RHEED performance parameter test system

Abstract

The invention belongs to the technical field of RHEED, and particularly relates to an RHEED performance parameter test system, which comprises a test platform, a molecular pump set, a picoammeter, a displacement table controller and a configuration screen, and is characterized in that the test platform comprises a test cavity, and a CF100 observation window, a vacuum gauge mounting plate weldment, a high-energy electron gun, a CF100 fluorescent screen assembly and a gate valve which are respectively mounted on the test cavity; the Faraday cup assembly, the tungsten filament assembly, the displacement table assembly, the displacement table supporting assembly and the CF150 supporting flange are located in the testing cavity. The Faraday cup assembly is used for measuring beam current and beam current stability parameters, the tungsten filament assembly is used for measuring beam spots and beam half-angle parameters, and the displacement table assembly comprises motions in four directions and is used for controlling the positions of a Faraday cup and a tungsten filament in the measurement process. According to the invention, the beam current, the beam spot, the beam half angle and the beam current stability parameters of the high-energy electron gun can be conveniently measured, and an important research means is provided for structure optimization and performance research of the high-energy electron gun.

Description

Technical Field

[0001] The invention belongs to the technical field of RHEED (high energy electron gun), in particular to a RHEED performance parameter testing system, wherein the measurable performance parameters include beam current, beam spot, beam half angle and beam current stability. Background Art

[0002] In the MBE (molecular beam epitaxy) system, the high-energy electron gun is used to observe the growth of epitaxial thin films in situ, providing an analytical basis for improving the film growth conditions. The high-energy electron gun is not limited to single crystal surface structure analysis, but can also be used for surface structure analysis of polycrystalline, twin crystals, amorphous surfaces and particle samples. It can also be used for crop phase identification, determination of crystal orientation and atomic position, etc. The performance parameters of the high-energy electron gun (beam current, beam spot, etc.) directly affect the observation quality of the film. Therefore, it is very important to test the performance parameters of the high-energy electron gun. Summary of the invention

[0003] The purpose of the present invention is to provide a RHEED performance parameter test system. The test system can test performance parameters such as beam current, beam spot, beam half angle, beam stability, etc., and provide a research method for structural optimization and performance research of high-energy electron guns.

[0004] The objective of the present invention is achieved through the following technical solutions:

[0005] The present invention comprises a test platform, a molecular pump group, a picoammeter, a displacement platform controller and a configuration screen, wherein the test platform comprises a test platform vehicle, a test bench, an ion pump, a gate valve and an adjustable lifting platform, the test bench comprises a test cavity, a CF100 observation window adapter flange, a CF100 observation window, a vacuum gauge mounting plate weldment, a CF40 high energy electron gun mounting adapter flange, a CF100 fluorescent screen assembly, a CF50 lifting platform mounting adapter flange, a CF150 gate valve adapter flange and CF150 displacement platform internal components, the The test chamber is installed on the test platform vehicle, one end of the test chamber is connected to a CF100 observation window adapter flange, the CF100 observation window is installed on the CF100 observation window adapter flange, the other end of the test chamber is connected to a CF150 gate valve adapter flange, the CF150 gate valve adapter flange is installed with a gate valve for connecting the molecular pump group and the test bench; the top of the test chamber is respectively installed with a vacuum gauge mounting plate weldment and a CF50 lifting platform mounting adapter flange, the adjustable lifting platform is installed on The CF50 lifting platform is installed on the adapter flange; the two opposite sides of the test cavity are respectively connected with the CF40 high-energy electron gun installation adapter flange and the CF100 fluorescent screen assembly, and the high-energy electron gun is installed on the CF40 high-energy electron gun installation adapter flange; the bottom of the test cavity is fixedly connected to two cavity flanges, and the ion pump is installed on one cavity flange; the internal components of the CF150 displacement stage are located in the test cavity, including a Faraday cup assembly, a tungsten filament assembly, a displacement stage assembly, a displacement stage support assembly, a test support plate and a CF150 support flange, the bottom of the displacement stage support assembly extends out of the test cavity and is installed on another cavity flange through the CF150 support flange, the displacement stage assembly is installed on the top of the displacement stage support assembly, the displacement stage assembly is installed with a test support plate, and the test support plate is installed with a Faraday cup assembly or a tungsten filament assembly, one end of the picoammeter and the displacement stage controller are respectively connected to the interface of the support flange on the displacement stage assembly, and the other end of the picoammeter and the displacement stage controller are connected to the configuration screen.

