Vertical probe, probe head, and method for manufacturing vertical probe

Abstract

The invention relates to a vertical probe which comprises a first side surface and a third side surface which are opposite and a second side surface and a fourth side surface which are opposite, the third side surface and the fourth side surface extend from a body to a needle point in a plane manner, and the first side surface and the second side surface comprise a first upper plane area and a second upper plane area which are positioned on the body; the first transition area and the second transition area are located at the needle point, the first lower plane area and the second lower plane area are closer to the third side face and the fourth side face than the first upper plane area and the second upper plane area respectively, the first transition area and the second transition area extend to the first lower plane area and the second lower plane area from the first upper plane area and the second upper plane area gradually close to the third side face and the fourth side face respectively, and the first transition area and the first lower plane area are achieved through laser processing. The vertical probe can be in point contact with a micro conductive contact, has good current resistance, structural strength, service life and machining precision, and can avoid breakage and position offset of the tip due to up-down movement when being applied to a probe head.

Description

Technical Field

[0001] The present invention relates to a probe head of a probe card and a probe thereof, and in particular to a vertical probe, a probe head having the vertical probe, and a method for manufacturing the vertical probe. Background Art

[0002] A commonly used vertical probe is in the shape of a slender column with a square or rectangular cross section. This vertical probe is made by micro-electromechanical process or cutting of plate materials, and can be formed into the required probe width and thickness according to the use requirements. With the trend of miniaturization of electronic components, the width and thickness of this vertical probe also need to be reduced accordingly to touch the tiny conductive contacts on the object under test (including but not limited to the object under test with micro bumps).

[0003] However, reducing the width and thickness of the entire probe will greatly increase its resistance and significantly reduce its structural strength. The higher the resistance of the probe, the lower its current resistance. If the current resistance of the probe is too low, the probe will easily burn out when the power is turned on. In addition, if the structural strength of the probe is too low, it will be easy to wear, bend or even break due to force during point measurement, which will shorten the service life of the probe and require frequent replacement. Therefore, how to make the probe have sufficient current resistance, so that the probe can meet the needs of touching tiny conductive contacts and increase the service life of the probe is a very important issue in this technical field. Summary of the invention

[0004] The present invention proposes a vertical probe, which has a reduced width and thickness only at its tip, so that the tip can meet the requirements of contacting a tiny conductive contact, while other sections have a relatively large width and thickness, so that the probe has good current resistance and structural strength. Such a vertical probe includes a body and a tip, the tip includes a tip contact portion with a width and thickness smaller than the body, and a tip tapered portion located between the body and the tip contact portion. The width reduction of the tip can be achieved by micro-electromechanical process or laser cutting of a plate, and the thickness reduction of the tip can be achieved by mechanical processing or etching processing of micro-electromechanical process.

[0005] However, in the process of installing the vertical probe on a probe seat, the vertical probe is first inserted into the upper and lower guide holes of the upper and lower guide plate units of the probe seat, and then the upper and lower guide plate units are first horizontally displaced relative to each other and then fixed to each other to form the probe seat. At this time, the upper and lower guide holes are horizontally offset from each other, so that the body of the vertical probe is elastically bent and deformed. For example, the lower guide plate unit is displaced to the left relative to the upper guide plate unit, which causes the body of the vertical probe to bend to the left from top to bottom. In this case, the right side surface of the vertical probe will abut against the inner surface of the lower guide hole, and the abutting point will be located at the body close to the tapered portion of the needle tip. When the contact portion of the needle tip contacts the object to be tested and is subjected to an upward reaction force, the needle tip will elastically retract slightly into the lower guide hole. Therefore, if the right side surface of the vertical probe has a step difference between the part of the needle tip tapering and the part of the body instead of being coplanar, the structural strength of this part is poor, and the right side surface will not completely contact the inner surface of the lower guide hole in a plane when the needle tip moves up and down, that is, there is a step difference where the right side surface moves up and down to contact the inner surface of the lower guide hole, which will easily cause the probe to break and the position of the needle tip contact part to shift and fail to align with the conductive contact of the object to be tested. Furthermore, using mechanical processing or etching processing of micro-electromechanical processes to reduce the thickness of the needle tip is likely to produce tolerances that do not meet the requirements, resulting in a low production pass rate of the probe card.

[0006] In view of the above problems, the main purpose of the present invention is to provide a vertical probe, a probe head and a method for manufacturing a vertical probe, so that the vertical probe can have good current resistance, structural strength and service life while meeting the requirements of touching tiny conductive contacts, and can achieve good processing accuracy. Moreover, when the vertical probe is applied to the probe head, the needle tip is not easy to break due to up and down movement when touching the object to be tested, and the needle tip position is not easy to deviate and can be aligned with the conductive contacts of the object to be tested.

[0007] To achieve the above-mentioned purpose, a vertical probe provided by the present invention includes a body extending along a longitudinal axis to form an elongated shape, and a needle tip connected to the body and extending from the body along the longitudinal axis. The vertical probe includes a first side surface, a second side surface, a third side surface facing in the opposite direction to the first side surface, and a fourth side surface facing in the opposite direction to the second side surface, and the third side surface and the fourth side surface both extend from the body to the needle tip in a planar shape. The first side surface includes a first upper plane area located at the body, and a first transition area and a first lower plane area located at the needle tip, the first transition area is located between the first upper plane area and the first lower plane area, there is a first upper boundary line between the first transition area and the first upper plane area, there is a first lower boundary line between the first transition area and the first lower plane area, the first lower plane area is closer to the third side surface than the first upper plane area, and the first transition area gradually approaches the third side surface and extends from the first upper boundary line to the first lower boundary line. The second side includes a second upper plane area located at the body, a second transition area and a second lower plane area located at the needle tip, the second transition area is located between the second upper plane area and the second lower plane area, there is a second upper boundary line between the second transition area and the second upper plane area, there is a second lower boundary line between the second transition area and the second lower plane area, the second lower plane area is closer to the fourth side than the second upper plane area, and the second transition area gradually approaches the fourth side and extends from the second upper boundary line to the second lower boundary line. The first transition area and the first lower plane area of ​​the first side are realized by a laser processing method.

[0008] Therefore, the needle tip of the vertical probe of the present invention is designed to be non-coplanar with the body only on the first side and the second side, that is, the first transition zone and the first lower plane zone are designed on the first side to reduce the thickness of the needle tip, and the third side located on the opposite side of the first side is coplanar with the body and the needle tip; similarly, the second transition zone and the second lower plane zone are designed on the second side to reduce the width of the needle tip, and the fourth side located on the opposite side of the second side is coplanar with the body and the needle tip. In this way, the part of the needle tip including the first and second transition zones is a needle tip tapered portion, and the part including the first and second lower plane zones is a needle tip contact portion. The needle tip tapered portion can be gradually reduced to the required thickness and width, so that the thickness and width of the needle tip contact portion meet the requirements of touching the tiny conductive contacts, while the body still has a relatively large width and thickness, so that the vertical probe has good current resistance, structural strength and service life. Moreover, when the vertical probe is installed in the upper and lower guide holes of the upper and lower guide plate units of the probe seat and the body of the vertical probe is elastically bent and deformed due to the horizontal relative displacement of the upper and lower guide plate units, the vertical probe can be pressed against the inner surface of the lower guide hole with the third side surface and / or the fourth side surface in a planar shape. In this way, since there is no drop between the body and the needle tip of the third side surface and the fourth side surface, the structural strength of this part is relatively good. Even if the needle tip moves up and down and shrinks into the lower guide hole when touching the object to be tested, the needle tip will not be easily broken, and the needle tip position deviation and inability to align with the conductive contact of the object to be tested can also be avoided. Furthermore, the first side surface of the vertical probe is formed by laser processing to form a first transition area and a first lower plane area, which can make the dimensional accuracy of the needle tip good. Even the second transition area and the second lower plane area of ​​the second side surface can also be formed by laser processing, so that the dimensional accuracy of the needle tip is even better. In this way, the tolerance of the vertical probe can meet the requirements, thereby improving the production qualification rate of the probe card.

