A manipulator end effector and a robotic arm

Abstract

The present invention discloses an end effector of a manipulator and a robotic arm, comprising: a finger part, including a finger body extending along its own length direction, having a proximal end and a distal end; a first clamping member fixedly connected to the distal end of the finger body, the first clamping member being provided with a first limiting card slot, including an inclined transition surface and a first constraint surface continuously extending therewith; a second clamping member translatably arranged at the proximal end of the finger body, the second clamping member being provided with a second limiting card slot, the second limiting card slot including a guiding slope surface and a second constraint surface continuously extending therewith, the first constraint surface and the second constraint surface forming a dynamic clamping space for constraining the edge of a wafer; a linear driving member having an output end capable of linear displacement, the output end being connected to the second clamping member. By adopting the above solution, it is used to synchronously adjust the level of the wafer during the clamping process of the wafer, and at the same time reduce the damage to the edge of the wafer.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer transfer equipment, and particularly to an end effector of a manipulator and a robotic arm. Background Art

[0002] In the field of semiconductor manufacturing, the application of robotic arms in semiconductor manufacturing needs to meet various requirements. On the one hand, the robotic arm needs to transfer wafers at high speed and with high precision in an ultra-clean environment, and its design and implementation involve a high degree of coordination in multiple fields such as machinery, materials, control, and clean environment compatibility, with extremely high technical difficulty. On the other hand, the structural design of the robotic arm needs to consider factors such as lightweight, multi-degree-of-freedom configuration, and the selection of the end effector to achieve high-precision positioning, anti-pollution control, and efficient production.

[0003] The end effector of the robotic arm, as the core component for wafer transfer, its clamping accuracy directly affects the yield of wafer processing. Traditional end effectors mostly adopt a rigid clamping structure, and the wafer is grasped by fixed jaws or vacuum suction cups. However, such structures can only provide a binding force in a single direction during the clamping process. When the wafer has a micron-level tilt due to residual stress from the previous process or the inertial movement of the robotic arm, the clamping force will be concentrated in a local area at the edge of the wafer, resulting in stress concentration. Especially for wafers with extremely thin thickness, the brittle area at the edge is extremely prone to microcracks under the non-uniform stress state, causing irreversible lattice damage. To address the above problems, existing technologies have tried to improve the clamping uniformity by adding an elastic buffer layer or adopting a multi-degree-of-freedom floating mechanism. However, such solutions have significant drawbacks: the elastic material is prone to creep after long-term high-frequency use, resulting in a decrease in the clamping force; while the floating mechanism can passively adapt to the wafer posture, but it cannot actively correct the flatness deviation of the wafer.

[0004] Therefore, it is necessary to provide an end effector of a manipulator and a robotic arm to solve the above problems existing in the prior art. Summary of the Invention

[0005] The purpose of the present invention is to provide an end effector of a manipulator and a robotic arm, which can synchronously adjust the flatness of the wafer during the clamping process of the wafer, and at the same time reduce the damage to the edge of the wafer.

[0006] To achieve the above purpose, the technical solution of the present invention is as follows:

[0007] In the first aspect, an end effector of a manipulator includes:

[0008] A finger part, including a finger body extending along its own length direction, having a proximal end and a distal end;

[0009] The first clamping member is fixedly connected to the distal end of the finger body. A first limiting slot is formed in the side wall of the first clamping member facing the central direction of the finger body. The first limiting slot includes an inclined transition surface and a first constraining surface continuously extending therefrom;

[0010] The second clamping member is arranged translatably at the proximal end of the finger body. A second limiting slot opposite to the first limiting slot is formed in the side wall of the second clamping member facing the central direction of the finger body. The second limiting slot includes a guiding slope surface and a second constraining surface continuously extending therefrom. The first constraining surface and the second constraining surface are opposite to each other in the horizontal direction and form a dynamic clamping space for constraining the edge of the wafer;

[0011] The linear driving member has an output end capable of linear displacement, and the output end is connected to the second clamping member;

[0012] Wherein, when the output end of the linear driving member drives the second clamping member to linearly displace towards the direction close to the first clamping member and changes the range of the clamping space, the inclined transition surface and the guiding slope surface approach each other and correct the flatness of the wafer located in the clamping space.

