Integrated test system and test method for semiconductor gas transmission combination device

Abstract

The invention discloses a semiconductor gas transmission combined device comprehensive test system and a test method. The system is provided with a first channel and a second channel, and the first channel and the second channel are used for being connected with a semiconductor gas transmission combination device to be tested. The other end of the first channel is connected with a 5N-HE gas source through a first valve, connected with a 9N-N2 gas source through a second valve and connected with a 5N-N2 gas source through a third valve; and the other end of the second channel is simultaneously connected with a trace oxygen analyzer and a trace water analyzer through a fourth valve, is connected with a particle counter through a fifth valve, and is connected with a helium mass spectrometer through a sixth valve. According to the test system, seamless switching of different test items can be realized, the test of the semiconductor gas transmission combination device is rapidly completed, and the test efficiency is comprehensively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of equipment detection, and more particularly to a comprehensive testing system and a testing method for a gas transmission assembly device. Background Art

[0002] In the field of semiconductor manufacturing, the performance of the gas transmission system directly affects the quality and reliability of semiconductor devices. As a key unit in the gas transmission system, the importance of GAS BOX is self-evident. After the traditional semiconductor gas transmission process is assembled, it is necessary to undergo a number of rigorous tests to ensure the airtightness, purity and functionality of the system.

[0003] However, the existing testing methods have the following shortcomings:

[0004] Inefficiency: Traditional testing methods usually require each test to be performed separately, and each test takes a lot of time to prepare and switch the test gas source and equipment;

[0005] Complex operation: Due to the large number of test items, operators need to frequently switch different test gas sources and test equipment, which not only increases the complexity of operation, but also increases the possibility of errors;

[0006] Waste of resources: Each test requires separate preparation of gas source and equipment, resulting in unnecessary waste of resources;

[0007] Long testing cycle: Due to the above reasons, the entire testing process is relatively long, which affects production efficiency.

[0008] In view of the above problems, how to provide a multifunctional comprehensive testing system is an issue that technical personnel in this field need to solve urgently. Summary of the invention

[0009] In view of this, the present invention provides an integrated semiconductor gas transmission assembly device comprehensive testing system and testing method to address the deficiencies in the prior art.

[0010] In order to achieve the above object, the present invention adopts the following technical solution:

[0011] First, a semiconductor gas transmission assembly integrated test system, comprising a first channel and a second channel, wherein the first channel and the second channel are used to access the semiconductor gas transmission assembly to be tested;

[0012] The other end of the first channel is connected to a 5N-HE gas source through a first valve, connected to a 9N-N2 gas source through a second valve, and connected to a 5N-N2 gas source through a third valve;

[0013] The other end of the second channel is connected to the trace oxygen analyzer and the trace water analyzer through the fourth valve, connected to the particle counter through the fifth valve, and connected to the helium mass spectrometer through the sixth valve.

[0014] Preferably, the first valve is connected to a 5N-HE gas source via a first filter, and the third valve is connected to a 5N-N2 gas source via a second filter, so as to provide a clean, dry, pollution-free gas environment and ensure detection reliability.

[0015] Preferably, the second valve is connected to a 5N-N2 gas source via a purifier to directly purify 5N-N2 into 9N-N2, thereby making the test system more economical and efficient.

[0016] Preferably, the other end of the first channel is also connected to the first backup interface through the seventh valve, and the other end of the second channel is also connected to the second backup interface through the eighth valve, so as to enhance the flexibility of the test system and make it suitable for a wider range of application scenarios.

[0017] Preferably, the first channel and the second channel are connected to the semiconductor gas transmission assembly through a first main valve and a second main valve respectively.

[0018] Preferably, the 9N-N2 gas source is connected to the trace oxygen analyzer and the trace water analyzer simultaneously through the pressure reducing valve, the flow limiter and the ninth valve in sequence. The present application enables the low-flow 9N-N2 to continuously purge the trace water analyzer and the trace oxygen analyzer, so that the pipelines in the trace water analyzer and the trace oxygen analyzer are kept clean, the life of the equipment is extended, the detection efficiency is improved, and the trace oxygen content and trace water content of the background gas are monitored at the same time.