[0009] Preferably, the needle tip has a contact end farthest from the body, the distance between the first lower boundary line and the contact end in the longitudinal axis is defined as a first height, the distance between the second lower boundary line and the contact end in the longitudinal axis is defined as a second height, and the first height and the second height are substantially unequal.

[0010] When the needle tip touches the object to be tested, stress will be concentrated in the first and second transition zones and the first and second lower plane zones, which are relatively prone to breakage. The present invention designs the first lower intersection line and the second lower intersection line at different heights, that is, the heights of the first and second lower plane zones are not equal, thereby improving the stress concentration problem and making the vertical probe less likely to break.

[0011] Preferably, the needle tip has a contact end that is farthest from the body, the distance between the first upper intersection line and the contact end in the longitudinal axis is defined as a third height, the distance between the second upper intersection line and the contact end in the longitudinal axis is defined as a fourth height, and the third height and the fourth height are not substantially equal. Thus, the first upper intersection line and the second upper intersection line are designed at different heights, that is, the total height of the first lower plane area and the first transition area and the total height of the second lower plane area and the second transition area are not equal, which can also improve the problem of stress concentration, making the vertical probe less likely to break. The present invention can also allow the first and second lower intersection lines to be located at different heights, and at the same time the first and second upper intersection lines are also located at different heights, which can further improve the problem of stress concentration, making the vertical probe less likely to break.

[0012] Preferably, the distance between the second upper intersection line and the second lower intersection line is greater than the distance between the first upper intersection line and the first lower intersection line. Thus, the length of the second transition zone will be greater than the length of the first transition zone, and therefore, compared with the first transition zone, the second transition zone can make the stress more dispersed. In the case where the upper and lower guide plate units of the probe seat are relatively displaced only along one transverse axis, or the upper and lower guide plate units are relatively displaced along two transverse axes but the relative displacement amounts in the two transverse axes are different, the vertical probe will be subjected to greater stress in the transverse axis with a larger relative displacement amount, and therefore the longer second transition zone can be made to face the transverse axis with a larger relative displacement amount to exert a better stress dispersion effect, and even the length of the first and second transition zones of the vertical probe can be designed according to the predetermined relative displacement amounts of the upper and lower guide plate units in the two transverse axes, so as to further improve the problem of stress concentration and make the vertical probe less likely to break.

[0013] Preferably, each of the first side surface, the second side surface, the third side surface and the fourth side surface has a width between 30 μm and 100 μm in the body. Thus, when the thickness and width of the vertical probe tip have not been reduced (that is, the first and second transition zones and the first and second lower plane zones have not been formed), the width of a single side surface is 30 μm to 100 μm, and such a size is suitable for reducing the thickness and width of the needle tip by processing the first and second transition zones and the first and second lower plane zones.

[0014] Preferably, the needle tip includes a needle tip tapered portion and a needle tip contact portion, the needle tip tapered portion includes a first transition zone and a second transition zone, the needle tip contact portion includes a first lower plane region and a second lower plane region, the cross section of the needle tip contact portion is square, and the cross section of the body is square. Thus, the vertical probe has an equal reduction in the width and thickness of the needle tip, which can avoid a large stress concentration in one of the transverse axes.

[0015] Preferably, the needle tip includes a needle tip tapered portion and a needle tip contact portion, the needle tip tapered portion includes a first transition zone and a second transition zone, the needle tip contact portion includes a first lower plane zone and a second lower plane zone, the second upper plane zone and the second lower plane zone of the second side surface are perpendicular to a first transverse axis, the first upper plane zone and the first lower plane zone of the first side surface are perpendicular to a second transverse axis, and the distance between the first upper plane zone and the first lower plane zone of the first side surface in the second transverse axis is greater than the distance between the second upper plane zone and the second lower plane zone of the second side surface in the first transverse axis. Thus, the cross section of the body is a rectangle with the short side on the first side surface and the long side on the second side surface, the reduction amount of the needle tip on the first side surface is greater than the reduction amount on the second side surface, so the stress concentration degree of the needle tip on the second side surface will be smaller, and the second side surface can be directed to the transverse axis with a larger relative displacement amount of the upper and lower guide plate units, so that the vertical probe is less likely to break, and the short side of the cross section of the body is parallel to the transverse axis with a larger relative displacement amount, which can produce a better elastic deformation effect.

[0016] To achieve the above-mentioned purpose, the probe head provided by the present invention includes an upper guide plate unit, a lower guide plate unit, and a vertical probe as described above. The upper guide plate unit includes an upper guide hole, the lower guide plate unit includes an upper surface, a lower surface, and a lower guide hole penetrating the upper surface and the lower surface, and the upper surface of the lower guide plate unit faces the upper guide plate unit. The body of the vertical probe includes an upper mounting portion and a lower mounting portion, the upper mounting portion and the lower mounting portion are respectively inserted into the upper guide hole and the lower guide hole, and the needle tip of the vertical probe is located below the lower surface of the lower guide plate unit.

[0017] Therefore, the vertical probe in the probe head provided by the present invention has the aforementioned structural features, and can meet the requirements of contacting tiny conductive contacts, and can also have good current resistance, structural strength and service life, and can achieve good processing accuracy. Moreover, the lower mounting portion of the vertical probe can be against the inner surface of the lower guide hole with the third side surface and / or the fourth side surface in a planar shape, so that the needle tip is less likely to break due to up and down movement, and can also avoid the needle tip position deviation and failure to align with the conductive contact of the object to be tested.

[0018] Preferably, the probe head can define a first transverse axis and a second transverse axis that are perpendicular to each other, and the upper guide hole and the lower guide hole are staggered along the first transverse axis, so that the fourth side surface of the vertical probe abuts against an inner surface of the lower guide hole. Thus, when the upper and lower guide plate units are relatively displaced in the first transverse axis so that the upper and lower guide holes are staggered along the first transverse axis, the vertical probe abuts against the inner surface of the lower guide hole with the fourth side surface in a planar shape, so that even if the needle tip moves up and down when touching the object to be tested and shrinks into the lower guide hole, the needle tip will not be easily broken, and it can also be prevented that the needle tip position is offset and cannot be aligned with the conductive contact of the object to be tested.

[0019] More preferably, the upper guide hole and the lower guide hole are also staggered along the second transverse axis, so that the third side surface of the vertical probe abuts against the other inner surface of the lower guide hole. Thus, when the upper and lower guide plate units are relatively displaced along the first and second transverse axes so that the upper and lower guide holes are staggered along the first and second transverse axes, the vertical probe abuts against the inner surface of the lower guide hole with the third and fourth side surfaces in a planar shape. In this way, even if the needle tip moves up and down when touching the object to be tested and shrinks into the lower guide hole, the needle tip will not be easily broken, and it can also be prevented from being offset and unable to align with the conductive contact of the object to be tested.

[0020] More preferably, the distance between the upper guide hole and the lower guide hole along the first transverse axis is greater than the distance between the upper guide hole and the lower guide hole along the second transverse axis. As a result, the relative displacement of the upper and lower guide plate units in the first transverse axis is large, which makes the distance between the upper and lower guide holes in the first transverse axis large, which will cause the body of the vertical probe to produce elastic bending deformation mainly along the first transverse axis, and the first and second transition zones of the vertical probe can be designed accordingly, for example, the length of the second transition zone is made greater than the length of the first transition zone, so as to further improve the problem of stress concentration and make the vertical probe less likely to break.

[0021] Preferably, the probe head further includes another vertical probe, the other vertical probe includes a body extending in an elongated shape along a longitudinal axis, and a needle tip connected to the body and extending from the body along the longitudinal axis, the other vertical probe includes a first side surface, a second side surface, a third side surface facing in an opposite direction to the first side surface, and a fourth side surface facing in an opposite direction to the second side surface, the first side surface, the second side surface, the third side surface and the fourth side surface of the other vertical probe all extend in a planar manner from the body of the other vertical probe to the needle tip of the other vertical probe, the body of the other vertical probe includes an upper mounting portion and a lower mounting portion, the upper mounting portion and the lower mounting portion of the other vertical probe are respectively penetrated through another upper guide hole of the upper guide plate unit and another lower guide hole of the lower guide plate unit, and the needle tip of the other vertical probe is located below the lower surface of the lower guide plate unit.

