Scanning electron microscope rotating sample stage

Abstract

The present invention provides a rotating sample stage for a scanning electron microscope (SEM), which relates to the field of microscopic imaging equipment. The stage comprises a sample stage arranged on a servo base, wherein at least one sample slot is provided on the upper surface of the sample stage, and the sample slot is used to carry multiple samples; an auxiliary sample pushing mechanism is also provided on one side of the sample stage, wherein the auxiliary sample pushing mechanism is provided with an auxiliary push rod flush with the sample slot, and the auxiliary push rod can slide along the sample slot; and the auxiliary sample pushing mechanism is provided with a driving mechanism for driving the auxiliary push rod to slide along the sample slot, so that the auxiliary push rod pushes multiple samples to pass through the center position of the sample stage in sequence for scanning. Thus, after a single vacuum is drawn, multiple samples can be scanned and images can be collected in sequence, greatly improving the working efficiency of the SEM. The auxiliary sample pushing mechanism adopted by the present invention has a very simple structure, occupies a small space, and the structure of the driving mechanism is also very simple, meeting the requirements for using the narrow space of the existing SEM.

Description

Technical Field

[0001] The invention relates to the field of microscopic imaging equipment for biological samples, in particular to a rotating sample stage for a scanning electron microscope. Background Art

[0002] The sample chamber of a scanning electron microscope (SEM) requires a vacuum environment because it uses a high-energy electron beam to scan the sample surface to produce an image. In a vacuum, electrons can propagate in straight lines without interference from air molecules, ensuring the accuracy and stability of the electron beam. Furthermore, moisture, oxygen, and other gas molecules in the air may react with or deposit on the sample, causing contamination and affecting image quality. A vacuum condition can reduce this risk. Chinese patent document CN117727610A describes a method, device, system, and storage medium for resetting the scanning position of a sample stage, enabling high-precision adjustment of the sample scanning point. However, the sample chamber must be re-evacuated after each sample scan. The number of samples that can be accommodated on a swingable sample stage is limited because the sample must be positioned in the center of the stage to achieve the desired focus position. This reduces the operating efficiency of the SEM. Furthermore, the sample chamber is small and operates under negative pressure. Automatically positioning and scanning multiple samples in a single vacuum operation presents a technical challenge in this field. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a rotating sample stage for a scanning electron microscope, which can realize scanning of multiple samples by vacuuming at one time, greatly improving the operating efficiency of the scanning electron microscope, and can fully utilize the narrow space in the sample chamber and the power of the servo base to complete the switching operation of multiple samples.

[0004] To solve the above-mentioned technical problems, the technical solution of the present invention is as follows: a scanning electron microscope rotating sample stage, comprising a sample stage arranged on a servo base, at least one sample slot being provided on a surface of the sample stage, the sample slot being used to hold multiple samples; an auxiliary sample pushing mechanism being provided on one side of the sample stage, the auxiliary sample pushing mechanism being provided with an auxiliary push rod flush with the sample slot, the auxiliary push rod being able to slide along the sample slot;

[0005] The auxiliary sample pushing mechanism is provided with a driving mechanism for driving the auxiliary push rod to slide along the sample slot;

[0006] The auxiliary push rod pushes multiple samples to pass through the center position of the sample stage in sequence for scanning.

[0007] In a preferred solution, the driving mechanism is a hydraulic cylinder, a pneumatic cylinder or an electric push rod.

[0008] In a preferred solution, the driving mechanism is a push rod driving mechanism provided in the auxiliary sample pushing mechanism;

[0009] The auxiliary push rod is slidingly arranged in the push rod slide groove, the push rod slide groove is arranged on the support frame, teeth are provided at the bottom of the auxiliary push rod, the push rod driving mechanism is arranged on the push rod slide groove or the support frame, and the end of the push rod driving mechanism is provided with a ratchet mechanism, the ratchet mechanism and the teeth are meshed and connected, and the push rod driving mechanism is provided with stacked piezoelectric elements. The ratchet mechanism drives the auxiliary push rod to slide unidirectionally along the sample slot through the extension and contraction of the push rod driving mechanism.

