Lamp and window configuration for substrate processing chamber

Abstract

The present disclosure relates to heat sources (e.g., lamps) and windows for processing chambers, and related methods. In one or more embodiments, a lamp suitable for semiconductor fabrication includes a bulb tube extending along at least a section of an arcuate profile. The bulb tube defines an arcuate central opening. The lamp includes a filament located in the arcuate central opening. The filament extends along at least the segment of the arcuate profile. The lamp includes a reflective coating formed on a first portion of an outer surface of the bulb tube.

Description

Technical Field

[0001] The present invention relates to heat sources (eg, lamps) and windows for use in processing chambers (eg, chambers suitable for semiconductor processing), and related methods. Background Art

[0002] Semiconductor substrates are processed for a variety of applications including the fabrication of integrated devices and micro-devices.

[0003] However, thermal processing may be limited in terms of thermal efficiency, temperature uniformity, product life, yield and throughput, chamber cost, and operating cost. For example, the heating device may have a relatively short service life. For another example, the temperature on the substrate may be non-uniform during heating, such as the outer edge of the substrate being cooler than the center of the substrate. For another example, a relatively small percentage (e.g., 10%) of the heat generated in the chamber may actually be absorbed by the substrate.

[0004] Therefore, there is a need for improved chambers and related apparatus and methods that facilitate increased yield and throughput, increased thermal efficiency, greater uniformity during processing, and reduced costs. Summary of the invention

[0005] The present invention relates to heat sources (eg, lamps) and windows for use in processing chambers, and related methods.

[0006] In one or more embodiments, a lamp suitable for semiconductor manufacturing includes a bulb tube extending along at least a segment of an arcuate profile. The bulb tube defines an arcuate central opening. The lamp includes a filament positioned in the arcuate central opening. The filament extends along at least the segment of the arcuate profile. The lamp includes a reflective coating formed on a first portion of an outer surface of the bulb tube.

[0007] In one or more embodiments, a window suitable for semiconductor manufacturing includes an outer portion and an inner portion disposed inside the outer portion. The inner portion includes a first outer surface, a second outer surface opposite to the first outer surface, and one or more grooves formed in the first outer surface.

[0008] In one or more embodiments, a processing chamber suitable for semiconductor manufacturing includes an interior space, and a substrate support disposed in the interior space. The substrate support includes a support surface. The processing chamber includes a window, which at least partially defines a processing space of the interior space. The window includes an outer portion and an inner portion, the inner portion being disposed inside the outer portion and having a radial center and a radial outer edge that interfaces with the outer portion. The inner portion includes a first outer surface facing away from the support surface, and a second outer surface opposite to the first outer surface. The second outer surface faces the support surface. The inner portion includes one or more grooves formed in the first outer surface. The processing chamber includes a plurality of lamps received in the one or more grooves of the window. The plurality of lamps are supported by the inner portion so that the distance between the lamps and the support surface has a gradient that transitions toward the support surface in a direction from the radial center to the radial outer edge. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] In order that the above-described features of the present invention can be understood in detail, a more particular description of the present invention, briefly summarized above, may be obtained by reference to the embodiments, some of which are illustrated in the accompanying drawings. It should be noted, however, that the drawings illustrate only exemplary embodiments and are therefore not to be considered limiting of the scope of the present invention, as the present invention may admit to other equally effective embodiments.

[0010] Figure 1 is a schematic side cross-sectional view of a processing chamber according to one or more embodiments.

[0011] Figure 2 According to one or more embodiments, Figure 1 Schematic side cross-sectional view of multiple lamps and windows shown in .

[0012] Figure 3 According to one or more embodiments, Figure 2 Schematic top view of multiple lights and windows shown in .

[0013] Figure 4 According to one or more embodiments, Figure 2 An enlarged view of the multiple lights and windows shown in FIG.

[0014] Figure 5 According to one or more embodiments, Figures 1 to 4 A schematic perspective view of a window and multiple lights shown in FIG.

[0015] Figure 6 According to one or more embodiments, Figure 5 Schematic top view of multiple lights and windows shown in .

[0016] Figure 7 is a schematic perspective view of a window and a plurality of lights according to one or more embodiments.

[0017] Figure 8 According to one or more embodiments, Figure 7 Schematic top view of multiple lights and windows shown in .

