Single crystal furnace crucible weighing mechanism

Abstract

The invention belongs to the technical field of single crystal furnace devices, and particularly relates to a single crystal furnace crucible weighing mechanism which comprises a bearing seat, a crucible is arranged on the top surface of the bearing seat; the side surface of the bearing seat is sleeved with a limiting cylinder. A supporting frame is mounted on the outer side, close to the bottom, of the limiting cylinder; a limiting assembly is installed between the limiting cylinder and the supporting frame. A plurality of uniformly arranged rotating grooves are formed in the surface of the limiting cylinder; a rotating column is rotationally connected into the rotating groove; the side, close to the crucible, of the rotating column is rotationally connected with a roller, and the roller makes contact with the outer side surface of the crucible. The crucible can be limited through the limiting cylinder and the idler wheel, the crucible is prevented from shaking in the rotating process, then the measuring precision of the weighing sensor is improved, the friction force between the idler wheel and the crucible can be reduced through rotation of the idler wheel, and the crucible can be replaced and rotated more smoothly.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal furnace devices, in particular to a single crystal furnace crucible weighing mechanism. Background Art

[0002] Single crystal silicon is an important semiconductor material, widely used in the manufacture of electronic devices, especially playing a key role in the integrated circuit industry. The production of single crystal silicon is generally carried out through a single crystal furnace and the direct pulling method.

[0003] In the process of preparing single crystal silicon in the prior art single crystal furnace, the weight of the crystal is an important parameter to measure the growth progress and quality. The monitoring of the crystal quality is generally carried out by a weighing device to perform real-time weight monitoring of the crystal to ensure that the crystal growth process is carried out according to the predetermined parameters.

[0004] However, during the crystal growth process, since the crucible needs to rotate, the weighing sensor not only bears vertical downward pressure, but is also affected by the vibration of the crucible axis due to rotation, which in turn affects its measurement accuracy and causes errors in the measured value.

[0005] To this end, the present invention provides a single crystal furnace crucible weighing mechanism. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve its technical problems is as follows: a single crystal furnace crucible weighing mechanism described in the present invention comprises a receiving seat; a crucible is arranged on the top surface of the receiving seat; a limiting cylinder is sleeved on the side surface of the receiving seat; a support frame is installed on the outer side of the limiting cylinder near the bottom position; a limiting assembly is installed between the limiting cylinder and the support frame; the limiting assembly is used to lock the relative position between the limiting cylinder and the receiving seat; a plurality of uniformly arranged rotating grooves are opened on the surface of the limiting cylinder; a rotating column is rotatably connected in the rotating groove; a roller is rotatably connected on the side of the rotating column close to the crucible, and the roller contacts the outer surface of the crucible; a sub-gear is fixedly connected to one end of the rotating column outside the limiting cylinder; a crown gear is rotatably connected to the top surface of the limiting cylinder; the crown gear is meshed with the sub-gear; a supporting rod is fixedly connected to the bottom surface of the receiving seat; a weighing sensor is installed at the bottom of the supporting rod; a rotating seat is installed at the bottom of the weighing sensor; a servo motor is installed inside the rotating seat to drive the weighing sensor, and the rotating seat is driven to rise and fall by an external hydraulic cylinder During operation, when single crystal silicon is being prepared by the Czochralski method, in order to monitor quality changes, the embodiment of the present invention can be used. Before the crucible is placed on the top surface of the receiving seat, the user needs to first rotate the crown gear, which drives the sub-gear to rotate, and then the sub-gear drives the rotating column in the rotating groove to rotate, so that the roller on the end surface of the rotating column is set in a vertical state. At this time, the crucible can be placed on the top surface of the receiving seat. Since the roller is set vertically, it can guide the crucible while reducing the friction of the crucible when it moves by its own rolling. force, and when the crucible is placed on the top surface of the receiving seat, the crown gear is turned again to drive the rotating column to rotate, so that the roller rotates to a horizontal state, and then the rotating seat drives the support rod and the receiving seat to rotate, and then drives the crucible to rotate, so as to complete the subsequent Czochralski method to prepare single crystal silicon rods. During the rotation of the crucible, the limit cylinder and the roller will limit the crucible to prevent the crucible from shaking during the rotation, thereby improving the measurement accuracy of the weighing sensor, and the rotation of the roller can also reduce the friction between it and the crucible, making the replacement and rotation of the crucible smoother.

[0008] Preferably, the bottom surface of the crucible is provided with a plurality of evenly arranged grooves; the top surface of the receiving seat is provided with a plurality of evenly arranged protrusions; the grooves correspond to the protrusions one by one, and the grooves and the protrusions fit each other; during operation, when the crucible needs to be placed on the top surface of the receiving seat, the grooves on the bottom surface of the crucible need to be aligned with the protrusions on the top surface of the receiving seat, so that the protrusions can be inserted into the grooves on the bottom surface of the crucible. At this time, when the receiving seat drives the crucible to rotate, slipping between the lower crucible and the receiving seat can be avoided.

