Spectral confocal three-dimensional scanning measurement structure

Abstract

The invention discloses a spectrum confocal three-dimensional scanning and measuring structure which comprises a base, and a scanning and measuring assembly is installed on the base. The scanning measurement assembly comprises a spectral measurement assembly and a mechanical measurement assembly, the mechanical measurement assembly comprises a direct measurement part and a feedback measurement part, and the direct measurement part and the feedback measurement part are installed on the base in a linkage mode; the spectral measurement assembly is mounted on the peripheral side of the feedback measurement part; the direct measuring part is used for being in contact with the surface of a workpiece to be measured to generate direct displacement change; the feedback measuring part performs feedback displacement change along with the direct measuring part; the spectral measurement assembly measures the feedback displacement change generated by the feedback measurement part, and obtains the position change data of the feedback measurement part in the space, thereby obtaining the size of the to-be-measured workpiece.

Description

Technical Field

[0001] The invention relates to the technical field of measuring equipment, and in particular to a spectral confocal three-dimensional scanning measurement structure. Background Art

[0002] Spectral confocal sensor, as a high-precision measurement device based on optical principles, has been widely used in the field of high-precision measurement due to its unique advantages.

[0003] Spectral confocal sensors can achieve nanometer-level precise measurement of displacement, morphology and other parameters of the surface or internal structure of an object by utilizing the interference effect of lasers and spectral analysis technology. However, traditional spectral confocal sensors have certain limitations in application, mainly manifested in the singleness of the measurement form, that is, most of them can only measure a single angle or a single dimension, and have low applicability.

[0004] Therefore, it is necessary to provide a spectral confocal three-dimensional scanning measurement structure to solve the problems mentioned in the above background technology. Summary of the invention

[0005] To achieve the above object, the present invention provides the following technical solution: a spectral confocal three-dimensional scanning measurement structure, comprising: a base, on which a scanning measurement component is installed;

[0006] The scanning measurement component includes a spectral measurement component and a mechanical measurement component. The mechanical measurement component includes a direct measurement unit and a feedback measurement unit. The direct measurement unit and the feedback measurement unit are installed on the base in a linkage manner. The spectral measurement component is installed around the feedback measurement unit.

[0007] The direct measuring part is used to contact the surface of the workpiece to be measured to produce a direct displacement change;

[0008] The feedback measurement unit follows the direct measurement unit to generate feedback displacement changes;

[0009] The spectrum measurement component measures the feedback displacement change generated by the feedback measurement unit, obtains the position change data of the feedback measurement unit in space, and thus obtains the size of the workpiece to be measured.

[0010] Preferably, the mechanical measurement assembly comprises a connecting rod structure, the connecting rod structure passes through the base and is rotatably connected to the base;

[0011] The direct measurement part and the feedback measurement part are respectively installed at two ends of the connecting rod structure.

[0012] Preferably, the connecting rod structure comprises:

[0013] A fixing sleeve, the direct measuring part is installed at the lower end of the fixing sleeve, a connecting rod is coaxially arranged at the upper end of the fixing sleeve, a ball joint structure is installed on the rod body of the connecting rod, the connecting rod is rotatably connected to the base through the ball joint structure, and the feedback measuring part is installed at the upper end of the connecting rod.

[0014] Preferably, the measuring structure further comprises a mobile reset structure installed in the base;

[0015] The movable reset structure comprises an axial reset unit and a radial reset unit, wherein the axial reset unit and the radial reset unit are respectively connected to the base and the connecting rod structure, and are respectively used for axially and radially resetting the connecting rod structure.

[0016] Preferably, the radial reset unit comprises: an adjustment block, a plurality of the adjustment blocks are arranged circumferentially along the inner wall of the base, a connecting seat is provided on the rod body of the connecting rod, and the connecting seat is elastically connected to each of the adjustment blocks via a tension spring.

[0017] Preferably, the axial resetting unit comprises:

[0018] The first leaf spring is a cross-shaped thin plate structure, and an avoidance hole is opened in the middle of the first leaf spring for avoiding the connecting rod. The end of the first leaf spring close to the avoidance hole is connected to the upper end of the outer ring of the ball joint structure through a plurality of screws, and the end of the first leaf spring away from the avoidance hole is connected to the base through a plurality of screws.

