Recycling method of titanium back pipe for rotary casting target material

Abstract

The invention relates to a recycling method of a titanium back pipe for a rotary casting target material, the rotary casting target material comprises a back pipe and a target material, the back pipe is a carrier of the target material, an etching groove is formed in the position, close to the end, of the target material used after sputtering, and the recycling method comprises the following steps that S1, the back pipe is checked; the method comprises the following steps: aiming at a rotating casting target material used after sputtering, after determining that the depth of an etching groove reaches a back pipe, judging that the target material reaches the highest service life, at the moment, checking the connection mode of the end part of the used back pipe, checking whether the connection mode has a damage sign or not, and checking the condition of the inner wall of the back pipe; and the back pipe is ensured not to be damaged in the use and transportation processes of the sputtering end. According to the recycling method of the titanium back pipe for the rotary casting target material, the rotary casting target material used after sputtering is treated, the mold outer sleeve is installed for casting, the rotary metal target material subjected to secondary casting can be obtained, the machining process is simple, the quality is stable, the treated back pipe can be repeatedly used, and the cost is low. And the technical requirement of repeatedly casting the target material is completely met.

Description

Technical Field

[0001] The invention relates to the technical field of processing and preparing a casting rotary target material, in particular to a method for recycling a titanium backing tube used for a rotary casting target material. Background Art

[0002] Rotating targets are usually composed of an inner tube and a surface sputtering coating material. The inner tube supports the target and is also called a back tube. Stainless steel or other hard metal tubes are usually used as back tubes. For low-melting-point, easy-to-cast metal and alloy rotating targets, such as aluminum, copper, tin, zinc, lead, nickel, gold, silver, etc., casting is often used for preparation. Sputtering targets made by casting are generally larger in size, higher in density, and denser in structure. This also means that the weight of cast targets is generally larger. Using a stainless steel inner tube may cause deformation, cracking, and other problems. Titanium alloys have high strength, low density, and corrosion resistance. It has excellent performance and is often used as the choice of back tube for casting targets. Due to the limitations of the titanium tube preparation process, the longer the titanium tube, the higher the cost. The production process of large-sized titanium tubes is a butt welding process after extrusion, which is not easy to mass produce. At the same time, due to the existence of the end etching grooves during the sputtering process, the remaining target material on the back tube of the rotating target for sputtering cannot be further used. The overall utilization rate of the target is generally 70%. In order to further reduce production costs, make full use of the remaining precious metal target materials after sputtering, and meet the future large-scale target preparation, it is necessary to recycle the titanium back tube of the large-size rotating target.

[0003] Therefore, there is an urgent need for a method for recycling titanium backing tubes for rotary casting targets with simple processing technology and stable quality. Summary of the invention

[0004] The purpose of the present invention is to overcome the above-mentioned shortcomings and provide a method for recycling a titanium backing tube for a rotary casting target material with simple processing technology and stable quality.

[0005] The object of the present invention is achieved in that:

[0006] A method for recycling a titanium backing tube for a rotary casting target, wherein the rotary casting target comprises a backing tube and a target material, wherein the backing tube is a carrier of the target material, and an etching groove is formed near the end of the target material after sputtering, comprising the following steps:

[0007] S1, check the back tube; for the spin casting target after sputtering, after determining that the depth of the etching groove reaches the back tube, it is determined that the target has reached the maximum service life. At this time, check the connection method of the back tube end after use to see if there is any sign of damage, and check the condition of the inner wall of the back tube to ensure that the back tube is not damaged during use at the sputtering end and transportation;

[0008] S2, turning: processing the end of the used target material, and taking the lowest point of the etched groove as the reference datum for the minimum diameter of turning;

[0009] S3, polishing: use a polishing belt to polish the surface of the residual target material to remove various impurities attached to the surface of the target material during the sputtering process and transportation;

[0010] S4, embossing; using an embossing mold, embossing the embossed portion 121 on the surface of the residual target material after the polishing process;

[0011] S5, installing the protective sleeve; installing the plastic protective sleeve on the end of the residual target material, ensuring that the sleeve is firmly installed and fits tightly to the end of the target material;

[0012] S6, sandblasting: Use steel grit to sandblast the sandblasting part of the back tube end after turning. After the sandblasting is completed, remove the package and use compressed gas to completely clean the steel grit remaining in the sandblasting part to ensure that the surface of the sandblasting part is clean;

[0013] S7, welding the mold jacket; selecting a special mold jacket for the target material that is compatible with the rotary casting target material, putting the mold jacket on the outside of the target material, and welding it to the backing tube;

[0014] S8, casting; injecting the pre-melted metal casting liquid into the mold jacket cavity that has completed the above-mentioned processing steps, and controlling the casting speed and temperature during the casting process;

[0015] S9, demoulding; after the casting is completed, the mold jacket is insulated to allow the metal casting liquid to gradually cool and solidify under a suitable temperature environment. After the cooling process is completed, the demoulding operation is performed to finally obtain the finished product.

