Glass substrate surface cleanliness testing equipment and testing method

Abstract

The present invention belongs to the field of detection technology, and in particular relates to a glass substrate surface cleanliness testing device and a testing method; the present invention provides a glass substrate surface cleanliness testing device, comprising: a detection station, which is arranged on a detection platform, and each detection station is provided with a supporting tool; a transport device, which is arranged on a side wall of the detection platform; and a detection device, which is slidably arranged above the detection platform; wherein the transport device absorbs the glass substrate and moves it above the detection station, and then obliquely places the glass substrate on the detection station; one end of the glass substrate abuts against the supporting tool, and the supporting tool is suitable for limiting the glass substrate to prevent the glass substrate from shaking; the detection device sends a parallel light beam to the glass substrate, and the light beam is refracted after passing through the inclined glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate; by setting the detection station, during detection, the glass substrate is placed obliquely on the detection station, which can amplify the grayscale projection of the glass substrate surface, thereby improving the detection accuracy and efficiency.

Description

Technical Field

[0001] The present invention belongs to the field of detection technology, and specifically relates to detection using optical means, and more particularly to a glass substrate surface cleanliness testing device and a testing method. Background Art

[0002] Glass substrates, thin sheets of glass with an extremely flat surface, are a key building block for the flat panel display industry. Before further processing, both the top and bottom surfaces of the glass substrates need to be inspected for dirt and cleaned.

[0003] In related technologies, when inspecting a glass substrate, the substrate is placed horizontally at an inspection station. A planar light source sends a parallel beam of light toward the substrate. A grayscale camera positioned beneath the substrate captures grayscale images. A control module receives the grayscale images and determines whether there are stains on the substrate. If there are stains on the bottom surface of the glass substrate, a spray system is activated to clean the stains.

[0004] However, for smaller stains, the planar light source sends a parallel beam of light onto the glass substrate, resulting in a smaller grayscale projection and being invisible to the grayscale camera. Furthermore, when spraying the bottom surface of a horizontally positioned glass substrate to clean stains, the impact of the water on the glass substrate can cause it to wobble, leading to friction between the sidewalls and the inspection station, causing damage.

[0005] Therefore, how to solve the problem of being unable to capture small stains on the glass substrate while preventing the glass substrate from shaking during spray cleaning is a technical problem that urgently needs to be solved in this field.

[0006] It should be noted that the above information disclosed in this background technology section is only used to understand the background technology of the present application concept, and therefore, the above description is not considered to constitute information of the prior art. Summary of the Invention

[0007] The embodiments of the present disclosure at least provide a glass substrate surface cleanliness testing device and a detection method thereof.

[0008] In a first aspect, an embodiment of the present disclosure provides a glass substrate surface cleanliness testing device, comprising:

[0009] Testing platform;

[0010] Several inspection stations are arranged on the inspection platform, and each inspection station is provided with a supporting tool;

[0011] A detection device, which is slidably arranged above the detection platform;

[0012] Among them, after the glass substrate is moved to above the inspection station, the glass substrate is placed at an angle on the inspection station;

[0013] One end of the glass substrate abuts against a supporting fixture, wherein the supporting fixture is suitable for limiting the glass substrate to prevent the glass substrate from shaking;

[0014] The detection device sends a parallel light beam to the glass substrate. The light beam is refracted after passing through the inclined glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate.

[0015] In an optional embodiment, the inspection station includes: a base having a receiving groove formed therein and an open upper end;

[0016] Positioning bars, two of which are symmetrically arranged on the side walls of the receiving groove and have an inclined angle with the horizontal plane;

[0017] a partition plate, which is horizontally arranged in the receiving groove and has a gap with the bottom wall of the receiving groove;

[0018] The supporting fixture is hinged to the side wall of the receiving groove at one end away from the positioning strip;

[0019] After the bottom wall of the glass substrate abuts against the positioning bar, the glass substrate pushes the supporting fixture to flip around the hinge point as the axis;

[0020] When the supporting fixture is turned over, the water flow on the partition is suitable for flowing toward the bottom wall of the containing tank.

