MLCC sintering furnace atmosphere testing method and parameter setting method

Abstract

The invention relates to an MLCC sintering furnace atmosphere testing method and a parameter setting method.According to the MLCC sintering furnace atmosphere testing method, the sintering atmosphere of a sintering object can be conveniently and visually measured, the testing method is simple, and the equipment cost is low; the metal sheet and a sintered object are fed into the furnace on the same day, and the metal sheet can be placed at the same position of the sintered object for measurement, so that the atmosphere of the sintered object can be reflected more directly; in a sintering environment in which protective gas needs to be continuously introduced and the oxygen content may fluctuate in the sintering process, compared with a traditional method for judging the atmosphere of the sintering furnace by directly measuring the oxygen content, the second weight variable quantity can measure the influence of the atmosphere on metal / ceramic in the sintering process on the whole in the whole sintering process, and the measurement accuracy is improved. The method has a direct guiding effect on formulation of the sintering atmosphere of a metal and ceramic co-firing system.

Description

Technical Field

[0001] The present application relates to the technical field of MLCC sintering, and in particular to a sintering furnace atmosphere testing method and parameter setting method for MLCC. Background Art

[0002] The sintering process of the base metal electrode of MLCC (Multi-layers Ceramic Capacitor) requires the co-firing of ceramic and metal electrodes. In order to prevent the metal electrodes (such as Ni, Cu, etc.) from being oxidized, it is necessary to introduce protective gas and keep the furnace environment in a weak reducing atmosphere at high temperature.

[0003] If the reducing atmosphere is too strong (i.e. the oxidation content in the environment is too low), the O in the oxide ceramic will be reduced to O2 and released into the air. If the O in the ceramic is stripped too much, the ceramic structure will become loose, and foreign ions will easily invade or pass through the O vacancy channel, which will damage the strength and durability of the ceramic. Therefore, the oxygen content in the atmosphere needs to be strictly controlled during the sintering process.

[0004] In traditional technology, oxygen analyzers are mainly used to measure the oxygen content in the sintering environment. There are two main testing methods. One is that the oxygen analyzer extracts the gas in the sintering environment, heats it to a predetermined temperature (generally above 800°C), and then analyzes the oxygen content therein. The other is the direct plug-in type, which directly inserts the sensor into a specific position in the furnace to detect the oxygen content in the sintering environment in real time.

[0005] Regardless of which method is used, the oxygen analyzer can only analyze and monitor specific locations in the furnace. It cannot accurately determine the oxygen content near the sintering object, let alone measure the actual impact of the atmosphere on the sintering object. In addition, in some specific sintering furnaces, the conditions for setting up an oxygen analyzer are not met, resulting in the inability to measure the oxygen content. Summary of the invention

[0006] Based on this, the present application provides a method for measuring the metal content of MLCC electrode slurry that can solve the above-mentioned technical problems, can accurately measure the actual metal content in the electrode slurry, can improve the deficiencies in the existing technology, and improve the performance and production yield of MLCC.

[0007] The above-mentioned purpose of the present application is achieved through the following technical solutions:

[0008] In a first aspect, the present application provides a method for testing the sintering furnace atmosphere of an MLCC, comprising the following steps:

[0009] preparing a plurality of metal sheets and weighing them;

[0010] Placing the metal sheet in a first sintering furnace, introducing a first protective gas into the first sintering furnace, calcining the metal sheet under the condition of preset sintering parameters, and measuring the oxygen content in the first sintering furnace;

[0011] The calcined metal sheet is taken out and weighed after cooling;

[0012] Adjusting the introduction parameters of the first protective gas, repeating the step of calcining the metal sheet in the first sintering furnace, and obtaining a first corresponding relationship between different oxygen contents in the first sintering furnace and a first weight change of each of the metal sheets before and after calcination;

[0013] placing the uncalcined metal sheet and the sintering object in a second sintering furnace, introducing a second protective gas into the second sintering furnace, and calcining the metal sheet and the sintering object under the conditions of the preset sintering parameters;

[0014] The calcined metal sheet is taken out, cooled and weighed to obtain a second weight change of the metal sheet before and after calcination;

[0015] The oxygen content during the sintering process in the second sintering furnace is obtained according to the second weight change and the first corresponding relationship.

[0016] In an optional embodiment, the process of preparing the metal sheet comprises the following steps:

[0017] Take metal powder and press it into metal sheets.

