Edge passivation equipment conveying device and carrier conveying method
By directly transmitting small and light silicon wafer carriers through the conveying device using a multi-stage conveying chain, the problem of low efficiency in the prior art is solved, and efficient silicon wafer carrier transmission and equipment operation are achieved.
Patent Information
- Application Number
- CN202510071764.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-16
- Publication Date
- 2025-04-29
AI Technical Summary
The conveying mechanism used in the prior art for edge passivation equipment is inefficient and cannot be effectively adapted to small and light silicon wafer vehicles, resulting in reduced equipment efficiency and production capacity.
The conveying device adopts a multi-stage conveying chain, including a first conveying device and a second conveying device, directly transmits the silicon wafer carrier through the conveying chain, cancels the boat support structure, and sets a barrier position and detection module on the conveying chain to achieve precise control and isolation.
It improves the working efficiency of the equipment, optimizes the control logic, reduces maintenance costs, and effectively reduces collisions and debris between silicon wafer vehicles.
Smart Images
Figure CN119905437A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of solar cell coating, and in particular to a half-silicon wafer edge passivation equipment line and a method for conveying a carrier. Background Art
[0002] With the development of photovoltaic half-cell technology, the passivation treatment of silicon wafer cutting points has gradually received attention, which has given rise to new silicon wafer carriers and conveying structures.
[0003] Currently, the silicon wafer carriers such as graphite boats, quartz boats, and metal boats used in the market often use structures such as in-and-out boats to transport such silicon wafer carriers. Most of these in-and-out boat mechanisms use belts to drive boat supports to transport silicon wafer carriers, which can transport silicon wafer carriers very well. Compared with the above-mentioned silicon wafer carriers, the silicon wafer carriers used in edge passivation equipment are small and light, and one reaction chamber can accommodate multiple silicon wafer carriers. If the original belt plus boat support conveying mechanism is used, after a silicon wafer carrier is sent in, it is necessary to wait for the boat support to transport back and forth several times before the reaction chamber can close the furnace door for the process, which greatly reduces the efficiency and production capacity of the equipment. Therefore, the original conveying mechanism is not suitable for edge passivation equipment, so it is necessary to improve on the basis of these conveying mechanisms to adapt to the conveying work of the silicon wafer carriers of the new equipment. Summary of the invention
[0004] In order to solve the technical problem of low efficiency of the conveying mechanism for edge passivation equipment in the prior art, the present invention provides an edge passivation equipment conveying device and a method for conveying a carrier.
[0005] The technical solution adopted by the present invention is:
[0006] The present invention proposes an edge passivation equipment conveying device, comprising:
[0007] A first conveying device, comprising a plurality of conveying chains arranged in sequence, each of which can be used to place and convey a carrier, and is provided with a pick-and-place position, which can convey the carrier from the loading mechanism to the pick-and-place position corresponding to the reaction chamber, and convey the carrier at the pick-and-place position to the unloading mechanism;
[0008] The second conveying device includes at least one section of conveying chain, which is used to convey the carrier of the unloading mechanism back to the loading mechanism.
[0009] Furthermore, each section of the conveying chain is provided with at least one blocking position, and a blocking device and a detection module are provided corresponding to the blocking position. The blocking device can be in a releasing state and a blocking state, and the detection module is used to detect whether there is a carrier at the blocking position.
[0010] Furthermore, the first conveying device includes three sections of the conveying chain that are connected in sequence, namely a first transmission section, a second transmission section and a third transmission section;
[0011] The first transmission section is used to transfer the carrier at the discharge end of the loading mechanism to the second transmission section; the second transmission section is provided with the pick-up and placement position, and the third transmission section is used to send the carrier sent out by the second transmission section to the unloading mechanism.
[0012] Furthermore, the second conveying device includes a conveying chain.
[0013] Furthermore, i blocking positions are sequentially arranged on the first transmission segment, the second transmission segment and the third transmission segment, and there is one blocking position corresponding to the pick-and-place position on the second transmission segment, specifically the nth blocking position, and i is greater than 3.
[0014] Furthermore, a section of the conveying chain of the second conveying device is sequentially provided with m blocking positions, and the mth blocking position is close to the feeding mechanism, and m is greater than 1.
[0015] Furthermore, the conveying chain is a roller chain structure.
[0016] Furthermore, the first conveying device and the second conveying device are arranged in parallel and spaced apart from each other, and the first conveying device is located at the upper layer.
