Film pasting equipment suitable for MEMS device

Abstract

The invention discloses film pasting equipment suitable for MEMS devices, the film pasting equipment comprises a rack, and a conveying mechanism, a feeding mechanism, a positioning mechanism, a first film pasting mechanism, a film tearing mechanism, a detection mechanism and a second film pasting mechanism which are arranged on the rack, the conveying mechanism can convey a bearing plate bearing a plurality of MEMS devices, the feeding mechanism can transfer the bearing plate into a conveying channel, and the film tearing mechanism is arranged on the conveying channel. The positioning mechanism can jack up a bearing plate in the conveying channel upwards, the first film pasting mechanism attaches a film to the MEMS device, the film tearing mechanism tears off the residual film, the detection mechanism can detect whether film bodies are not pasted on the MEMS device or not, and the second film pasting mechanism can attach single film bodies to the upper surface of the MEMS device which is not pasted. According to the automatic film pasting machine, an automatic film pasting mode of feeding, film pasting, film tearing, detecting and pasting supplementing is integrated, the film pasting efficiency of the MEMS device is improved, pasting supplementing can be conducted on the MEMS device, and the pasting missing problem is completely eradicated.

Description

Technical Field

[0001] The present invention relates to the technical field of film pasting equipment, and in particular to a film pasting equipment suitable for MEMS devices. Background Art

[0002] MEMS microphone is a kind of micro-electromechanical system. Microphone can be used to convert sound into electrical signals and is a kind of transducer. Nowadays, microphones have been widely used in electronic devices such as mobile phones, iPads, computers, smart watches and headphones. MEMS microphones are usually equipped with sound holes. During production, a diaphragm body made of special materials needs to be attached to the sound holes. This diaphragm body has waterproof and anti-fouling functions. The traditional method uses manual film pasting. Workers first place the carrier plate carrying multiple MEMS devices on the positioning fixture for positioning, and then place a whole diaphragm on the MEMS device. After pressing the diaphragm with a pressing plate, the remaining diaphragm is torn off, leaving the diaphragm body on the surface of the MEMS device. However, the efficiency of manual film pasting is low, and some MEMS devices have the problem of missing film during the film pasting process. Summary of the invention

[0003] In view of the deficiencies in the prior art, the present invention provides a film pasting device suitable for MEMS devices, which integrates the automated film pasting methods of loading, film pasting, film tearing, testing, and patching, thereby improving the film pasting efficiency of MEMS devices and being able to patch MEMS devices to prevent the problem of missed pasting.

[0004] To achieve the above purpose, the present invention adopts the following technical solutions:

[0005] A film pasting device suitable for MEMS devices, comprising a frame, and a conveying mechanism, a feeding mechanism, a positioning mechanism, a first film pasting mechanism, a film tearing mechanism, a detection mechanism, and a second film pasting mechanism arranged on the frame;

[0006] The conveying mechanism has a conveying channel, a conveying belt is arranged in the conveying channel, and the conveying belt can convey a carrier plate carrying a plurality of MEMS devices;

[0007] The loading mechanism can transfer the carrying plate to the conveying channel;

[0008] The positioning mechanism comprises a first positioning lifting seat and a second positioning lifting seat which are sequentially arranged in the conveying channel along the conveying direction of the carrying plate, and the first positioning lifting seat and the second positioning lifting seat can both lift the carrying plate in the conveying channel upwards and position the lifted carrying plate;

[0009] The first film attaching mechanism comprises a first suction head and a first driving module for driving the first suction head to move relative to the first positioning lifting seat, and the first suction head can attach the film to the MEMS device, wherein each film body on the film is attached to the upper surface of the corresponding MEMS device;

[0010] The film tearing mechanism comprises a first clamping component and a second driving module for driving the first clamping component to move, wherein the first clamping component can tear off the residual film to separate the residual film from the film body attached to the MEMS device;

[0011] The detection mechanism has a CCD camera, and the CCD camera can detect whether the film sheet is missing on the MEMS device;

[0012] The second film sticking mechanism comprises a second suction head and a third driving module for driving the second suction head to move relative to the second positioning lifting seat. The second suction head can stick a single film body to the upper surface of the missed MEMS device.

[0013] By setting a conveying mechanism, a feeding mechanism, a positioning mechanism, a first film-sticking mechanism, a film-tearing mechanism, a detection mechanism, and a second film-sticking mechanism, the conveying mechanism is used to transport a carrier plate carrying multiple MEMS devices, the feeding mechanism is used to transfer the carrier plate to a conveying channel, the positioning mechanism is used to lift up the carrier plate in the conveying channel to position the carrier plate, the first film-sticking mechanism is used to attach the diaphragm to the MEMS device, so that each diaphragm body on the diaphragm is attached to the upper surface of the corresponding MEMS device, the film-tearing mechanism is used to tear off the residual diaphragm, so that the residual diaphragm is separated from the diaphragm body attached to the MEMS device, the detection mechanism is used to detect whether a film body is missing from the MEMS device, and the second film-sticking mechanism is used to attach a single film body to the upper surface of the missing MEMS device; thereby, the film-sticking equipment integrates the automatic film-sticking method of feeding, film-sticking, film-tearing, detection, and compensation, improves the film-sticking efficiency of the MEMS device, and can compensate the MEMS device to prevent the problem of missing film.

