An optically integrated multi-band online detection device

Abstract

This application provides an optically integrated multi-band online detection device, belonging to the field of laser optoelectronic system detection. This optically integrated multi-band online detection device is located at the laser output end of a laser optoelectronic system and includes a reference unit, a beam-shrinking unit, a near-field detection unit, a self-calibration unit, a far-field detection unit, and an adjustment unit connected to each unit, arranged sequentially. The reference unit includes a reference window mirror with a crosshair; the beam-shrinking unit includes a primary mirror, a secondary mirror, and a focusing mechanism for moving the secondary mirror, arranged sequentially along the optical path; the near-field detection unit includes a near-field detector and a first beam splitter; the self-calibration unit includes a self-calibration light source, a second beam splitter, and a corner bevel; the first and second beam splitters are sequentially arranged on the optical path of the beam output from the secondary mirror; the far-field detection unit includes a far-field detector. This application can quickly and accurately test the optical axis and pupil deviation of a laser beam relative to its reference.

Description

Technical Field

[0001] This application relates to the field of laser optoelectronic system detection technology, specifically to an optically integrated multi-band online detection device. Background Technology

[0002] Compared to ordinary light sources, lasers have advantages such as good monochromaticity, good directionality, and high brightness, thus their applications are very wide. The near-field beam emitted by a laser has a small spot size and a large beam divergence angle, making it suitable for laser processing; while the far-field beam has a large spot size and a small beam divergence angle, making it suitable for laser imaging, ranging, and other applications.

[0003] In practical applications, the position of the emitted laser beam from a laser optoelectronic system is typically critical. Even a small deviation in the beam's direction can cause it to deviate from the target surface after long-distance transmission. With advancements in optical engineering technology, some specialized applications require strict control over the position of the laser emitted by the system. This necessitates the detection of pupil and optical axis deviations. Currently, theodolites are commonly used to test these deviations; however, using theodolites for this purpose is inefficient. Summary of the Invention

[0004] In view of the technical problems existing in the background art, this application provides an optically integrated multi-band online detection device, which can quickly and accurately perform near-field and far-field optical benchmark tests on the laser emitted by the laser optoelectronic system to obtain the pupil deviation and optical axis deviation.

[0005] This application provides an optically integrated multi-band online detection device, disposed at the laser output end of a laser optoelectronic system. It includes a reference unit, a beam-shrinking unit, a near-field detection unit, a self-calibration unit, a far-field detection unit, and an adjustment unit connected to each unit, arranged sequentially. The reference unit includes a reference window mirror with crosshairs. The beam-shrinking unit includes a primary mirror, a secondary mirror, and a focusing mechanism for moving the secondary mirror, arranged sequentially along the optical path. The near-field detection unit includes a near-field detector and a first beam splitter. The self-calibration unit includes a self-calibrating light source, a second beam splitter, and a corner bevel. The first and second beam splitters are sequentially disposed on the optical path of the beam output from the secondary mirror. The far-field detection unit includes a far-field detector. The laser output end of the laser optoelectronic system is provided with a reference mirror with crosshairs.

[0006] This application, by simultaneously setting up near-field and far-field detection units in the optical path, enables the measurement of both the pupil deviation and optical axis deviation of the laser emitted by the laser optoelectronic system through near-field detection and far-field detection. Specifically, during near-field detection, the cooperation of the reference window mirror, the beam-shrinking unit, and the adjustment unit achieves rapid and accurate near-field detection. Simultaneously, the position of the secondary mirror is adjusted by the focusing mechanism, ensuring that lasers of different optical powers (i.e., different distances between the reference mirror 9 and the reference window mirror 21) are converted into parallel light output after passing through the beam-shrinking unit, providing favorable conditions for near-field detection. During far-field detection, the cooperation of the self-calibration unit, the first beam splitter, the beam-shrinking unit, the reference window mirror, and the adjustment unit achieves rapid and accurate far-field detection. In other words, the online detection device of this application, through the coordinated operation of different units, can simultaneously measure the pupil and optical axis deviations; and components can be shared during both near-field and far-field detection.