[0009] Preferably, a receiving groove is provided on the top surface of the receiving seat at a position corresponding to the protrusion, and the receiving groove is matched with the protrusion; a through hole is fixedly connected to the bottom of the receiving groove, and the diameter of the through hole is smaller than the diameter of the receiving groove; a tray is slidably connected to the surface of the support rod; a push rod is fixedly connected to the top surface of the tray at a position corresponding to the through hole, and the push rod is matched with the through hole; during operation, when it is necessary to introduce raw materials into the crucible in the single crystal furnace, the support rod will gradually descend driven by the external hydraulic cylinder, so that the tray will rest against the bottom surface of the single crystal furnace. At this time, the push rod on the top surface of the tray will be pushed into the receiving groove through the through hole, thereby lifting the protrusion in the receiving groove, and then pushing the crucible away from the receiving seat through the protrusion. At this time, when the material is poured into the crucible, it will not continuously impact the weighing sensor through the crucible, thereby ensuring the service life of the weighing sensor.

[0010] Preferably, the inner side of the crown gear is fixedly connected with an outer ring; the inner side of the outer ring is rotatably connected with an inner ring; the surface of the inner ring is provided with a plurality of evenly arranged mounting grooves; the width of one end of the mounting groove is greater than that of the other side; the rolling connection in the mounting groove is provided with a limiting roller; the diameters of both ends of the limiting roller are greater than the diameter of the middle; the diameter of the middle of the limiting roller is smaller than the end with the larger mounting groove width but larger than the end with the smaller mounting groove width; the inner ring is rotatably provided with a plurality of evenly arranged clamping plates on the side away from the outer ring; the top of the crucible A docking groove is provided at the corresponding position of the clamping plate, and the docking groove is adapted to the clamping plate; during operation, when the user needs to replace the crucible, the roller needs to be in a vertical state, and the user can drive the support rod to rotate clockwise through the rotating seat, thereby driving the crucible to rotate clockwise, and the crucible will drive the clamping plate to rotate clockwise through the docking groove, and finally the inner ring will be driven by the clamping plate to rotate clockwise, and the clockwise rotating inner ring will drive the limiting roller in the installation groove to move toward the narrower side of the installation groove, and due to the diameter of the middle part of the limiting roller The outer ring and the inner ring will be clamped together through the limiting roller, and the inner ring can drive the outer ring and the crown gear connected to the outer ring to rotate together, and then the crown gear and the sub-gear are meshed, so that the rotating column drives the roller to rotate to a vertical state. At this time, when the user pulls the crucible again, the roller in the vertical state can reduce friction, so that the crucible can be taken out smoothly. After placing the new crucible on the top surface of the receiving seat, the user needs to put the clamping plate at the inner ring back to In the docking groove, and then rotate the crown gear to make the roller return to the horizontal state. During the direct pulling method for producing single crystal silicon, the rotating seat will drive the receiving seat and the crucible to rotate counterclockwise through the support rod. At this time, the inner ring will also rotate counterclockwise, and the limiting roller in the mounting groove will also move to the wider side of the mounting groove, so that the inner ring and the outer ring will not be stuck together. As a result, the inner ring will rotate normally without rotating the outer ring, thereby keeping the roller in a horizontal state, so that it can normally limit the crucible and reduce friction.

[0011] Preferably, the inner surface of the crown gear is fixedly connected to the limit plate; the limit plate extends to the inner surface of the limit cylinder; the inner wall of the limit cylinder is fixedly connected to the limit blocks on both sides of the limit plate; during operation, when the crown gear rotates, the rotation amplitude of the crown gear will be limited by the limit plate on its surface and the limit blocks on both sides of the limit plate, so that the crown gear can drive the sub-gear to rotate at an angle of exactly 90 degrees, thereby when the user rotates the crown gear and makes the limit plates of the crown gear respectively abut against the surfaces of the two limit blocks, the roller will be exactly in a horizontal or vertical state, avoiding the deviation of the angle piece of the roller, and failing to achieve the purpose of reducing friction.

[0012] Preferably, the limiting assembly includes a connecting ring; the connecting ring is fixedly connected to the inner side of the support frame; a pair of symmetrically arranged connecting rods are fixedly connected to the surface of the limiting cylinder; sleeves are rotatably connected to the surfaces of the connecting rods; a pair of symmetrically arranged drop openings are opened on the surface of the connecting ring, and the drop openings are adapted to the sleeves; a guide plate is fixedly connected to the bottom surface of the connecting ring at the corresponding position of the drop opening; a guide groove is opened on the side of the guide plate close to the limiting cylinder, and the guide groove is connected to the drop opening; during operation, when the user replaces the crucible, in order to facilitate the lifting of the crucible, the user needs to lower the limiting cylinder, for this purpose, the crown gear can be rotated first to make the roller rotate to a vertical state, and then the limiting cylinder is rotated to make the sleeve on the surface of the connecting rod roll along the connecting ring, so that the sleeve can enter the guide groove on the surface of the guide plate from the drop opening, so that the sleeve can descend along the guide groove, and then the sleeve can also follow the decline, at this time, there is no obstruction around the crucible, which is convenient for the user to lift and replace the crucible.

[0013] Preferably, the top surface of the connecting ring is fixedly connected to a pair of symmetrically arranged fixing seats; a pressure plate is slidably connected to one side of the two fixing seats close to the sleeve; a spring is fixedly connected between the pressure plate and the connecting ring; a slot is provided on the bottom surface of the pressure plate, and the slot is adapted to the sleeve; during operation, in order to prevent the limiting cylinder from rotating freely on the connecting ring, the user needs to rotate the sleeve on the surface of the connecting rod to the bottom of the pressure plate at the fixing seat, and make the sleeve just stuck in the slot. At this time, the spring is in a stretched state, so that the sleeve can be clamped by the pressure plate and the connecting ring, and then the limiting cylinder is fixed by the sleeve and the connecting rod, thereby preventing the limiting cylinder from moving freely on the connecting ring.

