X-ray analyzer

Abstract

Provided is an X-ray analyzer comprising: a feeding unit (2) that continuously feeds a sample (S) downstream at a constant feeding speed; a foreign matter inspection and analysis unit (10) that inspects and analyzes foreign matters in the fed sample; and a winding unit (7) that winds the sample that has passed through the foreign matter inspection and analysis unit, the foreign matter inspection and analysis unit being provided with: a foreign matter position detection unit (3) that detects the position of a foreign matter in the sample that has been fed out and is moving; an intermittent conveyance unit (4) that intermittently stops a portion of the sample in which the foreign matter is detected downstream from the foreign matter position detection unit or makes the movement speed thereof slower than the feed speed when the foreign matter is detected; and an X-ray analysis unit (5) that performs analysis by irradiating X-rays on the portion in which the foreign matter is detected that has been stopped or slowed down, and the intermittent conveyance unit discharges the portion in which the foreign matter is detected that has been stopped or slowed down to the winding unit after the analysis.

Description

Technical Field

[0001] The present invention relates to an X-ray analysis device capable of detecting the position of foreign matter contained in a sample which is a belt-shaped sheet material being continuously conveyed, and capable of analyzing the foreign matter with high accuracy. Background Art

[0002] In recent years, the demand for high-function sheet materials, including battery materials, has increased. It is known that such high-function sheet materials are produced by winding them into a roll and subjecting them to processing, inspection, and the like by a roll-to-roll method.

[0003] Conventionally, for example, Patent Document 1 describes a transmission X-ray foreign matter inspection device that inspects foreign matter in a roll-shaped or belt-shaped sample such as a high-performance sheet material using transmission X-rays while continuously moving the sample in a predetermined conveying direction.

[0004] In the transmission X-ray foreign matter inspection device of Patent Document 1, although foreign matter in a sample can be detected, the elements constituting the foreign matter cannot be identified.

[0005] Therefore, in the past, for example, in Patent Document 2, an X-ray analysis device combining transmission X-rays and fluorescent X-rays has been proposed, in which transmission X-rays are used to detect foreign matter in a sheet sample, the sample stage is moved to the position of the foreign matter based on the coordinate information of the foreign matter, and the elements of the foreign matter are identified by fluorescent X-ray analysis.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Publication No. 2013-170924

[0009] Patent Document 2: Japanese Patent No. 5956730 Summary of the invention

[0010] Problems to be solved by the invention

[0011] The above-mentioned prior art has the following problems.

[0012] In the conventional technology of Patent Document 2, after the foreign matter is detected by the transmission X-ray analysis, the sample is moved to the fluorescent X-ray inspection unit to perform the fluorescent X-ray analysis. However, if the inspection is performed while the sample is moved, it is difficult to measure the physical properties of the foreign matter with a short measurement time and high accuracy. In particular, in the case of a long strip-shaped sheet sample, it is necessary to cut the portion where the foreign matter is detected and move it to the fluorescent X-ray inspection unit, and perform the fluorescent X-ray analysis while the sample is stopped.

[0013] Therefore, there is a demand for an apparatus that detects foreign matter in a sample conveyed by a roll-to-roll method without reducing the conveying speed, and performs detailed analysis and inspection such as element identification of the foreign matter.

[0014] The present invention has been made in view of the above problems, and an object of the present invention is to provide an X-ray analysis apparatus that can detect foreign matter and identify the elements of foreign matter with high accuracy without reducing the conveying speed even in a roll-to-roll method.

[0015] Means for solving problems

[0016] The present invention adopts the following structure to solve the above-mentioned problems. That is, the X-ray analysis device of the first invention is characterized in that it has: a feeding section that continuously feeds a sample as a strip-shaped sheet to the downstream side at a constant feeding speed; a foreign matter inspection and analysis section that inspects and analyzes foreign matter in the sample fed from the feeding section; and a winding section that winds up the sample after passing through the foreign matter inspection and analysis section, the foreign matter inspection and analysis section having: a foreign matter position detection section that detects the position of foreign matter in the sample fed from the feeding section and moving; an intermittent conveying section that, when a foreign matter is detected by the foreign matter position detection section, stops the movement of a portion of the sample where the foreign matter is detected intermittently at a position downstream of the foreign matter position detection section or makes the moving speed slower than the feeding speed; and an X-ray analysis section that irradiates the portion where the foreign matter is detected and stops or slows down with X-rays to analyze it, and the intermittent conveying section discharges the portion where the foreign matter is detected and stops or slows down to the winding section after the analysis.

