Filter

Abstract

The invention relates to the technical field of radio frequency, in particular to a filter. The filter comprises a coil, a metal shell and a tuning assembly, the metal shell is provided with a containing cavity, the tuning assembly is arranged on the metal shell, the tuning assembly can be coupled with the coil, and the tuning assembly can move towards or away from the position where the coil is located relative to the metal shell so as to change the parasitic capacitance between the tuning assembly and the coil, and / or the tuning assembly is arranged on the metal shell. And the parasitic capacitance between two single-turn coils in the coil is changed. The impedance value of the filter is tunable, so that the filter is suitable for different working environments.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a filter. Background Art

[0002] Radio frequency filters, also known as "radio frequency interference filters", are mainly used in high-frequency electronic devices to greatly attenuate high-frequency interference signals generated by high-frequency electronic devices. Radio frequency filters are widely used in implementation. For example, radio frequency filters can be used in plasma processing systems, specifically in applications such as deposition, coating or etching of objects to be processed in processing chambers. When radio frequency filters are used in plasma processing systems, the filters need to be frequency tuned with high impedance to meet the high impedance characteristics and low heat consumption performance of the processing chamber. However, the impedance characteristics of existing filters in semiconductor equipment cannot be flexibly adjusted in the whole machine state.

[0003] Therefore, a filter with tuning function is urgently needed. Summary of the invention

[0004] The present application provides a filter, the impedance value of which is tunable.

[0005] The present application provides a filter, which includes a coil, a metal shell and a tuning component. The metal shell has a accommodating cavity. The tuning component is arranged in the metal shell. The tuning component can be coupled with the coil, and the tuning component can move relative to the metal shell to a position close to or away from the position where the coil is located. The tuning component is coupled with the coil so that a parasitic capacitance is generated between the tuning component and the coil. Specifically, when the tuning component moves close to or away from the position where the coil is located, the distance between the tuning component and the coil changes, thereby changing the parasitic capacitance between the tuning component and the coil. The change in parasitic capacitance will change the impedance value of the filter so that the impedance of the filter reaches the desired target. In addition, when the tuning component moves close to or away from the position where the coil is located, it will also change the parasitic capacitance between the two single-turn coils in the coil. In this way, the impedance value of the filter can also be changed so that the impedance of the filter reaches the desired target.

[0006] It is worth mentioning that a tuning component is provided in the filter, and the tuning component can adjust the impedance of the filter so that the filter has a tuning function.

[0007] In some embodiments, the tuning assembly includes at least one metal adjustment rod, which is disposed in a metal housing and can move relative to the metal housing toward or away from the position where the coil is located. By changing the relative position between the metal adjustment rod and the coil, the magnitude of the parasitic capacitance generated between the metal adjustment rod and the coil is changed, thereby changing the impedance value of the filter.

[0008] In some embodiments, the extension direction of the metal adjustment rod is perpendicular to the axial direction of the coil, and the metal adjustment rod can move relative to the metal shell toward or away from the axial direction of the coil.

[0009] In some embodiments, in order to increase the size of the parasitic capacitance between the tuning component and the coil, the tuning component may further include a metal adjustment plate, which is connected to the metal adjustment rod located at one end of the accommodating cavity and is perpendicular to the metal adjustment rod.

[0010] In some embodiments, the adjustment component includes a metal adjustment rod and a metal adjustment plate, the extension direction of the metal adjustment rod is perpendicular to the axial direction of the coil, the metal adjustment plate is connected to the metal adjustment rod, the metal adjustment plate is parallel to the metal adjustment rod, and the metal adjustment rod can drive the metal adjustment plate to move between any two turns of the coil. In this way, the metal adjustment rod moves closer to or away from the coil to adjust the parasitic capacitance between the metal adjustment rod and the coil, and when the metal adjustment rod moves between the two turns of the coil, the parasitic capacitance between the two turns of the coil can also be adjusted.

[0011] In some embodiments, there are multiple metal adjustment rods, the multiple metal adjustment rods are located on the same side of the coil, and the multiple metal adjustment rods are spaced apart along the axial direction of the coil.

[0012] In some embodiments, there are multiple metal adjustment rods, and the multiple metal adjustment rods are symmetrically arranged on both sides of the coil.

