Power regulation method, device, electronic device and storage medium

Abstract

This application provides a power regulation method, apparatus, electronic device, and storage medium, relating to the field of control technology. In this application, phase detection processing is performed on the voltage and current signals in the radio frequency (RF) device of an ion implanter to obtain a phase detection result. Based on the phase detection result, it can be determined whether the voltage and current signals in the RF device are in phase, and thus whether the output power of the RF power supply is a large output power. Furthermore, by real-time detection of whether the reflected power, which changes in the opposite direction to the output power of the RF power supply, meets a preset reflected power condition, and by adjusting the plate spacing of the capacitors in the RF device to change the magnitude of the reflected power, it can be ensured that the RF power supply maintains a large output power during the operation of the RF device.

Description

Technical Field

[0001] This application relates to the field of control technology, and in particular to a power regulation method, device, electronic device and storage medium. Background Technology

[0002] To ensure that the ion implanter can inject ions quickly, the radio frequency (RF) device of the ion implanter (e.g., RF barrel) usually needs to operate at its optimal power, that is, the output power of the RF power supply of the RF device is at its maximum.

[0003] However, as the output power of the RF power supply increases, and because RF devices are typically inductor-capacitor (LC) components, issues such as temperature drift and increased power can cause changes in the resonant frequency of the RF device, significantly affecting the power output of the RF power supply. To ensure that the RF power supply can maintain a high output power, the operating frequency of the RF device needs to be adjusted to be close to its resonant frequency.

[0004] Therefore, ensuring that the RF power supply maintains a large output power during the operation of the RF device is a problem that urgently needs to be solved. Summary of the Invention

[0005] This application provides a power regulation method, apparatus, electronic device, and storage medium to ensure that the radio frequency power supply maintains a large output power during the operation of the radio frequency device.

[0006] In a first aspect, embodiments of this application provide a power regulation method, the method comprising:

[0007] Phase detection processing is performed on the voltage and current signals in the radio frequency device of the ion implanter to obtain the phase detection result; wherein the voltage signal and the current signal have the same frequency, and the phase detection result characterizes the phase difference between the voltage signal and the current signal;

[0008] The spacing between capacitors in the RF device is adjusted based on the phase detection results until the reflected power of the RF power supply corresponding to the RF device meets the preset reflected power condition; wherein, the reflected power condition is used to indicate the output power range set for the RF power supply, and the output power range includes the maximum output power of the RF power supply.

[0009] In one optional embodiment, adjusting the plate spacing of capacitors in the radio frequency device based on the phase detection result includes:

[0010] Based on the phase detection results, the first zero point of the voltage signal and the current signal within a unit signal period corresponding to the voltage signal is obtained; the first zero point is an intersection point of the current waveform of the current signal and the voltage waveform of the voltage signal within a unit signal period.

[0011] The plate spacing of the capacitor is adjusted based on the first zero point and the first resonant point set for the first zero point.

[0012] In one optional embodiment, adjusting the plate spacing of the capacitors based on a first zero point and a first resonant point set for the first zero point includes:

[0013] If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonant point, a first control command is sent to the motor set for the capacitor; the first control command is used to instruct the motor to drive the first plate of the capacitor to move along a first direction, which is the direction of reducing the plate spacing of the capacitor.

[0014] If the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonant point, a second control command is sent to the motor. The second control command is used to instruct the motor to drive the first plate of the capacitor to move along the second direction, which is the direction of increasing the plate spacing of the capacitor.

[0015] In one optional embodiment, adjusting the plate spacing of capacitors in the radio frequency device based on the phase detection result includes:

[0016] Based on the phase detection results, the second zero point of the voltage signal and the current signal within a unit signal period corresponding to the voltage signal is obtained; the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the first zero point, and the first zero point and the second zero point are the two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal within a unit signal period;

[0017] The plate spacing of the capacitor is adjusted based on the second zero point and the second resonant point set for the second zero point.

[0018] In one optional embodiment, adjusting the plate spacing of the capacitor based on a second zero point and a second resonant point set for the second zero point includes:

[0019] If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonant point, a third control command is sent to the motor set for the capacitor. The third control command is used to instruct the motor to adjust from the default second direction to the first direction and drive the first plate of the capacitor to move along the first direction, wherein the first direction is the direction of decreasing the plate spacing of the capacitor and the second direction is the direction of increasing the plate spacing of the capacitor.

[0020] If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonant point, a fourth control command is sent to the motor. The fourth control command is used to instruct the motor to adjust from the default first direction to the second direction and drive the first plate of the capacitor to move along the second direction.

[0021] In one optional embodiment, the reflected power of the RF power supply is determined to satisfy a preset reflected power condition if the following condition is met:

[0022] During the adjustment of the capacitor plate spacing, the reflected power first decreases and then increases.

[0023] In one optional embodiment, the spacing between capacitors in the radio frequency device is adjusted based on the phase detection result until the reflected power of the radio frequency power supply corresponding to the radio frequency device meets a preset reflected power condition, including:

[0024] When it is determined that the reflected power meets the reflected power condition, a fifth control command is sent to the motor set for the capacitor; the fifth control command is used to instruct the motor to stop adjusting the plate spacing of the capacitor.

[0025] Secondly, embodiments of this application also provide a power regulation device, the device comprising:

[0026] The signal phase detection module is used to perform phase detection processing on the voltage and current signals in the radio frequency device of the ion implanter to obtain the phase detection result; wherein, the voltage signal and the current signal have the same frequency, and the phase detection result characterizes the phase difference between the voltage signal and the current signal;

[0027] The capacitor adjustment module is used to adjust the spacing between capacitors in the RF device based on the phase detection result until the reflected power of the RF power supply corresponding to the RF device meets the preset reflected power condition; wherein, the reflected power condition is used to indicate the output power range set for the RF power supply, and the output power range includes the maximum output power of the RF power supply.

[0028] In one optional embodiment, when adjusting the plate spacing of capacitors in the RF device based on the phase detection result, the capacitor adjustment module is specifically used for:

[0029] Based on the phase detection results, the first zero point of the voltage signal and the current signal within a unit signal period corresponding to the voltage signal is obtained; the first zero point is an intersection point of the current waveform of the current signal and the voltage waveform of the voltage signal within a unit signal period.

[0030] The plate spacing of the capacitor is adjusted based on the first zero point and the first resonant point set for the first zero point.

