Power combining device and radio frequency power supply system

Abstract

This application provides a power combining device and an RF power supply system. The power combining device includes an input terminal, an output terminal, N-1 phase shift control circuits, N RF power amplifiers, and a power combiner. The N-1 phase shift control circuits are connected one-to-one between the input terminal and the N-1 phase shift RF power amplifiers. The N-1 phase shift RF power amplifiers are connected to the power combiner. A reference RF power amplifier is connected between the input terminal and the power combiner. Each phase shift control circuit is used to selectively shift or not shift the phase angle of the initial RF signal to obtain a target RF signal. Each RF power amplifier is used to amplify the target RF signal or the initial RF signal to obtain sub-RF power. The power combiner is used to combine the sub-RF power obtained from each RF power amplifier to obtain RF power. This application can realize the power combining of multiple sub-RF powers.

Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular to a power combining device and a radio frequency power supply system. Background Technology

[0002] Currently, with the rapid development of radio frequency (RF) power technology, the requirements for RF power supply systems that provide power to loads such as plasma loads are becoming increasingly stringent, especially since RF power supply systems often need to provide high-power RF energy. However, current research on power combining faces challenges. Because the initial RF signals exhibit varying degrees of phase shift during individual power amplification, it is impossible to synthesize the required high-power RF energy. Therefore, how to achieve power combining of multiple sub-RF energy sources to obtain the high-power RF energy required by the load has become a problem that needs to be considered. Summary of the Invention

[0003] This application provides a power combining device and a radio frequency power supply system, which can realize the power combining of multiple sub-radio frequency power to obtain the high-power radio frequency power required by the load.

[0004] In a first aspect, a power combining device is provided, comprising an input terminal, an output terminal, N-1 phase-shift control circuits, N radio frequency (RF) power amplifiers, and a power combiner. The N RF power amplifiers include a reference RF power amplifier and N-1 phase-shift RF power amplifiers, where N ≥ 2. The input terminal is connected to a signal source to receive an initial RF signal output by the signal source. The N-1 phase-shift control circuits are connected one-to-one between the input terminal and the N-1 phase-shift RF power amplifiers. The N-1 phase-shift RF power amplifiers are connected to the power combiner. The reference RF power amplifier is connected between the input terminal and the power combiner. Each phase-shift control circuit selectively shifts or does not shift the phase angle of the initial RF signal to obtain a target RF signal. Each RF power amplifier amplifies the target RF signal or the initial RF signal to obtain sub-RF power. The power combiner is connected to the output terminal and combines the sub-RF power obtained from each RF power amplifier to obtain RF power. The output terminal is used to connect to a load to output radio frequency power to the load.

[0005] In one possible implementation, each phase shift control circuit is configured to selectively shift or not shift the phase angle of the initial radio frequency signal based at least on the phase angle of the sub-radio frequency power obtained from the reference radio frequency power amplifier, so as to obtain a target radio frequency signal with a target phase angle, such that the phase angles of the sub-radio frequency power obtained by the N-1 phase shift radio frequency power amplifiers based on the target radio frequency signal with the target phase angle are all equal to the phase angle of the sub-radio frequency power obtained by the reference radio frequency power amplifier.

[0006] In one possible implementation, the power combining device further includes a phase difference acquisition unit and a control unit. The phase difference acquisition unit is connected to all N radio frequency power amplifiers and the control unit, and the control unit is connected to all N-1 phase shift control circuits. The phase difference acquisition unit is used to acquire N-1 first phase differences, each first phase difference being the phase angle between the phase angle of the sub-radio frequency power obtained by the reference radio frequency power amplifier and the phase angle of the sub-radio frequency power obtained by the corresponding phase shift radio frequency power amplifier. The control unit is used to control the corresponding phase shift control circuit to selectively shift or not shift the phase angle of the initial radio frequency signal according to each first phase difference, so as to obtain a target radio frequency signal with a target phase angle.

[0007] In one possible implementation, each phase shift control circuit includes a first phase shift unit and a second phase shift unit, which are sequentially connected between the input terminal and the corresponding phase-shifted RF power amplifier. The first phase shift unit is used to selectively shift or not shift the phase angle of the initial RF signal to obtain an intermediate RF signal. The second phase shift unit is used to selectively shift or not shift the phase angle of the intermediate RF signal to obtain a target RF signal with a target phase angle.

[0008] In one possible implementation, the first phase shift unit is configured to selectively be in a first connection state or a second connection state, corresponding to shifting or not shifting the phase angle of the initial radio frequency signal. The second phase shift unit is configured to selectively be in a third connection state or a fourth connection state, corresponding to shifting or not shifting the phase angle of the intermediate radio frequency signal. The control unit is configured to control the corresponding first phase shift unit to be in the first connection state or the second connection state according to each first phase difference, and to control the corresponding second phase shift unit to be in the third connection state or the fourth connection state.

[0009] In one possible implementation, the control unit is configured to control the corresponding first phase shift unit to be in the first connection state and control the corresponding second phase shift unit to be in the fourth connection state when any first phase difference is not equal to zero, or control the corresponding first phase shift unit to be in the second connection state and control the corresponding second phase shift unit to be in the third connection state; and to control the corresponding first phase shift unit to be in the second connection state and control the corresponding second phase shift unit to be in the fourth connection state when any first phase difference is equal to zero.

[0010] In one possible implementation, the first phase shift unit further has a variable first phase shift parameter, wherein when the first phase shift unit is in the first connection state, the shift angle of the phase angle of the initial radio frequency signal by the first phase shift unit changes according to the change of the first phase shift parameter. The second phase shift unit further has a variable second phase shift parameter, wherein when the second phase shift unit is in the third connection state, the shift angle of the phase angle of the intermediate radio frequency signal by the second phase shift unit changes according to the change of the second phase shift parameter. The control unit is further configured to adjust the first phase shift parameter of the corresponding first phase shift unit, or adjust the second phase shift parameter of the corresponding second phase shift unit, according to the non-zero first phase difference, when any first phase difference is not equal to zero.