[0018] In an optional embodiment, after the metal powder is pressed into a metal sheet and before it is weighed, the following steps are further included:

[0019] The pressed metal sheets are placed in an oven for drying.

[0020] In an optional embodiment, the drying and weighing operations of the metal sheet are repeated multiple times until the weight change of continuous weighing is less than or equal to a set value.

[0021] In an optional embodiment, the process of obtaining the first corresponding relationship between different oxygen contents in the first sintering furnace and the first weight change of each of the metal sheets before and after calcination comprises the following steps:

[0022] Obtaining a fitting curve between the oxygen content and the first weight change according to the oxygen content and the first weight change;

[0023] The specific process of obtaining the oxygen content during the sintering process in the second sintering furnace according to the second weight change and the first corresponding relationship comprises the following steps:

[0024] The oxygen content during the sintering process in the second sintering furnace is obtained according to the second weight change and the fitting curve.

[0025] In an optional embodiment, the first sintering furnace is a sealed static atmosphere, and the second sintering furnace is a continuously ventilated atmosphere.

[0026] In an optional embodiment, the first protective gas includes nitrogen and hydrogen, and the second protective gas includes nitrogen and hydrogen; the introduction parameter includes any one of the following parameters of nitrogen and hydrogen:

[0027] Inlet flow, inlet pressure, and inlet time.

[0028] In an optional embodiment, the metal powder includes one or more materials.

[0029] In an optional embodiment, the preset sintering parameters include maximum temperature, heating rate and holding time.

[0030] In a second aspect, the present application provides a method for setting parameters of a sintering furnace of an MLCC, comprising the steps of the method for testing atmosphere of a sintering furnace of an MLCC in the above-mentioned embodiment;

[0031] After obtaining the oxygen content in the second sintering furnace during the sintering process according to the second weight change and the first corresponding relationship, the method further includes the following steps:

[0032] According to the oxygen content during the sintering process in the second sintering furnace, the parameters for introducing the second protective gas during the next calcination are set.

[0033] This application has the following beneficial effects:

[0034] The MLCC sintering furnace atmosphere test method of the embodiment of the present application can conveniently and intuitively measure the sintering atmosphere of the sintering object, and the test method is simple and the equipment cost is low; the metal sheet of the present application is put into the furnace on the same day as the sintering object, and can be placed at the same position as the sintering object for measurement, which can more directly reflect the atmosphere of the sintering object; in a sintering environment where protective gas needs to be continuously introduced and the oxygen content may fluctuate during the sintering process, compared with the traditional method of judging the atmosphere of the sintering furnace by directly measuring the oxygen content, the second weight change of the present application can measure the influence of the atmosphere on the metal / ceramic during the sintering process from the overall perspective of the entire sintering process, and has a direct guiding role in the formulation of the sintering atmosphere of the metal and ceramic co-firing system.

[0035] The MLCC sintering furnace parameter setting method of the present embodiment can set the protective gas introduction parameters for the next sintering according to the test results of the previous sintering furnace atmosphere, so that when the second sintering furnace is sintered for the next time, the atmosphere in the furnace is closer to the set value, so that the reducing atmosphere in the furnace will not be too strong (that is, the oxidation content in the environment is too low) or the oxygen content will not be too high during the next sintering, thereby avoiding oxidation of the metal and stripping of O in the ceramic to cause the ceramic structure to become loose, thereby improving the strength and durability of the ceramic and the quality of the MLCC. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 Schematic diagram of the steps of a method for testing the sintering furnace atmosphere of MLCC in an exemplary embodiment;

[0037] Figure 2 FIG. 1 is a schematic diagram of a fitting curve of oxygen potential and weight change of a Ni metal sheet in an exemplary embodiment;

[0038] Figure 3 FIG. 4 is a schematic diagram of the structure of a second sintering furnace in an exemplary embodiment. DETAILED DESCRIPTION

[0039] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0040] In addition, the terms "first" and "first" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "first" may explicitly or implicitly include at least one of the features. In the description of this application, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which the present application belongs. The terms used herein in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0042] In view of the technical problems in the background technology, the present application provides a method for testing the atmosphere of a sintering furnace of MLCC and a method for setting the parameters of a sintering furnace of MLCC, which can intuitively reflect the influence of the atmosphere in the sintering furnace on the sintering object, so as to know whether the sintering furnace is in the required weak reducing atmosphere, and provide guidance for setting the parameters of the protective gas for the next sintering. The sintering furnace involved in this embodiment includes a high-temperature sintering furnace, a low-temperature co-firing furnace, an intermittent sintering furnace, etc., which need to sinter MLCC under a protective atmosphere, and includes a tubular sintering furnace, a box-type sintering furnace, a belt-type sintering furnace, etc. according to different specific structures.

