VCSEL laser and hole unit thereof

Abstract

The invention discloses a VCSEL laser and a hole unit thereof. The VCSEL laser is provided with at least one oxidation limiting hole, the hole unit comprises a plurality of peripheral holes, the plurality of peripheral holes are circumferentially arranged and enclose to form a limiting hole forming area therein, and the oxidation limiting hole is formed in the limiting hole forming area; wherein the peripheral hole is provided with a first side wall facing the oxidation limiting hole, the first side wall comprises a first main body surface and at least one turning surface, and the first main body surface comprises at least one plane; the extending direction of the turning surface of the first side wall is different from that of the first main body surface, and the turning surface of the first side wall is bent towards the direction of the oxidation limiting hole.

Description

Technical Field

[0001] The present application relates to the field of semiconductor lasers, and more specifically to a VCSEL laser and an aperture unit thereof. Background Art

[0002] VCSEL (Vertical-Cavity Surface-Emitting Laser) is a semiconductor laser that forms a resonant cavity in the vertical direction of the substrate and emits laser in the vertical direction. VCSEL has the characteristics of stable beam quality, single longitudinal mode output, and high photoelectric conversion efficiency. It is widely used in communications, consumer, automotive and other fields.

[0003] The VCSEL laser mainly includes a substrate layer, an N-DBR layer and a PDBR layer stacked on the substrate layer, an active region sandwiched between the N-DBR layer and the PDBR layer, and a restriction layer located on the upper side and / or the lower side of the active region. At present, the restriction layer is mainly formed by an oxidation process. Specifically, the structural layer used to form the restriction layer is oxidized, and the oxidizing liquid enters the structural layer from the outer edge of the structural layer. The area close to the outer edge of the structural layer is oxidized to form a restriction area, and the unoxidized area forms a restriction hole.

[0004] It is worth mentioning that after the oxidizing liquid enters the structural layer used to form the restriction layer, the oxidation rates in each direction are different, making it difficult to control the position and shape of the restriction hole finally formed. As a result, the position and shape of the restriction hole finally formed may deviate greatly from the expected position and shape of the restriction hole.

[0005] In the conventional process, in the process of forming the VCSLE laser, an epitaxial structure is first formed, wherein the epitaxial structure includes, from bottom to top, a substrate layer, an N-DBR structure layer, an active region structure layer, and a P-DBR structure layer; then, a light exit hole is defined; then, the epitaxial structure is etched, and portions of some structural layers in the epitaxial structure surrounding the light exit hole are removed to form a mesa structure; then, the mesa structure is selectively oxidized to form the confinement layer.

[0006] In the process of forming the mesa structure, a whole circle of material around the light exit hole is removed, so that the oxidation hole formed in the subsequent oxidation process of the mesa structure is closer to a circle. However, such a design scheme makes the distance between two adjacent VCSEL lasers larger when forming a VCSEL array including multiple VCSEL lasers, and the arrangement of each VCSEL laser in the VCSEL array is not compact, and the overall volume of the VCSEL array is larger, which does not meet the requirements of device miniaturization.

[0007] The inventor of the present application proposes that only part of the material around the light-emitting hole can be etched to form spaced holes surrounding the light-emitting hole, thereby increasing the design flexibility of the distance between adjacent VCSEL lasers and making the arrangement of each VCSEL laser more compact.

[0008] However, after the oxidizing fluid enters the structural layer used to form the restriction layer, the isotropic diffusion rate and oxidation rate are different, and the holes are spaced apart from each other, making it difficult to control the diffusion range of the oxidizing fluid and the shape of the restriction hole finally formed. The intersection of the oxidizing fluid flowing out of each hole and the oxidation range of the structural layer is prone to form a sharp corner. In this way, the shape of the restriction hole finally formed may deviate greatly from the expected shape of the restriction hole. Summary of the invention

[0009] One advantage of the present application is that it provides a VCSEL laser and a hole unit thereof, wherein the present application provides a scheme for forming an oxidation restriction layer, and the shape of the restriction hole can be controlled by designing the extension direction of the peripheral wall of the hole unit extending to the structural layer used to form the oxidation restriction layer, so that the shape of the restriction hole finally formed is close to the expected shape of the restriction hole.

[0010] Another advantage of the present application is to provide a VCSEL laser and an aperture unit thereof, wherein the present application controls the shape of the limiting aperture so that the shape of the limiting aperture in the oxidation limiting layer is close to a circle.

[0011] Another advantage of the present application is to provide a VCSEL laser and an aperture unit thereof, wherein the present application reduces the sharpness of the turning angle of the outer edge of the limiting aperture in the oxidation limiting layer by controlling the shape of the limiting aperture, thereby improving the reliability of the VCSEL laser.

[0012] In order to achieve at least one of the above advantages or other advantages and purposes, according to one aspect of the present application, a hole unit for a VCSEL laser is provided, wherein the VCSEL laser has at least one oxidized limiting hole, and the hole unit comprises:

[0013] A plurality of peripheral holes, wherein the plurality of peripheral holes are arranged circumferentially to enclose and form a limiting hole forming area located therein, and the oxidation limiting hole is formed in the limiting hole forming area;

[0014] Wherein, the peripheral hole has a first side wall facing the oxidation limiting hole, the first side wall includes a first main surface and at least one turning surface, the first main surface includes at least one plane, the extension direction of the turning surface of the first side wall is different from the extension direction of the first main surface and is bent toward the direction of the oxidation limiting hole.

[0015] In some embodiments, the first side wall includes a first turning surface and a second turning surface, and the first main body surface is located between the first turning surface and the second turning surface.

[0016] In some embodiments, the first main surface is a planar surface extending within a plane.

[0017] In some embodiments, the first main surface has at least one turning area.

[0018] In some embodiments, the first main body surface includes a first main body portion, a first main body portion and a first main body middle portion, the first main body middle portion is located between the first main body portion and the first main body portion, and is recessed into the outer hole relative to the first main body portion and the first main body portion, and the turning areas are formed between the first main body middle portion and the first main body portion, and between the first main body middle portion and the first main body portion, respectively.

[0019] In some embodiments, the first body part one, the first body part two and the first body middle part of the first body surface are respectively planes extending within their respective planes.

[0020] In some embodiments, the first main body surface has a first main body end and a first main body end relative to each other, the first turning surface includes a first turning portion and a first turning portion, the first turning portion extends between the first main body end and the first turning portion of the first main body surface, wherein an angle exists between the first turning portion and the plane at the first main body end of the first main body surface; the second turning surface includes a second turning portion and a second turning portion, the second turning portion extends between the first main body ends and the second turning portion of the first main body surface, wherein an angle exists between the second turning portion and the plane at the first main body ends of the first main body surface.

[0021] In some embodiments, the peripheral hole further includes a second side wall, and the first side wall and the second side wall are symmetrically arranged about a first central axis defined by the peripheral hole.

[0022] In some embodiments, the peripheral hole also includes a third side wall, the third side wall includes a third main surface and at least one turning surface, the third main surface includes at least one plane, and the extension direction of the turning surface of the third side wall is different from the extension direction of the third main surface.

[0023] In some embodiments, the third side wall includes a fifth turning surface and a sixth turning surface, and the third main body surface is located between the fifth turning surface and the sixth turning surface.

[0024] In some embodiments, the third main body surface has a third main body end and a third main body end relative to each other, the fifth turning surface includes a fifth turning portion one and a fifth turning portion two, the fifth turning portion one extends between the third main body end of the third main body surface and the fifth turning portion two, wherein an angle exists between the fifth turning portion one and the plane where the third main body end of the third main body surface is located; the sixth turning surface includes a sixth turning portion one and a sixth turning portion two, the sixth turning portion one extends between the third main body ends of the third main body surface and the sixth turning portion two, wherein an angle exists between the sixth turning portion one and the plane where the third main body ends of the third main body surface are located.

[0025] In some embodiments, the peripheral hole further includes a fourth side wall, and the fourth side wall and the third side wall are symmetrically arranged about a second central axis defined by the peripheral hole.

[0026] In some embodiments, the peripheral hole also includes a first transition wall, a second transition wall, a third transition wall and a fourth transition wall, the first transition wall extends between the first side wall and the third side wall, the second transition wall extends between the first side wall and the fourth side wall, the third transition wall extends between the second side wall and the third side wall, and the fourth transition wall extends between the second side wall and the fourth side wall.

[0027] In some embodiments, the first transition wall and the second transition wall are symmetrically arranged about the second center axis set by the peripheral hole, the third transition wall and the fourth transition wall are symmetrically arranged about the second center axis set by the peripheral hole, the third transition wall and the first transition wall are symmetrically arranged about the first center axis set by the peripheral hole, and the fourth transition wall and the second transition wall are symmetrically arranged about the first center axis set by the peripheral hole.

[0028] In some embodiments, the first transition wall includes a first transition portion one and a first transition portion two, the first transition portion one extends from an end of the first side wall, the first transition portion two extends from an end of the third side wall, the first transition portion one and the first transition portion two intersect, and extend in different directions.

[0029] In some embodiments, the extension direction of the first transition portion is consistent with the extension direction of the first side wall at the intersection with the first transition portion, and the extension direction of the first transition portion is consistent with the extension direction of the third side wall at the intersection with the first transition portion.

