Micrometer-sized electrodynamic continuously adjustable slit device and optical device

Abstract

The present disclosure provides a micron-level electric continuous adjustable slit device and optical device, belonging to the technical field of adjustable slit. The device comprises a mounting plate and a slit adjusting mechanism mounted on the side wall of the mounting plate. The slit adjusting mechanism comprises: a first guide rail and a second guide rail, which are parallel to each other and movably arranged on the side wall of the mounting plate; a first slit blade and a second slit blade, which are parallel to each other and symmetrical, one of which is arranged on the first guide rail and the other is arranged on the second guide rail; a lead screw motor arranged on one side of the mounting plate; the lead screw motor drives the first guide rail and the second guide rail to move in opposite directions along the axis of the mounting plate through a transmission assembly, so as to drive the first slit blade and the second slit blade to move in opposite directions, and adjust the slit distance between the first slit blade and the second slit blade. The micron-level electric continuous adjustable slit device and optical device realize high-precision continuous bidirectional adjustment of the slit width.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of adjustable slit, in particular to a micron-level electric continuous adjustable slit device and an optical device. BACKGROUND

[0002] In the technical field of optical instrument application, a slit refers to a gap formed by a pair of partitions on a light path, which determines the size of the light flux of the incident light beam, thereby controlling the intensity of the outgoing light beam and playing the role of an aperture. The parallelism, symmetry, opening and closing uniformity of the slit opening and the slit width have important influences on the performance of the slit. The current slits mainly include fixed-width slits and adjustable slits.

[0003] In the prior art, in compact optical devices such as spectrometers, slit adjustment includes manual adjustment and screw rod motor adjustment. The manual adjustment is adjusted by a micrometer-like micrometer head, which has low precision and is not easy to operate. The precision of the current screw rod motor is 5um or more, which is difficult to meet the high-precision requirement of 25um or more per 1um continuous adjustment of the slit of the spectrometer. SUMMARY

[0004] The purpose of the present disclosure is to overcome the shortcomings of the prior art, provide a micron-level electric continuous adjustable slit device and an optical device, and realize high-precision continuous bidirectional adjustment of the width of the slit to improve the stability of the slit width adjustment.

[0005] To achieve the above-mentioned purpose of the application, the present disclosure adopts the following technical solutions:

[0006] A micron-level electric continuous adjustable slit device, comprising a mounting plate and a slit adjustment mechanism mounted on a side wall of the mounting plate, the slit adjustment mechanism comprising:

[0007] a first guide rail and a second guide rail, which are parallel to each other and axially movably arranged on the side wall of the mounting plate;

[0008] a first slit blade and a second slit blade which are parallel to each other and symmetrical, one of which is arranged on the first guide rail and the other of which is arranged on the second guide rail;

[0009] a screw rod motor arranged on one side of the mounting plate;

[0010] The screw rod motor drives the first guide rail and the second guide rail to move in opposite directions along the mounting plate through a transmission assembly, so as to drive the first slit blade and the second slit blade to move in opposite directions, thereby adjusting the slit spacing between the first slit blade and the second slit blade.

[0011] In an exemplary embodiment of the present disclosure, the transmission assembly comprises:

[0012] a wedge movably arranged on one side wall of the mounting plate, the wedge being located on one side of the first guide rail and the second guide rail;

[0013] a connecting rod rotatably arranged on one side wall of the mounting plate, the connecting rod being located on the other side of the first guide rail and the second guide rail;

[0014] a spring bolt movably arranged on one side wall of the mounting plate, the spring bolt being located on the side of the second guide rail away from the connecting rod, one end of the spring bolt abutting against the second guide rail, and the other end of the spring bolt extending out of the mounting plate and being threadedly connected with the mounting plate;

[0015] the lead screw motor is capable of driving the wedge to reciprocate in the mounting plate, and the wedge drives the first guide rail and the first slit blade to move when the wedge moves, the first guide rail is capable of driving the connecting rod to rotate, so that the second guide rail and the second slit blade move in opposite directions.

[0016] In an exemplary embodiment of the present disclosure, a groove is formed on the mounting plate, and a guide rod is arranged in the groove, and the wedge is movably sleeved on the guide rod;

[0017] the lead screw motor is located below the mounting plate, an output shaft of the lead screw motor extends into the groove and is threadedly connected with the wedge, and the lead screw motor is capable of driving the wedge to reciprocate along the guide rod in the groove.

