Metallized film double-sided evaporation device

Abstract

The invention discloses a metallized film double-sided evaporation device, and relates to the technical field of metallized film evaporation, the metallized film double-sided evaporation device comprises an evaporation bin, a film main body and an evaporation mechanism, the evaporation mechanism is installed on an evaporation source at the bottom of the inner side of the evaporation bin, an air outlet nozzle fixedly communicated with the air outlet end of the evaporation source, and a bottom evaporation part arranged on the air outlet nozzle; the bottom evaporation part is an evaporation pipe I arranged below the thin film main body; the evaporation mechanism further comprises a top evaporation part for evaporating the top surface of the thin film main body, a differential compensation part for compensating the evaporation effect of the top surface of the thin film main body and a flow direction limiting part; through the arrangement of the top evaporation part, in the process that an evaporation material is heated and gasified and is introduced into the inner side of the evaporation pipe I through the gas outlet nozzle, part of gasified evaporation material can still be introduced into the evaporation pipe II through the communicating pipe and is output by the evaporation pipe II facing downwards and directly facing the top surface of the film main body, so that the evaporation gas is distributed in a manner of distributing the evaporation gas; the second evaporation pipe and the first evaporation pipe are matched, and the effect of synchronous evaporation of the two faces of the film body is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of metallized film evaporation, and in particular to a metallized film double-sided evaporation device. Background Art

[0002] Evaporation refers to heating the evaporated material under certain vacuum conditions to melt (or sublimate) it and form vapor composed of atoms, molecules or atomic groups, which condenses on the surface of the substrate to form a film. The evaporation angle refers to the angle between the evaporation beam and the substrate. The evaporation angle will affect the thickness of the evaporated layer.

[0003] In the production of metallized films for capacitors, existing metallized coating equipment can only evaporate metal film on one side at a time. For products that require double-sided metal coating, it is necessary to rewind the film after single-sided vapor deposition, and then rewind it to evaporate the other side. Not only is the vapor deposition efficiency low, it also wastes energy. Repeated winding and unwinding will increase the defective rate, which is not conducive to mass production. Summary of the invention

[0004] In order to solve the above technical problems, a double-sided evaporation device for a metallized film is provided, which solves the problem in the prior art that when double-sided evaporation is performed on a film, the film needs to be taken out of the device and turned over before evaporation. This not only increases the operation process, but may also cause the film to be contaminated or damaged during the turning process, affecting the evaporation quality.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is: a double-sided evaporation device for a metallized film, comprising an evaporation chamber, a film body retracted inside the evaporation chamber, and an evaporation mechanism for evaporating the surface of the film body;

[0006] The evaporation mechanism is installed on the evaporation source at the bottom of the inner side of the evaporation chamber, the outlet nozzle fixedly connected to the outlet end of the evaporation source, and the bottom evaporation part arranged on the outlet nozzle, the bottom evaporation part is an evaporation tube 1 placed below the film body, and the evaporation mechanism also includes a top evaporation part for evaporating the top surface of the film body, a differential compensation part for compensating the evaporation effect of the top surface of the film body, and a flow direction restriction part;

[0007] The top evaporation part includes a second evaporation tube located above the film body and a connecting tube fixedly connected between the second evaporation tube and the gas outlet nozzle, and the second evaporation tube and the first evaporation tube are symmetrically distributed up and down;

[0008] The differential speed compensation part is mainly composed of an adjustable ventilation component and a flow rate enhancement component;

[0009] The flow direction limiting part includes a limiting seat in a rectangular frame shape fixedly sleeved on the outside of the second evaporating tube and an air pressure enhancement component located in the limiting seat. The bottoms of the front and rear sides of the limiting seat are both provided with exhaust grooves.

[0010] Preferably, the adjustable ventilation assembly includes a bellows fixedly connected between the evaporating tube 1 and the air outlet nozzle, a control panel arranged at the rear side of the bellows, and a bending member arranged on the control panel for changing the shape of the bellows.

[0011] Preferably, the flow rate enhancement component is a blower installed on the tube body of the connecting pipe, and a solenoid valve is built in the connection between the connecting pipe and the air outlet nozzle.

[0012] Preferably, the bending member is mainly composed of a fixed sleeve sleeved on the corrugated tube body and two movable sleeves, the two movable sleeves are symmetrically distributed up and down and are slidably connected to the control panel, and the fixed sleeve is located between the two movable sleeves and is fixedly connected to the control panel.