[0021] In an optional embodiment, a spray device is provided on the inner wall of the receiving tank away from the supporting tooling, and the spray head of the spray device faces the supporting tooling;

[0022] If stains are detected on the glass substrate, the spraying device sprays water onto the bottom wall of the glass substrate to clean the stains.

[0023] In an optional embodiment, the supporting tooling includes: a supporting plate, which is arranged horizontally;

[0024] a rotating shaft rotatably disposed on the inner wall of the receiving groove and passing through the support plate;

[0025] a sealing plate, which is vertically arranged on the bottom wall of the supporting plate and abuts against the partition plate;

[0026] When the bottom wall of the glass substrate contacts the positioning bar, the glass substrate pushes the support plate to flip around the rotation axis, so that the sealing plate is away from the partition.

[0027] In an optional embodiment, a filter element is provided below the support plate, the filter element is L-shaped, and the vertical section of the filter element abuts against the partition plate;

[0028] When the support plate flips around the rotating shaft, the sealing plate flips upward relative to the filter element to scrape off impurities protruding from the side wall of the filter element.

[0029] In an optional embodiment, the partition is made of a transparent material, and a grayscale camera is provided on the bottom wall of the partition, and the grayscale camera is configured to obtain a grayscale image on the upper surface of the partition.

[0030] In an optional embodiment, a buffer bar is provided on the inner wall of the receiving groove away from the supporting tooling side, the upper surface of the buffer bar is coplanar with the upper surface of the base, and the buffer bar is suitable for supporting the glass substrate.

[0031] In an optional embodiment, the detection platform;

[0032] Several inspection stations are arranged on the inspection platform, and each inspection station is provided with a supporting tool;

[0033] A spray device is provided on the side of the inspection station away from the supporting tooling;

[0034] Positioning bars, which are obliquely arranged on both side walls of the detection station;

[0035] The glass substrate is placed at an angle at the inspection station until the bottom wall of the glass substrate abuts against the positioning bar, and the supporting fixture is suitable for limiting the position of the glass substrate to prevent the glass substrate from shaking;

[0036] A parallel light beam is sent to the surface of the glass substrate. The light beam is refracted after passing through the inclined glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate.

[0037] If stains are detected on the glass substrate, the spraying device sprays water onto the bottom wall of the glass substrate to clean the stains.

[0038] In an optional embodiment, the inspection station includes: a base having a receiving groove formed therein and an open upper end;

[0039] The angle between the positioning strip and the bottom wall of the receiving groove does not exceed 15°;

[0040] a partition plate, which is horizontally arranged in the receiving groove and has a gap with the bottom wall of the receiving groove;

[0041] The supporting fixture is hinged to the side wall of the receiving groove at one end away from the positioning strip;

[0042] After the bottom wall of the glass substrate abuts against the positioning bar, the glass substrate pushes the supporting fixture to flip around the hinge point as the axis;

[0043] When the supporting fixture is turned over, the water flow on the partition is suitable for flowing toward the bottom wall of the containing tank.

[0044] In an optional embodiment, the supporting tooling includes: a supporting plate, which is arranged horizontally;

[0045] a rotating shaft rotatably disposed on the inner wall of the receiving groove and passing through the support plate;

[0046] a sealing plate, which is vertically arranged on the bottom wall of the supporting plate and abuts against the partition plate;

[0047] When the bottom wall of the glass substrate contacts the positioning bar, the glass substrate pushes the support plate to flip around the rotation axis, so that the sealing plate is away from the partition.

[0048] In an optional embodiment, a filter element is provided below the support plate, the filter element is L-shaped, and the vertical section of the filter element abuts against the partition plate;

[0049] When the supporting plate flips around the rotating shaft, the sealing plate flips upward relative to the sealing plate to scrape off impurities protruding from the side wall of the sealing plate.

[0050] In a second aspect, an embodiment of the present disclosure further provides a testing method for a testing device, the testing method comprising:

[0051] After the glass substrate is placed in an inclined position at the inspection station, one end of the glass substrate abuts against a supporting fixture, wherein the supporting fixture is suitable for limiting the position of the glass substrate to prevent the glass substrate from shaking;

[0052] The detection device sends a parallel light beam to the glass substrate. The light beam is refracted after passing through the inclined glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate.