[0011] In one possible implementation, the power values ​​of the sub-RF power received by each RF power amplifier are equal.

[0012] In one possible implementation, each RF power amplifier has a phase shift error angle, and the average of the phase shift error angles of the N RF power amplifiers is the average phase shift error angle. The RF power amplifier with the smallest difference between its phase shift error angle and the average phase shift error angle is the reference RF power amplifier.

[0013] Secondly, a radio frequency (RF) power supply system is also provided, comprising a signal source and a power combining device. The power combining device includes an input terminal, an output terminal, N-1 phase-shift control circuits, N RF power amplifiers, and a power combiner. The N RF power amplifiers include a reference RF power amplifier and N-1 phase-shift RF power amplifiers, where N ≥ 2. The input terminal is connected to the signal source to receive an initial RF signal output by the signal source. The N-1 phase-shift control circuits are connected one-to-one between the input terminal and the N-1 phase-shift RF power amplifiers. The N-1 phase-shift RF power amplifiers are connected to the power combiner. The reference RF power amplifier is connected between the input terminal and the power combiner. Each phase-shift control circuit is used to selectively shift or not shift the phase angle of the initial RF signal to obtain a target RF signal. Each RF power amplifier is used to amplify the power of the target RF signal or the initial RF signal to obtain sub-RF power. The power combiner is connected to the output terminal. The power combiner is used to combine the sub-RF power obtained from each RF power amplifier to obtain RF power. The output terminal is used to connect to a load to output RF power to the load.

[0014] The power combining device and RF power supply system of this application can obtain a target RF signal by selectively shifting or not shifting the phase angle of the initial RF signal through N-1 phase shift control circuits. Then, the target RF signal or the initial RF signal is amplified by N RF power amplifiers to obtain sub-RF power. The power combiner can then combine the sub-RF power obtained by each RF power amplifier to achieve power combining of multiple sub-RF power to obtain the high-power RF power required by the load. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0016] Figure 1 This is a block diagram of a power combining apparatus in some embodiments of this application.

[0017] Figure 2 This is another block diagram of a power combining apparatus in some embodiments of this application.

[0018] Figure 3 This is a block diagram of the phase shift control circuit in some embodiments of this application.

[0019] Figure 4 This is a circuit diagram of a phase shift control circuit in one embodiment of this application.

[0020] Figure 5 This is a circuit diagram of a phase shift control circuit in another embodiment of this application.

[0021] Figure 6 This is a block diagram of a power combiner in some embodiments of this application.

[0022] Figure 7 This is a circuit diagram of a power combiner in one embodiment of this application.

[0023] Figure 8 This is a block diagram of a radio frequency power supply system in some embodiments of this application.

[0024] Figure reference numerals: 1000, RF power system; SS, signal source; RF1, initial RF signal; 10, power combining device; 100, phase shift control circuit; 110, first phase shift unit; R1, first resistor; C1, first capacitor; S1, first switch; S3, third switch; S4, fourth switch; RF2, intermediate RF signal; 120, second phase shift unit; R2, second resistor; C2, second capacitor; S2, second switch; RF3, target RF signal; PA, RF power amplifier; PA1, reference RF power amplifier; PA2, phase shift RF power amplifier; RF4, sub-RF power; 200, power. Synthesizer, 210, First power combining module, D1, First diode, D2, Second diode, T1, First transformer, W1, First winding, W2, Second winding, 220, Second power combining module, D3, Third diode, D4, Fourth diode, T2, Second transformer, W3, Third winding, W4, Fourth winding, RF+, Positive half-cycle RF power, RF-, Negative half-cycle RF power, RF5, RF power, 300, Phase difference acquisition unit, A1, First phase difference, 400, Control unit, In, Input terminal, Out, Output terminal, E1, First potential, E2, Second potential, GND, Ground, RL, Load. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0026] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0027] Hereinafter, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0028] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0029] Please see Figure 1 , Figure 1 This is a block diagram of a power combining apparatus in some embodiments of this application. For example... Figure 1As shown, this application provides a power combining device 10, which includes an input terminal In, an output terminal Out, N-1 phase shift control circuits 100, N radio frequency power amplifiers PA, and a power combiner 200. The N radio frequency power amplifiers PA include a reference radio frequency power amplifier PA1 and N-1 phase shift radio frequency power amplifiers PA2, where N ≥ 2. The input terminal In is used to connect to a signal source SS to receive the initial radio frequency signal RF1 output by the signal source SS. N-1 phase-shift control circuits 100 are connected one-to-one between the input terminal In and N-1 phase-shift RF power amplifiers PA2. The N-1 phase-shift RF power amplifiers PA2 are connected to a power combiner 200. A reference RF power amplifier PA1 is connected between the input terminal In and the power combiner 200. Each phase-shift control circuit 100 selectively shifts or retains the phase angle of the initial RF signal RF1 to obtain the target RF signal RF3. Each RF power amplifier PA amplifies either the target RF signal RF3 or the initial RF signal RF1 to obtain sub-RF power RF4. The power combiner 200 is connected to the output terminal Out. The power combiner 200 combines the sub-RF power RF4 obtained from each RF power amplifier PA to obtain RF power RF5. The output terminal Out is connected to the load RL to output RF power RF5 to the load RL.

[0030] Therefore, the power combining device 10 described above in this application can obtain the target radio frequency signal RF3 by selectively shifting or not shifting the phase angle of the initial radio frequency signal RF1 through N-1 phase shift control circuits 100. Then, the target radio frequency signal RF3 or the initial radio frequency signal RF1 can be amplified by N radio frequency power amplifiers PA to obtain sub-radio frequency power RF4. Furthermore, the power combiner 200 can combine the sub-radio frequency power RF4 obtained by each radio frequency power amplifier PA to achieve power combining of multiple sub-radio frequency power RF4 to obtain the high-power radio frequency power RF5 required by the load RL.