[0013] Preferably, the bending component also includes two transmission screws which are staggered up and down on the control panel, a transmission screw seat which is rotatably connected between the inner walls on both sides of the transmission screw, and a connecting frame which is threadedly sleeved on the rod body of the transmission screw seat. The two connecting frames are respectively fixedly connected to the two movable sleeves, and the threads of the two transmission screw seats are in opposite directions.

[0014] Preferably, the air pressure enhancement component includes two air guide covers symmetrically fixed on the inner side of the limiting seat, a ventilation pipe fixedly connected between the two air guide covers, and an induced draft fan installed in the ventilation pipe.

[0015] Compared with the prior art, the advantages of the present invention are:

[0016] (1) Through the arrangement of the top evaporation part, when the evaporation material is heated and vaporized and passed into the inner side of the evaporation tube one through the gas outlet nozzle, part of the vaporized evaporation material can still be passed into the evaporation tube two through the connecting pipe, and outputted downward from the evaporation tube two directly facing the top surface of the film body. In this way, by diverting the evaporation gas, the evaporation tube two and the evaporation tube one cooperate to achieve the effect of simultaneous evaporation on both sides of the film body.

[0017] (2) By setting up the differential compensation part, the bending component in the adjustable ventilation assembly is used to change the deformation of the bellows to form an "S" shape. By increasing the path, the time for the evaporation gas to enter the interior of the evaporation tube one is prolonged. At the same time, the blower can still be turned on to increase the steam flow rate in the connecting tube, thereby compensating for the time difference between the steam entering the evaporation tube one and the evaporation tube two as much as possible, thereby improving the use effect.

[0018] (3) By setting up the limiting seat, an efficient and stable airflow channel can be constructed between the evaporation tube 2 and the film body, and the flow direction of the evaporation gas output from the evaporation tube 2 can be strictly constrained and guided. Specifically, the physical barrier formed by the limiting seat enables the evaporation gas to flow vertically downward only in a specific space and accurately reach the top surface of the film body, thereby achieving a high degree of controllability of the evaporation process. After the evaporation gas completes the interaction with the surface of the film body, it will be discharged in a horizontal flow through the exhaust groove. After leaving the exhaust groove, the exhausted gas will blow the surface of the film body located outside the limiting seat again in a specific horizontal flow form, thereby greatly suppressing the disordered diffusion of the gas, allowing the evaporation material to fully adhere to the top surface of the film body, thereby improving the evaporation quality of the top surface.

[0019] (4) By setting up the air pressure enhancement component, when the evaporation tube 2 outputs the evaporation gas, the induced draft fan is turned on. The induced draft fan can efficiently suck the evaporation gas output by the evaporation tube 2 from the inner side of the upper air guide hood, and discharge the evaporation gas into the lower air guide hood. In this way, by enhancing the wind pressure, the evaporation gas can sink rapidly along the direction guided by the lower air guide hood at a faster speed and in a more concentrated direction, and finally blow accurately to the top surface of the film body. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 It is a schematic diagram of the internal structure of the present invention;

[0022] Figure 3 This is a schematic diagram of the structure of the evaporation tube 2 of the present invention;

[0023] Figure 4 This is a schematic diagram of the internal structure of the limiting seat of the present invention;

[0024] Figure 5 It is a schematic diagram of the structure of the adjustable ventilation assembly of the present invention.

[0025] The numbers in the figure are:

[0026] 1. Evaporation chamber; 2. Film body; 3. Evaporation source; 4. Exhaust nozzle; 5. Evaporation tube 1; 6. Evaporation tube 2; 7. Connecting pipe; 8. Blower; 9. Bellows; 10. Control panel; 11. Fixed sleeve; 12. Movable sleeve; 13. Drive screw; 14. Drive screw seat; 15. Connecting frame; 16. Operating lever; 17. Drive belt; 18. Limit seat; 19. Exhaust slot; 20. Wind guide hood; 21. Ventilation duct; 22. Draft fan. DETAILED DESCRIPTION

[0027] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art may think of other obvious variations.

[0028] Reference Figure 1-5 As shown, a double-sided evaporation device for a metallized film comprises an evaporation chamber 1, a film body 2 inserted and retracted inside the evaporation chamber 1, and an evaporation mechanism for evaporating the surface of the film body 2, one end of the film body 2 is connected to a winding roller (not shown), and the other end of the film body 2 is connected to a winding stick (not shown);

[0029] The evaporation mechanism is installed on the evaporation source 3 at the bottom of the inner side of the evaporation chamber 1, the gas outlet nozzle 4 fixedly connected to the gas outlet end of the evaporation source 3, and the bottom evaporation part arranged on the gas outlet nozzle 4;

[0030] The bottom evaporation part is an evaporation tube 5 placed below the film body 2;

[0031] When the reeling and unreeling rollers are opened to allow the film body 2 to shrink inside the evaporation chamber 1, the evaporation source 3 is opened to heat the evaporation material stored therein, so that the evaporation material is vaporized by the heat and discharged into the evaporation tube 5 through the gas outlet nozzle 4, and finally output from the evaporation tube 5 facing the bottom surface of the film body 2, thereby achieving a single-sided evaporation effect on the film body 2.

