Sample taking and sending mechanism for electron microscope system and electron microscope

Abstract

The invention relates to the technical field of electron microscopes, in particular to a sample taking and sending mechanism for an electron microscope system and an electron microscope. The invention provides a sample taking and sending mechanism for an electron microscope system. The sample taking and sending mechanism comprises a pre-vacuumizing chamber, a detection chamber, a first conveying mechanism, a second conveying mechanism, a third conveying mechanism and a sample information acquisition mechanism. The pre-vacuumizing chamber is provided with a first valve; the detection chamber is provided with a second valve and a detection table; the first conveying mechanism is arranged corresponding to the first valve; the second conveying mechanism is arranged in the pre-vacuumizing chamber; the third conveying mechanism is arranged in the pre-vacuumizing chamber; the sample information acquisition mechanism is used for acquiring sample information of a to-be-detected sample and monitoring a sample feeding state in real time.

Description

Technical Field

[0001] The present disclosure relates to the technical field of electron microscopes, and in particular to a sample taking and delivering mechanism for an electron microscope system and an electron microscope. Background Art

[0002] Microscopes are the eyes of human beings to study the objective world. Among them, scanning transmission electron microscopes (STEM) are widely used. They have nanoscale characterization capabilities and are often used in the fields of biology, semiconductors, and materials science. However, the process of taking and delivering samples requires time to break the vacuum and restore the vacuum, which results in low detection efficiency. Summary of the invention

[0003] The present disclosure provides a sample taking and delivering mechanism for an electron microscope system and an electron microscope, so as to at least solve the above technical problems existing in the prior art.

[0004] The first aspect of the present disclosure provides a sample taking and delivering mechanism for an electron microscope system, comprising:

[0005] The pre-vacuum chamber is provided with a first valve;

[0006] A testing chamber, provided with a second valve and a testing station;

[0007] A first conveying mechanism, arranged corresponding to the first valve, and used for conveying the sample to be tested to the first valve;

[0008] A second conveying mechanism is disposed in the pre-vacuum chamber, the second conveying mechanism is used to move the sample to be tested to the pre-vacuum chamber after the first valve is opened, and the first valve is closed after the sample to be tested is moved to the pre-vacuum chamber;

[0009] a third conveying mechanism, disposed in the pre-vacuum chamber, the third conveying mechanism being used to move the sample to be tested to the detection chamber when the second valve is opened, and the second valve being used to close after the sample to be tested is moved to the detection platform;

[0010] The sample information collection mechanism is used to collect sample information of the samples to be tested and monitor the sample delivery status in real time.

[0011] Further, the sample information collection mechanism includes a first detection member, and the first detection member is arranged on the first conveying mechanism;

[0012] When the first detection component detects the information of the sample to be tested on the first conveying mechanism, the first conveying mechanism conveys the sample to be tested to the first valve.

[0013] Furthermore, the conveying directions of the first conveying mechanism and the second conveying mechanism are in a straight line;

[0014] And / or, the conveying directions of the third conveying mechanism and the second conveying mechanism are perpendicular to each other.

[0015] Furthermore, the first conveying mechanism includes a sample box, a first tray is provided in the sample box, and the first tray is slidably matched with the sample box;

[0016] The first tray is provided with a plurality of second trays, and the second trays are used to place the samples to be tested;

[0017] The first detection member is used to detect whether there is a first tray in the sample box. After the first valve is opened, the second conveying mechanism moves the first tray to the pre-vacuum chamber. The first valve is closed after the first tray arrives at the pre-vacuum chamber.

[0018] Furthermore, the sample information collection mechanism includes a second detection member, which is disposed in the pre-vacuum chamber, and is used to detect whether the second conveying mechanism has a sample to be tested;

[0019] When the second detection member detects that there is a sample to be tested on the second conveying mechanism, the second valve opens, and after the sample to be tested moves to the detection chamber, the second valve closes.

[0020] Furthermore, the second detection member is used to detect information of the sample to be tested on the second tray;

[0021] When the second detection member detects the sample to be tested on the second tray, the second valve opens, the third conveying mechanism moves the second tray to the detection chamber, and after the second tray moves to the detection chamber, the second valve closes.

[0022] Furthermore, it also includes a controller, and the first valve and the second valve are both connected to the controller;

[0023] The controller is used to control the opening or closing of the first valve; and / or, the controller is used to control the opening or closing of the second valve.

