Friction differential type four-foot driving plane universal bionic stepping piezoelectric actuator

Abstract

The invention discloses a friction differential type four-foot driving plane universal bionic stepping piezoelectric actuator which comprises a driving mechanism A, a driving mechanism B, a driving mechanism C, a driving mechanism D, an output end A, an output end B, an output end C, an output end D and a supporting frame. The end parts of the four corners of the support frame are fixedly connected with an output end A, an output end B, an output end C and an output end D respectively; the driving mechanism A comprises a piezoelectric wafer, a driving hinge, a driving support and a driving foot; the driving mechanism A, the driving mechanism B, the driving mechanism C and the driving mechanism D can complete displacement in any direction in a time sequence, due to the existence of friction force / torque difference, the driving mechanisms return to the initial state one by one without affecting the whole actuator after generating displacement, the process is continuously circulated and repeated, and the whole actuator is not affected. And the actuator can realize cross-scale plane universal stepping linear motion or stepping rotary motion.

Description

Technical Field

[0001] The invention belongs to the field of precision driving, and in particular relates to a friction differential quadruped-driven planar universal bionic stepping piezoelectric actuator. Background Art

[0002] Precision drive technology is one of the key technologies in the field of modern industrial automation and high-end manufacturing. It is widely used in high-tech industries such as semiconductor manufacturing, optical instruments, medical devices, robotics, and aerospace. The core of precision drive technology is to achieve high-precision, high-speed, and high-stability motion control of mechanical systems to meet the increasingly stringent requirements of modern industry for processing accuracy, production efficiency, and reliability. Although traditional mechanical drive technologies (such as stepper motors, servo motors, etc.) can achieve certain precision motion control, in the field of ultra-precision, their performance is often limited by factors such as mechanical structure gaps, friction, and inertia, making it difficult to meet the needs of high precision and high dynamic response. In contrast, piezoelectric drive technology, as an important technology in the field of precision drive, has the significant advantages of high precision, high response speed, no mechanical friction, and compact structure. It is widely used in precision positioning, micro-nano processing, optical adjustment, biomedical engineering, and aerospace, especially in situations where submicron or even nanometer precision is required. Piezoelectric drive technology has shown an irreplaceable role. Among them, the piezoelectric stepping actuators based on the stepping principle are mainly divided into inchworm-type piezoelectric actuators, seal-type piezoelectric actuators and inertial piezoelectric actuators according to their different structural compositions and driving principles.

[0003] The existing seal-type piezoelectric stepping actuator is mainly composed of a feed unit, a continuous clamping unit and an intermittent clamping unit. The design of the intermittent clamping unit causes the seal-type piezoelectric stepping actuator to have a large parasitic displacement and a single degree of freedom, which is not conducive to high-resolution multi-degree-of-freedom motion.

[0004] The present invention is based on the differential principle, cancels the clamping action of the existing seal-type piezoelectric stepping actuator, eliminates parasitic displacement, makes the actuator movement more precise, and solves the problem of single degree of freedom of the seal-type piezoelectric stepping actuator through compact structural design and different control voltage signals, and realizes integrated cross-scale stepping motion with multiple degrees of freedom of planar universal linear-rotation. Summary of the invention

[0005] The present invention aims to solve the problems of single degree of freedom, complex structure and large parasitic displacement of the existing seal-type piezoelectric stepping actuator, and proposes a friction differential quadruped-driven planar universal bionic stepping piezoelectric actuator.

[0006] A friction differential quadruped-driven planar universal bionic stepping piezoelectric actuator, comprising a driving mechanism A, a driving mechanism B, a driving mechanism C, a driving mechanism D, an output end A, an output end B, an output end C, an output end D and a support frame; The support frame is a four-pointed star structure, and the ends of the four corners of the support frame are respectively fixedly connected to the output terminal A, the output terminal B, the output terminal C, and the output terminal D; A driving mechanism A is fixedly connected between the output terminal A and the output terminal D; A driving mechanism B is fixedly connected between the output terminal A and the output terminal B; A driving mechanism C is fixedly connected between the output terminal B and the output terminal C; A driving mechanism D is fixedly connected between the output terminal C and the output terminal D; The driving mechanism A includes two pairs of piezoelectric chips, two driving hinges, a driving support and a driving foot; the ends of the two driving hinges that are far away from each other are fixedly connected to the output end D and the output end A respectively, and the ends of the two driving hinges that are close to each other are fixedly connected to the driving support; Two pairs of piezoelectric chips are respectively connected to the two sides of the two driving hinges of the driving mechanism A; The drive foot includes a set ball screw, which is installed in an adjustment threaded hole in the center of the drive support; Driving mechanism A, driving mechanism B, driving mechanism C, and driving mechanism D can complete displacement in any direction in sequence. Due to the existence of friction / torque difference, after each driving mechanism is displaced, it returns to the initial state one by one without affecting the entire actuator. By repeating this process in a cycle, the actuator can realize cross-scale plane universal stepping linear motion or stepping rotational motion.

[0007] Preferably, the driving foot also includes a fastening nut and a spring washer, and the spring washer and the fastening nut are sequentially mounted on the fixed ball screw.

[0008] Preferably, there is a through threaded hole in the center of the support frame, and there is a through threaded hole on the output end A, output end B, output end C, and output end D. The through threaded holes are used to connect external devices to output motion and power outward.

[0009] Preferably, the ceramic bead end of the fixed ball screw is in frictional contact with the working plane, and the four driving feet can be leveled by adjusting the fixed ball screw so that the pressure of each driving foot on the working plane is the same, and the spring washer and the fastening nut can fasten the fixed ball screw to the driving support.

