Manufacturing device and manufacturing method of optical microphone sensor

Abstract

The invention relates to the technical field of glass processing, in particular to an optical microphone sensor manufacturing device and a manufacturing method thereof.The optical microphone sensor manufacturing device comprises two supporting blocks, a rotating shaft, a sliding block, a connecting block, a connecting rod, a follow-up rod and a follow-up block; a plurality of annular tubular sliding blocks are rotationally connected to the periphery of the rotating shaft at equal intervals, the peripheries of the sliding blocks are wrapped with rubber layers, the two ends of the rotating shaft are rotationally connected with the two rotationally-connected connecting blocks respectively, connecting rods are fixedly connected to the peripheries of the two connecting blocks, follow-up rods are fixedly connected to one ends of the two connecting rods, and follow-up blocks are movably connected to the peripheries of the follow-up rods. The problem that the glass is damaged in the process that the quartz glass is driven by a sound device to move due to the fact that the curved surface of the quartz glass generates small deformation in the manufacturing process of a contrast file and the roller cannot be in good contact with the glass is solved, and the yield of glass production and the quality of an optical microphone sensor are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of glass processing, and in particular to a manufacturing device and a manufacturing method of an optical microphone sensor. Background Art

[0002] The sound sensing element in the optical microphone is mainly made by direct quartz bonding. After three specifications of quartz sheets are bonded in sequence, a complete sensing cavity can be formed.

[0003] The shapes of quartz glass also include various shapes such as curved surfaces and spherical surfaces, which can easily have a certain impact on the processing during the processing. In the prior art, during the processing of optical glass, generally only the edges of the glass are fixed, and the middle position of the glass is rarely supported. For example, the curved optical glass used for curved screens can easily cause the glass to break during the processing, and for the equipment that can support it, the contact position between the glass and the supporting parts is difficult to change, which in turn affects the normal processing progress of the glass.

[0004] In order to solve the above problems, a Chinese patent with announcement number CN115781612B proposes a fixed optical glass processing workbench, which mainly supports the curved optical glass through a main support mechanism, so that the support is more stable, the probability of the curved optical glass breaking during processing is reduced, and the yield rate is improved. The internal displacement sensor is used to sense the change of the axis coordinates of the first / second fixed axis before and after the movement, so that the control panel automatically calculates the axis coordinates of the processed curved optical glass. It can adapt to curved optical glasses of different sizes and can be adjusted through a trajectory adjustment mechanism, so that the curved optical glass can rotate and slide around its axis, so that the contact position of the curved optical glass and the supporting component can be easily changed, avoiding the influence of the supporting component on the processing process.

[0005] The disadvantage is that during the manufacturing process of quartz glass, the curved surface of the quartz glass will undergo some small deformation, which makes it difficult for the roller to contact the curved surface of the quartz glass well, resulting in damage to the glass during the process of the quartz glass being moved by the sound device, reducing the yield rate of quartz glass production and affecting the quality of the optical microphone sensor. Summary of the invention

[0006] The embodiment of the present application provides a manufacturing device and a manufacturing method for an optical microphone sensor, thereby solving the problem in the comparative document that during the manufacturing process of the quartz glass, the curved surface of the quartz glass may undergo some small deformations, which makes it difficult for the roller to contact the glass well, thereby causing damage to the glass in the process of the quartz glass being displaced by the sound device, thereby improving the yield rate of glass production and the quality of the optical microphone sensor.

[0007] The embodiment of the present application provides a manufacturing device for an optical microphone sensor, including a base plate, a lifting device, and a load-bearing device;

[0008] The bottom plate is a rectangular parallelepiped structure, the upper wall of the bottom plate is fixedly connected to the jacking device, the jacking device is fixedly connected to the load-bearing device, and the jacking device drives the load-bearing device to move up and down;

[0009] The load-bearing device includes a supporting block, a rotating shaft, a sliding block, a connecting block, a connecting rod, a follower rod, and a follower block;

[0010] The upper wall of the jacking device is symmetrically and fixedly connected with two cube-shaped support blocks;

[0011] The two ends of the rotating shaft respectively pass through a supporting block, and the rotating shaft is rotatably connected with the supporting block;

[0012] The outer circumference of the rotating shaft is equidistantly connected to a plurality of annular tubular sliding blocks, the outer circumference of the sliding blocks is wrapped with a rubber layer, and the plurality of sliding blocks are located between the two supporting blocks;

[0013] The two ends of the rotating shaft are rotatably connected to two rotating connection blocks respectively;

[0014] The outer peripheries of the two connecting blocks are fixedly connected to a rectangular connecting rod, and one end of the two connecting rods away from the connecting blocks is fixedly connected to a cylindrical follower rod;

[0015] The periphery of each follower rod is movably connected to a cylindrical follower block.

[0016] Furthermore, both of the two connecting blocks have an inner cavity, and an elastic tension spring is fixedly connected to the inner cavity of the connecting block. When quartz glass is placed on the load-bearing device, the connecting rod will flip downward, and the elastic tension spring in the inner cavity of the connecting block will be twisted, thereby supporting the middle position and corners of the curved quartz glass. When the quartz glass is removed, the elastic tension spring in the inner cavity of the connecting block will drive the connecting rod to reset.