[0024] Furthermore, the first detection element and the second detection element are both connected to the controller;

[0025] The first detection member is used to transmit information of whether the first conveying mechanism detects the presence of the sample to be tested to a controller, and the controller is used to control the first valve according to the information of whether the first conveying mechanism detects the presence of the sample to be tested;

[0026] The second detection member is used to detect whether there is information about the sample to be tested on the second tray, and the controller controls the second valve according to the information about whether there is information about the sample to be tested on the second tray.

[0027] Furthermore, the first detection element is used to detect the initial information of the sample to be tested and transmit the initial information to the controller, wherein the initial information includes the name of the sample testing unit, the product name, the testing time and the items to be tested;

[0028] The controller includes a sample number generating unit, and the sample number generating unit is used to add a sample number according to the initial information to form identification information;

[0029] The second detection member is used to move the sample to be tested to the detection chamber and perform detection according to the identification information;

[0030] The detection chamber is provided with a detection unit, and the detection unit is used to transmit the test result of the sample to be tested to the controller.

[0031] A second aspect of the present disclosure provides an electron microscope, comprising the sample taking and delivering mechanism for the electron microscope system described in the second aspect.

[0032] Compared with the prior art, the technical solution provided by the embodiments of the present disclosure has the following advantages:

[0033] The sample receiving and delivering mechanism for the electron microscope system provided in the embodiment of the present disclosure realizes full automation of sample receiving and delivering, changing the mainstream manual sample delivering operation on the market; a flexible sample receiving and delivering method in which the first conveying mechanism, the second conveying mechanism and the third conveying mechanism cooperate is adopted, thereby improving the detection efficiency of the samples and reducing the time cost; the movement coordination between the third conveying mechanism and the detection table in the detection chamber realizes the automation of taking and placing samples inside the vacuum.

[0034] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The above and other objects, features and advantages of the exemplary embodiments of the present disclosure will become readily understood by reading the detailed description below with reference to the accompanying drawings. In the accompanying drawings, several embodiments of the present disclosure are shown in an exemplary and non-limiting manner, in which:

[0036] In the drawings, the same or corresponding reference numerals represent the same or corresponding parts.

[0037] Figure 1 A schematic diagram of the structure of a sample taking and delivering mechanism for an electron microscope system provided by an embodiment of the present disclosure is shown;

[0038] Figure 2 A schematic structural diagram of a first conveying mechanism provided in an embodiment of the present disclosure is shown;

[0039] Figure 3 A schematic structural diagram of a pre-vacuum chamber provided in an embodiment of the present disclosure is shown.

[0040] Explanation of the numbers in the figure: 1. first conveying mechanism; 11. sample box; 12. first tray; 13. second tray; 2. second conveying mechanism; 3. third conveying mechanism; 4. pre-vacuum chamber; 5. detection chamber; 51. detection table; 6. first valve; 7. second valve; 8. sample information collection mechanism. DETAILED DESCRIPTION

[0041] In order to make the purpose, features, and advantages of the present disclosure more obvious and easy to understand, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present disclosure.

[0042] Combination Figure 1 , Figure 2 and Figure 3As shown, the sample taking and delivering mechanism for the electron microscope system provided by the embodiment of the present disclosure includes a pre-vacuum chamber 4, a detection chamber 5, a first conveying mechanism 1, a second conveying mechanism 2, a third conveying mechanism 3 and a sample information acquisition mechanism 8. The detection chamber 5 is used to provide a vacuum environment during detection. The pre-vacuum chamber 4 is used to provide a vacuum transfer environment. The pre-vacuum chamber 4 is provided with a first valve 6. When the first valve 6 is opened, the sample to be tested can be delivered into the pre-vacuum chamber 4. The detection chamber 5 is provided with a second valve 7 and a detection table 51, and the detection table 51 is used to carry the sample to be tested; the first conveying mechanism 1 is arranged corresponding to the first valve 6, and is used to convey the sample to be tested to the first valve 6; the second conveying mechanism 2 is arranged in the pre-vacuum chamber 4, and the second conveying mechanism 2 is used to move the sample to be tested to the pre-vacuum chamber 4 after the first valve 6 is opened, and the first valve 6 is closed after the sample to be tested is moved to the pre-vacuum chamber 4; when the first valve 6 is opened, the second conveying device can move the sample to be tested transported by the first conveying device to the first valve 6 into the pre-vacuum chamber 4. Since the first valve 6 is opened, the vacuum environment of the pre-vacuum chamber 4 will be destroyed. When the first valve 6 is opened, the pre-vacuum chamber 4 can be evacuated to form a vacuum environment in the pre-vacuum chamber 4.