[0019] Preferably, the pressure of the pressure reducing valve is no higher than 10 psig.

[0020] Second, a semiconductor gas transmission assembly comprehensive test method, through any of the above semiconductor gas transmission assembly comprehensive test system of the first channel and the second channel to connect to the semiconductor gas transmission assembly to be tested; the test steps include:

[0021] Leak detection: open the first main valve and the first valve, open the second main valve and the sixth valve, fill 5N-HE into the semiconductor gas transmission assembly to be tested, and use a helium mass spectrometer to perform internal leakage and external leakage detection in turn;

[0022] Trace water / oxygen detection: close the first main valve, open the second main valve, open all valves and the sixth valve inside the semiconductor gas transmission assembly to be tested, use a helium mass spectrometer to continuously evacuate, then close the sixth valve, open the first main valve, the second valve and the fourth valve, and fill 9N-N2 into the semiconductor gas transmission assembly to be tested for trace water and trace oxygen detection;

[0023] Pressure maintenance test: open the first main valve, open all valves and the third valve inside the semiconductor gas transmission assembly to be tested, and after reaching a certain pressure value, close the first main valve to perform a pressure maintenance test on the semiconductor gas transmission assembly to be tested;

[0024] Particle detection: open the first main valve, the second main valve, all valves inside the semiconductor gas transmission assembly to be tested, the third valve and the fifth valve, and fill 5N-N2 into the semiconductor gas transmission assembly to be tested for particle testing.

[0025] Preferably, after each test is completed, the valves currently opened in the integrated test system of the semiconductor gas transmission assembly are promptly closed.

[0026] Preferably, the internal leakage and external leakage detection are performed in sequence using a helium mass spectrometer, including:

[0027] Open the first main valve, the second main valve and the first valve, open all valves inside the semiconductor gas transmission assembly to be tested, and use a helium mass spectrometer to perform leakage detection;

[0028] And open all valves inside the semiconductor gas transmission assembly to be tested, close the internal valves to be tested in sequence as required, and use a helium mass spectrometer to perform internal leakage detection.

[0029] Preferably, during the entire test process, the pressure reducing valve, the flow limiter and the ninth valve are kept in the open state.

[0030] It can be seen from the above technical solutions that the present invention discloses a comprehensive test system and test method for a semiconductor gas transmission assembly device, which respectively achieves the following compared with the prior art:

[0031] Integrated design: All necessary test gas sources and test equipment are integrated into one test system, which simplifies the test process and reduces the space occupied by the equipment;

[0032] Background testing and continuous purging: The integrated system can perform background testing and continuous purging, ensuring the stability of the test environment and the accuracy of the test results;

[0033] Vacuum replacement: The integrated system has a vacuum replacement function, which can quickly switch between different test gas sources, reducing test preparation time;

[0034] Seamless test switching: Through optimized process design, seamless switching between different test items is achieved, greatly shortening the overall test time.

[0035] The technical solution of the present invention can quickly complete the test of the semiconductor gas transmission assembly device and comprehensively improve the test efficiency, which is of great significance for improving the production efficiency of semiconductor manufacturing equipment and reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0037] Figure 1 This is a schematic diagram of the structure of the comprehensive test system for the semiconductor gas transmission assembly provided by the present invention. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] The test system disclosed in the embodiment of the present invention integrates multiple test gas sources and multiple test equipment, which can realize seamless switching of different test items, greatly shorten the test time, simplify the test process and steps, and quickly complete the test of the semiconductor gas transmission combination device, thereby comprehensively improving the test efficiency.

[0040] The comprehensive test system in the present application has a first channel and a second channel, and the first channel and the second channel are used to access the semiconductor gas transmission assembly device to be tested;

[0041] The other end of the first channel is connected to a 5N-HE gas source through a first valve, connected to a 9N-N2 gas source through a second valve, and connected to a 5N-N2 gas source through a third valve;

[0042] The other end of the second channel is connected to the trace oxygen analyzer and the trace water analyzer through the fourth valve, connected to the particle counter through the fifth valve, and connected to the helium mass spectrometer through the sixth valve.