[0032] The above embodiment can only achieve the effect of single-sided evaporation of the film body 2. For products that require double-sided evaporation of metal films, it is often necessary to rewind the film after single-sided evaporation, and then rewind the film to evaporate the other side. This not only has low evaporation efficiency, but also wastes energy. Repeated winding and unwinding will increase the defective rate, which is not conducive to mass production.

[0033] After searching, a double-sided evaporation device with a patent announcement number of CN216585197U was found. From the above patent, it can be seen that the prior art arranges two groups of evaporation sources symmetrically distributed up and down, so that when the film body 2 passes through the two groups, the film body 2 is evaporated on both sides at the same time, thereby improving the coating efficiency;

[0034] However, based on the actual situation, in order to evaporate the thin film body 2 well, the evaporation source placed above must have its air outlet facing downward to the thin film body 2, so that the upper evaporation source is inverted relative to the lower evaporation source. Once the evaporation source is inverted, it is very easy to cause the evaporation material to spill out of the evaporation source, resulting in material waste. It will also make it impossible to supply the material to the evaporation area according to the normal path and method, resulting in interruption of material supply during the evaporation process, and it is impossible to continue evaporation, so that a complete and uniform thin film cannot be formed on the thin film body 2.

[0035] In view of this, refer to Figure 2 As shown, it is worth noting that the evaporation mechanism also includes a top evaporation part for evaporating the top surface of the thin film body 2;

[0036] The top evaporation part includes an evaporation tube 2 6 located above the film body 2 and a connecting tube 7 fixedly connected between the evaporation tube 2 6 and the gas outlet nozzle 4. The evaporation tube 2 6 and the evaporation tube 1 5 are symmetrically distributed up and down. The opposite sides of the evaporation tube 2 6 and the evaporation tube 1 5 are both provided with a plurality of air holes, and the evaporation tube 2 6 and the evaporation tube 1 5 are both fixedly connected to the inner wall of the evaporation chamber 1 through a bracket.

[0037] By setting the top evaporation part, when the evaporation material is heated and vaporized and passed into the inner side of the evaporation tube 1 5 through the gas outlet nozzle 4, part of the vaporized evaporation material can still be passed into the evaporation tube 2 6 through the connecting tube 7, and outputted from the evaporation tube 2 6 downwardly facing the top surface of the film body 2. In this way, by diverting the evaporation gas, the evaporation tube 2 6 and the evaporation tube 1 5 cooperate to achieve the effect of simultaneous evaporation on both sides of the film body 2.

[0038] In the above embodiment, although the effect of simultaneous evaporation deposition on both sides of the film body 2 is achieved by using the evaporation tube 2 6 and the evaporation tube 1 5, from the perspective of the actual flow path of the evaporation gas, the evaporation tube 1 5 built under the film body 2 is closer to the evaporation source 3, so the evaporation gas enters the evaporation tube 1 5 earlier than the evaporation tube 2 6, resulting in a time difference in the evaporation deposition on both sides of the film body 2 at the initial stage. This time difference may cause the evaporation rates on both sides of the film body 2 to be different in the initial stage, affecting the uniformity and consistency of the coating on both sides of the film body 2, and ultimately may cause differences in the overall performance of the film body 2;

[0039] For this purpose, refer to Figure 2 and Figure 5 As shown, it is worth noting that the evaporation mechanism also includes a differential speed compensation part for compensating the evaporation effect on the top surface of the film body 2;

[0040] The differential compensation part is mainly composed of an adjustable ventilation component and a flow rate enhancement component;

[0041] The adjustable ventilation assembly includes a bellows 9 fixedly connected between the evaporation tube 5 and the gas outlet nozzle 4, a control panel 10 arranged at the rear side of the bellows 9, and a bending member arranged on the control panel 10 for changing the shape of the bellows 9. The control panel 10 is fixedly connected to the inner wall of the evaporation chamber 1 through a bracket;

[0042] The flow rate enhancement component is a blower 8 installed on the body of the connecting pipe 7;

[0043] By setting the differential compensation part, the bending component in the adjustable ventilation component is used to change the deformation of the bellows 9 to form an "S" shape. The path is increased to extend the time for the evaporation gas to enter the evaporation tube 5. At the same time, the blower 8 can still be turned on to enhance the steam flow rate in the connecting tube 7, and compensate for the time difference between the steam entering the evaporation tube 1 5 and the evaporation tube 2 6 as much as possible, so that the evaporation tube 1 5 and the evaporation tube 2 6 can output steam to both sides of the film body 2 synchronously, thereby improving the use effect.