[0013] In some embodiments, in order to improve the heat dissipation effect of the coil in the filter, the filter further includes a heat dissipation structure, which is disposed in the accommodating cavity and connected to the coil and the metal shell.

[0014] In some embodiments, in order to facilitate the connection of the filter with other devices in the plasma processing device, the filter also includes an adapter assembly; the adapter assembly includes an adapter shell, the adapter shell includes a first adapter part and a second adapter part, one end of the first adapter part and the second adapter part is arranged in the metal shell, and the other end of the first adapter part and the second adapter part extends to the outside of the metal shell.

[0015] In some embodiments, the first adapter portion includes a plurality of first mounting cavities and a first crown spring terminal, and the second adapter portion includes a second mounting cavity and a second crown spring terminal; one end of the first crown spring terminal is located in the first mounting cavity, the other end of the first crown spring terminal is located in the accommodating cavity, and the other end of the first crown spring terminal is used to connect with the coil; one end of the second crown spring terminal is located in the second mounting cavity, and the other end of the second crown spring terminal is located in the accommodating cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1A schematic diagram of the structure of a filter provided in an embodiment of the present application;

[0017] Figure 2 A schematic diagram of another structure of the filter provided in the embodiment of the present application;

[0018] Figure 3 A schematic diagram of another structure of the filter provided in the embodiment of the present application;

[0019] Figure 4 A schematic diagram of another structure of the filter provided in the embodiment of the present application;

[0020] Figure 5 A schematic diagram of another structure of the filter provided in the embodiment of the present application;

[0021] Figure 6 A schematic diagram of another structure of the filter provided in the embodiment of the present application;

[0022] Figure 7 A schematic diagram of another structure of the filter provided in the embodiment of the present application;

[0023] Figure 8 A schematic diagram of the structure of the intermediate transfer component of the filter provided in an embodiment of the present application;

[0024] Fig. 9 A schematic diagram of another structure of the filter provided in the embodiment of the present application.

[0025] Reference numerals:

[0026] 10-metal shell; 11-accommodating cavity; 20-coil; 30-tuning assembly; 31-metal adjusting rod; 32-metal adjusting plate; 40-adapter assembly; 41-first adaptor part; 410-first mounting cavity; 411-first crown spring terminal; 42-second adaptor part; 420-second mounting cavity; 421-second crown spring terminal. DETAILED DESCRIPTION

[0027] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings.

[0028] In recent years, with the increase in the operating frequency of electronic equipment, the frequency of electromagnetic interference in electronic equipment has also been increasing. At present, radio frequency filters are generally used to filter the frequency to obtain the required frequency signal. The existing radio frequency filters are provided with capacitors and resistors, and the corresponding filtering function is achieved through corresponding capacitance values ​​and resistance values.

[0029] However, the capacitors and resistors in the existing radio frequency filters are fixed and need to be disassembled and replaced in order to make the radio frequency filters suitable for different use environments. Therefore, a filter with a tuning function is urgently needed.

[0030] The terms used in the following embodiments are only for the purpose of describing specific embodiments and are not intended to be limiting of the present application. As used in the specification and appended claims of the present application, the singular expressions "a", "an", "said", "above", "the" and "this" are intended to also include expressions such as "one or more", unless there is a clear contrary indication in the context.

[0031] References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present application. Thus, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. that appear at different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0032] Figure 1 A schematic diagram of the structure of the filter provided in the embodiment of the present application. Figure 1 A filter includes a coil 20, a metal shell 10 and a tuning component 30. The metal shell 10 has a housing cavity 11. The coil 20 is arranged in the housing cavity 11. The tuning component 30 is arranged in the metal shell 10. The tuning component 30 can be coupled with the coil 20, and the tuning component 30 can move relative to the metal shell 10 to the position close to or away from the position where the coil 20 is located. The tuning component 30 can generate parasitic capacitance between the coil 20, and when the tuning component 30 moves to the position close to or away from the position where the coil 20 is located, the distance between the tuning component 30 and the coil 20 changes, thereby changing the parasitic capacitance between the tuning component 30 and the coil 20. The change in parasitic capacitance will change the impedance value of the filter so that the impedance of the filter reaches the desired target. In addition, when the tuning component 30 moves to the position close to or away from the position where the coil 20 is located, the parasitic capacitance between the two single-turn coils in the coil 20 will also be changed. In this way, the impedance value of the filter can also be changed so that the impedance of the filter reaches the desired target.