[0043] like Figure 1 As shown, in a specific embodiment, the MLCC sintering furnace atmosphere test method of the present application includes the following steps:

[0044] S101: preparing a plurality of metal sheets and weighing them.

[0045] In this embodiment, a plurality of metal sheets with the same set thickness need to be prepared. The metal sheets can specifically be Ni, Cu, Cr, Zn, Fe and other related metal materials, or alloys thereof. Metal materials that can undergo oxidation reaction under high temperature conditions and are applicable to this method are within the protection scope of this embodiment and are not listed one by one here.

[0046] S102: placing the metal sheet in a first sintering furnace, introducing a first protective gas into the first sintering furnace, calcining the metal sheet under the condition of preset sintering parameters, and measuring the oxygen content in the first sintering furnace.

[0047] The protective gas in this embodiment is a gas that can effectively prevent the metal sheet or the sintering object from reacting with oxygen in the external environment. The protective gas puts the sintering furnace in a weak reducing environment. In this embodiment, the protective gas can specifically include one or more mixed gases of nitrogen (N2), hydrogen (H2), argon (Ar), etc. The first protective gas is introduced into the first sintering furnace to simulate the actual sintering environment of the sintering object, so that the environment in the first sintering furnace is in a weak reducing atmosphere at high temperature, so that the metal electrodes (such as Ni, Cu, etc.) in the sintered object are not oxidized.

[0048] Due to the limited purity of the protective gas, insufficient sealing of the sintering furnace, oxygen-containing materials or residual oxidizing compounds, enhanced oxygen diffusion in high-temperature environments, etc., oxygen will remain in the first sintering furnace. If the residual oxygen content is too high, it will produce an oxidation reaction with the metal; if the residual oxygen content is too low, the phenomenon described in the background technology of excessively strong reducing atmosphere causing O in the oxide ceramic to be reduced to O2 will occur. Therefore, the ultimate goal of this embodiment is to make the atmosphere in the sintering furnace in a suitable weak reducing atmosphere.

[0049] In this embodiment, the first sintering furnace can be a tubular sintering furnace, a box-type sintering furnace, a belt-type sintering furnace, etc. In order to make the oxygen content in the first sintering furnace more stable, the preferred first sintering furnace can be a sealed static atmosphere, so that after the first protective gas is introduced, the sintering atmosphere can be maintained in a sealed state, and its oxygen content remains relatively stable during sintering. The structure of the first sintering furnace in this embodiment is configured to measure the oxygen content during the sintering process by an oxygen analyzer. Specifically, the gas in the sintering environment can be extracted, then heated to a predetermined temperature (generally above 800°C), and then the oxygen content therein is analyzed. Another method is to directly insert the sensor of the oxygen analyzer into a specific position in the furnace to detect the oxygen content in the sintering environment in real time.

[0050] In this embodiment, the value of oxygen content can be the final oxygen content obtained by the oxygen analyzer. In some embodiments, for the convenience of calculation, it can also be indirectly represented by the readings of different oxygen analyzers. The reading is an intermediate variable, which can represent the oxygen content or be converted to obtain the oxygen content. Therefore, for the convenience of subsequent comparison and calculation, the reading can also be directly used to reflect the oxygen content.

[0051] In this embodiment, the preset sintering parameters for sintering the metal sheet in the first sintering furnace are the same as the sintering parameters of the final sintering object. Preferably, the sintering parameters include the maximum temperature, heating rate and holding time in the sintering furnace.

[0052] S103: taking out the calcined metal sheet, cooling it and weighing it.

[0053] Preferably, the calcined metal sheet is placed in a drying dish and cooled to room temperature and then weighed. After weighing, the first weight change of the metal sheet before and after calcination can be obtained.

