Method and device for detecting quartz crucible

Abstract

The invention provides a method and a device for detecting a quartz crucible. The apparatus includes: a first detection chamber having an opening; the base is arranged in the first detection chamber and is used for bearing a quartz crucible; the light sources are arranged on the inner walls of the two opposite sides of the base in the first detection chamber; the second detection chamber is provided with an opening, the second detection chamber can enter or leave the first detection chamber from the opening of the first detection chamber, and after the second detection chamber enters the first detection chamber, the base and the quartz crucible are located in the second detection chamber; the distance sensor is arranged in the second detection chamber and is used for detecting appearance parameters of the quartz crucible after the second detection chamber enters the first detection chamber; the photographing device is arranged in the first detection chamber and is used for photographing an inner surface image of the quartz crucible after the second detection chamber leaves the first detection chamber; and the confirmation part is used for confirming the detection state of the quartz crucible according to the appearance parameters of the quartz crucible and the inner surface image of the quartz crucible.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor manufacturing technology, and in particular to a method and device for detecting a quartz crucible. Background Art

[0002] In the process of pulling a single crystal silicon rod (also referred to as a crystal rod) by the CZ method, polycrystalline silicon raw materials are melted in a quartz crucible to generate a silicon melt, and a seed crystal is immersed in the silicon melt. The quartz crucible and the seed crystal are rotated while the seed crystal is slowly pulled up, thereby growing a large single crystal at the lower end of the seed crystal. According to the CZ method, the yield of large-diameter silicon single crystals can be improved.

[0003] As a container for holding molten silicon during the CZ method of pulling single crystal silicon rods, the quartz crucible is required to be non-deformed and free of defects on the inner surface of the quartz crucible. If the quartz crucible is deformed, the shape and quality of the pulled crystal rod will change. In the worst case, the crucible wall will contact the structure in the furnace and cause an accident. If there are defects such as spots, bubbles or scratches on the inner surface of the quartz crucible in contact with the molten silicon, the quality of the crystal rod will also be reduced, and the molten silicon may even leak. Therefore, it is usually necessary to detect the appearance parameters and defects of the quartz crucible.

[0004] In current related solutions, manual inspection is usually used to inspect quartz crucibles. However, the manual inspection method has low work efficiency, and the inspection results are easily affected by subjective factors such as the technical level, experience, and fatigue of the inspectors, and it is impossible to accurately and objectively inspect the quartz crucibles. Summary of the invention

[0005] The present disclosure provides a method and device for detecting a quartz crucible, which can accurately and objectively detect the appearance parameters and defects of the quartz crucible.

[0006] The technical solution of the present disclosure is achieved as follows: In a first aspect, the present disclosure provides a device for detecting a quartz crucible, the device comprising: a first detection chamber having an opening; A base disposed in the first detection chamber, used to support a quartz crucible; In the first detection chamber, light sources are arranged on inner walls on two opposite sides of the base; A second detection chamber having an opening, wherein the second detection chamber can enter or leave the first detection chamber from the opening of the first detection chamber, and after the second detection chamber enters the first detection chamber, the base and the quartz crucible are in the second detection chamber; A distance sensor disposed in the second detection chamber, used to detect the shape parameters of the quartz crucible after the second detection chamber enters the first detection chamber; A photographing device disposed in the first detection chamber, for photographing an image of the inner surface of the quartz crucible after the second detection chamber leaves the first detection chamber; The confirmation unit is configured to confirm the detection state of the quartz crucible based on the external shape parameters of the quartz crucible and the inner surface image of the quartz crucible.

[0007] In a second aspect, the present disclosure provides a method for detecting a quartz crucible, the method being applied to the device for detecting a quartz crucible according to the first aspect, the method comprising: After the second detection chamber enters the first detection chamber, detecting the appearance parameters of the quartz crucible; After the second detection chamber leaves the first detection chamber, taking an image of the inner surface of the quartz crucible; The detection state of the quartz crucible is confirmed according to the appearance parameters of the quartz crucible and the inner surface image of the quartz crucible.

[0008] The present disclosure provides a method and device for detecting a quartz crucible; in an optical dark field detection environment provided by a first detection chamber when a second detection chamber enters, the shape parameters of the quartz crucible are detected by a distance sensor; in a bright field detection environment provided after the second detection chamber leaves the first detection chamber, defects existing on the inner surface of the quartz crucible are detected by photographing an image of the inner surface of the quartz crucible; whether the detection state of the quartz crucible can continue to be used is determined based on the detected shape parameters and defects, and the quartz crucible can be accurately and objectively detected without manual inspection. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 A cross-sectional view of an exemplary quartz crucible provided for the present disclosure.

[0010] Figure 2 A schematic diagram of the composition of a device for detecting a quartz crucible provided in the present invention.