[0014] In one embodiment, the loading mechanism has a first material trough, a material moving assembly, and a material pushing assembly. The material moving assembly can transfer the material bin in the first material trough to one side of the conveying channel, and the material pushing assembly can push the supporting plate in the material bin into the conveying channel.

[0015] In one embodiment, a second material trough is provided above the first material trough, and a side of the second material trough close to the material transfer component is open with an opening for the material bin to enter, and the material transfer component can transfer the material bin to the second material trough.

[0016] In one embodiment, the material moving assembly has a second clamping assembly and a fourth driving module, the second clamping assembly can clamp the material bin, and the fourth driving module can drive the second clamping assembly to move so that the second clamping assembly clamps and moves the material bin out of the first material trough.

[0017] In one embodiment, the pushing assembly comprises a pushing block and a pushing driving unit, and the pushing driving unit drives the pushing block to move along the X-axis direction so that the pushing block pushes the supporting plate in the material bin into the conveying channel.

[0018] In one embodiment, the conveying mechanism has a first baffle and a second baffle arranged at a distance, the conveying channel is formed between the first baffle and the second baffle, and two conveyor belts are provided, and the two conveyor belts are respectively installed on the first baffle and the second baffle.

[0019] In one embodiment, the first film laminating mechanism further comprises a film unwinding assembly, and the first suction head can absorb the film output by the film unwinding assembly.

[0020] In one embodiment, a third positioning lifting seat is provided between the first positioning lifting seat and the second positioning lifting seat, and at least one pressure-maintaining mechanism is provided above the third positioning lifting seat. The pressure-maintaining mechanism can press downward the diaphragm body attached to the upper surface of the MEMS device, and the film tearing mechanism is provided on one side of the pressure-maintaining mechanism.

[0021] In one embodiment, a waste recovery mechanism is provided on the frame, and the waste recovery mechanism is provided on one side of the film tearing mechanism. The recovery mechanism can recover the residual film torn off by the first clamping assembly.

[0022] In one of the embodiments, a defective product removal robot is provided on one side of the detection mechanism, and the defective product removal robot can remove the carrier plate and the unqualified MEMS devices on the carrier plate out of the conveying channel.

[0023] Compared with the prior art, the present invention has obvious advantages and beneficial effects. Specifically, by setting a conveying mechanism, a feeding mechanism, a positioning mechanism, a first film pasting mechanism, a film tearing mechanism, a detection mechanism, and a second film pasting mechanism, the conveying mechanism is used to convey a carrier plate carrying multiple MEMS devices, the feeding mechanism is used to transfer the carrier plate to a conveying channel, the positioning mechanism is used to lift up the carrier plate in the conveying channel to position the carrier plate, the first film pasting mechanism is used to attach the diaphragm to the MEMS device, so that each diaphragm body on the diaphragm is attached to the upper surface of the corresponding MEMS device, the film tearing mechanism is used to tear off the residual diaphragm, so that the residual diaphragm is separated from the diaphragm body pasted on the MEMS device, the detection mechanism is used to detect whether a film body is missing from the MEMS device, and the second film pasting mechanism is used to attach a single film body to the upper surface of the missed MEMS device; thereby, the film pasting equipment integrates the automatic film pasting method of feeding, film pasting, film tearing, detection, and compensation, improves the film pasting efficiency of the MEMS device, and can compensate the MEMS device to prevent the problem of missing pasting.

[0024] In order to more clearly explain the structural features, technical means and specific purposes and functions achieved by the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments: BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the assembly structure of an embodiment of the present invention;

[0026] Figure 2 is a schematic top view of an embodiment of the present invention;

[0027] Figure 3 It is a schematic diagram of the structure of a feeding mechanism according to an embodiment of the present invention;

[0028] Figure 4 It is a schematic diagram of the working state of the first material trough, the second material trough, the material shifting seat and the material shifting assembly of the embodiment of the present invention;

[0029] Figure 5 It is a structural schematic diagram of a material diverter seat according to an embodiment of the present invention;

[0030] Figure 6 It is a cross-sectional schematic diagram of a material diverter seat according to an embodiment of the present invention;

[0031] Figure 7 It is a side view of the working state of the first material moving component of the embodiment of the present invention;

[0032] Figure 8 1 is a schematic structural diagram of a first pusher assembly according to an embodiment of the present invention;

[0033] Fig. 9 It is a schematic diagram of the assembly of the conveying mechanism and the second pusher assembly of an embodiment of the present invention;

[0034] Fig.10 is a schematic structural diagram of a first film-sticking mechanism according to an embodiment of the present invention;

[0035] Fig.11 is a schematic diagram of the diaphragm structure of an embodiment of the present invention;

[0036] Fig.12 Schematic diagram of the working state of the first suction head of the embodiment of the present invention;

[0037] Fig.13 Schematic diagram of the working state of the pressure-maintaining mechanism of the embodiment of the present invention;

[0038] Fig.14 2 is an exploded schematic diagram of a pressure-maintaining mechanism according to an embodiment of the present invention;

[0039] Fig.15 It is a schematic diagram of the assembly of the film tearing mechanism and the recovery mechanism of an embodiment of the present invention;

[0040] Fig.16 It is a schematic structural diagram of a material discharging mechanism according to an embodiment of the present invention.