[0022] In other words, the tip thickness and width of the other vertical probe (hereinafter also referred to as the second vertical probe) are not reduced and are equal to the body. Compared with the vertical probe with reduced tip thickness and width (hereinafter also referred to as the first vertical probe), the contact end area of ​​the tip of the second vertical probe is larger. Such a probe head is suitable for detecting a test object with micro bumps. The contact end of the tip of the second vertical probe can contact multiple micro bumps for transmitting power signals or ground signals at the same time, while the contact end of the tip of the first vertical probe contacts a single micro bump for transmitting a test signal. In this way, even if the sizes of the tips of the first and second vertical probes are not equal, the sizes of the bodies are still equal, so it is easy to control the deformation of the bodies of the first and second vertical probes to be consistent, thereby producing consistent needle test performance, and the wear of the first and second vertical probes can also be consistent. In addition, since the micro-bumps of the object under test are usually arranged in a matrix, the thickness and width of the needle tip of the first vertical probe can be reduced in such a way that the bodies of the first and second vertical probes are still aligned with each other under the premise that the needle tip of the first vertical probe just corresponds to a single micro-bump. Therefore, the lower guide holes for the first and second vertical probes to pass through can also be aligned with each other. In other words, there is no need to design different lower guide hole arrangements for the first and second vertical probes. This can make the design of the lower guide holes simpler and avoid damage to the plate body of the lower guide plate unit due to complex arrangement design of the lower guide holes or even inconsistent spacing.

[0023] Preferably, the probe head can define a first transverse axial direction and a second transverse axial direction perpendicular to each other, and the upper guide hole and the lower guide hole are staggered along the first transverse axial direction so that the fourth side of the vertical probe and the other vertical probe abut against an inner surface of the lower guide hole, wherein the upper guide hole and the lower guide hole are also staggered along the second transverse axial direction so that the third side of the vertical probe and the other vertical probe abut against the other inner surface of the lower guide hole, and the distance between the upper guide hole and the lower guide hole staggered along the first transverse axial direction is greater than the distance between the upper guide hole and the lower guide hole staggered along the second transverse axial direction.

[0024] Thus, when the upper and lower guide holes are mutually offset in the first and second transverse axes, the vertical probe abuts against the inner surface of the lower guide hole with the third and fourth plane sides, so that even if the needle tip moves up and down and retracts into the lower guide hole when touching the object to be tested, the needle tip will not be easily broken, and the needle tip position deviation and inability to align with the conductive contact of the object to be tested can be avoided. Moreover, the distance between the upper and lower guide holes mutually offset in the first transverse axis is large, which will cause the body of the vertical probe to produce elastic bending deformation mainly along the first transverse axis, and the first and second transition zones of the vertical probe can be designed accordingly, for example, the length of the second transition zone is made greater than the length of the first transition zone, which further improves the problem of stress concentration and makes the vertical probe less likely to break.

[0025] To achieve the above-mentioned purpose, the present invention provides a method for manufacturing a vertical probe as described above, characterized in that a first transition zone is formed by laser processing (such as laser ablation) between a first position and a second position on a top surface of a substrate made of a conductive material; and a first lower plane zone is formed by laser processing between a second position and a third position on the top surface of the substrate.

[0026] Thus, the first side surface of the vertical probe is laser processed to form a first transition area and a first lower plane area, which can ensure good dimensional accuracy of the needle tip, so that the tolerance of the vertical probe meets the requirements, thereby improving the manufacturing qualification rate of the probe card.

[0027] Preferably, the manufacturing method of the vertical probe is characterized in that the second transition area and the second lower plane area of ​​the second side are formed by laser processing the substrate by a laser processing method (such as laser cutting), so that the dimensional accuracy of the needle tip is better, thereby further improving the manufacturing qualification rate of the probe card.

[0028] In one embodiment of the present invention, the steps of the method for manufacturing a vertical probe include:

[0029] Providing a substrate, wherein the substrate is a plate, and the substrate has the top surface and a bottom surface facing in the opposite direction to the top surface;

[0030] Performing laser processing between a first position and a second position on the top surface of the substrate by laser processing to form a transition surface, such that the transition surface gradually extends from the first position to the second position close to the bottom surface;

[0031] Performing laser processing between the second position and the third position on the top surface of the substrate by laser processing to form a processing plane;

[0032] And, a cutting process is performed to cut the substrate into at least one vertical probe, so that the first upper plane area of ​​the first side of the vertical probe comes from the portion of the top surface of the substrate that has not been laser processed, the first transition area comes from the transition surface of the substrate, the first lower plane area comes from the processing plane of the substrate, and the second side and the fourth side are generated by the cutting process.

[0033] Thus, the vertical probe provided by the present invention can be made by laser processing (such as laser ablation) and cutting procedures on a plate body, wherein a transition surface and a processing plane are formed by laser processing on the top surface of the plate body, so as to reduce the thickness of the needle tip of the vertical probe cut later, and the bottom surface of the plate body can be maintained as a plane to become the third side surface of the vertical probe. This manufacturing method can not only manufacture a vertical probe with the above-mentioned functions, but also the same plate body can be cut into multiple probes after laser processing, and the manufacturing process is convenient and fast.

[0034] Preferably, the cutting process is performed by a laser processing method (such as laser cutting), so that the dimensional accuracy of the vertical probe can be improved, thereby further improving the manufacturing qualification rate of the probe card.

[0035] Preferably, the cutting process generates a distance between the second upper boundary line of the second side and the third position in the longitudinal axis that is substantially not equal to the distance between the first position and the third position in the longitudinal axis; or the cutting process generates a distance between the second lower boundary line of the second side and the third position in the longitudinal axis that is substantially not equal to the distance between the second position and the third position in the longitudinal axis. In this way, the second upper boundary line of the second side and the first upper boundary line of the first side can be non-aligned with each other, or the second lower boundary line of the second side and the first lower boundary line of the first side can be non-aligned with each other, so as to improve the stress concentration problem in the first and second transition zones and the first and second lower plane zones, so that the vertical probe is less likely to break.

[0036] In another embodiment of the present invention, the steps of the method for manufacturing a vertical probe include:

[0037] Providing a substrate, wherein the substrate is an elongated needle body and includes a second side of the vertical probe;

[0038] A first transition zone is formed by laser processing between a first position and a second position on the top surface of the substrate, and a first lower plane zone is formed by laser processing between a second position and a third position on the top surface of the substrate, so that the top surface of the substrate becomes the first side surface of the vertical probe.

[0039] Thus, the vertical probe provided by the present invention can be made of a long needle body through laser processing. The needle body can be formed by micro-electromechanical process or other methods. At this time, the side profile required for the vertical probe can be formed, so the needle body can include the second upper plane area, the second transition area and the second lower surface area of ​​the second side of the vertical probe. The top and bottom surfaces of the needle body can be planar. The manufacturing method can achieve the reduction of the needle tip thickness by forming the first transition area and the first lower plane area on the top surface of the needle body, while the bottom surface on the opposite side of the top surface can still be maintained as a plane to become the third side of the vertical probe. Such a manufacturing method can also manufacture a vertical probe with the above-mentioned effect.