[0011] Figure 3 A front view schematic diagram of a first detection chamber provided by the present disclosure.

[0012] Figure 4 A schematic diagram of another device for detecting a quartz crucible provided in the present invention.

[0013] Figure 5 An exemplary schematic diagram of detecting the external parameters of a quartz crucible provided in the present disclosure.

[0014] Figure 6Another exemplary schematic diagram of detecting the external parameters of a quartz crucible provided in the present disclosure.

[0015] Figure 7 A schematic top view of a method for controlling the movement of an infrared displacement sensor provided by the present invention.

[0016] Figure 8 Another exemplary schematic diagram of detecting the external parameters of a quartz crucible provided in the present disclosure.

[0017] Fig. 9 A schematic diagram of another example of detecting the external parameters of a quartz crucible provided in the present disclosure.

[0018] Fig.10 A schematic diagram of an image showing defects on the inner surface of a quartz crucible provided in the present disclosure.

[0019] Fig.11 A schematic flow chart of a method for detecting a quartz crucible provided in the present invention. DETAILED DESCRIPTION

[0020] The technical solutions in the present disclosure will be described clearly and completely below in conjunction with the accompanying drawings in the present disclosure.

[0021] Figure 1 1 is a cross-sectional view of a quartz crucible 1 capable of implementing the technical solution disclosed in the present invention. Figure 1 The quartz crucible 1 includes a substantially cylindrical straight portion 11 with an open upper end extending in a vertical direction, a curved bottom 12 , and a side portion 13 connecting the straight portion 11 and the bottom 12 and having a greater curvature than the bottom 12 .

[0022] by Figure 1 Taking the quartz crucible 1 shown as an example, its shape parameters can be used to determine whether the quartz crucible 1 is deformed, for example, the shape parameters can be compared with the shape parameters at the factory to determine whether there is deformation. In addition, the shape parameters can also be used to guide the use in the crystal pulling process, for example, the position of the liquid level line that contains polysilicon raw materials and melts into silicon melt is evaluated based on the shape parameters. During the crystal pulling process, the rising speed of the quartz crucible or the rising speed of the crystal rod is fine-tuned based on this position for the purpose of stabilizing the solid-liquid distance to ensure that the quality of the crystal rod is in the optimal area.

[0023] In some examples, such as Figure 1 As shown, the shape parameters of the quartz crucible 1 may include: the height of the quartz crucible 1; the inner diameter D1 and the outer diameter D2 of the straight tube portion 11 of the quartz crucible 1; the wall thickness T between the inner surface and the outer surface of the quartz crucible at the straight tube portion 11; the wall thickness N between the inner surface and the outer surface of the quartz crucible at the bottom 12; the curvature radius R1 of the bottom 12 and the curvature radius R2 of the side portion 13.

[0024] In addition to the above-mentioned appearance parameters of the quartz crucible 1, defects on the inner surface of the quartz crucible 1 will also affect the quality of the pulled crystal rod. The three most common defects on the inner surface of the quartz crucible 1 are spots, bubbles and scratches.

[0025] As for the spot defects, during the manufacturing process of the quartz crucible 1, since the synthetic sand or natural sand in the material contains impurities or metal components, these impurities or metal elements aggregate under the high temperature and high pressure environment of the molding process, thus forming black or brown abnormal spots. During the crystal pulling process, the same long-term high temperature and high pressure environment will further promote the aggregation of impurities or metal elements, making the size of the abnormal spots larger and larger, and easier to fall off from the inner surface of the quartz crucible 1 and enter the silicon melt. In the case where the silicon melt is mixed with the detached abnormal spots, the quality of the pulled crystal rod is reduced due to the impurities or metal elements.

[0026] As for bubble defects, during the manufacturing process of the quartz crucible 1, due to the influence of temperature and gas, bubbles will gather inside the quartz crucible 1 and cannot be discharged. During the crystal pulling process, the high temperature and high pressure environment will cause the bubbles to expand, and the expanded bubbles will cause the quartz crucible 1 to deform. In addition, as the quartz crucible 1 melts during the crystal pulling process, the bubbles inside the quartz crucible 1 will enter the silicon melt, resulting in bubbles in the crystal rod or an increase in the oxygen content in the crystal rod.

[0027] As for scratch defects, during the crystal pulling process, the high temperature environment will cause softening or crystallization at the scratch defect, causing impurities or metal components in the quartz crucible 1 to enter the silicon melt, causing the quality of the pulled crystal rod to be reduced due to the impurities or metal elements contained.

[0028] Based on the above-mentioned appearance parameters and defects of the quartz crucible, in related solutions, manual inspection is usually used for detection, which cannot accurately and objectively detect the quartz crucible. Based on this, the present disclosure hopes to provide a quartz crucible detection solution that can accurately and objectively detect the appearance parameters and defects of the quartz crucible.