[0017] Furthermore, the manufacturing device of the optical microphone sensor also includes an adjustment device and a placement device;

[0018] The upper surface of the bottom plate is symmetrically fixedly connected with two sets of adjustment devices, and the two adjustment devices are located on both sides of the jacking device;

[0019] Each set of the adjustment device includes a box, an adjustment chamber, a support plate, a hydraulic jack, a transmission shaft, a gear, and a hydraulic pump;

[0020] The upper wall of the bottom plate is fixedly connected to the lower wall of the box body, the box body is a rectangular parallelepiped structure, and the upper wall of the box body is downwardly provided with a rectangular parallelepiped adjustment cavity;

[0021] The inner wall of the regulating cavity is fixedly connected to two rectangular support plates;

[0022] A plurality of hydraulic jacks are fixedly connected to the upper wall of each support plate at equal intervals;

[0023] The side wall of each hydraulic jack output shaft is rotatably connected to a transmission shaft;

[0024] One end of each transmission shaft away from the hydraulic jacking device is fixedly connected to a gear, and a plurality of gears on each support plate are meshed with each other;

[0025] A hydraulic pump is fixedly connected to the upper wall of each support plate, and the hydraulic pump is connected to a processor. The processor controls the hydraulic pump to inject different pressures into a plurality of hydraulic jacks through the displacement change between the sliding block and the follower block, so that the plurality of gears on each support plate form the same curvature as the quartz glass.

[0026] Furthermore, each set of the adjustment device also includes a motor, an output rod, and a belt;

[0027] A motor is fixedly connected to the upper wall of each support plate;

[0028] The output shaft of each motor is fixedly connected to an output rod;

[0029] One end of the belt is sleeved on the output rod, and the other end is sleeved on a transmission shaft far away from one end of the output rod, thereby driving a plurality of gears to rotate.

[0030] Furthermore, each group of the adjustment devices also includes an electric slide rail, an electric slider, a sliding rod, a sliding groove, and a limit block;

[0031] The inner wall of each adjustment cavity is rotatably connected to an electric slide rail, the electric slide rail is located between two support plates, and the electric slide rail is parallel to the support plates;

[0032] A rectangular electric sliding block is slidably connected to the electric slide rail;

[0033] The upper and lower ends of the gears on the wall of each support plate are symmetrically slidably connected to two limit blocks, and the limit blocks are made of elastic metal material;

[0034] A rectangular sliding rod is fixedly connected to the side walls of one side of the plurality of limit blocks, and the sliding rod and the electric slide rail are vertically arranged;

[0035] A rectangular sliding groove is provided on the surface of the sliding rod close to the electric sliding rail;

[0036] The electric sliding block is slidably connected to the sliding groove.

[0037] Further, the placement device includes a placement rod, a rotating motor, a placement block, and a placement slot;

[0038] One end of each sliding rod located in the adjustment cavity is fixedly connected to a placement rod, and the placement rod is a cylindrical structure;

[0039] A rotating motor is fixed at both ends of each placement rod;

[0040] The output shaft of each of the rotating motors is fixedly connected to a rectangular placement block;

[0041] A rectangular placement groove is provided on the surface of each placement block close to the load-bearing device.

[0042] Furthermore, each side wall of the box is fixedly connected to a control panel.

[0043] Furthermore, the load-bearing device also includes a blowing and suction airbag;

[0044] The rubber layer on the outer periphery of each sliding block is provided with a plurality of spherical grooves at equal intervals, each groove is fixedly connected with a blowing and suction air bag, and each blowing and suction air bag is provided with a notch connected to the outside;

[0045] The plurality of blowing and suction airbags are externally connected to a first air pump. When the first air pump inflates the blowing and suction airbags, the plurality of blowing and suction airbags blow air externally through the notches, thereby blowing away impurities near the load-bearing device.

[0046] The plurality of blowing and suction airbags are externally connected to a second air pump, and the second air pump is also externally connected to a dust collecting device. When the quartz glass is placed on the sliding block, the second air pump evacuates the plurality of blowing and suction airbags, so that the quartz glass and the plurality of blowing and suction airbags are sucked together to prevent the quartz glass from shaking during the processing.

[0047] Furthermore, the load-bearing device also includes an inflatable airbag;

[0048] A spherical expansion air bag is arranged between adjacent blowing and suction air bags, and the plurality of expansion air bags are externally connected to a third air pump.