[0006] Wherein: the vacuum gauge mounting plate weldment includes a CF40 resistance gauge flange, a CF40 ionization gauge flange, a modified flange and a handle; the modified flange is installed on the test chamber; the CF40 resistance gauge flange, the CF40 ionization gauge flange and the handle are respectively fixed on the modified flange; the CF40 resistance gauge flange is used to install the resistance gauge; and the CF40 ionization gauge flange is used to install the ionization gauge.

[0007] The Faraday cup assembly includes a Faraday cup body, a Faraday cup support seat, a Faraday cup rear plate and an M3 ceramic pad insulating member. One side of the Faraday cup body is installed on a test support plate through the Faraday cup support seat, and the other side of the Faraday cup body is connected to the Faraday cup rear plate; M3 flat washers and Faraday cup beam lead-out M3 screws are respectively installed on the Faraday cup rear plate, and the Faraday cup beam lead-out M3 screws on the Faraday cup rear plate are connected to the BNC connector on the CF150 support flange through a signal line for beam lead-out.

[0008] One end of the Faraday cup support is fixedly connected to the test support plate, and the other end of the Faraday cup support is connected to the Faraday cup body through the Faraday cup M3 connecting bolts. M3 ceramic pad insulating parts are installed on both the front and rear sides of the other end of the Faraday cup support to isolate the Faraday cup body and the Faraday cup support; the other side of the Faraday cup body is connected to the Faraday cup rear plate through a slotted countersunk M3 screw.

[0009] The tungsten filament assembly includes a tungsten filament bottom support seat, a tungsten filament column, a tungsten filament and a beam lead-out M4 screw. The tungsten filament bottom support seat is installed on the test support plate. Two tungsten filament columns are tightened on the tungsten filament bottom support seat, and the two ends of the tungsten filament are respectively connected to the two tungsten filament columns; the tungsten filament bottom support seat is installed with a beam lead-out M4 screw. The beam lead-out M4 screw on the tungsten filament bottom support seat is connected to the BNC connector on the CF150 support flange through a signal line to lead the beam signal to the picoammeter.

[0010] One end of the tungsten filament column is screwed onto the tungsten filament bottom support seat, and the tungsten filament is wound around the other end of the tungsten filament column and fixed by a fixing wire M4 bolt; the tungsten filament bottom support seat is connected to the test support plate by the tungsten filament seat M4 connecting bolt, and an M4 ceramic insulating flat pad and an M4 ceramic insulating step pad are respectively provided between the tungsten filament bottom support seat and the test support plate to isolate the tungsten filament bottom support seat and the test support plate, and the tungsten filament seat M4 connecting bolt passes through the M4 ceramic insulating flat pad and the M4 ceramic insulating step pad.

[0011] The CF150 support flange is integrated with four DB15 plugs and one BNC connector. The DB15 plug is used to transmit the signal of the translation stage component and control the movement of the translation stage component. The BNC connector is used to lead the beam signal to the picoammeter.

[0012] The translation stage support assembly includes a support column, a support plate and an M6 nut. There are multiple support columns, and the lower end of each support column is fixedly connected to the CF150 support flange. The upper end of each support column passes through the support plate and is tightened and fixed by an M6 nut. The translation stage assembly is installed on the support plate.