[0044] Specifically, refer to Figure 5 As shown, it is worth noting that the bending member is mainly composed of a fixed sleeve 11 and two movable sleeves 12 sleeved on the body of the corrugated tube 9. The two movable sleeves 12 are symmetrically distributed up and down and are slidably connected to the control panel 10. The fixed sleeve 11 is located between the two movable sleeves 12 and is fixedly connected to the control panel 10.

[0045] The bending member also includes two transmission screws 13 staggered up and down on the control panel 10, a transmission screw seat 14 rotatably connected between the inner walls of both sides of the transmission screw 13, and a connecting frame 15 threadedly sleeved on the rod of the transmission screw seat 14. The two connecting frames 15 are respectively fixedly connected to the two movable sleeves 12, and the threads of the two transmission screw seats 14 are in opposite directions.

[0046] The two transmission screw seats 14 are rotated to pass through the control panel 10 and are fixed with an operating rod 16. The end of the operating rod 16 is rotated to pass through the vapor deposition chamber 1, and a transmission belt 17 is connected between the ends of the two operating rods 16. A handle is also fixed to the end of one of the operating rods 16.

[0047] By turning the handle, one of the operating rods 16 rotates, while the other operating rod 16 can be synchronously operated under the action of the transmission belt 17, so as to achieve the effect of synchronous rotation of the two transmission screw seats 14, so that the two connecting frames 15 slide in opposite directions under the corresponding threaded structure, pulling the two ends of the bellows 9 in different directions, so that the two ends of the bellows 9 are subjected to forces in different directions to form an "S" shape.

[0048] Furthermore, it is worth noting that a solenoid valve (not shown) is built into the connection between the connecting pipe 7 and the air outlet nozzle 4;

[0049] By setting the solenoid valve, the inside of the connecting tube 7 can be conveniently switched according to the actual processing situation. When only the evaporation tube 5 is needed to evaporate the thin film body 2 on one side, the solenoid valve is closed so that the steam generated by the evaporation source 3 can only be input into the evaporation tube 5 through the outlet nozzle 4 and the bellows 9 and emitted. On the contrary, when the thin film body 2 is evaporated on both sides, the solenoid valve is opened to connect the connecting tube 7 with the inside of the outlet nozzle 4 so as to divert the evaporation gas and allow part of the evaporation gas to pass from the connecting tube 7 into the evaporation tube 2 6 to implement evaporation on the top surface of the thin film body 2.

[0050] In the above embodiment, although the differential compensation part is used to make the evaporation tube 1 5 and the evaporation tube 2 6 output steam to both sides of the film body 2 at the same time, the evaporation tube 2 6 always outputs gas downward. According to the gas fluidity, the gas often has enough space to diffuse and rise after being output downward, so that the steam output by the evaporation tube 2 6 cannot be completely blown onto the top surface of the film body 2, thereby causing the evaporation quality of the top surface of the film body 2 to be reduced.

[0051] In view of this, refer to Figure 2-4 As shown, it is worth noting that the evaporation mechanism also includes a flow direction limiting portion for compensating for the evaporation effect on the top surface of the film body 2;

[0052] The flow direction limiting part includes a limiting seat 18 in a rectangular frame shape fixedly sleeved on the outside of the evaporating tube 2 6, and exhaust grooves 19 are provided at the bottom of the front and rear sides of the limiting seat 18, and the film body 2 is inserted into the inner side of the exhaust groove 19, and there is a certain gap between the film body 2 and the inner wall of the top of the exhaust groove 19;

[0053] By setting the limiting seat 18, an efficient and stable airflow channel can be constructed between the evaporation tube 2 6 and the film body 2, and the flow direction of the evaporation gas output by the evaporation tube 2 6 can be strictly constrained and guided. Specifically, the physical barrier formed by the limiting seat 18 enables the evaporation gas to flow vertically downward only in a specific space and accurately reach the top surface of the film body 2, thereby realizing the high controllability of the evaporation process, and after the evaporation gas completes the interaction with the surface of the film body 2, it will be discharged in a horizontal flow through the exhaust groove 19. After leaving the exhaust groove 19, the exhausted gas will blow the surface of the film body 2 located outside the limiting seat 18 again in a specific horizontal flow form, thereby greatly suppressing the disordered diffusion of the gas, allowing the evaporation material to fully adhere to the top surface of the film body 2, thereby improving the evaporation quality of the top surface.