[0031] In an optional embodiment, when adjusting the plate spacing of the capacitor based on a first zero point and a first resonant point set for the first zero point, the capacitor adjustment module is specifically used for:

[0032] If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonant point, a first control command is sent to the motor set for the capacitor; the first control command is used to instruct the motor to drive the first plate of the capacitor to move along a first direction, which is the direction of reducing the plate spacing of the capacitor.

[0033] If the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonant point, a second control command is sent to the motor. The second control command is used to instruct the motor to drive the first plate of the capacitor to move along the second direction, which is the direction of increasing the plate spacing of the capacitor.

[0034] In one optional embodiment, the capacitor spacing in the RF device is adjusted based on the phase detection result. Specifically, the capacitor adjustment module is used for:

[0035] Based on the phase detection results, the second zero point of the voltage signal and the current signal within a unit signal period corresponding to the voltage signal is obtained; the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the first zero point, and the first zero point and the second zero point are the two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal within a unit signal period;

[0036] The plate spacing of the capacitor is adjusted based on the second zero point and the second resonant point set for the second zero point.

[0037] In one optional embodiment, when adjusting the plate spacing of the capacitor based on the second zero point and the second resonant point set for the second zero point, the capacitor adjustment module is specifically used for:

[0038] If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonant point, a third control command is sent to the motor set for the capacitor. The third control command is used to instruct the motor to adjust from the default second direction to the first direction and drive the first plate of the capacitor to move along the first direction, wherein the first direction is the direction of decreasing the plate spacing of the capacitor and the second direction is the direction of increasing the plate spacing of the capacitor.

[0039] If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonant point, a fourth control command is sent to the motor. The fourth control command is used to instruct the motor to adjust from the default first direction to the second direction and drive the first plate of the capacitor to move along the second direction.

[0040] In one optional embodiment, the capacitor adjustment module determines that the reflected power of the RF power supply meets a preset reflected power condition if the following condition is met:

[0041] During the adjustment of the capacitor plate spacing, the reflected power first decreases and then increases.

[0042] In one optional embodiment, when adjusting the plate spacing of the capacitors in the RF device based on the phase detection result until the reflected power of the RF power supply corresponding to the RF device meets the preset reflected power condition, the capacitor adjustment module is specifically used for:

[0043] When it is determined that the reflected power meets the reflected power condition, a fifth control command is sent to the motor set for the capacitor; the fifth control command is used to instruct the motor to stop adjusting the plate spacing of the capacitor.

[0044] Thirdly, embodiments of this application also provide an electronic device, including:

[0045] Processor; and

[0046] Stored program memory,

[0047] The program includes instructions that, when executed by the processor, cause the processor to perform the power regulation method as described in the first aspect.

[0048] Fourthly, embodiments of this application also provide a non-transitory computer-readable storage medium storing computer instructions, wherein the computer instructions are used to cause a computer to perform the power regulation method as described in the first aspect.

[0049] Fifthly, this application provides a computer program product that, when invoked by a computer, causes the computer to perform the power regulation method steps as described in the first aspect.

[0050] The beneficial effects of this application are as follows:

[0051] In the power regulation method provided in this application embodiment, phase detection processing is performed on the voltage signal and current signal in the radio frequency device of the ion implanter to obtain the phase detection result. Based on the phase detection result, it can be determined whether the voltage signal and current signal in the radio frequency device are in phase, and thus it can be determined whether the output power of the radio frequency power supply is a large output power.

[0052] Furthermore, by real-time detection of whether the reflected power, which is opposite to the output power change of the RF power supply, meets the preset reflected power condition, and by adjusting the plate spacing of the capacitors in the RF device to change the magnitude of the reflected power, it can be ensured that the RF power supply maintains a large output power during the operation of the RF device.

[0053] Furthermore, other features and advantages of this application will be set forth in the following description and will be apparent in part from the description, or may be learned by practicing the application. The objectives and other advantages of this application may be realized and obtained by means of the structures particularly pointed out in the written description, claims, and drawings. Attached Figure Description

[0054] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described herein are used to provide a further understanding of this application, constitute a part of this application, and do not constitute an improper limitation of this application. In the accompanying drawings:

[0055] Figure 1 This is a schematic diagram of an optional power regulation system applicable to embodiments of this application;

[0056] Figure 2 A schematic diagram illustrating the implementation process of a power regulation method provided in this application embodiment;

[0057] Figure 3 A waveform diagram of a voltage signal and a current signal provided for an embodiment of this application;

[0058] Figure 4 A waveform diagram of another voltage signal and current signal provided in an embodiment of this application;

[0059] Figure 5 A schematic diagram illustrating the implementation process of a method for obtaining query conditions provided in this application embodiment;

[0060] Figure 6 This is a schematic diagram of the structure of a power regulation device provided in an embodiment of this application;

[0061] Figure 7 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0062] Embodiments of this application will now be described in more detail with reference to the accompanying drawings. While some embodiments of this application are shown in the drawings, it should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this application. It should be understood that the drawings and embodiments of this application are for illustrative purposes only and are not intended to limit the scope of protection of this application.

[0063] It should be understood that the steps described in the method embodiments of this application may be performed in different orders and / or in parallel. Furthermore, the method embodiments may include additional steps and / or omit the steps shown. The scope of this application is not limited in this respect.

[0064] The term "comprising" and its variations as used herein are open-ended, meaning "including but not limited to". The term "based on" means "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Definitions of other terms will be given in the following description. It should be noted that the concepts of "first", "second", etc., mentioned in this application are used only to distinguish different devices, modules, or units, and are not intended to limit the order of functions performed by these devices, modules, or units or their interdependencies.

[0065] It should be noted that the terms "a" and "a plurality of" used in this application are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0066] The names of the messages or information exchanged between multiple devices in the embodiments of this application are for illustrative purposes only and are not intended to limit the scope of these messages or information.

[0067] The following explanations of some terms used in the embodiments of this application are provided to facilitate understanding by those skilled in the art.

[0068] (1) The reflected power of an RF power supply refers to the energy reflected back from the load to the power supply. When an RF signal encounters a mismatched load during transmission, part of the signal will be reflected back instead of being completely absorbed by the load. The presence of reflected power reduces the efficiency of the power supply because some energy is not effectively utilized but is consumed in the matching circuit and load lines, which may cause these components to overheat or even be damaged. Ideally, the reflected power should be zero, but in reality, this is difficult to achieve due to the bandwidth of the signal and the complexity of matching. In engineering practice, it is generally considered that when the reflected power is reduced to a certain level (e.g., 1 / 1000 or 5 / 1000), the matching is considered good.