[0018] In an exemplary embodiment of the present disclosure, first and second guide grooves parallel to each other and extending in the length direction are formed on the mounting plate, a third guide groove extending in the width direction is also formed on the mounting plate, the third guide groove is in communication with the first and second guide grooves at two ends thereof, and the first guide groove is in communication with the groove;

[0019] the first guide rail is movably arranged in the first guide groove, the second guide rail is movably arranged in the second guide groove, and one end of the first guide rail extends into the groove and abuts against the inclined surface of the wedge through a first ball;

[0020] the connecting rod is rotatably installed in the third guide groove through a fixed hinge shaft, second balls are arranged at two ends of the connecting rod, and the connecting rod abuts against the first and second guide rails through the second balls at the two ends thereof;

[0021] the spring bolt is movably arranged in the second guide groove, one end of the spring bolt abuts against the second guide rail, and the other end of the spring bolt extends out of the mounting plate and is threadedly connected with the mounting plate.

[0022] In an example embodiment of the present disclosure, one end of the first guide rail extending into the groove is provided with a limiting block, an inwardly recessed guide groove extending along an axis is formed on the inclined surface of the wedge block, and the guide groove can clamp the first ball to transmit the movement of the wedge block to the first guide rail.

[0023] In an example embodiment of the present disclosure, at least one through hole is formed in the inner wall of the side of the first guide groove and the second guide groove away from each other, and a wave bead bolt is threadedly connected in the through hole.

[0024] The wave bead bolt on the inner wall of the first guide groove abuts against the first guide rail, and the wave bead bolt on the inner wall of the second guide groove abuts against the second guide rail.

[0025] In an example embodiment of the present disclosure, at least one guide hole extending in the width direction is formed in the first slit blade and the second slit blade, and at least one connecting hole corresponding to the guide hole is formed in the first guide rail and the second guide rail.

[0026] The first slit blade and the first guide rail, and the second slit blade and the second guide rail are connected by at least one screw, and the screw is sequentially arranged in the guide hole and the connecting hole.

[0027] In an example embodiment of the present disclosure, a magnet is arranged on the first slit blade and the second slit blade, and a magnetic induction sensor corresponding to the magnet is arranged on the mounting plate.

[0028] In an example embodiment of the present disclosure, an exit hole is arranged on one side wall of the mounting plate, and the exit hole is located between the first guide rail and the second guide rail.

[0029] A plurality of mounting holes are uniformly distributed in the circumferential direction outside the exit hole, the mounting hole is formed in the mounting plate, a spring is arranged on the side of the mounting hole away from the exit hole, a marble is movably arranged on the side of the mounting hole close to the exit hole, and the spring abuts against the first slit blade and the second slit blade through the marble.

[0030] An optical device comprising the micron-scale electrically continuous adjustable slit device of any one of the above embodiments.

[0031] The present disclosure has the following beneficial effects:

[0032] The micro-scale electric continuously adjustable slit device and optical device of the present disclosure are driven by a closed-loop screw motor to move a precisely processed wedge block structure longitudinally, so that a first slit blade and a second slit blade, which are parallel and symmetrical, are simultaneously moved closer to or away from each other, the width control of the slit is converted into the control of the step change amount of the screw rod, the parallelism, symmetry and uniformity of opening and closing of the slit opening are improved, the slit width adjustment precision and stability are improved, bidirectional automatic adjustment of the slit width is realized, and then continuous high-precision bidirectional adjustment of the slit width is realized. BRIEF DESCRIPTION OF DRAWINGS

[0033] The accompanying drawings, which are incorporated into and form part of the specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the disclosure. Obviously, the drawings in the following description are only some embodiments of the present disclosure, and other drawings can be obtained from these drawings without creative labor for those skilled in the art.

[0034] Figure 1 For an embodiment of the present disclosure, a structure diagram of a micro-scale electric continuously adjustable slit device is shown in the figure.

[0035] Figure 2 For an embodiment of the present disclosure, a sectional view of a micro-scale electric continuously adjustable slit device is shown in the figure.

[0036] Figure 3 For an embodiment of the present disclosure, a structure diagram of a mounting plate is shown in the figure.

[0037] Figure 4 For an embodiment of the present disclosure, a structure diagram of a first guide rail is shown in the figure.

[0038] Figure 5 For an embodiment of the present disclosure, a structure diagram of a first slit blade is shown in the figure.

[0039] Figure 6 For an embodiment of the present disclosure, a structure diagram of a wedge block is shown in the figure.

[0040] Explanation of reference signs:

[0041] 1, mounting plate; 2, first guide rail; 3, second guide rail; 4, first slit blade; 5, second slit blade; 6, screw motor; 7, wedge block; 8, connecting rod; 9, spring bolt; 10, groove; 11, guide rod; 12, first guide groove; 13, second guide groove; 14, third guide groove; 15, first ball; 16, fixed hinge shaft; 17, second ball; 18, limit block; 19, guide groove; 20, through hole; 21, ball bolt; 22, guide hole; 23, connecting hole; 24, screw; 25, magnet; 26, exit hole; 27, mounting hole; 28, ball; 29, mounting seat. DETAILED DESCRIPTION

[0042] Example embodiments now will be described more fully hereinafter with reference to the accompanying drawings; however, the example embodiments can be implemented in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. Like reference numerals refer to like elements throughout the drawings, and thus a detailed description of the same will be omitted. In addition, the drawings are to be considered in the illustrative mode, and not a restrictive one.

