Vortex tube structure and circulating system

Abstract

The invention relates to the field of semiconductor processing, in particular to a vortex tube structure and a circulation system. Comprising a pipe body, a hot flow channel arranged at one end of the pipe body, a cold flow channel arranged at the other end of the pipe body, a plug arranged at the air outlet end of the hot flow channel and air inlet pipes arranged on the side wall of the pipe body and symmetrically arranged on the side wall of the pipe body, a vortex transmission chamber is arranged in the pipe body, and an air chamber is formed between the vortex transmission chamber and the inner wall of the pipe body. A first air outlet is formed in the end, facing the hot flow channel, of the vortex transmission chamber, a second air outlet is formed in the end, facing the cold flow channel, of the vortex transmission chamber, and a plurality of airflow nozzles are arranged on the side wall of the vortex transmission chamber. The circulating system comprises an air compressor and any vortex tube structure, the input end of the air compressor is provided with a connecting tube, and the output end of the air compressor is connected with the air inlet tube. The device has the effects of saving energy, reducing consumption and controlling the gas jet angle.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing, and in particular to a vortex tube structure and a circulation system. Background Art

[0002] In the wet etching processing machine of semiconductor wafers, the speed of wet etching strongly depends on the solution temperature. Therefore, a constant temperature tank is required for different etching processes. The common practice in the industry is to use an ice machine to cool the low-temperature tank and an online or heating coil to heat the high-temperature tank. However, both methods consume a lot of electricity to maintain a constant temperature in the tank. In order to achieve energy saving and consumption reduction while satisfying the heating and cooling functions, the present application provides a vortex tube structure and circulation system. Summary of the invention

[0003] In order to achieve energy conservation and consumption reduction, meet the heating and cooling functions, and control the gas jet angle, the present application provides a vortex tube structure and circulation system.

[0004] On the one hand, the present application provides a vortex tube structure, which adopts the following technical solution: A vortex tube structure comprises a tube body, a hot flow channel arranged at one end of the tube body, a cold flow channel arranged at the other end of the tube body, a plug arranged at the air outlet end of the hot flow channel, and an air inlet pipe arranged on the side wall of the tube body and symmetrically arranged with the central axis in the length direction of the tube body as the symmetry axis, a vortex transmission chamber is arranged in the tube body, an air chamber is formed between the vortex transmission chamber and the inner wall of the tube body, an air outlet 1 is opened in the vortex transmission chamber at one end facing the hot flow channel, an air outlet 2 is opened in the vortex transmission chamber at one end facing the cold flow channel, and a plurality of air flow nozzles are arranged on the side wall of the vortex transmission chamber.

[0005] By adopting the above technical solution, compressed air enters the air intake pipe, then reaches the air chamber, and is injected into the vortex transmission chamber through the air flow nozzle. The air chamber and the vortex transmission chamber are isolated from each other, and compressed air can only flow in through the air flow nozzle. The air flow nozzle can control the gas inflow angle, and the gas then flows through the hot flow channel and the cold flow channel. The present application controls the gas injection angle by setting the air flow nozzle, thereby obtaining a vortex with continuous motion and adjustable shape.

[0006] Preferably, the plurality of air flow nozzles are distributed in a staggered manner.

[0007] By adopting the above technical solution, the airflow nozzles are staggered to improve the stability of vortex formation.

[0008] Preferably, the angle between the center line of the airflow nozzle and the radial normal line of the vortex transmission chamber is θ1, and the range of θ1 is 10-20 degrees or 80-90 degrees.

[0009] Preferably, the diameter of the hot flow channel is d1, the diameter of the cold flow channel is d2, the ratio of the diameter d1 / d2 is a, and the range of a is 1.5 <a<4。

[0010] Preferably, the length of the hot flow channel is L1, the length of the cold flow channel is L2, the ratio of length L2 / L1 is b, and the range of b is 1.3 <b<3。

[0011] Preferably, the width of the plug gradually increases away from the tube body, and the cross-sectional shape of the plug with the central axis in the length direction of the tube body as the cross-sectional line is an isosceles trapezoid.

