Flower basket for cleaning and drying wafers

Abstract

The invention belongs to the technical field of wafer processing technologies, and particularly relates to a flower basket for cleaning and drying wafers, which comprises a fixed bottom piece, a buckling part is arranged on the back of the outer surface of the fixed bottom piece, a drainage part is arranged at the bottom of the buckling part, and a drainage part is arranged at the bottom of the fixed bottom piece. The fixing bottom piece comprises a horizontal box shell, and guide sliding rods are symmetrically arranged on the two sides of the lower surface of the horizontal box shell. When the wafer cleaning device is used for working, wafers are stored in the wafer storage part, then cleaning liquid is injected into the combined sealing box shell, and therefore the effect of cleaning the wafers in a centralized mode is achieved. At the moment, the clamped part of the wafer cannot be cleaned due to the fact that cleaning liquid cannot make contact with the wafer, cleaning dead corners occur, the wafer inside the device is fixed through the rubber rolling wheels, the wafer can be made to rotate continuously in the cleaning process, and then the cleaning dead corners of the wafer are eliminated.

Description

Technical Field

[0001] The invention belongs to the technical field of wafer processing technology, in particular to a flower basket for cleaning and drying wafers. Background Art

[0002] In the field of wafer processing, the wafer needs to be cleaned many times, and the cleanliness requirement is high. At the same time, the wafer needs to be dried in time after cleaning. Whether it is the cleaning or drying process, it is necessary to ensure that the wafer is not damaged. In addition, the effect and efficiency of cleaning and drying need to be improved.

[0003] The existing flower basket equipment will gather the wafers that need to be cleaned together for unified cleaning, and then dry them inside the flower basket. However, when this flower basket is cleaning, the annular side of the wafer will be in contact with the flower basket and cannot be effectively cleaned. If the receiving groove of the flower basket is enlarged, although the cleaning liquid can effectively clean the wafer, the wafer cannot be effectively limited and fixed, and it is easy to loosen during cleaning, which may cause the wafer to break easily, so effective improvement is needed. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention solves the technical problems by adopting a technical solution: a flower basket for cleaning and drying wafers, comprising a fixed bottom piece, a buckling component is arranged on the back of the outer surface of the fixed bottom piece, a drainage component is arranged at the bottom of the buckling component, and a drainage component is arranged at the bottom of the fixed bottom piece;

[0005] The fixed bottom member comprises a horizontal box shell, guide slide bars are symmetrically arranged on both sides of the lower surface of the horizontal box shell, and wafer storage components are evenly arranged on the inner wall of the horizontal box shell, and the wafer storage components on the upper and lower sides need to be combined together to relatively seal the internal wafers;

[0006] The wafer storage component includes an arc-shaped rotating slot shell, the outer surface of which is fixedly connected to an arc-shaped clamping plate, rubber rollers are symmetrically arranged on both sides of the inner cavity of the arc-shaped clamping plate through a rotating rod, a motor is arranged in the inner cavity of the arc-shaped clamping plate, and the rod body of the rotating shaft is inserted into the inner wall of the rubber roller to achieve the effect of controlling the rotation of the rubber roller and prevent water from entering the motor, and bellows are symmetrically arranged on both sides of the inner wall of the arc-shaped clamping plate, and a diversion plate is fixedly connected to the air outlet of the bellows through a nozzle, and water-proof baffles are symmetrically arranged on both sides of the lower surface of the arc-shaped rotating slot shell, and the bellows can divert and diffuse the blasted hot air through the diversion plate, and then enter the area where the internal wafers are located through the water-proof baffle.

[0007] Furthermore, the buckling component includes a buckling shell and a side base, both sides of the upper surface of the side base are fixedly connected with a long cylindrical shell through a support plate, the upper part of the inner cavity of the long cylindrical shell is evenly provided with annular rotation grooves, the inner wall of the long cylindrical shell is rotatably connected with a solid rotating rod, the outer surface of the solid rotating rod is fixedly connected to the back of the outer surface of the buckling shell through a connecting plate, and both ends of the solid rotating rod are fixedly connected with a torque motor, which can drive the buckling shell to rotate axially by rotating the solid rotating rod, thereby achieving the effect of opening the fixed bottom piece.