[0019] Preferably, a second leaf spring is further provided at the lower end of the base, the second leaf spring has the same structure as the first leaf spring, a spring buckle is coaxially installed at the avoidance hole of the second leaf spring, and the spring buckle is located between the connecting seat and the fixing sleeve.

[0020] Preferably, the spring buckle is an annular plate structure, and the inner ring size of the spring buckle is larger than the outer diameter of the connecting rod and smaller than the outer diameter of the fixing sleeve.

[0021] Preferably, at least four spectral measurement components are provided, three of which are located in the horizontal direction of the spatial coordinates established with the feedback measurement unit as the center, and one spectral measurement component is located in the vertical direction of the spatial coordinates established with the feedback measurement unit as the center, and the position change data of the feedback measurement unit in space is obtained by measuring the displacement change of the feedback measurement unit in each direction.

[0022] Preferably, the spacing between each of the spectral measurement components and the feedback measurement unit in a vertical state is the same.

[0023] Compared with the prior art, the present invention provides a spectral confocal three-dimensional scanning measurement structure, which has the following beneficial effects:

[0024] In the present invention, by setting a spectral measurement component and a mechanical measurement component,

[0025] A direct measurement part and a feedback measurement part are set in the scanning measurement component to give full play to the high-precision measurement characteristics of the spectral confocal sensor, and the non-contact measurement of the spectral confocal sensor is converted into contact measurement. The buffer reset component enables the probe to be adaptively deflected or lifted and reset in real time, thereby realizing the measurement of structural dimensions of different dimensions on the surface of the workpiece to be measured and improving the applicability of the spectral confocal sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall cross-sectional structure of a spectral confocal three-dimensional scanning measurement structure;

[0027] Figure 2 It is a schematic diagram of a structure of a spectral confocal three-dimensional scanning measurement structure fixing seat;

[0028] Figure 3 A schematic diagram of a calculation structure when a measuring rod assembly of a spectral confocal three-dimensional scanning measurement structure has no angle deviation;

[0029] Figure 4 A schematic diagram of a calculation structure when an angle deviation occurs in a measuring rod component of a spectral confocal three-dimensional scanning measurement structure;

[0030] In the figure: 1. Shell; 2. Base; 3. Measuring hole; 4. Spectral measurement component; 5. Direct measurement part; 6. Feedback measurement part; 7. Fixing sleeve; 8. Connecting rod; 9. Ball joint structure; 10. Sliding hole; 11. Mounting cavity; 12. Adjusting block; 13. Connecting seat; 14. Tension spring; 15. First leaf spring; 16. Second leaf spring; 17. Spring buckle. DETAILED DESCRIPTION

[0031] See also Figure 1-4 The present invention provides a spectral confocal three-dimensional scanning measurement structure, comprising:

[0032] A base 2, on which a scanning measurement component is installed;

[0033] The scanning measurement component includes a spectral measurement component 4 and a mechanical measurement component. The mechanical measurement component includes a direct measurement unit 5 and a feedback measurement unit 6. The direct measurement unit 5 and the feedback measurement unit 6 are installed on the base 2 in a linkage manner. The spectral measurement component 4 is installed around the feedback measurement unit 6.

[0034] The direct measuring part 5 is used to contact the surface of the workpiece to be measured and generate direct displacement changes;

[0035] The feedback measurement unit 6 follows the direct measurement unit 5 to generate feedback displacement changes;

[0036] The spectrum measurement component 4 measures the feedback displacement change generated by the feedback measurement unit 6 to obtain the position change data of the feedback measurement unit 6 in space, thereby obtaining the size of the workpiece to be measured.

[0037] Specifically, the direct measurement unit 5 and the feedback measurement unit 6 are both spherical structures.

[0038] Furthermore, the mechanical measurement assembly includes a connecting rod structure, which passes through the base 2 and is rotatably connected to the base 2;

[0039] The direct measurement part 5 and the feedback measurement part 6 are respectively installed at two ends of the connecting rod structure.