[0029] See also Figure 2 , which shows a device 20 for detecting a quartz crucible provided by the present disclosure, and the device 20 may include: A first detection chamber 21 having an opening; A base 22 disposed in the first detection chamber 21, used to carry a quartz crucible; In the first detection chamber 21, a light source 23 is arranged on two inner walls opposite to each other of the base 22; A second detection chamber 24 having an opening, the second detection chamber 24 can enter or leave the first detection chamber 21 from the opening of the first detection chamber 21 along the direction indicated by the arrow, and after the second detection chamber 24 enters the first detection chamber 21, the base 22 and the quartz crucible are in the second detection chamber 24; The distance sensor 25 disposed in the second detection chamber 24 is used to detect the shape parameters of the quartz crucible after the second detection chamber 24 enters the first detection chamber 21; A photographing device 26 disposed in the first detection chamber 21, for photographing an inner surface image of the quartz crucible after the second detection chamber 24 leaves the first detection chamber 21; The confirmation unit 27 is used to confirm the detection status of the quartz crucible according to the outer shape parameters of the quartz crucible and the inner surface image of the quartz crucible.

[0030] In some examples, such as Figure 3 The schematic front view of the first detection chamber 21 shown in the figure, the first detection chamber 21 can be implemented as a box structure with an opening, and the box structure defines an internal space 217 of the first detection chamber 21. Figure 3 The box structure shown may further include five inner walls. Specifically, the five inner walls include four peripheral walls, namely a first peripheral wall 211, a second peripheral wall 212, a third peripheral wall 213 and a fourth peripheral wall 214. In addition, the five inner walls also include a bottom wall 216 relative to the opening.

[0031] In some examples, in the first detection chamber 21 according to Figure 3 When placed in the manner shown, the base 22 can be disposed on the second peripheral wall 212, in which case the light source 23 can be disposed on two opposite inner walls of the first peripheral wall 211 and the third peripheral wall 213. When a quartz crucible is carried on the base 22, the light source 23 can provide light irradiation toward the quartz crucible.

[0032] In some examples, in the first detection chamber 21, Figure 2 In the case where the opening is oriented vertically upward, the base 22 can be disposed on the bottom wall 216. In this case, the light source 23 can be disposed not only on the two opposite inner walls of the first peripheral wall 211 and the third peripheral wall 213, but also not on the two opposite inner walls of the second peripheral wall 212 and the fourth peripheral wall 214, and the present disclosure does not make any specific limitation on this.

[0033] In some examples, the second detection chamber 24 may also be implemented as a box structure with an opening similar to the first detection chamber 21. In a specific implementation, when the opening of the second detection chamber 24 is opposite to the opening of the first detection chamber 21, the second detection chamber 24 may enter or leave the first detection chamber 21 from the opening of the first detection chamber 21. After the second detection chamber 24 enters the first detection chamber 21, the base 22 and the quartz crucible it carries are not only in the internal space 217 of the first detection chamber 21, but also in the internal space defined by the box structure of the second detection chamber 24.

[0034] In some examples, the box material of the second detection chamber 24 is made of a light-absorbing material. When the base 22 and the quartz crucible it carries are in the internal space of the second detection chamber 24, the base 22 and the quartz crucible it carries are in an optical darkroom environment. For example, a black light-shielding cloth can be set on the inner wall of the second detection chamber 24 to block external light from entering the internal space of the second detection chamber 24, or a chemical light-absorbing material with a high light absorption rate can be coated on the inner wall of the second detection chamber 24. Based on the optical darkroom environment provided by the second detection chamber 24, the distance sensor 25 can avoid interference from other light during the detection process, so that the distance sensor 25 can capture smaller displacement changes, thereby improving the detection precision and accuracy of the distance sensor 25.

[0035] In some examples, a sliding rail is provided in the second detection chamber 24, and the distance sensor 25 moves in the second detection chamber 24 by means of the sliding rail, so as to measure the shape parameters of the quartz crucible. In some examples, the distance sensor 25 can be implemented as an infrared displacement sensor, and the infrared displacement sensor measures toward the quartz crucible in a direction perpendicular to the central axis of the quartz crucible.

[0036] In some examples, the confirmation unit 27 may be implemented as an electronic device with data processing and computing functions, such as at least one of a smart phone, a smart watch, a desktop computer, a laptop computer, a virtual reality terminal, an augmented reality terminal, a wireless terminal, and a laptop computer, etc. The electronic device has a communication function, can access a wired network or a wireless network, and receive data transmitted by other components in the device 20 based on the accessed wired network or wireless network.

[0037] In some possible implementations, see Figure 4The device 20 for detecting the quartz crucible also includes a control unit 28, which is configured to control the movement of the distance sensor 25 in the second detection chamber 24 when the base 22 and the quartz crucible carried by it are in the internal space of the second detection chamber 24, for example, to control the distance sensor 25 to move on the sliding guide rail in the second detection chamber 24, so that the distance sensor 25 measures the shape parameters of the quartz crucible during the movement.

