Mass spectrometer and imaging method of mass spectrometer

Abstract

The invention discloses a mass spectrometer and an imaging method thereof, the mass spectrometer comprises a sample introduction system, an ion source, a mass analyzer and a detector, the sample introduction system comprises a target plate for placing a sample to be detected, the ion source comprises an excitation system and an image pickup system, and the image pickup system comprises a lens assembly and an imaging assembly; the lens assembly is located between the target plate and the imaging assembly, an included angle is formed between the target plate and the extending face of the imaging assembly, the extending face of the target plate, the extending face of the lens assembly and the extending face of the imaging assembly intersect on the same straight line, and the lens assembly is movably arranged between the target plate and the imaging assembly. Therefore, the Gremer's law is applied to the mass spectrometer, the technical prejudice of an existing mass spectrometer on the design of an ion source camera system is broken through, the mass spectrometer is simpler in structure and more reasonable in spatial layout, high-precision mass spectrum imaging can be achieved, the central point and the boundary point on the target plate can be clearly imaged, the imaging definition is improved, and imaging is completed.

Description

Technical Field

[0001] The present invention relates to the technical field of mass spectrometer imaging, and in particular to a mass spectrometer and a mass spectrometer imaging method. Background Art

[0002] In the prior art, in the field of mass spectrometer imaging, the lens system is usually tilted relative to the target plate, and the imaging system is also tilted relative to the target plate, wherein the target plate is at a certain angle to the optical axis, the lens system and the imaging system are both perpendicular to the optical axis, and the optical axis axis of the lens system and the optical axis axis of the imaging system are distributed at a certain angle relative to the position of the target plate. As a result, the target plate, the lens system and the imaging system cannot be perpendicular to the optical axis at the same time, which will result in the target plate being unable to be clearly imaged within the entire field of view, resulting in blurred imaging of the edge position of the sample to be detected and low overall clarity of the imaging. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide a mass spectrometer that breaks the technical prejudice of the existing mass spectrometer on the design of the ion source camera system, can improve the imaging clarity, and perfect the imaging.

[0004] The present invention further proposes an imaging method for the mass spectrometer.

[0005] A mass spectrometer according to an embodiment of the present invention comprises: an injection system, an ion source, a mass analyzer and a detector, wherein the injection system comprises a target plate for placing a sample to be detected, the ion source comprises an excitation system and a camera system, the camera system comprises a lens assembly and an imaging assembly, the target plate is arranged at an angle, the lens assembly is located between the target plate and the imaging assembly, the target plate and an extended surface of the imaging assembly have an included angle, and the extended surface of the target plate, the extended surface of the lens assembly and the extended surface of the imaging assembly intersect in a straight line, and the lens assembly is movably arranged between the target plate and the imaging assembly; the sample to be detected on the target plate becomes a charged ion under the action of the ion source, enters the mass analyzer for mass analysis, and finally enters the detector to form a signal.

[0006] According to the mass spectrometer of the embodiment of the present invention, the extended surface of the target plate, the extended surface of the lens assembly and the extended surface of the imaging assembly intersect in a straight line so that the target plate, the lens assembly and the imaging assembly satisfy Schaum's law, and Schaum's law is applied to the mass spectrometer, breaking the technical prejudice of the existing mass spectrometer on the design of the camera system. The mass spectrometer of the present invention has a simpler structure and a more reasonable spatial layout, and can achieve high-precision mass spectrometry imaging and perfect imaging of the target plate within a large field of view, thereby expanding the projection depth of field, improving the clarity of the edge and center of the target plate, so that both the center point and the boundary point on the target plate can be clearly imaged, thereby improving the imaging clarity and perfecting the imaging.

[0007] Specifically, the lens assembly is arranged to be translated along the optical axis of the lens assembly, and the extended surface of the translated lens assembly intersects with the extended surface of the target plate and the extended surface of the imaging assembly in a straight line.

[0008] Furthermore, the lens assembly is rotatably arranged, and the extended surface of the rotated lens assembly, the extended surface of the target plate and the extended surface of the imaging assembly intersect in a straight line.