[0013] The beneficial effect of a manipulator end effector provided by the present invention lies in that: through the above structural design, high-precision clamping and leveling of the wafer are realized. The first clamping member and the second clamping member of the finger part are respectively provided with opposite first limiting slots and second limiting slots to form a variable clamping space. The linear driving member drives the second clamping member to move, changing the size of the clamping space, so that the flatness of the wafer can be actively adjusted when clamping the wafer, realizing the leveling of the wafer. This active leveling mechanism effectively solves the problem of wafer edge damage caused by concentrated clamping force in the traditional end effector, is especially suitable for the transmission of ultra-thin wafers, reduces the risk of microcracks generated by non-uniform stress on the wafer, and significantly improves the yield of wafer processing.

[0014] Further, the first clamping member includes at least two clamping blocks fixedly connected to the finger body, and the second clamping member includes at least two top blocks fixedly connected to the linear driving member. The clamping blocks and the top blocks enclose the clamping space.

[0015] Further, the widths of the first limiting slot and the second limiting slot gradually increase as they are away from the bottom of their own slots.

[0016] Further, the clamping block includes an integrally formed carrier and a shielding body. The first limiting slot is formed in the shielding body. The carrier has a leveling plane adjacent to the first constraining surface. The inclined transition surface, the first constraining surface and the leveling plane enclose the first limiting slot.

[0017] Further, the top block includes an integrally formed arc portion and a plugging portion. The second limiting card slot is formed along the outer contour of the arc portion, and the outer contour of the arc portion is semi-elliptical.

[0018] Further, the guiding slope surface extends gradually outward from the edge of the second constraint surface, and the guiding slope surfaces are symmetrically distributed on both sides of the second constraint surface.

[0019] Further, it further includes a wrist portion and a connecting portion connected to the wrist portion. The connecting portion includes a connecting housing, and the connecting housing includes a push rod main body, a widened clamping body, and an adapting portion. The push rod main body is fixedly connected to the linear driving member, the widened clamping body is fixedly connected to the push rod main body, the adapting portions are located at both ends of the widened clamping body, a sinking groove is formed in the plugging portion, the adapting portion is clamped in the sinking groove and fixedly connected to the plugging portion, and the width of the widened clamping body is not less than the distance between adjacent clamping blocks.

[0020] Further, the wrist portion includes a mounting housing, a first pulley and a second pulley arranged in the wrist housing, as well as a turning shaft, a servo motor and a synchronous belt. The turning shaft is fixedly connected to the connecting portion, the first pulley and the second pulley are connected by the synchronous belt, the first pulley is coaxially and fixedly connected to the turning shaft, and the second pulley is coaxially and fixedly connected to the servo motor.

[0021] Further, a first bearing and a second bearing are also arranged in the mounting housing. A bearing seat is fixedly connected to the mounting housing. The first bearing and the second bearing are sleeved on the turning shaft. The inner rings of the first bearing and the second bearing are in contact with the turning shaft, and the outer rings of the first bearing and the second bearing are in contact with the mounting housing. The turning shaft includes an annular protrusion, and the annular protrusion is clamped between the first bearing and the second bearing.

[0022] Further, the wrist portion further includes a tension adjusting assembly, and the tension adjusting assembly includes:

[0023] A motor seat, fixedly connected to the mounting housing;

[0024] An adjusting block, arranged on the motor seat, and a threaded hole is formed along the length direction of the synchronous belt;

[0025] An adjusting screw, in threaded cooperation with the threaded hole, and its end extends through the side wall of the mounting housing to the outside;

[0026] The motor base is provided with a strip-shaped hole, and the installation shell is provided with a fixing hole at the corresponding position. The vertical projection of the fixing hole is within the range of the strip-shaped hole. Among them, the adjusting screw adjusts the synchronous belt tension by screwing into the depth of the threaded hole.