[0043] The third conveying mechanism 3 is arranged in the pre-vacuum chamber 4. The third conveying mechanism 3 is used to move the sample to be tested to the detection chamber 5 when the second valve 7 is opened. The second valve 7 is used to close after the detection sample is moved to the detection platform. When the second valve 7 is opened, the third conveying mechanism 3 can move the sample to be tested to the detection chamber 5. Since the pre-vacuum chamber 4 is a vacuum environment, when the second valve 7 is opened, the vacuum environment of the detection chamber 5 will not be broken, which reduces the time to restore the vacuum.

[0044] The sample information collection mechanism 8 is used to collect sample information of the sample to be tested and monitor the sample delivery status in real time. When the sample information collection mechanism 8 detects the sample information to be tested on the first conveying mechanism 1, the first conveying mechanism 1 conveys the sample to be tested to the first valve 6. After the first valve 6 is opened, the second conveying device can move the sample to be tested that is conveyed by the first conveying device to the first valve 6 into the pre-vacuum chamber 4, and the first valve 6 is closed after the sample to be tested is moved into the pre-vacuum chamber 4. When the sample information collection mechanism 8 detects the sample information to be tested on the second conveying mechanism 2, the second valve 7 is opened, and the third conveying mechanism 3 moves the sample to be tested to the detection chamber 5, and after the sample to be tested is moved to the detection chamber 5, the second valve 7 is closed. The second valve 7 can isolate the detection chamber 5 from the pre-vacuum chamber 4, so that the detection chamber 5 can always be in a vacuum state, reducing the time required to restore the vacuum during detection.

[0045] The sample taking and delivering mechanism for the electron microscope system provided in the embodiment of the present disclosure realizes the full automation of sample taking and delivering, changing the mainstream manual sample delivery operation in the market; adopts a flexible sample taking and delivering method in which the first conveying mechanism 1, the second conveying mechanism 2 and the third conveying mechanism 3 cooperate, thereby improving the detection efficiency of the sample and reducing the time cost; the third conveying mechanism 3 and the detection table 51 provided in the detection chamber 5 have motion coordination, realizing the automation of taking and placing samples inside the vacuum. Both the detection chamber 5 and the pre-vacuum chamber 4 can be chambers surrounded by metal cavity walls, which are used to provide a vacuum environment.

[0046] The first conveying device, the second conveying device and the third conveying device can all adopt linear slide rail devices.

[0047] In some specific embodiments, the sample information collection mechanism 8 includes a first detection member, which is disposed on the first conveying mechanism 1; when the first detection member detects the information of the sample to be tested on the first conveying mechanism 1, the first conveying mechanism 1 conveys the sample to be tested to the first valve 6. When the first valve 6 is opened, the second conveying device can move the sample to be tested transported by the first conveying device to the first valve 6 into the pre-vacuum chamber 4, and the first valve 6 is closed after the sample to be tested is moved into the pre-vacuum chamber 4. The first detection member can monitor the sample delivery status in real time to realize intelligent and flexible sample delivery.

[0048] The first detection member may include a sensor or a camera.

[0049] In some specific embodiments, the conveying directions of the first conveying mechanism 1 and the second conveying mechanism 2 are in a straight line, so that the second conveying device can move the sample to be tested delivered by the first conveying device to the first valve 6 into the pre-vacuum chamber 4.

[0050] In some specific embodiments, the conveying directions of the third conveying mechanism 3 and the second conveying mechanism 2 are perpendicular to each other, so that the third conveying mechanism 3 can move the sample to be tested to the detection chamber 5 .

[0051] In some specific embodiments, the first conveying mechanism 1 includes a sample box 11, a first tray 12 is provided in the sample box 11, and the first tray 12 is slidably matched with the sample box 11; the first tray 12 is provided with a plurality of second trays 13, and the second tray 13 is used to place the sample to be tested; the first detection member is used to detect whether the first tray 12 is in the sample box 11, and the second conveying mechanism 2 moves the first tray 12 to the pre-vacuum chamber 4 after the first valve 6 is opened, and the first valve 6 is closed after the first tray 12 arrives at the pre-vacuum chamber 4. If the first tray 12 is in the sample box 11, the next step can be performed; if the second tray 13 is not in the sample box 11, the device alarm prompts that there is a lack of material in the box, and the next step will not be performed, thereby avoiding the time of breaking the vacuum and restoring the vacuum.

