Seed crystal support and crystal growth method

Abstract

The embodiment of the invention provides a seed crystal holder and a crystal growth method, the seed crystal holder comprises a seed crystal holder body and a connecting rod, the seed crystal holder body is fixed at one end of the connecting rod, and a seed crystal bonding surface is arranged on one side, far away from the connecting rod, of the seed crystal holder body.

Description

A seed crystal holder and crystal growth method

[0001] Cross-references

[0002] This application claims priority to Chinese application No. 202222415184.0 filed on September 9, 2022, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This specification relates to the field of crystal preparation, and in particular to a seed crystal holder and a crystal growth method. Background Art

[0004] The liquid phase method is one of the methods for growing crystals (e.g., silicon carbide single crystals). When using the liquid phase method to grow crystals (e.g., semiconductor crystals), the seed crystal needs to be bonded to the seed crystal holder before crystal growth can be performed. The bonding quality of the seed crystal directly affects the quality of the prepared crystal. When using the upper pulling method to prepare crystals, the seed crystal needs to be bonded to the seed crystal holder. By lowering the seed crystal holder, the seed crystal is brought into contact with the melt, thereby achieving crystal growth. Therefore, the structural design of the seed crystal holder and the bonding condition between the seed crystal holder and the crystal are very important for crystal growth.

[0005] Summary of the Invention

[0006] One or more embodiments of this specification provide a seed crystal holder, which includes a seed crystal holder body and a connecting rod. The seed crystal holder body is fixed to one end of the connecting rod, and a seed crystal bonding surface is provided on the side of the seed crystal holder body away from the connecting rod.

[0007] In some embodiments, the seed crystal holder body includes a hollow first inner cavity, and a channel for cooling medium to flow is provided in the connecting rod; the channel is connected to the first inner cavity.

[0008] In some embodiments, the seed crystal holder body is provided with a first through hole communicating with the first inner cavity.

[0009] In some embodiments, a cooling medium diffusion structure is provided in the inner cavity.

[0010] In some embodiments, the cooling medium diffusion structure includes a shell, a second inner cavity is formed in the shell, a plurality of diffusion holes are provided on the shell, the channel is connected to the second inner cavity, and the diffusion holes connect the first inner cavity and the second inner cavity.

[0011] In some embodiments, the seed crystal holder further includes a cooling device, which delivers the cooling medium to the channel, and the cooling medium flows in the channel at a preset flow rate.

[0012] In some embodiments, the cooling medium is an inert gas with a preset flow rate greater than 0.4 m / s.

[0013] In some embodiments, the seed crystal holder further includes a weight-increasing structure, and the weight-increasing structure is connected to the seed crystal holder body.

[0014] In some embodiments, the seed crystal holder further includes a cooling structure provided on the connecting rod, and the cooling structure cools the cooling medium in the channel.

[0015] In some embodiments, the seed crystal holder also includes a driving mechanism and a stirring mechanism. The other end of the connecting rod is connected to the driving mechanism, and the driving mechanism drives the seed crystal holder body to rotate around the axis of the connecting rod through the connecting rod; the stirring mechanism is connected to the seed crystal holder body, and the stirring mechanism stirs the melt used for crystal growth.

[0016] In some embodiments, the stirring mechanism includes a mounting rod and a stirring paddle, and the stirring paddle is located on a side of the seed crystal bonding surface away from the connecting rod.

[0017] In some embodiments, there are multiple stirring mechanisms, and the multiple stirring mechanisms are arranged around the seed holder body.

[0018] In some embodiments, the stirring mechanism is made of one or more of tungsten alloy and high-temperature ceramic.

[0019] In some embodiments, the seed crystal holder body includes at least two sub-parts, and each of the at least two sub-parts is provided with a half groove; the seed crystal holder also includes a locking structure and a clamping structure, and the clamping structure is provided at one end where the connecting rod is connected to the seed crystal holder body; the at least two sub-parts are spliced ​​so that the half grooves on each of the at least two sub-parts are spliced ​​into a clamping groove, and the clamping structure is clamped in the clamping groove; the locking structure fixes the spliced ​​at least two sub-parts.

[0020] In some embodiments, the at least two sub-sections include a first sub-section and a second sub-section with identical structures; the first sub-section and the second sub-section are symmetrically arranged with the axis of the connecting rod as the axis of symmetry.

[0021] In some embodiments, the first slot body and the second slot body of the clamping slot are arranged along the axial direction of the connecting rod, and the first slot body is closer to the seed crystal bonding surface than the second slot body; the area of ​​the cross section of the first slot body along the axis perpendicular to the connecting rod is larger than the area of ​​the cross section of the second slot body along the axis perpendicular to the connecting rod; the area of ​​the cross section of the clamping structure along the axis perpendicular to the connecting rod is larger than the area of ​​the cross section of the connecting rod along the axis perpendicular to the connecting rod.

[0022] In some embodiments, the snap-fit ​​structure is in a polyhedron shape.

[0023] In some embodiments, the locking structure includes an annular groove and a locking ring; the annular groove is arranged around the outer wall of the seed crystal holder body, and the locking ring is sleeved outside the at least two sub-parts after splicing and is arranged in the annular groove.

[0024] In some embodiments, the seed crystal holder further includes an annular protective holder, in which a receiving cavity matching the shape of the seed crystal holder body is provided; the protective holder is arranged around the seed crystal holder body, and the protective holder is arranged around one end of the connecting rod connected to the seed crystal holder body.

[0025] In some embodiments, the seed crystal holder further includes an annular first protective sleeve, which is sleeved outside the connecting rod and is located between the connecting rod and the protective holder.

[0026] In some embodiments, the connecting rod includes a first outer diameter segment and a second outer diameter segment along the axial direction of the connecting rod; the outer diameter of the first outer diameter segment is smaller than the outer diameter of the second outer diameter segment, and the first outer diameter segment is closer to the seed crystal holder body than the second outer diameter segment; the first protective cover includes a first inner diameter segment and a second inner diameter segment along the axial direction of the connecting rod; the outer diameter of the first inner diameter segment is smaller than the inner diameter of the second inner diameter segment, the first inner diameter segment matches the first outer diameter segment, and the second inner diameter segment matches the second outer diameter segment.

[0027] In some embodiments, a second annular protective cover is provided on a surface of the protective support away from the connecting rod. The second protective cover is embedded in the protective support and is disposed around the accommodating cavity.

[0028] In some embodiments, when a seed crystal is bonded to the seed crystal bonding surface, the end of the second protective cover away from the connecting rod is in contact with the seed crystal.

[0029] In some embodiments, a first groove is provided on the surface of the protective support away from the connecting rod; the diameter of the first groove is larger than the diameter of the opening of the accommodating cavity away from the connecting rod; the first groove includes a connecting portion connected to the opening and an annular portion surrounding the connecting portion; the bottom surface of the annular portion and the seed crystal bonding surface are located on the same plane; the annular protective sleeve is provided on the bottom surface of the annular portion.

[0030] In some embodiments, the diameter of the first groove is 5 mm to 10 mm larger than the diameter of the opening.

[0031] In some embodiments, graphite paper is bonded to the seed crystal bonding surface, and the graphite paper protrudes from a side surface of the second protective cover away from the connecting rod in a direction away from the connecting rod.

[0032] One or more embodiments of the present specification provide a seed crystal bonding device, which includes one or more bonding components, and the bonding components include a supporting part and a pressure-applying part. The supporting part supports the seed crystal holder, and the pressure-applying part applies pressure, and the pressure presses the seed crystal holder and the seed crystal on the seed crystal holder toward each other.

[0033] In some embodiments, the supporting component includes a first pressure member and a second pressure member, and the pressure-applying component includes a first pressure plate; the side wall of the first pressure member includes at least one first exhaust hole; the second pressure member is nested and connected to the first pressure member; wherein, during the seed crystal bonding and fixing process, the seed crystal is placed on the upper surface of the second pressure member, and the seed crystal holder is placed on the upper surface of the seed crystal; the first pressure plate applies pressure to the seed crystal holder.

[0034] In some embodiments, the bottom of the first pressing member includes a second through hole, the bottom of the second pressing member includes a first protrusion, and the first protrusion cooperates with the second through hole to achieve a nested connection between the first pressing member and the second pressing member.

[0035] In some embodiments, the cross-sectional diameter of the first exhaust hole is comprised between 0.01 mm and 10 mm.

[0036] In some embodiments, after the first pressing member and the second pressing member are nested and connected, a vertical distance between the first exhaust hole and an upper surface of the second pressing member is in a range of 0.2 mm to 5 mm.

[0037] In some embodiments, the side wall of the second pressing member includes at least one second exhaust hole, and the first exhaust hole at least partially corresponds to the second exhaust hole.

[0038] In some embodiments, the cross-sectional diameter of the second exhaust hole is comprised between 0.01 mm and 10 mm.

[0039] In some embodiments, a vertical distance between the second exhaust hole and an upper surface of the second pressing member is in a range of 0.2 mm to 5 mm.

[0040] In some embodiments, the height of the second pressing member is smaller than the height of the first pressing member.

[0041] In some embodiments, the seed crystal holder is threadedly connected to the first pressing member.

[0042] In some embodiments, the bottom of the first pressure plate includes a second protrusion, the upper portion of the seed crystal holder includes a second groove, and the second protrusion and the second groove cooperate to achieve the connection between the first pressure plate and the seed crystal holder.

[0043] In some embodiments, the support component includes an annular base, the annular base and a cover body, and the seed crystal holder is placed on the annular base; the cover body includes an annular side wall and a cover plate, the side wall is arranged outside the annular base, and the cover body applies pressure to the seed crystal on the seed crystal holder.

[0044] In some embodiments, it also includes a first connecting member and a second connecting member, the first connecting member is arranged on the annular base, and the second connecting member is arranged on the cover body; the first connecting member and the second connecting member are detachably connected; when the first connecting member and the second connecting member are connected, the cover plate of the cover body applies pressure to the seed crystal on the seed crystal holder.

[0045] In some embodiments, a locking structure is provided on the base, and the locking structure fixes the seed crystal holder to the annular base.

[0046] In some embodiments, a connecting threaded hole is provided on the side of the seed crystal holder away from the seed crystal bonding surface, and the locking structure includes a locking disk, a locking member and a locking nut, and the locking member includes a tray, a first threaded rod and a second threaded rod, the tray supports the side of the seed crystal holder away from the seed crystal bonding surface, and the first threaded rod cooperates with the connecting threaded hole; a mounting hole is provided on the locking disk, the second threaded rod passes through the mounting hole, and the locking nut cooperates with the second threaded rod; the locking nut and the tray are respectively located on both sides of the locking disk along the axial direction of the mounting hole.

[0047] In some embodiments, the tray is made of a resilient material.

[0048] In some embodiments, a supporting structure is provided on the inner wall of the annular base, and the supporting structure includes an annular connecting plate, an annular supporting plate and an annular supporting protrusion; the outer ring of the annular supporting plate is connected to the annular connecting plate, and the inner ring of the annular supporting plate is provided with the annular supporting protrusion, and the annular supporting protrusion supports the seed crystal holder; the annular connecting plate is connected to the inner wall of the annular base.

[0049] In some embodiments, a bubble removal device is provided on the cover body, and the bubble removal device removes bubbles between the seed crystal and the seed crystal holder.

[0050] In some embodiments, the bubble removal device includes a slot, an insert plate and a roller; the slot is provided on the cover body, the insert plate is located in the slot, and the roller is provided at one end of the insert plate; the insert plate moves in the slot to drive the roller to roll the seed crystal.

[0051] In some embodiments, a pull ring is provided at the other end of the plug board.

[0052] In some embodiments, the number of the bonding components is multiple, the supporting component includes a supporting plate, the supporting plate supports the seed crystal and the seed crystal holder, and the seed crystal is located between the supporting plate and the seed crystal holder; the seed crystal bonding device also includes a support frame and a plurality of pressure driving members arranged on the support frame, the supporting plate is arranged on the support frame, the seed crystal bonding device includes multiple bonding components, and a plurality of pressure driving members are respectively connected to a plurality of the pressure components; the pressure driving member enables the pressure component to apply pressure to the seed crystal holder toward the supporting plate.

[0053] In some embodiments, the support frame includes a plurality of support rods extending along the vertical direction, and the plurality of support rods are arranged at intervals along the circumference of the support plate; a plurality of pressure-applying driving members are provided on at least one of the support rods, and the plurality of pressure-applying driving members are arranged at intervals along the vertical direction, and a plurality of seed crystal bonding assemblies are arranged at intervals along the vertical direction.

[0054] In some embodiments, the pressure-exerting drive member includes a pneumatic pressure-exerting drive member or a hydraulic pressure-exerting drive member.

[0055] In some embodiments, a pressure-transmitting medium channel is provided on the support rod on which the pressure-exerting driving member is provided, and at least one of the pressure-exerting driving members is connected to the pressure-transmitting medium channel through a valve.

[0056] In some embodiments, the support disk is rotatably disposed on the support frame, the rotation axis of the support disk is parallel to the support rod, and the seed crystal bonding device further includes a rotation driving member connected to the support disk to drive the support disk to rotate.

[0057] In some embodiments, the rotating drive member includes a magnetic element, a power source and a magnetic drive member; the magnetic drive member is magnetically coupled to the magnetic element, the magnetic element is fixed on the support disk, and the magnetic drive member is fixed on the output end of the power source; the power source drives the magnetic drive member to rotate, so as to drive the magnetic element to drive the support disk to rotate.

[0058] In some embodiments, the pressure-applying component includes a limiting pressure plate provided on the support frame, and the pressure-applying driving member includes a first sub-driving member and a second sub-driving member, and the first sub-driving member and the second sub-driving member are provided on different support rods; the first sub-driving member and the second sub-driving member are arranged at intervals along the circumference of the limiting pressure plate, and the first sub-driving member and the second sub-driving member are both connected to the limiting pressure plate.

[0059] In some embodiments, the seed crystal bonding device further includes a pressure sensor, and the pressure sensor is used to determine the pressure applied by each of the pressure-applying components.

[0060] In some embodiments, the seed crystal bonding device further includes a controller, which is signal-connected to both the valve and the pressure sensor; the controller is configured to adjust the opening of the valve based on pressure data sensed by the pressure sensor.

[0061] One or more embodiments of the present specification provide a crucible, comprising a crucible body, a drive assembly, and a temperature field maintaining disk, wherein the drive assembly comprises a drive source and a connecting mechanism, wherein the connecting mechanism is connected between the drive source and the bottom of the crucible body, and the drive assembly drives the crucible body to rotate around the axis of the crucible body relative to the temperature field maintaining disk; the temperature field maintaining disk is arranged on the connecting structure and is located between the drive source and the bottom of the crucible body.

[0062] In some embodiments, the connection mechanism includes a rotating column and a first supporting tray, the first supporting tray is provided at one end of the rotating column, and the driving source is connected to the other end of the rotating column.

[0063] In some embodiments, the first supporting tray includes a plurality of concentrically arranged stepped grooves.

[0064] In some embodiments, the connecting mechanism includes a second supporting tray, which is annular and located between the first supporting tray and the driving source. The inner ring of the second supporting tray is fixed to the outer wall of the rotating column; the second supporting tray is connected to the temperature field holding plate through a ball structure.

[0065] In some embodiments, the material of the temperature field maintaining disk is at least one of mullite, corundum and alumina.

[0066] In some embodiments, the crucible further comprises a plurality of telescopic support rods, one end of each of the telescopic support rods being connected to the bottom of the temperature field holding plate.

[0067] In some embodiments, the crucible also includes a connecting ring and a locking mechanism, and a locking hole is provided on the side wall of the connecting ring; the connecting ring is sleeved on the output shaft of the driving source and the other end of the rotating column, and the locking hole cooperates with the locking mechanism to fix the connecting ring to the output shaft of the driving source and the rotating column.

[0068] One or more embodiments of the present specification provide a crystal growth method using a seed crystal holder as described in the aforementioned embodiments, comprising the following steps: bonding a seed crystal to the seed crystal bonding surface of the seed crystal holder body; sinking the seed crystal holder with the seed crystal bonded thereto into a melt for crystal growth in a crucible, with the surface of the seed crystal on the side away from the seed crystal holder being located at the position where the melt temperature is highest; and growing the crystal using the top pulling method.

[0069] In some embodiments, a portion of the seed pedestal body is located in the melt, and another portion of the seed pedestal body is located outside the melt.

[0070] In some embodiments, the seed crystal holder can rotate around the axis of the connecting rod, and the crucible can rotate around the axis of the crucible; the axis of the connecting rod is parallel to the axis of the crucible; and growing crystals using the top-pulling method includes: controlling the seed crystal holder and the crucible to rotate in opposite directions.

[0071] In some embodiments, the rotation speed of the seed holder is 0 rpm to 20 rpm; the rotation speed of the crucible is 0 rpm to 20 rpm.

[0072] In some embodiments, the product of the rotation speed of the seed holder and the rotation speed of the crucible is 20 or 150.

[0073] In some embodiments, before sinking the seed crystal holder with the seed crystal adhered thereto into the melt for crystal growth, the method further comprises: heating the melt to 1720° C. to 1780° C.