[0010] In a preferred embodiment, the servo base is provided with a Y-direction moving mechanism and an X-direction moving mechanism;

[0011] A plurality of first auxiliary feed teeth are provided on the edge of the sample slot of the sample stage;

[0012] The auxiliary push rod is slidably arranged in the push rod slide groove, and the push rod slide groove is arranged on the support frame. A tooth is provided at the bottom of the auxiliary push rod, and the inclination angle of one side of the tooth and the first auxiliary feed tooth is higher than the inclination angle of the other side, so that the tooth and the first auxiliary feed tooth form a one-way meshing connection;

[0013] The Y-direction moving mechanism or the X-direction moving mechanism of the servo base moves back and forth along the axis of the auxiliary push rod, driving the auxiliary push rod to slide along the sample slot, pushing multiple samples to pass through the center position of the sample stage in sequence for scanning.

[0014] In the preferred solution, the push rod chute is connected to the support frame through a swing shaft, and a support rod mechanism is provided to drive the push rod chute to swing;

[0015] A tension spring is provided between the push rod chute and the auxiliary push rod, one end of the tension spring is connected to the push rod chute, and the other end is connected to the auxiliary push rod;

[0016] The teeth of the auxiliary push rod are disengaged from the first auxiliary feed teeth, and the auxiliary push rod is returned to its initial position;

[0017] In the preferred solution, one end of the strut mechanism is connected to the support frame, and the other end is connected to the push rod slot. The strut mechanism is a group of stacked piezoelectric elements. The extension action of the strut mechanism causes the push rod slot to swing, and the teeth of the auxiliary push rod are disengaged from the first auxiliary feed teeth; the retraction action of the strut mechanism causes the teeth of the auxiliary push rod to resume the engagement with the first auxiliary feed teeth.

[0018] In a preferred embodiment, the servo base is further provided with a rotating mechanism and a swinging mechanism;

[0019] There are at least three sample slots and a sample unloading slot, the sample slots and the sample unloading slot form a "cross" shape, and the sample slots and the sample unloading slot are interconnected;

[0020] When the sample stage needs to be rotated, the extension action of the support rod mechanism causes the auxiliary push rod to be separated from the sample slot, and the retraction action of the support rod mechanism causes the auxiliary push rod to fall into the sample slot.

[0021] In a preferred embodiment, the center of the sample tank and the sample stage forms a tight fit with the sample or the sample holder;

[0022] The sample unloading groove and the sample or the sample holder form a loose fit. When the swing mechanism swings the sample stage to a certain inclination angle, the sample or the sample holder in the sample unloading groove can slide out of the sample unloading groove.

[0023] In a preferred solution, a carrying bag is provided around the servo base, and the sample or the sample holder that slides down from the sample unloading groove falls into the carrying bag.

[0024] In a preferred embodiment, the sample is placed on a bracket, and the bracket has the following structure: upper pressing plates are provided on both sides of the upper portion of the frame, the upper pressing plates are used to clamp the sample, the upper pressing plates are pressed on both sides of the sample, and a hollow structure is provided at the position corresponding to the frame and the sample;

[0025] An extended position is also provided on one side of the frame, and a clamping area and an information area are provided on the edge of the extended position;

[0026] The sample slot is configured as a dovetail slot structure, and the bracket is provided with a corresponding dovetail structure;

[0027] The structure of the servo base is as follows: the bottom of the sample stage is connected to the swing mechanism to drive the sample stage to swing, the bottom of the swing mechanism is connected to the rotating mechanism to drive the sample stage and the swing mechanism to rotate, the bottom of the rotating mechanism is connected to the Y-direction moving mechanism and the X-direction moving mechanism to drive the sample stage, the swing mechanism and the rotating mechanism to move along the X-direction or Y-direction, and the bottom of the Y-direction moving mechanism and the X-direction moving mechanism is connected to the lifting mechanism to drive the sample stage, the swing mechanism, the rotating mechanism, the Y-direction moving mechanism and the X-direction moving mechanism to rise and fall.

[0028] The present invention provides a scanning electron microscope rotating sample stage, which has the following advantages compared with the prior art:

[0029] 1. The present invention can load multiple samples at one time, so that after vacuuming once, multiple samples can be scanned and imaged in sequence, and each sample can be observed at an angle, greatly improving the working efficiency of the scanning electron microscope.