[0054] Specifically, the first weight change may indicate that the weight of the metal sheet has increased, that is, the metal sheet has undergone an oxidation reaction, or it may indicate that the weight of the metal sheet has slightly decreased. Taking Ni as an example, the reaction formula is as follows: When the first sintering furnace is in an oxidizing atmosphere, the reaction shifts to the right, and the weight of the metal sheet increases. When the first sintering furnace is in a reducing atmosphere, the reaction shifts to the left, and the weight of the metal sheet decreases. The amount of weight gain (weight loss) of the metal sheet can indicate the degree of oxidation or reduction.

[0055] In this embodiment, the reaction formula shifts to the left because a relatively low proportion of an oxide layer that exists on the surface of the metal sheet at room temperature and that is produced under any temperature condition is reduced in a reducing atmosphere.

[0056] S104: adjusting the introduction parameters of the first protective gas, repeating the step of calcining the metal sheets in the first sintering furnace, and obtaining a first corresponding relationship between different oxygen contents in the first sintering furnace and a first weight change of each metal sheet before and after calcination.

[0057] In this embodiment, under the condition of maintaining the preset sintering parameters, by adjusting the type, content, ratio, flow rate, pressure and other parameters of the first protective gas, the oxygen content in the first sintering furnace will change slightly, and step S103 is repeated multiple times to calcine multiple prepared metal sheets, and multiple groups of corresponding data of the oxygen content in the first sintering furnace and the first weight change of the metal sheet before and after sintering can be obtained. After obtaining multiple groups of data, the first corresponding relationship between different oxygen contents and the first weight change of the prepared metal sheet before and after calcination under the condition of the preset sintering parameters can be obtained. The first corresponding relationship can be specifically embodied in the form of a data table, a mathematical expression or a fitting model, data grouping (interval statistics), a fitting curve, etc.

[0058] S105: placing the uncalcined metal sheet and the sintering object in a second sintering furnace, introducing a second protective gas into the second sintering furnace, and calcining the metal sheet and the sintering object under the condition of the preset sintering parameters.

[0059] In step S105, the uncalcined metal sheet and the sintering object are placed in a second sintering furnace and calcined together with the sintering object, wherein the sintering parameters of the calcination are the same as the aforementioned preset sintering parameters. In this embodiment, the composition and introduction parameters of the second protective gas and the first protective gas may be the same or different. The introduction parameters of the second protective gas vary depending on the properties of the second sintering furnace. For example, if the second sintering furnace is an intermittent tubular furnace, it is necessary to continuously introduce the second protective gas into the furnace during the entire sintering process to maintain a weak reducing atmosphere therein. The sintering object of this embodiment is a whole block of MLCC green laminate, that is, a bar block.

[0060] S106: taking out the calcined metal sheet, cooling it, and weighing it to obtain a second weight change of the metal sheet before and after calcination.

[0061] S107: Obtaining the oxygen content during the sintering process in the second sintering furnace according to the second weight change and the first corresponding relationship.

[0062] In this embodiment, the metal sheet can be placed in a drying dish and cooled to room temperature before weighing. Since the sintering parameters in the second sintering furnace are the same as those in the first sintering furnace, the weight change of the metal sheet before and after sintering in the first sintering furnace and the second sintering furnace under the same oxygen content condition should be the same. Therefore, the oxygen content in the second sintering furnace can be inferred from the second weight change and the first corresponding relationship between different oxygen contents and the first weight change of the metal sheet before and after calcination.

[0063] The MLCC sintering furnace atmosphere test method of the embodiment of the present application can conveniently and intuitively measure the sintering atmosphere of the sintering object, and the test method is simple and the equipment cost is low; the metal sheet of the present application is put into the furnace on the same day as the sintering object, and can be placed at the same position as the sintering object for measurement, which can more directly reflect the atmosphere of the sintering object; in a sintering environment where protective gas needs to be continuously introduced and the oxygen content may fluctuate during the sintering process, compared with the traditional method of judging the atmosphere of the sintering furnace by directly measuring the oxygen content, the second weight change of the present application can measure the influence of the atmosphere on the metal / ceramic during the sintering process from the overall perspective of the entire sintering process, and has a direct guiding role in the formulation of the sintering atmosphere of the metal and ceramic co-firing system.

[0064] In an optional embodiment, the step of preparing the metal sheet in S101 includes: obtaining metal powder and pressing it into a metal sheet.