[0069] (2) An LC circuit is a circuit composed of components such as capacitors, inductors, and resistors, as well as electronic devices, that can generate oscillating current or have a filtering function. LC circuits are mainly used for harmonic compensation. Through the interaction of inductors and capacitors, they achieve the filtering function, remove or reduce harmonic components in the circuit, thereby improving the performance and stability of the circuit.

[0070] (3) A phase detector is a device that can identify the phase difference of an input signal. It is a circuit that makes the output voltage have a definite relationship with the phase difference between the two input signals and is an important component of a phase-locked loop.

[0071] Based on the above explanations of terms and related terminology, the design concept of the embodiments of this application will be briefly introduced below:

[0072] To ensure that the (high-energy) ion implanter can rapidly implant ions, the radio frequency (RF) device of the ion implanter (e.g., RF barrel) usually needs to be operated at its optimal power, that is, the output power of the RF power supply of the RF device is at its maximum.

[0073] However, as the output power of the RF power supply increases, and because RF devices are typically LC components, their resonant frequency can change due to temperature drift and increased power, significantly affecting the power output of the RF power supply. To ensure the RF power supply maintains high output power, the operating frequency of the RF device needs to be adjusted to near its resonant frequency.

[0074] In view of this, to ensure that the RF power supply maintains a large output power during the operation of the RF device, this application proposes a power adjustment method, which may specifically include: performing phase detection processing on the voltage and current signals in the RF device of the ion implanter to obtain a phase detection result, and then adjusting the plate spacing of the capacitors in the RF device based on the phase detection result until the reflected power of the RF power supply corresponding to the RF device meets a preset reflected power condition. The phase detection result can characterize the phase difference between the voltage signal and the current signal; the reflected power condition can be used to indicate the output power range set for the RF power supply, and the output power range may include the maximum output power of the RF power supply.

[0075] In this way, since the phase detection result can determine whether the voltage and current signals in the RF device are in phase, it can be determined whether the output power of the RF power supply is a large output power. Furthermore, by real-time detection of the reflected power, which changes in the opposite direction to the output power of the RF power supply, to ensure that the reflected power supply maintains a large output power during the operation of the RF device, and by adjusting the spacing between the capacitors in the RF device to change the reflected power, it can be ensured that the RF power supply maintains a large output power during the operation of the RF device.

[0076] In particular, the preferred embodiments of this application will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application. Furthermore, the embodiments of this application and the features in the embodiments can be combined with each other without conflict.

[0077] See Figure 1The diagram illustrates the architecture of an optional power regulation system applicable to an embodiment of this application. This power regulation system may include: a radio frequency (RF) device 101, an RF power supply 102, a motor 103, and a server 104. The RF device 101 is electrically connected to both the RF power supply 102 and the motor 103. The server 104 and the motor 103 can interact via a communication network. The communication network employs both wireless and wired communication methods.

[0078] For example, server 104 can access the network and communicate with motor 103 via cellular mobile communication technology. The cellular mobile communication technology may include, for example, 5G or next-generation mobile communication technology.

[0079] Optionally, the server 104 can also access the network and communicate with the motor 103 via short-range wireless communication. This short-range wireless communication method may include, for example, wireless fidelity (Wi-Fi) technology.

[0080] This application embodiment does not impose any limitation on the number of devices or modules involved in the above system architecture. For example, the above system architecture may include more radio frequency devices or motors, or it may include more radio frequency power supplies or servers, or it may also include other network devices. Figure 1 As shown, only the radio frequency device 101, radio frequency power supply 102, motor 103 and server 104 are described as examples. The following is a brief introduction to each of the above devices or modules and their respective functions.

[0081] Radio frequency (RF) device 101 typically refers to containers used in certain industrial or laboratory equipment that utilize RF technology for heating or other treatments, thereby heating materials or initiating chemical reactions. For example, RF device 101 can be a container such as an RF barrel; this embodiment does not specifically limit its application. Furthermore, in this embodiment, RF device 101 is primarily used to generate (high-energy) ions emitted by an ion implanter. RF power supply 102 provides energy to RF device 101 to ensure its normal operation. Motor 103 can be used to adjust the spacing between capacitor plates in RF device 101, changing the resonant frequency of RF device 101, and thus adjusting the output power of RF power supply 102.

[0082] Server 104 can be a standalone physical server, a server cluster or distributed system composed of multiple physical servers, or a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, content delivery networks (CDN), and big data and artificial intelligence platforms.

[0083] In this embodiment, server 104 can be used to perform phase detection processing on voltage and current signals in the radio frequency device 101 of the ion implanter to obtain phase detection results. The voltage signal and the current signal have the same frequency, and the phase detection results can characterize the phase difference between the voltage signal and the current signal. Then, the spacing between the capacitors in the radio frequency device 101 is adjusted based on the phase detection results until the reflected power of the radio frequency power supply 102 corresponding to the radio frequency device 101 meets the preset reflected power condition. The reflected power condition can be used to indicate the output power range set for the radio frequency power supply 102 (i.e., the power output range with a larger output power). Therefore, the output power range can include the maximum output power of the radio frequency power supply 102.

[0084] The power regulation method provided by the exemplary embodiments of this application will be described below in conjunction with the above system architecture and with reference to the accompanying drawings. It should be noted that the above system architecture is only shown to facilitate understanding of the spirit and principles of this application, and the embodiments of this application are not limited in any way.

[0085] See Figure 2 The diagram shown illustrates the implementation flow of a power regulation method provided in this application. Taking a server as an example, the specific implementation flow of this method is as follows:

[0086] S201: Perform phase detection processing on the voltage and current signals in the radio frequency device of the ion implanter to obtain the phase detection result.

[0087] In this context, the frequencies of the voltage signal and the current signal can be the same, meaning the signal period of the voltage signal can be the same as the signal period of the current signal. Thus, when the phases of the voltage signal and the current signal are the same, the intersection point of the voltage waveform with the horizontal axis (e.g., the X-axis) overlaps with or is the same as the intersection point of the current waveform with the horizontal axis.

[0088] The phase detection results described above characterize the phase difference between the voltage and current signals. Therefore, the server can determine whether the phase of the current signal leads the phase of the voltage signal or vice versa based on the phase detection results. Taking U as the phase difference between the voltage and current signals as an example, U > 0 indicates that the phase of the voltage signal leads the phase of the current signal, while U < 0 indicates that the phase of the current signal leads the phase of the voltage signal.