[0030] 2. The auxiliary sample pushing mechanism adopted in the present invention has a very simple structure and occupies a small space. The structure of the driving mechanism is also very simple, which meets the requirements for use in the narrow space of the existing scanning electron microscope.

[0031] 3. In an optimized solution of the present invention, a "cross"-shaped arrangement structure is adopted, and the number of samples that can be loaded at one time can reach 13, further improving the experimental efficiency.

[0032] 4. The bracket of the present invention can better carry samples, especially through the adaptation of shape and precision, so that the bracket can better cooperate with the sample slot, for example, to push multiple samples in the sample slot to the center of the sample stage, and to unload the samples located in the center. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The present invention will be further described below with reference to the accompanying drawings and examples:

[0034] Figure 1 It is a schematic diagram of the main view of the overall structure of the present invention.

[0035] Figure 2 for Figure 1 A local enlarged schematic diagram of point A in the middle.

[0036] Figure 3 for Figure 1 A partial enlarged schematic diagram of point B in the middle.

[0037] Figure 4 It is a top view of the sample stage and the auxiliary sample pushing mechanism in the present invention.

[0038] Figure 5 Schematic diagram of the structure of the sample bracket in the present invention.

[0039] Figure 6 It is a partially enlarged schematic diagram of the auxiliary sample pushing mechanism in the present invention.

[0040] In the figure: bracket 1, clamping area 101, information area 102, upper pressing plate 103, frame 104, sample 2, sample stage 3, sample slot 31, first auxiliary feed tooth 32, sample unloading slot 33, auxiliary sample pushing mechanism 4, auxiliary push rod 41, push rod slide 42, swing shaft 43, support rod mechanism 44, tension spring 45, support frame 46, ratchet mechanism 47, push rod driving mechanism 48, teeth 49, rotating mechanism 5, Y-axis moving mechanism 6, X-axis moving mechanism 7, swing mechanism 8, lifting mechanism 9, loading bag 10, servo base 100. DETAILED DESCRIPTION

[0041] Example 1:

[0042] See also Figures 1-3 6, a scanning electron microscope rotating sample stage includes a sample stage 3 provided on a servo base 100, and at least one sample groove 31 is provided on the upper surface of the sample stage 3, and the sample groove 31 is used to carry a plurality of samples 2;

[0043] An auxiliary sample pushing mechanism 4 is further provided on one side of the sample stage 3. The auxiliary sample pushing mechanism 4 is provided with an auxiliary push rod 41 flush with the sample slot 31. The auxiliary push rod 41 can slide along the sample slot 31.

[0044] The auxiliary sample pushing mechanism 4 is provided with a driving mechanism for driving the auxiliary push rod 41 to slide along the sample slot 31;

[0045] The auxiliary push rod 41 pushes the multiple samples 2 to pass through the center of the sample stage 3 for scanning. With this structure, a single vacuum operation can be performed to complete the scanning of multiple groups of samples.

[0046] The preferred solution is Figure 1 In the embodiment, the structure of the servo base 100 is as follows: the lower portion of the sample stage 3 is connected to the swing mechanism 8 to drive the sample stage 3 to swing; the lower portion of the swing mechanism 8 is connected to the rotation mechanism 5 to drive the sample stage 3 and the swing mechanism 8 to rotate; the lower portion of the rotation mechanism 5 is connected to the Y-movement mechanism 6 and the X-movement mechanism 7 to drive the sample stage 3, the swing mechanism 8, and the rotation mechanism 5 to move in the X or Y direction; the lower portions of the Y-movement mechanism 6 and the X-movement mechanism 7 are connected to the lifting mechanism 9 to drive the sample stage 3, the swing mechanism 8, the rotation mechanism 5, the Y-movement mechanism 6, and the X-movement mechanism 7 to rise and fall. The servo base 100 is a conventional structure.

[0047] In a preferred embodiment, the driving mechanism is a hydraulic cylinder, a pneumatic cylinder or an electric push rod. Preferably, the hydraulic cylinder and the electric push rod are used, and in particular the hydraulic cylinder, because the volume can be smaller, but it is more difficult to transmit the control signal into the sample chamber and to set up the hydraulic station.