[0065] Preferably, the metal powder is nano powder, for example, a mixture of one or more of nano Ni powder, nano Cu powder, nano Cr powder, nano Zn powder and nano Fe powder.

[0066] Optionally, a hydraulic press is used to press the metal powder into metal sheets.

[0067] In one embodiment, after the metal sheet is pressed, the pressed metal sheet is placed in an oven for drying before being weighed. To ensure that the metal sheet is thoroughly dried, preferably, the drying and weighing operations of the metal sheet are repeated multiple times until the weight change of the continuous weighing is less than or equal to a set value, and the set value can be selected between 0.01% and 0.001%.

[0068] In a specific embodiment, about 2.00 g of nano Ni powder is weighed and pressed into a Φ4 mm metal sheet using a hydraulic press at a pressure of about 20 MPa. The pressed metal sheet is placed in an oven at 110° C. and heat treated in air for 4 hours to a constant weight (weight difference ≤ 0.05%). Then the weight is accurately weighed and recorded.

[0069] In a preferred embodiment, in step S104, the process of obtaining a first corresponding relationship between different oxygen contents in the first sintering furnace and a first weight change of the metal sheet before and after calcination includes the following steps: obtaining a fitting curve between the oxygen content and the first weight change based on the two.

[0070] like Figure 2 As shown in FIG. 1 , in a specific embodiment, a quadratic polynomial fitting curve is formed by fitting data between oxygen potentials of multiple groups of oxygen analyzer readings and first weight changes of metal sheets, and the curve shows how changes in oxygen content (characterized by oxygen potential) affect the weight changes of Ni metal sheets. In this embodiment, a fitting formula of a quadratic equation can also be obtained based on the fitting curve.

[0071] In this embodiment, the specific process of obtaining the oxygen content during the sintering process in the second sintering furnace according to the second weight change and the first corresponding relationship includes the following steps:

[0072] The oxygen content during sintering in the second sintering furnace is obtained according to the second weight change and the fitting curve. Preferably, the second weight change can be substituted into the quadratic equation obtained by the fitting curve to obtain the corresponding oxygen content (oxygen potential).

[0073] In one embodiment, if Figure 3 As shown, the second sintering furnace is an intermittent tubular furnace with a continuously ventilated atmosphere; the first protective gas includes nitrogen and hydrogen, and the second protective gas includes nitrogen and hydrogen; the introduction parameters of the first protective gas and the second protective gas include any one of the following parameters of nitrogen and hydrogen: introduction flow rate, introduction pressure, and introduction time.

[0074] The present application also provides a method for setting parameters of a sintering furnace for MLCC, including the steps of the sintering furnace atmosphere test method for MLCC in any of the above embodiments. Based on the steps of the sintering furnace atmosphere test method for MLCC, after obtaining the oxygen content during the sintering process in the second sintering furnace according to the second weight change and the first corresponding relationship, the method further includes the following steps:

[0075] According to the oxygen content during the sintering process in the second sintering furnace, the parameters for introducing the second protective gas during the next calcination are set.

[0076] In this embodiment, after obtaining the oxygen content of the sintered object during sintering, the parameters for introducing the second protective gas during the next calcination can be adjusted so that the oxygen content in the second sintering furnace is closer to the required oxygen content during the next calcination.

[0077] In a specific embodiment, as shown in Table 1 below, in an intermittent tube furnace environment, the second protective gas includes nitrogen and hydrogen that are continuously introduced. The oxygen content is characterized by the numerical oxygen potential of the oxygen sensor. It can be seen that when the nitrogen flow rate remains unchanged, the change in hydrogen flow rate will cause a change in the oxygen content during the sintering process. Therefore, after obtaining the weight change of the Ni block, it can be calculated whether the oxygen potential corresponding to the oxygen content in the second sintering furnace during this sintering process is the required oxygen content. If not, the hydrogen flow rate during the next sintering can be adjusted according to whether the oxygen potential is too high or too low.

[0078] By adjusting the hydrogen flow rate in the input parameters, it can be seen that under different hydrogen flow rates, the oxygen potential during sintering in the second sintering furnace will also change. Therefore, according to this change law, the input flow rate can be accurately adjusted to accurately control the oxygen content in the next sintering process.

[0079] In other embodiments, the second gas may further include other gases and combinations of other gases, and the introduction parameters of the second protective gas may further include the introduction flow rate, introduction pressure, introduction time, etc. of other gases.