[0074] In some embodiments, the growing crystal using the top-pulling method includes: keeping the seed crystal holder with the seed crystal adhered thereto submerged in the melt for 10 to 30 minutes; and pulling the seed crystal holder at a pulling speed of 0.01 to 0.2 mm / h to grow the crystal.

[0075] In some embodiments, the crystal growth using the upper pulling method includes: after the crystal grows for 10 hours to 30 hours, pulling the crystal away from the melt at a pulling speed of 30 mm / h-40 mm / h, and the crystal has a spacing height of 15 mm to 25 mm from the melt surface.

[0076] In some embodiments, bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body includes: making the diameter of the seed crystal larger than the diameter of the seed crystal holder body by 5mm-10mm, and the seed crystal protruding from the side surface of the protective holder away from the connecting rod by 0.1mm-0.2mm.

[0077] In some embodiments, a second annular protective cover is provided on the surface of the protective holder away from the connecting rod, the second protective cover is embedded in the protective holder, and the second protective cover is arranged around the accommodating cavity; the step of bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body includes: fitting the seed crystal to the end of the second protective cover away from the connecting rod, and bonding it to the seed crystal bonding surface of the seed crystal holder body; the crystal growth method also includes: after the crystal growth is completed, cutting the seed crystal holder along a cutting plane parallel to the seed crystal bonding surface to separate the seed crystal holder from the crystal; the cutting plane covers the seed crystal holder body, the protective holder and the second protective cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0078] This specification will be further described in the form of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. These embodiments are not limiting, and in these embodiments, like numbers represent like structures, wherein:

[0079] FIG1 is an exemplary structural diagram of a seed crystal holder according to some embodiments of the present specification;

[0080] FIG2A is an exemplary cross-sectional view of another seed pad according to some embodiments of the present specification;

[0081] FIG2B is an exemplary cross-sectional view of another seed pad according to some embodiments of the present specification;

[0082] FIG2C is an exemplary cross-sectional view of another seed pad according to some embodiments of the present specification;

[0083] FIG3 is an exemplary cross-sectional view of another seed pad according to some embodiments of the present specification;

[0084] FIG4 is an exemplary cross-sectional view of another seed pad according to some embodiments of the present specification;

[0085] FIG5 is an exemplary cross-sectional view of another seed pad according to some embodiments of the present specification;

[0086] FIG6A is an exemplary front view of a first subsection according to some embodiments of the present specification;

[0087] FIG6B is an exemplary front view of a second subsection according to some embodiments of the present specification;

[0088] FIG6C is an exemplary front view of the first subsection and the second subsection after being spliced ​​together according to some embodiments of this specification;

[0089] FIG7 is an exemplary top view of another seed crystal holder according to some embodiments of the present specification;

[0090] FIG8 is an exemplary cross-sectional view of a locking structure according to some embodiments of the present specification;

[0091] FIG9 is an exemplary bottom view of a locking structure according to some embodiments of the present specification;

[0092] FIG10 is an exemplary cross-sectional view of another seed pad according to some embodiments of the present specification;

[0093] FIG11 is an exemplary module diagram of a seed crystal bonding device according to some embodiments of this specification;

[0094] FIG12 is an exemplary structural diagram of a seed crystal bonding device according to some embodiments of this specification;

[0095] FIG13 is an exemplary structural diagram of a seed assembly according to some embodiments of the present specification;

[0096] FIG14 is an exemplary cross-sectional view of another seed crystal bonding device according to some embodiments of the present specification;

[0097] FIG15A is an exemplary structural diagram of a locking member according to some embodiments of the present specification;

[0098] FIG15B is an exemplary top view of a bubble removal device according to some embodiments of the present specification;

[0099] FIG16 is an exemplary structural diagram of another seed crystal bonding device according to some embodiments of this specification;

[0100] FIG17 is an exemplary module diagram of a crucible according to some embodiments of the present specification;

[0101] FIG18 is an exemplary structural diagram of a connection mechanism according to some embodiments of the present specification;

[0102] FIG19 is an exemplary structural diagram of a second tray according to some embodiments of the present specification;

[0103] FIG20A is an exemplary structural diagram of a telescopic support rod according to some embodiments of the present specification;

[0104] FIG20B is an exemplary structural diagram of a temperature field holding plate according to some embodiments of the present specification;

[0105] FIG21 is an exemplary structural diagram of a connection ring according to some embodiments of this specification;

[0106] FIG22 is an exemplary flow chart of a crystal growth method according to some embodiments of the present specification;

[0107] FIG23 is a schematic diagram of growing a crystal according to some embodiments of the present specification. DETAILED DESCRIPTION

[0108] To more clearly illustrate the technical solutions of the embodiments of this specification, the following briefly describes the drawings required for describing the embodiments. Obviously, the drawings described below are merely examples or embodiments of this specification. Those skilled in the art can apply this specification to other similar scenarios based on these drawings without inventive effort. Unless otherwise apparent from the context or otherwise noted, the same reference numerals in the figures represent the same structure or operation.

[0109] It should be understood that the terms "system," "device," "unit," and / or "module" used herein are a method for distinguishing different components, elements, parts, portions, or assemblies at different levels. However, if other terms can achieve the same purpose, the terms may be replaced by other expressions.

[0110] As used in this specification and claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" do not refer to the singular but also include the plural. Generally speaking, the terms "comprises" and "include" only indicate the inclusion of the steps and elements specifically identified, and these steps and elements do not constitute an exclusive list. A method or apparatus may also include other steps or elements.

[0111] FIG. 1 is a diagram illustrating an exemplary structure of a seed pad according to some embodiments of the present disclosure.

[0112] This specification provides a seed crystal holder 100, which can be used to achieve crystal growth. When preparing a crystal, it is necessary to bond the seed crystal 130 to the seed crystal holder 100. The seed crystal holder 100 can be set on the seed crystal bonding device 30, and the raw materials for preparing the crystal are placed in the crucible 400. By heating the temperature field where the seed crystal holder 100 and the crucible 400 are located, the raw materials are volatilized into gaseous components and move to the upper seed crystal 130, thereby achieving crystal growth by the liquid phase method. Among them, the aforementioned seed crystal 130 may include a semiconductor seed crystal, for example, a silicon carbide seed crystal. For more information about the seed crystal bonding device 30, please refer to Figures 12 to 16 and their related descriptions, and for more information about the crucible 400, please refer to Figures 17 to 20B and their related descriptions.

[0113] As shown in FIG1 , the seed crystal holder 100 may include a seed crystal holder body 110 and a connecting rod 120 . The seed crystal holder body 110 is used to fix the seed crystal 130 . The seed crystal holder body 110 may be made of graphite and can bond the seed crystal 130 under certain conditions (e.g., vacuuming, heating, etc.). The seed crystal holder body 110 may be configured in a columnar shape (such as the cylindrical seed crystal holder body 110 shown in FIG1 ), a table shape (such as the truncated table shape seed crystal holder body 110 shown in FIG10 ), or other feasible shapes.

[0114] The connecting rod 120 is used to connect the seed crystal holder body 110 and the driving device (such as the driving mechanism 150 described below), so that the driving device can drive the seed crystal holder body 110 to move axially along the connecting rod 120 or rotate around the axis of the connecting rod 120. As shown in Figure 1, the seed crystal holder body 110 is fixed to one end of the connecting rod 120. There are many ways to connect the seed crystal holder body 110 and the connecting rod 120. In some embodiments, a connecting threaded hole is provided on the side of the seed crystal holder body 110 away from the seed crystal bonding surface 111, and a connecting thread can be provided on the connecting rod 120. The connecting rod 120 can be threadedly connected to the seed crystal holder body 110 by matching the connecting thread with the aforementioned connecting threaded hole. The connecting rod 120 can also be connected to the seed crystal holder body 110 in other feasible connection methods. For other feasible connection methods, please refer to Figures 5 to 7 and their related descriptions.

[0115] In some embodiments, as shown in FIG1 , a seed crystal bonding surface 111 for bonding the seed crystal 130 to the seed crystal holder body 110 is provided on one side of the seed crystal holder body 110 away from the connecting rod. The seed crystal bonding surface 111 can be a plane to ensure that the seed crystal 130 can be more stably bonded to the seed crystal holder body 110. The seed crystal bonding surface 111 can be provided on the end face of the seed crystal holder body 110. For example, when the seed crystal holder body 110 is cylindrical, the seed crystal bonding surface 111 can be on the end face of the cylinder. For another example, when the seed crystal holder body 110 is truncated cone-shaped, the seed crystal bonding surface 111 can be on the end face of the truncated cone with a larger area.

[0116] In some embodiments of the present specification, by fixing the seed crystal holder body 110 in the seed crystal holder 100 to one end of the connecting rod 120, the connecting rod 120 can apply pressure to the seed crystal holder body, and the seed crystal 130 can be stably bonded to the seed crystal bonding surface 111, which helps to improve the quality of crystal growth.

[0117] In some embodiments, as shown in FIG2A , the seed crystal holder body 110 may further include a hollow first inner cavity 112, and the connecting rod 120 may further include a channel 121 for circulating a cooling medium, the channel 121 being connected to the first inner cavity 112. The first inner cavity 112 is the internal space formed by the hollow structure of the seed crystal holder body 110, and is used to collect the cooling medium to reduce the temperature of the seed crystal holder body 110. In some embodiments, the shape of the first inner cavity 112 matches the shape of the seed crystal holder body 110 so that the wall thickness of the seed crystal holder 100 is uniform, thereby achieving uniform heat transfer. For example, the seed crystal holder body 110 may be a cylinder, a cube, or a polygonal prism, and correspondingly, the shape of the first inner cavity 112 may also be a cylinder, a cube, or a polygonal prism. The connecting rod 120 may be a hollow rod to form a channel for passing the cooling medium. The cooling medium refers to a fluid used to cool the seed crystal holder, such as helium, argon, etc. In some embodiments, the cooling medium may be an inert gas (e.g., argon at room temperature).

[0118] In some embodiments of the present specification, the channel 121 in the connecting rod 120 is connected to the first inner cavity 112, and the cooling medium can enter the first inner cavity 112 of the seed crystal holder body 110 through the channel 121, thereby cooling the seed crystal holder body 110. Since the temperature of the melt in the crucible 400 is relatively high, cooling the seed crystal holder body 110 can increase the temperature gradient inside the seed crystal holder body 110, which helps to accelerate the formation of crystals.

[0119] In some embodiments, the seed crystal holder body 110 may further include a first through hole 113 communicating with the first inner cavity 112. The first through hole 113 may connect the first inner cavity 112 to the furnace chamber of the crystal growth furnace 200, and is used to discharge the cooling medium from the first inner cavity 112 into the crystal growth furnace 200. The seed crystal holder body 110 may be provided with one or more first through holes 113. The shape of the first through hole 113 may be circular, elliptical, or any other shape. In some embodiments, the first through hole 113 may be provided on any surface of the seed crystal holder body 110 except the seed crystal bonding surface 111. As shown in FIG2A , the upper wall of the seed crystal holder body 110 is provided with a plurality of first through holes 113. The first inner cavity 112 is connected to the furnace cavity through the first through hole 113, so that the cooling medium that has basically lost its effectiveness can be discharged from the first inner cavity 112 through the first through hole 113, so that new cooling medium can continuously enter the seed crystal holder body 110 through the channel 121, thereby helping to improve the cooling effect of the seed crystal holder body 110. In addition, it can also avoid the increase of internal pressure of the seed crystal holder body 110, thereby ensuring the safe use of the seed crystal holder body 110.

[0120] In some embodiments, a cooling medium diffusion structure 114 may be further provided in the first inner cavity 112. The cooling medium diffusion structure 114 may be used to assist the cooling medium in diffusing in the first inner cavity 112. For example, the cooling medium diffusion structure 114 may be a spiral blade provided at the outlet of the channel 121 in the first inner cavity 112. When the cooling medium enters the first inner cavity 112 through the channel 121, the cooling medium may exert a force on the aforementioned spiral blade, thereby causing the spiral blade to rotate, thereby driving the entering cooling medium to be scattered throughout the first inner cavity 112 along with the spiral blade. In some embodiments of the present specification, the cooling medium diffusion structure 114 helps to uniformly diffuse the cooling medium in the first inner cavity 112, thereby ensuring that each position of the seed crystal holder body 110 can be evenly cooled, making the temperature distribution within the seed crystal holder body 110 more uniform.

[0121] In some embodiments, the cooling medium diffusion structure 114 may include one or more hollow tubular structures, which may be round tubes, square tubes, or tubular structures with other cross-sectional shapes.

[0122] When the aforementioned cooling medium diffusion structure 114 includes multiple tubular structures, the inlet at one end of the aforementioned multiple tubular structures is connected to the channel 121, and the other end may include multiple outlets. The multiple outlets can respectively guide the cooling medium to multiple different positions in the first inner cavity 112, so that the cooling medium can be evenly diffused at multiple positions in the first inner cavity 112.

[0123] In some embodiments, when the crystal is generated, the temperature of the seed crystal holder body 110 can also be detected by a temperature detection device (for example, an external thermal imager) to obtain corresponding temperature information (for example, a thermal infrared image). The seed crystal holder 100 can communicate with a processor (not shown in the figure), and the aforementioned processor can be used to control the crystal generation. When the aforementioned temperature information meets the preset temperature adjustment condition, the processor can determine the position where the temperature adjustment is required based on the aforementioned temperature information. For example, the preset temperature adjustment condition can be that the temperature difference between each area in the seed crystal holder body 110 does not exceed a preset temperature difference threshold. The processor can determine the temperature distribution of the seed crystal holder body 110 based on the aforementioned temperature information. When the aforementioned temperature distribution indicates that the temperature difference between the temperature of a local position in the seed crystal holder body 110 and the temperature of other areas is greater than the aforementioned temperature difference threshold, the processor can determine the aforementioned local position as a position where temperature adjustment is required. The processor can determine the corresponding cooling medium diffusion structure 114 based on the position where temperature adjustment is required, and control the cooling medium to be input into the corresponding cooling medium diffusion structure 114 to cool the position, and continuously obtain the temperature information corresponding to the seed crystal holder body 110 after the temperature reduction treatment, until the aforementioned temperature information indicates that the aforementioned position where temperature adjustment is required does not meet the preset temperature adjustment conditions. Among them, the processor can determine the corresponding cooling medium diffusion structure 114 through the temperature adjustment correspondence table and the position where temperature adjustment is required. The aforementioned temperature adjustment correspondence table may include the temperature adjustment position corresponding to each of the multiple tubular structures in the cooling medium diffusion structure 114, that is, the position corresponding to the outlet of each of the multiple tubular structures. Some embodiments of this specification, by setting the aforementioned cooling medium diffusion structure 114 as multiple tubular structures, can adjust the local temperature in a directionally controlled manner to avoid excessive local temperature and reduce the quality of crystal generation. In addition, by monitoring the temperature of the seed crystal holder body 110, the temperature of crystal generation can be automatically adjusted, thereby effectively improving the quality of crystal generation.

[0124] When the aforementioned cooling medium diffusion structure 114 includes a tubular structure, the aforementioned tubular structure can be spirally wrapped around the inner wall of the first inner cavity 112, with one end of the inlet connected to the channel 121, and finally guided out of the first through hole 113 to the crystal growth furnace 200. For example, the aforementioned cooling medium diffusion structure 114 can be a square tube, and the aforementioned square tube can be spirally wrapped around and completely adhered to all inner walls or designated areas of the first inner cavity 112. Furthermore, the aforementioned tubular structure can also extend to the outside of the crystal growth furnace 200. It is understandable that by allowing the cooling medium to enter the first inner cavity 112 through the aforementioned tubular structure, when the tubular structure is in contact with the inner wall of the first inner cavity 112, the cooling medium in the tubular structure can cool the seed crystal holder body 110, and the cooled cooling medium can continue to be guided out of the crystal growth furnace 200 through the tubular structure. In some embodiments of the present specification, the aforementioned arrangement can prevent the cooling medium from directly contacting the seed crystal holder body 110, but can still cool the seed crystal holder body 110, thereby preventing the cooling medium from entering the seed crystal holder body 110 and causing difficulty in cleaning, blockage, etc., or entering the crystal growth furnace 200 and affecting crystal growth. In addition, the aforementioned arrangement can also improve the controllability of cooling. For example, the cooling medium can be stopped from being continuously input into the aforementioned tubular structure, so that the current cooling medium can remain at a designated location. When the cooling medium needs to be updated, new cooling medium can be continuously input into the aforementioned tubular structure. As the new cooling medium enters, the used cooling medium will flow out of the aforementioned tubular structure to ensure the controllability of the cooling process.

[0125] In some embodiments, as shown in FIG2A , the cooling medium diffusion structure 114 may include a shell 1141 , wherein a second inner cavity 1142 is formed in the shell 1141 , and the channel 121 is connected to the second inner cavity 1142 so that the cooling medium can enter the second inner cavity 1142 . The shell 1141 is provided with a plurality of diffusion holes 1143 , which connect the first inner cavity 112 and the second inner cavity 1142 so that the cooling medium in the second inner cavity 1142 can diffuse to various locations in the first inner cavity 112 through the diffusion holes 1143 . The shape of the aforementioned shell 1141 can be adapted to the first inner cavity 112 . The shell 1141 can be of various shapes, such as a rectangular parallelepiped, a cube, a cylinder, or other shapes. The material of the shell 1141 can be graphite, high-temperature ceramics, stainless steel, or the like. In some embodiments of the present specification, the cooling medium may enter the second inner cavity 1142 through the channel 121 and then enter the first inner cavity 112 through the diffusion hole 1143 , which helps the cooling medium diffuse more quickly while preventing the cooling medium from accumulating at the outlet of the channel 121 .