[0041] Description of the accompanying drawings:

[0042] 10-frame, 11-defective product storage table, 20-conveying mechanism, 21-conveying channel, 22-conveying belt, 23-conveying motor, 24-first baffle, 25-second baffle, 26-first guide rod, 27-adjusting screw rod, 28-adjusting motor, 30-positioning mechanism, 31-first positioning lifting seat, 32-second positioning lifting seat, 33-third positioning lifting seat, 40-feeding mechanism, 41-first material trough, 42-first material moving assembly, 421-second clamping assembly, 4211-first clamping claw, 4212-second Clamping claw, 4213-clamping drive unit, 4214-slot, 422-fourth drive module, 4221-horizontal drive module, 4222-lifting drive module, 43-first push assembly, 431-first push block, 432-first push drive unit, 433-positioning slot, 434-first buffer spring, 44-second material slot, 45-push assembly, 451-push seat, 4511-swing arm, 4512-reset spring, 4513-rotating shaft, 4514-push surface, 4515-limiting surface, 4516- Receiving groove, 452-material dispensing drive unit, 46-block, 47-arrival sensor, 50-first film pasting mechanism, 51-first suction head, 52-first drive module, 521-XYZ axis drive module, 522-rotation drive module, 53-film unwinding assembly, 531-unwinding shaft, 532-rewinding shaft, 533-separation plate, 534-release film, 54-first calibration unit, 55-second calibration unit, 56-second film pasting mechanism, 60-film tearing mechanism, 61-first clamping assembly, 62-second drive module , 70-feeding mechanism, 71-third material trough, 72-second material moving assembly, 73-second material pushing assembly, 74-fourth material trough, 80-pressure maintaining mechanism, 81-pressure head, 82-pressure driving unit, 83-mounting seat, 84-second guide rod, 85-pressure sensor, 86-second buffer spring, 90-recovery mechanism, 91-pipeline, 911-input port, 100-carrying plate, 101-MEMS device, 110-diaphragm, 111-diaphragm body, 112-residual diaphragm, 120-material bin, 121-card plate. DETAILED DESCRIPTION

[0043] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside" and "outside" etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the positions or elements referred to must have specific directions, be constructed and operated in specific directions. Therefore, they should not be understood as limitations on the present invention.

[0044] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] like Figure 1-16 As shown, the present invention discloses a film pasting device suitable for MEMS devices, including a frame 10, and a conveying mechanism 20, a positioning mechanism 30, a loading mechanism 40, a first film pasting mechanism 50, a film tearing mechanism 60, a detection mechanism (not shown), a second film pasting mechanism 56, and a unloading mechanism 70 arranged on the frame 10.

[0046] The conveying mechanism 20 has a conveying channel 21, and a conveying belt 22 is arranged in the conveying channel 21. The conveying belt 22 can convey a carrier plate 100 carrying multiple MEMS devices 101 along the X-axis direction. The conveying belt 22 is driven to rotate by a conveying motor 23. Three groups of MEMS devices 101 are distributed on the carrier plate 100 along the X-axis direction at intervals. Each group of MEMS devices 101 has multiple MEMS devices 101 distributed in an array, and two adjacent MEMS devices 101 maintain a distance.

[0047] The loading mechanism 40 can transfer the carrier plate 100 carrying a plurality of MEMS devices 101 to the conveying channel 21 .

[0048] The positioning mechanism 30 includes a first positioning lifting seat 31 and a second positioning lifting seat 32 which are sequentially arranged in the conveying channel 21 along the conveying direction of the carrying plate 100. The first positioning lifting seat 31 and the second positioning lifting seat 32 can both lift the carrying plate 100 in the conveying channel 21 upward and position the lifted carrying plate 100.

[0049] The first film sticking mechanism 50 has a first suction head 51 and a first driving module 52 for driving the first suction head 51 to move relative to the first positioning lifting seat 31. The first suction head 51 can stick the diaphragm 110 to the MEMS device 101, wherein each diaphragm body 111 on the diaphragm 110 is stuck to the upper surface of the corresponding MEMS device 101.

[0050] The film tearing mechanism 60 comprises a first clamping component 61 and a second driving module 62 for driving the first clamping component 61 to move. The first clamping component 61 can tear off the residual film 112 to separate the residual film 112 from the film body 111 attached to the MEMS device 101 .

[0051] The detection mechanism has a CCD camera (not shown), which can detect whether the film sheet 111 is missing from the MEMS device 101 . The CCD camera is disposed above the second positioning lifting seat 32 .

