Method for automatically and continuously measuring body resistivity and resistivity line distribution of material

Abstract

The invention discloses a two-stage displacement automatic continuous acquisition and resistivity line distribution measurement method integrating a micron-scale numerical control platform and a nano-scale piezoelectric platform, and relates to a method for measuring the average body resistivity and resistivity distribution of a block or film material. The method aims to solve the problems that the uniformity of the internal conductivity of a material is difficult to measure and continuous measurement is not automatic when the resistivity of the material is measured nowadays. The method is characterized in that firstly, the method integrates a numerical control-piezoelectric two-stage displacement platform, a digital power supply and a digital multimeter to realize automatic movement, acquisition and measurement of a probe with the minimum movement distance greater than or equal to 50nm; 2, by using the method, the distribution uniformity of the conductivity of the sample material on the micro-nano scale can be measured, so that the component, structure and organization distribution uniformity of the material can be reflected from the aspect of electrical property; and 3, samples used in the method have various types and forms. The device can realize automatic, continuous and accurate acquisition and measurement of the conductivity of the sample material on the micro-nano scale, and is suitable for measuring the average volume resistivity and resistivity line distribution of the sample material and detecting the microstructure of the sample material and the uniformity degree of the structure.

Description

Technical Field

[0001] The present invention relates to a method for automatically and continuously measuring the resistivity of a material and the distribution of its resistivity line. background

[0003] With the continuous development and progress of modern science and technology, the measurement of resistivity plays an increasingly important role in the field of materials science and engineering. Measuring the resistivity of materials can be used to help researchers understand the conductive properties of materials, study the electrical properties of materials, and optimize the design of electronic devices. Therefore, it is widely used in semiconductors, electronic materials, metal materials and other fields.

[0004] At present, the basic methods for measuring resistivity mainly include the four-probe method and the Van der Pauw method. The traditional resistivity measurement technology using these basic methods has some limitations, such as only being able to measure the local average value, slow measurement speed, and requiring manual operation. In order to solve these problems, the technology of automated resistivity measurement has gradually attracted the attention of researchers and engineers.

[0005] Actual materials are non-uniform in terms of microscopic composition, organization and structure. It is costly and inefficient to judge them through material analysis and testing methods such as electron microscopy and XRD. The distribution of the material's conductive properties can quickly and efficiently determine the uniformity of the material and guide the rapid iterative optimization of the material preparation process. However, traditional measurement methods often make it difficult to measure the resistivity of the material that varies with position across scales (nanometers to millimeters). In addition, the demand for conductive property distribution measurement of functional gradient materials and heterogeneous joint conductive structures also poses a great challenge to the technology of automated resistivity distribution measurement. Therefore, there is an urgent need for a method that can automatically and continuously measure the resistivity line distribution of materials such as bulk, thin films, functional gradients and heterogeneous joints across scales. Summary of the invention

[0006] The present invention is mainly to solve the various problems that the traditional material resistivity measurement method is difficult to determine the uniformity of the resistivity distribution inside the material and the continuous measurement is non-automatic, and proposes a method for integrating a CNC-piezoelectric two-stage displacement platform ②, a digital power supply ⑩ and a digital multimeter ⑨ to realize the automatic movement of the probe ⑥ with a minimum moving distance greater than or equal to 50nm, and to collect and measure the distribution of resistance lines, and relates to a method for measuring the resistivity of a material.

[0007] The device of the present invention can well realize the automatic acquisition of the cross-scale (nanometer-micrometer-millimeter) line distribution of the material body resistivity, solve the existing technical deficiencies and challenges, and achieve good measurement accuracy, and is characterized by comprising the following steps:

[0008] 1. Cut the sample to be tested into a cylinder with uniform cross-sectional size, grind the surface with sandpaper to 5000# step by step, use anhydrous ethanol or acetone to ultrasonically clean the sample, and dry it for later use.