[0018] Fig. 9 According to one or more embodiments, Figures 1 to 4 Schematic side cross-sectional view of multiple lamps and windows shown in .

[0019] Fig.10 According to one or more embodiments, Fig. 9 Schematic top view of multiple lights and windows shown in .

[0020] Fig.11 According to one or more embodiments, Fig. 9 A schematic perspective view of the multiple lights and windows shown in FIG.

[0021] Fig.12 According to one or more embodiments, Fig.11 Schematic cross-sectional view of multiple lamps and windows shown in .

[0022] Fig.13 According to one or more embodiments, Figures 9 to 12 Schematic side cross-sectional view of multiple lamps and windows shown in .

[0023] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical components that are common to the figures. It is contemplated that components and features of one embodiment may be beneficially incorporated in other embodiments without further recitation. DETAILED DESCRIPTION

[0024] The present invention relates to heat sources (eg, lamps) and windows for use in processing chambers, and related methods.

[0025] It is contemplated that terms such as “couples,” “coupling,” “couple,” and “coupled” may include, but are not limited to, welding, fusion, melting together, interference fit, and / or fastening such as through the use of bolts, threaded connections, pins, and / or screws. It is contemplated that terms such as “couples,” “coupling,” “couple,” and “coupled” may include, but are not limited to, integrally formed. It is contemplated that terms such as “couples,” “coupling,” “couple,” and “coupled” may include, but are not limited to, direct coupling and / or indirect coupling, such as indirect coupling through a component such as a connecting rod.

[0026] Figure 1 1 is a schematic side cross-sectional view of a processing chamber 100 according to one or more embodiments. The processing chamber 100 is a deposition chamber. In one embodiment that can be combined with other embodiments, the processing chamber 100 is an epitaxial deposition chamber. The processing chamber 100 is used to grow an epitaxial thin film on a substrate 102. The processing chamber 100 generates a cross flow of precursors across a top surface 150 of the substrate 102.

[0027] The processing chamber 100 includes an upper body 156; a lower body 148 disposed below the upper body 156; and a flow module 112 disposed between the upper body 156 and the lower body 148. In one or more embodiments, the upper body 156 includes an upper clamping ring and the lower body 148 includes a lower clamping ring. The upper body 156, the flow module 112, and the lower body 148 form a chamber body. Disposed within the chamber body are a substrate support 106, an upper window 250 (such as an upper dome), a lower window 110 (such as a lower dome), a plurality of upper lamps 210, and a plurality of lower lamps 143. As shown, a controller 120 is in communication with the processing chamber 100 and is used to control the operation of the process and method, such as the method described herein. The substrate support 106 has a support surface 109 that supports the substrate 102.

[0028] The substrate support 106 is disposed between the upper window 250 and the lower window 110. The substrate support 106 includes a support surface 123 that supports the substrate 102. A plurality of upper lamps 210 are disposed between the upper window and the lid 154. The plurality of upper lamps 210 form a portion of an upper lamp module 155. The lid 154 may include a plurality of sensors (not shown) disposed therein for measuring the temperature within the processing chamber 100. In one or more embodiments, a reflective coating is formed on one or more inner surfaces 187, 188 of the lid 154. The reflective coating may be similar to or the same as one or more of the reflective coating 219 and / or the reflective coating of the reflective plate 280 described below. A plurality of lower lamps 143 are disposed between the lower window 110 and the base plate 152. The plurality of lower lamps 143 form a portion of a lower lamp module 145. The upper lamp 250 is an upper dome and is formed of an energy transmissive material (e.g., quartz). The lower lamp 110 is a lower dome and is formed of an energy transmissive material such as quartz.

[0029] The process space 136 and the purge space 138 are formed between the upper window 250 and the lower window 110. The process space 136 and the purge space 138 are a portion of an inner space at least partially defined by the upper window 250, the lower window 110, and one or more liners 163.