[0089] For example, during step S201, the server can use an analog-to-digital converter (ADC) to acquire the phase detection results (e.g., phase difference) of the voltage signal and current signal output by the phase detector, thereby determining whether the phase of the current signal leads the phase of the voltage signal, or vice versa. See [link to relevant documentation]. Figure 3 As shown, it is a waveform diagram of a voltage signal and a current signal provided in an embodiment of this application. It can be seen from the voltage waveform of the voltage signal and the current waveform of the current signal that the phase of the voltage signal leads the phase of the current signal.

[0090] Using the above method, since the phase detection result can reflect whether the voltage signal and the current signal are in phase (i.e., the phase difference between the voltage signal and the current signal is 0), and the output power of the RF power supply is maximum when the voltage signal and the current signal in the RF device are in phase, meaning that the LC circuit in the RF device operates at its resonant frequency, the phase detection result can be used to adjust the LC circuit in the RF device so that the RF device can operate near its actual resonant frequency, thereby ensuring that the RF power supply maintains a large output power during the operation of the RF device.

[0091] S202: Adjust the plate spacing of the capacitors in the RF device based on the phase detection results until the reflected power of the RF power supply corresponding to the RF device meets the preset reflected power condition.

[0092] The aforementioned plate spacing is the distance between the first plate (e.g., the upper plate or positive plate) and the second plate (e.g., the lower plate or negative plate) of the capacitor. The aforementioned preset reflection power condition can be used to indicate the output power range set for the RF power supply. The aforementioned output power range includes the maximum output power of the RF power supply during the operation of the RF device. In other words, during the process of adjusting the plate spacing of the capacitors in the RF device based on the phase detection result, the server stops or ceases adjusting the plate spacing of the capacitors in the RF device until the output power of the RF power supply falls within the aforementioned output power range.

[0093] In this way, the change in reflected power can be used to indirectly determine the change in the output power of the RF power supply, avoiding the need for direct detection of the output power change and thus reducing the complexity of determining the output power change. Specifically, if the reflected power changes from large to small, it can be determined that the output power of the RF power supply is increasing. Conversely, if the reflected power changes from small to large, it can be determined that the output power of the RF power supply is decreasing.

[0094] Optionally, the output power of the above-mentioned RF power supply can be expressed as P. out The reflected power of the aforementioned radio frequency power supply can be expressed as P. verf Furthermore, the aforementioned preset reflection power condition can also be called the preset reflection power variation condition. Of course, it can also have other names, which are not limited in this embodiment.

[0095] To maximize the output power of the RF power supply, it is necessary to find the resonant point where the reflected power of the LC circuit in the RF device is minimized during actual operation. At this point, the impedance Z of the LC circuit is at its minimum, resulting in the lowest power loss. In other words, the RF power supply output power is maximized when the RF device operates at this resonant point. According to the formula for calculating the resonant frequency, the resonant frequency of the LC circuit is related to the inductive element (inductor L) and the capacitive element (capacitor C) in the RF device. For example, the formula for calculating the resonant frequency can be expressed as follows:

[0096]

[0097] Where f represents the resonant frequency of the LC circuit, L represents the inductance, and C represents the capacitance.

[0098] However, since the inductor L in an RF device cannot usually be changed except by replacing the inductor, the capacitance value can only be changed by altering the capacitor's size. Based on the capacitance calculation formula, increasing the spacing between capacitor plates (i.e., plate spacing or electrode spacing) reduces the capacitance value. Therefore, the resonant frequency of the RF device can be adjusted by regulating the plate spacing using a motor, thus adjusting the output power or reflected power of the RF power supply. For example, assuming the capacitor in the RF device is a parallel capacitor, the specific formula for calculating the capacitance value can be expressed as follows:

[0099]

[0100] Where C represents the capacitance value; ε is a constant; S represents the area of ​​the two plates facing each other; d represents the distance between the plates (i.e., the plate spacing); and k is the electrostatic constant.

[0101] When the current signal and voltage signal are in phase (i.e., the phase difference between the voltage signal and the current signal is 0), the output power of the RF power supply is at its maximum, and the output value of the phase detector (e.g., the voltage value) is 0. Based on this theory, the phase difference of the phase detector can be used as a basis for determining the motor adjustment direction to achieve the maximum output power of the RF power supply.

[0102] In one optional implementation, during step S202, the server can obtain the first zero point of the voltage signal and current signal within a unit signal period corresponding to the voltage signal based on the phase detection result, and then adjust the capacitor spacing based on the first zero point and a first resonant point set for the first zero point. Here, the aforementioned first zero point is an intersection point of the current waveform of the current signal and the voltage waveform of the voltage signal within a unit signal period, and the aforementioned first resonant point is where the phase difference between the voltage signal and the current signal is 0. For example, see... Figure 4 As shown, the unit signal period is 2π, point A is the first resonant point with an abscissa of 0, and the intersection point B of the current waveform of the current signal and the voltage waveform of the voltage signal is the first zero point.

[0103] It should be noted that the server can determine whether the phase difference between the voltage and current signals is greater than 0 based on the voltage waveform, current waveform, and the first zero point. For example... Figure 4 As shown, to the left of the first zero point, the vertical coordinate of the voltage waveform is greater than that of the current waveform, while to the right of the first zero point, the vertical coordinate of the voltage waveform is less than that of the current waveform. Therefore, the server can determine that the phase of the voltage signal leads the phase of the current signal (i.e., the phase difference is greater than 0).

[0104] If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonant point, the server can send a first control command to the motor configured for the capacitor. This first control command instructs the motor to move the first plate of the capacitor along a first direction, which can be the direction that reduces the spacing between the capacitor plates. Therefore, after receiving the first control command, the motor can move the first plate of the capacitor along the first direction. Taking a horizontally placed parallel capacitor and the first plate as the lower plate as an example, the first direction is the direction closer to the upper plate of the capacitor, i.e., upwards.

[0105] It should be understood that the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonant point, that is, the phase difference between the voltage signal and the current signal is greater than 0, and the phase of the voltage signal leads the phase of the current signal.

[0106] In other words, to the left of the first zero point, the vertical coordinate of the voltage waveform is greater than that of the current waveform, while to the right of the first zero point, the vertical coordinate of the voltage waveform is less than that of the current waveform.

[0107] Based on the above method, the spacing between the capacitor plates becomes smaller, the capacitance value becomes larger, and the resonant frequency of the LC circuit in the RF device will decrease. By reducing the spacing between the capacitor plates, the impedance of the RF device at the current frequency can be adjusted to ensure that the circuit impedance matches the output impedance of the RF power supply. At this time, the transmission line loss is minimized, thereby reducing the reflected power of the RF power supply.