[0126] In some embodiments, the seed crystal holder 100 may further include a cooling device (not shown). The cooling device is a device that provides a cooling medium to the seed crystal holder body 110, and can deliver the cooling medium to the channel 121. The cooling device can output the cooling medium at a certain flow rate so that the cooling medium flows in the channel 121 at a preset flow rate. For example, the outlet of the cooling device can be connected to the channel 121, and a power structure (such as a delivery pump) can be provided in the cooling device or the channel to provide power for the cooling medium, drive it out of the cooling device, and cause the cooling medium to flow in the channel 121 toward the seed crystal holder body 110 at a preset flow rate.

[0127] In some embodiments, the preset flow rate of the cooling medium is greater than 0.4 m / s. In some embodiments, the cooling medium may be at room temperature. In other embodiments, the cooling medium may be cooled to a certain temperature, such as 10°, 15°, 20°, etc. It is worth noting that due to the high temperature inside the crystal growth furnace 200 equipped with the seed crystal holder body 110, the cooling medium with a lower flow rate may be heated. In some embodiments of this specification, by setting the preset flow rate to be greater than 0.4 m / s, the cooling medium can be prevented from being heated, thereby ensuring the cooling effect of the cooling medium on the seed crystal holder body 110.

[0128] It is understandable that since the seed crystal holder body 110 is configured to have a structure with a first inner cavity 112, the mass of the seed crystal holder body 110 is reduced, which may cause shaking. Therefore, in some embodiments of the present specification, the seed crystal holder 100 may also include a weight-increasing structure (not shown in the figure), and the weight-increasing structure may be connected to the side of the seed crystal holder body 110 away from the connecting rod 120 by welding or bonding. The weight-increasing structure can be arranged in the first inner cavity 112, or on the outer wall of the seed crystal holder body 110 (such as, on any outer wall except the seed crystal bonding surface 111). The weight-increasing structure can be used to increase the weight of the seed crystal holder body 110. The weight-increasing structure can be a variety of shapes, for example, a plate-like structure, a ring-like structure, etc. The material of the weight-increasing structure can be stainless steel, high-temperature ceramics, tungsten alloy, etc. In some embodiments of this specification, by connecting a weight-increasing structure to the seed crystal holder body 110 , the seed crystal holder body 110 can be weighted to prevent the seed crystal holder body 110 from shaking during the crystal growth process, which helps to stably generate crystals and thus ensure the quality of the grown crystals.

[0129] In some embodiments, the seed crystal holder 100 may further include a cooling structure (not shown), which may be provided on the connecting rod 120 for cooling the cooling medium in the channel 121. The cooling structure may include multiple types, such as a condenser, an expansion valve, etc. or any combination thereof. The cooling structure may be an annular structure attached to the inner wall of the connecting rod 120. When the cooling medium passes through the channel 121, the cooling structure may cool the cooling medium in the channel 121 by reducing the pressure of the cooling medium and / or exchanging heat with the cooling medium. In some embodiments of the present specification, by providing a cooling structure, the temperature of the cooling medium can be reduced, thereby preventing the cooling medium from being heated too quickly by the surrounding environment, and ensuring that the cooling medium enters the first inner cavity 112 at a lower temperature, so that the heat of the seed crystal holder body 110 can be absorbed more quickly and efficiently in the first inner cavity 112, which helps to improve the cooling effect on the seed crystal holder body 110.

[0130] In some embodiments, the cooling structure includes a cooling circuit 123, which transports a cooling fluid for cooling the cooling medium. In some embodiments, the cooling circuit 123 is arranged outside the connecting rod. As shown in Figures 2B and 2C, the cooling structure may include a cooling jacket 124, which is sleeved on the connecting rod 120, and the cooling circuit 123 is arranged on the cooling jacket 124. In some embodiments, the cooling fluid may be a coolant, for example, water. In some embodiments, the cooling circuit 123 may include an input channel and an output channel. In some embodiments, the input channel and the output channel may be parallel to the channel 121 for transporting the cooling medium. In other embodiments, in order to better cool the cooling medium, the output channel and the output channel may be spirally arranged around the channel 121 for transporting the cooling medium.

[0131] In some embodiments, as shown in FIG. 3 , the seed holder 100 may further include a driving mechanism 150 and a stirring mechanism 160 .

[0132] The driving mechanism 150 refers to a mechanism that converts other energy sources into mechanical energy and generates kinetic energy. The driving mechanism 150 can include multiple types, such as a motor, an air pressure source, a hydraulic source, etc. The driving mechanism 150 can be connected to the other end of the connecting rod 120, wherein the other end of the connecting rod 120 refers to the end away from the seed crystal holder body 110. The driving mechanism 150 can drive the seed crystal holder body 110 to rotate around the axis A of the connecting rod 120 through the connecting rod 120. By setting the driving structure 150, during the crystal growth process, the seed crystal holder 100 can rotate at a required speed to ensure stable growth of the crystal.

[0133] The stirring mechanism 160 can stir the melt 140 used for crystal growth. As shown in Figures 3 and 4, the stirring mechanism 160 can be connected to the seed crystal holder body 110. When the driving mechanism 150 drives the seed crystal holder 100 to rotate, the stirring mechanism 160 can stir the melt 140. The stirring mechanism 160 can have various shapes, such as rods, plates, or other various irregular shapes. It should be noted that during the crystal growth process, the stirring mechanism 160 needs to extend below the liquid surface of the melt 140 to achieve stirring of the melt 140.

[0134] During the crystal growth process, the seed crystal 130 and the melt 140 only contact the surface of the liquid. Therefore, the overall agitation of the melt 140 is relatively small, and the flow rate is not high. This can lead to insufficient and uneven mass transfer of the melt 140, which in turn affects the quality of crystal growth. In some embodiments of the present specification, the drive mechanism 150 drives the seed crystal holder body 110 to rotate about the axis A of the connecting rod 120. The rotation of the seed crystal holder body 110 can also drive the stirring mechanism 160 to rotate about the axis A of the connecting rod 120, thereby stirring the melt 140. This can increase the flow rate of the melt 140, help improve the mass transfer path of key substances in the melt 140, ensure uniform mass transfer, and improve crystal growth efficiency.

[0135] In some embodiments, as shown in FIG4 , the stirring mechanism 160 may include a mounting rod 161 and a stirring paddle 162 . One mounting rod 161 corresponds to one stirring paddle 162 . The stirring paddle 162 may have various shapes, such as a paddle-type stirring paddle, a disc turbine paddle, etc. The stirring paddle 162 is located on the side of the seed crystal bonding surface 111 away from the connecting rod 120 . The stirring paddle 162 may extend into the melt 140 to stir the melt 140 . As shown in FIG3 and FIG4 , the stirring mechanism 160 may include a mounting rod 161 and a stirring paddle 162 . One end of the mounting rod 161 is connected to the seed crystal holder body 110 , and the other end is connected to the stirring paddle 162 . The operation of the driving mechanism 150 can drive the seed crystal holder body 110 to rotate along the axis A, thereby driving the mounting rod 161 to rotate along the axis A. The rotation of the mounting rod 161 can drive the stirring paddle 162 connected thereto to move, so that the stirring paddle 162 stirs the melt 140 .

[0136] In some embodiments, the number of stirring mechanisms 160 can be multiple, and the multiple stirring mechanisms 160 are arranged around the seed crystal holder body. In some embodiments, the stirring mechanisms 160 can be arranged centrally and symmetrically with respect to the axis A. As shown in FIG3 , the seed crystal holder 100 can include two stirring mechanisms 160, wherein the two stirring mechanisms 160 are arranged centrally and symmetrically with respect to the axis A.

[0137] In some embodiments, the number of stirring mechanisms 160 can also be single. As shown in FIG4 , the seed crystal holder 100 can include a single stirring mechanism 160 , and the stirring paddle 162 of the single stirring mechanism 160 can include multiple blades. When the stirring mechanism 160 rotates about the axis A, the blades of the stirring paddle 162 can rotate about the center of the stirring paddle 162 , thereby increasing the flow rate of the melt 140 .

[0138] In some embodiments, the stirring mechanism 160 may be made of one or more materials such as tungsten alloy and high-temperature ceramics. The stirring mechanism 160 made of materials such as tungsten alloy and high-temperature ceramics can have high stability in the high-temperature melt 140 and effectively increase the service life of the stirring mechanism 160.

[0139] In some embodiments, the seed holder body 110 includes at least two sub-sections. As shown in Figures 6A, 6B, and 6C, the seed holder body 110 may include two sub-sections, namely, a first sub-section 115 and a second sub-section 116. The seed holder body may also include three sub-sections, four sub-sections, or another number of sub-sections. The following description will be based on an embodiment in which the seed holder body 110 includes two sub-sections.

[0140] As shown in FIG6C , for example, the first sub-section 115 and the second sub-section 116 can be assembled to form the seed crystal holder body 110. It is understood that, as previously described, the seed crystal holder body 110 can be in various shapes, such as a table or a cylinder, and its sub-sections can be shaped to correspond to the seed crystal holder body 110 after segmentation. For example, if the seed crystal holder body 110 is truncated cone or cylindrical, the first sub-section 115 and the second sub-section 116 can be in the shape of a semi-cylinder or a semi-truncated cone.

[0141] In some embodiments, the shapes and sizes of the different subsections of the seed holder body 110 may also vary. For example, the first subsection 115 may be a three-quarter cylinder, and the second subsection 116 may be a quarter cylinder. That is, the cross-sectional area of ​​the first subsection 115 perpendicular to the axis of the first subsection 115 is greater than the cross-sectional area of ​​the second subsection 116 perpendicular to the axis of the second subsection 116. For example, the cross-sectional area of ​​the first subsection 115 perpendicular to the axis of the first subsection 115 may be defined by a major arc and a straight line, while the cross-sectional area of ​​the second subsection 116 perpendicular to the axis of the second subsection 116 may be defined by a minor arc and a straight line.

[0142] The splicing of the at least two sub-sections of the seed crystal holder body 110 can mean placing and combining the at least two sub-sections in a predetermined position to form a complete seed crystal holder body 110. The at least two sub-sections of the seed crystal holder body 110 can be spliced ​​in a variety of ways. For example, the at least two sub-sections can simply be placed together in a predetermined position. In another example, one of any two adjacent sub-sections has a positioning groove and the other has a positioning protrusion. The positioning protrusion is placed in the positioning groove to achieve positioning of the two adjacent sub-sections, thereby combining the at least two sub-sections.

[0143] In some embodiments, each of the at least two sub-sections of the seed crystal holder body 110 is provided with a half groove. It should be noted that a half groove can be understood as a portion of a complete snap-in groove. The splicing of the at least two sub-sections allows the half grooves on each of the at least two sub-sections to be spliced ​​into a complete snap-in groove 170. In other words, the sub-section is a portion of the seed crystal holder body 110, and the half groove is a portion of the snap-in groove 170. By splicing the sub-sections into the seed crystal holder body 110, the snap-in groove is also spliced ​​together to form the half groove. For example, the first sub-section 115 can be provided with a first half groove 1150, and the second sub-section 116 can be provided with a second half groove 1160. The first sub-section 115 and the second sub-section 116 are spliced ​​together so that the first half groove 1150 and the second half groove 1160 are spliced ​​into the snap-in groove 170.

[0144] As shown in Figures 5 and 6A to 6C, the first half groove 1150 is located in the first sub-section 115 and is provided at the end where the first sub-section 115 is connected to the connecting rod 120. The second half groove 1160 is located in the second sub-section 116 and is provided at the end where the second sub-section 116 is connected to the connecting rod 120. In some embodiments, the structure of the second half groove 1160 can be the same as that of the first half groove 1150, and can be symmetrical with the axis A of the connecting rod 120 as the axis of symmetry. In other embodiments, the structures of the first half groove 1150 and the second half groove 1160 can be different. The first half groove 1150 and the second half groove 1160 are spliced ​​together to form a snap-fit ​​groove 170, and the connecting rod 120 and the snap-fit ​​structure 118 can be embedded in the snap-fit ​​groove.

[0145] In some embodiments, the seed tray 100 may further include a locking structure 117 and a clamping structure 118 .

[0146] As shown in Figure 5, the clamping structure 118 is provided at one end where the connecting rod 120 is connected to the seed crystal holder body 110. The clamping structure 118 can be clamped in the clamping groove so that the connecting rod 120 and the seed crystal holder body 110 are tightly connected through the clamping structure 118. The clamping structure 118 can include a variety of three-dimensional structures (such as a cube, a cylinder, etc.), and is located at one end where the connecting rod 120 is connected to the seed crystal holder body 110. The clamping structure 118 can be understood as being able to be accommodated in the clamping groove 170 and will not be separated from the clamping groove 170 after being clamped. There can be multiple ways to clamp the clamping structure 118 to the clamping groove 170. Please refer to the relevant instructions below for details.

[0147] As shown in FIG5 , a locking structure 117 is provided on the outer wall of the seed crystal holder body 110 and can secure at least two joined sub-sections (e.g., the first sub-section 115 and the second sub-section 116). In some embodiments, the locking structure 117 can include a bolt, a nut, and a protrusion structure. The protrusion structure is provided on the first sub-section 115 and the second sub-section 116. The protrusion structure has a threaded hole. The bolt can pass through the threaded hole on the protrusion structure of the first sub-section 115 and the threaded hole on the protrusion structure of the second sub-section 116 and be secured by the nut, thereby securing the first sub-section 115 and the second sub-section 116.

[0148] It is understandable that during the crystal growth process, the seed crystal holder body 110 and the connecting rod 120 are often connected by threads. The screw connection portion will produce a cavity due to the presence of a knife-back groove, and gas can enter the cavity space, thereby affecting the uniform change of the temperature gradient of the seed crystal holder body 110 and inducing the formation of a cavity on the crystal growth surface. Therefore, in some embodiments of the present specification, by configuring the seed crystal holder body 110 to include at least two sub-parts, the locking structure 117 fixes the at least two sub-parts, and the clamping structure 118 is clamped in the clamping groove, the seed crystal holder body 110 and the connecting rod 120 can be tightly connected without the existence of a space for gas to enter, thus solving the problem of the knife-back groove. Not only can the temperature of the seed crystal holder body 110 be uniformly changed, but it is also convenient for the subsequent separation of the seed crystal holder (just release the lock of the locking structure 117), greatly improving the quality of the prepared crystal.

[0149] In addition, it is worth noting that ablation of the seed crystal holder body 110 can achieve the separation of the crystal from the seed crystal holder body 110 after crystal growth. The ablation speed is related to the direction of the inner concave thread at the top of the seed crystal holder body 110 in the ablation equipment. When there is no attachment to the threaded hole at the top of the seed crystal holder body 110, the ablation speed will gradually slow down after ablation of about one-third in 12 hours against the wind. In the above embodiments of this specification, a combination surface will appear at the joints of multiple sub-parts. As shown in Figure 7, a combination surface B exists at the joint of the first sub-part 115 and the second sub-part 116. The combination surface B can play a certain guiding role in the ablation process, accelerate the ablation speed in the later stage, and help improve the efficiency of crystal holder separation.

[0150] In some embodiments, the at least two sub-sections of the seed crystal holder body 110 include a first sub-section 115 and a second sub-section 116 having identical structures. The first sub-section 115 and the second sub-section 116 are symmetrically arranged with the axis of the connecting rod as the symmetry axis. In other embodiments, when the seed crystal holder body includes three or more sub-sections, each sub-section can have the same structure and be evenly and symmetrically arranged.

[0151] Taking the seed crystal holder body including two sub-parts as an example, as shown in Figures 6A, 6B, 6C and 7, the structures of the first sub-part 115 and the second sub-part 116 can be the same, and the first sub-part 115 and the second sub-part 116 can be symmetrically arranged with the axis A of the connecting rod 120 as the symmetry axis.

[0152] In some embodiments of the present specification, at least two sub-parts of the seed holder body 110 have the same structure and are symmetrically arranged, which can facilitate production and manufacturing, and may improve the assembly efficiency of the seed holder body 110 .

[0153] As shown in Figures 5 to 7, the engaging grooves 170 are arranged along the axis A of the connecting rod 120 to form a first groove body 171 and a second groove body 172. The first groove body 171 is closer to the seed crystal bonding surface than the second groove body 172. The cross-sectional area of ​​the first groove body 171 along the axis A perpendicular to the connecting rod 120 is larger than the cross-sectional area of ​​the second groove body 172 along the axis A perpendicular to the connecting rod 120. The cross-sectional area of ​​the engaging structure 118 along the axis A perpendicular to the connecting rod 120 is larger than the cross-sectional area of ​​the connecting rod 120 along the axis A perpendicular to the connecting rod 120.