[0017] The present invention also provides a method for conveying a carrier, using the above-mentioned edge passivation device conveying device, comprising the steps of:
[0018] Detect whether there is a vehicle at the corresponding blocking position through the detection module;
[0019] The blocking device is controlled to switch according to the preset control logic of the blocking position.
[0020] The preset control logic of the blocking bit specifically includes:
[0021] The preset control logic of the first blocking position to the n-2th blocking position and the n+1th blocking position to the i-1th blocking position of the first conveying device is: when the blocking position after the blocking position is in the no-carrier state, the blocking device of the blocking position is released.
[0022] The control logic of the n-1th blocking position of the first conveying device is: when the reaction chamber needs a carrier, the robot corresponding to the pick-and-place position returns to the origin, and the blocking device of the blocking position is released;
[0023] The control logic of the nth blocking position of the first conveying device is: when the n+1th blocking position is in a carrier-free state and the nth blocking position is a processed carrier, the robot at the corresponding pick-and-place position returns to the origin, and the blocking device at the nth blocking position is released.
[0024] The control logic of the i-th blocking position of the first conveying device is: when there is no carrier at the unloading position of the unloading mechanism, the blocking device at the i-th blocking position is released.
[0025] The control logic of the first blocking position to the m-1th blocking position of the second conveying device is: when the blocking position after the blocking position is in the no-carrier state, the blocking device of the blocking position releases, and when the blocking position after the blocking position switches from the no-carrier state to the carrier state, the blocking device of the blocking position blocks;
[0026] The control logic of the mth blocking position of the second conveying device is: when the loading mechanism needs a carrier, the blocking device of the blocking position is released.
[0027] Compared with the prior art, the present invention has the following advantages:
[0028] 1. The improved edge passivation conveying device no longer relies on boats to transport the carrier, but directly transports the carrier, which improves the working efficiency of the equipment.
[0029] 2. The upper conveying device adopts a multi-stage structure with independence and is controlled separately, which optimizes the control logic. When one part needs maintenance, other motion modules can still work, reducing maintenance costs;
[0030] 3. Add blocking devices and detection modules to the conveying device to effectively separate the silicon wafer carriers and reduce the fragmentation rate. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.
[0032] Figure 1 It is a structural schematic diagram of an embodiment of the present invention;
[0033] Figure 2 This is a schematic structural diagram of a first conveying device in an embodiment of the present invention;
[0034] Figure 3 This is a schematic structural diagram of a second conveying device in an embodiment of the present invention;
[0035] Figure 4 It is a control block diagram of the blocking device of the first conveying device in an embodiment of the present invention;
[0036] Figure 5 It is a control block diagram of the blocking device of the first conveying device in an embodiment of the present invention;
[0037] 11. A first conveying device;
[0038] 111, first conveying section; 112, second conveying section; 113, third conveying section;
[0039] 12. A second conveying device;
[0040] 121, fourth conveying section;
[0041] 2. Vehicle;
[0042] 3. Detection module;
[0043] A. Blocking device. DETAILED DESCRIPTION
[0044] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.
[0045] The principle and structure of the present invention are described in detail below with reference to the accompanying drawings and embodiments.
[0046] The silicon wafer carrier used in the edge passivation equipment is smaller and lighter than the above-mentioned silicon wafer carriers, and one reaction chamber can accommodate multiple silicon wafer carriers. If the original belt plus boat support conveying mechanism is used, after sending in a silicon wafer carrier, it is necessary to wait for the boat support to transport it back and forth multiple times before the reaction chamber can close the furnace door and carry out the process, which greatly reduces the efficiency and production capacity of the equipment. Therefore, the original conveying mechanism is not suitable for edge passivation equipment.
[0047] In this regard, Figures 1 to 3 As shown, the present invention proposes a conveying device for edge passivation equipment, including: a first conveying device 11 and a second conveying device 12, wherein the first conveying device 11 and the second conveying device 12 are specifically conveying chains (with brackets, driving parts, etc.), and the carrier 2 can be directly placed on the conveying chain for conveyance. Among them, the first conveying device 11 includes multiple sections of conveying chains arranged in sequence, and pick-up and placement positions are set, and each section of the conveying chain can be placed and conveyed on the carrier 2, and the carrier 2 can be transferred from the previous section of the conveying chain to the next section of the conveying chain. The first conveying device 11 is used to transfer the carrier 2 from the loading mechanism to the pick-up and placement position, and to transfer the carrier at the pick-up and placement position to the unloading mechanism. The second conveying device 12 includes a section of conveying chain (multiple sections can also be set as needed), which is used to transfer the carrier of the unloading mechanism back to the loading mechanism.