[0027] In a second aspect, a robotic arm includes the above-mentioned end effector of a manipulator, having a shoulder joint axis, an elbow joint axis, and a wrist joint axis, and further includes: an upper arm rotatable around the shoulder joint axis, a forearm rotatably connected to the upper arm around the elbow joint axis, and the end effector is connected to the forearm around the wrist joint axis. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is an overall cross-sectional view of an end effector of a manipulator according to an embodiment of the present invention;

[0029] Figure 2 It is a schematic structural diagram of a finger part and a connecting part according to an embodiment of the present invention;

[0030] Figure 3 It is a schematic structural diagram of a wrist according to an embodiment of the present invention;

[0031] Figure 4 It is a schematic structural diagram of a motor base according to an embodiment of the present invention;

[0032] Figure 5 It is an overall cross-sectional view of the wrist according to an embodiment of the present invention;

[0033] Figure 6 It is a schematic diagram of the state where a wafer is clamped according to an embodiment of the present invention;

[0034] Figure 7 It is a schematic structural diagram of an installation shell according to an embodiment of the present invention;

[0035] Figure 8 It is a schematic structural diagram of a top block according to an embodiment of the present invention;

[0036] Figure 9 It is a schematic structural diagram of a clamping block according to an embodiment of the present invention;

[0037] Figure 10 It is a schematic overall structural diagram of the robotic arm according to the present invention.

[0038] Reference numerals: 1, wrist; 11, mounting housing; 12, first pulley; 13, second pulley; 14, turning shaft; 141, annular protrusion; 15, servo motor; 16, synchronous belt; 17, first bearing; 18, second bearing; 19, bearing seat; 101, motor seat; 1011, strip hole; 102, adjusting block; 103, adjusting screw; 2, connecting portion; 21, connecting housing; 22, widened clamping body; 23, adapting portion; 24, top block; 241, second limit card slot; 242, arc portion; 2421, guiding slope surface; 2422, second constraint surface; 243, plugging portion; 2431, sinking groove; 2432, trapezoidal groove; 25, linear driving member; 251, guide rail; 252, slider; 253, power source; 3, finger portion; 31, clamping block; 311, first limit card slot; 312, carrier; 313, shielding body; 3131, inclined transition surface; 3132, first constraint surface; 32, finger body; 33, stop block; 4, upper arm; 5, forearm; 6, wafer. Detailed implementation manners

[0039] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the art in the field to which the present invention belongs. The words such as "including" used herein mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0040] The following combines the attached Figure 1 -attached Figure 10 , and makes a further detailed description of the specific implementation manners of the present invention.

[0041] Referring to Figures 1-9 , in a first aspect, in some embodiments of the present invention, an end effector of a manipulator includes a wrist 1 connected to a robotic arm, a connecting portion 2 connected to the wrist 1, and a finger portion 3 provided on the connecting portion 2.

[0042] Referring to Figure 2, the finger part 3 includes a finger body 32 fixedly connected to the connecting part 2 and a first clamping member fixed to the front end of the finger body 32. The finger body 32 extends along its own length direction and has a proximal end and a distal end. The first clamping member is fixedly connected to the distal end of the finger body 32. A first limit card slot 311 is formed in the side wall of the first clamping member facing the center direction of the finger body 32. The first limit card slot 311 includes an inclined transition surface 3131 and a first constraint surface 3132 continuously extending therefrom. Among them, the first constraint surface 3132 is an upright surface and perpendicular to the surface of the wafer 6.

[0043] The connecting part 2 includes a connecting housing 21, a linear driving member 25 provided on the connecting housing 21, and a second clamping member. The second clamping member is controllably and translationally arranged at the proximal end of the finger body 32. A second limit card slot 241 opposite to the first limit card slot 311 is formed in the side wall of the second clamping member facing the center direction of the finger body 32. The second limit card slot 241 includes a guiding slope surface 2421 and a second constraint surface 2422 continuously extending therefrom. Among them, the second constraint surface 2422 is an upright surface and perpendicular to the surface of the wafer 6. The first constraint surface 3132 and the second constraint surface 2422 are opposite to each other in the horizontal direction and form a dynamic clamping space for constraining the edge of the wafer 6. The linear driving member 25 has an output end capable of linear displacement, and the output end is connected to the second clamping member. When the linear driving member 25 is used to drive the second clamping member to linearly move towards the first clamping member to change the clamping space, the first clamping member and the second clamping member can level the wafer 6 in the clamping space (in combination with Figure 6 ).

[0044] Specifically, when the output end of the linear driving member 25 drives the second clamping member to linearly displace towards the first clamping member and changes the clamping space range, the inclined transition surface 3131 and the guiding slope surface 2421 approach each other simultaneously. At this time, the inclined transition surface 3131 and the guiding slope surface 2421 can decompose the linear driving force of the linear driving member 25 on the wafer 6 during the movement into a normal clamping force for restricting the radial displacement of the wafer 6 and a tangential leveling force for correcting the flatness of the wafer 6.