[0031] In one or more embodiments, the reference RF power amplifier PA1 and each phase-shift RF power amplifier PA2 may include a Class D RF power amplifier, a Class E RF power amplifier, or other types of RF power amplifiers, and this application is not limited thereto.

[0032] In one or more embodiments, the power combiner 200 may include a power combining circuit composed of passive devices such as inductors and capacitors, or it may include a power combining circuit composed of other passive devices. This application is not limited thereto.

[0033] It should be noted that the sub-RF power RF4 can also be regarded as an RF signal with a target power value. However, compared with the initial RF signal RF1 or the target RF signal RF3, the power value of the sub-RF power RF4 is greater. Therefore, the phase angle of the sub-RF power RF4 is also the phase angle of the RF signal with the target power value.

[0034] In one or more embodiments, each phase shift control circuit 100 is configured to selectively shift or not shift the phase angle of the initial radio frequency signal RF1 based at least on the phase angle of the sub-radio frequency power RF4 obtained by the reference radio frequency power amplifier PA1, so as to obtain a target radio frequency signal RF3 with a target phase angle, such that the phase angles of the sub-radio frequency power RF4 obtained by the N-1 phase shift radio frequency power amplifiers PA2 based on the target radio frequency signal RF3 with the target phase angle are all equal to the phase angles of the sub-radio frequency power RF4 obtained by the reference radio frequency power amplifier PA1.

[0035] Therefore, the power combining device 10 described above in this application, by configuring each phase shift control circuit 100 to selectively shift or not shift the phase angle of the initial radio frequency signal RF1 at least according to the phase angle of the sub-radio frequency power RF4 obtained by the reference radio frequency power amplifier PA1, obtains a target radio frequency signal RF3 with a target phase angle. This enables the phase angles of the sub-radio frequency power RF4 obtained by N-1 phase shift radio frequency power amplifiers PA2 to be equal to the phase angle of the sub-radio frequency power RF4 obtained by the reference radio frequency power amplifier PA1, that is, the phase angles of each sub-radio frequency power RF4 are the same, thereby realizing the power combining of multiple sub-radio frequency power RF4 to obtain the high-power radio frequency power RF5 required by the load RL.

[0036] In particular, when the phase angle of any sub-RF power RF4 is different from the phase angle of other sub-RF power RF4, the RF power RF5 obtained by power combining multiple sub-RF power RF4 will not reach the expected power value, and the RF power RF5 will also contain noise, thus failing to meet the requirements of the load RL.

[0037] Please see Figure 2 , Figure 2 This is another block diagram of a power combining apparatus in some embodiments of this application. For example... Figure 2As shown, the power combining device 10 further includes a phase difference acquisition unit 300 and a control unit 400. The phase difference acquisition unit 300 is connected to N radio frequency power amplifiers PA and the control unit 400, and the control unit 400 is connected to N-1 phase shift control circuits 100. The phase difference acquisition unit 300 is used to acquire N-1 first phase differences A1, each first phase difference A1 being the phase difference between the phase angle of the sub-radio frequency power RF4 obtained by the reference radio frequency power amplifier PA1 and the phase angle of the sub-radio frequency power RF4 obtained by the corresponding phase shift radio frequency power amplifier PA2. The control unit 400 is used to control the corresponding phase shift control circuit 100 to selectively shift or not shift the phase angle of the initial radio frequency signal RF1 according to each first phase difference A1, so as to obtain a target radio frequency signal RF3 with a target phase angle.

[0038] Therefore, the power combining device 10 described above in this application, by setting a phase difference acquisition unit 300 to acquire the phase difference between the phase angle of the sub-RF power RF4 obtained by the reference RF power amplifier PA1 and the phase angle of the sub-RF power RF4 obtained by the corresponding phase-shifted RF power amplifier PA2, can determine the difference between the phase shift degree of the corresponding phase-shifted RF power amplifier PA2 and the phase shift degree of the reference RF power amplifier PA1. Then, by setting a control unit 400 to control the corresponding phase shift control circuit 100 to selectively move or not move the phase angle of the initial RF signal RF1 according to such N-1 first phase differences A1, a target RF signal RF3 with a target phase angle can be obtained. This can effectively solve the difference between the phase shift degrees of the N RF power amplifiers PA and avoid problems when supplying RF power RF5 to the load RL.

[0039] In particular, even if each RF power amplifier (PA) has the same circuit structure, it will have different phase shifts. That is, the phase angles of the signals obtained by each RF power amplifier amplifying signals with the same phase angle may be different. Furthermore, the phase shift of each RF power amplifier (PA) can also change during operation.

[0040] In one or more embodiments, the phase difference acquisition unit 300 may include N voltage sensors, N operational amplifiers, and N-1 XOR gates or other logic devices to acquire N-1 first phase differences A1. Each voltage sensor acquires the sub-RF power RF4 obtained from the reference RF power amplifier PA1 and the corresponding sub-RF power RF4 obtained from the phase-shifted RF power amplifier PA2. Each operational amplifier converts the sub-RF power RF4 obtained from the reference RF power amplifier PA1 and the corresponding sub-RF power RF4 obtained from the phase-shifted RF power amplifier PA2 into a square wave. Each XOR gate or other logic device performs logical operations on the square wave sub-RF power RF4 obtained from the reference RF power amplifier PA1 and the corresponding sub-RF power RF4 obtained from the phase-shifted RF power amplifier PA2 to obtain N-1 first phase differences A1.