[0009] 2. Use positive and negative thread bidirectional screw Simultaneously move the first fixed electrode ③ and the second fixed electrode ④ to clamp the sample to be tested together, and use the torque knob ⑦ to accurately adjust the positive and negative thread bidirectional screw The torsional torque is set to accurately set the clamping force of the first fixed electrode ③ and the second fixed electrode ④ on the sample to be tested, and the mechanical self-locking of the positive and negative bidirectional lead screw is used to stably maintain the clamping force of the sample to be tested, so as to achieve good electrical contact between the sample to be tested and the first fixed electrode ③ and the second fixed electrode ④, thereby ensuring the reliability and repeatability of the test results.

[0010] 3: Connect the digital power supply ⑩ to the first and second fixed electrodes, distinguish the positive and negative poles, turn on the digital power meter ⑩, use the power input signal provided by the host computer ⑧ program setting, and pass a high-frequency stable and controllable current.

[0011] 4. Install the first spring probe ⑤ on the three-dimensional fixed probe seat On the NC-piezoelectric dual-stage displacement platform ②, adjust the relative position of the first spring probe ⑤ and the sample to be tested, and ensure good electrical contact between the first spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. Install the second spring probe ⑥ on the CNC-piezoelectric dual-stage displacement platform ②, move the dual-stage platform to adjust the relative position of the second spring probe ⑥ and the sample to be tested, and ensure good electrical contact between the second spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. After the probe connection is completed, connect the digital multimeter ⑨. The first and second spring probes are respectively connected to the positive and negative poles of the digital multimeter ⑨ to collect correct current and voltage data.

[0012] Five: Integration - Collection, the host computer ⑧ software coordinates the control of the CNC-piezoelectric dual-stage displacement platform ②, digital power supply ⑩ and digital multimeter ⑨, controls the probe to achieve automatic movement with a minimum moving distance greater than or equal to 50nm, and controls the digital multimeter ⑨ to automatically read real-time data, and the electronic magnifying glass ① displays the real-time image of the contact between the probe and the sample. The data is automatically saved for subsequent processing.

[0013] The principles and advantages of the present invention are:

[0014] In order to solve the problems that the traditional material resistivity measurement method is difficult to determine the uniformity of the resistivity distribution inside the material and the non-automaticity during continuous measurement, the present invention proposes a method for integrating a CNC-piezoelectric dual-stage displacement platform ②, a digital power supply ⑩ and a digital multimeter ⑨ to realize the automatic movement, collection and measurement of the resistance line distribution with a minimum moving distance of the probe greater than or equal to 50nm, which can measure the volume resistivity of various types of materials and the uniformity of the measured materials. The method can well realize the automatic collection of the cross-scale (nanometer-micrometer-millimeter) line distribution of the volume resistivity of the material, solve the existing technical deficiencies and challenges, and achieve good measurement accuracy.

[0015] When the device of the present invention is in operation, the digital power supply ⑩ powers on the device, the digital multimeter ⑨ collects data, and the data is processed in real time at the receiving end without human intervention. The digital multimeter ⑨ can display the distribution image of the resistance. The device has a real-time monitoring system that can monitor the data during the collection process. If there are any abnormal conditions, adjustments and processing can be made to ensure the automation and accuracy of the measurement process. After the data collection is completed, the data will be automatically stored, and the automatic data export function is supported. The user can export the data by himself, which is convenient for further analysis and processing, and realizes the automatic management and utilization of the data.

[0016] The device of the present invention can be used to measure the resistivity of materials including but not limited to metals, alloys, semiconductors, etc. For different materials, the probe type can be switched and adjusted according to the different characteristics and requirements of the test samples to adapt to the measurement of different samples, including samples of different shapes, sizes and materials, to ensure the stability and reliability of the measurement of different samples.

[0017] The device of the present invention can distinguish the uniformity of materials, and collects parameters by setting a program: sampling interval, sampling times. After testing the set data amount at each measurement point, the probe is lifted and moved to the next test point, and the minimum moving distance is greater than or equal to 50nm. The resistance value distribution curve is drawn based on the collected resistance data. For uniform materials, the resistance value distribution curve should be relatively stable, while for non-uniform materials, the resistance value distribution curve may fluctuate or change irregularly. Therefore, it is feasible to judge the uniformity of the material based on the resistance data image collected by the final processing.