[0007] In some embodiments, the focusing mechanism includes a motor, a gear, and a guide rail connected in sequence; the gear is connected to the output shaft of the motor; and the gear is meshed with the guide rail.

[0008] In this embodiment, the movement of the secondary mirror is achieved through the coordinated operation of the motor, gears, and guide rails in the focusing mechanism, thereby changing the relative positional relationship between the primary and secondary mirrors, matching incident lasers of different optical powers, and providing favorable conditions for near-field detection.

[0009] In some embodiments, the beam-shrinking unit further includes a switchable attenuation wheel and a switchable filter wheel sequentially disposed at the output end of the secondary mirror beam.

[0010] In this embodiment, a switchable attenuation wheel attenuates laser light of different powers to the required power, while a switchable filter wheel filters out light from other wavelengths of the laser, achieving the output of laser light of a specific wavelength. Through the cooperation of the switchable attenuation wheel and the switchable filter wheel, the detection of lasers of different powers and wavelengths can be achieved. Furthermore, the switching time of the switchable attenuation wheel and the switchable filter wheel is short, and the switching optical axis deviation is small, enabling rapid and precise control.

[0011] In some embodiments, the self-calibration unit further includes a movable baffle disposed at the input end of the cone beam.

[0012] In this embodiment, self-collimation calibration can be quickly achieved by setting a movable baffle.

[0013] In some embodiments, the optically integrated multi-band online detection device further includes an automatic control and data extraction unit; the automatic control and data extraction unit is electrically connected to the near-field detection unit, the self-calibration unit, the far-field detection unit, and the adjustment unit, respectively.

[0014] In this embodiment, the automatic control and data extraction unit controls the position of each component through the control and adjustment unit, thereby achieving rapid and accurate near-field and far-field detection; at the same time, the data in the near-field and far-field detectors are analyzed.

[0015] In some embodiments, the adjustment unit is an electric five-dimensional adjustment mechanism.

[0016] In this embodiment, the electric five-dimensional adjustment mechanism has high adjustment accuracy and repeatability, achieving precise positioning of the component.

[0017] In some embodiments, the reference unit further includes a cubic prism disposed above the reference window mirror; the cubic prism is used to calibrate the normal angle of the light inlet of the reference window mirror.

[0018] In some embodiments, the reference window mirror is provided with an adjustment fixture for adjusting the orientation and pitch angle of the reference window mirror.

[0019] In some embodiments, the detection method of the optically integrated multi-band online detection device includes the following steps:

[0020] S1. Switch the target surface of the self-calibration unit to a crosshair target, turn on the self-calibration light source, and the output beam of the self-calibration light source is split into two parts after passing through the second beam splitter. One part of the light is transmitted to the corner cone, reflected by the corner cone to the second beam splitter, and then reflected by the second beam splitter to the far-field detector to form a crosshair spot image; the other part of the light is reflected to the first beam splitter, transmitted through the first beam splitter to the secondary mirror, reflected by the secondary mirror to the primary mirror, reflected by the primary mirror to the reference window mirror, and the beam reflected to the reference window mirror returns to the second beam splitter along the original path, is transmitted through the second beam splitter to the far-field detector to form a crosshair spot image; if the two crosshair spot images overlap, self-calibration is completed, and the self-calibration light source is turned off.

[0021] S2. Turn on the laser optoelectronic system, and adjust the focusing mechanism and the adjustment unit so that the crosshairs on the reference mirror are imaged on the center of the near-field detector to complete the pupil reference, and then turn off the laser optoelectronic system.