[0041] Please refer to the following: Figure 3 , Figure 3 This is a block diagram of the phase shift control circuit in some embodiments of this application. For example... Figure 2 , Figure 3 As shown, each phase shift control circuit 100 includes a first phase shift unit 110 and a second phase shift unit 120. The first phase shift unit 110 and the second phase shift unit 120 are sequentially connected between the input terminal In and the corresponding phase-shifted RF power amplifier PA2. The first phase shift unit 110 is used to selectively shift or not shift the phase angle of the initial RF signal RF1 to obtain the intermediate RF signal RF2. The second phase shift unit 120 is used to selectively shift or not shift the phase angle of the intermediate RF signal RF2 to obtain the target RF signal RF3 with the target phase angle.

[0042] Therefore, the power combining device 10 described above in this application, by setting the first phase shift unit 110 and the second phase shift unit 120 to modulate the phase angle of the initial radio frequency signal RF1 in sequence, can provide a variety of modulation methods according to specific needs, and finally obtain the target radio frequency signal RF3 with the target phase angle.

[0043] In one or more embodiments, the first phase shift unit 110 is configured to selectively be in a first connection state or a second connection state to shift or not shift the phase angle of the initial radio frequency signal RF1. The second phase shift unit 120 is configured to selectively be in a third connection state or a fourth connection state to shift or not shift the phase angle of the intermediate radio frequency signal RF2. The control unit 400 is configured to control the corresponding first phase shift unit 110 to be in the first connection state or the second connection state, and to control the corresponding second phase shift unit 120 to be in the third connection state or the fourth connection state, based on each first phase difference A1.

[0044] Therefore, the power combining device 10 described above in this application, by setting the first phase shift unit 110 and the second phase shift unit 120 to each of two different connection states, and configuring the control unit 400 to control the first phase shift unit 110 and the second phase shift unit 120 to be in two different connection states according to each first phase difference A1, can be in the corresponding connection state as needed.

[0045] In one or more embodiments, when the first phase shift unit 110 is in a first connection state, the first phase shift unit 110 shifts the phase angle of the initial radio frequency signal RF1 in a first direction. When the second phase shift unit 120 is in a third connection state, the second phase shift unit 120 shifts the phase angle of the intermediate radio frequency signal RF2 in a second direction. The first and second directions are opposite.

[0046] In one or more embodiments, the first direction can be a direction that causes the phase angle of the initial radio frequency signal RF1 to lead, and the corresponding second direction is a direction that causes the phase angle of the initial radio frequency signal RF1 to lag. Alternatively, the first direction can be a direction that causes the phase angle of the initial radio frequency signal RF1 to lag, and the corresponding second direction can be a direction that causes the phase angle of the initial radio frequency signal RF1 to lead.

[0047] Furthermore, when the first phase shift unit 110 is in the second connection state, the first phase shift unit 110 does not shift the phase angle of the initial radio frequency signal RF1. When the second phase shift unit 120 is in the fourth connection state, the second phase shift unit 120 does not shift the phase angle of the intermediate radio frequency signal RF2.

[0048] It should be noted that when the first phase shift unit 110 does not shift the phase angle of the initial radio frequency signal RF1, the phase angle of the obtained intermediate radio frequency signal RF2 is the same as the phase angle of the initial radio frequency signal RF1. When the second phase shift unit 120 does not shift the phase angle of the intermediate radio frequency signal RF2, the phase angle of the obtained target radio frequency signal RF3 is the same as the phase angle of the intermediate radio frequency signal RF2.

[0049] In one or more embodiments, the control unit 400 is configured to control the corresponding first phase shift unit 110 to be in a first connection state and control the corresponding second phase shift unit 120 to be in a fourth connection state when any first phase difference A1 is not equal to zero; or, control the corresponding first phase shift unit 110 to be in a second connection state and control the corresponding second phase shift unit 120 to be in a third connection state; and control the corresponding first phase shift unit 110 to be in a second connection state and control the corresponding second phase shift unit 120 to be in a fourth connection state when any first phase difference A1 is equal to zero.

[0050] Therefore, the power combining device 10 described above in this application is specifically configured with a control unit 400 to control the first phase shift unit 110 and the second phase shift unit 120 to be in the corresponding connection state based on whether N-1 first phase differences A1 are zero.

[0051] Furthermore, the control unit 400 is configured to control the corresponding first phase shift unit 110 to be in a first connection state and the corresponding second phase shift unit 120 to be in a fourth connection state when any first phase difference A1 is greater than zero, and to control the corresponding first phase shift unit 110 to be in a second connection state and the corresponding second phase shift unit 120 to be in a third connection state when any first phase difference A1 is less than zero. Alternatively, the control unit 400 is configured to control the corresponding first phase shift unit 110 to be in a first connection state and the corresponding second phase shift unit 120 to be in a fourth connection state when any first phase difference A1 is less than zero, and to control the corresponding first phase shift unit 110 to be in a second connection state and the corresponding second phase shift unit 120 to be in a third connection state when any first phase difference A1 is greater than zero.

[0052] In one or more embodiments, the phase shift accuracy of each first phase shift unit 110 is different from the phase shift accuracy of the corresponding second phase shift unit 120. The control unit 400 can be used to control the corresponding first phase shift unit 110 to be in a first connection state and to control the corresponding second phase shift unit 120 to be in a third connection state when any first phase difference A1 is not equal to zero.

[0053] Therefore, the power combining device 10 described above in this application can simultaneously enable the first phase shift unit 110 to be in the first connection state and enable the corresponding second phase shift unit 120 to be in the third connection state, thereby solving the phase shift difference of the initial radio frequency signal RF1 during the power amplification process of different radio frequency power amplifiers PA to the greatest extent by using different phase shift accuracies.