[0040] Preferably, the distance between the first position and the third position in the longitudinal direction is not substantially equal to the distance between the second upper boundary line of the second side and the third position in the longitudinal direction; or, the distance between the second position and the third position in the longitudinal direction is not substantially equal to the distance between the second lower boundary line of the second side and the third position in the longitudinal direction. Thus, the top surface of the needle body is laser-processed to form a first transition zone whose starting position is different from the starting position of the second transition zone of the second side, so that the boundary lines of the first and second transition zones and the first and second upper plane zones are not aligned with each other; or, the ending position of the first transition zone is different from the ending position of the second transition zone of the second side, so that the boundary lines of the first and second transition zones and the first and second lower plane zones are not aligned with each other. In this way, the problem of stress concentration in the first and second transition zones and the first and second lower plane zones can be improved, making the vertical probe less likely to break. The present invention also allows the boundaries between the first and second transition zones and the first and second upper plane zones to be non-aligned with each other, and the boundaries between the first and second transition zones and the first and second lower plane zones to be non-aligned with each other, which can further improve the stress concentration problem and make the vertical probe less likely to break.

[0041] The detailed structure, characteristics, assembly or use of the vertical probe, probe head and the manufacturing method of the vertical probe provided by the present invention will be described in the detailed description of the implementation method later. However, those with ordinary knowledge in the technical field to which the present invention belongs should understand that these detailed descriptions and the specific embodiments listed for implementing the present invention are only used to illustrate the present invention and are not used to limit the scope of patent protection of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 It is a cross-sectional schematic diagram of a probe head provided by a first preferred embodiment of the present invention.

[0043] Figure 2 It is a plan view of a vertical probe provided by the first preferred embodiment of the present invention.

[0044] Figure 3The probe tip provided by the first preferred embodiment of the present invention is Figure 1 Sectional view along section line 3-3 in FIG.

[0045] Figure 4 It is a three-dimensional schematic diagram of a vertical probe provided by the first preferred embodiment of the present invention.

[0046] Figure 5 It is a flow chart of a method for manufacturing a vertical probe provided by a first preferred embodiment of the present invention.

[0047] Figures 6 to 8 It is a three-dimensional schematic diagram showing the manufacturing process of the vertical probe provided by the first preferred embodiment of the present invention.

[0048] Fig. 9 Similar to Figure 3 , showing that the cross-section of the body of the vertical probe is rectangular.

[0049] Fig.10 It is a plan view of a vertical probe provided by a second preferred embodiment of the present invention.

[0050] Fig.11 Similar to Figure 8 , showing the cutting process of the vertical probe provided by the second preferred embodiment of the present invention.

[0051] Fig.12 The figure is a flow chart of another method for manufacturing the vertical probe provided by the present invention.

[0052] Fig.13 yes Fig.12 A three-dimensional schematic diagram of the manufacturing method shown.

[0053] Fig.14 It is a cross-sectional schematic diagram of a probe head provided by a third preferred embodiment of the present invention.

[0054] Fig.15 It is a schematic diagram of two vertical probe contact micro-bumps of a probe head provided in the third preferred embodiment of the present invention. DETAILED DESCRIPTION

[0055] The applicant first explains that in the embodiments and drawings to be introduced below, the same reference numbers represent the same or similar elements or their structural features. It should be noted that the elements and structures in the drawings are for illustration purposes only and are not drawn according to the actual proportions and quantities, and if it is possible in practice, the features of different embodiments can be applied interchangeably. Secondly, when it is mentioned that an element is disposed on another element, it means that the aforementioned element is directly disposed on the other element, or the aforementioned element is indirectly disposed on the other element, that is, one or more other elements are disposed between the two elements. When it is mentioned that an element is "directly" disposed on another element, it means that no other elements are disposed between the two elements.

[0056] Please read first Figure 1 The probe head 10 provided in a first preferred embodiment of the present invention includes an upper guide plate unit 20, a lower guide plate unit 30, and a vertical probe 40 (the number is not limited).

[0057] The upper and lower guide plate units 20 and 30 in this embodiment each include only one plate body, however, the upper guide plate unit 20 and / or the lower guide plate unit 30 may also be composed of a plurality of stacked plates. The edges of the upper and lower guide plate units 20 and 30 may have a protruding structure and be directly connected to each other, or a hollow middle guide plate (not shown) may be connected between the upper and lower guide plate units 20 and 30. The upper guide plate unit 20 includes an upper surface 21, a lower surface 22, and an upper guide hole 23 (the number is not limited) penetrating the upper surface 21 and the lower surface 22. The lower guide plate unit 30 includes an upper surface 31, a lower surface 32, and a lower guide hole 33 (the number is not limited) penetrating the upper surface 31 and the lower surface 32.

[0058] During the assembly process of the probe head 10, the upper and lower guide plate units 20 and 30 are first arranged relative to each other but not fixed to each other, the upper surface 31 of the lower guide plate unit 30 faces the lower surface 22 of the upper guide plate unit 20, and the upper guide hole 23 corresponds to the lower guide hole 33 coaxially. Figure 2 As shown, the vertical probe 40 is originally in a straight line shape, passing through the coaxial upper guide hole 23 and the lower guide hole 33 from top to bottom, and then the upper and lower guide plate units 20 and 30 move relatively along a first transverse axis (Y axis), so that the upper guide hole 23 and the lower guide hole 33 are staggered along the Y axis, thereby making the vertical probe 40 as shown in FIG. Figure 1The upper and lower guide plate units 20 and 30 may also move relative to each other along a second transverse axis (X axis), so that the upper guide hole 23 and the lower guide hole 33 are also offset from each other along the X axis. In this embodiment, the distance between the upper guide hole 23 and the lower guide hole 33 along the Y axis is greater than the distance between the upper guide hole 23 and the lower guide hole 33 along the X axis, so that the vertical probe 40 is mainly bent along the Y axis. Then, the upper and lower guide plate units 20 and 30 are fixed to each other, so that the vertical probe 40 in the probe head 10 is maintained as shown. Figure 1 The curved shape shown.

[0059] like Figure 2 As shown, the vertical probe 40 includes a body 41 extending in a longitudinal direction (Z axis) into an elongated shape, a needle tail 42 integrally connected to the body 41 and extending upward from the body 41 along the Z axis, and a needle tip 43 integrally connected to the body 41 and extending downward from the body 41 along the Z axis. Figure 1 As shown, the part connecting the main body 41 and the needle tail 42 is an upper mounting part 411, which is passed through the upper guide hole 23; the part connecting the main body 41 and the needle tip 43 is a lower mounting part 412, which is passed through the lower guide hole 33, and the lower mounting part 412 more partially protrudes from the lower surface 32 of the lower guide plate unit 30, so that the needle tip 43 is located below the lower surface 32 of the lower guide plate unit 30.

[0060] See also Figures 2 to 4 The vertical probe 40 includes a first side surface 44, a second side surface 45, a third side surface 46 facing in the opposite direction to the first side surface 44, and a fourth side surface 47 facing in the opposite direction to the second side surface 45. The third side surface 46 and the fourth side surface 47 both extend in a planar manner from the body 41 to the needle tip 43. To be more specific, the portion of the third side surface 46 located at the body 41 is coplanar with the portion of the third side surface 46 located at the needle tip 43 and is parallel to the Y axis and the Z axis, that is, the YZ plane; the portion of the fourth side surface 47 located at the body 41 is coplanar with the portion of the fourth side surface 47 located at the needle tip 43 and is parallel to the X axis and the Z axis, that is, the XZ plane. In detail, the third side surface 46 and the fourth side surface 47 are not coplanar with every portion of the body 41 and the portion of the needle tip 43, but only the portion where the body 41 and the needle tip 43 are connected is coplanar. Therefore, the third side surface 46 and the fourth side surface 47 both extend in a planar manner from the body 41 to the needle tip 43. For only the portion where the body 41 and the needle tip 43 are connected, please refer to Figure 1 Generally speaking, the portion of the body 41 connected to the needle tip 43 may be the lower mounting portion 412 of the body 41, or the portion of the lower mounting portion 412 of the body 41 partially protruding from the lower surface 32 of the lower guide plate unit 30. In contrast, the first side surface 44 and the second side surface 45 extend from the body 41 to the needle tip 43 in a non-completely planar shape, as described below.