[0108] If the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonant point, the server can send a second control command to the motor. This second control command instructs the motor to move the first plate of the capacitor along a second direction. This second direction can be the direction that increases the spacing between the capacitor plates, meaning it is opposite to the first direction. Therefore, after receiving the second control command, the motor can move the first plate of the capacitor along the second direction. Taking a horizontally placed parallel capacitor and the first plate as the lower plate as an example, the second direction is the direction away from the upper plate of the capacitor, i.e., downwards.

[0109] It should be understood that the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonant point, that is, the phase difference between the voltage signal and the current signal is less than 0, and the phase of the current signal leads the phase of the voltage signal.

[0110] In other words, to the left of the first zero point, the vertical coordinate of the voltage waveform is smaller than that of the current waveform, while to the right of the first zero point, the vertical coordinate of the voltage waveform is larger than that of the current waveform.

[0111] Based on the above method, the spacing between the capacitor plates increases, the capacitance value decreases, and the resonant frequency of the LC circuit in the RF device increases. By increasing the spacing between the capacitor plates, the impedance of the RF device at the current frequency is adjusted to ensure that the circuit impedance matches the output impedance of the RF power supply. At this time, the transmission line loss is minimized, thereby reducing the reflected power of the RF power supply.

[0112] It should be noted that the second plate of the capacitor can be fixed, or it can be movable; this embodiment does not limit this. If the second plate is movable, the capacitance can be adjusted by moving the first and second plates in the same or opposite directions using a motor.

[0113] Given that adjusting the output power (or resonant frequency) based on the phase detector has an erroneous zero point (i.e., a second zero point) that causes the motor to adjust in the opposite direction, increasing reflected power, the following improvement can be made: Since the ultimate goal of adjusting the output power of the RF power supply is to minimize its reflected power, this can be achieved by adjusting the reflected power. Specifically, the reflected power of the RF power supply changes in real time during motor movement. Adjusting the direction of movement aims to reduce the reflected power, thereby finding the point with the lowest reflected power and increasing the output power of the RF power supply.

[0114] In another optional implementation, during step S202, the server can also obtain the second zero point of the voltage signal and current signal within a unit signal period corresponding to the voltage signal based on the phase detection result, and then adjust the plate spacing of the capacitors based on the second zero point and the second resonant point set for the second zero point. Here, the frequency value corresponding to the aforementioned second zero point is greater than the frequency value corresponding to the aforementioned first zero point, and the aforementioned first zero point and the aforementioned second zero point are the two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal within a unit signal period.

[0115] Still Figure 4 For example, point C is the second resonant point with an abscissa of π, and the intersection point D of the current waveform of the current signal and the voltage waveform of the voltage signal is the second zero point.

[0116] If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonant point, the server can send a third control command to the motor configured for the capacitor. This third control command instructs the motor to adjust from the default second direction to the first direction, causing the first plate of the capacitor to move along the first direction. The first direction can be the direction that decreases the spacing between the capacitor plates, while the second direction can be the direction that increases the spacing between the capacitor plates. Therefore, after receiving the third control command, the motor can move the first plate of the capacitor along the first direction.

[0117] It should be understood that the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonant point, that is, the phase difference between the voltage signal and the current signal is greater than 0, and the phase of the voltage signal leads the phase of the current signal.

[0118] In other words, to the left of the second zero point, the vertical coordinate of the voltage waveform is smaller than that of the current waveform, while to the right of the second zero point, the vertical coordinate of the voltage waveform is larger than that of the current waveform.

[0119] Therefore, in this scenario, if the motor moves the first plate of the capacitor along the default second direction, the LC circuit in the RF device will deviate further from the optimal resonant point (i.e., the second resonant point). By comparing the collected reflected power, it can be found that the reflected power is increasing, thus confirming that the adjustment direction of the plate spacing is incorrect. At this point, the server can use the motor to move the first plate of the capacitor along the first direction to find the point with the minimum reflected power.

[0120] If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonant point, the server can send a fourth control command to the motor. This fourth control command can instruct the motor to adjust from the default first direction to the second direction, and drive the first plate of the capacitor to move along the second direction. Therefore, after receiving the fourth control command, the motor can drive the first plate of the capacitor to move along the second direction.

[0121] It should be understood that the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonant point, that is, the phase difference between the voltage signal and the current signal is less than 0, and the phase of the current signal leads the phase of the voltage signal.

[0122] In other words, to the left of the second zero point, the vertical coordinate of the voltage waveform is greater than that of the current waveform, while to the right of the second zero point, the vertical coordinate of the voltage waveform is less than that of the current waveform.

[0123] Similarly, in this scenario, if the motor moves the first plate of the capacitor along the default first direction, the LC circuit in the RF device will deviate further from the optimal resonant point (i.e., the second resonant point). By comparing the collected reflected power, it can be found that the reflected power is increasing, thus confirming that the adjustment direction of the plate spacing is incorrect. At this point, the server can use the motor to move the first plate of the capacitor along the second direction to find the point with the minimum reflected power.

[0124] The method based on reflected power adjustment not only realizes closed-loop adjustment of reflected power based on RF power supply, ensuring maximum output power of RF power supply, but also eliminates the problem of reverse adjustment of motor based on second zero point.

[0125] Since the change in reflected power is exactly the opposite of the change in the output power of the RF power supply, in one optional implementation, if the reflected power first decreases and then increases during the adjustment of the capacitor spacing, it can be determined that the reflected power of the RF power supply meets the preset reflected power condition. In other words, when the reflected power first decreases and then increases, the minimum reflected power has already been reached. Therefore, when the reflected power meets the preset reflected power condition, the output power of the RF power supply is a relatively large output power, and the corresponding output power range includes the maximum output power of the RF power supply.

[0126] It should be understood that the aforementioned preset reflection power condition, i.e., the change in reflection power, is that it first decreases and then increases.

[0127] To ensure the high output power of the reflected power supply, the server can promptly shut down the motor once it is determined that the motor has adjusted the capacitor's capacitance to a level sufficient for the RF power supply's output power (i.e., the reflected power meets the preset reflected power adjustment). This allows the server to send a fifth control command to the motor when the reflected power meets the preset condition. This fifth control command can instruct the motor to stop adjusting the capacitor's plate spacing, effectively stopping the movement of the capacitor's first plate.