[0017] In the X-ray analysis device, the foreign matter inspection and analysis section comprises: a foreign matter position detection section that detects the position of foreign matter in the sample being sent out from the sending section and moving; an intermittent conveying section that, when the foreign matter is detected by the foreign matter position detection section, makes the portion of the sample where the foreign matter is detected intermittently stop at a position downstream of the foreign matter position detection section or makes the moving speed slower than the sending speed; and an X-ray analysis section that irradiates X-rays to the portion where the foreign matter is detected that is stopped or slowed down for analysis, so that the foreign matter position detection section can detect the position of the foreign matter while continuously moving, and the X-ray analysis section that performs fluorescent X-ray analysis and the like can perform element identification and other analysis on the portion where the foreign matter is detected when the portion is stopped or slowed down. In addition, since the intermittent conveying section discharges the portion where the foreign matter is detected that is stopped or slowed down after analysis to the winding section, the portion where the foreign matter is detected that is stopped or slowed down after analysis is discharged and conveyed to the downstream side, and wound up by the winding section, so that the X-ray analysis can be performed without stopping the conveyance of the sample as a whole.

[0018] Therefore, even with a roll-to-roll method, it is possible to detect the position of foreign matter while continuously moving the strip sample at a constant conveying speed, and by intermittently and locally stopping or slowing down the portion where the foreign matter is detected, high-precision analysis can be performed without reducing the overall conveying speed and while ensuring sufficient measurement time.

[0019] The X-ray analysis device of the second invention is characterized in that, in the first invention, the foreign matter position detection unit is a transmission X-ray inspection unit that irradiates the sample with transmission X-rays to detect the foreign matter, and the X-ray analysis unit is a fluorescence X-ray analysis unit that irradiates the part where the foreign matter is detected with X-rays and detects fluorescence X-rays emitted from the sample.

[0020] That is, in the X-ray analysis device, the foreign matter position detection unit is a transmission X-ray inspection unit that irradiates the sample with transmission X-rays to detect foreign matter, and the X-ray analysis unit is a fluorescence X-ray analysis unit that irradiates the portion where the foreign matter is detected with X-rays and detects the fluorescence X-rays emitted from the sample. Therefore, the element identification of the foreign matter can be performed by irradiating the position of the foreign matter detected by the transmission X-rays with X-rays and detecting the emitted fluorescence X-rays by the X-ray analysis unit.

[0021] The X-ray analysis device of the third invention is characterized in that, in the first invention, the foreign matter position detection unit is a first transmission X-ray inspection unit that irradiates the sample with transmission X-rays to detect the foreign matter, the foreign matter position detection unit is a first transmission X-ray inspection unit that irradiates the sample with transmission X-rays to detect the foreign matter, and the X-ray analysis unit is a second transmission X-ray inspection unit that irradiates the portion where the foreign matter is detected to detect the size of the foreign matter.

[0022] That is, in the X-ray analysis device, the foreign matter position detection unit is a first transmission X-ray inspection unit that irradiates the sample with transmission X-rays to detect foreign matter, and the X-ray analysis unit is a second transmission X-ray inspection unit that irradiates the portion where the foreign matter is detected with transmission X-rays to detect the size of the foreign matter. Therefore, while the sample is moved, the first transmission X-ray inspection unit (foreign matter inspection unit) is used to perform a rough detection of only the position of the foreign matter, and then, when the sample is stopped or in a slower speed, the second transmission X-ray inspection unit (X-ray analysis unit) is used to detect the size of the foreign matter, thereby enabling a more detailed foreign matter analysis to be performed in two stages.

[0023] The X-ray analysis device of the fourth invention is characterized in that, in the first invention, the foreign matter position detection unit is a visible light inspection unit that detects visible light from the sample to detect the foreign matter, and the X-ray analysis unit is a fluorescent X-ray analysis unit that irradiates X-rays to the part where the foreign matter is detected and detects fluorescent X-rays emitted from the sample.

[0024] That is, in the X-ray analysis device, the foreign matter position detection unit is a visible light inspection unit that detects visible light from the sample to detect foreign matter, and the X-ray analysis unit is a fluorescent X-ray analysis unit that irradiates the portion where the foreign matter is detected with X-rays and detects fluorescent X-rays emitted from the sample. Therefore, foreign matter such as debris, wrinkles, bubbles, and discolored portions of the sample can be confirmed by the visible light inspection unit (foreign matter position detection unit), and the elements that constitute the foreign matter can be identified by the fluorescent X-ray analysis unit (X-ray analysis unit).

[0025] The X-ray analysis apparatus according to a fifth aspect of the present invention is characterized in that, in any one of the first to fourth aspects of the present invention, a marking unit is provided for marking the portion where the foreign matter is detected or its vicinity.

[0026] That is, in this X-ray analysis apparatus, since the marking section is provided to mark the portion where the foreign matter is detected or its vicinity, the portion where the foreign matter is detected can be visually confirmed by the marking, and analysis of the foreign matter in a subsequent process can be facilitated.

[0027] A sixth aspect of the present invention is an X-ray analysis apparatus according to the fifth aspect of the present invention, wherein the marking section performs the marking in a state where the sample is stopped or transported at a slow speed by the intermittent transport section.