[0038] For the above implementation, combined with the aforementioned exemplary quartz crucible shape parameters, in some examples, when the distance sensor 25 is an infrared displacement sensor, combined with Figure 5 As shown, the control unit 28 is configured as follows: Control the infrared displacement sensor to move according to a first movement process, and obtain a first movement distance of the infrared displacement sensor in the first movement process; wherein the first movement process is a movement process in which the infrared displacement sensor moves from the top of the base 22 along the vertical direction indicated by the solid arrow until the infrared displacement sensor can no longer receive reflected infrared rays; and, in the first moving process, selecting at least three first measuring distances in the first stage of measuring the bottom of the quartz crucible by the infrared displacement sensor; and, during the first movement, selecting at least three second measurement distances in a second stage of measuring the side of the quartz crucible by the infrared displacement sensor; The confirmation unit 27 is further configured to: Determining the first moving distance as the height of the quartz crucible; Acquire the curvature radius of the bottom of the quartz crucible according to the at least three first measurement distances; The curvature radius of the side of the quartz crucible is acquired according to the at least three second measurement distances.

[0039] Specifically, if Figure 5As shown, the distance sensor 25, such as the infrared displacement sensor, emits infrared rays in a direction perpendicular to the central axis of the quartz crucible (as shown by the dashed line), that is, in a horizontal direction, toward the outer surface of the quartz crucible during the first movement. After absorbing part of the infrared rays, the outer surface of the quartz crucible will reflect the remaining infrared rays. After receiving the infrared rays reflected by the outer surface of the quartz crucible, the infrared displacement sensor calculates the change in the distance between the infrared displacement sensor and the outer surface of the quartz crucible during the first movement according to the change in light intensity between the emitted infrared rays and the received reflected infrared rays. When the distance sensor 25, such as the infrared displacement sensor, moves in a vertical direction to the top of the quartz crucible, as shown by the dotted line, the infrared displacement sensor no longer receives the reflected infrared rays, that is, the infrared rays emitted by the infrared displacement sensor will not be blocked by the quartz crucible, and there will be no reflection of infrared rays in the optical darkroom environment of the internal space of the second detection chamber 24, which means that the moving distance of the infrared displacement sensor exceeds the height of the quartz crucible. Based on this, the confirmation unit 27 can determine the moving distance of the infrared displacement sensor in the first moving process as the height of the quartz crucible.

[0040] In addition, during the first movement, the infrared displacement sensor will measure the distance between itself and the bottom, side and straight part of the quartz crucible in turn. In the first stage of the infrared displacement sensor measuring the distance between itself and the bottom of the quartz crucible, the first measurement distance between the infrared displacement sensor itself and at least three measurement points on the bottom of the quartz crucible can be collected. Based on this, the confirmation unit 27 can use the at least three first measurement distances to determine the positions of the at least three measurement points, and based on the non-collinear nature of the at least three measurement points, the positions of the at least three measurement points can be used to calculate the curvature radius of the bottom of the quartz crucible. For example, starting from the top of the base 22, a measurement point is collected every 1 mm, and a total of three non-collinear measurement points P1, P2 and P3 are collected. According to the positions of these three measurement points P1, P2 and P3, the curvature radius of the bottom of the quartz crucible can be calculated.

[0041] Similarly, in the second stage of the infrared displacement sensor measuring the distance between itself and the side of the quartz crucible, the second measurement distance between the infrared displacement sensor itself and at least three measurement points on the side of the quartz crucible can be collected. Based on this, the confirmation unit 27 can use the at least three second measurement distances to determine the positions of the three measurement points, and based on the non-collinear nature of the at least three measurement points, the curvature radius of the side of the quartz crucible can be calculated using the positions of the at least three measurement points. For example, within the set moving distance before measuring the distance to the straight tube, three non-collinear measurement points P4, P5 and P6 are collected, and the curvature radius of the side of the quartz crucible can be calculated based on the positions of the three measurement points P4, P5 and P6.

[0042] For the above implementation, combined with the aforementioned exemplary shape parameters of the quartz crucible, in some examples, when the distance sensor 25 is an infrared displacement sensor, the control unit 28 is configured as follows: Controlling the infrared displacement sensor to collect a third measurement distance of three measurement points on the inner surface of the straight tube portion of the quartz crucible at a set height; The confirmation unit 27 is configured to: Obtaining the center point of the quartz crucible at the set height according to a third measurement distance of three measurement points on the inner surface of the straight tube portion of the quartz crucible; The control unit 28 is further configured to: After controlling the infrared displacement sensor to move to the center point at the set height, it moves vertically to the height of the quartz crucible; and controlling the infrared displacement sensor to measure toward the quartz crucible from the center point at the height of the quartz crucible to obtain a fourth measurement distance between the infrared displacement sensor and the lowest point of the inner surface of the quartz crucible; The confirmation unit 27 is further configured to: The wall thickness between the inner surface and the outer surface of the quartz crucible at the bottom is obtained according to the height of the quartz crucible and the fourth measurement distance.