[0008] Furthermore, the outer surface of the side base is slidably connected to the lower part of the outer surface of the horizontal box shell through a guide slide groove, the outer surface of the snap-on shell is slidably connected to the outer surface of the long cylindrical shell through a circular cutting groove, and the outer surface of the torque motor is fixedly connected to the side of the long cylindrical shell. The outer surface of the arc-shaped clamping plate is fixedly connected to the inner wall of the horizontal box shell, and drainage grooves are evenly provided at the bottom of the inner cavity of the horizontal box shell. The outer surface of the blower box is fixedly connected to the inner wall of the arc-shaped clamping plate, and the outer surface of the water-blocking baffle and the outer surface of the diversion plate are squeezed against each other. Through grooves are symmetrically provided on both sides of the inner cavity of the arc-shaped rotating groove shell, and the middle part of the outer surface of the rubber roller is rotatably connected to the inner cavity of the arc-shaped rotating groove shell through the through groove, and the inner wall of the snap-on shell is also evenly provided with wafer storage components.

[0009] Furthermore, the drainage component includes a long drainage tube, the inner cavity of the long drainage tube is uniformly provided with drainage grooves, the outer surface of the long drainage tube is uniformly provided with a pressure divider, the bottom of the inner cavity of the pressure divider is uniformly provided with a vertical drainage pipe, both ends of the long drainage tube are fixedly connected with a pressurizer, the bottom of the inner cavity of the pressurizer is fixedly connected with a water inlet, the pressurizer first adds cleaning liquid to the inside of the long drainage tube by pressurization, the cleaning liquid enters the pressure divider under the diversion effect of the drainage groove, the cleaning liquid is pumped into the side area of ​​the wafer storage component along the vertical drainage pipe through the pressure divider, and then the cleaning liquid infiltrates into the merged wafer storage component from the side. The lower surface of the pressure divider is fixedly connected to the upper surface of the snap-on shell, the outer surface of the long drainage tube is fixedly connected to the inner cavity of the pressure divider through the drainage groove, the bottom end of the vertical drainage pipe extends to the inside of the snap-on shell through the through-hole, and the outer surface of the pressure divider is fixedly connected to the outer surface of the snap-on shell.

[0010] Furthermore, the drainage component includes a water receiving box, the bottom of the inner cavity of the water receiving box is evenly provided with drainage grooves, the front and rear sides of the upper surface of the water receiving box are symmetrically provided with guide slide rails, the left and right sides of the outer surface of the water receiving box are symmetrically provided with height-adjusting connecting plates, the top of the height-adjusting connecting plate is fixedly connected with a compression connecting rod, the height-adjusting connecting plate can slide up and down through the segmented structure in the middle, and the top of the height-adjusting connecting plate can control the actual length of the compression connecting rod by pressurizing the compression connecting rod, the compression connecting rod is fixedly connected with a connecting plate at one end away from the height-adjusting connecting plate, the middle of the inner cavity of the connecting plate is provided with a plug-in groove, and semicircular grooves are provided on both sides of the snap-on shell and both sides of the horizontal box shell, and the connecting plate can be inserted into the semicircular groove through the plug-in groove in the middle. The lower surface of the horizontal box shell is slidably connected to the inner wall of the drainage groove through a guide slide rod, the lower part of the inner cavity of the connecting plate is plugged into the inner cavity of the horizontal box shell through the plug-in groove, and the upper part of the inner cavity of the connecting plate is plugged into the inner cavity of the snap-on shell through the plug-in groove.

[0011] The beneficial effects of the present invention are as follows:

[0012] 1. When the device is used, the wafers are stored inside the wafer storage component, and then the cleaning liquid is injected into the combined sealed box shell to achieve the effect of centralized cleaning of the wafers. Since the general flower basket will clamp the wafers to ensure the stability of the wafers, the clamped parts of the wafers cannot be cleaned because the cleaning liquid cannot contact them, resulting in cleaning dead corners. The device fixes the internal wafers through rubber rollers. During the cleaning process, the wafers can be continuously rotated to eliminate the cleaning dead corners of the wafers.

[0013] 2. After the cleaning work is completed, the wafers and the arc-shaped rotating tank shell where the wafers are placed must be attached with cleaning liquid. At this time, drying work is required to eliminate water stains. The blower boxes on both sides can spray the added gas from the inside to the outside, and then clean the water stains inside the wafer storage component. Since the hot air is blown out from bottom to top and exhausted through the vertical drain pipe above, there will be no problem of incomplete drying inside the wafer storage component and residual water stains in the corners.