[0053] If stains are detected on the glass substrate, the spraying device sprays water onto the bottom wall of the glass substrate to clean the stains.

[0054] The present invention provides a glass substrate surface cleanliness testing device and method. By utilizing tilted positioning bars and supporting fixtures, a glass substrate is positioned at an angle at a testing station. A parallel light beam is directed toward the glass substrate, which refracts after passing through the tilted glass substrate, thereby amplifying the grayscale projection of stains on the glass substrate surface. If stains are present on the glass substrate, a spray device sprays water to clean it, causing one end of the glass substrate to abut against the supporting fixture. The supporting fixture is adapted to position the glass substrate to prevent it from shaking, thereby improving the accuracy and efficiency of glass substrate testing and enhancing the stability of the glass substrate during placement.

[0055] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or understood by practicing the present invention. The purposes and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description, claims and drawings.

[0056] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically cited herein and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0058] Figure 1 A three-dimensional diagram of a glass substrate surface cleanliness testing device provided in an embodiment of the present disclosure;

[0059] Figure 2 A three-dimensional diagram of the inspection station and the handling device provided in an embodiment of the present disclosure;

[0060] Figure 3 A three-dimensional diagram of an inspection station provided in an embodiment of the present disclosure;

[0061] Figure 4 A sectional perspective view of a detection station provided in an embodiment of the present disclosure;

[0062] Figure 5 A sectional front view of a detection station provided in an embodiment of the present disclosure;

[0063] Figure 6 A schematic diagram of the state of a glass substrate limited by a supporting tool provided in an embodiment of the present disclosure;

[0064] Figure 7 Schematic diagram of the refraction state of a light source provided in an embodiment of the present disclosure passing through a glass substrate.

[0065] In the picture:

[0066] 1. Testing platform;

[0067] 2. Inspection station; 20. Support fixture; 201. Support plate; 202. Rotating shaft; 203. Sealing plate;

[0068] 21. Base; 22. Receiving groove; 23. Positioning bar; 24. Partition; 25. Spraying device; 26. Filter element; 27. Grayscale camera; 28. Buffer bar;

[0069] 3. Handling device;

[0070] 4. Detection device. DETAILED DESCRIPTION

[0071] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0072] In this document, when it is mentioned that a first component is located on a second component, this may mean that the first component may be directly formed on the second component, or that a third component may be interposed between the first component and the second component. In addition, in the drawings, the thickness of components may be exaggerated or reduced in order to effectively describe technical content.

[0073] Herein, example embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as "at least one of..." when following a list of elements modify the entire list of elements, rather than modifying individual elements in the list. For example, the expression "at least one of a, b, and c" should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0074] The terms used herein are only used to describe specific exemplary configurations and are not intended to be limiting. As used herein, the singular articles "a", "an" and "the" may also be intended to include plural forms, unless otherwise clearly indicated herein. The terms "comprise", "include" and "have" are inclusive and therefore specify the presence of features, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components and / or combinations thereof. The method steps, processes and operations described herein should not be interpreted as necessarily requiring them to be performed in the particular order discussed or shown, unless specifically identified as an execution order. Additional or alternative steps may be adopted.

[0075] As used herein, the phrases "in one embodiment," "according to one embodiment," "in some embodiments," and the like generally refer to the fact that the particular feature, structure, or characteristic following the phrase may be included in at least one embodiment of the present disclosure. Thus, a particular feature, structure, or characteristic may be included in more than one embodiment of the present disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms "example," "exemplary," and the like are used to "serve as an example, instance, or illustration." Any implementation, aspect, or design described herein as "example" or "exemplary" is not necessarily to be construed as preferred or advantageous over other implementations, aspects, or designs. Instead, the use of the terms "example," "exemplary," and the like is intended to present concepts in a concrete manner.

[0076] After research, it is found that the shortcomings of the existing technology (other shortcomings that do not appear in the background technology can also be described to further refine the technical problems and focus on some very detailed technical problems), the problems and purposes to be solved by the invention.