[0048] The present invention uses a chain to transport the carrier, and the silicon wafer carrier is in direct contact with the chain, which can eliminate the boat support structure and improve the carrier's transmission efficiency. The chain is resistant to high temperatures and can avoid dust and oil pollution.
[0049] Specifically, the chain can adopt a roller chain structure, and the friction form is rolling friction. Compared with the sliding friction of belt conveyor, rolling friction reduces friction and ensures stability during transportation. In addition, a variety of chain types can be selected without specific restrictions, and all are within the protection scope of the present invention.
[0050] In a specific embodiment, at least one blocking position is provided on each section of the conveyor chain, and a blocking device A and a detection module 3 are provided corresponding to each blocking position. The blocking device A can be switched between a release state and a blocking state. When the blocking device A is in a blocking state, if there is a carrier at the blocking position corresponding to the blocking device A, it will be blocked by the blocking device and cannot move with the conveyor chain. When the blocking device is in a release state, the carrier at the blocking position corresponding to the blocking device can move with the conveyor chain.
[0051] The detection module 3 is used to detect whether there is a vehicle on the blocking position, so that the control module can control the blocking device according to the vehicle presence signal and the vehicle absence signal.
[0052] The setting structure of the blocking device is not limited specifically, for example, it can be blocked by lifting with a cylinder, which is within the protection scope of the present invention; the detection module can specifically use a photoelectric sensor for detection, or use an electric shock switch, a proximity switch and other detection methods, etc.
[0053] The blocking device can effectively ensure the spacing between the silicon wafer carriers and prevent fragmentation caused by collision.
[0054] In a specific embodiment, the first conveying device 11 includes three sections of conveying chains connected in sequence, namely a first conveying section 111, a second conveying section 112 and a third conveying section 113;
[0055] Among them, the first transmission section 111 is used to transfer the carrier at the discharge end of the loading mechanism to the second transmission section; the second transmission section 112 is provided with a pick-up and placement position, and the robot can send the carrier on the pick-up and placement position to the reaction chamber, and can also send the carrier in the reaction chamber to the pick-up and placement position; the third transmission section 113 is used to send the carrier sent out by the second transmission section to the unloading mechanism.
[0056] By dividing the first conveying device 11 into three sections, the control module can control the three-section line structure separately, which simplifies the control logic, reduces the control difficulty, facilitates maintenance, maintains stability during transportation, and reduces the phenomenon of silicon wafer fragments caused by shaking or collision during transportation.
[0057] In a specific embodiment, the second conveyor 12 includes a conveyor chain, namely, the fourth conveyor section 121. The second conveyor 12 only transports empty wafer carriers, and does not need to specifically control the spacing of the carriers, that is, does not need to set a special functional position, and can still use the entire chain conveyor to reduce costs.
[0058] The first conveying device 11 and the second conveying device 12 are arranged in parallel and spaced apart from each other, the first conveying device is located at the upper layer, and the second conveying device is located at the lower layer.
[0059] In a specific embodiment, i blocking positions are set in sequence on the first transmission segment 111, the second transmission segment 112, and the third transmission segment 113, wherein one blocking position is set on the second transmission segment 112, specifically the nth blocking position (corresponding to the pick-and-place position), and i is greater than 3, and i is greater than n.
[0060] The fourth transmission section 121 of the second conveying device 12 is sequentially provided with m blocking positions, and the m+ith blocking position (i+1 is the first blocking position on the second conveying device, and so on) is close to the loading mechanism, m is greater than 1, and specifically m can be equal to 2.
[0061] The conveying device for edge passivation adopts a double-line structure arranged up and down. The upper conveying device transports the fully loaded silicon wafer carrier to the reaction chamber, and sends the processed silicon wafers and silicon wafer carriers to the unloading mechanism to unload the processed silicon wafers. Due to the need to accurately control the start and stop, as well as the spacing between silicon wafer carriers, the first conveying device on the upper layer is designed as a three-stage structure, and blocking devices and detection modules corresponding to the number of silicon wafer carriers are arranged inside the conveying device. A detection module is added to the pick-up and placement position where the robot picks up and places the silicon wafer carrier to detect whether there is a silicon wafer carrier at the pick-up and placement position. In the first conveying device on the upper layer, the silicon wafer carrier is first filled with silicon wafers by the automatic loading mechanism and then sent to the first conveying device.
[0062] The present invention also provides a method for conveying a carrier, using the above-mentioned edge passivation device conveying device, comprising the steps of:
[0063] Detect whether there is a vehicle at the corresponding blocking position through the detection module;
[0064] And according to the preset control logic corresponding to the blocking position, the blocking device is controlled to switch.