[0030] In some embodiments, there is an angle between the extension direction of the first transition portion and the extension direction of the first side wall connected to the first transition portion, and there is an angle between the extension direction of the first transition portion 2 and the extension direction of the third side wall connected to the first transition portion 2.

[0031] In some embodiments, the first transition wall is a plane extending between the first sidewall and the third sidewall.

[0032] In some embodiments, the first transition wall is a curved surface.

[0033] In some embodiments, the first turning surface is a curved surface, and the second turning surface is a curved surface.

[0034] In some embodiments, the peripheral hole also includes a second side wall and a third side wall, the second side wall includes a second main surface, a third turning surface and a fourth turning surface; the third side wall includes a third main surface, a fifth turning surface and a sixth turning surface; the second main surface is located between the third turning surface and the fourth turning surface, and the third main surface is located between the fifth turning surface and the sixth turning surface; the first turning surface of the first side wall is connected to the third turning surface of the second side wall, the second turning surface of the first side wall is connected to the fifth turning surface of the third side wall, and the fourth turning surface of the second side wall is connected to the sixth turning surface of the third side wall.

[0035] In some embodiments, the third turning surface is a curved surface, the fourth turning surface is a curved surface, the fifth turning surface is a curved surface, and the sixth turning surface is a curved surface.

[0036] According to another aspect of the present application, a VCSEL laser is provided, comprising:

[0037] at least one oxidation limiting layer, the oxidation limiting layer having an oxidation limiting pore; and

[0038] A pore unit as described above.

[0039] Further objectives and advantages of the present application will be fully reflected through understanding of the following description and drawings.

[0040] These and other objects, features and advantages of the present application are fully reflected in the following detailed description, drawings and claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] These and / or other aspects and advantages of the present application will become clearer and easier to understand from the following detailed description of the embodiments of the present application in conjunction with the accompanying drawings, in which:

[0042] Figure 1A schematic diagram of an implementation of an aperture unit for a laser according to an embodiment of the present application is illustrated.

[0043] Figure 2 A schematic diagram of another implementation of an aperture unit for a laser according to an embodiment of the present application is illustrated.

[0044] Figure 3 A schematic diagram of yet another implementation of an aperture unit for a laser according to an embodiment of the present application is illustrated.

[0045] Figure 4 A schematic diagram of yet another implementation of an aperture unit for a laser according to an embodiment of the present application is illustrated.

[0046] Figure 5 A schematic diagram of yet another implementation of an aperture unit for a laser according to an embodiment of the present application is illustrated.

[0047] Figure 6 A schematic diagram of yet another implementation of an aperture unit for a laser according to an embodiment of the present application is illustrated.

[0048] Figure 7 A schematic diagram of yet another implementation of an aperture unit for a laser according to an embodiment of the present application is illustrated.

[0049] Figure 8 A schematic diagram of yet another implementation of an aperture unit for a laser according to an embodiment of the present application is illustrated.

[0050] Fig. 9 A schematic diagram of yet another implementation of an aperture unit for a laser according to an embodiment of the present application is illustrated.

[0051] Fig.10 A schematic diagram of an arrangement of hole units for a laser according to an embodiment of the present application is shown. DETAILED DESCRIPTION

[0052] The terms and words used in the following specification and claims are not limited to the literal meanings, but are merely used by the inventor to enable a clear and consistent understanding of the present application. Therefore, it will be apparent to those skilled in the art that the following description of various embodiments of the present application is provided for illustration purposes only and not for the purpose of limiting the present application as defined by the appended claims and their equivalents.

[0053] It is to be understood that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the element may be multiple, and the term "one" should not be understood as a limitation on the quantity.

[0054] Although ordinals such as "first," "second," and the like will be used to describe various components, those components are not limited herein. The term is used only to distinguish one component from another. For example, a first component may be referred to as a second component, and likewise, a second component may be referred to as a first component without departing from the teachings of the present application. The term "and / or" as used herein includes any and all combinations of one or more associated listed items.

[0055] The terms used herein are only used for the purpose of describing various embodiments and are not intended to be limiting. As used herein, singular forms are intended to also include plural forms, unless the context clearly indicates an exception. In addition, it will be understood that the terms "including" and / or "having" when used in this specification specify the presence of the described features, numbers, steps, operations, components, elements or combinations thereof, without excluding the presence or addition of one or more other features, numbers, steps, operations, components, elements or groups thereof.

[0056] Application Overview

[0057] As mentioned above, currently, the limiting layer is mainly formed by an oxidation process. Specifically, the structural layer used to form the limiting layer is oxidized, and an oxidizing fluid, such as water vapor, enters the structural layer from the outer edge of the structural layer, and the area near the outer edge of the structural layer is oxidized to form a limiting area, and the unoxidized area forms a limiting hole.

[0058] In the traditional process, the mesa structure is selectively oxidized to form the restriction layer. In the process of forming the mesa structure, a whole circle of material around the light exit hole is removed, so that the oxidation hole formed in the subsequent oxidation of the mesa structure is closer to a circle. However, such a design scheme makes the distance between two adjacent VCSEL lasers larger when forming a VCSEL array including multiple VCSEL lasers, and the arrangement of each VCSEL laser in the VCSEL array is not compact, and the overall volume of the VCSEL array is larger, which does not meet the requirements of device miniaturization.

[0059] The inventor of the present application proposes that only part of the material around the light-emitting hole can be etched to form spaced holes surrounding the light-emitting hole, thereby increasing the design flexibility of the distance between adjacent VCSEL lasers and making the arrangement of each VCSEL laser more compact.

[0060] However, after the oxidizing fluid enters the structural layer used to form the restriction layer, the isotropic diffusion rate and oxidation rate are different, and the holes are spaced apart from each other, making it difficult to control the diffusion range of the oxidizing fluid and the shape of the restriction hole finally formed. The intersection of the oxidizing fluid flowing out of each hole and the oxidation range of the structural layer is prone to form a sharp corner. In this way, the shape of the restriction hole finally formed may deviate greatly from the expected shape of the restriction hole.

[0061] The inventors of the present application noticed that the peripheral wall of the hole has a guiding effect on the oxidizing fluid, so that the oxidizing fluid flows and diffuses inward from the outer edge of the structural layer along the extension direction of the peripheral wall of the hole, and impregnates the structural layer used to form the restriction layer, and oxidizes the structural layer used to form the restriction layer along a specific direction. In this way, a restriction hole is formed in the hole structure.

[0062] Based on this, the inventors of the present application proposed to control the flow direction of the oxidation fluid by designing the extension direction of the peripheral wall of the hole extending to the structural layer used to form the oxidation restriction layer, thereby controlling the shape of the restriction hole finally formed.

[0063] Furthermore, the higher the sharpness of the intersection of adjacent edges of the limiting hole, the more current is gathered at the intersection, resulting in a much higher current density at the intersection than the surrounding area, resulting in a higher local thermal effect and reduced reliability of the VCSEL chip. Therefore, the sharpness of the outer edge of the limiting hole should be reduced as much as possible, and the ideal shape of the limiting hole is a circle. The extension direction of the peripheral wall of the hole extending to the structural layer for forming the oxidation limiting layer will affect the shape of the limiting hole. Therefore, it is necessary to further design the extension direction of the peripheral wall of the hole extending to the structural layer for forming the oxidation limiting layer to reduce the sharpness of the limiting hole and make it closer to a circle.

[0064] Similar to a regular polygon, the more sides there are, the larger the internal angles are, and the lower the sharpness of the intersection of adjacent sides. The present application proposes to increase the turning surface of the hole side wall toward the limiting hole so that the sharpness of the intersection of the diffusion range of the oxidizing fluid flowing and diffusing along each surface is reduced.

[0065] Accordingly, the present application proposes an aperture unit for a VCSEL laser, wherein the VCSEL laser has at least one oxidation limiting aperture, and the aperture unit comprises: a plurality of peripheral apertures, wherein the plurality of peripheral apertures are arranged circumferentially to enclose a limiting aperture forming region therein, and the oxidation limiting aperture is formed in the limiting aperture forming region; wherein the peripheral aperture has a first side wall facing the oxidation limiting aperture, wherein the first side wall comprises a first main body surface and at least one turning surface, wherein the first main body surface comprises at least one plane, and an extension direction of the turning surface of the first side wall is different from an extension direction of the first main body surface.

[0066] After introducing the basic principles of the present application, various non-limiting embodiments of the present application will be described in detail with reference to the accompanying drawings.

[0067] Schematic diagram of a hole unit for a VCSEL laser

[0068] like Figures 1 to 10 As shown, the hole unit for the laser according to the embodiment of the present application is illustrated. The VCSEL laser has a multi-layer structure, mainly including a substrate layer, an N-DBR layer, a P-DBR layer, an active region sandwiched between the N-DBR layer and the P-DBR layer, and an oxidation restriction layer located on the upper side of the active region and / or the lower side of the active region, and the oxidation restriction layer has an oxidation restriction hole 200.

[0069] In the embodiment of the present application, the VCSEL laser further comprises an aperture unit, the aperture unit comprising a plurality of peripheral apertures 10, each of the peripheral apertures 10 at least partially extending to the oxidation restriction layer. Specifically, the peripheral apertures 10 extend from the upper surface of the VCSEL laser to below the active region, that is, below the bottom surface of the active region.