[0014] 3. The device first uses the high-powered pressurizers on both sides to keep each drainage tube full of liquid, and then injects the cleaning liquid into the box shell through the low-power pressure divider to ensure sufficient supply of cleaning liquid while avoiding the problem that the pressurizer directly supplies liquid to the inside of the box, resulting in excessive pressure on the components inside the box due to the cleaning liquid with excessive pressure, causing damage to the internal components.

[0015] 4. During cleaning, the connecting plates on both sides will slide left and right synchronously through the compression connecting rod, thereby driving the horizontal box shell to slide along the drainage groove through the guide slide bar at the bottom, causing the box shell to shake left and right. Since the chip is fixed by the rubber roller and will not shake, the cleaning liquid inside will shake relative to the chip, thereby effectively refreshing the side parts of the chip. The shaking box body can quickly shake off the residual cleaning liquid inside, which is more efficient than the natural discharge of the cleaning liquid, thereby improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a front view of the present invention;

[0017] Figure 2 is a cross-sectional view of the present invention;

[0018] Figure 3 is a cross-sectional view of a fixed bottom member of the present invention;

[0019] Figure 4 is a cross-sectional view of a wafer storage component of the present invention;

[0020] Figure 5 is a cross-sectional view of the buckling component of the present invention;

[0021] Figure 6 It is a schematic diagram of the structure of the drainage component of the present invention;

[0022] Figure 7 It is a schematic structural diagram of the drainage component of the present invention.

[0023] In the figure: 1. buckle-mounted component; 2. fixed bottom component; 3. drainage component; 4. drainage component; 21. horizontal box shell; 22. guide slide; 23. wafer storage component; 231. arc-shaped rotating groove shell; 232. arc-shaped clamping plate; 233. rubber roller; 234. water-blocking baffle; 235. blower box; 236. diversion plate; 11. buckle shell; 12. side base; 13. long cylinder shell; 14. annular rotating groove; 15. solid rotating rod; 16. torque motor; 41. drainage long tube; 42. drainage groove; 43. voltage divider; 44. vertical drainage pipe; 45. pressurizer; 46. water inlet; 31. water receiving box; 32. guide slide; 33. drainage groove; 34. height-adjusting connecting plate; 35. compression connecting rod; 36. connecting plate; 37. plug-in groove. DETAILED DESCRIPTION

[0024] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

[0025] Example 1, please refer to Figure 1-Figure 5 The present invention provides a technical solution: a flower basket for cleaning and drying wafers, comprising a fixed bottom member 2, a buckling component 1 is arranged on the back of the outer surface of the fixed bottom member 2, a drainage component 3 is arranged at the bottom of the buckling component 1, and a drainage component 4 is arranged at the bottom of the fixed bottom member 2;

[0026] The fixed bottom member 2 includes a horizontal box shell 21, and guide slide bars 22 are symmetrically arranged on both sides of the lower surface of the horizontal box shell 21. The inner wall of the horizontal box shell 21 is evenly provided with wafer storage components 23. The wafer storage components 23 on the upper and lower sides need to be combined together to relatively seal the internal wafers.

[0027] The wafer storage component 23 includes an arc-shaped rotating groove shell 231, and an arc-shaped clamping plate 232 is fixedly connected to the outer surface of the arc-shaped rotating groove shell 231. Rubber rollers 233 are symmetrically arranged on both sides of the inner cavity of the arc-shaped clamping plate 232 through a rotating rod. A motor is arranged in the inner cavity of the arc-shaped clamping plate 232, and the rod body of the rotating shaft is inserted into the inner wall of the rubber roller 233 to achieve the effect of controlling the rotation of the rubber roller 233 and prevent water from entering the motor. Blowing boxes 235 are symmetrically arranged on both sides of the inner wall of the arc-shaped clamping plate 232, and a diversion plate 236 is fixedly connected to the air outlet of the blower box 235 through a nozzle. Water-proof baffles 234 are symmetrically arranged on both sides of the lower surface of the arc-shaped rotating groove shell 231. The blower box 235 can divert and diffuse the blasted hot air through the diversion plate 236, and then enter the area where the internal wafers are located through the water-proof baffle 234.