[0061] The first side surface 44 includes a first upper plane area 441 located at the body 41, and a first transition area 442 and a first lower plane area 443 located at the needle tip 43. The first transition area 442 is located between the first upper plane area 441 and the first lower plane area 443. The first upper plane area 441 and the first lower plane area 443 are perpendicular to the X-axis, and the first transition area 442 is inclined relative to the first upper plane area 441 and the first lower plane area 443. There is a first upper boundary line 444 between the first transition area 442 and the first upper plane area 441, and there is a first lower boundary line 445 between the first transition area 442 and the first lower plane area 443. The first lower plane area 443 is closer to the third side surface 46 than the first upper plane area 441. The first transition area 442 gradually approaches the third side surface 46 and extends from the first upper boundary line 444 to the first lower boundary line 445. In other words, if the distance between the first side surface 44 and the third side surface 46 on the X-axis is defined as the thickness, the thickness of the body 41 is greater than the thickness of the needle tip 43, and the thickness of the needle tip 43 gradually decreases within the first transition zone 442 and maintains a uniform thickness within the first lower plane zone 443.

[0062] The second side surface 45 includes a second upper plane area 451 located at the body 41, and a second transition area 452 and a second lower plane area 453 located at the needle tip 43. The second transition area 452 is located between the second upper plane area 451 and the second lower plane area 453. The second upper plane area 451 and the second lower plane area 453 are perpendicular to the Y axis, and the second transition area 452 is inclined relative to the second upper plane area 451 and the second lower plane area 453. There is a second upper boundary line 454 between the second transition area 452 and the second upper plane area 451, and there is a second lower boundary line 455 between the second transition area 452 and the second lower plane area 453. The second lower plane area 453 is closer to the fourth side surface 47 than the second upper plane area 451. The second transition area 452 gradually approaches the fourth side surface 47 and extends from the second upper boundary line 454 to the second lower boundary line 455. In other words, if the distance between the second side surface 45 and the fourth side surface 47 on the Y-axis is defined as the width, the width of the body 41 is greater than the width of the needle tip 43, and the needle tip 43 gradually reduces its width within the second transition zone 452 and maintains a uniform width within the second lower plane zone 453.

[0063] In this way, the portion of the needle tip 43 including the first and second transition zones 442 and 452 is a needle tip tapered portion 431, and the portion including the first and second lower plane zones 443 and 453 is a needle tip contact portion 432. The needle tip tapered portion 431 is located between the body 41 and the needle tip contact portion 432, and the cross-sectional area of ​​the needle tip tapered portion 431 gradually decreases from the body 41 to the needle tip contact portion 432. The end of the needle tip contact portion 432 is a contact end 433, that is, the farthest point of the needle tip 43 from the body 41, and the contact end 433 is used to contact a conductive contact of a test object (not shown in the figure). The needle tip tapered portion 431 can be gradually reduced to the required thickness and width, so that the thickness and width of the needle tip contact portion 432 meet the requirements of touching a tiny conductive contact, while the body 41 still has a relatively large width and thickness, so that the vertical probe 40 has good current resistance, structural strength and service life. In this embodiment, the first and second transition regions 442 and 452 are respectively an inclined plane. However, the first and second transition regions 442 and 452 are not limited to be inclined planes, as long as the thickness and width can be gradually reduced, for example, they can be in a stepped shape.

[0064] See also Figures 5 to 8 The manufacturing method of the vertical probe 40 includes the following steps S11 to S14.

[0065] Step S11 provides a substrate 50A (eg Figure 6 As shown in FIG. 5 , the substrate 50A is a plate made of a conductive material, and the substrate 50A has a top surface 51 and a bottom surface 52 facing the opposite direction of the top surface 51. For example, in the selection of the substrate 50A, an alloy plate or an electroplated plate can be used, and a long material can be used. For example, the plate can be formed by micro-electromechanical molding or metal hot rolling molding.

[0066] Step S12 forms a transition surface 511 by performing laser processing (e.g., laser ablation) between a first position P1 and a second position P2 on the top surface 51 of the substrate 50A, such that the transition surface 511 gradually extends from the first position P1 to the second position P2 close to the bottom surface 52. The transition surface 511 is not limited to an inclined plane, as long as it can gradually reduce the thickness of the substrate 50A, for example, it can be in a stepped shape.

[0067] Step S13 is to perform laser processing between the second position P2 and a third position P3 on the top surface 51 of the substrate 50A by the laser processing method to form a processing plane 512. In other words, after step S12 is completed, step S13 is performed in the same laser processing method to form the processing plane 512, so the starting position of forming the processing plane 512 is the end position (i.e., the second position P2) of forming the transition surface 511, and the end position (i.e., the third position P3) of forming the processing plane 512 is located at an end surface 53 of the substrate 50A. The laser processing method (e.g., laser ablation) described in steps S12 and S13 refers to using laser to directly hit the substrate 50A, and ablating the substrate 50A through the energy of the laser to make the thickness of the substrate 50A thinner.

[0068] Step S14 performs a cutting process to cut the substrate 50A into at least one vertical probe 40, for example, Figure 8 The two cutting paths 54 and 55 shown cut out Figure 2 The vertical probe 40 shown in the figure makes the first upper plane area 441 of the first side surface 44 of the vertical probe 40 come from the portion of the top surface 51 of the substrate 50A that has not been laser processed (ie Figure 7 and Figure 8 The first transition area 442 comes from the transition surface 511 of the substrate 50A, the first lower plane area 443 comes from the processing plane 512 of the substrate 50A, and the second side 45 and the fourth side 47 are generated by the cutting process. More specifically, Figure 8 The cutting paths 54 and 55 shown respectively form the fourth side surface 47 and the second side surface 45 of the vertical probe 40. The cutting path 55 has two turning positions 551 and 552 for cutting out the second upper plane area 451, the second transition area 452 and the second lower plane area 453 of the second side surface 45. The cutting process can be performed by a laser processing method, such as laser cutting.

[0069] Since the needle tip 43 of the vertical probe 40 of the present invention is designed to be non-coplanar with the body 41 only on the first side 44 and the second side 45, the needle tip 43 is coplanar with the body 41 on the third side 46 and the fourth side 47, Figure 1 and Figure 3As shown, the vertical probe 40 is mounted on the lower guide plate unit 30 in such a manner that the second side surface 45 faces the direction in which the lower guide hole 33 is offset relative to the upper guide hole 23 along the first transverse axis (i.e., the negative direction of the Y axis), so that the fourth side surface 47 abuts against an inner surface 331 of the lower guide hole 33 facing the negative direction of the Y axis. In the case where the upper guide hole 23 and the lower guide hole 33 are also offset along the second transverse axis, the first side surface 44 faces the direction in which the lower guide hole 33 is offset relative to the upper guide hole 23 along the second transverse axis (i.e., the positive direction of the X axis), so that the third side surface 46 abuts against another inner surface 332 of the lower guide hole 33 facing the positive direction of the X axis.

[0070] In this way, the vertical probe 40 rests against the inner surface 332 and / or the inner surface 331 of the lower guide hole 33 with the planar third side surface 46 and / or the fourth side surface 47. There is no step between the third side surface 46 and the fourth side surface 47 and the needle tip 43, and the structural strength of this part is relatively good. Therefore, when the contact end 433 of the needle tip 43 contacts the conductive contact of the object to be tested, even if the needle tip 43 moves up and down and shrinks into the lower guide hole 33, the needle tip 43 will not be easily broken, and it can also avoid the position deviation of the needle tip 43 so that the contact end 433 cannot be aligned with the conductive contact of the object to be tested. Furthermore, the first side surface 44 of the vertical probe 40 is formed into a first transition area 442 and a first lower plane area 443 by laser processing, so that the dimensional accuracy of the needle tip 43 is good. The second transition area 452 and the second lower plane area 453 of the second side surface 45 can also be formed by laser processing, so that the dimensional accuracy of the needle tip 43 is further improved. In this way, the tolerance of the vertical probe 40 can meet the requirements, thereby improving the production pass rate of the probe card.