[0014] Preferably, a through groove is provided on the top surface of the receiving seat; the through groove passes through the receiving seat and the support rod; the support rod is made of heat-insulating material; a pressure rod is arranged in the through groove; the bottom surface of the pressure rod is connected to the weighing sensor; the bottom surface of the support rod is rotatably connected to a heat-insulating pad, and the heat-insulating pad is fixedly connected to the outer shell of the weighing sensor; during operation, when the crucible is placed on the top surface of the receiving seat, the bottom of the crucible will transfer pressure to the weighing sensor outside the single crystal furnace through the pressure rod. Since the pressure rod is made of heat-insulating material, the heat-insulating pad also avoids direct contact between the support rod and the weighing sensor, thereby protecting the weighing sensor and preventing the weighing sensor from being in a high-temperature environment for a long time, which will affect the service life of the weighing sensor.

[0015] Preferably, a connecting tube is fixedly connected to the top surface of the contact point of the weighing sensor, and the connecting tube is located in the through groove; a bearing is fixedly connected to the inner wall of the connecting tube, and the bearing is located at the top position of the connecting tube; the pressure rod is fixedly connected to the inner wall of the bearing; during operation, when the rotating seat drives the supporting rod and the receiving seat to rotate, due to the friction between the pressure rod and the crucible, the pressure rod will also rotate with it, and the weighing sensor will not rotate, so the connecting tube fixedly connected to the weighing sensor contact point will not rotate either. At this time, the pressure rod will rotate relative to the connecting tube through the bearing, avoiding the pressure rod from rotating directly at the contact point, thereby causing wear to the contact point. At the same time, the weighing sensor does not rotate, which can also facilitate the connection of the weighing sensor with the outside world and avoid cable entanglement.

[0016] Preferably, a plurality of evenly arranged strip grooves are provided on the surface of the limiting cylinder; the strip grooves pass through the limiting cylinder and are evenly distributed at the bottom of the rotating groove; during operation, when the graphite heater in the single crystal furnace is heated, the heat can heat the crucible through the strip grooves, thereby avoiding the limiting cylinder blocking the heat transfer, thereby reducing the heating efficiency of the crucible.

[0017] The beneficial effects of the present invention are as follows: 1. The single crystal furnace crucible weighing mechanism described in the present invention can limit the crucible through a limit tube and a roller to prevent the crucible from shaking during rotation, thereby improving the measurement accuracy of the weighing sensor. The rotation of the roller can also reduce the friction between the roller and the crucible, making the replacement and rotation of the crucible smoother.

[0018] 2. The single crystal furnace crucible weighing mechanism described in the present invention is pushed into the receiving groove through the through hole, thereby pushing up the protrusion in the receiving groove, and then pushing the crucible away from the receiving seat through the protrusion. At this time, when the material is poured into the crucible, it will not continuously impact the weighing sensor through the crucible, thereby ensuring the service life of the weighing sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below in conjunction with the accompanying drawings.

[0020] Figure 1 is a stereogram of the present invention; Figure 2 It is a schematic diagram of the structure of the crucible in the present invention; Figure 3 It is a structural schematic diagram of the receiving seat in the present invention; Figure 4 It is a structural schematic diagram of the crown gear in the present invention; Figure 5 It is a structural schematic diagram of the sleeve in the present invention; Figure 6 It is a schematic diagram of the structure of the limiting roller in the present invention; Figure 7 It is a structural schematic diagram of the pressure plate in the present invention; Figure 8 is a partial cross-sectional view of the support rod in the present invention; In the figure: 1, receiving seat; 2, crucible; 3, limiting cylinder; 4, supporting frame; 5, rotating groove; 6, rotating column; 7, roller; 8, secondary gear; 9, crown gear; 10, supporting rod; 11, weighing sensor; 12, rotating seat; 13, groove; 14, protrusion; 15, receiving groove; 16, through hole; 17, tray; 18, top rod; 19, outer ring; 20, inner ring; 21, installation groove; 22, limiting 1. Positioning roller; 23. Clamping plate; 24. Docking groove; 25. Limiting plate; 26. Limiting block; 27. Connecting ring; 28. Connecting rod; 29. ​​Sleeve; 30. Dropping mouth; 31. Guide plate; 32. Guide groove; 33. Fixed seat; 34. Pressing plate; 35. Spring; 36. Clamping groove; 37. Through groove; 38. Pressing rod; 39. Insulating pad; 40. Connecting pipe; 41. Bearing; 42. Strip groove. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0022] like Figures 1 to 4As shown, a weighing mechanism for a single crystal furnace crucible 2 described in an embodiment of the present invention comprises a receiving seat 1; a crucible 2 is arranged on the top surface of the receiving seat 1; a limiting cylinder 3 is sleeved on the side surface of the receiving seat 1; a support frame 4 is installed on the outer side of the limiting cylinder 3 near the bottom position; a limiting component is installed between the limiting cylinder 3 and the support frame 4; the limiting component is used to lock the relative position between the limiting cylinder 3 and the receiving seat 1; a plurality of evenly arranged rotating grooves 5 are opened on the surface of the limiting cylinder 3; a rotating column 6 is rotatably connected in the rotating groove 5; the rotating column 6 is close to the crucible 2 A roller 7 is rotatably connected to one side, and the roller 7 contacts the outer surface of the crucible 2; a sub-gear 8 is fixedly connected to one end of the rotating column 6 outside the limiting cylinder 3; a crown gear 9 is rotatably connected to the top surface of the limiting cylinder 3; the crown gear 9 is meshedly connected with the sub-gear 8; a supporting rod 10 is fixedly connected to the bottom surface of the receiving seat 1; a weighing sensor 11 is installed at the bottom of the supporting rod 10; a rotating seat 12 is installed at the bottom of the weighing sensor 11; a servo motor is installed inside the rotating seat 12 for driving the weighing sensor 11, and the rotating seat 12 is driven up and down by an external hydraulic cylinder; During operation, in order to monitor the quality change during the Czochralski method preparation of single crystal silicon, the embodiment of the present invention can be used. Before the crucible 2 is placed on the top surface of the receiving seat 1, the user needs to first rotate the crown gear 9, which drives the sub-gear 8 to rotate, and then the sub-gear 8 drives the rotating column 6 in the rotating groove 5 to rotate, so that the roller 7 on the end surface of the rotating column 6 is set in a vertical state. At this time, the crucible 2 can be placed on the top surface of the receiving seat 1. Since the roller 7 is set vertically, it can reduce the friction of the crucible 2 when it moves by rolling while guiding the crucible 2. After the crucible 2 is placed on the top surface of the receiving seat 1, the crown gear 9 is rotated again to drive the rotating column 6 to rotate, so that the roller 7 rotates to a horizontal state, and then the rotating seat 12 drives the support rod 10 and the receiving seat 1 to rotate, thereby driving the crucible 2 to rotate, so as to complete the subsequent Czochralski method for preparing single crystal silicon rods. During the rotation of the crucible 2, the limit cylinder 3 and the roller 7 will limit the crucible 2 to prevent the crucible 2 from shaking during the rotation, thereby improving the measurement accuracy of the weighing sensor 11, and the rotation of the roller 7 can also reduce the friction between it and the crucible 2, so that the replacement and rotation of the crucible 2 are smoother.