[0048] The preferred solution is Figure 6 In the embodiment, the driving mechanism is a push rod driving mechanism 48 provided in the auxiliary sample pushing mechanism 4;

[0049] The auxiliary push rod 41 is slidably arranged in the push rod slot 42, and the push rod slot 42 is arranged on the support frame 46. A tooth 49 is provided at the bottom of the auxiliary push rod 41. The push rod drive mechanism 48 is arranged on the push rod slot 42 or the support frame 46. The end of the push rod drive mechanism 48 is provided with a ratchet mechanism 47, which is engaged with the tooth 49. The push rod drive mechanism 48 is provided with a stacked piezoelectric element. The ratchet mechanism 47 drives the auxiliary push rod 41 to slide unidirectionally along the sample groove 31 through the extension and contraction of the push rod drive mechanism 48. With this structure, the sample 2 can be pushed to the center position of the sample stage 3 for electron microscope scanning in sequence by the push of the auxiliary push rod 41. In this example, with reference to TN-1912, the sample stage 3 with a diameter of 38mm can load 4 to 5 samples 2 at a time. Preferably, a copper mesh is used to load the sample in this example.

[0050] The preferred solution is Figure 1In the embodiment, a carrier bag 10 is provided around the servo base 100 , and the sample 2 or the bracket 1 of the sample 2 that slides down from the sample unloading slot 33 falls into the carrier bag 10 .

[0051] Example 2:

[0052] The preferred solution is Figures 1 to 4 In the embodiment, the servo base 100 is provided with a Y-direction moving mechanism 6 and an X-direction moving mechanism 7;

[0053] A plurality of first auxiliary feed teeth 32 are provided on the edge of the sample slot 31 of the sample stage 3;

[0054] The auxiliary push rod 41 is slidably disposed in a push rod slot 42 , which is disposed on a support frame 46 . A tooth 49 is disposed at the bottom of the auxiliary push rod 41 . The inclination angle of one side of the tooth 49 and the first auxiliary feed tooth 32 is higher than the inclination angle of the other side, so that the tooth 49 and the first auxiliary feed tooth 32 form a one-way meshing connection.

[0055] The Y-axis moving mechanism 6 or X-axis moving mechanism 7 of the servo base 100 reciprocates along the axis of the auxiliary push rod 41, driving the auxiliary push rod 41 to slide along the sample slot 31, pushing multiple samples 2 to pass through the center position of the sample stage 3 for scanning. The cleverness of this example lies in the use of the servo base 100's own Y-axis moving mechanism 6 and X-axis moving mechanism 7 to achieve the feeding of the auxiliary push rod 41. Although the displacement of the existing Y-axis moving mechanism 6 and X-axis moving mechanism 7 is insufficient to cover at least half of the entire distance of the sample stage 3, the use of Figure 2 As shown in the meshing structure of the tooth 49 and the first auxiliary feed tooth 32, when the sample stage 3 moves to the left, the tooth 49 and the first auxiliary feed tooth 32 disengage from each other and form a new meshing, and when the sample stage 3 moves to the right, the first auxiliary feed tooth 32 moves to the right with the auxiliary push rod 41 through the meshing with the tooth 49, so that the auxiliary push rod 41 pushes the multiple samples 2 to the middle of the sample stage 3.

[0056] In the preferred embodiment, the push rod chute 42 is connected to the support frame 46 via a swing shaft 43, and a support rod mechanism 44 is provided to drive the push rod chute 42 to swing;

[0057] A tension spring 45 is provided between the push rod chute 42 and the auxiliary push rod 41. One end of the tension spring 45 is connected to the push rod chute 42, and the other end is connected to the auxiliary push rod 41.