[0045] In some embodiments of the present invention, the first clamping member includes at least two clamping blocks 31 fixedly connected to the finger body 32, and the second clamping member includes at least two top blocks 24 fixedly connected to the linear driving member 25. By providing at least two clamping blocks 31, at least two clamping blocks 31 and at least two top blocks 24 enclose a clamping space and achieve uniform distribution of clamping forces at multiple clamping points, significantly improving the clamping stability, effectively preventing the wafer from sliding due to uneven stress, increasing the contact area of clamping at the same time, reducing local stress concentration, and reducing the risk of wafer edge damage. In addition, at least two clamping blocks 31 also enhance the adaptability to wafers of different sizes and shapes, improving the clamping flexibility.

[0046] In some specific embodiments of the present invention, the finger body 32 has a U-shaped structure, and two stoppers 33 are provided at the tail end of the finger body 32. The first clamping member includes two clamping blocks 31 oppositely arranged and fixedly connected to the front end of the finger body 32, and a pre-clamping area for the wafer 6 is formed between the first clamping member and the stopper 33.

[0047] Refer to Figure 7 , in some embodiments of the present invention, the second clamping member includes two top blocks 24 fixedly connected to the linear driving member 25. The widths of the first limiting card slot 311 and the second limiting card slot 241 gradually increase as they are away from their own slot bottoms. A wedge-shaped fit is formed between the guiding inclined surface formed by the slot wall and the wafer edge. During the clamping process, the wafer is automatically guided into the predetermined position, and at the same time, the clamping force is decomposed into a horizontal binding force and a vertical leveling force, effectively correcting the wafer tilt; the gradually expanding structure increases the contact area, reduces the local pressure, and avoids wafer edge stress concentration; in addition, the flared design can accommodate the wafer size tolerance and the positioning error of the robotic arm, improving the clamping fault tolerance and ensuring stable clamping under different working conditions.

[0048] Refer to Figure 9 , in some embodiments of the present invention, the clamping block 31 includes a carrier 312 and a shielding body 313 fixedly connected. The first limiting card slot 311 is opened on the shielding body 313. The carrier 312 has a leveling plane adjacent to the first constraint surface 3132. The inclined transition surface 3131, the first constraint surface 3132 and the leveling plane enclose the first limiting card slot 311. The inclined transition surface 3131 of the shielding body 313 guides the sliding of the wafer edge during the clamping process, gradually correcting the inclined wafer to the leveling plane of the carrier 312; the leveling plane forms a large-area contact support with the wafer, dispersing local stress. At the same time, it prevents the wafer 6 from falling off during the flipping and conveying processes.

[0049] Refer to Figure 7 and Figure 8In some embodiments of the present invention, the top block 24 includes an arc portion 242 and a plug-in portion 243 that are fixedly connected, and the second limit slot 241 is opened along the outer contour of the arc portion 242, and the outer contour of the arc portion 242 is semi-elliptical. The curvature design of the arc portion 242 of the top block 24 enables it to automatically adapt to the change of wafer diameter through continuous tangent point contact between the arc surface and the edge of the wafer when contacting wafers of different sizes, reducing dependence on specific sizes; when the top block 24 is clamped horizontally, the direction of the normal force at the contact point tends to be consistent with the arc tangent, and the clamping force is mainly converted into a horizontal constraint component, effectively reducing the vertical force component, avoiding the wafer from generating vertical displacement or overturning moment during the clamping process, thereby ensuring clamping stability and wafer positioning accuracy. In some specific embodiments of the present invention, the plug-in portion 243 is provided with a trapezoidal groove 2432, and the shape of the plug-in portion 243 is adapted to the trapezoidal groove 2432 for easy plugging.

[0050] In some embodiments of the present invention, the guide slope surface 2421 gradually extends outward from the edge of the second constraint surface 2422 , and the guide slope surfaces 2421 are symmetrically distributed on both sides of the second constraint surface 2422 .