[0052] The second film-laminating mechanism 56 has a second suction head (not shown) and a third driving module (not shown) for driving the second suction head to move relative to the second positioning lifting seat 32. The second suction head can attach a single diaphragm body 111 to the upper surface of the missed MEMS device 101. The second film-laminating mechanism 56 is based on the same principle as the first film-laminating mechanism 50. The number of the second suction heads is single. The second suction head sucks a single diaphragm body 111 each time and attaches it to the upper surface of the missed MEMS device 101. It can be understood that a plurality of second suction heads can be arranged side by side, and each of the second suction heads can move independently.

[0053] The unloading mechanism 70 can receive the carrying plate 100 outputted from the conveying channel 21 . The unloading mechanism 70 has the same structure and principle as the loading mechanism 40 .

[0054] The loading mechanism 40 comprises a first material trough 41, a first material moving component 42, and a first material pushing component 43. The first material moving component 42 can transfer the material bin 120 in the first material trough 41 to one side of the input end of the conveying channel 21, and the first material pushing component 43 can push the supporting plate 100 in the material bin 120 into the conveying channel 21 along the X-axis direction. The first material trough 41 extends along the Y-axis direction, and both ends of the first material trough 41 are open to form openings for the material bin 120 to enter and exit. By setting up the loading mechanism 40 composed of the first material trough 41, the first material moving component 42, and the first material pushing component 43, the first material moving component 42 moves the material bin 120 out of the first material trough 41, and then the first material pushing component 43 pushes the supporting plate 100 in the material bin 120 into the conveying channel 21, thereby realizing automatic loading of the supporting plate 100 with high efficiency.

[0055] A second material trough 44 is provided above the first material trough 41. The second material trough 44 extends along the Y-axis direction. The second material trough 44 has an opening on one side close to the first material moving component 42 for the material bin 120 to enter. The first material moving component 42 can transfer the material bin 120 to the second material trough 44. By providing the second material trough 44, the empty material bin 120 can be stacked in the second material trough 44 in time, which facilitates the first material moving component 42 to continue to move the full material trough out of the first material trough 41, thereby shortening the loading time and improving efficiency.

[0056] The feeding mechanism 40 also has a material shifting assembly 45, which has a material shifting seat 451 and a material shifting driving unit 452. The material shifting seat 451 is movably arranged in the first material trough 41. A swing arm 4511 and a return spring 4512 are arranged on the material shifting seat 451. The swing arm 4511 is rotatably connected to the material shifting seat 451 through a rotating shaft 4513. The axis of the rotating shaft 4513 extends along the X-axis direction. The return spring 4512 allows the end of the swing arm 4511 close to the first material shifting assembly 42 to always have a revolving The shaft 4513 tilts upward and protrudes from the upper surface of the material-discharging seat 451, and the material-discharging driving unit 452 drives the material-discharging seat 451 to move along the Y-axis direction toward the first material-discharging assembly 42, so that the swing arm 4511 pushes the stacked material bin 120 to move toward the direction of the first material-discharging assembly 42. The return spring 4512 can be a pressure spring, and the upper end of the pressure spring abuts against the swing arm 4511, and the lower end of the pressure spring abuts against the material-discharging seat 451. It can be understood that the return spring 4512 can also be By adopting a tension spring; by arranging a material-pickling seat 451 and a material-pickling driving assembly in the first material trough 41, a swing arm 4511 and a return spring 4512 are arranged on the material-pickling seat 451, under the elastic force of the return spring 4512, one end of the swing arm 4511 close to the first material-moving assembly 42 is tilted upward, and when the material-pickling driving unit 452 drives the material-pickling seat 451 to move close to the first material-moving assembly 42, the tilted end of the swing arm 4511 pushes the stacked material bins 120 to move along the first material trough 41, so that the first material-moving assembly 42 can move the material bins 120 to the first material-moving assembly 42. 20 is moved out, when the material removing drive unit 452 drives the material removing seat 451 to move away from the first material moving component 42, the material bin 120 abuts against the upper surface of the swing arm 4511, so that the end of the swing arm 4511 close to the first material moving component 42 rotates downward, thereby allowing the swing arm 4511 to move smoothly to the side of the material bin 120 away from the first material moving component 42, so that the subsequent swing arm 4511 can push the material bin 120 to move, so that the full material bin 120 only needs to be stacked in the first material trough 41 to wait for subsequent automatic loading, and the loading efficiency of the material bin 120 is high.

[0057] The material-prying driving unit 452 may be driven by a cylinder or a synchronous belt + servo motor. The servo motor drives the material-prying seat 451 to move via the synchronous belt. In addition, the material-prying driving unit 452 may also be driven by a linear motor.