[0043] Although relative terms such as "upper", "lower", etc. are used herein to describe one component's relationship to another component of the icon, these terms are used herein solely for convenience, e.g., based on the orientation of the example shown in the drawings. It will be understood that if the device of the icon is turned upside down, the component described as being "upper" will become the component that is "lower". When a structure is "on" another structure, it can mean that the structure is formed integrally with the other structure, or that the structure is "directly" on the other structure, or that the structure is "indirectly" on the other structure via another structure.

[0044] The terms "one", "a", "an", "the", and "at least one" are used to mean that "one or more" of something is present; the term "or" is used to mean "and / or" both; the term "including" is used to mean "including, but not limited to"; and the term "based on" is used to mean "based, at least in part, on". The term "first", "second", and "third" are used to distinguish elements with the same name but are not used to limit the number of elements.

[0045] The example embodiments of the present disclosure provide a micron-sized electrically-driven continuously adjustable slit device, as shown in Figures 1 to 6 , which includes a mounting plate 1 and a slit adjustment mechanism mounted on a side wall of the mounting plate 1. The slit adjustment mechanism includes: first and second guide rails 2 and 3, which are parallel to each other and axially movably arranged on the side wall of the mounting plate 1; first and second slit blades 4 and 5, which are parallel to each other and symmetrically arranged, one on the first guide rail 2 and the other on the second guide rail 3; and a lead screw motor 6 arranged on one side of the mounting plate 1. The lead screw motor 6 drives the first and second guide rails 2 and 3 to move axially along the mounting plate 1 in opposite directions through a transmission assembly, so as to drive the first and second slit blades 4 and 5 to move in opposite directions to each other, thereby adjusting the slit gap between the first and second slit blades 4 and 5.

[0046] In the embodiment of the present disclosure, the micron-level electric continuously adjustable slit device is composed of a mounting plate 1 and a slit adjusting mechanism mounted on the mounting plate 1, wherein the slit adjusting mechanism is composed of a first guide rail 2, a second guide rail 3, a first slit blade 4, a second slit blade 5, a lead screw motor 6 and a transmission assembly, the mounting plate 1 is provided with an exit hole 26, the first guide rail 2 and the second guide rail 3 are movably arranged on the side wall of the mounting plate 1 in the axial direction of the mounting plate 1 and are arranged on the two sides of the exit hole 26 in parallel with each other, one of the first slit blade 4 and the second slit blade 5 is mounted on the first guide rail 2, and the other of the first slit blade 4 and the second slit blade 5 is mounted on the second guide rail 3, the first slit blade 4 and the second slit blade 5 are parallel and symmetrical to each other, the blade ends of the first slit blade 4 and the second slit blade 5 are close to each other to form a slit, the lead screw motor 6 is mounted outside the mounting plate 1, the transmission assembly is mounted on one side wall of the mounting plate 1, the transmission assembly is driven to move by the lead screw motor 6, the first guide rail 2 and the second guide rail 3 are driven to move, that is, the first guide rail 2 and the second guide rail 3 are moved in the axial direction of the mounting plate 1 transversely and in opposite directions, the first slit blade 4 and the second slit blade 5 are driven to move in the axial direction of the mounting plate 1 toward opposite directions, the slit distance between the first slit blade 4 and the second slit blade 5 is changed, and the width of the slit is adjusted on both sides.

[0047] Compared with the existing manual adjustment and lead screw motor adjustment of the slit, the micron-level electric continuously adjustable slit device drives the transmission assembly to move by the closed-loop lead screw motor, so that the first slit blade and the second slit blade which are parallel and symmetrical to each other are simultaneously close to or away from each other, the width control of the slit is converted into the control of the step change amount of the lead screw, the parallelism, symmetry and uniformity of opening and closing of the slit opening are improved, the adjustment precision and stability of the slit width are improved, the bidirectional automatic adjustment of the slit width is realized, and then the continuous high-precision bidirectional adjustment of the slit width is realized.

[0048] In one embodiment of the present disclosure, referring to Figure 1 , the first slit blade 4 is arranged on the first guide rail 2, and the second slit blade 5 is arranged on the second guide rail 3.