[0030] The interior space has a substrate support 106 disposed therein. The substrate support 106 includes a top surface on which the substrate 102 is disposed. The processing chamber includes a first support frame 198, and a second support frame 199 disposed at least partially around the first support frame 198. The second support frame 199 includes an arm coupled to the substrate support 106 so that lifting and lowering the second support frame 199 can lift and lower the substrate support 106. A plurality of lift pins 132 are suspended from the substrate support 106. Lowering of the substrate support 106 initiates contact of the lift pins 132 with the arms of the first support frame 198. Continued lowering of the substrate support 106 initiates contact of the lift pins 132 with the substrate 102 so that the lift pins 132 raise the substrate 102. A bottom region 205 of the chamber sides 201a, 201b is defined between the chamber body bottom 234 and the first and second pedestals 254a, 254b. The rod 118 (eg, axle) of each support frame 198 , 199 extends through the bottom of the lower body 148 .

[0031] The substrate support 106 is attached to the rod 118 of the second support frame 199 by an arm. The rod 118 of each support frame 198, 199 is connected to the motion assembly 121. The motion assembly 121 includes one or more actuators and / or adjustment devices that provide movement and / or adjustment of the support frames 198, 199 within the processing space 136. The substrate support 106 may include lift pin holes 107 disposed therein. The lift pin holes 107 are each sized to accommodate a respective one of the lift pins 132 for lifting the substrate 102 from the substrate support 106 before or after performing a deposition process. The lift pins 132 may rest on the lift pin stops 134 when the substrate support 106 is lowered from the process position to the transfer position. Figure 1 In the implementation shown in FIG. 1 , the lift pin 134 is part of an arm of the first support frame 198 .

[0032] The flow module 112 includes a plurality of gas inlets 114, a plurality of purge gas inlets 164, and one or more exhaust outlets 116. The plurality of gas inlets 114 and the plurality of purge gas inlets 164 are disposed on a side of the flow module 112 opposite to the one or more exhaust outlets 116. One or more flow guides 117a, 117b are disposed below the plurality of gas inlets 114 and the one or more exhaust outlets 116. One or more flow guides 117a, 117b are disposed above the purge gas inlet 164. One or more liners 163 are disposed on the inner surface of the flow module 112 and protect the flow module 112 from the reaction gas used during the deposition operation and / or the cleaning operation. The gas inlet 114 and the purge gas inlet 164 are each positioned so that the gas flows parallel to the top surface 150 of the substrate 102 disposed in the process space 136. The gas inlet 114 is fluidly connected to one or more process gas sources 151 and one or more cleaning gas sources 153. The purge gas inlet 164 is fluidly connected to one or more purge gas sources 162. The one or more exhaust outlets 116 are fluidly connected to the exhaust pump 157. The one or more process gases supplied using the one or more process gas sources 151 may include one or more reactive gases (such as one or more of silicon (Si), phosphorus (P) and / or germanium (Ge)) and / or one or more carrier gases (such as one or more of nitrogen (N2) and / or hydrogen (H2)). The one or more purge gases supplied using the one or more purge gas sources 162 may include one or more inert gases (such as one or more of argon (Ar), helium (He) and / or nitrogen (N2)). The one or more cleaning gases supplied using the one or more cleaning gas sources 153 may include one or more of hydrogen (H) and / or chlorine (Cl). In one embodiment that may be combined with other embodiments, the one or more process gases include silicon phosphide (SiP) and / or phosphine (PH3), and the one or more cleaning gases include hydrochloric acid (HCl).

[0033] The one or more exhaust outlets 116 are further connected to or include an exhaust system 178. The exhaust system 178 fluidly connects the one or more exhaust outlets 116 to the exhaust pump 157. The exhaust system 178 can help control the deposition of layers on the substrate 102. The exhaust system 178 is disposed on an opposite side of the processing chamber 100 relative to the flow module 112.

[0034] The controller 120 includes a central processing unit (CPU), a memory containing instructions, and support circuits for the CPU. The controller 120 controls various devices directly or through other computers and / or controllers. In one or more embodiments, the controller 120 is communicatively coupled to a dedicated controller, and the controller 120 serves as a central controller.