[0022] S3. Turn on the self-calibrating light source, move the movable baffle to block the corner cone, the light beam emitted by the self-calibrating light source is reflected to the first beam splitter, transmitted through the first beam splitter to the secondary mirror, reflected by the secondary mirror to the primary mirror, reflected by the primary mirror to the reference window mirror, and transmitted to the reference mirror, and then returns along the original path, imaging the crosshairs on the self-calibrating unit onto the far-field detector, by adjusting the adjustment unit so that the crosshairs on the self-calibrating unit are imaged at the center of the far-field detector, completing the optical axis reference, and then turn off the self-calibrating light source;

[0023] S4. Turn on the laser optoelectronic system and test the centroid of the output beam of the laser optoelectronic system on the near-field detector; at the same time, test the centroid of the output beam of the laser optoelectronic system on the far-field detector.

[0024] In the technical solution of this application embodiment, by simultaneously setting a near-field detection unit and a far-field detection unit in the optical path, the pupil deviation of the laser emitted by the laser optoelectronic system can be measured through near-field detection, and the optical axis deviation of the laser emitted by the laser optoelectronic system can be measured through far-field detection. Through the coordinated cooperation of the focusing mechanism, the switchable attenuation wheel and the switchable filter wheel, the near-field and far-field detection of incident lasers of different wavelengths and powers can be realized, providing technical support for multi-band detection in optical integration process technology, and enabling the detection of targets at different distances.

[0025] In some embodiments, the method further includes the step of extracting and analyzing data from the near-field detector and the far-field detector.

[0026] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of this application, the accompanying drawings used in this application will be briefly described below. Obviously, the drawings described below are merely some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without any creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of the optically integrated multi-band online detection device in the embodiments of this application;

[0029] Figure 2 This is the optical path diagram for near-field detection imaging in the embodiments of this application;

[0030] Figure 3 This is the optical path diagram for near-field detection imaging in the embodiments of this application.

[0031] Explanation of reference numerals in the attached figures: 1000-Optical integrated multi-band online detection device; 1-Laser optoelectronic system; 2-Reference unit; 3-Beam shrinking unit; 4-Near-field detection unit; 5-Self-calibration unit; 6-Far-field detection unit; 7-Adjustment unit; 8-Automatic control and data extraction unit; 9-Reference mirror; 21-Reference window mirror; 22-Cubic prism; 31-Primary mirror; 32-Focusing mechanism; 33-Secondary mirror; 34-Switchable attenuation wheel; 35-Switchable filter wheel; 41-Near-field detector; 42-First beam splitter; 51-Self-calibration light source; 52-Second beam splitter; 53-Pyramid; 54-Modible baffle; 61-Far-field detector. Detailed Implementation

[0032] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0033] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application may also be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, apparatuses, circuits, and methods have been omitted so as not to obscure the description of this application with unnecessary detail.

[0034] In this document, the term "comprising" indicates the presence of a described feature, integral, step, operation, element, and / or component, but does not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or collections thereof. The terms "comprising," "including," "having," and variations thereof all mean "including but not limited to," with exclusions being otherwise specifically emphasized. Hereinafter, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying one or more of the feature. In the description of embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0035] With the development of laser optical engineering technology, some special applications require strict control over the position of the laser emitted by the laser optoelectronic system. This necessitates the detection of the pupil and optical axis deviation of the emitted laser. Using a theodolite to test the beam's optical axis and pupil deviation is inefficient. Therefore, rapidly and accurately locating the output laser and quickly detecting the pupil and optical axis of the laser optoelectronic system's output beam is particularly important.

[0036] To address the low efficiency of theodolite detection, this application provides an optically integrated multi-band online detection device. By simultaneously incorporating near-field and far-field detection units in the optical path, it enables the measurement of both the pupil deviation of the laser emitted by the laser-photoelectric system via near-field detection and the optical axis deviation via far-field detection. Through the coordinated operation of a focusing mechanism, a switchable attenuation wheel, and a switchable filter wheel, it achieves near- and far-field detection of incident beams with different power and wavelengths. This provides technical support for multi-band detection in optical integration processes and enables the detection of targets at varying distances. This application can rapidly and accurately test the optical axis and pupil deviation of a laser beam relative to its reference.