[0058] Specifically, the material-digging seat 451 is slidably connected to the frame 10, and the end of the swing arm 4511 close to the first material-moving component 42 is provided with a pushing surface 4514 that can push the material bin 120, and the lower end of the end of the swing arm 4511 away from the first material-moving component 42 is provided with a limiting surface 4515 that can abut against the material-digging seat 451, and the material-digging seat 451 is provided with a receiving groove 4516, and the swing arm 4511 is provided with a receiving groove 4516, and the lower end of the return spring 4512 abuts against the inner bottom wall of the receiving groove 4516, and the limiting surface 4515 abuts against the inner bottom wall of the receiving groove 4516 to limit the swing arm 451 1 rotates, when the material-dipping seat 451 moves toward the direction approaching the first material-moving assembly 42, the pushing surface 4514 pushes the material bin 120 to move; when the material-dipping seat 451 moves toward the direction approaching and away from the first material-moving assembly 42, the material bin 120 abuts against the upper surface of the swing arm 4511, so that the end of the swing arm 4511 close to the first material-moving assembly 42 rotates downward around the rotating shaft 4513 and hides in the accommodating groove 4516; by providing the accommodating groove 4516, the swing arm 4511 and the return spring 4512 are both arranged in the accommodating groove 4516, so that the assembly structure of the material-dipping seat 451, the swing arm 4511 and the return spring 4512 is compact and occupies little space.

[0059] Blocks 46 are provided on both sides of the opening of the first material trough 41 close to the first material moving assembly 42. The block 46 abuts against the material bin 120 to limit the block 46 from falling from the first material trough 41. A sensor 47 for detecting the material bin 120 is provided on the block 46. When the sensor 47 detects the material bin 120, the material shifting drive assembly stops working.

[0060] The first material moving component 42 has a second clamping component 421 and a fourth driving module 422. The second clamping component 421 can clamp the material bin 120. The fourth driving module 422 can drive the second clamping component 421 to move along the Y-axis and Z-axis directions so that the second clamping component 421 clamps and moves out the material bin 120 in the first material trough 41.

[0061] Specifically, the second clamping assembly 421 is provided with a first clamping jaw 4211, a second clamping jaw 4212 and a clamping drive unit 4213, the clamping drive unit 4213 can adopt a slide cylinder, the first clamping jaw 4211 is arranged above the second clamping jaw 4212, the clamping drive unit 4213 drives the first clamping jaw 4211 to move closer to or away from the second clamping jaw 4212 along the Z-axis direction, the second clamping jaw 4212 is provided with a slot 4214 with an upward opening, the slot 4214 can be used for the card plate 121 at the lower end of the silo 120 to extend into, the cooperation between the slot 4214 and the card plate 121 can limit the movement of the silo 120 along the Y-axis direction, the fourth drive module 422 has a horizontal drive module 4221 and a lifting drive module 4222, the horizontal drive module 4221 and the lifting drive module 4222 can both adopt a screw + motor drive method or a synchronous belt + motor drive method.

[0062] The first pusher assembly 43 has a first pusher block 431 and a first pusher driving unit 432 . The first pusher driving unit 432 drives the first pusher block 431 to move along the X-axis direction, so that the first pusher block 431 pushes the carrier plate 100 in the bin 120 and the MEMS device 101 on the carrier plate 100 into the conveying channel 21 .

[0063] A positioning notch 433 is provided at one end of the first push block 431 facing the conveying channel 21. The positioning notch 433 extends along the Y-axis direction and passes through both sides of the first push block 431. The positioning notch 433 has a trumpet-shaped opening (not shown). The width of the trumpet-shaped opening gradually increases toward the conveying channel 21. A first buffer spring 434 is provided between the first push block 431 and the driving end of the first push drive unit 432. The first buffer spring 434 enables the first push block 431 to always have a tendency to move toward the conveying channel 21. The first push drive unit 432 can adopt a slide cylinder. By setting the positioning notch 433, one end of the carrier plate 100 is extended into the positioning notch 433 for positioning, so that it is more stable when pushing the carrier plate 100 to move. The trumpet-shaped opening is provided to facilitate the carrier plate 100 to smoothly extend into the positioning notch 433.

[0064] It should be noted that the loading mechanism 40 can also be set as a material tray + robot structure, the material tray can store multiple supporting plates 100 distributed side by side, and the robot takes the supporting plate 100 from the material tray and directly puts it into the conveying channel 21.

[0065] The conveying mechanism 20 has a first baffle 24 and a second baffle 25 which are spaced apart from each other, and the conveying channel 21 is formed between the first baffle 24 and the second baffle 25. Two conveyor belts 22 are provided, and the two conveyor belts 22 are respectively installed on the first baffle 24 and the second baffle 25. When working, the two conveyor belts 22 support the carrier plate 100 and drive the carrier plate 100 to move. Two conveying motors 23 are provided, and the two conveying motors 23 are respectively installed on the first baffle 24 and the second baffle 25. The two conveying motors 23 respectively drive the corresponding conveyor belts 22 to rotate.

[0066] The first baffle 24 is connected to the frame 10, and the second baffle 25 is movably connected to the first baffle 24 through the first guide rod 26. The first baffle 24 is provided with an adjusting screw rod 27 and an adjusting motor 28. The adjusting screw rod 27 is rotatably connected to the second baffle 25. The adjusting motor 28 drives the second baffle 25 to move closer to or away from the first baffle 24 along the Y-axis direction through the adjusting screw rod 27 to adjust the width of the conveying channel 21.