[0049] Furthermore, the present application also discloses a method for manufacturing an optical microphone sensor, comprising the following steps:

[0050] S1, sintering, mixing the diaphragm raw materials in the optical microphone sensor, and putting them into a sintering furnace after mixing, and heating at high temperature to diffuse and combine the particles to form a dense quartz diaphragm structure;

[0051] S2, forming, placing the formed diaphragm in a placement groove, using multiple follower blocks and multiple sliding blocks to carry the initial diaphragm, after carrying the diaphragm, using multiple and second air pumps to negatively adsorb the diaphragm, and after the diaphragm is fixed by negative pressure adsorption, processing and cutting the diaphragm to divide the diaphragm into multiple pieces to form a single unit diaphragm;

[0052] S3, Piranha solution cleaning, the three unit membranes are cleaned with solution, the three unit membranes are respectively composed of a membrane layer, an intermediate layer and a top layer, the three quartz sheets are cleaned and surface modified with Piranha solution, the organic matter and oxides carried on the surface of the quartz glass itself are removed, the surface of the quartz glass is cleaned and smoothed, the surface of the quartz glass is hydrophilized with Piranha solution, and the contact angle of the solution on the surface of the quartz glass is less than 10°;

[0053] S4. Rinse. After the quartz glass is soaked in the Piranha solution for 1 hour, rinse the treated quartz slice with deionized water and place it in a similarly cleaned culture dish to avoid environmental contamination during the experiment.

[0054] S5, pre-bonding, while soaking the quartz glass, prepare a 2% NaOH solution by mass, weigh 0.2g of NaOH solid, add 9.8mL of deionized water, and mix evenly by ultrasonication, then use a disposable dropper to absorb an appropriate amount of NaOH solution, and drop it on the top quartz sheet with the treated surface. Due to the hydrophilic effect of the piranha solution, the NaOH droplets will quickly spread on the quartz sheet and completely soak the entire quartz glass. After NaOH soaks the top quartz sheet, quickly place the middle quartz sheet on the NaOH liquid surface for pre-bonding. After placing it, wipe off the excess NaOH solution, and then use a disposable dropper to drop an appropriate amount of NaOH solution on the other side of the middle layer. Use the same method to pre-bond the membrane quartz glass and wipe off the excess solution at the same time;

[0055] S6, low temperature bonding, after the pre-bonding is completed, the device is placed at room temperature for 24 hours of ion reaction, and then the device is placed in an oven at 150°C and heated for 48 hours to obtain a firmly bonded sensor element;

[0056] S7, packaging, pre-place the inserted optical fiber ceramic ferrule on the prepared sensor element. The sensor element is designed to be in a step shape so that the ceramic ferrule is stuck in the length of the cavity. The ceramic ferrule and the sensor element are packaged with ultraviolet curing glue to obtain a complete optical fiber acoustic sensor module.

[0057] One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:

[0058] Firstly, by rotatably connecting a plurality of annular tubular sliding blocks on the outer circumference of a rotating shaft, and wrapping the outer circumference of the sliding blocks with a rubber layer, when the curved quartz glass is placed on a load-bearing device, it is helpful for the sliding blocks to better fit the curved surface of the curved quartz glass, and avoids the small contact surface between the curved quartz glass and the sliding blocks, thereby avoiding local force and causing damage to the curved quartz glass, thereby improving the use stability and adaptability of the load-bearing device.

[0059] Secondly, when the quartz glass is placed on a number of sliding blocks, when the first air pump inflates the blowing and suction airbags, the blowing and suction airbags will blow air outward through the gaps, thereby blowing away impurities near the load-bearing device. Then the operator places the quartz glass on a number of rubber blocks, the first air pump stops working, and the second air pump evacuates the blowing and suction airbags, so that the quartz glass and the blowing and suction airbags are sucked together, thereby avoiding the quartz glass from shaking when it is collided or vibrated during processing by the manufacturing device, further improving the convenience of the overall device, while also reducing the influence of dust on the manufacturing of quartz glass, and improving the yield rate of quartz glass manufacturing.

[0060] Thirdly, the plurality of expansion airbags are externally connected to a third air pump. Before the quartz glass is placed on the load-bearing device, when the first air pump inflates the blowing and suction airbags, the plurality of blowing and suction airbags will blow air to the outside through the notches. Then the third air pump injects gas into the plurality of expansion airbags to expand the plurality of expansion airbags. The expanded expansion airbags drive the rubber layer on the periphery of the sliding block to deform. Then the first air pump and the second air pump alternately inflate and deflate the blowing and suction airbags, so that the plurality of blowing and suction airbags continuously collide with the expansion airbags, so that impurities attached to the surfaces of the plurality of sliding blocks are shaken off, thereby improving the cleanliness near the load-bearing device and further improving the yield rate of quartz glass production. BRIEF DESCRIPTION OF THE DRAWINGS

[0061] Figure 1 A schematic diagram of the structure of a manufacturing device for an optical microphone sensor proposed by the present invention;

[0062] Figure 2 This is a schematic diagram of the structure of the load-bearing device proposed by the present invention;

[0063] Figure 3 It is a structural schematic diagram of the adjustment device proposed by the present invention;

[0064] Figure 4 This is a schematic diagram of the structure of the placement device proposed by the present invention;

[0065] Figure 5 A cross-sectional view of the sliding block in the second embodiment of the present invention;

[0066] Figure 6 This is a cross-sectional view of the sliding block in the third embodiment of the present invention.