[0023] like Figures 1 to 3 As shown, the bottom surface of the crucible 2 is provided with a plurality of evenly arranged grooves 13; the top surface of the receiving seat 1 is provided with a plurality of evenly arranged protrusions 14; the grooves 13 correspond to the protrusions 14 one by one, and the grooves 13 and the protrusions 14 are adapted to each other; during operation, when the crucible 2 needs to be placed on the top surface of the receiving seat 1, the grooves 13 on the bottom surface of the crucible 2 need to be aligned with the protrusions 14 on the top surface of the receiving seat 1, so that the protrusions 14 can be inserted into the grooves 13 on the bottom surface of the crucible 2. At this time, when the receiving seat 1 drives the crucible 2 to rotate again, slipping between the lower crucible 2 and the receiving seat 1 can be avoided.

[0024] like Figure 3 As shown, the top surface of the receiving seat 1 is provided with a receiving groove 15 at a position corresponding to the protrusion 14, and the receiving groove 15 is adapted to the protrusion 14; the bottom of the receiving groove 15 is fixedly connected with a through hole 16, and the diameter of the through hole 16 is smaller than the diameter of the receiving groove 15; the surface of the supporting rod 10 is slidably connected with a tray 17; the top surface of the tray 17 is fixedly connected with a push rod 18 at a position corresponding to the through hole 16, and the push rod 18 is adapted to the through hole 16; when working, when it is necessary to introduce the crucible 2 in the single crystal furnace When the raw materials are loaded, the support rod 10 will gradually descend driven by the external hydraulic cylinder, so that the tray 17 will rest against the bottom surface of the interior of the single crystal furnace. At this time, the push rod 18 on the top surface of the tray 17 will be pushed into the receiving groove 15 through the through hole 16, thereby lifting the protrusion 14 in the receiving groove 15, and then the crucible 2 will be pushed away from the receiving seat 1 through the protrusion 14. At this time, when the material is poured into the crucible 2, it will not continuously impact the weighing sensor 11 through the crucible 2, thereby ensuring the service life of the weighing sensor 11.