[0067] The first positioning lifting seat 31 is driven to move up and down by a first lifting drive unit, and the first lifting drive unit is installed on the frame 10. The second positioning lifting seat 32 is driven to move up and down by a second lifting drive unit. The first lifting drive unit and the second lifting drive unit can both use cylinders. The first positioning lifting seat 31 and the second positioning seat are both provided with a plurality of positioning columns (not shown) and a plurality of adsorption holes. The positioning columns can extend upward into the positioning holes (not shown) at the edge of the carrying plate 100, and the adsorption holes can adsorb the lower surface of the carrying plate 100. In addition, a horizontal driving unit can be provided to drive the first positioning lifting seat 31 to move along the X-axis direction, so that the position of the first positioning lifting seat 31 along the X-axis direction can be fine-tuned so that the positioning columns can accurately extend into the positioning holes, and the same is true for the second positioning lifting seat 32.

[0068] The first film laminating mechanism 50 also has a film 110 unwinding component 53, and the first suction head 51 can absorb the film 110 output by the film 110 unwinding component 53. Specifically, the film 110 unwinding component 53 has an unwinding shaft 531, a winding shaft 532 and a separation plate 533. The release film 534 output by the unwinding shaft 531 reaches the winding shaft 532 after passing through the separation plate 533. The separation plate 533 separates the film 110 on the material strip from the release film 534, so that the first suction head 51 can absorb the film 110.

[0069] The first driving module 52 comprises an XYZ-axis driving module 521 and a rotating driving module 522. The rotating driving module 522 is arranged at the driving end of the XYZ-axis driving module 521. The first suction head 51 is arranged at the driving end of the rotating driving module 522. The rotating axis of the rotating driving module 522 extends along the Z-axis direction. The driving end of the XYZ-axis driving module 521 is also provided with a first calibration unit 54. The camera of the first calibration unit 54 can detect the position of the diaphragm 110 on the diaphragm 110 unwinding assembly 53. A second calibration unit 55 is provided on one side of the diaphragm 110 unwinding assembly 53. The second calibration unit 55 can detect the position of the diaphragm 110 on the first suction head 51. Both the first calibration unit 54 and the second calibration unit 55 can adopt CCD cameras.

[0070] The second driving module 62 has the same structure as the first driving module 52 . The second driving module 62 can drive the first clamping assembly 61 to move along the X-axis, Y-axis, and Z-axis directions. Specifically, the first clamping assembly 61 can use a clamping cylinder.

[0071] A third positioning lifting seat 33 is provided between the first positioning lifting seat 31 and the second positioning lifting seat 32. The third positioning lifting seat 33 is driven to move up and down by a third lifting driving unit. The third positioning lifting seat 33 has the same structure as the first positioning lifting seat 31. At least one pressure-maintaining mechanism 80 is provided above the third positioning lifting seat 33. For example, there are three pressure-maintaining mechanisms 80 distributed along the X-axis direction. The pressure-maintaining mechanisms 80 can press downward against the diaphragm body 111 attached to the upper surface of the MEMS device 101. The tearing film The mechanism 60 is arranged on one side of the pressure-keeping mechanism 80, and the pressure-keeping mechanism 80 has a pressure head 81 and a pressure driving unit 82 for driving the pressure head 81 to move up and down, and the pressure driving unit 82 can adopt a cylinder; by setting the third positioning lifting seat 33 and the pressure-keeping mechanism 80, the pressure-keeping mechanism 80 is used to press the diaphragm 110, so that the diaphragm body 111 is more tightly and firmly adhered to the MEMS device 101, so that when the film tearing mechanism 60 tears off the residual diaphragm 112, the residual diaphragm 112 is easier to separate from the diaphragm body 111, thereby reducing the phenomenon of missing adhesion.

[0072] A mounting seat 83 is provided at the driving end of the pressure driving unit 82, and the pressure head 81 is slidably mounted on the mounting seat 83 by a second guide rod 84. A pressure sensor 85 and a plurality of second buffer springs 86 are provided between the mounting seat 83 and the pressure head 81, and the plurality of second buffer springs 86 surround the outer side of the pressure sensor 85. The upper and lower surfaces of the pressure sensor 85 are respectively in contact with the mounting seat 83 and the pressure head 81, and the upper and lower ends of the second buffer spring 86 are respectively in contact with the mounting seat 83 and the pressure head 81. When the pressure sensor 85 detects that the pressure value reaches the set value, the pressure driving unit 82 stops moving; by providing the pressure sensor 85 and the plurality of second buffer springs 86, the pressure head 81 is prevented from applying excessive pressure to avoid damaging the MEMS device 101. The plurality of second buffer springs 86 surround the outer side of the pressure sensor 85, so that the force in all directions between the mounting seat 83 and the pressure head 81 is uniform, so that the pressure value detected by the pressure sensor 85 has a small deviation, and the pressure maintaining effect is better.