[0058] The teeth 49 of the auxiliary push rod 41 are disengaged from the first auxiliary feed teeth 32, and the auxiliary push rod 41 returns to its initial position;

[0059] The preferred solution is Figure 3In the figure, one end of the strut mechanism 44 is connected to the support frame 46, and the other end is connected to the push rod slot 42. The strut mechanism 44 is a group of stacked piezoelectric elements. The extension action of the strut mechanism 44 causes the push rod slot 42 to swing, and the teeth 49 of the auxiliary push rod 41 are disengaged from the first auxiliary feed teeth 32; the retraction action of the strut mechanism 44 causes the teeth 49 of the auxiliary push rod 41 to resume the engagement with the first auxiliary feed teeth 32.

[0060] The preferred solution is Figure 1 In the embodiment, the servo base 100 is further provided with a rotating mechanism 5 and a swinging mechanism 8;

[0061] There are at least three sample slots 31 and a sample unloading slot 33. The sample slots 31 and the sample unloading slot 33 form a "cross" shape. The sample slots 31 and the sample unloading slot 33 are connected to each other.

[0062] When the sample stage 3 needs to be rotated, the extension of the support rod mechanism 44 causes the auxiliary push rod 41 to be disengaged from the sample slot 31 , and the retraction of the support rod mechanism 44 causes the auxiliary push rod 41 to fall into the sample slot 31 .

[0063] The preferred solution is Figure 4 In the figure, the center position of the sample slot 31 and the sample stage 3 forms a tight fit with the sample 2 or the bracket 1 of the sample 2; that is, the sample slot 31 can form a damping structure with the sample 2 or the bracket 1 to prevent the sample 2 or the bracket 1 from falling when the bracket 1 is tilted.

[0064] The sample unloading groove 33 and the sample 2 or the bracket 1 of the sample 2 form a loose fit, that is, there is no damping between the sample 2 or the bracket 1 and the sample unloading groove 33.

[0065] When the swing mechanism 8 swings the sample stage 3 to a certain inclination angle, for example, above 25°, the sample 2 in the sample unloading groove 33 or the sample 2 holder 1 can slide out of the sample unloading groove 33 and fall into the object pocket 10 .

[0066] In a preferred embodiment, the sample 10 is placed on the bracket 1. The bracket 1 has the following structure: upper pressing plates 103 are provided on both sides of the upper portion of the frame 104. The upper pressing plates 103 are used to clamp the sample 10. The upper pressing plates 103 are pressed on both sides of the sample 10. A hollow structure is provided at the position of the frame 104 corresponding to the sample 10.

[0067] An extension position is further provided on one side of the frame 104, and a clamping area 101 and an information area 102 are provided at the edge of the extension position;

[0068] The sample slot 31 is configured as a dovetail slot, and the bracket 1 is configured with a corresponding dovetail structure; the bracket 1 can better adapt to the accuracy of the sample slot 31. The bracket 1 is made of a conductive structure, such as conductive plastic or conductive rubber.

[0069] Example 3:

[0070] Taking the structure of Example 2 as an example, the method of using the present invention is described. In this example, the sample stage 3 of the TN-1912 model with a diameter of 38 mm is used. Figure 4 In the example, after installing a bracket 1 for each sample 2, a total of 13 samples 2 are installed in the three sample slots 31 distributed at 90 degrees and in the middle. The bracket 1 is rectangular, which can better define and position it in the sample slot 31. After vacuuming, as shown in FIG. Figures 1-3 As shown, the support rod mechanism 44 is in a retracted state, the end of the auxiliary push rod 41 falls on the edge of the sample stage 3, and the teeth 49 and the first auxiliary feed teeth 32 form a one-way meshing structure. When the sample stage 3 moves to the left, the teeth 49 disengage from the first auxiliary feed teeth 32. At this time, in the retracted state of the support rod mechanism 44, the tension spring 45 is insufficient to retract the auxiliary push rod 41. The teeth 49 and the first auxiliary feed teeth 32 slide relative to each other by multiple tooth pitches, pushing the sample 2 to the right for a distance. Then the sample stage 3 moves to the right, and the first auxiliary feed teeth 32 pulls the auxiliary push rod 41 to the right through the teeth 49 until a sample 2 moves to the center of the sample stage 3. At this time, scanning of the sample 2 at the center position begins. After scanning and image acquisition are completed, the sample stage 3 repeats the left and right reciprocating motion to scan the samples 2 in the current sample slot 31 in sequence. All samples 2 in the sample slot 31 enter the sample unloading slot 33. When other operations are required on sample stage 3, support rod mechanism 44 extends, and auxiliary push rod 41 disengages from sample well 31, allowing sample stage 3 to rotate, swing, lift, and move to perform various focus-finding operations. Once completed, sample stage 3 returns to a horizontal position, and sample well 31 is aligned with auxiliary push rod 41, allowing sample 2 to be pushed again.