[0070] For example, when the substrate layer, the N-DBR layer, the active area, the oxidation restriction layer and the P-DBR layer are arranged from bottom to top, the peripheral hole 10 extends from the P-DBR layer to the N-DBR layer below the active area, and the peripheral hole 10 passes through the oxidation restriction layer; for another example, when the substrate layer, the P-DBR layer, the active area, the oxidation restriction layer and the N-DBR layer are arranged from bottom to top, the peripheral hole 10 extends from the N-DBR layer to the P-DBR layer below the active area, and the peripheral hole 10 passes through the oxidation restriction layer.

[0071] The plurality of peripheral holes 10 are arranged along the circumference of the VCSEL laser and are spaced from each other. The plurality of peripheral holes 10 enclose a limiting hole forming area 101 located therein, and the oxidation limiting hole 200 is formed in the limiting hole forming area 101. In the process of forming the oxidation limiting layer, an oxidation fluid is introduced into the peripheral holes 10, wherein the peripheral holes 10 are located at the peripheral part of the structural layer used to form the oxidation limiting layer; the oxidation fluid enters the interior of the structural layer used to form the oxidation limiting layer from the peripheral holes 10; the portion of the structural layer used to form the oxidation limiting layer oxidized by the oxidation fluid forms a limiting area, and the portion of the interior that is not oxidized by the oxidation fluid forms the oxidation limiting hole 200.

[0072] It is worth mentioning that the peripheral wall of the peripheral hole 10 has a guiding effect on the oxidation fluid. In the process of forming the oxidation restriction layer, the oxidation fluid flows and diffuses in the surroundings along the extension direction of the peripheral wall of the peripheral hole 10. Accordingly, in the embodiment of the present application, the flow direction of the oxidation fluid is regulated by designing the extension direction of the peripheral wall of the peripheral hole 10, thereby regulating the shape of the oxidation restriction hole 200 finally formed.

[0073] Furthermore, the higher the sharpness of the intersection of the adjacent edges of the oxidation limiting hole 200, the more current is gathered at the intersection, resulting in a much higher current density at the intersection than at the periphery, resulting in a higher local thermal effect and reduced reliability of the VCSEL chip. Therefore, the sharpness of the outer edge of the oxidation limiting hole 200 should be reduced as much as possible, and the ideal shape of the oxidation limiting hole 200 is a circle.

[0074] Similar to a regular polygon, the more edges there are, the larger the internal angles are, and the lower the sharpness of the intersection of adjacent edges. The present application proposes to increase the turning surface of the hole side wall toward the oxidation limiting hole 200 so that the sharpness of the intersection of the diffusion range of the oxidation fluid flowing and diffusing along each surface is reduced.

[0075] The specific shape of the peripheral hole 10 is not limited by the present application. For example, in some embodiments of the present application, the peripheral hole 10 is obtained by deforming a rectangular hole. In some embodiments of the present application, the peripheral hole 10 is obtained by deforming a triangular hole.

[0076] The structure of the peripheral hole 10 obtained by deforming the rectangular hole is described below. Figures 1 to 6 shown.

[0077] The peripheral hole 10 includes a first side wall 11, a second side wall 12, a third side wall 13 and a fourth side wall 14. The first side wall 11 is opposite to the second side wall 12, and the third side wall 13 is opposite to the fourth side wall 14. The first side wall 11 includes a first main body surface 111 and at least one turning surface. The first main body surface 111 includes at least one plane. The extending direction of the turning surface of the first side wall 11 is different from the extending direction of the first main body surface 111, that is, there is an angle between the turning surface of the first side wall 11 and the first main body surface 111.

[0078] Accordingly, in some embodiments of the present application, the first side wall 11 includes a first turning surface 112 and a second turning surface 113, and the first main body surface 111 is located between the first turning surface 112 and the second turning surface 113. Specifically, the first main body surface 111 has a first main body end 1101 and a first main body second end 1102 opposite to each other, the first turning surface 112 extends from the first main body end 1101 to turn relative to the first main body surface 111, and the second turning surface 113 extends from the first main body second end 1102 to turn relative to the first main body surface 112.

[0079] Optionally, the first main surface 111 is a plane, and each part extends in the same plane; or, the first main surface 111 is a non-planar surface, and at least two parts extend in different planes, and the first main surface 111 has at least one turning area.

[0080] Accordingly, in some embodiments of the present application, the first main surface 111 is a plane. Figure 1 , Figure 3 and Figure 5 shown.

[0081] In some other embodiments of the present application, the first main surface 111 is a non-planar surface, for example, a curved surface, a multi-plane combined transition surface, a plane-curved surface combined transition surface, etc. The curved surface can be expressed as a single arc-shaped surface, a combined curved surface formed by a combination of multiple arc-shaped surfaces, etc. The multi-plane combined transition surface is expressed as a transition surface composed of multiple planes, wherein each two adjacent planes are located in different planes. The plane-curved surface combined transition surface is expressed as a transition surface formed by a combination of planes and curved surfaces, wherein an angle exists between each two adjacent surfaces. In other embodiments, each two adjacent surfaces can also be connected by an arc-shaped transition surface so that the three surfaces form an integral arc-shaped surface.

[0082] In some embodiments where the first main surface 111 is non-planar, such as Figure 2 , Figure 4 and Figure 6 As shown, the first main body surface 111 includes a first main body portion 1111, a first main body portion 1112 and a first main body middle portion 1113. The first main body middle portion 1113 is located between the first main body portion 1111 and the first main body portion 1112, and is recessed into the outer hole 10 relative to the first main body portion 1111 and the first main body portion 1112. The turning areas are formed between the first main body middle portion 1113 and the first main body portion 1111, and between the first main body middle portion 1113 and the first main body portion 1112, respectively.

[0083] Specifically, a turning area is formed between the first main body middle portion 1113 and the first main body first portion 1111 , and another turning area is formed between the first main body middle portion 1113 and the first main body second portion 1112 .

[0084] The end of the first main body portion 1111 forms the first main body end 1101 of the first main body surface 111 , and the end of the first main body portion 1112 forms the first main body end 1102 of the first main body surface 111 .

[0085] The first main body portion 1111 , the first main body portion 1112 , and the first main body middle portion 1113 of the first main body surface 111 are respectively planes, extending within their respective planes.

[0086] Optionally, the first main body portion 1111 and the first main body portion 1112 extend in the same plane, or in different planes.

[0087] Further optionally, the plane where the middle portion 1113 of the first body is located is parallel to the plane where the first body portion 1111 is located and / or the plane where the first body portion 1112 is located, or may be neither parallel to the plane where the first body portion 1111 is located nor parallel to the plane where the first body portion 1112 is located.

[0088] The first main body part 1111 and the first main body part 1112 may also be non-planar, for example, a curved surface, a multi-planar combination transition surface, a planar curved surface combination transition surface, etc. Figure 7 and Figure 8 shown.

[0089] The first body surface 111 further includes a first body first connection surface 1114 and a first body second connection surface 1115. The first body first connection surface 1114 is connected between the first body first portion 1111 and the first body middle portion 1113, and the first body second connection surface 1115 is connected between the first body second portion 1112 and the first body middle portion 1113.

[0090] The first body first connection surface 1114 may be a plane or a non-plane, such as a curved surface, a multi-plane combined transition surface, a plane-curved-surface combined transition surface, etc. Similarly, the first body second connection surface 1115 may be a plane or a non-plane, such as a curved surface, a multi-plane combined transition surface, a plane-curved-surface combined transition surface, etc.

[0091] In one embodiment of the present application, both the first main body first connection surface 1114 and the second main body second connection surface 1215 are planes. In this embodiment, the first main body first portion 1111 and the first main body second portion 1112 extend in the same plane, the plane where the first main body middle portion 1113 is located is parallel to the plane where the first main body first portion 1111 and the first main body second portion 1112 are located, and is recessed into the peripheral hole 10 relative to the first main body first portion 1111 and the first main body second portion 1112, the first main body first connection surface 1114 is perpendicular to the first main body first portion 1111 and the first main body middle portion 1113, and the first main body second connection surface 1115 is perpendicular to the first main body second portion 1112 and the first main body middle portion 1113.

[0092] In the embodiment of the present application, the first turning surface 112 includes a first turning portion 1121 and a first turning portion 1122, the first turning portion 1121 extends between the first main body end 1101 of the first main body surface 111 and the first turning portion 1122, wherein an angle exists between the first turning portion 1121 and a plane where the first main body end 1101 of the first main body surface 111 is located; the second turning surface 113 includes a second turning portion 1131 and a second turning portion 1132, the second turning portion 1131 extends between the first main body ends 1102 of the first main body surface 111 and the second turning portion 1132, wherein an angle exists between the second turning portion 1131 and a plane where the first main body ends 1102 of the first main body surface 111 are located.