[0009] Furthermore, the lens assembly rotates synchronously during the translation process, and the extended surface of the lens assembly, the extended surface of the target plate and the extended surface of the imaging assembly after translation and rotation are compared to a straight line.

[0010] In some embodiments, the lens assembly is a single lens.

[0011] In other embodiments, the lens assembly is a plurality of lenses.

[0012] The imaging method of the mass spectrometer according to an embodiment of the present invention is applicable to the mass spectrometer described in any one of the above embodiments, and the imaging method includes: placing the sample to be detected on the target plate of the injection system; the ion source makes the sample to be detected become charged ions; the ion source transmits the charged ions to the mass analyzer; the mass analyzer performs mass analysis on the charged ions, and the detector detects the charged ions.

[0013] In some embodiments, the step in which the ion source makes the sample to be detected become charged ions includes: the camera system of the ion source includes a lens assembly and an imaging assembly, the extended surface of the target plate, the extended surface of the lens assembly and the extended surface of the imaging assembly intersect in a straight line; the material on the surface of the sample to be detected is ionized to form charged ions; the lens assembly is used to observe the conditions of the target point and the laser; and the imaging assembly is used to image the sample to be detected.

[0014] In some embodiments, the position of the imaging assembly is determined based on the position of the target plate and the lens assembly and the magnification of the object image.

[0015] In some embodiments, the position of the lens assembly is determined based on the position of the target plate and the imaging assembly and the magnification of the object image.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 is a first schematic diagram of a mass spectrometer according to an embodiment of the present invention;

[0019] Figure 2 is a second schematic diagram of a mass spectrometer according to an embodiment of the present invention;

[0020] Figure 3 is a third schematic diagram of a mass spectrometer according to an embodiment of the present invention;

[0021] Figure 4 is a table of parameters corresponding to different magnifications of the object image when the angle between the optical axis of the lens assembly and the vertical axis of the target plate surface is 30° according to an embodiment of the present invention;

[0022] Figure 5 is a schematic diagram of a mass spectrometer according to an embodiment of the present invention, in which the angle between the optical axis of the lens assembly and the vertical axis of the target plate surface is 30° and the object image magnification is 0.5 times;

[0023] Figure 6 It corresponds to Figure 5 The modulation transfer function of

[0024] Figure 7 is a schematic diagram of a mass spectrometer according to an embodiment of the present invention, in which the angle between the optical axis of the lens assembly and the vertical axis of the target plate surface is 30° and the object image magnification is 1 times;

[0025] Figure 8 It corresponds to Figure 7 The modulation transfer function of

[0026] Fig. 9 is a schematic diagram of a mass spectrometer according to an embodiment of the present invention, in which the angle between the optical axis of the lens assembly and the vertical axis of the target plate surface is 30° and the object image magnification is 2 times;

[0027] Fig.10 It corresponds to Fig. 9 The modulation transfer function of

[0028] Fig.11 is a table of parameters corresponding to different magnifications of the object image when the angle between the optical axis of the lens assembly and the vertical axis of the target plate surface is 45° according to an embodiment of the present invention;

[0029] Fig.12 is a schematic diagram of a mass spectrometer according to an embodiment of the present invention, in which the angle between the optical axis of the lens assembly and the vertical axis of the target plate surface is 45° and the object image magnification is 0.5 times;

[0030] Fig.13 It corresponds to Fig.12 The modulation transfer function of

[0031] Fig.14 is a schematic diagram of a mass spectrometer according to an embodiment of the present invention, in which the angle between the optical axis of the lens assembly and the vertical axis of the target plate surface is 45° and the object image magnification is 1 times;

[0032] Fig.15 It corresponds to Fig.14 The modulation transfer function of

[0033] Fig.16 is a schematic diagram of a mass spectrometer according to an embodiment of the present invention, in which the angle between the optical axis of the lens assembly and the vertical axis of the target plate surface is 45° and the object image magnification is 2 times;

[0034] Fig.17 It corresponds to Fig.16 The modulation transfer function of

[0035] Fig.18 Schematic diagram of a lens assembly including two lenses according to an embodiment of the present invention.