[0043] In a preferred embodiment, the test system as a whole includes three major modules:

[0044] Module 1: Inlet gas source module, including 5N-N2, 5N-HE, integrated purification and filtration parts;

[0045] Module 2: Test equipment interface module: including helium mass spectrometer, particle counter, trace water analyzer, trace oxygen analyzer;

[0046] Module 3: Background gas continuous purge module, using low-flow 9N-N2 to continuously purge the trace water analyzer and trace oxygen analyzer.

[0047] Specifically, Figure 1 The first valve 1 is connected to the 5N-HE gas source through the first filter, and the third valve 3 is connected to the 5N-N2 gas source through the second filter, which is used to provide a clean, dry, and pollution-free gas environment to ensure the reliability of detection; the second valve 2 is connected to the 5N-N2 gas source through the purifier, which is used to directly purify 5N-N2 into 9N-N2, thereby making the test system more economical and efficient.

[0048] In one embodiment, the other end of the first channel is connected to the first backup interface through the seventh valve 7, and the other end of the second channel is connected to the second backup interface through the eighth valve 8, so as to improve the flexibility of the test system and make it suitable for a wider range of application scenarios.

[0049] In one embodiment, the first channel and the second channel are connected to the semiconductor gas transmission assembly through a first main valve and a second main valve, respectively.

[0050] In one embodiment, the 9N-N2 gas source is connected to the trace oxygen analyzer and the trace water analyzer simultaneously through the pressure reducing valve, the flow restrictor and the ninth valve 9. The present application enables low-flow 9N-N2 to continuously purge the trace water analyzer and the trace oxygen analyzer, so that the pipelines in the trace water analyzer and the trace oxygen analyzer are kept clean, the life of the equipment is extended, the detection efficiency is improved, and the trace oxygen content and trace water content of the background gas are monitored at the same time.

[0051] Preferably, the pressure of the pressure reducing valve is no higher than 10 psig.

[0052] In order to further optimize the above technical solution, the present application also provides a semiconductor gas transmission assembly comprehensive test method, the method is connected to the semiconductor gas transmission assembly to be tested through the first channel and the second channel in the semiconductor gas transmission assembly comprehensive test system as described above; and the test items include: leakage detection, trace water / oxygen detection, pressure maintenance detection and particle detection;

[0053] The various testing steps include:

[0054] Leak detection: open the first main valve and the first valve 1, open the second main valve and the sixth valve 6, fill 5N-HE into the semiconductor gas transmission assembly to be tested, and use a helium mass spectrometer to perform internal and external leakage detection in sequence; preferably, open the first main valve, the second main valve and the first valve 1, open all valves inside the semiconductor gas transmission assembly to be tested, and use a helium mass spectrometer to perform external leakage detection;

[0055] and opening all valves inside the semiconductor gas transmission assembly to be tested, closing each valve to be tested in turn as required, and performing internal leakage detection using a helium mass spectrometer;

[0056] Trace water / oxygen detection: close the first main valve, open the second main valve, open all valves inside the semiconductor gas transmission assembly to be tested and the sixth valve 6, use the helium mass spectrometer to continuously evacuate, then close the sixth valve 6, open the first main valve, the second valve 2 and the fourth valve 4, and fill 9N-N2 into the semiconductor gas transmission assembly to be tested for trace water and trace oxygen detection;

[0057] Pressure maintenance test: open the first main valve, open all valves inside the semiconductor gas transmission assembly to be tested and the third valve 3, and after reaching a certain pressure value, close the first main valve and perform a pressure maintenance test on the semiconductor gas transmission assembly to be tested;

[0058] Particle detection: open the first main valve, the second main valve, all valves inside the semiconductor gas transmission assembly to be tested, the third valve 3 and the fifth valve 5, and fill 5N-N2 into the semiconductor gas transmission assembly to be tested for particle testing.