[0018] The automatic measurement system of the device of the present invention adopts precise control and measurement technology, which can provide high-precision and high-stability measurement results, and can well realize the automatic collection of cross-scale (nanometer-micrometer-millimeter) line distribution of material body resistivity, solve the existing technical deficiencies and challenges, and achieve good measurement accuracy. It reduces the introduction and interference of human errors, and is easy to operate and easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a schematic diagram of the structure of a numerical control-piezoelectric platform in an automated resistance measuring device provided in an embodiment of the present invention;

[0020] Figure 2 is a schematic diagram of the connection between the sample stage and the digital power supply provided by an embodiment of the present invention;

[0021] Figure 3 This is an image of the connection between the probe on the sample table and the digital multimeter provided by an embodiment of the present invention;

[0022] Figure 4 This is a data image of a p-type skutterudite sample tested in Example 1 of the present invention;

[0023] Figure 5 is a data image of a Cu wafer sample tested in Example 4 of the present invention;

[0024] Figure 6 is a data image of an Invar alloy sample tested in Example 6 of the present invention;

[0025] Reference numerals:

[0026] ①: Electronic magnifying glass;

[0027] ②: CNC-piezoelectric dual-stage displacement platform;

[0028] ③: first fixed electrode;

[0029] ④: second fixed electrode;

[0030] ⑤: The second spring probe;

[0031] ⑥: The first spring probe;

[0032] ⑦: Torque knob;

[0033] ⑧: Host computer;

[0034] ⑨: Digital multimeter;

[0035] ⑩: Digital power supply;

[0036] Three-dimensional fixed probe holder;

[0037] Bidirectional screw with positive and negative teeth; DETAILED DESCRIPTION

[0038] The scope of application of the technical solution of the present invention is not limited to the specific implementation methods listed below, but also includes other methods for automatically measuring resistivity of any other type of material. Please note that the terms such as connection mentioned in the present invention may include various forms, such as fixed connection, integrated connection, direct or indirect connection, electrical connection, etc., all of which belong to connection methods.

[0039] Specific implementation method 1: Device diagram reference Figure 1 The present invention is mainly to solve the various problems that the traditional material resistivity measurement method is difficult to determine the uniformity of the resistivity distribution inside the material and the continuous measurement is non-automatic, and proposes a method for integrating a CNC-piezoelectric two-stage displacement platform ②, a digital power supply ⑩ and a digital multimeter ⑨ to realize the automatic movement of the probe ⑥ with a minimum moving distance greater than or equal to 50nm, collect and measure the distribution of resistance lines, and relates to a method for measuring the resistivity of a material.

[0040] The device of the present invention can well realize the automatic acquisition of the cross-scale (nanometer-micrometer-millimeter) line distribution of the material body resistivity, solve the existing technical deficiencies and challenges, and achieve good measurement accuracy. Its characteristics include the following steps:

[0041] 1. Cut the sample to be tested into a cylinder with uniform cross-sectional size, grind the surface with sandpaper to 5000# step by step, use anhydrous ethanol or acetone to ultrasonically clean the sample, and dry it for later use.

[0042] 2. Use positive and negative thread bidirectional screw Simultaneously move the first fixed electrode ③ and the second fixed electrode ④ to clamp the sample to be tested together, and use the torque knob ⑦ to accurately adjust the positive and negative thread bidirectional screw The torsional torque is set to accurately set the clamping force of the first fixed electrode ③ and the second fixed electrode ④ on the sample to be tested, and the mechanical self-locking of the positive and negative bidirectional lead screw is used to stably maintain the clamping force of the sample to be tested, so as to achieve good electrical contact between the sample to be tested and the first fixed electrode ③ and the second fixed electrode ④, thereby ensuring the reliability and repeatability of the test results.

[0043] 3: Connect the digital power supply ⑩ to the first and second fixed electrodes, distinguish the positive and negative poles, turn on the digital power meter ⑩, use the power input signal provided by the host computer ⑧ program setting, and pass a high-frequency stable and controllable current.