[0036] Reference numerals:

[0037] Mass spectrometer 100,

[0038] Target plate 10,

[0039] Lens assembly 20, single lens 21, first lens 22, second lens 23,

[0040] Imaging assembly 30, optical axis 40, target plate plane vertical axis 50. DETAILED DESCRIPTION

[0041] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0042] Reference below Figure 1-Figure 18 A mass spectrometer 100 and an ion source according to an embodiment of the present invention are described.

[0043] like Figure 1-Figure 3 As shown, the mass spectrometer 100 according to an embodiment of the present invention includes: a sample injection system, an ion source, a mass analyzer and a detector.

[0044] Among them, the sampling system includes a target plate 10 for placing a sample to be detected, the ion source includes an excitation system and a camera system, and the camera system includes a lens assembly 20 and an imaging assembly 30; the lens assembly 20 is located between the target plate 10 and the imaging assembly 30, and the extended surfaces of the target plate 10 and the imaging assembly 30 have an angle, and the extended surfaces of the target plate 10, the lens assembly 20 and the imaging assembly 30 intersect in a straight line, and the lens assembly 20 is movably arranged between the target plate 10 and the imaging assembly 30; the sample to be detected on the target plate 10 becomes a charged ion under the action of the ion source, and the charged ion enters the mass analyzer for mass analysis, and finally enters the detector to form a signal.

[0045] Since the target plate, lens assembly and imaging assembly in the prior art cannot simultaneously satisfy the perpendicularity to the optical axis, the target plate 10 cannot be clearly imaged within the entire field of view, resulting in fuzzy imaging of the edge position of the sample to be detected. In order to obtain a comprehensive and clear image of the sample to be detected, Schaum's law can be applied to the mass spectrometer 100 of the embodiment of the present invention, even if the extended surface of the target plate 10 in the injection system, the extended surface of the lens assembly 20 in the camera system and the extended surface of the imaging assembly 30 intersect in a straight line.

[0046] The sample to be detected is placed on the target plate 10 of the injection system. Under the action of the ion source, the sample to be detected becomes charged ions and is introduced into the mass analyzer by the ion source. The mass analyzer performs mass analysis on the charged ions introduced therein, and finally enters the detector to form a signal.

[0047] Specifically, the target plate 10 is used to place the sample to be detected, the lens assembly 20 is arranged between the target plate 10 and the imaging assembly 30, the imaging assembly 30 is used to image the sample to be detected, the target plate 10 and the lens assembly 20 are arranged non-parallel, and the imaging assembly 30 and the lens assembly 20 are arranged non-parallel, and the positions of the lens assembly 20 and the imaging assembly 30 are adjusted so that the extended surface of the target plate 10, the extended surface of the lens assembly 20 and the extended surface of the imaging assembly 30 intersect in a straight line.

[0048] When the extended surface of the target plate 10, the extended surface of the lens assembly 20 and the extended surface of the imaging assembly 30 intersect in a straight line, Schaum's law is satisfied. Schaum's law is applied to the imaging field. When the extended surfaces of the target surface, the imaging plane and the lens plane intersect in a straight line, a comprehensive and clear image can be obtained. Figure 1As shown, three dotted lines represent three planes, and the three dotted lines intersect at the same point. Applying Sham's law to the mass spectrometry imaging system can achieve clear imaging of a large field of view of the target plate 10, with clear center points and boundaries of the target plate 10, and expand the projection depth of field.

[0049] The derivation is as follows, Figure 3 As shown, let OP be the lens plane, AB be the target plane, the extended line of AB intersecting the lens plane is P', MN be the imaging plane, the extended line of MN intersecting the lens plane is P; the image point of A is M, the image point of B is N, and f is the focal length. In the figure, d1 = AO, d2 = OM, x1 = FA, x2 = GM, y1 = BF, y2 = NG. To prove that P' and P are co-points, we only need to prove that d1 × tanα = d2 × tanβ.