[0028] That is, in this X-ray analyzer, the marking unit performs marking while the intermittent transport unit stops the sample or reduces the speed, so that the portion where the foreign matter is detected can be accurately marked directly while the sample is stopped or reduced in speed.

[0029] The X-ray analysis device of the seventh invention is characterized in that, in the fifth invention, the marking unit performs the marking only on or near the part where the foreign matter meeting certain conditions is detected based on the analysis result of the foreign matter analyzed by the X-ray analysis unit, or performs the marking using a specific marker.

[0030] That is, in the X-ray analysis device, the marking unit marks only the portion where the foreign matter meeting certain conditions is detected or its vicinity or marks with a specific mark based on the analysis result of the foreign matter analyzed by the X-ray analysis unit, so that the portion where the foreign matter that will not cause problems to the product is detected and the portion where the foreign matter that will cause problems to the product is detected can be distinguished by the presence or absence of the mark or the difference in the mark.

[0031] For example, when the X-ray analysis unit is a fluorescence X-ray analysis device, the portion where the foreign matter is detected can be marked only when a specific element that may cause problems with the sample is detected from the constituent elements of the detected foreign matter, and when the X-ray analysis unit is a transmission X-ray analysis device, the portion where the foreign matter is detected can be marked only when the size of the detected foreign matter may cause problems with the product. Thus, even if a foreign matter is detected, it is possible to visually distinguish whether it is a foreign matter that does not cause problems with the product or a foreign matter that causes problems, and the overall yield rate can be improved.

[0032] Effects of the Invention

[0033] According to the present invention, the following effects are achieved.

[0034] That is, according to the X-ray analysis device of the present invention, the foreign matter inspection and analysis section comprises: a foreign matter position detection section, which detects the position of a foreign matter in a sample being sent out from a sending section and moving; an intermittent conveying section, which, when a foreign matter is detected by the foreign matter position detection section, causes a portion of the sample where the foreign matter is detected to stop moving intermittently at a position downstream of the foreign matter position detection section or causes its moving speed to be slower than a sending speed; and an X-ray analysis section, which irradiates the portion where the foreign matter is detected and stopped or slowed down with X-rays for analysis, and after the analysis, the intermittent conveying section discharges the portion where the foreign matter is detected and stopped or slowed down to a winding section, so that even in a roll-to-roll method, the position of the foreign matter can be detected while the strip-shaped sample is continuously moved at a constant conveying speed, and by causing the portion where the foreign matter is detected to stop or slow down intermittently and locally, the physical properties of the foreign matter can be inspected with high precision without reducing the overall conveying speed and while ensuring sufficient measurement time.

[0035] Therefore, in the X-ray analysis apparatus of the present invention, in the sheet material manufacturing process, the location of foreign matter and the identification of foreign matter elements can all be completed in the roll-to-roll process. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 The configuration of an X-ray analysis device in the X-ray analysis device according to the first embodiment of the present invention is shown.

[0037] Figure 2 These are explanatory diagrams showing the states of the intermittent transport unit in the first embodiment when foreign matter is detected and transport is stopped (a), when transport is restarted from the stopped state (b), and when the accumulated sample is discharged (c).

[0038] Figure 3 1 is a diagram showing the configuration of an X-ray analysis device in an X-ray analysis device according to a second embodiment of the present invention.

[0039] Figure 4 1 is a diagram showing the configuration of an X-ray analysis device in an X-ray analysis device according to a third embodiment of the present invention.

[0040] Description of Reference Numerals

[0041] 1, 21, 31: X-ray analysis device, 2: delivery section, 3, 33: foreign matter position detection section, 4: intermittent conveying section, 5, 25: X-ray analysis section, 7: winding section, 8, 28: marking section, 10, 20, 30: foreign matter inspection and analysis section, S: sample. DETAILED DESCRIPTION

[0042] Below, refer to Figure 1 and Figure 2 A first embodiment of the X-ray analysis device of the present invention will be described.

[0043] like Figure 1 and Figure 2 As shown, the X-ray analysis device 1 of this embodiment includes: a delivery section 2, which continuously delivers a strip-shaped sheet, i.e., a sample S, to the downstream side at a constant delivery speed; a foreign matter inspection and analysis section 10, which inspects and analyzes foreign matter in the sample S delivered from the delivery section 2; and a winding section 7, which winds up the sample S that has passed through the foreign matter inspection and analysis section 10.

[0044] The foreign matter inspection and analysis unit 10 comprises: a foreign matter position detection unit 3, which detects the position of a foreign matter in the sample S that is being sent out from the sending unit 2 and is moving; an intermittent conveying unit 4, which, when a foreign matter is detected by the foreign matter position detection unit 3, makes the portion of the sample S where the foreign matter is detected intermittently stop moving at a position downstream of the foreign matter position detection unit 3 or makes its moving speed slower than the sending speed; and an X-ray analysis unit 5, which irradiates the portion of the sample S where the foreign matter is detected that has stopped or moved at a slower speed with X-rays for analysis.