[0044] 4. Install the first spring probe ⑤ on the three-dimensional fixed probe seat On the NC-piezoelectric dual-stage displacement platform ②, adjust the relative position of the first spring probe ⑤ and the sample to be tested, and ensure good electrical contact between the first spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. Install the second spring probe ⑥ on the CNC-piezoelectric dual-stage displacement platform ②, move the dual-stage platform to adjust the relative position of the second spring probe ⑥ and the sample to be tested, and ensure good electrical contact between the second spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. After the probe connection is completed, connect the digital multimeter ⑨. The first and second spring probes are respectively connected to the positive and negative poles of the digital multimeter ⑨ to collect correct current and voltage data.

[0045] Five: Integration - Collection, the host computer ⑧ software coordinates the control of the CNC-piezoelectric dual-stage displacement platform ②, digital power supply ⑩ and digital multimeter ⑨, controls the probe to achieve automatic movement with a minimum moving distance greater than or equal to 50nm, and controls the digital multimeter ⑨ to automatically read real-time data, and the electronic magnifying glass ① displays the real-time image of the contact between the probe and the sample. The data is automatically saved for subsequent processing.

[0046] The principles and advantages of the present invention are:

[0047] In order to solve the problems that the traditional material resistivity measurement method is difficult to determine the uniformity of the resistivity distribution inside the material and the non-automaticity during continuous measurement, the present invention proposes a method for integrating a CNC-piezoelectric dual-stage displacement platform ②, a digital power supply ⑩ and a digital multimeter ⑨ to realize the automatic movement, collection and measurement of the resistance line distribution with a minimum moving distance of the probe greater than or equal to 50nm, which can measure the volume resistivity of various types of materials and the uniformity of the measured materials. The method can well realize the automatic collection of the cross-scale (nanometer-micrometer-millimeter) line distribution of the volume resistivity of the material, solve the existing technical deficiencies and challenges, and achieve good measurement accuracy.

[0048] When the device of the present invention is in operation, the digital power supply ⑩ powers on the device, the digital multimeter ⑨ collects data, and the data is processed in real time at the receiving end without human intervention. The digital multimeter ⑨ can display the distribution image of the resistance. The device has a real-time monitoring system that can monitor the data during the collection process. If there are any abnormal conditions, adjustments and processing can be made to ensure the automation and accuracy of the measurement process. After the data collection is completed, the data will be automatically stored, and the automatic data export function is supported. The user can export the data by himself, which is convenient for further analysis and processing, and realizes the automatic management and utilization of the data.

[0049] The device of the present invention can be used to measure the resistivity of materials including but not limited to metals, alloys, semiconductors, etc. For different materials, the probe type can be switched and adjusted according to the different characteristics and requirements of the test samples to adapt to the measurement of different samples, including samples of different shapes, sizes and materials. The stability and reliability of the measurement of different samples can be ensured.

[0050] The device of the present invention can distinguish the uniformity of materials, and collect parameters by setting the program: sampling interval, sampling times. After each measurement point tests the set data volume, the probe automatically lifts and moves to the next test point, and the minimum moving distance is greater than or equal to 50nm. The resistance value distribution curve is drawn based on the collected resistance data. For uniform materials, the resistance value distribution curve should be relatively stable, while for non-uniform materials, the resistance value distribution curve may fluctuate or change irregularly. Therefore, it is feasible to judge the uniformity of the material based on the resistance data image collected by the final processing.

[0051] The automatic measurement system of the device of the present invention adopts precise control and measurement technology, which can provide high-precision and high-stability measurement results, and can well realize the automatic collection of cross-scale (nanometer-micrometer-millimeter) line distribution of material body resistivity, solve the existing technical deficiencies and challenges, and achieve good measurement accuracy. It reduces the introduction and interference of human errors, and is easy to operate and easy to use.

[0052] Specific implementation method 2: The difference between this implementation method and the above-mentioned specific implementation method is that the sample used is an alloy. The alloy material can be: Cu-based alloy, Al-based alloy, Ni-based alloy, etc.

[0053] Specific implementation method three: This implementation method is different from the previous specific implementation methods in that the sample used is a semiconductor material. The semiconductor material includes but is not limited to the following types: silicon (Si), germanium (Ge), gallium arsenide (GaAs), cadmium selenide (CdSe), zinc selenide (ZnSe), bismuth antimonide, skutterudite and other materials.

[0054] Specific implementation method 4: This implementation method is different from the above-mentioned specific implementation methods in that the geometric shape of the sample to be measured is changed, including but not limited to the following types: cylinder, film, etc.