[0037] Please refer to Figure 1 , Figure 1 This is a schematic diagram of the structure of an optically integrated multi-band online detection device 1000, which is set at the laser output end of the laser optoelectronic system 1 and is used to test the pupil and optical axis deviation of the laser emitted by the laser optoelectronic system 1; it includes a reference unit 2, a beam-shrinking unit 3, a near-field detection unit 4, a self-calibration unit 5, a far-field detection unit 6, and an adjustment unit 7 connected to each unit in sequence.

[0038] Reference unit 2 is used to establish the pupil and optical axis references, including a reference window mirror 21 with crosshairs. The normal of the outer surface of the reference window mirror 21 represents the pointing reference of the incident beam, and the crosshairs represent the position reference of the incident beam. Adjustment unit 7 ensures that the laser output from the laser optoelectronic system 1 enters the reference window mirror 21 from the center of the crosshairs. Simultaneously, through the coordinated operation of reference mirror 9 and reference window mirror 21, the reference transmission of the beam output from the laser optoelectronic system 1 is further achieved.

[0039] The beam-shrinking unit 3 is used to reduce the aperture of the output beam of the laser seed source 1 so that it matches the aperture of the subsequent near-field detection unit 4 and far-field detection unit 6. It includes a primary mirror 31, a secondary mirror 33 arranged sequentially along the optical path, and a focusing mechanism 32 for moving the secondary mirror 33. The beam output by the laser optoelectronic system 1 is reflected by the primary mirror 31 and the secondary mirror 33 to achieve unobstructed beam shrinking. At the same time, the secondary mirror 33 is moved by the focusing mechanism 32 to realize the transmission of the optical reference of lasers with different optical powers.

[0040] The near-field detection unit 4 is used to measure the pupil deviation of the output beam of the laser optoelectronic system 1, and includes a near-field detector 41 and a first beam splitter 42. The output beam of the laser optoelectronic system 1 is output after passing through the reference unit 2 and the beam-shrinking unit 3, and then reflected by the first beam splitter 42 into the near-field detection unit 4 for imaging.

[0041] The self-calibration unit 5 is used to realize the self-collimation calibration of the optical integrated multi-band online detection device 1000. It includes a self-calibration light source 51, a second beam splitter 52, and a corner bevel 53. The first beam splitter 42 and the second beam splitter 52 are sequentially arranged on the optical path of the beam output from the secondary mirror 32. The output beam of the self-calibration light source 51 is split into two parts after passing through the second beam splitter 52. One part of the light is transmitted to the corner bevel 53, reflected by the corner bevel 53 to the second beam splitter 52, and then reflected by the second beam splitter 52 to the far-field detection unit 6 for imaging. The other part of the light is reflected to the first beam splitter 42, transmitted through the first beam splitter 42 to the secondary mirror 32, reflected by the secondary mirror 32 to the primary mirror 31, reflected by the primary mirror 31 to the reference window mirror 21, and the beam reflected to the reference window mirror 21 returns to the second beam splitter 52 along the original path. The second beam splitter 52 is transmitted to the far-field detection unit 6 for imaging. The adjustment unit 7 makes the two parts of the light overlap and be located at the center of the far-field detection unit 6, thereby realizing self-collimation calibration.

[0042] The far-field detection unit 6 is used to measure the optical axis deviation of the output beam of the laser optoelectronic system 1, and includes a far-field detector 61. After the output beam of the laser optoelectronic system 1 passes through the reference unit 2 and the beam-shrinking unit 3, it is transmitted through the first beam splitter 42 to the second beam splitter 52. After being transmitted again by the second beam splitter 52, it enters the far-field detection unit 6 for imaging.

[0043] The adjustment unit 7 is used to adjust the orientation of the optical integrated multi-band online detection device 1000. The adjustment unit 7 is connected to the reference unit 2, the beam-shrinking unit 3, the near-field detection unit 4, the self-calibration unit 5 and the far-field detection unit 6 respectively via cables.