[0093] The angle between the first turning portion 1121 and the plane where the first main body end 1101 of the first main body surface 111 is located is not limited by the present application. For example, in some embodiments of the present application, the angle between the first turning portion 1121 and the plane where the first main body end 1101 of the first main body surface 111 is 90 degrees. It should be understood that due to process errors, workpiece wear and other reasons, the angle between the first turning portion 1121 and the plane where the first main body end 1101 of the first main body surface 111 is allowed to have an error, and the angle between the first turning portion 1121 and the plane where the first main body end 1101 of the first main body surface 111 is 90 degrees, which means that the angle between the first turning portion 1121 and the plane where the first main body end 1101 of the first main body surface 111 is approximately 90 degrees, and an error of 1 to 2 degrees is allowed. For example, in some embodiments of the present application, the first turning portion 1121 and the plane where the first main body end 1101 of the first main body surface 111 are located are transitioned by an arc-shaped transition surface, so that an angle of 60-120 degrees exists between the extension of the first turning portion 1121 and the extension of the first main body end 1101 of the first main body surface 111 after the intersection of the two planes.

[0094] The first turning portion 1121 may be a plane or a non-plane, and the first turning portion 1122 may be a plane or a non-plane, and may be an irregular curved surface.

[0095] In one embodiment of the present application, both the first turning part 1121 and the first turning part 2 1122 are planes. In this embodiment, the first turning part 2 1122 is parallel to the plane where the first main body end 1101 of the first main body surface 111 is located, wherein the end of the first main body part 1111 of the first main body surface 111 is the first main body end 1101 of the first main body surface 111, that is, the first turning part 2 1122 is parallel to the first main body part 1111, and the first turning part 1121 is perpendicular to the first main body part 1111 and the first turning part 2 1122.

[0096] The angle between the second turning portion 1131 and the plane where the first main body ends 1102 of the first main body surface 111 are located is not limited by the present application. For example, in some embodiments of the present application, the angle between the second turning portion 1131 and the plane where the first main body ends 1102 of the first main body surface 111 are located is 90 degrees. It should be understood that the angle between the second turning portion 1131 and the plane where the first main body ends 1102 of the first main body surface 111 are 90 degrees, which means that the angle between the second turning portion 1131 and the plane where the first main body ends 1102 of the first main body surface 111 are approximately 90 degrees, and an error of 1 to 2 degrees is allowed. For example, in some embodiments of the present application, the second turning portion 1131 and the plane where the first main body ends 1102 of the first main body surface 111 are located are transitioned through an arc-shaped transition surface, so that an angle of 60-120 degrees exists between the planes where the second turning portion 1131 and the extensions at the first main body ends 1102 of the first main body surface 111 are located after the intersection.

[0097] The second turning portion 1131 may be a plane or a non-plane, and the second turning portion 1132 may be a plane or a non-plane.

[0098] In one embodiment of the present application, both the second turning part 1131 and the second turning part 1132 are planes. In this embodiment, the second turning part 1132 is parallel to the plane where the first main body second end 1102 of the second main body surface 121 is located, wherein the end of the first main body second part 1112 of the first main body surface 111 is the first main body second end 1102 of the first main body surface 111, that is, the second turning part 1132 is parallel to the first main body second part 1112, and the second turning part 1131 is perpendicular to the first main body second part 1112 and the second turning part 1132. The end of the first turning part 1122 is the end of the first turning surface 112, and is also one end of the first side wall 11. The end of the second turning part 1132 is the end of the second turning surface 113, and is also the other end of the first side wall 11.

[0099] Optionally, the first side wall 11 and the second side wall 12 are symmetrically arranged about a first central axis L1 defined by the peripheral hole 10 .

[0100] Correspondingly, the second side wall 12 includes a second main surface 121 and at least one turning surface, the second main surface 121 includes at least one plane, and the extending direction of the turning surface of the second side wall 12 is different from the extending direction of the second main surface 121 .

[0101] In some embodiments of the present application, the second side wall 12 includes a third turning surface 122 and a fourth turning surface 123, and the second main body surface 121 extends between the third turning surface 122 and the fourth turning surface 123. Specifically, the second main body surface 121 has a second main body one end 1201 and a second main body two end 1202 opposite to each other, the third turning surface 122 extends from the second main body one end 1201 to turn relative to the second main body surface 121, and the fourth turning surface 123 extends from the second main body two end 1202 to turn relative to the second main body surface 121.

[0102] Optionally, the second main surface 121 is a plane, and each part extends in a plane; or, the second main surface 121 is a non-planar surface, and at least two parts extend in different planes, and the second main surface 121 has at least one turning area.

[0103] Accordingly, in some embodiments of the present application, the second main surface 121 is a plane.

[0104] In some other embodiments of the present application, the first main surface 111 is a non-planar surface, for example, a curved surface, a multi-plane combined transition surface, a plane-curved combined transition surface, etc.

[0105] In some embodiments where the second main body surface 121 is non-planar, the second main body surface 121 includes a second main body portion 1211, a second main body portion 1212 and a second main body middle portion 1213. The second main body middle portion 1213 is located between the second main body portion 1211 and the second main body portion 1212, and is recessed into the outer hole 10 relative to the second main body portion 1211 and the second main body portion 1212. The turning areas are formed between the second main body middle portion 1213 and the second main body portion 1211, and between the second main body middle portion 1213 and the second main body portion 1212, respectively.

[0106] Specifically, a turning area is formed between the second body middle portion 1213 and the second body first portion 1211 , and another turning area is formed between the second body middle portion 1213 and the second body second portion 1212 .

[0107] The end of the second body portion 1211 forms the second body end 1201 of the second body surface 121 , and the end of the second body portion 1212 forms the second body end 1202 of the second body surface 121 .

[0108] The second main body first portion 1211 , the second main body second portion 1212 , and the second main body middle portion 1213 of the second main body surface 121 may be planes respectively, extending within their respective planes.

[0109] Optionally, the second main body part 1211 and the second main body part 1212 extend in the same plane, or extend in different planes.

[0110] Further optionally, the plane where the middle portion 1213 of the second body is located is parallel to the plane where the first portion 1211 of the second body is located and / or the plane where the second portion 1212 of the second body is located, or may be neither parallel to the plane where the first portion 1211 of the second body is located nor parallel to the plane where the second portion 1212 of the second body is located.

[0111] The second main body part 1211 and the second main body part 1212 may also be non-planar surfaces, for example, curved surfaces, multi-planar combined turning surfaces, planar curved combined turning surfaces, etc.

[0112] The second body surface 121 further includes a second body first connection surface 1214 and a second body second connection surface 1215. The second body first connection surface 1214 is connected between the second body first portion 1211 and the second body middle portion 1213, and the second body second connection surface 1215 is connected between the second body second portion 1212 and the second body middle portion 1213.

[0113] The second body first connection surface 1214 can be a plane or a non-plane, such as a curved surface, or a multi-plane combination turning surface, a plane-curved surface combination turning surface, etc. Similarly, the second body second connection surface 1215 can be a plane or a non-plane, such as a curved surface, or a multi-plane combination turning surface, a plane-curved surface combination turning surface, etc.

[0114] In some embodiments of the present application, the second body first connection surface 1214 and the second body second connection surface 1215 are both planes. In this embodiment, the second body first portion 1211 and the second body second portion 1212 extend in the same plane, the plane where the second body middle portion 1213 is located is parallel to the plane where the second body first portion 1211 and the second body second portion 1212 are located, and is recessed into the peripheral hole 10 relative to the second body second portion 1212 and the second body first portion 1211, the second body first connection surface 1214 is perpendicular to the second body first portion 1211 and the second body middle portion 1213, and the second body second connection surface 1215 is perpendicular to the second body second portion 1212 and the first body middle portion 1113.

[0115] In the embodiment of the present application, the third turning surface 122 includes a third turning portion 1221 and a third turning portion 1222, the third turning portion 1221 extends between the second main body end 1201 of the second main body surface 121 and the third turning portion 1222, wherein an angle exists between the third turning portion 1221 and a plane where the second main body end 1201 of the second main body surface 121 is located; the fourth turning surface 123 includes a fourth turning portion 1231 and a fourth turning portion 1232, the fourth turning portion 1231 extends between the second main body ends 1202 of the second main body surface 121 and the fourth turning portion 1232, wherein an angle exists between the fourth turning portion 1231 and a plane where the second main body ends 1202 of the second main body surface 121 are located.

[0116] The angle between the third turning portion 1221 and the plane at the second main body end 1201 of the second main body surface 121 is not limited by the present application. For example, in one embodiment of the present application, the angle between the third turning portion 1221 and the plane at the second main body end 1201 of the second main body surface 121 is 90 degrees. The angle between the third turning portion 1221 and the plane at the second main body end 1201 of the second main body surface 121 is 90 degrees, which means that the angle between the third turning portion 1221 and the plane at the second main body end 1201 of the second main body surface 121 is approximately 90 degrees, and an error of 1 to 2 degrees is allowed. For example, in some embodiments of the present application, the third turning portion 1221 and the plane where the second main body end 1201 of the second main body surface 121 is located are transitioned through an arc-shaped transition surface, so that an angle of 60-120 degrees exists between the planes where the third turning portion 1221 and the extension of the second main body end 1201 of the second main body surface 121 are located after the intersection.

[0117] The third turning portion 1221 may be a plane or a non-plane, and the third turning portion 1222 may be a plane or a non-plane.

[0118] In one embodiment of the present application, the third turning part 1221 and the third turning part 2 1222 are both planes. In this embodiment, the third turning part 2 1222 is parallel to the plane where the second main body end 1201 of the second main body surface 121 is located, wherein the end of the second main body part 1211 of the second main body surface 121 is the second main body end 1201 of the second main body surface 121, that is, the third turning part 2 1222 is parallel to the second main body part 1211, and the third turning part 1221 is perpendicular to the second main body part 1211 and the third turning part 2 1222.