[0013] The test platform vehicle comprises a vehicle frame, casters, a front baffle and side baffles, wherein the front baffle and the side baffles are respectively mounted on the vehicle frame, and a plurality of casters are mounted on the bottom of the vehicle frame; the test bench is mounted on the vehicle frame.

[0014] The advantages and positive effects of the present invention are:

[0015] The present invention can realize the testing of the performance parameters of the high energy electron gun beam current, beam spot, beam half angle and beam stability, and provides an important research means for the structural optimization and performance research of the high energy electron gun. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0017] Figure 2 It is a schematic diagram of the overall structure of the test platform of the present invention;

[0018] Figure 3 for Figure 2 A top view of

[0019] Figure 4 It is a structural schematic diagram of the tungsten filament assembly, the translation stage assembly, the translation stage support assembly and the test support plate of the present invention;

[0020] Figure 5 for Figure 4 A partial cross-sectional view of

[0021] Figure 6 It is a structural schematic diagram of a Faraday cup assembly and a translation stage assembly of the present invention;

[0022] Figure 7 for Figure 6 A top view of

[0023] Among them: 1 is an adjustable lifting platform, 2 is a CF (Conflat Flange) 50 lifting platform installation adapter flange, 3 is a CF100 observation window adapter flange, 4 is a CF100 observation window, 5 is a body frame, 6 is a side baffle, 7 is a caster, 8 is an ion pump, 9 is a front baffle, 10 is a plug valve, 11 is a CF150 plug valve adapter flange, 12 is a vacuum gauge mounting plate weldment, 13 is a CF40 high energy electron gun installation adapter flange, 14 is a CF40 resistance gauge flange, 15 is a CF100 fluorescent screen assembly, 16 is a CF40 ionization gauge flange, 17 is a modified flange, 18 is a handle, 19 is a test chamber, 20 is a test support plate, 21 is Translation stage assembly, 22 is a support column, 23 is a support plate, 24 is an M6 nut, 25 is a CF150 support flange, 26 is a beam extraction M4 screw, 27 is a fixing wire M4 bolt, 28 is a tungsten filament, 29 is a tungsten filament column, 30 is a tungsten filament bottom support seat, 31 is an M4 ceramic insulating step pad, 32 is a tungsten filament seat M4 connecting bolt, 33 is an M4 ceramic insulating flat pad, 34 is an M3 flat pad, 35 is a Faraday cup beam extraction M3 screw, 36 is an M3 ceramic pad insulating part, 37 is a Faraday cup M3 connecting bolt, 38 is a Faraday cup support seat, 39 is a Faraday cup body, 40 is a Faraday cup back plate, 41 is a slotted countersunk M3 screw, and 42 is a cavity flange. DETAILED DESCRIPTION

[0024] The present invention will be further described below in conjunction with the accompanying drawings.