[0010] Beneficial effects of the present invention: Friction / torque difference is generated by four evenly arranged driving mechanisms, thereby realizing planar universal stepping linear motion and stepping rotational motion at the output end by utilizing the differential principle. This design eliminates the parasitic displacement caused by the clamping motion of the existing seal-type piezoelectric stepping actuator, has high precision, and solves the problem of single degree of freedom of the seal-type piezoelectric stepping actuator through compact structural design and different control voltage signals, realizing integrated cross-scale stepping motion with multiple degrees of freedom of planar universal linear-rotation. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 It is a schematic diagram of the structure of the driving foot of the present invention; Figure 3 It is a schematic diagram of the distribution of piezoelectric chips of the present invention; Figure 4 It is a simplified structural motion principle diagram of the driving mechanism A of the present invention; Figure 5 It is a fluctuation diagram of the voltage signal of the piezoelectric chip control when the piezoelectric chip moves in the positive direction of the X and Y axes and rotates in the clockwise direction; Figure 6 , Figure 7 This is a fluctuation diagram of the voltage signal of the piezoelectric chip control when the piezoelectric chip moves in a direction with an angle of 45° with the X-axis; Figure 8 It is a principle diagram of the present invention moving in the positive direction of the X-axis under the control voltage drive; Fig. 9 It is a principle diagram of the present invention moving in the positive direction of the Y axis under the control voltage drive; Fig.10 It is a principle diagram of the present invention moving in a direction of 45° with respect to the X-axis under the driving of a control voltage; Fig.11 It is a principle diagram of the clockwise rotation movement of the present invention driven by a control voltage; Among them, the reference numerals in the figure are: 1: driving mechanism A; 2: piezoelectric chip; 3: driving hinge; 4: driving foot; 5: driving support; 6: output end A; 7: driving mechanism B; 8: output end B; 9: driving mechanism C; 10: output end C; 11: driving mechanism D; 12: support frame; 13: output end D; 14: spring washer; 15: fastening nut; 16: fixed ball screw; 1-1: piezoelectric chip A; 1-2: piezoelectric chip B; 1-3: piezoelectric chip C; 1-4: piezoelectric chip D; 2-1: piezoelectric chip E; 2-2: piezoelectric chip F; 2-3: piezoelectric chip G; 2-4: piezoelectric chip H; 3-1: piezoelectric chip I; 3-2: piezoelectric chip J; 3-3: piezoelectric chip K; 3-4: piezoelectric chip L; 4-1: piezoelectric chip M; 4-2: piezoelectric chip N; 4-3: piezoelectric chip P; 4-4: piezoelectric chip Q. DETAILED DESCRIPTION

[0012] In order to make the purpose, technical solutions and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work are protected by the present application.

[0013] like Figure 1-3 As shown, a friction differential quadruped-driven planar universal bionic stepping piezoelectric actuator comprises a driving mechanism A1, a driving mechanism B7, a driving mechanism C9, a driving mechanism D11, an output end A6, an output end B8, an output end C10, an output end D13 and a support frame 12; The support frame 12 is a four-pointed star-shaped structure, which is responsible for supporting the structure of the entire actuator. The ends of the four corners of the support frame 12 are respectively fixedly connected to the output terminal A6, the output terminal B8, the output terminal C10, and the output terminal D13; A driving mechanism A1 is fixedly connected between the output terminal A6 and the output terminal D13; A driving mechanism B7 is fixedly connected between the output terminal A6 and the output terminal B8; A driving mechanism C9 is fixedly connected between the output terminal B8 and the output terminal C10; A driving mechanism D11 is fixedly connected between the output terminal C10 and the output terminal D13; The driving mechanism A1 includes two pairs of piezoelectric chips 2, two driving hinges 3, a driving support 5 and a driving foot 4; the ends of the two driving hinges 3 that are far away from each other are fixedly connected to the output end D13 and the output end A6 respectively, and the ends of the two driving hinges 3 that are close to each other are fixedly connected to the driving support 5; Two pairs of piezoelectric chips 2 are glued to the two sides of the two driving hinges 3 of the driving mechanism A1 respectively; The driving foot 4 includes a fixed ball screw 16, a fastening nut 15, and a spring washer 14. The fixed ball screw 16 is installed in the adjusting threaded hole at the center of the driving support 5, and the spring washer 14 and the fastening nut 15 are installed on the fixed ball screw 16 in sequence; Driving mechanism A1, driving mechanism B7, driving mechanism C9, and driving mechanism D11 can complete displacement in any direction in a timely manner. Due to the existence of friction / torque difference, after each driving mechanism is displaced, it returns to the initial state one by one without affecting the entire actuator. By repeating this process in a cycle, the actuator can realize cross-scale plane universal stepping linear motion or stepping rotational motion.

[0014] like Figure 1-3 As shown, further, the two pairs of piezoelectric chips 2 used by the driving mechanism A1 are piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, and piezoelectric chip D1-4; The piezoelectric chip A1-1 and the piezoelectric chip B1-2 are symmetrically glued on both sides of a driving hinge 3 in the driving mechanism A1; The piezoelectric chip C1-3 and the piezoelectric chip D1-4 are symmetrically glued on both sides of another driving hinge 3 in the driving mechanism A1; The two pairs of piezoelectric chips 2 used by the driving mechanism B7 are piezoelectric chip E2-1, piezoelectric chip F2-2, piezoelectric chip G2-3, and piezoelectric chip H2-4; The piezoelectric chip E2-1 and the piezoelectric chip F2-2 are symmetrically glued on both sides of a driving hinge 3 in the driving mechanism B7; The piezoelectric chip G2-3 and the piezoelectric chip H2-4 are symmetrically glued on both sides of another driving hinge 3 in the driving mechanism B7; The two pairs of piezoelectric chips 2 used by the driving mechanism C9 are piezoelectric chip I3-1, piezoelectric chip J3-2, piezoelectric chip K3-3, and piezoelectric chip L3-4; The piezoelectric chip I3-1 and the piezoelectric chip J3-2 are symmetrically glued to the two sides of a driving hinge 3 in the driving mechanism C9; The piezoelectric chip K3-3 and the piezoelectric chip L3-4 are symmetrically glued on both sides of another driving hinge 3 in the driving mechanism C9; The two pairs of piezoelectric chips 2 used by the driving mechanism D11 are piezoelectric chip M4-1, piezoelectric chip N4-2, piezoelectric chip P4-3, and piezoelectric chip Q4-4; The piezoelectric chip M4-1 and the piezoelectric chip N4-2 are symmetrically glued on both sides of a driving hinge 3 in the driving mechanism D11; The piezoelectric chip P4-3 and the piezoelectric chip Q4-4 are symmetrically glued to the two sides of another driving hinge 3 in the driving mechanism D11.

[0015] like Figure 1 As shown, more specifically, there is a through threaded hole in the center of the support frame 12, and there is a through threaded hole on the output end A6, the output end B8, the output end C10, and the output end D13. The through threaded holes are used to connect external devices to output motion and power outward.

[0016] like Figure 1 and Figure 2 As shown, further, the ceramic bead end of the fixed ball screw 16 is in frictional contact with the working plane. By adjusting the fixed ball screw 16, the four driving feet 4 can be leveled so that the pressure of each driving foot 4 on the working plane is the same. The spring washer 14 and the fastening nut 15 can fasten the fixed ball screw 16 to the driving support 5.

[0017] like Figure 1 As shown, further, the other structures of the driving mechanism A1, the driving mechanism B7, the driving mechanism C9 and the driving mechanism D11 except the piezoelectric chip 2 and the driving foot 4, as well as the output end A6, the output end B8, the output end C10, the output end D13 and the support frame 12 are all integrally processed from a whole piece of elastic metal material.

[0018] The working principle of the circular motion trajectory of a single driving mechanism of the present invention (taking driving mechanism A1 as an example) is as follows: like Figure 1 and Figure 4 As shown, Figure 4 It is a simplified diagram of the structure of the driving mechanism A1, wherein the red line represents the driving mechanism A1 in the original position, the black line represents the driving mechanism A1 in the position after movement, and the dotted line represents the circular motion trajectory that the driving foot 4 of the driving mechanism A1 can complete.