[0045] The intermittent conveying unit 4 is set to discharge the portion where the foreign matter is detected and stopped or slowed down after the analysis to the winding unit 7. That is, the intermittent conveying unit 4 is set to discharge the portion where the foreign matter is detected and stopped or slowed down after the X-ray analysis to the winding unit 7 at a speed faster than the delivery speed and in a short time, so that the delivery amount of the sample S from the delivery unit 2 and the winding amount of the sample S in the winding unit 7 are consistent.

[0046] In addition, the X-ray analysis device 1 of this embodiment includes a marking unit 8 for marking the portion where the foreign matter is detected or its vicinity. As a marking performed near the portion where the foreign matter is detected, for example, a portion of the strip-shaped sample S where an imaginary line extending in the width direction from the portion where the foreign matter is detected intersects with the side edge of the sample S is marked.

[0047] The marking section 8 performs marking when the sample S is stopped or transported at a slow speed by the intermittent transport section 4 .

[0048] Furthermore, the marking unit 8 marks only the portion where the foreign matter meeting certain conditions is detected or the vicinity thereof, or marks with a specific mark, based on the analysis result of the foreign matter analyzed by the X-ray analysis unit 5 .

[0049] In this embodiment, the foreign matter position detection unit 3 is a transmission X-ray inspection unit (XRT inspection unit) that irradiates the sample S with transmission X-rays to detect foreign matter, and the X-ray analysis unit 5 is a fluorescence X-ray analysis unit (XRF analysis unit) that irradiates the part where the foreign matter is detected with X-rays and detects the fluorescent X-rays emitted from the sample S.

[0050] The foreign matter position detection unit 3 comprises: a first X-ray source 3a, which is arranged below the transported sample S and irradiates X-rays toward the sample S; a first X-ray detector 3b, which is arranged above the sample S opposite to the first X-ray source 3a and detects the X-rays that have passed through the sample S; and a foreign matter judgment unit 3c, which is connected to the first X-ray detector 3b and judges the presence and position of foreign matter based on the transmitted X-rays detected by the first X-ray detector 3b, and sends the position information of the foreign matter.

[0051] The above-mentioned X-ray analysis unit 5 includes: a second X-ray source 5a arranged above the sample S of the intermittent conveying unit 4 and irradiating foreign matter in the sample S with X-rays, a second X-ray detector 5b arranged above the sample S of the intermittent conveying unit 4 and detecting fluorescent X-rays emitted from the foreign matter, and a foreign matter analysis unit 5c connected to the second X-ray detector 5b and identifying the elements of the foreign matter and sending out the information of the identified elements.

[0052] The above-mentioned delivery section 2 includes: a delivery roller 2a, which winds up the strip-shaped sample S before foreign matter detection and delivers the sample S; a pair of foreign matter inspection rollers 2b, which are arranged in the horizontal direction so that the sample S delivered from the delivery roller 2a can be transported in the horizontal direction; and a first guide roller 2c, which is used to guide the sample S from the foreign matter inspection roller 2b to the intermittent conveying section 4.

[0053] The first X-ray source 3 a is disposed below the sample S horizontally conveyed between the pair of foreign matter inspection rollers 2 b , and the first X-ray detector 3 b is disposed above the sample S.

[0054] The intermittent conveying section 4 includes: a first and a second fixed roller 4a, 4b, which guide the sample S conveyed from the first guide roller 2c; a first movable roller 4c, which passes through the middle of the first and second fixed rollers 4a, 4b and can be moved in a direction perpendicular to the conveying path of the sample S (the up and down direction in this embodiment) by a motor or the like; third and fourth fixed rollers 4d, 4e, which guide the sample S conveyed from the second fixed roller 4b; and a second movable roller 4f, which passes through the middle of the third and fourth fixed rollers 4d, 4e and can be moved in a direction perpendicular to the conveying path of the sample S (the up and down direction in this embodiment) by a motor or the like.

[0055] The second fixed roller 4 b and the third fixed roller 4 d are arranged horizontally to each other so as to horizontally convey the sample S therebetween.

[0056] The first movable roller 4c is, for example, mounted on a ball screw (not shown) extending in the vertical direction so as to penetrate the centers of the first and second fixed rollers 4a and 4b, and the first movable roller 4c can be moved up and down by controlling a motor (not shown) that rotates the ball screw.

[0057] In addition, the second movable roller 4f is also similarly installed on a ball screw (not shown) extending in the vertical direction in a manner that passes through the center of the third and fourth fixed rollers 4d and 4e. The second movable roller 4f can be moved up and down by controlling a motor (not shown) that rotates the ball screw.

[0058] The winding section 7 includes a second guide roller 7a for guiding the sample S fed from the fourth fixed roller 4e, and a winding roller 7b for winding the sample S from the second guide roller 7a at a constant winding speed. Thus, the sample S is conveyed by a roll-to-roll method in this embodiment. The winding roller 7b is driven to rotate by a motor (not shown).