[0016] Preferably, in step S2, the lowest point of the etched groove is used as the starting position during turning, and the turning operation is performed toward the inside of the target material, and the turning length is controlled within a range of 40 mm to 80 mm.

[0017] Preferably, in step S3, the polishing belt is an aluminum oxide polishing belt.

[0018] Preferably, in step S6, G14 steel grit is used for sandblasting.

[0019] Preferably, in step S7, one end of the mold jacket is sealed by welding to the back tube, and a support plate is fixedly provided on the inner wall of the other end thereof, and the support plate supports the mold jacket by abutting against the back tube to ensure that the mold jacket is concentric with the back tube.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The method for recycling the titanium back tube for the rotary casting target of the present invention can obtain a secondary cast rotary metal target by processing the rotary casting target after sputtering and installing a mold jacket for casting. The method has simple processing technology and stable quality. The processed back tube can be reused, which fully meets the technical requirements of repeated casting targets.

[0022] 2. The method for recycling the titanium back tube for the rotary casting target of the present invention forms a specific texture and pattern on the surface of the target by embossing the surface of the rotary casting target after sputtering, thereby increasing the bonding strength with the subsequent casting material and ensuring that the casting material can be tightly attached to the surface of the target during the secondary casting process. The sandblasting treatment can further improve the bonding performance between the casting material and the back tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the three-dimensional structure of the rotary casting target in the method for recycling the titanium backing tube for the rotary casting target of the present invention.

[0024] Figure 2 It is a schematic diagram of the three-dimensional structure of the rotary casting target after sputtering in the method for recycling the titanium backing tube for the rotary casting target of the present invention.

[0025] Figure 3 It is a schematic structural diagram of the rotary casting target in step S4 of the method for recycling the titanium backing tube for the rotary casting target of the present invention.

[0026] Figure 4 It is a schematic diagram of the structure of the rotary casting target in steps S5 and S6 of the method for recycling the titanium backing tube for the rotary casting target of the present invention.

[0027] Figure 5 It is a schematic diagram of the structure of the rotary casting target in step S8 of the method for recycling the titanium backing tube for the rotary casting target of the present invention.

[0028] Among them: a rotary casting target 1, a back tube 11, a sandblasting part 111, a target 12, an embossing part 121, an etching groove 13, a sleeve 2, and a mold jacket 3. DETAILED DESCRIPTION

[0029] See also Figures 1 to 5 The present invention relates to a method for recycling a titanium backing tube for a rotary casting target. The rotary casting target 1 includes a backing tube 11 and a target material 12, wherein the backing tube 11 is a carrier of the target material 12, and an etching groove 13 is formed near the end of the target material 12 after sputtering, comprising the following steps:

[0030] S1, check the back tube; for the spin casting target 1 after sputtering, after determining that the depth of the etched groove 13 reaches the back tube 11, it is determined that the target 12 has reached the maximum service life. At this time, the connection mode of the end of the back tube 11 after use is checked to see if there is any damage, deformation or other damage signs in the connection mode, and the inner wall of the back tube 11 is checked to ensure that the back tube 11 is not damaged during use at the sputtering end and transportation, such as cracks, corrosion pits or foreign matter attachment, and is cleaned in time;

[0031] S2, turning; processing the end of the used target material 12, taking the lowest point of the etched groove 13 as the reference datum for the minimum diameter of turning, starting from the lowest point of the etched groove 13, and performing turning operation toward the inside of the target material 12, and controlling the turning length to be 40 mm to 80 mm;

[0032] S3, polishing: polishing the surface of the residual target material 12 with a polishing belt to remove various impurities such as metal particles, oxides, etc. attached to the surface of the target material 12 during the sputtering process and transportation, so that the surface of the target material 12 reaches a certain smoothness standard through polishing, providing a good basic condition for subsequent embossing treatment;

[0033] S4, embossing: using a professional embossing die, embossing the embossed portion 121 on the surface of the residual target material 12 after polishing, so that a specific texture and pattern are formed on the surface of the target material 12, thereby increasing the bonding force with the subsequent casting material and ensuring that the casting material can be closely attached to the surface of the target material 12 during the secondary casting process;

[0034] S5, installing the protective sleeve; installing the plastic protective sleeve 2 at the end of the residual target material 12, ensuring that the sleeve 2 is firmly installed and tightly fits the end of the target material 12 to prevent subsequent steel sand from adhering to the target material 12 and contaminating the target material 12;

[0035] S6, sandblasting; using G14 steel grit to sandblast the sandblasting portion 111 at the end of the back tube 11 after turning. After the sandblasting is completed, the sleeve 2 is removed, and the steel grit remaining in the sandblasting portion 111 is completely cleaned using compressed gas to ensure that the surface of the sandblasting portion 111 is clean, thereby further improving the bonding performance between the casting material and the back tube 11;