[0025] like Figure 1 , Figure 4 and Figure 6As shown, an outer ring 19 is fixedly connected to the inner side of the crown gear 9; an inner ring 20 is rotatably connected to the inner side of the outer ring 19; a plurality of evenly arranged mounting grooves 21 are provided on the surface of the inner ring 20; the width of one end of the mounting groove 21 is greater than that of the other side; a limiting roller 22 is provided for rolling connection in the mounting groove 21; the diameters of both ends of the limiting roller 22 are greater than the diameter of the middle part; the diameter of the middle part of the limiting roller 22 is smaller than the end with the larger width of the mounting groove 21 but larger than the end with the smaller width of the mounting groove 21; a plurality of evenly arranged clamping plates 23 are rotatably provided on the side of the inner ring 20 away from the outer ring 19; A docking groove 24 is provided on the top surface at a position corresponding to the clamping plate 23, and the docking groove 24 is adapted to the clamping plate 23; during operation, when the user needs to replace the crucible 2, the roller 7 needs to be in a vertical state, and the user can drive the support rod 10 to rotate clockwise through the rotating seat 12, thereby driving the crucible 2 to rotate clockwise, and the crucible 2 will drive the clamping plate 23 to rotate clockwise through the docking groove 24, and finally the inner ring 20 will be driven by the clamping plate 23 to rotate clockwise, and the clockwise rotating inner ring 20 will drive the limiting roller 22 in the installation groove 21 to move toward the narrower side of the installation groove 21, and because the limiting roller 22 The diameter of the middle part is larger than the narrower side of the mounting groove 21, so that the outer ring 19 and the inner ring 20 are clamped together through the limiting roller 22. At this time, the inner ring 20 can drive the outer ring 19 and the crown gear 9 fixed to the outer ring 19 to rotate together, and then through the meshing of the crown gear 9 and the sub-gear 8, the rotating column 6 drives the roller 7 to rotate to a vertical state. At this time, when the user pulls the crucible 2 again, the roller 7 in this vertical state can reduce friction, so that the crucible 2 can be taken out smoothly. After the new crucible 2 is placed on the top surface of the receiving seat 1, the user needs to move the clamping plate 23 at the inner ring 20. Put it back into the docking groove 24, and then rotate the crown gear 9 to make the roller 7 return to the horizontal state. During the process of producing single crystal silicon by the direct pulling method, the rotating seat 12 will drive the receiving seat 1 and the crucible 2 to rotate counterclockwise through the support rod 10. At this time, the inner ring 20 will also rotate counterclockwise, and the limiting roller 22 in the installation groove 21 will also move to the wider side of the installation groove 21, so that the inner ring 20 and the outer ring 19 will not be stuck together. As a result, the inner ring 20 will rotate normally without rotating the outer ring 19, thereby keeping the roller 7 in a horizontal state, so that it can normally limit the crucible 2 and reduce friction.

[0026] like Figure 1 and Figure 4As shown, the inner surface of the crown gear 9 is fixedly connected to the limit plate 25; the limit plate 25 extends to the inner surface of the limit cylinder 3; the inner wall of the limit cylinder 3 is fixedly connected to the limit blocks 26 on both sides of the limit plate 25; during operation, when the crown gear 9 rotates, the rotation amplitude of the crown gear 9 will be limited by the limit plate 25 on its surface and the limit blocks 26 on both sides of the limit plate 25, so that the crown gear 9 can drive the sub-gear 8 to rotate at an angle of exactly 90 degrees. Therefore, when the user rotates the crown gear 9 and makes the limit plates 25 of the crown gear 9 respectively abut against the surfaces of the two limit blocks 26, the roller 7 will be exactly in a horizontal or vertical state, avoiding the angle piece of the roller 7 from being offset, and failing to achieve the purpose of reducing friction.

[0027] like Figure 1 and Figure 5 As shown, the limiting assembly includes a connecting ring 27; the connecting ring 27 is fixedly connected to the inner side of the support frame 4; a pair of symmetrically arranged connecting rods 28 are fixedly connected to the surface of the limiting cylinder 3; the surfaces of the connecting rods 28 are rotatably connected to sleeves 29; a pair of symmetrically arranged lower openings 30 are opened on the surface of the connecting ring 27, and the lower openings 30 are adapted to the sleeves 29; a guide plate 31 is fixedly connected to the bottom surface of the connecting ring 27 at the position corresponding to the lower opening 30; a guide groove 32 is opened on the side of the guide plate 31 close to the limiting cylinder 3, and the guide groove 32 is connected to the lower opening 30; working When the user replaces the crucible 2, in order to facilitate the lifting of the crucible 2, the user needs to lower the limiting cylinder 3. To this end, the crown gear 9 can be rotated first to rotate the roller 7 to a vertical state, and then the limiting cylinder 3 is rotated to make the sleeve 29 on the surface of the connecting rod 28 roll along the connecting ring 27, so that the sleeve 29 can enter the guide groove 32 on the surface of the guide plate 31 from the drop opening 30, so that the sleeve 29 can descend along the guide groove 32, and then the sleeve 29 can also follow the decline. At this time, the crucible 2 is not blocked around, so it is convenient for the user to lift and replace the crucible 2.

[0028] like Figures 1 to 7 As shown, the top surface of the connecting ring 27 is fixedly connected with a pair of symmetrically arranged fixing seats 33; the two fixing seats 33 are slidably connected with a pressure plate 34 on one side close to the sleeve 29; a spring 35 is fixedly connected between the pressure plate 34 and the connecting ring 27; a card slot 36 is provided on the bottom surface of the pressure plate 34, and the card slot 36 is adapted to the sleeve 29; during operation, in order to prevent the limiting cylinder 3 from rotating freely on the connecting ring 27, the user needs to rotate the sleeve 29 on the surface of the connecting rod 28 to the bottom of the pressure plate 34 at the fixing seat 33, and make the sleeve 29 just stuck in the card slot 36, at this time the spring 35 is in a stretched state, so that the sleeve 29 can be clamped by the pressure plate 34 and the connecting ring 27, and then the limiting cylinder 3 is fixed by the sleeve 29 and the connecting rod 28, thereby preventing the limiting cylinder 3 from moving freely on the connecting ring 27.

[0029] like Figure 1 and Figure 7 As shown, a through groove 37 is provided on the top surface of the receiving seat 1; the through groove 37 passes through the receiving seat 1 and the support rod 10; the support rod 10 is made of heat-insulating material; a pressure rod 38 is arranged in the through groove 37; the bottom surface of the pressure rod 38 is connected to the weighing sensor 11; the bottom surface of the support rod 10 is rotatably connected with a heat-insulating pad 39, and the heat-insulating pad 39 is fixedly connected to the outer shell of the weighing sensor 11; during operation, when the crucible 2 is placed on the top surface of the receiving seat 1, the bottom of the crucible 2 will transfer the pressure to the weighing sensor 11 outside the single crystal furnace through the pressure rod 38. Since the pressure rod 38 is made of heat-insulating material, and the heat-insulating pad 39 also avoids direct contact between the support rod 10 and the weighing sensor 11, thereby protecting the weighing sensor and preventing the weighing sensor 11 from being in a high-temperature environment for a long time, which affects the service life of the weighing sensor 11.