[0059] The first X-ray detector 3b of the foreign matter position detection unit 3 is a TDI (Time Delay Integration) sensor as an X-ray detection unit, which has, for example, a plurality of line sensors along a specific direction, with pixels arranged in a matrix, and uses pixels to detect X-rays after passing through the sample S.

[0060] The second X-ray detector 5 b of the X-ray analyzer 5 is, for example, a silicon drift detector (SDD) that forms a pn junction by providing a P-type semiconductor region by implanting B (boron) into the window surface side of an n-type high-resistance substrate.

[0061] The X-ray analyzer 5 has an analyzer moving mechanism (not shown) such as an XY stage that can move the second X-ray source 5a and the second X-ray detector 5b relative to the plane of the sample S along the XY axis (the X direction is the extension direction of the sample S, and the Y direction is the width direction of the sample S).

[0062] In addition, the X-ray analysis device 1 of the present embodiment has a control unit C serving as a computer, which is connected to the delivery unit 2, the intermittent conveying unit 4, the foreign matter position detection unit 3, the X-ray analysis unit 5, the marking unit 8, the winding unit 7, etc. and controls them, and displays and records the position of the foreign matter received from the foreign matter position detection unit 3 and the information of the identification element of the foreign matter received from the X-ray analysis unit 5.

[0063] Next, a method of detecting and analyzing foreign matter in a sample S using the X-ray analysis device 1 according to the present embodiment will be described.

[0064] First, when the sample S is pulled out from the feed roller 2a of the feed section 2 at a constant feed speed and transported between a pair of foreign matter inspection rollers 2b, the foreign matter position detection section 3 serving as a transmission X-ray inspection section inspects the sample S in the moving state for the presence of foreign matter and the position of the foreign matter.

[0065] When no foreign matter is detected in the sample S, the sample S is always fed out from the feed roller 2a at a constant feed speed and in a constant amount, and the sample S between the second fixed roller 4b and the third fixed roller 4d is also fed at the same feed speed. In addition, since no foreign matter is detected, the foreign matter analysis unit 5c does not perform foreign matter analysis.

[0066] When foreign matter is detected, the foreign matter position detection unit 3 transmits the presence of foreign matter in the sample S and the position of the foreign matter as foreign matter information to the control unit C. Furthermore, when multiple foreign matters are detected, the foreign matter information of each of these foreign matters is also transmitted.

[0067] Based on the received foreign matter information, the control unit C uses the intermittent conveying unit 4 to temporarily stop the conveyance between the second fixed roller 4b and the third fixed roller 4d or make the conveying speed slower than the sending speed when the part of the sample S where the foreign matter is detected is conveyed between the second fixed roller 4b and the third fixed roller 4d of the intermittent conveying unit 4.

[0068] For example, when the conveyance of the sample S is stopped, the measurement time of the fluorescent X-ray analysis is set to, for example, 2 seconds for each detected foreign matter, and the conveyance of the sample S is stopped by the intermittent conveying unit 4 for a time corresponding to the number of foreign matter.

[0069] When the intermittent conveying unit 4 stops conveying the sample S, the third fixed roller 4d is first stopped, and the conveying of the sample S between the second fixed roller 4b and the third fixed roller 4d is stopped, and the sample S is brought to a stationary state. At this time, the delivery roller 2a, which is driven to rotate at a constant rotation speed, does not stop rotating, and the sample S to be delivered when the delivery is restarted next time is always delivered from the delivery roller 2a at a constant amount, and the sample S always delivered at a constant amount is accumulated by the movement of the first moving roller 4c.

[0070] That is, Figure 2 As shown in (a), the first moving roller 4c winds up the sample S between the first fixed roller 4a and the second fixed roller 4b and moves in a direction orthogonal to the conveying path of the sample S (downward in this embodiment) so as to gradually move away from the first and second fixed rollers 4a and 4b, thereby accumulating the sample S to be conveyed when the conveyance is restarted next time. At this time, the sample S is accumulated between the first fixed roller 4a and the second fixed roller 4b by a length twice the distance between the first and second fixed rollers 4a and 4b and the first moving roller 4c. In addition, the length of the temporarily accumulated sample S corresponds to the time when the conveyance is stopped for foreign matter analysis, and is determined so that the overall conveying speed of the sample S does not decrease.

[0071] In addition, simultaneously with the above-mentioned operation, the second moving roller 4f is gradually brought close to the third and fourth fixed rollers 4d and 4e.

[0072] In a state where the transport of the sample S is stopped by the intermittent transport unit 4 or the transport speed is lower than the delivery speed, the X-ray analyzer 5 performs fluorescent X-ray analysis on the foreign matter based on the foreign matter information. At this time, the second X-ray source 5a and the second X-ray analyzer 5b are moved to the position of the foreign matter of the sample S which is in a stationary state or moving at a slower speed by the analyzer moving mechanism such as the XY stage, and the foreign matter is irradiated with X-rays through the light spot, and the element of the foreign matter is identified by the foreign matter analyzer 5c based on the fluorescent X-rays detected by the foreign matter being irradiated.