[0035] The controller 120 is any form of general purpose computer processor used in industrial environments to control various substrate processing chambers and equipment, and subprocessors thereon or therein. The memory or non-temporary computer readable medium is one or more readily available memories, such as random access memory (RAM), dynamic random access memory (DRAM), static random access memory (SRAM) and synchronous dynamic RAM (synchronous dynamic RAM) (e.g., DDR1, DDR2, DDR3, DDR3L, LPDDR3, DDR4, LPDDR4, etc.), read only memory (ROM), floppy disk, hard disk, flash drive, or any other form of local or remote digital storage. The support circuits of the controller 120 are coupled to the CPU to support the CPU (processor). The support circuits include cache memory, power supply, clock circuits, input / output circuits and subsystems, etc. The operating parameters (such as the heating power applied to each heat source (e.g., lamp), the pressure of the process gas, the process gas flow rate and / or the rotational position of the substrate support 106) and the operations are stored in the memory as software routines that are executed or called to transform the controller 120 into a dedicated controller to control the operations of the various chambers / modules described herein. The controller 120 is configured to perform any of the operations described herein. The instructions stored on the memory, when executed, cause one or more of the operations described herein to be performed.

[0036] The various operations described herein may be performed automatically using the controller 120 , or may be performed automatically or manually using certain operations performed by a user.

[0037] Figure 2 According to one or more embodiments, Figure 1 Schematic side cross-sectional view of a plurality of lamps 210 and a window 250 is shown in FIG.

[0038] Figure 3 According to one or more embodiments, Figure 2 Schematic top view of multiple lamps 210 and windows 250 shown in FIG.

[0039] Figure 4 According to one or more embodiments, Figure 2 An enlarged view of the plurality of lamps 210 and the window 250 is shown in FIG.

[0040] Each lamp 210 includes a bulb tube 211 extending along at least one section of an arcuate profile 215. In one or more embodiments, the arcuate profile 215 is a circular profile. In one or more embodiments, the bulb tube 211 is cylindrical. In one or more embodiments, the cross-section of the bulb tube 211 is arcuate (e.g., circular). It is contemplated that other shapes (e.g., rectangular) may be used for the cross-section of the bulb tube 211.

[0041] Each bulb tube 211 defines an arcuate central opening 212. Each lamp 210 includes a filament 213 located in the arcuate central opening 212, and the filament 213 extends along the segment of the arcuate profile. Each lamp 210 includes a reflective coating 219 formed on a first portion 216 of an outer surface of the bulb tube 211. The reflective coating 219 is formed on the first portion 216 so that a second portion 217 of the outer surface is uncoated. The reflective coating 219 has a reflectivity of 0.8 or higher. In one or more embodiments, the reflective coating 219 includes one or more of gold (Au), silver (Ag), aluminum oxide (Al2O3), and / or one or more other ceramics. Other materials are also contemplated for the reflective coating 219. For each lamp 210, the reflective coating 219 is formed on the first portion 216 at a coating angle A1 around the bulb tube 211. The coating angle A1 is at least 180 degrees. For at least one of the lamps 210, the coating angle A1 is at least 210 degrees, such as 240 degrees or higher. For the radially innermost lamp 210A, the coating angle A1 is about 180 degrees. For the radially outermost lamp 210B, the coating angle A1 is about 300 degrees. The further radially outwardly the lamp 210 is positioned, the greater the coating angle A1.

[0042] The reflective coating 219 facilitates directing light from the lamps 210 toward the substrate 102 being processed, thereby reducing light losses to other chamber components, thus aiding heating efficiency and reducing power consumption.

[0043] exist Figure 3 In the illustrated embodiment, seven radial positions (relative to the center of the window 250) are illustrated, each radial position having a respective arcuate profile 215. For each radial position, a plurality of bulb tubes 211 ( Figure 3 Each radial position in FIG. 2 shows two bulb tubes 211 arranged along respective arcuate profiles such that an angular gap 221 is defined between the ends of adjacent bulb tubes 211. Figure 3 Two angular gaps 221 are shown at each radial position in the embodiment. The angular gaps 221 at each radial position each have a gap angle GA1 less than 15 degrees. In one or more embodiments, the gap angle GA1 is 10 degrees or less. In one or more embodiments, the gap angles GA1 of the angular gaps 221 may be different from each other on the lamp 210. Other values ​​of the gap angle GA1 are contemplated in the present case.