[0044] This application achieves rapid self-calibration of the optically integrated multi-band online detection device 1000 by setting a self-calibration unit 5 in the optical path; by simultaneously setting a near-field detection unit 4 and a far-field detection unit 6 in the optical path, it can measure the pupil deviation of the laser emitted by the laser optoelectronic system through near-field detection, and simultaneously measure the optical axis deviation of the laser emitted by the laser optoelectronic system through far-field detection. Specifically, during the near-field detection process, the incident laser is rapidly and accurately imaged onto the near-field detector 41 through the cooperation of the crosshairs of the reference window mirror 21, the primary mirror 31, the secondary mirror 33, and the adjustment unit 7, thus achieving near-field detection. At the same time, the position of the secondary mirror 33 is adjusted by the focusing mechanism 32, so that lasers of different optical powers are converted into parallel light output after passing through the beam-shrinking unit 3, providing favorable conditions for near-field detection. During far-field detection, the laser beam is rapidly and accurately input to the far-field detector 61 through the coordinated operation of the self-calibrating light source 51, the second beam splitter 52, the corner pyramid 53, the first beam splitter 42, the secondary mirror 32, the primary mirror 31, the reference window mirror 21, and the adjustment unit 7, thus achieving far-field detection. In other words, the online detection device of this application, through the coordinated operation of different units, can simultaneously achieve pupil and optical axis deviation detection; and components can be shared during near-field and far-field detection. Simultaneously, by adjusting the position of the secondary mirror 33 during detection, incident beams of different optical powers are converged and imaged on the near-field detector 41 and the far-field detector 61, thereby achieving the detection of targets at different distances. The online detection device of this application is highly accurate, efficient, automatically establishes a reference, has a flexible structure, is convenient to install and adjust, and has high reliability.

[0045] Furthermore, in this embodiment, the focusing mechanism 32 includes a motor, a gear, and a guide rail connected in sequence; the gear is connected to the output shaft of the motor; the gear is meshed with the guide rail. The motor drives the gear to rotate, thereby causing the guide rail to move linearly, which in turn moves the secondary mirror 33. The linkage mechanism formed by the motor, gear, and guide rail is a relatively mature structure and will not be described in detail here. Through the coordinated operation of the motor, gear, and guide rail in the focusing mechanism 32, the movement of the secondary mirror 33 is achieved, thereby changing the relative positional relationship between the primary mirror 31 and the secondary mirror 33 to adapt to lasers of different optical powers, achieving parallel light output of lasers of different optical powers in the beam-shrinking unit 3, providing favorable conditions for near-field detection. The influence of the guide rail's linearity error on the principal point results in the detector's principal point accuracy being less than one pixel.

[0046] Furthermore, in the embodiments of this application, such as Figure 1As shown, the beam-shrinking unit 3 also includes a switchable attenuation wheel 34 and a switchable filter wheel 35 sequentially disposed at the beam output end of the secondary mirror 33. The switchable attenuation wheel 34 matches incident lasers of different powers, attenuating the lasers of different powers to the required power to achieve the output of a specific power laser. The switchable filter wheel 35 matches incident lasers of different wavelengths, filtering out light from other wavelengths of the laser to achieve the output of a specific wavelength laser. Depending on the beam filtered out by the switchable filter wheel 35, near-field and far-field detection of incident beams in the visible, near-infrared, and short-wave infrared bands can be achieved, providing technical support for multi-band detection in optical integration process technology. Through the cooperation of the switchable attenuation wheel 34 and the switchable filter wheel 35, the output of lasers of different powers and multiple wavelengths can be achieved. At the same time, the switching time of the switchable attenuation wheel 34 and the switchable filter wheel 35 is short and the switching optical axis deviation is small, enabling rapid and precise control.

[0047] Furthermore, in the embodiments of this application, such as Figure 1 As shown, the self-calibration unit 5 also includes a movable baffle 54 disposed at the beam input end of the cone 53. When self-collimation calibration is required, the movable baffle 54 is moved away, so that the beam passing through the second beam splitter 52 can be transmitted to the cone 53, thereby quickly achieving self-collimation.