[0040] Furthermore, the connecting rod structure includes:

[0041] A fixing sleeve 7, the direct measuring part 5 is installed at the lower end of the fixing sleeve 7, a connecting rod 8 is coaxially arranged at the upper end of the fixing sleeve 7, a ball joint structure 9 is installed on the rod body of the connecting rod 8, the connecting rod 8 is rotationally connected to the base 2 through the ball joint structure 9, and the feedback measuring part 6 is installed at the upper end of the connecting rod 8.

[0042] Preferably, the base 2 is installed inside the shell 1 , a measuring hole 3 is opened at the lower end of the shell 1 , and the direct measuring part 5 is arranged downward through the measuring hole 3 .

[0043] It should be explained that in the initial state, the mechanical measurement component is in a vertical state. When working, the housing 1 is driven to move by the detection device driving end, thereby driving the direct measurement part 5 to contact and displace the surface of the workpiece to be measured. The workpiece size is fed back to the feedback measurement part 6 through the displacement of the direct measurement part 5, and the spectral measurement component 4 detects the initial relative displacement between the feedback measurement part 6 and the feedback measurement part 6, thereby calculating the measurement value of the workpiece to be measured by the direct measurement part 5, and realizing the measurement of the structural dimensions of different dimensions of the surface of the workpiece to be measured.

[0044] Furthermore, the measuring structure also includes a mobile reset structure installed in the base 2;

[0045] The movable reset structure comprises an axial reset unit and a radial reset unit, and the axial reset unit and the radial reset unit are respectively connected to the base 2 and the connecting rod structure, and are respectively used for axially and radially resetting the connecting rod structure.

[0046] Furthermore, the radial reset unit includes: an adjustment block 12, a plurality of which are arranged circumferentially along the inner wall of the base 2, a connecting seat 13 is provided on the rod body of the connecting rod 8, and the connecting seat 13 is elastically connected to each of the adjustment blocks 12 via a tension spring 14.

[0047] Furthermore, the axial resetting unit comprises:

[0048] The first leaf spring 15 is a cross-shaped thin plate structure, and a avoidance hole is opened in the middle of the first leaf spring 15 for avoiding the connecting rod 8. The end of the first leaf spring 15 close to the avoidance hole is connected to the upper end of the outer ring of the ball joint structure 9 through a plurality of screws, and the end of the first leaf spring 15 away from the avoidance hole is connected to the base 2 through a plurality of screws.

[0049] Specifically, the ball joint structure 9 is a joint bearing, which includes an inner ring and an outer ring. It is an existing structure and will not be described in detail here. The portion between the screw at the upper end of the outer ring of the joint bearing and the screw at one end away from the avoidance hole is the buffer reset portion of the first leaf spring 15, which is used to axially reset the measuring rod assembly.

[0050] Preferably, the base 2 is a rotating body structure, a sliding hole 10 is coaxially opened in the base 2, the connecting rod structure is slidably arranged in the sliding hole 10, and an installation cavity 11 is coaxially opened at the lower end of the sliding hole 10, and the radial reset unit is installed in the installation cavity 11.

[0051] Furthermore, a second leaf spring 16 is provided at the lower end of the base 2. The second leaf spring 16 has the same structure as the first leaf spring 15. A spring clip 17 is coaxially installed at the avoidance hole of the second leaf spring 16. The spring clip 17 is located between the connecting seat 13 and the fixing sleeve 7.

[0052] It should be explained that, under the action of the mobile reset structure, the direct measuring part 5 can flexibly deflect and reset when in contact with the surface of the workpiece to be measured, and within a certain size range, the direct measuring part 5 can completely fit and displace with the surface of the workpiece to be measured, which is conducive to ensuring detection accuracy.

[0053] Furthermore, the spring buckle 17 is an annular plate structure, and the inner ring size of the spring buckle 17 is larger than the outer diameter of the connecting rod 8 and smaller than the outer diameter of the fixing sleeve 7, so as to enhance the axial resetting effect on the mechanical measuring component.

[0054] Furthermore, at least four spectral measurement components 4 are provided, wherein three of the spectral measurement components 4 are located in the horizontal direction of the spatial coordinates established with the feedback measurement unit 6 as the center, and one spectral measurement component 4 is located in the vertical direction of the spatial coordinates established with the feedback measurement unit 6 as the center. By measuring the displacement change of the feedback measurement unit 6 in each direction, the position change data of the feedback measurement unit 6 in space is obtained.