[0073] On the other hand, the marking section 8 marks the position where the foreign matter is detected or its vicinity.

[0074] For example, when Cu is not a problem but Fe is a problem as an element contained in the foreign matter as a product, the marking unit 8 does not mark or marks a mark indicating OK (good) (e.g., "○") when Cu is detected from the foreign matter by the X-ray analysis unit 5, and marks or marks a mark indicating NG (bad) (e.g., "×") when Fe is detected from the foreign matter by the X-ray analysis unit 5. In addition, the marking unit 8 can also be moved by the analysis unit moving mechanism such as the XY stage so as to mark the position where the foreign matter is detected or in the vicinity thereof.

[0075] Next, after the foreign matter analysis unit 5c completes the analysis of the foreign matter, the first moving roller 4c is quickly brought close to the first and second fixed rollers 4a and 4b in order to discharge the sample S accumulated by the first moving roller 4c in a short time.

[0076] That is, by driving the third fixed roller 4d to rotate, the first moving roller 4c approaches the first and second fixed rollers 4a and 4b by a length corresponding to half the length of the conveyed sample S. The approach of the first moving roller 4c is performed synchronously with the rotation of the third fixed roller 4d.

[0077] On the first moving roller 4c, the sample S is wound into a U shape, and the sample S of the following length is sent out from the second fixed roller 4b, which is the sum of a length equal to twice the movement amount of the first moving roller 4c and the length of the sample S sent out from the sending roller 2a in this short time.

[0078] In addition, the sample S fed out from the second fixed roller 4 b and conveyed via the third fixed roller 4 d is accumulated in a short time due to the movement of the second moving roller 4 f.

[0079] That is, Figure 2 As shown in (b), the second movable roller 4f winds up the sample S between the third fixed roller 4d and the fourth fixed roller 4e and moves rapidly in a short time in a direction orthogonal to the conveying path of the sample S (downward in this embodiment) in a manner of moving away from the third and fourth fixed rollers 4d and 4e, thereby accumulating the sample S for discharge for winding.

[0080] The third fixed roller 4d is driven to rotate by a motor to extract the portion of the sample S where foreign matter analysis has been completed, so that the sample S is accumulated between the third fixed roller 4d and the fourth fixed roller 4e by a length twice the distance between the third and fourth fixed rollers 4d, 4e and the second moving roller 4f.

[0081] At this time, the rotation of the third fixed roller 4d is performed in synchronization with the movement of the second moving roller 4f.

[0082] The sample S is wound in a U-shape on the second moving roller 4f, and a length of the sample S equal to twice the movement amount of the second moving roller 4f and the length of the sample S wound by the winding roller 7b in this short time is accumulated between the third fixed roller 4d and the fourth fixed roller 4e.

[0083] In addition, the movement amount of the first moving roller 4c is the same as the movement amount of the second moving roller 4f.

[0084] Figure 2(c) shows a state in which the sample S stopped between the second fixed roller 4b and the third fixed roller 4d is immediately transported to and accumulated between the third fixed roller 4d and the fourth fixed roller 4e.

[0085] After that, the accumulated sample S is discharged by moving the second moving roller 4f and is wound up by the winding section 7. That is, the second moving roller 4f between the third fixed roller 4d and the fourth fixed roller 4e is moved upward to approach the third fixed roller 4d and the fourth fixed roller 4e, so that the accumulated sample S is discharged from the fourth fixed roller 4e to the downstream side and wound up by the winding roller 7b driven by the motor. In addition, the winding roller 7b is set to always wind up the sample S at a constant amount.

[0086] Thus, in the X-ray analysis device 1 of the present embodiment, the foreign matter inspection and analysis section 10 comprises: a foreign matter position detection section 3, which detects the position of a foreign matter in the sample S that is sent out and moves from the sending section 2; an intermittent conveying section 4, which, when a foreign matter is detected by the foreign matter position detection section 3, causes the portion of the sample S where the foreign matter is detected to stop moving intermittently at a position downstream of the foreign matter position detection section 3 or makes its moving speed slower than the sending speed; and an X-ray analysis section 5, which irradiates the portion where the foreign matter is detected and is at a stopped or slower speed with X-rays for analysis. Therefore, the foreign matter position detection section 3 can detect the position of the foreign matter while the sample S is continuously moving, and the X-ray analysis section 5 that performs fluorescent X-ray analysis can perform elemental identification analysis on the portion where the foreign matter is detected while the foreign matter is stopped or at a slower speed.

[0087] In particular, the foreign matter position detection unit 3 is a transmission X-ray inspection unit that irradiates the sample S with transmission X-rays to detect foreign matter, and the X-ray analysis unit 5 is a fluorescent X-ray analysis unit that irradiates the portion where the foreign matter is detected with X-rays and detects the fluorescent X-rays emitted from the sample S. Therefore, the X-ray analysis unit 5 irradiates the position of the foreign matter detected by the transmission X-rays with X-rays and detects the emitted fluorescent X-rays, thereby being able to perform elemental identification of the foreign matter with high accuracy.