[0028] The buckling component 1 includes a buckling shell 11 and a side base 12, both sides of the upper surface of the side base 12 are fixedly connected with a long cylindrical shell 13 through a support plate, the upper part of the inner cavity of the long cylindrical shell 13 is evenly provided with annular grooves 14, the inner wall of the long cylindrical shell 13 is rotatably connected with a solid rotating rod 15, the outer surface of the solid rotating rod 15 is fixedly connected to the back of the outer surface of the buckling shell 11 through a connecting plate, and the two ends of the solid rotating rod 15 are fixedly connected with a torque motor 16, the torque motor 16 can drive the buckling shell 11 to rotate axially by rotating the solid rotating rod 15, thereby achieving the effect of opening the fixed bottom part 2.

[0029] The outer surface of the side base 12 is slidably connected to the lower part of the outer surface of the horizontal box shell 21 through the guide slide groove, the outer surface of the buckle shell 11 is slidably connected to the outer surface of the long cylindrical shell 13 through the annular groove 14, and the outer surface of the torque motor 16 is fixedly connected to the side of the long cylindrical shell 13. The outer surface of the arc clamping plate 232 is fixedly connected to the inner wall of the horizontal box shell 21, and the bottom of the inner cavity of the horizontal box shell 21 is evenly provided with drainage grooves, the outer surface of the blower box 235 is fixedly connected to the inner wall of the arc clamping plate 232, and the outer surface of the water baffle 234 and the outer surface of the diversion plate 236 are pressed against each other. Through grooves are symmetrically opened on both sides of the inner cavity of the arc rotating groove shell 231, and the middle part of the outer surface of the rubber roller 233 is rotatably connected to the inner cavity of the arc rotating groove shell 231 through the through groove, and the inner wall of the buckle shell 11 is also evenly provided with wafer storage components 23.

[0030] When using the device to clean wafers, the round wafers are sequentially inserted into the wafer storage component 23 inside the fixed bottom component 2 to ensure that each wafer is in a vertical state when supported by the wafer storage component 23. Then the torque motor 16 on the back controls the solid rotating rod 15 to rotate, driving the upper buckle shell 11 to buckle on the horizontal box shell 21. At this time, the wafer storage components 23 on the upper and lower sides are spliced ​​together to confine the wafers in the internal area.

[0031] When cleaning, cleaning liquid is injected into the interior of the box through the upper drainage component 4. Since the speed of adding cleaning liquid is faster than the discharge speed of the horizontal box shell 21 through the bottom drainage groove, the cleaning liquid will gradually fill the entire box. Then, when cleaning, the rubber roller 233 in direct contact with the side of the chip will rotate under the control of the arc clamping plate 232, and then the rubber rollers 233 on the four sides will drive the clamped chip to rotate axially inside the arc rotating groove shell 231, so that the chip rotates inside the cleaning liquid to achieve the effect of cleaning the chip.

[0032] After cleaning, the cleaning liquid inside the box is discharged through the notch at the bottom of the horizontal box shell 21. After the discharge is completed, the snap-on shell 11 is not opened temporarily. Hot air is blown in through the blower boxes 235 on both sides of the bottom of the inner wall of the arc-shaped clamping plate 232, and then the gas is diverted by the water-proof baffle 234 and flows back from bottom to top through the opening at the bottom of the arc-shaped rotating groove shell 231 to the area where the chip is located, thereby drying the residual cleaning liquid.

[0033] After drying, the snap-on shell 11 is opened, and the wafers inside are taken out in sequence to obtain cleaned and relatively clean wafers.

[0034] Example 2, please refer to Figure 1-Figure 7The present invention provides a technical solution: on the basis of embodiment 1, the drainage component 3 includes a long drainage tube 41, the inner cavity of the long drainage tube 41 is evenly provided with drainage grooves 42, the outer surface of the long drainage tube 41 is evenly provided with a pressure divider 43, the bottom of the inner cavity of the pressure divider 43 is evenly provided with a vertical drainage pipe 44, both ends of the long drainage tube 41 are fixedly connected with a pressurizer 45, the bottom of the inner cavity of the pressurizer 45 is fixedly connected with a water inlet 46, the pressurizer 45 first adds cleaning liquid to the interior of the long drainage tube 41 by pressurization, the cleaning liquid enters the pressure divider 43 under the diversion effect of the drainage groove 42, and the cleaning liquid is pumped into the side area of ​​the wafer storage component 23 along the vertical drainage pipe 44 through the pressure divider 43, and then the cleaning liquid penetrates into the merged wafer storage component 23 from the side. The lower surface of the voltage divider 43 is fixedly connected to the upper surface of the snap-on shell 11, the outer surface of the drainage long tube 41 is fixedly connected to the inner cavity of the voltage divider 43 through the drainage groove 42, the bottom end of the vertical drainage pipe 44 extends to the interior of the snap-on shell 11 through the through opening, and the outer surface of the pressurizer 45 is fixedly connected to the outer surface of the snap-on shell 11.