[0054] In one or more embodiments, the first phase shift unit 110 further has a variable first phase shift parameter. When the first phase shift unit 110 is in a first connection state, the shift angle of the phase angle of the initial radio frequency signal RF1 by the first phase shift unit 110 changes according to the change of the first phase shift parameter. The second phase shift unit 120 further has a variable second phase shift parameter. When the second phase shift unit 120 is in a third connection state, the shift angle of the phase angle of the intermediate radio frequency signal RF2 by the second phase shift unit 120 changes according to the change of the second phase shift parameter. The control unit 400 is further configured to adjust the first phase shift parameter of the corresponding first phase shift unit 110, or adjust the second phase shift parameter of the corresponding second phase shift unit 120, according to the non-zero first phase difference A1, when any first phase difference A1 is not equal to zero.

[0055] Therefore, the power combining device 10 described above in this application, by configuring the first phase shift unit 110 to have a variable first phase shift parameter and the second phase shift unit 120 to have a variable second phase shift parameter, can change the moving angle according to specific circumstances.

[0056] The phase shift accuracy of each first phase shift unit 110 is the minimum change of the first phase shift parameter, and the phase shift accuracy of each second phase shift unit 120 is the minimum change of the second phase shift parameter.

[0057] Furthermore, the control unit 400 can also be used to adjust the first phase shift parameter of the corresponding first phase shift unit 110 and the second phase shift parameter of the corresponding second phase shift unit 120 according to the non-zero first phase difference A1 when any first phase difference A1 is not equal to zero.

[0058] Please refer to the following: Figure 4 , Figure 4 This is a circuit diagram of a phase shift control circuit according to one embodiment of this application. Figure 3 , Figure 4 As shown, each first phase shift unit 110 includes a first resistor R1, a first capacitor C1, and a first switch S1. The first resistor R1 and the first capacitor C1 are sequentially connected between the input terminal In and ground GND. The connection point between the first resistor R1 and the first capacitor C1 is connected to the corresponding second phase shift unit 120. The two ends of the first switch S1 are correspondingly connected to the two ends of the first resistor R1. The first switch S1 is used to selectively be in a conducting or disconnected state, so that the first phase shift unit 110 is selectively in a second connected state or a first connected state.

[0059] Specifically, the phase difference between the phase angle of the intermediate RF signal RF2 and the phase angle of the initial RF signal RF1 satisfies a first preset relationship, which can be -tan -1 (R1×C1×ω), that is, the phase difference between the phase angle of the initial RF signal RF1 and the phase angle of the intermediate RF signal RF2 is related to the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the angular frequency of the initial RF signal RF1. In other words, the shift angle of the phase angle of the initial RF signal RF1 by each first phase shift unit 110 is -tan ω. -1 (R1×C1×ω), the first phase shift parameter of each first phase shift unit 110 is related to the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the angular frequency of the initial radio frequency signal RF1.

[0060] Furthermore, the first resistor R1 has an adjustable resistance value and / or the first capacitor C1 has an adjustable capacitance value. By adjusting the resistance value of the first resistor R1 and / or the capacitance value of the first capacitor C1, the first phase shift parameter of the corresponding first phase shift unit 110 can be changed. Figure 4 As shown, the first capacitor C1 can be an adjustable capacitor with an adjustable capacitance value.

[0061] Please refer to the following: Figure 5 , Figure 5 This is a circuit diagram of a phase shift control circuit according to another embodiment of this application. Figure 3 , Figure 5 As shown, each first phase shift unit 110 may also include a first resistor R1, a first capacitor C1, a third switch S3, and a fourth switch S4. The first resistor R1, the first capacitor C1, and the fourth switch S4 are sequentially connected between the input terminal In and ground GND. The connection point between the first resistor R1 and the first capacitor C1 is connected to the corresponding second phase shift unit 120. The two ends of the third switch S3 are correspondingly connected to the two ends of the first capacitor C1. The third switch S3 and the fourth switch S4 are used to selectively be in a conducting or disconnected state simultaneously, so that the first phase shift unit 110 is selectively in a second connected state or a first connected state. That is, when both the third switch S3 and the fourth switch S4 are in the conducting state, the corresponding first phase shift unit 110 is selectively in the second connected state; and when both the third switch S3 and the fourth switch S4 are in the disconnected state, the corresponding first phase shift unit 110 is selectively in the first connected state.

[0062] like Figure 3 , Figure 4 , Figure 5 As shown, each second phase shift unit 120 includes a second resistor R2, a second capacitor C2, and a second switch S2. The second capacitor C2 and the second resistor R2 are sequentially connected between the corresponding first phase shift unit 110 and ground GND. The connection point between the second capacitor C2 and the second resistor R2 is connected to the corresponding phase shift RF power amplifier PA2. The two ends of the second switch S2 are correspondingly connected to the two ends of the second capacitor C2. The second switch S2 is used to selectively be in an on or off state, so that the second phase shift unit 120 is selectively in a fourth connection state or a third connection state.

[0063] Specifically, the phase difference between the phase angle of the target radio frequency signal RF3 and the phase angle of the intermediate radio frequency signal RF2 satisfies a second preset relationship, which can be tan . -1(1 / R2×C2×ω), that is, the phase difference between the phase angle of the target RF signal RF3 and the phase angle of the intermediate RF signal RF2 is related to the resistance value of the second resistor R2, the capacitance value of the second capacitor C2, and the angular frequency of the intermediate RF signal RF2. In other words, the shift angle of the phase angle of the intermediate RF signal RF2 by each second phase shift unit 120 is tan ω. -1 (1 / R2×C2×ω), the second phase shift parameter of each second phase shift unit 120 is related to the resistance value of the second resistor R2, the capacitance value of the second capacitor C2, and the angular frequency of the intermediate radio frequency signal RF2.