[0030] like Figure 1 and Figure 8 As shown, the top surface of the contact point of the weighing sensor 11 is fixedly connected with a connecting tube 40, and the connecting tube 40 is located in the through groove 37; the inner wall of the connecting tube 40 is fixedly connected with a bearing 41, and the bearing 41 is located at the top position of the connecting tube 40; the pressure rod 38 is fixedly connected to the inner wall of the bearing 41; during operation, when the rotating seat 12 drives the support rod 10 and the receiving seat 1 to rotate, due to the friction between the pressure rod 38 and the crucible 2, the pressure rod 38 will also rotate with it, and the weighing sensor 11 will not rotate, so the connecting tube 40 fixedly connected to the contact point of the weighing sensor 11 will not rotate either. At this time, the pressure rod 38 will rotate relative to the connecting tube 40 through the bearing 41, avoiding the pressure rod 38 to rotate directly at the contact point, thereby causing wear to the contact point. At the same time, the weighing sensor 11 does not rotate, which can also facilitate the connection of the weighing sensor 11 with the outside world and avoid cable entanglement.

[0031] like Figure 1 and Figure 4 As shown, a plurality of evenly arranged strip grooves 42 are provided on the surface of the limiting cylinder 3; the strip grooves 42 pass through the limiting cylinder 3 and are evenly distributed at the bottom of the rotating groove 5; during operation, when the graphite heater in the single crystal furnace is heated, the heat can pass through the strip grooves 42 to heat the crucible 2, thereby avoiding the limiting cylinder 3 blocking the heat transfer, thereby reducing the heating efficiency of the crucible 2.

[0032] During operation, when single crystal silicon is being prepared by the Czochralski method, in order to monitor quality changes, the embodiment of the present invention can be used. Before the crucible 2 is placed on the top surface of the receiving seat 1, the user needs to first rotate the crown gear 9, which drives the sub-gear 8 to rotate, and then the sub-gear 8 drives the rotating column 6 in the rotating groove 5 to rotate, so that the roller 7 on the end surface of the rotating column 6 is set in a vertical state. At this time, the crucible 2 can be placed on the top surface of the receiving seat 1. Since the roller 7 is set vertically, it can reduce the friction of the crucible 2 when it moves by rolling while guiding the crucible 2. When After the crucible 2 is placed on the top surface of the receiving seat 1, the crown gear 9 is rotated again to drive the rotating column 6 to rotate, so that the roller 7 rotates to a horizontal state, and then the rotating seat 12 drives the support rod 10 and the receiving seat 1 to rotate, thereby driving the crucible 2 to rotate, so as to complete the subsequent Czochralski method for preparing single crystal silicon rods. During the rotation of the crucible 2, the limit cylinder 3 and the roller 7 will limit the crucible 2 to prevent the crucible 2 from shaking during the rotation, thereby improving the measurement accuracy of the weighing sensor 11, and the rotation of the roller 7 can also reduce the friction between it and the crucible 2, so that the replacement and rotation of the crucible 2 are smoother.

[0033] When the crucible 2 needs to be placed on the top surface of the receiving seat 1, the groove 13 on the bottom surface of the crucible 2 needs to be aligned with the protrusion 14 on the top surface of the receiving seat 1, so that the protrusion 14 can be inserted into the groove 13 on the bottom surface of the crucible 2. At this time, when the receiving seat 1 drives the crucible 2 to rotate, slipping between the lower crucible 2 and the receiving seat 1 can be avoided.

[0034] When it is necessary to introduce raw materials into the crucible 2 in the single crystal furnace, the support rod 10 will be gradually lowered under the drive of the external hydraulic cylinder, so that the tray 17 will be against the bottom surface of the single crystal furnace. At this time, the push rod 18 on the top surface of the tray 17 will be pushed into the receiving groove 15 through the through hole 16, thereby lifting the protrusion 14 in the receiving groove 15, and then the crucible 2 will be pushed away from the receiving seat 1 through the protrusion 14. At this time, when the material is poured into the crucible 2, it will not continuously impact the weighing sensor 11 through the crucible 2, thereby ensuring the service life of the weighing sensor 11.