[0154] The first slot 171 is used to secure the clamping structure 118, and the second slot 172 is used to accommodate the connecting rod 120. Accordingly, the cross-sectional area of ​​the clamping structure 118 along the axis A perpendicular to the connecting rod 120 is larger than the cross-sectional area of ​​the connecting rod 120 along the axis A perpendicular to the connecting rod 120. The shape of the first slot 171 matches that of the clamping structure 118, allowing the clamping structure 118 to be clamped within the first slot 171. The shape of the second slot 172 matches that of the end of the connecting rod 120 proximate to the clamping structure 118. The end of the connecting rod 120 proximate to the clamping structure 118 is located within the second slot 172, allowing the clamping structure 118 to secure the relative position of the connecting rod 120 and the seed crystal holder body 110. In some embodiments of this specification, the connecting rod 120 and the seed crystal holder body 110 are embedded together through the clamping structure 118, which helps to avoid the aforementioned void problem caused by the existence of the backing groove and ensures a stable connection between the connecting rod 120 and the seed crystal holder body 110.

[0155] The following description uses as an example at least two sub-sections, including a first sub-section 115 (having a first half-slot 1150 thereon) and a second sub-section 116 (having a second half-slot 1160 thereon). As shown in FIG6A , the first half-slot 1150 can be divided into a first upper half-slot 1151 and a first lower half-slot 1152. As shown in FIG6B , the second half-slot 1160 can be divided into a second upper half-slot 1161 and a second lower half-slot 1162. As shown in FIG6C , the first upper half-slot 1151 and the second upper half-slot 1161 can be joined to form a first slot body 171, and the first lower half-slot 1152 and the second lower half-slot 1162 can be joined to form a second slot body 172.

[0156] In some embodiments, the clamping structure 118 can be a polyhedron. As shown in FIG7 , the cross-section of the clamping structure 118 can be a cube. In some embodiments of this specification, by configuring the clamping structure 118 in a polyhedron shape, the clamping structure 118 can be ensured to rotate synchronously with the rotation of the seed crystal holder body 110. It is understood that if the seed crystal holder body 110 does not rotate during crystal growth, the clamping structure 110 can also be a cylinder.

[0157] It should be noted that the shapes of the engaging groove 170 and the engaging structure 118 can be various, as long as the engaging structure 118 can be engaged with the engaging groove 170 and prevented from being disengaged. By way of example only, the engaging groove 170 can be a trapezoidal groove, meaning that the cross-sectional areas of the engaging groove 170 perpendicular to the axis A vary at different locations, with the engaging groove 170 having a larger cross-sectional area perpendicular to the axis A as it approaches the seed crystal bonding surface 111. Correspondingly, the engaging structure 118 can also be a quadrangular pyramid.

[0158] As shown in Figures 8 and 9, the locking structure 117 may include an annular groove 1171 and a locking ring 1172. The annular groove 1171 can be arranged around the outer wall of the seed crystal holder body 110, and the locking ring 1172 is sleeved outside the at least two sub-parts (such as the first sub-part 115 and the second sub-part 116) after splicing, and is arranged in the annular groove 1171. In some embodiments, the outer wall of the annular groove 1171 is provided with an external thread, and the inner wall of the locking ring 1172 is provided with an internal thread. The locking ring 1172 is connected to the annular groove 1171 by a threaded connection so that the locking ring 1172 is set in the annular groove. In addition, the external thread on the outer wall of the annular groove 1171 does not exceed the top of the seed crystal holder body 110 to avoid the inability to hot press in the later stage.

[0159] The bottom of the locking ring 1172 and the annular groove 1171 in the locking structure 117 can fit with the seed crystal holder body 110. The locking ring 1172 surrounds the seed crystal holder body 110 at the outer wall of the seed crystal holder body 110, and can lock at least two spliced ​​sub-sections (such as the first sub-section 115 and the second sub-section 116), fix and restrict the seed crystal holder body 110, and achieve the fixation of at least two sub-sections, thereby ensuring a tight connection between the seed crystal holder body 110 and the connecting rod 120, and the locking operation is simple and convenient.

[0160] In some embodiments, the seed crystal holder 100 may further include a protective holder 180 for protecting the seed crystal holder body 110. As shown in FIG10 , the seed crystal holder 100 may further include an annular protective holder 180, wherein a receiving cavity 184 matching the shape of the seed crystal holder body 110 is provided in the protective holder 180, and the protective holder 180 may be arranged around the seed crystal holder body 110. In addition, the protective holder 180 may also surround one end of the seed crystal holder body 110 connected to the connecting rod 120. The aforementioned receiving cavity 184 may accommodate the seed crystal holder body 110, and the seed crystal holder body 110 may fit tightly against the inner wall of the receiving cavity 184. The protective holder 180 may be made of graphite material. The side of the protective support 180 close to the connecting rod 120 is the upper surface, and the upper surface of the protective support 180 is provided with a third through hole. The shape of the third through hole can match the shape of the connecting rod 120 (for example, the connecting rod 120 is a cylindrical rod, and the third through hole can be a cylindrical hole). The third through hole is connected to the aforementioned accommodating cavity 184. The aperture of the third through hole matches the outer diameter of the outer wall of the connecting rod 120 along the axial direction of the connecting rod 120. The third through hole can be set with the axis A of the connecting rod 120 as the axis. The connecting rod 120 can pass through the third through hole on the upper surface of the protective support 180 and be connected to the seed crystal support body 110 in a variety of ways (for example, threaded connection, snap connection, the methods described in the above embodiments, etc.).

[0161] It is worth noting that when the top seed crystal 130 is pulled and grown, the contact area between the seed crystal holder body 110 and the seed crystal 130 is coated with volatiles, and a layer of adhesion is formed on the surface of the seed crystal holder body 110. This not only makes it impossible to directly separate the seed crystal holder, but the adhesion layer also affects the absorption and release of heat by the seed crystal holder 110, affecting the growth and quality of the crystal. In some embodiments of this specification, the protective holder 180 surrounds the seed crystal holder 110 to prevent the formation of an adhesion layer on the surface of the seed crystal holder body 110, thereby controlling the axial and radial temperature gradients of the seed crystal holder body 110, and thereby improving the quality and morphological stability of the crystal.

[0162] In some embodiments, the seed crystal holder 100 may further include an annular first protective sleeve 181, which is sleeved over the connecting rod 120 and located between the connecting rod 120 and the protective sleeve 180. The first protective sleeve 181 can be used to prevent volatile substances from entering between the seed crystal holder body 110 and the connecting rod 120, and between the protective sleeve 180 and the connecting rod 120. As shown in FIG10 , the first protective sleeve 181 can be an annular cylinder with a hollow interior. The inner wall of the first protective sleeve 181 wraps around the connecting rod 120, the outer wall is connected to the surface of the protective sleeve 180, and the bottom surface is embedded in the protective sleeve 180. The upper surface of the protective sleeve 180 can be provided with an annular groove, the size of which is adapted to the first protective sleeve 181, so that the outer wall and bottom surface of the first protective sleeve 181 fit in the annular groove.

[0163] As shown in Figure 10, the connecting rod 120 may include a first outer diameter section r3 and a second outer diameter section r2 along the axial direction of the connecting rod 120. The outer diameter of the first outer diameter section r3 is smaller than the outer diameter of the second outer diameter section r2, and the first outer diameter section r3 is closer to the seed crystal holder body 110 than the second outer diameter section r2. Correspondingly, the first protective sleeve 181 may include a first inner diameter section r4 and a second inner diameter section r1 along the axial direction of the connecting rod 120. The first inner diameter section r4 is smaller than the inner diameter of the second inner diameter section r1, and the first inner diameter section r4 is closer to the seed crystal holder body 110 than the second inner diameter section r1. The first inner diameter section r4 may match the first outer diameter section r3, and the second inner diameter section r1 may match the second outer diameter section r2. As shown in Figure 10, the first protective cover 181 can connect the connecting rod 120 with the protective support 180. The first inner diameter section r4 and the second inner diameter section r1 of the first protective cover 181 are respectively fitted with the connection parts of the first outer diameter section r3 and the second outer diameter section r2 in the connecting rod 120. The outer wall of the first protective cover 181 is connected to the protective support 180, and the bottom surface is embedded in the protective support 180.

[0164] In some embodiments of this specification, the connecting rod 120 and the protective holder 180 are connected by the first protective cover 181, which can more effectively prevent volatile substances from entering between the seed crystal holder body 110 and the connecting rod 120, and between the protective holder 180 and the connecting rod 120 to cause adhesion, thereby facilitating crystal separation by cutting or ablation.

[0165] In some embodiments, a second annular protective cover 182 may be provided on a surface of the protective support 180 away from the connecting rod 120 . The second protective cover 182 is embedded in the protective support 180 and surrounds the accommodating cavity 184 .

[0166] As shown in Figure 10, when the seed crystal 130 is bonded to the seed crystal bonding surface 111, the end of the second protective cover 182 away from the connecting rod 120 can be fitted with the side of the seed crystal 130 close to the connecting rod 120 to prevent volatile substances from entering between the seed crystal holder body 110 and the connecting rod 120, and between the protective holder 180 and the connecting rod 120 to cause adhesion.

[0167] In some embodiments of this specification, the second protective cover 182 can prevent volatiles of the melt 140 from entering the seed crystal holder body 110 to corrode the graphite paper or the seed crystal holder body 110 , and can also ensure that the seed crystal 130 is not subjected to force during pulling, thereby preventing the seed crystal 130 from falling off.

[0168] In some embodiments, the ratio of the axial height of the second protective cover 182 along the connecting rod 120 to the diameter of the seed crystal bonding surface 111 of the seed crystal holder body 110 is 3:150. By setting the ratio of the axial height of the second protective cover 182 to the diameter of the seed crystal bonding surface 111, the size of the second protective cover 182 can be ensured to provide a more effective protective effect.

[0169] In some embodiments, a first groove 183 may be provided on the surface of the protective holder 180 on the side away from the connecting rod 120. The diameter of the first groove 183 is greater than the diameter L of the opening of the accommodating cavity 184 on the side away from the connecting rod 120. As shown in FIG10 , the first groove 183 includes a connecting portion 1831 communicating with the opening and an annular portion 1832 surrounding the connecting portion. The bottom surface of the annular portion 1832 (i.e., the upper surface of the first groove) is coplanar with the seed crystal bonding surface 111. The annular portion 1832 of the first groove 183 matches the shape of the second protective cover 182, which is disposed on the bottom surface of the annular portion 1832 of the first groove 183.

[0170] In the embodiments of the present specification, the first groove 183 allows the second protective cover 182 to be embedded in the protective holder, further preventing volatile substances from entering between the seed crystal holder body 110 and the connecting rod 120, and between the protective holder 180 and the connecting rod 120, causing adhesion. In addition, because the bottom surface of the annular portion 1832 (i.e., the upper surface of the first groove) and the seed crystal bonding surface 111 are located on the same plane, part of the seed crystal can be bonded to the bottom surface of the annular portion 1832 and fit with the second protective cover 182. The size of the first groove 183 can basically match the size of the seed crystal, and can also facilitate the operator to determine the bonding position of the seed crystal to a certain extent, ensuring the concentricity of the seed crystal and the seed crystal holder 100.

[0171] In some embodiments, the diameter of the first groove 183 is 5 mm to 10 mm larger than the diameter of the opening to facilitate the arrangement of the annular portion and facilitate the embedding of the second protective cover 182 into the protective holder 180 , thereby ensuring that the seed crystal can be more stably bonded.

[0172] In some embodiments, graphite paper 119 may be adhered to the seed crystal bonding surface 111. The graphite paper 119 may be used to fix the seed crystal 130. The size of the graphite paper 119 may be adapted to the seed crystal bonding surface 111 so that the graphite paper 119 is completely adhered to the seed crystal bonding surface 111. The graphite paper 119 may be adhered to the seed crystal bonding surface 111 by hot melt adhesive. The graphite paper 119 protrudes from the lower surface of the second protective cover 182 in a direction away from the connecting rod 120 (i.e., direction D as shown in FIG10 ). For example, the graphite paper 119 may protrude from the side surface of the second protective cover 182 away from the connecting rod 120 by 0.1 mm to 0.2 mm in a direction away from the connecting rod 120 to ensure that the seed crystal 130 may protrude from the lower surface of the protective support 180 in a direction away from the connecting rod 120. It is worth noting that after the seed crystal 130 contacts the melt 140, it begins to grow at a certain rate. Over time, corrosion of the crucible wall and evaporation of the melt 140 may cause the liquid level of the melt 140 to gradually decrease. This causes the relative speed at which the seed crystal 130 deviates from the melt 140 surface to gradually increase, making it impossible to grow at the specified pulling rate. In some embodiments of this specification, graphite paper is placed on the side of the protruding second protective cover 182 away from the connecting rod 120. This ensures that the seed crystal 130 is in full contact with the liquid level of the melt 140, allowing the crystal to grow at the specified pulling rate.

[0173] In some embodiments, the seed crystal holder 100 may be disposed in a seed crystal bonding device 30 , and the seed crystal bonding device 30 may bond the seed crystal 130 based on the seed crystal holder 100 . The seed crystal bonding device 30 may be used to bond the seed crystal 130 .

[0174] FIG. 11 is an exemplary structural diagram of a seed crystal bonding device 30 according to some embodiments of the present disclosure.

[0175] As shown in FIG. 11 , the seed crystal bonding device 30 may include one or more bonding assemblies 300 . The bonding assemblies 300 may include a supporting component 310 and a pressure applying component 320 .

[0176] The support member 310 can be used to support the seed crystal holder 100. For example, the support member 310 can be used to support the seed crystal holder body 110. For another example, the support member 310 can also be used to support the seed crystal holder body 110 and the connecting rod 120. The support member 310 can include a support frame made of metal, stainless steel, or other materials, and the structures in the seed crystal holder 100 that need to be supported can be fixed to the support frame.

[0177] The pressure applying component 320 may apply pressure to the seed crystal 130 and / or the seed holder 100 , and the pressure may press the seed holder 100 and the seed crystal 130 on the seed holder 100 toward each other.

[0178] In some embodiments of the present specification, a seed crystal bonding device 30 having one or more bonding components 300 is provided, which can not only press the seed crystal holder 100 and the seed crystal 130 toward each other during the bonding process, but also fix the seed crystal holder 100, making the bonding process more stable, thereby improving the bonding effect of the seed crystal 130.

[0179] As shown in Figure 12, the seed crystal bonding device 30 may also include a vacuum furnace chamber 31, a vacuum assembly 32, a column 33, a motor 34, a screw 35, a pressure column 36, a support assembly 37, a heating assembly 38, and a lower pressure plate 39. Among them, the vacuum furnace chamber 31 can be a place for bonding the seed crystal 130, and the vacuum assembly 32 can be used to vacuum the vacuum cranial cavity 31. The column 33 can be arranged at the top of the vacuum cavity 31, and the motor 34 can be fixedly arranged (for example, bolted, welded) on the column 33. The screw 35 can be rotatably connected to the motor 34. When the motor 34 is running, the screw 35 can rotate around the central axis and move up and down. The upper end of the pressure column 36 can be connected to the lower end of the screw 35. When the screw 35 rotates and moves up and down, the pressure column 36 can also move up and down. When the pressure column 36 moves downward, it can apply pressure to the bonding assembly 300. The support assembly 37 can be placed at the bottom of the seed crystal bonding device 30 to support the heating assembly 38 and the lower pressure plate 39. The heating assembly 38 can be arranged between the support assembly 37 and the lower pressure plate 39 to provide the heat required for bonding the seed crystal 130. The lower pressure plate 39 can be placed on the upper surface of the heating assembly 38, and the bonding assembly 300 can be placed on the upper portion of the lower pressure plate 39 to cooperate with the pressure column 36 to apply pressure to the bonding assembly 300 to bond the seed crystal 130 to the seed crystal holder 100. The seed crystal holder 100 and the seed crystal 130 can be placed in the bonding assembly 300. Other components within the seed crystal bonding device 30 (e.g., the vacuum assembly 32, the pressure column 36, the heating assembly 38, and the lower pressure plate 39) evacuate the vacuum chamber 31 and apply pressure to the bonding assembly 300 to bond the seed crystal 130 to the seed crystal holder 100, thereby allowing crystal growth to proceed.

[0180] In some embodiments, the support component 310 includes a first pressing member 380 and a second pressing member 390, and the pressure-applying component 320 includes a first pressure plate 322. The second pressing member 390 is nested with the first pressing member 380. During the bonding and fixing process of the seed crystal 130, the seed crystal 130 is placed on the upper surface of the second pressing member 390, and the seed crystal holder 100 is placed on the upper surface of the seed crystal 130. The first pressure plate 322 can apply pressure to the seed crystal holder 100 to ensure that the seed crystal 130 is bonded to the seed crystal holder 100.

[0181] The sidewall of the first pressing member 380 may include at least one first vent hole 383. The at least one first vent hole 383 may horizontally penetrate the sidewall of the first pressing member 380. The at least one first vent hole 383 may be evenly and symmetrically distributed on the sidewall of the first pressing member 380. The at least one first vent hole 383 may be located at the same height in the vertical direction.