[0071] It is worth mentioning that the probe head 10 in the present embodiment includes upper and lower guide plate units 20 and 30 for the vertical probe 40 to pass through, but the probe head 10 may not include the upper guide plate unit 20. As long as the vertical probe 40 is passed through the lower guide hole 33 of the lower guide plate unit 30 and the third side surface 46 and / or the fourth side surface 47 are abutted against the inner surface 332 and / or the inner surface 331 of the lower guide hole 33, the function of the vertical probe 40 of the present invention mentioned above can be exerted.

[0072] Preferably, if Figure 3 As shown, the width W1 of the first side 44 and the third side 46 of the vertical probe 40 in the body 41 is between 30 microns and 100 microns, and the width W2 of the second side 45 and the fourth side 47 in the body 41 is also between 30 microns and 100 microns. In other words, in the aforementioned manufacturing process, Figure 6 The thickness of the substrate 50A shown (equivalent to the width W2) is between 30 μm and 100 μm. Figure 8The maximum distance between the two cutting paths 54 and 55 shown on the Y axis (equivalent to the width W1) is also between 30 microns and 100 microns. Such dimensions are suitable for reducing the thickness and width of the needle tip by processing the first and second transition zones 442 and 452 and the first and second lower plane zones 443 and 453.

[0073] In this embodiment, the cross section of the body 41 is square. Figure 3 As shown, the widths W1 and W2 are equal, and the cross section of the needle tip contact portion 432 is also square, that is, the widths W3 and W4 are equal. In this way, the reduction in the needle tip width (i.e., the difference between W1 and W3) and the reduction in the needle tip thickness (i.e., the difference between W2 and W4) of the vertical probe 40 are equal, which can avoid a large stress concentration in one of the transverse axes. However, if Fig. 9 As shown, the cross-section of the body 41 may also be rectangular, while the cross-section of the needle tip contact portion 432 is still square, and the short sides of the cross-section of the body 41 are on the first and third side surfaces 44, 46, while the long sides are on the second and fourth side surfaces 45, 47. Therefore, the reduction amount of the needle tip 43 on the first side surface 44 will be greater than the reduction amount on the second side surface 45, that is, the distance D1 between the first upper plane area 441 and the first lower plane area 443 of the first side surface 44 on the X-axis is greater than the distance D2 between the second upper plane area 451 and the second lower plane area 453 of the second side surface 45 on the Y-axis. In other words, the cross-sectional area of ​​the needle tip 43 is reduced to a greater extent on the first side 44, and to a relatively lesser extent on the second side 45. Thus, the stress concentration of the needle tip 43 on the second side 45 is smaller. Therefore, the second side 45 is directed toward the transverse axis (i.e., the Y axis) where the relative displacement of the upper and lower guide plate units 20 and 30 is larger, so that the vertical probe 40 is less likely to break. Moreover, the short side of the cross section of the body 41 is parallel to the transverse axis (i.e., the Y axis) where the relative displacement is larger, so that a better elastic deformation effect can be produced. In addition, the body 41 may be further provided with at least one slit (not shown) that passes through the first side 44 and the third side 46 to produce a better elastic deformation effect. The cross section of the needle tip contact portion 432 of the present invention is square, and the cross section of the body 41 is square or rectangular, wherein the square or rectangular is not limited to a perfect square or rectangular, but also includes the case where the four corners of the square or rectangular are not perfect right angles due to processing errors or chamfers.

[0074] See also Figure 2 and Figure 4, the present invention defines the distance between the first lower boundary line 445 and the contact end 433 on the Z axis as a first height H1, and the distance between the second lower boundary line 455 and the contact end 433 on the Z axis as a second height H2. In the first preferred embodiment, the first height H1 is greater than the second height H2. Since the stress will be concentrated in the first and second transition areas 442, 452 and the first and second lower plane areas 443, 453 when the needle tip 43 touches the object to be tested, this part is relatively prone to breakage. The first and second lower boundary lines 445, 455 are designed to be at different heights, that is, the heights of the first and second lower plane areas 443, 453 are not equal. This can improve the stress concentration problem and make the vertical probe 40 less likely to break. In other words, the second height H2 can also be greater than the first height H1. As long as the first height H1 and the second height H2 are not equal, the aforementioned effect can be achieved. In order to achieve this structural feature, in the manufacturing method of the vertical probe 40, if Figure 8 The cutting process shown generates a distance D3 between the second lower boundary line 455 (ie, the turning point 552 of the cutting path 55) and the third position P3 on the Z axis, which is not equal to the distance D4 between the second position P2 and the third position P3 on the Z axis.

[0075] The above-mentioned effect can also be achieved by designing the first and second upper boundary lines 444 and 454 at different heights, for example Fig.10 The vertical probe provided by a second preferred embodiment of the present invention shown in the figure, wherein the distance between the first upper boundary line 444 and the contact end 433 on the Z axis is defined as a third height H3, and the distance between the second upper boundary line 454 (i.e., the turning point of the second side surface 45 between the second upper plane area 451 and the second transition area 452) and the contact end 433 on the Z axis is defined as a fourth height H4, and the fourth height H4 is made greater than the third height H3, or the third height H3 is made greater than the fourth height H4, that is, the total height of the first lower plane area 443 and the first transition area 442 is not equal to the total height of the second lower plane area 453 and the second transition area 452, which can also improve the problem of stress concentration, making the vertical probe less likely to break. In order to achieve this structural feature, the cutting procedure in the manufacturing method of the vertical probe is as follows: Fig.11 As shown, the distance D5 between the position of the second upper boundary line 454 (that is, the turning position 551 of the cutting path 55) and the third position P3 on the Z axis generated by this cutting process is not equal to the distance D6 between the first position P1 and the third position P3 on the Z axis. The present invention can also allow the first and second lower boundary lines 445 and 455 to be located at different heights, and at the same time, the first and second upper boundary lines 444 and 454 are also located at different heights, which can further improve the problem of stress concentration and make the vertical probe less likely to break.

[0076] In the first and second preferred embodiments, the distance D7 between the second upper boundary line 454 and the second lower boundary line 455 is greater than the distance D8 between the first upper boundary line 444 and the first lower boundary line 445. Figure 4 As shown, the length of the second transition zone 452 is greater than the length of the first transition zone 442, so that the second transition zone 452 has a better stress dispersion effect than the first transition zone 442. When the upper and lower guide plate units 20 and 30 are relatively displaced only along the Y axis, or when the relative displacement of the upper and lower guide plate units 20 and 30 along the Y axis is greater than the relative displacement along the X axis, the vertical probe 40 will be subjected to a greater stress on the Y axis where the relative displacement is greater. The second transition zone 452 faces the Y axis and has a relatively long length, which can effectively disperse the relatively large stress on the Y axis on which the vertical probe 40 is subjected. The aforementioned distances D7 and D8 can even be designed according to the predetermined relative displacement of the upper and lower guide plate units 20 and 30 on the X axis and the Y axis, thereby further improving the problem of stress concentration and making the vertical probe less likely to break.

[0077] See also Figure 12 to Figure 13 The vertical probe 40 of the present invention can also be manufactured by another manufacturing method, which includes the following steps S21 to S23.

[0078] Step S21 provides a substrate 50B (eg Fig.13 As shown in the figure, the substrate 50B is a long needle body formed of a conductive material, and the substrate 50B has a top surface 51, a bottom surface 52 facing the opposite direction of the top surface 51, and two side surfaces 56 and 57 facing the opposite directions. For example, the needle body can be formed by a micro-electromechanical process, and usually a plurality of needle bodies are formed on a substrate (not shown) at the same time, and the plurality of needle bodies are subjected to subsequent steps at the same time, thereby manufacturing a plurality of vertical probes. Fig.13 Only one needle body is schematically shown. At this point, the required side profile of the vertical probe 40 can be formed, so the sides 56 and 57 of the needle body 50B are respectively the fourth side 47 and the second side 45 of the vertical probe 40 (as shown in FIG. Figure 4 In other words, the needle body 50B provided in step S21 already includes the second upper plane area 451, the second transition area 452, the second lower surface area 453, the second upper boundary line 454 and the second lower boundary line 455 of the second side surface 45 of the vertical probe 40. The maximum width and thickness of the substrate 50B provided in step S21 will be equal to the width and thickness of the body 41 of the vertical probe 40 that is finally manufactured, that is, Figure 3 W1 and W2 shown.