[0033] It is worth mentioning that a tuning component 30 is provided in the filter, and the tuning component 30 can adjust the impedance of the filter so that the filter has a tuning function.

[0034] In some embodiments, the metal housing 10 may be in various forms, such as a rectangular, square, diamond or circular shape, etc. The following description will be made by taking the rectangular shape of the metal housing 10 as an example.

[0035] The tuning assembly 30 may have various structural forms, such as: the tuning assembly 30 includes at least one metal adjustment rod 31, or the tuning assembly 30 includes at least one metal adjustment rod 31 and a metal adjustment plate connected to the metal adjustment rod 31. Specifically, the metal adjustment rod 31 may be a screw or a pin.

[0036] Figure 2 This is another structural diagram of the filter provided in the embodiment of the present application. Figure 2 When the tuning assembly 30 includes at least one metal adjustment rod 31, at least one metal adjustment rod 31 is disposed in the metal shell 10, that is, one end of the metal adjustment rod 31 is located in the accommodating cavity 11 of the metal shell 10, and the other end of the metal adjustment rod 31 is located outside the metal shell 10. The extension direction of the metal adjustment rod 31 can be arranged parallel to the direction of the axis of the coil 20, and at least one metal adjustment rod 31 can move relative to the metal shell 10 toward or away from the position where the coil 20 is located. Specifically, when the metal adjustment rod 31 moves in a direction parallel to the axis of the coil 20, the distance between the metal adjustment rod 31 and the coil 20 changes, and the parasitic capacitance generated between the metal adjustment rod 31 and the coil 20 will change accordingly, thereby changing the impedance value of the filter.

[0037] in, Figure 3 This is another structural diagram of the filter provided in the embodiment of the present application. Figure 3 When the tuning assembly 30 includes multiple metal adjustment rods 31, and the extension direction of the multiple metal adjustment rods 31 is parallel to the axis of the coil 20, the multiple metal adjustment rods 31 can be set at one end of the metal shell 10, or the multiple metal adjustment rods 31 are divided into two parts and respectively set at both ends of the metal shell 10. At this time, when adjusting the metal adjustment rods 31, the positions of the metal adjustment rods 31 at both ends can be adjusted at the same time, or the position of the metal adjustment rods 31 at any end can be adjusted.

[0038] Continue to refer to Figure 1When the tuning component 30 includes at least one metal adjustment rod 31, at least one metal adjustment rod 31 is disposed on the metal shell 10, and the extension direction of the metal adjustment rod 31 is perpendicular to the axial direction of the coil 20, and the metal adjustment rod 31 can move relative to the metal shell 10 toward or away from the axial direction of the coil 20. Specifically, when the metal adjustment rod 31 moves in a direction perpendicular to the axial direction of the coil 20, the distance between the metal adjustment rod 31 and the coil 20 changes, and the parasitic capacitance generated between the metal adjustment rod 31 and the coil 20 will change accordingly, thereby changing the impedance value of the filter. Among them, when the metal adjustment rod 31 extends between two single-turn coils in the coil 20, the parasitic capacitance between the two single-turn coils in the coil 20 can be changed, so that the impedance value of the filter can also be changed, so that the impedance of the filter reaches the desired target.

[0039] in, Figure 4 This is another structural diagram of a filter provided in an embodiment of the present application. Figure 5 This is another structural diagram of the filter provided in the embodiment of the present application. Figure 4 and Figure 5 When there are multiple metal adjustment rods 31 and the extension direction of the multiple metal adjustment rods 31 is perpendicular to the axis of the coil 20, the multiple metal adjustment rods 31 can be set on the same side of the metal shell 10, or the multiple metal adjustment rods 31 are divided into two parts and set on both sides of the metal shell 10. At this time, when adjusting the metal adjustment rods 31, the positions of the metal adjustment rods 31 on both sides can be adjusted at the same time, or the position of the metal adjustment rods 31 on any one side can be adjusted.