[0035] The drainage component 4 includes a water receiving box 31, and drainage grooves 33 are evenly opened at the bottom of the inner cavity of the water receiving box 31, and guide slide rails 32 are symmetrically opened on the front and rear sides of the upper surface of the water receiving box 31, and height adjustment connecting plates 34 are symmetrically arranged on the left and right sides of the outer surface of the water receiving box 31. The top of the height adjustment connecting plate 34 is fixedly connected with a compression connecting rod 35, and the height adjustment connecting plate 34 can slide up and down through the segmented structure in the middle, and the top of the height adjustment connecting plate 34 can control the actual length of the compression connecting rod 35 by pressurizing the compression connecting rod 35. The compression connecting rod 35 is fixedly connected to the end away from the height adjustment connecting plate 34. A plug-in groove 37 is opened in the middle of the inner cavity of the connecting plate 36, and semicircular grooves are opened on both sides of the snap-on shell 11 and both sides of the horizontal box shell 21. The connecting plate 36 can be inserted into the semicircular groove through the plug-in groove 37 in the middle. The lower surface of the horizontal box shell 21 is slidably connected to the inner wall of the drainage groove 33 through the guide slide rod 22, the lower part of the inner cavity of the connecting plate 36 is plugged into the inner cavity of the horizontal box shell 21 through the plug-in groove 37, and the upper part of the inner cavity of the connecting plate 36 is plugged into the inner cavity of the snap-on shell 11 through the plug-in groove 37.

[0036] The drainage component 4 is used to add cleaning liquid to the interior of the closed shell, and the pressurizers 45 on both sides are used to inject liquid into each drainage tube 41. The cleaning liquid is evenly distributed to each pressure divider 43 through the drainage groove 42 of the drainage tube 41, and then the pressure divider 43 pressurizes the cleaning liquid here to the vertical drainage pipe 44. The cleaning liquid is poured into the closed shell through the vertical drainage pipe 44, and the cleaning liquid penetrates into the interior of the wafer storage component 23 through the side area of ​​the wafer storage component 23.

[0037] When the snap-on shell 11 is merged with the horizontal box shell 21, the cutouts on both sides of the horizontal box shell 21 will be inserted into the plug-in grooves 37 on the upper part of the connecting disk 36. At this time, the two sides of the merged shell will be connected to the connecting disks 36. When cleaning, the connecting disks 36 on both sides will synchronously slide left and right through the compression connecting rods 35, thereby driving the horizontal box shell 21 to slide along the drainage grooves 33 through the guide slide rods 22 at the bottom, so that the box shell will swing left and right. Since the chip is fixed by the rubber roller 233 and will not swing, the cleaning liquid inside will swing relative to the chip, thereby flushing the chip horizontally, and the waste liquid discharged from the bottom groove of the horizontal box shell 21 will be discharged through the drainage grooves 33.

[0038] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention are implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. A basket for cleaning and drying wafers, comprising a fixed bottom member (2), a buckling member (1) is arranged on the back of the outer surface of the fixed bottom member (2), a drainage member (3) is arranged at the bottom of the buckling member (1), and a drainage member (4) is arranged at the bottom of the fixed bottom member (2), characterized in that: The fixed bottom member (2) comprises a horizontal box shell (21), guide slide bars (22) are symmetrically arranged on both sides of the lower surface of the horizontal box shell (21), and wafer storage components (23) are evenly arranged on the inner wall of the horizontal box shell (21); The wafer storage component (23) comprises an arc-shaped rotating slot shell (231), the outer surface of the arc-shaped rotating slot shell (231) is fixedly connected to an arc-shaped clamping plate (232), both sides of the inner cavity of the arc-shaped clamping plate (232) are symmetrically provided with rubber rollers (233) through rotating rods, both sides of the inner wall of the arc-shaped clamping plate (232) are symmetrically provided with blower boxes (235), the air outlet of the blower box (235) is fixedly connected to a diversion plate (236) through a nozzle, and both sides of the lower surface of the arc-shaped rotating slot shell (231) are symmetrically provided with water-proof baffles (234); The buckling component (1) comprises a buckling shell (11) and a side base (12), both sides of the upper surface of the side base (12) are fixedly connected to a long cylindrical shell (13) through a support plate, the upper part of the inner cavity of the long cylindrical shell (13) is evenly provided with annular rotation grooves (14), the inner wall of the long cylindrical shell (13) is rotatably connected to a solid rotating rod (15), the outer surface of the solid rotating rod (15) is fixedly connected to the back of the outer surface of the buckling shell (11) through a connecting plate, and the two ends of the solid rotating rod (15) are fixedly connected to a torque motor (16).