[0019] like Figure 1-Figure 5 As shown, when the driving mechanism A1 moves in the positive direction of the X-axis, that is, in the direction with an angle of 0° with the X-axis, the piezoelectric chip B1-2 and the piezoelectric chip C1-3 are input with a voltage U1, and the piezoelectric chip A1-1 and the piezoelectric chip D1-4 are input with a voltage -U1. Under the action of the inverse piezoelectric effect, the piezoelectric chip B1-2 and the piezoelectric chip C1-3 gradually extend, and the piezoelectric chip A1-1 and the piezoelectric chip D1-4 gradually shorten, driving the driving hinge 3 to bend, thereby driving the driving foot 4 to complete a linear motion in the positive direction of the X-axis, that is, in the direction with an angle of 0° with the X-axis, as shown in FIG. Figure 4 (a) as shown; like Figure 1-Figure 4 , Figure 6 and Figure 7 As shown, when the driving mechanism A1 moves in the direction of 45° with the X-axis, the piezoelectric chip A1-1 inputs voltage U3, the piezoelectric chip B1-2 inputs voltage -U3, the piezoelectric chip C1-3 inputs voltage U2, and the piezoelectric chip D1-4 inputs voltage -U2. Under the inverse piezoelectric effect, the piezoelectric chip A1-1 and the piezoelectric chip C1-3 gradually extend, and the piezoelectric chip B1-2 and the piezoelectric chip D1-4 gradually shorten, driving the driving hinge 3 to bend, thereby driving the driving foot 4 to complete a linear motion in the direction of 45° with the X-axis, as shown in FIG. Figure 4 (b) as shown; like Figure 1-Figure 5 As shown, when the driving mechanism A1 moves in the positive direction of the Y axis, that is, in the direction with an angle of 90° with the X axis, the piezoelectric chip A1-1 and the piezoelectric chip C1-3 are input with a voltage U1, and the piezoelectric chip B1-2 and the piezoelectric chip D1-4 are input with a voltage -U1. Under the action of the inverse piezoelectric effect, the piezoelectric chip A1-1 and the piezoelectric chip C1-3 gradually extend, and the piezoelectric chip B1-2 and the piezoelectric chip D1-4 gradually shorten, driving the driving hinge 3 to bend, thereby driving the driving foot 4 to complete a linear motion in the positive direction of the Y axis, that is, in the direction with an angle of 90° with the X axis, as shown in FIG. Figure 4 (c) as shown; To summarize, by applying different control voltage signals to each piezoelectric chip of the driving mechanism A1, the driving foot 4 of the driving mechanism A1 can realize linear motion in the directions of 0°, 45°, and 90° with the X-axis. Similarly, by applying different control voltage signals to each piezoelectric chip of the driving mechanism A1, the driving foot 4 of the driving mechanism A1 can realize linear motion in any angle direction to reach any point on the circular motion trajectory, which will not be elaborated here. Moreover, since the structural configuration of the driving mechanism B7, the driving mechanism C9, and the driving mechanism D11 are exactly the same as that of the driving mechanism A1, each of them can also realize linear motion in any angle direction, which will not be elaborated here.