[0025] like Figures 1 to 7As shown, the present invention includes a test platform, a molecular pump group, a picoammeter, a displacement stage controller and a configuration screen, wherein the test platform includes a test platform vehicle, a test bench, an ion pump 8, a gate valve 10 and an adjustable lifting platform 1, and the test bench includes a test chamber 19, a CF100 observation window adapter flange 3, a CF100 observation window 4, a vacuum gauge mounting plate weldment 12, a CF40 high energy electron gun mounting adapter flange 13, a CF100 fluorescent screen assembly 15, a CF50 lifting platform mounting adapter flange 2, a CF150 gate valve adapter flange 10 and a CF150 displacement stage internal assembly The test chamber 19 is installed on the test platform vehicle, one end of the test chamber 19 is connected to a CF100 observation window adapter flange 3, and the CF100 observation window 4 is installed on the CF100 observation window adapter flange 3. The other end of the test chamber 19 is connected to a CF150 gate valve adapter flange 10, and the gate valve 10 for connecting the molecular pump group and the test bench is installed on the CF150 gate valve adapter flange 10; the top of the test chamber 19 is respectively installed with a vacuum gauge mounting plate weldment 12 and a CF50 lifting platform mounting adapter flange 2, and the adjustable lifting platform 1 is installed on the CF50 lifting platform. The lowering platform is mounted on the adapter flange 2; the two opposite sides of the test cavity 19 are respectively connected with the CF40 high energy electron gun mounting adapter flange 13 and the CF100 fluorescent screen assembly 15, the CF100 fluorescent screen assembly 15 is used to observe and adjust the beam spot, and the high energy electron gun is mounted on the CF40 high energy electron gun mounting adapter flange 13; the bottom of the test cavity 19 is fixedly connected with two cavity flanges 42, and the ion pump 8 is mounted on one cavity flange 42; the internal components of the CF150 displacement stage are located in the test cavity 19, including the Faraday cup assembly, the tungsten filament assembly, the displacement stage assembly 21, the displacement The stage support assembly, the test support plate 20 and the CF150 support flange 25, the bottom of the stage support assembly extends out of the test cavity 19 and is mounted on another cavity flange 42 through the CF150 support flange 25, the stage assembly 21 is mounted on the top of the stage support assembly, the test support plate 20 is mounted on the stage assembly 21, the Faraday cup assembly or the tungsten filament assembly is mounted on the test support plate 20, one end of the picoammeter and the stage controller are respectively connected to the interface of the support flange on the stage assembly 21, and the other end of the picoammeter and the stage controller are connected to the configuration screen. The molecular pump group is used as the front stage of the ion pump 8 to pump the vacuum degree to below the starting pressure range of the ion pump 8; the picoammeter is used to display the beam; the stage controller is used to control the movement of the stage assembly 21; the configuration screen is used to integrate the functions of beam display and movement of the stage assembly 21, so as to facilitate user operation.

[0026] The test platform vehicle of this embodiment includes a vehicle frame 5, casters 7, a front baffle 9 and side baffles 6, the front baffle 9 and the side baffles 6 are respectively installed on the vehicle frame 5, and a plurality of casters 7 are installed at the bottom of the vehicle frame 5; the test bench is installed on the vehicle frame 5.

[0027] The vacuum gauge mounting plate weldment 12 of the present embodiment includes a CF40 resistance gauge flange 14, a CF40 ionization gauge flange 16, a modified flange 17 and a handle 18. The modified flange 17 is installed on the test chamber 19. The CF40 resistance gauge flange 14, the CF40 ionization gauge flange 16 and the handle 18 are respectively fixed on the modified flange 17. The CF40 resistance gauge flange 14 is used to install the resistance gauge, and the CF40 ionization gauge flange 16 is used to install the ionization gauge.

[0028] The gate valve 10 of this embodiment is used to connect the molecular pump group and the test bench. The molecular pump group is used for front-stage exhaust. After reaching the starting pressure of the ion pump 8, the ion pump 8 is started. After the vacuum degree is stable, the gate valve 10 is closed.

[0029] The adjustable lifting platform 1 of this embodiment is a commercially available product purchased from Shanghai Feimian Instrument Technology Co., Ltd. The adjustable lifting platform 1 is used to install samples and adjust the sample height, with an adjustable range of 0 to 100 mm; the adjustable lifting platform 1 is integrated with a resistance wire for heating the sample; the adjustable lifting platform 1 is integrated into the test bench for expanding subsequent sample diffraction pattern tests.

[0030] The translation stage support assembly of the present embodiment includes a support column 22, a support plate 23 and an M6 nut 24. There are multiple support columns 22. The lower end of each support column 22 is fixedly connected to the CF150 support flange 25. The upper end of each support column 22 passes through the support plate 23 and is fastened and fixed by the M6 ​​nut 24. The translation stage assembly 21 is installed on the support plate 23.