[0044] The window 250 includes an outer portion 251 and an inner portion 252 disposed inside the outer portion 251. The inner portion 252 includes a first outer surface 253, a second outer surface 254 opposite to the first outer surface 253, and one or more grooves 255 formed in the first outer surface 253. Figures 2 to 4 In the embodiment of FIG. 1 , a plurality of grooves 255 (seven) are shown, and a groove 255 is formed at each of seven radial positions. Figures 2 to 4 In the implementation shown in , the plurality of grooves 255 are arranged in a concentric arrangement relative to each other. The lamps 210 are received in the grooves 255. Each lamp 210 of the plurality of lamps 210 is disposed in an arcuate portion 257 of a corresponding groove 255 of the plurality of grooves 255. Figures 2 to 4 In the embodiment shown in FIG. 1 , a plurality of lamps 210 are disposed in each recess 255 (in Figures 1 to 4 Two lamps 210 are shown in each groove 255 in the embodiment. The present invention contemplates that a different number of radial positions (e.g., eight or more, or six or less) may be used, one or more grooves 255 may be positioned at each radial position, and one or more lamps 210 may be positioned in each groove 255.

[0045] The inner portion 252 has a radial center 261 and a radial outer edge 262 that interfaces with the outer portion 251. Figure 2 and Figure 4 As shown in FIG. 2 , the first outer surface 253 has a gradient transitioning toward the second outer surface 254 in a direction D1 from the radial center 261 to the radial outer edge 262. In one or more embodiments, the inner portion 252 is transparent, and the outer portion 251 is opaque. The inner portion 252 is configured to pass 95% or more of infrared light, and the outer portion 251 is configured to absorb infrared light.

[0046] The bulb tube 211 of the lamp is transparent and is configured to pass 95% or more of infrared light. Each of the bulb tube 211, the inner portion 252, and / or the outer portion 251 may be formed of one or more of quartz (such as transparent quartz or opaque quartz), silicon carbide (SiC), and / or graphite coated with SiC and / or opaque quartz. In one or more embodiments, the inner portion 252 is formed of a transparent material (such as transparent quartz), and the outer portion 251 is formed of an opaque material (such as opaque quartz, SiC, and / or graphite coated with SiC and / or opaque quartz).

[0047] As described above, the window 250 and the lamp 210 may be disposed in a processing chamber such as Figure 1. When disposed in the processing chamber 100, the window 250 at least partially defines the processing space 136. The first outer surface 253 faces away from the support surface 109, while the second outer surface 254 faces the support surface 109. The lamp 210 is disposed in the groove 255 and supported by the inner portion 252 so that the distance DS1 between the lamp 210 and the support surface 109 has a gradient transitioning toward the support surface 109 in the direction D1 from the radial center 261 to the radial outer edge 262 of the inner portion 252. In one or more embodiments, for each lamp 210, the distance DS1 is less than 5.0 inches. The distance DS1 promotes more uniform heating, less power consumption, and less heating loss due to absorption of light by chamber components. In one or more embodiments, for the radially innermost lamp 210A, the distance DS1 is in the range of 2.0 inches to 3.0 inches, and for the radially outermost lamp 210B, the distance DS1 is about 2.0 inches. The further each lamp 210 is from the radial center 261 , the smaller the distance DS1 is, to promote center-to-edge substrate temperature uniformity and deposition uniformity.

[0048] In one or more embodiments, the inner portion 252 has a uniform thickness between the radial center 261 and the radial outer edge 262, except for the portion aligned with the groove 255. The uniform thickness facilitates reducing or eliminating the effects of thermal stresses during processing.

[0049] The reflective plate 280 may be located above the window 250. In one or more embodiments, the reflective plate 280 is part of the cover 154 or is positioned between the cover 154 and the window 250. In one or more embodiments, the reflective plate 280 is formed of aluminum (Al) and / or coated with a reflective coating having a reflectivity of 0.8 or more. In one or more embodiments, the reflective coating includes one or more of the following materials: gold (Au), silver (Ag), aluminum oxide (Al2O3), and / or one or more other ceramics. Other materials for the reflective coating of the reflective plate 280 are contemplated. It is contemplated that the reflective plate 280 may be omitted.