[0049] In one embodiment of the present disclosure, referring to Figure 1 and Figure 2The transmission assembly comprises: a wedge block 7 movably arranged on one side wall of the mounting plate 1, the wedge block 7 being located on one side of the first guide rail 2 and the second guide rail 3; a connecting rod 8 rotatably arranged on one side wall of the mounting plate 1, the connecting rod 8 being located on the other side of the first guide rail 2 and the second guide rail 3; and a spring bolt 9 movably arranged on one side wall of the mounting plate 1, the spring bolt 9 being located on the side of the second guide rail 3 away from the connecting rod 8, one end of the spring bolt 9 abutting against the second guide rail 3, and the other end of the spring bolt 9 extending out of the mounting plate 1 and being threadedly connected with the mounting plate 1. The lead screw motor 6 can drive the wedge block 7 to reciprocate in the mounting plate 1, and the wedge block 7 drives the first guide rail 2 and the first slit blade 4 to move when the wedge block 7 moves. The first guide rail 2 can drive the connecting rod 8 to rotate, so that the second guide rail 3 and the second slit blade 5 move in opposite directions. In this way, the longitudinal movement of the precisely machined wedge block 7 driven by the lead screw motor 6 realizes the conversion of the width control of the slit into the control of the step change amount of the lead screw, and the width adjustment accuracy of the slit is improved.

[0050] It can be understood that the output shaft of the lead screw motor 6 extends into the mounting plate 1 and is threadedly connected with the wedge block 7, one end of the connecting rod 8 abuts against the first guide rail 2, the other end of the connecting rod 8 abuts against the second guide rail 3, the spring bolt 9 is threadedly mounted on the side wall of the mounting plate 1 away from the connecting rod 8, one end of the spring bolt 9 extends into the mounting plate 1 and abuts against the end of the second guide rail 3 away from the connecting rod 8, the wedge block 7 is driven by the lead screw motor 6 to move in the mounting plate 1, the wedge block 7 pushes the first guide rail 2 to move transversely in the mounting plate 1, the first guide rail 2 drives the connecting rod 8 to rotate, the connecting rod 8 pushes the second guide rail 3 to move reversely transversely in the mounting plate 1, the second guide rail 3 drives the second slit blade 5 to move reversely transversely in the mounting plate 1, the width of the slit formed between the first slit blade 4 and the second slit blade 5 changes, and the width of the slit is adjusted on both sides.

[0051] In the embodiment of the present disclosure, the first guide rail 2, the connecting rod 8, the second guide rail 3 and the spring bolt 9 form a connecting rod mechanism similar to a parallelogram, so that the first guide rail 2 and the second guide rail 3 move synchronously in opposite directions, the displacement amounts of the first guide rail 2 and the second guide rail 3 are the same, the first slit blade 4 and the second slit blade 5 move synchronously by the same displacement amount, the symmetry of the first slit blade 4 and the second slit blade 5 is ensured, the structure of the parallelogram connecting rod makes the first slit blade 4 and the second slit blade 5 more stable during movement, and the first slit blade 4 and the second slit blade 5 are not prone to shaking and shaking, the width parallelism, symmetry and opening and closing uniformity of the slit opening are improved, and the opening part of the slit always remains concentric with the exit hole 26 when the width of the slit changes.

[0052] In an embodiment of the present disclosure, the slope of the wedge 7 is designed as a (i.e. the angle between the inclined surface of the wedge 7 and the vertical surface is a), and the tangent value tga of the slope a is the one-way width change amount of the slit / the displacement change amount of the screw rod, so that the width control of the slit is converted to the control of the screw step change amount of the screw motor 6 through the precision machining of the wedge 7, and the continuous high-precision adjustment of the slit width is facilitated. For example, when the positioning accuracy of the screw motor 6 is 5um and tga=1 / 10, the one-way adjustment accuracy of the slit width can reach 0.5um, so that the high-precision adjustment of the slit width on both sides is realized, the screw motor 6 is continuously started, the continuous high-precision adjustment of the slit width is realized, and the high-precision requirement of the continuous adjustment of the slit width of 25um or more per 1um of the spectrometer is met.

[0053] In an embodiment of the present disclosure, referring to Figures 1 to 3 , the mounting plate 1 is provided with a groove 10, the groove 10 is provided with a guide rod 11, and the wedge 7 is movably sleeved on the guide rod 11; the screw motor 6 is located below the mounting plate 1, the output shaft of the screw motor 6 extends into the groove 10 and is threadedly connected with the wedge 7, and the screw motor 6 can drive the wedge 7 to reciprocatingly move along the guide rod 11 in the groove 10. In this way, the wedge 7 can move stably in the groove 10, the first slit blade 4 and the second slit blade 5 can move stably, the accuracy of the slit width adjustment is improved, and the high-precision continuous adjustment of the slit width is realized.

[0054] It can be understood that the output shaft of the screw motor 6 extends into the groove 10, the output shaft of the screw motor 6 is rotationally connected with the mounting plate 1, the output shaft of the screw motor 6 is threadedly connected with the wedge 7, the guide rod 11 serves as a guide, and the wedge 7 moves longitudinally along the guide rod 11 through the screw transmission between the screw motor 6 and the wedge 7, so that the wedge 7 is prevented from deflecting during the movement and the stability of the movement of the wedge 7 is improved.