[0043] Specifically, the control unit 28 can move the distance sensor 25, such as the infrared displacement sensor, into the quartz crucible and to a set height below the top of the quartz crucible, such as Figure 6 Then, the distance sensor 25, such as the infrared displacement sensor, is controlled to translate at the set height, as shown in FIG. Figure 7As shown in the top view, the infrared displacement sensor measures the third measurement distance between the three measurement points P7, P8 and P9 on the inner surface of the straight tube portion of the quartz crucible at the set height. Based on this, the confirmation unit 27 can use the third measurement distances corresponding to the at least three measurement points P7, P8 and P9 to determine the positions of the at least three measurement points P7, P8 and P9, and based on the property that the at least three measurement points P7, P8 and P9 are not collinear, the positions of the at least three measurement points P7, P8 and P9 can be used to determine the center point O of the quartz crucible at the set height by a three-point circle determination method.

[0044] In addition, the three non-collinear measurement points collected at a set height inside the quartz crucible and below the top of the quartz crucible can also be obtained by controlling the distance sensor 25, such as the infrared displacement sensor, to rotate, and the third measurement distance corresponding to the three measurement points can be measured by the infrared displacement sensor.

[0045] After determining the center point O of the quartz crucible at the set height, the control unit 28 may also control the distance sensor 25, such as the infrared displacement sensor, to move to the center point of the height of the quartz crucible. Specifically, the control unit 28 may first control the distance sensor 25, such as the infrared displacement sensor, to move to the center point O at the set height, and then control the distance sensor 25, such as the infrared displacement sensor, to move upward in the vertical direction to the height of the quartz crucible. After the distance sensor 25, such as the infrared displacement sensor, moves to the center of the height of the quartz crucible (as shown by the dotted line), as shown in FIG. Figure 8 As shown, the distance sensor 25, for example, the infrared displacement sensor, can be controlled to measure toward the quartz crucible to obtain a fourth measurement distance between the infrared displacement sensor and the lowest point of the inner surface of the quartz crucible. The confirmation unit 27 can determine the wall thickness between the inner surface and the outer surface of the quartz crucible at the bottom according to the difference between the height H of the quartz crucible obtained in the above example and the fourth measurement distance M, that is, Figure 1 The wall thickness N is shown in FIG.

[0046] For the above implementation, combined with the aforementioned exemplary quartz crucible shape parameters, in some examples, when the distance sensor 25 is an infrared displacement sensor, combined with Fig. 9 As shown, the control unit 28 is configured as follows: Controlling the infrared displacement sensor to move according to a second movement process, wherein the second movement process is a movement process in which the infrared displacement sensor moves from the center at the height of the quartz crucible along the horizontal direction indicated by the solid arrow until the infrared displacement sensor can no longer receive reflected infrared rays; During the second movement, recording a first position of the infrared displacement sensor when the measured distance begins to be less than a set distance threshold, and a second position of the infrared displacement sensor when it begins to be unable to receive reflected infrared rays; The confirmation unit 27 is configured to: The inner diameter and outer diameter of the quartz crucible and the wall thickness between the inner surface and the outer surface of the straight tube portion of the quartz crucible are determined according to the first position and the second position.

[0047] Specifically, if Fig. 9 As shown, the distance sensor 25, for example the infrared displacement sensor, emits infrared rays toward the inner surface of the quartz crucible in a direction parallel to the central axis of the quartz crucible (as shown by the dotted line) during the second movement process. After the inner surface of the quartz crucible absorbs part of the infrared rays, it reflects the remaining infrared rays. After receiving the infrared rays reflected by the inner surface of the quartz crucible, the infrared displacement sensor calculates the change in the distance between the infrared displacement sensor and the outer surface of the quartz crucible during the second movement process according to the change in light intensity between the emitted infrared rays and the received reflected infrared rays.