[0067] In the figure: 100, bottom plate; 200, lifting device; 300, load-bearing device; 310, support block; 320, rotating shaft; 330, sliding block; 340, connecting block; 350, connecting rod; 360, follower rod; 370, follower block; 380, blowing and suction airbag; 390, expansion airbag; 400, adjustment device; 410, box; 420, adjustment chamber; 430, support plate; 440, hydraulic jack Lifter; 450, transmission shaft; 460, gear; 470, hydraulic pump; 480, motor; 490, output rod; 411, belt; 412, electric slide rail; 413, electric slider; 414, sliding rod; 415, sliding groove; 416, limit block; 500, placement device; 510, placement rod; 520, rotating motor; 530, placement block; 540, placement groove; 600, control panel. DETAILED DESCRIPTION

[0068] To facilitate the understanding of the present invention, the present application will be described more comprehensively below with reference to the relevant drawings; the drawings show preferred embodiments of the present invention, but the present invention can be implemented in many different forms and is not limited to the embodiments described herein; on the contrary, the purpose of providing these embodiments is to enable a more thorough and comprehensive understanding of the disclosed content of the present invention.

[0069] It should be noted that the terms “vertical”, “horizontal”, “up”, “down”, “left”, “right” and similar expressions used in this document are only for illustrative purposes and do not represent the only implementation method.

[0070] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which the present invention belongs; the terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention; the term "and / or" used herein includes any and all combinations of one or more related listed items.

[0071] Embodiment 1

[0072] like Figure 1 - Figure 4 As shown, a manufacturing device for an optical microphone sensor includes a base plate 100, a lifting device 200, and a load-bearing device 300;

[0073] The bottom plate 100 is a rectangular parallelepiped structure, the upper wall of the bottom plate 100 is fixedly connected to the jacking device 200, the jacking device 200 is fixedly connected to the load-bearing device 300, and the jacking device 200 drives the load-bearing device 300 to move up and down;

[0074] The load-bearing device 300 includes a support block 310, a rotating shaft 320, a sliding block 330, a connecting block 340, a connecting rod 340, a follower rod 360, and a follower block 370;

[0075] The upper wall of the lifting device 200 is symmetrically fixedly connected to two cube-shaped support blocks 310;

[0076] The two ends of the rotating shaft 320 respectively pass through a supporting block 310, and the rotating shaft 320 is rotatably connected to the supporting block 310;

[0077] The outer circumference of the rotating shaft 320 is equidistantly rotatably connected to a plurality of annular tubular sliding blocks 330, the outer circumference of the sliding blocks 330 is wrapped with a rubber layer, and the plurality of sliding blocks 330 are located between the two supporting blocks 310;

[0078] The two ends of the rotating shaft 320 are rotatably connected to two cylindrical connecting blocks 340 respectively;

[0079] A rectangular parallelepiped connecting rod 350 is fixedly connected to the outer periphery of the two connecting blocks 340, and one end of the two connecting rods 350 away from the connecting blocks 340 is fixedly connected to a cylindrical follower rod 360;

[0080] The outer periphery of each follower rod 360 is movably connected to a cylindrical follower block 370 .

[0081] Furthermore, both of the two connecting blocks 340 have an inner cavity, and an elastic tension spring is fixedly connected to the inner cavity of the connecting block 340. When quartz glass is placed on the load-bearing device 300, the connecting rod 350 will flip downward, and the elastic tension spring in the inner cavity of the connecting block 340 will be twisted, which will support the middle position and corners of the curved quartz glass. When the quartz glass is removed, the elastic tension spring in the inner cavity of the connecting block 340 will drive the connecting rod 350 to reset.

[0082] Furthermore, the manufacturing device of the optical microphone sensor also includes an adjustment device 400 and a placement device 500;

[0083] The upper wall of the bottom plate 100 is symmetrically fixedly connected with two sets of adjustment devices 400, and the two adjustment devices 400 are located on both sides of the lifting device 200;

[0084] Each set of the adjustment device 400 includes a box 410, an adjustment chamber 420, a support plate 430, a hydraulic jack 440, a transmission shaft 450, a gear 460, and a hydraulic pump 470;

[0085] The upper wall of the bottom plate 100 is fixedly connected to the lower wall of the box body 410. The box body 410 is a rectangular parallelepiped structure, and a rectangular parallelepiped adjustment cavity 420 is formed downward on the upper wall of the box body 410.

[0086] The inner wall of the adjustment cavity 420 is fixedly connected to two rectangular support plates 430;

[0087] A plurality of hydraulic jacks 440 are fixedly connected to the upper wall of each support plate 430 at equal intervals;

[0088] The side wall of the output shaft of each hydraulic jack 440 is rotatably connected to a transmission shaft 450;

[0089] One end of each transmission shaft 450 away from the hydraulic jacking device 440 is fixedly connected to a gear 460, and a plurality of gears 460 on each support plate 430 are meshed with each other;

[0090] A hydraulic pump 470 is fixedly connected to the upper wall of each support plate 430, and the hydraulic pump 470 is connected to a processor. The processor controls the hydraulic pump 470 to inject different pressures into the hydraulic jacks 440 through the displacement change between the sliding block 330 and the follower block 370, so that the gears 460 on each support plate 430 form the same curvature as the quartz glass.