[0052] The first conveying mechanism 1 can move the plurality of second trays 13 to the pre-vacuum chamber 4 and can simultaneously convey a plurality of samples to be tested, thereby reducing the time for breaking the vacuum and restoring the vacuum.

[0053] In some specific embodiments, the sample information collection mechanism 8 includes a second detection member, which is arranged in the pre-vacuum chamber 4, and the second detection member is used to detect whether there is a sample to be tested on the second conveying mechanism 2; when the second detection member detects that there is a sample to be tested on the second conveying mechanism 2, the second valve 7 is opened, and after the sample to be tested moves to the detection chamber 5, the second valve 7 is closed. Optionally, if there is a sample to be tested on the second conveying mechanism 2, the next step can be performed, and the second valve 7 is opened, and after the sample to be tested moves to the detection chamber 5, it is closed. If there is no sample to be tested on the second conveying mechanism 2, the device alarm prompts that there is a lack of material, and the next step will not be performed, thereby avoiding the time to break the vacuum and restore the vacuum. The second detection member can monitor the sample delivery status in real time to realize the intelligent and flexible sample delivery.

[0054] The second detection member may include a sensor or a camera.

[0055] In some specific embodiments, the second detection member is used to detect the information of the sample to be tested on the second tray 13; when the second detection member detects the sample to be tested on the second tray 13, the second valve 7 is opened, the third conveying mechanism 3 moves the second tray 13 to the detection chamber 5, and after the second tray 13 is moved to the detection chamber 5, the second valve 7 is closed. Optionally, if there is a second tray 13 on the first tray 12, the next step can be performed, the second valve 7 is opened, and is closed after the sample to be tested is moved to the detection chamber 5. If there is no second tray 13 on the first tray 12, the device alarm prompts that there is a lack of material, and the next step will not be performed, thereby avoiding the time to break the vacuum and restore the vacuum. The second detection member can monitor the sample delivery status in real time to achieve intelligent and flexible sample delivery.

[0056] In some specific embodiments, a controller is also included, and the first valve 6 and the second valve 7 are both connected to the controller; the controller is used to control the opening or closing of the first valve 6; and / or, the controller is used to control the opening or closing of the second valve 7, thereby realizing the automation of taking and placing samples inside the vacuum.

[0057] In some specific embodiments, the first detection member and the second detection member are both connected to the controller; the first detection member is used to transmit information of whether the sample to be tested exists in the first conveying mechanism 1 to the controller, and the controller is used to control the first valve 6 according to the information of whether the sample to be tested exists in the first conveying mechanism 1; the second detection member is used to transmit information of whether the sample to be tested exists on the second tray 13, and the controller controls the second valve 7 according to the information of whether the sample to be tested exists on the second tray 13, thereby realizing the automation of taking and placing samples inside the vacuum.

[0058] In some specific embodiments, the first detection member is used to detect the initial information of the sample to be tested and transmit the initial information to the controller, the initial information includes the name of the sample inspection unit, the product name, the inspection time and the items to be inspected; the controller includes a sample number generation unit, the sample number generation unit is used to add the sample number according to the initial information to form identification information; the second detection member is used to move the sample to be tested to the detection chamber 5 and perform the detection according to the identification information; the detection chamber 5 is provided with a detection unit, and the detection unit is used to transmit the test result of the sample to be tested to the controller. After receiving the test result, the terminal can correspond the subsequent test result with the initial information of the sample to be tested, avoiding the staff from repeatedly inputting the sample information, reducing the influence of human factors on the sample detection process, and realizing the intelligence and flexibility of sample delivery and testing.

[0059] The electron microscope provided in the embodiment of the disclosure includes the sample taking and delivering mechanism for the electron microscope system provided in the embodiment of the disclosure. Since the electron microscope provided in the embodiment of the disclosure has the same advantages as the sample taking and delivering mechanism for the electron microscope system provided in the embodiment of the disclosure, they will not be described in detail here.

[0060] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps recorded in this disclosure can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solutions disclosed in this disclosure can be achieved, and this document does not limit this.