[0088] In addition, since the intermittent conveying section 4 stops or slows down the portion where foreign matter is detected and discharges it to the winding section 7 after analysis, the portion that stops or slows down is discharged and conveyed to the downstream side after analysis and is wound up by the winding section 7, thereby enabling X-ray analysis to be performed without stopping the conveyance of the sample as a whole.

[0089] Therefore, even with a roll-to-roll method, it is possible to detect the position of foreign matter while continuously moving the strip sample S at a constant conveying speed, and by intermittently and locally stopping or slowing down the portion where the foreign matter is detected, high-precision analysis can be performed without reducing the overall conveying speed and while ensuring sufficient measurement time.

[0090] Furthermore, since the marking portion 8 is provided to mark the portion where the foreign matter is detected or its vicinity, the portion where the foreign matter is detected can be visually confirmed by the marking, and analysis of the foreign matter in a subsequent process can be facilitated.

[0091] In particular, since the marking section 8 performs marking when the sample S is stopped or moved at a slower speed by the intermittent conveying section 4, the sample S is stopped or moved at a slower speed, so that the portion where the foreign matter is detected can be accurately marked directly.

[0092] Furthermore, the marking unit 8 marks only the portion where the foreign matter meeting certain conditions is detected or its vicinity, or marks with a specific mark, based on the analysis result of the foreign matter analyzed by the X-ray analysis unit 5. Therefore, for example, it is possible to distinguish between the portion where the foreign matter that does not cause problems for the product is detected and the portion where the foreign matter that will cause problems for the product is detected, based on the presence or absence of the mark or the difference in the mark.

[0093] Next, refer to Figure 3 as well as Figure 4 The second and third embodiments of the X-ray analysis device of the present invention are described below. In the description of each of the following embodiments, the same components as those described in the above embodiments are denoted by the same reference numerals, and the description thereof is omitted.

[0094] The second embodiment is different from the first embodiment in that, in the first embodiment, the X-ray analysis unit 5 is a fluorescent X-ray analysis unit, whereas in the second embodiment, the X-ray analysis device 21 is Figure 3 As shown, the X-ray analysis unit 25 and the foreign matter position detection unit 3 are both transmission X-ray inspection units.

[0095] That is, in the second embodiment, the foreign matter position detection unit 3 of the foreign matter inspection and analysis unit 20 is a first transmission X-ray inspection unit that irradiates the sample S with transmission X-rays to detect foreign matter, and the X-ray analysis unit 25 is a second transmission X-ray inspection unit that irradiates the part where the foreign matter is detected with transmission X-rays to detect the size of the foreign matter.

[0096] The X-ray analysis unit 25 of the second embodiment includes: a third X-ray source 25a, which is arranged below the sample S between the second fixed roller 4b and the third fixed roller 4d of the intermittent conveying unit 4; a third X-ray analyzer 25b, which is arranged above the sample S between the second fixed roller 4b and the third fixed roller 4d opposite to the third X-ray source 25a; and a foreign matter analysis unit 25c, which is connected to the third X-ray analyzer 25b and sends information on the size of the foreign matter.

[0097] In addition, the third X-ray source 25a and the third X-ray analyzer 25b can be moved to a position facing the position of the foreign matter by the analysis unit moving mechanism of the XY stage.

[0098] In the second embodiment, the marking unit 28 marks the portion where the foreign matter is detected only when the size of the detected foreign matter causes a problem with the product.

[0099] The marking section 28 of the second embodiment is disposed so as to be able to mark the sample S conveyed between the fourth fixed roller 4e and the second guide roller 7a.

[0100] For example, if the size (outer diameter) of the foreign matter is 100 μm or more, which indicates a problem with the product, the marking unit 28 marks or marks a mark indicating NG at or near the location of the foreign matter if the size of the foreign matter measured by the X-ray analysis unit 25 as the second transmission X-ray inspection unit is 100 μm or more. On the other hand, if the size of the foreign matter measured by the X-ray analysis unit 25 is less than 100 μm, the marking unit 28 does not mark or marks a mark indicating OK at or near the location of the foreign matter.

[0101] Thus, in the X-ray analysis device 21 of the second embodiment, the foreign matter position detection unit 3 is a first transmission X-ray inspection unit that irradiates the sample S with transmission X-rays to detect foreign matter, and the X-ray analysis unit 25 is a second transmission X-ray inspection unit that irradiates the portion where the foreign matter is detected with transmission X-rays to detect the size of the foreign matter. Therefore, while the sample S is moved, the first transmission X-ray inspection unit (foreign matter position detection unit 3) is used to perform a rough detection of only the position of the foreign matter, and then, when the sample is stopped or in a slower speed state, the second transmission X-ray inspection unit (X-ray analysis unit 25) is used to detect the size of the foreign matter, thereby enabling a more detailed foreign matter analysis to be performed in two stages.