[0055] Specific implementation method 5: This implementation method is different from the above-mentioned specific implementation methods in that the ambient humidity during the measurement process is 60%. The ambient humidity can be within any adjustable range.

[0056] Specific implementation example 6: This implementation example is different from the previous specific implementation examples in that the current provided by the digital power supply device is 500 mA, but it is not limited to 500 mA, and a reasonable current size can also be provided according to the size of the sample resistance.

[0057] Embodiment 1: This embodiment is a method for automatically and continuously collecting and measuring the distribution of resistance lines by an integrated CNC-piezoelectric dual-stage displacement platform ②, which is carried out according to the following steps:

[0058] 1. In an indoor environment with a humidity of 40%, the unannealed p-type skutterudite sample to be tested is cut into cylinders with uniform cross-sectional size, the surface is polished to 5000# with sandpaper step by step, the sample is ultrasonically cleaned with anhydrous ethanol or acetone, and dried for later use.

[0059] 2. Use positive and negative tooth bidirectional screw Simultaneously move the first fixed electrode ③ and the second fixed electrode ④ to clamp the sample to be tested together, and use the torque knob ⑦ to accurately adjust the positive and negative thread bidirectional screw The torsional torque is set accurately to provide a 30N clamping force for the sample to be tested by the first fixed electrode ③ and the second fixed electrode ④. The mechanical self-locking of the positive and negative tooth bidirectional screw rod is used to stably maintain the clamping force of the sample to be tested, so as to achieve good electrical contact between the sample to be tested and the first fixed electrode ③ and the second fixed electrode ④. Connect the digital power supply ⑩ to the first and second fixed electrodes, turn on the digital power meter ⑩, use the program setting to provide 100mA power supply, and pass high-frequency stable controllable current. Install the first spring probe ⑤ on the three-dimensional fixed probe seat ⑦, adjust the relative position of the first spring probe and the sample to be tested, and ensure good electrical contact between the first spring probe ⑤ and the sample to be tested by a certain amount of downward pressure on the spring probe. Install the second spring probe ⑥ on the CNC-piezoelectric two-stage displacement platform ②, move the two-stage platform to adjust the relative position of the second spring probe and the sample to be tested, and ensure good electrical contact between the second spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. After the probe connection is completed, connect the digital multimeter ⑨. The first and second spring probes are respectively connected to the positive and negative poles of the digital multimeter ⑨ to collect correct current and voltage data.

[0060] 3. Collect data. The upper computer ⑧ software controls the probe to realize the automatic movement of the probe with a moving distance of 10μm, realizes fixed-point measurement, collects 100 data points at each measuring point and processes the feedback in the digital multimeter ⑨ for data processing, and automatically transfers to the next measuring point after 10μm to continue measuring 100 data. After completing the data feedback, it continues to the next point, and gradually proceeds to 500μm. Finally, the obtained data is processed to realize the automatic measurement of the p-type skutterudite resistance of the sample. The test data is shown in the figure Figure 4 shown.

[0061] Embodiment 2: This embodiment is a method for automatically and continuously collecting and measuring the distribution of resistance lines using an integrated CNC-piezoelectric dual-stage displacement platform ②, which is performed in the following steps:

[0062] 1. In an indoor environment with a humidity of 60%, the unannealed p-type skutterudite sample to be tested is cut into cylinders with uniform cross-sectional size, the surface is polished to 5000# with sandpaper step by step, the sample is ultrasonically cleaned with anhydrous ethanol or acetone, and dried for later use.