[0035] When the user needs to replace the crucible 2, it is necessary to make the roller 7 in a vertical state. The user can drive the support rod 10 to rotate clockwise through the rotating seat 12, thereby driving the crucible 2 to rotate clockwise, and the crucible 2 will drive the clamping plate 23 to rotate clockwise through the docking groove 24, and finally the clamping plate 23 drives the inner ring 20 to rotate clockwise, and the clockwise rotating inner ring 20 will drive the limiting roller 22 in the mounting groove 21 to move toward the narrower side of the mounting groove 21, and since the diameter of the middle part of the limiting roller 22 is larger than the narrower side of the mounting groove 21, the outer ring 19 and the inner ring 20 will be stuck together through the limiting roller 22. At this time, the inner ring 20 can drive the outer ring 19 and the crown gear 9 fixed to the outer ring 19 to rotate together, and then through the meshing of the crown gear 9 and the sub-gear 8, the rotating column 6 drives the roller 7 to rotate to a vertical state. At this time, the user can raise the When pulling the crucible 2, the roller 7 in the vertical state can reduce the friction, so that the crucible 2 can be taken out smoothly. After the new crucible 2 is placed on the top surface of the receiving seat 1, the user needs to put the clamping plate 23 at the inner ring 20 back into the docking groove 24, and then rotate the crown gear 9 to make the roller 7 return to the horizontal state. In the process of producing single crystal silicon by the direct pulling method, the rotating seat 12 will drive the receiving seat 1 and the crucible 2 to rotate counterclockwise through the support rod 10. At this time, the inner ring 20 will also rotate counterclockwise, and the limiting roller 22 in the mounting groove 21 will also move to the wider side of the mounting groove 21, so that the inner ring 20 and the outer ring 19 will not be stuck together. As a result, the inner ring 20 will rotate normally without rotating the outer ring 19, thereby keeping the roller 7 in a horizontal state, so that it can normally limit the crucible 2 and reduce friction.

[0036] When the crown gear 9 rotates, the rotation range of the crown gear 9 will be limited by the limit plate 25 on its surface and the limit blocks 26 on both sides of the limit plate 25, so that the crown gear 9 can drive the sub-gear 8 to rotate at an angle of exactly 90 degrees. Therefore, when the user rotates the crown gear 9 and makes the limit plates 25 of the crown gear 9 respectively abut against the surfaces of the two limit blocks 26, the roller 7 will be exactly in a horizontal or vertical state, avoiding the angle deviation of the roller 7, and failing to achieve the purpose of reducing friction.

[0037] When the user replaces the crucible 2 again, in order to facilitate the lifting of the crucible 2, the user needs to lower the limiting cylinder 3. To this end, the crown gear 9 can be rotated first to rotate the roller 7 to a vertical state, and then the limiting cylinder 3 is rotated to make the sleeve 29 on the surface of the connecting rod 28 roll along the connecting ring 27, so that the sleeve 29 can enter the guide groove 32 on the surface of the guide plate 31 from the drop port 30, so that the sleeve 29 can descend along the guide groove 32, and then the sleeve 29 can also follow the decline. At this time, the crucible 2 is not blocked around, which makes it convenient for the user to lift and replace the crucible 2.

[0038] In order to prevent the limiting cylinder 3 from rotating freely on the connecting ring 27, the user needs to rotate the sleeve 29 on the surface of the connecting rod 28 to the bottom of the pressure plate 34 at the fixing seat 33, and make the sleeve 29 just stuck in the slot 36. At this time, the spring 35 is in a stretched state, so that the sleeve 29 can be clamped by the pressure plate 34 and the connecting ring 27, and then the limiting cylinder 3 is fixed by the sleeve 29 and the connecting rod 28, thereby preventing the limiting cylinder 3 from moving freely on the connecting ring 27.

[0039] When the crucible 2 is placed on the top surface of the receiving seat 1, the bottom of the crucible 2 will transfer pressure to the weighing sensor 11 outside the single crystal furnace through the pressure rod 38. Since the pressure rod 38 is made of thermal insulation material, the thermal insulation pad 39 also avoids direct contact between the support rod 10 and the weighing sensor 11, thereby protecting the weighing sensor and preventing the weighing sensor 11 from being in a high temperature environment for a long time, which will affect the service life of the weighing sensor 11.

[0040] When the rotating seat 12 drives the supporting rod 10 and the receiving seat 1 to rotate, due to the friction between the pressure rod 38 and the crucible 2, the pressure rod 38 will also rotate, while the weighing sensor 11 will not rotate, so the connecting tube 40 fixedly connected to the contact of the weighing sensor 11 will not rotate either. At this time, the pressure rod 38 will rotate relative to the connecting tube 40 through the bearing 41, avoiding the pressure rod 38 to rotate directly at the contact point and causing wear to the contact point. At the same time, the weighing sensor 11 does not rotate, which can also facilitate the connection of the weighing sensor 11 with the outside world and avoid cable entanglement.

[0041] When the graphite heater in the single crystal furnace is heating, the heat can heat the crucible 2 through the strip grooves 42 , thereby preventing the limiting cylinder 3 from blocking the transfer of heat, thereby reducing the heating efficiency of the crucible 2 .

[0042] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A weighing mechanism for a single crystal furnace crucible (2), characterized in that: The invention comprises a receiving seat (1); a crucible (2) is arranged on the top surface of the receiving seat (1); a limiting cylinder (3) is sleeved on the side surface of the receiving seat (1); a support frame (4) is installed on the outer side of the limiting cylinder (3) near the bottom; a limiting assembly is installed between the limiting cylinder (3) and the support frame (4); the limiting assembly is used to lock the relative position between the limiting cylinder (3) and the receiving seat (1); a plurality of evenly arranged rotating grooves (5) are opened on the surface of the limiting cylinder (3); a rotating column (6) is rotatably connected in the rotating groove (5); a roller (7) is rotatably connected on the side of the rotating column (6) close to the crucible (2), The roller (7) is in contact with the outer surface of the crucible (2); one end of the rotating column (6) outside the limiting cylinder (3) is fixedly connected to a pinion gear (8); the top surface of the limiting cylinder (3) is rotatably connected to a crown gear (9); the crown gear (9) is meshingly connected to the pinion gear (8); the bottom surface of the receiving seat (1) is fixedly connected to a support rod (10); a weighing sensor (11) is installed at the bottom of the support rod (10); a rotating seat (12) is installed at the bottom of the weighing sensor (11); a servo motor is installed inside the rotating seat (12) for driving the support rod (10) to rotate, and the rotating seat (12) is driven to rise and fall by an external hydraulic cylinder.