[0050] In one or more embodiments, the first power is applied to the innermost group of the one or more lamps 210 at the innermost radial position (e.g., closest to the radial center 261), and the second power is applied to the outermost group of the one or more lamps 210 at the outermost radial position (e.g., closest to the radial outer edge 262). The second power is higher than the first power. In one or more embodiments, the second power is a ratio of the first power, and the ratio is at least 1.5, such as about 2.0. In one or more embodiments, the first power is less than 1.3 kW, such as about 1.0 kW. In one or more embodiments, the second power is in the range of 1.8 kW to 2.2 kW, such as about 2.0 kW.

[0051] Figure 5 According to one or more embodiments, Figures 1 to 4 Schematic perspective view of the window 250 and multiple lights 510 shown in FIG.

[0052] Figure 6 According to one or more embodiments, Figure 5 Schematic top view of multiple lamps 510 and window 250 shown in FIG.

[0053] Light 510 is similar to Figures 1 to 4 , and includes one or more of the aspects, features, components, operations, and / or operations of lamp 210.

[0054] Each lamp 510 includes a first extension tube 523 disposed near a first end 526 of the bulb tube 511 and extending to intersect the bulb tube 511. Each lamp 510 includes a second extension tube 524 disposed adjacent a second end 527 of the bulb tube 511 and extending to intersect the bulb tube 511. Each lamp 510 includes a first electrical connector 528 coupled to the first extension tube 523, and a second electrical connector 529 coupled to the second extension tube 524. The first electrical connector 528 is configured to couple to a power line 531, and the second electrical connector 529 is configured to couple to a ground line 532. In one or more embodiments, the bulb tube 511 is cylindrical. In one or more embodiments, the cross-section of the bulb tube 511 is arcuate (e.g., circular). It is contemplated that other shapes (e.g., rectangular) may be used for the cross-section of the bulb tube 511.

[0055] exist Figure 6 In the implementation shown in FIG. 1 , the bulb tube 511 extends along at least a portion of a segment of the arcuate profile 215 at each radial position to define an angular gap 521 between a first end 526 and a second end 527 of the bulb tube 511. The angular gap 521 at each radial position has a gap angle GA2 of less than 45 degrees.

[0056] exist Figure 5 and Figure 6 In the implementation shown in FIG. 5 , a single lamp 510 is positioned in each recess 255 of the window 250 .

[0057] Figure 7 is a schematic perspective view of a window 750 and a plurality of lamps 710 according to one or more embodiments.

[0058] Figure 8 According to one or more embodiments, Figure 7 Schematic top view of multiple lamps 710 and windows 750 shown in FIG.

[0059] Lamp 710 is similar to Figures 1 to 6210, 510 shown in FIG. 210, 510, and includes one or more of the aspects, features, components, operations, and / or operations of the lamps 210, 510. The window 750 is similar to Figures 1 to 6 , and includes one or more of the aspects, features, components, operations, and / or operations of window 250 .

[0060] The window 750 includes a plurality of recesses 755. The recesses 755 and the lamps 710 disposed therein are disposed in a spaced arrangement relative to one another. The spaced arrangement is non-concentric so that the inner diameter and outer diameter of each bulb tube 711 are not within or overlap the inner diameter or outer diameter of any adjacent bulb tube 711. The spaced arrangement is non-concentric so that the inner diameter and outer diameter of each recess 755 are not within or overlap the inner diameter or outer diameter of any adjacent recess 755. In one or more embodiments, the bulb tube 711 is cylindrical. In one or more embodiments, the cross-section of the bulb tube 711 is arcuate (e.g., circular). It is contemplated that other shapes (e.g., rectangular) may be used for the cross-section of the bulb tube 711.

[0061] exist Figure 7 and Figure 8 In the implementation shown in , three radial positions are illustrated. With the exception of the central lamp 710a and central recess 755a, the geometric center 726 of each recess 755 and lamp 710 is aligned with the arcuate profile 215 of one of the radial positions.

[0062] Fig. 9 According to one or more embodiments, Figures 1 to 4 950 and a schematic side cross-sectional view of a plurality of lamps 210 and a window 950 are shown in FIG. The window 950 is similar to Figures 1 to 6 , and includes one or more of the aspects, features, components, operations, and / or operations of window 250 .

[0063] Fig.10 According to one or more embodiments, Fig. 9 Schematic top view of multiple lamps 210 and window 950 shown in FIG.