[0128] For example, during the process of the motor adjusting the first plate (or capacitance value) of the capacitor, if it is found that the reflected power first decreases and then increases, and reaches a value 0-3W greater than the minimum reflected power value, the server can send a fifth control command to the motor to instruct it to stop adjusting the plate spacing of the capacitor. Using this method, after receiving the aforementioned fifth control command, the motor will stop moving and will no longer adjust the plate spacing (or capacitance value). The RF power supply will maintain its current output power, thus ensuring that the RF power supply maintains a high output power during the operation of the RF device.

[0129] Based on the power adjustment method described in steps S201-S202 above, the server can reduce the reflected power by observing the real-time changes in the RF power supply reflection during motor movement, thereby finding the lowest reflected power point for RF cigarette lighting and increasing the output efficiency of the RF power supply. (See also...) Figure 5 As shown, the specific implementation process of the method executed by the server is as follows:

[0130] S501: Start.

[0131] S502: Acquire the output value U of the phase detector.

[0132] The output value described above can characterize the phase difference between the voltage signal and the current signal in the radio frequency device.

[0133] S503: U > 0. If so, proceed to S504a; otherwise, proceed to S504b.

[0134] If we assume that the phase difference is the phase of the voltage signal minus the phase of the current signal, then U > 0 can indicate that the voltage signal leads the current signal; conversely, U < 0 can indicate that the current signal leads the voltage signal.

[0135] S504a: Motor forward motion.

[0136] Taking a horizontally placed parallel capacitor in a radio frequency device as an example, and assuming the upper plate (i.e., the second plate) of the capacitor is fixed and the lower plate (i.e., the first plate) is movable, then the aforementioned forward movement of the motor can be the motor moving upwards, that is, the motor driving the lower plate of the capacitor to move along the first direction.

[0137] S505a: Has the reflected power decreased? If yes, proceed to S506a; otherwise, proceed to S504b.

[0138] If the forward motion of the motor can reduce the reflected power of the RF power supply, then it can be determined that the forward motion of the motor can increase the output power of the RF power supply. Therefore, the minimum value of the reflected power can be found during the forward motion of the motor.

[0139] In other words, it can be determined that the forward motion of the motor deviates from the resonant point corresponding to the radio frequency device (i.e., the phase difference between the voltage signal and the current signal increases). At this time, it is necessary to adjust the direction of the motor's motion from forward motion to reverse motion in a timely manner.

[0140] It should be noted that, as before Figure 4 or Figure 3 As shown, if the voltage waveform of the voltage signal is fixed, then as the reflected power decreases, the current waveform of the current signal gradually approaches the voltage waveform of the voltage signal; conversely, as the reflected power increases, the current waveform of the current signal gradually moves away from the voltage waveform.

[0141] S506a: Does the reflected power increase by 2W in the reverse direction? If yes, proceed to S507; otherwise, continue controlling the motor movement.

[0142] If the reflected power first decreases and then increases in the opposite direction, it can be determined that the minimum reflected power has been reached during the motor's forward motion. Furthermore, since the reflected power increases by a certain value in the opposite direction, it is not necessary to repeatedly control the motor to return to the minimum reflected power; instead, the motor can be stopped directly, thereby reducing the power consumption required for motor operation.

[0143] S504b: Motor reverses direction.

[0144] Taking the capacitor in the radio frequency device as a horizontally placed parallel capacitor, with the upper plate (i.e., the second plate) fixed and the lower plate (i.e., the first plate) movable, then the aforementioned reverse movement of the motor can be the motor moving downwards, that is, the motor driving the lower plate of the capacitor to move along the second direction.

[0145] S505b: Has the reflected power decreased? If yes, proceed to S506b; otherwise, proceed to S504a.

[0146] If reversing the motor reduces the reflected power of the RF power supply, then reversing the motor increases the output power of the RF power supply. Therefore, the minimum reflected power can be found during the reversing motion of the motor.

[0147] In other words, it can be determined that the forward motion of the motor deviates from the resonant point corresponding to the radio frequency device (i.e., the phase difference between the voltage signal and the current signal increases). At this time, it is necessary to adjust the direction of the motor's motion from reverse motion to forward motion in a timely manner.

[0148] S506b: Does the reflected power increase by 2W in the reverse direction? If yes, proceed to S507; otherwise, continue controlling the motor movement.

[0149] S507: End.

[0150] That is, the motor stops moving, and the spacing between capacitors in the radio frequency device is no longer adjusted by the motor.

[0151] In summary, the power regulation method provided in this application embodiment can perform phase detection processing on the voltage and current signals in the radio frequency (RF) device of the ion implanter to obtain a phase detection result. Based on the phase detection result, it can be determined whether the voltage and current signals in the RF device are in phase, and thus whether the output power of the RF power supply is a large output power. Furthermore, by real-time detection of whether the reflected power, which changes in the opposite direction to the output power of the RF power supply, meets a preset reflected power condition, and by adjusting the spacing between capacitors in the RF device to change the magnitude of the reflected power, it can be ensured that the RF power supply maintains a large output power during the operation of the RF device.

[0152] Furthermore, based on the same technical concept, embodiments of this application provide a power regulation device for implementing the above-described method flow of embodiments of this application. See also... Figure 6 As shown, the power adjustment device 600 may include: a signal phase detection module 601 and a capacitor adjustment module 602, wherein:

[0153] The signal phase detection module 601 is used to perform phase detection processing on the voltage signal and current signal in the radio frequency device of the ion implanter to obtain the phase detection result; wherein, the voltage signal and the current signal have the same frequency, and the phase detection result characterizes the phase difference between the voltage signal and the current signal;

[0154] The capacitor adjustment module 602 is used to adjust the plate spacing of the capacitors in the radio frequency device based on the phase detection result until the reflected power of the radio frequency power supply corresponding to the radio frequency device meets the preset reflected power condition; wherein, the reflected power condition is used to indicate the output power range set for the radio frequency power supply, and the output power range includes the maximum output power of the radio frequency power supply.

[0155] In an optional embodiment, when adjusting the plate spacing of capacitors in the RF device based on the phase detection result, the capacitor adjustment module 602 is specifically used for:

[0156] Based on the phase detection results, the first zero point of the voltage signal and the current signal within a unit signal period corresponding to the voltage signal is obtained; the first zero point is an intersection point of the current waveform of the current signal and the voltage waveform of the voltage signal within a unit signal period.

[0157] The plate spacing of the capacitor is adjusted based on the first zero point and the first resonant point set for the first zero point.