2. A single crystal furnace crucible (2) weighing mechanism according to claim 1, characterized in that: The bottom surface of the crucible (2) is provided with a plurality of evenly arranged grooves (13); the top surface of the receiving seat (1) is provided with a plurality of evenly arranged protrusions (14); the grooves (13) correspond to the protrusions (14) one by one, and the grooves (13) and the protrusions (14) are adapted to each other.

3. A single crystal furnace crucible (2) weighing mechanism according to claim 2, characterized in that: The top surface of the receiving seat (1) is provided with a receiving groove (15) at a position corresponding to the protrusion (14), and the receiving groove (15) is matched with the protrusion (14); the bottom of the receiving groove (15) is fixedly connected with a through hole (16), and the diameter of the through hole (16) is smaller than the diameter of the receiving groove (15); the surface of the supporting rod (10) is slidably connected with a tray (17); the top surface of the tray (17) is fixedly connected with a push rod (18) at a position corresponding to the through hole (16), and the push rod (18) is matched with the through hole (16).

4. A single crystal furnace crucible (2) weighing mechanism according to claim 3, characterized in that: An outer ring (19) is fixedly connected to the inner side of the crown gear (9); an inner ring (20) is rotatably connected to the inner side of the outer ring (19); a plurality of evenly arranged mounting grooves (21) are provided on the surface of the inner ring (20); the width of one end of the mounting groove (21) is greater than that of the other side; a limiting roller (22) is rollingly connected in the mounting groove (21); the diameters of both ends of the limiting roller (22) are greater than the diameter of the middle part; the diameter of the middle part of the limiting roller (22) is smaller than the end of the mounting groove (21) with a larger width but larger than the end of the mounting groove (21) with a smaller width; a plurality of evenly arranged clamping plates (23) are rotatably provided on the side of the inner ring (20) away from the outer ring (19); a docking groove (24) is provided on the top surface of the crucible (2) at a position corresponding to the clamping plate (23), and the docking groove (24) is adapted to the clamping plate (23).

5. A single crystal furnace crucible (2) weighing mechanism according to claim 1, characterized in that: The inner surface of the crown gear (9) is fixedly connected to a limit plate (25); the limit plate (25) extends to the inner surface of the limit cylinder (3); and the inner wall of the limit cylinder (3) is fixedly connected to limit blocks (26) on both sides of the limit plate (25).

6. A single crystal furnace crucible (2) weighing mechanism according to claim 5, characterized in that: The limiting assembly comprises a connecting ring (27); the connecting ring (27) is fixedly connected to the inner side of the support frame (4); a pair of symmetrically arranged connecting rods (28) are fixedly connected to the surface of the limiting cylinder (3); the surfaces of the connecting rods (28) are rotatably connected to sleeves (29); a pair of symmetrically arranged lower openings (30) are formed on the surface of the connecting ring (27), and the lower openings (30) are matched with the sleeves (29); a guide plate (31) is fixedly connected to the bottom surface of the connecting ring (27) at positions corresponding to the lower openings (30); a guide groove (32) is formed on a side of the guide plate (31) close to the limiting cylinder (3), and the guide groove (32) is communicated with the lower opening (30).

7. A single crystal furnace crucible (2) weighing mechanism according to claim 6, characterized in that: A pair of symmetrically arranged fixing seats (33) are fixedly connected to the top surface of the connecting ring (27); a pressure plate (34) is slidably connected to one side of the two fixing seats (33) close to the sleeve (29); a spring (35) is fixedly connected between the pressure plate (34) and the connecting ring (27); a clamping groove (36) is provided on the bottom surface of the pressure plate (34), and the clamping groove (36) is adapted to fit the sleeve (29).

8. A single crystal furnace crucible (2) weighing mechanism according to claim 7, characterized in that: The top surface of the receiving seat (1) is provided with a through groove (37); the through groove (37) passes through the receiving seat (1) and the supporting rod (10); the supporting rod (10) is made of a heat-insulating material; a pressure rod (38) is arranged in the through groove (37); the bottom surface of the pressure rod (38) is connected to the weighing sensor (11); the bottom surface of the supporting rod (10) is rotatably connected to a heat-insulating pad (39), and the heat-insulating pad (39) is fixedly connected to the outer shell of the weighing sensor (11).

9. A single crystal furnace crucible (2) weighing mechanism according to claim 8, characterized in that: A connecting tube (40) is fixedly connected to the top surface of the contact point of the weighing sensor (11), and the connecting tube (40) is located in the through groove (37); a bearing (41) is fixedly connected to the inner wall of the connecting tube (40), and the bearing (41) is located at the top position of the connecting tube (40); and the pressure rod (38) is fixedly connected to the inner wall of the bearing (41).

10. A single crystal furnace crucible (2) weighing mechanism according to claim 1, characterized in that: The surface of the limiting cylinder (3) is provided with a plurality of evenly arranged strip grooves (42); the strip grooves (42) penetrate the limiting cylinder (3) and are evenly distributed at the bottom of the rotating groove (5).

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