[0051] Reference Figures 3-5 In some embodiments of the present invention, the housing of the connecting part 2 includes a push rod body, a widened clamping body 22 and an adaptor 23. The push rod body is fixedly connected to the linear drive member 25, the widened clamping body 22 is fixedly connected to the push rod body, and the adaptor 23 is located at the widened clamping body. The width of the widened clamping body 22 is not less than the distance between adjacent clamping blocks 31, and the widened clamping body 22 is convenient for adapting to the clamping of larger wafers. 22, the plug-in part 243 is provided with a sinking groove 2431, and the adaptor 23 is clamped in the sinking groove 2431 and fixedly connected to the plug-in part 243. Specifically, the push rod body, the widened clamping body 22 and the adaptor 23 are integrally formed. Specifically, the plug-in part 243 is provided with a fixing screw hole, and the adaptor 23 is fixed by screws after being clamped with the plug-in part 243. The widened clamping body 22 is Y-shaped, which is used to increase the size range and stability of the clamped wafer. The wrist 1 includes an installation shell 11, a first pulley 12 and a second pulley 13 arranged in the shell of the wrist 1, a flip shaft 14, a servo motor 15 and a synchronous belt 16. The flip shaft 14 is fixedly connected to the right end of the connecting part 2, the first pulley 12 and the second pulley 13 are connected through the synchronous belt 16, the first pulley 12 is coaxially fixedly connected to the flip shaft 14, and the second pulley 13 is coaxially fixedly connected with the servo motor 15.

[0052] Specifically, the principle of wafer 6 flipping: The output shaft of the servo motor 15 is rigidly connected to the second pulley 13 through a coupling, driving the second pulley 13 to rotate; the second pulley 13 transmits power to the first pulley 12 through the synchronous belt 16; the first pulley 12 and the flip shaft 14 are coaxially driven by a keyway fit to transmit the rotational motion to the flip shaft 14; both ends of the flip shaft 14 form a rotary pair with the mounting housing 11 through bearings; when the flip shaft 14 rotates, it drives the connecting portion 2 and the finger portion 3 rigidly connected thereto to make a flipping motion around the axis of the flip shaft 14, realizing the active adjustment of the wafer clamping posture.

[0053] A first bearing 17 and a second bearing 18 are further arranged in the mounting housing 11, and both the first bearing 17 and the second bearing 18 have an inner ring and an outer ring. The first bearing 17 and the second bearing 18 are sleeved on the flip shaft 14, the inner rings of the first bearing 17 and the second bearing 18 are in contact with the flip shaft 14, the outer rings of the first bearing 17 and the second bearing 18 are in contact with the mounting housing 11, and the annular protrusion 141 is clamped between the inner rings of the first bearing 17 and the second bearing 18. The annular protrusion 141 forms a mechanical limit constraint by axially clamping between the inner rings of the two bearings, which not only restricts the axial movement of the flip shaft 14, but also generates a pre-tightening force through the interference fit between the protrusion and the inner ring end face, so that the inner ring of the bearing is closely attached to the flip shaft 14 to prevent relative sliding between the inner ring and the shaft when the shaft rotates; at the same time, the two bearings are symmetrically distributed on both sides of the protrusion, evenly distributing the flipping torque to the two bearings, avoiding excessive unilateral load, and improving the structural rigidity and motion stability.

[0054] In some embodiments of the present invention, the tension adjustment assembly includes a motor base 101, an adjustment block 102, and an adjustment screw 103. The motor base 101 is fixedly connected to the mounting housing 11 by bolts. The adjustment block 102 is disposed on the upper surface of the motor base 101 and is provided with a threaded hole penetrating along the length direction of the synchronous belt 16. The adjustment screw 103 is in threaded engagement with the threaded hole, and its end extends to the outside through a reserved through hole on the side wall of the mounting housing 11. The motor base 101 is provided with a strip-shaped hole 1011 along the adjustment direction, and a fixing hole is provided at the corresponding position of the mounting housing 11. The vertical projection of the fixing hole is located within the range of the strip-shaped hole 1011. The final positioning of the motor base 101 is achieved by passing a bolt through the strip-shaped hole 1011 and the fixing hole. Specifically, the adjustment block 102 is fixed on the upper surface of the motor base 101 by a countersunk head screw, and the axis of its threaded hole is consistent with the tensioning direction of the synchronous belt 16; the adjustment screw 103 is screwed into the threaded hole of the adjustment block 102, and its end abuts against the inner surface of the side wall of the mounting housing 11; specifically, the adjustment screw 103 is an internal hexagonal socket head cap screw. In the initial state of the motor base 101 and the mounting housing 11, the bolt passes through the strip-shaped hole 1011 of the motor base 101 and the fixing hole of the mounting housing 11 for pre-tightening, leaving an axial adjustment margin; when the adjustment screw 103 is rotated, the end of the screw pushes the side wall of the mounting housing 11, forcing the motor base 101 to move slightly along the limiting direction of the strip-shaped hole 1011, changing the pulley spacing to adjust the tension of the synchronous belt 16. After the adjustment is completed, the bolt is tightened to fix the position of the motor base 101.