[0064] Fig.11 According to one or more embodiments, Fig. 9 Schematic perspective view of multiple lamps 210 and window 950 shown in FIG.

[0065] Fig.12 According to one or more embodiments, Fig.11 Schematic cross-sectional view of multiple lamps 210 and window 950 shown in FIG.

[0066] The window 950 includes a plurality of grooves 955, and each groove 955 includes an arcuate portion 257 and a rectangular portion 958 between the arcuate portion 257 and the first outer surface 253, so that the arcuate portion 257 is recessed from the first outer surface 253a at a distance from the first outer surface 253a. The window 950 includes a second outer surface 954, on which a plurality of protrusions 959 (such as ridges) are formed. A corner 956 transitions the first outer surface 253 to each rectangular portion 958. It is contemplated that the corner 956 may be tapered (e.g., chamfered) or rounded. Each groove 955 is formed at a groove depth DE1. The bulb tube 211 of each lamp 210 has an outer diameter OD1, and the groove depth DE1 is equal to or greater than the outer diameter OD1. In one or more examples, the outer diameter OD1 is approximately 13 mm, and the groove depth DE1 is equal to or greater than 13 mm.

[0067] Fig.13 According to one or more embodiments, Figures 9 to 12 13 is a schematic side cross-sectional view of a plurality of lamps 210 and a window 1350 as shown in FIG. The window 1350 is similar to Figures 1 to 6 , and includes one or more of the aspects, features, components, operations, and / or operations of window 250 .

[0068] The inner portion 1352 of the window 1350 is suspended relative to the upper surface 271 of the outer portion 251 so that the inner portion 1352 is aligned between the upper surface 271 and the lower surface 272 of the outer portion 251. In one or more embodiments, the lowermost end of the inner portion 1352 is suspended below the upper surface 271 of the outer portion 251 by a distance D1 of about 0.5 inches.

[0069] The window 1350 includes a single groove 1355. The single groove 1355 is a groove around the radial center 261 of the inner portion 252. The single groove 1355 defines a concave surface 1356 having a gradient transitioning toward the second outer surface 1354 of the window 1350 in the direction D1 from the radial center 261 to the radial outer edge 262. The concave surface 1356 is a portion of the first outer surface 1353 of the window 1350.

[0070] A plurality of lamps 210 are received in a single recess 1355 , and each lamp 210 of the plurality of lamps rests on a recessed surface 1356 .

[0071] Benefits of the present invention include improved thermal (e.g., heating) efficiency and reduced power consumption (e.g., power used for heating) in a manner that increases yield and throughput, and in a manner that promotes reduced or mitigated degradation of chamber components (e.g., seals). For example, using the lamp modules described herein (e.g., the upper lamp module including lamp 210), it is believed that higher processing temperatures can be achieved at lower (e.g., less than half, such as about 25%) lamp input powers than other operations. For example, when using lower lamp input powers, a larger portion of the processing volume 136 that may otherwise be at 600 to 800 degrees Celsius can be at a higher processing temperature of 1000 degrees Celsius or higher (e.g., about 1200 degrees Celsius). In addition, for example, portions of the substrate 102 (e.g., the exterior of the substrate 102) can be heated to a higher temperature (e.g., at 1000 degrees Celsius or higher), thus promoting deposition uniformity and high growth rates. For another example, a portion of the substrate support 106 that is aligned below the exterior of the substrate 102 can be heated to a higher temperature (e.g., 1400 degrees Celsius or higher).

[0072] Benefits also include enhanced temperature uniformity and deposition uniformity (e.g., uniformity from center to edge of substrate), enhanced component performance, product life, simpler components and / or reduced number of components, reduced component cost, reduced chamber cost, and reduced operating cost. For example, the lamps described herein facilitate increased lamp life. For another example, the windows and lamps described herein facilitate reduced heat loss (e.g., to chamber components), and an increased percentage of the heat generated is absorbed by the substrate being processed rather than other components.

[0073] It is contemplated that aspects described herein may be combined. For example, one or more features, aspects, components, operations, and / or characteristics of the processing chamber 100, window 250, lamp 210, lamp 510, window 750, lamp 710, window 950, and / or window 1350 may be combined. It is further contemplated that any combination may achieve the benefits described above.