[0055] In an embodiment of the present disclosure, referring to Figure 1 and Figure 2 , the mounting seat 29 is arranged between the screw motor 6 and the mounting plate 1, one end of the mounting seat 29 is detachably connected with the screw motor 6, the other end of the mounting seat 29 is detachably connected with the mounting plate 1, the output shaft of the screw motor 6 extends into the groove 10 through the mounting seat 29 and is rotationally connected with the mounting seat 29.

[0056] In an example, one end of the guide rod 11 extends out of the mounting plate 1 and passes through the mounting seat 29 to be connected with the screw motor 6.

[0057] In an embodiment of the present disclosure, referring to Figures 1 to 3The first guide groove 12 and the second guide groove 13 are parallel to each other and extend along the length direction of the mounting plate 1. The third guide groove 14 extends along the width direction of the mounting plate 1, and the two ends of the third guide groove 14 are communicated with the first guide groove 12 and the second guide groove 13 respectively, and the first guide groove 12 is communicated with the groove 10. The first guide rail 2 is movably arranged in the first guide groove 12, and the second guide rail 3 is movably arranged in the second guide groove 13. One end of the first guide rail 2 extends into the groove 10 and abuts against the inclined surface of the wedge block 7 through the first ball 15. The connecting rod 8 is rotatably arranged in the third guide groove 14 through the fixed hinge shaft 16. The two ends of the connecting rod 8 are respectively provided with the second ball 17, and the two ends of the connecting rod 8 abut against the first guide rail 2 and the second guide rail 3 through the second ball 17 respectively. The spring bolt 9 is movably arranged in the second guide groove 13, one end of the spring bolt 9 abuts against the second guide rail 3, and the other end of the spring bolt 9 extends out of the mounting plate 1 and is threadedly connected with the mounting plate 1. In this way, the first guide rail 2 and the second guide rail 3 can move stably on the mounting plate 1, and the wedge block 7 can push the first guide rail 2 to move through the first ball 15. The rotatably arranged connecting rod 8 transmits the movement of the first guide rail 2 to the second guide rail 3, so that the second guide rail 3 moves in the opposite direction, the first guide rail 2 and the second guide rail 3 move in the opposite direction at the same time, the first slit blade 4 and the second slit blade 5 move in the opposite direction at the same time, the first slit blade 4 and the second slit blade 5 move stably, and the accuracy of slit width adjustment is improved.

[0058] Optionally, the first ball 15 and the second ball 17 are steel balls.

[0059] Optionally, referring to Figure 1 and Figure 2 The cross section of the wedge block 7 is a right trapezoid, and the inclined surface of the wedge block 7 abuts against the first guide rail 2 through the first ball 15.

[0060] It can be understood that the first guide groove 12 and the second guide groove 13 are symmetrically arranged on the two sides of the exit hole 26, and extend along the length direction of the mounting plate 1, so that the first guide rail 2 and the second guide rail 3 can move along the length direction of the mounting plate 1, the first slit blade 4 and the second slit blade 5 can move along the length direction of the mounting plate 1, and the slit width can be adjusted along the length direction of the mounting plate 1.

[0061] Of course, the first guide groove 12 and the second guide groove 13 can also extend along the width direction of the mounting plate 1, and the positions of the remaining components are adjusted adaptively.

[0062] It can be understood that the fixed hinge shaft 16 is located at the center of the connecting rod 8, and can completely transmit the movement of the first guide rail 2 to the second guide rail 3, so that the displacement amounts of the first guide rail 2 and the second guide rail 3 are the same, thereby realizing that the slit opening part is always concentric with the exit hole 26 when the slit width changes, and improving the uniformity of the slit opening opening and closing.

[0063] It can be understood that the spring bolt 9 is used for buffering the second guide rail 3, so that the first guide rail 2 and the second guide rail 3 synchronously move the same displacement, the stability of the movement of the second guide rail 3 is improved, and the adjustment accuracy of the slit width is improved.

[0064] In an embodiment of the present disclosure, the inner walls of the first guide groove 12 and the second guide groove 13 are respectively provided with ball slides, and the first guide rail 2 and the second guide rail 3 can be connected with the ball slides, so as to reduce the friction force when the first guide rail 2 and the second guide rail 3 move, facilitate the movement of the first guide rail 2 and the second guide rail 3, avoid the friction overheating phenomenon between the first guide rail 2 and the first guide groove 12 and between the second guide rail 3 and the second guide groove 13, reduce the wear of the device, and avoid the failure of the device.