[0040] Figure 6 This is another structural diagram of the filter provided in the embodiment of the present application. Figure 6 The tuning assembly 30 further includes at least one metal adjustment plate 32, which is connected to the metal adjustment rod 31. The metal adjustment rod 31 is located at one side of the accommodating cavity 11, and the metal adjustment plate 32 is perpendicular to the extension direction of the metal adjustment rod 31. When the extension direction of the metal adjustment rod 31 is parallel to the axis of the coil 20, the metal adjustment plate 32 is perpendicular to the axis of the coil 20, and when the metal adjustment rod 31 moves toward or away from the position where the coil 20 is located, the parasitic capacitance between the metal adjustment plate 32 and the metal adjustment rod 31 and the coil 20 will be adjusted, that is, the parasitic capacitance generated by the tuning assembly 30 and the coil 20 will change, thereby changing the impedance value of the filter.

[0041] When the extension direction of the metal adjustment rod 31 is perpendicular to the axis of the coil 20, the metal adjustment plate 32 and the axis of the coil 20 can be understood to be in a parallel state. When the metal adjustment rod 31 moves closer to or away from the position where the coil 20 is located, the parasitic capacitance between the metal adjustment plate 32 and the metal adjustment rod 31 and the coil 20 will be adjusted, that is, the parasitic capacitance generated by the tuning component 30 and the coil 20 will change, thereby changing the impedance value of the filter.

[0042] Figure 7 This is another structural diagram of the filter provided in the embodiment of the present application. Figure 7 , when the tuning component 30 includes a metal adjustment plate 32, the metal adjustment plate 32 is connected to the metal adjustment rod 31, the metal adjustment plate 32 is located on one side of the metal adjustment rod 31 in the accommodating cavity 11, and the metal adjustment rod 31 is perpendicular to the axial direction of the coil 20, and the metal adjustment plate 32 is arranged in parallel with the metal adjustment rod 31. When the metal adjustment rod 31 moves toward or away from the position where the coil 20 is located, a portion of the metal adjustment rod 31 and a portion of the metal adjustment plate 32 can extend between two single-turn coils in the coil 20 to change the parasitic capacitance between the two single-turn coils in the coil 20, so that the impedance value of the filter can also be changed so that the impedance of the filter reaches the desired target.

[0043] In the above embodiment, the number of the metal adjustment plates 32 may be smaller than or equal to the number of the metal adjustment rods 31 .

[0044] In some embodiments, a heat dissipation structure (not shown) may be further provided inside the metal shell 10, and the heat dissipation structure is used to wrap at least part of the coil 20 to dissipate heat from the coil 20. Specifically, the heat dissipation structure may be glue potting, and the glue potting may completely wrap the coil 20, or the glue potting may only wrap the outside of the coil 20. The heat dissipation structure may quickly dissipate the heat generated by the coil 20 through the metal shell 10 to optimize the heat dissipation performance of the filter. In order to improve the dielectric constant inside the metal shell 10, a medium may be loaded inside the metal shell.

[0045] In the above embodiment, when the number of coils included in the filter may be multiple, the filter may further include multiple metal shells and a housing, each metal shell is provided with at least one tuning component, multiple coils may be arranged in parallel, and each coil may be connected to a capacitor. Alternatively, multiple coils are arranged in the metal shell, and multiple tuning components are provided, and the multiple tuning components are used to correspond to different coils.