[0050] According to the image imaging formula:

[0051] From ΔOBF∽ΔONG, we can get: Right now

[0052] Substituting ③ into ②, we get: Right now Right now

[0053] Available

[0054] Same reason

[0055] In ΔOBF and ΔMNG, we can get

[0056]

[0057] Substituting ④ and ⑤ into ⑥, we get:

[0058] Substituting ① into ⑦, we get:

[0059] That is: d1·tanα=d2·tanβ

[0060] Thus, it is verified that all points on the sample plane AB to be detected and all points imaged on the imaging plane MN conform to the law of lens imaging and are clear.

[0061] According to the mass spectrometer 100 of the embodiment of the present invention, the extended surface of the target plate 10, the extended surface of the lens assembly 20 and the extended surface of the imaging assembly 30 intersect in a straight line so that the target plate 10, the lens assembly 20 and the imaging assembly 30 satisfy Schaum's law. The Schaum's law is applied to the mass spectrometer 100, breaking the technical prejudice of the existing mass spectrometer on the design of the camera system. The mass spectrometer of the present invention has a simpler structure and a more reasonable spatial layout, and can achieve high-precision mass spectrometry imaging, and can achieve perfect imaging of the target plate 10 within a large field of view, expand the projection depth of field, improve the clarity of the edge and center of the target plate 10, so that both the center point and the boundary point on the target plate 10 can be clearly imaged, improve the imaging clarity, and improve the imaging.

[0062] Applying Schaum's law to the mass spectrometer 100 can break the technical prejudice of existing mass spectrometers on camera system design, which is reflected in the following aspects:

[0063] First, the structure of the mass spectrometer 100 of the present invention is simpler and the spatial layout is more reasonable, which can save space. The structure of the mass spectrometer in the prior art is relatively complex, and its ion source space is very compact. It has more stringent requirements on accuracy, vacuum environment and other characteristics, and it requires the target plate, lens and imaging components to be located in a straight line. Due to these conditions, there is little room for improvement of the mass spectrometer in the prior art.

[0064] Secondly, no one in the industry has thought of applying Schaam's law to the field of mass spectrometer 100. In the prior art, changes are usually made in adjusting the angle of light, optimizing the lens group, etc. to improve the clarity of imaging. In the present invention, Schaam's law is applied to the field of mass spectrometer 100, so that the extended surfaces of the three planes of target plate 10, lens assembly 20, and imaging assembly 30 intersect in a straight line, which has an unexpected effect. It can not only improve the clarity of imaging, but also adjust the magnification of imaging by moving the lens assembly 20, which is more convenient to operate.

[0065] Specifically, the lens assembly 20 is translated along the optical axis 40 of the lens assembly 20, and the extended surface of the translated lens assembly 20 intersects with the extended surface of the target plate 10 and the extended surface of the imaging assembly 30 in a straight line. Specifically, the lens assembly 20 is translated along the optical axis 40 of the lens assembly 20, and the extended surface of the translated lens assembly 20, the extended surface of the target plate 10 and the extended surface of the imaging assembly 30 intersect in a straight line.

[0066] Specifically, the lens assembly 20 is rotatably arranged, and the extended surface of the rotated lens assembly 20, the extended surface of the target plate 10 and the extended surface of the imaging assembly 30 intersect in a straight line.

[0067] Specifically, the lens assembly 20 rotates synchronously during the translation process, and the extended surface of the lens assembly 20, the extended surface of the target plate 10 and the extended surface of the imaging assembly 30 after translation and rotation are compared to a straight line.

[0068] It should be noted that the positions of the target plate 10 and the imaging component 30 can be determined, and the position of the lens component 20 can be adjusted by the magnification of the object image, wherein the lens component 20 can be translated or rotated between the target plate 10 and the imaging component 30, and of course can be both translated and rotated. Regardless of translation, rotation, or both translation and rotation, it is necessary to ensure that the three satisfy Sham's law, that is, the extended surface of the target plate 10, the extended surface of the lens component 20, and the extended surface of the imaging component 30 intersect in a straight line.