[0065] In an embodiment of the present disclosure, referring to Figure 4 and Figure 6 , one end of the first guide rail 2 extending into the groove 10 is provided with a limiting block 18, and an inclined surface of the wedge block 7 is recessed inward to form a guide groove 19 extending along an axis, the guide groove 19 and the limiting block 18 can clamp the first ball 15, so as to transmit the movement of the wedge block 7 to the first guide rail 2. In this way, the wedge block 7 and the limiting block 18 can clamp the first ball 15, the friction between the limiting block 18 and the first ball 15 is reduced, the first guide rail 2 is facilitated to move through the first ball 15 when the wedge block 7 moves longitudinally, and the control of the width of the slit is facilitated to be converted into the control of the stepping change amount of the screw rod.

[0066] Optionally, the limiting block 18 is L-shaped in cross section, and the first ball 15 is located at an inner right angle of the L-shaped limiting block 18, so as to facilitate the inclined surface of the wedge block 7 to clamp the first ball 15 with the limiting block 18, and realize the transmission of the longitudinal movement of the wedge block 7 to the first guide rail 2.

[0067] Optionally, a side wall of the horizontal frame of the L-shaped limiting block 18 close to the wedge block 7 is an inclined surface, and is parallel to the inclined surface of the wedge block 7, so as to avoid the interference and collision between the wedge block 7 and the limiting block 18.

[0068] Optionally, the limiting block 18 and the first guide rail 2 can be integrally formed.

[0069] Optionally, the guide groove 19 is a V-shaped groove.

[0070] In an embodiment of the present disclosure, referring to Figure 2The inner wall of the first guide groove 12 and the inner wall of the second guide groove 13, which are away from each other, are respectively provided with at least one through hole 20, and the wave bead bolt 21 is threadedly connected in the through hole 20. The wave bead bolt 21 on the inner wall of the first guide groove 12 abuts against the first guide rail 2, and the wave bead bolt 21 on the inner wall of the second guide groove 13 abuts against the second guide rail 3. In this way, the horizontal degree of the first guide rail 2 and the second guide rail 3 can be adjusted, the parallel degree of the first guide rail 2 and the second guide rail 3 can be improved, and the accuracy of the slit width adjustment can be improved.

[0071] In an example, two through holes 20 are provided on the inner wall of the first guide groove 12, and two through holes 20 are provided on the inner wall of the second guide groove 13.

[0072] Optionally, the through holes 20 on the first guide groove 12 and the through holes 20 on the second guide groove 13 are symmetrically distributed, and the wave bead bolts 21 on the first guide groove 12 and the wave bead bolts 21 on the second guide groove 13 are symmetrically distributed.

[0073] Optionally, the two through holes 20 and the two wave bead bolts 21 in the through holes 20 are spaced apart.

[0074] In an embodiment of the present disclosure, referring to Figure 4 and Figure 5 At least one guide hole 22 extending in the width direction is provided on the first slit blade 4 and the second slit blade 5, respectively, and at least one connecting hole 23 corresponding to the guide hole 22 is provided on the first guide rail 2 and the second guide rail 3, respectively. The first slit blade 4 and the first guide rail 2, and the second slit blade 5 and the second guide rail 3 are connected by at least one screw 24, and the screw 24 is sequentially arranged in the guide hole 22 and the connecting hole 23. In this way, the installation position of the first slit blade 4 and the second slit blade 5 on the first guide rail 2 and the second guide rail 3 can be adjusted, the distance between the first slit blade 4 and the second slit blade 5 can be conveniently adjusted, and the slit width can be conveniently adjusted.

[0075] In an example, the number of the guide hole 22 and the connecting hole 23 is two, the two guide holes 22 and the two connecting holes 23 correspond to each other, and the two groups of guide holes 22 and connecting holes 23 are connected by two different screws 24.

[0076] For example, one of the screws 24 is an internal hexagonal round head screw, and the other screw 24 is an internal hexagonal cylindrical screw.

[0077] In an embodiment of the present disclosure, referring to Figure 5The first slit blade 4 and the second slit blade 5 are respectively provided with a magnet 25, and the mounting plate 1 is provided with a magnetic induction sensor corresponding to the magnet 25. In this way, the displacement of the first slit blade 4 and the second slit blade 5 is measured through the cooperation of the magnetic induction sensor and the magnet 25, the change of the feedback slit width is realized, and the influence of the error of the mechanical part of the device on the slit width adjustment accuracy is effectively compensated.

[0078] Optionally, the two magnets 25 are located on the same horizontal line.

[0079] In an embodiment of the present disclosure, the surfaces of the first slit blade 4 and the second slit blade 5 are coated with an optical absorption layer. In this way, harmful light reflection can be reduced.

[0080] Optionally, the optical absorption layer is black ink.