[0020] Working principle of the present invention: like Figure 1 , Figure 2 , Figure 3 As shown, in the initial state, by adjusting the fixed ball screws 16 on the four driving feet 4, the pressure of the four driving feet 4 on the working plane is made the same, that is, the maximum static friction between the driving mechanism A1, the driving mechanism B7, the driving mechanism C9, the driving mechanism D11 and the working plane is equal, and then the fixed ball screws 16 are tightened by the spring washer 14 and the fastening nut 15, that is, the driving foot 4 is tightened; like Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 8 As shown, when the actuator moves in the positive direction of the X-axis, that is, in the direction of the angle 0° with the X-axis, the piezoelectric chip A1-1 and the piezoelectric chip D1-4 adopt the following Figure 5 The I-type control voltage shown, the piezoelectric chip B1-2, the piezoelectric chip C1-3 adopts Figure 5 The II type control voltage shown, the piezoelectric chip F2-2, the piezoelectric chip H2-4 adopts Figure 5 The III-type control voltage shown, the piezoelectric chip E2-1 and the piezoelectric chip G2-3 adopt the following Figure 5 The IV type control voltage shown, the piezoelectric chip I3-1, the piezoelectric chip L3-4 adopts Figure 5The V-type control voltage shown, the piezoelectric chip J3-2, the piezoelectric chip K3-3 adopts Figure 5 The VI type control voltage shown, the piezoelectric chip M4-1, the piezoelectric chip P4-3 adopts the following Figure 5 The VII type control voltage shown, the piezoelectric chip N4-2, the piezoelectric chip Q4-4 adopts the following Figure 5 The eight pairs of piezoelectric chips, driven by the control voltage signal, can control the driving feet 4 of the driving mechanisms A1, B7, C9 and D11 to produce sequential displacement, so that the actuator can complete the stepping linear motion in the positive direction of the X-axis, that is, in the direction of the angle 0° with the X-axis, as shown in FIG. Figure 8 As shown; The specific movement process of the present invention when moving in the positive direction of the X-axis, that is, in the direction with an angle of 0° with the X-axis, is as follows: 1. During the 0-T / 5 process, the voltage of the piezoelectric chip A1-1, the piezoelectric chip D1-4, the piezoelectric chip F2-2, the piezoelectric chip H2-4, the piezoelectric chip I3-1, the piezoelectric chip L3-4, the piezoelectric chip M4-1, and the piezoelectric chip P4-3 rises linearly from 0 to U1, and the voltage of the piezoelectric chip B1-2, the piezoelectric chip C1-3, the piezoelectric chip E2-1, the piezoelectric chip G2-3, the piezoelectric chip J3-2, the piezoelectric chip K3-3, the piezoelectric chip N4-2, and the piezoelectric chip Q4-4 drops linearly from 0 to -U1; Figure 1-3 and Figure 5 , Figure 8 As shown, under the action of the inverse piezoelectric effect, the piezoelectric chip A1-1, the piezoelectric chip D1-4, the piezoelectric chip F2-2, the piezoelectric chip H2-4, the piezoelectric chip I3-1, the piezoelectric chip L3-4, the piezoelectric chip M4-1, and the piezoelectric chip P4-3 gradually extend, and the piezoelectric chip B1-2, the piezoelectric chip C1-3, the piezoelectric chip E2-1, the piezoelectric chip G2-3, the piezoelectric chip J3-2, the piezoelectric chip K3-3, the piezoelectric chip N4-2, and the piezoelectric chip Q4-4 gradually shorten, driving the driving hinges 3 of the driving mechanisms A1, B7, C9, and D11 to bend, and the four driving feet 4 all have a tendency to move in the negative direction of the X-axis, but due to the existence of friction, the four driving feet 4 are fixed, thereby driving the output terminals A6, B8, C10, D13 and the support frame 12 to simultaneously generate a positive displacement ∆ L in the X-axis; 2. In the process of T / 5-2T / 5, the voltage of piezoelectric chip A1-1 and piezoelectric chip D1-4 decreases linearly from U1 to 0, the voltage of piezoelectric chip B1-2 and piezoelectric chip C1-3 increases linearly from -U1 to 0, the voltage of piezoelectric chip F2-2, piezoelectric chip H2-4, piezoelectric chip I3-1, piezoelectric chip L3-4, piezoelectric chip M4-1, and piezoelectric chip P4-3 remains unchanged at U1, and the voltage of piezoelectric chip E2-1, piezoelectric chip G2-3, piezoelectric chip J3-2, piezoelectric chip K3-3, piezoelectric chip N4-2, and piezoelectric chip Q4-4 remains unchanged at -U1; Figure 1-3 , Figure 5 , Figure 8 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chips A1-1, B1-2, C1-3, and D1-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism A1 to bend, thereby driving the driving foot 4 of the driving mechanism A1 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms B7, C9, and D11 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism A1 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 3. In the process of 2T / 5-3T / 5, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, and piezoelectric chip D1-4 is 0, the voltage of piezoelectric chip F2-2 and piezoelectric chip H2-4 decreases linearly from U1 to 0, the voltage of piezoelectric chip E2-1 and piezoelectric chip G2-3 increases linearly from -U1 to 0, the voltage of piezoelectric chip I3-1, piezoelectric chip L3-4, piezoelectric chip M4-1, and piezoelectric chip P4-3 remains unchanged at U1, and the voltage of piezoelectric chip J3-2, piezoelectric chip K3-3, piezoelectric chip N4-2, and piezoelectric chip Q4-4 remains unchanged at -U1; Figure 1-3 , Figure 5 , Figure 8 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip E2-1, the piezoelectric chip F2-2, the piezoelectric chip G2-3, and the piezoelectric chip H2-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism B7 to bend, thereby driving the driving foot 4 of the driving mechanism B7 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms A1, C9, and D11 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism B7 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 4. In the process of 3T / 5-4T / 5, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, piezoelectric chip D1-4, piezoelectric chip E2-1, piezoelectric chip F2-2, piezoelectric chip G2-3, and piezoelectric chip H2-4 is 0, the voltage of piezoelectric chip I3-1 and piezoelectric chip L3-4 decreases linearly from U1 to 0, the voltage of piezoelectric chip J3-2 and piezoelectric chip K3-3 increases linearly from -U1 to 0, the voltage of piezoelectric chip M4-1 and piezoelectric chip P4-3 remains unchanged at U1, and the voltage of piezoelectric chip N4-2 and piezoelectric chip Q4-4 remains unchanged at -U1; as Figure 1-3 , Figure 5 , Figure 8 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip I3-1, the piezoelectric chip J3-2, the piezoelectric chip K3-3, and the piezoelectric chip L3-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism C9 to bend, thereby driving the driving foot 4 of the driving mechanism C9 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms A1, B7, and D11 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism C9 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 5. In the 4T / 5-T process, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, piezoelectric chip D1-4, piezoelectric chip E2-1, piezoelectric chip F2-2, piezoelectric chip G2-3, piezoelectric chip H2-4, piezoelectric chip I3-1, piezoelectric chip J3-2, piezoelectric chip K3-3, and piezoelectric chip L3-4 is 0, the voltage of piezoelectric chip M4-1 and piezoelectric chip P4-3 decreases linearly from U1 to 0, and the voltage of piezoelectric chip N4-2 and piezoelectric chip Q4-4 increases linearly from -U1 to 0; Figure 1-3 , Figure 5 , Figure 8 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip M4-1, the piezoelectric chip N4-2, the piezoelectric chip P4-3, and the piezoelectric chip Q4-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism D11 to bend, thereby driving the driving foot 4 of the driving mechanism D11 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms A1, B7, and C9 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism D11 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; After a cycle of the actuator, the drive mechanism A1, drive mechanism B7, drive mechanism C9, and drive mechanism D11 can complete the movement in time, so that the actuator completes the positive displacement along the X-axis. Due to the existence of friction, each drive mechanism returns to the initial state one by one after completing the movement without affecting the entire actuator. The process is repeated continuously, and the actuator can achieve large-stroke cross-scale stepping linear motion. By applying the reverse driving voltage of the piezoelectric chip, the actuator can achieve stepping motion along the negative direction of the X-axis, that is, the direction with an angle of 180° with the X-axis, which will not be repeated here.