[0063] 2. Use positive and negative tooth bidirectional screw Simultaneously move the first fixed electrode ③ and the second fixed electrode ④ to clamp the sample to be tested together, and use the torque knob ⑦ to accurately adjust the positive and negative thread bidirectional screw The first fixed electrode ③ and the second fixed electrode ④ are precisely set to provide a 30N clamping force for the sample. The mechanical self-locking stably maintains the clamping force of the sample to be tested, and achieves good electrical contact between the sample to be tested and the first fixed electrode ③ and the second fixed electrode ④. Connect the digital power supply ⑩ to the first and second fixed electrodes, turn on the digital power meter ⑩, use the program setting to provide 100mA power supply, and pass high-frequency stable controllable current. Install the first spring probe ⑤ on the three-dimensional fixed probe seat ⑦, adjust the relative position of the first spring probe ⑤ and the sample to be tested, and ensure the good electrical contact between the first spring probe ⑤ and the sample to be tested by a certain amount of downward pressure on the spring probe. Install the second spring probe ⑥ on the CNC-piezoelectric two-stage displacement platform ②, move the two-stage platform to adjust the relative position of the second spring probe and the sample to be tested, and ensure the good electrical contact between the second spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. After the probe connection is completed, connect the digital multimeter ⑨. The first and second spring probes are respectively connected to the positive and negative poles of the digital multimeter to collect correct current and voltage data

[0064] 3. Collect data. The upper computer ⑧ software controls the probe to realize automatic movement of the probe at a distance of 10μm to achieve fixed-point measurement. 50 data points are collected at each measuring point and the feedback is processed and processed in the digital multimeter ⑨ for data processing. It automatically moves to the next measuring point after 10μm to continue measuring 50 data. After completing the data feedback, it continues to the next point, and gradually proceeds to 500μm. Finally, the obtained data is processed.

[0065] Embodiment 3: This embodiment is a method for automatically and continuously collecting and measuring the distribution of resistance lines by an integrated CNC-piezoelectric dual-stage displacement platform ②, which is carried out according to the following steps:

[0066] 1. In an indoor environment with a humidity of 40%, the annealed p-type skutterudite sample to be tested is cut into cylinders with uniform cross-sectional size, the surface is polished to 5000# with sandpaper step by step, the sample is ultrasonically cleaned with anhydrous ethanol or acetone, and dried for later use.

[0067] 2. Use positive and negative tooth bidirectional screw At the same time, move the first fixed electrode ③ and the second fixed electrode ④ to clamp the sample to be tested together, use the torque knob ⑦ to accurately adjust the torsional torque of the positive and negative thread bidirectional screw, accurately set the first fixed electrode ③ and the second fixed electrode ④ to provide a 30N clamping force for the sample to be tested, and use the positive and negative thread bidirectional screw The mechanical self-locking stably maintains the clamping force of the sample to be tested, and achieves good electrical contact between the sample to be tested and the first fixed electrode ③ and the second fixed electrode ④. Connect the digital power supply ⑩ to the first and second fixed electrodes, turn on the digital power meter, use the program setting to provide 100mA power supply, and pass high-frequency stable controllable current. Install the first spring probe ⑤ on the three-dimensional fixed probe seat ⑦, adjust the relative position of the first spring probe and the sample to be tested, and ensure good electrical contact between the first spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. Install the second spring probe ⑥ on the CNC-piezoelectric two-stage displacement platform ②, move the two-stage platform to adjust the relative position of the second spring probe ⑥ and the sample to be tested, and ensure good electrical contact between the second spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. After the probe connection is completed, connect the digital multimeter ⑨. The first and second spring probes are respectively connected to the positive and negative poles of the digital multimeter to collect correct current and voltage data.

[0068] 3: Collect data. The upper computer ⑧ software controls the probe to realize automatic movement of the probe distance 10μm, realize fixed-point measurement, collect 100 data points at each measuring point and process the feedback in the digital multimeter ⑨ for data processing, and automatically transfer to the next measuring point after 10μm to continue measuring 100 data. After completing the data feedback, continue to the next point, and gradually proceed to 500μm. Finally, the obtained data is processed.

[0069] Embodiment 4: This embodiment is a method for automatically and continuously collecting and measuring the distribution of resistance lines using an integrated CNC-piezoelectric dual-stage displacement platform ②, which is performed in the following steps:

[0070] 1. In an indoor environment with a humidity of 40%, cut the Cu sample to be tested into a cylinder with uniform cross-sectional size, polish the surface to 5000# with sandpaper step by step, use anhydrous ethanol or acetone to ultrasonically clean the sample, and dry it for later use.