[0182] As shown in Figure 13, the shape of the first pressing member 380 can be a cylinder with an internal cavity 381. For example, a cylinder, a cube or a polygonal prism with an internal cavity. The shape of the internal cavity of the first pressing member 380 can be a cylinder, a cube or a polygonal prism. The shape of the second pressing member 390 can be a cylinder, a cube or a polygonal prism. The shape and / or size of the internal cavity of the first pressing member 380 is compatible with the shape and / or size of the second pressing member 390, so that the second pressing member 390 can be placed in the first pressing member 380 without moving significantly (for example, the movable amount is less than a preset threshold). Specifically, the shape and / or size of the internal cavity of the first pressing member 380 and the shape and / or size of the second pressing member 390 can be adapted to each other by: the shape of the internal cavity of the first pressing member 380 is consistent or substantially consistent with the shape of the outer wall of the second pressing member 390; the size of the internal cavity of the first pressing member 380 is slightly larger than the size of the outer wall of the second pressing member 390; and the difference between the size of the internal cavity of the first pressing member 380 and the size of the outer wall of the second pressing member 390 is less than a first preset size threshold (e.g., 3 mm). The first preset size threshold can be a default value or can be adjusted according to different circumstances. For example, if the outer wall of the second pressing member 390 is cylindrical, then the shape of the internal cavity of the first pressing member 380 is also cylindrical, and the diameter of the internal cavity of the first pressing member 380 is slightly larger than the diameter of the outer wall of the second pressing member 390 (e.g., the diameter of the outer wall of the second pressing member 390 is 15 cm, and the diameter of the internal cavity of the first pressing member 380 is 15.3 cm).

[0183] By setting the shape and / or size of the internal cavity of the first pressing piece 380 to match the shape and / or size of the second pressing piece 390, the second pressing piece 390 can be placed in the first pressing piece 380 without significant movement, and the nested connection between the first pressing piece 38 and the second pressing piece 390 is more stable.

[0184] In some embodiments, the bottom of the first pressing piece 380 includes a second through hole 382 , and the bottom of the second pressing piece 390 includes a first protrusion 391 . The first protrusion 391 cooperates with the second through hole 382 to achieve a nested connection between the first pressing piece 380 and the second pressing piece 390 .

[0185] As shown in Figure 13, the shape of the second through hole 382 can be a cylinder, a cube, or a polygonal prism. For ease of installation, the second through hole 382 can be a cylinder. In some embodiments, the diameter of the second through hole 382 can be 5mm-150mm. In some embodiments, the diameter of the second through hole 382 can be 8mm-140mm. In some embodiments, the diameter of the second through hole 382 can be 10mm-130mm. In some embodiments, the diameter of the second through hole 382 can be 20mm-120mm. In some embodiments, the diameter of the second through hole 382 can be 30mm-110mm. In some embodiments, the diameter of the second through hole 382 can be 40mm-100mm. In some embodiments, the diameter of the second through hole 382 can be 50mm-90mm. In some embodiments, the diameter of the second through hole 382 can be 60mm-80mm. In some embodiments, the diameter of the second through hole 382 can be 70mm-75mm.

[0186] The shape of the first protrusion 391 can be a cylinder, a cube or a polygonal prism. The first protrusion 391 and the second through hole 382 can be concentrically arranged. The shape and / or size of the second through hole 382 are adapted to the shape and / or size of the first protrusion 391, so that the first protrusion 391 can be placed in the second through hole 382 and does not move significantly (for example, the movable amount is less than a preset threshold). Specifically, the shape and / or size of the second through hole 382 are adapted to the shape and / or size of the first protrusion 391, and the shape of the first protrusion 391 and the shape of the second through hole 382 can be consistent or substantially consistent, and the size of the second through hole 382 is slightly larger than the size of the first protrusion 391 and the difference between the size of the second through hole 382 and the size of the first protrusion 391 is less than a second preset size threshold (such as 3mm). The second preset size threshold can be a default value, or it can be adjusted according to different circumstances. For example, if the first protrusion 391 is shaped like a cylinder, the second through hole 382 is also shaped like a cylinder, and the diameter of the second through hole 382 is slightly larger than the diameter of the first protrusion 391 (for example, the diameter of the first protrusion 391 is 5 cm, and the diameter of the second through hole 382 is 5.3 cm).

[0187] By setting the shape and / or size of the second through hole 382 to match the shape and / or size of the first protrusion 391, the second pressure piece 390 can be placed in the first pressure piece 380 and the first protrusion 391 and the second through hole 382 cooperate with each other to achieve a nested connection between the first pressure piece 380 and the second pressure piece 390, thereby making the overall structural connection of the adhesive assembly 300 more stable.

[0188] In some embodiments, when the cross-section of the first vent hole 383 is circular, the cross-sectional diameter of the first vent hole 383 may be 0.01 mm to 10 mm. In some embodiments, when the cross-section of the first vent hole 383 is circular, the diameter of the first vent hole 383 may be 0.1 mm to 9 mm. In some embodiments, when the cross-section of the first vent hole 383 is circular, the diameter of the first vent hole 383 may be 1 mm to 8 mm. In some embodiments, when the cross-section of the first vent hole 383 is circular, the diameter of the first vent hole 383 may be 2 mm to 7 mm. In some embodiments, when the cross-section of the first vent hole 383 is circular, the diameter of the first vent hole 383 may be 3 mm to 6 mm. In some embodiments, when the cross-section of the first vent hole 383 is circular, the diameter of the first vent hole 383 may be 4 mm to 5 mm. By properly setting the size of the first vent hole 383, the exhaust effect during the bonding and fixing process of the seed crystal 130 can be enhanced, thereby improving the bonding and fixing effect and improving the quality of the prepared crystal.

[0189] In some embodiments, after the first pressing member 380 and the second pressing member 390 are nested, the vertical distance between the first vent hole 383 and the upper surface of the second pressing member 390 is within a range of 0.2-5 mm. In some embodiments, after the first pressing member 380 and the second pressing member 390 are nested, the vertical distance between the first vent hole 382 and the upper surface of the second pressing member 390 can be within a range of 0.5 mm-4.5 mm. In some embodiments, after the first pressing member 380 and the second pressing member 390 are nested, the vertical distance between the first vent hole 383 and the upper surface of the second pressing member 390 can be within a range of 1 mm-4 mm. In some embodiments, after the first pressing member 380 and the second pressing member 390 are nested, the vertical distance between the first vent hole 383 and the upper surface of the second pressing member 390 can be within a range of 2 mm-3 mm. By controlling the vertical distance between the first vent hole 383 and the upper surface of the second pressing member 390, the venting effect during the bonding and fixing process of the seed crystal 130 can be enhanced, thereby improving the bonding and fixing effect and improving the quality of the prepared crystal.

[0190] In some embodiments, the sidewall of the second pressing member 390 includes at least one second vent hole 393. As shown in FIG13 , the at least one second vent hole 393 can horizontally penetrate the sidewall of a slot 392 on the second pressing member 390. The slot 392 is used to accommodate the seed crystal 130. The at least one second vent hole 393 can be evenly and symmetrically distributed on the sidewall of the slot 392 and can be located at the same height in the vertical direction.

[0191] The first vent hole 383 at least partially corresponds to the second vent hole 393. This at least partially corresponds to the first vent hole 383 at least partially. After the first pressing member 380 and the second pressing member 390 are nested and connected, the first vent hole 383 and the second vent hole 393 partially or completely overlap. Alternatively, after the first pressing member 380 and the second pressing member 390 are nested and connected, the first vent hole 383 and the second vent hole 393 are concentrically arranged. The size of the first vent hole 383 and the size of the second vent hole 393 can be the same or different.

[0192] In some embodiments of this specification, the first exhaust hole 383 and the second exhaust hole 393 are at least partially aligned with each other, which can improve the exhaust effect during the bonding process of the seed crystal 130 and help improve the quality of the prepared crystal.

[0193] In some embodiments, the cross-sectional diameter of the second vent hole 393 may be 0.01 mm to 10 mm to improve the venting effect during the bonding process of the seed crystal 130. In some embodiments, when the cross-sectional area of ​​the second vent hole 393 is circular, the diameter of the second vent hole 393 may be 1 mm to 8 mm. In some embodiments, when the cross-sectional area of ​​the second vent hole 393 is circular, the diameter of the second vent hole 393 may be 2 mm to 7 mm. In some embodiments, when the cross-sectional area of ​​the second vent hole 393 is circular, the diameter of the second vent hole 393 may be 3 mm to 6 mm. In some embodiments, when the cross-sectional area of ​​the second vent hole 393 is circular, the diameter of the second vent hole 393 may be 4 mm to 5 mm.

[0194] In some embodiments, the vertical distance between the second vent hole 393 and the upper surface of the second pressing member 390 is in the range of 0.2 mm to 5 mm to improve the exhaust effect during the bonding process of the seed crystal 130. In some embodiments, the vertical distance between the second vent hole 393 and the upper surface of the second pressing member 120 can be in the range of 0.5 mm to 4.5 mm. In some embodiments, the vertical distance between the second vent hole 393 and the upper surface of the second pressing member 390 can be in the range of 1 m to 4 m. In some embodiments, the vertical distance between the second vent hole 393 and the upper surface of the second pressing member 390 can be in the range of 2 m to 3 m.

[0195] In some embodiments, the height of the second pressing member 390 may be smaller than that of the first pressing member 380 , so that after the second pressing member 390 is nested with the first pressing member 380 , the second pressing member 390 may be located in the internal cavity 381 of the first pressing member 380 .

[0196] In some embodiments, the seed crystal holder 100 and the first pressing member 380 can be threadedly connected. The upper sidewalls of the inner cavity 381 of the first pressing member 380 can be provided with a threaded structure, and the sidewalls of the seed crystal holder 100 can also be provided with a threaded structure. After the seed crystal holder 100 and the first pressing member 380 are threadedly connected, the second pressing member 390 can be positioned within the cavity enclosed by the seed crystal holder 100 and the first pressing member 380.

[0197] In some embodiments, the bottom of the first pressure plate 322 includes a second protrusion 3221 , and the upper portion of the seed crystal holder 100 includes a second groove 3222 . The second protrusion 3221 and the second groove 3222 cooperate to achieve the connection between the first pressure plate 380 and the seed crystal holder 100 .

[0198] The second protrusion 3221 may be shaped like a cylinder, a cube, or a polygonal prism. The sidewall of the second protrusion 3221 may be provided with a threaded structure, the inner sidewall of the second groove 3222 may be provided with a threaded structure, and the second protrusion 3221 and the second groove 3222 may be threadedly connected. By providing the second groove 3222 and the second protrusion 3221 with a threaded connection, the second groove 3222 and the second protrusion 3221 cooperate with each other to achieve the connection between the first pressure plate 322 and the seed crystal holder 100, thereby achieving the extrusion and exhaust of the seed crystal 130 and the adhesive in stages at different temperatures or pressures, so as to better bond the seed crystal 130 to the seed crystal holder 100.

[0199] In some embodiments, the support component 310 may further include an annular base 311 and a cover 312, and the seed crystal holder 100 may be placed on the annular base 311. The annular base 311 may be cylindrical, and the diameter of the annular base 311 may be larger or smaller than the maximum diameter of the seed crystal holder 100 (i.e., the diameter of the seed crystal bonding surface 111). When the diameter of the annular base 311 is larger than the maximum diameter of the seed crystal holder 100, the seed crystal bonding surface 111 can be placed stably on the annular base 311. When the diameter of the annular base 311 is smaller than the maximum diameter of the seed crystal holder 100, the outer surface of the seed crystal holder 100 can be placed on the annular base 311. The cover 312 may also be cylindrical. As shown in FIG. 14 , the cover 312 includes an annular sidewall 3121 and a cover plate 3122. The sidewall 3121 may be mounted on the outside of the annular base 311. In some embodiments, the inner wall of the sidewall 3121 may be aligned with the outer wall of the annular base 311. The cover plate 3122 can be cylindrical with a hollow interior and is located at the upper end of the annular base 311 as shown in Figure 14. The cross-sectional area of ​​the cover plate 3122 along the axis A perpendicular to the seed crystal holder 100 is greater than the cross-sectional area of ​​the bottom surface of the annular base 311 along the axis A perpendicular to the seed crystal holder 100. The cover 312 can apply pressure to the seed crystal 130 attached to the seed crystal holder 100 toward the annular base 311. In some embodiments of this specification, the annular base 311 secures the seed crystal holder 100 while the cover 312 applies pressure to the seed crystal 130, pressing the seed crystal 130 against the seed crystal holder 100, thereby achieving quick and convenient bonding of the seed crystal 130.

[0200] In some embodiments, the seed crystal bonding device 30 may further include a first connecting member 331 and a second connecting member 332 , wherein the first connecting member 331 may be disposed on the annular base 311 , and the second connecting member 332 may be disposed on the cover 312 .

[0201] The first connecting member 331 can be detachably connected to the second connecting member 332. As shown in FIG14 , the first connecting member 331 can be a structure such as a snap ring, a hook, or a snap block located on the side wall of the annular base 311. The second connecting member 332 can include a positioning protrusion 3321 and a snap 3322. The positioning protrusion 3321 can be provided on the lower surface or side surface of the side wall 3121 of the cover 312 as shown in FIG14 , and is used to secure the second connecting member 332 to the cover 312. The snap 3322 can be rotatably connected to the fixing protrusion 3321 and can be snapped into the first connecting member 331 to connect the first connecting member 331 to the second connecting member 332. At this time, the cover plate 3122 of the cover 312 applies pressure to the seed crystal 130 on the seed crystal holder 100 to bond the seed crystal 130. When the buckle 3322 is separated from the first connecting member 331 , the first connecting member 331 and the second connecting member 332 are separated.

[0202] In some embodiments, the first connecting member 331 and the second connecting member 332 can be connecting ropes, one end of the first connecting member 331 is wrapped around the outer peripheral side of the annular base 331, one end of the second connecting member 332 is wrapped around the lower surface or side surface of the side wall 3121 of the cover body 312, and the other end of the first connecting member 331 is connected to the other end of the second connecting member 332.

[0203] The seed crystal bonding device 30 may include a plurality of first connecting members 331 and a plurality of second connecting members 332, wherein the plurality of first connecting members 331 and the plurality of second connecting members 332 are matched with each other in a one-to-one correspondence. As shown in FIG14 , the seed crystal bonding device 30 may include two first connecting members 331 and two second connecting members 332, wherein each first connecting member 331 is matched with one second connecting member 332.

[0204] In some embodiments of this specification, the first connector 331 and the second connector 332 facilitate quick connection of the cover 312 and the annular base 311, thereby applying pressure to the seed crystal holder 100. Furthermore, by providing a detachable connection between the first connector 331 and the second connector 332, misalignment between the seed crystal holder 100 and the seed crystal 130 caused by a fixed connection can be avoided, thereby improving the bonding effect.

[0205] In some embodiments, the annular base 311 may further include a locking structure 340. The locking structure 340 can be used to secure the seed holder 100 to the annular base 311, thereby improving the stability of the seed holder 100 during the crystal growth process and enhancing the quality of the resulting crystal. For example, the locking structure 340 can include a latch. The seed holder 130 and the sidewall 3121 may include a latch hole with a position and size matching that of the latch. The latch can be inserted into the latch hole, thereby securing the seed holder 100 to the annular base 311.

[0206] In some embodiments, a threaded connection hole is provided on the side of the seed crystal holder 100 away from the seed crystal bonding surface 111, and the locking structure 340 includes a locking disc 341, a locking member, and a locking nut 343. As shown in FIG15A , the locking member may include a tray 3421, a first threaded rod 3422, and a second threaded rod 3423. The first threaded rod 3422 and the second threaded rod 3423 may be located on opposite sides of the tray 3421 in the thickness direction. As shown in FIG14 , the first threaded rod 3422 may be inserted into the threaded connection hole (not shown) and then threadedly connected to the seed crystal holder 100. In some embodiments, a threaded hole (not shown) may be provided in the tray 3421 to allow for threaded connection with the first threaded rod 3422, thereby supporting the side of the seed crystal holder 100 away from the seed crystal bonding surface 111. In other embodiments, the first threaded rod 3422 may be fixed to the tray 3421 by adhesive bonding, welding, or other fixed connection methods. The second threaded rod 3423 can be located on a side of the tray 3421 away from the seed crystal bonding surface 111 and can be threadedly connected to the tray 341. The locking disk 341 can be located on a side of the tray 3421 away from the seed crystal bonding surface 111. The locking disk 341 can be a circular disk that fits against the inner wall of the annular base 311. The locking disk 341 can be provided with a mounting hole, and the second threaded rod 3423 can pass through the aforementioned mounting hole to engage with the locking nut 343. The locking nut 343 and the tray 3421 can be located on either side of the locking disk 341 along the axial direction of the mounting hole (same as the thickness direction of the tray 3421). The axial direction of the mounting hole can be the same as the direction of the axis A of the seed crystal holder 100. In some embodiments of this specification, the connecting threaded hole of the seed crystal holder 100 and the locking plate 341 are connected by a locking member and fixed by a locking nut 343, so that the seed crystal holder 100 can be fixed on the annular base 311 more stably. At the same time, the cooperation between the locking plate 341 and the annular base 311 is conducive to improving the concentricity of the seed crystal holder 100 and the seed crystal 130.