[0064] Therefore, the power combining device 10 described above in this application, by setting each first phase shift unit 110 and each second phase shift unit 120 to include electronic devices such as capacitors, resistors, and switches, and configuring corresponding connection relationships, enables each first phase shift unit 110 to selectively move or not move the phase angle of the initial radio frequency signal RF1 in a first direction, and the first direction corresponds to the direction that causes the phase angle of the initial radio frequency signal RF1 to lag, while not affecting other waveform parameters of the initial radio frequency signal RF1, which may include waveform, frequency, etc., and enables each second phase shift unit 120 to selectively move or not move the phase angle of the intermediate radio frequency signal RF2 in a second direction, and the second direction corresponds to the direction that causes the phase angle of the intermediate radio frequency signal RF2 to lead, while not affecting other waveform parameters of the intermediate radio frequency signal RF2, which may include waveform, frequency, etc.

[0065] Furthermore, the second resistor R2 has an adjustable resistance value and / or the second capacitor C2 has an adjustable capacitance value. By adjusting the resistance value of the second resistor R2 and / or the capacitance value of the second capacitor C2, the second phase shift parameter of the corresponding second phase shift unit 120 can be changed. For example... Figure 5 As shown, the second capacitor C2 can be an adjustable capacitor with an adjustable capacitance value.

[0066] In one or more embodiments, such as Figure 2 The control unit 400 shown controls, respectively, such as Figure 4 , Figure 5 One or more of the first switch S1, the second switch S2, the third switch S3, and the fourth switch S4 shown are turned on or off to control the corresponding first phase shift unit 110 to be in the first connection state or the second connection state, and to control the corresponding second phase shift unit 120 to be in the third connection state or the fourth connection state.

[0067] In one or more embodiments, such as Figure 2 The control unit 400 shown can be adjusted by adjusting, for example... Figure 4 , Figure 5The capacitance values ​​of the first capacitor C1 and / or the second capacitor C2 are shown to adjust the first phase shift parameter of the first phase shift unit 110 and / or the second phase shift parameter of the second phase shift unit 120 accordingly.

[0068] In one or more embodiments, the control unit 400 may be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), application-specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, or other logic control devices. It may also be a microprocessor such as a micro control unit (MCU).

[0069] In one or more embodiments, the power value of the sub-RF power RF4 obtained by each RF power amplifier PA is equal.

[0070] Therefore, in the power combining device 10 described above in this application, the power values ​​of the sub-radio power RF4 obtained by each radio frequency power amplifier PA are all equal, so that the subsequent power combiner 200 can combine the power of each sub-radio power RF4 to obtain radio frequency power RF5.

[0071] In one or more embodiments, each RF power amplifier PA has a phase shift error angle, and the average of the phase shift error angles of N RF power amplifiers PA is the average phase shift error angle. Among them, the RF power amplifier PA with the smallest difference between the phase shift error angle and the average phase shift error angle is the reference RF power amplifier PA1.

[0072] Therefore, in the power combining apparatus 10 described in this application, the phase shift of each radio frequency power amplifier PA changes very little or not at all during operation. Thus, by selecting one of the radio frequency power amplifiers PA with the smallest difference between the phase shift error angle and the average phase shift error angle as the reference radio frequency power amplifier PA1, subsequent power combining can be facilitated.

[0073] Please refer to the following: Figure 6 , Figure 6 This is a block diagram of a power combiner in some embodiments of this application. For example... Figure 1 , Figure 6As shown, when N=2 and the power values ​​of the sub-RF power RF4 obtained by the two RF power amplifiers PA are not equal, the power combiner 200 may include a first power combining module 210 and a second power combining module 220. The two RF power amplifiers PA may include a reference RF power amplifier PA1 and a phase-shift RF power amplifier PA2. The first power combining module 210 is connected to the reference RF power amplifier module, the phase-shift RF power amplifier module, and the output terminal Out. The first power combining module 210 is used to conduct during the positive half-cycle of the two sub-RF power RF4 and to combine the power of the two sub-RF power RF4 during conduction to obtain the positive half-cycle RF power RF+. The second power combining module 220 is connected to the reference RF power amplifier module, the phase-shift RF power amplifier module, and the output terminal Out. The second power combining module 220 is used to conduct during the negative half-cycle of the two sub-RF power RF4 and to combine the power of the two sub-RF power RF4 during conduction to obtain the negative half-cycle RF power RF-. Among them, the positive half-cycle RF power RF+ and the negative half-cycle RF power RF- are mixed at the output terminal Out to form the complete cycle RF power RF5, which is then output to the load RL.

[0074] Specifically, the power values ​​of the sub-RF power RF4 obtained by the two RF power amplifiers PA are not equal, that is, the amplitude of the sub-RF power RF4 obtained by the two RF power amplifiers PA is not equal. Therefore, the power cannot be amplified by the power combining circuit composed of passive components such as inductors and capacitors. By configuring the first power combining module 210, the second power combining module 220 and the corresponding functions, the power combining of the two sub-RF power RF4 can be realized.

[0075] In one or more embodiments, the first power combining module 210 is further configured to disconnect during the negative half-cycle of the two sub-RF powers RF4, and to stop inputting the two sub-RF powers RF4 when disconnected. The second power combining module 220 is further configured to disconnect during the positive half-cycle of the two sub-RF powers RF4, and to stop inputting the two sub-RF powers RF4 when disconnected.

[0076] In one or more embodiments, the amplitudes of the positive half-cycle radio frequency power RF+ and the negative half-cycle radio frequency power RF- are the same, and the amplitudes of the positive half-cycle radio frequency power RF+ and the negative half-cycle radio frequency power RF- are the sum of the amplitudes of the two sub-radio frequency power RF4.

[0077] Please refer to the following: Figure 7 , Figure 7 This is a circuit diagram of a power combiner according to one embodiment of this application. Figure 1 , Figure 6 , Figure 7As shown, the first power combining module 210 includes a first diode D1, a second diode D2, and a first transformer T1. The first transformer T1 includes a first winding W1 and a second winding W2. The positive terminal of the first diode D1 is connected to the reference RF power amplifier module, and the negative terminal of the first diode D1 is connected to the same-name terminal of the first winding W1. The positive terminal of the second diode D2 is connected to the phase-shift RF power amplifier module, and the negative terminal of the second diode D2 is connected to the opposite-name terminal of the second winding W2. The opposite-name terminal of the first winding W1 is connected to the output terminal Out, and the same-name terminal of the second winding W2 is connected to the first potential E1.