[0158] In an optional embodiment, when adjusting the plate spacing of the capacitor based on a first zero point and a first resonant point set for the first zero point, the capacitor adjustment module 602 is specifically used for:

[0159] If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonant point, a first control command is sent to the motor set for the capacitor; the first control command is used to instruct the motor to drive the first plate of the capacitor to move along a first direction, which is the direction of reducing the plate spacing of the capacitor.

[0160] If the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonant point, a second control command is sent to the motor. The second control command is used to instruct the motor to drive the first plate of the capacitor to move along the second direction, which is the direction of increasing the plate spacing of the capacitor.

[0161] In an optional embodiment, when adjusting the plate spacing of capacitors in the RF device based on phase detection results, the capacitor adjustment module 602 is specifically used for:

[0162] Based on the phase detection results, the second zero point of the voltage signal and the current signal within a unit signal period corresponding to the voltage signal is obtained; the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the first zero point, and the first zero point and the second zero point are the two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal within a unit signal period;

[0163] The plate spacing of the capacitor is adjusted based on the second zero point and the second resonant point set for the second zero point.

[0164] In an optional embodiment, when adjusting the plate spacing of the capacitor based on the second zero point and the second resonant point set for the second zero point, the capacitor adjustment module 602 is specifically used for:

[0165] If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonant point, a third control command is sent to the motor set for the capacitor. The third control command is used to instruct the motor to adjust from the default second direction to the first direction and drive the first plate of the capacitor to move along the first direction, wherein the first direction is the direction of decreasing the plate spacing of the capacitor and the second direction is the direction of increasing the plate spacing of the capacitor.

[0166] If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonant point, a fourth control command is sent to the motor. The fourth control command is used to instruct the motor to adjust from the default first direction to the second direction and drive the first plate of the capacitor to move along the second direction.

[0167] In an optional embodiment, the capacitor adjustment module 602 determines that the reflected power of the RF power supply meets a preset reflected power condition if the following condition is met:

[0168] During the adjustment of the capacitor plate spacing, the reflected power first decreases and then increases.

[0169] In an optional embodiment, when adjusting the plate spacing of the capacitors in the RF device based on the phase detection result until the reflected power of the RF power supply corresponding to the RF device meets the preset reflected power condition, the capacitor adjustment module 602 is specifically used for:

[0170] When it is determined that the reflected power meets the reflected power condition, a fifth control command is sent to the motor set for the capacitor; the fifth control command is used to instruct the motor to stop adjusting the plate spacing of the capacitor.

[0171] Based on the description of the method and apparatus embodiments above, an exemplary embodiment of the present invention also provides an electronic device, including: at least one processor; and a memory communicatively connected to the at least one processor. The memory stores a computer program executable by the at least one processor, which, when executed by the at least one processor, causes the electronic device to perform the method according to an embodiment of the present invention.

[0172] This application also provides a non-transitory computer-readable storage medium storing a computer program, wherein the computer program, when executed by a computer's processor, is used to cause the computer to perform a method according to an embodiment of this application.

[0173] This application also provides a computer program product, including a computer program, wherein the computer program, when executed by a computer's processor, is used to cause the computer to perform a method according to an embodiment of this application.

[0174] See Figure 7The diagram shown below illustrates the structure of an electronic device 700 that can serve as a server or client in this application, and is an example of a hardware device that can be applied to various aspects of this application. The electronic device is intended to represent various forms of digital electronic computer devices, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices, and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the application described and / or claimed herein.

[0175] like Figure 7 As shown, the electronic device 700 includes a computing unit 701, which can perform various appropriate actions and processes based on a computer program stored in a read-only memory (ROM) 702 or a computer program loaded from a storage unit 708 into a random access memory (RAM) 703. The RAM 703 may also store various programs and data required for the operation of the device 700. The computing unit 701, ROM 702, and RAM 703 are interconnected via a bus 704. An input / output (I / O) interface 705 is also connected to the bus 704.

[0176] Multiple components in electronic device 700 are connected to I / O interface 705, including: input unit 706, output unit 707, storage unit 708, and communication unit 709. Input unit 706 can be any type of device capable of inputting information to electronic device 700. Input unit 706 can receive input digital or character information and generate key signal inputs related to user settings and / or function control of electronic device. Output unit 707 can be any type of device capable of presenting information and may include, but is not limited to, a display, speaker, video / audio output terminal, vibrator, and / or printer. Storage unit 708 may include, but is not limited to, disk and optical disk. Communication unit 709 allows electronic device 700 to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks, and may include, but is not limited to, modems, network cards, infrared communication devices, wireless communication transceivers and / or chipsets, such as Bluetooth devices, WiFi devices, worldwide interoperability for microwave access (WiMax) devices, cellular communication devices, and / or the like.

[0177] The computing unit 701 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of the computing unit 701 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various artificial intelligence (AI) computing chips, various computing units running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. The computing unit 701 performs the various methods and processes described above. For example, in some embodiments, the power regulation method described above can be implemented as a computer software program, which is tangibly contained in a machine-readable medium, such as storage unit 708. In some embodiments, part or all of the computer program can be loaded and / or installed on the electronic device 700 via ROM 702 and / or communication unit 709. In some embodiments, the computing unit 701 can be configured to perform the power regulation method described above by any other suitable means (e.g., by means of firmware).

[0178] The program code used to implement the methods of this application may be written in any combination of one or more programming languages. This program code may be provided to a processor or controller of a general-purpose computer, special-purpose computer, or other programmable data processing device, such that when executed by the processor or controller, the functions / operations specified in the flowcharts and / or block diagrams are implemented. The program code may be executed entirely on a machine, partially on a machine, as a standalone software package partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0179] In the context of this application, a machine-readable medium can be a tangible medium that may contain or store a program for use by or in conjunction with an instruction execution system, apparatus, or device. A machine-readable medium can be a machine-readable signal medium or a machine-readable storage medium. A machine-readable medium can be, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination of the foregoing. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, RAM, ROM, erasable programmable read-only memory (EPROM) or flash memory, optical fibers, compact disc read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.

[0180] As used in this application, the terms "machine-readable medium" and "computer-readable medium" refer to any computer program product, device, and / or apparatus (e.g., disk, optical disk, memory, programmable logic device, PLD) used to provide machine instructions and / or data to a programmable processor, including machine-readable media that receive machine instructions as machine-readable signals. The term "machine-readable signal" refers to any signal used to provide machine instructions and / or data to a programmable processor.