[0071] For the two sample slots 31 perpendicular to the sample unloading slot 33, the first sample slot 31 can be scanned by pushing a sample 2, then rotating the sample stage 3 90°. Then, from the sample slot 31 where all samples have been pushed, the central sample 2 is pushed into the sample unloading slot 33. The sample stage 3 is then rotated 90° in the opposite direction to push the next sample 2. The second sample slot 31 can be pushed directly into the opposite, already empty sample slot 31, or the above steps can be used to push each sample into the sample unloading slot 33 in sequence. Through the above steps, a single vacuum operation completes the scanning of all samples 2.

[0072] The above embodiments are merely preferred technical solutions of the present invention and should not be construed as limiting the present invention. The embodiments and features in the embodiments of this application may be arbitrarily combined with each other unless they conflict. The scope of protection of the present invention shall be the technical solutions described in the claims, including equivalent alternatives to the technical features of the technical solutions described in the claims. Equivalent alternatives and improvements within this scope are also within the scope of protection of the present invention.

Claims

1. A scanning electron microscope rotating sample stage, characterized by: It comprises a sample stage (3) arranged on a servo base (100), wherein at least one sample groove (31) is provided on the upper surface of the sample stage (3), and the sample groove (31) is used to carry a plurality of samples (2); An auxiliary sample pushing mechanism (4) is further provided on one side of the sample stage (3), and an auxiliary push rod (41) flush with the sample groove (31) is provided on the auxiliary sample pushing mechanism (4), and the auxiliary push rod (41) can slide along the sample groove (31); The auxiliary sample pushing mechanism (4) is provided with a driving mechanism for driving the auxiliary push rod (41) to slide along the sample groove (31); The auxiliary push rod (41) pushes the plurality of samples (2) to sequentially pass through the center position of the sample stage (3) for scanning; The driving mechanism is a push rod driving mechanism (48) provided on the auxiliary sample pushing mechanism (4); The auxiliary push rod (41) is slidably arranged in the push rod slot (42), the push rod slot (42) is arranged on the support frame (46), and teeth (49) are provided at the bottom of the auxiliary push rod (41). The push rod driving mechanism (48) is arranged in the push rod slot (42) or on the support frame (46). The end of the push rod driving mechanism (48) is provided with a ratchet mechanism (47), and the ratchet mechanism (47) and the teeth (49) are engaged with each other. The push rod driving mechanism (48) is provided with stacked piezoelectric elements, and the ratchet mechanism (47) drives the auxiliary push rod (41) to slide unidirectionally along the sample groove (31) through the extension and contraction of the push rod driving mechanism (48).

2. The scanning electron microscope rotating sample stage according to claim 1, wherein: The driving mechanism is a hydraulic cylinder, an air cylinder or an electric push rod.

3. The scanning electron microscope rotating sample stage according to claim 1, wherein: The servo base (100) is provided with a Y-direction moving mechanism (6) and an X-direction moving mechanism (7); A plurality of first auxiliary feed teeth (32) are provided on the edge of the sample groove (31) of the sample stage (3); The auxiliary push rod (41) is slidably arranged in the push rod slide groove (42), and the push rod slide groove (42) is arranged on the support frame (46). A tooth (49) is provided at the bottom of the auxiliary push rod (41), and the inclination angle of one side of the tooth (49) and the first auxiliary feed tooth (32) is higher than the inclination angle of the other side, so that the tooth (49) and the first auxiliary feed tooth (32) form a one-way meshing connection; The Y-direction moving mechanism (6) or the X-direction moving mechanism (7) of the servo base (100) moves back and forth along the axis of the auxiliary push rod (41), driving the auxiliary push rod (41) to slide along the sample groove (31), thereby pushing the multiple samples (2) to pass through the center position of the sample stage (3) in sequence for scanning.