[0071] 2. Use positive and negative tooth bidirectional screw Simultaneously move the first fixed electrode ③ and the second fixed electrode ④ to clamp the sample to be tested together, and use the torque knob ⑦ to accurately adjust the positive and negative thread bidirectional screw The torsional torque is set accurately to provide a 30N clamping force for the sample to be tested by the first fixed electrode ③ and the second fixed electrode ④. The mechanical self-locking of the positive and negative tooth bidirectional screw rod is used to stably maintain the clamping force of the sample to be tested, so as to achieve good electrical contact between the sample to be tested and the first fixed electrode and the second fixed electrode. Connect the digital power supply to the first and second fixed electrodes, turn on the digital power meter ⑩, use the program setting to provide a 500mA power supply, and pass a high-frequency stable controllable current. Install the first spring probe ⑤ on the three-dimensional fixed probe seat ⑦, adjust the relative position of the first spring probe ⑥ and the sample to be tested, and ensure good electrical contact between the first spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. Install the second spring probe ⑥ on the CNC-piezoelectric two-stage displacement platform ②, move the two-stage platform to adjust the relative position of the second spring probe ⑥ and the sample to be tested, and ensure good electrical contact between the second spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. After the probe connection is completed, connect the digital multimeter ⑨. The first and second spring probes are respectively connected to the positive and negative poles of the digital multimeter to collect correct current and voltage data.

[0072] 3: Collect data. The upper computer ⑧ software controls the probe to realize the automatic movement of the probe with a moving distance of 10μm, realizes fixed-point measurement, collects 50 data points at each measurement point and processes the feedback in the digital multimeter ⑨ for data processing, and automatically transfers to the next measurement point after 10μm to continue measuring 50 data. After completing the data feedback, continue to the next point, and gradually proceed to 500μm. Finally, the obtained data is processed. The automatic measurement of the resistance of the Cu sample is realized. The test data is shown in the figure Figure 5 shown.

[0073] Embodiment 6: This embodiment is a method for automatically and continuously collecting and measuring the distribution of resistance lines using an integrated CNC-piezoelectric dual-stage displacement platform ②, which is performed in the following steps:

[0074] 1: In an indoor environment with a humidity of 40%, prepare the Invar alloy sample to be tested, polish the surface with sandpaper to 5000# step by step, use anhydrous ethanol or acetone to ultrasonically clean the sample, and dry it for later use.

[0075] 2. Use positive and negative thread bidirectional screw Simultaneously move the first fixed electrode ③ and the second fixed electrode ④ to clamp the sample to be tested together, and use the torque knob ⑦ to accurately adjust the positive and negative thread bidirectional screw The first fixed electrode ③ and the second fixed electrode ④ are precisely set to provide a 30N clamping force for the sample. The mechanical self-locking stably maintains the clamping force of the sample to be tested, and achieves good electrical contact between the sample to be tested and the first fixed electrode and the second fixed electrode. Connect the digital power supply ⑩ to the first and second fixed electrodes, turn on the digital power meter, use the program setting to provide 500mA power, and pass high-frequency stable controllable current. Install the first spring probe ⑤ on the three-dimensional fixed probe seat ⑦, adjust the relative position of the first spring probe and the sample to be tested, and ensure good electrical contact between the first spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. Install the second spring probe ⑥ on the CNC-piezoelectric two-stage displacement platform ②, move the two-stage platform to adjust the relative position of the second spring probe ⑥ and the sample to be tested, and ensure good electrical contact between the second spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe. After the probe connection is completed, connect the digital multimeter ⑨. The first and second spring probes are respectively connected to the positive and negative poles of the digital multimeter to collect correct current and voltage data.

[0076] 3. Collect data. The upper computer⑧ software controls the probe to realize the automatic movement of the probe with a moving distance of 10μm, realizes fixed-point measurement, collects 50 data points at each measurement point and processes the feedback in the digital multimeter⑨ for data processing, and automatically transfers to the next measurement point after 10μm to continue measuring 50 data. After completing the data feedback, it continues to the next point, and gradually proceeds to 500μm. Finally, the obtained data is processed. The automatic measurement of the resistance of the Invar alloy sample is realized. The test data is shown in the figure Figure 6 shown.