[0074] Although the foregoing is directed to various embodiments of the present invention, other and further embodiments of the present invention may be designed without departing from the basic scope of the present invention, and the scope of the present invention is determined by the following claims.

Claims

1. A lamp suitable for semiconductor manufacturing, comprising: a bulb tube extending along at least a section of the arcuate profile, said bulb tube defining an arcuate central opening; a filament positioned in the arcuate central opening, the filament extending along at least the segment of the arcuate profile; and A reflective coating is formed on a first portion of the outer surface of the bulb tube. 2 . The lamp of claim 1 , wherein the reflective coating is formed on the first portion such that a second portion of the outer surface is uncoated.

3. The lamp of claim 2, wherein the reflective coating comprises one or more of the following materials: gold (Au), silver, aluminum oxide, and / or one or more other ceramics.

4. The lamp of claim 2, wherein the reflective coating is formed on the first portion at a coating angle around the bulb tube, and the coating angle is at least 180 degrees.

5. The lamp of claim 4, wherein the coating angle is at least 210 degrees.

6. The lamp of claim 1, wherein the bulb tube extends along at least the segment of the arcuate profile to define an angular gap between the first and second ends of the bulb tube. The lamp of claim 6 , wherein the angular gap has a gap angle less than 45 degrees.

8. The lamp of claim 6, further comprising: a first extension tube disposed adjacent the first end and extending to intersect the bulb tube; a second extension tube disposed adjacent the second end and extending to intersect the bulb tube; A first electrical connector coupled to the first extension tube, the first electrical connector being configured to be coupled to a power line; as well as The second electrical connector is coupled to the second extension tube, and the second electrical connector is configured to couple to a ground wire.

9. A window suitable for semiconductor manufacturing, comprising: External parts; and An inner portion, disposed inside the outer portion, the inner portion comprising: The first outer surface, a second outer surface opposite to the first outer surface, and One or more grooves are formed in the first outer surface.

10. The window of claim 9, wherein the one or more grooves comprises a plurality of grooves disposed in a concentric arrangement relative to one another.

11. The window of claim 10, further comprising a plurality of lamps received in the plurality of grooves, wherein each lamp of the plurality of lamps is disposed in an arcuate portion of a corresponding groove of the plurality of grooves.

12. The window of claim 11, wherein the plurality of lights are disposed in each recess of the one or more recesses.

13. The window of claim 11, wherein each respective groove of the plurality of grooves further includes a rectangular portion between the arcuate portion and the first exterior surface such that the arcuate portion is recessed from the first exterior surface.

14. The window of claim 10, wherein the inner portion has a radial center and a radial outer edge interfaced with the outer portion, and the first outer surface has a gradient transitioning toward the second outer surface in a direction from the radial center to the radial outer edge.

15. The window of claim 14, wherein the inner portion is transparent and the outer portion is opaque.

16. The window of claim 9, wherein the one or more grooves comprises a plurality of grooves disposed in a spaced-apart arrangement relative to one another.

17. The window of claim 16, further comprising a plurality of lamps received in the one or more grooves, wherein each lamp of the plurality of lamps is disposed in an arcuate portion of a corresponding groove of the plurality of grooves.

18. A window according to claim 9, wherein the one or more grooves include a single groove, the inner portion having a radial center and a radial outer edge interfaced with the outer portion, and the single groove defines a concave surface having a gradient transitioning toward the second outer surface in a direction from the radial center to the radial outer edge.

19. The window of claim 18, wherein the window further comprises a plurality of lamps received in the single recess, wherein each lamp of the plurality of lamps rests on the recessed surface.

20. A processing chamber suitable for semiconductor manufacturing, comprising: Internal space; a substrate support disposed in the interior space, the substrate support comprising a support surface; A window at least partially defining a processing space of the interior space, the window comprising: External part, an inner portion disposed within the outer portion and having a radial center and a radial outer edge interfacing with the outer portion, the inner portion comprising: a first outer surface, facing away from the support surface, a second outer surface, opposite to the first outer surface, the second outer surface facing the support surface, and one or more grooves formed in the first outer surface; and A plurality of lamps are received in the one or more grooves of the window and supported by the inner portion so that the distance between the lamps and the supporting surface has a gradient transitioning toward the supporting surface in a direction from the radial center to the radial outer edge.

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