[0059] It should be noted that after each test is completed, the open valves in the current semiconductor gas transmission combination device comprehensive test system should be closed in time.

[0060] In a preferred embodiment, the pressure reducing valve, the flow restrictor and the ninth valve 9 are kept in an open state during the whole test process. Preferably, the pressure reducing valve can be provided with a pressure gauge, and the pipeline pressure can be adjusted by observing the pressure gauge reading so that the ninth valve 9 always maintains a certain pressure, thereby achieving continuous purging.

[0061] In an exemplary embodiment, after all functional tests of the semiconductor gas delivery assembly are qualified, the integrated test system is used to sequentially test;

[0062] First, the test system is initially set up, including preparing the gas source and adjusting the pressure of the pressure reducing valve to a suitable test pressure. In this embodiment, the set pressure is not higher than 10 psig.

[0063] Then, helium mass spectrometry leak detection - internal leakage, external leakage: to check whether the product has leakage problems. The steps include keeping all valves of the test platform closed except the pressure reducing valve and the ninth valve 9, opening all valves of the combination device to be tested, and opening the first valve 1 and the first main valve, as well as the second main valve and the sixth valve 6 for external leakage detection at the same time. After the external leakage detection, all valves on the product to be tested are closed, and the valves on the product to be tested are opened one by one in sequence for internal leakage detection;

[0064] In this embodiment, trace water and oxygen tests are carried out simultaneously, including keeping all valves of the test platform closed except the pressure reducing valve and the ninth valve 9, opening all valves of the product to be tested, opening the sixth valve 6 and the second main valve to evacuate the vacuum to 0.01Pa and then continuing to evacuate for 30 minutes, then closing the sixth valve 6, opening the second valve 2, the first main valve and the fourth valve 4, and opening the trace water analyzer and the trace oxygen analyzer for direct testing.

[0065] The moisture content in 5N-HE is generally 3PPM. Using vacuum replacement can reduce the water content by about 1 / 10000, and the gas in the pipeline can reach about 0.03PPB level. If it is a positive pressure purge, it will take about 4 hours. In addition, H2O is a polar substance. Stainless steel pipes, valves, etc. will absorb some moisture. Vacuuming can also quickly replace this part of the moisture.

[0066] Further pressure maintenance test: keep all valves on the test platform closed except the pressure reducing valve and the ninth valve 9, open all valves of the product to be tested, open the third valve 3 and the first main valve to pass 5N-N2 at a specified pressure, close the third valve 3 and the first main valve after the pressure stabilizes, maintain the pressure for 12 hours, and then perform leakage detection.

[0067] Similarly, during the particle test, all valves on the test platform except the pressure reducing valve and the ninth valve 9 are kept closed, and all valves of the product to be tested are opened, as well as the third valve 3, the first main valve, the second main valve and the fifth valve 5. 5N-N2 directly enters the semiconductor gas transmission assembly device to be tested after passing through the second filter for particle testing.

[0068] In the present application, 9N-N2 is continuously purged during the entire test process without shutting off the pressure reducing valve and the ninth valve 9.

[0069] Compared with the prior art, the beneficial effects of this application include:

[0070] 1. A continuous purge pipeline is designed so that the background gas can be tested at any time. A flow limiter is set to prevent the flow rate from affecting the test. The trace water analyzer and trace oxygen analyzer are protected by continuous purge of background gas. Traditional testing requires the determination of background gas separately, which wastes a part of the test time.

[0071] 2. The entire test process is carried out in a closed environment, without secondary pollution. Traditional tests are carried out in batches, and air will mix into the system during each test, affecting the test efficiency.

[0072] 3. Using vacuum replacement instead of traditional purge replacement greatly improves the test efficiency. Traditional testing uses purge replacement, which has two disadvantages: 1. The replacement time is slow, and 2. The dead zone cannot be purged.

[0073] 4. The test equipment is fixed to avoid moving the equipment back and forth. Traditional testing requires moving the equipment for each test, and the vibration caused by the movement may affect the equipment and sometimes even damage it.