[0091] Furthermore, each set of the adjustment device 400 also includes a motor 480, an output rod 490, and a belt 411;

[0092] A motor 480 is fixedly connected to the upper wall of each support plate 430;

[0093] The output shaft of each motor 480 is fixedly connected to an output rod 490;

[0094] One end of the belt 411 is sleeved on the output rod 490 , and the other end is sleeved on the transmission shaft 450 away from one end of the output rod 490 , thereby driving the plurality of gears 460 to rotate.

[0095] Furthermore, each set of the adjustment device 400 further includes an electric slide rail 412, an electric slider 413, a sliding rod 414, a sliding groove 415, and a limit block 416;

[0096] The inner wall of each adjusting cavity 420 is rotatably connected to an electric slide rail 412, and the electric slide rail 412 is located between two support plates 430, and the electric slide rail 412 is parallel to the support plates 430;

[0097] A rectangular electric slider 413 is slidably connected to the electric slide rail 412;

[0098] The upper and lower ends of the gears 460 on the upper wall of each support plate 430 are symmetrically slidably connected to two limit blocks 416, and the limit blocks 416 are made of elastic metal material;

[0099] The side walls of the plurality of limit blocks 416 are all fixedly connected to a rectangular sliding rod 414, and the sliding rod 414 and the electric slide rail 412 are vertically arranged;

[0100] The sliding rod 414 is provided with a rectangular sliding groove 415 on the surface close to the electric sliding rail 412;

[0101] The electric slider 413 is slidably connected to the sliding groove 415 .

[0102] Furthermore, the placement device 500 includes a placement rod 510, a rotating motor 520, a placement block 530, and a placement slot 540;

[0103] One end of each sliding rod 414 located in the adjustment cavity 420 is fixedly connected to the placement rod 510, and the placement rod 510 is a cylindrical structure;

[0104] A rotating motor 520 is fixed at both ends of each placement rod 510;

[0105] The output shaft of each of the rotating motors 520 is fixedly connected to a rectangular placement block 530;

[0106] A rectangular placement groove 540 is formed on the surface of each placement block 530 close to the load-bearing device 300 .

[0107] Furthermore, a control panel 600 is fixedly connected to the side wall of each box body 410 .

[0108] Specific implementation: When using, refer to the attached Figure 1-Figure 4 As shown, the straight-line distance between the two long corners of the curved optical glass is set, and the value is input into the control panel 600, so that the control panel 600 controls the rotating motor 520 to rotate, and the working rotating motor 520 drives the placement slot 540 to extend, and the four corners of the curved optical glass are placed in the placement slot 540 through manual handling, and then the control panel 600 controls the lifting device 200 to lift the load-bearing device 300, so that a plurality of sliding blocks 330 contact the bottom side of the curved optical glass. In this process, the two follower blocks 370 first contact the curved optical glass, and the two connecting rods 350 are pushed to flip downward, and the elastic tension springs in the two connecting rods 350 are twisted, which play a supporting role for the middle position and corners of the curved glass, and the supporting position is relatively even;

[0109] When the contact position between the curved optical glass and the load-bearing device 300 affects the processing, the control panel 600 can be used to control the electric slider 413 to start, so that when the electric slider 413 moves, it drives the sliding rod 414 to slide on the electric slide rail 412, and due to the matching restrictions between the sliding groove 415 and the electric slider 413, and the matching restrictions between the gear 460 and the limit block 416, the sliding rod 414 slides in an arc trajectory. At the same time, the control panel 600 controls the motor 480 to start, and the motor 480 drives the belt 411 to rotate, and drives multiple gears 460 and the limit blocks 416 to rotate through the belt 411 to avoid friction between each other and causing unstable vibration, and the center position of its sliding trajectory is on the axis of the curved optical glass, so that when the adjustment device 400 drives the sliding of the curved optical glass, the plurality of sliding blocks 330 and the two connecting rods 350 rotate and are always in contact with the curved optical glass, avoiding the contact position between the curved optical glass and the load-bearing device 300 affecting the normal processing.

[0110] Beneficial effect: by rotating and connecting a plurality of annular tubular sliding blocks 330 on the outer periphery of the rotating shaft 320, and wrapping the outer periphery of the sliding blocks 330 with a rubber layer, when the curved quartz glass is placed on the load-bearing device 300, it is helpful for the sliding blocks 330 to better fit the curved surface of the curved quartz glass, avoiding local force caused by a small contact surface between the curved quartz glass and the sliding blocks 330, causing damage to the curved quartz glass, and improving the use stability and adaptability of the load-bearing device 300.

[0111] Embodiment 2

[0112] When the manufacturing device is hit or the machine vibrates during the process of processing the quartz glass, the manufacturing device and the quartz glass also vibrate, thereby affecting the processing of the quartz glass. Therefore, the second embodiment further improves the first embodiment.

[0113] like Figure 5 As shown, the load-bearing device 300 further includes a blowing and suction airbag 380;

[0114] The rubber layer on the outer periphery of each sliding block 330 is provided with a plurality of spherical grooves at equal intervals, and a blowing and suction airbag 380 is fixedly connected in each groove, and each blowing and suction airbag 380 is provided with a notch communicating with the outside;

[0115] The plurality of blowing and suction airbags 380 are externally connected to a first air pump. When the first air pump inflates the blowing and suction airbags 380, the plurality of blowing and suction airbags 380 blow air to the outside through the notches, thereby blowing away impurities near the load-bearing device 300.