[0073] The frame 10 is provided with a waste recovery mechanism 90, and the waste recovery mechanism 90 is arranged on one side of the film tearing mechanism 60. The recovery mechanism 90 can recover the residual film 112 torn off by the first clamping assembly 61. Specifically, the recovery device has a pipe 91 and a negative pressure device connected to the pipe 91. The input port 911 of the pipe 91 is horizontally facing the first clamping assembly 61. When working, the pipe 91 can suck away the residual film 110 torn off by the first clamping assembly 61.

[0074] A defective product removal robot (not shown) is provided on one side of the detection mechanism. The defective product removal robot can remove the carrier plate 100 and the MEMS device 101 on the carrier plate 100 that has not been subsidized properly out of the conveying channel 21. A defective product storage table 11 is provided on one side of the conveying channel 21. During operation, the second film-sticking mechanism 56 subsidizes the missed MEMS devices 101, and the detection mechanism re-inspects the subsidized MEMS devices 101. If the subsidization is unqualified, the defective product removal robot will remove the carrier plate 100 and the MEMS device 101 on the carrier plate 100 that has not been subsidized properly out of the conveying channel 21.

[0075] The unloading mechanism 70 has a third material trough 71, a second material moving component 72, and a second material pushing component 73. The second material moving component 72 can transfer the material bin 120 in the third material trough 71 to one side of the output end of the conveying channel 21. The second material pushing component 73 can push the carrier plate 100 and the MEMS device 101 on the carrier plate 100 completely into the material bin 120 along the X-axis direction. A fourth material trough 74 is provided above the third material trough 71. When working, the conveying channel 21 conveys the carrier plate 100 and the MEMS device 101 on the carrier plate 100 to the material bin 120. Due to the limitations of the conveyor belt 22, the carrier plate 100 does not completely enter the material bin 120, so it is necessary to use the second material pushing component 73 to push the carrier plate 100 completely into the material bin 120.

[0076] It should also be noted that the MEMS device 101 may be a MEMS microphone or a MEMS sensor, and the carrier board 100 may be a PCB board or other board with a carrying function.

[0077] The working principle of the present invention is as follows: a worker stacks the material bins 120 and places them into the first material trough 41; the material shifting assembly 45 pushes the stacked material bins 120 to move toward the first material moving assembly 42; the first material moving assembly 42 clamps the material bins 120 and transfers the material bins 120 from the first material trough 41 to one side of the input end of the conveying channel 21; the first material pushing assembly 43 pushes the carrier plate 100 in the material bin 120 into the conveying channel 21; the conveyor belt 22 drives the carrier plate 100 to pass through the first positioning lifting seat 31, the second positioning lifting seat 32, and the third positioning lifting seat 33 in sequence; the first positioning lifting seat 31 is lifted up The carrier plate 100 is positioned, and the first film sticking mechanism 50 sticks the diaphragm 110 on the MEMS device 101 located on the carrier plate 100, so that each diaphragm body 111 on the diaphragm 110 is attached to the upper surface of the corresponding MEMS device 101, and the first positioning lifting seat 31 descends, and the conveyor belt drives the carrier plate 100 to move above the third positioning lifting seat 33, and the third positioning lifting seat 33 lifts the carrier plate 100, and the pressure holding mechanism 80 presses the diaphragm 110 downward, so that the diaphragm body 111 and the MEMS device 101 are closely attached. After the pressure holding is completed, the film tearing mechanism The residual film 112 is torn off by the film tearing mechanism 60, so that the residual film 112 is separated from the film body 111 attached to the MEMS device 101. When the film tearing mechanism 60 transfers the residual film 112 to the input port 911 of the pipeline 91, the input port 911 sucks away the residual film 112, and then the third positioning lifting seat 33 descends, and the conveyor belt 22 drives the carrier plate to move to the top of the second positioning lifting seat 32. The detection mechanism detects whether the film body 111 is missing on the MEMS device 101. If there is a missing film, the second positioning lifting seat 32 lifts the carrier plate 100, and the second film sticking mechanism 56 removes the missing MEMS device 101. The EMS device 101 is subsidized. After the subsidy is completed, the testing organization re-inspects the subsidized MEMS device 101. If the re-inspection fails, the defective product removal robot moves the carrier plate 100 and the unqualified MEMS device 101 on the carrier plate 100 to the defective product storage table 11. If there is no missing or the re-inspection is qualified, the conveyor belt 22 transports the carrier plate 100 to the material bin 120 on the second material transfer component 72, the second material pushing component 73 pushes the carrier plate 100 completely into the material bin 120, and finally the second material transfer component 72 transfers the material bin 120 to the fourth material trough 74.

