Nine-axis linkage multi-motion device

Abstract

The invention relates to a nine-axis linkage multi-motion device which comprises a supporting platform, a first supporting stand column and a second supporting stand column. The first lifting unit is used for lifting the first working end; the two second lifting units are installed on the first supporting stand column and the second supporting stand column correspondingly; the rotating unit is installed between the two second lifting units, and the second lifting units are used for adjusting the height of the rotating unit; the arc-shaped movement unit is connected with the rotating unit, the rotating unit is used for driving the arc-shaped movement unit to achieve 360-degree rotation, a second working end is arranged on the arc-shaped movement unit, and the arc-shaped movement unit drives the second working end to achieve arc-shaped movement; an X-axis moving unit; and the Y-axis moving unit is arranged on the X-axis moving unit, and the X-axis moving unit and the Y-axis moving unit form an XY double-axis movement system. According to the nine-axis linkage multi-motion device, on the premise that precise motion in the three-dimensional direction can be achieved, precise rotating motion in the two directions can be achieved.

Description

Technical Field

[0001] The invention relates to the field of automation technology, in particular to a nine-axis linkage multi-motion device. Background Art

[0002] With the continuous development of science and technology, in the existing manufacturing industry, CNC technology has become an indispensable technology in modern industrial production and industrialization technology, such as in the industrial production of precision parts processing equipment in electronics, aviation, automobiles, etc., as well as in industrial control such as robot motion.

[0003] Among them, the motion platform is a part of the machine tool equipment, which is used to drive the workpiece to move to the specified position during processing, testing and other operations. The direction of motion usually includes linear motion of the X-axis, Y-axis, and Z-axis, as well as rotational motion around the X-axis, Y-axis, and Z-axis, and even rotational motion around the X-axis and Y-axis.

[0004] With the widespread application of high-precision positioning multi-axis motion platforms in precision processing fields such as semiconductor manufacturing, multi-axis motion platforms are required to have more combinations of motion forms to achieve performance optimization, that is, they need to have translation and rotation, and even more so, arc motion. However, the current motion platform is not only complex in structure, which is not conducive to improving the motion response performance of the platform, but also leads to a large overall longitudinal dimension space of the platform, resulting in low platform motion accuracy, making it difficult to meet the actual application requirements of the semiconductor manufacturing field for high-precision motion platforms. Summary of the invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the problem that the existing technology has a motion platform with higher requirements, the integration is not high, and the use space and motion accuracy cannot be taken into account at the same time.

[0006] In order to solve the above technical problems, the present invention provides a nine-axis linkage multi-motion device, including: a support platform, on which a support column 1 and a support column 2 are provided; a lifting unit 1, which is installed on the support platform, and the lifting unit 1 is used for lifting the working end 1; a lifting unit 2, which is set in two groups, and the two groups of lifting units 2 are respectively installed on the support column 1 and the support column 2; a rotating unit, which is installed between the two groups of lifting units 2, and the lifting unit 2 is used to adjust the height of the rotating unit; an arc motion unit, which is connected to the rotating unit, and the rotating unit is used to drive the arc motion unit to achieve 360° rotation, the arc motion unit is provided with a working end 2, and the arc motion unit drives the working end 2 to achieve arc motion; an X-axis moving unit, which is installed on the support platform; a Y-axis moving unit, which is arranged on the X-axis moving unit, and the X-axis moving unit and the Y-axis moving unit constitute an XY biaxial motion system. The nine-axis linkage multi-motion device of the present invention can realize precise rotational motion in two directions on the premise of realizing precise motion in three-dimensional directions.

[0007] In one embodiment of the present invention, the lifting unit 1 includes a mounting seat 1, a lifting drive motor 1, a lifting screw 1 and a lifting slider 1, the mounting seat 1 is fixedly connected to the support platform, the lifting drive motor 1 and the lifting screw 1 are installed on the mounting seat 1, and the output end of the lifting drive motor 1 is connected to the lifting screw 1, and the lifting slider 1 is connected to the nut pair of the lifting screw 1.

[0008] In one embodiment of the present invention, the second lifting unit includes a second lifting drive motor, a second lifting screw rod, a second lifting slide plate, a second lifting guide rail and a second lifting slider; the output end of the second lifting drive motor is connected to the second lifting screw rod, the second lifting slide plate is connected to the nut pair of the second lifting screw rod, the second lifting slider is fixedly connected to the second lifting slide plate, the second lifting slider is arranged on the second lifting guide rail, and the second lifting slider can slide along the second lifting guide rail, and the rotating unit is arranged on the second lifting slider.