[0031] The translation stage assembly 21 of the present embodiment is a commercially available product purchased from Beijing Ziheng Technology Co., Ltd.; the translation stage assembly 21 has an X-axis, a Y-axis, a Z-axis and an R rotation axis.

[0032] In this embodiment, four DB15 plugs and one BNC connector are integrated on the CF150 support flange 25. The DB15 plug is used to transmit the signal of the translation stage assembly 21 and control the movement of the translation stage assembly 21, and the BNC connector is used to lead the beam signal to the picoammeter.

[0033] The CF100 fluorescent screen assembly 15 of this embodiment is a commercially available product purchased from STAIB, Germany.

[0034] The Faraday cup assembly of the present embodiment includes a Faraday cup body 39, a Faraday cup support seat 38, a Faraday cup rear plate 40, a Faraday cup M3 connecting bolt 37, an M3 ceramic pad insulating member 36, a Faraday cup beam extraction M3 screw 35, a slotted countersunk M3 screw 41 and an M3 flat washer 34. One end of the Faraday cup support seat 38 is fixedly connected to the test support plate 20 through the Faraday cup M3 connecting bolt 37, and the other end of the Faraday cup support seat 38 is connected to one side of the Faraday cup body 39 through the Faraday cup M3 connecting bolt 37. M3 ceramic pad insulating members 36 are installed on both the front and rear sides of the other end of the Faraday cup support seat 38 to isolate the Faraday cup body 39 from the Faraday cup support seat 38; the other side of the Faraday cup body 39 is connected to the Faraday cup rear plate 40 through the slotted countersunk M3 screw 41. The Faraday cup rear plate 40 is respectively installed with an M3 flat washer 34 and a Faraday cup beam lead-out M3 screw 35. The Faraday cup beam lead-out M3 screw 35 on the Faraday cup rear plate 40 is connected to the BNC connector on the CF150 support flange 25 through a signal line for beam lead-out. After the high-energy electron gun emits electrons, the beam spot shape displayed on the CF100 fluorescent screen assembly 15 is adjusted to make it bright and sharp. After being collected by the Faraday cup, it is displayed on the picoammeter and the configuration screen through the signal line connected to the Faraday cup rear plate 40, thereby measuring the beam parameters. The beam stability is to continuously collect the beam signal within the set time and calculate the beam stability by analyzing the fluctuation range of the beam value.

[0035] The tungsten filament assembly of the present embodiment comprises a tungsten filament bottom support seat 30, a tungsten filament column 29, a tungsten filament 28, a fixing filament M4 bolt 27, a tungsten filament seat M4 connecting bolt 32, an M4 ceramic insulating flat washer 33, an M4 ceramic insulating step washer 31 and a beam extraction M4 screw 26. The tungsten filament bottom support seat 30 is connected to the test support plate 20 through the tungsten filament seat M4 connecting bolt 32. An M4 ceramic insulating flat washer 33 and an M4 ceramic insulating step washer 31 are respectively provided between the tungsten filament bottom support seat 30 and the test support plate 20. The insulating step pad 31 is used to isolate the tungsten filament bottom support seat 30 and the test support plate 20. The tungsten filament seat M4 connecting bolt 32 passes through the M4 ceramic insulating flat pad 33 and the M4 ceramic insulating step pad 31. Two tungsten filament columns 29 are tightened on the tungsten filament bottom support seat 30. One end of the tungsten filament column 29 is tightened on the tungsten filament bottom support seat 30. The tungsten filament 28 is wound around the other end of the tungsten filament column 29 and fixed by the fixing wire M4 bolt 27. The diameter of the tungsten filament in this embodiment is 10 to 20 μm. The beam lead-out M4 screw 26 is installed on the tungsten filament bottom support seat 30. The beam lead-out M4 screw 26 on the tungsten filament bottom support seat 30 leads the beam signal to the picoammeter through the signal line and the BNC connector on the CF150 support flange 25. The tungsten filament 28 performs reciprocating periodic motion through the translation stage assembly 21, reciprocatingly cutting the beam spot, and collecting continuous beam signals on the configuration screen. The beam spot value is calculated through the known motion stroke and motion cycle. The beam half-angle is calculated by collecting continuous beam signals on the normal planes at different intervals of the light beam and calculating the beam half-angle through the known interval distance and the beam spot calculation values ​​on different normal planes.