[0048] When the distance sensor 25, such as the infrared displacement sensor, moves horizontally to the top plane corresponding to the quartz crucible, as shown by the dotted line at the first position Loc-1, the distance measured by the infrared displacement sensor will be significantly reduced to a smaller distance. The present disclosure uses a distance threshold to determine whether the distance at this location is smaller. As the infrared displacement sensor continues to move and begins to move out of the outer surface corresponding to the quartz crucible, as shown by the dotted line at the second position Loc-2, the infrared displacement sensor no longer receives reflected infrared rays, that is, the infrared rays emitted by the infrared displacement sensor will not be blocked by the quartz crucible, and in the optical darkroom environment of the internal space of the second detection chamber 24, there will be no reflection of infrared rays, which indicates that the infrared displacement sensor has moved out of the measurement range of the quartz crucible. Based on this, the confirmation unit 27 can determine the inner diameter of the quartz crucible according to the distance from the center of the height of the quartz crucible to the first position Loc-1 by the infrared displacement sensor, determine the outer diameter of the quartz crucible according to the distance from the center of the height of the quartz crucible to the second position Loc-2 by the infrared displacement sensor, and determine the wall thickness between the inner surface and the outer surface of the quartz crucible at the straight tube portion according to the distance from the first position Loc-1 to the second position Loc-2 by the infrared displacement sensor, that is, Figure 1 The wall thickness T shown in FIG.

[0049] Through the above Figures 5 to 9The example shown in the figure illustrates a specific implementation example of controlling the movement of the distance sensor 25 in the second detection chamber 24 so that the distance sensor 25 measures the shape parameters of the quartz crucible during the movement when the base 22 and the quartz crucible carried by the base 22 are in the inner space of the second detection chamber 24. Figure 1 After the height of the quartz crucible 1, the inner diameter D1 and the outer diameter D2 of the straight tube portion 11 of the quartz crucible 1, the wall thickness T between the inner surface and the outer surface of the quartz crucible at the straight tube portion 11, the wall thickness N between the inner surface and the outer surface of the quartz crucible at the bottom 12, the curvature radius R1 of the bottom 12, and the curvature radius R2 of the side portion 13 are determined, the confirmation unit 27 can be used to determine whether the quartz crucible 1 has abnormal conditions such as deformation, for example, by comparing the shape parameters with the shape parameters at the time of leaving the factory to determine whether there is deformation. In addition, these shape parameters are used to guide the use in the crystal pulling process, for example, the position of the liquid level line containing polysilicon raw materials and melted into silicon melt is evaluated according to the shape parameters.

[0050] In some possible implementations, the control unit 28 is further configured to control the camera 26 to capture an image of the inner surface of the quartz crucible after the second detection chamber 24 leaves the first detection chamber 21; The confirmation unit 27 is configured to determine the type of defects occurring on the inner surface of the quartz crucible according to the image of the inner surface of the quartz crucible.

[0051] For the above implementation, specifically, after the second detection chamber 24 leaves the first detection chamber 21, the light source 23 arranged in the first detection chamber 21 can provide a bright detection environment and a bright field detection environment. In this detection environment, the light source 23 can be implemented as an LED array to form a Figure 2 The line light source shown in the figure, the light source 23 provides light irradiation toward the quartz crucible, which can improve the contrast and enhance the visible details on the surface of the quartz crucible, so that the image taken by the camera 26 can better capture the defects on the surface of the inner quartz crucible, which is helpful for the analysis of the defect type.

[0052] In some examples, the photographing device 26 can be implemented as a charge-coupled device (CCD) camera. The controller 28 can control the photographing device 26 to move in the direction indicated by the dotted line in the quartz crucible to collect images of all areas of the inner surface of the quartz crucible. The photographing device 26 can also be controlled to deflect at a fixed position in the quartz crucible to collect images of all areas of the inner surface of the quartz crucible. For the collected images of the inner surface of the quartz crucible, the confirmation unit 27 identifies whether there are defects on the inner surface of the quartz crucible and the types of defects based on these images.

[0053] Specifically, the confirmation unit 27 can obtain the image features of the inner surface image of the quartz crucible by image processing, and then identify whether there are defects on the inner surface of the quartz crucible by feature classification, and match the defect types existing on the inner surface of the quartz crucible according to the image features corresponding to each type of defect. The above implementation methods based on image recognition of defects and their types are not elaborated in this disclosure. Fig.10 In the figure, images of three common defects on the inner surface of the quartz crucible, namely spots, bubbles and scratches, are shown from left to right. After the confirmation unit 27 recognizes these types of defects based on the image, it can also determine the usage status of the quartz crucible according to the size and number of these defects. For example, it can determine whether the quartz crucible can continue to be used based on the size and number of spot defects, or it can determine whether the quartz crucible can continue to be used based on the length and number of scratch defects and whether the position of the scratch defects is above the liquid level line. It can also determine whether the quartz crucible can continue to be used based on the distribution density of bubble defects, for example, the number of bubble defects within 1 square centimeter.

[0054] The device 20 for inspecting quartz crucibles provided by the above technical solution provides two inspection environments, an optical dark field and a bright field, respectively. In the optical dark field inspection environment, the shape parameters of the quartz crucible are detected by a distance sensor, and in the bright field inspection environment, the inner surface image of the quartz crucible is taken to detect defects on the inner surface of the quartz crucible, thereby determining whether the inspection status of the quartz crucible can continue to be used based on the detected shape parameters and defects, and the quartz crucible can be inspected accurately and objectively without manual inspection.