[0012] Preferably, the angle of the extension line of the isosceles trapezoid of the plug is θ2, and the range of θ2 is 30-60 degrees.

[0013] Preferably, the width of the wider end of the plug is H1, the width of the narrower end of the plug is H2, the ratio of the width H1 / H2 is c, and the range of c is 1.5 <c<2.5。

[0014] Preferably, a guide tube is provided at one end of the heat flow channel away from the tube body, and the diameter of the guide tube gradually increases away from the tube body.

[0015] On the other hand, the present application provides a circulation system, which adopts the following technical solution: A circulation system comprises an air compressor and any one of the above-mentioned vortex tube structures, wherein the input end of the air compressor is provided with a connecting pipe, the connecting pipe comprises a connecting part 1 for recovering the gas of the hot flow pipeline and a connecting part 2 for recovering the gas of the cold flow pipeline, and the output end of the air compressor is connected to the air inlet pipe.

[0016] To summarize, the present application balances the intake pressure through symmetrically arranged intake pipes; the airflow jet angle is controllable, and a number of airflow nozzles are staggered to improve the smoothness of vortex formation. The vortex heat conversion efficiency is high, which is beneficial to reducing the electrical and thermal losses of the system; the circulation system allows the air to be circulated and reused in a sealed system, saving the system's heating or cooling energy consumption and reducing the power cost during the wafer production process. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 This is a schematic diagram of a vortex tube structure of the present application. Figure 1 ; Figure 2 This is a schematic diagram of a vortex tube structure of the present application. Figure 2 ; Figure 3 This is a schematic diagram of a vortex tube structure of the present application. Figure 3 .

[0017] Explanation of the accompanying drawings: 1. Tube body; 2. Hot flow channel; 3. Cold flow channel; 4. Plug; 5. Inlet pipe; 6. Vortex transmission chamber; 7. Air chamber; 8. Air outlet one; 9. Air outlet two; 10. Air flow nozzle; 11. Guide tube. DETAILED DESCRIPTION

[0018] The following is combined with Figure 1-Figure 3 The present application is further described. The following examples are only used to more clearly illustrate the technical solution of the present application, and cannot be used to limit the protection scope of the present application.

[0019] In the description of the present application, it should be noted that the orientations or positional relationships indicated by “center”, “up”, “down”, “left”, “right”, “vertical”, “horizontal”, “inside”, “outside”, etc. are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0020] The present application embodiment discloses a vortex tube structure. Figure 1 and Figure 2 , comprising a tube body 1, a hot flow channel 2 located at one end of the tube body 1 and connected to the tube body 1, a cold flow channel 3 located at the other end of the tube body 1 and connected to the tube body 1, a plug 4 located at the outlet end of the hot flow channel 2, a vortex transmission chamber 6 arranged in the tube body 1, and an air intake pipe 5 arranged on the side wall of the tube body 1. In the embodiment of the present application, two or more groups of air intake pipes 5 are arranged on the side wall of the tube body 1 symmetrically with the central axis of the length direction of the tube body 1 as the symmetry axis, and multiple air intake pipes 5 are also arranged on the side wall of the tube body 1 symmetrically with the central axis of the length direction of the tube body 1 as the symmetry axis. The gas enters the tube body 1 through the air intake pipe 5. An air chamber 7 is formed between the vortex transmission chamber 6 and the inner wall of the tube body 1. A plurality of air flow nozzles 10 are arranged on the vortex transmission chamber 6. After the gas enters the air chamber 7, it enters the vortex transmission chamber 6 through the air flow nozzles 10. In order to improve the stability of vortex formation, a plurality of air flow nozzles 10 are arranged alternately on the inner wall of the vortex transmission chamber 6. In order to facilitate the hot air flow to enter the hot flow channel 2, the vortex transmission chamber 6 is provided with an outlet 8 at one end facing the hot flow channel 2. In the embodiment of the present application, the inner diameter of the outlet 8 is consistent with the inner diameter of the hot flow channel 2, reducing the factors affecting the gas flow. In order to facilitate the cold air flow to enter the cold flow channel 3, the vortex transmission chamber 6 is provided with an outlet 9 at one end facing the cold flow channel 3. In the embodiment of the present application, the inner diameter of the outlet 9 is consistent with the cold flow channel 3, facilitating the gas flow and reducing the factors affecting the vortex rotation.