[0069] It should be noted that the larger the angle between the lens assembly optical axis 40 and the target plate surface vertical axis 50, the larger the angle between the extended surface of the imaging assembly 30 and the extended surface of the target plate 10. For example, Figure 4 and Fig.11 As shown in the table data, when the angle between the optical axis 40 of the lens assembly and the vertical axis 50 of the target plate surface is 30°, and the object image magnification is 1 times, the angle between the extended surface of the imaging assembly 30 and the extended surface of the target plate 10 is 59.89°; when the angle between the optical axis 40 of the lens assembly and the vertical axis 50 of the target plate surface is 45°, and the object image magnification is 1 times, the angle between the extended surface of the imaging assembly 30 and the extended surface of the target plate 10 is 89.85°.

[0070] This means that the greater the angle between the optical axis 40 of the lens assembly and the vertical axis 50 of the target board surface, the greater the inclination of the imaging assembly 30, and the farther the imaging assembly 30 is from the target board 10. By adjusting the angle between the optical axis 40 of the lens assembly and the vertical axis 50 of the target board surface, the distance between the imaging assembly 30 and the target board 10 and the deflection position of the imaging assembly 30 can be adjusted. The adjustment method is simple and quick, which reduces the difficulty of operation.

[0071] Specifically, when the angle between the optical axis 40 of the lens assembly and the vertical axis 50 of the target plate surface is determined, the spatial layout of the mass spectrometer 100 is basically determined, and the position of the lens assembly 20 located between the target plate 10 and the imaging assembly 30 is adjustable. By adjusting the position of the lens assembly 20 to move it toward the target plate 10, or to move it toward the imaging assembly 30, the magnification of the object image can be adjusted. The appropriate position of the lens assembly 20 can be determined according to actual needs to determine the magnification of the object image. With this arrangement, the adjustment method is simple and convenient, the operation is faster, and the clarity of the imaging can be guaranteed.

[0072] like Figure 4-Figure 16 As shown, the lens assembly 20 moves toward the target plate 10 , and the magnification of the object image gradually increases with the movement of the target plate 10 .

[0073] It should be noted that the lens assembly 20 is disposed between the target plate 10 and the imaging assembly 30. The position of the lens assembly 20 can determine the magnification of the object image. The distance between the lens assembly 20 and the target plate 10 is the object distance, and the distance between the lens assembly 20 and the imaging assembly 30 is the image distance. Figure 4 and Fig.11 It can be seen from the table data in that the smaller the object distance, the larger the corresponding image distance, the larger the magnification of the object image, and the larger the object distance, the smaller the corresponding image distance, and the smaller the magnification of the object image. The lens assembly 20 can move toward the target plate 10, and the magnification of the object image gradually increases with the movement of the target plate 10. In this way, the magnification of the object image can be adjusted by adjusting the distance between the lens assembly 20 and the target plate 10, which can be achieved by simply moving the lens assembly 20, reducing the difficulty of adjustment and making the operation simple and convenient.

[0074] In addition, if Figure 4-Figure 17 As shown, in one embodiment, the field of view to be observed on the target plate 10 is selected to be 5 mm, when the angle between the vertical axis 50 of the target plate surface and the optical axis 40 of the lens assembly is 30°, and the object-image magnifications are 0.5, 1, and 2 times, respectively, there are the following three states of system parameters, which are the object distance, the image distance, and the angle between the extended surface of the target plate 10 and the extended surface of the imaging assembly 30, as shown in FIG. Figure 4 As shown, it can be seen that when the optical axis 40 is deflected by 30° and at different object magnifications, as well as different layouts of the target plate 10, the lens assembly 20, and the imaging assembly 30, the performance comparison of the mass spectrometer 100 is that in the three states shown in the table, MTF>0.4@5lp / mm, where MTF (Modulation Transfer Function) is the modulation transfer function, which can reflect the resolution of the mass spectrometer 100, and the resolution is expressed in line pairs per millimeter (lp / mm).