[0207] In some embodiments, the tray 341 can be made of an elastic material (eg, rubber, plastic) to absorb pressure or friction of the seed holder 100 during rotation, thereby achieving a buffering effect and preventing the seed holder body 110 from being damaged during the hot pressing process.

[0208] In some embodiments, a supporting structure 350 may be further provided on the inner wall of the annular base 311. As shown in FIG14 , the supporting structure 350 may include an annular connecting plate 351, an annular supporting plate 352, and an annular supporting protrusion 353.

[0209] The annular connecting plate 351 can be used to connect to the inner wall of the annular base 311. The outer wall of the annular connecting plate 351 can conform to the inner wall of the annular base 311, and its shape can be adapted to the shape of the inner wall of the annular base 311. For example, if the inner wall of the annular base 311 is cylindrical, the annular connecting plate 351 can be a corresponding ring. The inner wall of the annular base 311 can be provided with a snap-fitting groove that matches the annular connecting plate 351, and the annular connecting plate 351 can be inserted into the snap-fitting groove.

[0210] The shape of the annular support plate 352 can be adapted to the shape of the annular connecting plate 351. For example, if the annular connecting plate 351 is a circular ring, the annular support plate 352 can be a corresponding circular ring. The outer ring of the annular support plate 352 is connected to the annular connecting plate 351, and the inner ring is provided with an annular support protrusion 353.

[0211] The annular support protrusion 353 can be used to support the seed crystal holder 100. Its cross-section can be semicircular or other shapes (e.g., inverted conical). The annular support protrusion 353 can be made of an elastic material (e.g., rubber) to absorb pressure or friction during rotation of the seed crystal holder 100, achieving a buffering effect and helping to protect the seed crystal holder body 110 during the hot pressing process.

[0212] In some embodiments of this specification, the supporting structure 350 is provided to help support the seed crystal holder 100 more stably, effectively reducing the displacement of the seed crystal holder 100 after being compressed. The annular supporting protrusion 353 is conducive to supporting seed crystal holders 100 with different tapers.

[0213] Glue is used to bond the seed crystal 130 to the seed crystal holder 100. The viscous glue can generate bubbles during the bonding process. In some embodiments, the seed crystal bonding surface 111 can be provided with a coating. The coating can be a thermoplastic (such as polytetrafluoroethylene) to maintain the smoothness of the seed crystal bonding surface 111, thereby better discharging bubbles generated during extrusion.

[0214] In some embodiments, the seed crystal bonding device may further include a bubble removal device. In some embodiments, the bubble removal device may be disposed on the cover 312 and may be used to remove bubbles between the seed crystal 130 and the seed crystal holder 100. The bubble removal device may be disposed between the cover 312 and the seed crystal holder 100. In other embodiments, the bubble removal device may include a device that drives the seed crystal holder to rotate (such as a rotary drive member 370 shown in FIG. 16 below; for more information about the rotary drive member 370, see FIG. 16 and its related description). When the bubble removal device includes the rotary drive member 370 shown in FIG. 16 below, the seed crystal holder 100, which has been bonded to the seed crystal 130, can be removed from the annular base 311 and then placed on a device that drives the seed crystal holder 100 to rotate. Under the pressure provided by the cover 312, the seed crystal holder 100 rotates, thereby discharging bubbles between the seed crystal holder 100 and the seed crystal 130.

[0215] In some embodiments of this specification, bubbles can be removed by using a bubble removal device to improve the bonding effect between the seed crystal 130 and the seed crystal holder 100 .

[0216] As shown in Figures 14 and 15B, the bubble removal device may further include a slot 361, an insert plate 362 and a roller 363. The slot 361 is located on the cover body 312, and is used to accommodate the insert plate 362 and limit the movement direction of the insert plate 362. The insert plate 362 is strip-shaped, and its size is adapted to the slot 361. The insert plate 362 can be located in the slot 361. The roller 363 can be set at one end of the insert plate 362. The diameter of the aforementioned roller 363 can be smaller than the height of the slot 361, so that the roller 363 can move in the slot 361. The aforementioned roller 363 can be made of an elastic material (such as rubber) to avoid damage to the seed crystal 130 or the seed crystal holder 100 when it moves.

[0217] Before the seed crystal 130 is bonded, the insert plate 362 can support the seed crystal holder 100. After the seed crystal 130 is bonded, the insert plate 362 can move within the slot 361 (e.g., left and right) to drive the roller 363 to roll the seed crystal 130. In some embodiments of this specification, the insert plate 362 drives the roller 363 to roll the seed crystal 130, thereby squeezing out bubbles generated during the bonding process of the seed crystal 130 and improving the bonding quality between the seed crystal 130 and the seed crystal holder 100.

[0218] As shown in Figures 14 and 15B, a pull ring 364 may be provided at the other end of the insert plate 362. After the seed crystal 130 is bonded, pulling the pull ring 364 can drive the insert plate 362 to move, thereby driving the roller 363 to roll the seed crystal 130, thereby more conveniently squeezing out bubbles.

[0219] In some embodiments, the bubble removal device may further include a rolling member (not shown). The rolling member may apply a certain pressure to the seed crystal 130 in the direction toward the seed crystal bonding surface 111. At the same time, the rolling member may rotate about a fixed axis (such as axis A), and by applying pressure to the seed crystal 130 while rotating, the gas between the seed crystal 130 and the seed crystal holder 100 may be discharged. In the following embodiments, the surface of the rolling member that contacts the seed crystal 130 may be provided with balls, rollers, or wheels to reduce friction between the rolling member and the seed crystal 130.

[0220] In some embodiments, as shown in FIG16 , the support member 310 may include a support plate 313. The support plate 313 is used to support the seed crystal 130 and the seed crystal holder 100. In some embodiments, the support plate 313 may be in the shape of a circular disk, a square disk, or the like. The cross-sectional area of ​​the support plate 313 along an axis A perpendicular to the seed crystal holder 100 is greater than the cross-sectional area of ​​the seed crystal holder 100 or the seed crystal 130 along the axis A perpendicular to the seed crystal holder 100. The seed crystal 130 is positioned between the support plate 313 and the seed crystal holder 110.

[0221] In some embodiments, the seed crystal bonding device 30 may further include a support frame 314 and a plurality of pressure-applying actuators disposed on the support frame 314. The support plate 313 is disposed on the support frame 314. The pressure-applying actuators may include a pump device (e.g., an electric pump) for driving a pressure component 320 to apply pressure to the seed crystal holder 100. In some embodiments, the pressure-applying actuators may also include pneumatic pressure-applying actuators or hydraulic pressure-applying actuators.

[0222] In some embodiments, the seed crystal bonding device 30 may include multiple bonding assemblies 300. The multiple pressure-applying driving members are respectively connected to the pressure-applying components 320 in each bonding assembly 300, so that the pressure-applying components 320 apply pressure to the seed crystal holder 100 toward the support plate 313. When the pressure-applying driving members apply pressure to the seed crystal holder 100, the support plate 313 can support the seed crystal holder 100 and limit its position to prevent the seed crystal holder 100 from displacement. At the same time, the multiple bonding assemblies 300 can perform multiple groups of bonding simultaneously, thereby improving bonding efficiency. As shown in Figure 16, the seed crystal bonding device 30 may include three bonding components 300, which are arranged at intervals along the vertical direction. The aforementioned vertical direction is the same as the axial direction of the seed crystal holder 100. Each bonding component 300 bonds the seed crystal 130 of a seed crystal holder 100. When the pressure driving member can simultaneously drive the pressure components 320 of the three bonding components 300 to apply pressure to the corresponding seed crystal holder 100, the simultaneous bonding of multiple groups of seed crystals 130 can be achieved.

[0223] As shown in FIG16 , the support frame 314 may include a plurality of support rods 315 extending in the aforementioned vertical direction. The support rods 315 are spaced apart along the circumference of the support plate 313. Multiple pressure-applying actuators may be provided on at least one of the support rods 315, and the multiple pressure-applying actuators are spaced apart in the vertical direction. The multiple bonding assemblies 300 are spaced apart in the vertical direction, thereby facilitating the multiple pressure-applying actuators to apply pressure to bond multiple bonding assemblies 300 simultaneously and reducing space usage.

[0224] In some embodiments, the support rod 315 provided with the pressure-applying driver may also be provided with a pressure-transmitting medium channel, and at least one pressure-applying driver may be connected to the pressure-transmitting medium channel via a valve 316. The valve 316 may be provided on the support rod 315 provided with the pressure-applying driver. By opening the valve 316, the seed crystal bonding device 30 may transmit the air pressure or hydraulic pressure generated by the pressure-applying driver through the pressure-transmitting medium channel, thereby transmitting the air pressure or hydraulic pressure to the pressure assembly 320, thereby applying pressure to the seed crystal holder 100.

[0225] In some embodiments, the support disk 313 is rotatably mounted on the support frame 314, and the rotation axis of the support disk 313 can be parallel to the support rod 314. The seed crystal bonding device 30 can further include a rotary drive 370, which is connected to the support disk 313 to drive the support disk 313 to rotate. For example, the rotary drive 370 can include a motor, which can drive the rotation of the support disk 313. For another example, the rotary drive 370 can include a pneumatic drive located at the bottom of the support disk 313, which can be a circular turntable. The bottom of the pneumatic drive is connected to a gas compressor, which can transfer compressed air to the pneumatic drive to drive the pneumatic drive to rotate, thereby driving the rotation of the support disk 313.

[0226] In some embodiments of this specification, the support plate 313 is rotatably mounted on the support frame 314 . The rotation of the support plate 313 can drive out bubbles at the bonding site of the seed crystal 130 , thereby effectively preventing the seed crystal 130 from detaching due to weak bonding.

[0227] In some embodiments, the rotational drive member 370 may include a magnetic element, a power source 371 and a magnetic drive member. The magnetic element may be fixed to the support disk 313. The magnetic drive member may be used to drive the magnetic element to rotate. In some embodiments, the magnetic drive member may be a circular turntable. The magnetic drive member may be fixed to the output end of the power source 371, and the magnetic drive member is magnetically coupled to the magnetic element. The power source 371 may convert other energy sources into kinetic energy for driving the magnetic drive member to rotate. In some embodiments of this specification, the power source 371 drives the magnetic drive member to rotate, and then drives the magnetic element to drive the support disk 313 to rotate, so that the rotation of the support disk 313 can be more conveniently controlled, and the friction and vibration of the support disk 313 during rotation can be reduced.

[0228] In some embodiments, the pressure member 320 may include a limiting pressure plate 317 disposed on the support frame 314. As shown in FIG16 , in some embodiments, the limiting pressure plate 317 is a circular disc with a protrusion at the bottom, and the protrusion is connected to the seed crystal holder 110 (for example, by a threaded or snap-fit ​​connection).

[0229] In some embodiments, the pressure-applying driver may include a first sub-driver 381 and a second sub-driver 382. The first sub-driver 381 and the second sub-driver 382 may be disposed on different support rods 314 to adjust the distance between different positions of the limiting pressure plate 317 and the support plate 313. The first sub-driver 381 and the second sub-driver 382 may have the same structure, for example, both may be movable support bases. The first sub-driver 381 and the second sub-driver 382 may be spaced apart along the circumference of the limiting pressure plate 317, and both the first sub-driver 381 and the second sub-driver 382 are connected to the limiting pressure plate 317.

[0230] In some embodiments of the present specification, the first sub-driving member 381 and the second sub-driving member 381 can apply pressure to the seed holder 100 from different positions, which helps to avoid uneven force on the seed holder 100 caused by applying pressure from a single position.

[0231] In some embodiments, the seed crystal bonding device 30 may further include a pressure sensor 321, which is used to determine the pressure applied by each pressure-applying component 320. As shown in Figure 16, in some embodiments, the pressure sensor 321 can be mounted on the portion where the support rod 315 is connected to the support frame 314, and can be used to sense the driving pressure of the pressure-applying driver and / or the pressure at the valve 316. In other embodiments, the pressure sensor 321 can also be directly provided on the upper surface of the support plate 313 to directly sense the pressure on the seed crystal holder 100. Through the pressure sensor 321, the pressure at the seed crystal holder 100 can be directly or indirectly sensed, which helps to better control the bonding process of the seed crystal 130, facilitates timely adjustment when the pressure is too high or too low, and effectively prevents the seed crystal 130 from being crushed due to excessive pressure, or reduces the bonding quality of the seed crystal 130 due to too low pressure.

[0232] In some embodiments, the seed crystal bonding device 30 may further include a controller, which may be signal-connected to both the valve 316 and the pressure sensor 321. In some embodiments, the controller may adjust the opening of the valve 316 based on the pressure data sensed by the pressure sensor 321. For example, the controller may obtain the pressure data obtained by the pressure sensor 321 in real time. When the pressure data is less than a preset minimum reference pressure, the controller may increase the opening of the valve 316 to improve the bonding effect of the seed crystal 130; when the pressure data is greater than a preset maximum reference pressure, the controller may decrease the opening of the valve 316 to prevent the seed crystal 130 from being crushed. In some embodiments of the present specification, by determining the pressure data sensed by the pressure sensor 321 and then automatically adjusting the opening of the valve 316, it is helpful to regulate the pressure of each bonding component 300, so that each bonding component 300 is subjected to a balanced force, and can effectively prevent the seed crystal 130 from being crushed due to excessive pressure, or the seed crystal 130 from being affected by insufficient pressure.

[0233] This specification also provides a crucible 400. Crucible 400 can be used to generate the gaseous components required for crystal growth. Under the influence of a temperature field, the raw materials (e.g., melt 140) in crucible 400 can be volatilized into gaseous components and move to the seed crystal 130 bonded to the seed crystal holder 100, thereby achieving crystal growth.

[0234] In some embodiments, as shown in FIG. 17 , the crucible 400 may include a crucible body 450 , a driving assembly 460 , and a temperature field holding plate 410 .

[0235] The crucible body 450 is used to hold the melt 140 for crystal growth. The crucible body 450 can be cylindrical and contain the melt 140. By heating the crucible body 450 to heat the melt 140, the seed crystal 130 in the seed crystal holder 100 contacts the melt 140, thereby achieving crystal growth.

[0236] The thermal field holding disk 410 may be used to hold the thermal field.

[0237] The drive assembly 460 can drive the crucible body 450 to rotate about the axis E of the crucible body 450 relative to the temperature field holding plate 410. The drive assembly 460 can include a drive source and a connecting mechanism 420. The connecting mechanism 420 can be connected between the drive source and the bottom of the crucible body 450. The drive source can be located at the bottom of the connecting mechanism 420 to provide driving force for the drive assembly 460. The aforementioned drive source can include a combination of various drive devices and transmission devices. The drive device can include a motor, a hydraulic cylinder, a pneumatic cylinder, etc.

[0238] The heat-maintaining plate 410 can be disposed on the connecting structure 420 and positioned between the driving source and the bottom of the crucible body 450. In some embodiments, the heat-maintaining plate 410 can be disc-shaped or in another shape. In some embodiments, the heat-maintaining plate 410 is made of at least one of mullite, corundum, and alumina. This material configuration allows the heat-maintaining plate 410 to adapt to high-temperature environments and helps improve the stability of the heat-maintaining plate 410.

[0239] The heat field maintenance plate 410 keeps the heat field stationary while the crucible 400 rotates, preventing it from tilting and contacting the coil, which could cause sparks and prevent further crystal growth. Furthermore, as the crucible 400 moves up and down along the axis E of the crucible body 450, the heat field maintenance plate 410 remains relatively stationary relative to the crucible 400, maintaining a stable crucible temperature and ensuring high-quality crystal growth.

[0240] In some embodiments of the present specification, a driving assembly 460 is provided to drive the crucible body 450 to rotate around the axis E of the crucible body 450, so that the crucible 400 and the seed crystal 130 can rotate in opposite directions, and the crucible 400 and the seed crystal 130 can also rotate alternately, etc., to flush the steps formed on the crystal in different directions to reduce the width and size of the steps, make the crystal smoother and reduce the inclusion of flux.

[0241] The rotation of the crucible body 450 can make the crystal flatter and reduce the inclusion of flux, greatly improving the overall mass transfer of the melt, thereby effectively increasing the crystal thickness.

[0242] As shown in Figure 18, the connecting mechanism 420 may include a rotating column 421 and a first supporting tray 422. The first supporting tray 422 is provided at one end of the rotating column 421, and the driving source is connected to the other end of the rotating column 421. As shown in Figure 18, the first supporting tray 422 may be cylindrical and used to support the crucible body 450, and the rotating column 421 may be cylindrical and used to drive the first supporting tray 422 to rotate. The rotating column 421 may be connected to the driving source through couplings, bearings, and other connecting parts. The material of the first supporting tray 422 may be graphite, and the material of the rotating column 421 may be a high-temperature resistant material such as mullite, corundum, or alumina. In some embodiments of this specification, the driving source drives the rotating column 421 to rotate, which can further drive the crucible body 450 in the first supporting tray 422 to rotate.