[0021] Reference Figure 2 and Figure 3, the air chamber 7 is isolated from the eddy current transmission chamber 6, and the compressed gas can only enter the eddy current transmission chamber 6 through the air flow nozzle 10. In the embodiment of the present application, 6 air flow nozzles 10 are provided, and the injection air flow angle is controlled by the air flow nozzle 10. The center line of the air flow nozzle 10 forms a certain included angle θ1 with the radial normal of the pipeline for fixing the air flow nozzle 10, so as to obtain a continuously moving and shape-adjustable eddy current. The range of the included angle θ1 is 10-20 degrees or 80-90 degrees. This angle can obtain a continuous and well-shaped eddy current, and the eddy current of this shape has a high heat conversion efficiency, which is beneficial to reducing the electrothermal loss of the system.

[0022] Refer to Figure 1 and Figure 2 , according to the principle of thermodynamics, the initial kinetic energy of the compressed air forms a spiral gas when flowing through the air flow nozzle 10. When moving to the left, due to the large diameter of the left-end pipeline and the plug 4 at the very end, the spiral-moving gases collide with each other, and the loss of kinetic energy of the gas molecules during the collision is released in the form of heat, forming a hot port at the leftmost end. This heat is used to heat the inside of the tank, and continuous heat is used to maintain the constancy of the high temperature inside the tank; part of the gas molecules that release heat at the left end flow out from the hot end, and the other part is reflected back by the plug 4 and continuously exchanges kinetic and thermal energy during the reflection process and then flows out from the right end. According to the law of conservation of energy, the temperature of the air flowing out at this time is relatively low, forming a cold port at the rightmost end. This low-temperature characteristic is applied to cool the inside of the tank, and continuous cold air is used to maintain the constancy of the low temperature inside the tank. The temperature difference between the hot end and the cold end depends on the diameters and lengths of the respective port pipe bodies. The diameter of the heat flow channel 2 in the present application is d1, and the diameter of the cold flow channel 3 is d2. The ratio of the diameters d1 / d2 is a, and the range of a is 1.5 < a < 4. The length of the heat flow channel 2 is L1, and the length of the cold flow channel 3 is L2. The ratio of the lengths L2 / L1 is b, and the range of b is 1.3 < b < 3.

[0023] Refer to Figure 2 , the temperature difference between the hot end and the cold end is also affected by the shape of the plug 4 in addition to the diameters and lengths of the port pipe bodies. Specifically, the shape of the plug 4 affects the reflection angle of the eddy current gas and thus affects the heat exchange and transfer efficiency of the eddy current gas. If the reflection angle is adjusted properly, the eddy current gas forms peaks and valleys that are coupled with each other, which can optimize the energy conversion efficiency of the eddy current gas. The width of the plug 4 in the present application gradually increases away from the pipe body 1, and the cross-sectional shape of the plug 4 with the central axis of the pipe body 1 in the length direction as the section line is an isosceles trapezoid. The included angle of the extension line of the isosceles trapezoid of the plug 4 is θ2, and the range of θ2 is 30-60 degrees. The width of the wider end of the plug 4 is H1, and the width of the narrower end of the plug 4 is H2. The ratio of the widths H1 / H2 is c, and the range of c is 1.5 < c < 2.5. A guide pipe 11 is provided at the end of the heat flow channel 2 away from the pipe body 1, and the diameter of the guide pipe 11 gradually increases away from the pipe body 1 to facilitate the outflow of hot air.

[0024] The present application designs an upper and lower symmetrical air intake of the pipeline, provides an optimal airflow nozzle 10 angle, reasonable diameters and lengths at both ends, and a hot end plug 4 shape, with a high overall energy conversion efficiency, effectively improving the energy-saving and consumption-reducing effect of the vortex tube.