[0077] The defects in the above solutions are the results obtained by the inventors after practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed by the present disclosure in this article should be the contributions made by the inventors to the present disclosure during the disclosure process.

[0078] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0079] The following embodiments of the present invention are described in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features therein may be combined with each other.

[0080] like Figures 1 to 7 As shown, at least one embodiment provides a glass substrate surface cleanliness testing device, comprising: a detection platform 1; the detection platform 1 is slidably mounted on a workbench, a placement table is provided on the side of the workbench near the detection platform 1, a glass substrate is horizontally placed on the placement table, and the placement table is disposed below the transport device 3, the transport device 3 being adapted to negatively pressure adsorb the glass substrate on the placement table and transport it to the detection station 2. A plurality of detection stations 2 are disposed on the detection platform 1, each of which is provided with a supporting fixture 20; a transport device 3 is disposed on one side of the detection platform 1 and adapted to negatively pressure adsorb the glass substrate; and a detection device 4 is slidably mounted above the detection platform 1. Preferably, the detection device 4 includes a plurality of planar light sources.

[0081] Reference Attachment Figure 2During inspection, the transport device 3 absorbs the glass substrate and moves it to the top of the inspection station 2, then tilts the glass substrate to the inspection station 2; one end of the glass substrate abuts against the support fixture 20, which is suitable for limiting the glass substrate to prevent it from shaking; the inspection device 4 sends a parallel light beam to the glass substrate, which refracts after passing through the tilted glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate. Through the cooperation of the tilted positioning bar 23 and the support fixture 20, the glass substrate is tilted and placed in the inspection station 2, and a parallel light beam is sent to the glass substrate. The light beam refracts after passing through the tilted glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate. If there is stain on the glass substrate, the spray device 25 sprays water to clean it, and one end of the glass substrate abuts against the support fixture 20, which is suitable for limiting the glass substrate to prevent it from shaking, thereby improving the accuracy and efficiency of glass substrate inspection and improving the stability of the glass substrate when it is placed. The glass substrate described in this embodiment is a glass substrate.

[0082] Reference Attachment Figure 3 The inspection station 2 includes: a base 21, an accommodating groove 22 is provided inside the base, and the upper end is open; the base 21 is placed horizontally on the inspection platform 1 and is rectangular; further, the glass substrate is adapted to the base 21, and the width of the glass substrate is not greater than the width of the accommodating groove 22.

[0083] Continue to refer to the attached Figure 3 Positioning bars 23 are symmetrically arranged on the side walls of the receiving groove 22 and have an inclined angle with the horizontal plane. The angle between the positioning bars 23 and the bottom wall of the receiving groove 22 does not exceed 15 degrees. A buffer bar 28 is provided on the inner wall of the receiving groove 22 away from the support fixture 20. The upper surface of the buffer bar 28 is coplanar with the upper surface of the base 21, and the buffer bar 28 is suitable for supporting the glass substrate. When the glass substrate is placed at an angle in the inspection station 2, the bottom wall of the glass substrate abuts the positioning bars 23 and the buffer bar 28. Compared with a glass substrate placed horizontally, the glass substrate of this embodiment is placed at an angle, and the suspended portion in the middle of the glass substrate is subjected to less force, making the glass substrate less susceptible to damage.

[0084] Reference Attachment Figure 4 , a partition 24 is horizontally arranged in the accommodating groove 22 and has a gap with the bottom wall of the accommodating groove 22; the partition 24 is made of transparent material, and a grayscale camera 27 is provided on the bottom wall of the partition 24, and the grayscale camera 27 is configured to obtain a grayscale image of the upper surface of the partition 24.

[0085] Reference Attachment Figure 7The detection device 4 sends a parallel light beam to the glass substrate. The parallel light beam is perpendicular to the horizontal plane. After the light beam passes through the tilted glass substrate, it is refracted, and the image produced by the refraction is projected on the partition 24. If the stain on the glass substrate is relatively small, the projection of the small stain is refracted by the light, and its grayscale projection on the partition 24 is increased, so that the grayscale camera 27 can capture its grayscale projection.