[0009] In one embodiment of the present invention, the rotating unit includes a rotating drive motor, a gear box, two bearing seats and two rotating shafts, the output end of the rotating drive motor is connected to the gear box, the gear box is connected to one of the two rotating shafts, the bearing seat is connected to the second lifting slide, the two bearing seats and the two rotating shafts are arranged in a one-to-one correspondence, the rotating shaft is connected to the bearing seat through a bearing, and the rotating shaft is connected to the arc motion unit.

[0010] In one embodiment of the present invention, the arc motion unit includes an arc support frame, an arc motor and a movable bracket, two ends of the arc support frame are connected to two rotating shafts, the arc motor is installed on the arc support frame, the movable bracket is connected to the mover of the arc motor, and the movable bracket is slidably connected to the arc support frame.

[0011] In one embodiment of the present invention, the X-axis moving unit includes two X-axis linear motors, an X-axis stage, an X-axis slide rail and an X-axis slider, the two X-axis linear motors and the X-axis slide rail are installed on a supporting platform, the X-axis stage is connected to the mover of the X-axis linear motor, the X-axis slider is installed on the X-axis stage, and the X-axis slider is slidably connected to the X-axis slide rail, and the Y-axis moving unit is arranged on the X-axis stage.

[0012] In one embodiment of the present invention, a mounting bar 1 is installed on the support platform, a grating ruler 1 is provided on the mounting bar 1, an encoder 1 is installed on the X-axis stage, and the encoder 1 and the grating ruler 1 are used to calibrate the moving position of the X-axis stage.

[0013] In one embodiment of the present invention, the Y-axis moving unit includes two Y-axis linear motors, a Y-axis stage, a Y-axis slide rail and a Y-axis slider, the Y-axis linear motor and the Y-axis slide rail are both installed on the X-axis stage, the Y-axis stage is connected to the mover of the Y-axis linear motor, the Y-axis slider is connected to the Y-axis slide rail, and the Y-axis slider is slidably connected to the Y-axis slide rail.

[0014] In one embodiment of the present invention, a second grating ruler is installed on the Y-axis stage, and a second encoder is installed on the X-axis stage. The second encoder and the second grating ruler are used to calibrate the position of the Y-axis stage.

[0015] In one embodiment of the present invention, a bearing is provided on the bearing seat, and the rotating shaft is connected to the bearing.

[0016] The above technical solution of the present invention has the following beneficial effects compared with the prior art: The nine-axis linkage multi-motion device described in the present invention is designed to realize the precision movement of the entire device in all directions (movement in the X, Y, Z directions and rotation in the R, θ directions) on the premise of space, precision and cost. The direct drive motor, arc motor, servo screw rod and servo rotary platform are used as power sources to realize the precision module of 9-axis linkage, so that the device has the advantages of wide radiation space at the working end, high motion precision and low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to make the content of the present invention more clearly understood, the present invention is further described in detail below according to specific embodiments of the present invention in conjunction with the accompanying drawings, wherein: Figure 1 The structure of the nine-axis linkage multi-motion device in the preferred embodiment of the present invention is shown in FIG. Figure 1 ; Figure 2 The structure of the nine-axis linkage multi-motion device in the preferred embodiment of the present invention is shown in FIG. Figure 2 ; Figure 3 This is a structural schematic diagram of a lifting unit 1 in a preferred embodiment of the present invention; Figure 4 It is a structural schematic diagram of a rotating unit in a preferred embodiment of the present invention; Figure 5 This is a structural schematic diagram of the lifting unit 2 in a preferred embodiment of the present invention; Figure 6 The structure of the arc motion unit in the preferred embodiment of the present invention is shown in FIG. Figure 1 ; Figure 7 The structure of the arc motion unit in the preferred embodiment of the present invention is shown in FIG. Figure 2 ; Figure 8 The structure of the X-axis moving unit and the Y-axis moving unit in the preferred embodiment of the present invention is shown in FIG. Figure 1 ; Fig. 9 The structure of the X-axis moving unit and the Y-axis moving unit in the preferred embodiment of the present invention is shown in FIG. Figure 2 .