[0055] Specifically, when the exposed adjustment screw 103 is rotated, the screw feeds axially along the threaded hole, and its end pushes against the side wall of the mounting housing 11. The reaction force drives the motor base 101 to carry the second pulley 13 to move along the direction defined by the strip-shaped hole 1011, thereby increasing or decreasing the center distance between the two pulleys; since the length of the synchronous belt 16 is fixed, the tension is adjusted as the center distance changes. The matching design of the strip-shaped hole 1011 and the fixing hole allows the motor base 101 to translate within a certain range, realizing fine tension adjustment. The stepless adjustment of the tension of the synchronous belt 16 is achieved through a pure mechanical structure, avoiding the elastic attenuation problem of traditional spring tensioners. And after the adjustment is completed, it is rigidly locked by bolts, eliminating the tension fluctuation caused by vibration during operation. In addition, the limit of the strip-shaped hole 1011 ensures that the adjustment direction is strictly consistent with the tensioning direction of the synchronous belt 16, preventing belt deviation caused by pulley skew.

[0056] The core effect of a manipulator end effector provided by the present invention is that the clamping block 31 and the top block 24 form a wedge-shaped guiding structure, which constrains the edge of the wafer to the bottom of the first limit slot 311 and the second limit slot 241 during the clamping process; at the same time, the arc contact surface matches the curvature of the wafer, so that the normal clamping force acts along the tangent direction, significantly reducing the vertical force component. In addition, the shielding part can also prevent the wafer from escaping from the clamping space due to inertia when the wafer is flipped at high speed through the dual effects of surface contact friction and axial constraint when the wafer is flipped at high speed. Thereby completely eliminating the problem of wafer 6 falling off during high-speed flipping or due to vibration or inertia. In addition, through the guiding slope surface, adjustment plane and inclined transition surface of the clamping block 31 and the top block 24, the clamping process is changed into a gradual process, in which the wafer can be gradually clamped and tightened, and the wafer 6 can be gradually leveled to avoid the edge of the wafer 6 from cracking. In summary, the solution of the present invention can achieve integrated control of clamping, leveling, damage prevention and anti-slippage of the wafer 6.

[0057] Second, refer to Figure 10 A robotic arm includes the above-mentioned robotic end effector, having a shoulder joint axis, an elbow joint axis and a wrist joint axis, and also includes: an upper arm 4 rotatable around the shoulder joint axis, a forearm 5 rotatably connected to the upper arm 4 around the elbow joint axis, and the end effector is connected to the forearm 5 around the wrist 1 joint axis.

[0058] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A manipulator end effector, characterized in that, Comprising: A finger part (3), including a finger body (32) extending along its own length direction, having a proximal end and a distal end; A first clamping member, fixedly connected to the distal end of the finger body (32). A first limiting slot (311) is formed in the side wall of the first clamping member facing the central direction of the finger body (32). The first limiting slot (311) includes an inclined transition surface (3131) and a first constraint surface (3132) continuously extending therewith. The first clamping member includes at least two clamping blocks (31) fixedly connected to the finger body (32). The clamping block (31) includes an integrally formed carrier body (312) and a shielding body (313). The first limiting slot (311) is formed in the shielding body (313). The carrier body (312) has a leveling surface adjacent to the first constraint surface (3132); A second clamping member, translatably arranged at the proximal end of the finger body (32). A second limiting slot (241) opposite to the first limiting slot (311) is formed in the side wall of the second clamping member facing the central direction of the finger body (32). The second limiting slot (241) includes a guiding slope surface (2421) and a second constraint surface (2422) continuously extending therewith. The first constraint surface (3132) and the second constraint surface (2422) are opposite in the horizontal direction and form a dynamic clamping space. The clamping space is used to constrain the edge of a wafer (6). The guiding slope surface (2421) extends gradually outward from the edge of the second constraint surface (2422). The guiding slope surfaces (2421) are symmetrically distributed on both sides of the second constraint surface (2422); A linear driving member (25), having an output end capable of linear displacement, and the output end is connected to the second clamping member; wherein, when the output end of the linear driving member (25) drives the second clamping member to linearly displace towards the direction close to the first clamping member and changes the range of the clamping space, the inclined transition surface (3131) and the guiding slope surface (2421) approach each other and correct the levelness of the wafer (6) located in the clamping space; The second clamping member includes at least two top blocks (24) fixedly connected to the linear driving member (25); The top block (24) includes an integrally formed arc portion (242) and a plug-in portion (243). The second limiting slot (241) is formed along the outer contour of the arc portion (242). The outer contour of the arc portion (242) is semi-elliptical.