[0021] like Figure 1 , Figure 2 , Figure 3 , Figure 5 and Fig. 9 As shown, when the actuator moves in the positive direction of the Y axis, that is, in the direction of 90° with the X axis, the piezoelectric chip B1-2 and the piezoelectric chip D1-4 adopt the following Figure 5 The I-type control voltage shown, the piezoelectric chip A1-1 and the piezoelectric chip C1-3 adopt the following Figure 5 The II type control voltage shown, the piezoelectric chip F2-2, the piezoelectric chip G2-3 adopts Figure 5 The III-type control voltage shown, the piezoelectric chip E2-1 and the piezoelectric chip H2-4 adopt the following Figure 5 The IV type control voltage shown, the piezoelectric chip I3-1 and the piezoelectric chip K3-3 adopt the following Figure 5 The V-type control voltage shown, the piezoelectric chip J3-2, the piezoelectric chip L3-4 adopts Figure 5 The VI type control voltage shown, the piezoelectric chip N4-2, the piezoelectric chip P4-3 adopts the following Figure 5 The VII type control voltage shown, the piezoelectric chip M4-1 and the piezoelectric chip Q4-4 adopt the following Figure 5 The eight pairs of piezoelectric chips, driven by the control voltage signal, can control the driving feet 4 of the driving mechanisms A1, B7, C9 and D11 to produce sequential displacement, so that the actuator can complete the stepping linear motion in the positive direction of the Y axis, that is, in the direction of the angle of 90° with the X axis, as shown in FIG. Fig. 9 As shown; The specific movement process of the present invention when moving in the direction of the positive direction of the Y axis and the angle of 90° between the X axis is as follows: 1. During the 0-T / 5 process, the voltage of the piezoelectric chip B1-2, the piezoelectric chip D1-4, the piezoelectric chip F2-2, the piezoelectric chip G2-3, the piezoelectric chip I3-1, the piezoelectric chip K3-3, the piezoelectric chip N4-2, and the piezoelectric chip P4-3 rises linearly from 0 to U1, and the voltage of the piezoelectric chip A1-1, the piezoelectric chip C1-3, the piezoelectric chip E2-1, the piezoelectric chip H2-4, the piezoelectric chip J3-2, the piezoelectric chip L3-4, the piezoelectric chip M4-1, and the piezoelectric chip Q4-4 drops linearly from 0 to -U1; Figure 1-3 and Figure 5 , Fig. 9 As shown, under the action of the inverse piezoelectric effect, the piezoelectric chip B1-2, the piezoelectric chip D1-4, the piezoelectric chip F2-2, the piezoelectric chip G2-3, the piezoelectric chip I3-1, the piezoelectric chip K3-3, the piezoelectric chip N4-2, and the piezoelectric chip P4-3 gradually extend, and the piezoelectric chip A1-1, the piezoelectric chip C1-3, the piezoelectric chip E2-1, the piezoelectric chip H2-4, the piezoelectric chip J3-2, the piezoelectric chip L3-4, the piezoelectric chip M4-1, and the piezoelectric chip Q4-4 gradually shorten, driving the driving hinges 3 of the driving mechanisms A1, B7, C9, and D11 to bend, and the four driving feet 4 all have a tendency to move in the negative direction of the Y axis, but due to the existence of friction, the four driving feet 4 are fixed, thereby driving the output terminals A6, B8, C10, D13 and the support frame 12 to simultaneously generate a positive displacement ∆ L in the Y axis; 2. During the T / 5-2T / 5 process, the voltage of the piezoelectric chip B1-2 and the piezoelectric chip D1-4 decreases linearly from U1 to 0, the voltage of the piezoelectric chip A1-1 and the piezoelectric chip C1-3 increases linearly from -U1 to 0, the voltage of the piezoelectric chip F2-2, the piezoelectric chip G2-3, the piezoelectric chip I3-1, the piezoelectric chip K3-3, the piezoelectric chip N4-2, and the piezoelectric chip P4-3 remains unchanged at U1, and the voltage of the piezoelectric chip E2-1, the piezoelectric chip H2-4, the piezoelectric chip J3-2, the piezoelectric chip L3-4, the piezoelectric chip M4-1, and the piezoelectric chip Q4-4 remains unchanged at -U1; Figure 1-3 , Figure 5 and Fig. 9 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chips A1-1, B1-2, C1-3, and D1-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism A1 to bend, thereby driving the driving foot 4 of the driving mechanism A1 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms B7, C9, and D11 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism A1 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 3. In the process of 2T / 5-3T / 5, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, and piezoelectric chip D1-4 is 0, the voltage of piezoelectric chip F2-2 and piezoelectric chip G2-3 decreases linearly from U1 to 0, the voltage of piezoelectric chip E2-1 and piezoelectric chip H2-4 increases linearly from -U1 to 0, the voltage of piezoelectric chip I3-1, piezoelectric chip K3-3, piezoelectric chip N4-2, and piezoelectric chip P4-3 remains unchanged at U1, and the voltage of piezoelectric chip J3-2, piezoelectric chip L3-4, piezoelectric chip M4-1, and piezoelectric chip Q4-4 remains unchanged at -U1; Figure 1-3 and Figure 5 , Fig. 9 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip E2-1, the piezoelectric chip F2-2, the piezoelectric chip G2-3, and the piezoelectric chip H2-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism B7 to bend, thereby driving the driving foot 4 of the driving mechanism B7 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms A1, C9, and D11 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism B7 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 4. In the process of 3T / 5-4T / 5, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, piezoelectric chip D1-4, piezoelectric chip E2-1, piezoelectric chip F2-2, piezoelectric chip G2-3, and piezoelectric chip H2-4 is 0, the voltage of piezoelectric chip I3-1 and piezoelectric chip K3-3 decreases linearly from U1 to 0, the voltage of piezoelectric chip J3-2 and piezoelectric chip L3-4 increases linearly from -U1 to 0, the voltage of piezoelectric chip N4-2 and piezoelectric chip P4-3 remains unchanged at U1, and the voltage of piezoelectric chip M4-1 and piezoelectric chip Q4-4 remains unchanged at -U1; as Figure 1-3 , Figure 5 and Fig. 9 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip I3-1, the piezoelectric chip J3-2, the piezoelectric chip K3-3, and the piezoelectric chip L3-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism C9 to bend, thereby driving the driving foot 4 of the driving mechanism C9 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms A1, B7, and D11 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism C9 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 5. In the 4T / 5-T process, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, piezoelectric chip D1-4, piezoelectric chip E2-1, piezoelectric chip F2-2, piezoelectric chip G2-3, piezoelectric chip H2-4, piezoelectric chip I3-1, piezoelectric chip J3-2, piezoelectric chip K3-3, and piezoelectric chip L3-4 is 0, the voltage of piezoelectric chip N4-2 and piezoelectric chip P4-3 decreases linearly from U1 to 0, and the voltage of piezoelectric chip M4-1 and piezoelectric chip Q4-4 increases linearly from -U1 to 0; Figure 1-3 , Figure 5 and Fig. 9 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip M4-1, the piezoelectric chip N4-2, the piezoelectric chip P4-3, and the piezoelectric chip Q4-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism D11 to bend, thereby driving the driving foot 4 of the driving mechanism D11 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms A1, B7, and C9 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism D11 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; After a cycle of the actuator, the drive mechanism A1, drive mechanism B7, drive mechanism C9, and drive mechanism D11 can complete the movement in time, so that the actuator completes the positive displacement along the Y axis. Due to the existence of friction, each drive mechanism returns to the initial state one by one after completing the movement without affecting the entire actuator. The actuator can achieve large-stroke cross-scale stepping linear motion by repeating this process. By applying the reverse driving voltage of the piezoelectric chip, the actuator can achieve stepping motion along the negative direction of the Y axis, that is, the direction with an angle of 270° with the X axis, which will not be repeated here.