[0079] In other embodiments, the needle body can be formed by laser processing (such as laser cutting), and usually a plurality of needle bodies are formed simultaneously on a substrate (not shown) to form the side profile required by the vertical probe 40. Therefore, the sides 56 and 57 of the needle body 50B are respectively the fourth side 47 and the second side 45 (such as the fourth side 47 and the second side 45) of the vertical probe 40. Figure 4 shown).

[0080] Step S22 forms a first transition region 442 (eg, a vertical probe 40) between a first position P1 and a second position P2 on the top surface 51 of the substrate 50B by laser processing (eg, laser ablation). Figure 4 shown).

[0081] Step S23 is to perform laser processing between the second position P2 and a third position P3 on the top surface 51 of the substrate 50B by the laser processing method to form a first lower plane area 443 (eg, Figure 4 shown).

[0082] In other words, after step S22, step S23 is performed in the same laser processing manner, so that the top surface 51 of the substrate 50B becomes the first side surface 44 of the vertical probe 40. The starting position for forming the first lower plane area 443 is the end position (i.e., the second position P2) for forming the first transition area 442, and the end position (i.e., the third position P3) for forming the first lower plane area 443 is located at one end 58 of the substrate 50B.

[0083] In this manufacturing method, the distance D9 between the first position P1 and the third position P3 on the Z axis can be different from the distance D10 between the second upper intersection line 454 and the third position P3 on the Z axis, so that the first and second upper intersection lines 444 and 454 of the vertical probe 40 manufactured in the end are not aligned with each other. Fig.10 The third height H3 and the fourth height H4 are not equal to improve the stress concentration problem, so that the vertical probe 40 is less likely to break. The distance D11 between the second position P2 and the third position P3 on the Z axis can also be made not equal to the distance D12 between the second lower boundary line 455 and the third position P3 on the Z axis, so that the first and second lower boundary lines 445 and 455 of the vertical probe 40 finally manufactured are not aligned with each other. Figure 2 The first height H1 and the second height H2 are not equal to each other, so as to improve the stress concentration problem and make the vertical probe 40 less likely to break.

[0084] See also Fig.14The probe head provided in a third preferred embodiment of the present invention is similar to that provided in the first preferred embodiment, but the probe head of this embodiment is provided with two vertical probes 40, 40', wherein the vertical probe 40 can adopt any of the aforementioned forms, and its needle tip 43 is reduced on the first side surface 44 and the second side surface 45, and compared with the vertical probe 40, the difference of the vertical probe 40' is only that its needle tip 43 is not provided with the first and second transition areas 442, 452 and the first and second lower plane areas 443, 453, that is, the first to fourth side surfaces 44~47 of the vertical probe 40' are all planarly extended from the body 41 to the needle tip 43, so the needle tip 43 of the vertical probe 40' is not reduced in thickness and width and is equal to the body 41, and the contact end 433 area of ​​the needle tip 43 of the vertical probe 40' is larger than the contact end 433 area of ​​the needle tip 43 of the vertical probe 40.

[0085] Therefore, if Fig.14 The probe head of the embodiment shown is suitable for use in detecting an object with micro-bumps, for example, Fig.15 Nine micro-bumps 61 and 62 are schematically shown. The micro-bumps can be arranged in a matrix, and the micro-bumps used to transmit power signals or ground signals can be arranged in groups of three or four. Fig.15 In the illustrated embodiment, all micro-bumps 61 are used to transmit power signals or all are used to transmit ground signals, while micro-bumps 62 used to transmit test signals are arranged in a non-clustered manner. Fig.15 The diagram also schematically shows the contact ends 433 and the body 41 of the two vertical probes 40 and 40', as well as the lower guide holes 33 through which the vertical probes 40 and 40' are penetrated. The contact end 433 of the vertical probe 40' can be used to contact four microbumps 61 at the same time, and the contact end 433 of the vertical probe 40 is used to contact a single microbump 62.

[0086] Thus, even if the sizes of the needle tips 43 of the vertical probes 40 and 40' are not equal, the sizes of the main bodies 41 are still roughly equal, so it is easy to control the deformation of the main bodies 41 of the vertical probes 40 and 40' to be consistent, thereby producing roughly consistent needle measurement performance, and the wear of the vertical probes 40 and 40' can also be roughly consistent.

[0087] It is worth noting that Fig.15 In the illustrated embodiment, the contact end 433 of the vertical probe 40 is configured to contact four micro-bumps 61 simultaneously, but the present invention is not limited thereto. The contact end 433 of the vertical probe 40 can be configured to contact multiple micro-bumps 61 simultaneously, such as three, nine, or other numbers. However, the contact end 433 of the needle tip 43 of the vertical probe 40 only corresponds to a single micro-bump.

[0088] Those skilled in the art of the present invention understand that the thickness and width of the needle tip 43 of the vertical probe 40 can be appropriately reduced in a manner and proportion, so that the contact end 433 of the needle tip 43 of the vertical probe 40 just corresponds to a single micro-bump 62. After the thickness and width of the needle tip 43 of the vertical probe 40 are reduced, the bodies 41 of the vertical probes 40 and 40' can still be aligned with each other, so the lower guide holes 33 for the vertical probes 40 and 40' to penetrate can also be aligned with each other, that is, it is not necessary to design different arrangements of the lower guide holes 33 for the vertical probes 40 and 40', so that the design of the lower guide holes 33 can be simpler, avoiding damage to the plate body of the lower guide plate unit 30 due to a complex arrangement design of the lower guide holes 33 or even inconsistent spacing.

[0089] The following example illustrates how to install the vertical probes 40 and 40' in the upper guide hole 23 and the lower guide hole 33. Fig.14 and Fig.15 , and at the same time compare Figure 1 and Figure 4 The vertical probes 40, 40' can be installed on the lower guide plate unit 30 in such a manner that the second side surface 45 faces the direction in which the lower guide hole 33 is offset relative to the upper guide hole 23 along the first transverse axis (i.e., the negative direction of the Y axis), so that the fourth side surface 47 abuts against an inner surface 331 of the lower guide hole 33 facing the negative direction of the Y axis. In the case where the upper guide hole 23 and the lower guide hole 33 are also offset along the second transverse axis, the first side surface 44 faces the direction in which the lower guide hole 33 is offset relative to the upper guide hole 23 along the second transverse axis (i.e., the positive direction of the X axis), so that the third side surface 46 abuts against another inner surface 332 of the lower guide hole 33 facing the positive direction of the X axis.

[0090] Finally, it must be stated again that the constituent elements disclosed in the aforementioned embodiments of the present invention are for illustrative purposes only and are not intended to limit the scope of protection of this case. Replacements or changes to other equivalent elements should also be covered by the scope of patent protection of this case.

Claims

1. A vertical probe, characterized in that Contains: A main body extending along a longitudinal axis into an elongated shape; A needle tip connected to the body and extending from the body along the longitudinal axis; The vertical probe comprises a first side surface, a second side surface, a third side surface facing in an opposite direction to the first side surface, and a fourth side surface facing in an opposite direction to the second side surface, wherein the third side surface and the fourth side surface are both planar and extend from the body to the needle tip; Wherein, the first side surface includes a first upper plane area located on the body, and a first transition area and a first lower plane area located on the needle tip, the first transition area is located between the first upper plane area and the first lower plane area, there is a first upper boundary line between the first transition area and the first upper plane area, there is a first lower boundary line between the first transition area and the first lower plane area, the first lower plane area is closer to the third side surface than the first upper plane area, and the first transition area gradually approaches the third side surface and extends from the first upper boundary line to the first lower boundary line; The second side surface includes a second upper plane area located on the body, and a second transition area and a second lower plane area located on the needle tip, the second transition area is located between the second upper plane area and the second lower plane area, there is a second upper boundary line between the second transition area and the second upper plane area, there is a second lower boundary line between the second transition area and the second lower plane area, the second lower plane area is closer to the fourth side surface than the second upper plane area, and the second transition area gradually approaches the fourth side surface and extends from the second upper boundary line to the second lower boundary line; The first transition area and the first lower plane area of ​​the first side surface are realized by a laser processing method.