[0075] In another embodiment, the field of view to be observed on the target plate 10 is also selected to be 5 mm. When the angle between the vertical axis 50 of the target plate surface and the optical axis 40 of the lens assembly is 45°, and the object-image magnifications are 0.5, 1, and 2 times, respectively, there are the following three states of system parameters, which are also the object distance, the image distance, and the angle between the extended surface of the target plate 10 and the extended surface of the imaging assembly 30, such as Fig.11 As shown, it can be seen that when the optical axis 40 is deflected by 45°, and under different object magnifications, and different layouts of the target plate 10, the lens assembly 20, and the imaging assembly 30, the performance comparison of the mass spectrometer 100 shows that MTF>0.6@5lp / mm in the three states shown in the table. It can be seen that the angle between the target plate surface vertical axis 50 and the lens assembly optical axis 40 will affect the MTF.

[0076] like Figure 1As shown, in some embodiments, the lens assembly 20 is a single lens 21. It should be noted that the side of the single lens 21 close to the target plate 10 is an aspheric surface, and the side away from the target plate 10 is a plane. In this way, the combination of the aspheric surface and the plane can increase the imaging aperture and improve the resolution of the entire field of view. In addition, the lens assembly 20 is a single lens 21, and the single lens 21 can be a plano-convex lens, a convex lens, or a cemented lens; if the single lens 21 is a cemented lens, a combination of crown glass (K) and flint glass (F) can be used. In this way, the dispersion properties of the two types of glass are utilized to make the dispersion compensate each other, and the purpose of achromatism can be achieved, thereby improving the imaging quality of the entire field of view.

[0077] like Fig.18 As shown, in some embodiments, the lens assembly 20 is a plurality of lenses. The lens assembly 20 may be composed of a plurality of identical lenses or a plurality of different lenses. Specifically, the lens assembly 20 may all be composed of single lenses, the lens assembly 20 may all be composed of cemented lenses, or the lens assembly 20 may be composed of a single lens and a cemented lens.

[0078] It should be noted that the lens assembly 20 may include at least two lenses to form a complex multi-lens assembly, which may be a microscope lens assembly 20, a monitoring lens assembly 20, etc. The extended surface of the meridian plane of the lens assembly 20 composed of at least two lenses, the extended surface of the target plate 10, and the extended surface of the imaging assembly 30 intersect in a straight line to form the mass spectrometer 100 of the embodiment of the present invention. Exemplarily, the lens assembly 20 is composed of two lenses, the first lens 22 can change the refraction angle of the incident light, and the second lens 23 further collects the light entering from the first lens 22, reduces the angle of the incident light, and makes the light smoothly transition to the imaging assembly 30, thereby improving the clarity of the edge and center of the target plate 10, so that the center point and boundary point on the target plate 10 can be clearly imaged.

[0079] According to the imaging method of the mass spectrometer 100 of the second aspect of the present invention, the imaging method is applicable to the mass spectrometer 100 of any one of the above embodiments, and the imaging method includes:

[0080] The sample to be detected is placed on the target plate 10 of the injection system; the ion source turns the sample to be detected into charged ions; the charged ions are introduced into the mass analyzer by the ion source; the mass analyzer performs mass analysis on the charged ions, and finally enters the detector to form a signal.

[0081] Among them, the steps of the ion source making the sample to be detected become charged ions include: the camera system of the ion source includes a lens assembly 20 and an imaging assembly 30, and the extended surface of the target plate 10, the extended surface of the lens assembly 20 and the extended surface of the imaging assembly 30 intersect in a straight line; the material on the surface of the sample to be detected is ionized to form charged ions; the lens assembly 20 is used to observe the conditions of the target point and the laser; the imaging assembly 30 is used to image the sample to be detected.

[0082] In some embodiments, the position of the imaging assembly 30 is determined based on the position of the target plate 10 and the lens assembly 20 and the magnification of the object image. The position of the lens assembly 30 can be determined by determining the position of the target plate 10 and the lens assembly 20 and the magnification of the object image. The magnification of the object image is different, and the distance of the imaging assembly 30 from the lens assembly 20 and the deflection angle thereof are different.