[0022] like Figure 1 , Figure 2 , Figure 3 , Figure 6 , Figure 7 and Fig.10 As shown, when the actuator moves in a direction with an angle of 45° with respect to the X-axis, the piezoelectric chip A1-1 adopts the following Figure 7 The II type control voltage shown, the piezoelectric chip B1-2 adopts Figure 7 The I-type control voltage shown, the piezoelectric chip C1-3 adopts Figure 6 The type II control voltage is shown, and the piezoelectric chips D1-4 are as follows Figure 6 The I-type control voltage shown, the piezoelectric chip E2-1 adopts Figure 6 The IV type control voltage shown, the piezoelectric chip F2-2 adopts Figure 6The III-type control voltage shown, the piezoelectric chip G2-3 adopts Figure 7 The IV type control voltage shown, the piezoelectric chip H2-4 adopts Figure 7 The III-type control voltage shown, the piezoelectric chip I3-1 adopts Figure 6 The V-type control voltage shown, the piezoelectric chip J3-2 adopts Figure 6 The VI type control voltage shown, the piezoelectric chip K3-3 adopts Figure 7 The V-type control voltage shown, the piezoelectric chip L3-4 adopts Figure 7 The VI type control voltage shown, the piezoelectric chip M4-1 adopts Figure 7 The VII type control voltage shown, the piezoelectric chip N4-2 adopts Figure 7 The VIII type control voltage shown, the piezoelectric chip P4-3 adopts Figure 6 The VII type control voltage shown, the piezoelectric chip Q4-4 adopts Figure 6 The eight pairs of piezoelectric chips, driven by the control voltage signal, can control the driving feet 4 of the driving mechanism A1, the driving mechanism B7, the driving mechanism C9, and the driving mechanism D11 to produce a timed displacement, so that the actuator completes a stepping linear motion along the direction of the angle 45° with the X-axis, as shown in FIG. Fig.10 As shown; The specific movement process of the present invention when moving in a direction with an angle of 45° with the X-axis is as follows: 1. In the 0-T / 5 process, the voltage of the piezoelectric chip D1-4, the piezoelectric chip F2-2, the piezoelectric chip I3-1, and the piezoelectric chip P4-3 rises linearly from 0 to U2, the voltage of the piezoelectric chip C1-3, the piezoelectric chip E2-1, the piezoelectric chip J3-2, and the piezoelectric chip Q4-4 drops linearly from 0 to -U2, the voltage of the piezoelectric chip B1-2, the piezoelectric chip H2-4, the piezoelectric chip K3-3, and the piezoelectric chip M4-1 rises linearly from 0 to U3, and the voltage of the piezoelectric chip A1-1, the piezoelectric chip G2-3, the piezoelectric chip L3-4, and the piezoelectric chip N4-2 drops linearly from 0 to -U3; Figure 1-3 , Figure 6 , Figure 7 and Fig.10As shown, under the inverse piezoelectric effect, the piezoelectric chip D1-4, the piezoelectric chip F2-2, the piezoelectric chip I3-1, the piezoelectric chip P4-3, the piezoelectric chip B1-2, the piezoelectric chip H2-4, the piezoelectric chip K3-3, and the piezoelectric chip M4-1 gradually stretch, and the piezoelectric chip C1-3, the piezoelectric chip E2-1, the piezoelectric chip J3-2, the piezoelectric chip Q4-4, the piezoelectric chip A1-1, the piezoelectric chip G2-3, the piezoelectric chip L3-4, and the piezoelectric chip N4-2 stretch. The pressure gradually shortens, driving the driving hinges 3 of the driving mechanism A1, the driving mechanism B7, the driving mechanism C9, and the driving mechanism D11 to bend, and the four driving feet 4 have a tendency to move in the negative direction of the angle 45° with the X-axis, that is, the direction of the angle 225° with the X-axis. However, due to the existence of friction, the four driving feet 4 are fixed, thereby driving the output end A6, the output end B8, the output end C10, the output end D13 and the support frame 12 to simultaneously generate a displacement ∆ L in the direction of the angle 45° with the X-axis; 2. In the process of T / 5-2T / 5, the voltage of piezoelectric chip D1-4 decreases linearly from U2 to 0, the voltage of piezoelectric chip C1-3 increases linearly from -U2 to 0, the voltage of piezoelectric chip B1-2 decreases linearly from U3 to 0, the voltage of piezoelectric chip A1-1 increases linearly from -U3 to 0, the voltage of piezoelectric chip F2-2, piezoelectric chip I3-1, and piezoelectric chip P4-3 remains unchanged at U2, the voltage of piezoelectric chip E2-1, piezoelectric chip J3-2, and piezoelectric chip Q4-4 remains unchanged at -U2, the voltage of piezoelectric chip H2-4, piezoelectric chip K3-3, and piezoelectric chip M4-1 remains unchanged at U3, the voltage of piezoelectric chip G2-3, piezoelectric chip L3-4, and piezoelectric chip N4-2 remains unchanged at -U3; Figure 1-3 , Figure 6 , Figure 7 and Fig.10 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chips A1-1, B1-2, C1-3, and D1-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism A1 to bend, thereby driving the driving foot 4 of the driving mechanism A1 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms B7, C9, and D11 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism A1 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 3. In the process of 2T / 5-3T / 5, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, and piezoelectric chip D1-4 is 0, the voltage of piezoelectric chip F2-2 decreases linearly from U2 to 0, the voltage of piezoelectric chip E2-1 increases linearly from -U2 to 0, the voltage of piezoelectric chip H2-4 decreases linearly from U3 to 0, the voltage of piezoelectric chip G2-3 increases linearly from -U3 to 0, the voltage of piezoelectric chip I3-1 and piezoelectric chip P4-3 remains unchanged at U2, the voltage of piezoelectric chip J3-2 and piezoelectric chip Q4-4 remains unchanged at -U2, the voltage of piezoelectric chip K3-3 and piezoelectric chip M4-1 remains unchanged at U3, the voltage of piezoelectric chip L3-4 and piezoelectric chip N4-2 remains unchanged at -U3; as Figure 1-3 , Figure 6 , Figure 7 and Fig.10 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip E2-1, the piezoelectric chip F2-2, the piezoelectric chip G2-3, and the piezoelectric chip H2-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism B7 to bend, thereby driving the driving foot 4 of the driving mechanism B7 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms A1, C9, and D11 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism B7 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 4. In the 3T / 5-4T / 5 process, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, piezoelectric chip D1-4, piezoelectric chip E2-1, piezoelectric chip F2-2, piezoelectric chip G2-3, and piezoelectric chip H2-4 is 0, the voltage of piezoelectric chip I3-1 decreases linearly from U2 to 0, the voltage of piezoelectric chip J3-2 increases linearly from -U2 to 0, the voltage of piezoelectric chip K3-3 decreases linearly from U3 to 0, the voltage of piezoelectric chip L3-4 increases linearly from -U3 to 0, the voltage of piezoelectric chip P4-3 remains unchanged at U2, the voltage of piezoelectric chip Q4-4 remains unchanged at -U2, the voltage of piezoelectric chip M4-1 remains unchanged at U3, and the voltage of piezoelectric chip N4-2 remains unchanged at -U3; as Figure 1-3 , Figure 6 , Figure 7 and Fig.10As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip I3-1, the piezoelectric chip J3-2, the piezoelectric chip K3-3, and the piezoelectric chip L3-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism C9 to bend, thereby driving the driving foot 4 of the driving mechanism C9 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms A1, B7, and D11 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism C9 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 5. In the 4T / 5-T process, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, piezoelectric chip D1-4, piezoelectric chip E2-1, piezoelectric chip F2-2, piezoelectric chip G2-3, piezoelectric chip H2-4, piezoelectric chip I3-1, piezoelectric chip J3-2, piezoelectric chip K3-3, and piezoelectric chip L3-4 is 0, the voltage of piezoelectric chip P4-3 decreases linearly from U2 to 0, the voltage of piezoelectric chip Q4-4 increases linearly from -U2 to 0, the voltage of piezoelectric chip M4-1 decreases linearly from U3 to 0, and the voltage of piezoelectric chip N4-2 increases linearly from -U3 to 0; as Figure 1-3 , Figure 6 , Figure 7 and Fig.10 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip M4-1, the piezoelectric chip N4-2, the piezoelectric chip P4-3, and the piezoelectric chip Q4-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism D11 to bend, thereby driving the driving foot 4 of the driving mechanism D11 to return to its initial position. Since the sum of the static friction forces of the driving feet 4 of the driving mechanisms A1, B7, and C9 on the moving plane is greater than the maximum static friction force of the driving feet 4 of the driving mechanism D11 on the moving plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; After a cycle of the actuator, the drive mechanisms A1, B7, C9, and D11 can complete the movement in sequence, so that the actuator completes the displacement ∆ L in the direction of the angle 45° with the X-axis. Due to the existence of friction, each drive mechanism returns to the initial state one by one after completing the movement without affecting the entire actuator. The actuator can achieve large-stroke cross-scale stepping linear motion by repeating this process. By applying the reverse driving voltage of the piezoelectric chip, the actuator can achieve stepping linear motion in the negative direction of the angle 45° with the X-axis, that is, the direction of the angle 225° with the X-axis, which will not be repeated here.