[0119] The angle between the fourth turning portion 1231 and the plane where the second main body ends 1202 of the second main body surface 121 are located is not limited by the present application. For example, in some embodiments of the present application, the angle between the fourth turning portion 1231 and the plane where the second main body ends 1202 of the second main body surface 121 are located is 90 degrees. It should be understood that the angle between the fourth turning portion 1231 and the plane where the second main body ends 1202 of the second main body surface 121 are 90 degrees, which means that the angle between the fourth turning portion 1231 and the plane where the second main body ends 1202 of the second main body surface 121 are approximately 90 degrees, and an error of 1 to 2 degrees is allowed. For example, in some embodiments of the present application, the fourth turning portion 1231 and the plane where the second main body ends 1202 of the second main body surface 121 are located are transitioned through an arc-shaped transition surface, so that an angle of 60-120 degrees exists between the planes where the fourth turning portion 1231 and the extensions at the second main body ends 1202 of the second main body surface 121 are located after the intersection.

[0120] The fourth turning portion 1231 may be a plane or a non-plane, and the fourth turning portion 1232 may be a plane or a non-plane.

[0121] In one embodiment of the present application, the fourth turning part 1231 and the fourth turning part 2 1232 are both planes. In this embodiment, the fourth turning part 2 1232 is parallel to the plane where the second main body end 1202 of the second main body surface 121 is located, wherein the end of the second main body part 1212 of the second main body surface 121 is the second main body end 1202 of the second main body surface 121, that is, the fourth turning part 2 1232 is parallel to the second main body part 1212, and the fourth turning part 1231 is perpendicular to the second main body part 1212 and the fourth turning part 2 1232. The end of the third turning part 2 1222 is the end of the third turning surface 122, and is also one end of the second side wall 12. The end of the fourth turning part 2 1232 is the end of the fourth turning surface 123, and is also the other end of the second side wall 12.

[0122] Optionally, the third side wall 13 includes a third main surface 131 and at least one turning surface, the third main surface 131 includes at least one plane, and the extending direction of the turning surface of the third side wall 13 is different from the extending direction of the third main surface 131 .

[0123] Correspondingly, the third side wall 13 includes a fifth turning surface 132 and a sixth turning surface 133, and the third main body surface 131 is located between the fifth turning surface 132 and the sixth turning surface 133. Specifically, the third main body surface 131 has a third main body one end 1301 and a third main body second end 1302 opposite to each other, the fifth turning surface 132 extends from the third main body one end 1301 in a turning manner relative to the third main body surface 131, and the sixth turning surface 133 extends from the third main body second end 1302 in a turning manner relative to the third main body surface 131.

[0124] Optionally, the third main body surface 131 may be a plane, with each portion extending in the same plane, or the third main body surface 131 is a non-planar surface, with at least two portions extending in different planes, and having at least one turning area. Accordingly, in one embodiment of the present application, the third main body surface 131 is a plane.

[0125] In the embodiment of the present application, the fifth turning surface 132 includes a fifth turning portion 1321 and a fifth turning portion 1322, and the fifth turning portion 1321 extends between the third main body end 1301 of the third main body surface 131 and the fifth turning portion 1322, wherein an angle exists between the fifth turning portion 1321 and the plane where the third main body end 1301 of the third main body surface 131 is located; the sixth turning surface 133 includes a sixth turning portion 1331 and a sixth turning portion 1332, and the sixth turning portion 1331 extends between the third main body end 1302 of the third main body surface 131 and the sixth turning portion 1332, wherein an angle exists between the sixth turning portion 1331 and the plane where the third main body end 1302 of the third main body surface 131 is located.

[0126] The angle between the fifth turning portion 1321 and the plane where the third main body end 1301 of the third main body surface 131 is located is not limited by the present application. For example, in some embodiments of the present application, the angle between the fifth turning portion 1321 and the plane where the third main body end 1301 of the third main body surface 131 is located is approximately 90 degrees, and an error of 1 to 2 degrees is allowed. For another example, in some embodiments of the present application, the fifth turning portion 1321 and the plane where the third main body end 1301 of the third main body surface 131 is located are transitioned through an arc-shaped transition surface, so that the fifth turning portion 1321 and the extension at the third main body end 1301 of the third main body surface 131 have an angle of 60-120 degrees between the planes where the two are located after the intersection.

[0127] The fifth turning portion 1321 may be a plane or a non-plane, and the fifth turning portion 1322 may be a plane or a non-plane.

[0128] In one embodiment of the present application, the fifth turning part 1321 and the fifth turning part 2 1322 are both planes. In this embodiment, the fifth turning part 2 1322 is parallel to the plane where the third main body end 1301 of the third main body surface 131 is located, wherein the third main body surface 131 is a plane, that is, the fifth turning part 2 1322 is parallel to the third main body surface 131, and the fifth turning part 1321 is perpendicular to the third main body surface 131.

[0129] The angle between the sixth turning portion 1331 and the plane where the third main body ends 1302 of the third main body surface 131 are located is not limited by the present application. For example, in some embodiments of the present application, the angle between the sixth turning portion 1331 and the plane where the third main body ends 1302 of the third main body surface 131 are located is 90 degrees. It should be understood that the angle between the sixth turning portion 1331 and the plane where the third main body ends 1302 of the third main body surface 131 are located is 90 degrees, which means that the angle between the sixth turning portion 1331 and the plane where the third main body ends 1302 of the third main body surface 131 are located is approximately 90 degrees, and an error of 1 to 2 degrees is allowed. For example, in some embodiments of the present application, the sixth turning portion 1331 and the plane where the second ends 1302 of the third main body of the third main body surface 131 are located are transitioned through an arc-shaped transition surface, so that an angle of 60-120 degrees exists between the extension of the sixth turning portion 1331 and the extension of the second ends 1302 of the third main body of the third main body surface 131 after the intersection of the two planes.

[0130] The sixth turning portion 1331 may be a plane or a non-plane, and the sixth turning portion 1332 may be a plane or a non-plane.

[0131] In one embodiment of the present application, the sixth turning part 1331 and the sixth turning part 2 1332 are both planes. In this embodiment, the sixth turning part 2 1332 is parallel to the plane where the third main body second end 1302 of the second main body surface 121 is located, wherein the third main body surface 131 is a plane, that is, the sixth turning part 2 1332 is parallel to the third main body surface 131, and the sixth turning part 1331 is perpendicular to the third main body surface 131. The end of the fifth turning part 2 1322 is the end of the fifth turning surface 132, and is also one end of the third side wall 13. The end of the sixth turning part 2 1332 is the end of the sixth turning surface 133, and is also the other end of the third side wall 13.

[0132] It should be understood that the third side wall 13 may be provided with only one turning surface connected to the third main body surface 131, for example, only the fifth turning surface 132 is provided, or only the sixth turning surface 133 is provided. The third side wall 13 may also extend in one plane as a whole, that is, the third side wall 13 is not provided with any turning surface connected to the third main body surface 131.

[0133] The third side wall 13 and the fourth side wall 14 are symmetrically disposed about a second central axis L2 defined by the peripheral hole 10 .

[0134] Correspondingly, the fourth side wall 14 includes a fourth main surface 141 and at least one turning surface, the fourth main surface 141 includes at least one plane, and the extending direction of the turning surface of the fourth side wall 14 is different from the extending direction of the fourth main surface 141 .

[0135] In some embodiments of the present application, the fourth side wall 14 includes a seventh turning surface 142 and an eighth turning surface 143, and the fourth main body surface 141 is located between the seventh turning surface 142 and the eighth turning surface 143. Specifically, the fourth main body surface 141 has a fourth main body one end 1401 and a fourth main body second end 1402 opposite to each other, the seventh turning surface 142 extends from the fourth main body one end 1401 to turn relative to the fourth main body surface 141, and the eighth turning surface 143 extends from the fourth main body second end 1402 to turn relative to the fourth main body surface 141.

[0136] Optionally, the fourth main surface 141 may be a plane, and each part extends in the same plane, or the fourth main surface 141 is a non-planar surface, and at least two parts extend in different planes, and the fourth main surface 141 has at least one turning area. Accordingly, in one embodiment of the present application, the fourth main surface 141 is a plane.

[0137] In the embodiment of the present application, the seventh turning surface 142 includes a seventh turning portion 1421 and a seventh turning portion 1422, and the seventh turning portion 1421 extends between the fourth main body end 1401 of the fourth main body surface 141 and the seventh turning portion 1422, wherein an angle exists between the seventh turning portion 1421 and the plane where the fourth main body end 1401 of the fourth main body surface 141 is located; the eighth turning surface 143 includes an eighth turning portion 14311431 and an eighth turning portion 1432, and the eighth turning portion 14311431 extends between the fourth main body end 1402 of the fourth main body surface 141 and the eighth turning portion 1432, wherein an angle exists between the eighth turning portion 14311431 and the plane where the fourth main body end 1402 of the fourth main body surface 141 is located.