4. The scanning electron microscope rotating sample stage according to claim 3, wherein: The push rod chute (42) is connected to the support frame (46) via a swing shaft (43), and a support rod mechanism (44) is provided for driving the push rod chute (42) to swing. A tension spring (45) is provided between the push rod chute (42) and the auxiliary push rod (41), one end of the tension spring (45) is connected to the push rod chute (42), and the other end is connected to the auxiliary push rod (41); This causes the teeth (49) of the auxiliary push rod (41) to disengage from the first auxiliary feed teeth (32), and allows the auxiliary push rod (41) to return to its initial position.

5. The scanning electron microscope rotating sample stage according to claim 4, characterized in that: One end of the support rod mechanism (44) is connected to the support frame (46), and the other end is connected to the push rod slide (42). The support rod mechanism (44) is a group of stacked piezoelectric elements. The extension action of the support rod mechanism (44) causes the push rod slide (42) to swing, and the teeth (49) of the auxiliary push rod (41) and the first auxiliary feed teeth (32) are disengaged; the retraction action of the support rod mechanism (44) causes the teeth (49) of the auxiliary push rod (41) and the first auxiliary feed teeth (32) to resume the meshing state.

6. The scanning electron microscope rotating sample stage according to any one of claims 3 to 5, characterized in that: The servo base (100) is further provided with a rotating mechanism (5) and a swinging mechanism (8); There are at least three sample slots (31) and a sample unloading slot (33), the sample slots (31) and the sample unloading slot (33) form a "cross" shape, and the sample slots (31) and the sample unloading slot (33) are interconnected; When the sample stage (3) needs to be rotated, the extension action of the support rod mechanism (44) causes the auxiliary push rod (41) to be disengaged from the sample slot (31), and the retraction action of the support rod mechanism (44) causes the auxiliary push rod (41) to fall into the sample slot (31).

7. The rotating sample stage for a scanning electron microscope according to claim 6, wherein: The center positions of the sample groove (31) and the sample stage (3) form a tight fit with the sample (2) or the bracket (1) of the sample (2); The sample unloading groove (33) and the sample (2) or the bracket (1) of the sample (2) form a loose fit. When the swing mechanism (8) swings the sample stage (3) to a certain inclination angle, the sample (2) or the bracket (1) of the sample (2) in the sample unloading groove (33) can slide out of the sample unloading groove (33).

8. The scanning electron microscope rotating sample stage according to claim 7, wherein: A carrying bag (10) is provided around the servo base (100), and the sample (2) or the bracket (1) of the sample (2) that slides down from the sample unloading groove (33) falls into the carrying bag (10).

9. The scanning electron microscope rotating sample stage according to any one of claims 7 to 8, characterized in that: The sample (2) is arranged on the bracket (1), and the structure of the bracket (1) is as follows: upper pressing plates (103) are provided on both sides above the frame (104), the upper pressing plates (103) are used to clamp the sample (2), the upper pressing plates (103) are pressed on the positions on both sides of the sample (2), and a hollow structure is provided at the position of the frame (104) corresponding to the sample (2); An extended position is also provided on one side of the frame (104), and a clamping area (101) and an information area (102) are provided at the edge of the extended position; The sample slot (31) is provided with a dovetail slot structure, and the bracket (1) is provided with a corresponding dovetail structure; The structure of the servo base (100) is as follows: the lower part of the sample stage (3) is connected to the swing mechanism (8) to drive the sample stage (3) to swing; the lower part of the swing mechanism (8) is connected to the rotating mechanism (5) to drive the sample stage (3) and the swing mechanism (8) to rotate; the lower part of the rotating mechanism (5) is connected to the Y-direction moving mechanism (6) and the X-direction moving mechanism (7) to drive the sample stage (3), the swing mechanism (8) and the rotating mechanism (5) to move along the X-direction or the Y-direction; the lower parts of the Y-direction moving mechanism (6) and the X-direction moving mechanism (7) are connected to the lifting mechanism (9) to drive the sample stage (3), the swing mechanism (8), the rotating mechanism (5), the Y-direction moving mechanism (6) and the X-direction moving mechanism (7) to lift and lower.

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