[0065] Specifically, the preset controls corresponding to each blocking position are as follows:
[0066] The preset control logic of the first blocking position to the n-2th blocking position and the n+1th blocking position to the i-1th blocking position of the first conveying device is: when the blocking position after the blocking position is in the no-carrier state, the blocking device of the blocking position is released.
[0067] The control logic of the n-1th blocking position of the first conveying device is: when the reaction chamber needs a carrier, the robot corresponding to the pick-and-place position returns to the origin, and the blocking device of the blocking position is released;
[0068] The control logic of the nth blocking position of the first conveying device is: when the n+1th blocking position is in a carrier-free state and the nth blocking position is a processed carrier, the robot at the corresponding pick-and-place position returns to the origin, and the blocking device at the nth blocking position is released.
[0069] The control logic of the i-th blocking position of the first conveying device is: when there is no carrier at the unloading position of the unloading mechanism, the blocking device at the i-th blocking position is released.
[0070] The control logic of the first blocking position to the m-1th blocking position of the second conveying device is: when the blocking position after the blocking position is in the no-carrier state, the blocking device of the blocking position releases, and when the blocking position after the blocking position switches from the no-carrier state to the carrier state, the blocking device of the blocking position blocks;
[0071] The control logic of the mth blocking position of the second conveying device is: when the loading mechanism needs a carrier, the blocking device of the blocking position is released.
[0072] like Figure 4 , 5 As shown, the specific embodiments are as follows:
[0073] The control logic of the first conveyor device on the upper layer is as follows:
[0074] For the sake of simplicity, the blocking devices A designed in the first transmission section, the second transmission section and the third transmission section are represented as A1, A2...Ai respectively.
[0075] After the carrier is loaded with silicon wafers at the automatic loading mechanism, a signal is sent to the control module of the edge passivation equipment. The control module controls the first transmission section chain to drive the silicon wafer carrier to move to the other end. The initial states of all blocking devices in the first transmission section except An-1 are set to the "release" state. At this time, since the detection module of the second blocking position corresponding to A2 recognizes that "there is no carrier at the second blocking position", A1 maintains the "release" state for the silicon wafer carrier, and the silicon wafer carrier can pass through the first blocking position smoothly. Since the detection module of the third blocking position recognizes that "there is no carrier at the third blocking position", A2 maintains the "release" state for the silicon wafer carrier. By analogy, the silicon wafer carrier will reach n-1 blocking positions and will eventually be blocked by An-1.
[0076] During the transportation of the silicon wafer carrier in the first transmission section, the automatic loading mechanism will simultaneously transport the next silicon wafer carrier to the first transmission section, and move on the first transmission section according to the above logic. Since there are silicon wafer carriers at the n-1 blocking positions at this time, the next silicon wafer carrier will eventually reach the n-2 blocking position. If the reaction chamber does not need a new silicon wafer carrier for the process, all silicon wafer carrier positions on the first transmission section will be occupied. After the silicon wafer carriers waiting at their respective positions for the n-1 blocking positions are transported to the second transmission section, they will move to the n-1 blocking positions in turn and reach their respective next workstations.
[0077] The nth blocking position on the second transmission section is the pick-up and placement position of the robot on the conveying device. Only one blocking device, namely An, is set. Under normal conditions, the nth blocking position is always in a blocking state. Only when the silicon wafer carrier that has completed the process reaches the nth blocking position, the robot returns to the original position (i.e., the state before transportation), and it is identified that "n+1 blocking positions have no carriers", the above three conditions can be changed to the "release" state. At this time, the silicon wafer carrier after the process can reach the n+1 blocking position from the nth blocking position. The control of the blocking device in the third transmission section is consistent with the first transmission section: it is necessary to determine whether the next position has a carrier before deciding to "release" or "block", and Ai is always in a "blocking" state under normal conditions. Only when the automatic unloading mechanism transmits "no carrier at the unloading position", Ai will change to a "release" state, and the silicon wafer carrier will enter the automatic unloading mechanism from the i-th blocking position.