[0080] Table 1 Changes in oxygen potential and Ni block weight under various setting conditions

[0081]

[0082]

[0083] The MLCC sintering furnace parameter setting method of the present embodiment can set the protective gas introduction parameters for the next sintering according to the test results of the previous sintering furnace atmosphere, so that when the second sintering furnace is sintered for the next time, the atmosphere in the furnace is closer to the set value, so that the reducing atmosphere in the furnace will not be too strong (that is, the oxidation content in the environment is too low) or the oxygen content will not be too high during the next sintering, thereby avoiding oxidation of the metal and stripping of O in the ceramic to cause the ceramic structure to become loose, thereby improving the strength and durability of the ceramic and the quality of the MLCC.

[0084] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0085] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims, and the description may be used to interpret the contents of the claims.

Claims

1. A method for testing the sintering furnace atmosphere of MLCC, characterized in that: The following steps are involved: preparing a plurality of metal sheets and weighing them; Placing the metal sheet in a first sintering furnace, introducing a first protective gas into the first sintering furnace, calcining the metal sheet under the condition of preset sintering parameters, and measuring the oxygen content in the first sintering furnace; The calcined metal sheet is taken out and weighed after cooling; Adjusting the introduction parameters of the first protective gas, repeating the step of calcining the metal sheet in the first sintering furnace, and obtaining a first corresponding relationship between different oxygen contents in the first sintering furnace and a first weight change of each of the metal sheets before and after calcination; placing the uncalcined metal sheet and the sintering object in a second sintering furnace, introducing a second protective gas into the second sintering furnace, and calcining the metal sheet and the sintering object under the conditions of the preset sintering parameters; The calcined metal sheet is taken out, cooled and weighed to obtain a second weight change of the metal sheet before and after calcination; The oxygen content during the sintering process in the second sintering furnace is obtained according to the second weight change and the first corresponding relationship.

2. The MLCC sintering furnace atmosphere testing method according to claim 1, characterized in that: The process of preparing the metal sheet includes the following steps: Take metal powder and press it into metal sheets.

3. The MLCC sintering furnace atmosphere testing method according to claim 2, characterized in that: After the metal powder is pressed into metal sheets, before weighing them, the following steps are also included: The pressed metal sheets are placed in an oven for drying.

4. The MLCC sintering furnace atmosphere testing method according to claim 3, characterized in that: The drying and weighing operations of the metal sheet are repeated multiple times until the weight change of continuous weighing is less than or equal to the set value.

5. The MLCC sintering furnace atmosphere testing method according to claim 1, characterized in that: The process of obtaining the first corresponding relationship between different oxygen contents in the first sintering furnace and the first weight change of each of the metal sheets before and after calcination comprises the following steps: Obtaining a fitting curve between the oxygen content and the first weight change according to the oxygen content and the first weight change; The specific process of obtaining the oxygen content during the sintering process in the second sintering furnace according to the second weight change and the first corresponding relationship comprises the following steps: The oxygen content during the sintering process in the second sintering furnace is obtained according to the second weight change and the fitting curve.

6. The MLCC sintering furnace atmosphere testing method according to claim 1, characterized in that: The first sintering furnace is a sealed static atmosphere, and the second sintering furnace is a continuously ventilated atmosphere.

7. The MLCC sintering furnace atmosphere testing method according to claim 6, characterized in that: The first protective gas includes nitrogen and hydrogen, and the second protective gas includes nitrogen and hydrogen; the introduction parameters include one or more of the following parameters of nitrogen and hydrogen: Inlet flow, inlet pressure, and inlet time.

8. The MLCC sintering furnace atmosphere testing method according to claim 1, characterized in that: The metal powder includes one or more materials.

9. The MLCC sintering furnace atmosphere testing method according to claim 1, characterized in that: The preset sintering parameters include maximum temperature, heating rate and holding time.

10. A method for setting parameters of a sintering furnace for MLCC, characterized in that: The method comprises the steps of the MLCC sintering furnace atmosphere testing method as described in any one of claims 1 to 9; After obtaining the oxygen content in the second sintering furnace during the sintering process according to the second weight change and the first corresponding relationship, the method further includes the following steps: According to the oxygen content during the sintering process in the second sintering furnace, the parameters for introducing the second protective gas during the next calcination are set.

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