[0054] Further, refer to Figure 4 As shown, it is worth noting that the flow restriction portion also includes an air pressure enhancement component located in the restriction seat 18;

[0055] The air pressure enhancement assembly includes two air guide covers 20 symmetrically fixed to the inner side of the limiting seat 18, a ventilation pipe 21 fixedly connected between the two air guide covers 20, and an induced draft fan 22 installed in the ventilation pipe 21;

[0056] By setting the air pressure enhancement component, when the evaporation tube 26 outputs the evaporation gas, the induced draft fan 22 is turned on. The induced draft fan 22 can efficiently suck the evaporation gas output by the evaporation tube 26 from the inner side of the upper air guide hood 20, and discharge the evaporation gas into the lower air guide hood 20. In this way, by enhancing the wind pressure, the evaporation gas can sink rapidly along the direction guided by the lower air guide hood 20 at a faster speed and in a more concentrated direction, and finally be accurately blown to the top surface of the film body 2.

[0057] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. A double-sided evaporation device for a metallized film, comprising an evaporation chamber (1), a film body (2) inserted into and retracted inside the evaporation chamber (1), and an evaporation mechanism for evaporating the surface of the film body (2); The evaporation mechanism is installed on an evaporation source (3) at the bottom of the inner side of the evaporation chamber (1), an outlet nozzle (4) fixedly connected to the outlet end of the evaporation source (3), and a bottom evaporation part arranged on the outlet nozzle (4), wherein the bottom evaporation part is an evaporation tube (5) arranged below the film body (2), characterized in that: The evaporation mechanism also includes a top evaporation portion for evaporating the top surface of the thin film body (2), a differential speed compensation portion for compensating for the evaporation effect of the top surface of the thin film body (2), and a flow direction restriction portion; The top evaporation part comprises a second evaporation tube (6) located above the film body (2) and a connecting tube (7) fixedly connected between the second evaporation tube (6) and the gas outlet nozzle (4), wherein the second evaporation tube (6) and the first evaporation tube (5) are symmetrically distributed up and down; The differential speed compensation part is mainly composed of an adjustable ventilation component and a flow rate enhancement component; The flow direction limiting part comprises a limiting seat (18) in the shape of a rectangular frame fixedly sleeved on the outside of the second evaporating tube (6) and an air pressure enhancement component located in the limiting seat (18), and exhaust grooves (19) are provided at the bottom of the front and rear sides of the limiting seat (18).

2. A metallized film double-sided evaporation device according to claim 1, characterized in that: The adjustable ventilation assembly comprises a bellows (9) fixedly connected between the evaporating tube (5) and the air outlet nozzle (4), a control panel (10) arranged at the rear side of the bellows (9), and a bending member arranged on the control panel (10) for changing the shape of the bellows (9).

3. The double-sided evaporation device of a metallized film according to claim 1, characterized in that: The flow rate enhancement component is a blower (8) installed on the tube body of the connecting tube (7), and a solenoid valve is built into the connection between the connecting tube (7) and the air outlet nozzle (4).

4. The double-sided evaporation device of a metallized film according to claim 2, characterized in that: The bending component is mainly composed of a fixed sleeve (11) sleeved on the body of the corrugated tube (9) and two movable sleeves (12); the two movable sleeves (12) are symmetrically distributed up and down and are slidably connected to the control panel (10); the fixed sleeve (11) is located between the two movable sleeves (12) and is fixedly connected to the control panel (10).

5. The double-sided evaporation device of a metallized film according to claim 4, characterized in that: The bending member further comprises two transmission screws (13) staggeredly arranged on the control panel (10) up and down, a transmission screw seat (14) rotatably connected between the inner walls on both sides of the transmission screw (13), and a connecting frame (15) threadedly sleeved on the rod body of the transmission screw seat (14), the two connecting frames (15) are respectively fixedly connected to the two movable sleeves (12), and the threads of the two transmission screw seats (14) are in opposite directions.

6. The double-sided evaporation device of a metallized film according to claim 1, characterized in that: The air pressure enhancement component comprises two air guide covers (20) symmetrically fixed on the inner side of the limiting seat (18) in an upper and lower manner, a ventilation pipe (21) fixedly connected between the two air guide covers (20), and an induced draft fan (22) installed in the ventilation pipe (21).

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