[0018] Description of the accompanying drawings: support platform 1, support column 11, support column 2 12, lifting unit 1 2, mounting seat 1 21, lifting drive motor 1 22, lifting screw rod 1 23, lifting slider 1 24, lifting unit 2 3, lifting drive motor 2 31, lifting screw rod 2 32, lifting slide plate 2 33, lifting guide rail 2 34, lifting slider 2 35, rotating unit 4, rotating drive motor 41, gear box 42, bearing seat 43, bearing 431, rotating shaft 44, arc Arc motion unit 5, arc support frame 51, arc grating scale 511, arc motor 52, movable bracket 53, arc encoder 531, X-axis moving unit 6, X-axis linear motor 61, X-axis stage 62, encoder 1 621, encoder 2 622, X-axis slide rail 63, X-axis slider 64, mounting bar 1 65, grating scale 1 651, Y-axis moving unit 7, Y-axis linear motor 71, Y-axis stage 72, grating scale 2 721, Y-axis slide rail 73, Y-axis slider 74. DETAILED DESCRIPTION

[0019] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0020] Reference Figure 1 , 2As shown, the nine-axis linkage multi-motion device of the present invention includes: a supporting platform 1, on which a supporting column 11 and a supporting column 2 12 are provided; a lifting unit 1 2, which is installed on the supporting platform 1, and the lifting unit 1 2 is used for lifting the working end 1; a lifting unit 2 3, which is arranged in two groups, and the two groups of lifting units 2 3 are respectively installed on the supporting column 1 1 and the supporting column 2 12; a rotating unit 4, which is installed between the two groups of lifting units 2 3, and the lifting unit 2 3 is used to adjust the height of the rotating unit 4; an arc motion unit 5, which is connected to the rotating unit 4, and the rotating unit 4 is used to drive the arc motion unit 5 to realize 360° rotation, the arc motion unit 5 is provided with a working end 2, and the arc motion unit 5 drives the working end 2 to realize arc motion; an X-axis moving unit 6, which is installed on the supporting platform 1; a Y-axis moving unit 7, which is arranged on the X-axis moving unit 6, and the X-axis moving unit 6 and the Y-axis moving unit 7 constitute an XY dual-axis motion system.

[0021] Reference Figure 3 As shown, the lifting unit 2 includes a mounting seat 21, a lifting drive motor 22, a lifting screw rod 23 and a lifting slider 24. The mounting seat 21 is fixedly connected to the support platform 1. The lifting drive motor 22 and the lifting screw rod 23 are mounted on the mounting seat 21, and the output end of the lifting drive motor 22 is connected to the lifting screw rod 23. The lifting slider 24 is connected to the nut pair of the lifting screw rod 23. The outer cover of the lifting screw rod 23 is provided with an accordion cover, and the accordion cover is mounted on the mounting seat 21. The position where the support platform 1 and the lifting unit 2 face each other is set to be hollow, and the XY dual-axis motion system composed of the X-axis moving unit 6 and the Y-axis moving unit 7 is located above the lifting unit 2.

[0022] Reference Figure 4 , 5 As shown, the lifting unit 2 3 includes a lifting drive motor 2 31, a lifting screw rod 2 32, a lifting slide plate 2 33, a lifting guide rail 2 34 and a lifting slider 2 35. The output end of the lifting drive motor 2 31 is connected to the lifting screw rod 2 32, the lifting slide plate 2 33 is connected to the nut pair of the lifting screw rod 2 32, the lifting slide plate 2 35 is fixedly connected to the lifting slide plate 2 33, the lifting slide plate 2 35 is arranged on the lifting guide rail 2 34, and the lifting slide plate 2 35 can slide along the lifting guide rail 2 34, and the rotating unit 4 is arranged on the lifting slide plate 2 33. Two groups of lifting units 2 3 are symmetrically arranged. Two groups of lifting drive motors 2 31, lifting screw rods 2 32 and lifting guide rails 2 34 are respectively arranged on the supporting column 1 11 and the supporting column 2 12, and the lifting guide rails 2 34 are two parallelly arranged, and the lifting guide rails 2 34 are arranged in parallel with the lifting screw rod 2 32. The first supporting column 11 and the second supporting column 12 are both covered with accordion covers, and the second lifting screw rod 32 is covered by the accordion covers.

[0023] Reference Figure 6 As shown, the rotating unit 4 includes a rotating drive motor 41, a gear box 42, two bearing seats 43 and two rotating shafts 44. The output end of the rotating drive motor 41 is connected to the gear box 42, the gear box 42 is connected to one of the two rotating shafts 44, the bearing seat 43 is connected to the lifting slide 2 33, the two bearing seats 43 and the two rotating shafts 44 are arranged in a one-to-one correspondence, the rotating shaft 44 is connected to the bearing seat 43 through a bearing, and the rotating shaft 44 is connected to the arc motion unit 5. Two groups of lifting units 2 3, two bearing seats 43 and two rotating shafts 44 are arranged in a one-to-one correspondence, the bearing seats 43 are respectively installed on the lifting units 2 3, and the rotating unit 4 is driven to rise and fall through the lifting units 2 3. In the accommodating space, the rotating unit 4 can drive the arc motion unit 5 to rotate within a range of 360°. The lifting unit 2 3 rises and falls in the vertical direction, and the rotating unit 4 rotates along the horizontal axis.