[0078] The second conveying device on the lower level has only two blocking devices, so the conveying line is recorded as the fourth conveying section. A total of two blocking devices are set, specifically represented as Ai+1 and Ai+2; the control logic is as follows: the empty carrier is transported to the second conveying device by the automated unloading mechanism, at which time Ai+1 of the i+1th blocking position (actually the first blocking position of the second conveying device) is in the "blocking" state. When the detection module of the i+2th blocking position recognizes the "no carrier" signal, the Ai+1 corresponding to the i+1th blocking position changes to the "release" state. After the carrier enters the i+2th blocking position from the i+1th blocking position, it is blocked by the Ai+2 of the i+2th blocking position. At this time, the Ai+1 of the i+1th blocking position immediately changes to the "blocking" state to block the next carrier. The i+2th blocking position is the "cache position" for entering the automatic loading mechanism. When the control module recognizes that the automatic loading machine "needs a carrier", it controls Ai+2 to switch to the "release" state, and the carrier enters the automatic loading mechanism from the conveying device.
[0079] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.
[0080] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.
[0081] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.
[0082] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.
[0083] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.
[0084] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
Claims
1. An edge passivation equipment conveying device, characterized in that: include: A first conveying device, comprising a plurality of conveying chains arranged in sequence, each of which can be used to place and convey a carrier, and is provided with a pick-and-place position, which can convey the carrier from the loading mechanism to the pick-and-place position corresponding to the reaction chamber, and convey the carrier at the pick-and-place position to the unloading mechanism; The second conveying device includes at least one section of conveying chain, which is used to convey the carrier of the unloading mechanism back to the loading mechanism.
2. The edge passivation equipment conveying device according to claim 1, characterized in that: Each section of the conveying chain is provided with at least one blocking position, and a blocking device and a detection module provided corresponding to the blocking position. The blocking device can be switched between a release state and a blocking state, and the detection module is used to detect whether there is a carrier at the blocking position.
3. The edge passivation equipment conveying device according to claim 2, characterized in that: The first conveying device comprises three sections of the conveying chain connected in sequence, namely a first transmission section, a second transmission section and a third transmission section; The first transmission section is used to transfer the carrier at the discharge end of the loading mechanism to the second transmission section; the second transmission section is provided with the pick-up and placement position, and the third transmission section is used to send the carrier sent out by the second transmission section to the unloading mechanism.
4. The edge passivation equipment conveying device according to claim 2, characterized in that: The second conveying device includes a conveying chain.
5. The edge passivation equipment conveying device according to claim 3, characterized in that: The first transmission segment, the second transmission segment, and the third transmission segment are sequentially provided with i blocking positions, and the second transmission segment has a blocking position corresponding to the pick-and-place position, specifically the nth blocking position, and i is greater than 3 and i is greater than n.
6. The edge passivation equipment conveying device according to claim 4, characterized in that: A section of the conveying chain of the second conveying device is sequentially provided with m blocking positions, and the mth blocking position is close to the feeding mechanism, and m is greater than 1.
7. The edge passivation equipment conveying device according to claim 1, characterized in that: The conveying chain is a roller chain structure.
8. The edge passivation equipment conveying device according to claim 1, characterized in that: The first conveying device and the second conveying device are arranged in parallel and spaced apart from each other, and the first conveying device is located at the upper layer.
9. A method for transporting a carrier, characterized in that: Using the edge passivation device delivery device as claimed in any one of claims 1 to 8, comprising the steps of: Detect whether there is a vehicle at the corresponding blocking position through the detection module; The blocking device is controlled to switch according to the preset control logic of the blocking position.
10. The method for conveying a carrier according to claim 9, characterized in that: The preset control logic of the first blocking position to the n-2th blocking position and the n+1th blocking position to the i-1th blocking position of the first conveying device is: when the blocking position after the blocking position is in the no-carrier state, the blocking device of the blocking position is released.
11. The method for conveying a carrier according to claim 9, characterized in that: The control logic of the n-1th blocking position of the first conveying device is: when the reaction chamber needs a carrier, the robot corresponding to the pick-and-place position returns to the origin, and the blocking device of the blocking position is released; The control logic of the nth blocking position of the first conveying device is: when the n+1th blocking position is in a carrier-free state and the nth blocking position is a processed carrier, the robot at the corresponding pick-and-place position returns to the origin, and the blocking device at the nth blocking position is released.
12. The method for transporting a carrier according to claim 9, wherein: The control logic of the i-th blocking position of the first conveying device is: when there is no carrier at the unloading position of the unloading mechanism, the blocking device at the i-th blocking position is released.
13. The method for transporting a carrier according to claim 9, wherein: The control logic of the first blocking position to the m-1th blocking position of the second conveying device is: when the blocking position after the blocking position is in the no-carrier state, the blocking device of the blocking position releases, and when the blocking position after the blocking position switches from the no-carrier state to the carrier state, the blocking device of the blocking position blocks; The control logic of the mth blocking position of the second conveying device is: when the loading mechanism needs a carrier, the blocking device of the blocking position is released.