[0046] Figure 8 A schematic diagram of the structure of the intermediate adapter component of the filter provided in an embodiment of the present application. Fig. 9 This is another structural diagram of the filter provided in the embodiment of the present application. Figure 8 and9 , the filter may further include an adapter assembly 40, one end of which is located inside the metal shell, and the other end of which is located outside the metal shell. The adapter assembly 40 includes a first adapter portion 41 and a second adapter portion 42, the first adapter portion 41 and the second adapter portion 42 are integrally arranged, one end of the first adapter portion 41 is arranged inside the metal shell, and the other end of the first adapter portion 41 is arranged outside the metal shell, that is, one end of the first adapter portion 41 is located in the accommodating cavity, and the other end of the first adapter portion 41 is located outside the accommodating cavity. One end of the second adapter portion 42 is arranged inside the metal shell, and the other end of the second adapter portion 42 is arranged outside the metal shell, that is, one end of the second adapter portion 42 is located in the accommodating cavity, and the other end of the second adapter portion 42 is located outside the accommodating cavity. Specifically, the first adapter 41 includes a plurality of first mounting cavities 410 and a plurality of first crown spring terminals 411, each of which is provided with a first crown spring terminal 411, each of which can be clamped in the first mounting cavity 410, and one end of the first crown spring terminal 411 is located in the accommodating cavity and connected to the coil, and the other end of the first crown spring terminal 411 is located in the first mounting cavity, that is, the other end of the first crown spring terminal 411 does not extend to the outside of the first mounting cavity 410, and the other end of the first crown spring terminal 411 can be connected to a component in the plasma treatment device. The second adapter 42 includes a second mounting cavity 420 and a second crown spring terminal 421 provided in the second mounting cavity 420, one end of the second crown spring terminal 421 is provided in the accommodating cavity, the other end of the second crown spring terminal 421 is located in the second mounting cavity, and the other end of the second crown spring terminal 421 does not extend to the outside of the second mounting cavity, and the other end of the second crown spring terminal 421 can be connected to a component in the plasma treatment device. Since the other ends of the first crown spring terminal 411 and the second crown spring terminal 421 are respectively located inside the first installation cavity 410 and the second installation cavity 420 , the first crown spring terminal 411 and the second crown spring terminal 421 are ensured to be stably matched with other components in the plasma treatment device.

[0047] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A filter, characterized in that: include: Coils, metal housings and tuning components; The metal shell has a accommodating cavity, the coil is arranged in the accommodating cavity, the tuning component is arranged in the metal shell, the tuning component is coupled to the coil, and the tuning component can move closer to or away from the position where the coil is located relative to the metal shell to change the parasitic capacitance between the tuning component and the coil, and / or change the parasitic capacitance between two single-turn coils in the coil.

2. The filter according to claim 1, characterized in that The tuning component comprises at least one metal adjusting rod, and the at least one metal adjusting rod is arranged on the metal shell. The metal adjusting rod can move relative to the metal shell toward or away from the position where the coil is located.

3. The filter according to claim 2, characterized in that The extension direction of the metal adjustment rod is perpendicular to the axial direction of the coil, and the metal adjustment rod can move relative to the metal shell toward or away from the axial direction of the coil.

4. The filter according to claim 3, characterized in that The tuning component further comprises a metal adjustment plate, which is connected to one end of the metal adjustment rod located in the accommodating cavity, and the metal adjustment plate is perpendicular to the metal adjustment rod.

5. The filter according to claim 3, characterized in that The tuning assembly further comprises a metal adjustment plate, the metal adjustment plate is connected to the metal adjustment rod, and the metal adjustment plate is parallel to the metal adjustment rod; The metal adjustment rod can drive the metal adjustment plate to move to the gap between any two turns of the coil.

6. The filter according to any one of claims 2 to 5, characterized in that: When there are multiple metal adjustment rods, the multiple metal adjustment rods are located on the same side of the coil, and the multiple metal adjustment rods are arranged at intervals along the axial direction of the coil.

7. The filter according to any one of claims 2 to 5, characterized in that: When there are multiple metal adjustment rods, The plurality of metal adjustment rods are symmetrically arranged on both sides of the coil.

8. The filter according to any one of claims 1 to 7, characterized in that: The filter further comprises a heat dissipation structure, which is arranged in the accommodating cavity and connected to the coil and the metal shell.

9. The filter according to any one of claims 1 to 8, characterized in that: The filter also includes a transfer assembly; the transfer assembly includes a transfer shell, the transfer shell includes a first transfer part and a second transfer part, one end of the first transfer part and the second transfer part is arranged in the metal shell, and the other end of the first transfer part and the second transfer part extends to the outside of the metal shell.

10. The filter according to claim 9, characterized in that The first transition portion includes a plurality of first mounting cavities and first crown spring terminals, and the second transition portion includes a second mounting cavity and a second crown spring terminal; One end of the first crown spring terminal is located in the first installation cavity, the other end of the first crown spring terminal is located in the accommodating cavity, and the other end of the first crown spring terminal is used to connect with the coil; One end of the second crown spring terminal is located in the second installation cavity, and the other end of the second crown spring terminal is located in the accommodating cavity.

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