2. The flower basket for cleaning and drying wafers according to claim 1, characterized in that: The outer surface of the side base (12) is slidably connected to the lower part of the outer surface of the horizontal box shell (21) through a guide groove, the outer surface of the buckle shell (11) is slidably connected to the outer surface of the long cylindrical shell (13) through an annular groove (14), and the outer surface of the torque motor (16) is fixedly connected to the side of the long cylindrical shell (13).

3. The flower basket for cleaning and drying wafers according to claim 2, characterized in that: The outer surface of the arc-shaped clamping plate (232) is fixedly connected to the inner wall of the horizontal box shell (21), and drainage grooves are evenly arranged at the bottom of the inner cavity of the horizontal box shell (21). The outer surface of the blower box (235) is fixedly connected to the inner wall of the arc-shaped clamping plate (232), and the outer surface of the water-blocking baffle (234) and the outer surface of the diversion plate (236) are pressed against each other.

4. The flower basket for cleaning and drying wafers according to claim 3, characterized in that: Through grooves are symmetrically provided on both sides of the inner cavity of the arc-shaped rotating groove shell (231); the middle part of the outer surface of the rubber roller (233) is rotatably connected to the inner cavity of the arc-shaped rotating groove shell (231) through the through groove; and the inner wall of the buckle shell (11) is also evenly provided with wafer storage components (23).

5. The flower basket for cleaning and drying wafers according to claim 1, characterized in that: The drainage component (3) comprises a long drainage tube (41), the inner cavity of the long drainage tube (41) is evenly provided with drainage grooves (42), the outer surface of the long drainage tube (41) is evenly provided with a pressure divider (43), the bottom of the inner cavity of the pressure divider (43) is evenly provided with a vertical drainage pipe (44), both ends of the long drainage tube (41) are fixedly connected with a pressurizer (45), and the bottom of the inner cavity of the pressurizer (45) is fixedly connected with a water inlet (46).

6. The basket for cleaning and drying wafers according to claim 5, characterized in that: The lower surface of the voltage divider (43) is fixedly connected to the upper surface of the snap-on shell (11); the outer surface of the drainage long tube (41) is fixedly connected to the inner cavity of the voltage divider (43) through the drainage groove (42); the bottom end of the vertical drainage pipe (44) extends to the interior of the snap-on shell (11) through the through opening; the outer surface of the pressurizer (45) is fixedly connected to the outer surface of the snap-on shell (11).

7. The basket for cleaning and drying wafers according to claim 1, characterized in that: The drainage component (4) comprises a water receiving box (31), the bottom of the inner cavity of the water receiving box (31) is evenly provided with drainage grooves (33), the front and rear sides of the upper surface of the water receiving box (31) are symmetrically provided with guide rails (32), the left and right sides of the outer surface of the water receiving box (31) are symmetrically provided with height adjustment connecting plates (34), the top of the height adjustment connecting plate (34) is fixedly connected with a compression connecting rod (35), the end of the compression connecting rod (35) away from the height adjustment connecting plate (34) is fixedly connected with a connecting plate (36), and the middle part of the inner cavity of the connecting plate (36) is provided with a plug-in groove (37).

8. The basket for cleaning and drying wafers according to claim 7, characterized in that: The lower surface of the horizontal box shell (21) is slidably connected to the inner wall of the drainage groove (33) through a guide slide bar (22), the lower part of the inner cavity of the connecting plate (36) is plugged into the inner cavity of the horizontal box shell (21) through a plug-in groove (37), and the upper part of the inner cavity of the connecting plate (36) is plugged into the inner cavity of the buckle shell (11) through a plug-in groove (37).

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