[0055] Specifically, the spectral measurement component 4 is a spectral confocal sensor, which utilizes the high precision characteristics of the spectral confocal sensor and the principle of four points in space determining a sphere, and calculates the relative displacement of the feedback measurement unit 6 and the relative displacement of the connecting rod structure in the axial direction, thereby calculating the actual size value of the workpiece to be measured, thereby realizing the measurement of structural dimensions of different dimensions on the surface of the workpiece to be measured, and converting the non-contact measurement function of the spectral confocal sensor into a contact measurement function, thereby improving the applicability of the spectral confocal sensor.

[0056] Furthermore, the spacing between each of the spectrum measurement components 4 and the feedback measurement unit 6 in the vertical state is the same.

[0057] In the present invention, the calculation process of detecting the size of the workpiece to be measured based on the relative displacement of the feedback measuring unit 6 is:

[0058] 1. The mechanical measuring components do not have any angular deviation during measurement (e.g. Figure 3 As shown), the value of the spectral confocal sensor in the vertical direction is recorded as △Z, and the value of the spectral confocal sensor in the horizontal direction is recorded as △X1, △X2, and △X3. If △X1=△X2=△X3, that is, △X1, △X2, and △X3 are the initial spacings between the horizontally arranged spectral confocal sensor and the feedback measurement part 6, it indicates that there is no angular deviation in the mechanical measurement component, and △Z is recorded as the value of the dimension of the workpiece to be measured at that position.

[0059] 2. The mechanical measuring component is offset at an angle during measurement (e.g. Figure 4 As shown), based on the first point numerical setting, the angle between the measuring rod assembly and the Z axis is recorded as θ, the radius of the sphere of the feedback measuring part 6 is recorded as R, the distance between the center of the sphere of the feedback measuring part 6 and the rotation center of the joint bearing in the zero state is recorded as Y, and the displacement of the mechanical measuring assembly in the Z axis direction is recorded as ω;

[0060] First, according to the judgment condition △X1≠△X2 or △X3≠△X2 or △X1≠△X3, if the judgment is established, the mechanical measurement component has an angular deviation;

[0061] According to trigonometric calculation: Here, △X is the relative displacement value between △X1 and △X2 and △X3; at this time, the height in the Z-axis direction in the triangle with angle θ is Y-ω (the downward displacement ω of the direct measuring part 5 is a positive value, and the upward displacement is a negative value of ω);

[0062] The relative displacement in the horizontal direction is △X, so the value of the angle θ is solved as follows:

[0063] arctanθ

[0064] tanθ=△X / (Y-ω)

[0065] Finally, the displacement direction of △X is obtained according to the vector definition relationship to calculate the angle θ;

[0066] The above calculation process is just a simple illustration of the solution and is not the only one.

[0067] During specific implementation, the driving end of the detection device drives the shell to move, thereby driving the direct measurement part to contact and displace the surface of the workpiece to be measured. The contact between the direct measurement part and the surface of the workpiece to be measured generates displacement, and the workpiece size is fed back to the feedback measurement part through the displacement of the direct measurement part. The relative displacement of the feedback measurement part is then detected by four groups of spectral confocal sensors. The high-precision characteristics of the spectral confocal sensors and the principle of determining a sphere by four points in space are utilized to calculate the relative displacement of the feedback measurement part and the relative displacement of the mechanical measurement component in the axial direction, thereby calculating the measurement value of the direct measurement part on the workpiece to be measured, thereby realizing the measurement of structural dimensions of different dimensions on the surface of the workpiece to be measured.