[0036] The beam spot test and beam current test of this embodiment require manual replacement of the Faraday cup assembly and the tungsten filament assembly.

Claims

1. A RHEED performance parameter testing system, characterized in that: The invention comprises a test platform, a molecular pump group, a picoammeter, a displacement platform controller and a configuration screen, wherein the test platform comprises a test platform vehicle, a test bench, an ion pump (8), a gate valve (10) and an adjustable lifting platform (1), the test bench comprises a test chamber (19), a CF100 observation window adapter flange (3), a CF100 observation window (4), a vacuum gauge mounting plate weldment (12), a CF40 high energy electron gun mounting adapter flange (13), a CF100 fluorescent screen assembly (15), a CF50 lifting platform mounting adapter flange (2), a CF150 gate valve adapter flange (10) and internal components of the CF150 displacement platform, the test chamber ( 19) is installed on a test platform vehicle, one end of the test chamber (19) is connected to a CF100 observation window adapter flange (3), the CF100 observation window (4) is installed on the CF100 observation window adapter flange (3), the other end of the test chamber (19) is connected to a CF150 gate valve adapter flange (10), and the CF150 gate valve adapter flange (10) is installed with a gate valve (10) for connecting a molecular pump group and a test bench; the top of the test chamber (19) is respectively installed with a vacuum gauge mounting plate weldment (12) and a CF50 lifting platform mounting adapter flange (2), and the adjustable lifting platform (1) is installed on The CF50 lifting platform is mounted on the adapter flange (2); the two opposite sides of the test cavity (19) are respectively connected with the CF40 high-energy electron gun mounting adapter flange (13) and the CF100 fluorescent screen assembly (15), and the high-energy electron gun is mounted on the CF40 high-energy electron gun mounting adapter flange (13); the bottom of the test cavity (19) is fixedly connected with two cavity flanges (42), and the ion pump (8) is mounted on one cavity flange (42); the internal components of the CF150 displacement platform are located in the test cavity (19), including a Faraday cup assembly, a tungsten filament assembly, a displacement platform assembly (21), a displacement platform support assembly, and a test support assembly. The invention relates to a displacement stage support assembly having a support plate (20) and a CF150 support flange (25), wherein the bottom of the displacement stage support assembly extends out of the test cavity (19) and is mounted on another cavity flange (42) through the CF150 support flange (25), the displacement stage assembly (21) is mounted on the top of the displacement stage support assembly, the displacement stage assembly (21) is mounted with a test support plate (20), a Faraday cup assembly or a tungsten filament assembly is mounted on the test support plate (20), one end of the picoammeter and the displacement stage controller are respectively connected to the interface of the support flange on the displacement stage assembly (21), and the other end of the picoammeter and the displacement stage controller are connected to a configuration screen.

2. The RHEED performance parameter testing system according to claim 1, characterized in that: The vacuum gauge mounting plate weldment (12) comprises a CF40 resistance gauge flange (14), a CF40 ionization gauge flange (16), a modified flange (17) and a handle (18); the modified flange (17) is mounted on a test chamber (19); the CF40 resistance gauge flange (14), the CF40 ionization gauge flange (16) and the handle (18) are respectively fixed on the modified flange (17); the CF40 resistance gauge flange (14) is used for mounting a resistance gauge; and the CF40 ionization gauge flange (16) is used for mounting an ionization gauge.