[0078] like Figure 1 , Figure 6 , Figure 7 As shown, the second power combining module 220 includes a third diode D3, a fourth diode D4, and a second transformer T2. The second transformer T2 includes a third winding W3 and a fourth winding W4. The negative terminal of the third diode D3 is connected to the reference RF power amplifier module, and the positive terminal of the third diode D3 is connected to the same-name terminal of the third winding W3. The negative terminal of the fourth diode D4 is connected to the phase-shift RF power amplifier module, and the positive terminal of the fourth diode D4 is connected to the opposite-name terminal of the fourth winding W4. The opposite-name terminal of the third winding W3 is connected to the output terminal Out, and the same-name terminal of the fourth winding W4 is connected to the first potential E1.

[0079] like Figure 1 , Figure 6 , Figure 7 As shown, the end of the load RL not connected to the output terminal Out is used to connect to the second potential E2. The voltage values ​​of the first potential E1 and the second potential E2 are different.

[0080] In one or more embodiments, the voltage value of the first potential E1 is less than the voltage value of the second potential E2.

[0081] Furthermore, the difference between the voltage value of the second potential E2 and the voltage value of the first potential E1 is greater than the first voltage threshold.

[0082] In one or more embodiments, the voltage value of the second potential E2 may be equal to the voltage value of ground GND.

[0083] Therefore, it is possible to avoid using a power combiner 200 composed of electronic devices such as diodes and transformers to increase the voltage value of the load RL, thereby preventing the radio frequency power RF5 from being transmitted to the load RL normally.

[0084] In one or more embodiments, both the first transformer T1 and the second transformer T2 can be balun transformers.

[0085] In one or more embodiments, the load RL may be a plasma load RL.

[0086] The power combining device 10 of this application, through the above structure, can effectively solve the phase shift problem and amplitude difference problem of the initial radio frequency signal RF1 during the power amplification process according to actual needs, and can better perform subsequent power combining, thereby realizing the power combining of multiple sub-radio frequency power RF4 to obtain the high-power radio frequency power RF5 required by the load RL, and thus better provide radio frequency power RF5 to the load RL such as the plasma load RL.

[0087] Please see Figure 8 , Figure 8 This is a block diagram of a radio frequency power supply system in some embodiments of this application. For example... Figure 8 As shown, this application also provides a radio frequency power supply system 1000, which includes a signal source SS and a power combining device 10 in any of the foregoing embodiments.

[0088] Please refer to it again. Figure 1 .like Figure 1 As shown, the power combining device 10 includes an input terminal In, an output terminal Out, N-1 phase shift control circuits 100, N radio frequency power amplifiers PA, and a power combiner 200. The N radio frequency power amplifiers PA include a reference radio frequency power amplifier PA1 and N-1 phase shift radio frequency power amplifiers PA2, where N ≥ 2. The input terminal In is connected to a signal source SS to receive the initial radio frequency signal RF1 output by the signal source SS. The N-1 phase shift control circuits 100 are connected one-to-one between the input terminal In and the N-1 phase shift radio frequency power amplifiers PA2. The N-1 phase shift radio frequency power amplifiers PA2 are connected to the power combiner 200. The reference radio frequency power amplifier PA1 is connected between the input terminal In and the power combiner 200. Each phase shift control circuit 100 is used to selectively shift or not shift the phase angle of the initial radio frequency signal RF1 to obtain a target radio frequency signal RF3. Each radio frequency power amplifier PA is used to amplify the power of either the target radio frequency signal RF3 or the initial radio frequency signal RF1 to obtain a sub-radio frequency power RF4. A power combiner 200 is connected to the output terminal Out. The power combiner 200 is used to combine the sub-RF power RF4 obtained from each RF power amplifier PA to obtain RF power RF5. The output terminal Out is used to connect to the load RL to output RF power RF5 to the load RL.

[0089] For a more specific description of the power combining device 10, please refer to the relevant content of the power combining device 10 in any of the foregoing embodiments, which will not be repeated here.

[0090] Specifically, the signal source SS can be a crystal oscillator source, so the waveform of the initial radio frequency signal RF1 is a sine wave, and the waveform of the sub-radio frequency power RF4 obtained from the initial radio frequency signal RF1, and the waveform of the radio frequency power RF5 obtained by power synthesis are also sine waves.

[0091] The power combining device 10 and the radio frequency power supply system 1000 of this application, through the above structure, can effectively solve the phase shift problem and amplitude difference problem of the initial radio frequency signal RF1 during the power amplification process according to actual needs, and can better perform subsequent power combining, thereby realizing the power combining of multiple sub-radio frequency power RF4 to obtain the high-power radio frequency power RF5 required by the load RL, and thus better provide radio frequency power RF5 to the load RL such as the plasma load RL.