[0243] As shown in FIG18 , the first support tray 422 may include a plurality of concentrically arranged stepped grooves. The plurality of stepped grooves are all concentric with the rotating column 421 and have dimensions adapted to the dimensions of a plurality of different crucible bodies 450. In some embodiments of this specification, the plurality of concentrically arranged stepped grooves can be used to position crucible bodies 450 of various sizes, and crucible bodies 450 of different sizes and shapes can be replaced based on actual conditions to prevent the crucible body 450 from being concentrically offset from the first support tray 422. In some embodiments, the plurality of stepped grooves on the first support tray 422 may also include a limiting structure (e.g., a rubber ring) to prevent the crucible body 450 from sliding during rotation.

[0244] In some embodiments, the connecting mechanism 420 further includes a second tray 423. The second tray 423 can be used to support the temperature field holding plate 410. The material of the second tray 423 can be at least one of mullite, corundum, alumina and other high temperature resistant materials.

[0245] As shown in FIG19 , in some embodiments, the second support tray 423 can be annular, with the inner ring of the second support tray 423 fixed to the outer wall of the rotating column 421. The second support tray 423 can be located between the first support tray 422 and the drive source. In some embodiments, the second support tray 423 can be located at the bottom of the heat preservation plate 410 and connected to the heat preservation plate 410 via a ball structure 424. The second support tray 423 can include multiple ball structures 424, which can be fixed to the second support tray 423 via one or more positioning devices and evenly distributed axially around the second support tray 423. As shown in FIG19 , the ball structures 424 can be arranged in two circular rings of different radii, centered around the center of the second support tray 423. It is worth noting that the material of the heat preservation plate is easily pulverized, has low hardness and stability, and cannot guarantee absolute balance during rotation. Therefore, the heat preservation plate 410 may shift and tilt during rotation, causing it to contact the coil and spark, thus preventing further crystal growth. At the same time, it will also destroy the stability inside the crucible body 450 and lead to an increase in uncontrollable factors. Some embodiments of this specification connect the second supporting tray 423 and the temperature field holding disk 410 through a ball structure 424, which can keep the temperature field holding disk 410 stationary when the rotating column 421 rotates, helping to prevent an increase in uncontrollable factors in the rotation of the temperature field holding disk 410.

[0246] In some embodiments, the crucible 400 may further include multiple telescopic support rods 430. The telescopic support rods 430 may be used to support the temperature-maintaining disk 410, with one end of the telescopic support rod 430 connected to the bottom of the temperature-maintaining disk 410. As shown in FIG20A , the telescopic support rods 430 may include a sliding rod 431 and a fixed rod 432. The sliding rod 431 may be movable up and down along the axis of the telescopic support rod 430, and the sliding rod 431 and the fixed rod 432 may be secured by tightening threads or other locking mechanisms. The end of the sliding rod 431 distal from the fixed rod 432 may be connected to a fourth through hole 411 of the temperature-maintaining disk 410. As shown in FIG20B , the temperature-maintaining disk 410 may include three fourth through holes 411 evenly distributed axially around the temperature-maintaining disk 410. The dimensions of the fourth through holes 411 are compatible with the sliding rods 431. The sliding rods may be threaded or otherwise secured through the fourth through holes 411 and secured to the temperature-maintaining disk 410. Some embodiments of this specification can prevent the temperature field holding plate 410 from tilting during the rotation of the crucible 400 by using multiple telescopic support rods 430, thereby ensuring normal growth of the crystal.

[0247] In some embodiments, the crucible 400 may further include a connecting ring 440 and a locking mechanism. The aforementioned locking hole 441 cooperates with the locking mechanism to fix the connecting ring 440 to the output shaft of the driving source and the rotating column 421. As shown in Figure 21, the connecting ring 440 can be a hollow cylinder with a plurality of locking holes 441 symmetrically arranged along the axis of the connecting ring 440 on its sidewall. The connecting ring 440 can be sleeved on the output shaft of the driving source and the other end of the rotating column 421 (i.e., the end close to the driving source). The locking mechanism can be a screw, and the size of the locking hole 441 is adapted to the locking mechanism. The connecting ring 440 can be fixed to the output shaft of the driving source and the rotating column 421 by the locking mechanism and the locking hole 441. In some embodiments of this specification, the output shaft of the driving source and the rotating column 421 can be fixed to the connecting ring 440 by the connecting ring 440 and the locking mechanism. The driving source can stably drive the rotating column 421 to rotate, which helps to prevent the rotating column 421 from detaching from the driving source when rotating.

[0248] In some embodiments, the seed pad 110 can be used to grow crystals using the crystal growth method described in the process 2200 shown in FIG. 22 .

[0249] FIG22 is an exemplary flow chart of a crystal growth method according to some embodiments of the present disclosure. In some embodiments, the method can be performed using a seed crystal holder (such as the seed crystal holder shown in FIG10 ). As shown in FIG22 , process 2200 includes the following steps.

[0250] Step 2210: Bond the seed crystal to the seed crystal bonding surface of the seed crystal holder body.

[0251] The seed crystal can be bonded to the seed crystal bonding surface. In some embodiments, the seed crystal can be fixed by graphite paper. For more information about the seed crystal bonding surface and graphite paper, please refer to the relevant parts above, such as Figures 1 and 10.

[0252] In some embodiments, bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body includes: making the diameter of the seed crystal slightly larger than the diameter of the seed crystal holder body, and the seed crystal slightly protruding from a side surface of the protection holder away from the connecting rod.

[0253] In some preferred embodiments, when the seed crystal is bonded to the seed crystal bonding surface of the seed crystal holder, the seed crystal's diameter is 5 mm to 10 mm larger than the diameter of the seed crystal holder, and the seed crystal protrudes 0.1 mm to 0.2 mm beyond the surface of the protective holder away from the connecting rod. Furthermore, the protective holder can wrap around the seed crystal to achieve axial and radial temperature gradient control and protect the seed crystal. For example, after the seed crystal is sunk into the protective holder, it is not subjected to force during lifting, preventing the seed crystal from falling off.

[0254] In some embodiments of this specification, when bonding the seed crystal, the diameter of the seed crystal is slightly larger than the diameter of the seed crystal holder body, and the seed crystal slightly protrudes from the side surface of the protective holder away from the connecting rod, which can ensure sufficient contact between the seed crystal and the melt.

[0255] In some embodiments, when the seed crystal holder includes components such as the protective holder 180 and the second protective cover 182 shown in FIG10 , the step of bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body may further include placing the seed crystal in contact with the end of the second protective cover 182 away from the connecting rod 120, and bonding the end to the seed crystal bonding surface 111 of the seed crystal holder body 110. This ensures that during crystal growth, the second protective cover 182 can effectively prevent volatiles from the melt from entering between the seed crystal and the protective holder 180, and between the seed crystal holder body 110 and the protective holder.

[0256] In step 2220 , the seed crystal holder with the seed crystal attached thereto is sunk into the melt for crystal growth in the crucible, with the surface of the seed crystal away from the seed crystal holder body being located at a position where the melt temperature is highest.

[0257] Figure 23 is a schematic diagram of growing a crystal according to some embodiments of this specification. As shown in Figure 23, the seed crystal holder can be sunk into a melt 2320 for crystal growth in a crucible 400. The melt 2320 refers to the molten state of the raw materials used to grow the crystal.

[0258] In some embodiments, the surface of the seed crystal facing away from the seed holder is substantially located at the highest melt temperature. This can be understood as the distance between the surface of the seed crystal facing away from the seed holder and the high-temperature line of the melt being the highest temperature is very small, such as less than 1% of the overall melt depth. As shown in Figure 23 , the surface of the seed crystal facing away from the seed holder is located at the high-temperature line 2310 of the melt. High-temperature line 2310 can represent the highest melt temperature.

[0259] In some embodiments, a portion of the seed tray is located in the melt, while another portion is located outside the melt. Referring to Figure 23 , a portion of the seed tray is located in the melt, while another portion is located outside the melt. It is understood that leaving a portion of the seed tray exposed outside the melt can ensure control of the axial and radial temperature gradients of the seed tray, ensuring better crystal growth. In some embodiments, the seed tray is minimized from contact with the melt to prevent volatiles from adhering to the seed tray, which would make it difficult to separate the seed tray after crystal growth. However, minimizing contact between the seed tray and the melt is actually detrimental to crystal growth. Due to the provision of the protective tray 180, and particularly the further provision of the first protective cover 181 and the second protective cover 182, volatiles are prevented from adhering to the seed tray itself. After resolving this issue, the seed tray can be partially located in the melt and the other portion outside the melt, allowing the seed crystal to be placed near the high-temperature line of the melt, thus ensuring better crystal growth.

[0260] In some embodiments, before the seed crystal holder with the seed crystal attached is submerged into the melt for crystal growth, the process further includes heating the melt to a predetermined temperature range. In some preferred embodiments, the predetermined temperature range for heating the melt may be 1720°C to 1780°C. It will be appreciated that heating the melt to a temperature range of 1720°C to 1780°C ensures sufficient melting of the melt, facilitating subsequent crystal growth.

[0261] Step 2230, growing a crystal using the Czochralski method.

[0262] In some embodiments, crystals can be grown by a Czochralski method.

[0263] In some embodiments, the seed holder is rotatable around the axis of the connecting rod, and the crucible is rotatable around the axis of the crucible; the axis of the connecting rod is parallel to the axis of the crucible.

[0264] As shown in FIG23 , the seed crystal holder can rotate around the axis A of the connecting rod, and the crucible can rotate around the axis of the crucible, wherein the axis of the crucible is parallel to the axis of the connecting rod.

[0265] In some embodiments, growing a crystal using the top-pulling method further includes controlling the seed holder and the crucible to rotate in opposite directions. In some embodiments of this specification, rotating the seed holder and the crucible in opposite directions can improve the pulling process and increase the crystal growth efficiency.

[0266] In some embodiments, the rotation speed of the seed holder is 0 rpm to 20 rpm; the rotation speed of the crucible is 0 rpm to 20 rpm.

[0267] In some embodiments, the product of the rotation speed of the seed holder and the rotation speed of the crucible is a predetermined value.

[0268] In some preferred embodiments, the product of the rotation speed of the seed holder and the rotation speed of the crucible is 20 or 150.

[0269] In some embodiments of the present specification, the product of the rotation speed of the seed crystal holder and the rotation speed of the crucible is controlled to be 20 or 150, which can ensure stable, rapid and high-quality growth of the crystal.

[0270] In some embodiments, growing a crystal using the top-pulling method includes: keeping a seed crystal holder with a seed crystal attached thereto submerged in the melt for 10 to 30 minutes, and pulling the seed crystal holder at a pulling speed of 0.01 to 0.2 mm / h to grow the crystal.

[0271] In some preferred embodiments, the pulling speed may be 0.05 mm / h.

[0272] In some embodiments of the present specification, the above embodiments can ensure that the crystal grows under the condition of stable melt.

[0273] In some embodiments, after the crystal grows for 10 hours to 30 hours, the crystal is pulled out of the melt at a pulling speed of 30 mm / h-40 mm / h, and a height gap of 15 mm to 25 mm is maintained between the crystal and the melt surface.

[0274] It is worth noting that after a period of crystal growth, the melt level gradually decreases due to corrosion of the crucible wall and melt evaporation, which causes the relative speed of the seed crystal to leave the melt to gradually increase, resulting in slow or even no crystal growth. The growth time, pull height, and spacing height described in the above embodiments can effectively overcome the above problems and achieve better crystal growth.

[0275] In some embodiments, the crystal growth method further comprises: after crystal growth is completed, cutting the seed crystal holder along a cutting plane parallel to the seed crystal bonding surface to separate the seed crystal holder from the crystal. The cutting plane covers the seed crystal holder body, the protective holder, and the second protective cover. Due to the provision of the protective holder and the second protective cover, no volatiles adhere to the seed crystal and the seed crystal holder body, allowing for convenient cutting and separation of the seed crystal holder from the crystal.

[0276] In some embodiments of this specification, the crystal growth methods described in the above embodiments prevent adhesion caused by volatile substances, eliminate the adhesion between the seed crystal and the seed crystal holder, and the seed crystal has a larger diameter than the seed crystal holder, making it easy to separate the crystal. Furthermore, the protective holder can regulate axial and radial temperature gradients to ensure stable and efficient growth of the seed crystal. Therefore, the crystal growth methods described in the embodiments of this specification can efficiently and quickly obtain crystals, and the obtained crystals are easy to separate.

[0277] It should be noted that the above description of process 2200 is for illustrative purposes only and does not limit the scope of this specification. Those skilled in the art may, under the guidance of this specification, make various modifications and alterations to process 2200. However, such modifications and alterations are still within the scope of this specification.

[0278] While the basic concepts have been described above, it will be apparent to those skilled in the art that the detailed disclosure is merely illustrative and does not limit this specification. Although not explicitly stated herein, various modifications, improvements, and revisions to this specification may be made by those skilled in the art. Such modifications, improvements, and revisions are suggested in this specification and remain within the spirit and scope of the exemplary embodiments of this specification.

[0279] This specification also uses specific terms to describe the embodiments of this specification. For example, "one embodiment," "an embodiment," and / or "some embodiments" refer to a feature, structure, or characteristic associated with at least one embodiment of this specification. Therefore, it should be emphasized and noted that references to "one embodiment," "an embodiment," or "an alternative embodiment" two or more times in different locations in this specification do not necessarily refer to the same embodiment. Furthermore, certain features, structures, or characteristics of one or more embodiments of this specification may be appropriately combined.

[0280] In addition, unless expressly stated in the claims, the order of the processing elements and sequences, the use of alphanumeric characters, or the use of other names described in this specification are not intended to limit the order of the processes and methods of this specification. Although the above disclosure discusses some of the invention embodiments currently considered useful through various examples, it should be understood that such details are for illustrative purposes only, and the appended claims are not limited to the disclosed embodiments. On the contrary, the claims are intended to cover all modifications and equivalent combinations that are consistent with the spirit and scope of the embodiments of this specification. For example, although the system components described above can be implemented by hardware devices, they can also be implemented only by software solutions, such as installing the described system on an existing server or mobile device.

[0281] Similarly, it should be noted that, in order to simplify the presentation of this specification and thus facilitate understanding of one or more embodiments of the invention, the foregoing descriptions of the embodiments of this specification sometimes combine multiple features into a single embodiment, figure, or description thereof. However, this disclosure method does not imply that the subject matter of this specification requires more features than those recited in the claims. In fact, an embodiment may have fewer features than all of the features of a single disclosed embodiment.

[0282] In some embodiments, numbers are used to describe the quantity of components and attributes. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise stated, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the description and claims are approximate values, which may change according to the required characteristics of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of this specification are approximate values, in specific embodiments, the settings of such numerical values ​​are as accurate as possible within the feasible range.

[0283] Each patent, patent application, patent application publication, and other materials, such as articles, books, specifications, publications, and documents, cited in this specification is hereby incorporated by reference in its entirety. This includes application history documents that are inconsistent with or conflict with the content of this specification, as well as documents (currently or subsequently attached to this specification) that limit the broadest scope of the claims of this specification. It should be noted that if the descriptions, definitions, and / or terminology used in the accompanying materials are inconsistent or conflicting with the content of this specification, the descriptions, definitions, and / or terminology used in this specification will control.

[0284] Finally, it should be understood that the embodiments described in this specification are intended only to illustrate the principles of the embodiments of this specification. Other variations may also fall within the scope of this specification. Therefore, by way of example and not limitation, alternative configurations of the embodiments of this specification may be considered consistent with the teachings of this specification. Accordingly, the embodiments of this specification are not limited to the embodiments explicitly described and illustrated in this specification.

Claims

1. A seed crystal holder, characterized in that: The invention comprises a seed crystal holder body and a connecting rod. The seed crystal holder body is fixed to one end of the connecting rod. A seed crystal bonding surface is provided on the side of the seed crystal holder body away from the connecting rod.

2. The seed crystal holder according to claim 1, wherein: The seed crystal holder body includes a hollow first inner cavity, and a channel for cooling medium to flow is provided in the connecting rod; the channel is connected to the first inner cavity.

3. The seed crystal holder according to claim 2, wherein: The seed crystal holder body is provided with a first through hole communicating with the first inner cavity.

4. The seed crystal holder according to claim 2, wherein: A cooling medium diffusion structure is provided in the inner cavity.

5. The seed crystal holder according to claim 4, wherein: The cooling medium diffusion structure includes a shell, a second inner cavity is formed in the shell, a plurality of diffusion holes are provided on the shell, the channel is connected with the second inner cavity, and the diffusion holes are connected with the first inner cavity and the second inner cavity.

6. The seed crystal holder according to claim 2, wherein: The seed crystal holder further includes a cooling device, which delivers the cooling medium to the channel. The cooling medium flows in the channel at a preset flow rate.

7. The seed crystal holder according to claim 6, wherein: The cooling medium is an inert gas, and the preset flow rate is greater than 0.4 m / s.

8. The seed crystal holder according to claim 2, wherein: The seed crystal holder further includes a weight-increasing structure, and the weight-increasing structure is connected to the seed crystal holder body.

9. The seed crystal holder according to claim 2, wherein: The seed crystal holder further includes a cooling structure provided on the connecting rod, and the cooling structure cools the cooling medium in the channel.