Claims

1. A method for automatically and continuously measuring the volume resistivity and resistivity line distribution of a material, the method being carried out in the following steps:

1. Cut, grind, clean and dry the samples to be tested; Second: Use the forward and reverse bidirectional screw to simultaneously move the first fixed electrode and the second fixed electrode to clamp the sample to be tested, and use the torque knob to accurately adjust the torsional torque of the forward and reverse bidirectional screw; 3. Turn on the power and connect the digital power supply to the first and second fixed electrodes; Fourth: Install the first spring probe on the three-dimensional fixed probe seat, adjust the relative position of the first spring probe and the sample to be tested, and ensure good electrical contact between the first spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe; Install the second spring probe on the CNC-piezoelectric two-stage displacement platform, move the two-stage platform to adjust the relative position of the second spring probe and the sample to be tested, and ensure good electrical contact between the second spring probe and the sample to be tested by a certain amount of downward pressure on the spring probe; After the probe connection is completed, connect the digital multimeter; 5. Integration - Acquisition. The host computer software coordinates the control of the CNC-piezoelectric dual-stage displacement platform, digital power supply and digital multimeter to control the probe to achieve automatic movement with a minimum moving distance greater than or equal to 50nm. At the same time, it controls the digital multimeter to automatically read real-time data, and the electronic magnifying glass displays the real-time image of the contact between the probe and the sample; the data is automatically saved for subsequent processing.

2. The method for automatically and continuously measuring the volume resistivity and resistivity line distribution of a material according to claim 1, characterized in that: The cutting, grinding and cleaning process described in step 1 is as follows: the sample to be tested is cut into a cylinder with uniform cross-sectional size, the surface is gradually grinded to 5000# with sandpaper, the sample is ultrasonically cleaned with anhydrous ethanol or acetone, and dried for later use.

3. The method for automatically and continuously measuring the volume resistivity and resistivity line distribution of a material according to claim 1, characterized in that: The samples described in step 1 include metal samples, alloy samples, semiconductor material samples and the like.

4. The method for automatically and continuously measuring the volume resistivity and resistivity line distribution of a material according to claim 3, characterized in that: The metal sample is Cu, Fe, Zn, Ni, Co or Cr; the alloy material is Cu-based alloy, Fe-based alloy, Zn-based alloy, Ni-based alloy, Co-based alloy or Cr-based alloy; the semiconductor material is silicon (Si), germanium (Ge), gallium nitride (GaN), etc.

5. The method for automatically and continuously measuring the volume resistivity and resistivity line distribution of a material according to claim 4, characterized in that: The Cu-based alloy is CuW or CuMo, etc.; the Fe-based alloy is FeW, FeMo, FeCr or FeCoNi, etc.; the Zn-based alloy is AlCuZn, AlZn, etc.; the Ni-based alloy is NiW, NiMo, etc.; the Co-based alloy is CoW, CoNi or CoFe, etc.; the Cr-based alloy is CrW, CrMo, or CrFeNi, etc.

6. The method for automatically and continuously measuring the volume resistivity and resistivity line distribution of a material according to claim 1, characterized in that: The forward and reverse bidirectional screw in step 2 uses a torque knob to precisely adjust its torsional torque, thereby accurately setting the clamping force of the first fixed electrode and the second fixed electrode on the sample to be tested.

7. The method for automatically and continuously measuring the volume resistivity and resistivity line distribution of a material according to claim 1, characterized in that: In step 2, the mechanical self-locking of the forward and reverse bidirectional screw rod is used to stably maintain the clamping force of the sample to be tested, so that good electrical contact between the sample to be tested and the first fixed electrode and the second fixed electrode can be achieved to ensure the reliability and repeatability of the test results.

8. The method for automatically and continuously measuring the volume resistivity and resistivity line distribution of a material according to claim 1, characterized in that: In step three, connect the digital power supply to the electrode, distinguish the positive and negative poles, turn on the digital power meter, and then use the power input signal provided by the host computer program setting to pass a high-frequency stable and controllable current through the device.

9. The method for automatically and continuously measuring the volume resistivity and resistivity line distribution of a material according to claim 1, characterized in that: In step 4, the probes are connected to a digital multimeter, wherein the first and second spring probes are connected to the positive and negative poles of the digital multimeter, respectively, to collect correct current and voltage data.

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