[0048] Furthermore, in the embodiments of this application, such as Figure 1 As shown, the optical integrated multi-band online detection device 1000 also includes an automatic control and data extraction unit 8; the automatic control and data extraction unit 8 is electrically connected to the near-field detection unit 4, the self-calibration unit 5, the far-field detection unit 6, and the adjustment unit 7. The automatic control and data extraction unit 8 can control the adjustment unit 7 to adjust the positions of each component, achieving rapid and accurate near-field and far-field detection; on the other hand, it can extract the centroid data of the far-field detection spot and the centroid data of the near-field detection spot. It is equipped with digital image processing software, which can calculate the miss distance and collect and process the spot information received by the near-field and far-field detectors.

[0049] Furthermore, in the embodiments of this application, such as Figure 1 As shown, adjustment unit 7 is an electrically driven five-dimensional (X-axis, Y-axis, Z-axis, azimuth, and pitch) adjustment mechanism. This electrically driven five-dimensional adjustment mechanism offers high adjustment accuracy and repeatability, enabling precise positioning of components. Based on the extraction technology of the light spot centroid and centroid, the addition of this five-dimensional electrically driven adjustment mechanism automatically establishes optical axis and pupil references for the online detection device.

[0050] Furthermore, in the embodiments of this application, such as Figure 1 As shown, the reference unit 2 also includes a cubic prism 22 disposed above the reference window mirror 21; the cubic prism 22 is used to calibrate the normal angle of the light inlet of the reference window mirror 21.

[0051] Secondly, this application also provides a detection method for the aforementioned optically integrated multi-band online detection device 1000, comprising the following steps:

[0052] S1. Switch the target surface of the self-calibration unit 5 to a cross-shaped reticle target, turn on the self-calibration light source 51, and remove the movable baffle 54. The output beam of the self-calibration light source 51 is split into two parts after passing through the second beam splitter 52. One part of the light is transmitted to the corner cone 53, reflected by the corner cone 53 to the second beam splitter 52, and then reflected by the second beam splitter 52 to the far-field detector 61 to form a cross-shaped light spot image. The other part of the light is reflected to the first beam splitter 42, transmitted through the first beam splitter 42 to the secondary mirror 32, reflected by the secondary mirror 32 to the primary mirror 31, reflected by the primary mirror 31 to the reference window mirror 21, and the beam reflected to the reference window mirror 21 returns to the second beam splitter 52 along the original path. The beam is transmitted through the second beam splitter 52 to the far-field detector 6 to form a cross-shaped light spot image. If the two crosshair light spot images overlap and are located at the center of the far-field detection unit 6, then self-calibration is considered complete. If the two crosshair light spot images do not overlap, the two parts of the light are made to overlap and be located at the center of the far-field detection unit 6 by adjusting the azimuth and elevation angle of the reference window mirror 21. That is, the two crosshair light spot images are made to overlap and be located at the center of the crosshairs on the far-field detector 61 by adjusting the azimuth and elevation angle of the reference window mirror 21, then self-calibration is complete. Turn off the self-calibration light source 51, reset the movable baffle 54, and make the movable baffle 54 block the corner cone 53.

[0053] S2. Turn on the laser optoelectronic system 1. The automatic control and data extraction unit 8 controls the adjustment unit 7 to work. Adjust the focusing mechanism 32 and the adjustment unit 7 so that the crosshairs on the reference mirror 9 are imaged at the center of the near-field detector 41, thus completing the pupil reference. Turn off the laser optoelectronic system 1.