[0055] Based on the same inventive concept as the above technical solution, see Fig.11 , which shows a method for detecting a quartz crucible provided by the present disclosure, which can be applied to the device 20 for detecting a quartz crucible described in any of the above schemes or examples, and the method may include: S1101: After the second inspection chamber enters the first inspection chamber, inspect the appearance parameters of the quartz crucible; S1102: after the second detection chamber leaves the first detection chamber, photographing an inner surface image of the quartz crucible; S1103: confirming the detection state of the quartz crucible according to the appearance parameters of the quartz crucible and the inner surface image of the quartz crucible.

[0056] In some examples, after the second detection chamber enters the first detection chamber, detecting the shape parameters of the quartz crucible includes: After the second detection chamber enters the first detection chamber, the distance sensor is controlled to move in the second detection chamber, so that the distance sensor measures the shape parameters of the quartz crucible during the movement.

[0057] In some examples, controlling the movement of the distance sensor in the second detection chamber so that the distance sensor measures the shape parameters of the quartz crucible during the movement includes: When the distance sensor is an infrared displacement sensor, the infrared displacement sensor is controlled to move according to a first movement process, and a first movement distance of the infrared displacement sensor in the first movement process is obtained, and the first movement distance is determined as the height of the quartz crucible; wherein the first movement process is a movement process in which the infrared displacement sensor starts from the top of the base and moves in a vertical direction until the infrared displacement sensor can no longer receive reflected infrared rays; In the first moving process, the infrared displacement sensor selects at least three first measuring distances in the first stage of measuring the bottom of the quartz crucible, and obtains the curvature radius of the bottom of the quartz crucible according to the at least three first measuring distances; In the first moving process, the infrared displacement sensor selects at least three second measurement distances in the second stage of measuring the side of the quartz crucible, and obtains the curvature radius of the side of the quartz crucible according to the at least three second measurement distances.

[0058] In some examples, controlling the movement of the distance sensor in the second detection chamber so that the distance sensor measures the shape parameters of the quartz crucible during the movement includes: When the distance sensor is an infrared displacement sensor, controlling the infrared displacement sensor to collect a third measurement distance of three measurement points on the inner surface of the straight tube portion of the quartz crucible at a set height; Acquire the center point of the quartz crucible at the set height according to the third measurement distance; After controlling the infrared displacement sensor to move to the center point at the set height, it moves vertically to the height of the quartz crucible; Controlling the infrared displacement sensor to measure toward the quartz crucible from the center point at the height of the quartz crucible to obtain a fourth measurement distance between the infrared displacement sensor and the lowest point of the inner surface of the quartz crucible; The wall thickness between the inner surface and the outer surface of the quartz crucible at the bottom is obtained according to the height of the quartz crucible and the fourth measurement distance.

[0059] In some examples, controlling the movement of the distance sensor in the second detection chamber so that the distance sensor measures the shape parameters of the quartz crucible during the movement includes: Controlling the infrared displacement sensor to move according to a second movement process, wherein the second movement process is a movement process in which the infrared displacement sensor moves horizontally from the center at the height of the quartz crucible until the infrared displacement sensor can no longer receive reflected infrared rays; During the second movement, recording a first position of the infrared displacement sensor when the measured distance begins to be less than a set distance threshold, and a second position of the infrared displacement sensor when it begins to be unable to receive reflected infrared rays; The inner diameter and outer diameter of the quartz crucible and the wall thickness between the inner surface and the outer surface of the straight tube portion of the quartz crucible are determined according to the first position and the second position.

[0060] In some examples, confirming the detection state of the quartz crucible according to the appearance parameters of the quartz crucible and the inner surface image of the quartz crucible includes: Determining whether the quartz crucible is deformed according to the appearance parameters of the quartz crucible; An image analysis is performed on the inner surface image of the quartz crucible to determine defects existing on the inner surface of the quartz crucible and corresponding defect types.

[0061] The above is a schematic scheme of a method for detecting a quartz crucible provided by the present disclosure. It should be noted that the technical scheme of the method for detecting a quartz crucible and the technical scheme of the device for detecting a quartz crucible described above belong to the same concept, and the details of the technical scheme of the method for detecting a quartz crucible that are not described in detail can all be referred to the description of the technical scheme of the device for detecting a quartz crucible described above.

[0062] It should be noted that the technical solutions described in the present disclosure can be combined arbitrarily without conflict.