[0086] Continue to refer to the attached Figure 4 The support fixture 20 is hinged to the side wall of the accommodating groove 22 away from the positioning bar 23; when the glass substrate is placed on the support fixture 20 in an inclined state, the support fixture 20 flips around the rotating shaft 202 to limit the glass substrate and prevent it from shaking; specifically, the support fixture 20 includes: a support plate 201, which is horizontally arranged; a rotating shaft 202, which is rotatably arranged on the inner wall of the accommodating groove 22 and passes through the support plate 201; a torsion spring is sleeved on the outer wall of the rotating shaft 202, and the two ends of the torsion spring are respectively fixed to the outer wall of the rotating shaft 202 and the bottom wall of the support plate 201, and the torsion spring is suitable for pushing the support plate 201 to flip until the support plate 201 is in a horizontal state.

[0087] Continue to refer to the attached Figure 4 The sealing plate 203 is perpendicularly mounted on the bottom wall of the support plate 201 and abuts against the partition 24. If the glass substrate is not placed on the positioning bar 23, the bottom wall of the sealing plate 203 abuts against the surface of the partition 24. When the bottom wall of the glass substrate abuts the positioning bar 23, the glass substrate pushes the support plate 201 to flip around the rotation axis 202, thereby moving the sealing plate 203 away from the partition 24. When the spray device 25 sprays water onto the bottom wall of the glass substrate to clean stains, the water flows from the bottom wall of the glass substrate onto the partition 24, and the water on the partition 24 flows toward the filter element 26. After the bottom wall of the glass substrate abuts the positioning bar 23, the glass substrate pushes the support fixture 20 to flip around the hinge point. When the support fixture 20 flips, the water on the partition 24 is suitable for flowing toward the bottom wall of the receiving tank 22.

[0088] Reference Attachment Figure 5 A spray device 25 is provided on the inner wall of the receiving groove 22 away from the supporting tooling 20, and the spray head of the spray device 25 is facing the supporting tooling 20; if stains are detected on the glass substrate, the spray device 25 sprays water to the bottom wall of the glass substrate to clean the stains.

[0089] Reference Attachment Figure 6 An L-shaped filter element 26 is disposed beneath the support plate 201, with its vertical section abutting against the partition plate 24. If impurities are found in the vertical section of the filter element 26, some of the impurities will protrude from the vertical section of the filter element 26. When the support plate 201 rotates about the rotating shaft 202, the sealing plate 203 rotates upward relative to the filter element 26 to scrape off impurities protruding from the sidewalls of the filter element 26.

[0090] Reference Attachment Figure 1 At least one embodiment provides a glass substrate surface cleanliness testing device, comprising: a testing platform 1; a plurality of testing stations 2, which are arranged on the testing platform 1, and each testing station 2 is provided with a supporting fixture 20; a spray device 25, which is provided on a side of the testing station 2 away from the supporting fixture 20; positioning bars 23, which are obliquely arranged on both side walls of the testing station 2; wherein the glass substrate is placed obliquely at the testing station 2 until the bottom wall of the glass substrate abuts against the positioning bars 23, and the supporting fixture 20 is suitable for limiting the glass substrate to prevent the glass substrate from shaking; a parallel light beam is sent to the surface of the glass substrate, and the light beam is refracted after passing through the inclined glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate; if the glass substrate is detected to have stains, the spray device 25 sprays water to the bottom wall of the glass substrate to clean the stains.

[0091] At least one embodiment provides a testing method for a testing device, the testing method comprising:

[0092] After the glass substrate is placed in an inclined position at the inspection station 2, one end of the glass substrate abuts against the supporting tooling 20, which is suitable for limiting the glass substrate to prevent it from shaking; the inspection device 4 sends a parallel light beam to the glass substrate, which is refracted after passing through the inclined glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate; if the glass substrate is detected to have stains, the spray device 25 sprays water on the bottom wall of the glass substrate to clean the stains.

[0093] In the description of the embodiments of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0094] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, terms such as "first", "second" and other numerical terms do not imply an order or sequence when used herein unless expressly indicated above. Therefore, without departing from the teachings of the example embodiments, the first element, component, region, layer or section discussed above may be referred to as a second element, component, region, layer or section.