3. The RHEED performance parameter testing system according to claim 1, characterized in that: The Faraday cup assembly comprises a Faraday cup body (39), a Faraday cup support seat (38), a Faraday cup rear plate (40) and an M3 ceramic pad insulating member (36); one side of the Faraday cup body (39) is mounted on a test support plate (20) via the Faraday cup support seat (38); the other side of the Faraday cup body (39) is connected to the Faraday cup rear plate (40); an M3 flat washer (34) and a Faraday cup beam lead-out M3 screw (35) are respectively mounted on the Faraday cup rear plate (40); the Faraday cup beam lead-out M3 screw (35) on the Faraday cup rear plate (40) is connected to a BNC connector on a CF150 support flange (25) via a signal line for beam lead-out.

4. The RHEED performance parameter testing system according to claim 3, characterized in that: One end of the Faraday cup support seat (38) is fixedly connected to the test support plate (20), and the other end of the Faraday cup support seat (38) is connected to the Faraday cup body (39) through the Faraday cup M3 connecting bolt (37). M3 ceramic pad insulating parts (36) are installed on both the front and rear sides of the other end of the Faraday cup support seat (38) to isolate the Faraday cup body (39) and the Faraday cup support seat (38); the other side of the Faraday cup body (39) is connected to the Faraday cup rear plate (40) through a slotted countersunk M3 screw (41).

5. The RHEED performance parameter testing system according to claim 1, characterized in that: The tungsten filament assembly comprises a tungsten filament bottom support seat (30), a tungsten filament column (29), a tungsten filament (28) and a beam lead-out M4 screw (26); the tungsten filament bottom support seat (30) is mounted on a test support plate (20); two tungsten filament columns (29) are screwed onto the tungsten filament bottom support seat (30); two ends of the tungsten filament (28) are respectively connected to the two tungsten filament columns (29); the tungsten filament bottom support seat (30) is mounted with a beam lead-out M4 screw (26); the beam lead-out M4 screw (26) on the tungsten filament bottom support seat (30) is connected to a BNC connector on a CF150 support flange (25) via a signal line to lead out a beam signal to a picoammeter.

6. The RHEED performance parameter testing system according to claim 5, characterized in that: One end of the tungsten filament column (29) is screwed onto the tungsten filament bottom support seat (30), and the tungsten filament (28) is wound around the other end of the tungsten filament column (29) and fixed by a fixing wire M4 bolt (27); the tungsten filament bottom support seat (30) is connected to the test support plate (20) by a tungsten filament seat M4 connecting bolt (32), and an M4 ceramic insulating flat washer (33) and an M4 ceramic insulating step washer (31) are respectively provided between the tungsten filament bottom support seat (30) and the test support plate (20) to isolate the tungsten filament bottom support seat (30) and the test support plate (20), and the tungsten filament seat M4 connecting bolt (32) passes through the M4 ceramic insulating flat washer (33) and the M4 ceramic insulating step washer (31).

7. The RHEED performance parameter testing system according to claim 1, characterized in that: The CF150 support flange (25) is integrated with four DB15 plugs and a BNC connector. The DB15 plug is used to transmit the signal of the translation stage component (21) and control the movement of the translation stage component (21), and the BNC connector is used to lead the beam signal to the picoammeter.

8. The RHEED performance parameter testing system according to claim 1, characterized in that: The translation platform support assembly comprises a support column (22), a support plate (23) and an M6 nut (24); there are multiple support columns (22); the lower end of each support column (22) is fixedly connected to a CF150 support flange (25); the upper end of each support column (22) passes through the support plate (23) and is fastened and fixed by an M6 nut (24); the translation platform assembly (21) is mounted on the support plate (23).

9. The RHEED performance parameter testing system according to claim 1, characterized in that: The test platform vehicle comprises a vehicle frame (5), casters (7), a front baffle (9) and side baffles (6); the front baffle (9) and the side baffles (6) are respectively mounted on the vehicle frame (5); a plurality of casters (7) are mounted on the bottom of the vehicle frame (5); and the test bench is mounted on the vehicle frame (5).

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