[0138] The angle between the seventh turning portion 1421 and the plane where the fourth main body end 1401 of the fourth main body surface 141 is located is not limited by the present application. For example, in some embodiments of the present application, the angle between the seventh turning portion 1421 and the plane where the fourth main body end 1401 of the fourth main body surface 141 is located is approximately 90 degrees, and an error of 1 to 2 degrees is allowed. For another example, in some embodiments of the present application, the seventh turning portion 1421 and the plane where the fourth main body end 1401 of the fourth main body surface 141 is located are transitioned through an arc-shaped transition surface, so that the seventh turning portion 1421 and the extension at the fourth main body end 1401 of the fourth main body surface 141 have an angle of 60-120 degrees between the planes where the two are located after the intersection.

[0139] The seventh turning portion 1421 may be a plane or a non-plane, and the seventh turning portion 1422 may be a plane or a non-plane.

[0140] In one embodiment of the present application, the seventh turning part 1421 and the seventh turning part 2 1422 are both planes. In this embodiment, the seventh turning part 2 1422 is parallel to the plane where the fourth main body end 1401 of the fourth main body surface 141 is located, wherein the end of the fourth main body part of the fourth main body surface 141 is the fourth main body end 1401 of the fourth main body surface 141, that is, the seventh turning part 2 1422 is parallel to the fourth main body part, and the seventh turning part 1421 is perpendicular to the fourth main body part and the seventh turning part 2 1422.

[0141] The angle between the eighth turning portion 14311431 and the plane where the fourth main body ends 1402 of the fourth main body surface 141 are located is not limited by the present application. For example, in some embodiments of the present application, the angle between the eighth turning portion 14311431 and the plane where the fourth main body ends 1402 of the fourth main body surface 141 are located is 90 degrees. It should be understood that the angle between the eighth turning portion 14311431 and the plane where the fourth main body ends 1402 of the fourth main body surface 141 are located is approximately 90 degrees, allowing an error of 1 to 2 degrees. For example, in some embodiments of the present application, the eighth turning portion 14311431 and the plane where the fourth main body ends 1402 of the fourth main body surface 141 are located are transitioned through an arc-shaped transition surface, so that the eighth turning portion 14311431 and the extension of the fourth main body ends 1402 of the fourth main body surface 141 have an angle of 60-120 degrees between the planes where the two are located after the intersection.

[0142] The eighth turning portion 14311431 may be a plane or a non-plane, and the eighth turning portion 2 1432 may be a plane or a non-plane.

[0143] In one embodiment of the present application, the eighth turning part 14311431 and the eighth turning part 2 1432 are both planes. In this embodiment, the eighth turning part 2 1432 is parallel to the plane where the fourth main body second end 1402 of the second main body surface 121 is located, wherein the end of the fourth main body second part of the fourth main body surface 141 is the fourth main body second end 1402 of the fourth main body surface 141, that is, the eighth turning part 2 1432 is parallel to the fourth main body second part, and the eighth turning part 14311431 is perpendicular to the fourth main body second part and the eighth turning part 2 1432. The end of the seventh turning part 2 1422 is the end of the seventh turning surface 142, and is also one end of the fourth side wall 14. The end of the eighth turning part 2 1432 is the end of the eighth turning surface 143, and is also the other end of the fourth side wall 14.

[0144] It should be understood that the fourth side wall 14 may be provided with only one turning surface connected to the fourth main body surface 141, for example, only the seventh turning surface 142 is provided, or only the eighth turning surface 143 is provided. The fourth side wall 14 may also extend in one plane as a whole, that is, the fourth side wall 14 is not provided with any turning surface connected to the fourth main body surface 141.

[0145] In the embodiment of the present application, the peripheral hole 10 also includes a first transition wall 15, a second transition wall 16, a third transition wall 17 and a fourth transition wall 18, the first transition wall 15 extends between the first side wall 11 and the third side wall 13, the second transition wall 16 extends between the first side wall 11 and the fourth side wall 14, the third transition wall 17 extends between the second side wall 12 and the third side wall 13, and the fourth transition wall 18 extends between the second side wall 12 and the fourth side wall 14.

[0146] Specifically, the first transition wall 15 extends between the first turning portion 1122 of the first turning surface 112 of the first side wall 11 and the fifth turning portion 1322 of the fifth turning surface 132 of the third side wall 13, the second transition wall 16 extends between the second turning portion 1132 of the second turning surface 113 of the first side wall 11 and the seventh turning portion 1422 of the seventh turning surface 142 of the fourth side wall 14, the third transition wall 17 extends between the third turning portion 1222 of the third turning surface 122 of the second side wall 12 and the sixth turning portion 1332 of the sixth turning surface 133 of the third side wall 13, and the fourth transition wall 18 extends between the fourth turning portion 1232 of the fourth turning surface 123 of the second side wall 12 and the eighth turning portion 1432 of the eighth turning surface 143 of the fourth side wall 14.

[0147] The first transition wall 15 , the second transition wall 16 , the third transition wall 17 and the fourth transition wall 18 may be planes or non-planes, respectively.

[0148] In some embodiments of the present application, the first transition wall 15 , the second transition wall 16 , the third transition wall 17 and the fourth transition wall 18 may be multi-plane combined turning surfaces respectively.

[0149] For example, in one embodiment of the present application, the first transition wall 15 includes a first transition part 151 and a first transition part 2 152, the first transition part 151 extends from one end of the first side wall 11, the first transition part 2 152 extends from one end of the third side wall 13, the first transition part 151 and the first transition part 2 152 intersect, and extend in different directions; the second transition wall 16 includes a second transition part 161 and a second transition part 2 162, the second transition part 161 extends from the other end of the first side wall 11, the second transition part 2 162 extends from one end of the fourth side wall 14, the second transition part 161 and the second transition part 2 162 intersect, and extend in different directions. The extension directions are different; the third transition wall 17 includes a third transition part 171 and a third transition part 2 172, the third transition part 171 extends from one end of the second side wall 12, the third transition part 2 172 extends from the other end of the third side wall 13, the third transition part 171 and the third transition part 2 172 intersect, and the extension directions are different; the fourth transition wall 18 includes a fourth transition part 181 and a fourth transition part 2 182, the fourth transition part 181 extends from the other end of the second side wall 12, the fourth transition part 2 182 extends from the other end of the fourth side wall 14, the fourth transition part 181 and the fourth transition part 2 182 intersect, and the extension directions are different.

[0150] The angle between the first transition part 151 and the second transition part 162, the angle between the second transition part 161 and the second transition part 162, the angle between the third transition part 171 and the third transition part 172, and the angle between the fourth transition part 181 and the fourth transition part 182 are not limited by the present application. Optionally, the angle between the first transition part 151 and the second transition part 162, the angle between the second transition part 161 and the second transition part 162, the angle between the third transition part 171 and the third transition part 172, and the angle between the fourth transition part 181 and the fourth transition part 182 are all approximately 90 degrees.

[0151] In this embodiment, if Figure 1 and Figure 2 As shown, the first transition part 151 and the first transition part 2 152, the second transition part 161 and the second transition part 162, the third transition part 171 and the third transition part 2 172, and the fourth transition part 181 and the fourth transition part 2 182 are all planes. The extension direction of the first transition part 151 is consistent with the extension direction of the first side wall 11 where it connects with the first transition part 151, that is, consistent with the extension direction of the first turning part 2 1122 of the first side wall 11, that is, the first transition part 151 and the first turning part 2 1122 extend in the same plane; the extension direction of the first transition part 2 152 is consistent with the extension direction of the third side wall 13 where it connects with the first transition part 2 152, that is, consistent with the extension direction of the fifth turning part 2 1322 of the third side wall 13, that is, the first transition part 2 152 and the fifth turning part 2 1322 extend in the same plane.

[0152] The extension direction of the second transition portion 161 is consistent with the extension direction of the first side wall 11 at the connection with the second transition portion 161, that is, it is consistent with the extension direction of the second turning portion 1132 of the first side wall 11, that is, the second transition portion 161 and the second turning portion 1132 extend in the same plane; the extension direction of the second transition portion 162 is consistent with the extension direction of the fourth side wall 14 at the connection with the second transition portion 162, that is, it is consistent with the extension direction of the seventh turning portion 1422 of the fourth side wall 14, that is, the second transition portion 162 and the seventh turning portion 1422 extend in the same plane.

[0153] The extension direction of the third transition portion 171 is consistent with the extension direction of the second side wall 12 at the connection with the third transition portion 171, that is, it is consistent with the extension direction of the third turning portion 2 1222 of the second side wall 12, that is, the third transition portion 171 and the third turning portion 2 1222 extend in the same plane; the extension direction of the third transition portion 2 172 is consistent with the extension direction of the third side wall 13 at the connection with the third transition portion 2 172, that is, it is consistent with the extension direction of the sixth turning portion 2 1332 of the third side wall 13, that is, the third transition portion 2 172 and the sixth turning portion 2 1332 extend in the same plane.

[0154] The extension direction of the fourth transition portion 181 is consistent with the extension direction of the second side wall 12 at the connection with the fourth transition portion 181, that is, it is consistent with the extension direction of the fourth turning portion 1232 of the second side wall 12, that is, the fourth transition portion 181 and the fourth turning portion 1232 extend in the same plane; the extension direction of the fourth transition portion 182 is consistent with the extension direction of the fourth side wall 14 at the connection with the fourth transition portion 182, that is, it is consistent with the extension direction of the eighth turning portion 1432 of the fourth side wall 14, that is, the fourth transition portion 182 and the eighth turning portion 1432 extend in the same plane.