[0095] With the above-described preferred embodiments of the present invention as a guide, and with reference to the above description, relevant personnel are fully capable of making various changes and modifications without departing from the technical scope of this invention. The technical scope of this invention is not limited to the contents of the specification and must be determined according to the scope of the claims.

Claims

1. A glass substrate surface cleanliness testing device, characterized in that: include: Detection platform (1); A plurality of inspection stations (2) are arranged on the inspection platform (1), and a supporting tool (20) is provided in each inspection station (2); A detection device (4) is slidably arranged above the detection platform (1); wherein, after the glass substrate is moved to above the inspection station (2), the glass substrate is placed obliquely on the inspection station (2); One end of the glass substrate abuts against the supporting fixture (20) to form a glass substrate limiting area with the inner wall of the supporting fixture (20); The detection device (4) sends a parallel light beam to the glass substrate, and the light beam is refracted after passing through the inclined glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate; The inspection station (2) comprises: a base (21) with a receiving groove (22) formed therein and an open top; Positioning bars (23), wherein the two positioning bars (23) are symmetrically arranged on the side walls of the receiving groove (22) and have an inclined angle with the horizontal plane; a partition (24) horizontally disposed in the receiving groove (22) and having a gap with the bottom wall of the receiving groove (22); The supporting fixture (20) is hinged to a side wall of the receiving groove (22) at one end away from the positioning strip (23); After the bottom wall of the glass substrate abuts against the positioning bar (23), the glass substrate pushes the supporting fixture (20) to flip around the hinge point as the axis; A spray device (25) is provided on the inner wall of the receiving groove (22) away from the supporting tool (20), and the spray head of the spray device (25) faces the supporting tool (20); If stains are detected on the glass substrate, the spraying device (25) sprays water onto the bottom wall of the glass substrate to clean the stains, and the water flows from the bottom wall of the glass substrate onto the partition (24); When the supporting tool (20) is turned over, the water flow on the partition (24) is suitable for flowing toward the bottom wall of the receiving tank (22); The supporting tool (20) comprises: a supporting plate (201) which is arranged horizontally; A rotating shaft (202) is rotatably disposed on the inner wall of the receiving groove (22) and passes through the support plate (201); A sealing plate (203) is vertically arranged on the bottom wall of the support plate (201) and abuts against the partition plate (24); When the bottom wall of the glass substrate abuts against the positioning bar (23), the glass substrate pushes the support plate (201) to flip around the rotating shaft (202) so that the sealing plate (203) is away from the partition (24); The partition (24) is made of a transparent material. A grayscale camera (27) is provided on the bottom wall of the partition (24). The grayscale camera (27) is configured to obtain a grayscale image of the upper surface of the partition (24).

2. The glass substrate surface cleanliness testing device according to claim 1, wherein: A filter element (26) is provided below the support plate (201), the filter element (26) is L-shaped, and a vertical section of the filter element (26) abuts against the partition plate (24); When the support plate (201) turns over with the rotating shaft (202) as the axis, the sealing plate (203) turns upward relative to the filter element (26) to scrape off impurities protruding from the side wall of the filter element (26).

3. The glass substrate surface cleanliness testing device according to claim 1, wherein: A buffer bar (28) is provided on the inner wall of the accommodating groove (22) away from the supporting fixture (20), the upper surface of the buffer bar (28) being coplanar with the upper surface of the base (21), and the buffer bar (28) being suitable for supporting a glass substrate.

4. A testing method for a testing device, characterized in that: Using the glass substrate surface cleanliness testing device according to any one of claims 1 to 3, the testing method comprises: After the glass substrate is placed in an inclined state at the detection station (2), one end of the glass substrate abuts against a supporting fixture (20), and the supporting fixture (20) is suitable for limiting the glass substrate to prevent the glass substrate from shaking; The detection device (4) sends a parallel light beam to the glass substrate, and the light beam is refracted after passing through the inclined glass substrate to amplify the grayscale projection of the stain on the surface of the glass substrate; If stains are detected on the glass substrate, the spraying device (25) sprays water onto the bottom wall of the glass substrate to clean the stains.

Images