[0081] In an embodiment of the present disclosure, referring to Figure 2 and Figure 3 , the mounting plate 1 is provided with an exit hole 26 on one side wall, and the exit hole 26 is located between the first guide rail 2 and the second guide rail 3; a plurality of mounting holes 27 are uniformly distributed on the outer edge of the exit hole 26, the mounting holes 27 are arranged on the mounting plate 1, a spring is arranged on the side of the mounting hole 27 away from the exit hole, and a spring ball 28 is movably arranged on the side of the mounting hole 27 close to the exit hole, and the spring is in abutment with the first slit blade 4 and the second slit blade 5 through the spring ball 28. In this way, the first slit blade 4 and the second slit blade 5 can be supported, the flatness of the first slit blade 4 and the second slit blade 5 can be ensured, and the first slit blade 4 and the second slit blade 5 can be prevented from being stuck during movement.

[0082] In an embodiment of the present disclosure, referring to Figure 1 and Figure 2 , the lead screw motor 6 is electrically connected to an external controller through wiring.

[0083] In an embodiment of the present disclosure, referring to Figures 1 to 6 , the working process of the micron-level electric continuous adjustable slit device is briefly described as follows:

[0084] When the micro-sized electric continuously adjustable slit device is used, there is a certain distance between the first slit blade 4 and the second slit blade 5, and the slit formed between the first slit blade 4 and the second slit blade 5 is opposite to the exit hole 26. When it is needed to reduce the width of the slit, the lead screw motor 6 is started to drive the wedge block 7 to move upward in the groove 10 along the guide rod 11, the wedge block 7 pushes the first guide rail 2 to move rightward in the first guide groove 12 through the first ball 15, the first guide rail 2 pushes the connecting rod 8 to rotate around the fixed hinge shaft 16 in the third guide groove 14, the other end of the connecting rod 8 synchronously pushes the second guide rail 3 to move leftward in the second guide groove 13, so that the spring bolt 9 is compressed, the first guide rail 2 drives the first slit blade 4 to move rightward, the second guide rail 3 synchronously drives the second slit blade 5 to move leftward, so that the first slit blade 4 and the second slit blade 5 are close to each other, the first slit blade 4 and the second slit blade 5 move the same displacement amount, so that the width of the slit formed between the first slit blade 4 and the second slit blade 5 is reduced. When it is needed to increase the width of the slit, the lead screw motor 6 is started in the opposite direction to drive the wedge block 7 to move downward in the groove 10 along the guide rod 11, so as to reduce the pressure on the first guide rail 2, the second guide rail 3 moves rightward in the second guide groove 13 under the elastic force of the spring bolt 9, the second guide rail 3 pushes the connecting rod 8 to rotate reversely around the fixed hinge shaft 16 in the third guide groove 14, the other end of the connecting rod 8 synchronously pushes the first guide rail 2 to move leftward in the first guide groove 12, so that the first guide rail 2 drives the first slit blade 4 to move leftward, the second guide rail 3 synchronously drives the second slit blade 5 to move rightward, so that the first slit blade 4 and the second slit blade 5 are away from each other, so that the width of the slit formed between the first slit blade 4 and the second slit blade 5 is increased.

[0085] The micro-sized electric continuously adjustable slit device according to any one of the above embodiments is provided.

[0086] Other embodiments of the present disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses or adaptive changes of the present disclosure along with their equivalents, which follow the general principles of the present disclosure and include known or customary practices in the art. The specification and examples are to be regarded as exemplary only, and the true scope and spirit of the present disclosure are indicated by the appended claims.

Claims

1. A micrometer-sized electrically powered continuously adjustable slit device comprising a mounting plate (1) and a slit adjustment mechanism mounted on one side wall of the mounting plate (1), characterized in that, The slit adjusting mechanism comprises: A first guide rail (2) and a second guide rail (3) are arranged on the side wall of the mounting plate (1) in parallel and axially movably; A first slit blade (4) and a second slit blade (5) are arranged in parallel and symmetrically, one on the first guide rail (2) and the other on the second guide rail (3); A lead screw motor (6) is arranged on one side of the mounting plate (1); The lead screw motor (6) drives the first guide rail (2) and the second guide rail (3) to move axially along the mounting plate (1) in opposite directions through a transmission assembly, so as to drive the first slit blade (4) and the second slit blade (5) to move in opposite directions, thereby adjusting the slit distance between the first slit blade (4) and the second slit blade (5); The transmission assembly comprises: A wedge block (7) is movably arranged on one side wall of the mounting plate (1), and the wedge block (7) is located on one side of the first guide rail (2) and the second guide rail (3); A connecting rod (8) is rotatably arranged on one side wall of the mounting plate (1), and the connecting rod (8) is located on the other side of the first guide rail (2) and the second guide rail (3); A spring bolt (9) is movably arranged on one side wall of the mounting plate (1), and the spring bolt (9) is located on the side of the second guide rail (3) away from the connecting rod (8), one end of the spring bolt (9) abuts against the second guide rail (3), and the other end of the spring bolt (9) extends out of the mounting plate (1) and is threadedly connected with the mounting plate (1); The wedge block (7) has an inclined surface, the inclined surface of the wedge block (7) has a guide groove (19), and the guide groove (19) abuts against the first guide rail (2) through a first ball (15); The lead screw motor (6) can drive the wedge block (7) to reciprocate in the mounting plate (1), and when the wedge block (7) moves, the first guide rail (2) is pushed to move through the first ball (15), the first guide rail (2) drives the connecting rod (8) to rotate when the first guide rail (2) moves, and the connecting rod (8) moves the second guide rail (3) in the opposite direction when the connecting rod (8) rotates, so that the first slit blade (4) and the second slit blade (5) move in opposite directions.