[0102] Next, the third embodiment is different from the first embodiment in that, in the first embodiment, the foreign matter position detection unit 3 is a transmission X-ray inspection unit, whereas in the third embodiment, the X-ray analysis device 31 is Figure 4As shown, the foreign matter position detection unit 33 of the foreign matter inspection and analysis unit 30 is a visible light inspection unit that detects visible light from the sample S to detect foreign matter.

[0103] That is, the foreign matter position detection unit 3 of the third embodiment is a visible light inspection unit arranged above the sample S conveyed between a pair of foreign matter inspection rollers 2b, and is equipped with a visible light measuring device 33b such as a CCD camera for photographing the surface of the sample S and a foreign matter judgment unit 33c for detecting foreign matter based on the image of the sample S.

[0104] The foreign matter position detection unit 33 uses a visible light measuring device 33b to capture the state of the surface of the sample S, and uses a foreign matter judgment unit 33c to detect foreign matter such as debris, wrinkles, bubbles, and discolored parts, and sends its position to the control unit C as foreign matter information.

[0105] Thus, in the X-ray analysis device 31 of the third embodiment, the foreign matter position detection unit 33 is a visible light inspection unit that detects visible light from the sample S to detect foreign matter. Therefore, the visible light inspection unit (foreign matter position detection unit 33) can be used to confirm foreign matter such as debris, wrinkles, bubbles, discolored parts, etc. of the sample S through visible light, and the fluorescent X-ray analysis unit (X-ray analysis unit 5) can be used to identify the elements that constitute these foreign matter.

[0106] In addition, the technical scope of the present invention is not limited to the above-mentioned embodiments, and various modifications can be added within the scope not departing from the gist of the present invention.

[0107] For example, in the foreign matter analysis unit of the first embodiment, an X-ray source and an X-ray analyzer for fluorescence X-ray analysis are arranged above the sample, but the X-ray source and the X-ray analyzer for fluorescence X-ray analysis may be arranged below the sample. In this case, even if the sample is thick, not only foreign matter on the front side of the sample but also foreign matter on the back side can be identified with high accuracy.

Claims

1. An X-ray analysis device, characterized in that: have: A delivery section that continuously delivers the sample as a strip-shaped sheet toward the downstream side at a constant delivery speed; a foreign matter inspection and analysis unit that inspects and analyzes foreign matter in the sample sent out from the sending unit; and a winding section for winding the sample after passing through the foreign matter inspection and analysis section, The foreign matter inspection and analysis unit comprises: a foreign matter position detection unit configured to detect a position of a foreign matter in the sample being sent out from the sending unit and being moved; an intermittent conveying section which, when a foreign object is detected by the foreign object position detecting section, causes the portion of the sample where the foreign object is detected to intermittently stop moving downstream of the foreign object position detecting section or to make its moving speed slower than the delivery speed; as well as An X-ray analysis unit irradiates the portion where the foreign matter is detected and stops or slows down to perform analysis. The intermittent conveying unit stops or slows down the portion where the foreign matter is detected after the analysis and discharges it to the winding unit.

2. The X-ray analysis device according to claim 1, characterized in that: The foreign matter position detection unit is a transmission X-ray inspection unit that irradiates the sample with transmission X-rays to detect the foreign matter. The X-ray analysis unit is a fluorescent X-ray analysis unit that irradiates the portion where the foreign matter is detected with X-rays and detects fluorescent X-rays emitted from the sample.

3. The X-ray analysis device according to claim 1, characterized in that: The foreign matter position detection unit is a first transmission X-ray inspection unit that irradiates the sample with transmission X-rays to detect the foreign matter. The X-ray analysis unit is a second transmission X-ray inspection unit that irradiates a portion where the foreign matter is detected with transmission X-rays to detect the size of the foreign matter.

4. The X-ray analysis device according to claim 1, characterized in that: The foreign matter position detection unit is a visible light inspection unit that detects visible light from the sample to detect the foreign matter. The X-ray analysis unit is a fluorescent X-ray analysis unit that irradiates the portion where the foreign matter is detected with X-rays and detects fluorescent X-rays emitted from the sample.

5. The X-ray analysis device according to any one of claims 1 to 4, characterized in that: A marking unit is provided, and the marking unit marks the portion where the foreign matter is detected or its vicinity.

6. The X-ray analysis device according to claim 5, characterized in that: The marking unit performs the marking in a state where the sample is stopped or transported at a slow speed by the intermittent transport unit.

7. The X-ray analysis device according to claim 5, characterized in that The marking unit performs the marking only on a portion where the foreign matter meeting a certain condition is detected or in the vicinity thereof, based on the analysis result of the foreign matter analyzed by the X-ray analysis unit, or performs the marking using a specific marker.

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