[0181] To provide interaction with a user, the systems and techniques described herein can be implemented on a computer having: a display device (e.g., a cathode ray tube (CRT) or liquid crystal display (LCD) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the computer. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including sound input, voice input, or tactile input).

[0182] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as a data server), or computing systems that include middleware components (e.g., an application server), or computing systems that include frontend components (e.g., a user computer with a graphical user interface or web browser through which a user can interact with implementations of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., a communication network). Examples of communication networks include local area networks (LANs), wide area networks (WANs), and the Internet.

[0183] Computer systems can include clients and servers. Clients and servers are generally located far apart and typically interact through communication networks. Client-server relationships are created by computer programs running on the respective computers and having a client-server relationship with each other.

[0184] Furthermore, it should be understood that the above-disclosed embodiments are merely preferred embodiments of this application and should not be construed as limiting the scope of the invention. Therefore, any equivalent variations made in accordance with the claims of this invention are still within the scope of this application.

Claims

1. A power regulation method, characterized in that, include: Phase detection processing is performed on the voltage and current signals in the radio frequency device of the ion implanter to obtain a phase detection result; wherein the frequency of the voltage signal and the frequency of the current signal are the same, and the phase detection result characterizes the phase difference between the voltage signal and the current signal; Based on the phase detection result, the plate spacing of the capacitors in the radio frequency device is adjusted until the reflected power of the radio frequency power supply corresponding to the radio frequency device meets a preset reflected power condition; wherein, the reflected power condition is used to indicate the output power range set for the radio frequency power supply, and the output power range includes the maximum output power of the radio frequency power supply; adjusting the plate spacing of the capacitors in the radio frequency device based on the phase detection result includes: obtaining the first zero point of the voltage signal and the current signal within a unit signal period corresponding to the voltage signal based on the phase detection result; the first zero point is an intersection point of the current waveform of the current signal and the voltage waveform of the voltage signal within the unit signal period; based on the first zero point and the first zero point... The spacing between the capacitor plates is adjusted by setting a first resonant point; or, based on the phase detection result, a second zero point is obtained for the voltage signal and the current signal within a unit signal period corresponding to the voltage signal; the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the first zero point, and the first zero point and the second zero point are two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal within the unit signal period; the spacing between the capacitor plates is adjusted based on the second zero point and a second resonant point set for the second zero point. If the following condition is met, it is determined that the reflected power of the RF power supply meets the preset reflected power condition: during the adjustment of the spacing between the capacitor plates, the reflected power changes by first decreasing and then increasing.

2. The method as described in claim 1, characterized in that, The adjustment of the plate spacing of the capacitor based on the first zero point and the first resonant point set for the first zero point includes: If the frequency value corresponding to the first zero point is greater than the frequency value corresponding to the first resonant point, a first control command is sent to the motor configured for the capacitor; the first control command is used to instruct the motor to drive the first plate of the capacitor to move along a first direction, the first direction being the direction of reducing the plate spacing of the capacitor; If the frequency value corresponding to the first zero point is less than the frequency value corresponding to the first resonant point, a second control command is sent to the motor; the second control command is used to instruct the motor to drive the first plate of the capacitor to move along a second direction, the second direction being the direction of increasing the plate spacing of the capacitor.

3. The method as described in claim 1, characterized in that, The adjustment of the plate spacing of the capacitor based on the second zero point and the second resonant point set for the second zero point includes: If the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the second resonant point, a third control command is sent to the motor configured for the capacitor; the third control command is used to instruct the motor to adjust from the default second direction to the first direction, and drive the first plate of the capacitor to move along the first direction, wherein the first direction is the direction of decreasing the plate spacing of the capacitor, and the second direction is the direction of increasing the plate spacing of the capacitor; If the frequency value corresponding to the second zero point is less than the frequency value corresponding to the second resonant point, a fourth control command is sent to the motor; the fourth control command is used to instruct the motor to adjust from the default first direction to the second direction, and drive the first plate of the capacitor to move along the second direction.

4. The method according to any one of claims 1 to 3, characterized in that, The step of adjusting the plate spacing of the capacitors in the radio frequency device based on the phase detection result until the reflected power of the radio frequency power supply corresponding to the radio frequency device meets the preset reflected power condition includes: When it is determined that the reflected power meets the reflected power condition, a fifth control command is sent to the motor configured for the capacitor; the fifth control command is used to instruct the motor to stop adjusting the plate spacing of the capacitor.

5. A power regulation device, characterized in that, include: The signal phase detection module is used to perform phase detection processing on the voltage signal and the current signal in the radio frequency device of the ion implanter to obtain the phase detection result; wherein the frequency of the voltage signal and the frequency of the current signal are the same, and the phase detection result characterizes the phase difference between the voltage signal and the current signal; A capacitor adjustment module is used to adjust the plate spacing of capacitors in the radio frequency device based on the phase detection result until the reflected power of the radio frequency power supply corresponding to the radio frequency device meets a preset reflected power condition; wherein, the reflected power condition is used to indicate the output power range set for the radio frequency power supply, and the output power range includes the maximum output power of the radio frequency power supply; adjusting the plate spacing of capacitors in the radio frequency device based on the phase detection result includes: obtaining a first zero point of the voltage signal and the current signal within a unit signal period corresponding to the voltage signal based on the phase detection result; the first zero point is an intersection point of the current waveform of the current signal and the voltage waveform of the voltage signal within the unit signal period; based on the first zero point and the... The first resonant point set at the first zero point adjusts the plate spacing of the capacitor; or, based on the phase detection result, the second zero point of the voltage signal and the current signal within the unit signal period corresponding to the voltage signal is obtained; the frequency value corresponding to the second zero point is greater than the frequency value corresponding to the first zero point, and the first zero point and the second zero point are the two intersection points of the current waveform of the current signal and the voltage waveform of the voltage signal within the unit signal period; the plate spacing of the capacitor is adjusted based on the second zero point and the second resonant point set for the second zero point. If the following condition is met, it is determined that the reflected power of the RF power supply meets the preset reflected power condition: during the process of adjusting the plate spacing of the capacitor, the reflected power changes by first decreasing and then increasing.

6. An electronic device, comprising: processor; as well as Stored program memory, The program includes instructions that, when executed by the processor, cause the processor to perform the method as described in any one of claims 1-4.

7. A non-transitory computer-readable storage medium storing computer instructions, wherein, The computer instructions are used to cause the computer to perform the method as described in any one of claims 1-4.

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