting delay zone refers to a delay element, which is used to control the propagation delay of the signal. The delay line can delay the time information of the arrival of the photon in the adjusted spectral distribution signal by introducing a time delay. After the time information is delayed, a plurality of mutually parallel parallel nanowires can detect the time information of the arrival of the photon in the adjusted spectral distribution signal. According to the time difference detected by the plurality of mutually parallel parallel nanowires, the position information of the arrival photon in the adjusted spectral distribution signal is determined.

[0089] In this embodiment, the delay line can ensure that photons arrive at multiple mutually parallel nanowires at different times through different paths by introducing time delay, which helps to determine the position of the photons. Multiple mutually parallel nanowires can detect photons at different positions in parallel, so that the superconducting nanowire single-photon imaging device can detect the arrival time and arrival position of photons more accurately.

[0090] Based on the same inventive concept, the embodiment of the present application also provides a spectrum calibration and detection method applied to the above-mentioned spectrum device. The implementation scheme for solving the problem provided by the method is similar to the implementation scheme recorded in the above-mentioned device, so the specific limitations in one or more spectrum calibration and detection method embodiments provided below can refer to the above-mentioned limitations on the spectrum device, and will not be repeated here.

[0091] In an exemplary embodiment, Figure 4 As shown, the present application provides a spectrum calibration and detection method, which includes the following steps:

[0092] Step 402: split the broadband optical signal to output narrowband monochromatic light.

[0093] Step 404: perform optical signal detection on the narrow-band monochromatic light to obtain a first detection signal.

[0094] Step 406, collecting photon number information of the first detection signal, obtaining broadband tunable monochromatic light according to the photon number information, and performing spectrum calibration according to the broadband tunable monochromatic light; the photon number information includes the number of photons and the arrival time of each photon.

[0095] Step 408, splitting the spectral signal of the target to be measured and outputting a spectral distribution signal.

[0096] Step 410: Perform optical signal detection on the spectral distribution signal to obtain a second detection signal.

[0097] Step 412, collecting the arrival photon information of the second detection signal, and performing spectral detection on the target to be detected based on the arrival photon information; the arrival photon information includes the time information and position information of the arrival photon.

[0098] In this embodiment, by splitting the broadband optical signal, outputting narrowband monochromatic light, performing optical signal detection on the narrowband monochromatic light, obtaining a first detection signal, and outputting broadband tunable monochromatic light according to the photon number information of the first detection signal, a wide-spectrum, high-precision wavelength calibration spectrum is realized, and by splitting the spectral signal of the target to be measured, a spectral distribution signal is output, and optical signal detection is performed on the spectral distribution signal to obtain a second detection signal, and high-precision, high-sensitivity single-photon spectral detection can be achieved according to the arriving photon information of the second detection signal, which effectively solves the problem that the traditional technology cannot realize the integration of broadband tunable monochromatic light output and spectral detection, and can simultaneously meet the needs of broadband spectral calibration and high-sensitivity single-photon spectral detection, thereby realizing wide-spectrum, high-precision spectral calibration and spectral detection.

[0099] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0100] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A spectral device, characterized in that: The device comprises: A monochromator module is used to split the broadband optical signal and output narrow-band monochromatic light; A first detection optical path module, connected to the monochromator module, for performing optical signal detection on the narrow-band monochromatic light to obtain a first detection signal; a data acquisition and processing module, connected to the first detection optical path module, for acquiring photon number information of the first detection signal, acquiring broadband tunable monochromatic light according to the photon number information, and performing spectrum calibration according to the broadband tunable monochromatic light; the photon number information includes the number of photons and the arrival time of each photon; The monochromator module is also used to split the spectral signal of the target to be measured and output a spectral distribution signal; A second detection optical path module, connected to the monochromator module, for performing optical signal detection on the spectral distribution signal to obtain a second detection signal; The data acquisition and processing module is connected to the second detection optical path module, and is also used to collect the arrival photon information of the second detection signal, and perform spectral detection on the target to be detected according to the arrival photon information; the arrival photon information includes the time information and position information of the arrival photon.