[0155] In another embodiment of the present application, the first transition wall 15 includes a first transition portion 151 and a first transition portion 152, the first transition portion 151 extends from one end of the first side wall 11, the first transition portion 152 extends from one end of the third side wall 13, the first transition portion 151 and the first transition portion 152 intersect, and extend in different directions; the second transition wall 16 includes a second transition portion 161 and a second transition portion 162, the second transition portion 161 extends from the other end of the first side wall 11, the second transition portion 162 extends from one end of the fourth side wall 14, the second transition portion 161 and the second transition portion 162 intersect, and extend The directions are different; the third transition wall 17 includes a third transition part 171 and a third transition part 2 172, the third transition part 171 extends from one end of the second side wall 12, the third transition part 2 172 extends from the other end of the third side wall 13, the third transition part 171 and the third transition part 2 172 intersect, and the extension directions are different; the fourth transition wall 18 includes a fourth transition part 181 and a fourth transition part 2 182, the fourth transition part 181 extends from the other end of the second side wall 12, the fourth transition part 2 182 extends from the other end of the fourth side wall 14, the fourth transition part 181 and the fourth transition part 2 182 intersect, and the extension directions are different.

[0156] The angle between the first transition part 151 and the second transition part 162, the angle between the second transition part 161 and the second transition part 162, the angle between the third transition part 171 and the third transition part 172, and the angle between the fourth transition part 181 and the fourth transition part 182 are not limited by the present application. Optionally, the angle between the first transition part 151 and the second transition part 162, the angle between the second transition part 161 and the second transition part 162, the angle between the third transition part 171 and the third transition part 172, and the angle between the fourth transition part 181 and the fourth transition part 182 are all approximately 90 degrees.

[0157] In this embodiment, if Figure 3 and Figure 4As shown, the first transition part 151 and the first transition part 2 152, the second transition part 161 and the second transition part 162, the third transition part 171 and the third transition part 2 172, and the fourth transition part 181 and the fourth transition part 2 182 are all planes. An angle is formed between the extension direction of the first transition part 151 and the extension direction of the first side wall 11 where the first transition part 151 is connected, that is, an angle is formed between the extension direction of the first transition part 151 and the first turning part 2 1122 of the first side wall 11, that is, the first transition part 151 and the first turning part 2 1122 extend in different planes; an angle is formed between the extension direction of the first transition part 2 152 and the extension direction of the third side wall 13 where the first transition part 152 is connected, that is, an angle is formed between the extension direction of the fifth turning part 2 1322 of the third side wall 13, that is, the first transition part 2 152 and the fifth turning part 2 1322 extend in different planes.

[0158] There is an angle between the extension direction of the second transition portion 161 and the extension direction of the first side wall 11 at the connection with the second transition portion 161, that is, there is an angle between the extension direction of the second transition portion 161 and the second turning portion 1132 of the first side wall 11, that is, the second transition portion 161 and the second turning portion 1132 extend in different planes; there is an angle between the extension direction of the second transition portion 162 and the extension direction of the fourth side wall 14 at the connection with the second transition portion 162, that is, there is an angle between the extension direction of the second transition portion 162 and the seventh turning portion 1422 of the fourth side wall 14, that is, the second transition portion 162 and the seventh turning portion 1422 extend in different planes.

[0159] There is an angle between the extension direction of the third transition portion 171 and the extension direction of the second side wall 12 at the connection with the third transition portion 171, that is, there is an angle between the extension direction of the third turning portion 1222 of the second side wall 12, that is, the third transition portion 171 and the third turning portion 1222 extend in different planes; there is an angle between the extension direction of the third transition portion 172 and the extension direction of the third side wall 13 at the connection with the third transition portion 172, that is, there is an angle between the extension direction of the sixth turning portion 1332 of the third side wall 13, that is, the third transition portion 172 and the sixth turning portion 1332 extend in different planes.

[0160] There is an angle between the extension direction of the fourth transition portion 181 and the extension direction of the second side wall 12 at the connection with the fourth transition portion 181, that is, there is an angle between the extension direction of the fourth turning portion 1232 of the second side wall 12, that is, the fourth transition portion 181 and the fourth turning portion 1232 extend in different planes; there is an angle between the extension direction of the fourth transition portion 182 and the extension direction of the fourth side wall 14 at the connection with the fourth transition portion 182, that is, there is an angle between the extension direction of the eighth turning portion 1432 of the fourth side wall 14, that is, the fourth transition portion 182 and the eighth turning portion 1432 extend in different planes.

[0161] The angle between the extension direction of the first transition portion 151 and the extension direction of the first side wall 11 at the connection with the first transition portion 151, the angle between the extension direction of the first transition portion 152 and the extension direction of the third side wall 13 at the connection with the first transition portion 152, the angle between the extension direction of the second transition portion 161 and the extension direction of the first side wall 11 at the connection with the second transition portion 161, the angle between the extension direction of the second transition portion 162 and the extension direction of the fourth side wall 14 at the connection with the second transition portion 162, the angle between the extension direction of the third transition portion 171 and the extension direction of the third side wall 13 at the connection with the first transition portion 152, The angle between the extension direction of the second side wall 12 and the extension direction of the third transition part 171, the angle between the extension direction of the third transition part 172 and the extension direction of the third side wall 13 and the third transition part 172, the angle between the extension direction of the fourth transition part 181 and the extension direction of the second side wall 12 and the fourth transition part 181, and the angle between the extension direction of the fourth transition part 182 and the extension direction of the fourth side wall 14 and the fourth transition part 182 are not limited to the present application. For example, they can all be approximately 90 degrees or other angles.

[0162] Optionally, the first transition wall 15 and the second transition wall 16 are symmetrically arranged about the second center axis L2 set by the peripheral hole 10, the third transition wall 17 and the fourth transition wall 18 are symmetrically arranged about the second center axis L2 set by the peripheral hole 10, the third transition wall 17 and the first transition wall 15 are symmetrically arranged about the first center axis L1 set by the peripheral hole 10, and the fourth transition wall 18 and the second transition wall 16 are symmetrically arranged about the first center axis L1 set by the peripheral hole 10.

[0163] In other embodiments of the present application, Figure 5 and Figure 6As shown, the first transition wall 15, the second transition wall 16, the third transition wall 17 and the fourth transition wall 18 may be planes respectively.

[0164] In some other embodiments of the present application, the first transition wall 15 , the second transition wall 16 , the third transition wall 17 and the fourth transition wall 18 may be curved surfaces respectively.

[0165] In the structure of the peripheral hole 10 obtained by deformation of the rectangular hole, the first main surface 111 of the first side wall 11, the second main surface 121 of the second side wall 12, the third main surface 131 of the third side wall 13 and the fourth main surface 141 of the fourth side wall 14 form the main body of the peripheral hole 10; the first turning surface 112, the first transition surface 15 and the fifth turning surface 132 form the first protrusion of the peripheral hole 10; the second turning surface 113, the second transition surface 16 and the seventh turning surface 142 form the second protrusion of the peripheral hole 10; the third turning surface 122, the third transition surface 17 and the sixth turning surface 133 form the third protrusion of the peripheral hole 10; the fourth turning surface 123, the fourth transition surface 18 and the eighth turning surface 143 form the fourth protrusion of the peripheral hole 10.

[0166] The structure of the peripheral hole 10 obtained by deforming the triangular hole is described below. Fig. 9 shown.

[0167] The peripheral hole 10A includes a first side wall 11A, a second side wall 12A and a third side wall 13A. The first side wall 11A, the second side wall 12A and the third side wall 13A are connected end to end, wherein one end of the second side wall 12A is connected to one end of the first side wall 11A, one end of the third side wall is connected to the other end of the first side wall 11A, and the other end of the second side wall 12A is connected to the other end of the third side wall 13A.

[0168] The first side wall 11A faces the oxidation limiting hole 200A, and includes a first main body surface 111A, a first turning surface 112A, and a second turning surface 113A. The first main body surface 111A is located between the first turning surface 112A and the second turning surface 113A. The second side wall 12A includes a second main body surface 121A, a third turning surface 122A, and a fourth turning surface 123A. The third side wall 13A includes a third main body surface 131A, a fifth turning surface 132A, and a sixth turning surface 133A.

[0169] The first main body surface 111A has a first main body end 1101A and a first main body second end 1102A opposite to each other, the first turning surface 112A turns and extends from the first main body end 1101A relative to the first main body surface 111A, and the second turning surface 113A turns and extends from the second main body second end 1202A relative to the first main body surface 111A. The second main body surface 121A has a second main body end 1201A and a second main body second end 1202A opposite to each other, the third turning surface 122A turns and extends from the second main body end 1201A relative to the second main body surface 121A, and the fourth turning surface 123A turns and extends from the second main body second end 1202A relative to the second main body surface 121A. The third main body surface 131A has a third main body end 1301A and a third main body second end 1302A relative to each other, the fifth turning surface 132A extends from the third main body end 1301A in a turning manner relative to the third main body surface 131A, and the sixth turning surface 133A extends from the third main body second end 1302A in a turning manner relative to the third main body surface 131A.