2. The end effector of a manipulator according to claim 1, characterized in that The clamping blocks (31) and the top blocks (24) enclose to form the clamping space.

3. The end effector of a manipulator according to claim 1, characterized in that The widths of the first limiting slot (311) and the second limiting slot (241) gradually increase as they are away from their respective slot bottoms.

4. The end effector of a manipulator according to claim 2, characterized in that The inclined transition surface (3131), the first constraint surface (3132) and the leveling surface enclose the first limiting slot (311).

5. The end effector of a manipulator according to claim 4, characterized in that, It further includes a wrist (1) and a connecting part (2) connected to the wrist (1). The connecting part (2) includes a connecting housing (21). The connecting housing (21) includes a push rod main body, a widened clamping body (22) and an adaptation part (23). The push rod main body is fixedly connected to the linear driving part (25). The widened clamping body (22) is fixedly connected to the push rod main body. The adaptation part (23) is located at both ends of the widened clamping body (22). The insertion part (243) is provided with a sunken groove (2431). The adaptation part (23) is clamped in the sunken groove (2431) and fixedly connected to the insertion part (243). The width of the widened clamping body (22) is not less than the distance between adjacent clamping blocks (31).

6. The end effector of a manipulator according to claim 5, characterized in that, The wrist (1) includes a mounting housing (11), a first pulley (12) and a second pulley (13) arranged in the housing of the wrist (1), as well as a turning shaft (14), a servo motor (15) and a synchronous belt (16). The turning shaft (14) is fixedly connected to the connecting part (2). The first pulley (12) and the second pulley (13) are connected by the synchronous belt (16) for transmission. The first pulley (12) is coaxially and fixedly connected to the turning shaft (14). The second pulley (13) is coaxially fixedly connected to a servo motor (15).

7. The end effector of a manipulator according to claim 6, characterized in that, The mounting housing (11) is further provided with a first bearing (17) and a second bearing (18). A bearing seat (19) is fixedly connected to the mounting housing (11). The first bearing (17) and the second bearing (18) are sleeved on the turning shaft (14). The inner rings of the first bearing (17) and the second bearing (18) are in contact with the turning shaft (14). The outer rings of the first bearing (17) and the second bearing (18) are in contact with the mounting housing (11). The turning shaft (14) includes an annular protrusion (141). The annular protrusion (141) is clamped between the first bearing (17) and the second bearing (18).

8. The end effector of a manipulator according to claim 6, characterized in that, The wrist (1) further includes a tension adjustment assembly, which includes; A motor seat (101), fixedly connected to the mounting housing (11); An adjustment block (102), arranged on the motor seat (101), with a threaded hole opened along the length direction of the synchronous belt (16); An adjustment screw (103), in threaded cooperation with the threaded hole, and its end extends to the outside through the side wall of the mounting housing (11); The motor seat (101) is provided with a strip hole (1011). The mounting housing (11) is provided with a fixing hole at the corresponding position. The vertical projection of the fixing hole is within the range of the strip hole (1011). Wherein, the tension of the synchronous belt (16) is adjusted by the depth of the adjustment screw (103) screwed into the threaded hole.

9. A robotic arm, comprising a robotic end effector according to any one of claims 1-8, having a shoulder joint axis, an elbow joint axis, and a wrist joint axis, characterized in that, It further includes: an upper arm (4) that can rotate around the shoulder joint axis, a forearm (5) that is rotatably connected to the upper arm (4) around the elbow joint axis, and the end effector is connected to the forearm (5) around the wrist joint axis.

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