10. The seed crystal holder according to claim 1, wherein: The seed crystal holder further includes a driving mechanism and a stirring mechanism, the other end of the connecting rod is connected to the driving mechanism, and the driving mechanism drives the seed crystal holder body to rotate around the axis of the connecting rod through the connecting rod; The stirring mechanism is connected to the seed crystal holder body, and the stirring mechanism stirs the melt used for crystal growth.

11. The seed crystal holder according to claim 10, wherein: The stirring mechanism includes a mounting rod and a stirring paddle, and the stirring paddle is located on a side of the seed crystal bonding surface away from the connecting rod.

12. The seed crystal holder according to claim 10, wherein: There are multiple stirring mechanisms, and the multiple stirring mechanisms are arranged around the seed crystal holder body.

13. The seed crystal holder according to claim 10, wherein: The material of the stirring mechanism is one or more of tungsten alloy and high-temperature ceramic.

14. The seed crystal holder according to claim 1, wherein: The seed crystal holder body includes at least two sub-parts, and each of the at least two sub-parts is provided with a half groove; The seed crystal holder further comprises a locking structure and a clamping structure, wherein the clamping structure is provided at one end where the connecting rod is connected to the seed crystal holder body; The at least two sub-parts are spliced ​​so that the half grooves on each of the at least two sub-parts are spliced ​​into a clamping groove, and the clamping structure is clamped in the clamping groove; The locking structure fixes the at least two spliced ​​sub-parts.

15. The seed crystal holder according to claim 14, wherein: The at least two sub-sections include a first sub-section and a second sub-section with identical structures; the first sub-section and the second sub-section are symmetrically arranged with the axis of the connecting rod as the axis of symmetry.

16. The seed crystal holder according to claim 14, wherein: The first slot body and the second slot body of the clamping slot are arranged along the axial direction of the connecting rod, and the first slot body is closer to the seed crystal bonding surface than the second slot body; the area of ​​the first slot body along the cross section perpendicular to the axis of the connecting rod is larger than the area of ​​the second slot body along the cross section perpendicular to the axis of the connecting rod; the area of ​​the clamping structure along the cross section perpendicular to the axis of the connecting rod is larger than the area of ​​the connecting rod along the cross section perpendicular to the axis of the connecting rod.

17. The seed crystal holder according to claim 14, wherein: The clamping structure is in a polyhedron shape.

18. The seed crystal holder according to claim 14, wherein: The locking structure includes an annular groove and a locking ring; the annular groove is arranged around the outer wall of the seed crystal holder body, and the locking ring is sleeved outside the at least two sub-parts after splicing and is arranged in the annular groove.

19. The seed crystal holder according to claim 1, wherein: The seed crystal holder also includes an annular protective holder, which is provided with a receiving cavity matching the shape of the seed crystal holder body; the protective holder is arranged around the seed crystal holder body, and the protective holder is arranged around the end of the connecting rod connected to the seed crystal holder body.

20. The seed crystal holder according to claim 19, wherein: The seed crystal holder further includes an annular first protective sleeve, which is sleeved outside the connecting rod and is located between the connecting rod and the protective holder.

21. The seed crystal holder according to claim 20, wherein: The connecting rod includes a first outer diameter section and a second outer diameter section along the axial direction of the connecting rod; the outer diameter of the first outer diameter section is smaller than the outer diameter of the second outer diameter section, and the first outer diameter section is closer to the seed crystal holder body than the second outer diameter section; The first protective cover includes a first inner diameter section and a second inner diameter section along the axial direction of the connecting rod; the outer diameter of the first inner diameter section is smaller than the inner diameter of the second inner diameter section, the first inner diameter section matches the first outer diameter section, and the second inner diameter section matches the second outer diameter section.

22. The seed crystal holder according to claim 19, wherein: A second annular protective cover is provided on a surface of the protective support away from the connecting rod. The second protective cover is embedded in the protective support and surrounds the accommodating cavity.

23. The seed crystal holder according to claim 22, wherein: When a seed crystal is bonded to the seed crystal bonding surface, the end of the second protective cover away from the connecting rod is in contact with the seed crystal.

24. The seed crystal holder according to claim 22, wherein: A first groove is provided on a surface of the protective bracket on a side away from the connecting rod; the diameter of the first groove is larger than the diameter of the opening of the accommodating cavity on a side away from the connecting rod; the first groove includes a connecting portion communicating with the opening and an annular portion surrounding the connecting portion; The bottom surface of the annular portion and the seed crystal bonding surface are located on the same plane; the annular protective sleeve is arranged on the bottom surface of the annular portion.

25. The seed crystal holder according to claim 24, wherein: The diameter of the first groove is 5 mm to 10 mm larger than the diameter of the opening.

26. The seed crystal holder according to claim 24, wherein: Graphite paper is bonded to the seed crystal bonding surface, and the graphite paper protrudes from a side surface of the second protective cover away from the connecting rod in a direction away from the connecting rod.

27. A seed crystal bonding device, characterized in that: The seed crystal bonding device includes one or more bonding components, and the bonding components include a supporting component and a pressure component. The supporting component supports the seed crystal holder, and the pressure component applies pressure to press the seed crystal holder and the seed crystal on the seed crystal holder toward each other.

28. The seed crystal bonding device according to claim 27, wherein: The supporting component includes a first pressing member and a second pressing member, and the pressing component includes a first pressure plate; The side wall of the first pressing member includes at least one first exhaust hole; the second pressing member is nested and connected to the first pressing member; wherein, during the seed crystal bonding and fixing process, the seed crystal is placed on the upper surface of the second pressing member, and the seed crystal holder is placed on the upper surface of the seed crystal; the first pressure plate applies pressure to the seed crystal holder.

29. The seed crystal bonding device according to claim 28, wherein: The bottom of the first pressing member includes a second through hole, and the bottom of the second pressing member includes a first protrusion. The first protrusion cooperates with the second through hole to achieve a nested connection between the first pressing member and the second pressing member.

30. The seed crystal bonding device according to claim 28, wherein: The cross-sectional diameter of the first exhaust hole is comprised between 0.01 mm and 10 mm.

31. The seed crystal bonding device according to claim 28, wherein: After the first pressing member and the second pressing member are nested and connected, a vertical distance between the first exhaust hole and an upper surface of the second pressing member is within a range of 0.2 mm to 5 mm.

32. The seed crystal bonding device according to claim 28, wherein: The side wall of the second pressing member includes at least one second exhaust hole, and the first exhaust hole at least partially corresponds to the second exhaust hole.

33. The seed crystal bonding device according to claim 32, wherein: The cross-sectional diameter of the second exhaust hole is comprised between 0.01 mm and 10 mm.

34. The seed crystal bonding device according to claim 32, wherein: A vertical distance between the second exhaust hole and an upper surface of the second pressing member is in a range of 0.2 mm to 5 mm.

35. The seed crystal bonding device according to claim 28, wherein: The height of the second pressing member is smaller than that of the first pressing member.

36. The seed crystal bonding device according to claim 28, wherein: The seed crystal holder is threadedly connected to the first pressing piece.

37. The seed crystal bonding device according to claim 28, wherein: The bottom of the first pressure plate includes a second protrusion, the upper portion of the seed crystal holder includes a second groove, and the second protrusion and the second groove cooperate to achieve the connection between the first pressure plate and the seed crystal holder.

38. The seed crystal bonding device according to claim 27, wherein: The supporting component includes an annular base, the annular base and a cover body, and the seed crystal holder is placed on the annular base; the cover body includes an annular side wall and a cover plate, the side wall is sleeved outside the annular base, and the cover body applies pressure to the seed crystal on the seed crystal holder.

39. The seed crystal bonding device according to claim 38, wherein: The device further comprises a first connecting member and a second connecting member, wherein the first connecting member is provided on the annular base, and the second connecting member is provided on the cover; the first connecting member and the second connecting member are detachably connected; When the first connecting member is connected to the second connecting member, the cover plate of the cover body applies pressure to the seed crystal on the seed crystal holder.

40. The seed crystal bonding device according to claim 38, wherein: A locking structure is provided on the base, and the locking structure fixes the seed crystal holder to the annular base.

41. The seed crystal bonding device according to claim 40, wherein: A connecting threaded hole is provided on a side of the seed crystal holder away from the seed crystal bonding surface, and a locking structure includes a locking disk, a locking member and a locking nut. The locking member includes a tray, a first threaded rod and a second threaded rod. The tray supports the side of the seed crystal holder away from the seed crystal bonding surface, and the first threaded rod cooperates with the connecting threaded hole; a mounting hole is provided on the locking disk, and the second threaded rod passes through the mounting hole, and the locking nut cooperates with the second threaded rod; The locking nut and the tray are respectively located on two sides of the locking plate along the axial direction of the mounting hole.

42. The seed crystal bonding device according to claim 41, wherein: The tray is made of elastic material.

43. The seed crystal bonding device according to claim 38, wherein: A supporting structure is provided on the inner wall of the annular base, and the supporting structure includes an annular connecting plate, an annular supporting plate and an annular supporting protrusion; the outer ring of the annular supporting plate is connected to the annular connecting plate, and the inner ring of the annular supporting plate is provided with the annular supporting protrusion, and the annular supporting protrusion supports the seed crystal holder; the annular connecting plate is connected to the inner wall of the annular base.

44. The seed crystal bonding device according to claim 38, wherein: A bubble removal device is provided on the cover body, and the bubble removal device removes bubbles between the seed crystal and the seed crystal holder.

45. The seed crystal bonding device according to claim 44, wherein: The bubble removal device includes a slot, an insert plate and a roller; the slot is provided on the cover body, the insert plate is located in the slot, and the roller is provided at one end of the insert plate; the insert plate moves in the slot to drive the roller to roll the seed crystal.

46. ​​The seed crystal bonding device according to claim 45, wherein: The other end of the inserting plate is provided with a pull ring.

47. The seed crystal bonding device according to claim 27, wherein: There are multiple bonding components, and the supporting component includes a supporting plate, the supporting plate supports the seed crystal and the seed crystal holder, and the seed crystal is located between the supporting plate and the seed crystal holder; The seed crystal bonding device further comprises a support frame and a plurality of pressure driving members arranged on the support frame, and the support plate is arranged on the support frame. The seed crystal bonding device includes a plurality of bonding components, and a plurality of pressure driving members are respectively connected to the plurality of pressure components; the pressure driving members enable the pressure components to apply pressure to the seed crystal holder toward the support plate.

48. The seed crystal bonding device according to claim 47, wherein: The support frame includes a plurality of support rods extending along the vertical direction, and the plurality of support rods are arranged at intervals along the circumference of the support plate; a plurality of pressure-applying driving members are provided on at least one of the support rods, and the plurality of pressure-applying driving members are arranged at intervals along the vertical direction, and a plurality of seed crystal bonding assemblies are arranged at intervals along the vertical direction.

49. The seed crystal bonding device according to claim 47, wherein: The pressure driving member includes a pneumatic pressure driving member or a hydraulic pressure driving member.

50. The seed crystal bonding device according to claim 49, wherein: A pressure transmission medium channel is provided on the support rod on which the pressure driving member is provided, and at least one of the pressure driving members is connected to the pressure transmission medium channel through a valve.

51. The seed crystal bonding device according to claim 47, wherein: The support disk is rotatably mounted on the support frame, and a rotation axis of the support disk is parallel to the support rod. The seed crystal bonding device further comprises a rotation driving member connected to the support disk to drive the support disk to rotate.

52. The seed crystal bonding device according to claim 51, wherein: The rotating driving member includes a magnetic element, a power source and a magnetic driving member; the magnetic driving member is magnetically coupled to the magnetic element, the magnetic element is fixed on the supporting disk, and the magnetic driving member is fixed on the output end of the power source; the power source drives the magnetic driving member to rotate, thereby driving the magnetic element to drive the supporting disk to rotate.

53. The seed crystal bonding device according to claim 48, wherein: The pressure component includes a limiting pressure plate provided on the support frame, and the pressure driving member includes a first sub-driving member and a second sub-driving member, wherein the first sub-driving member and the second sub-driving member are provided on different support rods; The first sub-driving member and the second sub-driving member are arranged at intervals along the circumference of the limiting pressure plate, and both the first sub-driving member and the second sub-driving member are connected to the limiting pressure plate.

54. The seed crystal bonding device according to claim 50, wherein: The seed crystal bonding device further includes a pressure sensor, which is used to determine the pressure applied by each of the pressure-applying components.

55. The seed crystal device according to claim 54, characterized in that The seed crystal bonding device further includes a controller, which is signal-connected to both the valve and the pressure sensor; the controller is configured to: The opening of the valve is adjusted based on the pressure data sensed by the pressure sensor.

56. A crucible, characterized in that The crucible comprises a crucible body, a driving assembly and a temperature-maintaining disk. The driving assembly comprises a driving source and a connecting mechanism. The connecting mechanism is connected between the driving source and the bottom of the crucible body. The driving assembly drives the crucible body to rotate relative to the temperature-maintaining disk around the axis of the crucible body. The temperature-maintaining disk is arranged on the connecting structure and is located between the driving source and the bottom of the crucible body.

57. The crucible according to claim 56, characterized in that The connecting mechanism includes a rotating column and a first tray. The first tray is provided at one end of the rotating column. The driving source is connected to the other end of the rotating column.

58. The crucible according to claim 57, wherein The first supporting tray includes a plurality of concentrically arranged stepped grooves.

59. The crucible according to claim 57, wherein The connecting mechanism includes a second tray, the second tray is annular, the second tray is located between the first tray and the driving source, and the inner ring of the second tray is fixed to the outer wall of the rotating column; The second supporting tray is connected to the temperature field maintaining plate through a ball structure.

60. The crucible of claim 56, wherein: The material of the temperature field maintaining disk is at least one of mullite, corundum and alumina.

61. The crucible of claim 56, wherein: The crucible further comprises a plurality of telescopic support rods, one end of each telescopic support rod being connected to the bottom of the temperature field maintaining plate.

62. The crucible of claim 56, wherein: The crucible also includes a connecting ring and a locking mechanism, and a locking hole is provided on the side wall of the connecting ring; the connecting ring is sleeved outside the output shaft of the driving source and the other end of the rotating column, and the locking hole cooperates with the locking mechanism to fix the connecting ring to the output shaft of the driving source and the rotating column.

63. A crystal growth method, characterized in that: Using the seed crystal holder according to claims 19-26 comprises the following steps: Bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body; sinking the seed crystal holder with the seed crystal adhered thereto into a melt for crystal growth in a crucible, with the surface of the seed crystal away from the seed crystal holder being located at a position where the melt temperature is highest; The crystals were grown using the Czochralski method.

64. The crystal growth method according to claim 63, wherein A portion of the seed crystal holder body is located in the melt, and another portion of the seed crystal holder body is located outside the melt.

65. The crystal growth method according to claim 63, wherein The seed crystal holder can rotate around the axis of the connecting rod, and the crucible can rotate around the axis of the crucible; the axis of the connecting rod is parallel to the axis of the crucible; The method of growing crystals by the upper pulling method comprises: The seed holder and the crucible are controlled to rotate in opposite directions.

66. The crystal growth method according to claim 65, wherein The rotation speed of the seed crystal holder is 0 rpm to 20 rpm; the rotation speed of the crucible is 0 rpm to 20 rpm.

67. The crystal growth method according to claim 66, wherein The product of the rotation speed of the seed holder and the rotation speed of the crucible is 20 or 150.

68. The crystal growth method according to claim 63, wherein Before sinking the seed crystal holder with the seed crystal adhered thereto into the melt for crystal growth, the method further comprises: The melt is heated to 1720°C to 1780°C.

69. The crystal growth method according to claim 63, wherein The method of growing crystals by the upper pulling method comprises: Keeping the seed crystal holder with the seed crystal adhered thereto submerged in the melt for 10 to 30 minutes; The seed crystal holder is pulled at a pulling speed of 0.01 mm / h to 0.2 mm / h to perform crystal growth.

70. The crystal growth method according to claim 63, wherein The method of growing crystals by the upper pulling method comprises: After the crystal grows for 10 hours to 30 hours, the crystal is pulled out of the melt at a pulling speed of 30 mm / h to 40 mm / h, and a height gap of 15 mm to 25 mm is maintained between the crystal and the surface of the melt.

71. The crystal growth method according to claim 63, wherein The step of bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body comprises: The diameter of the seed crystal is 5 mm to 10 mm larger than the diameter of the seed crystal holder body, and the seed crystal protrudes from the side surface of the protection holder away from the connecting rod by 0.1 mm to 0.2 mm.

72. The crystal growth method according to claim 63, wherein A second annular protective cover is provided on a surface of the protective support away from the connecting rod, the second protective cover is embedded in the protective support, and the second protective cover is arranged around the accommodating cavity; The step of bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body comprises: Fitting the seed crystal to the end of the second protective cover away from the connecting rod, and bonding it to the seed crystal bonding surface of the seed crystal holder body; The crystal growth method further comprises: After the crystal growth is completed, cutting the seed crystal holder along a cutting plane parallel to the bonding surface of the seed crystal to separate the seed crystal holder from the crystal; The cutting plane covers the seed crystal holder body, the protective holder and the second protective cover.

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