[0116] The plurality of blowing and suction airbags 380 are externally connected to a second air pump, and the second air pump is also externally connected to a dust collecting device. When the quartz glass is placed on the sliding block 330, the second air pump evacuates the plurality of blowing and suction airbags 380, so that the quartz glass and the plurality of blowing and suction airbags 380 are sucked together to prevent the quartz glass from shaking during the processing.

[0117] When the quartz glass is placed on the plurality of sliding blocks 330, when the first air pump inflates the blowing and suction airbags 380, the plurality of blowing and suction airbags 380 blow air outward through the notches, thereby blowing away impurities near the load-bearing device 300. Then the operator places the quartz glass on the plurality of rubber blocks 330, the first air pump stops working, and the second air pump evacuates the plurality of blowing and suction airbags 380, so that the quartz glass and the plurality of blowing and suction airbags 380 are attracted together, thereby avoiding the quartz glass from shaking when the manufacturing device is hit or the machine vibrates during the processing of the quartz glass, further improving the convenience of the overall device, while also reducing the influence of dust on the manufacturing of quartz glass, and improving the yield rate of quartz glass manufacturing.

[0118] Embodiment 3

[0119] When the first air pump inflates the blowing and suction airbag 380, although the impurities near the load-bearing device 300 can be blown away, the impurities attached to the surface of the sliding block 330 cannot be blown away, so the third embodiment further improves the second embodiment.

[0120] like Figure 6 As shown, the load-bearing device 300 further includes an inflatable airbag 390;

[0121] A spherical expansion air bag 390 is provided between adjacent blowing and suction air bags 380;

[0122] The plurality of expansion airbags 390 are all externally connected to a third air pump. Before the quartz glass is placed on the load-bearing device 300, when the first air pump inflates the blowing and suction airbags 380, the plurality of blowing and suction airbags 380 will blow air to the outside through the notch. Then the third air pump injects gas into the plurality of expansion airbags 390 to expand the plurality of expansion airbags 390. The expanded expansion airbags 390 drive the rubber layer on the periphery of the sliding block 330 to deform. Then the first air pump and the second air pump alternately inflate and deflate the blowing and suction airbags 380, so that the plurality of blowing and suction airbags 380 continuously collide with the expansion airbags 390, so that the magazines attached to the surfaces of the plurality of sliding blocks 330 are shaken off, thereby improving the cleanliness near the load-bearing device 300 and further improving the yield rate of quartz glass production.

[0123] Embodiment 4

[0124] The present application also discloses a method for manufacturing an optical microphone sensor, comprising the following steps:

[0125] S1, sintering, mixing the diaphragm raw materials in the optical microphone sensor, and putting them into a sintering furnace after mixing, and heating at high temperature to diffuse and combine the particles to form a dense quartz diaphragm structure;

[0126] S2, forming, placing the formed diaphragm in the placement groove 540, using multiple follower blocks 370 and multiple sliding blocks 330 to carry the initial diaphragm, and after carrying the diaphragm, using multiple 380 and the second air pump to negatively adsorb the diaphragm, and after the diaphragm is fixed by negative pressure adsorption, the diaphragm is processed and cut to form, and the diaphragm is divided into multiple pieces to form a single unit diaphragm;

[0127] S3, Piranha solution cleaning, the three unit membranes are cleaned with solution, the three unit membranes are respectively composed of a membrane layer, an intermediate layer and a top layer, the three quartz sheets are cleaned and surface modified with Piranha solution, the organic matter and oxides carried on the surface of the quartz glass itself are removed, the surface of the quartz glass is cleaned and smoothed, the surface of the quartz glass is hydrophilized with Piranha solution, and the contact angle of the solution on the surface of the quartz glass is less than 10°;

[0128] S4. Rinse. After the quartz glass is soaked in the Piranha solution for 1 hour, rinse the treated quartz slice with deionized water and place it in a similarly cleaned culture dish to avoid environmental contamination during the experiment.

[0129] S5, pre-bonding, while soaking the quartz glass, prepare a 2% NaOH solution by mass, weigh 0.2g of NaOH solid, add 9.8mL of deionized water, and mix evenly by ultrasonication, then use a disposable dropper to absorb an appropriate amount of NaOH solution, and drop it on the top quartz sheet with the treated surface. Due to the hydrophilic effect of the piranha solution, the NaOH droplets will quickly spread on the quartz sheet and completely soak the entire quartz glass. After NaOH soaks the top quartz sheet, quickly place the middle quartz sheet on the NaOH liquid surface for pre-bonding. After placing it, wipe off the excess NaOH solution, and then use a disposable dropper to drop an appropriate amount of NaOH solution on the other side of the middle layer. Use the same method to pre-bond the membrane quartz glass and wipe off the excess solution at the same time;

[0130] S6, low temperature bonding, after the pre-bonding is completed, the device is placed at room temperature for 24 hours of ion reaction, and then the device is placed in an oven at 150°C and heated for 48 hours to obtain a firmly bonded sensor element;

[0131] S7, packaging, pre-place the inserted optical fiber ceramic ferrule on the prepared sensor element. The sensor element is designed to be in a step shape so that the ceramic ferrule is stuck in the length of the cavity. The ceramic ferrule and the sensor element are packaged with ultraviolet curing glue to obtain a complete optical fiber acoustic sensor module.