[0074] 5. The overall structure is compact, which is convenient for testers to operate and connect. Traditional testing uses loose wire connections, and multiple pipeline connections will be disassembled each time, which may affect the life of the seals at the connection.

[0075] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0076] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A semiconductor gas transmission assembly integrated test system, characterized in that: It has a first channel and a second channel, and one end of the first channel and the second channel are connected to a semiconductor gas transmission assembly device to be tested; The other end of the first channel is connected to a 5N-HE gas source through a first valve, connected to a 9N-N2 gas source through a second valve, and connected to a 5N-N2 gas source through a third valve; The other end of the second channel is connected to the trace oxygen analyzer and the trace water analyzer through the fourth valve, connected to the particle counter through the fifth valve, and connected to the helium mass spectrometer through the sixth valve.

2. The semiconductor gas transmission assembly integrated test system according to claim 1, characterized in that: The first valve is connected to a 5N-HE gas source via a first filter, and the third valve is connected to a 5N-N2 gas source via a second filter.

3. The semiconductor gas transmission assembly integrated test system according to claim 1, characterized in that: The second valve is connected to a 5N-N2 gas source via a purifier.

4. The semiconductor gas transmission assembly integrated test system according to claim 1, characterized in that: The other end of the first channel is also connected to the first standby interface through the seventh valve, and the other end of the second channel is also connected to the second standby interface through the eighth valve.

5. The semiconductor gas transmission assembly integrated test system according to claim 1, characterized in that: The first channel and the second channel are connected to the semiconductor gas transmission assembly device to be tested through the first main valve and the second main valve respectively.

6. The semiconductor gas transmission assembly integrated test system according to claim 1, characterized in that: The 9N-N2 gas source is connected to the trace oxygen analyzer and the trace water analyzer simultaneously through the pressure reducing valve, the flow limiter and the ninth valve in sequence.

7. The semiconductor gas transmission assembly integrated test system according to claim 6, characterized in that: The pressure of the pressure reducing valve is not higher than 10 psig.

8. A comprehensive testing method for a semiconductor gas transmission assembly, characterized in that: The semiconductor gas transmission assembly to be tested is connected through the first channel and the second channel in the semiconductor gas transmission assembly comprehensive test system according to any one of claims 1 to 7; the testing steps include: Leak detection: open the first main valve and the first valve, open the second main valve and the sixth valve, fill 5N-HE into the semiconductor gas transmission assembly to be tested, and use a helium mass spectrometer to perform internal leakage and external leakage detection in turn; Trace water / oxygen detection: close the first main valve, open the second main valve, open all valves and the sixth valve inside the semiconductor gas transmission assembly to be tested, use a helium mass spectrometer to continuously evacuate, then close the sixth valve, open the first main valve, the second valve and the fourth valve, and fill 9N-N2 into the semiconductor gas transmission assembly to be tested for trace water and trace oxygen detection; Pressure maintenance test: open the first main valve, open all valves and the third valve inside the semiconductor gas transmission assembly to be tested, and after reaching the preset pressure value, close the first main valve to perform a pressure maintenance test on the semiconductor gas transmission assembly to be tested; Particle detection: open the first main valve, the second main valve, all valves inside the semiconductor gas transmission assembly to be tested, the third valve and the fifth valve, and fill 5N-N2 into the semiconductor gas transmission assembly to be tested for particle testing.

9. The semiconductor gas transmission assembly comprehensive testing method according to claim 8, characterized in that: Internal and external leak detection is performed sequentially using a helium mass spectrometer, including: Open the first main valve, the second main valve and the first valve, open all valves inside the semiconductor gas transmission assembly to be tested, and use a helium mass spectrometer to perform leakage detection; And open all valves inside the semiconductor gas transmission assembly to be tested, close the internal valves to be tested in sequence as required, and use a helium mass spectrometer to perform internal leakage detection.

10. The semiconductor gas transmission assembly comprehensive testing method according to claim 8, characterized in that: During the entire test process, keep the pressure reducing valve, flow limiter and ninth valve in the open state.

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