[0068] What has been described above are only preferred specific implementations of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, can make equivalent replacements or changes based on the technical solutions and inventive concepts of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A spectral confocal three-dimensional scanning measurement structure, characterized in that: include: A base (2), wherein a scanning measurement component is mounted on the base (2); The scanning measurement component comprises a spectral measurement component (4) and a mechanical measurement component, the mechanical measurement component comprises a direct measurement unit (5) and a feedback measurement unit (6), the direct measurement unit (5) and the feedback measurement unit (6) are mounted on the base (2) in a linked manner; the spectral measurement component (4) is mounted on the peripheral side of the feedback measurement unit (6); The direct measuring part (5) is used to contact the surface of the workpiece to be measured to generate a direct displacement change; The feedback measurement unit (6) follows the direct measurement unit (5) to generate feedback displacement changes; The spectrum measurement component (4) measures the feedback displacement change generated by the feedback measurement unit (6), obtains the position change data of the feedback measurement unit (6) in space, and thus obtains the size of the workpiece to be measured.

2. The spectral confocal three-dimensional scanning measurement structure according to claim 1, characterized in that: The mechanical measurement assembly comprises a connecting rod structure, wherein the connecting rod structure passes through the base (2) and is rotatably connected to the base (2); The direct measurement part (5) and the feedback measurement part (6) are respectively installed at two ends of the connecting rod structure.

3. The spectral confocal three-dimensional scanning measurement structure according to claim 2, characterized in that: The connecting rod structure comprises: A fixing sleeve (7), the direct measuring part (5) is installed at the lower end of the fixing sleeve (7), a connecting rod (8) is coaxially arranged at the upper end of the fixing sleeve (7), a ball joint structure (9) is installed on the rod body of the connecting rod (8), the connecting rod (8) is rotatably connected to the base (2) through the ball joint structure (9), and the feedback measuring part (6) is installed at the upper end of the connecting rod (8).

4. The spectral confocal three-dimensional scanning measurement structure according to claim 3, characterized in that: The measuring structure also includes a moving resetting structure installed in the base (2); The movable reset structure comprises an axial reset unit and a radial reset unit, wherein the axial reset unit and the radial reset unit are respectively connected to the base (2) and the connecting rod structure, and are respectively used to reset the connecting rod structure axially and radially.

5. The spectral confocal three-dimensional scanning measurement structure according to claim 4, characterized in that: The radial reset unit comprises: an adjustment block (12), a plurality of the adjustment blocks (12) are arranged circumferentially along the inner wall of the base (2), a connecting seat (13) is arranged on the rod body of the connecting rod (8), and the connecting seat (13) is elastically connected to each of the adjustment blocks (12) via a tension spring (14).

6. The spectral confocal three-dimensional scanning measurement structure according to claim 5, characterized in that: The axial resetting unit comprises: A first leaf spring (15), wherein the first leaf spring (15) is a cross-shaped thin plate structure, and a avoidance hole is provided in the middle of the first leaf spring (15) for avoiding the connecting rod (8), wherein one end of the first leaf spring (15) close to the avoidance hole is connected to the upper end of the outer ring of the ball joint structure (9) by a plurality of screws, and one end of the first leaf spring (15) away from the avoidance hole is connected to the base (2) by a plurality of screws.

7. The spectral confocal three-dimensional scanning measurement structure according to claim 6, characterized in that: A second leaf spring (16) is also provided at the lower end of the base (2); the second leaf spring (16) has the same structure as the first leaf spring (15); a spring buckle (17) is coaxially mounted at the avoidance hole of the second leaf spring (16); the spring buckle (17) is located between the connecting seat (13) and the fixing sleeve (7).

8. The spectral confocal three-dimensional scanning measurement structure according to claim 7, characterized in that: The spring buckle (17) is an annular plate structure, and the inner ring size of the spring buckle (17) is larger than the outer diameter of the connecting rod (8) and smaller than the outer diameter of the fixing sleeve (7).

9. The spectral confocal three-dimensional scanning measurement structure according to claim 1, characterized in that: At least four spectral measurement components (4) are provided, wherein three of the spectral measurement components (4) are located in the horizontal direction of the spatial coordinates established with the feedback measurement unit (6) as the center, and one of the spectral measurement components (4) is located in the vertical direction of the spatial coordinates established with the feedback measurement unit (6) as the center. By measuring the displacement change of the feedback measurement unit (6) in each direction, the position change data of the feedback measurement unit (6) in space is obtained.

10. The spectral confocal three-dimensional scanning measurement structure according to claim 9, characterized in that: The spacing between each of the spectrum measurement components (4) and the feedback measurement unit (6) in a vertical state is the same.

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