[0078] In summary, the present invention is provided with a conveying mechanism 20, a feeding mechanism 40, a positioning mechanism 30, a first film pasting mechanism 50, a film tearing mechanism 60, a detection mechanism, and a second film pasting mechanism 56. The conveying mechanism 20 is used to convey a carrier plate 100 carrying a plurality of MEMS devices 101. The feeding mechanism 40 is used to transfer the carrier plate 100 to the conveying channel 21. The positioning mechanism 30 is used to lift the carrier plate 100 in the conveying channel 21 upward to position the carrier plate 100. The first film pasting mechanism 50 is used to attach the diaphragm 110 to the MEMS device 101, so that each diaphragm body 111 on the diaphragm 110 is attached to the corresponding diaphragm body 111. The upper surface of the corresponding MEMS device 101 is peeled off by the film peeling mechanism 60 to separate the residual film 112 from the film body 111 attached to the MEMS device 101, and the detection mechanism is used to detect whether the film body 111 is missed on the MEMS device 101, and the second film sticking mechanism 56 is used to attach a single film body 111 to the upper surface of the missed MEMS device 101; thereby, the film sticking equipment integrates the automated film sticking method of loading, film sticking, film peeling, detection, and patching, thereby improving the film sticking efficiency of the MEMS device 101, and the MEMS device 101 can be patched to prevent the problem of missed sticking.

[0079] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Therefore, any modification, equivalent replacement, improvement, etc. made to the above embodiment based on the technical practice of the present invention still falls within the scope of the technical solution of the present invention.

Claims

1. A film attaching device suitable for MEMS devices, characterized in that: It includes a frame, and a conveying mechanism, a feeding mechanism, a positioning mechanism, a first film pasting mechanism, a film tearing mechanism, a detection mechanism, and a second film pasting mechanism arranged on the frame; The conveying mechanism has a conveying channel, a conveying belt is arranged in the conveying channel, and the conveying belt can convey a carrier plate carrying a plurality of MEMS devices; The loading mechanism can transfer the carrying plate to the conveying channel; The positioning mechanism comprises a first positioning lifting seat and a second positioning lifting seat which are sequentially arranged in the conveying channel along the conveying direction of the carrying plate, and the first positioning lifting seat and the second positioning lifting seat can both lift the carrying plate in the conveying channel upwards and position the lifted carrying plate; The first film attaching mechanism comprises a first suction head and a first driving module for driving the first suction head to move relative to the first positioning lifting seat, and the first suction head can attach the film to the MEMS device, wherein each film body on the film is attached to the upper surface of the corresponding MEMS device; The film tearing mechanism comprises a first clamping component and a second driving module for driving the first clamping component to move, wherein the first clamping component can tear off the residual film to separate the residual film from the film body attached to the MEMS device; The detection mechanism has a CCD camera, and the CCD camera can detect whether the film sheet is missing on the MEMS device; The second film sticking mechanism comprises a second suction head and a third driving module for driving the second suction head to move relative to the second positioning lifting seat. The second suction head can stick a single film body to the upper surface of the missed MEMS device.

2. The film attaching device suitable for MEMS devices according to claim 1, characterized in that: The loading mechanism comprises a first material trough, a material moving assembly and a material pushing assembly. The material moving assembly can transfer the material bin in the first material trough to one side of the conveying channel, and the material pushing assembly can push the carrying plate in the material bin into the conveying channel.

3. The film attaching device suitable for MEMS devices according to claim 2, characterized in that: A second material trough is provided above the first material trough, and a side of the second material trough close to the material transfer assembly is opened with an opening for the material bin to enter, and the material transfer assembly can transfer the material bin to the second material trough.

4. The film attaching device suitable for MEMS devices according to claim 2, characterized in that: The material moving assembly comprises a second clamping assembly and a fourth driving module. The second clamping assembly can clamp the material bin, and the fourth driving module can drive the second clamping assembly to move so that the second clamping assembly clamps and moves the material bin out of the first material trough.

5. The film attaching device suitable for MEMS devices according to claim 2, characterized in that: The pushing assembly comprises a pushing block and a pushing driving unit, and the pushing driving unit drives the pushing block to move along the X-axis direction so that the pushing block pushes the carrying plate in the bin into the conveying channel.

6. The film attaching device suitable for MEMS devices according to claim 1, characterized in that: The conveying mechanism comprises a first baffle and a second baffle which are spaced apart from each other, wherein the conveying passage is formed between the first baffle and the second baffle, and two conveying belts are provided, and the two conveying belts are respectively mounted on the first baffle and the second baffle.

7. The film attaching device suitable for MEMS devices according to claim 1, characterized in that: The first film laminating mechanism further comprises a film unwinding assembly, and the first suction head can absorb the film output by the film unwinding assembly.

8. The film attaching device suitable for MEMS devices according to claim 1, characterized in that: A third positioning lifting seat is provided between the first positioning lifting seat and the second positioning lifting seat, and at least one pressure-maintaining mechanism is provided above the third positioning lifting seat. The pressure-maintaining mechanism can press downward the diaphragm body attached to the upper surface of the MEMS device, and the film tearing mechanism is provided on one side of the pressure-maintaining mechanism.

9. The film attaching device suitable for MEMS devices according to claim 1, characterized in that: The frame is provided with a waste recovery mechanism, which is arranged on one side of the film tearing mechanism. The recovery mechanism can recover the residual film torn off by the first clamping assembly.

10. The film attaching device suitable for MEMS devices according to claim 1, characterized in that: A defective product removal robot is provided on one side of the detection mechanism, and the defective product removal robot can remove the supporting plate and the unqualified MEMS devices on the supporting plate out of the conveying channel.

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