2. The device according to claim 1, characterized in that The monochromator module comprises a first incident slit, a second incident slit, a first exit slit, a second exit slit and a grating light splitting component; The grating spectroscopic component is used to perform grating spectroscopic analysis on the broadband optical signal input from the first incident slit to obtain narrow-band monochromatic light, and output the narrow-band monochromatic light through the first exit slit; The grating spectroscopic component is further used to perform grating spectroscopic analysis on the spectrum signal of the target to be measured input from the second incident slit to obtain a spectrum distribution signal, and output the spectrum distribution signal through the second exit slit.

3. The device according to claim 1, characterized in that The first detection optical path module comprises: A coupling unit, used for coupling the narrow-band monochromatic light to a computational spectrum chip; The computational spectrum chip is used to detect the optical signal of the narrow-band monochromatic light to obtain a first detection signal.

4. The device according to claim 3, characterized in that The coupling unit is an optical coupling unit or a spatial coupling unit.

5. The device according to claim 1, characterized in that The second detection optical path module comprises: A relay mirror, used for extending the transmission optical path of the spectral distribution signal and performing beam adjustment on the spectral distribution signal; A linear array single photon detector connected to the relay mirror, used for performing optical signal detection on the adjusted spectral distribution signal to obtain a second detection signal; A refrigeration device, in which the linear array single-photon detector is housed, is used to ensure that the linear array single-photon detector operates within a preset temperature range.

6. The device according to claim 5, characterized in that The linear array single-photon detector comprises a superconducting nanowire single-photon imaging device, which is used to perform optical signal detection on the adjusted spectral distribution signal to obtain a second detection signal.

7. The device according to claim 6, characterized in that The superconducting nanowire single-photon imaging device comprises a superconducting delay region, the superconducting delay region comprises a delay line and a superconducting nanowire detector which are separately arranged, the superconducting nanowire detector comprises a plurality of detection units, each detection unit comprises a plurality of parallel nanowires which are parallel to each other; The delay line is used to delay the time information of the arriving photons in the adjusted spectral distribution signal, and the multiple parallel nanowires are used to detect the time information of the arriving photons in the adjusted spectral distribution signal, and the position information of the arriving photons in the adjusted spectral distribution signal is determined based on the time difference detected by the multiple parallel nanowires, and a second detection signal is obtained based on the detected time information and position information of the arriving photons.

8. The device according to claim 1, characterized in that The data acquisition and processing module comprises: A collection module, which is a time-correlated single-photon counting module, is used to collect photon number information of the first detection signal and to collect arrival photon information of the second detection signal; The terminal is connected to the acquisition module and is used to obtain broadband tunable monochromatic light according to the photon number information, perform spectral calibration according to the broadband tunable monochromatic light, and perform spectral detection on the target to be measured according to the arriving photon information.

9. The device according to claim 1, characterized in that The device further comprises: a light source module connected to the monochromator module, the light source module comprising: Laser, used to output broadband parallel light; The beam adjustment unit is connected to the laser and is used to focus the broadband parallel light to obtain the broadband optical signal.

10. The device according to claim 1, characterized in that The device comprises: a collecting light path module connected to the monochromator module, and the collecting light path module comprises: The converging objective lens is used to collect and collimate the outgoing light signal of the target to be measured to obtain a collimated light signal; A converging lens is connected to the converging objective lens and is used to focus the collimated light signal and output the spectrum signal of the target to be measured to the monochromator module.

11. A spectrum calibration and detection method, characterized in that: The method comprises: Split the broadband optical signal and output narrowband monochromatic light; Performing optical signal detection on the narrow-band monochromatic light to obtain a first detection signal; Collecting photon number information of the first detection signal, acquiring broadband tunable monochromatic light according to the photon number information, and performing spectrum calibration according to the broadband tunable monochromatic light; the photon number information includes the number of photons and the arrival time of each photon; Split the spectral signal of the target to be measured and output the spectral distribution signal; Performing optical signal detection on the spectral distribution signal to obtain a second detection signal; The arriving photon information of the second detection signal is collected, and spectral detection is performed on the target to be detected according to the arriving photon information; the arriving photon information includes time information and position information of the arriving photons.

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