[0063] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A device for detecting a quartz crucible, characterized in that: The device for detecting the quartz crucible comprises: a first detection chamber having an opening; A base disposed in the first detection chamber, used to support a quartz crucible; In the first detection chamber, light sources are arranged on inner walls on two opposite sides of the base; A second detection chamber having an opening, wherein the second detection chamber can enter or leave the first detection chamber from the opening of the first detection chamber, and after the second detection chamber enters the first detection chamber, the base and the quartz crucible are in the second detection chamber; A distance sensor disposed in the second detection chamber, used to detect the shape parameters of the quartz crucible after the second detection chamber enters the first detection chamber; A photographing device disposed in the first detection chamber, for photographing an image of the inner surface of the quartz crucible after the second detection chamber leaves the first detection chamber; The confirmation unit is configured to confirm the detection state of the quartz crucible based on the external shape parameters of the quartz crucible and the inner surface image of the quartz crucible.

2. The device for detecting a quartz crucible according to claim 1, characterized in that: The box material of the second detection chamber is made of light-absorbing material. When the base and the quartz crucible carried by it are in the inner space of the second detection chamber, the base and the quartz crucible carried by it are in an optical darkroom environment.

3. The device for detecting a quartz crucible according to claim 1, characterized in that: The distance sensor is an infrared displacement sensor.

4. The device for detecting a quartz crucible according to claim 3, characterized in that: The device for detecting a quartz crucible further includes: a control unit configured to control the movement of the distance sensor in the second detection chamber when the base and the quartz crucible carried by the base are in the inner space of the second detection chamber, so that the distance sensor measures the external shape parameters of the quartz crucible during the movement.

5. The device for detecting a quartz crucible according to claim 4, characterized in that: The control unit is configured to: Controlling the infrared displacement sensor to move according to a first movement process, and obtaining a first movement distance of the infrared displacement sensor in the first movement process; wherein the first movement process is a movement process in which the infrared displacement sensor moves vertically from the top of the base to a point where the infrared displacement sensor cannot receive reflected infrared rays; And, in the first moving process, the infrared displacement sensor selects at least three first measurement distances in a first stage of measuring the bottom of the quartz crucible; and, during the first movement, selecting at least three second measurement distances by the infrared displacement sensor in a second stage of measuring the side of the quartz crucible; The confirmation unit is further configured to: Determining the first moving distance as the height of the quartz crucible; Acquire the curvature radius of the bottom of the quartz crucible according to the at least three first measurement distances; The curvature radius of the side of the quartz crucible is acquired according to the at least three second measurement distances.

6. The device for detecting a quartz crucible according to claim 5, characterized in that: The control unit is configured to: Controlling the infrared displacement sensor to collect a third measurement distance of three measurement points on the inner surface of the straight tube portion of the quartz crucible at a set height; The confirmation unit is further configured to: Acquire the center point of the quartz crucible at the set height according to the third measurement distance; The control unit is further configured to: After controlling the infrared displacement sensor to move to the center point at the set height, it moves vertically to the height of the quartz crucible; and controlling the infrared displacement sensor to measure toward the quartz crucible from the center point at the height of the quartz crucible to obtain a fourth measurement distance between the infrared displacement sensor and the lowest point of the inner surface of the quartz crucible; The confirmation unit is further configured to: The wall thickness between the inner surface and the outer surface of the quartz crucible at the bottom is obtained according to the height of the quartz crucible and the fourth measurement distance.

7. The device for detecting a quartz crucible according to claim 6, characterized in that: The control unit is configured to: Controlling the infrared displacement sensor to move according to a second movement process, wherein the second movement process is a movement process in which the infrared displacement sensor moves horizontally from the center at the height of the quartz crucible until the infrared displacement sensor can no longer receive reflected infrared rays; During the second movement, recording a first position of the infrared displacement sensor when the measured distance begins to be less than a set distance threshold, and a second position of the infrared displacement sensor when it begins to be unable to receive reflected infrared rays; The confirmation unit is configured to: The inner diameter and outer diameter of the quartz crucible and the wall thickness between the inner surface and the outer surface of the straight tube portion of the quartz crucible are determined according to the first position and the second position.

8. The device for detecting a quartz crucible according to any one of claims 2 to 7, characterized in that: The confirmation unit is configured to: Whether the quartz crucible is deformed is determined according to the appearance parameters of the quartz crucible.

9. The device for detecting a quartz crucible according to claim 1, characterized in that: The confirmation unit is configured to: An image analysis is performed on the inner surface image of the quartz crucible to determine defects existing on the inner surface of the quartz crucible and corresponding defect types.

10. A method for detecting a quartz crucible, characterized in that: The method is applied to the device for detecting a quartz crucible according to any one of claims 1 to 9, and the method comprises: After the second detection chamber enters the first detection chamber, detecting the appearance parameters of the quartz crucible; After the second detection chamber leaves the first detection chamber, taking an image of the inner surface of the quartz crucible; The detection state of the quartz crucible is confirmed according to the appearance parameters of the quartz crucible and the inner surface image of the quartz crucible.

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