[0132] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A manufacturing device for an optical microphone sensor, comprising a base plate (100), a lifting device (200), and a load-bearing device (300); the base plate (100) is a rectangular parallelepiped structure, the upper wall of the base plate (100) is fixedly connected to the lifting device (200), the lifting device (200) and the load-bearing device (300) are fixedly connected, and the lifting device (200) drives the load-bearing device (300) to move up and down; characterized in that The load-bearing device (300) comprises a supporting block (310), a rotating shaft (320), a sliding block (330), a connecting block (340), a connecting rod (350), a follower rod (360), and a follower block (370); The upper wall of the lifting device (200) is symmetrically and fixedly connected to two cube-shaped support blocks (310); The two ends of the rotating shaft (320) respectively penetrate a supporting block (310), and the two ends of the rotating shaft (320) are respectively rotatably connected to the two supporting blocks (310); The outer circumference of the rotating shaft (320) is equidistantly rotatably connected to a plurality of annular tubular sliding blocks (330), and the outer circumference of the sliding blocks (330) is wrapped with a rubber layer; Both ends of the rotating shaft (320) are rotatably connected to cylindrical connecting blocks (340); A rectangular parallelepiped connecting rod (350) is fixedly connected to the outer periphery of the two connecting blocks (340), and one end of the two connecting rods (350) away from the connecting blocks (340) is fixedly connected to a cylindrical follower rod (360); Each of the follower rods (360) is movably connected to a cylindrical follower block (370).

2. The manufacturing device of an optical microphone sensor according to claim 1, characterized in that: The rubber layer on the outer periphery of each sliding block (330) is provided with a plurality of spherical grooves at equal intervals, each groove is fixedly connected to a blowing and suction airbag (380), and each blowing and suction airbag (380) is provided with a notch communicating with the outside; The plurality of blowing and suction airbags (380) are all externally connected to a first air pump, and when the first air pump inflates the blowing and suction airbags (380), the plurality of blowing and suction airbags (380) blow air externally through the notches, thereby blowing away impurities near the load-bearing device (300); The plurality of blowing and suction airbags (380) are externally connected to a second air pump, and the second air pump is also externally connected to a dust collecting device. When the quartz glass is placed on the sliding block (330), the second air pump performs an air extraction operation on the plurality of blowing and suction airbags (380), so that the quartz glass and the plurality of blowing and suction airbags (380) are attracted to each other, thereby preventing the quartz glass from shaking during the processing process.

3. The manufacturing device of an optical microphone sensor according to claim 2, characterized in that: The load-bearing device (300) further includes an inflatable airbag (390); A spherical expansion air bag (390) is provided between adjacent blowing and suction air bags (380), and a plurality of expansion air bags (390) are externally connected to a third air pump.

4. The manufacturing device of an optical microphone sensor according to claim 1, characterized in that: The two connecting blocks (340) are each provided with an inner cavity, and an elastic tension spring is fixedly connected to the inner cavity of the connecting block (340). When quartz glass is placed above the connecting rod (350), the connecting rod (350) flips downward, and the elastic tension spring in the inner cavity of the connecting block (340) is twisted, thereby supporting the middle position and corners of the curved quartz glass. When the quartz glass is removed, the elastic tension spring in the inner cavity of the connecting block (340) drives the connecting rod (350) to reset.

5. The manufacturing device of an optical microphone sensor according to claim 1, characterized in that: The manufacturing device of the optical microphone sensor also includes an adjustment device (400) and a placement device (500); The upper wall of the bottom plate (100) is symmetrically fixedly connected to two groups of adjustment devices (400), and the two adjustment devices (400) are located on both sides of the lifting device (200); Each set of the adjustment device (400) comprises a box (410), an adjustment chamber (420), a support plate (430), a hydraulic jack (440), a transmission shaft (450), a gear (460), and a hydraulic pump (470); The upper wall of the bottom plate (100) is fixedly connected to the lower wall of the box body (410); the box body (410) is a rectangular parallelepiped structure; and a rectangular parallelepiped adjustment cavity (420) is provided downwardly on the upper wall of the box body (410); The inner wall of the regulating cavity (420) is fixedly connected to two rectangular support plates (430); A plurality of hydraulic lifters (440) are fixedly connected to the upper wall of each support plate (430) at equal intervals; The side wall of the output shaft of each hydraulic jack (440) is rotatably connected to a transmission shaft (450); One end of each transmission shaft (450) away from the hydraulic jacking device is fixedly connected to a gear (460), and a plurality of gears (460) on each support plate (430) are meshed with each other; The upper wall of each support plate (430) is fixedly connected to a hydraulic pump (470), and the hydraulic pump (470) is connected to a processor. The processor controls the hydraulic pump (470) to inject different pressures into the plurality of hydraulic lifters (440) through the displacement change between the sliding block (330) and the follower block (370), so that the plurality of gears (460) on each support plate (430) form the same arc as the quartz glass.