[0054] S3. Turn on the self-calibration light source 51. The beam emitted by the self-calibration light source 51 is reflected to the first beam splitter 42, transmitted through the first beam splitter 42 to the secondary mirror 32, reflected by the secondary mirror 32 to the primary mirror 31, reflected by the primary mirror 31 to the reference window mirror 21, transmitted through the reference window mirror 21 to the reference mirror 9, and then the beam returns along the original path, imaging the crosshairs on the self-calibration unit 5 onto the far-field detector 61. By adjusting the adjustment unit 7, the crosshairs on the self-calibration unit 5 are imaged at the center of the far-field detector 61, completing the optical axis reference. Then, turn off the self-calibration light source 51. At this time, the crosshairs on the reference mirror 9 are also imaged at the center of the near-field detector 41. That is, by adjusting the adjustment unit 7, the crosshairs on the reference mirror 9 can be imaged at the center of the near-field detector 41 at the same time, and the crosshairs on the self-calibration unit 5 can be imaged at the center of the far-field detector 61.

[0055] S4. Turn on the laser optoelectronic system 1 and test the centroid of the output beam of the laser optoelectronic system 1 on the near-field detector 41. Specifically, the optical path diagram of the near-field detection process is as follows: Figure 2 As shown in Figure a, the emitted light from the laser optoelectronic system 1 is output after passing through the reference unit 2 and the beam-shrinking unit 3, and then reflected by the first beam splitter 42 into the near-field detection unit 4, where it is imaged onto the near-field detector 41, as shown in Figure a. Figure 2 As shown in b; the near-field detector 41 transmits the received spot information to the automatic control and data extraction unit 8, and the digital image processing software of the automatic control and data extraction unit 8 extracts the near-field spot centroid data to obtain the distance between the pupil (i.e., the center of the dot) and the center of the crosshairs, i.e., the pupil deviation.

[0056] The output beam of the test laser optoelectronic system 1 is located at the centroid of the spot on the far-field detector 61; specifically, the optical path diagram of the far-field detection process is as follows: Figure 3 As shown in Figure a, the emitted light from the laser optoelectronic system 1 is output through the reference unit 2 and the beam-shrinking unit 3, then projected onto the second beam splitter 52 via the first beam splitter 42, and then transmitted through the second beam splitter 52 into the far-field detection unit 6, where it is imaged on the far-field detector 61. Figure 3 As shown in b; the far-field detector 61 transmits the received spot information to the automatic control and data extraction unit 8, and the digital image processing software of the automatic control and data extraction unit 8 extracts the centroid data of the far-field spot to obtain the distance between the optical axis (i.e., the center of the dot) and the center of the crosshairs, i.e., the optical axis deviation.

[0057] During near-field and far-field detection, near-field detection can be performed after completing the pupil reference in step S2, and then the optical axis reference in step S3 can be performed after the near-field detection is completed, followed by far-field detection.

[0058] This application, by simultaneously setting a near-field detection unit 4 and a far-field detection unit 6 in the optical path, can measure the pupil deviation of the laser emitted by the laser optoelectronic system through near-field detection, and simultaneously measure the optical axis deviation of the laser emitted by the laser optoelectronic system through far-field detection. Through the coordinated cooperation of the focusing mechanism 32, the switchable attenuation wheel 34, and the switchable filter wheel 35, it can realize the near-field and far-field detection of incident laser beams with different optical powers, different wavelengths, and different power, providing technical support for multi-band detection in optical integration process technology, and enabling the detection of targets at different distances.

[0059] It should be noted that this application is not limited to the above-described embodiments. The above embodiments are merely examples, and any embodiments with the same structure and effect as the technical concept within the scope of this application are included in the technical scope of this application. Furthermore, various modifications that can be conceived by those skilled in the art to the embodiments, and other ways of constructing by combining some of the constituent elements of the embodiments, without departing from the spirit of this application, are also included in the scope of this application.