[0061] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present disclosure, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0062] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A sample taking and delivering mechanism for an electron microscope system, characterized in that: include: A pre-vacuum chamber (4) is provided with a first valve (6); A detection chamber (5) is provided with a second valve (7) and a detection platform (51); A first conveying mechanism (1), arranged corresponding to the first valve (6), and used for conveying the sample to be tested to the first valve (6); a second conveying mechanism (2) disposed in the pre-vacuum chamber (4), the second conveying mechanism (2) being used to move the sample to be tested to the pre-vacuum chamber (4) after the first valve (6) is opened, and the first valve (6) being closed after the sample to be tested is moved to the pre-vacuum chamber (4); a third conveying mechanism (3), arranged in the pre-vacuum chamber (4), the third conveying mechanism (3) being used to move the sample to be tested to the detection chamber (5) when the second valve (7) is opened, and the second valve (7) being used to close after the sample to be tested is moved to the detection platform; The sample information collection mechanism (8) is used to collect sample information of the sample to be tested and to monitor the sample delivery status in real time.

2. The sample taking and delivering mechanism for an electron microscope system according to claim 1, characterized in that: The sample information collection mechanism (8) comprises a first detection member, and the first detection member is arranged on the first conveying mechanism (1); When the first detection element detects the information of the sample to be tested on the first conveying mechanism (1), the first conveying mechanism (1) conveys the sample to be tested to the first valve (6).

3. The sample taking and delivering mechanism for an electron microscope system according to claim 1, characterized in that: The conveying directions of the first conveying mechanism (1) and the second conveying mechanism (2) are on a straight line; And / or, the conveying directions of the third conveying mechanism (3) and the second conveying mechanism (2) are perpendicular to each other.

4. The sample taking and delivering mechanism for an electron microscope system according to claim 2, characterized in that: The first conveying mechanism (1) comprises a sample box (11), a first tray (12) is arranged inside the sample box (11), and the first tray (12) is slidably matched with the sample box (11); The first tray (12) is provided with a plurality of second trays (13), and the second trays (13) are used to place the samples to be tested; The first detection member is used to detect whether a first tray (12) exists in the sample box (11); after the first valve (6) is opened, the second conveying mechanism (2) moves the first tray (12) to the pre-vacuum chamber (4); and the first valve (6) is closed after the first tray (12) arrives at the pre-vacuum chamber (4).

5. The sample taking and delivering mechanism for an electron microscope system according to claim 4, characterized in that: The sample information collection mechanism (8) comprises a second detection member, the second detection member is arranged in the pre-vacuum chamber (4), and the second detection member is used to detect whether the second conveying mechanism (2) has a sample to be tested; When the second detection member detects that the second conveying mechanism (2) has a sample to be tested, the second valve (7) opens, and after the sample to be tested moves to the detection chamber (5), the second valve (7) closes.

6. The sample taking and delivering mechanism for an electron microscope system according to claim 5, characterized in that: The second detection member is used to detect information of the sample to be tested on the second tray (13); When the second detection member detects the sample to be tested on the second tray (13), the second valve (7) is opened, the third conveying mechanism (3) moves the second tray (13) to the detection chamber (5), and after the second tray (13) is moved to the detection chamber (5), the second valve (7) is closed.

7. The sample taking and delivering mechanism for an electron microscope system according to claim 6, characterized in that: It also includes a controller, wherein the first valve (6) and the second valve (7) are both connected to the controller; The controller is used to control the opening or closing of the first valve (6); and / or, the controller is used to control the opening or closing of the second valve (7).

8. The sample taking and delivering mechanism for an electron microscope system according to claim 7, characterized in that: The first detection element and the second detection element are both connected to the controller; The first detection member is used to transmit information of whether the first conveying mechanism (1) detects the presence of the sample to be tested to a controller, and the controller is used to control the first valve (6) according to the information of whether the first conveying mechanism (1) detects the presence of the sample to be tested; The second detection member is used to detect whether there is information about the sample to be tested on the second tray (13), and the controller controls the second valve (7) according to the information about whether there is information about the sample to be tested on the second tray (13).

9. The sample taking and delivering mechanism for an electron microscope system according to claim 7, characterized in that: The first detection element is used to detect the initial information of the sample to be tested and transmit the initial information to the controller, wherein the initial information includes the name of the sample inspection unit, the product name, the inspection time and the items to be inspected; The controller includes a sample number generating unit, and the sample number generating unit is used to add a sample number according to the initial information to form identification information; The second detection element is used to move the sample to be tested to the detection chamber (5) and perform detection according to the identification information; The detection chamber (5) is provided with a detection unit, and the detection unit is used to transmit the test result of the sample to be tested to the controller.

10. An electron microscope, characterized in that: The invention comprises a sample taking and delivering mechanism for an electron microscope system as described in any one of claims 1 to 9.

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