2. The micro-sized electrodynamic continuously adjustable slit device according to claim 1, characterized in that, A recess (10) is formed in the mounting plate (1), a guide rod (11) is arranged in the recess (10), and the wedge block (7) is movably sleeved on the guide rod (11); The lead screw motor (6) is located below the mounting plate (1), the output shaft of the lead screw motor (6) extends into the recess (10) and is threadedly connected with the wedge block (7), and the lead screw motor (6) can drive the wedge block (7) to reciprocate along the guide rod (11) in the recess (10).

3. The micro-sized electrodynamic continuously adjustable slit device according to claim 2, wherein, The first guide groove (12) and the second guide groove (13) are parallel to each other and extend along the length direction, and the third guide groove (14) extends along the width direction and is in communication with the first guide groove (12) and the second guide groove (13) at both ends, and the first guide groove (12) is in communication with the groove (10); The first guide rail (2) is movably arranged in the first guide groove (12), and the second guide rail (3) is movably arranged in the second guide groove (13), and one end of the first guide rail (2) extends into the groove (10) and abuts against the inclined surface of the wedge block (7) through the first ball (15); The connecting rod (8) is rotatably arranged in the third guide groove (14) through the fixed hinge shaft (16), and the connecting rod (8) is provided with the second ball (17) at both ends, and the connecting rod (8) abuts against the first guide rail (2) and the second guide rail (3) through the second ball (17) at both ends; The spring bolt (9) is movably arranged in the second guide groove (13), one end of the spring bolt (9) abuts against the second guide rail (3), and the other end of the spring bolt (9) extends out of the mounting plate (1) and is threadedly connected with the mounting plate (1).

4. The micro-sized electrodynamic continuously adjustable slit device according to claim 3, wherein, The first guide rail (2) is provided with a limiting block (18) at the end extending into the groove (10), and the inclined surface of the wedge block (7) is recessed inward to form a guide groove (19) extending along the axis, and the guide groove (19) and the limiting block (18) can clamp the first ball (15) to transmit the movement of the wedge block (7) to the first guide rail (2).

5. The micro-sized electrodynamic continuously adjustable slit device of claim 3, wherein, At least one through hole (20) is formed in the inner wall of the first guide groove (12) and the second guide groove (13) away from each other, and a wave bead bolt (21) is threadedly connected in the through hole (20); The wave bead bolt (21) on the inner wall of the first guide groove (12) abuts against the first guide rail (2), and the wave bead bolt (21) on the inner wall of the second guide groove (13) abuts against the second guide rail (3).

6. The microscale electrodynamic continuously adjustable slit device of claim 1, wherein, At least one guide hole (22) extending along the width direction is formed in the first slit blade (4) and the second slit blade (5), and at least one connecting hole (23) corresponding to the guide hole (22) is formed in the first guide rail (2) and the second guide rail (3); The first slit blade (4) and the first guide rail (2), and the second slit blade (5) and the second guide rail (3) are connected by at least one screw (24), and the screw (24) is sequentially arranged in the guide hole (22) and the connecting hole (23).

7. The microscale electrodynamic continuously adjustable slit device of claim 1, wherein, The first slit blade (4) and the second slit blade (5) are respectively provided with a magnet (25), and the mounting plate (1) is provided with a magnetic induction sensor corresponding to the magnet (25).

8. The microscale electrodynamic continuously adjustable slit device of claim 1, wherein, The installation plate (1) is provided with an exit hole (26) on one side wall, the exit hole (26) is located between the first guide rail (2) and the second guide rail (3); The outer edge of the exit hole (26) is circumferentially uniformly distributed with a plurality of mounting holes (27), the mounting holes (27) are opened on the installation plate (1), a spring is arranged on the side away from the opening in the mounting hole (27), a spring ball (28) is movably arranged on the side close to the opening in the mounting hole (27), and the spring is in abutment with the first slit blade (4) and the second slit blade (5) through the spring ball (28).

9. An optical device, characterized by A micro-sized electric continuously adjustable slit device as claimed in any one of claims 1 to 8.

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