[0024] In the above structure, the bearing seat 43 is provided with a bearing 431, and the rotating shaft 44 is connected to the bearing 431. Preferably, the support platform 1, the support column 11 and the support column 2 12 are all made of marble, which is not easily deformed.

[0025] Reference Figure 6 , 7 As shown, the arc motion unit 5 includes an arc support frame 51, an arc motor 52 and a moving bracket 53. The two ends of the arc support frame 51 are connected to two rotating shafts 44. The arc motor 52 is installed on the arc support frame 51. The moving bracket 53 is connected to the mover of the arc motor 52, and the moving bracket 53 is slidably connected to the arc support frame 51. Preferably, the cross section of the arc support frame 51 is semicircular, and the mover of the matching arc motor 52 moves along the arc surface of the arc support frame 51. Two arc guide rails 54 are provided on the arc support frame 51. The bending curvature of the arc guide rail 54 is in the same direction as the curvature of the arc support frame 51 and the moving track of the mover of the arc motor 52. The moving bracket 53 is provided with an arc slider 55, which is arranged on the arc guide rail 54 and can slide along the arc guide rail 54. The arc support frame 51 rotates with the rotating shaft where the two rotating shafts 44 are located. The arc support frame 51 is provided with an arc grating ruler 511 that matches the arc of the arc support frame 51, and the movable support frame 53 is installed with an arc encoder 531, and the arc encoder 531 and the arc grating ruler 511 are used to calibrate the moving position of the movable support frame 53. The XY dual-axis motion system composed of the X-axis moving unit 6 and the Y-axis moving unit 7 is located below the arc support frame 51.

[0026] Reference Figure 8 , 9As shown, the X-axis moving unit 6 includes two X-axis linear motors 61, an X-axis stage 62, an X-axis slide rail 63 and an X-axis slider 64. The two X-axis linear motors 61 and the X-axis slide rail 63 are all mounted on the support platform 1. The X-axis stage 62 is connected to the mover of the X-axis linear motor 61. The X-axis slider 64 is mounted on the X-axis stage 62, and the X-axis slider 64 is slidably connected to the X-axis slide rail 63. The Y-axis moving unit 7 is arranged on the X-axis stage 62. The X-axis slide rail 63 is in the same direction as the mover of the X-axis linear motor 61. The X-axis slide rails 63 are two parallel slide rails, and the two X-axis slide rails 63 and the X-axis linear motor 61 are arranged one by one. The support platform 1 is provided with a mounting bar 65, on which a grating ruler 651 is provided, and an encoder 621 is provided on the X-axis stage 62, and the encoder 621 and the grating ruler 651 are used to calibrate the moving position of the X-axis stage 62. The mounting bar 65 is made of marble and is not easily deformed.

[0027] In the above structure, the Y-axis moving unit 7 includes two Y-axis linear motors 71, a Y-axis stage 72, a Y-axis slide rail 73 and a Y-axis slider 74. The Y-axis linear motor 71 and the Y-axis slide rail 73 are both installed on the X-axis stage 62. The Y-axis stage 72 is connected to the mover of the Y-axis linear motor 71, and the Y-axis slider 74 is connected to the Y-axis slide rail 73, and the Y-axis slider 74 is slidably connected to the Y-axis slide rail 73. The Y-axis slide rail 73 is arranged along the moving direction of the mover of the Y-axis linear motor 71. The Y-axis slide rail 73 is two parallel rails. The two Y-axis slide rails 73 and the two Y-axis linear motors 71 are arranged one by one. The Y-axis slide rail 73 is perpendicular to the X-axis slide rail 63. A grating ruler 2 721 is installed on the Y-axis stage 72, and an encoder 2 622 is installed on the X-axis stage 62. The encoder 2 622 and the grating ruler 2 721 are used to calibrate the position of the Y-axis stage 72. Each motion mechanism uses an encoder to achieve high-precision motion.

[0028] Obviously, the above embodiments are merely examples for clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the protection scope of the invention.