[0023] To summarize, according to the principle of friction differential, by applying different control voltage signals to each piezoelectric chip of drive mechanism A1, drive mechanism B7, drive mechanism C9, and drive mechanism D11, the actuator can complete stepping linear motion along the directions of 0°, 45°, 90°, 180°, 225°, and 270° with the X-axis. Similarly, for the remaining angles, by applying control voltage signals of different directions and sizes to each piezoelectric chip of drive mechanism A1, drive mechanism B7, drive mechanism C9, and drive mechanism D11, linear motion at any angle can be achieved, which will not be repeated here.

[0024] like Figure 1 , Figure 2 , Figure 3 , Figure 5 and Fig.11 As shown, when the actuator rotates clockwise, the piezoelectric chip A1-1 and the piezoelectric chip D1-4 adopt the following Figure 5 The I-type control voltage shown, the piezoelectric chip B1-2, the piezoelectric chip C1-3 adopts Figure 5 The II type control voltage shown, the piezoelectric chip E2-1 and the piezoelectric chip H2-4 adopt the following Figure 5 The III-type control voltage shown, the piezoelectric chip F2-2 and the piezoelectric chip G2-3 adopt the following Figure 5 The IV type control voltage shown, the piezoelectric chip J3-2 and the piezoelectric chip K3-3 adopt the following Figure 5 The V-type control voltage shown, the piezoelectric chip I3-1, the piezoelectric chip L3-4 adopts Figure 5 The VI type control voltage shown, the piezoelectric chip N4-2, the piezoelectric chip P4-3 adopts the following Figure 5 The VII type control voltage shown, the piezoelectric chip M4-1 and the piezoelectric chip Q4-4 adopt the following Figure 5 The eight pairs of piezoelectric chips can control the driving feet 4 of the driving mechanism A1, the driving mechanism B7, the driving mechanism C9, and the driving mechanism D11 to produce a timed displacement under the drive of the control voltage signal, so that the actuator completes the stepping rotation movement in the clockwise direction, such as Fig.11 As shown; The specific movement process of the present invention when moving in the clockwise direction is as follows: 1. In the 0-T / 5 process, the voltage of piezoelectric chip A1-1, piezoelectric chip D1-4, piezoelectric chip E2-1, piezoelectric chip H2-4, piezoelectric chip J3-2, piezoelectric chip K3-3, piezoelectric chip N4-2, and piezoelectric chip P4-3 rises linearly from 0 to U1, and the voltage of piezoelectric chip B1-2, piezoelectric chip C1-3, piezoelectric chip F2-2, piezoelectric chip G2-3, piezoelectric chip I3-1, piezoelectric chip L3-4, piezoelectric chip M4-1, and piezoelectric chip Q4-4 drops linearly from 0 to -U1; Figure 1-3, Figure 5 and Fig.11 As shown, under the action of the inverse piezoelectric effect, the piezoelectric chip A1-1, the piezoelectric chip D1-4, the piezoelectric chip E2-1, the piezoelectric chip H2-4, the piezoelectric chip J3-2, the piezoelectric chip K3-3, the piezoelectric chip N4-2, and the piezoelectric chip P4-3 gradually extend, and the piezoelectric chip B1-2, the piezoelectric chip C1-3, the piezoelectric chip F2-2, the piezoelectric chip G2-3, the piezoelectric chip I3-1, the piezoelectric chip L3-4, the piezoelectric chip M4-1, and the piezoelectric chip Q4-4 gradually shorten, driving the driving hinges 3 of the driving mechanisms A1, B7, C9, and D11 to bend, and the four driving feet 4 all have a tendency to move counterclockwise, but due to the existence of friction, the four driving feet 4 are fixed, thereby driving the output terminals A6, B8, C10, D13 and the support frame 12 to rotate clockwise at an angle ∆φ at the same time; 2. In the process of T / 5-2T / 5, the voltage of piezoelectric chip A1-1 and piezoelectric chip D1-4 decreases linearly from U1 to 0, the voltage of piezoelectric chip B1-2 and piezoelectric chip C1-3 increases linearly from -U1 to 0, the voltage of piezoelectric chip E2-1, piezoelectric chip H2-4, piezoelectric chip J3-2, piezoelectric chip K3-3, piezoelectric chip N4-2, and piezoelectric chip P4-3 remains unchanged at U1, and the voltage of piezoelectric chip F2-2, piezoelectric chip G2-3, piezoelectric chip I3-1, piezoelectric chip L3-4, piezoelectric chip M4-1, and piezoelectric chip Q4-4 remains unchanged at -U1; Figure 1-3 , Figure 5 and Fig.11 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chips A1-1, B1-2, C1-3, and D1-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism A1 to bend, thereby driving the driving foot 4 of the driving mechanism A1 to return to its initial position. Since the sum of the friction torques of the driving feet 4 of the driving mechanisms B7, C9, and D11 on the motion plane is greater than the maximum friction torque of the driving feet 4 of the driving mechanism A1 on the motion plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 3. In the process of 2T / 5-3T / 5, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, and piezoelectric chip D1-4 is 0, the voltage of piezoelectric chip E2-1 and piezoelectric chip H2-4 decreases linearly from U1 to 0, the voltage of piezoelectric chip F2-2 and piezoelectric chip G2-3 increases linearly from -U1 to 0, the voltage of piezoelectric chip J3-2, piezoelectric chip K3-3, piezoelectric chip N4-2, and piezoelectric chip P4-3 remains unchanged at U1, and the voltage of piezoelectric chip I3-1, piezoelectric chip L3-4, piezoelectric chip M4-1, and piezoelectric chip Q4-4 remains unchanged at -U1; Figure 1-3 , Figure 5 and Fig.11 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip E2-1, the piezoelectric chip F2-2, the piezoelectric chip G2-3, and the piezoelectric chip H2-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism B7 to bend, thereby driving the driving foot 4 of the driving mechanism B7 to return to its initial position. Since the sum of the friction torques of the driving feet 4 of the driving mechanisms A1, C9, and D11 to the motion plane is greater than the maximum friction torque of the driving feet 4 of the driving mechanism B7 to the motion plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 4. In the process of 3T / 5-4T / 5, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, piezoelectric chip D1-4, piezoelectric chip E2-1, piezoelectric chip F2-2, piezoelectric chip G2-3, and piezoelectric chip H2-4 is 0, the voltage of piezoelectric chip J3-2 and piezoelectric chip K3-3 decreases linearly from U1 to 0, the voltage of piezoelectric chip I3-1 and piezoelectric chip L3-4 increases linearly from -U1 to 0, the voltage of piezoelectric chip N4-2 and piezoelectric chip P4-3 remains unchanged at U1, and the voltage of piezoelectric chip M4-1 and piezoelectric chip Q4-4 remains unchanged at -U1; as Figure 1-3 , Figure 5 and Fig.11 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip I3-1, the piezoelectric chip J3-2, the piezoelectric chip K3-3, and the piezoelectric chip L3-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism C9 to bend, thereby driving the driving foot 4 of the driving mechanism C9 to return to its initial position. Since the sum of the friction torques of the driving feet 4 of the driving mechanisms A1, B7, and D11 to the motion plane is greater than the maximum friction torque of the driving feet 4 of the driving mechanism C9 to the motion plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; 5. In the 4T / 5-T process, the voltage of piezoelectric chip A1-1, piezoelectric chip B1-2, piezoelectric chip C1-3, piezoelectric chip D1-4, piezoelectric chip E2-1, piezoelectric chip F2-2, piezoelectric chip G2-3, piezoelectric chip H2-4, piezoelectric chip I3-1, piezoelectric chip J3-2, piezoelectric chip K3-3, and piezoelectric chip L3-4 is 0, the voltage of piezoelectric chip N4-2 and piezoelectric chip P4-3 decreases linearly from U1 to 0, and the voltage of piezoelectric chip M4-1 and piezoelectric chip Q4-4 increases linearly from -U1 to 0; Figure 1-3 , Figure 5 and Fig.11 As shown, under the action of the inverse piezoelectric effect, the other piezoelectric chips remain unchanged, and the piezoelectric chip M4-1, the piezoelectric chip N4-2, the piezoelectric chip P4-3, and the piezoelectric chip Q4-4 gradually return to their initial states, driving the driving hinge 3 of the driving mechanism D11 to bend, thereby driving the driving foot 4 of the driving mechanism D11 to return to its initial position. Since the sum of the friction torques of the driving feet 4 of the driving mechanisms A1, B7, and C9 on the motion plane is greater than the maximum friction torque of the driving feet 4 of the driving mechanism D11 on the motion plane, the positions of the output terminals A6, B8, C10, D13, and the support frame 12 remain unchanged; After a cycle of the actuator, the drive mechanism A1, drive mechanism B7, drive mechanism C9, and drive mechanism D11 can complete the movement in time sequence, so that the actuator completes the stepping rotation movement in the clockwise direction. Due to the existence of friction, each drive mechanism returns to the initial state one by one after completing the movement without affecting the entire actuator. The actuator can achieve a large-stroke stepping rotation movement by repeating this process. By applying the reverse driving voltage of the piezoelectric chip, the actuator can complete the stepping rotation movement in the counterclockwise direction, which will not be repeated here.