2. The vertical probe according to claim 1, characterized in that: The needle tip has a contact end farthest from the body, the distance between the first lower boundary line and the contact end in the longitudinal axis is defined as a first height, the distance between the second lower boundary line and the contact end in the longitudinal axis is defined as a second height, and the first height and the second height are substantially unequal.

3. The vertical probe according to claim 1, characterized in that: The needle tip has a contact end farthest from the body, the distance between the first upper boundary line and the contact end in the longitudinal axis is defined as a third height, the distance between the second upper boundary line and the contact end in the longitudinal axis is defined as a fourth height, and the third height is substantially unequal to the fourth height.

4. The vertical probe according to claim 1, characterized in that: The distance between the second upper boundary line and the second lower boundary line is greater than the distance between the first upper boundary line and the first lower boundary line.

5. The vertical probe according to claim 1, characterized in that: Each of the first side surface, the second side surface, the third side surface and the fourth side surface has a width of the body between 30 micrometers and 100 micrometers.

6. The vertical probe according to claim 1, characterized in that: The needle tip includes a needle tip tapered portion and a needle tip contact portion, the needle tip tapered portion includes the first transition zone and the second transition zone, the needle tip contact portion includes the first lower plane area and the second lower plane area, the cross section of the needle tip contact portion is square, and the cross section of the body is square.

7. The vertical probe according to claim 1, characterized in that: The needle tip includes a needle tip tapered portion and a needle tip contact portion, the needle tip tapered portion includes the first transition zone and the second transition zone, the needle tip contact portion includes the first lower plane zone and the second lower plane zone, the second upper plane zone and the second lower plane zone of the second side surface are perpendicular to a first transverse axis, the first upper plane zone and the first lower plane zone of the first side surface are perpendicular to a second transverse axis, and the distance between the first upper plane zone and the first lower plane zone of the first side surface in the second transverse axis is greater than the distance between the second upper plane zone and the second lower plane zone of the second side surface in the first transverse axis.

8. A probe head, characterized in that Contains: An upper guide plate unit including an upper guide hole; A lower guide plate unit comprises an upper surface, a lower surface, and a lower guide hole penetrating the upper surface and the lower surface, wherein the upper surface faces the upper guide plate unit; A vertical probe as described in any one of claims 1 to 7, wherein the body of the vertical probe includes an upper mounting portion and a lower mounting portion, the upper mounting portion and the lower mounting portion are respectively inserted into the upper guide hole and the lower guide hole, and the needle tip of the vertical probe is located below the lower surface of the lower guide plate unit.

9. The probe head according to claim 8, characterized in that: The probe head can define a first transverse axis and a second transverse axis that are perpendicular to each other. The upper guide hole and the lower guide hole are staggered along the first transverse axis so that the fourth side surface of the vertical probe abuts against an inner surface of the lower guide hole.

10. The probe head according to claim 9, characterized in that: The upper guide hole and the lower guide hole are also staggered with each other along the second transverse axis, so that the third side surface of the vertical probe abuts against the other inner surface of the lower guide hole.

11. The probe head according to claim 10, characterized in that: The distance between the upper guide hole and the lower guide hole staggered along the first transverse axis is greater than the distance between the upper guide hole and the lower guide hole staggered along the second transverse axis.

12. The probe head according to claim 8, characterized in that: The probe head also includes another vertical probe, which includes a body extending in an elongated shape along a longitudinal axis, and a needle tip connected to the body and extending from the body along the longitudinal axis. The other vertical probe includes a first side surface, a second side surface, a third side surface facing in an opposite direction to the first side surface, and a fourth side surface facing in an opposite direction to the second side surface. The first side surface, the second side surface, the third side surface and the fourth side surface of the other vertical probe all extend in a planar manner from the body of the other vertical probe to the needle tip of the other vertical probe. The body of the other vertical probe includes an upper mounting portion and a lower mounting portion. The upper mounting portion and the lower mounting portion of the other vertical probe are respectively penetrated through another upper guide hole of the upper guide plate unit and another lower guide hole of the lower guide plate unit, and the needle tip of the other vertical probe is located below the lower surface of the lower guide plate unit.

13. The probe head according to claim 12, wherein: The probe head can define a first transverse axial direction and a second transverse axial direction perpendicular to each other, the upper guide hole and the lower guide hole are staggered along the first transverse axial direction, so that the fourth side of the vertical probe and the other vertical probe abut against an inner surface of the lower guide hole, wherein the upper guide hole and the lower guide hole are also staggered along the second transverse axial direction, so that the third side of the vertical probe and the other vertical probe abut against the other inner surface of the lower guide hole, and the distance between the upper guide hole and the lower guide hole staggered along the first transverse axial direction is greater than the distance between the upper guide hole and the lower guide hole staggered along the second transverse axial direction.

14. A method for manufacturing a vertical probe, used for manufacturing the vertical probe as claimed in claim 1; the manufacturing method is characterized by: The first transition zone is formed by laser processing between a first position and a second position on a top surface of a substrate made of a conductive material by the laser processing method; the first lower plane zone is formed by laser processing between the second position and a third position on the top surface of the substrate by the laser processing method.

15. The method for manufacturing a vertical probe according to claim 14, characterized in that: The second transition area and the second lower plane area of ​​the second side surface are formed by laser processing the substrate in a laser processing manner.

16. The method for manufacturing a vertical probe according to claim 14, wherein: The steps of the manufacturing method include: Providing the substrate, wherein the substrate is a plate, and the substrate has the top surface and a bottom surface facing in the opposite direction to the top surface; Performing laser processing between a first position and a second position on the top surface of the substrate by the laser processing method to form a transition surface, such that the transition surface gradually approaches the bottom surface and extends from the first position to the second position; Performing laser processing between the second position and the third position on the top surface of the substrate by the laser processing method to form a processing plane; A cutting process is performed to cut the substrate into at least one of the vertical probes, so that the first upper plane area of ​​the first side of the vertical probe comes from the portion of the top surface of the substrate that has not been laser processed, the first transition area comes from the transition surface of the substrate, the first lower plane area comes from the processing plane of the substrate, and the second side and the fourth side are generated by the cutting process.

17. The method for manufacturing a vertical probe according to claim 16, wherein: The cutting process is performed by a laser processing method.

18. The method for manufacturing a vertical probe according to claim 16, wherein: The cutting procedure generates a distance between the second upper boundary line of the second side and the third position in the longitudinal axis, which is not substantially equal to the distance between the first position and the third position in the longitudinal axis; or the cutting procedure generates a distance between the second lower boundary line of the second side and the third position in the longitudinal axis, which is not substantially equal to the distance between the second position and the third position in the longitudinal axis.

19. The method for manufacturing a vertical probe according to claim 14, wherein: The steps of the manufacturing method include: Providing the substrate, wherein the substrate is an elongated needle body and includes the second side of the vertical probe; The first transition zone is formed by performing laser processing between a first position and a second position on the top surface of the substrate by the laser processing method, and the first lower plane zone is formed by performing laser processing between a second position and a third position on the top surface of the substrate by the laser processing method, so that the top surface of the substrate becomes the first side surface of the vertical probe.

20. The method for manufacturing a vertical probe according to claim 19, wherein: The distance between the first position and the third position in the longitudinal axis is not substantially equal to the distance between the second upper boundary line of the second side and the third position in the longitudinal axis; or the distance between the second position and the third position in the longitudinal axis is not substantially equal to the distance between the second lower boundary line of the second side and the third position in the longitudinal axis.

Images