6. The manufacturing device of an optical microphone sensor according to claim 5, characterized in that: Each set of the adjustment devices (400) further includes a motor (480), an output rod (490), and a belt (411); The upper wall of each support plate (430) is fixedly connected to a motor (480); The output shaft of each motor (480) is fixedly connected to an output rod (490); One end of the belt (411) is sleeved on the output rod (490), and the other end is sleeved on the transmission shaft (450) away from one end of the output rod (490), thereby driving the plurality of gears (460) to rotate.

7. The manufacturing device of an optical microphone sensor according to claim 5, characterized in that: Each set of the adjustment devices (400) further comprises an electric slide rail (412), an electric slide block (413), a sliding rod (414), a sliding groove (415), and a limit block (416); The inner wall of each adjustment cavity (420) is rotatably connected to an electric slide rail (412), the electric slide rail (412) is located between two support plates (430), and the electric slide rail (412) is parallel to the support plates (430); A rectangular parallelepiped electric sliding block (413) is slidably connected to the electric sliding rail (412); The upper and lower ends of the plurality of gears (460) on the upper wall of each support plate (430) are symmetrically slidably connected to two limit blocks (416), and the limit blocks (416) are made of elastic metal material; The side walls of the plurality of limit blocks (416) are all fixedly connected to a rectangular parallelepiped sliding rod (414), and the sliding rod (414) and the electric sliding rail (412) are vertically arranged; A rectangular parallelepiped sliding groove (415) is provided on the surface of the sliding rod (414) close to the electric sliding rail (412); The electric sliding block (413) is slidably connected to the sliding groove (415).

8. The manufacturing device of an optical microphone sensor according to claim 7, characterized in that: The placement device (500) comprises a placement rod (510), a rotating motor (520), a placement block (530), and a placement slot (540); One end of each sliding rod (414) located in the adjustment cavity (420) is fixedly connected to a placement rod (510), and the placement rod (510) is a cylindrical structure; A rotating motor (520) is fixed at both ends of each placement rod (510); The output shaft of each of the rotating motors (520) (480) is fixedly connected to a rectangular placement block (530); A rectangular placement groove (540) is formed on the surface of each placement block (530) close to the load-bearing device (300).

9. The manufacturing device of an optical microphone sensor according to claim 5, characterized in that: The side wall of each box (410) is fixedly connected to a control panel (600).

10. A method for manufacturing an optical microphone sensor according to any one of claims 1 to 9, characterized in that: The steps include: S1, sintering, mixing the diaphragm raw materials in the optical microphone sensor, and putting them into a sintering furnace after mixing, and heating at high temperature to diffuse and combine the particles to form a dense quartz diaphragm structure; S2, forming, placing the formed diaphragm in the placement groove (540), using multiple follower blocks (370) and multiple sliding blocks (330) to carry the initial diaphragm, after carrying the diaphragm, using multiple (380) and a second air pump to perform negative pressure adsorption on the diaphragm, and after the diaphragm is fixed by negative pressure adsorption, processing and cutting the diaphragm to form, dividing the diaphragm into multiple pieces to form a single unit diaphragm; S3, Piranha solution cleaning, the three unit membranes are cleaned with solution, the three unit membranes are respectively composed of a membrane layer, an intermediate layer and a top layer, the three quartz sheets are cleaned and surface modified with Piranha solution, the organic matter and oxides carried on the surface of the quartz glass itself are removed, the surface of the quartz glass is cleaned and smoothed, the surface of the quartz glass is hydrophilized with Piranha solution, and the contact angle of the solution on the surface of the quartz glass is less than 10°; S4. Rinse. After the quartz glass is soaked in the Piranha solution for 1 hour, rinse the treated quartz slice with deionized water and place it in a similarly cleaned culture dish to avoid environmental contamination during the experiment. S5, pre-bonding, while soaking the quartz glass, prepare a 2% NaOH solution by mass, weigh 0.2g of NaOH solid, add 9.8mL of deionized water, and mix evenly by ultrasonication, then use a disposable dropper to absorb an appropriate amount of NaOH solution, and drop it on the top quartz sheet with the treated surface. Due to the hydrophilic effect of the piranha solution, the NaOH droplets will quickly spread on the quartz sheet and completely soak the entire quartz glass. After NaOH soaks the top quartz sheet, quickly place the middle quartz sheet on the NaOH liquid surface for pre-bonding. After placing it, wipe off the excess NaOH solution, and then use a disposable dropper to drop an appropriate amount of NaOH solution on the other side of the middle layer. Use the same method to pre-bond the membrane quartz glass and wipe off the excess solution at the same time; S6, low temperature bonding, after the pre-bonding is completed, the device is placed at room temperature for 24 hours of ion reaction, and then the device is placed in an oven at 150°C and heated for 48 hours to obtain a firmly bonded sensor element; S7, packaging, pre-place the inserted optical fiber ceramic ferrule on the prepared sensor element. The sensor element is designed to be in a step shape so that the ceramic ferrule is stuck in the length of the cavity. The ceramic ferrule and the sensor element are packaged with ultraviolet curing glue to obtain a complete optical fiber acoustic sensor module.

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