[0036] S7, welding the mold jacket; select a target-specific mold jacket 3 that is compatible with the rotary casting target 1, put the mold jacket 3 on the outside of the target 12, and weld it to the back tube 11. During welding, ensure that one end of the mold jacket 3 is sealed by welding with the back tube 11 without welding defects. At the same time, a support sheet is fixedly provided on the inner wall of the other end of the mold jacket 3, and the mold jacket 3 and the back tube 11 are firmly connected through the support sheet, ensuring that the mold jacket 3 is concentric with the back tube 1, and at the same time ensuring that the mold jacket 3 will not be displaced or deformed during the subsequent casting process, providing a stable and reliable mold structure for the casting process;

[0037] S8, casting; slowly and evenly inject the pre-melted metal casting liquid into the mold cavity 3 of the mold jacket 3 that has completed the above-mentioned processing steps. During the casting process, the casting speed and temperature are controlled to prevent problems such as insufficient casting, bubble generation or uneven temperature;

[0038] S9, demoulding; after the casting is completed, the mold jacket 3 is wrapped with a heating device, and the mold jacket 3 is insulated so that the metal casting liquid is gradually cooled and solidified in a suitable temperature environment. After the cooling process is completed, the demoulding operation is performed, and finally the rotating metal target material of the secondary casting can be obtained.

[0039] In addition: It should be noted that the above specific implementation is only an optimization scheme of this patent. Any changes or improvements made by technicians in this field based on the above concept are within the scope of protection of this patent.

Claims

1. A method for recycling a titanium backing tube for a rotary casting target, wherein the rotary casting target (1) comprises a backing tube (11) and a target (12), wherein: The back tube (11) is a carrier of the target material (12), and an etching groove (13) is formed near the end of the target material (12) after sputtering. The method is characterized in that it includes the following steps: S1, check the back tube; for the spin casting target (1) after sputtering, after determining that the depth of the etched groove (13) reaches the back tube (11), it is determined that the target (12) has reached the maximum service life. At this time, the connection method of the end of the back tube (11) after use is checked to see if there is any sign of damage to the connection method, and the condition of the inner wall of the back tube (11) is checked to ensure that the back tube (11) is not damaged during use at the sputtering end and transportation; S2, turning; processing the end of the used target material (12), and taking the lowest point of the etched groove (13) as a reference for the minimum diameter of turning; S3, polishing; using a polishing belt, polishing the surface of the residual target material (12) to remove various impurities attached to the surface of the target material (12) during the sputtering process and the transportation link; S4, embossing; using an embossing die, embossing the embossed portion (121) on the surface of the residual target material (12) after the polishing process; S5, installing a protective sleeve; installing a plastic protective sleeve (2) at the end of the residual target material (12), ensuring that the sleeve (2) is firmly installed and fits tightly to the end of the target material (12); S6, sandblasting; using steel grit to sandblast the sandblasting portion (111) at the end of the back tube (11) after turning. After the sandblasting is completed, the sleeve (2) is removed, and compressed gas is used to completely clean the steel grit remaining in the sandblasting portion (111) to ensure that the surface of the sandblasting portion (111) is clean; S7, welding the mold jacket; selecting a target-specific mold jacket (3) that is compatible with the rotary casting target (1), sleeve the mold jacket (3) on the outside of the target (12), and weld it to the backing tube (11); S8, casting; injecting the pre-melted metal casting liquid into the mold jacket 3 cavity that has completed the above processing steps, during the casting process, controlling the casting speed and temperature; S9, demoulding; after the casting is completed, the mold jacket (3) is insulated to allow the metal casting liquid to gradually cool and solidify under a suitable temperature environment. After the cooling process is completed, the demoulding operation is performed to finally obtain the finished product.

2. The method for recycling a titanium backing tube for a rotary casting target according to claim 1, characterized in that: In step S2, during turning, the lowest point of the etching groove (13) is used as the starting position, and the turning operation is performed toward the inside of the target material (12), and the turning length is controlled within a range of 40 mm to 80 mm.

3. The method for recycling a titanium backing tube for a rotary casting target according to claim 1, characterized in that: In step S3, the polishing belt is an aluminum oxide polishing belt.

4. The method for recycling titanium backing tube for rotary casting target according to claim 1, characterized in that: In step S6, sandblasting is performed using G14 steel grit.

5. The method for recycling titanium backing tube for rotary casting target according to claim 1, characterized in that: In step S7, one end of the mold sleeve (3) is sealed by welding to the back tube (11), and a support plate is fixedly provided on the inner wall of the other end thereof. The support plate supports the mold sleeve (3) by abutting against the back tube (11), thereby ensuring that the mold sleeve (3) is concentric with the back tube 1.

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