[0170] Correspondingly, the first turning surface 112A of the first side wall 11A is connected to the third turning surface 122A of the second side wall 12A, the second turning surface 113A of the first side wall 11A is connected to the fifth turning surface 132A of the third side wall 13A, and the fourth turning surface 123A of the second side wall 12A is connected to the sixth turning surface 133A of the third side wall 13A.

[0171] Optionally, the first main surface 111A may be a plane, and each part extends in the same plane, or the first main surface 111A is a non-plane, at least two parts extend in different planes, and the second main surface 121A has at least one turning area; the second main surface 121A may be a plane, and each part extends in the same plane, or the second main surface 121A is a non-plane, at least two parts extend in different planes, and the second main surface 121A has at least one turning area; the third main surface 131A may be a plane, and each part extends in the same plane, or the third main surface 131A is a non-plane, at least two parts extend in different planes, and the second main surface 121A has at least one turning area.

[0172] In one embodiment of the present application, the first main body surface 111A is a plane, the first turning surface 112A is a curved surface, and the second turning surface 113A is a curved surface; the second main body surface 121A is a plane, the third turning surface 122A is a curved surface, and the fourth turning surface 123A is a curved surface; the third main body surface 131A is a plane, the fifth turning surface 132A is a curved surface, and the sixth turning surface 133A is a curved surface.

[0173] It should be understood that in other embodiments of the present application, the first main surface 111A, the second main surface 121A and the third main surface 131A may also be non-planar, for example, a multi-plane combination turning surface, a plane curved surface combination turning surface; the first turning surface 112A, the second turning surface 113A, the third turning surface 122A, the fourth turning surface 123A, the fifth turning surface 132A and the sixth turning surface 133A may also be implemented in other ways, for example, a multi-plane combination turning surface, a plane curved surface combination turning surface.

[0174] In the structure of the peripheral hole 10A obtained by deformation of the triangular hole, the first main surface 111A of the first side wall 11A, the second main surface 121A of the second side wall 12A and the third main surface 131A of the third side wall 13A form the main body of the peripheral hole 10A; the first turning surface 112A and the third turning surface 122A form the first protrusion of the peripheral hole 10A; the second turning surface 113A and the fifth turning surface 132A form the second protrusion of the peripheral hole 10A; the fourth turning surface 123A and the sixth turning surface 133A form the third protrusion of the peripheral hole 10A.

[0175] It should be understood that the peripheral hole 10A can also be in other shapes, and the extension direction of each side wall can be designed according to needs.

[0176] It is worth mentioning that in a VCSEL array formed by arranging a plurality of VCSEL lasers, two adjacent VCSEL lasers may share at least one peripheral hole 10A, such as Fig.10 shown.

[0177] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

Claims

1. An aperture unit for a VCSEL laser having at least one oxide-limited aperture, characterized in that: The hole unit comprises: A plurality of peripheral holes, wherein the plurality of peripheral holes are arranged circumferentially to enclose and form a limiting hole forming area located therein, and the oxidation limiting hole is formed in the limiting hole forming area; Wherein, the peripheral hole has a first side wall facing the oxidation limiting hole, the first side wall includes a first main surface and at least one turning surface, the first main surface includes at least one plane, the extension direction of the turning surface of the first side wall is different from the extension direction of the first main surface and is bent toward the direction of the oxidation limiting hole.

2. The aperture unit for VCSEL laser according to claim 1, wherein: The first side wall includes a first turning surface and a second turning surface, and the first main body surface is located between the first turning surface and the second turning surface.

3. The aperture unit for VCSEL laser according to claim 2, wherein: The first main body surface is a plane and extends within a plane.

4. The aperture unit for VCSEL laser according to claim 2, wherein: The first main body surface has at least one turning area.

5. The aperture unit for VCSEL laser according to claim 4, wherein: The first main body surface includes a first main body portion, a first main body portion two and a first main body middle portion. The first main body middle portion is located between the first main body portion one and the first main body portion two, and is recessed into the outer hole relative to the first main body portion one and the first main body portion two. The turning areas are formed between the first main body middle portion and the first main body portion one, and between the first main body middle portion and the first main body portion two, respectively.

6. The aperture unit for VCSEL laser according to claim 5, wherein: The first main body part one, the first main body part two and the first main body middle part of the first main body surface are respectively planes, extending within their respective planes.

7. The aperture unit for VCSEL laser according to claim 2, wherein: The first main body surface has a first main body end and a first main body end relative to each other, the first turning surface includes a first turning portion and a first turning portion, the first turning portion extends between the first main body end and the first turning portion of the first main body surface, wherein an angle is formed between the first turning portion and the plane where the first main body end of the first main body surface is located; the second turning surface includes a second turning portion and a second turning portion, the second turning portion extends between the first main body ends and the second turning portion of the first main body surface, wherein an angle is formed between the second turning portion and the plane where the first main body ends of the first main body surface are located.

8. The aperture unit for VCSEL laser according to claim 7, wherein: The peripheral hole further includes a second side wall, and the first side wall and the second side wall are symmetrically arranged about a first central axis defined by the peripheral hole.

9. The aperture unit for VCSEL laser according to claim 8, wherein: The peripheral hole further includes a third side wall, the third side wall includes a third main surface and at least one turning surface, the third main surface includes at least one plane, and the extension direction of the turning surface of the third side wall is different from the extension direction of the third main surface.

10. The aperture unit for VCSEL laser according to claim 9, wherein: The third side wall includes a fifth turning surface and a sixth turning surface, and the third main body surface is located between the fifth turning surface and the sixth turning surface.

11. The aperture unit for VCSEL laser according to claim 10, wherein: The third main body surface has a third main body end and a third main body end relative to each other, the fifth turning surface includes a fifth turning portion and a fifth turning portion, the fifth turning portion extends between the third main body end of the third main body surface and the fifth turning portion, wherein an angle exists between the fifth turning portion and the plane where the third main body end of the third main body surface is located; the sixth turning surface includes a sixth turning portion and a sixth turning portion, the sixth turning portion extends between the third main body end of the third main body surface and the sixth turning portion, wherein an angle exists between the sixth turning portion and the plane where the third main body end of the third main body surface is located.

12. The aperture unit for VCSEL laser according to claim 11, wherein: The peripheral hole further includes a fourth side wall, and the fourth side wall and the third side wall are symmetrically arranged about a second central axis defined by the peripheral hole.

13. The aperture unit for VCSEL laser according to claim 12, wherein: The peripheral hole also includes a first transition wall, a second transition wall, a third transition wall and a fourth transition wall, the first transition wall extends between the first side wall and the third side wall, the second transition wall extends between the first side wall and the fourth side wall, the third transition wall extends between the second side wall and the third side wall, and the fourth transition wall extends between the second side wall and the fourth side wall.

14. The aperture unit for VCSEL laser according to claim 13, wherein: The first transition wall and the second transition wall are symmetrically arranged about the second center axis set by the peripheral hole, the third transition wall and the fourth transition wall are symmetrically arranged about the second center axis set by the peripheral hole, the third transition wall and the first transition wall are symmetrically arranged about the first center axis set by the peripheral hole, and the fourth transition wall and the second transition wall are symmetrically arranged about the first center axis set by the peripheral hole.

15. The aperture unit for VCSEL laser according to claim 14, wherein: The first transition wall includes a first transition portion and a first transition portion. The first transition portion extends from an end of the first side wall, and the first transition portion extends from an end of the third side wall. The first transition portion and the first transition portion intersect and extend in different directions.

16. The aperture unit for VCSEL laser according to claim 15, wherein: The extension direction of the first transition portion is consistent with the extension direction of the first side wall at the intersection with the first transition portion, and the extension direction of the first transition portion 2 is consistent with the extension direction of the third side wall at the junction with the first transition portion 2.

17. The aperture unit for VCSEL laser according to claim 15, wherein: There is an angle between the extension direction of the first transition portion and the extension direction of the first side wall connected to the first transition portion, and there is an angle between the extension direction of the first transition portion 2 and the extension direction of the third side wall connected to the first transition portion 2.

18. The aperture unit for VCSEL laser according to claim 14, wherein: The first transition wall is a plane extending between the first side wall and the third side wall.

19. The aperture unit for VCSEL laser according to claim 14, wherein: The first transition wall is a curved surface.

20. The aperture unit for VCSEL laser according to claim 2, wherein: The first turning surface is a curved surface, and the second turning surface is a curved surface.

21. The aperture unit for VCSEL laser according to claim 20, wherein: The peripheral hole also includes a second side wall and a third side wall, the second side wall includes a second main surface, a third turning surface and a fourth turning surface; the third side wall includes a third main surface, a fifth turning surface and a sixth turning surface; the second main surface is located between the third turning surface and the fourth turning surface, and the third main surface is located between the fifth turning surface and the sixth turning surface; the first turning surface of the first side wall is connected to the third turning surface of the second side wall, the second turning surface of the first side wall is connected to the fifth turning surface of the third side wall, and the fourth turning surface of the second side wall is connected to the sixth turning surface of the third side wall.

22. The aperture unit for VCSEL laser according to claim 21, wherein: The third turning surface is a curved surface, the fourth turning surface is a curved surface, the fifth turning surface is a curved surface, and the sixth turning surface is a curved surface.

23. A VCSEL laser, characterized in that: include: at least one oxidation restriction layer, the oxidation restriction layer having an oxidation restriction hole; and A hole unit as claimed in any one of claims 1 to 22.

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