Claims

1. An optically integrated multi-band online detection device, disposed at the laser output end of a laser optoelectronic system, characterized in that, It includes a reference unit, a beam-shrinking unit, a near-field detection unit, a self-calibration unit, a far-field detection unit, and an adjustment unit connected to each unit, arranged in sequence. The reference unit includes a reference window mirror with a crosshair; The beam-shrinking unit includes a primary mirror, a secondary mirror, and a focusing mechanism for moving the secondary mirror, arranged sequentially along the optical path. The near-field detection unit includes a near-field detector and a first beam splitter; The self-calibration unit includes a self-calibration light source, a second beam splitter, and a corner cone; the first beam splitter and the second beam splitter are sequentially arranged on the optical path of the beam output from the second beam splitter. The far-field detection unit includes a far-field detector; The laser output end of the laser optoelectronic system is equipped with a reference mirror with a crosshair. The beam-shrinking unit also includes a switchable attenuation wheel and a switchable filter wheel sequentially disposed at the output end of the secondary mirror beam.

2. The optically integrated multi-band online detection device according to claim 1, characterized in that, The focusing mechanism includes a motor, a gear, and a guide rail connected in sequence; the gear is connected to the output shaft of the motor; and the gear is meshed with the guide rail.

3. The optically integrated multi-band online detection device according to claim 1, characterized in that, The self-calibration unit also includes a movable baffle disposed at the input end of the cone beam.

4. The optically integrated multi-band online detection device according to claim 3, characterized in that, The optically integrated multi-band online detection device also includes an automatic control and data extraction unit; the automatic control and data extraction unit is electrically connected to the near-field detection unit, the self-calibration unit, the far-field detection unit, and the adjustment unit, respectively.

5. The optically integrated multi-band online detection device according to claim 4, characterized in that, The adjustment unit is an electric five-dimensional adjustment mechanism.

6. The optically integrated multi-band online detection device according to claim 5, characterized in that, The reference unit also includes a cubic prism disposed above the reference window mirror; the cubic prism is used to calibrate the normal angle of the light inlet of the reference window mirror.

7. The optically integrated multi-band online detection device according to claim 6, characterized in that, The reference window mirror is equipped with an adjustment fixture for adjusting the orientation and pitch angle of the reference window mirror.

8. The optically integrated multi-band online detection device according to claim 1, characterized in that, The detection method of the optically integrated multi-band online detection device includes the following steps: S1. Switch the target surface of the self-calibration unit to a crosshair target, turn on the self-calibration light source, and the output beam of the self-calibration light source is split into two parts after passing through the second beam splitter. One part of the light is transmitted to the corner cone, reflected by the corner cone to the second beam splitter, and then reflected by the second beam splitter to the far-field detector to form a crosshair spot image; the other part of the light is reflected to the first beam splitter, transmitted through the first beam splitter to the secondary mirror, reflected by the secondary mirror to the primary mirror, reflected by the primary mirror to the reference window mirror, and the beam reflected to the reference window mirror returns to the second beam splitter along the original path, is transmitted through the second beam splitter to the far-field detector to form a crosshair spot image; if the two crosshair spot images overlap, self-calibration is completed, and the self-calibration light source is turned off. S2. Turn on the laser optoelectronic system, and adjust the focusing mechanism and the adjustment unit so that the crosshairs on the reference mirror are imaged at the center of the near-field detector to complete the pupil calibration, and then turn off the laser optoelectronic system. S3. Turn on the self-calibrating light source, move the movable baffle to block the corner cone, the light beam emitted by the self-calibrating light source is reflected to the first beam splitter, transmitted through the first beam splitter to the secondary mirror, reflected by the secondary mirror to the primary mirror, reflected by the primary mirror to the reference window mirror, and transmitted to the reference mirror, and then returns along the original path, imaging the crosshairs on the self-calibrating unit onto the far-field detector, and by adjusting the adjustment unit, the crosshairs on the self-calibrating unit are imaged at the center of the far-field detector, completing the optical axis calibration, and then the self-calibrating light source is turned off; S4. Turn on the laser optoelectronic system and test the centroid of the output beam of the laser optoelectronic system on the near-field detector; at the same time, test the centroid of the output beam of the laser optoelectronic system on the far-field detector.

9. The optically integrated multi-band online detection device according to claim 8, characterized in that, It also includes the following steps: extracting and analyzing the data from the near-field detector and the far-field detector.

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