Claims

1. A nine-axis linkage multi-motion device, characterized in that: include: A supporting platform, on which a supporting column 1 and a supporting column 2 are provided; A lifting unit 1, which is installed on the supporting platform, and the lifting unit 1 is used for lifting the working end 1; The lifting unit 2 is provided in two groups, and the two groups of the lifting unit 2 are respectively installed on the supporting column 1 and the supporting column 2; A rotating unit, which is installed between the two sets of lifting units 2, and the lifting units 2 are used to adjust the height of the rotating unit; An arc motion unit connected to the rotating unit, the rotating unit is used to drive the arc motion unit to achieve 360° rotation, the arc motion unit is provided with a working end 2, and the arc motion unit drives the working end 2 to achieve arc motion; An X-axis moving unit, which is mounted on the supporting platform; The Y-axis moving unit is arranged on the X-axis moving unit, and the X-axis moving unit and the Y-axis moving unit constitute an XY dual-axis motion system.

2. The nine-axis linkage multi-motion device according to claim 1, characterized in that: The lifting unit 1 includes a mounting seat 1, a lifting drive motor 1, a lifting screw rod 1 and a lifting slider 1. The mounting seat 1 is fixedly connected to the support platform, the lifting drive motor 1 and the lifting screw rod 1 are installed on the mounting seat 1, and the output end of the lifting drive motor 1 is connected to the lifting screw rod 1, and the lifting slider 1 is connected to the nut pair of the lifting screw rod 1.

3. The nine-axis linkage multi-motion device according to claim 1 or 2, characterized in that: The second lifting unit includes a second lifting drive motor, a second lifting screw rod, a second lifting slide plate, a second lifting guide rail and a second lifting slider. The output end of the second lifting drive motor is connected to the second lifting screw rod, the second lifting slide plate is connected to the nut pair of the second lifting screw rod, the second lifting slider is fixedly connected to the second lifting slide plate, the second lifting slider is arranged on the second lifting guide rail, and the second lifting slider can slide along the second lifting guide rail, and the rotating unit is arranged on the second lifting slider.

4. The nine-axis linkage multi-motion device according to claim 3, characterized in that: The rotating unit includes a rotating drive motor, a gear box, two bearing seats and two rotating shafts. The output end of the rotating drive motor is connected to the gear box, the gear box is connected to one of the two rotating shafts, the bearing seat is connected to the second lifting slide plate, the two bearing seats and the two rotating shafts are arranged in a one-to-one correspondence, the rotating shaft is connected to the bearing seat through a bearing, and the rotating shaft is connected to the arc motion unit.

5. The nine-axis linkage multi-motion device according to claim 4, characterized in that: The arc motion unit includes an arc support frame, an arc motor and a movable bracket, two ends of the arc support frame are connected to two rotating shafts, the arc motor is installed on the arc support frame, the movable bracket is connected to the mover of the arc motor, and the movable bracket is slidably connected to the arc support frame.

6. The nine-axis linkage multi-motion device according to claim 1, characterized in that: The X-axis moving unit includes two X-axis linear motors, an X-axis platform, an X-axis slide rail and an X-axis slider. The two X-axis linear motors and the X-axis slide rail are all installed on a supporting platform. The X-axis platform is connected to the mover of the X-axis linear motor. The X-axis slider is installed on the X-axis platform, and the X-axis slider is slidably connected to the X-axis slide rail. The Y-axis moving unit is arranged on the X-axis platform.

7. The nine-axis linkage multi-motion device according to claim 6, characterized in that: A mounting bar 1 is installed on the support platform, a grating ruler 1 is provided on the mounting bar 1, an encoder 1 is installed on the X-axis stage, and the encoder 1 and the grating ruler 1 are used to calibrate the moving position of the X-axis stage.

8. The nine-axis linkage multi-motion device according to claim 6, characterized in that: The Y-axis moving unit includes two Y-axis linear motors, a Y-axis platform, a Y-axis slide rail and a Y-axis slider. The Y-axis linear motor and the Y-axis slide rail are both installed on the X-axis platform. The Y-axis platform is connected to the mover of the Y-axis linear motor, the Y-axis slider is connected to the Y-axis slide rail, and the Y-axis slider is slidably connected to the Y-axis slide rail.

9. The nine-axis linkage multi-motion device according to claim 8, characterized in that: The Y-axis stage is provided with a grating ruler 2, and the X-axis stage is provided with an encoder 2. The encoder 2 and the grating ruler 2 are used to calibrate the position of the Y-axis stage.

10. The nine-axis linkage multi-motion device according to claim 4, characterized in that: The bearing seat is provided with a bearing, and the rotating shaft is connected to the bearing.

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