[0083] In other embodiments, the position of the lens assembly 20 is determined based on the target plate 10, the imaging assembly 30 and the magnification of the object image. The positions of the target plate 10 and the imaging assembly 30 are determined, and the lens assembly 20 moves between the two. The position of the lens assembly 20 can be adjusted by the magnification of the object image.

[0084] The imaging method of the mass spectrometer 100 of the present invention adopts Sham's law, which can achieve high-precision mass spectrometry imaging, improve the resolution of the edge and center of the field of view, improve the imaging clarity, and improve the imaging. The structure of the mass spectrometer 100 of the present invention is simpler, compact, and occupies less space. It can achieve large field of view imaging in a limited space and adjust the imaging magnification without occupying more space.

[0085] In the description of the present invention, it is to be understood that the terms "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0086] In the description of the present invention, "first feature" or "second feature" may include one or more of the features.

[0087] In the description of the present invention, "plurality" means two or more.

[0088] In the description of the present invention, a first feature being “on” or “under” a second feature may include that the first and second features are directly in contact with each other, or may include that the first and second features are not in direct contact with each other but are in contact with each other via another feature therebetween.

[0089] In the description of the present invention, “on”, “over” and “above” a first feature from a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0090] In the description of the present invention, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0091] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A mass spectrometer, characterized in that include: A sample injection system, the sample injection system comprising a target plate for placing a sample to be detected; An ion source, the ion source comprising an excitation system and a camera system, the camera system comprising a lens assembly and an imaging assembly; The lens assembly is located between the target plate and the imaging assembly, the target plate and the extended surface of the imaging assembly have an included angle, and the extended surface of the target plate, the extended surface of the lens assembly and the extended surface of the imaging assembly intersect in a straight line, and the lens assembly is movably arranged between the target plate and the imaging assembly; mass analyzers and detectors; The sample to be detected on the target plate becomes charged ions under the action of the ion source. The charged ions enter the mass analyzer for mass analysis and enter the detector to form signals.

2. The mass spectrometer according to claim 1, characterized in that The lens assembly is arranged to be translated along the optical axis of the lens assembly, and the extended surface of the translated lens assembly intersects with the extended surface of the target plate and the extended surface of the imaging assembly in a straight line.

3. The mass spectrometer according to claim 1, characterized in that The lens assembly is rotatably arranged, and the extended surface of the rotated lens assembly intersects with the extended surface of the target plate and the extended surface of the imaging assembly in a straight line.

4. The mass spectrometer according to claim 2, characterized in that The lens assembly rotates synchronously during translation, and the extended surface of the lens assembly after translation and rotation intersects with the extended surface of the target plate and the extended surface of the imaging assembly in a straight line. The mass spectrometer according to claim 1 , wherein the lens assembly is a single lens. The mass spectrometer according to claim 1 , wherein the lens assembly comprises a plurality of lenses.

7. A mass spectrometer imaging method, characterized in that: Applicable to the mass spectrometer of any one of claims 1 to 6, wherein the imaging method comprises: Place the sample to be tested on the target plate of the injection system; The ion source turns the sample to be detected into charged ions; The ion source transmits the charged ions to a mass analyzer; The mass analyzer performs mass analysis on the charged ions; The detector detects the charged ions.

8. The imaging method of mass spectrometer according to claim 7, characterized in that: The step of the ion source making the sample to be detected become charged ions comprises: The camera system of the ion source includes a lens assembly and an imaging assembly, and the extended surface of the target plate, the extended surface of the lens assembly and the extended surface of the imaging assembly intersect in a straight line; The surface substances of the sample to be detected are ionized to form charged ions; The lens assembly is used to observe the conditions of the target and the laser; The imaging component is used to image the sample to be detected.

9. The imaging method of mass spectrometer according to claim 8, characterized in that: The position of the imaging component is determined based on the position of the target plate and the lens component and the magnification of the object image.

10. The imaging method of mass spectrometer according to claim 8, characterized in that: The position of the lens assembly is determined based on the positions of the target plate and the imaging assembly and the magnification of the object image.

Images