[0092] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A power combining device, characterized by, The power synthesizing device comprises an input end, an output end, N-1 phase shift control circuits, N radio frequency power amplifiers and a power synthesizer, wherein the N radio frequency power amplifiers comprise one reference radio frequency power amplifier and N-1 phase shift radio frequency power amplifiers, and N≥2; The input end is used to be connected with a signal source to receive an initial radio frequency signal output by the signal source; The N-1 phase shift control circuits are connected one by one between the input end and the N-1 phase shift radio frequency power amplifiers, and the N-1 phase shift radio frequency power amplifiers are connected with the power synthesizer, and the reference radio frequency power amplifier is connected between the input end and the power synthesizer, wherein each phase shift control circuit is used to selectively move or not move the phase angle of the initial radio frequency signal to obtain a target radio frequency signal, and each radio frequency power amplifier is used to power amplify the target radio frequency signal or the initial radio frequency signal to obtain a sub radio frequency electric energy; The power synthesizer is connected with the output end, and the power synthesizer is used to power synthesize the sub radio frequency electric energy obtained by each radio frequency power amplifier to obtain a radio frequency electric energy; The output end is used to be connected with a load to output the radio frequency electric energy to the load; When N=2 and the power values of the sub radio frequency electric energy obtained by the two radio frequency power amplifiers are not equal, the power synthesizer comprises a first power synthesizing module and a second power synthesizing module, wherein the two radio frequency power amplifiers comprise a reference radio frequency power amplifier and a phase shift radio frequency power amplifier; The first power synthesizing module is connected with the reference radio frequency power amplifier, the phase shift radio frequency amplifier and the output end, and the first power synthesizing module is used to be turned on in the positive half cycle of the two sub radio frequency electric energy and power synthesize the two sub radio frequency electric energy to obtain a positive half cycle radio frequency electric energy when being turned on; the second power synthesizing module is connected with the reference radio frequency power amplifier, the phase shift radio frequency amplifier and the output end, and the second power synthesizing module is used to be turned on in the negative half cycle of the two sub radio frequency electric energy and power synthesize the two sub radio frequency electric energy to obtain a negative half cycle radio frequency electric energy when being turned on; Wherein, the positive half cycle radio frequency electric energy and the negative half cycle radio frequency electric energy are mixed into a complete cycle radio frequency electric energy at the output end and output to the load.

2. The power combining device of claim 1, wherein, Each phase shift control circuit is used to selectively move or not move the phase angle of the initial radio frequency signal according to at least the phase angle of the sub radio frequency electric energy obtained by the reference radio frequency power amplifier to obtain a target radio frequency signal with a target phase angle, so that the phase angles of the sub radio frequency electric energy obtained by the N-1 phase shift radio frequency power amplifiers according to the target radio frequency signal with the target phase angle are equal to the phase angle of the sub radio frequency electric energy obtained by the reference radio frequency power amplifier.

3. The power combining device of claim 2, wherein, The power synthesizing device further comprises a phase difference obtaining unit and a control unit, the phase difference obtaining unit is connected with the N radio frequency power amplifiers and the control unit, and the control unit is connected with the N-1 phase shift control circuits. The phase difference acquisition unit is configured to acquire N-1 first phase differences, each of which is a phase difference between a phase angle of the sub-radio frequency electric energy obtained by the reference radio frequency power amplifier and a phase angle of the sub-radio frequency electric energy obtained by the corresponding phase shift radio frequency power amplifier. The control unit is configured to control the corresponding phase shift control circuit to selectively move or not move the phase angle of the initial radio frequency signal according to each first phase difference, so as to obtain a target radio frequency signal with a target phase angle.

4. The power combining device of claim 3, wherein, Each phase shift control circuit comprises a first phase shift unit and a second phase shift unit, which are connected in sequence between the input end and the corresponding phase shift radio frequency power amplifier. The first phase shift unit is configured to selectively move or not move the phase angle of the initial radio frequency signal, so as to obtain an intermediate radio frequency signal. The second phase shift unit is configured to selectively move or not move the phase angle of the intermediate radio frequency signal, so as to obtain a target radio frequency signal with a target phase angle.

5. The power combining device of claim 4, wherein, The first phase shift unit is configured to selectively be in a first connection state or a second connection state, so as to correspondingly move or not move the phase angle of the initial radio frequency signal. The second phase shift unit is configured to selectively be in a third connection state or a fourth connection state, so as to correspondingly move or not move the phase angle of the intermediate radio frequency signal. The control unit is configured to control the corresponding first phase shift unit to be in the first connection state or the second connection state and control the corresponding second phase shift unit to be in the third connection state or the fourth connection state according to each first phase difference.

6. The power combining device of claim 5, wherein, When any first phase difference is not equal to zero, the control unit is configured to control the corresponding first phase shift unit to be in the first connection state and the corresponding second phase shift unit to be in the fourth connection state, or control the corresponding first phase shift unit to be in the second connection state and the corresponding second phase shift unit to be in the third connection state; when any first phase difference is equal to zero, the control unit is configured to control the corresponding first phase shift unit to be in the second connection state and the corresponding second phase shift unit to be in the fourth connection state.

7. The power combining device of claim 5, wherein, The first phase shift unit also has a variable first phase shift parameter, and when the first phase shift unit is in the first connection state, a moving angle of the phase angle of the initial radio frequency signal by the first phase shift unit changes according to a change of the first phase shift parameter. The second phase shift unit also has a variable second phase shift parameter, and when the second phase shift unit is in the third connection state, a moving angle of the phase angle of the intermediate radio frequency signal by the second phase shift unit changes according to a change of the second phase shift parameter. The control unit is also configured to, when any first phase difference is not equal to zero, adjust the first phase shift parameter of the corresponding first phase shift unit or the second phase shift parameter of the corresponding second phase shift unit according to the first phase difference which is not equal to zero.

8. The power combining device of claim 1, wherein, The power values of the sub-radio frequency electric energy obtained by each radio frequency power amplifier are equal.

9. The power combining device of claim 1, wherein, Each of the radio frequency power amplifiers has a phase shift error angle, and an average of the phase shift error angles of the N radio frequency power amplifiers is an average phase shift error angle; wherein one of the radio frequency power amplifiers having a difference between the phase shift error angle and the average phase shift error angle that is the smallest is the reference radio frequency power amplifier.

10. A radio frequency power supply system characterized by, A power combining device as claimed in any of claims 1 to 9, comprising a signal source. A power combining device as claimed in any of claims 1 to 9, comprising a signal source.

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