[0025] The embodiments described above are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A friction differential quadruped-driven planar universal bionic stepping piezoelectric actuator, characterized in that: It comprises a driving mechanism A (1), a driving mechanism B (7), a driving mechanism C (9), a driving mechanism D (11), an output end A (6), an output end B (8), an output end C (10), an output end D (13) and a support frame (12); The support frame (12) is a four-pointed star-shaped structure, and the ends of the four corners of the support frame (12) are respectively fixedly connected to the output end A (6), the output end B (8), the output end C (10), and the output end D (13); A driving mechanism A (1) is fixedly connected between the output terminal A (6) and the output terminal D (13); A driving mechanism B (7) is fixedly connected between the output terminal A (6) and the output terminal B (8); A driving mechanism C (9) is fixedly connected between the output terminal B (8) and the output terminal C (10); A driving mechanism D (11) is fixedly connected between the output terminal C (10) and the output terminal D (13); The driving mechanism A (1) comprises two pairs of piezoelectric chips (2), two driving hinges (3), a driving support (5) and a driving foot (4); the ends of the two driving hinges (3) that are away from each other are fixedly connected to the output end D (13) and the output end A (6) respectively, and the ends of the two driving hinges (3) that are close to each other are fixedly connected to the driving support (5); Two pairs of piezoelectric chips (2) are respectively connected to two sides of two driving hinges (3) of the driving mechanism A (1); The driving foot (4) includes a fixed ball screw (16), and the fixed ball screw (16) is installed in the adjustment threaded hole at the center of the driving support (5); Drive mechanism A (1), drive mechanism B (7), drive mechanism C (9), and drive mechanism D (11) can complete displacement in any direction in a timely manner. Due to the existence of friction / torque difference, each drive mechanism returns to its initial state one by one after displacement without affecting the entire actuator. By repeating this process in a cycle, the actuator can realize cross-scale plane universal stepping linear motion or stepping rotational motion.

2. The friction differential quadruped-driven planar universal bionic stepping piezoelectric actuator according to claim 1, characterized in that: The driving foot (4) further comprises a fastening nut (15) and a spring washer (14), and the spring washer (14) and the fastening nut (15) are sequentially mounted on the fixed ball screw (16).

3. The friction differential quadruped-driven planar universal bionic stepping piezoelectric actuator according to claim 1, characterized in that: The support frame (12) has a through threaded hole at the center, and the output end A (6), the output end B (8), the output end C (10), and the output end D (13) each have a through threaded hole, and the through threaded holes are used to connect external devices to output motion and power to the outside.

4. The friction differential quadruped-driven planar universal bionic stepping piezoelectric actuator according to claim 2, characterized in that: The ceramic bead end of the fixed bead screw (16) is in frictional contact with the working plane. By adjusting the fixed bead screw (16), the four driving feet (4) can be leveled so that the pressure of each driving foot (4) on the working plane is the same. The spring washer (14) and the fastening nut (15) can fasten the fixed bead screw (16) to the driving support (5).

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