[0025] The embodiment of the present application also discloses a circulation system, including an air compressor and the above-mentioned vortex tube structure. When the vortex tube is used, the hot end and the cold end are respectively connected to a sealed tank body or space. The input end of the air compressor is provided with a connecting pipe, and the connecting pipe includes a connecting part 1 and a connecting part 2. The connecting part 1 is used to recover the gas of the hot flow pipeline, and the connecting part 2 is used to recover the gas of the cold flow pipeline. One end of the connecting part 1 is connected to the air compressor, and the other end of the connecting part 1 is connected to the closed space of the hot end; one end of the connecting part 2 is connected to the air compressor, and the other end of the connecting part 2 is connected to the closed space of the cold end. The output end of the air compressor is connected to the air inlet pipe 5, and the air compressor inputs compressed air to the air inlet pipe 5. The compressed air flows through one end of the vortex tube to generate hot air to heat the tank body, and the other end of the cold air cools the tank body. The compressed air flows back to the air compressor through the connecting pipe, so that the gas is compressed again, and the air is circulated and reused in the sealed system, saving the energy consumption of heating or cooling of the system, and reducing the power cost in the wafer production process.

[0026] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A vortex tube structure, characterized in that: The invention comprises a tube body (1), a hot flow channel (2) arranged at one end of the tube body (1), a cold flow channel (3) arranged at the other end of the tube body (1), a plug (4) arranged at the air outlet end of the hot flow channel (2), and an air inlet pipe (5) arranged on the side wall of the tube body (1) and symmetrically arranged with the central axis of the tube body (1) in the longitudinal direction as the symmetry axis, wherein a vortex transmission chamber (6) is arranged in the tube body (1), an air chamber (7) is formed between the vortex transmission chamber (6) and the inner wall of the tube body (1), an air outlet (8) is provided at one end of the vortex transmission chamber (6) facing the hot flow channel (2), an air outlet (9) is provided at one end of the vortex transmission chamber (6) facing the cold flow channel (3), and a plurality of air flow nozzles (10) are provided on the side wall of the vortex transmission chamber (6).

2. A vortex tube structure according to claim 1, characterized in that: The plurality of air flow nozzles (10) are distributed in a staggered manner.

3. A vortex tube structure according to claim 1, characterized in that: The angle between the center line of the airflow nozzle (10) and the radial normal line of the vortex transmission chamber (6) is θ1, and the range of θ1 is 10-20 degrees or 80-90 degrees.

4. A vortex tube structure according to claim 1, characterized in that: The diameter of the hot flow channel (2) is d1, the diameter of the cold flow channel (3) is d2, the ratio of the diameter d1 / d2 is a, and the range of a is 1.5 <a<4。 5. A vortex tube structure according to claim 1, characterized in that: The length of the hot flow channel (2) is L1, the length of the cold flow channel (3) is L2, the ratio of the length L2 / L1 is b, and the range of b is 1.3 <b<3。 6. A vortex tube structure according to claim 1, characterized in that: The width of the plug (4) gradually increases as it moves away from the tube body (1), and the cross-sectional shape of the plug (4) with the central axis in the length direction of the tube body (1) as the cross-sectional line is an isosceles trapezoid.

7. A vortex tube structure according to claim 6, characterized in that: The included angle of the extension line of the isosceles trapezoid of the plug (4) is θ2, and the range of θ2 is 30-60 degrees.

8. A vortex tube structure according to claim 6, characterized in that: The wider end of the plug (4) has a width H1, the narrower end of the plug (4) has a width H2, the ratio of the width H1 / H2 is c, and the range of c is 1.5 <c<2.5。 9. The vortex tube structure according to claim 1, characterized in that: A guide tube (11) is provided at one end of the hot flow channel (2) away from the tube body (1), and the diameter of the guide tube (11) gradually increases away from the tube body (1).

10. A circulation system, characterized in that: It comprises an air compressor and any one of the above-mentioned vortex tube structures, wherein the input end of the air compressor is provided with a connecting pipe, the connecting pipe comprises a connecting part 1 for recovering the gas of the hot flow pipeline and a connecting part 2 for recovering the gas of the cold flow pipeline, and the output end of the air compressor is connected to an air inlet pipe (5).

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